JP2016114451A - Coating device and defect repair device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coating device that allows for observing defects using an observation optical system while applying a coating, and a defect repair device.SOLUTION: A coating device 100 is for coating a microscopic area on a surface 30a of a target object with a liquid material, and includes a coating unit 10 configured to coat a microscopic area with a liquid material and an observation optical system 1 that enables observation of the microscopic area. The observation optical system 1 is installed such that an angle between an optical axis L of the observation optical system 1 and the surface 30a can be changed.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a coating apparatus and a defect repairing apparatus using the coating apparatus, and in particular, a coating apparatus that applies a liquid material to a fine portion of a flat panel display (FPD), a solar cell, a semiconductor, a printed board, and the like, and the same. The present invention relates to a defect repair apparatus.

  As the size and resolution of liquid crystal displays (LCDs) have increased, the number of pixels has increased, making it difficult to produce liquid crystal displays without defects, and the probability of occurrence of defects has also increased. Under such circumstances, in order to improve the yield, a defect correcting apparatus that corrects a defect that occurs in the manufacturing process of the liquid crystal color filter substrate has become indispensable for the production line.

  4A to 4C are diagrams showing defects that occur in the manufacturing process of the liquid crystal color filter substrate. 4A to 4C, the liquid crystal color filter substrate includes a transparent substrate, a lattice pattern called a black matrix 51 formed on the surface 30a, and a plurality of sets of R (red) pixels 52, G. (Green) pixel 53 and B (blue) pixel 54 are included. In the manufacturing process of the liquid crystal color filter substrate, the white defect 55 in which the color of the pixel or the black matrix 51 is lost as shown in FIG. 4A, or the adjacent pixel and color as shown in FIG. 4B. Are mixed, or a black defect 56 in which the black matrix 51 protrudes from the pixel, or a foreign object defect 57 in which a foreign object adheres to the pixel as shown in FIG.

  In general, a white defect is corrected by applying ink of the same color as the color that has been lost to the white defect portion. For black defects, the black defect portion is first removed by a laser or the like and converted into a white defect, and then the white defect portion is coated with ink of the same color as the color that has been lost. Do.

  JP-A-9-236933, JP-A-2002-333725, and JP-A-2008-296148 describe a defect correction apparatus that corrects a defect by applying ink to a white defect using a needle. Has been.

JP 9-236933 A JP 2002-333725 A JP 2008-296148 A

  However, in the defect correction apparatuses described in Japanese Patent Application Laid-Open Nos. 9-236933 and 2002-333725, the observation optical system and the application mechanism including the application needle are mounted on the same correction head, and are relative to each other. The positional relationship is fixed. For this reason, first the defect position (application position) is specified by the observation optical system, and then the tip position of the application needle of the application mechanism is moved vertically above the defect position to proceed to the application operation. Since the axis is shifted by an amount corresponding to the amount of movement from the defect position, the state of the defect being applied cannot be observed using the observation optical system.

  In the defect correction apparatus disclosed in Japanese Patent Application Laid-Open No. 2008-296148, an application mechanism including an application needle is provided so that the relative positional relationship with respect to the observation optical system can be changed by an XYZ stage. Therefore, when the tip position of the application needle is moved to a position immediately above the defect position (application position) to move to the application operation, only the application mechanism can be moved without moving the optical axis of the observation optical system from the defect position. .

  However, since the coating needle is arranged on the optical axis of the observation optical system between the observation optical system and the coating position, it is impossible to observe the state of the defect during the coating using the observation optical system. .

  The present invention has been made to solve the above-described problems. A main object of the present invention is to provide a coating mechanism capable of observing a state of a defect during coating using an observation optical system and a defect correcting apparatus using the coating mechanism.

  A defect correction apparatus according to the present invention is a coating apparatus that applies a liquid material to a fine region on the surface of an object, and an application unit that applies the liquid material to the fine region, and an observation optical system that can observe the fine region; Is provided. The observation optical system is provided so that the angle formed by the optical axis of the observation optical system and the surface can be changed.

  An object of the present invention is to provide a coating mechanism capable of observing a state of a defect during coating using an observation optical system and a defect correcting apparatus using the coating mechanism.

