CN87214469U - Multifunctional specimen-loading support for electronic scanning microscope - Google Patents
Multifunctional specimen-loading support for electronic scanning microscope Download PDFInfo
- Publication number
- CN87214469U CN87214469U CN 87214469 CN87214469U CN87214469U CN 87214469 U CN87214469 U CN 87214469U CN 87214469 CN87214469 CN 87214469 CN 87214469 U CN87214469 U CN 87214469U CN 87214469 U CN87214469 U CN 87214469U
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- template
- pair
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- sample stage
- loading
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Abstract
The utility model discloses a multifunctional specimen-loading support for an electronic scanning microscope, comprising a pair of symmetric loading systems of a stepper motor, a pair of bottom boards, a first template or a second template which are arranged on the bottom boards, and conveying rods which are fixed on the templates, wherein, the first template can fix a first specimen clamp or a second specimen clamp which are used for the tensile tests of strip or thread materials, and the second template can fix a cross section bending die, a face bending (compressing) die, cutting off (stamping out) die, etc. In addition, the multifunctional specimen-loading support is also provided with a recording device which can record the changes of specimens. The multifunctional specimen-loading support enlarges the use functions of an electronic scanning microscope, so that various loading courses can be effectively simulated, and the measured state parameters can be recorded.
Description
The utility model relates to the loading sample stage on the scanning electron microscopy, the multi-functional loading sample stage of particularly a kind of scanning electron microscopy.
ESEM is a kind of visual plant in the electronic optical instrument field, obtains extensive use in science and technology such as material, machinery, medical science and industrial circle.By the sample that is fixed on the sample stage is loaded, can observe the complicated change procedure of sample (being material) under stress, thereby carry out dynamic analysis.The sample platform of scanning electronic microscope that existing Britain Camb company makes, utilize two stepper motors, by the worm and gear transmission, drive template and on the sample chuck, the sample that is fixed on the sample chuck is done to stretch or compression-loaded, simultaneously sample is carried out scanning, and by the state parameter detection output (gauge outfit indication) of transducer with sample.This sample stage load mode is single, can only stretch to load or compression-loaded.Need during the load mode conversion sample stage and related template are all changed, the transposing operation is complicated, and the time is long, and the parts of changing are difficult for keeping.In addition, the output of its signal can only show by meter pointer, is difficult for observing out for the details of some variations, and can not carries out reference record.
The purpose of this utility model is can stretch to sample in order to provide a kind of, compression, crooked, the multi-functional loading sample stage that shearing and punching press load, ESEM uses this multi-functional loading sample stage just might effectively simulate the real process of various mode of loadings, reaches the purpose that dynamic observes that gears to actual circumstances.
Further purpose of the present utility model is to be equipped with a function tape deck on ESEM again, measured state parameter is noted, so that carry out analysis-by-synthesis with viewed corresponding pattern.
The purpose of this utility model realizes by following manner, the multi-functional loading sample stage of a kind of ESEM comprises a pair of stepper motor symmetry loading system, the a pair of sample stage base plate that can do relative motion by two stepper motor symmetry loading systems drivings, a pair of be removably mounted on respectively on each sample stage base plate, be used for fixing the template of sample chuck, and be installed in driven rod on the template, that signal to transducer.Wherein, a kind of second sample chuck that is used for carrying out a material tension test can be fixed on the described template (i.e. first template), the second sample chuck is two pairs, wherein each right shape cooperates with dress mould groove shapes on first template and is removably mounted on pressing plate in the dress mould groove, and each is to all there being a V-type groove on the correspondence position of the centre of pressing plate contact-making surface; Perhaps, described template is a kind of energy fixed shear (punching press) mould, second template of surface curvature (compression) mould and cross section bending die, second template is a pair of template that is angle square shape, wherein on the long limit of each level some positioning through hole are arranged, there is a horizontal flanges rear surface on the long limit of each level, and a projection is arranged on the front surface of each vertical minor face, the upside of projection respectively has two screws that driven rods are installed, and also has one aforementioned various moulds to be installed and to be made a side of mould nestle up the installed surface of a side of projection on the front surface of each vertical minor face.
