CN115178476A

CN115178476A - Be used for six outward appearance check out test set of high-speed high accuracy of chip

Info

Publication number: CN115178476A
Application number: CN202210866744.6A
Authority: CN
Inventors: 张学东; 王焕龙; 毕爱荣; 韩禄丰; 周少峰
Original assignee: Shanghai Ziyi Measurement And Control Technology Co ltd
Current assignee: Shanghai Ziyi Measurement And Control Technology Co ltd
Priority date: 2022-07-22
Filing date: 2022-07-22
Publication date: 2022-10-14

Abstract

The invention discloses high-speed high-precision six-side appearance detection equipment for a chip, which relates to the technical field of chips and comprises a marble linear motor motion platform; the inside of marble linear electric motor motion platform is including having the bottom steelframe, and installs four damping air flotation all around the top of bottom steelframe, and the marble platform is installed on the top of damping air flotation, and the marble platform top is connected with marble longmen frame. According to the invention, the height of the suction nozzle is detected by adopting a side detection camera aiming at the discharging suction nozzle which takes out the chip from the carrier and puts into the carrier disc, the height of the product is measured by a height measurement sensor, and under the condition that the height of the suction nozzle and the height of the chip are accurately known, the suction nozzle can be ensured to accurately reach the target height by the high-precision encoder linear motor module arranged in the vertical direction, so that the distance between the suction nozzle and the chip is ensured to be accurate before the vacuum suction chip is started by the suction nozzle, and the chip can be prevented from being damaged by the suction nozzle.

Description

Be used for six outward appearance check out test set of high-speed high accuracy of chip

Technical Field

The invention belongs to the technical field of chips, and particularly relates to high-speed high-precision six-face appearance detection equipment for a chip.

Background

Chips are a way of miniaturizing circuits (mainly including semiconductor devices and also including passive components) in electronics, and are often manufactured on the surface of a semiconductor wafer, while mobile phones or camera devices also need the chips to take pictures during shooting, and the chips generally need to be detected on the surface during shipment, so as to prevent the outflow of defective products.

The six appearance inspection methods of current chip divide into two kinds, one kind is personnel detect the chip through the microscope, and artifical detection is not only lower in efficiency, because the chip is less, under long-time detection, lead to personnel's vision to appear tiredly easily, lead to the outflow of defective products, another kind of inspection methods detects for check out test set, this type of equipment mostly has visual localization, do not make chip height detection or suction nozzle height detection, because the chip is very little, so the suction nozzle is very little and the vacuum gas pocket is very little, so need the suction nozzle to be close very apart from the chip distance just can suck the product, but the suction nozzle can not contact the chip again, cause the chip to damage, so there is deformation at the year dish, the product has certain tolerance, under the condition that has the difference in height after the suction nozzle is changed, it can appear very easily to absorb the height and can't accurately control, lead to suck the condition of chip or crush the chip, check out test set can vibrate during operation simultaneously, vibration leads to the visual localization equipment on the equipment to appear rocking easily, lead to the picture that the camera was clapped, influence the detection to the chip.

Disclosure of Invention

The invention aims to solve the defects that the prior six-side appearance detection mode of a chip is divided into two modes, one mode is that a person detects the chip through a microscope, the manual detection is low in efficiency, the chip is small, the visual fatigue of the person is easily caused under the long-time detection, and the defective product flows out, the other mode is that the detection equipment detects the chip, most of the equipment has visual positioning and is not used for detecting the height of the chip or the height of a suction nozzle, the suction nozzle is small and has small vacuum air holes, so the product can be sucked up only by the suction nozzle being close to the chip, but the suction nozzle can not contact the chip, the chip is damaged, the suction height can not be accurately controlled under the condition that the product has certain tolerance and the suction nozzle has height difference after replacement, the chip cannot be sucked up or the chip is crushed, and the detection equipment vibrates during working, the vibration easily causes the visual positioning equipment on the equipment to shake, the picture shot by a camera is blurred, and the detection of the chip is influenced.

