CN108356432A - Optical scanner and laser drill equipment - Google Patents
Optical scanner and laser drill equipment Download PDFInfo
- Publication number
- CN108356432A CN108356432A CN201810000650.4A CN201810000650A CN108356432A CN 108356432 A CN108356432 A CN 108356432A CN 201810000650 A CN201810000650 A CN 201810000650A CN 108356432 A CN108356432 A CN 108356432A
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- China
- Prior art keywords
- fixed
- sheet material
- laser
- light path
- movable
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
A kind of optical scanner of present invention offer and laser drill equipment, use manipulator to carry out automatic loading/unloading work, using copper post coordinate position on Machine Vision Detection chip, and record, then wait for the chip mold（molding）It drills later, to ensure that bore position precision, entire Scanning Detction and boring procedure are to synchronously complete on a machine and are full automatic working, to achieve the effect that the while of improving the quality and precision of drilling is greatly saved manpower.
Description
Technical field
The invention belongs to semiconductor applications, and in particular to a kind of laser micro-processing equipment of semiconductor chip.
Background technology
During carrying out chip package using fan-out techniques, first pasting chip is needed, then mold again
（molding）Layer of material, in order to realize every layer of mold（molding）Conducting between material, and need on opposite chip
The position trepanning of copper post.Due to mold（molding）The position of copper post is not just observed later, so needing in mold
（molding）The scanning record for doing copper post position on chip before, waits for workpiece mold（molding）And then using laser according to
It drills according to scanning information before.Prior art can only realize " scanning " and " drilling " process at twice, it is inefficient and
It is error-prone.
Invention content
According to the above demand, a kind of optical scanner of present invention offer and laser drill equipment use manipulator to carry out certainly
Dynamic loading and unloading work, using copper post coordinate position on Machine Vision Detection chip, and records, then waits for the chip mold
（molding）It drills later, to ensure that bore position precision, entire Scanning Detction and boring procedure are in a machine
On synchronously complete and be full automatic working, to reach the effect for being greatly saved manpower while the quality and precision that improve drilling
Fruit.
Its specific technical solution is as follows：
A kind of optical scanner and laser drill equipment, including rack（1）, operation base station（2）, motion module（3）, light path system
（4）, it is characterised in that：The rack（1）For carrying and fixed operation base station（2）Steel frame construction；The operation base station（2）On
It is provided with absorption platform（22）, temporary platform（23）, dust-absorbing box（24）And manipulator（26）；The absorption platform（22）It is movable to set
It sets in operation base station（2）On for adsorbing and fixing sheet material to be processed；The temporary platform（23）It is fixed on the operation base station
（2）On, it is located at the absorption platform（22）One end of same linear position, for storing by the manipulator（26）It transmits
Sheet material is simultaneously transferred to the absorption platform by sheet material（22）On；The dust-absorbing box（24）Positioned at the absorption platform（22）Same
The other end of linear position, the dust generated in drilling for drawing sheet material.The motion module（3）Including crossbeam（31）、
Main shaft（34）, countershaft（35）；The main shaft（34）And countershaft（35）It is movable to be arranged in the crossbeam（31）On, and can be described
Crossbeam（31）The upper movement for carrying out X-axis and Z-direction；The main shaft（34）Drilling for sheet material；The countershaft（35）For
The Scanning Detction of sheet material；The motion module（3）Pass through crossbeam（31）It is fixed to be arranged in the operation base station（2）；The light
Road system（4）It is fixed to be arranged in the operation base station（2）, the laser needed when sheet material drilling is provided.
Further, the temporary platform（23）Including a rectangular frame（231）With four groups of cylinder assemblies, four groups of cylinder assemblies
Respectively cylinder assembly 1（235）, cylinder assembly 2（236）, cylinder assembly 3（237）, cylinder assembly 4（238）, wherein every group of gas
Cylinder component all includes movable end and fixing end；The cylinder assembly 1（235）Fixing end pass through fixed plate（232）Vertical consolidates
It is scheduled on the rectangular frame（231）Top, the cylinder assembly 2（236）Fixing end then pass through mounting plate（233）Horizontal
It is fixed on the cylinder assembly 1（235）Movable end, the cylinder assembly 2（236）Movable end on be then fixed with sheet material bracket
（239）；In addition the cylinder assembly 3（237）Fixing end it is vertical be fixed on the rectangular frame（231）Side, it is described
Cylinder assembly 4（238）Fixing end then horizontal be fixed on the cylinder assembly 3（237）Movable end, the cylinder assembly 4
（238）Movable end on be then fixed with sheet material bracket（239）；The sheet material bracket（239）For support sheet material.
