CN102455303A - Inspection device - Google Patents
Inspection device Download PDFInfo
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- CN102455303A CN102455303A CN 201110332038 CN201110332038A CN102455303A CN 102455303 A CN102455303 A CN 102455303A CN 201110332038 CN201110332038 CN 201110332038 CN 201110332038 A CN201110332038 A CN 201110332038A CN 102455303 A CN102455303 A CN 102455303A
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Abstract
The invention provides an inspection device capable of reducing the shot part of an adsorption part used for absorbing and keeping a substrate during the shooting process of the substrate. The FPD inspection device (1) comprises a detection unit (100) used for performing the prescribed treatment on a substrate (W) served as an examination object, and an overall image obtaining part (13); and a conveying table (12, 20, 21) used for loading and conveying the substrate. The conveying table comprises at least free rollers (121, 201, 211) used for movably supporting the substrate along the conveying direction (D) of the substrate; an absorption part used for absorbing and keeping the substrate, a driving mechanism (30) of a driving part (32) used for supporting the absorption part and enabling the absorption part to extend parallel to a conveying shaft (31). The inspection device also comprises a control part (1b) used for controlling the descending of the absorption part when the absorption part is positioned at the processing position of the overall image obtaining part (13).
Description
Technical field
The present invention relates to a kind of being used for to the for example testing fixture checked such as glass basal plates of flat panel display, semiconductor substrate, printed circuit board (PCB) particularly.
Background technology
In recent years, in the manufacturing of glass substrate, semiconductor substrate, printed circuit board (PCB) (below be called substrate) etc., have and be used for substrate such as is checked at the testing fixture of handling.Testing fixture has and is used to utilize shooting etc. substrate is checked the handling part of processing and to be used for from outside to the handling part conveying substrate or from the delivery section of handling part to outside conveying substrate.
About handling part; It for example is surface irradiation illumination light to substrate; After obtaining general image, use microscope etc. obtains the images such as wiring pattern of the assigned position on the substrate, carries out the inspection of substrate then utilizing line-scan camera (line sensor camera) to accept its reflected light.
Delivery section comprises: float and use plate, it is being used for having a plurality of airports on the conveyor surface of conveying substrate, and through making substrate floating from this airport blow out air; Sucker, it has and is used to adsorb the adsorption section that keeps substrate, and can move along throughput direction.Delivery section moves sucker through with the adsorption section state that the substrate that floats with plate adsorbs maintenance being floated in utilization, thereby carries out the conveying of substrate.In addition, the supporting of substrate also exists to replace floats the situation of using supporting member with plate, and this supporting member utilization can come supporting substrates along the free roller of throughput direction rotation.
But, as above-mentioned delivery section, the center of gravity and the transport (for example with reference to patent documentation 1) of conveying substrate that on the straight line of the roughly center of gravity through substrate, the adsorption section are set and are used to adsorb supporting substrates are disclosed.In this transport, suppress since the torque that weight and transporting velocity produced of the substrate of substrate when carrying be used for conveying substrate, so can stably carry out the conveying of substrate.
Patent documentation 1: TOHKEMY 2007-281285 communique
But; Because the adsorption section of patent documentation 1 disclosed transport is in the centre of gravity place of substrate; Therefore when in handling part, carrying out the shooting of substrate, exist the adsorption section to be taken into and used the such problem of precision reduction of the inspection of the substrate image that is obtained.
Summary of the invention
The present invention In view of the foregoing makes, and its purpose is to provide a kind of testing fixture that absorption keeps the adsorption section of substrate to be taken into that when substrate is made a video recording, can reduce.
In order to address the above problem and to achieve the goal, a kind of testing fixture of the present invention comprises: inspection portion, and it is used for the substrate of inspection object is implemented predetermined process; And transport platform, it is used for carrying puts aforesaid substrate and carries this substrate, it is characterized in that above-mentioned transport platform comprises: support unit, and it can move along the throughput direction of carrying aforesaid substrate at least, and is used for supporting directly or indirectly aforesaid substrate; A plurality of maintaining parts, it keeps aforesaid substrate with the mode that the conveying axis that can the edge extends abreast with above-mentioned throughput direction moves, and can go up and down; And drive division, it is used to make above-mentioned maintaining part to move along above-mentioned conveying axis; Above-mentioned testing fixture also comprises control part, and this control part is positioned at the control that under the situation of processing position of above-mentioned inspection portion this maintaining part is descended in above-mentioned maintaining part.
