CN103903942A - Multi-freedom-degree nanometer operating desk suitable for nanometer material control - Google Patents
Multi-freedom-degree nanometer operating desk suitable for nanometer material control Download PDFInfo
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Abstract
The invention discloses a multi-freedom-degree nanometer operating desk suitable for nanometer material control. The multi-freedom-degree nanometer operating desk comprises a base, a Z-direction displacement table, an X-direction and Y-direction displacement table and a nanometer operating arm. The Z-direction displacement table is arranged on the base in the vertical direction and comprises fixed parts connected with one another and a movable part with a Z-direction linear driving motor. The X-direction and Y-direction displacement table is arranged on the movable part of the Z-direction displacement table in the horizontal direction and comprises a first parallel connection part, a second parallel connection part and a third parallel connection part, wherein the first parallel connection part, the second parallel connection part and the third parallel connection part are connected with one another in parallel in a sliding mode. A Y-direction linear driving motor is arranged on the first parallel connection part. An X-direction linear driving motor is arranged on the second parallel connection part. A rotation movement driving motor and the nanometer operation arm are arranged on the third parallel connection part. Through high-precise control over the driving motors and the displacement tables and through design of main work specification parameters, accuracy and stability of nanometer operation can be effectively ensured, and meanwhile the multi-freedom-degree nanometer operating desk has the advantages of being high in movement accuracy, wide in movement range, flexible in adjustment, compact in structure and the like.
Description
Technical field
The invention belongs to nano-manipulation apparatus field, more specifically, relate to a kind of multi-degree-of-freedom nanometer operating desk that is applicable to nano material manipulation.
Background technology
At present, nanometer technology high speed development, and the high-tech areas such as manufacture, information, biology, medical science, the energy, environment, aerospace are produced to far-reaching influence.Nano material manipulation, significant for the test of nano material electromechanical properties, nanometer manufacture based on nano material etc.According to existing documents and materials, the common micro-nano that uses characterizes measuring equipment at present, and such as atomic force microscope, Measurement of Semiconductors instrument etc. carry out nano material to carry out the multiple manipulations such as acquisition, placement, electrically measurement, assembling.
But, further research shows, above-mentioned micro-nano characterizes defect or the deficiency of measuring equipment below at least existing in the time that nano material is operated: the first, existing sign measuring equipment can only carry out partial parameters to specific sample and characterizes and measure, its manipulation application to nano material is limited in scope, can not realize multiple control action simultaneously, for example atomic force microscope can be measured the surface configuration parameter of micro-nano structure, but can not assemble nano material; The second, the use of sign measuring equipment is more complicated, need to carry out professional training to user of service, and some even needs sample to anticipate preparation, and such as Measurement of Semiconductors instrument before using needs sample to carry out the preliminary treatment such as sputter or evaporation conductive electrode; Three, can not realize the operation under vision monitoring, efficiency is very low; Four, characterize purchase, the maintenance cost costliness of measuring equipment, operational environment requires quite high to temperature, humidity, vibrations etc., and the required consumptive material of routine use takes huge; Although some micro-nanos characterizes measuring equipment and can serve as nano-manipulation instrument now, because their design function is not on nano-manipulation, so operating efficiency, can practical function etc. many aspects be still difficult to practical requirement.Correspondingly, association area is needed badly and is developed the nano material operating desk that function is more perfect, to effectively overcome the above problems.
Summary of the invention
For above defect or the Improvement requirement of prior art, the object of the present invention is to provide a kind of multi-degree-of-freedom nanometer operating desk that is applicable to nano material manipulation, the wherein application characteristic of combining nano material manipulation self, structure and set-up mode thereof to nano-manipulation platform key component design, should be able to effectively overcome mutually in prior art range of application narrow, operate the complicated and inferior problem of inefficiency, possess the advantages such as compact conformation, multiple degrees of freedom flexible operating, high accuracy and function are strong simultaneously.