The utility model comprises further that also an energy issues driven rod the tape deck that the signal of transducer is noted with functional form.
The utility model has the advantages that provide a kind of and can stretch, compressed sample, multi-functional loading sample stage that crooked, shearing and punching press load, ESEM uses this sample stage just to enlarge its function of use, thereby might effectively simulate the real process of various mode of loadings, reach the purpose that dynamic observes that gears to actual circumstances.And the state parameter that records can be noted, so that carry out analysis-by-synthesis with viewed corresponding pattern.
Below in conjunction with accompanying drawing embodiment of the present utility model is done detailed explanation:
Fig. 1 is the loading sample stage structure chart;
Fig. 2 is the cope match-plate pattern front view in first template;
Fig. 3 is the right view of structure shown in Figure 2;
Fig. 4 is the lower bolster front view in first template;
Fig. 5 is the left view of structure shown in Figure 4;
Fig. 6 is the front view of the first sample chuck;
Fig. 7 is the bottom view of structure shown in Figure 6;
Fig. 8 is the front view of a pair of second sample chuck;
Fig. 9 is the top view of structure shown in Figure 8;
Figure 10 is in second template, with the cope match-plate pattern front view of the crooked punch in a cross section;
Figure 11 is the top view of structure shown in Figure 10;
Figure 12 is in second template, with the lower bolster front view of the crooked die in a cross section;
Figure 13 is the top view of structure shown in Figure 12;
Figure 14 is a front view of shearing (punching press) mould;
Figure 15 is the cutaway view along Figure 14 A-A line;
Figure 16 is the front view of surface curvature (compression) mould;
Figure 17 is the top view of structure shown in Figure 16.
Referring to Fig. 1, a pair of base plate-upper plate 2 and lower shoe 3 are installed on the sample stage 1 of ESEM slidably, that base plate 2 and 3 can be done under a pair of stepper motor symmetry loading system (not shown) drives is relative (in opposite directions or opposing) moves.The center displacement of two stepper motors symmetry loading system is little, the load capacity height, and can arbitrarily adjust the speed and the direction of loading and unloading.During work, base plate and template fixed thereon and mould etc. are inserted in the sample room of ESEM.
One location groove 4 is arranged on the front surface of upper plate 2, and some positioning screw holes 5 are arranged at the bottom of front surface.One location groove 6 is also arranged on the front surface of lower shoe 3, and some positioning screw holes 7 are also arranged at the top of front surface.The front surface of the front surface of upper plate 2 and lower shoe 3 is in the same plane.Upper plate 2 and lower shoe 3 parallel interval one segment distance on the direction vertical with their direction of motion.
In Fig. 1, fixedly mounting the cope match-plate pattern 8 in first template on the front surface of upper plate 2, fixedly mounting the lower bolster 9 in first template on the front surface of lower shoe 3.First template is the template of using in prior art.
The structure of cope match-plate pattern 8 is described in conjunction with Fig. 2 and Fig. 3 now.Two projection-first projections 10 and second projection 11 are arranged on the front surface of cope match-plate pattern 8, first projection 10 and second projection, 11 relative sides all are as shown in Figure 2 an arc, and the interval between first projection 10 and second projection 11 forms a dress mould groove 12.On the front surface at dress mould groove 12 places, a screw 13 is arranged.The through hole 14 that one band counterbore is arranged on first projection 10, on the front surface, with the position of through hole 14 same levels on also have a through hole 15.One horizontal flanges 16 is arranged at the top of the rear surface of cope match-plate pattern 8.The size of the detent 4 on the size of flange 16 and the upper plate 2 cooperates, and the horizontal interval of flange 16 and through hole 14,15 just in time with upper plate 2 on detent 4 equate with the horizontal interval of positioning screw hole 5.Thereby be entrenched in 4 li of grooves by flange 16, and screw passes through hole 14 or 15 and be connected 5 li of screws, the cope match-plate pattern 8 of first template correctly can be positioned on the upper plate 2, as shown in Figure 1.It can also be seen that to also have a screw 17 from Fig. 1 on the upper side of first projection 10, screw 17 is used for fixing the driven rod (not shown).
