CN1288434C - Parallel machanism and test apparatus - Google Patents

Parallel machanism and test apparatus Download PDF

Info

Publication number
CN1288434C
CN1288434C CNB008132992A CN00813299A CN1288434C CN 1288434 C CN1288434 C CN 1288434C CN B008132992 A CNB008132992 A CN B008132992A CN 00813299 A CN00813299 A CN 00813299A CN 1288434 C CN1288434 C CN 1288434C
Authority
CN
China
Prior art keywords
direct
actuator
acting
mentioned
acting actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB008132992A
Other languages
Chinese (zh)
Other versions
CN1376265A (en
Inventor
冈田尚史
中原尚寿
高桥一
木场博之
广濑和也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Publication of CN1376265A publication Critical patent/CN1376265A/en
Application granted granted Critical
Publication of CN1288434C publication Critical patent/CN1288434C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H21/00—Gearings comprising primarily only links or levers, with or without slides
    • F16H21/46—Gearings comprising primarily only links or levers, with or without slides with movements in three dimensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B25J17/0258—Two-dimensional joints
    • B25J17/0266—Two-dimensional joints comprising more than two actuating or connecting rods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Robotics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Transmission Devices (AREA)

Abstract

A test appatratus is provided in present invention which includes at least three expandable linear actuators (5,12,13); a drive means, an object stage support (23), and a wafer holder (24). The drive means supports the proximity ends of the linear actuators (5,12,13) so that they can move along guide rails (2,6,7), at least one of the guide rails (2,6,7) includes slopes (102, 103) on which the actuators (12, 13) run with their levels varying; the stage support (23) is held by the distal ends of the linear actuators (5, 12, 13); and the wafer holder (24) is attached to a moving member for holding a workpiece.

