JP5344545B2 - Substrate holding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate holding device capable of performing stable measurement simply. <P>SOLUTION: This substrate holding device comprises a place-on stand 12 on which the end of a sample 50 is placed, first and second attraction parts 13a, 13b which are provided to the place-on stand 12 and attract the sample 50, and an attraction stand 18 which is movably provided to the lower side of the sample 50 and has a jet port 46 jetting gas to the sample 50, and the device comprises switch parts 15a, 15b for switching ON/OFF of the first and second attraction parts 13a, 13b. The switch parts 15a, 15b turn on one of the first and second attraction parts 13a, 13b and turn off the other according to the position of the attraction stand 18 in relation to the sample 50. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention relates to a substrate holding device, and more particularly to a substrate holding device that sucks and holds a substrate.

  In a manufacturing process of a liquid crystal display device or the like, an inspection is performed by irradiating a transparent substrate with illumination light. In such an inspection process, there are a case where transmitted light transmitted through the sample is used and a case where reflected light reflected by the sample is used. Examples of the transparent substrate include a color filter substrate, a liquid crystal panel, and a TFT array substrate. In recent years, the substrate size of these substrates has increased.

  In a transmission type inspection apparatus using transmitted light, a substrate to be inspected is placed on a stage. Thereby, it can hold | maintain in the stable state. With the substrate placed on the stage, light from the light source is irradiated from the front surface side or the back surface side of the substrate. And the light which permeate | transmitted the board | substrate and the stage is detected with the detector of CCD or a photodiode. Therefore, a transparent stage that transmits light from a light source is used as a stage used in a transmission type defect inspection apparatus (Patent Document 1).

  For example, a detector is disposed on the upper part of the substrate, and an illumination light source is disposed on the lower part of the transparent stage. Thereby, a transmission image of the substrate can be taken. A glass plate or the like is usually used for such a transparent stage. In order to accurately detect minute defects on the substrate, it is desirable that the substrate does not vibrate. That is, when the substrate vibrates, it becomes impossible to perform stable measurement. Along with the increase in size of the substrate, the transparent stage for mounting it also increases in size. Therefore, vibration suppression measures are more important. However, there is a limit to the thickness of the transparent glass stage, and it is difficult to make the thickness above a certain level.

Further, a stage device having a damping rod is disclosed (Patent Document 2). The damping rod is provided on the lower side of the stage. Furthermore, an inspection apparatus in which a unit for adsorbing a substrate is provided under the substrate is disclosed (Patent Document 3). In this inspection apparatus, a unit is provided under the glass substrate. The unit is provided with an adsorption port and a jet port. The vibration can be reduced by adsorbing the substrate at the adsorption port. When the substrate is moved, air is ejected from the ejection port of the unit. And the light-receiving part is arrange | positioned between two units.
JP 2001-148625 A (paragraph number 0011) JP 2006-337542 A JP 2003-279495 A

  However, in the stage apparatus of patent document 2, it is necessary to raise / lower a damping rod according to the movement of a head. Therefore, it is necessary to control the drive mechanism that raises and lowers the damping rod. Moreover, in the inspection apparatus of patent document 3, in order to inspect the whole board | substrate, the board | substrate is moved. When the substrate is moved, the inspection apparatus becomes large. Thus, in these apparatuses, the apparatus becomes complicated in order to perform transmitted illumination. Accordingly, there is a problem in that an apparatus using transmitted illumination cannot easily perform stable measurement.

  The present invention has been made to solve such problems, and an object of the present invention is to provide a substrate holding apparatus that can easily perform stable measurement.

  A substrate holding device according to a first aspect of the present invention includes a mounting table on which an end portion of a substrate is mounted, a first and a second suction unit that are provided on the mounting table and suck the substrate, A movable base provided movably on the lower side of the substrate and having a jet port for jetting gas to the substrate, and a switching unit for switching ON / OFF of the first and second suction units; The switching unit turns on one of the first and second suction units and turns off the other in accordance with the position of the movable base with respect to the substrate. As a result, when the movable base moves, the portion of the substrate can be reliably lifted. Since the height of the mounting table and the movable table can be made closer, the flatness of the substrate can be improved. Therefore, stable measurement and processing are possible.

  A substrate holding apparatus according to a second aspect of the present invention is the substrate holding apparatus described above, wherein the mounting table mounts end portions on both sides of the substrate, and the movable table is between the mounting tables on both sides. Each of the mounting tables provided on both sides of the substrate is provided with the first suction portions at both ends in the first direction, so as to pass through the first direction. The second suction part is provided between the first suction parts provided at both ends, and when the movable base moves to a position corresponding to the first suction part, the first suction part is provided. When the suction part is turned off, the second suction part is turned on, and the movable base is moved to a position corresponding to the first suction part, the first suction part is turned off and the first suction part is turned off. The second suction portion is turned on. As a result, when the movable base moves, the portion of the substrate can be reliably lifted. Since the height of the mounting table and the movable table can be made closer, the flatness of the substrate can be improved. Therefore, stable measurement and processing are possible.

  A substrate holding device according to a third aspect of the present invention is the substrate holding device described above, wherein a boundary region between a position corresponding to the first suction portion and a position corresponding to the second suction portion is: The first and second suction portions are turned on. Thereby, since the substrate does not move even when passing through the boundary region, stable measurement is possible.

  ADVANTAGE OF THE INVENTION According to this invention, the board | substrate holding apparatus which can perform the stable measurement simply can be provided.

Embodiment 1 FIG.
The measurement apparatus according to the present embodiment is an optical measurement apparatus that performs measurement using transmitted light that has passed through a sample. The measuring device measures a pattern or a defect provided in the sample. Specifically, the pattern shape, pattern width, defect position, defect size, defect shape, and the like are measured. Therefore, a microscope or an inspection apparatus that uses transmitted light can be used as the measurement apparatus according to this embodiment.

  A measuring apparatus according to the present invention will be described with reference to FIGS. FIG. 1 is a top view schematically showing the configuration of the measuring apparatus. FIG. 2 is a perspective view schematically showing a configuration of a stage apparatus used in the measuring apparatus. As shown in FIG. 1, the measuring apparatus 100 includes a surface plate 11, a mounting table 12, a guide rail 14, a support member 16, a suction table 18, an X rail 21, a measuring head 22, a Y rail 23, and a contact portion 48. Have. The measuring apparatus 100 is an inspection apparatus for inspecting the sample 50. As shown in FIG. 2, the stage apparatus 10 for holding the sample 50 includes a surface plate 11, a mounting table 12, a guide rail 14, a support member 16, and an adsorption table 18.

