JP5495313B2 - Chuck device, substrate observation device, and defect correction device - Google Patents

Description

  The present invention relates to a chuck device, a substrate observation device, and a defect correction device, and more particularly to a chuck device that holds a substrate, a substrate observation device that observes the surface of the substrate, and a defect correction device that corrects a defect on the surface of the substrate.

  In a manufacturing process of a color filter which is a main part of an LCD (Liquid Crystal Display), a pattern correcting apparatus for correcting a defect generated on the surface of the color filter is used in order to improve the yield.

  In the pattern correction apparatus, it is necessary to observe the surface of the color filter in order to determine a defect correction condition or to determine whether the correction is successful. As a first method for observing the surface of the color filter, there is a method in which the color filter is chucked on a glass surface plate, transmitted light is applied to the color filter from below the glass surface plate, and the surface of the color filter is observed from above. is there.

  In addition, as a second method for observing the surface of the color filter, a ring illuminator provided on an objective lens above the glass surface plate by chucking the color filter on a glass surface plate having a reflective film formed on the lower surface. There is a method in which the color filter is irradiated with light, the light is reflected by a reflective film on the lower surface of the glass surface plate, and the surface of the color filter is observed through an objective lens (see, for example, Patent Document 1).

  Further, as a third method for observing the surface of the color filter, a plurality of objective lenses are provided on the lower surface of the movable plate, the movable plate is moved, and the desired objective lens is arranged under the observation lens barrel. There is a method of observing the surface of a color filter through an objective lens (see, for example, Patent Document 2).

JP 2006-38825 A JP 2009-122259 A

  In the first method, since transmitted light is applied to the color filter from below the glass surface plate and the surface of the color filter is observed from above, it is not possible to place an object that blocks light under the glass surface plate. Therefore, it is necessary to support the glass surface plate only by the outer peripheral portion of the glass surface plate.

  However, in recent years, as the LCD screen has become larger, the color filter has also become larger and the glass surface plate has also increased in size. Therefore, if only the outer periphery of the glass surface plate is supported, the center of the glass surface plate is lowered by its own weight. Therefore, there is a problem that the color filter cannot be stably chucked.

  In the second method, a reflective film is formed on the lower surface of the glass surface plate, light is irradiated from above the glass surface plate, and observation is performed from above the glass surface plate, so that the entire lower surface of the glass surface plate is supported. be able to.

  However, when the second and third methods are combined, it is necessary to provide a ring illuminator for each of the plurality of objective lenses under the movable plate, which causes a problem that the apparatus becomes large and complicated. Therefore, the second and third methods cannot be combined, and when the third method is adopted, it is necessary to adopt the first method.

  Therefore, a main object of the present invention is to provide a chuck device, a substrate observation device, and a defect correction device capable of stably chucking a large substrate without disturbing observation of the substrate surface.

  The chuck device according to the present invention is a chuck device for holding a substrate in a substrate observation device for observing the surface of the substrate, the transparent surface plate on which the substrate is placed, and the outer periphery of the transparent surface plate. When the position of the observation target on the surface of the substrate is located above the support member, along the lower surface of the transparent surface plate Drive means for moving the support member to another position.

  Preferably, the transparent surface plate is formed in a quadrangular shape and supported horizontally. The support member includes a support bar arranged in parallel with one side of the transparent surface plate. The driving means horizontally moves the support bar in a direction orthogonal to the support bar.

  Preferably, the drive means moves the support bar by a predetermined distance larger than the width of the support bar when moving the support member.

  Preferably, the support member further includes a plurality of rolling elements provided on the upper surface of the support bar and in contact with the lower surface of the transparent surface plate.

Preferably, each of the plurality of rolling elements is a roller.
Further, the substrate observation apparatus according to the present invention includes a transparent surface plate on which the substrate is placed, a support base that supports the outer peripheral portion of the transparent surface plate from below, and a substantially central portion of the transparent surface plate from below. A supporting member to be supported, a light source that provides transmitted light to the substrate from below the transparent surface plate, an observation optical system for observing the surface of the substrate from above the transparent surface plate, and a desired optical system on the surface of the substrate. Positioning means for moving above the position, and driving means for moving the support member to another position along the lower surface of the transparent surface plate when a desired position on the surface of the substrate is located above the support member. It is a thing.