It is a perspective view for demonstrating the defect correction apparatus which concerns on this Embodiment. It is a side view for demonstrating the coating device which concerns on this Embodiment. It is a side view for demonstrating the coating device which concerns on this Embodiment. It is a top view for demonstrating the defect of a liquid crystal color filter. It is a side view for demonstrating the conventional coating device. It is a side view for demonstrating the modification of the coating device which concerns on this Embodiment. It is a side view for demonstrating the modification of the coating device which concerns on this Embodiment. It is a side view for demonstrating the modification of the coating device which concerns on this Embodiment.

  Embodiments of the present invention will be described below with reference to the drawings. In the following drawings, the same or corresponding parts are denoted by the same reference numerals, and description thereof will not be repeated.

First, the outline of the embodiment of the present invention will be enumerated.
(1) The coating apparatus 100 according to the present embodiment is a coating apparatus 100 that applies a liquid material to a fine region on the surface 30a of the object 30, and includes a coating unit 10 that applies the liquid material to the fine region, And an observation optical system 1 capable of observing the region. The observation optical system 1 is provided such that the angle θ (see FIG. 3) formed by the optical axis L (see FIG. 3) of the observation optical system 1 and the surface 30a can be changed.

  In this way, by changing the angle θ formed by the optical axis L of the observation optical system 1 and the surface 30a, the state of the defect (fine region) during the application of the liquid material by the application unit 10 is performed. Can be observed using the observation optical system 1. As a result, it is possible to grasp and correct the displacement of the application position at an early stage. Further, since the optimum application condition can be found for each defect in the substrate 30 from the state of the defect during the application of the liquid material by the application unit 10, the condition setting time can be shortened. . Therefore, the defect repairing operation can be proceeded more efficiently.

  (2) The observation optical system 1 is provided so that it can be positioned so that the optical axis L reaches the fine area without intersecting the application part 10 in a state where the application part 10 applies the liquid material to the fine area. ing.

  In this way, the observation optical system 1 uses the observation optical system 1 to observe the state of the fine region without being blocked by the application unit 10 even when the application unit 10 is applying the liquid material to the fine region. Can be observed.

  (3) The optical axis so as to change the angle θ formed by the optical axis L of the observation optical system 1 and the surface 30a in the circumferential direction of the circle on the plane intersecting the surface 30a centered at one point A of the fine region Further provided is a rotating portion 6 that allows L to move.

  In this way, by moving the observation optical system 1 by the rotation unit 6, the optical axis L of the observation optical system 1 can be moved so as to reach a fine region without the coating unit 10 intersecting. . As a result, even when the application unit 10 is applying the liquid material to the fine region, it is possible to observe the state of the fine region using the observation optical system 1 without being blocked by the application unit 10.

  (4) The optical axis L of the observation optical system 1 and the surface 30a in the circumferential direction of a circle centering on one point located at a position away from the surface 30a in the direction perpendicular to the surface 30a and intersecting the surface 30a The rotation unit 6 is further provided to allow the optical axis L to be moved so as to change the angle θ formed by.

  In this manner, the angle θ formed by the optical axis L of the observation optical system 1 and the surface 30a is changed by the rotating unit 6, and the observation is performed in at least one of the direction along the surface 30a and the vertical direction. By moving the optical system 1, the optical axis L of the observation optical system 1 can be moved so as to reach a fine region without the application unit 10 intersecting. As a result, even when the application unit 10 is applying the liquid material to the fine region, it is possible to observe the state of the fine region using the observation optical system 1 without being blocked by the application unit 10.

  (5) While maintaining the angle θ between the optical axis L of the observation optical system 1 and the surface 30a in a state where the optical axis L is moved by the rotating unit 6, the direction perpendicular to the surface 30a and along the surface 30a are maintained. It further includes a moving unit that allows the observation optical system 1 to move in the direction.

  In this way, even if the rotation center of the observation optical system 1 by the rotation unit 6 is set at an arbitrary position from the surface 30a, the optical axis L of the observation optical system 1 reaches the fine region without the application unit 10 intersecting. Can be moved. As a result, even when the application unit 10 is applying the liquid material to the fine region, it is possible to observe the state of the fine region using the observation optical system 1 without being blocked by the application unit 10.