  Here, the sample 50 will be described as a color filter substrate used in a display device such as a liquid crystal display device. The color filter substrate includes three colored layers of R, G, and B and a light shielding layer provided between the colored layers. In the measuring apparatus 100 according to the present embodiment, an adsorption table 18 is provided under the sample 50. And the sample 50 is illuminated from the back side by the illumination light source 41 provided in the adsorption stand 18. A measurement head 22 is disposed on the sample 50. The light transmitted through the sample 50 is received by the photodetector provided in the measuring head 22. The detector is, for example, a CCD camera. Thereby, an image of the sample 50 can be taken. Thereby, the pattern shape, pattern width, etc. of the sample 50 are measured. Furthermore, the size and position of the defect can be measured by comparing with a normal pattern. Then, an inspection is performed as to whether or not the sample 50 is normal.

  As shown in FIGS. 1 and 2, the horizontal plane is the XY plane. Further, the X direction and the Y direction are orthogonal to each other. The sample 50 is disposed substantially horizontally on the XY plane. Further, let the vertical direction be the Z direction. The upper surface of the surface plate 11 is parallel to the XY plane. The surface plate 11 is installed and fixed with respect to the floor surface, for example. Further, the surface plate 11 may be installed via a damper that absorbs vibration.

  Y rails 23 are provided at both ends of the surface plate 11. The Y rail 23 is along the Y direction. That is, the longitudinal direction of the Y rail 23 is parallel to the Y direction. An X rail 21 is provided on the two Y rails 23. The X rail 21 is provided along the X direction so as to straddle the sample 50. The longitudinal direction of the X rail 21 is parallel to the X direction. A measuring head 22 is attached to the X rail 21. The measuring head 22 is provided so as to be movable with respect to the X rail 21. Thereby, the measurement head 22 moves along the X direction. The measurement head 22 is provided with a photodetector such as a camera, a lens, and the like. The measuring head 22 receives light from an illumination light source 41 of the suction table 18 described later. Further, an epi-illumination optical system may be disposed on the measurement head 22. Thereby, both transmitted illumination and epi-illumination can be utilized. Furthermore, a laser light source for laser processing may be provided in the measurement head 22. As a result, the defective portion can be corrected.

  Further, the X rail 21 is provided so as to be movable with respect to the Y rail 23. As a result, the X rail 21 moves in the Y direction. Accordingly, the measurement head 22 moves on the sample 50 in the XY directions. That is, the measurement head 22 can be moved two-dimensionally by moving the measurement head 22 in the X direction and moving the X rail 21 to which the measurement head 22 is attached in the Y direction. Thereby, it can measure with respect to the sample 50 whole surface. Moreover, since the footprint of the measuring apparatus 100 can be reduced, productivity can be improved. The measurement head 22 and the X rail 21 can be driven by a known method such as an AC servo motor.

  Further, two mounting tables 12 are fixed on the surface plate 11. The sample 50 is placed on the mounting table 12. The mounting table 12 is provided along the Y direction. That is, the longitudinal direction of the mounting table 12 is parallel to the Y direction. The mounting table 12 is disposed between the two Y rails 23. The mounting table 12 is separated by a distance corresponding to the size of the sample 50. Therefore, both ends of the sample 50 are mounted on the mounting table 12. That is, the upper surface of the mounting table 12 is a mounting surface on which the sample 50 is mounted.

  On the surface plate 11, two guide rails 14 are fixed as shown in FIG. In FIG. 2, one guide rail 14 is omitted from illustration. The guide rail 14 is provided along the Y direction. That is, the longitudinal direction of the guide rail 14 is parallel to the Y direction. The guide rail 14 is disposed between the two mounting tables 12. A sample 50 is disposed on the guide rail 14. Therefore, the guide rail 14 is lower than the mounting table 12. That is, the upper surface of the guide rail 14 is lower than the mounting surface of the mounting table 12. Thereby, a gap is provided between the guide rail 14 and the sample 50.

  On the guide rail 14, a suction stand 18 is movably supported. For example, the suction stand 18 is attached to the guide rail 14 by a linear guide or the like. Here, the suction table 18 is slidably supported by the two guide rails 14. Thereby, the adsorption stand 18 can be supported horizontally. The suction stand 18 moves in the Y direction along the guide rail 14. Thereby, the adsorption stand 18 can be moved to the position where illumination is performed.

  The suction stand 18 is, for example, a rectangular flat plate member. The suction stand 18 is provided along the X direction. That is, the longitudinal direction of the suction stand 18 is parallel to the X direction. The suction table 18 is disposed between the two mounting tables 12. The suction table 18 has substantially the same length as the interval between the two mounting tables 12. Accordingly, the suction table 18 is provided from the vicinity of the inner side of one mounting table 12 to the vicinity of the inner side of the other mounting table 12. That is, the suction stand 18 includes the entire inspection range in the X direction. The suction stand 18 slides in the Y direction along the guide rail 14. That is, the guide rail 14 becomes a slide rail for moving the suction table 18. The suction table 18 can be driven using a known method such as an AC servo motor.

  The suction stand 18 is provided with an illumination light source 41. The illumination light source 41 is, for example, a linear light source that emits linear light. Here, illumination light having a linear spot parallel to the X direction is emitted from the illumination light source 41. Thereby, the whole inspection range can be illuminated in the X direction. A sample 50 is placed on the adsorption table 18. The suction stand 18 is provided with a suction port for sucking the sample 50. Measurement is performed with the sample 50 adsorbed. Thereby, vibration can be reduced and stable measurement can be performed.

  The configuration of the suction table 18 will be described with reference to FIG. FIG. 3 is a side view showing the configuration of the suction table 18. FIG. 3A shows a state where the suction table 18 is moving, and FIG. 3B shows a state where the suction table 18 is stopped.

  The suction table 18 is provided with an illumination light source 41 that is a linear light source. The illumination light source 41 is disposed substantially at the center of the suction table 18 in the Y direction. The illumination light source 41 includes an LED (Light Emitting Diode) 42 and a diffusion plate 43. The LED 42 and the diffusion plate 43 are embedded in a recess provided in the suction table 18. Specifically, a recess is formed in the approximate center of the suction table 18 in the Y direction. The recess is formed along the X direction. This recessed portion is a recessed groove provided in substantially the entire suction table 18 in the X direction. And LED42 which is a point light source is arrange | positioned in the recessed part. Here, a plurality of LEDs 42 are arranged along the X direction. A plurality of LEDs 42 are arranged in a line along the X direction at equal intervals. For example, the LEDs 42 are arranged every 2 cm. Then, the diffusion plate 43 is placed on the plurality of LEDs 42. The diffusion plate 43 is a rectangular flat plate member whose longitudinal direction is the X direction. As a result, the LEDs 42 arranged in one row are covered with the diffusion plate 43. The diffusion plate 43 is disposed in the recess of the suction table 18. Therefore, the diffusion plate 43 and the LED 42 do not protrude above the recess. A gap is generated between the sample 50 adsorbed by the adsorption table 18 and the illumination light source 41. Thereby, the sample 50 can be held horizontally.

