KR20090117616A - Apply needle and use apply struture thereof, defect amending apparatus and apply method - Google Patents

Abstract

PURPOSE: An application needle, an application apparatus employing the same, a defect amending apparatus and an application method are provided to easily coat the liquid materials. CONSTITUTION: An application needle(1) attaches a liquid material to a front terminal part and applies the liquid material by contacting the front terminal part with a substrate. A tapered portion(2) is formed at the front terminal part which becomes narrow towards the front terminal part. A flat plane(3) is formed in the front terminal part. A liquid material supply unit is formed, which accumulates the liquid material and supplies it to the front terminal part.

Description

APPLICATION GUIDE AND APPLICATION MECHANISM, Flaw Correction Apparatus, and Application Method {APPLY NEEDLE AND USE APPLY STRUTURE THEREOF, DEFECT AMENDING APPARATUS AND APPLY METHOD}

The present invention relates to a coating needle, a coating mechanism, a defect correction device, and a coating method using the same, and in particular, a coating needle for attaching a liquid material to the tip end thereof and bringing the tip into contact with a substrate to apply the liquid material. And a coating mechanism, a defect correction device, and a coating method using the same.

In recent years, with the increase in size and precision of LCDs (liquid crystal displays), the number of pixels has increased, and manufacturing LCDs without defects has become difficult, and the probability of occurrence of defects has also increased. In such a situation, in order to improve the yield, a defect correction apparatus for correcting defects occurring in the manufacturing process of the color filter of the LCD has been indispensable in the production line.

In recent years, 65-inch LCDs are also commercially available. As shown in Figs. 19A and 19B, the size of one pixel is also about 740 µm × 240 µm from about 350 µm × 130 µm in the small panel. It is approximately four times in area ratio and has become very large. As the pixel size increases, the defect size also increases and the correction size also increases. In such a situation, even if the crystal quality is not a problem in the conventional small crystal size, a problem arises because it becomes an area visible to the naked eye in the large crystal size.

20A to 20C are diagrams showing a defect generated in the manufacturing process of the color filter of the LCD. 20 (a) to (c), the color filter includes a transparent substrate, a lattice pattern called a black matrix 50 formed on the surface thereof, and a plurality of sets of R (red) pixels 51. , G (green) pixel 52, and B (blue) pixel 53. In the manufacturing process of the color filter, as shown in FIG. 20 (a), the white defects 54 in which the color of the pixel and the black matrix 50 are omitted, or as shown in FIG. 20 (b), Colors are mixed, or black defects 55 in which the black matrix 50 is projected out of the pixels, and foreign matter defects 56 attached to the pixels as shown in FIG. 20C are generated.

As a method of correcting the white defect 54, ink of the same color as the pixel where the white defect 54 is present is attached to the tip of the coating needle, and the ink layer of the circular flat surface of the tip of the needle is attached to the white defect 54. There is a method of transferring and covering the white defect 54 with a circular ink layer (see Patent Document 1, for example).

In addition, as a method of correcting the black defect 55 or the foreign matter defect 56, a rectangular white defect 54 is formed by laser cutting a defective part, and a rectangular shape is formed using a coating needle having a rectangular tip flat surface. There is a method of transferring a rectangular ink layer into the white defects 54 (see Patent Document 2, for example).

In addition, there is a method of forming a groove or the like on the surface of the tip of the coating needle and supplying ink accumulated in the groove or the like to the contact portion between the tip of the coating needle and the substrate due to an imbalance in surface tension caused by contact between the tip of the coating needle and the substrate. (See Patent Document 3, for example).

Patent Document 1: Japanese Patent Application Laid-Open No. 9-61296

Patent Document 2: Japanese Patent Application Laid-Open No. 9-262520

Patent Document 3: Japanese Patent Application Laid-Open No. 2007-94341

However, in the method of Patent Document 1, since the white defect 54 is covered by a circular ink layer larger than the white defect 54, as shown in FIG. Is applied, and the overlap portion 57 of the ink is generated. As described above, when the correction size increases, this overlap 57 may be determined to be defective by visual inspection.

In addition, since only the ink adhering to the flat surface of the tip of the coating needle is transferred and applied, there is a problem that the amount of ink that can be applied at one time is small. It is also possible to increase the amount of ink applied when repeatedly applied, but it is necessary to reciprocate the application needle between the ink tank and the defect every time the application, and the correction time becomes long.

Moreover, in the method of patent document 2, since the shape of the tip of a coating needle was made rectangular, it is possible to apply ink in the same shape as a laser cut part, but it is necessary to position the coating needle tip with high precision in a laser cut part. . However, in recent years, since the board | substrate is enlarged, it is not easy to carry out high-precision positioning on the whole board | substrate surface.

In addition, since the coating size is determined by the size of the tip of the coating needle, when the laser cut size changes, it is necessary to replace the coating needle, resulting in poor workability.

In addition, similarly to Patent Document 1, since only the ink attached to the flat surface of the tip of the coating needle is transferred and applied, there is a problem that the amount of ink that can be applied at one time is small.