Description

Parallel machanism and testing fixture
Technical field
The present invention relates to have some connecting rods, the parallel machanism and the testing fixture of control movable platen posture.
Background technology
In the prior art, the special platform-type parallel machanism in phase Tours is known, in this parallel machanism, connecting with several connecting rods can be by actuators such as hydraulic cylinder flexible upper movable plate and lower tie plate, by making each actuator flexible, change length of connecting rod, the posture of control movable platen remains on various angles (level or inclination).
In this parallel machanism, the stationkeeping of each hydraulic cylinder, by stretching of these hydraulic cylinders, the length of regulating each connecting rod, the posture of decision movable platen.
Parallel machanism for example is used for macro inspection apparatus etc., inspection substrate is positioned on the movable platen, the membrane thickness unevenness or the damage on available visualization inspection substrate surface.
But, adopt in macroscopical base board checking device of parallel machanism before, there is following problem.That is, only depend on the telescopic adjustment scope of the length of connecting rod of each actuator, the posture of decision movable platen is so with respect to the device volume, the actuating range of movable platen is little.Therefore, can not carry out inspecting substrate with the state of spying on inspection substrate inspection substrate fully near the examiner, the examiner carries out operation with the posture of discomfort.
On the other hand, by regulating the posture of the movable platen that each length of connecting rod can set, be only limited to horizontal direction and vergence direction, so the damage of inspection substrate face is not easy when being formed on some direction to be seen, can not carries out the high inspection of precision.
The purpose of this invention is to provide a kind of degree of freedom high and realize the parallel machanism of wide scope action and adopt this parallel machanism, the efficient height, can carry out the testing fixture of high precision inspecting substrate.
Disclosure of an invention
Parallel machanism of the present invention is characterized in that having: at least 3 telescopic direct-acting actuators;
The walking driving mechanism, its base end part with these direct-acting actuators can move the path straight line and support movably along each, and, move at least one of path at these, have moving and the rake of height change along with described direct-acting actuator;
Movable member, it is supported in the leading section of action shaft that is in the described direct-acting actuator of relative position relation with the base end part of above-mentioned direct-acting actuator by universal bindiny mechanism.Direct-acting actuator is moved along rake, carry out the extension and contraction control of each direct-acting actuator in phase, movable member is all around moved.
Testing fixture of the present invention is characterized in that having: at least 3 telescopic direct-acting actuators;
The walking driving mechanism, its base end part with this direct-acting actuator can move the path straight line and support movably along each, and, move at least one of path at these, have moving and the rake of height change along with direct-acting actuator;
Movable member, it is supported in the leading section of action shaft that is in the described direct-acting actuator of relative position relation with the base end part of above-mentioned direct-acting actuator by universal bindiny mechanism;
The subject maintaining body is located on this movable member, is used to keep subject.
As a result,, can make the maintaining body that is keeping subject, move near examiner's eyes, and the subject maintaining body is all around moved, can change the reflection angle of illumination, can find defective easily, carry out high-precision macro check according to the present invention.
The simple declaration of accompanying drawing
Figure 1A, 1B are the figure of the base board checking device of expression one embodiment of the invention, and Figure 1A is the whole stereographic map of expression, and Figure 1B is the planimetric map of expression substrate holder.
Fig. 2 is the front view (FV) that the actuator usefulness transfer table in this base board checking device is organized in expression.
Fig. 3 is the skiagraph that the direct-acting actuator in this base board checking device is organized in expression.
Fig. 4 is the key diagram of this base board checking device action of expression.
Fig. 5 is the key diagram of this base board checking device action of expression.
Fig. 6 is the key diagram of this base board checking device action of expression.
Below, with reference to the description of drawings embodiments of the invention.
(the 1st embodiment)
Figure 1A is the stereographic map of the base board checking device of the expression parallel machanism that adopts one embodiment of the invention, and Figure 1B is the planimetric map of expression substrate holder 24, and this substrate holder 24 is used to keep the inspection substrate W as subject.Among Fig. 1, the 1st, the base station that constitutes by rectangular-shaped framework, central portion the 1a of its limit portion (1a of this limit portion is corresponding with the device front that the examiner is positioned at), form the recess 101 of predetermined length, in addition, with the device corresponding 1b of limit portion in two sides, form the rake 102,103 that increases gradually towards the device front.
In addition,, disposing guide rail 2, be provided with the actuator that can move along this guide rail 2, with on transfer table 3, the base end part of direct-acting actuator 5 is being set by swing part 4 at this actuator with transfer table 3 as mobile path along the recess 101 of base station 1.
Similarly, on the rake 102,103 of base station 1, above it, disposing guide rail 6,7 as mobile path, be provided with the actuator that can move along these guide rails 6,7 with transfer table 8,9, with on the transfer table 8,9, the base end part of direct-acting actuator 12,13 is set by swing part 10,11 respectively at these actuators.
Swing part 4,10,11 is respectively the joint that rotates with one degree of freedom around turning axle 4a, 10a, 11a.The turning axle 4a of swing part 4 is parallel to the direction of principal axis of guide rail 2.Turning axle 10a, the 11a of swing part 10,11 are parallel to surface level, and with respect to the surface level projection line of guide rail 6,7 with angle θ inclination inwardly.θ is about 15 degree in the present embodiment, and this value can be done design alteration according to required actuating range etc.
As shown in Figure 2, actuator is supporting along guide rail 2 movably with transfer table 3, by fixed screw portion 15, is connected with the screw shaft 14 that disposes along this guide rail 2, when motor 16 makes screw shaft 14 rotations, moves back and forth along guide rail 2 by fixed screw portion 15.
This structure also is same for actuator with transfer table 8,9, quotes above-mentioned Fig. 2, and its explanation is omitted.