  The LED 42 emits illumination light upward. Illumination light is emitted toward the diffusion plate 43. Then, the light emitted from the LED 42 is diffused by the diffusion plate 43. That is, the light from the LED 42 enters the sample 50 through the diffusion plate 43. Thereby, a linear area | region can be illuminated uniformly. The illumination light source 41 is preferably a linear light source. By using a linear light source, the entire inspection range in the X direction can be illuminated. Therefore, the entire sample 50 can be inspected only by moving the illumination light source only in the Y direction. That is, if the suction table 18 has a unidirectional drive mechanism, measurement can be performed at an arbitrary position of the sample 50.

  Further, a light guide plate having a high refractive index can be used instead of the diffusion plate 43. In this case, when light is incident on the side surface or the lower surface of the light guide plate, the light repeatedly propagates total reflection within the light guide plate. Then, light is emitted from the upper surface of the light guide plate. Thereby, even if it reduces the number of LED42, a linear area | region can be illuminated uniformly. Further, for example, a lamp light source can be used as the illumination light source 41. Of course, the illumination light source 41 is not limited to these configurations. Furthermore, the illumination light source 41 is not limited to a linear light source. Only the area measured by the measuring head 22 may be illuminated. That is, it is only necessary that the field of view of the photodetector provided in the measurement head 22 is illuminated uniformly. Specifically, only a part of the plurality of LEDs 42 can emit light and the field of view can be illuminated uniformly. In this case, when the measuring head 22 moves in the X direction, the light emitting LEDs 42 are sequentially scanned. That is, the LED 42 is switched on and off according to the position of the measurement head 22. Thus, it is preferable to use the illumination light source 41 that can illuminate the linear illumination area. That is, the illumination light source 41 illuminates a linear region along the X direction without moving in the Y direction. You may make it illuminate a strip | belt-shaped area | region.

  The adsorption table 18 is provided with an adsorption port 45 for adsorbing the sample 50. Therefore, when the gas is sucked from the suction port 45, a part of the sample 50 is sucked by the suction table 18. Specifically, as shown in FIG. 3B, a band-like region having the longitudinal direction in the X direction is adsorbed. Thereby, the sample 50 is held in the region corresponding to the suction table 18. In this way, the suction stand 18 sucks and holds a part of the sample 50. During the measurement, the sample 50 is adsorbed by the adsorption table 18. Therefore, vibration generated during measurement can be reduced, and more stable measurement can be performed.

  The suction ports 45 are arranged on both sides of the illumination light source 41 whose longitudinal direction is the X direction. That is, the two suction ports 45 are spaced apart in the Y direction. An illumination light source 41 is disposed between the two suction ports 45. The suction port 45 has a groove shape extending in the X direction. Alternatively, the plurality of suction ports 45 may be arranged along the X direction. By providing the suction ports 45 on both sides of the illumination light source 41, the illuminated illumination area can be reliably sucked. Therefore, it can measure correctly.

  Furthermore, the suction stand 18 is provided with an ejection port 46 for ejecting gas. A jet port 46 is disposed outside the suction port 45. Accordingly, the suction ports 45 are provided on both sides of the illumination light source 41 in the Y direction. When gas is ejected from the ejection port 46, a gap (air gap) is generated between the sample 50 and the adsorption table 18. As shown in FIG. 3A, the sample 50 floats in the portion where the gas is ejected from the ejection port 46. That is, the portion of the sample 50 corresponding to the suction table 18 swells upward. Thereby, a gap is generated between the adsorption table 18 and the sample 50. Therefore, when moving, adsorption is stopped and gas is ejected from the ejection port 46. Thereby, the adsorption stand 18 can be moved without interfering with the sample 50. The suction stand 18 can be moved quickly. The spout 46 is a groove-like one extending in the X direction. Or you may arrange the some jet nozzle 46 along a X direction. By providing the ejection port 46 outside the adsorption port 45, the sample 50 and the adsorption table 18 can be reliably separated. The spout 46 is preferably provided in the vicinity of the end of the suction table 18 in the Y direction. The suction stand 18 can be moved more quickly.

  When actually inspecting, the measuring head 22 is disposed on the suction table 18. That is, the sample 50 is disposed between the suction table 18 and the measurement head 22. Then, the sample 50 is adsorbed and held. The sample 50 is illuminated from below by the illumination light source 41 of the suction table 18. The transmitted light that has passed through the sample 50 is received by a photodetector provided in the measurement head 22. The photodetector is typically a CCD camera. An image of the sample 50 is picked up by this CCD camera. Thereby, the pattern shape etc. of the sample 50 can be measured. When the measurement at that position is completed, the measurement head 22 and the suction table 18 are moved in synchronization. When moving, first, adsorption is stopped and gas is ejected from the ejection port 46. As a result, a gap is generated between the sample 50 and the adsorption table 18. Then, after moving to the next measurement position, the ejection is stopped and sucked from the suction port 45. Thereby, the sample 50 is held. In this way, the whole or a part of the sample 50 is inspected.

  When inspecting substantially the entire sample 50, the suction table 18 is moved to one end of the sample 50. Further, the measuring head 22 is moved directly above the suction table 18. Here, the measurement head 22 is moved to the end in the X direction. Then, suck air from the suction port 45. The sample 50 is adsorbed. Linear illumination light is emitted from the illumination light source 41 with the sample 50 held by suction. Of the illumination light, transmitted light that has passed through the sample 50 is detected by the measurement head 22. The measurement head 22 receives the transmitted light that has passed through the sample 50 on the upper side of the sample 50. The measuring head 22 images a part of the linear illumination area. Thereby, an image of the sample 50 is picked up, and a part of the sample 50 can be observed. Then, the measuring head 22 is moved in the X direction, and inspection for one line is performed. That is, the measuring head 22 is moved from one end to the other end. During the movement, the linear illumination areas illuminated by the illumination light source 41 are sequentially imaged. In this way, measurement is performed on the entire linear illumination area.

  When the inspection for one line is completed, the suction by the suction stand 18 is released, and the gas is ejected from the ejection port 46. Thereby, the sample 50 and the adsorption stand 18 are separated from each other. And the suction stand 18 and the measurement head 22 are shifted to a Y direction, making it eject. That is, the suction table 18 and the measurement head 22 are moved by one line. Similarly, the measurement head 22 is moved in the X direction to measure the second line. This is repeated until the other end of the sample 50 is measured. In this way, measurement can be performed on the sample 50. That is, the suction table 18 is scanned in the Y direction, and the measurement head 22 is raster scanned. Thereby, the whole sample 50 can be inspected.

