WO2017049671A1

WO2017049671A1 - Micro operating system based on scanning electron microscope

Info

Publication number: WO2017049671A1
Application number: PCT/CN2015/091628
Authority: WO
Inventors: 钟博文; 杨湛; 钱哲; 李宗伟; 王振华; 孙立宁
Original assignee: 苏州大学张家港工业技术研究院
Priority date: 2015-09-25
Filing date: 2015-10-10
Publication date: 2017-03-30
Also published as: CN105225910B; CN105225910A

Abstract

Disclosed is a micro operating system (100) based on a scanning electron microscope, wherein the system is applied to a scanning electron microscope device. The micro operating system (100) based on a scanning electron microscope comprises a base (10); several three-axis linear motion platforms (20) and a five-axis macro-motion platform (30) arranged on the base (10); a sample operating platform (40) arranged on the five-axis macro-motion platform (30); and carbon nano manipulators (50) arranged corresponding to each of the three-axis linear motion platforms (20), wherein the carbon nano manipulators (50) are arranged on the three-axis linear motion platforms (20), and the several three-axis linear motion platforms (20) are arranged around the circumference of the sample operating platform (40) at the periphery of the sample operating platform (40). By means of the arrangement of the above-mentioned structure, the micro operating system (100) based on a scanning electron microscope achieves multi-axis linkage with respect to a sample, thereby solving the problem in the prior art that a sample can only be observed from a single aspect.

Description

Scanning electron microscope based micro operating system

The present application claims the priority of the Chinese Patent Application No. 201510621517.7, entitled "Micro-Operating System Based on Scanning Electron Microscope", the entire disclosure of which is incorporated herein by reference. .

Technical field

The invention relates to a micro-operating system based on a scanning electron microscope, which is applied to a scanning electron microscope device.

Background technique

With the development of science and technology, people constantly need to observe and understand the material world around them from a higher micro level. Microscopic objects such as cells and microorganisms are not directly visible to the naked eye, and the invention of the microscope solves this problem. At present, nanotechnology has become a research hotspot. The characteristic scale of integrated circuit processing has entered deep submicron. All these smaller objects are not observed by optical microscopy, and scanning electron microscopy must be used.

Scanning electron microscopy (SEM) is a microscopic observation method between transmission electron microscopy and optical microscopy. It can directly use the material properties of the sample surface material for microscopic imaging. Advantages of scanning electron microscope: 1. It has a high magnification, and is continuously adjustable between 20 and 200,000 times. 2. It has a large depth of field, a large field of view, and a three-dimensional image. It can directly observe various samples. The fine structure of the surface; 3, the sample preparation is simple.

A scanning electron microscope (SEM) is an image device for amplifying a sample for observation. The SEM includes an electro-optical unit to magnify an image of the sample, a control unit to control the electro-optical unit, and a vacuum pump to create a vacuum in the electro-optical unit. The electron optical unit includes an electron gun to generate electrons, the lens unit directs an electron beam emitted by the electron gun to the sample in the sample holder, and the scan coil to scan the electron beam onto the sample. The image obtained by the electro-optical unit can be displayed on a display unit such as a computer or stored in a storage device and printed.

However, due to the limitations of its operating system, the existing scanning electron microscope (SEM) can only observe the sample in a single way, and can not adjust the observation posture of the sample and micro-nano with the multi-axis linkage of the sample. operating.

Summary of the invention

It is an object of the present invention to provide a scanning electron microscope-based micro-operating system that enables multi-axis linkage of a sample.

In order to achieve the above object, the technical solution adopted by the present invention is as follows: a micro-operating system based on a scanning electron microscope, comprising a base, a plurality of three-axis linear motion platform and a five-axis macro motion platform disposed on the base, a sample console disposed on the five-axis macro-motion platform and a carbon nano-operator corresponding to each of the three-axis linear motion platform, the carbon nano-operator is disposed on the three-axis linear motion platform, and the plurality of A three-axis linear motion platform is disposed around the sample stage along the circumference of the sample stage.

Further, the three-axis linear motion platform and the five-axis macro motion platform are driven by a piezoelectric motor.

Further, the three-axis linear motion platform includes a base disposed on the base, a first sliding seat disposed on the base, a second sliding seat disposed on the first sliding seat, and a second sliding seat disposed on the first sliding seat a lifting seat on the second sliding seat, the first sliding seat is driven by a piezoelectric motor to move in the X-axis direction on the base, and the second sliding seat is driven by the piezoelectric motor in the first sliding seat The upper side moves in the Z-axis direction, and the lift block is driven by the piezoelectric motor to move in the Y-axis direction on the second sliding seat.