In order to achieve the purpose, the invention adopts the following technical scheme: a high-speed high-precision six-side appearance detection device for chips comprises a marble linear motor motion platform;

the marble linear motor motion platform comprises a bottom steel frame, four vibration reduction air floats are arranged on the periphery of the top end of the bottom steel frame, a marble platform is arranged on the top end of the vibration reduction air floats, the top end of the marble platform is connected with a marble gantry frame, first linear modules are respectively arranged on two sides of the marble gantry frame, a first sliding block is arranged on the surface of each first linear module, an optical fiber sensor is arranged on one side of the marble gantry frame, a carrier linear module marble platform is connected to the top end of the marble platform, a second linear module is arranged on the top end of the carrier linear module marble platform, a second sliding block is arranged on the surface of each second linear module, and a carrier is arranged on the top end of each second sliding block, and a taking mechanism is arranged on the surface of each first sliding block;

the taking mechanism comprises a first mounting plate, a vacuum generator is mounted on one side of the first mounting plate, a linear rotation actuator is mounted on one side of the first mounting plate, a suction nozzle is mounted at the bottom end of the linear rotation actuator, and a positioning camera is mounted on the side portion of the first mounting plate;

two tray transport mechanisms are installed on the top of marble platform, the surface mounting of carrier straight line module marble platform has detection mechanism, positioning mechanism is installed on the top of marble platform, and the top of marble platform installs defective products unloading mechanism, the surface mounting of marble gantry frame has record mechanism.

As a further description of the above technical solution:

be connected between the surface of first mounting panel and first slider, optical fiber sensor is the symmetry about marble longmen frame's axis, laser sensor is installed on the top of marble platform.

As a further description of the above technical solution:

the tray carrying mechanism comprises two first supports, the top ends of the first supports are connected with four first air cylinders, one ends of the first air cylinders are connected with linear guide rails, one ends of the linear guide rails are connected with tray supporting blocks, the top ends of the marble platforms are connected with two second supports, the top ends of the second supports are connected with four concave blocks, the inner walls of the concave blocks are rotatably connected with rotating shafts, and the surfaces of the rotating shafts are connected with tray rotating supporting blocks;

the utility model discloses a marble platform, including marble platform, support column, guide bar, tray backup pad, tray connecting plate, marble platform and marble platform, the servo module of third is installed on the top of marble platform, and the surface of the servo module of third is connected with the bottom suspension fagging, the top of bottom suspension fagging is connected with the support column, and the top of support column is connected with the backup pad, four guide bars have been cup jointed in the top activity of going up the backup pad, and the bottom of guide bar is connected with the guide bar connecting plate, the top of guide bar is connected with the tray backup pad, and the surface of tray backup pad is connected with two first stoppers, the surface of tray backup pad is connected with two second cylinders, and the one end of second cylinder is connected with the second stopper, the top of tray backup pad is provided with the tray.

As a further description of the above technical solution:

and the top end of the lower supporting plate is provided with a lifting device.

As a further description of the above technical solution:

the detection mechanism comprises a first detection industrial camera, a second detection industrial camera, a third detection industrial camera and a second height measurement sensor.

As a further description of the above technical solution:

the inside of the positioning mechanism comprises an industrial camera.

As a further description of the above technical solution:

the inside of defective products unloading mechanism is including the fourth servo module, and is connected between the top of fourth servo module and marble platform, the surface mounting of fourth servo module has defective products tray support.

As a further description of the above technical solution:

the recording mechanism is characterized in that a camera mounting support is arranged inside the recording mechanism and connected with the surface of the marble gantry frame, a first connecting plate with a U-shaped cross section is connected to one side of the camera mounting support, a manual displacement table is arranged on one side of the first connecting plate, a second connecting plate is connected to one side of the manual displacement table, a discharge detection camera is arranged on one side of the second connecting plate, and a fourth light supplementing source is arranged on one side of the camera mounting support.

In summary, due to the adoption of the technical scheme, the invention has the beneficial effects that:

1. according to the invention, the high-precision marble platform, the camera, the height measurement sensor and the vibration reduction air flotation are adopted, so that the product can be carried at high precision and detected at high positioning precision, and six sides of the product can be detected efficiently and stably.