Further, the dust-absorbing box（24）Including dust absorption window（241）And dust hood（242）, the dust absorption window（241）
For rectangle frame, centre has rectangular window；The dust hood（242）One end and the dust absorption window（241）One side unicom
It is fixed, the dust hood（242）The other end connection tracheae carry out air suction process；The dust-absorbing box（24）It is described by being connected to
Dust absorption window（241）The fixed seat of two sides（243）It is fixed on the operation base station（2）, and make the dust absorption window（241）Position
In the absorption platform（22）Top.
Further, the absorption platform（22）Pass through Y-axis guide rail（21）It is movable to be arranged in the operation base station（2）On,
And it can be in the rectangular frame（231）With the dust absorption window（241）The Y-axis guide rail of lower section（21）The upper fortune for carrying out Y direction
It is dynamic；The absorption platform（22）Including adsorption plate and bottom plate, wherein having several adsorption holes on the adsorption plate, and it is located at bottom plate
Top；It forms chamber among the adsorption plate and the bottom plate, the chamber and is fixed on the operation base station（2）On vacuum
Hose（223）It is connected, passes through the vacuum hose（223）Realize the absorption platform（22）The conveying of gas and pumping in inner cavity chamber
Go out, the absorption platform is adjusted with this（22）To the adsorption capacity intensity of sheet material.
Further, the absorption platform（22）On be additionally provided with locating piece（221）, cylinder（222）And speed governing valve（224）；
There are two the locating pieces for each fixation in the wherein adjacent both sides of the adsorption plate（221）, the locating piece（221）For determining
Sheet material placement location；The cylinder（222）The adsorption plate is fixed in addition on adjacent both sides, for holding out against sheet material described
Locating piece（221）On position, to which fixed sheet material is in the absorption platform（22）On position；The speed governing valve（224）It is fixed
On the absorption platform, for adjusting the vacuum hose（223）To the absorption platform（22）Interior gas conveying and extraction
Speed.
Further, the crossbeam（31）Pass through cushion block（25）It is fixed to be arranged in the operation base station（2）；The crossbeam
（X-axis guide rail is provided on 31（32）, X-axis motor（33）, the main shaft（34）With the countershaft（35）Pass through X-axis movable plate（37）
It is movable to be arranged in the X-axis guide rail（32）On, and can be with the X-axis movable plate（37）In the X-axis guide rail（32）Upper carry out X-axis
The movement in direction, the X-axis motor（33）For the X-axis movable plate（37）Movement provide power；The crossbeam（31）On also set
It is equipped with X-axis drag chain（36）, it is used for cabling.
Further, the main shaft（34）Pass through Z main shaft substrates（341）It is fixed on the X-axis movable plate（37）On, the main shaft
（34）Including motor 1（342）, Z main shaft movable plates（348）, speculum 1（345）, speculum 2（346）, galvanometer（343）, field lens
（344）, laser displacement sensor 1（349）With camera 1（347）, the Z main shafts movable plate（348）Pass through Z main shaft guide rails（3411）
It is movable to be arranged in the Z main shafts substrate（341）On, and in the Z main shafts guide rail（3411）The upper movement for carrying out Z-direction,
The motor 1（342）For the Z main shafts movable plate（348）Movement provide power；The speculum 1（345）It is solid by speculum
Fixed board（3451）It is fixed to be arranged in the Z main shafts substrate（341）On, for receiving the light path system（4）The laser of offer
And reflect the laser light to the speculum 2（346）On；The galvanometer（343）, laser displacement sensor 1（349）With the camera
1（347）Parallel is fixed on the Z main shafts movable plate（348）On；The galvanometer（343）Lower end connects the field lens（344）, with
This realizes the drilling operation of sheet material；The speculum 2（346）Pass through speculum fixed module（3461）It is fixed to be arranged described
Galvanometer（343）, and will be from the speculum 1（345）The laser reflection that receives is transported to the galvanometer（343）In；It is described to swash
Optical displacement sensor 1（349）For measuring and controlling main shaft（34）Height apart from sheet material；The camera 1（347）Lower section links
Camera lens 1（3471）, for detecting sheet surface and drilling quality.