As shown in Figure 3, direct-acting actuator 5, hollow bulb along fixed cylinder 17, be provided with guide member 18 and screw shaft 19 side by side, on screw shaft 19, be provided with action shaft 21, when motor 22 makes screw shaft 19 rotations by gear 231, fixed screw portion 20 moved back and forth along guide member 18 by fixed screw portion 20, like this, make action shaft 21 straight actions.
This structure also is same for direct-acting actuator 12,13, quotes above-mentioned Fig. 3, and its explanation is omitted.
At the leading section of the action shaft 21 of direct-acting actuator 5,12,13,, connecting as objective table support 23 movable member, that constitute by rectangular-shaped framework by the universal 21a of bindiny mechanism of spherojoint etc.
Objective table support 23 in the central authorities of the limit portion 23a corresponding with the device front, is connecting the action shaft 21 of direct-acting actuator 5; On the limit portion 23b corresponding, form extension 23a1,23b1 toward each other, that stretch out towards vertical direction with the device side face.The action shaft 21 of direct-acting actuator 12,13 is connected on these extensions 23a1, the 23b1.Between these extensions 23a1,23b1, supporting rotating substrate holder 24.On extension 23a1,23b1, be provided with rotary driving part 25.Rotary driving part 25 substrate holder 24 rotatably supports.
Substrate holder 24 is used for mounting inspection substrate W, have with the periphery of inspection substrate W in opposite directions framework 24a and be provided with some adsorption orifice 24b on this framework 24a.At each adsorption orifice 24b, acting on by figure and do not showing the pull of vacuum that vacuum pump produces, inspection substrate W absorption is being kept.24c among the figure represents peristome.
The following describes the action of the embodiment of this structure.When accepting inspection substrate W, as shown in Figure 4, make each actuator transfer table 8,9 of direct-acting actuator 12,13, be positioned at the lowest part of rake 102,103, and driven in rotation drive division 25, substrate holder 24 is remained horizontality.
Then, coordinate the flexible of control direct-acting actuator 5,12,13, make objective table support 23 move to the position of readiness that is transported into of inspection substrate W, inspection substrate W mounting on the substrate holder of with the horizontality standby 24.
Substrate holder 24 is arranged in the normal position to the inspection substrate W that accepts, and, with the vacuum attraction of adsorption orifice 24b, inspection substrate W absorption is maintained.
Then, as shown in Figure 5, each actuator of direct-acting actuator 12,13 is moved along rake 102,103 with transfer table 8,9.At this moment, actuator moves towards the device front direction along guide rail 6,7 with transfer table 8,9.
As shown in Figure 6, when making actuator move to the desired height position of rake 102,103, coordinate the flexible of control direct-acting actuator 5,12,13 once more, substrate holder 24 is set in the height that is suitable for visualization inspection substrate W most with transfer table 8,9.
At this state, illumination light is shone the surface of the inspection substrate W on the substrate holder 24.Then, driven in rotation drive division 25 makes substrate holder 24 tilt to the predetermined angular that is suitable for visualization most from horizontality, utilizes the reflected light on inspection substrate W surface, with visual membrane thickness unevenness of observing inspection substrate W surface on a macro scale and damage etc., carry out visual examination.
In addition, on one side direct-acting actuator 12,13 is moved along rake 102,103, Yi Bian coordinate the flexible of each direct-acting actuator 5,12,13 of control, substrate holder 24 is swung forwards, backwards, like this, can be from many aspects visual substrate holder 24 on one side, Yi Bian carry out macro check.
In addition, also require recently the inspection substrate W back side is checked.This is because if dirt or attachment of moisture at the back side of inspection substrate W, then are easy to generate the crack on the section when scribing, perhaps can produce die bonding to substrate the time bonding badly after the scribing, and the finished product disqualification rate is increased.In order to satisfy above-mentioned requirements, at the state that inspection substrate W absorption is remained on the substrate holder 24, make substrate holder 24 Rotate 180s ° with rotary driving part 25, the back side that makes inspection substrate W is towards the device front, like this, with similarly above-mentioned, macro check is carried out at the available visual back side to inspection substrate W.
Therefore, like this, direct-acting actuator 12,13 is moved along the rake 102,103 on the 1b of limit portion that is formed on base station 1, can make the substrate holder 24 that is keeping inspection substrate W, move near examiner's the eyes, and, carry out the flexible of each direct-acting actuator 5,12,13 in phase, can make substrate holder 24 and objective table support 2
3 move together all around, therefore, can aim at the illumination of carrying out macroscopic observation, carry out visual examination then accurately.
In addition, easily carry out the inspection of inspection substrate W, preferably try one's best substrate holder 24 forward and raising in order to make the examiner.For this reason, once adopted the method for the flexible stroke of lengthening direct-acting actuator 12,13, but this method reduces the rigidity of device, Zhuan Zhi center of gravity increases simultaneously, and stability reduces.
And in the base board checking device of the present invention, owing to rake 102,103 tilts towards the front side with increasing, so, make the base end part of direct-acting actuator 12,3 move in front of during side, the flexible stroke that needn't extend can be positioned at high position with substrate holder 24, can guarantee stability.
On the other hand, the examiner is when side is observed inspection substrate W in front of device, hinders the parts observed, when for example direct-acting actuator being arranged, then can influence observation if having in the front side.And in this board device, the fulcrum of the direct-acting actuator 5 of front side is installed near the bottom of objective table support 23, so, do not hinder observation.In addition, the direct-acting actuator of both sides 12,13 is owing to be configured in the rear, so, do not hinder observation yet.
With rotary driving part 25, make substrate holder 24 rotations that keeping inspection substrate W, inspection substrate W can be tilted to the angle that the observer observes easily, carry out macro check.In addition, further make substrate holder 24 rotation, can be with the back side of inspection substrate W towards the device front, so, also can carry out high-precision macro check to the back side of inspection substrate W.
Promptly, by making rotary driving part 25 starts, substrate holder 24 is rotated on objective table support 23, compare when only inspection substrate W being overturn with parallel machanism, needn't the extend flexible stroke of direct-acting actuator 5,12,13 can make equipment miniaturization, simplification.
Workability on the industry
Parallel machanism of the present invention and testing fixture, can realize the free degree high, with height The action of speed in wide scope is applicable to the technical field of parallel machanism and is applicable to Adopt the high accuracy testing fixture of this parallel machanism.