  In this way, the region for measurement is arranged immediately above the suction table 18. And only the area | region corresponding to a part of adsorption stand 18 is illuminated. That is, only the linear region corresponding to the illumination light source 41 of the suction table 18 is illuminated. Only a part of the illumination area illuminated with this illumination light is the field of view of the measuring head 22. By adsorbing, it is possible to reduce vibration generated in the imaged area.

  Furthermore, as shown in FIGS. 1 and 2, a plurality of support members 16 are provided on the surface plate 11. The support member 16 is disposed inside the mounting table 12. The support member 16 is a pin-shaped member that supports the sample 50. Each support member 16 is provided along the Z direction. The sample 50 is supported by the upper end of the support member 16 coming into contact with the sample 50. That is, portions other than the suction table 18 can be supported by the support member 16. Thereby, the vibration with respect to the sample 50 can be reduced more. Moreover, the bending of the sample 50 is reduced.

  A plurality of support members 16 are arranged in a matrix. A plurality of support members 16 may be arranged at equal intervals. 1 and 2, four support members 16 are arranged in the X direction, and seven support members 16 are arranged in the Y direction. Accordingly, 28 support members 16 are provided. Of course, the number and arrangement of the support members 16 are not limited to the above example. Here, in the arrangement of the support members 16, the X direction is a row and the Y direction is a column. The support member 16 is disposed on both sides of the guide rail 14 in the X direction. That is, the guide rail 14 is disposed between the columns of the support members 16. More specifically, one guide rail 14 is disposed between the support members 16 in the first row and the support members 16 in the second row from the right in FIG. Further, one guide rail 14 is disposed between the support members 16 in the third row and the support members 16 in the fourth row from the right in FIG.

  The support member 16 is disposed below the sample 50. Therefore, the upper end of the support member 16 is substantially the same height as the mounting surface of the mounting table 12. In consideration of the bending of the sample 50, the upper end of the support member 16 may be slightly lower than the placement surface. The detailed configuration of the support member 16 will be described later.

  Further, the suction table 18 is provided with a contact portion 48. The abutting part 48 moves together with the suction table 18. When the contact portion 48 contacts the support member 16, the support member 16 rotates. Thereby, the support member 16 falls and a gap is generated between the support member 16 and the sample 50. The suction table 18 passes through this gap. It is possible to prevent the suction table 18 and the support member 16 from colliding with each other. That is, when the suction stand 18 moves, it does not interfere with the support member 16. For example, the support member 16 at the position where the suction table 18 has moved rotates. Therefore, the support member 16 extended in the Z direction falls down and the support member 16 tilts from the Z direction. As a result, the upper end of the support member 16 is separated from the lower surface of the sample 50. The suction table 18 in which a space for the suction table 18 to pass immediately below the sample 50 is formed passes between the sample 50 and the support member 16.

  Next, the rotation operation of the support member 16 will be described with reference to FIGS. 4 and 5. FIG. 4 is a side view schematically showing the configuration of the stage apparatus 10. More specifically, FIG. 4A is a side view showing a state where the support member 16 supports the sample 50, and FIG. 4B is a side view showing a state where the sample 50 is not supported. FIG. That is, FIG. 4A shows a state where the support member 16 is not in contact with the contact portion 48. FIG. 4B shows a state in which the support member 16 is in contact with the contact portion 48 and the support member 16 is rotating. FIG. 5 is a view for explaining the operation of the support member 16.

  As shown in FIG. 4A, a plurality of support members 16 are connected by a shaft 35. The shaft 35 serves as a rotation axis for rotating the support member 16. The shaft 35 is provided along the X direction. The shaft 35 is connected to a connection portion 32 provided at the lower portion of the support member 16. Thereby, the support members 16 adjacent in the X direction are connected by the shaft 35. A support pin 34 is extended above the connection portion 32. In a state where the support member 16 is in contact with the contact portion 48, the upper end of the support pin 34 is in contact with the sample 50.

  Further, the shafts 35 connected to the support members 16 at both ends in the X direction are attached to the mounting table 12. The mounting table 12 supports the shaft 35 rotatably. The shaft 35 is inserted into a through hole provided in the guide rail 14. Thus, the four support members 16 arranged in the X direction are connected by the shaft 35. That is, all the supporting members 16 in the horizontal row are connected by the shaft 35. Thereby, the several support member 16 in the same position in a Y direction rotates simultaneously. For example, when one support member 16 rotates about the shaft 35 as a rotation axis, the other three support members 16 also rotate. At this time, the four support members 16 rotate at the same angle. The horizontal row of support members 16 rotate simultaneously.

  Further, a cam roller 31 is provided on one of the four support members 16. In FIG. 4, a cam roller 31 is provided on the second support member 16 from the right. When the suction stand 18 moves to the vicinity of the support member 16, the contact portion 48 contacts the cam roller 31. The contact portion 48 and the cam roller 31 constitute a cam mechanism. Therefore, when the contact portion 48 comes into contact with the cam roller 31, the support member 16 rotates as shown in FIG. That is, the straight movement in the Y direction of the contact portion 48 is converted into a rotational movement with the shaft 35 as a rotation axis. Thereby, the support member 16 to which the cam roller 31 is attached rotates. Accordingly, the upper end 37 of the support pin 34 that has supported the sample 50 is separated from the sample 50. That is, the rotated support member 16 does not support the sample 50.

  Further, the support member 16 provided with the cam roller 31 and the other support member 16 are connected by a shaft 35. For this reason, the horizontal row of support members 16 rotate simultaneously. As shown in FIG. 4B, the sample 50 and the support member 16 are separated from each other. That is, a space for the adsorption table 18 to pass through is formed under the sample 50. The suction table 18 can pass through the rotated horizontal support members 16. Thus, interference between the suction stand 18 and the support member 16 can be prevented with a simple mechanism.

  As shown in FIG. 5, the contact portion 48 is formed wider than the suction surface of the suction stand 18 in the Y direction. Thereby, the support member 16 arrange | positioned directly under the adsorption stand 18 rotates. A space through which the suction table 18 can pass is secured. Measurement can also be performed directly above the support member 16. Furthermore, as shown in FIG. 5, both ends of the abutting portion 48 serving as a cam are tapered. That is, the contact surface that contacts the cam roller 31 of the contact portion 48 is a tapered surface inclined from the horizontal plane. Here, the contact surface of the contact part 48 is a curved surface. Therefore, the contact surface of the contact portion 48 changes smoothly. Thereby, the supporting member 16 rotates gradually. Therefore, the impact can be reduced. Therefore, the moving speed of the suction stand 18 can be improved, and the suction stand 18 can be moved quickly.