Further, the five-axis macro motion platform includes a fixing base disposed on the base and a movable seat disposed on the fixing base, and the sample operating table is fixed on the moving seat, the moving seat It is driven by a piezoelectric motor to move in the three axial directions X, Y, Z on the mount and to be twisted on the mount by a piezoelectric motor.

Further, a rail assembly is disposed between the base and the three-axis linear motion platform.

Further, the scanning electron microscope-based micro-operating system further includes a driving device that drives the three-axis linear motion platform to move along the rail assembly relative to the base.

Further, the driving device includes a plurality of ceramic strips fixed on the base and a plurality of piezoelectric ultrasonic motors disposed corresponding to the ceramic strips, and each of the piezoelectric ultrasonic motors is disposed correspondingly on the three axes On a linear motion platform.

Further, the rail assembly includes a rail fixed on the base and a plurality of movable seats disposed on the rail and movable relative to the rail, and the plurality of three-axis linear motion platforms are fixed in one-to-one correspondence Said on the mobile seat.

Further, a cavity for accommodating the sample console is disposed through the base.

Further, the five-axis macro motion platform is located below the base.

With the above solution, the present invention has at least the following advantages: the scanning electron microscope-based micro-operating system of the present invention has a plurality of three-axis linear motion platforms and five-axis macro motion platforms on the pedestal, and several three-axis linear motion platforms It is arranged around the sample console along the circumferential direction of the sample console to realize multi-axis linkage of the sample, which solves the problem that only a single specimen can be observed in the prior art.

The above description is only an overview of the technical solutions of the present invention, and the technical means of the present invention can be more clearly understood and can be implemented in accordance with the contents of the specification. Hereinafter, the preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Specific embodiments of the present invention are given in detail by the following examples and the accompanying drawings.

DRAWINGS

1 is a schematic structural view of a micro-operating system based on a scanning electron microscope according to an embodiment of the present invention;

2 is a schematic view showing the structure of the micro-operating system based on the scanning electron microscope shown in FIG. 1 from another perspective;

Figure 3 is a partial structural view of Figure 1;

Figure 4 is a partial structural view of Figure 3;

Figure 5 is an assembled view of the five-axis piezoelectric platform and the console of Figure 3;

Figure 6 is a schematic structural view of the three-axis manual linear motion platform of Figure 1;

7 is a schematic structural view of a micro-operating system based on a scanning electron microscope in another embodiment of the present invention.

detailed description

The specific embodiments of the present invention are further described in detail below with reference to the drawings and embodiments. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.

Referring to FIG. 1 to FIG. 6, a scanning electron microscope-based micro-operating system 100 includes a susceptor 10, a plurality of three-axis linear motion platforms 20 and five axes disposed on the susceptor 10. The macro motion platform 30, a sample stage 40 disposed on the five-axis macro motion platform 30 for placing the sample, and a carbon nano-operating hand 50 disposed corresponding to each of the three-axis linear motion platforms 20. The carbon nanomanipulator 50 is disposed on the three-axis linear motion platform 20, and a plurality of the three-axis linear motion platforms 20 are disposed around the sample console 40 along the circumferential direction of the sample console 40. In the present embodiment, the number of the three-axis linear motion platforms 20 used is four, and the four three-axis linear motion platforms 20 are symmetrically disposed on both sides of the carbon nano-operating hand 50.

The base 10 is provided with a cavity 11 for accommodating the sample console 40. In the embodiment, the base 10 is a thin rectangular parallelepiped, and the base 10 includes an opposite upper surface 12 and The lower surface 13 is formed through the upper surface 12 of the base 10 and the lower surface 13 of the base 10. The cross-sectional shape of the cavity 11 is circular, and the base 10 is provided with support for supporting the base 10. Column 14. The sample stage 40 includes a mounting block 41 and an operation portion 42 fixed to the mounting block 41, the operation portion 42 including a rod body 421 perpendicular to the mounting block 41 and a table portion provided on the rod body 421. 422. In actual operation, the sample console 40 can be moved within the cavity 11 according to actual needs, such as moving downward, axially moving or rotating.

The three-axis linear motion platform 20 and the five-axis linear motion platform 30 are each driven by a piezoelectric motor 60. The three-axis linear motion platform 20 includes a base 21 disposed on the base 10, a first sliding seat 22 disposed on the base 21, and a second sliding seat disposed on the first sliding seat 22. 23 and a lifting seat 24 disposed on the second sliding seat 23. The first sliding seat 22 is driven by a piezoelectric motor 60 to move in the X-axis direction on the base 21, and the second sliding seat 23 is driven by the piezoelectric motor 60 to be in the Z-axis direction on the first sliding seat 22. Moving upward, the lift base 24 is driven by the piezoelectric motor 60 to move in the Y-axis direction on the second sliding seat 23. The carbon nano-operating hand 50 is fixed on the lifting seat 24, and the carbon nano-operating hand 50 controls the three-axis linear motion platform 20 to move in three axial directions by the piezoelectric motor 60, that is, in the X, Y, and Z. Move in the axial direction. It is to be noted that the three-axis linear motion platform 20 can also have other structures to enable the carbon nano-operating hand 50 to move in three axial directions of X, Y, and Z through the three-axis linear motion platform 20.