For achieving the above object, according to the present invention, a kind of multi-degree-of-freedom nanometer operating desk that is applicable to nano material manipulation is provided, it is characterized in that, this multi-degree-of-freedom nanometer operating desk is arranged in the vacuum chamber of scanning electron microscopy, and comprise that base, Z-direction displacement platform, XY are to displacement platform and nano-manipulation arm, wherein:
Described Z-direction displacement platform is arranged on base along vertical direction, and comprises by spherical guide fixed part connected to one another and moving-member, and wherein fixed part keeps being connected with base, for whole operating desk is supported; Z-direction linear drive motor is directly installed on moving-member, and under this motor drives, moving-member is moved along Z-direction; In addition, between the top of moving-member and the bottom of fixed part, be provided with back-moving spring, realize thus the linear reciprocating motion of Z-direction displacement platform in Z-direction;
Described XY is arranged on along horizontal direction on the moving-member of Z-direction displacement platform by L shaped connecting plate to displacement platform, and comprise by spherical guide be connected in parallel to each other the first parts in parallel, the second parts in parallel and the 3rd parts in parallel that are slidably connected, wherein the first parts in parallel keep being connected with the moving-member of Z-direction displacement platform, for whole XY is supported to displacement platform, and Y-direction linear drive motor is directly installed; The second parts in parallel are directly connected with the rotor of Y-direction linear drive motor, and X are directly installed to linear drive motor; The 3rd parts in parallel are connected to the rotor of linear drive motor with X, and the drive motors that rotatablely moves is directly installed, thus at X under, Y-direction linear drive motor driving separately, second, third parts in parallel can move along X-axis, Y direction with respect to the first parts in parallel simultaneously, and realize rotatablely moving in perpendicular under the driving of the drive motors that rotatablely moves; In addition, between described first, second, and third parts in parallel, be respectively arranged with back-moving spring, realize thus XY to displacement platform the linear reciprocating motion in X-axis and Y direction;
Described X is set to 30nm to the rectilinear motion minimum resolution of, Y-direction and Z-direction linear drive motor, the minimum resolution that rotatablely moves of the described drive motors that rotatablely moves is set to 1mrad, maximum movement speed is 1.2 mm/min, and all drive motors all can be 10
-6under the vacuum vacuum environment of Pa, work;
Described nano-manipulation arm is arranged on described the 3rd parts in parallel, realizes thus the rectilinear motion of X-axis, Y-axis and Z-direction; Or described in being arranged on, rotatablely move on drive motors, realize thus rotatablely moving in the rectilinear motion of X-axis, Y-axis and Z-direction and vertical plane.
As further preferably, described XY is preferably 25 × 25mm to the mesa dimensions of displacement platform, and stroke is ± 3mm, and mobile accuracy comprises following parameter: linearity 0.002mm, the rectilinear movement angle of pitch 30 ", rectilinear movement swings 25 ".
As further preferably, the mesa dimensions of described Z-direction displacement platform is preferably 25 × 25mm, and stroke is ± 3mm, and mobile accuracy comprises following parameter: linearity 0.002mm, moving parallel degree 0.02mm.
As further preferably, all drive motors preferably have two path control signal input separately, and wherein a road is earth terminal; In addition, the control signal earth terminal of all drive motors Wei Yi road of being connected, the two path control signal input of the drive motors that rotatablely moves is designed to arrange faller gill matrix.
As further preferably, described multi-degree-of-freedom nanometer operating desk is also equipped with driver, host computer and control box, and wherein driver is connected with each drive motors by winding displacement, and its control signal output is connected with the control signal input of motor; Described host computer is connected with described driver by RJ45 interface, and described control box is connected with described host computer by USB interface.
As further preferably, the integrated all control functions to nano-manipulation platform of described control box, comprise selection, drive motors speed, the input of acceleration and the selection of motor movement mode etc. of drive motors.
As further preferably, described Z-direction displacement platform and XY form by stainless steel to displacement platform, and all spherical guides use silica-based vacuum grease to be lubricated.
As further preferably, described in the drive motors that rotatablely moves be removably mounted on described XY on the 3rd parts in parallel of displacement platform.
As further preferred, described nano-manipulation arm is set to sonde-type, flexure type or tweezers-shaped, and its top tip radius is set to 200nm.