2. According to the invention, the vibration transfer rate is reduced by increasing the air flotation, so that the equipment detection is not influenced by external vibration, the equipment stabilization time is shortened, and the loss of the acceleration and deceleration of the rotor to the equipment is reduced, so that the service life of the equipment is prolonged, and the problem of camera shooting blurring caused by vibration is solved by adopting a marble platform with lower natural frequency.

3. According to the invention, after the suction nozzle is replaced, the height of the suction nozzle is detected by adopting the laser sensor aiming at the feeding suction nozzle which takes the chip out of the carrying disc and puts the chip into the carrying disc, the height of the suction nozzle is detected by adopting the side detection camera aiming at the discharging suction nozzle which takes the chip out of the carrying disc, the height of the product is measured by the height measurement sensor, and under the condition that the height of the suction nozzle and the height of the chip are accurately known, the suction nozzle can be ensured to accurately reach the target height through the linear motor module with the high-precision encoder in the vertical direction, so that the suction nozzle can ensure that the distance between the suction nozzle and the chip is accurate before the vacuum suction chip is started, and the suction nozzle can be ensured to suck the chip and not crush the chip.

Of course, it is not necessary for any product in which the invention is practiced to achieve all of the above-described advantages at the same time.

Drawings

FIG. 1 is a schematic side view of a high-speed high-precision six-sided appearance inspection apparatus for chips according to the present invention;

FIG. 2 is a schematic diagram of another side structure of a high-speed high-precision six-sided appearance inspection apparatus for chips in accordance with the present invention;

fig. 3 is a schematic view of the top end portion of a marble platform of the present invention;

fig. 4 is a schematic structural view of the top end part of a marble linear motor motion platform in the invention;

FIG. 5 is a schematic view of the surface structure of the picking mechanism of the present invention;

FIG. 6 is a schematic view of the surface structure of the pallet carrying mechanism according to the present invention;

FIG. 7 is an enlarged view of the structure at A in FIG. 6;

FIG. 8 is an enlarged view of the structure at B in FIG. 6;

FIG. 9 is a schematic view of the bottom support plate surface structure according to the present invention;

FIG. 10 is a schematic view of the surface structure of the detecting mechanism of the present invention;

FIG. 11 is an enlarged view of the structure at C in FIG. 10;

FIG. 12 is an enlarged view of the structure of FIG. 10 at D;

FIG. 13 is a schematic view of the surface structure of the positioning mechanism of the present invention;

FIG. 14 is a schematic structural view of a defective product blanking mechanism according to the present invention;

FIG. 15 is a schematic view of the surface structure of a recording mechanism according to the present invention.

Illustration of the drawings:

1. a marble linear motor motion platform; 101. damping air flotation; 102. a marble platform; 103. a marble gantry frame; 104. a first linear module; 105. a first slider; 106. an optical fiber sensor; 107. carrying a linear module marble platform; 108. a second linear module; 109. a second slider; 110. a carrier; 2. a fetching mechanism; 201. a first mounting plate; 202. a vacuum generator; 203. a linear rotation actuator; 204. a suction nozzle; 205. a first servo module; 206. a third slider; 207. positioning a camera; 208. a first light supplement source; 209. a height measurement sensor support; 210. a first height measurement sensor; 3. a tray carrying mechanism; 301. a first bracket; 302. a first cylinder; 303. a linear guide rail; 304. a pallet support block; 305. a second bracket; 306. a concave block; 307. a rotating shaft; 308. a tray rotating support block; 309. a third servo module; 310. a lower support plate; 311. a support pillar; 312. an upper support plate; 313. a guide bar; 314. a guide rod connecting plate; 315. a tray support plate; 316. a first stopper; 317. a second cylinder; 318. a second limiting block; 319. a tray; 4. a detection mechanism; 401. a camera detection bracket; 402. a first inspection camera servo module; 403. a fifth slider; 404. a first inspection industrial camera; 405. a second light supplement source; 406. a second inspection camera servo module; 407. a sixth slider; 408. a second inspection industrial camera; 409. a third detection camera servo module; 410. a seventh slider; 411. a third inspection industrial camera; 412. an L-shaped bracket; 413. a second height measurement sensor; 5. a positioning mechanism; 501. a second mounting plate; 502. a fifth servo module; 503. an eighth slider; 504. an industrial camera; 505. a third light supplement source; 6. a defective product discharging mechanism; 601. a fourth servo module; 602. a defective tray support; 7. a recording mechanism; 701. a camera mounting bracket; 702. a first connecting plate; 703. a manual displacement table; 704. a second connecting plate; 705. a discharge detection camera; 706. and a fourth light supplement source.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