The structure of lower bolster 9 is described in conjunction with Fig. 4 and Fig. 5 now.Have two projections-the 3rd projection 18 and the 4th projection 19, the three projections 18 and the 4th projection 19 relative sides all to be as shown in Figure 4 an arc on the front surface of lower bolster 9, the interval between the 3rd projection 18 and the 4th projection 19 forms a dress mould groove 20.On the front surface at dress mould groove 20 places, a screw 21 is arranged.The shape of tankage groove 20 and screw 21 are identical in the position of 12 li of dress mould grooves with the shape and the screw 13 of the dress mould groove 12 of 8 li of cope match-plate patterns in the position of 20 li of dress mould grooves.The through hole 22 that one band counterbore is arranged on the 4th projection 19, on the front surface, with the position of through hole 22 same levels on also have a through hole 23.One horizontal flanges 24 is arranged at the bottom of the rear surface of lower bolster 9.The size of the detent 6 on the size of flange 24 and the lower shoe 3 cooperates, and the horizontal interval distance of flange 24 and through hole 22,23 just in time with lower shoe 3 on the horizontal interval of detent 6 and positioning screw hole 7 apart from equating.Be entrenched in 6 li of grooves by flange 24 like this, and screw passes through hole 22 or 23 and be connected 7 li of screws, the lower bolster 9 of first template correctly can be fixed on the lower shoe 3.As shown in Figure 1, mounted cope match-plate pattern 8 and lower bolster 9, their dress mould groove 12 and 20 opening are aligned with each other.Also can find out to also have two screws 25 from Fig. 1 on the upper side of the 3rd projection 18, they are the (not shown)s that are used for fixing driven rod.
Referring to Fig. 6 and Fig. 7, this is the first sample chuck that is used for carrying out the band tension test, and this uses in the prior art.The first sample chuck is two block pressur plates 26, and a through hole 27 is arranged on the pressing plate 26, the front end 28 of pressing plate 26 and the form fit of both sides arc with dress mould groove 12 and 20.One block pressur plate 26 is installed in the dress mould groove of a template, screw is fixed on pressing plate 26 in the dress mould groove by the through hole on the pressing plate 26 27, this moment, the front end 28 of pressing plate 26 was positioned at the opening part of adorning the mould groove, and the two ends of band sample are fixed on respectively between two pairs of pressing plates and the dress mould groove.
Referring to Fig. 8 and Fig. 9, this is the second sample chuck that is used for carrying out a material tension test, and the second sample chuck is two pairs of pressing plates 29.It is formed that pressing plate 29 is that pressing plate 26 extend horizontally away a transverse slat 30 again at its front end 28 places, so a through hole 31 is also arranged on the pressing plate 29.In addition, on a transverse slat 30 of a pair of pressing plate 29, a pair of through hole 32 is arranged, a pair of screw 33 is arranged on another piece transverse slat 30.Pair of screws 34 can be with a pair of pressing plate 29 relative fixed by through hole 32 and screw 33.After two block pressur plates 29 touched and on the correspondence position of centre of face a V-type groove 35, two block pressur plates 29 relative fixed arranged all, two V-type grooves, the 35 synthetic diamond holes (as shown in Figure 9) on their contact-making surfaces were at an end of diamond hole place anchoring filament material sample.Be installed in two pairs of pressing plates 29 on first template, their transverse slat 30 is relative, and their diamond holes that synthesized by V-type groove 35 align in the horizontal direction.
Referring to Figure 10 and Figure 11, the cope match-plate pattern 36 of second template is angle square shape, and the horizontal sides 37 of angle square shape cope match-plate pattern 36 is longer, and vertical edges 38 is shorter.The lower horizontal of horizontal sides 37 is being arranged some through holes 39, and a horizontal flanges 40 is arranged at the top of horizontal sides 37 rear surfaces, and the size of the detent 4 on the size of flange 40 and the upper plate 2 cooperates.The front surface of vertical edges 38 has a projection 41, and the surface area of the surface area ratio vertical edges 38 of projection 41 is smaller, thereby reserves an installed surface on vertical edges 38, has two screws on the installed surface, thus can be on installed surface fixed mould.In Figure 10 and 11, on installed surface, fixed the crooked punch 43 in a cross section by screw 42, the left side of the crooked punch 43 in cross section is against the right side of projection 41.The upside of projection 41 has two screws 44, and the through hole 46 of two vertical band counterbores is arranged on the driven rod 45, passes through hole 46 by screw 47 and is tightened on the screw 44, driven rod 45 is fixed on the upper side of projection 41.So the cope match-plate pattern 37 of second template of structure can be installed on the upper plate shown in Figure 12, and the flange 40 on the cope match-plate pattern 37 is entrenched in 4 li of grooves at this moment, and screw can pass through hole 39 and be tightened in 5 li of screws.