Testing fixture of the present invention is owing to make the adsorption section separate with substrate under the situation in the adsorption section that is used to keep substrate is in the camera watch region of line-scan camera, therefore plays and when substrate is made a video recording, can reduce adsorption section such effect that is taken into.
Description of drawings
Fig. 1 is the vertical view of the structure of flat-panel monitor (FPD) testing fixture that schematically shows embodiment 1 of the present invention.
Fig. 2 is the side view of structure that schematically shows the FPD testing fixture of embodiment 1 of the present invention.
Fig. 3 is the partial sectional view of the A-A section of expression FPD testing fixture shown in Figure 1.
Fig. 4 is the synoptic diagram that the substrate of the FPD testing fixture of expression embodiment 1 of the present invention is carried.
Fig. 5 is the synoptic diagram that the substrate of the FPD testing fixture of expression embodiment 1 of the present invention is carried.
Fig. 6 is the synoptic diagram that the substrate of the FPD testing fixture of expression embodiment 1 of the present invention is carried.
Fig. 7 is the synoptic diagram that the substrate of the FPD testing fixture of expression embodiment 1 of the present invention is carried.
Fig. 8 is the synoptic diagram of variation of the FPD testing fixture of expression this embodiment 1.
Fig. 9 is the synoptic diagram of variation of the FPD testing fixture of expression this embodiment 1.
Figure 10 is the synoptic diagram that the substrate of the FPD testing fixture of expression embodiment 2 of the present invention is carried.
Figure 11 is the synoptic diagram that the substrate of the FPD testing fixture of expression embodiment 2 of the present invention is carried.
Figure 12 is the synoptic diagram that the substrate of the FPD testing fixture of expression embodiment 3 of the present invention is carried.
Figure 13 is the synoptic diagram that the substrate of the FPD testing fixture of expression embodiment 3 of the present invention is carried.
Figure 14 is the synoptic diagram that the substrate of the FPD testing fixture of expression embodiment 3 of the present invention is carried.
Figure 15 is the synoptic diagram that the substrate of the FPD testing fixture of expression embodiment 3 of the present invention is carried.
Figure 16 is the vertical view of structure that schematically shows the FPD testing fixture of embodiment 4 of the present invention.
Embodiment
Below, the embodiment that is used for embodiment of the present invention at length is described in conjunction with accompanying drawing.In addition, the invention is not restricted to following embodiment.In addition, in following explanation, each figure of institute's reference just roughly expresses shape, size and position relation with the degree that can understand content of the present invention.That is, the invention is not restricted to illustrative shape, size and position relation in each figure.
(embodiment 1)
The testing fixture of embodiment 1 of the present invention at first, at length is described with reference to accompanying drawing.In addition, in following explanation, be that example describes with the testing fixture of substrate.Testing fixture both can be in line style, also can be offline model.
Fig. 1 is the vertical view of schematic configuration of flat-panel monitor (FPD) testing fixture of expression this embodiment 1.Fig. 2 is the side view of structure that schematically shows the FPD testing fixture of this embodiment 1.As shown in Figure 1, FPD testing fixture 1 comprises: the 1a of processing substrate portion, and it is used to detect the defective that is transferred substrate W that come, rectangular; And control part 1b, it is used to carry out the whole control of the 1a of processing substrate portion.In addition, the 1a of processing substrate portion comprises: gantry objective table (gantry stage) 10, and it is used to keep inspection unit 100, and this inspection unit 100 is used to detect the defective of substrate W; Transport platform 12,20,21, it is used for conveying substrate W; And general image acquisition portion 13, it is used to obtain the general image of substrate W.
Gantry objective table 10, transport platform 12,20,21 and general image acquisition portion 13 for example are fixed on Fig. 1, this pallet 11 shown in 2.Pallet 11 is made up of marble that will be for example block, the higher member of vibration strengths such as framework that steel combine.In addition, at pallet 11 be provided with between the face (for example floor) shock absorption mechanism 14 that is made up of for example spring, oleo damper etc. is set.Prevent the vibration of gantry objective table 10, transport platform 12,20,21 and general image acquisition portion 13 thus further.