  When the suction table 18 further moves and completely passes through the rotated support member 16, the contact portion 48 is separated from the cam roller 31. As a result, the support member 16 returns to its original position and comes into contact with the sample 50. That is, the upper end 37 of the support member 16 contacts the lower surface of the sample 50. Further, since both ends of the contact portion 48 are tapered, the support member 16 gradually rotates and returns to the original angle. For this reason, the impact when the sample 50 and the support member 16 contact can be relieved. The support member 16 may be biased so as to return to the original state in a state where the cam roller 31 and the contact portion 48 are not in contact with each other. Thereby, when the contact part 48 leaves | separates from the cam roller 31, the support member 16 will return to the original rotation angle. The upper end of the support member 16 comes into contact with the sample 50 and supports the sample 50. Therefore, it returns to the state shown in FIG. The support member 16 rotates in both directions around the shaft 35 as a rotation axis. As a result, a gap is generated between the sample 50 and the support member 36 even when the suction table 18 moves in any of the ± Y directions.

  As described above, the support member 16 other than the position directly below the adsorption table 18 supports the sample 50. That is, only one horizontal support member 16 corresponding to the suction table 18 rotates. Accordingly, the support members 16 in the same row as the support members 16 in contact with the contact portions 48 rotate. The support members 16 in a row different from the support members 16 in contact with the contact portions 48 do not rotate and support the sample 50. Support members 16 other than the rotated support member 16 are in contact with the sample 50. In this way, the support member 16 supports the portions other than the suction table 18. Therefore, vibration can be reduced. Further, two or more horizontal rows of support members 16 may be rotated at the same time depending on the width and position of the suction table 18. Of course, when the suction stand 18 is between the support members 16 adjacent in the Y direction, all the support members 16 may be in contact with the sample 50.

  Thus, the contact part 48 moves with the suction stand 18. The abutment portion 48 abuts on the support member 16, so that the support member 16 is separated from the sample 50. For this reason, even if it is the structure which provided the supporting member 16 in order to reduce a vibration, the adsorption stand 18 can be moved freely. Moreover, since it is not necessary to raise / lower the support member 16, it can be set as a simple structure. That is, the lifting mechanism for the support member and its control are not required. Since the measuring apparatus 100 has a simple structure, the assembly process is greatly shortened. Therefore, productivity can be improved.

  Further, when the sample 50 is transported, it is not necessary to raise and lower the support member 16. Thereby, the tact time can be shortened. For example, when transporting and unloading the sample 50, the X rail 21 and the suction table 18 are moved to the end of the surface plate 11. As a result, the measurement head 22 and the suction table 18 are retracted outside the mounting table 12. Then, the transport robot holding the sample 50 is driven to transport the sample 50 onto the mounting table 12. Then, the transport robot is lowered and the sample 50 is delivered to the mounting table 12. At this time, the hand of the transfer robot moves to a position where it does not interfere with the support member 16 and the guide rail 14. For example, the hand of the transfer robot is moved between the guide rail 14 and the support member 16. The hand may be moved between the support member 16 and the support member 16. Thereby, loading and unloading of the sample 50 can be performed in a short time. Therefore, tact time can be shortened and productivity can be improved.

  The cam rollers 31 may be provided on two or more support members 16 arranged in a horizontal row. Then, the contact portion 48 may be brought into contact with each cam roller 31. Note that by reducing the number of support members 16 on which the cam rollers 31 are provided, the number of parts of the cam mechanism can be reduced. Furthermore, the number of cam mechanisms can be reduced by connecting two or more support members 16 with the shaft 35. Therefore, even when the number of support members 16 is increased in order to inspect a large substrate, a simple configuration can be achieved.

  Furthermore, it is good also as a structure which moves not only the structure which rotates the support member 16, but an up-down direction. It is only necessary to provide a cam mechanism that converts horizontal motion into vertical motion. Further, the moving direction of the suction table 18 and the direction of the illumination area of the illumination light source are not limited to being orthogonal. In other words, the direction of movement of the suction table 18 and the direction of the illumination area of the illumination light source may be different.

  In the above description, the color filter substrate of a display device such as a liquid crystal display device has been described. Of course, it can be used for pattern substrates other than the color filter substrate. For example, it can be used to correct a phosphor such as a PDP or a cathode ray tube. Further, it can be used for a thin film transistor array substrate of a liquid crystal display device. Further, it may be a liquid crystal display panel, a photomask or the like.

Modification An optical measurement apparatus according to this modification will be described with reference to FIG. FIG. 6 is a top view schematically showing the arrangement of the support members 16 provided in the stage apparatus 10. Note that the description of the same configuration as that of Embodiment 1 is omitted. In FIG. 6, some components are omitted for the sake of simplicity.

  Here, as shown in FIG. 6, in the Y direction, the support members 16 arranged at both ends are referred to as end-side support members 16a, and the other support members 16 are referred to as inner support members 16b. Accordingly, the support members 16 in the first row from the top and the seventh row from the top (first row from the bottom) become the end side support members 16a. The support pins in the second to sixth rows from the top serve as the inner support member 16b. In the Y direction, the inner support member 16b is disposed between the two end side support members 16a. Further, the sample 50 is vacuum-adsorbed on the mounting table 12.

  In this modification, the return speed at which the support member 16 separated from the sample 50 by the contact portion 48 returns to the original state is changed. That is, the speed at which the support member 16 returns from the state in which it is separated from the sample 50 to the state in which the sample 50 is supported is different. Specifically, the return speed of the support member 16 is changed according to the position of the support member 16. The rotational speed at which the shaft 35 is rotated about the rotation axis is changed between the end-side support member 16a and the inner support member 16b. For this reason, the time from the unsupported state in which the contact portion 48 is separated from the support member 16 to the support state in which the support member 16 is in contact with the sample 50 differs depending on the support member 16. Here, the return speed of the end support member 16a is made faster than the return speed of the inner support member 16b.

  The mounting table 12 supports both sides of the rectangular sample 50. Here, the long side of the sample 50 is mounted on the mounting table 12. That is, the end portion on the long side of the sample 50 is supported by the mounting table 12. For this reason, the end portion on the short side of the rectangular sample 50 is not supported by the mounting table 12. That is, the short side of the sample 50 is open. In the vicinity of the short side of the sample 50, the amount of bending in the unsupported state increases. For this reason, the return speed of the end side support member 16a is made faster than the inner side support member 16b.