Further, the countershaft（35）Pass through Z countershaft substrates（352）It is fixed on the X-axis movable plate（37）On, the countershaft
（35）Including motor 2（351）, Z countershaft movable plates（353）, laser displacement sensor 2（355）With camera 2（356）, the Z countershafts
Movable plate（353）Pass through Z countershaft guide rails（3522）It is movable to be arranged in the Z countershafts substrate（352）On, and led in the Z countershafts
Rail（3522）The upper movement for carrying out Z-direction, the motor 2（351）For the Z countershafts movable plate（353）Movement provide power；
Laser displacement sensor 2（355）With the camera 2（356）Parallel is fixed on the Z countershafts movable plate（353）On；The laser
Displacement sensor 2（349）For measuring and controlling countershaft（35）Height apart from sheet material；The camera 2（356）Lower section links mirror
First 2（357）, for scanning, detecting sheet surface quality.
Further, the light path system（4）Including laser（41）, light path 1（42）With light path 2（43）；The laser
（41）With the light path 1（42）Pass through laser placement rack（44）It is fixed on the operation base station（2）On, the light path 2（43）
Pass through optical element placement rack（45）It is fixed on the operation base station（2）On；The laser（41）The laser sent out passes through institute
State light path 1（42）Into the light path 2（43）, through the light path 2（44）By the light path 2 behind right angle reflection change direction（44）
Inject to the speculum 1（345）On.
Further, the light path 1（42）Include optical gate, beam expanding lens, spectroscope and speculum；The light path 2（43）In
Including speculum, shaping mirror and diaphragm.
The optical scanner of the present invention and laser drill equipment, by single fortune driven mobile Y-axis and absorption platform is driven to do Y-direction
It is dynamic, drive laser drill component and photomoduel to do X-direction movement respectively by two single movement X-axis of driving, by two sets of ball-screws
Structure drives laser drill component and photomoduel to do the movement of Z-direction, the conjunction of two three axis of X1/Y/Z2 and X2/Y/Z2 respectively
Spatial three-dimensional movement is completed at movement.Absorption platform is made of the aluminium sheet with adsorption hole, can be used for adsorbing workpiece, be ensured sweeping
Workpiece can remain stationary as and can ensure that the flatness of workpiece when retouching and drilling.
The additional aspect of the present invention and advantage will be set forth in part in the description, and will partly become from the following description
Obviously, or practice through the invention is recognized.
Description of the drawings
The above-mentioned and/or additional aspect and advantage of the present invention will become from the following description of the accompanying drawings of embodiments
Obviously and it is readily appreciated that, wherein：
Fig. 1 show optical scanner and laser drill equipment overall schematic；
Fig. 2 show temporary platform overall schematic；
Fig. 3 show temporary platform left view；
Fig. 4 show absorption platform and dust-absorbing box position relationship schematic diagram；
Fig. 5 show the position relationship schematic diagram that absorption platform is arranged on operation base station；
Fig. 6 show motion module overall schematic；
Fig. 7 show main shaft front view；
Fig. 8 show countershaft front view；
Fig. 9 show light path system overall schematic；
Wherein, 1 is rack, and 2 be operation base station, and 3 be motion module, and 4 be light path system；
21 be Y-axis guide rail, and 22 be absorption platform, and 23 be temporary platform, and 24 be dust-absorbing box, and 25 be cushion block, and 26 be manipulator, and 27 be base
Seat；
221 be locating piece, and 222 be cylinder, and 223 be vacuum hose, and 224 be speed governing valve；231 be frame assembly, and 232 be fixation
Plate, 233 be mounting plate, and 234 be connector, and 235 be cylinder assembly 1,236 be cylinder assembly 2,237 be cylinder assembly 3,238 be gas
Cylinder component 4,239 is sheet material bracket；
241 be dust absorption window, and 242 be dust hood, and 243 be fixed seat；
31 be crossbeam, and 32 be X-axis guide rail, and 33 be X-axis motor, and 34 be main shaft, and 35 be countershaft, and 36 be X-axis drag chain, and 37 is dynamic for X-axis
Plate；
341 be Z main shaft substrates, and 342 for motor 1,343 be galvanometer, and 344 be field lens, and 345 be speculum 1,346 be speculum 2,
347 be camera 1,348 be Z main shaft movable plates, and 349 be laser displacement sensor 1；3411 be Z main shaft guide rails, and 3451 is solid for speculum
Fixed board, 3461 be speculum fixed module, and 3471 be camera lens 1；
351 be motor 2,352 be Z countershaft substrates, and 353 be Z countershaft movable plates, and 354 be camera holder mounting plate, and 355 be laser displacement
It is camera lens 2,3522 is Z countershaft guide rails that sensor 2,356, which is camera 2,357,；
41 be laser, and 42 be light path Isosorbide-5-Nitrae 3 be light path 2,44 be laser placement rack, and 45 be optical element placement rack.
Specific implementation mode
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, and is only used for explaining the present invention, and is not construed as limiting the claims.