In addition, in the method of patent document 3, although ink stuck to the groove | channel of the surface of an application needle tip etc. can also be apply | coated, the quantity of ink which can be apply | coated at once is not enough, and in order to fix a big defect, it is apply | coated multiple times. Needs to be.

Then, the main objective of this invention is to provide the coating needle which can apply | coat a liquid material easily and quickly correctly, the application | coating mechanism, the defect correction apparatus, and the application method using the same.

The coating needle according to the present invention is a coating needle for applying a liquid material by attaching a liquid material to the distal end thereof and bringing the distal end into contact with a substrate. And a liquid material supply portion for accumulating and supplying the liquid material to the tip, and the liquid material supply portion includes one or two or more slit grooves formed from a flat surface to an upper portion of the tapered portion by dividing the tapered portion into a plurality of portions. Characterized in that.

Preferably, the liquid material supply portion further includes a through hole penetrating the coating needle in the radial direction on the upper portion of the tapered portion, and the slit groove is formed from the flat surface to the through hole.

Moreover, Preferably, the space | interval of the side wall of a slit groove is extended toward the same or upward from the front-end | tip to the upper part of a taper part.

Moreover, the application | coating mechanism which concerns on this invention was equipped with the said coating needle and the drive means which adhere | attaches a liquid material to the front-end | tip of a coating needle, and makes the tip contact a board | substrate, and apply | coats a liquid material, It is characterized by the above-mentioned.

Moreover, the defect correction apparatus which concerns on this invention hardens the said coating apparatus, the observation optical apparatus for observing a board | substrate, the laser irradiation mechanism which removes the defect part of a board | substrate, and the liquid material apply | coated to the defect part by an application | coating mechanism. And a positioning mechanism for relatively moving the ink curing mechanism, the application mechanism, the observation optical mechanism, the laser irradiation mechanism, and the ink curing mechanism in the directions perpendicular to and parallel to the substrate.

Moreover, the coating method which concerns on this invention apply | coats a liquid material by making the tip of a coating needle contact a board | substrate, making a liquid material adhere | attach to the front-end | tip of the said coating needle, and holding a coating needle perpendicular | vertical to a board | substrate. do.

Preferably, the application amount of the liquid material is adjusted by the time for bringing the tip of the coating needle into contact with the substrate.

Also preferably, the liquid material is applied in a line shape by relatively moving the coating needle and the substrate while the tip of the coating needle is brought into contact with the substrate.

In the applicator according to the present invention, a liquid material supply portion for accumulating and supplying liquid material to the tip is formed, and the liquid material supply portion is formed from one or two or more formed from a flat surface to an upper portion of the tapered portion by dividing the tapered portion into a plurality of portions. It includes a slit groove. Therefore, when the flat surface of the tip of the coating needle is brought into contact with the substrate, the liquid material accumulated in the upper portion of the tapered portion and the slit groove is supplied to the tip by capillary action and applied to the substrate. Therefore, more liquid materials can be applied easily and quickly than before. For example, when ink is applied to the white grains of the color filter, the tip of the coating needle can be easily and quickly applied to the entire white grains by bringing the tip of the coating needle into contact with the white grains.

FIG. 1 (a) is a front view showing the distal end portion of the coating needle 1 according to one embodiment of the present invention, and FIG. (B) is a sectional view taken along the line IB-IB in FIG. 2 (a) is a front view showing a state in which the ink 5 is attached to the tip end of the coating needle 1, and FIG. 2 (b) is a sectional view taken along the line IIB-IIB of FIG.

1 (a) and (b), the tip of the coating needle 1 has a tapered portion whose cross-sectional area of the coating needle 1 gradually increases from the tip of the coating needle 1 toward the base end. 2) is provided, and the flat surface 3 is provided at the tip of the coating needle 1, and the taper part 2 is divided into two, and the flat surface 3 to the upper part of the taper part 2 is provided. The slit groove 4 of a predetermined dimension is formed over.

Thus, when the coating needle 1 is pulled out from an ink tank by providing the taper part 2, the flat surface 3, and the slit groove 4 in the front-end | tip part, it will show in FIG.2 (a), (b). As described above, residual ink is generated on the upper portion of the tapered portion 2 by the surface tension, the flat surface 3 and its vicinity are covered with a thin ink layer, and the ink 5 is accumulated in the slit groove 4. When the flat surface 3 at the tip of the coating needle 1 is brought into contact with the substrate surface, an imbalance of surface tension occurs due to the adhesion of the ink 5 to the substrate surface, and the upper portion of the tapered portion 2 or the slit groove 4 ), The ink 5 accumulated therein is supplied to the front end through the slit groove 4 by capillary action and applied to the substrate. For example, in the case of applying the ink 5 to the white grain of the color filter, the tip of the coating needle 1 is brought into contact with the center of the white defect so that the ink 5 can be quickly and easily placed on the entire white defect. Can be applied.

3 (a), (b) to 10 (a), (b) are diagrams showing a modified example of the embodiment. 3 (a), (b), 5 (a), (b), 7 (a), (b), and 9 (a) and (b) respectively, FIGS. 1 (a) and (b) and (b), (b), 6 (a), (b), 8 (a), (b), and 10 (a) and (b), respectively. Is a view contrasted with FIGS. 2 (a) and 2 (b).