In addition,, can keep comprising the zone of the centre of gravity place of the substrate W that is moved into transport platform, carry thereby can carry out stable substrate through driving mechanism 30 being arranged at the central authorities of the Width of transport platform.In addition; As long as can make conveying axis 31 through in the image pickup scope of line-scan camera 13B and/or inspection unit 100 at least not wounded substrate W carry on ground; Then the equipping position with respect to the Width of transport platform of driving mechanism 30 can be position arbitrarily, also can be provided with a plurality of driving mechanisms 30.
Fig. 3 is the partial sectional view of the A-A section of expression FPD testing fixture shown in Figure 1.In addition, in Fig. 3, express the situation of central authorities that inspection unit 100 is positioned at the Width of transport platform 12.As shown in Figure 3, sucker 34A～34C comprises respectively: adsorption section 34a (maintaining part), and it is used to utilize air-breathing absorption of not shown pump to keep substrate W; And lifting unit 34b, it is used for liftably supporting adsorption section 34a along vertical.In addition, lifting unit 34b is under the control of control part 1b and utilize pneumatic cylinder, electro-motor etc. that adsorption section 34a is gone up and down.
Each limit of detent mechanism 40,41 and substrate W is provided with 1～2 accordingly; Each extension 40b, 41b extend respectively and make the pairing limit of pairing limit butt and the clamping substrate W of abutting member 40a, 41a and substrate W, thereby carry out the location of substrate W.For example, detent mechanism 40 disposes detent mechanism 40A～40C respectively with the mode of the opposite side among the clamping substrate W.In addition, likewise in detent mechanism 41, also dispose detent mechanism 41A～41C respectively with the mode of other opposite side of clamping substrate W.After substrate W was positioned, if utilize sucker 34 absorption to keep substrate W, then detent mechanism 40,41 was removed the clamp position of substrate W and is kept out of the way the below of transport platform 20.
As shown in Figure 3, general image acquisition portion 13 comprises: illuminating member 13A, and it is used for substrate W is thrown light on; And line-scan camera 13B, it is used to accept from the reflected light of the illumination light of illuminating member 13A and obtains the general image of substrate W.Line-scan camera 13B is provided in shown in the dotted line among Fig. 3 the catoptrical position that the such illumination light that can accept from illuminating member 13A is formed by substrate W reflection.
In addition, inspection unit 100 replaceable one-tenth: for example be used for reparation unit, the image unit that is used to observe, preserve image that defect part to substrate W carries out that laser radiation reparation, coating are revised etc., be used for implementing other processing units of processing of the measuring units such as dimensional measurement, film thickness measuring, color measuring etc. of wiring etc. in the position of regulation.That is, processing unit comprises inspection unit, repairs unit, image unit, exposing unit, measuring unit etc.In addition, the FPD testing fixture of this embodiment also comprises by above-mentioned processing unit and substrate W is carried out the structure that each is handled being used for carrying on the platform put substrate W.
In addition, as long as just can form inner space (dust free room), so be preferred because FPD testing fixture 1 comprises the shell that is used to surround inspection space PR1 and conveying space TR1, TR2.This dust free room is the space of moving into mouthful, taking out of mouthful and be sealed the pipeline of bottom except substrate.Shell has the FFU that is used for sending into to the inner space clean air (below be called pure air) above the inspection unit 100.
FFU is used to see off and has removed the for example pure air of dust such as particulate.Its result particularly makes near inspection unit 100 reaching check that line L1 periphery (inspection space PR1) becomes the state of the less cleaning of dust.In addition, near inspection unit 100, reach inspection line L1 periphery and concentrate the air of the cleaning of seeing off in dust free room, to form katabatic drainage (down flow) afterwards, discharge from exhausr port.
In above-mentioned FPD testing fixture 1; For the substrate W that moves into transport platform 20 from the outside; Under the control of control part 1b, by the carrying after a seated position adjusts of 40 couples of substrate W of detent mechanism, utilize sucker 34 absorption to keep substrate W and carry along throughput direction D; Obtain general images by general image acquisition portion 13, and utilize inspection unit 100 to carry out the defect inspection etc. of substrate W.At this moment, sucker 34 makes substrate W get back to transport platform 20 once more making substrate W through after the general image acquisition portion 13, and moves and utilize inspection unit 100 to carry out defect inspection to throughput direction D once more.In addition; From the distance of general image acquisition portion 13 to inspection unit 100 with respect to the sufficiently long situation of substrate W under; Utilizing after whole acquisition portion 13 obtains general images, can not make substrate W get back to transport platform 20 and just utilize inspection unit 100 to carry out defect inspection.