In the description of the present invention, it is to be understood that, term "upper", "lower", "bottom", "top", "front", "rear", "inner",
The orientation or positional relationship of the instructions such as "outside", " cross ", " perpendicular " is to be based on the orientation or positional relationship shown in the drawings, merely to just
In the description present invention and simplify description, do not indicate or imply the indicated device or element must have a particular orientation, with
Specific azimuth configuration and operation, therefore be not considered as limiting the invention.
Fig. 1 show optical scanner and laser drill equipment overall diagram, including rack 1, operation base station 2, motion module 3,
Light path system 4, rack 1 be carrying and fixed operation base station 2 steel frame construction, inside need carry out relevant control circuit it is gentle
The arrangement of pipe, condition known in the inside implied as equipment normal operation, does not elaborate herein, has no effect on and entirely sets
Standby structure function；It includes pedestal 27, absorption platform 22, temporary platform 23, dust-absorbing box 24 and manipulator 26 to operate base station 2；Absorption
Platform 22 is movable to be arranged on pedestal 27 for adsorbing and fixing sheet material to be processed；Temporary platform 23 is fixed on the pedestal 27
On, it is located at one end of 22 same linear position of the absorption platform, for storing the sheet material transmitted by the manipulator 26 simultaneously
Sheet material is transferred on the absorption platform 22；The dust-absorbing box 24 is located at the another of 22 same linear position of the absorption platform
One end, the dust generated in drilling for drawing sheet material.The motion module 3 includes crossbeam 31, main shaft 34, countershaft 35；Institute
It states main shaft 34 and countershaft 35 is movable is arranged on the crossbeam 31, and X-axis and Z-direction can be carried out on the crossbeam 31
Movement；The main shaft 34 is used for the drilling of sheet material；The countershaft 35 is used for the Scanning Detction of sheet material；The motion module 3 passes through
Crossbeam 31 is fixed to be arranged in the pedestal 27；The fixed setting of the light path system 4 provides sheet material drilling in the pedestal 27
When the laser that needs.
The present invention more specifically makees specific expansion below realization method：
Platform overall schematic is kept in conjunction with Fig. 2 and Fig. 3 is kept in shown in platform left view, and it includes a rectangular frame 231 to keep in platform 23
With four groups of cylinder assemblies, four groups of cylinder assemblies are respectively cylinder assembly 1（235）, cylinder assembly 2（236）, cylinder assembly 3
（237）, cylinder assembly 4（238）, wherein every group of cylinder assembly all includes the identical cylinder of two specifications, every group of cylinder assembly packet
The movable end and fixing end included is the piston end and cylinder body of cylinder in cylinder assembly；The cylinder assembly 1（235）Fixing end
Pass through the top for being fixed on the rectangular frame 231 that fixed plate 232 is vertical, the cylinder assembly 2（236）Fixing end then lead to
That crosses 233 level of mounting plate is fixed on the cylinder assembly 1（235）Movable end, the cylinder assembly 2（236）Movable end
On be then fixed with sheet material bracket 239；In addition the cylinder assembly 3（237）Fixing end it is vertical be fixed on the rectangular frame
231 side, the cylinder assembly 4（238）Fixing end then horizontal be fixed on the cylinder assembly 3（237）Movable end,
The cylinder assembly 4（238）Movable end on be then fixed with sheet material bracket 239；The sheet material bracket 239 is used for support sheet material.
When equipment work starts, sheet material to be processed is transferred on cylinder assembly 2 and cylinder assembly 4 by manipulator 26
Sheet material bracket 239, then the piston end of cylinder assembly 3, which stretches out, drives cylinder assembly 4 to be displaced downwardly to the top of absorption platform 22, cylinder
It is smooth by absorption on absorption platform 22 that the piston end contraction of component 4 makes sheet material be fallen from its sheet material bracket 239, then air cylinder group
The piston end shrinkage band of part 3 cylinder component 4 of taking offence rises to the lower section of cylinder assembly 2, and the piston end stretching of cylinder assembly 2 makes its sheet material
Sheet material on bracket 239 drops down onto on the sheet material bracket 239 on cylinder assembly 4, and cylinder assembly 3 drives cylinder assembly 4 to fall after rise, machinery
Hand 26 will wait for that sheet material transmits, on the sheet material bracket 239 that is loaded on cylinder assembly 2 again, recycle the above process with this, keep in platform
23 are achieved that the temporary and transfer function of sheet material to be processed.