In general, the multi-degree-of-freedom nanometer operating desk that the present invention conceives is undertaken preferably by the structure to for example travel mechanism of its key component and drive motors and set-up mode thereof, the application characteristic of combining nano material manipulation self, design its specifications parameter and control assembly, mutually should be able to be with compact conformation, be convenient to manipulation and high-precision mode and realize the multiple degrees of freedom manipulation of nano material.Test shows that it can steadily realize displacement and the location of multiple degree of freedom directions, and is particularly useful for the applied environment of condition of high vacuum degree.
Brief description of the drawings
Fig. 1 is according to the structure front view of the multi-degree-of-freedom nanometer operating desk of the preferred embodiment of the present invention;
Fig. 2 is the structure rearview of the operating desk of multi-degree-of-freedom nanometer shown in Fig. 1;
Fig. 3 is the system principle diagram of multi-degree-of-freedom nanometer operating desk of the present invention;
In institute's drawings attached, identical Reference numeral is used for representing identical element or structure, wherein:
1-drive motors 2-Z axle linear drive motor 3-Y axle linear drive motor 4-XY axial displacement platform 5-X axle linear drive motor 6-Z axial displacement platform 7-nano-manipulation arm 61-fixed part 62-moving-member 41-the first parts 42-second in parallel parts 43-the 3rd parts in parallel in parallel that rotatablely move
Embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.In addition,, in each execution mode of described the present invention, involved technical characterictic just can combine mutually as long as do not form each other conflict.
Following examples of the present invention relate to multiaxis nano-manipulation platform, relate in particular to the nano-manipulation platform of multiple manipulation function such as can realizing nanostructure mechanically actuated operation, measurement, nano-device assembling.Fig. 1 is according to the structure front view of the multi-degree-of-freedom nanometer operating desk of the preferred embodiment of the present invention, and Fig. 2 is the structure rearview of the operating desk of multi-degree-of-freedom nanometer shown in Fig. 1.As shown in Figures 1 and 2, this operating desk is arranged in the vacuum chamber of scanning electron microscopy, mainly comprises that base, Z-direction displacement platform 6 and XY are to displacement platform 4.
Particularly, described Z-direction displacement platform 6 is arranged on base along vertical direction, and comprises fixed part 61 and moving-member 62, and wherein fixed part 61 keeps being connected with base, for whole operating desk is supported; Z-direction linear drive motor 2 is directly installed on moving-member 62, and the spiral motion of exporting at this motor 2 makes moving-member 62 move along Z-direction under driving, make thus Z-direction displacement platform and the parts entirety that is installed on it is moved; Between above-mentioned fixed part 61 and moving-member 62, be connected to each other by spherical guide, to ensure the accurate and steady of motion.In addition, between the bottom of the top of moving-member 62 and fixed part 61, be provided with back-moving spring, realize thus the linear reciprocating motion of Z-direction displacement platform 6 in Z-direction, also by drive motors and spring be used in conjunction with guarantee that Z-direction displacement platform realizes straight reciprocating motion in Z-direction.
Described XY is for example arranged on along horizontal direction on the moving-member 62 of Z-direction displacement platform by L shaped connecting plate to displacement platform 4, and comprise by spherical guide be connected in parallel to each other the first parts 41 in parallel, the second parts 42 in parallel and the 3rd parts 43 in parallel that roll and connect and can select one processing.Wherein the first parts 41 in parallel keep being connected with the moving-member 62 of Z-direction displacement platform, for whole XY is supported to displacement platform 4, and Y-direction linear drive motor 3 are directly installed; The second parts 42 in parallel are directly connected with the rotor of Y-direction linear drive motor 3, make the second parallel drive parts 42 (that is to say that the first parts 41 in parallel keep motionless with respect to the first parallel drive parts 41 along Y direction displacement, the second parts 42 in parallel move), and X is directly installed to linear drive motor 5; The 3rd portion 43 in parallel is connected to the rotor of linear drive motor 5 with X, make the second parallel drive parts 42 (that is to say that the first parts 41 in parallel keep motionless with respect to the first parallel drive parts 41 along X-direction displacement, the second parts 42 in parallel move), and the drive motors 1 that rotatablely moves is directly installed, realize rotatablely moving in perpendicular by the drive motors that rotatablely moves thus; In addition, between described first, second, and third parts in parallel, be respectively arranged with back-moving spring, the linear reciprocating motion in X-axis and Y direction passes through above structure to displacement platform to realize thus XY, can form a multi-degree-of-freedom nanometer operating desk of realizing XYZ tri-linear axis and a rotating shaft, thus with compact conformation, be convenient to manipulation mode realize displacement and the location in three dimensions.Especially, above-mentioned linear drive motor is all directly installed on displacement platform moving-member, and the spiral motion of exporting by motor promotes moving-member motion; When backhaul, motor screw-pinch, moving-member relies on the spring between fixed part to reply, and realizes linear reciprocating motion.This project organization is simple and reliable, and there is no bindiny mechanism between motor and moving-member, can maximum ensure that in couples the kinematic accuracy of motor passes to displacement platform, guarantees whereby displacement and the positioning precision of operating desk.In addition, described nano-manipulation arm 7 is arranged on the 3rd parts 43 in parallel, realize thus the rectilinear motion of X-axis, Y-axis and Z-direction, or be set directly on rotary drive motor 1, realize thus rotatablely moving in the rectilinear motion of X-axis, Y-axis and Z-direction and vertical plane.