As shown in fig. 1-15, a high-speed high-precision six-side appearance detection device for chips comprises a marble linear motor motion platform 1;

the marble linear motor motion platform 1 comprises a bottom steel frame inside, four vibration reduction air floats 101 are installed on the periphery of the top end of the bottom steel frame, a marble platform 102 is installed on the top end of the vibration reduction air floats 101, a marble gantry frame 103 is connected to the top end of the marble platform 102, first linear modules 104 are installed on two sides of the marble gantry frame 103 respectively, a first sliding block 105 is installed on the surface of each first linear module 104, an optical fiber sensor 106 is installed on one side of the marble gantry frame 103, a carrier linear module marble platform 107 is connected to the top end of the marble platform 102, a second linear module 108 is installed on the top end of the carrier linear module marble platform 107, a second sliding block 109 is installed on the surface of each second linear module 108, and a taking mechanism 2 is installed on the surface of the first sliding block 105 of a carrier 110 and installed on the top end of the second sliding block 109;

the taking mechanism 2 comprises a first mounting plate 201 inside, a vacuum generator 202 is mounted on one side of the first mounting plate 201, a linear rotation actuator 203 is mounted on one side of the first mounting plate 201, a suction nozzle 204 is mounted at the bottom end of the linear rotation actuator 203, a positioning camera 207 is mounted on the side portion of the first mounting plate 201, a first servo module 205 is mounted on one side of the first mounting plate 201, a third slider 206 is mounted on the surface of the first servo module 205, the positioning camera 207 is connected with the surface of the third slider 206, a first light supplement source 208 is mounted on the surface of the first mounting plate 201, the first light supplement source 208 is located right below the positioning camera 207, a height measurement sensor support 209 is mounted on the surface of the first mounting plate 201, a first height measurement sensor 210 is mounted on the surface of the height measurement sensor support 209, after the product is subjected to height measurement by the first height measurement sensor 210, the discharging positioning camera 207 moves to adjust the height through the first servo module 205, the taking mechanism 204 on the linear rotation camera 203 is positioned according to the position of the suction nozzle 203, and then the taking mechanism guides the taking camera to a camera 204 on the rotary carrier 204;

two tray carrying mechanisms 3 are installed at the top end of a marble platform 102, a detection mechanism 4 is installed on the surface of a carrier linear module marble platform 107, a positioning mechanism 5 is installed at the top end of the marble platform 102, a defective product blanking mechanism 6 is installed at the top end of the marble platform 102, a recording mechanism 7 is installed on the surface of a marble gantry frame 103, a vibration reduction air flotation 101 is used for eliminating the influence of vibration and external vibration on detection when equipment moves at a high speed, the marble platform 102 and the marble gantry frame 103 are made of marble, the precision is high, the linear module is driven by a direct drive motor, the force loss caused by force transmission can be reduced, the driving force is increased, a connecting plate of the module and a mechanism main fixing plate, namely a fixing plate for fixing a discharging positioning camera 207 module, a first height measuring sensor 210 module, a linear rotary actuator 203 and a suction nozzle 204 module, are made into one plate, and performing modal analysis on the board, on the basis of satisfying the strength, the quality is lightest, a marble linear motor platform is adopted, the structure is optimized through modal analysis, the method for improving the natural frequency of the equipment and increasing the strength of a material taking and placing structure is used, the setting time of the material taking and placing mechanism is shortened, the method for improving the motion speed of the equipment is realized by increasing the driving force, reducing the weight of a rotor and reducing the setting time of the equipment, the first linear module 104 is convenient for the mechanism 2 to take and move, the second linear module 108 is convenient for the carrier 110 to move, the bottom of a chip placing groove of the carrier 110 can avoid a solder ball to support the bottom surface of the chip, the solder ball hole is excavated to avoid the solder ball, a high-precision linear motor marble structure is adopted, the solder ball part of the chip can accurately fall into the solder ball hole of the carrier 110, the chip is sucked from the solder ball hole by vacuum, therefore, the chip is flatly placed in the carrier 110, the brand of the linear rotary actuator 203 is SMAC, the model is LCR16, the brand of the height measuring sensor is Kenzhi, the model is CL-3000, the model of the optical fiber sensor 106 is FU-A100, as shown in the figure 3 and the figure 4, the first linear module 104 is respectively installed on two sides of the marble gantry frame 103, the first linear module 104 with a shorter point is a feeding linear module, the first linear module 104 with a longer point is a discharging linear module, and the surface of the first linear module is provided with the taking mechanism 2.