Fig. 4 show absorption platform and dust-absorbing box position relationship schematic diagram, and wherein dust-absorbing box 24 includes 241 He of dust absorption window
Dust hood 242, the dust absorption window 241 are rectangle frame, and centre has rectangular window；One end of the dust hood 242 with it is described
One side unicom of dust absorption window 241 is fixed, and the other end connection tracheae of the dust hood 242 carries out air suction process；The dust suction
Box 24 is fixed on by being connected to the fixed seat 243 of 241 two sides of the dust absorption window on the pedestal 27, and makes the dust suction
Window 241 is located at the top of the absorption platform 22.
As shown in Figure 4,5.Absorption platform 22 is arranged by the way that Y-axis guide rail 21 is movable on the pedestal 27, and can be in institute
State the movement that Y direction is carried out in the Y-axis guide rail 21 of 241 lower section of rectangular frame 231 and the dust absorption window；The absorption platform
22 include adsorption plate and bottom plate, wherein there are several adsorption holes on the adsorption plate, and positioned at the top of bottom plate；The adsorption plate
It is connected with the vacuum hose 223 being fixed on the pedestal 27 with formation chamber, the chamber among the bottom plate, by described true
Empty hose 223 realizes the conveying and extraction of gas in 22 inner cavity chamber of the absorption platform, and it is right to adjust the absorption platform 22 with this
The adsorption capacity intensity of sheet material.
In addition locating piece 221, cylinder 222 and speed governing valve 224 are additionally provided on the absorption platform 22；In the adsorption plate
There are two the locating piece 221, the locating piece 221 is used for determining sheet material placement location for each fixation in wherein adjacent both sides；Institute
It states cylinder 222 and is fixed on the adsorption plate in addition on adjacent both sides, for holding out against sheet material in 221 position of the locating piece,
To position of the fixed sheet material on the absorption platform 22；The speed governing valve 224 is fixed on the absorption platform, for adjusting
Save the speed that the vacuum hose 223 conveys gas in the absorption platform 22 and extracts out.
Wherein main shaft 34 and countershaft 35 will be in the dust absorption windows 241 of dust-absorbing box 24 to the sheet material on absorption platform 22
It is operated, when main shaft 34 drills to sheet material, dust-absorbing box 24 is used as strength dust exhaust apparatus, can be being produced in process
Raw dust removal is clean, prevents dust from being had an impact to product processing, is in addition also provided with ion wind stick in dust-absorbing box 24,
Further eliminate electrostatic and dust.
As shown in fig. 6, the crossbeam 31 is arranged by the way that cushion block 25 is fixed in the pedestal 27；It is arranged on the crossbeam 31
There are X-axis guide rail 32, X-axis motor 33, the main shaft 34 and the countershaft 35 to be arranged in the X-axis by the way that X-axis movable plate 37 is movable
On guide rail 32, and the movement of X-direction, the X-axis motor 33 can be carried out in the X-axis guide rail 32 with the X-axis movable plate 37
Movement for the X-axis movable plate 37 provides power；It is additionally provided with X-axis drag chain 36 on the crossbeam 31, is used for cabling.
Further such as Fig. 7, the main shaft 34 are fixed on by Z main shafts substrate 341 on the X-axis movable plate 37, the main shaft
34 include motor 1（342）, Z main shafts movable plate 348, speculum 1（345）, speculum 2（346）, galvanometer 343, field lens 344, laser
Displacement sensor 1（349）With camera 1（347）, the Z main shafts movable plate 348 is by the movable setting of Z main shafts guide rail 3411 in institute
It states on Z main shafts substrate 341, and carries out the movement of Z-direction, the motor 1 on the Z main shafts guide rail 3411（342）For institute
The movement for stating Z main shafts movable plate 348 provides power；The speculum 1（345）Existed by the fixed setting of speculum fixed plate 3451
On the Z main shafts substrate 341, for receiving the laser of the offer of the light path system 4 and reflecting the laser light to the speculum 2
（346）On；The galvanometer 343, laser displacement sensor 1（349）With the camera 1（347）Parallel is fixed on the Z main shafts
On movable plate 348；343 lower end of the galvanometer connects the field lens 344, and the drilling operation of sheet material is realized with this；The speculum 2
（346）It is arranged in the galvanometer 343 by the way that speculum fixed module 3461 is fixed, and will be from the speculum 1（345）It receives
To laser reflection, be transported in the galvanometer 343；The laser displacement sensor 1（349）For measuring and controlling main shaft 34
Height apart from sheet material, to realize optimal distance of the field lens 344 away from sheet material；The camera 1（347）Lower section links camera lens 1
（3471）, for detecting sheet surface and drilling quality.