Referring to Figure 14 and 15, this is shearing (punching press) mould of a cover band guide pillar, and punch 57 has the through holes 58 of two band counterbores, and screw can be fixed on punch 57 on the installed surface of the cope match-plate pattern 37 of second template or lower bolster 48 by through hole 58; The through holes 60 of two band counterbores are also arranged on the die 59, and screw can be fixed on die 59 on the installed surface of the lower bolster 48 of second template or cope match-plate pattern 37 by through hole 60.Be installed in the position that this cover die prodigiosin on second template just in time is in correct cooperation.Actually this mold is made shearing test, still the punch test of work will be determined according to the thickness of sample, the gap between the concavo-convex mould.
Referring to Figure 16 and 17, surface curvature (compression) mould has two such pressing plates 61, two through holes 62 that cooperate with screw on the second template installed surface are arranged on the pressing plate 61, one block pressur plate 61 is fixed on the installed surface of a template, and each end of sample is placed between the installed surface and pressing plate 61 of template.If sample is thinner, the power in opposite directions that is applied on the sample two ends can make the sample bending, face bend test that then Here it is; If sample is thicker, the power in opposite directions that is applied on the sample two ends can only make sample be extruded, and has then just become compression test.
Method of operation of the present utility model is, as carrying out band or the tension test of silk material, a pair of first template can be installed in respectively on a pair of base plate, and cope match-plate pattern 8 is installed on the upper plate 2, and lower bolster 9 is installed on the lower shoe 3.The first sample chuck that on bolster, fixedly has sample then, or the second sample chuck.As carrying out cross section bending, surface curvature (compression) or shearing (punching press) test, a pair of second template can be installed in respectively on a pair of base plate, cope match-plate pattern 37 is installed on the upper plate 2, and lower bolster 48 is installed on the lower shoe 3.Constant cross-section bending die or surface curvature (compression) mould or shear (punching press) mould on bolster then, and sample is placed therebetween.On the sample stage base plate, install template, behind mould and the sample, sample stage is placed in the sample room, the direction of motion and the movement velocity of template are adjusted by the control device outside the sample room.At this moment can observe the stand under load situation of sample by the scanning lens barrel on the one hand.On the one hand by being fixed on driven rod on the template to transducer power output and deformation signal, this signal is indicated by instrument after amplifying.This signal can also be transported to and carry out record in the recorder that is attached on the ESEM, and does behind the A/D conversion by the magnetic tape type printer record.This record instrument can be X-Y recorder, printer or magnetic tape station.
Identical label is represented identical structure or parts in institute's drawings attached.
Claims (3)
1, the multi-functional loading sample stage of a kind of ESEM comprises a pair of stepper motor symmetry loading system, the a pair of sample stage base plate that can do relative motion by two stepper motor symmetry loading systems drivings, a pair of being removably mounted on respectively on each sample stage base plate, be used for fixing the template of sample chuck, and be installed on the template, driven rod to the transducer signalling, it is characterized in that, a kind of second sample chuck that is used for carrying out a material tension test can be fixed on the described template (i.e. first template), the second sample chuck is two pairs, wherein each right shape cooperates with dress mould groove shapes on first template and is removably mounted on pressing plate in the dress mould groove, and each is to all there being a V-type groove on the correspondence position of the centre of pressing plate contact-making surface.