  In addition, the defect correcting apparatus according to the present invention includes a transparent surface plate on which a substrate is placed, a support base that supports the outer peripheral portion of the transparent surface plate from below, and a substantially central portion of the transparent surface plate from below. A supporting member for supporting, a light source for transmitting transmitted light to the substrate from below the transparent surface plate, an observation optical system for observing defects on the surface of the substrate from above the transparent surface plate, correcting means for correcting the defects, When observing, the observation optical system is moved above the defect, and when correcting the defect, the positioning means for moving the correction means above the defect, and the lower surface of the transparent surface plate when the defect is located above the support member Drive means for moving the support member to another position along the line.

  As described above, according to the present invention, since the support base that supports the outer peripheral portion of the transparent surface plate from below and the support member that supports the substantially central portion of the transparent surface plate from the bottom are provided, It can be held stably. In addition, when the position of the observation target on the surface of the substrate is located above the support member, driving means for moving the support member to another position along the lower surface of the transparent surface plate is provided. It can be avoided.

It is a figure which shows the whole structure of the pattern correction apparatus by one Embodiment of this invention. It is a figure which shows the defect of the color filter used as the correction object of the pattern correction apparatus shown in FIG. It is a figure which shows the structure of the chuck apparatus shown in FIG. It is a figure which shows the structure of the support bar shown in FIG. It is a figure which shows the usage method of the support bar shown in FIG. It is a block diagram which shows the operation part and control part of the pattern correction apparatus shown in FIGS. It is a figure which shows the comparative example of embodiment.

  As shown in FIG. 1, a pattern correction apparatus according to an embodiment of the present application includes a metal mount 1 arranged horizontally. A chuck device 2 is provided at the center of the upper surface of the metal mount 1. The chuck device 2 includes a rectangular glass surface plate 3 and a table-like support table 4 that supports the outer periphery of the glass surface plate 3. The short side of the glass surface plate 3 is arranged toward the X-axis direction in the figure, and the long side is arranged toward the Y-axis direction in the figure.

  The glass surface plate 3 has a plurality of holes 3a. A color filter 10 to be corrected is placed on the center of the upper surface of the glass surface plate 3. The color filter 10 is formed in a rectangular shape. The short side of the color filter 10 is arranged in the X-axis direction in the figure, and the long side is arranged in the Y-axis direction in the figure. A part of the plurality of holes 3 a is used for adsorbing and fixing the color filter 10.

  Of the plurality of holes 3a, the holes 3a other than the suction holes are used for passing the plurality of lifter pins. When the color filter 10 is carried in, a plurality of lifter pins protrude onto the glass surface plate 3 through the plurality of holes 3a. When the color filter 10 is mounted on the plurality of lifter pins by the robot hand and the plurality of lifter pins are lowered below the glass surface plate 3 after the robot hand is retracted, the color filter 10 is mounted on the glass surface plate 3. Placed.

  In addition, when the color filter 10 is unloaded, a plurality of lifter pins protrude onto the glass surface plate 3 through the plurality of holes 3a. After the robot hand is inserted between the color filter 10 and the glass surface plate 3 and the color filter 10 is lifted and carried out, the plurality of lifter pins are accommodated below the glass surface plate 3 through the plurality of holes 3a.

  Further, two rails 11 and 12 are provided in parallel on both sides of the chuck device 2. Both the rails 11 and 12 extend in the Y-axis direction. A gantry type Y stage 13 is provided on the rails 11 and 12. The Y stage 13 is controlled by a control device (not shown) and moves above the chuck device 2 along the rails 11 and 12 in the Y-axis direction.

  A rod-shaped light source 14 is provided between the two legs 13 a and 13 b of the Y stage 13. The light source 14 is inserted between the glass surface plate 3 and the metal gantry 1, and provides transmitted illumination light to the color filter 10 through the glass surface plate 3. The light source 14 moves in the Y axis direction together with the Y stage 13. An X stage 15 is mounted on the Y stage 13. The X stage 15 is controlled by a control device (not shown) and moves along the Y stage 13 above the chuck device 2 in the X-axis direction.

