CN205069577U - Novel little operation platform - Google Patents
Novel little operation platform Download PDFInfo
- Publication number
- CN205069577U CN205069577U CN201520753105.4U CN201520753105U CN205069577U CN 205069577 U CN205069577 U CN 205069577U CN 201520753105 U CN201520753105 U CN 201520753105U CN 205069577 U CN205069577 U CN 205069577U
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- linear motion
- novel
- axle
- pedestal
- platform
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Abstract
The utility model relates to a novel little operation platform, be applied to scanning electron microscope equipment, this novel little operation platform includes the base, setting a plurality of triaxial linear motion platforms and five grand platforms that move on the base, the setting five grand sample operation panels on moving the platform with correspond the carbon nanometer operation hand that every triaxial linear motion platform set up, the setting of carbon nanometer operation hand is on triaxial linear motion platform, the circumference setting that the sample operation panel is followed to a plurality of triaxial linear motion platforms is around the sample operation panel, triaxial linear motion platform and five grand platforms that move are all through piezoelectricity motor drive, link up on the base and be provided with the cavity that is used for holding the sample operation panel, five grand moves the below that the platform is located the base.
Description
Technical field
The utility model relates to a kind of novel microoperation platform, is applied to scanning electron microscopy equipment.
Background technology
Along with the progress of science and technology, people constantly need to observe from higher microcosmic level, be familiar with the material world around.The object of the micro-meter scale such as cell, microbe directly detect by an unaided eye less than, microscopical utility model solves this problem.At present, nanosecond science and technology become study hotspot, and the characteristic dimension of integrated circuit technology processing enters deep-submicron, and all these more small object optical microscopes do not observe yet, and must use scanning electron microscopy.
Scanning electron microscopy (SEM) is a kind of microcosmic looks Observations Means between transmission electron microscope and light microscope, can directly utilize the material performance of sample surfaces material to carry out microcosmic imaging.The advantage of ESEM: 1, have higher multiplication factor, continuously adjustabe between 20-20 ten thousand times; 2, have the very large depth of field, the visual field is large, and imaging is rich in third dimension, directly can observe the fine structure on the uneven surface of various sample; 3, sample preparation is simple.
Scanning electron microscopy (SEM) is used to observation and amplifies the image device of sample.SEM comprises electron optical unit to amplify the image of sample, and control unit is to control this electron optical unit, and vacuum pump to produce vacuum in this electron optical unit.Electron optical unit comprises electron gun to produce electronics, and lens unit is with the direct electron beams of will be launched by electron gun to the sample in specimen holder, and scanning coil is to make electron beam scanning on sample.The image obtained by electron optical unit can show or be stored in the storage device and be printed on display unit (such as computer).
But existing scanning electron microscopy (SEM) is due to the restriction of its operating platform, and can only be single observe exemplar, cannot carry out micro-nano adjustment to the observation attitude of exemplar and carry out multi-shaft interlocked micro-nano operation to exemplar.
Utility model content
The purpose of this utility model is to provide one can realize micro-nano operation, and the novel microoperation platform that volume is little.
To achieve these goals, the technical scheme that the utility model adopts is as follows: a kind of novel microoperation platform, comprise pedestal, be arranged on the some three axle linear motion platforms on described pedestal and five axle macro-moving stages, be arranged on the carbon nano-manipulation hand that sample operation platform on five axle macro-moving stages and each described three axle linear motion platforms of correspondence are arranged, described carbon nano-manipulation hand is arranged on described three axle linear motion platforms, some described three axle linear motion platforms are arranged on the surrounding of described sample operation platform along the circumference of described sample operation platform, described three axle linear motion platforms and described five axle macro-moving stages are all driven by piezo-electric motor, throughly on described pedestal be provided with the cavity holding described sample operation platform, described five axle macro-moving stages are positioned at the below of described pedestal.
Further, guide assembly is provided with between described pedestal and three axle linear motion platforms.
Further, described novel microoperation platform also comprises the drive unit driving described three axle linear motion platforms along the movement of guide assembly opposite base.
Further, described drive unit comprises some piezoelectric ultrasonic motors being fixed on ceramic bar on described pedestal and the described ceramic bar of some correspondences and arranging, and each described piezoelectric ultrasonic motor one_to_one corresponding is arranged on described three axle linear motion platforms.