Fig. 4～7th, the synoptic diagram that the substrate of the FPD testing fixture of expression this embodiment 1 is carried.At first, as shown in Figure 4, if drive division 32 drives (direction of arrow among the figure), then adsorb the substrate W that remains in sucker 34 and move to the direction of line-scan camera 13B.Here, conveying axis 31 has linear scale 31a, and this linear scale 31a has along the coordinate information of conveying axis 31.In addition, drive division 32 has the reading part 32a that is used for reading from linear scale 31a coordinate information.
As shown in Figure 5, when sucker 34A reached the camera watch region of line-scan camera 13B, reading part 32a read the coordinate of this position from linear scale 31a, and to control part 1b output coordinate information.Control part 1b judges that from the coordinate information that obtained sucker 34A is whether in camera watch region.If control part 1b is judged as sucker 34A and is in the camera watch region, then control part 1b drives lifting unit 34b and makes pairing sucker 34 declines (Fig. 6).At this moment, control part 1b descends adsorption section 34a, and the depth of focus that is in than is used to the line-scan camera 13B that takes substrate W up to the upper end of adsorption section 34a is at least leaned on the position of below.
Afterwards, the mobile interlock of reading part 32a and drive division 32 and read coordinate information from linear scale 31a, and export to control part 1b successively.Control part 1b repeats to judge from the coordinate information that is obtained whether sucker is in the judgement in the camera watch region, has got under the situation in the camera watch region at sucker 34B as Fig. 7, the adsorption section 34a of sucker 34B is descended.In addition, also utilize identical processing that the adsorption section is descended to sucker 34C.
As above-mentioned embodiment 1; Under the situation in the adsorption section 34a that is used to keep substrate W is in the camera watch region of line-scan camera 13B; Owing to be made as adsorption section 34a is left from substrate, therefore when substrate is made a video recording, can reduce the adsorption section and be taken into.In addition, even because the adsorption section is separated with substrate, can keep substrate by other adsorption sections absorption, therefore can and carry the maintenance of substrate does not have influence ground and handle yet.In addition, through being descended, the adsorption section prevents that substrate at the inspection location bending, therefore also can for example be provided with anti-bending roller in the position that does not hinder inspection between the tabular component.
In addition, the situation with 3 suckers has been described in this embodiment 1, as long as but can carry out maintenance, the conveying of substrate, then can have 2, also can have more than 4.In addition, for the caused vibration of the decline that prevents the adsorption section, also can make to rise on the remaining adsorption section or decline.
(variation)
Fig. 8, the 9th, the synoptic diagram of the variation of the FPD testing fixture of expression this embodiment 1.Fig. 8,9 corresponding with the synoptic diagram shown in Fig. 4 etc.Driving mechanism 30a comprises adjacent respectively 3 groups of sucker 341A, 342A, 341B, 342B, 341C, the 342C that sets.Absorption keeps and the mechanism of up-down is undertaken by adsorption section and lifting unit with embodiment 1 identically.As shown in Figure 8, for utilizing each sucker 341A, 342A, 341B, 342B, 341C, 342C absorption keeps and carries out substrate conveying W, is read the coordinate information of linear scale 31a and is exported to control part 1b by reading part 32a.
At this moment, as shown in Figure 9, if sucker 341A gets into the camera watch region of line-scan camera 13B, then control part 1b is judged as sucker 341A according to the coordinate information from reading part 32a output and is in camera watch region, thereby the adsorption section 34a of sucker 341A is descended.Afterwards, also utilize control part 1b to carry out identical judgement, adsorption section 34a is descended each sucker 342A, 341B, 342B, 341C, 342C.
Because the driving mechanism 30a of the variation of above-mentioned embodiment 1 is adjacent to be provided with sucker, therefore can reduces the adsorption section substrate is being carried out being taken in the shooting process, and compare with embodiment 1 and can more stably carry out the conveying of substrate.
(embodiment 2)
Figure 10, the 11st representes the synoptic diagram that the substrate of the FPD testing fixture of embodiment 2 of the present invention is carried.In the driving mechanism 30b of embodiment 2; Corresponding position is provided with position-detection sensor (position detection component) below the vertical of in conveying axis 31 and camera watch region line-scan camera 13B, and with the corresponding position of sucker 34A～34C detected object is set at supporting member 33.In addition, to the formation mark identical Reference numeral identical with the formation shown in Fig. 1 etc.