  (6) The defect repair apparatus 200 according to the present embodiment includes any of the coating apparatuses 100 described above.

  By using such a defect repairing apparatus 200, it is possible to grasp and correct the displacement of the application position at an early stage, and to shorten the time for deriving the optimum application condition for each defect in the substrate 30. Can do. As a result, it is possible to proceed with defect repair work more efficiently.

  Next, with reference to FIGS. 1-3, the coating device 100 and the defect repair apparatus 200 which concern on this Embodiment are demonstrated. The defect repairing apparatus 200 is equipped with a coating apparatus 100, a Z table 21 on which the coating apparatus 100 is mounted and the coating apparatus 100 can be moved in a direction perpendicular to the surface 30a of the object 30 (liquid crystal color filter substrate 30). An X table 22 that mounts the Z table 21 so that the Z table 21 can be moved in the direction (X direction) along the surface 30a, and an X table 22 that mounts the X table 22 along the surface 30a. And a Y table 23 that can move in the same direction (Y direction). The defect repairing apparatus 200 cures, for example, a cutting laser device (not shown) in which the black defect 56 (see FIG. 4) is the white defect 55 (see FIG. 4) or the correction ink applied to the white defect 55. The ink curing light source (not shown) may be further provided.

  The coating apparatus 100 is an apparatus that applies and corrects a liquid material (correction ink) to a fine region (white defect 55) on the surface 30a of the liquid crystal color filter substrate 30. The coating apparatus 100 includes a coating unit 10, an observation optical system 1, a rotation unit 6 on which the observation optical system 1 is mounted, and a base unit 7 that supports them.

  The application unit 10 corrects the white defect 55 by applying correction ink. The application unit 10 includes an application needle 11 that guides correction ink to the white defect 55, an ink container 13 that stores the correction ink, and a head unit 14 that holds the application needle 11 and the ink container 13. Further, the application unit 10 includes a Z stage 15 that allows the head unit to move in a direction (Z-axis direction) perpendicular to the surface 30a of the substrate 30, and a direction (X-axis or Y-axis direction) along the surface 30a. It further has an X stage 16 and a Y stage 17 that allow the head unit 14 to move. Thereby, the application unit 10 is provided to be movable relative to the observation optical system 1. The application part 10 is fixed to a base part 7 supporting an observation optical system 1 described later by an attachment stay 8.

  The observation optical system 1 includes the presence or absence of a defect (white defect 55, black defect, etc.) in the substrate 30, the application state of the correction ink by the application unit 10 to the white defect 55, or the state of the correction ink applied to the white defect 55. Observe etc. The observation optical system 1 includes a microscope main body 2, an objective lens 3, a CCD camera 4, and a light source 5 for illumination. An image observed by the microscope 2 is converted into an electrical signal by the CCD camera 4 and displayed on an external monitor (not shown). The observation optical system 1 is supported by the rotation unit 6 so as to be rotatable with respect to the base unit 7 in the coating apparatus 100.

  The rotating unit 6 is centered on one point A of the white defect 55 and has a circumferential direction of a circle in a plane intersecting the surface 30a (for example, a circumferential direction of a circle in a plane (XZ plane) perpendicular to the surface 30a (XY plane)). In the circumferential direction around the Y axis, the optical axis L can be moved so as to change the angle θ (see FIG. 3) formed by the optical axis L of the observation optical system 1 and the surface 30a. Although the rotation part 6 should just have arbitrary structures, it is a gonio stage etc., for example. In this case, the rotation part 6 has the fixed part 6A and the movable part 6B, for example. The fixed portion 6A is fixed to the base portion 7 of the coating apparatus 100 and has a surface circumscribing the circular arc of the circle, and the movable portion 6B is mounted with the observation optical system 1 and has a surface inscribed in the circular arc of the circle. Have. That is, the rotation part 6 is provided so that the fixed part 6A and the movable part 6B can be relatively moved in the circumferential direction with the surface as a sliding surface.