  On the other hand, in the inner support member 16b, the return speed can be decreased. In the portion corresponding to the inner support member 16b, the support members 16 are disposed on both sides in the Y direction. For example, the second and fourth rows of inner support members 16b are disposed on both sides of the third row of inner support members 16b. Therefore, even if one row of the inner support members 16b is not supported, the support members 16 on both sides support the sample 50. For this reason, in the part corresponding to the inner side support member 16b, the bending amount of the sample 50 becomes smaller than the part corresponding to the end side support member 16a. That is, in the vicinity of the end-side support member 16a, the amount of bending of the sample 50 in the unsupported state increases. For this reason, the return speed of the inner side support member 16b is made slower than the return speed of the return speed of the end side support member 16a. Thereby, it becomes possible to suppress the impact on the glass substrate which is the sample 50 and the load on the suction table 18. Therefore, durability can be improved. Further, excessive deformation of the glass substrate that is the sample 50 can be suppressed. Therefore, it can prevent that the vacuum suction of the mounting base 12 comes off.

  Next, a configuration example for changing the return speed of the support member 16 will be described with reference to FIG. FIG. 7 is a side view showing a state in which the support member 16 is rotating. As shown in FIG. 7, when the contact surface of the contact portion 48 comes into contact with the cam roller 31, the support pin 34 rotates. Here, in the same manner as described above, the support pin 34 rotates around the shaft 35 as a rotation axis. In addition, about the structure similar to said embodiment, description is abbreviate | omitted suitably. In FIG. 7, the three support members 16 are arranged in the Y direction. Then, the contact portion 48 moves from the right side to the left side, and the angle of the support pin 34 changes from the state shown in FIG. 7A to the state shown in FIGS. 7B and 7C. It changes to the state of 7 (d).

  As shown in FIG. 7, the contact portion 48 is provided with a tapered surface that comes into contact with the cam roller 31. That is, the contact surface that contacts the cam roller 31 of the contact portion 48 is tapered. In the Y direction, the tapered surfaces are provided on both sides of the contact portion 48. The shape of the left tapered surface is symmetric with the shape of the right tapered surface. Thereby, even when it moves to +/- Y direction, the support member 16 can be driven similarly. In the contact portion 48, a horizontal plane is formed between the tapered surfaces provided at both ends.

  When the contact portion 48 comes into contact with the cam roller 31 provided in the middle support member 16, the support member 16 rotates. That is, the connecting portion 32 supporting the cam roller 31 is inclined. Here, as shown in FIG. 7A, the cam roller 31 comes into contact with the left tapered surface of the contact portion 48. As a result, the support pin 34 is inclined in the anti-advancing direction of the contact portion 48. Therefore, the upper end of the support pin 34 moves away from the sample 50 (not shown). It will be in the unsupported state which is not supporting the sample 50. FIG. Here, the tapered surface and the cam roller 31 are in contact with each other. For this reason, as the contact part 48 advances to the left side, the tilt angle of the support pin 34 increases.

  When the contact portion 48 advances to the left from the state of FIG. 7A, the cam roller 31 contacts the lower surface of the contact portion 48 as shown in FIG. 7B. Here, the horizontal surface of the contact portion 48 and the cam roller 31 are in contact with each other. In the state shown in FIG. 7B, the support pin 34 is further tilted to the right than in the state shown in FIG. Accordingly, the tilt angle of the support pin 34 is increased. The tilt angle of the support pin 34 does not change while the cam roller 31 is in contact with the horizontal plane.

  Further, when the contact portion 48 advances, the contact position of the cam roller 31 moves to the right in the horizontal plane of the contact portion 48. Then, as shown in FIG. 7C, the right tapered surface of the contact portion 48 and the cam roller 31 come into contact with each other. As the support pin 34 rotates, the tilt angle of the support pin 34 decreases. As the contact portion 48 moves to the left, the tilt angle decreases. When the taper surface of the contact portion 48 is separated from the cam roller 31, the support pin 34 returns to the original angle as shown in FIG. That is, the support pin 34 stands upright, and the upper end 37 and the sample 50 come into contact with each other. Thereby, the support member 16 is in a state of supporting the sample 50.

  In this modification, a spring 38 is provided to return the support pin 34 to its original position. One end of the spring 38 is attached to the connection portion 32, and the other end is fixed to the surface plate 11 (not shown in FIG. 7) or the like. For example, when the contact portion 48 and the cam roller 31 come into contact with each other and the support pin 34 tilts, the spring 38 extends. Then, the support pin 34 returns to the original state by the elastic force of the spring 38. That is, as the portion of the contact portion 48 that contacts the cam roller 31 advances from the horizontal plane to the tapered surface, the spring 38 contracts. That is, in the state shown in FIG. 7C, the spring 38 is shorter than in the state shown in FIG. The support pin 34 rotates in an upright direction by the elastic force of the spring 38. And when the taper surface of the contact part 48 passes the cam roller 31, the support pin 34 will return to the original angle by the elastic force of the spring 38, and will be in an upright state. That is, the support member 16 returns from the unsupported state to the supported state.

  Further, a shock absorber 39 is provided to absorb an impact when the support member 16 returns. The shock absorber 39 is fixed to the surface plate 11 or the like. And the shock absorber 39 collides with the support member 16 when returning. For example, the shock absorber 39 and the support member 16 come into contact with each other during the transition from the state shown in FIG. 7B to FIG. 7C. Here, the shock absorber 39 is in contact with a portion extending downward from the connection portion 32 of the support member 16. Thereby, the impact concerning the support member 16 is relieved.

  For example, the return speed can be adjusted by changing the strength of the spring 38 or the shock absorber 39. When the return speed is adjusted according to the strength of the spring 38, the spring strength (spring constant) of the spring 38 provided on the support member 16 to be returned quickly is increased. Therefore, the spring strength of the spring 38 of the end side support member 16a is made stronger than the spring strength of the spring 38 of the inner side support member 16b. Thereby, the return time of the end side support member 16a becomes short.

  When adjusting the return speed with the shock absorber 39, the strength of the shock absorber 39 provided on the support member 16 to be returned slowly is increased. Therefore, the strength of the shock absorber 39 of the end support member 16a is made stronger than the strength of the shock absorber 39 of the inner support member 16b. Thereby, the return speed of the inner side support member 16b can be made slow. Therefore, the impact when the inner support member 16b collides with the sample 50 can be suppressed.

  Further, the return speed may be changed by driving the inner support member 16b and the end support member 16a with different cams. For example, the position of the cam roller 31 is changed between the inner support member 16b and the end support member 16a. That is, the position of the cam roller 31 in the X direction is shifted. By doing so, the position of the contact surface in the X direction changes between the end support member 16a and the inner support member 16b. Further, the shape of the contact surface that contacts the cam roller 31 is changed between the inner support member 16b and the end support member 16a. For example, the taper angle of the abutting surface provided on the support member 16 that returns later is made gentle. That is, the contact surface provided on the inner support member 16b is gently inclined to increase the length of the contact surface in the Y direction. Thus, the shape of the contact surface can be changed by changing the position of the cam roller 31. Therefore, the return speed and return timing of the support member 16 can be changed according to the row.