Shown in figure 10, position-detection sensor for example uses that magnetic proximity sensor 31b realizes, detects as any one and to control part 1b output testing result among magnetic material 33a～33c such as the employed magnet of detected object.Shown in figure 11, if control part 1b then makes corresponding sucker 34A descend from the testing result that magnetic proximity sensor 31b receives magnetic detection.
Above-mentioned embodiment 2 is identical with above-mentioned embodiment 1, under the situation in the adsorption section that is used to keep substrate is in the camera watch region of line-scan camera, the adsorption section is separated with substrate, therefore can reduce the adsorption section and when substrate is made a video recording, be taken into.
In addition; In this embodiment 2; Also can be following structure: supporting member has the Lighting Division (detected object) that is provided with and is used for sending towards conveying axis 31 sides light with each sucker accordingly, and conveying axis 31 has the photoelectric sensor (position detection component) of the light that is used to detect this Lighting Division.
(embodiment 3)
The synoptic diagram that the substrate of the FPD testing fixture of embodiment 3 of the present invention is carried is represented in Figure 12～15th.In the driving mechanism 30c of embodiment 3, be not provided for detecting the mechanism of the position of sucker, but the position of obtaining sucker according to the actuating speed and the driving time of drive division by control part, thereby the control that descends.In addition, to the formation mark identical Reference numeral identical with the formation shown in Fig. 1 etc.
At first, shown in figure 12, in the driving starting position of drive division 32, for example the end with supporting member 33 is a benchmark in this embodiment 3, and establishing this position is time T 0.Afterwards, when having passed through time T 1 when driving drive division 32, because in the camera watch region of sucker 34A entering line-scan camera 13B, so control part 1b makes the adsorption section 34a decline (Figure 13) of sucker 34A.Being set under the situation of adsorbing substrate W in rising once more according to the translational speed of drive division 32 fall time of the adsorption section 34a of this moment makes adsorption section 34a can not be photographed the time in the image.
Then, shown in figure 14, when elapsed time T2, the adsorption section 34a of sucker 34B is descended.In addition, shown in figure 15, when elapsed time T3, the adsorption section 34a of sucker 34C is descended.So, so that each sucker 34A～34C gets into the corresponding mode of regulation driving time of interior opportunity of the camera watch region of line-scan camera 13B and drive division 32 each adsorption section is descended.In addition, because drive division 32 is utilizing known speed program to move the condition of becoming, but, therefore more preferably move with constant speed in order to control easily.
Above-mentioned embodiment 3 is identical with above-mentioned embodiment 1; Under the situation in the adsorption section that is used to keep substrate is in the camera watch region of line-scan camera; The adsorption section is separated with substrate, therefore can reduce the adsorption section and when substrate is made a video recording, be taken into, and owing to need not to be provided for the mechanism of detection position; Therefore apparatus structure is simply changed, thereby can be shortened the processing time.
In addition, in above-mentioned embodiment 2,3, can be suitable for the structure of sucker of the variation of embodiment 1.
(embodiment 4)
Figure 16 is the vertical view of structure that schematically shows the FPD testing fixture of embodiment 4 of the present invention.Shown in figure 16, FPD testing fixture 2 comprises: the 2a of processing substrate portion, and it is used to detect the defective that is transferred substrate W that come, rectangular; And control part 2, it is used to carry out the whole control of the 2a of processing substrate portion.In embodiment 4, utilize air as support unit to make to carry and place the substrate W that floats transport platform 50～52 to float, thereby to eliminate with the friction of substrate W and the mode of the damage of the substrate W that causes of preventing to rub is carried.In addition, establish the set zones such as gantry objective table 10 with the inspection unit 100 that is used on inspection line L2, moving with embodiment 1 identically and be inspection space PR2 (inspection portion), the zone of establishing beyond the inspection space PR2 is conveying space TR3, TR4.In addition, to the formation mark identical Reference numeral identical with the formation shown in Fig. 1 etc.
For example, floating transport platform 51 has respectively to float with the plate edge direction vertical with throughput direction D and is arranged in the structure that the curtain shape forms.In respectively floating, be provided for utilizing the air supplied with from air supply unit 60 with plate and above vertical a plurality of holes 511 that blow out of blow out air.In addition, in floating transport platform 50,52, respectively float with plate and also have the hole of blowing out 501,521.