As shown in fig. 1-15, the first mounting plate 201 is connected to the surface of the first slider 105, the optical fiber sensors 106 are symmetrical about the central axis of the marble gantry frame 103, the top end of the marble platform 102 is provided with a laser sensor, the laser sensor is manufactured by keyence and is of type IG-010, after the suction nozzle 204 is replaced, the height of the suction nozzle 204 is determined by combining the correlation optical fiber sensor 106 with a vertical motor and a laser sensor for taking out the chip from the carrier disc and placing the chip into the loading suction nozzle 204 of the carrier 110, and the height of the suction nozzle 204 is detected by a detection camera for taking out the chip from the carrier disc and placing the chip into the unloading suction nozzle 204 of the carrier disc 110.

As shown in fig. 6 to 9, the tray carrying mechanism 3 includes two first brackets 301 inside, the top end of each first bracket 301 is connected with four first cylinders 302, one end of each first cylinder 302 is connected with a linear guide 303, one end of each linear guide 303 is connected with a tray supporting block 304, the top end of the marble platform 102 is connected with two second brackets 305, the top end of each second bracket 305 is connected with four concave blocks 306, the inner walls of the concave blocks 306 are rotatably connected with rotating shafts 307, and the surfaces of the rotating shafts 307 are connected with tray rotating supporting blocks 308;

the top end of the marble platform 102 is provided with a third servo module 309, the surface of the third servo module 309 is connected with a lower support plate 310, the top end of the lower support plate 310 is connected with a support column 311, the top end of the support column 311 is connected with an upper support plate 312, the top end of the upper support plate 312 is movably sleeved with four guide rods 313, the bottom ends of the guide rods 313 are connected with guide rod connecting plates 314, the top end of each guide rod 313 is connected with a tray support plate 315, the surface of the tray support plate 315 is connected with two first limit blocks 316, the surface of the tray support plate 315 is connected with two second air cylinders 317, one end of each second air cylinder 317 is connected with a second limit block 318, the top end of the tray support plate 315 is provided with a tray 319, the surface of the first support 301 is provided with a photoelectric sensor, when a plurality of trays 319 are stacked on the first support 301, the guide rod connecting plate 314 is driven to move the guide rod 313 by the operation of the third cylinder 322, so that the tray supporting plate 315 at the top end of the guide rod 313 can be moved to the bottom end of the tray 319 at the lowest end of the first bracket 301, the tray supporting block 304 on the linear guide 303 can be moved away from the bottom end of the tray 319 by the operation of the first cylinder 302, the tray supporting plate 315 can be driven to move the tray 319 downward by the operation of the third cylinder 322, after the tray 319 is moved to a designated position, the tray supporting block 304 can be driven to move to the penultimate tray 319 by the linear guide 303 and be supported by the operation of the first cylinder 302, and the tray 319 on the tray supporting plate 315 can be moved to the designated position by the operation of the third servo module 309.