The five-axis macro motion platform 30 includes a fixing base 31 disposed on the base 10 and a movable seat 32 disposed on the fixing base 31, and the mounting block 41 of the sample operating table 40 is fixed to the movement On the seat 32, the movable seat 32 is driven by the piezoelectric motor 60 to move in the three axial directions of X, Y, Z on the fixed seat 31 and is driven by the piezoelectric motor 60 on the fixed seat 31. Reversed. The five-axis macro motion platform 30 is located below the base 10, and the five-axis macro motion platform 30 further includes a fixing block 33 disposed on two sides of the fixing base 31, and the fixing block 33 is fixed on the lower surface of the base 10. 13 to thereby fix the five-axis macro motion platform 30 to the base 10. It is true that the five-axis macro motion platform 30 can also be configured to allow the sample console 40 to move in three axial directions of X, Y, and Z through the five-axis macro motion platform 30 and in two directions. Torsion (ie, movement in five directions).

A guide rail assembly 70 is disposed between the base 10 and the three-axis linear motion platform 20 to move the three-axis linear motion platform 20 along the rail assembly 70 on the base 10 through the rail assembly 70 to adjust the three-axis straight line. The position of the motion platform 20. The rail assembly 70 includes a rail 71 fixed on the base 10 and a plurality of movable seats 72 disposed on the rail 71 and movable relative to the rail 71, and the plurality of three-axis linear motion platforms 20-one Correspondingly fixed on the moving base 72. The track 71 disposed on the base 10 has a plurality of segments. In the embodiment, the track 71 has a four-segment structure, and the four-segment track 71 is disposed one-to-one with the four three-axis linear motion platforms 20, respectively. Each of the segments 71 is arcuate and is fixed to the upper surface 12 of the base 10. The scanning electron microscope-based micro-operating system 100 further includes driving the three-axis linear motion platform 20 along the rail assembly 70 relative to the base 10 Mobile drive unit 80. The driving device 80 includes a plurality of ceramic strips 81 fixed on the base 10 and a plurality of piezoelectric ultrasonic motors 82 corresponding to the ceramic strips 81. Each of the piezoelectric ultrasonic motors 82 and the movable base 72 are one by one. Correspondingly, the movable seat 72 is mounted with an inverted L-shaped mount 90, and the mount 90 includes a horizontal portion 91 fixed on the movable seat 72 and a vertical portion 92 extending downward from the horizontal portion 91, The piezoelectric ultrasonic motor 82 is fixed to a vertical portion 92 which is located above the ceramic strip 81. In the present embodiment, since the number of the three-axis linear motion platform 20 is four, the ceramic strip 81 and the piezoelectric ultrasonic motor 82 are also respectively provided with four, four ceramic strips 81 and four mounted three-axis linear motion platforms. The tracks 71 of 20 are one-to-one, respectively. Each of the ceramic strips 81 has an arc shape, and each of the ceramic strips 81 is concentric with the corresponding rail 71, and the arcs of the two are the same. In order to facilitate the installation of the driving device 80 and to reduce the overall volume of the scanning electron microscope-based micro-operating system 100, in the present embodiment, the susceptor 10 is recessed downwardly from the upper surface 12 thereof to form an annular groove. 15. The annular groove 15 is disposed around the periphery of the cavity 11, and the ceramic strip 81 of the driving device 80 is disposed in the annular groove 15. The annular groove 15 includes a bottom wall 151 and a side wall 152 which is located outside the bottom wall 151, and the ceramic strip 81 is fixed to the bottom wall 151. The annular groove 15 is further provided with four displacement detectors 93 and four balance plates 94. The four displacement detectors 93 are respectively arranged in a one-to-one manner with the four three-axis linear motion platforms 20, each of which is disposed. The displacement detector 93 is used to detect the position of the three-axis linear motion platform 20 corresponding thereto, and each of the displacement detectors 93 is located between the corresponding ceramic strip 81 and the side wall 152. The balance plate 94 is fixed to a vertical portion 92 of the mounting seat 90, the balance plate 94 is located in the annular groove 15, and the balance plate 94 has an arcuate wall 941 facing the side wall 152 of the annular groove 15. The curved portion 941 abuts against the side wall 152 of the annular groove 15. In other embodiments, the track 71 can be an annular track 71. In addition, in other embodiments, the driving device 80 may also be other power devices to drive the three-axis linear motion platform 20 to move relative to the base 10. In the embodiment, in order to facilitate the installation of the rail 71, the upper surface 12 of the base 10 is further provided with four positioning strips 95 matched with the rails, and the four positioning strips 95 are respectively disposed one by one with the four rails 71, one for each. The positioning bar 95 has an arc shape that is the same as the arc of the track 71. The four positioning bars 95 are respectively disposed one-to-one with the four rails 71.