2, the multi-functional loading sample stage of a kind of ESEM comprises a pair of stepper motor symmetry loading system, the a pair of sample stage base plate that can do relative motion by two stepper motor symmetry loading systems drivings, a pair ofly be removably mounted on template on each sample stage base plate, that be used for fixing the sample chuck respectively, and be installed in driven rod on the template, that signal to transducer, it is characterized in that, described template is a kind of energy fixed shear (punching press) mould, second template of surface curvature (compression) mould and cross section bending die; Second template is a pair of template that is angle square shape, wherein on the long limit of each level positioning through hole is arranged, and there is a horizontal flanges rear surface on the long limit of each level; And have a projection, the upside of projection that two screws that driven rods are installed are respectively arranged on the front surface of each vertical minor face, also have one aforementioned various moulds to be installed and to be made a side of mould nestle up the installed surface of a side of projection on the front surface of each vertical minor face.
3, multi-functional loading sample stage according to claim 1 and 2 is characterized in that, comprises that also an energy sends to driven rod the tape deck that the signal of transducer is noted with functional form.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 87214469 CN87214469U (en) | 1987-10-14 | 1987-10-14 | Multifunctional specimen-loading support for electronic scanning microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 87214469 CN87214469U (en) | 1987-10-14 | 1987-10-14 | Multifunctional specimen-loading support for electronic scanning microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN87214469U true CN87214469U (en) | 1988-07-20 |
Family
ID=4828784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 87214469 Expired - Lifetime CN87214469U (en) | 1987-10-14 | 1987-10-14 | Multifunctional specimen-loading support for electronic scanning microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN87214469U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1580751B (en) * | 2003-08-12 | 2010-05-12 | 三星Sdi株式会社 | Support and analyzing device including same |
| CN101158629B (en) * | 2007-10-26 | 2010-06-02 | 北京工业大学 | Scanning electron microscope electron back scattering diffraction in-situ stretching device and measuring method |
| CN101221882B (en) * | 2007-12-14 | 2010-09-01 | 中国科学院物理研究所 | Adapter of transmission electron microscope example bench, its substrate and manufacturing method thereof |
| CN1661363B (en) * | 1998-11-10 | 2011-03-23 | 株式会社岛津制作所 | Electro-probe micro analyzer |
| CN101493387B (en) * | 2009-02-17 | 2012-10-03 | 深圳市金洲精工科技股份有限公司 | Fixing device for detecting micro-drilling by scanning electron microscope |
| CN104254767A (en) * | 2012-02-26 | 2014-12-31 | 克力博成像诊断股份有限公司 | Tissue specimen stage for an optical sectioning microscope |
| CN105225910A (en) * | 2015-09-25 | 2016-01-06 | 苏州大学张家港工业技术研究院 | Based on the micro OS of scanning electron microscopy |
-
1987
- 1987-10-14 CN CN 87214469 patent/CN87214469U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1661363B (en) * | 1998-11-10 | 2011-03-23 | 株式会社岛津制作所 | Electro-probe micro analyzer |
| CN1580751B (en) * | 2003-08-12 | 2010-05-12 | 三星Sdi株式会社 | Support and analyzing device including same |
| CN101158629B (en) * | 2007-10-26 | 2010-06-02 | 北京工业大学 | Scanning electron microscope electron back scattering diffraction in-situ stretching device and measuring method |
| CN101221882B (en) * | 2007-12-14 | 2010-09-01 | 中国科学院物理研究所 | Adapter of transmission electron microscope example bench, its substrate and manufacturing method thereof |
| CN101493387B (en) * | 2009-02-17 | 2012-10-03 | 深圳市金洲精工科技股份有限公司 | Fixing device for detecting micro-drilling by scanning electron microscope |
| CN104254767A (en) * | 2012-02-26 | 2014-12-31 | 克力博成像诊断股份有限公司 | Tissue specimen stage for an optical sectioning microscope |
| CN104254767B (en) * | 2012-02-26 | 2016-10-26 | 克力博成像诊断股份有限公司 | For optical section microscopical tissue samples workbench |
| CN105225910A (en) * | 2015-09-25 | 2016-01-06 | 苏州大学张家港工业技术研究院 | Based on the micro OS of scanning electron microscopy |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CX01 | Expiry of patent term |