  In addition, an observation optical system 16, a laser device 17, and a coating unit 18 are mounted on the X stage 15. The observation optical system 16 is provided to face the light source 14 and is used for observing the surface of the color filter 10. The laser device 17 is used to irradiate the surface of the color filter 10 with a laser beam via the observation optical system 16 and remove the defect. The application unit 18 includes an application needle, an actuator for moving the application needle up and down, a plurality of ink tanks filled with a plurality of types of correction ink, and the correction ink adhered to the tip of the application needle on the surface of the color filter 10. Contact the defect and apply the correction ink to correct the defect.

  A Z stage is further mounted on the X stage 15, an observation optical system 16, a laser device 17, and a coating unit 18 are mounted on the Z stage, and the observation optical system 16 and the like are vertically oriented (Z-axis direction) by the Z stage. It may be moved.

  2A to 2C are diagrams showing defects that occur in the manufacturing process of the color filter 10. 2A to 2C, the color filter 10 includes a transparent substrate, a lattice pattern called a black matrix 21 formed on the surface thereof, a plurality of sets of R (red) pixels 22, and G (green). ) Pixel 23 and B (blue) pixel 24. In the manufacturing process of the color filter 10, the white defect 25 in which the color of the pixel or the black matrix 21 is lost as shown in FIG. 2A or the adjacent pixel and the color as shown in FIG. A black defect 26 in which the black matrix 21 protrudes from the pixel or a foreign object defect 27 in which a foreign object adheres to the pixel as shown in FIG. 2C occurs.

  Next, a method for correcting defects on the surface of the color filter 10 will be described with reference to FIGS. 1 and 2A to 2C. When there is a defect on the surface of the color filter 10, the Y stage 13 and the X stage 15 are controlled to align the optical axis of the observation optical system 16 with the defect, and the defect is observed. A defect correction method is determined based on the defect observation result.

  When correcting the white defect 25, the Y stage 13 and the X stage 15 are controlled to move the coating unit 18 above the white defect 25. Next, the application unit 18 causes the same color ink as the pixel having the white defect 25 to adhere to the tip of the application needle, and applies the ink attached to the tip of the application needle to the white defect 25 to correct it.

  Further, when correcting the black defect 26 or the foreign object defect 27, the laser device 17 irradiates the defect portion with laser light through the observation optical system 16, and laser-cuts the defect portion to form a rectangular white defect 25. . Next, the Y stage 13 and the X stage 15 are controlled to move the coating unit 18 above the white defect 25. Next, the application unit 18 applies and corrects the ink adhered to the tip of the application needle to the white defect 25.

  Next, the chuck device 2 which is a feature of the present application will be described. As shown in FIG. 3, the chuck device 2 includes a glass surface plate 3, a support base 4, a support bar 30, and actuators 31 and 32. The support table 4 includes square columnar support members 40 to 49. The support members 40 and 41 are arranged on the metal gantry 1 at a predetermined interval so as to be directed in the X-axis direction. The support members 42 and 43 are disposed on the center portions of the support members 40 and 41 so as to be directed in the X-axis direction.

  The support members 44 and 45 are arranged on the support members 40 and 41 so as to face the Y-axis direction and sandwich the support members 42 and 43. The support members 46 and 47 are arranged on the support member 44 along the inner side of the support member 44 so as to be directed in the Y-axis direction. The support members 48 and 49 are disposed on the support member 45 along the inner side of the support member 45 in the Y-axis direction.

  The thickness d1 of the support members 42 and 43 is equal to the sum of the thickness d2 of the support members 44 and 45 and the thickness d3 of the support members 46 to 49. Therefore, the surfaces of the support members 42, 43, and 46 to 49 have the same height and are included in one horizontal plane. The distance L1 between the support members 42 and 43 is shorter than the long side (the length in the Y-axis direction) of the glass surface plate 3 by a predetermined distance, and the distance L2 between the support members 46 and 48 and the distance between the support members 47 and 49. Each of L2 is shorter than the short side (length in the X-axis direction) of the glass surface plate 3 by a predetermined distance. For this reason, the outer peripheral part of the glass surface plate 3 is horizontally supported by the support members 42, 43, 46 to 49.