As shown in fig. 6 to 9, a lifting device is installed at the top end of the lower support plate 310, the lifting device can be lifted by a servo motor, a ball screw and a ball nut, and can also be lifted by an air cylinder, etc., after unloading chips inside the tray 319 at the top end of the tray support plate 315, the lifting device can move the chips to the bottom end of the second support 305 through the third servo module 309, the tray support plate 315 is driven by the lifting device to move upward, the tray 319 on the tray support plate 315 can move to the bottom end of the tray rotation support block 308 and press the tray, the tray rotation support block 308 can rotate through the rotation shaft 307, so that the tray 319 can move to the top end of the second support 305, the tray 319 can be removed from the surface of the tray rotation support block 308, the tray rotation support block 308 can be reset by the self weight of the tray rotation support block 308, and the bottom end of the tray rotation support block can be in contact with the top end of the second support 305, and the empty tray 319 can be placed at the top end of the second support 305.

As shown in fig. 10-12, the inside of the inspection mechanism 4 comprises a first inspection industrial camera 404, a second inspection industrial camera 408, a third inspection industrial camera 411 and a second height sensor 413, the inside of the inspection mechanism 4 further comprises a camera inspection bracket 401, the camera inspection bracket 401 is connected with one side of the top end of the carrier linear module marble platform 107, one side of the camera inspection bracket 401 is provided with a first inspection camera servo module 402, the surface of the camera inspection bracket is also provided with a fifth slider 403, the first inspection industrial camera 404 is connected with the surface of the fifth slider 403, a second light supplement source 405 is arranged right below the first inspection camera servo module 402, the side of the second linear module 108 is provided with a second inspection camera servo module 406, the surface of which is provided with a sixth slider 407, and the second inspection industrial camera 408 is connected with the surface of the sixth slider 407, the first detection camera servo module 402 is provided with a third detection camera servo module 409, the surface of which is provided with a seventh slider 410, a third detection industrial camera 411 is connected with the surface of the seventh slider 410, the top end of the carrier linear module marble platform 107 is connected with an L-shaped support 412, the surface of the L-shaped support 412 is provided with a second height measurement sensor 413, when the carrier 110 provided with the chip moves to the position of the second height measurement sensor 413, the carrier moves to the bottom end of the first detection industrial camera 404 after the height measurement of the second height measurement sensor 413, the first detection industrial camera 404 adjusts the height through the first detection camera servo module 402 according to the height measurement signal, the top end of the chip can be detected after the height is adjusted to a designated height, the carrier 110 moves to the bottom end of the suction nozzle 204 after the top end detection is completed, the chip is sucked by the suction nozzle 204 and moved to the second detection industrial camera 408 for four-side detection, and after the four-side detection is completed, the chip is moved to the top end of the third detection industrial camera 411 for bottom surface detection, so that six sides of the chip can be detected.

As shown in fig. 13, the positioning mechanism 5 includes an industrial camera 504, the positioning mechanism 5 further includes a second mounting plate 501 connected to the top end of the marble platform 102, a fifth servo module 502 is mounted on the surface of the second mounting plate 501, an eighth slider 503 is mounted on the surface of the second mounting plate 501, the industrial camera 504 is connected to the surface of the eighth slider 503, a third light supplement source 505 is mounted on the surface of the second mounting plate 501, and the fifth industrial camera 504 is mainly responsible for automatically taking a picture of the chip to be tested in the tray 319, the chip on the suction nozzle 204, the chip in the carrier 110, the empty carrier 110 or the empty carrier disk, and determining the center of the chip, the carrier 110 or the center position of the empty carrier disk.

As shown in fig. 14, the defective product unloading mechanism 6 includes a fourth servo module 601 inside, the fourth servo module 601 is connected to the top end of the marble platform 102, a defective product tray support 602 is mounted on the surface of the fourth servo module 601, three defective product unloading mechanisms 6 are mounted on the top end of the marble platform 102, and are mainly used for placing defective products of different types, and the fourth servo module 601 carries a defective product tray to transfer and place the defective products at the point-changing position and switches the positions of the upper and lower trays and the material-placing position.