  The range of the angle θ formed by the optical axis L of the observation optical system 1 and the surface 30 a that can be changed by the rotation unit 6 is the range of the observation optical system 1 when the application unit 10 applies the correction ink to the white defect 55. As long as the optical axis L is provided so as to be able to reach the white defect 55 without intersecting the application part 10, it may be provided arbitrarily.

  Further, the rotation unit 6 can reach the white defect 55 without the optical axis L of the observation optical system 1 intersecting the application unit 10 at least in a state where the application unit 10 applies the correction ink to the white defect 55. The observation optical system 1 is provided at a position where the white defect 55 can be observed.

  Since the base unit 7 is mounted on the Z table 21, the coating apparatus 100 is provided so as to be movable by the Z table 21, the X table 22, and the Y table 23 in the defect repairing apparatus 200.

  The coating apparatus 100 is operated as follows, for example. First, the coating apparatus 100 is configured so that, for example, the sliding surface is positioned at a height corresponding to the radius of the circle with respect to the surface 30a with the optical axis L of the observation optical system 1 perpendicular to the surface 30a. Positioned in the axial direction. Next, the coating apparatus 100 is scanned on the XY plane, and when the white defect 55 (or the white defect 55 formed by irradiating the black defect with laser light) is confirmed by the observation optical system 1, the white defect 55. The rotation unit 6 is driven with the point A as the rotation center to change the angle θ between the optical axis L of the observation optical system 1 and the surface 30a. At the same time as or before and after the rotation of the rotating unit 6, the application unit 10 is moved to a position where the correction ink can be applied to the white defect 55 by the application needle 11. After that, while the appearance of the white defect 55 is confirmed by the observation optical system 1, the correction ink is applied to the white defect 55 by the application unit 10. When the correction ink applied to the white defect 55 is cured, the white defect 55 can be corrected. Note that the observation optical system 1 is in an initial state after applying correction ink to the white defect 55 (for example, the optical axis L of the observation optical system 1 is perpendicular to the surface 30a and corresponds to the radius of the circle with respect to the surface 30a). To the height at which the sliding surface is located).

  Next, operational effects of the coating apparatus 100 and the defect repair apparatus 200 according to the present embodiment will be described. According to the coating apparatus 100, by changing the angle θ formed by the optical axis L of the observation optical system 1 and the surface 30a, defects (fine regions) during the application of the correction ink by the coating unit 10 are changed. The state can be observed using the observation optical system 1. As a result, it is possible to grasp and correct the displacement of the application position at an early stage. Further, since the optimum application condition can be found for each defect in the substrate 30 from the state of the defect during the application of the liquid material by the application unit 10, the condition setting time can be shortened. it can.

  On the other hand, referring to FIG. 5, in the conventional defect repair apparatus 300, the angle θ (see FIG. 3) formed by the optical axis L of the observation optical system 1 and the surface 30a is not provided so as to be changeable. Depending on the direction in which the optical axis L of the observation optical system 1 is fixed (generally, the Z-axis direction), the application unit 10 is moved on the optical axis L to apply the correction ink. The state of the defect inside cannot be observed using the observation optical system 1. For this reason, even if the application position is displaced, it is difficult to grasp the defect without moving the observation optical system 1 after application and observing the defect again. Further, if the observation optical system 1 is moved after application and the defect is not observed again, it is not possible to confirm the application state. Therefore, it takes time to check the application state and derive optimum application conditions.

  Therefore, defect repair apparatus 200 according to the present embodiment can proceed with defect repair work more efficiently than conventional defect repair apparatus 200.

  In addition, the rotation unit 6 in the coating apparatus 100 according to the present embodiment has the optical axis L of the observation optical system 1 in the circumferential direction of a circle centering on one point A of the fine region and intersecting the surface 30a. Although the optical axis L is movably provided so as to change the angle θ formed between the surface 30a and the surface 30a, the present invention is not limited to this.

  Referring to FIGS. 6 to 8, rotating portion 6 is, for example, a circumferential direction of a circle on a plane centering on point B at a position away from surface 30 a in a direction perpendicular to surface 30 a and intersecting surface 30 a. , The optical axis L may be movably provided so as to change the angle θ formed by the optical axis L of the observation optical system 1 and the surface 30a.