Referring to FIG. 7 , together with FIG. 1 to FIG. 6 , a scanning electron microscope based micro operating system 100 ′ according to another preferred embodiment of the present invention and a scanning electron microscope based micro operating system 100 in the first embodiment. The structure is basically the same, and the only difference is that the rail assembly 70 is not disposed between the three-axis linear motion platform of the micro-operating system 100 based on the scanning electron microscope of the embodiment, and the corresponding driving device 80 is not provided. In the present embodiment, the three-axis linear motion platform 20 of the scanning electron microscope-based micro-operating system 100 is directly fixed to the base 10, and the three-axis linear motion platform 20 cannot move relative to the base 10.

In summary, the above-described scanning electron microscope-based micro-operating system 100, 100' is provided with a plurality of three-axis linear motion platform 20 and a five-axis macro motion platform 30 on the base 10, and a plurality of three-axis linear motion platforms 20 are The circumferential direction of the sample operating table 40 is disposed around the sample operating table 40, thereby achieving multi-axis linkage of the sample, which solves the problem that only a single sample can be observed in the prior art; The motor 60 drives the three-axis linear motion platform 20 and the five-axis macro motion platform 30 to achieve micro-nano adjustment of the penetrating posture of the sample; and the combination of the piezoelectric motor 60, the three-axis linear motion platform 20 and the five-axis macro motion The micro-nano operation for micro-nano adjustment of the observation posture of the sample and multi-axis linkage of the sample is realized.

The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention. It should be noted that those skilled in the art can make some improvements without departing from the technical principles of the present invention. And modifications and variations are also considered to be within the scope of the invention.

Claims

A micro-operating system based on a scanning electron microscope, comprising: a base, a plurality of three-axis linear motion platform and a five-axis macro motion platform disposed on the base, and a sample disposed on the five-axis macro motion platform a console and a carbon nanomanipulator corresponding to each of the three-axis linear motion platform, the carbon nano-operator is disposed on the three-axis linear motion platform, and the three-axis linear motion platform operates along the sample The circumference of the stage is placed around the sample station.
The scanning electron microscope-based micro-operating system according to claim 1, wherein the three-axis linear motion platform and the five-axis macro motion platform are each driven by a piezoelectric motor.
The scanning electron microscope-based micro-operating system according to claim 2, wherein the three-axis linear motion platform comprises a base disposed on the base, a first sliding seat disposed on the base, a second sliding seat disposed on the first sliding seat and a lifting seat disposed on the second sliding seat, the first sliding seat being driven by a piezoelectric motor to move along the X-axis direction on the base, The second sliding seat is driven by a piezoelectric motor to move in the Z-axis direction on the first sliding seat, and the lifting seat is driven by the piezoelectric motor to move in the Y-axis direction on the second sliding seat.
The scanning electron microscope-based micro-operating system according to claim 3, wherein the five-axis macro motion platform comprises a fixed seat disposed on the base and a movable seat disposed on the fixed seat, The sample operating table is fixed on the movable seat, and the movable seat is driven by a piezoelectric motor to move in three axial directions of X, Y, and Z on the fixed seat and driven by a piezoelectric motor. The seat is twisted.
The scanning electron microscope-based micro-operating system according to claim 1 or 2, wherein a guide rail assembly is disposed between the base and the three-axis linear motion platform.
The scanning electron microscope-based micro-operating system according to claim 5, wherein the scanning electron microscope-based micro-operating system further comprises a driving device for driving the three-axis linear motion platform to move along the rail assembly relative to the base .
The scanning electron microscope-based micro-operating system according to claim 6, wherein the driving device comprises a plurality of ceramic strips fixed on the base and a plurality of piezoelectric ultrasonic motors disposed corresponding to the ceramic strips. Each of the piezoelectric ultrasonic motors is disposed one by one on the three-axis linear motion platform.
A scanning electron microscope-based micro-operating system according to claim 5, wherein said rail assembly comprises a rail fixed to said base and a plurality of rails disposed on said rail and movable relative to said rail The moving seat, a plurality of the three-axis linear motion platforms are fixed to the moving seat one by one.
The scanning electron microscope-based micro-operating system according to claim 2, wherein the base is provided with a cavity for accommodating the sample stage.
The scanning electron microscope-based micro-operating system according to claim 9, wherein the five-axis macro motion platform is located below the base.