Further such as Fig. 8, the countershaft 35 are fixed on by Z countershafts substrate 352 on the X-axis movable plate 37, the countershaft
35 include motor 2（351）, Z countershafts movable plate 353, laser displacement sensor 2（355）With camera 2（356）, the Z countershafts movable plate
353 are arranged by the way that Z countershafts guide rail 3522 is movable on the Z countershafts substrate 352, and enterprising in the Z countershafts guide rail 3522
The movement of row Z-direction, the motor 2（351）Movement for the Z countershafts movable plate 353 provides power；Laser displacement sensor
2（355）With the camera 2（356）Parallel is fixed on the Z countershafts movable plate 353；The laser displacement sensor 2（349）
For measuring and controlling height of the countershaft 35 apart from sheet material；The camera 2（356）Lower section links camera lens 2（357）, for scanning,
Detect sheet surface quality.
It should be clear that camera 2（356）Target surface size be more than camera 1（347）, pixel be higher than camera 1（347）
, while camera lens 2（357）Multiplying power also above camera lens 1（3471）'s.Camera 1（347）Function be for processing boring procedure
In contraposition, and camera 2（356）It is to be detected for positional precision after processing is completed, on the whole, camera 2（356）Detection
Range is than camera 1（347）It is big, precision also wants high, to more accurately realize double processing of Scanning Detction and drilling.
Further such as Fig. 9, light path system 4 includes laser 41, light path 1（42）With light path 2（43）；41 He of the laser
The light path 1（42）It is fixed on the pedestal 27 by laser placement rack 44, the light path 2（43）It is put by optical element
Seat 45 is set to be fixed on the pedestal 27；The laser that the laser 41 is sent out passes through the light path 1（42）Into the light path 2
（43）, through the light path 2（44）By the light path 2 behind right angle reflection change direction（44）Inject to the speculum 1（345）
On.It should be clear that in light path 1（42）、2（43）Include the optical gate to form laser path, beam expanding lens, spectroscope, reflection
Outside mirror and diaphragm, in order to ensure drilling quality and spot size, in the present embodiment, light path 2（43）In also have for switching light
π-sharper the mirrors of type（Shaping mirror）.
It is further to note that not doing corresponding displaying to the trend of the control circuit in equipment in the present invention and being situated between
It continues, it is to be appreciated that the part can be voluntarily controlled by technical staff without doing specific description, had no effect on each in the application
The function of part-structure.
Specific component, structure or the feature for meaning to combine embodiment description for referring to " embodiment " any in the present invention
It is included at least one embodiment of the present invention.It is not necessarily referring in the schematic representation of this specification everywhere identical
Embodiment.Moreover, when describing specific component, structure or feature in conjunction with any embodiment, advocated, in conjunction with others
Within the scope of embodiment realizes that such component, structure or feature all fall within those skilled in the art.
Although the specific implementation mode of the present invention is described in detail in the illustrative examples with reference to the present invention,
It is it must be understood that those skilled in the art can be designed that various other improvement and embodiment, these are improved and embodiment will
It falls within spirit and scope.Specifically, aforementioned disclosure, attached drawing and the scope of the claims it
It is interior, rational variations and modifications can be made in terms of the arrangement that parts and/or sub-combination are laid out, without departing from this
The spirit of invention.In addition to the variations and modifications in terms of parts and/or layout, range is by the following claims and their equivalents
It limits.
Claims (10)
1. a kind of optical scanner and laser drill equipment, including rack（1）, operation base station（2）, motion module（3）, light path system
（4）, it is characterised in that：
The rack（1）For carrying and fixed operation base station（2）Steel frame construction；
The operation base station（2）Including pedestal（27）, absorption platform（22）, temporary platform（23）, dust-absorbing box（24）And manipulator
（26）；The absorption platform（22）It is movable to be arranged in the pedestal（27）On for adsorbing and fixing sheet material to be processed；It is described
Temporary platform（23）It is fixed on the pedestal（27）On, it is located at the absorption platform（22）One end of same linear position, is used for
Storage is by the manipulator（26）Sheet material is simultaneously transferred to the absorption platform by the sheet material of transmission（22）On；The dust-absorbing box（24）
Positioned at the absorption platform（22）The other end of same linear position, the dust generated in drilling for drawing sheet material；
The motion module（3）Including crossbeam（31）, main shaft（34）, countershaft（35）；The main shaft（34）And countershaft（35）Activity
Setting in the crossbeam（31）On, and can be in the crossbeam（31）The upper movement for carrying out X-axis and Z-direction；The main shaft
（34）Drilling for sheet material；The countershaft（35）Scanning Detction for sheet material；The motion module（3）Pass through crossbeam（31）
It is fixed to be arranged in the pedestal（27）On；
The light path system（4）It is fixed to be arranged in the pedestal（27）On, the laser needed when sheet material drilling is provided.