Further, described guide assembly comprises and is fixed on track on described pedestal and some settings on the track and can the Mobile base of relative described rail moving, and some described three axle linear motion platform one_to_one corresponding are fixed on described Mobile base.
Further, track set on described pedestal is some sections, and some described tracks and some described ceramic bars are arranged one to one, and described in every section of described track and every bar, ceramic bar is all in camber.
Further, on described pedestal, indent is formed with annular groove, and described annular groove is around in the periphery of described cavity, and the ceramic bar of described drive unit is arranged in shown annular groove.
Further, described pedestal is provided with the positioning strip coordinated with described track.
Further, described three axle linear motion platforms comprise the base be arranged on described pedestal, the first sliding seat be arranged on described base, the elevating bracket that is arranged on the second sliding seat on described first sliding seat and is arranged on described second sliding seat, described first sliding seat drives it to move along in X-direction on base by piezo-electric motor, described second sliding seat drives it to move along in Z-direction on the first sliding seat by piezo-electric motor, and described elevating bracket drives it to move along in Y direction on the second sliding seat by piezo-electric motor.
Further, described five axle macro-moving stages comprise the holder be arranged on described pedestal and the kinematic nest be arranged on described holder, described sample operation platform is fixed in described kinematic nest, and described kinematic nest drives it axially move along X, Y, Z tri-on described holder and drive it to reverse on described holder by piezo-electric motor by piezo-electric motor.
By such scheme, the utility model at least has the following advantages: novel microoperation platform of the present utility model by arranging some three axle linear motion platforms and five axle macro-moving stages on pedestal, and some three axle linear motion platforms are arranged on the surrounding of sample operation platform along the circumference of sample operation platform, thus realize carry out multi-shaft interlocked to exemplar, solve can only be single in prior art the problem that exemplar is observed; Dynamic triaxial linear motion platform and five axle macro-moving stages are driven, to realize carrying out micro-nano adjustment to the attitude that runs through of exemplar by adopting piezo-electric motor; And make the observation attitude of realization to exemplar carry out micro-nano adjustment by piezo-electric motor, three axle linear motion platforms and the grand dynamic combination of five axles and multi-shaft interlocked micro-nano operation is carried out to exemplar; And the through cavity holding described sample operation platform that is provided with on pedestal, to reduce the overall volume of novel microoperation platform.
Above-mentioned explanation is only the general introduction of technical solutions of the utility model, in order to better understand technological means of the present utility model, and can be implemented according to the content of specification, coordinates accompanying drawing to be described in detail as follows below with preferred embodiment of the present utility model.
Accompanying drawing explanation
Fig. 1 is the structural representation of the novel microoperation platform in the utility model one embodiment;
Fig. 2 is the structural representation of novel microoperation platform on another visual angle shown in Fig. 1;
Fig. 3 is the part-structure schematic diagram in Fig. 1;
Fig. 4 is the part-structure schematic diagram in Fig. 3;
Fig. 5 is the assembly drawing of five axle piezotables and operating desk in Fig. 3;
Fig. 6 is the structural representation of three axle manual type linear motion platforms in Fig. 1;
Fig. 7 is the structural representation of the novel microoperation platform in another embodiment of the utility model.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples for illustration of the utility model, but are not used for limiting scope of the present utility model.
See Fig. 1 to Fig. 6, a kind of novel microoperation platform 100 described in the utility model one preferred embodiment comprises pedestal 10, be arranged on some three axle linear motion platforms 20 on pedestal 10 and five axle macro-moving stages 30, be arranged on five axle macro-moving stages 30 and the carbon nano-manipulation hand 50 that arranges of each described three axle linear motion platforms 20 of sample operation platform 40 and correspondence in order to place exemplar.Described carbon nano-manipulation hand 50 is arranged on described three axle linear motion platforms 20, and some described three axle linear motion platforms 20 are arranged on the surrounding of described sample operation platform 40 along the circumference of described sample operation platform 40.In the present embodiment, the quantity of the three axle linear motion platforms 20 adopted is four, and four three axle linear motion platforms 20 are symmetricly set on the both sides of carbon nano-manipulation hand 50 between two.