Claims (4)

1. parallel machanism is characterized in that having: at least 3 telescopic direct-acting actuators;
The walking driving mechanism, its base end part with these direct-acting actuators can move the path straight line and support movably along each, and, move at least one of path at these, have moving and the rake of height change along with described direct-acting actuator;
Movable member, it is supported in the leading section of action shaft that is in the described direct-acting actuator of relative position relation with the base end part of above-mentioned direct-acting actuator by universal bindiny mechanism.
2. parallel machanism as claimed in claim 1 is characterized in that, above-mentioned walking driving mechanism has guide rail, actuator transfer table and screw shaft; Above-mentioned actuator transfer table is supporting direct-acting actuator by the universal shaft joint, and, can move along guide rail; Above-mentioned screw shaft disposes along described guide rail; By this screw shaft rotation is driven, above-mentioned actuator is walked along guide rail with transfer table.
3. testing fixture is characterized in that having: at least 3 telescopic direct-acting actuators;
The walking driving mechanism, its base end part with this direct-acting actuator can move the path straight line and support movably along each, and, move at least one of path at these, have moving and the rake of height change along with direct-acting actuator;
Movable member, it is supported in the leading section of action shaft that is in the described direct-acting actuator of relative position relation with the base end part of above-mentioned direct-acting actuator by universal bindiny mechanism;
The subject maintaining body is located on this movable member, is used to keep subject.
4. testing fixture as claimed in claim 3 is characterized in that, above-mentioned subject maintaining body rotatably is supported on the above-mentioned movable member.
CNB008132992A 1999-09-22 2000-09-21 Parallel machanism and test apparatus Expired - Fee Related CN1288434C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP26876399 1999-09-22
JP268763/99 1999-09-22

Publications (2)

Publication Number Publication Date
CN1376265A CN1376265A (en) 2002-10-23
CN1288434C true CN1288434C (en) 2006-12-06