  Alternatively, not the contact surface but the shape of the cam roller 31 may be different. Of course, both the cam roller 31 and the contact surface may be different. The return speed can be adjusted by changing the shape of the portion where the contact portion 48 and the support member 16 are in contact with each other. Thus, the inner side support member 16b and the end side support member 16a are driven by different cams. That is, the return speed can be adjusted by providing cams of different shapes on the inner support member 16b and the end support member 16a.

  By doing in this way, the impact at the time of the inner side support member 16b colliding with the sample 50 can be suppressed. Further, when the sample 50 is adsorbed on the mounting table 12, it is possible to prevent the adsorption between the support member 16 and the sample 50 due to an impact at the time of collision. Of course, the return speed may be changed by combining two or more of the spring 38, the shock absorber 39, and the cam shape. Furthermore, the return speed may be changed by other methods.

  When returning all the support members 16 at the same speed, it is necessary to match the return speed of the support members 16 to be returned quickly. That is, in order to quickly return the support member 16 in a portion with a large amount of deflection, it is necessary to match the return speed of the support member 16. Accordingly, the return speed of the support member 16 that is small in the amount of bending and does not need to be returned quickly increases. For this reason, it is difficult to suppress the impact when the support member 16 collides with the sample 50. In this modification, since the return speed of the support member 16 is changed according to the position of the support member 16, the return speed of some of the support members 16 can be reduced. Therefore, the impact applied when the support member 16 collides with the sample 50 can be suppressed. Of course, the support member 16 that slows the return speed is not limited to the inner support member 16b. For example, the return speed of the support member 16 that increases the amount of deflection when the support members 16 are separated from each other is increased, and the return speed of the other support members 16 is decreased. In this way, the return speed may be set to three or more stages by preparing three or more types of springs 38 and the like. For example, the return speed of the support member 16 can be adjusted for each row.

Embodiment 2. FIG.
The structure of the stage apparatus 10 concerning this Embodiment is demonstrated using FIG. FIG. 8 is a top view schematically showing the configuration of the stage apparatus 10 according to the second embodiment. In addition, about the structure similar to Embodiment 1, description is abbreviate | omitted suitably. For example, since the operation and configuration of the support member 16 and the like are the same as those in the first embodiment, illustration and description thereof are omitted. In the present embodiment, the description will be focused on the configuration of the stage apparatus 10 which is a substrate holding apparatus.

  In the stage apparatus 10 according to the second embodiment, a suction unit 13 is provided on the mounting table 12. The suction part 13 has a suction hole, a suction groove, and the like. That is, suction holes, suction grooves, and the like are formed on the top surface of the mounting table 12. Then, air is sucked from the suction holes of the suction unit 13 and the like. When suction is performed with the sample 50 mounted on the mounting table 12, the inside of the suction hole is depressurized. Thereby, the sample 50 can be vacuum-sucked. Furthermore, in this Embodiment, the adsorption | suction part 13 is divided into 2 systems. That is, the mounting table 12 is formed with a first suction portion 13a and a second suction portion 13b.

  As shown in FIG. 8, the mounting table 12 is disposed on both sides of the sample 50. That is, the mounting table 12 is disposed on the right side and the left side of the sample 50, respectively. Accordingly, the two mounting tables 12 are arranged apart from each other. In other words, the two mounting tables 12 are spaced apart from each other in the X direction, and the suction table 18 moves between them.

  Each mounting table 12 is provided along the Y direction. Each mounting table 12 is provided with a first suction portion 13a and a second suction portion 13b. Here, one mounting table 12 is provided with seven suction holes. The seven suction holes are arranged along the Y direction. And the suction hole of both ends becomes the 1st suction part 13a, and the suction hole between them becomes the 2nd suction part 13b. Accordingly, the first suction portion 13 a is provided at the end of the mounting table 12 in the Y direction, and the second suction portion 13 b is provided at the center of the mounting table 12. In one mounting table 12, the first suction part 13a has two suction holes, and the second suction part 13b has five suction holes.

  The 1st switching part 15a is connected to the 1st adsorption | suction part 13a via piping. The first switching unit 15a controls the operation of the first suction unit 13a. Specifically, ON / OFF of the 1st adsorption | suction part 13a is switched by the 1st switching part 15a. For example, the first switching unit 15a includes a vacuum pump and a valve provided in the pipe. The ON / OFF operation of the first suction unit 13a is controlled by opening and closing the valve. When the first switching unit 15a turns on the first adsorption unit 13a, the four corners of the sample 50 are adsorbed. When the first switching unit 15a turns off the first adsorption unit 13a, the adsorption of the four corners of the sample 50 is released.

  Similarly, the 2nd switching part 15b is connected to the 2nd adsorption | suction part 13b via piping. The 2nd switching part 15b controls operation | movement of the 2nd adsorption | suction part 13b similarly to the 1st switching part 15a. Thereby, ON / OFF operation | movement of the 2nd adsorption | suction part 13b can be switched. When the second switching unit 15b turns on the second adsorption unit 13b, the central portion of the long side of the sample 50 is adsorbed. When the second switching unit 15b turns off the second adsorption unit 13b, the adsorption of the central portion of the long side of the sample 50 is released. As described above, the first switching unit 15a and the second switching unit 15b have different areas for switching the suction.

  The first switching unit 15a and the second switching unit 15b are independent. Therefore, one of the first suction unit 13a and the second suction unit 13b can be turned on and the other can be turned off. Of course, both the first suction unit 13a and the second suction unit 13b may be turned on. The first switching unit 15 a and the second switching unit 15 b switch ON / OFF according to the position of the suction table 18. In addition, in FIG. 8, about the 1st switching part 15a connected to the left mounting base 12, and the 2nd switching part 15b, the 1st switching part 15a connected to the right mounting base 12, And since it is the same as that of the 2nd switching part 15b, it is abbreviate | omitted.

  For example, when the suction stand 18 is in the area A corresponding to the first suction portion 13a, the first suction portion 13a is turned off and the second suction portion 13b is turned on. That is, in the Y direction, when the suction table 18 is at the end of the sample 50, the first suction unit 13a at the end of the mounting table 12 is switched from ON to OFF. On the other hand, when the suction stand 18 is in the region C corresponding to the second suction portion 13b, the first suction portion 13a is turned on and the second suction portion 13b is turned off. That is, when the suction table 18 is in the center of the sample 50, the second suction unit 13b in the center of the mounting table 12 is switched from ON to OFF. Further, when the suction table 18 is in the region B corresponding to the boundary between the first suction unit 13a and the second suction unit 13b, the suction of the first suction unit 13a and the second suction unit 13b is turned on. To do.