Throughly on described pedestal 10 be provided with the cavity 11 holding described sample operation platform 40, in the present embodiment, described pedestal 10 is in slim cuboid, described pedestal 10 comprises the upper surface 12 and lower surface 13 that are oppositely arranged, described cavity 11 runs through formation from the upper surface 12 of pedestal 10 to lower surface 13, the cross sectional shape of this cavity 11 is round, described pedestal 10 is provided with the support column 14 in order to supporting base 10.The operating portion 42 that described sample operation platform 40 comprises mounting blocks 41 and is fixed on described mounting blocks 41, the body of rod 421 that described operating portion 42 comprises vertical described mounting blocks 41 and the platform portion 422 be arranged on the described body of rod 421.When practical operation, sample operation platform 40 can be made according to the actual requirements to move in cavity 11, as moved up and down, move axially or rotating.
Described three axle linear motion platforms 20 and described five axle macro-moving stages 30 are all driven by piezo-electric motor 60.Described three axle linear motion platforms 20 comprise the base 21 be arranged on described pedestal 10, the first sliding seat 22 be arranged on described base 21, the elevating bracket 24 that is arranged on the second sliding seat 23 on described first sliding seat 22 and is arranged on described second sliding seat 23.Described first sliding seat 22 drives it to move along in X-direction on base 21 by piezo-electric motor 60, described second sliding seat 23 drives it to move along in Z-direction on the first sliding seat 22 by piezo-electric motor 60, and described elevating bracket 24 drives it to move along in Y direction on the second sliding seat 23 by piezo-electric motor 60.Described carbon nano-manipulation hand 50 is fixed on this elevating bracket 24, and this carbon nano-manipulation hand 50 controls three axle linear motion platforms 20 by piezo-electric motor 60 and moves on three axial directions, namely axially moves X, Y, Z tri-.Really, this three axles linear motion platform 20 also can be other structures, is realized in X, Y, Z tri-movements axially by this three axles linear motion platform 20 to make this carbon nano-manipulation hand 50.
Described five axle macro-moving stages 30 comprise the holder 31 be arranged on described pedestal 10 and the kinematic nest 32 be arranged on described holder 31, the mounting blocks 41 of described sample operation platform 40 is fixed in described kinematic nest 32, and described kinematic nest 32 drives it axially to move along X, Y, Z tri-on described holder 31 by piezo-electric motor 60 and driven by piezo-electric motor 60 it to reverse on described holder 31.Described five axle macro-moving stages 30 are positioned at the below of described pedestal 10, this five axles macro-moving stage 30 also comprises the fixed block 33 being arranged on holder 31 both sides, this fixed block 33 is fixed on the lower surface 13 of pedestal 10, thus is fixed on pedestal 10 by five axle macro-moving stages 30.Really, this five axles macro-moving stage 30 also can be other structures, realizes the torsion (motions namely on five directions) in X, Y, Z tri-movement axially and both direction to make this sample operation platform 40 by this five axles macro-moving stage 30.