In addition, consider that multi-degree-of-freedom nanometer operating desk of the present invention is arranged in the vacuum chamber of scanning electron microscopy, the particularity of applied environment makes also must take into full account in job specifications, motor type, assembly material selection, assembling process and the aspect such as clean according to nano-manipulation platform of the present invention, to ensure not destroy the vacuum degree of vacuum chamber in application process, ensure the high accuracy of whole operation simultaneously.For this reason, aspect the selection of motor, through more contrast test, according to the preferred embodiments of the present invention, described X is set to 30nm to the rectilinear motion minimum resolution of, Y-direction and Z-direction linear drive motor, the minimum resolution that rotatablely moves of the described drive motors that rotatablely moves is set to 1mrad, maximum movement speed is 1.2 mm/min, and all drive motors all can be 10
-6under the vacuum environment of Pa, work.Test result shows, under this ultra-high vacuum environment, this motor still both can ensure the step pitch resolution of 30nm, can maintain again the stable and good rigidity of movement output under long stroke.In addition, in the time that motor power-off does not have movement output, can also realize self-locking, guarantee positioning precision.
According to a preferred embodiment of the present invention, described XY is set to 25 × 25mm to the mesa dimensions of displacement platform, and stroke is ± 3mm, and mobile accuracy comprises following parameter: linearity 0.002mm, the rectilinear movement angle of pitch 30 ", rectilinear movement swings 25 ".The mesa dimensions of described Z-direction displacement platform is designed to 25 × 25mm, and stroke is ± 3mm, and mobile accuracy comprises following parameter: linearity 0.002mm, moving parallel degree 0.02mm.Described nano-manipulation arm is set to sonde-type, flexure type or tweezers-shaped, and top tip radius is set as 200nm.By the design of above specifications parameter, can further improve the integrated moving precision control of whole XY to displacement platform, and the especially setting of nano-manipulation arm, be applicable to the manipulation application occasion of nano material.
According to another preferred implementation of the present invention, described Z-direction displacement platform and XY all have linear pattern and the precision positioning performance of high rigidity, high bearing capacity, excellence to displacement platform.The rapidoprint of displacement platform is selected stainless steel, and compared with general steel or aluminium, stainless steel intensity is good, durable in use, and shock resistance is wear-resistant, and what is more important can not be got rusty, and can not pollute vacuum chamber, destroys vacuum degree.Spherical guide uses silica-based vacuum grease to be lubricated, displacement platform surface can be left intact, machine rear use ultrasonic oscillation instrument and clean, spring uses national standard part stainless steel cylindrical spring, and above design all ensures that displacement platform is applicable to the environment of condition of high vacuum degree.
In addition, although there is the influencing factors such as alignment error in assembling process, but there is high step pitch resolution according to the selected motor of above-mentioned preferred implementation, simultaneous displacement platform has excellent rigidity, linear pattern, positioning performance, when the two be used in conjunction with, can further ensure the positioning precision of displacement platform, in practical operation, the enlargement ratio of scanning electron microscopy that the present invention uses can reach × and 100,000, resolution 0.2nm, the displacement output of operating desk can judge adjustment by operating personnel by the realtime graphic of scanning electron microscopy.