  In this way, the suction portion 13 near the suction stand 18 is turned off. Thereby, the sample 50 can be reliably floated with respect to the adsorption stand 18. For example, the sample 50 floats from the suction table 18 by the air from the ejection port 46 of the suction table 18. Thereby, the clearance gap for the adsorption stand 18 to pass through generate | occur | produces. Then, the suction table 18 moves with the sample 50 floating. At this time, the sample 50 is not adsorbed by the mounting table 12 on both outer sides of the adsorption table 18 in the X direction. Therefore, a sufficient amount of the sample 50 can be lifted by the air from the adsorption table 18. A gap for allowing the suction table 18 to pass through can be provided with certainty. Even when the difference in height between the suction table 18 and the mounting table 12 is reduced, the suction table 18 and the sample 50 can be prevented from colliding with each other. Therefore, since the sample 50 and the suction table 18 are not in contact with each other, the sample 50 and the suction table 18 can be prevented from being damaged. The difference in height between the suction table 18 and the mounting table 12 can be reduced.

  Thus, in order to secure a gap between the suction table 18 and the sample 50, the suction table 18 does not have to be lower than the mounting table 12. For this reason, the flatness of the sample 50 can be increased. For example, the difference in height between the suction table 18 and the mounting table 12 can be adjusted on the order of μm. Therefore, stable measurement can be performed between the mounting table 12 and the suction table 18. Even when the suction table 18 is in the area of A and C, one of the first suction unit 13 a and the second suction unit 13 b is sucking the sample 50. For this reason, the position shift of the sample 50 can be prevented.

  Further, in the region B serving as the boundary between A and C, both the first suction unit 13a and the second suction unit 13b are turned on. Thereby, there is no moment when both the first suction part 13a and the second suction part 13b are turned off. That is, at the time of switching the operation of the first suction unit 13a and the second suction unit 13b, both the first suction unit 13a and the second suction unit 13b are turned ON. Therefore, since the sample 50 is always adsorbed by the one or more adsorbing units 13, the sample 50 can be prevented from moving. Thereby, stable measurement can be performed.

  The above configuration is particularly effective when the defect of the sample 50 is corrected by polishing. For example, it is assumed that the measuring head 22 is provided with a polishing tape or the like. Then, the measuring head 22 is moved to a position directly above the suction table 18. That is, the sample 50 is disposed between the measurement head 22 and the suction table 18. In this state, the defect of the sample 50 is corrected using the polishing tape provided in the measuring head 22. That is, the polishing tape is sent out with the polishing tape in contact with the surface of the sample 50. Thereby, the protrusion which is a defect is grind | polished with an abrasive | polishing tape. The protrusion on the sample 50 is removed, and the defect is corrected. By controlling the suction unit 13 as described above, the flatness of the sample 50 can be increased. For this reason, stable polishing and correction can be performed.

  Moreover, you may use for the processing apparatus which processes other than grinding | polishing. That is, the substrate holding apparatus according to the present embodiment is suitable for a processing apparatus provided with a processing head that moves on the sample 50. Further, a machining head may be provided separately from the measurement head 22. In addition, you may divide the adsorption | suction part 13 into 3 or more systems.

  Depending on the position of the suction stand 18, the first suction portion 13a and the second suction portion 13b are switched ON / OFF. That is, when the suction stand 18 moves in the vicinity of the first suction part 13a, the first suction part 13a is turned off and suction is performed only by the second suction part 13b. On the other hand, when the suction stand 18 moves in the vicinity of the second suction portion 13b, the second suction portion 13b is turned off and suction is performed only by the first suction portion 13a. Thereby, the clearance gap which the adsorption stand 18 passes can be ensured. Further, when passing through the boundary between the first suction part 13a and the second suction part 13b, the first suction part 13a and the second suction part 13b are turned on. Thereby, since any of the adsorbing portions 13 is adsorbed, it can be reliably held.

  Regardless of the position of the suction table 18, if both the first suction unit 13 a and the second suction unit 13 b are always turned on, a gap may not be secured. For this reason, it becomes necessary to make the suction table 18 lower than the mounting table 12. Then, since the flatness of the sample 50 deteriorates, stable measurement and processing cannot be performed. Therefore, the stage apparatus 10 according to the present embodiment can realize stable measurement and processing.

  It should be noted that Embodiments 1 and 2 and the modifications described above can be used in appropriate combination.

It is a top view which shows typically the structure of the optical measuring device concerning this Embodiment. It is a perspective view which shows typically the structure of the stage apparatus used for the optical measuring device concerning this Embodiment. It is side surface sectional drawing which shows typically the structure of the adsorption stand used for the optical measuring device concerning this Embodiment. It is a side view which shows typically the structure of the stage apparatus used for the optical measuring device concerning this Embodiment. It is a figure for demonstrating operation | movement of the supporting member concerning this Embodiment. It is a top view which shows typically arrangement | positioning of the supporting member concerning a modification. It is a side view which shows a mode that the support member is rotating. It is a top view which shows typically the structure of the stage apparatus concerning Embodiment 2. FIG.

Explanation of symbols

10 stage device, 12 mounting table, 14 guide rail,
16 support members, 18 suction tables,
21 X rail, 22 measuring head, 23 Y rail,
31 Cam roller, 32 connection part, 34 support pin, 35 shaft, 37 upper end,
41 Illumination light source, 42 LED, 43 diffuser plate, 45 suction port, 46 jet port,
50 samples,
DESCRIPTION OF SYMBOLS 13 Adsorption part 13a 1st adsorption part 13b 2nd adsorption part 15a 1st switching part 15b 2nd switching part 16a End side support member 16b Inner support member 38 Spring 39 Shock absorber

Claims (3)

A mounting table on which the end of the substrate is mounted;
A first suction unit and a second suction unit which are provided on the mounting table and suck the substrate;
A movable base provided movably on the lower side of the substrate, and having a spout for ejecting gas to the substrate and a suction port for adsorbing the substrate ;
A switching unit that switches ON / OFF of the first and second suction units,
The substrate holding apparatus in which the switching unit turns on one of the first and second suction units and turns off the other in accordance with the position of the movable base with respect to the substrate. The mounting table places the end portions on both sides of the substrate,
Moving along the first direction so that the movable table passes between the mounting tables on both sides,
Each of the mounting tables provided on both sides of the substrate is provided with the first suction portions at both ends in the first direction,
The second suction part is provided between the first suction parts provided at both ends,
When the movable base moves to a position corresponding to the first suction part, the first suction part is turned OFF, and the second suction part is turned ON,
When said movable table is moved to a position corresponding to the second adsorption unit, according to claim 1, wherein the second suction portion is OFF, and the first adsorption unit is characterized by ON Substrate holding device. The first and second suction sections are turned on when the movable base is present in a boundary region between a position corresponding to the first suction section and a position corresponding to the second suction section. Item 3. The substrate holding apparatus according to Item 1 or 2.