  The lengths of the support members 46 and 47 are ½ or less of the support member 44, and a gap of a predetermined distance L3 is opened between the support members 46 and 47. Similarly, the lengths of the support members 48 and 49 are ½ or less of the support member 45, and a gap of a predetermined distance L3 is opened between the support members 48 and 49. A rectangular parallelepiped support bar 30 for supporting the substantially central portion of the lower surface of the glass surface plate 3 from below is inserted in the gap. The width W of the support bar 30 is set to ½ or less of the distance L3 between the support members 46 and 47 (that is, the distance L3 between the support members 48 and 49). As a result, the support bar 30 can be moved in the Y-axis direction over a distance equal to or greater than the width W of the support bar 30.

  The drive shaft of the actuator 31 is coupled to one end of the support bar 30, and the main body of the actuator 31 is fixed on the support member 44. The drive shaft of the actuator 32 is coupled to the other end of the support bar 30, and the body of the actuator 32 is fixed on the support member 45. The drive shafts of the actuators 31 and 32 can be expanded and contracted simultaneously in the Y-axis direction. When the drive shafts of the actuators 31 and 32 are contracted, the support bar 30 moves to the front side in the figure, and when the drive shafts of the actuators 31 and 32 are extended, the support bar 30 moves to the back side in the figure.

  As shown in FIGS. 4A and 4B, a plurality of rollers 33 are arranged on the upper surface of the support bar 30 in the length direction (X-axis direction) of the support bar 30. Each roller 33 has a rotation center axis extending in the X-axis direction, and is rotatably held on the upper surface of the support bar 30. Each roller 33 is brought into contact with the lower surface of the glass surface plate 3. When the support bar 30 is moved in the Y-axis direction by the actuators 31 and 32, each roller 33 rotates along the lower surface of the glass surface plate 3. Thereby, the support bar 30 can be smoothly moved in the Y-axis direction. Further, by supporting the lower surface of the glass surface plate 3 by the plurality of rollers 33, it is possible to prevent the glass surface plate 3 from being bent.

  FIGS. 5A and 5B are diagrams illustrating a method of using the support bar 30. Now, it is assumed that the support bar 30 supports the center portion of the lower surface of the glass surface plate 3 and the center portion of the surface of the color filter 10 has a defect. In this case, when the Y stage 13 and the X stage 15 are controlled to position the optical axis of the objective lens 16a included in the observation optical system 16 at a defect, the objective lens 16a and the light source 14 are shown in FIG. A support bar 30 is disposed between the two. In this state, the light from the light source 14 is blocked by the support bar 30, and the defect cannot be observed.

  Therefore, in the present invention, as shown in FIG. 5B, the support bar 30 is moved in the width direction (Y-axis direction) by the actuators 31 and 32, and the support bar 30 is moved from the space between the objective lens 16 a and the light source 14. Evacuate. At this time, the actuators 31 and 32 move the support bar 30 by a distance larger than the width W of the support bar 30. Thereby, the light from the light source 14 is incident on the objective lens 16a without being blocked by the support bar 30, and the defect can be observed. Moreover, since the support bar 30 is moved while supporting the lower surface of the glass surface plate 3 by the plurality of rollers 33, it is possible to prevent the glass surface plate 3 from being bent.

  FIG. 6 is a block diagram showing the overall configuration of the pattern correction apparatus. In FIG. 6, the pattern correction apparatus includes an operation unit 50 and a control unit 51 in addition to those shown in FIGS. 1 to 5. The operation unit 50 includes a plurality of buttons and a plurality of switches operated by a user of the pattern correction apparatus, and is used for operating the pattern correction apparatus. The control unit 51 controls the Y stage 13, the light source 14, the X stage 15, the observation optical system 16, the laser device 17, the coating unit 18, the actuators 31 and 32, etc. according to signals from the operation unit 50. The user can move the support bar 30 to a desired position using the operation unit 50.

  The control unit 51 detects the position of the optical axis of the observation optical system 16 from the coordinates of the Y stage 13 and the X stage 15 and detects the position of the support bar 30 from the coordinates of the actuators 31 and 32. When the observation optical system 16 is positioned above the support bar 30, the control unit 51 controls the actuators 31 and 32 to move the support bar 30 to another position so that the support bar 30 does not interfere with the observation. . Therefore, even if the user does not move the support bar 30, the support bar 30 automatically moves to a position that does not hinder observation.