Fig. 3 is according to the system principle diagram of multi-degree-of-freedom nanometer operating desk of the present invention.As shown in Figure 3, this system, except the drive motors as control object and nano-manipulation platform, also can comprise control box, host computer and driver etc.Wherein control box can be communicated by letter by USB interface with host computer, and host computer and driver can pass through RJ45 interface communication, and driver is communicated by letter by winding displacement with drive motors.And in a preferred embodiment, be one group by three drive motors and drive motors volumes that rotatablely move that can realize 3 d-line motion, driver can connect controls many groups, is used in conjunction with.
The operation principle of said system is soluble as follows: send drive displacement signal by control box to host computer, drive signal to comprise the selection of drive motors, the input of Velocity-acceleration, the selection of motion mode (crawl, long moving).Host computer is packed and is sent to driver in showing above-mentioned signal by man-machine interface, and driver drives selected drive motors according to the Velocity-acceleration numerical value in packets of information and motion mode.Drive motors promotes corresponding displacement platform motion, nano-manipulation platform output displacement.
To sum up, can realize smoothly the mechanically actuated operation such as acquisition, placement of nanostructure according to multi-degree-of-freedom nanometer operating desk of the present invention, electrically measure, the nano-manipulations such as nano-device assembling have been filled up domestic blank on multiaxis nano-manipulation platform is manufactured simultaneously.This operating desk has the features such as applied range, easy and simple to handle, operating efficiency is high, cost is low, its movement travel can reach 8 × 8 × 10mm × 360 °, rectilinear motion minimum resolution 30nm, the minimum resolution that rotatablely moves 1mrad, maximum movement speed 1.2mm/min.Test shows that it can steadily realize displacement and the location of multiple degree of freedom directions, and is particularly useful for the applied environment of condition of high vacuum degree.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., within all should being included in protection scope of the present invention.
Claims (9)
1. a multi-degree-of-freedom nanometer operating desk that is applicable to nano material manipulation, is characterized in that, this multi-degree-of-freedom nanometer operating desk is arranged in the vacuum chamber of scanning electron microscopy, and comprises that base, Z-direction displacement platform, XY are to displacement platform and nano-manipulation arm, wherein:
Described Z-direction displacement platform is arranged on base along vertical direction, and comprises by spherical guide fixed part connected to one another and moving-member, and wherein fixed part keeps being connected with base, for whole operating desk is supported; Z-direction linear drive motor is directly installed on moving-member, and under this motor drives, moving-member is moved along Z-direction; In addition, between the top of moving-member and the bottom of fixed part, be provided with back-moving spring, realize thus the linear reciprocating motion of Z-direction displacement platform in Z-direction;
Described XY is arranged on along horizontal direction on the moving-member of Z-direction displacement platform by L shaped connecting plate to displacement platform, and comprise by spherical guide be connected in parallel to each other the first parts in parallel, the second parts in parallel and the 3rd parts in parallel that are slidably connected, wherein the first parts in parallel keep being connected with the moving-member of Z-direction displacement platform, for whole XY is supported to displacement platform, and Y-direction linear drive motor is directly installed; The second parts in parallel are directly connected with the rotor of Y-direction linear drive motor, and X are directly installed to linear drive motor; The 3rd parts in parallel are connected to the rotor of linear drive motor with X, and the drive motors that rotatablely moves is directly installed, thus at X under, Y-direction linear drive motor driving separately, second, third parts in parallel can move along X-axis, Y direction with respect to the first parts in parallel simultaneously, and realize rotatablely moving in perpendicular under the driving of the drive motors that rotatablely moves; In addition, between described first, second, and third parts in parallel, be respectively arranged with back-moving spring, realize thus XY to displacement platform the linear reciprocating motion in X-axis and Y direction;
Described X is set to 30nm to the rectilinear motion minimum resolution of, Y-direction and Z-direction linear drive motor, the minimum resolution that rotatablely moves of the described drive motors that rotatablely moves is set to 1mrad, maximum movement speed is 1.2 mm/min, and all drive motors all can be 10
-6under the vacuum vacuum environment of Pa, work;
Described nano-manipulation arm is arranged on described the 3rd parts in parallel, realizes thus the rectilinear motion of X-axis, Y-axis and Z-direction; Or described in being arranged on, rotatablely move on drive motors, realize thus rotatablely moving in the rectilinear motion of X-axis, Y-axis and Z-direction and vertical plane.