In addition, the central authorities at the Width that floats transport platform 50～52 are provided with above-mentioned driving mechanism 30.Utilization keeps substrate W with embodiment 1～3 identical formation absorption and carries, and the adsorption section is descended, thereby prevents that the adsorption section is taken into when substrate is made a video recording.In addition, float transport platform 50 and be supported on shock absorption mechanism shown in Figure 2 14.
Above-mentioned embodiment 4 is identical with above-mentioned embodiment 1; Under the situation in the adsorption section 34a that is used to keep substrate W is in the camera watch region of line-scan camera 13B; The adsorption section is separated with substrate; Therefore can reduce the adsorption section and when substrate is made a video recording, be taken into, and owing to utilize air to come supporting substrates, thereby therefore can eliminate the damage that the friction force that substrate is applied prevents substrate more reliably.
In addition, in above-mentioned embodiment 1～4, in inspection space PR 1, PR2, inspection unit 100 (gantry objective table 10) is not set, but the structure of general image acquisition portion 13 is only arranged, go for being used for obtaining the testing fixture of the general image of substrate yet.In addition, driving mechanism 30 so long as can control respectively then also can be provided with a plurality of.
As stated, when obtaining the image of substrate, to reduce other members this point that is taken into be useful to testing fixture of the present invention.
Description of reference numerals
1,2, FDP testing fixture; 1a, 2a, processing substrate portion; 1b, 2b, control part; 10, gantry objective table; 11, pallet; 12,20,21, transport platform; 13, general image acquisition portion; 13A, illuminating member; 13B, line-scan camera; 14, shock absorption mechanism; 30,30a, 30b, 30c, driving mechanism; 31, conveying axis; 32, drive division; 33, supporting member; 34,34A～34C, sucker; 34a, adsorption section; 34b, lifting unit; 40,41, detent mechanism; 50～52, float transport platform; 60, air supply unit; 100, inspection unit; 101, microscope; 121,201,211, free roller; 501,511,521, blow out the hole; L1, L2, inspection line; PR1, PR2, inspection space; TR1～TR4, conveying space; W, substrate.
Claims (9)
1. testing fixture, it comprises: inspection portion, it is used for the substrate of inspection object is implemented predetermined process; And transport platform, it is used for carrying puts aforesaid substrate and carries this substrate, it is characterized in that,
Above-mentioned transport platform comprises:
Support unit, it can move along the throughput direction of carrying aforesaid substrate at least, and is used for supporting directly or indirectly aforesaid substrate;
A plurality of maintaining parts, it keeps aforesaid substrate with the mode that the conveying axis that can the edge extends abreast with above-mentioned throughput direction moves, and can go up and down; And
Drive division, it is used to make above-mentioned maintaining part to move along above-mentioned conveying axis;
Above-mentioned testing fixture also comprises control part, and this control part is positioned at the control that under the situation of processing position of above-mentioned inspection portion this maintaining part is descended in above-mentioned maintaining part.
2. testing fixture according to claim 1 is characterized in that,
Above-mentioned testing fixture also comprises:
Linear scale, it has the coordinate information along above-mentioned conveying axis; And
Reading part, it is used for reading above-mentioned coordinate information from above-mentioned linear scale;
Above-mentioned control part descends this maintaining part according to the coordinate information that above-mentioned reading part read.
3. testing fixture according to claim 1 is characterized in that,
Above-mentioned testing fixture also comprises:
Position detection component, it is arranged at and corresponding position, above-mentioned processing position; And
The detected object of above-mentioned position detection component, itself and each maintaining part are provided with accordingly;
Above-mentioned control part detects the such information of above-mentioned detected object according to above-mentioned position detection component descends this maintaining part.
4. testing fixture according to claim 1 is characterized in that,
Above-mentioned control part descends this maintaining part according to the actuating speed of above-mentioned drive division and driving time on the opportunity of regulation.
5. testing fixture according to claim 1 is characterized in that,
Above-mentioned inspection portion has and is used for image pickup part that aforesaid substrate is made a video recording,
Above-mentioned control part makes above-mentioned maintaining part drop to the position of leaning on the below than the depth of focus of above-mentioned image pickup part.
6. testing fixture according to claim 1 is characterized in that,
Above-mentioned conveying axis is at least through above-mentioned processing position.