Family

ID=17462984

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB008132992A Expired - Fee Related CN1288434C (en) 1999-09-22 2000-09-21 Parallel machanism and test apparatus

Country Status (5)

Country Link
JP (1) JP3635572B2 (en)
KR (1) KR100432359B1 (en)
CN (1) CN1288434C (en)
TW (1) TW455684B (en)
WO (1) WO2001022069A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI264532B (en) * 2001-11-05 2006-10-21 Olympus Corp Substrate inspection device
CN103954626B (en) * 2014-04-17 2016-07-13 来安县新元机电设备设计有限公司 Mobile phone screen crackle detecting instrument
CN104440875B (en) * 2014-11-06 2016-04-06 河南理工大学 The 3-freedom parallel mechanism that working space is adjustable and method of adjustment thereof
CN105150199B (en) * 2015-10-27 2017-02-01 河南理工大学 Structure-adjustable three-freedom-degree parallel mechanism
CN105252524B (en) * 2015-11-25 2017-01-25 河南理工大学 Three-freedom-degree parallel mechanism with reinforcing pillars
CN105606614A (en) * 2016-01-27 2016-05-25 太仓井林机械科技有限公司 Appearance detection equipment

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0559219U (en) * 1992-01-21 1993-08-06 テクノエイト株式会社 Board inspection equipment
US5752834A (en) * 1995-11-27 1998-05-19 Ling; Shou Hung Motion/force simulators with six or three degrees of freedom
EP0791438B1 (en) * 1996-02-07 2002-05-29 Verein Deutscher Werkzeugmaschinenfabriken e.V. (VDW) Device for moving a body in space
JPH10110799A (en) * 1996-10-02 1998-04-28 Hitachi Ltd Motion base
JP4166340B2 (en) * 1997-09-24 2008-10-15 オリンパス株式会社 Board inspection equipment

Also Published As

Publication number Publication date
WO2001022069A1 (en) 2001-03-29
KR100432359B1 (en) 2004-05-20
TW455684B (en) 2001-09-21
KR20020035875A (en) 2002-05-15
JP3635572B2 (en) 2005-04-06
CN1376265A (en) 2002-10-23

Similar Documents

Publication Publication Date Title
KR100743427B1 (en) Apparatus for macro inspection of flat display panel
CN100345273C (en) Collimator
CN1776350A (en) Detector supporting mechanism
CN113607755B (en) Automatic detection device for wafer
CN103252761A (en) Long-stroke two-dimensional nano worktable system with angle compensation function
CN1866494A (en) High precision silicon slice bench and uses thereof
CN1824458A (en) Objective table device and dragon gate style objective table device, controlling means of objective table device
CN1550434A (en) Integrated large glass handling system
CN1288434C (en) Parallel machanism and test apparatus
CN1324334C (en) Motion platform mechanism suitable for optical waveguide automatic-packaging robot system
CN107102432B (en) Adjustment mechanism for a sample holder, microscope having an adjustment mechanism and method
CN1786720A (en) Plate supply device for testing unit of plate display and sub-working table thereof
CN111633510B (en) Clamping equipment for lens polishing detection
CN106526785A (en) Low-height biaxial deflection device having deflection axes intersected on surface of reflector and method
CN101063824A (en) Exposure apparatus and exposure method
CN109239068B (en) Visual detection device and method for macro-micro motion platform
CN101038377A (en) Appearance checking device
US6161294A (en) Overhead scanning profiler
CN1288435C (en) Substrate checking apparatus
JPH029550A (en) Driving device for six-degree-freedom fine moving stage
CN111830069A (en) Motion platform and method for X-ray detection based on spherical domain motion detection
CN105225910A (en) Based on the micro OS of scanning electron microscopy
CN214174184U (en) Defect detection imaging device
CN1749901A (en) Movable operating device and method of controlling the movable operating device
CN108356432A (en) Optical scanner and laser drill equipment

Legal Events

Date Code Title Description
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20061206

Termination date: 20091021