2. optical scanner according to claim 1 and laser drill equipment, which is characterized in that the temporary platform（23）Including
One rectangular frame（231）With four groups of cylinder assemblies, four groups of cylinder assemblies are respectively cylinder assembly 1（235）, cylinder assembly 2
（236）, cylinder assembly 3（237）, cylinder assembly 4（238）, wherein every group of cylinder assembly all includes movable end and fixing end；It is described
Cylinder assembly 1（235）Fixing end pass through fixed plate（232）Vertical is fixed on the rectangular frame（231）Top, it is described
Cylinder assembly 2（236）Fixing end then pass through mounting plate（233）Horizontal is fixed on the cylinder assembly 1（235）Activity
End, the cylinder assembly 2（236）Movable end on be then fixed with sheet material bracket（239）；In addition the cylinder assembly 3（237）'s
Fixing end it is vertical be fixed on the rectangular frame（231）Side, the cylinder assembly 4（238）Fixing end it is then horizontal
It is fixed on the cylinder assembly 3（237）Movable end, the cylinder assembly 4（238）Movable end on be then fixed with sheet material bracket
（239）；The sheet material bracket（239）For support sheet material.
3. optical scanner according to claim 2 and laser drill equipment, which is characterized in that the dust-absorbing box（24）Including
Dust absorption window（241）And dust hood（242）, the dust absorption window（241）For rectangle frame, centre has rectangular window；The suction
Dust hood（242）One end and the dust absorption window（241）One side unicom fix, the dust hood（242）The other end connection
Tracheae carries out air suction process；The dust-absorbing box（24）By being connected to the dust absorption window（241）The fixed seat of two sides（243）
It is fixed on the pedestal（27）On, and make the dust absorption window（241）Positioned at the absorption platform（22）Top.
4. optical scanner according to claim 3 and laser drill equipment, which is characterized in that the absorption platform（22）It is logical
Cross Y-axis guide rail（21）It is movable to be arranged in the operation pedestal（27）On, and can be in the rectangular frame（231）With the dust suction
Window（241）The Y-axis guide rail of lower section（21）The upper movement for carrying out Y direction；The absorption platform（22）Including adsorption plate and bottom
Plate, wherein there are several adsorption holes on the adsorption plate, and positioned at the top of bottom plate；Shape among the adsorption plate and the bottom plate
At chamber, the chamber and it is fixed on the pedestal（27）On vacuum hose（223）It is connected, passes through the vacuum hose（223）
Realize the absorption platform（22）The conveying and extraction of gas in inner cavity chamber, the absorption platform is adjusted with this（22）To sheet material
Adsorption capacity intensity.
5. optical scanner according to claim 4 and laser drill equipment, which is characterized in that the absorption platform（22）On
It is additionally provided with locating piece（221）, cylinder（222）And speed governing valve（224）；It is respectively fixed in the wherein adjacent both sides of the adsorption plate
Two locating pieces（221）, the locating piece（221）For determining sheet material placement location；The cylinder（222）It is fixed on institute
Adsorption plate is stated in addition on adjacent both sides, for holding out against sheet material in the locating piece（221）On position, to which fixed sheet material is in institute
State absorption platform（22）On position；The speed governing valve（224）It is fixed on the absorption platform, it is soft for adjusting the vacuum
Pipe（223）To the absorption platform（22）The speed of interior gas conveying and extraction.
6. optical scanner according to claim 1 and laser drill equipment, which is characterized in that the crossbeam（31）Pass through pad
Block（25）It is fixed to be arranged in the pedestal（27）On；The crossbeam（31）On be provided with X-axis guide rail（32）, X-axis motor（33）,
The main shaft（34）With the countershaft（35）Pass through X-axis movable plate（37）It is movable to be arranged in the X-axis guide rail（32）On, and can be with
The X-axis movable plate（37）In the X-axis guide rail（32）The upper movement for carrying out X-direction, the X-axis motor（33）For the X-axis
Movable plate（37）Movement provide power；The crossbeam（31）On be additionally provided with X-axis drag chain（36）, it is used for cabling.