Guide assembly 70 is provided with, to make three axle linear motion platforms 20 can move on pedestal 10 along guide assembly 70 by this guide assembly 70, to adjust the position of three axle linear motion platforms 20 between described pedestal 10 and three axle linear motion platforms 20.Described guide assembly 70 comprises and is fixed on track 71 on described pedestal 10 and is arranged on described track 71 with some and can relative to the Mobile base 72 of described track 71 movement, and some described three axle linear motion platform 20 one_to_one corresponding are fixed on described Mobile base 72.Track 71 set on described pedestal 10 is in some sections, in the present embodiment, this track 71 in four-part form structure, four sections of tracks 71 respectively with four three axle linear motion platforms 20 in arranging one to one, wherein every section of track 71 is in camber, is fixed on the upper surface 12 of described pedestal 10.Described novel microoperation platform 100 also comprises the drive unit 80 driving described three axle linear motion platforms 20 along the movement of guide assembly 70 opposite base 10.Described drive unit 80 comprises some piezoelectric ultrasonic motors 82 being fixed on ceramic bar 81 on described pedestal 10 and the described ceramic bar 81 of some correspondences and arranging, each described piezoelectric ultrasonic motor 82 is arranged with Mobile base 72 one_to_one corresponding, described Mobile base 72 is provided with inverted L shape mount pad 90, described mount pad 90 comprises the horizontal part 91 be fixed on Mobile base 72 and the vertical component effect 92 extended to form from horizontal part 91 downwards, described piezoelectric ultrasonic motor 82 is fixed on vertical component effect 92, and this piezoelectric ultrasonic motor 82 is positioned at the top of ceramic bar 81.In the present embodiment, quantity set by three axle linear motion platforms 20 is four, so ceramic bar 81 and piezoelectric ultrasonic motor 82 also arrange four respectively, four ceramic bars 81 and four tracks 71 installing three axle linear motion platforms 20 are arranged respectively one to one.Described in every bar, ceramic bar 81 is curved, and every bar pottery bar 81 is concentric with corresponding track 71, and both radians are identical.For the ease of installing described drive unit 80 and reducing the overall volume of this novel microoperation platform 100, in the present embodiment, described pedestal 10 is formed with annular groove 15 from the downward indent of its upper surface 12, this annular groove 15 is around in the periphery of described cavity 11, and the ceramic bar 81 of described drive unit 80 is arranged in annular groove 15.This annular groove 15 comprises diapire 151 and sidewall 152, and this sidewall 152 is positioned at the outside of diapire 151, and described ceramic bar 81 is fixed on described diapire 151.Four displacement detectors 93 and four balance plates 94 are also provided with in described annular groove 15, four displacement detectors 93 are arranged in man-to-man mode with four three axle linear motion platforms 20 respectively, each described displacement detector 93 is in order to detect the position of the three axle linear motion platforms 20 corresponding with it, and each described displacement detector 93 is between the ceramic bar 81 and sidewall 152 of correspondence.Described balance plate 94 is fixed on the vertical component effect 92 of mount pad 90, this balance plate 94 is positioned at described annular groove 15, described balance plate 94 has the arcwall 941 of the sidewall 152 towards annular groove 15, and described curved portions 941 supports on the sidewall 152 of described annular groove 15.In other embodiments, described track 71 can be a circular orbit 71.In addition, in other embodiments, this drive unit 80 also can be other power set, moves to drive dynamic triaxial linear motion platform 20 opposite base 10.In the present embodiment, for the ease of attachment rail 71, the upper surface 12 of described pedestal 10 is also provided with four positioning strips coordinated with track 94, article four, positioning strip 94 is arranged one to one with four tracks 71 respectively, each described positioning strip 94 in the arc identical with track 71 radian, four positioning strips 94 respectively with four tracks 71 in arranging one to one.
Refer to Fig. 7, and composition graphs 1 to Fig. 6, novel microoperation platform 100 ' described in another preferred embodiment of the utility model is substantially identical with the structure of the novel microoperation platform 100 in embodiment one, distinctive points is only: between the three axle linear motion platforms and pedestal 10 of the novel microoperation platform 100 of the present embodiment, do not arrange guide assembly 70, and also not corresponding drive unit 80, in the present embodiment, three axle linear motion platforms 20 of this novel microoperation platform 100 are directly fixed on pedestal 10, and three axle linear motion platform 20 opposite base 10 cannot move.
In sum, above-mentioned novel microoperation platform 100,100 ' by arranging some three axle linear motion platform 20 and five axle macro-moving stages 30 on pedestal 10, and some three axle linear motion platforms 20 are arranged on the surrounding of sample operation platform 40 along the circumference of sample operation platform 40, thus realize carry out multi-shaft interlocked to exemplar, solve can only be single in prior art the problem that exemplar is observed; In addition, by adopting piezo-electric motor 60 to drive dynamic triaxial linear motion platform 20 and five axle macro-moving stages 30, to realize carrying out micro-nano adjustment to the attitude that runs through of exemplar; And make the observation attitude of realization to exemplar carry out micro-nano adjustment by piezo-electric motor 60, three axle linear motion platform 20 and the grand dynamic combination of five axles and multi-shaft interlocked micro-nano operation is carried out to exemplar.
The above is only preferred implementation of the present utility model; be not limited to the utility model; should be understood that; for those skilled in the art; under the prerequisite not departing from the utility model know-why; can also make some improvement and modification, these improve and modification also should be considered as protection range of the present utility model.