  FIG. 7 is a diagram showing a comparative example of the embodiment, and is a diagram to be compared with FIG. In FIG. 7, in this comparative example, the chuck device 2 is replaced with the chuck device 60. The chuck device 60 removes the support bar 30 and the actuators 31 and 32 from the chuck device 2, replaces the support members 46 and 47 with one support member 61, and replaces the support members 48 and 49 with one support member 62. It is a replacement. The outer peripheral part of the glass surface plate 3 is supported by support members 42, 43, 61, 62. Since the chuck device 60 supports only the outer peripheral portion of the glass surface plate 3, the central portion of the glass surface plate 3 bends downward due to its own weight depending on the area and weight of the glass surface plate 3. For this reason, the color filter 10 cannot be held stably.

  On the other hand, in this invention, since the center part of the glass surface plate 3 is supported from the bottom by the support bar 30, even when the glass surface plate 3 is large, it can prevent that the glass surface plate 3 bends. The color filter 10 can be held stably. In addition, since the support bar 30 can be moved so that the defect of the color filter 10 is not located above the support bar 30, the support bar 30 does not hinder the observation of the defect.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  DESCRIPTION OF SYMBOLS 1 Metal mount, 2,60 Chuck apparatus, 3 Glass surface plate, 3a hole, 4 Support stand, 10 Color filter, 11, 12 rail, 13 Y stage, 13a, 13b Leg part, 14 Light source, 15 X stage, 16 Observation optical system, 16a objective lens, 17 laser device, 18 coating unit, 21 black matrix, 22 R pixel, 23 G pixel, 24 B pixel, 25 white defect, 26 black defect, 27 foreign object defect, 30 support bar, 31, 32 Actuators, 33 Rollers, 40 to 49, 61, 62 Support members, 50 operation units, 51 control units.

Claims (7)

A chuck device for holding the substrate in a substrate observation device for observing the surface of the substrate,
A transparent surface plate on which the substrate is placed;
A support for supporting the outer peripheral portion of the transparent surface plate from below;
A support member for supporting a substantially central portion of the transparent surface plate from below;
A chuck device, comprising: a driving unit that moves the support member to another position along the lower surface of the transparent surface plate when the position of the observation target on the surface of the substrate is located above the support member. The transparent surface plate is formed in a quadrangular shape and supported horizontally,
The support member includes a support bar disposed in parallel with one side of the transparent surface plate,
The chuck device according to claim 1, wherein the driving unit horizontally moves the support bar in a direction orthogonal to the support bar.   3. The chuck device according to claim 2, wherein when the support member is moved, the drive unit moves the support bar by a predetermined distance larger than a width of the support bar.   4. The chuck device according to claim 2, wherein the support member further includes a plurality of rolling elements provided on an upper surface of the support bar and in contact with a lower surface of the transparent surface plate. 5.   The chuck device according to claim 4, wherein each of the plurality of rolling elements is a roller. A transparent surface plate on which the substrate is placed;
A support for supporting the outer peripheral portion of the transparent surface plate from below;
A support member for supporting a substantially central portion of the transparent surface plate from below;
A light source that provides transmitted light to the substrate from below the transparent surface plate;
An observation optical system for observing the surface of the substrate from above the transparent surface plate;
Positioning means for moving the observation optical system above a desired position on the surface of the substrate;
When the desired position of the surface of the said board | substrate is located above the said supporting member, a drive means which moves the said supporting member to another position along the lower surface of the said transparent surface plate is provided. A transparent surface plate on which the substrate is placed;
A support for supporting the outer peripheral portion of the transparent surface plate from below;
A support member for supporting a substantially central portion of the transparent surface plate from below;
A light source that provides transmitted light to the substrate from below the transparent surface plate;
An observation optical system for observing defects on the surface of the substrate from above the transparent surface plate;
Correction means for correcting the defect;
Positioning means for moving the observation optical system above the defect when observing the defect, and moving the correction means above the defect when correcting the defect;
And a driving unit that moves the support member to another position along the lower surface of the transparent surface plate when the defect is located above the support member.

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