As shown in fig. 15, the recording mechanism 7 includes a camera mounting bracket 701 inside, the camera mounting bracket 701 is connected with the surface of the marble gantry frame 103, one side of the camera mounting bracket 701 is connected with a first connecting plate 702 with a "u" shaped cross section, one side of the first connecting plate 702 is provided with a manual displacement table 703, one side of the manual displacement table 703 is connected with a second connecting plate 704, one side of the second connecting plate 704 is provided with a discharge detection camera 705, one side of the camera mounting bracket 701 is provided with a fourth light supplement source 706, the manual displacement table 703 is of a happy brand and a happy brand, the type is HHQ01, the manual displacement table 703 can adjust the discharge detection camera 705, and the discharge detection camera 705 is used for taking pictures of products on the discharge tray to keep a file for tracing back product information.

The working principle is as follows: the tray 319 with the chip is manually placed at the top end of the first bracket 301, the lifting device works to drive the guide rod connecting plate 314 and the guide rod 313 to move upwards, so that the tray supporting plate 315 at the top end of the guide rod 313 moves to the bottom end of the tray 319 at the lowest end on the first bracket 301, the linear guide rail 303 drives the tray supporting block 304 to move away from one end of the tray 319 at the lowest end through the work of the first air cylinder 302, the lifting device moves downwards to drive the tray 319 to move downwards, after the tray is moved to a specified position, the linear guide rail 303 drives the tray supporting block 304 to move to the surface of the last tray 319 through the work of the first air cylinder 302 and support the tray, the second limiting block 318 presses the tray 319 through the work of the second air cylinder 317, and the tray 319 can be pressed to the surface of the first limiting block 316, the height of the tray 319 on the tray supporting plate 315 can be limited, the first height measuring sensor 210 can be moved to the top end of the chip for height measurement through the operation of the third servo module 309, the positioning camera 207 can be moved to the top end of the chip for photographing through the operation of the first linear module 104, the suction nozzle 204 is driven by the linear rotary actuator 203 to move to the top end of the chip according to the positioning of height measurement and photographing, the chip is sucked up by the suction nozzle 204, the carrier 110 and the chip are moved to the bottom end of the second height measuring sensor 413 for height measurement through the second linear module 108 after the height measurement is completed, the carrier 110 and the chip are moved to the bottom end of the first detection industrial camera 404 after the height measurement is completed, the first detection industrial camera 404 adjusts the height of the first detection industrial camera 404 through the first detection camera servo module 402 according to the height measurement signal, after the chip is moved to a specified height, top surface detection is carried out on the chip in the carrier 110, after the top surface detection is finished, the chip is moved to a specified position through the second linear module 108, the bottom end of the suction nozzle 204 on the other side of the marble gantry frame 103 is driven by the linear rotary actuator 203 to move the suction nozzle 204 to the top end of the chip and suck the chip, the chip is moved to the front end of the second detection industrial camera 408 through the first linear module 104, four side surfaces of the chip can be detected through the rotation and the lifting of the linear rotary actuator 203, after the detection is finished, the chip on the suction nozzle 204 is moved to the top end of the third detection industrial camera 411, so that the bottom end of the chip can be detected, six sides of the chip can be detected, and according to the detection result, the suction nozzle 204, the linear module and the like can move the chip to the defective product blanking mechanism 6 or the tray 319 on the other side of the top end of the marble platform 102.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims

1. The utility model provides a be used for six outward appearance check out test set of high-speed high accuracy of chip, includes marble linear electric motor motion platform (1), its characterized in that:

the marble linear motor motion platform comprises a bottom steel frame inside (1), four vibration reduction air floats (101) are arranged on the periphery of the top end of the bottom steel frame, a marble platform (102) is arranged on the top end of each vibration reduction air float (101), a marble gantry frame (103) is connected to the top end of each marble platform (102), first linear modules (104) are arranged on two sides of each marble gantry frame (103), a first sliding block (105) is arranged on the surface of each first linear module (104), an optical fiber sensor (106) is arranged on one side of each marble gantry frame (103), a carrier linear module marble platform (107) is connected to the top end of each marble platform (102), a second linear module (108) is arranged on the top end of each carrier linear module marble platform (107), a second sliding block (109) is arranged on the surface of each second linear module (108), and a carrier (110) is arranged on the top end of each second sliding block (109), and a taking mechanism (2) is arranged on the surface of each first sliding block (105);