7. optical scanner according to claim 6 and laser drill equipment, which is characterized in that the main shaft（34）Pass through Z
Main shaft substrate（341）It is fixed on the X-axis movable plate（37）On, the main shaft（34）Including motor 1（342）, Z main shaft movable plates
（348）, speculum 1（345）, speculum 2（346）, galvanometer（343）, field lens（344）, laser displacement sensor 1（349）And phase
Machine 1（347）, the Z main shafts movable plate（348）Pass through Z main shaft guide rails（3411）It is movable to be arranged in the Z main shafts substrate（341）
On, and in the Z main shafts guide rail（3411）The upper movement for carrying out Z-direction, the motor 1（342）For the Z main shafts movable plate
（348）Movement provide power；The speculum 1（345）Pass through speculum fixed plate（3451）It is fixed to be arranged in the Z master
Axis substrate（341）On, for receiving the light path system（4）The laser of offer simultaneously reflects the laser light to the speculum 2（346）
On；The galvanometer（343）, laser displacement sensor 1（349）With the camera 1（347）The parallel Z main shafts that are fixed on move
Plate（348）On；The galvanometer（343）Lower end connects the field lens（344）, the drilling operation of sheet material is realized with this；The reflection
Mirror 2（346）Pass through speculum fixed module（3461）It is fixed to be arranged in the galvanometer（343）On, and will be from the speculum 1
（345）The laser reflection that receives is transported to the galvanometer（343）In；The laser displacement sensor 1（349）For measuring
And control main shaft（34）Height apart from sheet material；The camera 1（347）Lower section links camera lens 1（3471）, for detecting sheet material table
Face and drilling quality.
8. optical scanner according to claim 6 and laser drill equipment, which is characterized in that the countershaft（35）Pass through Z
Countershaft substrate（352）It is fixed on the X-axis movable plate（37）On, the countershaft（35）Including motor 2（351）, Z countershaft movable plates
（353）, laser displacement sensor 2（355）With camera 2（356）, the Z countershafts movable plate（353）Pass through Z countershaft guide rails（3522）
It is movable to be arranged in the Z countershafts substrate（352）On, and in the Z countershafts guide rail（3522）The upper movement for carrying out Z-direction,
The motor 2（351）For the Z countershafts movable plate（353）Movement provide power；Laser displacement sensor 2（355）With the phase
Machine 2（356）Parallel is fixed on the Z countershafts movable plate（353）On；The laser displacement sensor 2（349）For measuring and controlling
Countershaft processed（35）Height apart from sheet material；The camera 2（356）Lower section links camera lens 2（357）, for scanning, detecting sheet material table
Face quality.
9. optical scanner according to claim 7 and laser drill equipment, which is characterized in that the light path system（4）Packet
Include laser（41）, light path 1（42）With light path 2（43）；The laser（41）With the light path 1（42）It is placed by laser
Seat（44）It is fixed on the pedestal（27）On, the light path 2（43）Pass through optical element placement rack（45）It is fixed on the pedestal
（27）On；The laser（41）The laser sent out passes through the light path 1（42）Into the light path 2（43）, through the light path 2
（44）By the light path 2 behind right angle reflection change direction（44）Inject to the speculum 1（345）On.
10. optical scanner according to claim 9 and laser drill equipment, which is characterized in that the light path 1（42）Middle packet
Include optical gate, beam expanding lens, spectroscope and speculum；The light path 2（43）Include speculum, shaping mirror and diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810000650.4A CN108356432A (en) | 2018-01-02 | 2018-01-02 | Optical scanner and laser drill equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810000650.4A CN108356432A (en) | 2018-01-02 | 2018-01-02 | Optical scanner and laser drill equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108356432A true CN108356432A (en) | 2018-08-03 |
Family
ID=63010980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810000650.4A Pending CN108356432A (en) | 2018-01-02 | 2018-01-02 | Optical scanner and laser drill equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108356432A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111001953A (en) * | 2019-12-28 | 2020-04-14 | 东莞市盛雄激光先进装备股份有限公司 | Laser cutting device |
| US20210346985A1 (en) * | 2018-10-16 | 2021-11-11 | Electro Scientific Industries, Inc. | Frame and exterior shrouding for laser processing system |
-
2018
- 2018-01-02 CN CN201810000650.4A patent/CN108356432A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20210346985A1 (en) * | 2018-10-16 | 2021-11-11 | Electro Scientific Industries, Inc. | Frame and exterior shrouding for laser processing system |
| CN111001953A (en) * | 2019-12-28 | 2020-04-14 | 东莞市盛雄激光先进装备股份有限公司 | Laser cutting device |
| CN111001953B (en) * | 2019-12-28 | 2021-11-02 | 东莞市盛雄激光先进装备股份有限公司 | Laser cutting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180803 |
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| WD01 | Invention patent application deemed withdrawn after publication |