Claims (10)
1. a novel microoperation platform, it is characterized in that: comprise pedestal, be arranged on the some three axle linear motion platforms on described pedestal and five axle macro-moving stages, be arranged on the carbon nano-manipulation hand that sample operation platform on five axle macro-moving stages and each described three axle linear motion platforms of correspondence are arranged, described carbon nano-manipulation hand is arranged on described three axle linear motion platforms, some described three axle linear motion platforms are arranged on the surrounding of described sample operation platform along the circumference of described sample operation platform, described three axle linear motion platforms and described five axle macro-moving stages are all driven by piezo-electric motor, throughly on described pedestal be provided with the cavity holding described sample operation platform, described five axle macro-moving stages are positioned at the below of described pedestal.
2. novel microoperation platform according to claim 1, is characterized in that: be provided with guide assembly between described pedestal and three axle linear motion platforms.
3. novel microoperation platform according to claim 2, is characterized in that: described novel microoperation platform also comprises the drive unit driving described three axle linear motion platforms along the movement of guide assembly opposite base.
4. novel microoperation platform according to claim 3, it is characterized in that: described drive unit comprises some piezoelectric ultrasonic motors being fixed on ceramic bar on described pedestal and the described ceramic bar of some correspondences and arranging, and each described piezoelectric ultrasonic motor one_to_one corresponding is arranged on described three axle linear motion platforms.
5. novel microoperation platform according to claim 4, it is characterized in that: described guide assembly comprises and is fixed on track on described pedestal and some settings on the track and can the Mobile base of relative described rail moving, and some described three axle linear motion platform one_to_one corresponding are fixed on described Mobile base.
6. novel microoperation platform according to claim 5, is characterized in that: track set on described pedestal is some sections, and some described tracks and some described ceramic bars are arranged one to one, and described in every section of described track and every bar, ceramic bar is all in camber.
7. novel microoperation platform according to claim 5, it is characterized in that: on described pedestal, indent is formed with annular groove, described annular groove is around in the periphery of described cavity, and the ceramic bar of described drive unit is arranged in shown annular groove.
8. novel microoperation platform according to claim 7, is characterized in that: described pedestal is provided with the positioning strip coordinated with described track.
9. the novel microoperation platform according to any one in claim 1 to 8, it is characterized in that: described three axle linear motion platforms comprise the base be arranged on described pedestal, be arranged on the first sliding seat on described base, the elevating bracket being arranged on the second sliding seat on described first sliding seat and being arranged on described second sliding seat, described first sliding seat drives it to move along in X-direction on base by piezo-electric motor, described second sliding seat drives it to move along in Z-direction on the first sliding seat by piezo-electric motor, described elevating bracket drives it to move along in Y direction on the second sliding seat by piezo-electric motor.
10. novel microoperation platform according to claim 9, it is characterized in that: described five axle macro-moving stages comprise the holder be arranged on described pedestal and the kinematic nest be arranged on described holder, described sample operation platform is fixed in described kinematic nest, and described kinematic nest drives it axially move along X, Y, Z tri-on described holder and drive it to reverse on described holder by piezo-electric motor by piezo-electric motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520753105.4U CN205069577U (en) | 2015-09-25 | 2015-09-25 | Novel little operation platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520753105.4U CN205069577U (en) | 2015-09-25 | 2015-09-25 | Novel little operation platform |
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| Publication Number | Publication Date |
|---|---|
| CN205069577U true CN205069577U (en) | 2016-03-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520753105.4U Expired - Fee Related CN205069577U (en) | 2015-09-25 | 2015-09-25 | Novel little operation platform |
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| CN (1) | CN205069577U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017049671A1 (en) * | 2015-09-25 | 2017-03-30 | 苏州大学张家港工业技术研究院 | Micro operating system based on scanning electron microscope |
-
2015
- 2015-09-25 CN CN201520753105.4U patent/CN205069577U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017049671A1 (en) * | 2015-09-25 | 2017-03-30 | 苏州大学张家港工业技术研究院 | Micro operating system based on scanning electron microscope |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160302 Termination date: 20180925 |