the taking mechanism (2) comprises a first mounting plate (201) inside, a vacuum generator (202) is mounted on one side of the first mounting plate (201), a linear rotation actuator (203) is mounted on one side of the first mounting plate (201), a suction nozzle (204) is mounted at the bottom end of the linear rotation actuator (203), and a positioning camera (207) is mounted on the side portion of the first mounting plate (201);

two tray handling mechanisms (3) are installed on the top of marble platform (102), the surface mounting of carrier straight line module marble platform (107) has detection mechanism (4), positioning mechanism (5) are installed on the top of marble platform (102), and the top of marble platform (102) installs defective products unloading mechanism (6), the surface mounting of marble gantry frame (103) has record mechanism (7).

2. The device for detecting the six-sided appearance of the chip with high speed and high precision according to claim 1, is characterized in that: the first mounting plate (201) is connected with the surface of the first sliding block (105), the optical fiber sensors (106) are symmetrical about the central axis of the marble gantry frame (103), and the top end of the marble platform (102) is provided with a laser sensor.

3. The device for detecting the six-sided appearance of the chip with high speed and high precision according to claim 1, is characterized in that: the tray carrying mechanism (3) comprises two first supports (301), the top ends of the first supports (301) are connected with four first air cylinders (302), one ends of the first air cylinders (302) are connected with linear guide rails (303), one ends of the linear guide rails (303) are connected with tray supporting blocks (304), the top end of the marble platform (102) is connected with two second supports (305), the top end of each second support (305) is connected with four concave blocks (306), the inner wall of each concave block (306) is rotatably connected with a rotating shaft (307), and the surface of each rotating shaft (307) is connected with a tray rotating supporting block (308);

third servo module (309) is installed on the top of marble platform (102), and the surface of third servo module (309) is connected with bottom suspension fagging (310), the top of bottom suspension fagging (310) is connected with support column (311), and the top of support column (311) is connected with backup pad (312), the top activity of going up backup pad (312) has cup jointed four guide bar (313), and the bottom of guide bar (313) is connected with guide bar connecting plate (314), the top of guide bar (313) is connected with tray backup pad (315), and the surface of tray backup pad (315) is connected with two first stopper (316), the surface of tray backup pad (315) is connected with two second cylinder (317), and the one end of second cylinder (317) is connected with second stopper (318), the top of tray backup pad (315) is provided with tray (319).

4. The device for detecting the six-sided appearance of the chip with high speed and high precision according to claim 3, wherein: and the top end of the lower supporting plate (310) is provided with a lifting device.

5. The device for detecting the six-sided appearance of the chip with high speed and high precision according to claim 1, is characterized in that: the detection mechanism (4) comprises a first detection industrial camera (404), a second detection industrial camera (408), a third detection industrial camera (411) and a second height measurement sensor (413).

6. The apparatus for detecting six-sided appearance of chips at high speed and high precision according to claim 1, characterized in that: the positioning mechanism (5) comprises an industrial camera (504) inside.

7. The device for detecting the six-sided appearance of the chip with high speed and high precision according to claim 1, is characterized in that: the interior of defective product unloading mechanism (6) is including fourth servo module (601), and is connected between the top of fourth servo module (601) and marble platform (102), the surface mounting of fourth servo module (601) has defective product tray support (602).

8. The device for detecting the six-sided appearance of the chip with high speed and high precision according to claim 1, is characterized in that: the inside of the recording mechanism (7) comprises a camera mounting support (701), the camera mounting support (701) is connected with the surface of the marble gantry frame (103), one side of the camera mounting support (701) is connected with a first connecting plate (702) with a U-shaped cross section, a manual displacement table (703) is installed on one side of the first connecting plate (702), a second connecting plate (704) is connected to one side of the manual displacement table (703), a discharging detection camera (705) is installed on one side of the second connecting plate (704), and a fourth light supplementing source (706) is installed on one side of the camera mounting support (701).