7. testing fixture according to claim 1 is characterized in that,
Above-mentioned drive division is arranged at the central authorities of the Width of above-mentioned transport platform.
8. testing fixture according to claim 1 is characterized in that,
Above-mentioned support unit has can be along a plurality of free roller of above-mentioned throughput direction rotation.
9. testing fixture according to claim 1 is characterized in that,
Above-mentioned support unit have air that utilization supplies with from the air supply unit and towards the top of above-mentioned transport platform a plurality of holes that blow out of blow out air.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-241312 | 2010-10-27 | ||
| JP2010241312A JP2012094711A (en) | 2010-10-27 | 2010-10-27 | Inspection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102455303A true CN102455303A (en) | 2012-05-16 |
Family
ID=46038725
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120417764 Expired - Fee Related CN202363426U (en) | 2010-10-27 | 2011-10-27 | Inspection device |
| CN 201110332038 Pending CN102455303A (en) | 2010-10-27 | 2011-10-27 | Inspection device |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120417764 Expired - Fee Related CN202363426U (en) | 2010-10-27 | 2011-10-27 | Inspection device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2012094711A (en) |
| CN (2) | CN202363426U (en) |
| TW (1) | TW201230237A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014101310A1 (en) * | 2012-12-27 | 2014-07-03 | 深圳市华星光电技术有限公司 | Laser inspection machine for mother glass and mother glass inspection method |
| US9140655B2 (en) | 2012-12-27 | 2015-09-22 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Mother glass inspection device and mother glass inspection method |
| CN106034194A (en) * | 2014-10-31 | 2016-10-19 | 韩华泰科株式会社 | Line scan apparatus |
| CN108226166A (en) * | 2017-12-29 | 2018-06-29 | 信利（惠州）智能显示有限公司 | A kind of automatic optics inspection scan method |
| CN109313207A (en) * | 2016-05-25 | 2019-02-05 | 环球生物研究株式会社 | Sample pretreating measuring system |
| CN113125342A (en) * | 2019-12-31 | 2021-07-16 | 由田新技股份有限公司 | Transfer device, optical inspection apparatus, and optical inspection method |
| CN113829760A (en) * | 2020-06-24 | 2021-12-24 | 合肥欣奕华智能机器有限公司 | Substrate operation platform |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7148289B2 (en) * | 2018-06-20 | 2022-10-05 | 芝浦メカトロニクス株式会社 | Substrate detection device and substrate processing device |
-
2010
- 2010-10-27 JP JP2010241312A patent/JP2012094711A/en not_active Withdrawn
-
2011
- 2011-10-26 TW TW100138939A patent/TW201230237A/en unknown
- 2011-10-27 CN CN 201120417764 patent/CN202363426U/en not_active Expired - Fee Related
- 2011-10-27 CN CN 201110332038 patent/CN102455303A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014101310A1 (en) * | 2012-12-27 | 2014-07-03 | 深圳市华星光电技术有限公司 | Laser inspection machine for mother glass and mother glass inspection method |
| US9140655B2 (en) | 2012-12-27 | 2015-09-22 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Mother glass inspection device and mother glass inspection method |
| CN106034194A (en) * | 2014-10-31 | 2016-10-19 | 韩华泰科株式会社 | Line scan apparatus |
| CN109313207A (en) * | 2016-05-25 | 2019-02-05 | 环球生物研究株式会社 | Sample pretreating measuring system |
| US11204358B2 (en) | 2016-05-25 | 2021-12-21 | Universal Bio Research Co., Ltd. | Specimen processing and measuring system |
| CN109313207B (en) * | 2016-05-25 | 2022-07-19 | 环球生物研究株式会社 | Sample processing and measuring system |
| CN108226166A (en) * | 2017-12-29 | 2018-06-29 | 信利（惠州）智能显示有限公司 | A kind of automatic optics inspection scan method |
| CN113125342A (en) * | 2019-12-31 | 2021-07-16 | 由田新技股份有限公司 | Transfer device, optical inspection apparatus, and optical inspection method |
| CN113829760A (en) * | 2020-06-24 | 2021-12-24 | 合肥欣奕华智能机器有限公司 | Substrate operation platform |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012094711A (en) | 2012-05-17 |
| TW201230237A (en) | 2012-07-16 |
| CN202363426U (en) | 2012-08-01 |
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Application publication date: 20120516 |