2. multi-degree-of-freedom nanometer operating desk as claimed in claim 1, is characterized in that, described XY is preferably 25 × 25mm to the mesa dimensions of displacement platform, stroke is ± 3mm, and mobile accuracy comprises following parameter: linearity 0.002mm, the rectilinear movement angle of pitch 30 ", rectilinear movement swings 25 ".
3. multi-degree-of-freedom nanometer operating desk as claimed in claim 2, is characterized in that, the mesa dimensions of described Z-direction displacement platform is preferably 25 × 25mm, and stroke is ± 3mm, and mobile accuracy comprises following parameter: linearity 0.002mm, moving parallel degree 0.02mm.
4. the multi-degree-of-freedom nanometer operating desk as described in claim 1-3 any one, is characterized in that, all drive motors preferably have two path control signal input separately, and wherein a road is earth terminal; In addition, the control signal earth terminal of all drive motors Wei Yi road of being connected, the two path control signal input of the drive motors that rotatablely moves is designed to arrange faller gill matrix.
5. the multi-degree-of-freedom nanometer operating desk as described in claim 1-4 any one, it is characterized in that, described multi-degree-of-freedom nanometer operating desk is also equipped with driver, host computer and control box, wherein driver is connected with each drive motors by winding displacement, and its control signal output is connected with the control signal input of motor; Described host computer is connected with described driver by RJ45 interface, and described control box is connected with described host computer by USB interface.
6. multi-degree-of-freedom nanometer operating desk as claimed in claim 5, it is characterized in that, the integrated all control functions to nano-manipulation platform of described control box, comprise selection, drive motors speed, the input of acceleration and the selection of motor movement mode etc. of drive motors.
7. the multi-degree-of-freedom nanometer operating desk as described in claim 1-6 any one, is characterized in that, described Z-direction displacement platform and XY form by stainless steel to displacement platform, and all spherical guides use silica-based vacuum grease to be lubricated.
8. multi-degree-of-freedom nanometer operating desk as claimed in claim 1 or 2, is characterized in that, described in the drive motors that rotatablely moves be removably mounted on described XY on the 3rd parts in parallel of displacement platform.
9. multi-degree-of-freedom nanometer operating desk as claimed in claim 1, is characterized in that, described nano-manipulation arm is set to sonde-type, flexure type or tweezers-shaped, and its top tip radius is set to 200nm.
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| WO2017049671A1 (en) * | 2015-09-25 | 2017-03-30 | 苏州大学张家港工业技术研究院 | Micro operating system based on scanning electron microscope |
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| CN106441394A (en) * | 2016-11-04 | 2017-02-22 | 中国航空工业集团公司北京航空精密机械研究所 | Multiple-degree of freedom adjustment module |
| CN107055467A (en) * | 2017-05-08 | 2017-08-18 | 中国科学院物理研究所 | Vacuum transfer equipment for preparing two-dimensional material Van der Waals hetero-junctions |
| CN107055467B (en) * | 2017-05-08 | 2019-06-04 | 中国科学院物理研究所 | It is used to prepare the vacuum transfer equipment of two-dimensional material Van der Waals hetero-junctions |
| CN107991205A (en) * | 2018-01-17 | 2018-05-04 | 合肥工业大学 | A kind of reciprocating high temperature friction and wear testing machine of micro linear |
| CN109502543A (en) * | 2018-12-29 | 2019-03-22 | 哈尔滨工业大学 | A kind of nano-manipulation device |
| CN109502543B (en) * | 2018-12-29 | 2019-11-22 | 哈尔滨工业大学 | A kind of nano-manipulation device |
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| CN103903942B (en) | 2015-12-02 |
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