  Referring to FIG. 7, in this case, from the state in which white defect 55 is confirmed by observation optical system 1 (for example, the state in which optical axis L of observation optical system 1 is perpendicular to surface 30a), the light of observation optical system 1 If the observation optical system 1 (the optical axis L) is simply moved by the rotating unit 6 so as to change the angle θ formed between the axis L and the surface 30 a, the optical axis L of the observation optical system 1 is separated from the white defect 55. It will shift. Therefore, in such a coating apparatus 100, the moving unit 18 that allows the observation optical system 1 to move independently of the coating unit 10 in at least one of the direction perpendicular to the surface 30a and the direction along the surface 30a. May be further provided.

  The moving unit 18 is a position where the optical axis L of the observation optical system 1 can reach the white defect 55 without intersecting the application unit 10 in a state where the application unit 10 applies the correction ink to the white defect 55 (white defect 55). The observation optical system 1 is movably provided at a position where 55 can be observed. Furthermore, it is preferable that the moving part 18 is provided so that the observation optical system 1 can be positioned at the observable position. In this way, it is possible to apply the correction ink to the white defect 55 by the application unit 10 while confirming the state of the defect with the observation optical system 1, and the application apparatus 100 and the defect correction apparatus according to the present embodiment. The same effect can be achieved.

  Referring to FIGS. 7 and 8, coating apparatus 100 including such rotating unit 6 and moving unit 18 is operated as follows, for example. After the white defect 55 is confirmed by the observation optical system 1, as shown in FIG. 7, the rotation unit 6 is first driven to change the angle θ between the optical axis L of the observation optical system 1 and the surface 30a. Thereafter, as shown in FIG. 8, the moving unit 18 is driven so that the optical axis L does not intersect the application unit 10 in the state where the application unit 10 applies the correction ink to the white defect 55. The observation optical system 1 may be moved to a position to reach (a position where the white defect 55 can be observed). Alternatively, after the white defect 55 is confirmed by the observation optical system 1, the moving unit 18 is first driven to rotate the rotation center B of the observation optical system 1 when the observation optical system 1 is at a position where the white defect 55 can be observed. After moving to a position overlapping the center, the rotation unit 6 is driven to change the optical axis L in the circumferential direction of the rotation center, thereby changing the angle θ formed by the optical axis L of the observation optical system 1 and the surface 30a. May be.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above description of the embodiments but by the claims, and is intended to include all modifications within the scope.

  DESCRIPTION OF SYMBOLS 1 Observation optical system, 2 Microscope main body, 3 Objective lens, 4 Camera, 5 Light source, 6 Rotating part, 6A Fixed part, 6B Movable part, 7 Base part, 8 Mounting stay, 10 Application part, 11 Application needle, 13 Ink Container, 14 head unit, 15, 16, 17 stage, 18 moving unit, 21, 22, 23 table, 30 liquid crystal color filter substrate (object), 30a surface, 100 coating device, 200 defect repair device.

Claims (6)

An application device for applying a liquid material to a fine region on the surface of an object,
An application part for applying the liquid material to the fine region;
An observation optical system capable of observing the fine region,
The observation optical system is a coating apparatus provided so that an angle formed by the optical axis of the observation optical system and the surface can be changed.   The observation optical system is provided so as to be positioned so that the optical axis reaches the fine area without intersecting the application part in a state in which the application part applies the liquid material to the fine area. The coating apparatus according to claim 1.   A rotating unit that allows the optical axis to move so as to change the angle formed by the optical axis and the surface in the circumferential direction of a circle on a plane that intersects the surface and that is centered on one point of the fine region The coating apparatus according to claim 2, further comprising:   The angle formed by the optical axis and the surface is changed in the circumferential direction of a circle around a point that is located away from the surface in a direction perpendicular to the surface and intersecting the surface. The coating apparatus according to claim 2, further comprising a rotation unit that allows the optical axis to move.   The observation optical system can be moved in a direction perpendicular to the surface and in a direction along the surface while maintaining the angle formed by the optical axis and the surface while the optical axis is moved by the rotating unit. The coating apparatus according to claim 4, further comprising a moving unit.   A defect repair apparatus comprising the coating apparatus according to claim 1.

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