In the modified examples of FIGS. 3A, 3B, and 4A, 2B, two slits 4 are formed crosswise, and FIGS. 5A, 6B, and 6A ), (b), the three slits 4 are formed at 120 degree intervals. Since the amount of ink accumulated in the slit groove 4 increases as the number of the slit grooves 4 increases, the amount of the ink 5 flowing out of the contact portion between the coating needle 1 and the substrate increases. Moreover, a large amount of ink 5 can be made to flow out in a shorter time, and the correction time can be shortened.

In the modified example of FIG.7 (a), (b) and FIG.8 (a), (b), the coating needle 1 penetrated in the radial direction (direction orthogonal to a center line) in the upper part of the taper part 2, The cylindrical through hole 6 is formed, and the slit groove 4 is formed from the flat surface 3 to the through hole 6. In this modification, since the ink 5 is also accumulated in the through hole 6, the ink application amount is increased. Thus, it is possible to apply on a larger area or on a longer line. In addition, when the diameter of the flat surface 3 of the tip of the coating needle 1 becomes small, as shown to FIG. 3 (a), (b), FIG. 5 (a), (b), the some slit groove ( It is difficult to form 4) due to dimensional constraints. This modification is effective to increase the ink coating amount in such a case.

In the modified example of FIGS. 9A, 9B, and 10A, 10B, the slit groove 4 has a width (space | interval of side walls) gradually widening toward the upper part of the coating needle 1 It is formed in a wedge shape. In this modification, more ink 5 can be accumulated in the slit groove 4 than in the modifications of Figs. 7 (a) and 7 (b).

11 (a) to 11 (e) are cross-sectional views showing an operation of applying the ink 5 to the surface of the substrate 7 using the applicator 1, and FIGS. It is an enlarged view of the front end of the coating needle 1 shown to FIG. 11 (a)-(e).

First, as shown in Figs. 11 (a) and 11 (f), the coating needle 1 having the ink 5 attached to the tip end is kept perpendicular to the surface of the substrate 7, and the coating needle 1 For example, the tip of is positioned above the central part of the white defect. Subsequently, as shown in FIGS. 11B and 11G, the flat surface 3 at the tip of the coating needle 1 is held in contact with the surface of the substrate 7. Thereby, the ink 5 adhering to the flat surface 3 at the tip of the coating needle 1 is extruded to the outer circumference of the flat surface 3. At this time, the ink 5 accumulated in the extruded ink 5 and the slit groove 4 are connected to each other so that an unbalance occurs in the surface tension of the ink 5 and the accumulated ink and the slit groove 4 are accumulated. Ink 5 flows out to the contact portion between the coating needle 1 and the substrate 7 as shown in Figs. 11C and 11H by capillary action. Since the quantity of the ink 5 which flows out into this contact part increases with time, the quantity of the ink 5 which flows out from the coating needle 1 to the surface of the board | substrate 7 makes the coating needle 1 the board | substrate 7 Can be managed by the time to keep in contact with.

As shown in Fig. 11 (d), (e), (i), and (j), when the coating needle 1 is moved upward, the ink layer 8 is formed on the surface of the substrate 7. When the coating needle 1 is moved upward, and a space | interval arises between the surface of the board | substrate 7 and the flat surface 3 of the front-end | tip of the coating needle 1, the ink 5 also flows in this space | interval. Since the flow velocity of the ink 5 at this time is determined by the characteristics of the viscosity of the ink 5, the wettability with respect to the surface of the board | substrate 7, etc., the speed which moves the coating needle 1 upward accordingly is accordingly. By adjusting, the amount of ink 5 applied to the surface of the substrate 7 and the thickness of the ink layer 8 can be adjusted.

12 (a) to 12 (e) are cross-sectional views showing another operation of applying the ink 5 to the surface of the substrate 7 using the application needle 1. 12A to 12E, a color filter film 9 is formed on the surface of the substrate 7, for example, black defects are laser cut to remove a part of the color filter film 9 in a rectangle. It is. Conventionally, the circular ink layer is transferred so as to cover the laser cut portion 10 by using a coating needle having a circular flat surface larger than the laser cut portion 10, or a rectangular flat surface having the same dimensions as the laser cut portion 10. A rectangular ink layer is transferred into the laser cut portion 10 using an application needle having a thickness. In this invention, the coating needle 1 which has the flat surface 3 smaller than the laser cut part 10 is used.

First, as shown in Fig. 12 (a), the coating needle 1 having the ink 5 of the same color as the color filter film 9 attached to the tip end is held perpendicular to the surface of the substrate 7, Further, the tip of the coating needle 1 is positioned above the central portion of the laser cut portion 10. Subsequently, as shown in FIG. 12 (b), the flat surface 3 at the tip of the coating needle 1 is held in contact with the surface of the substrate 7. Thereby, the ink 5 adhering to the flat surface 3 at the tip of the coating needle 1 is extruded to the outer circumference of the flat surface 3. At this time, the extruded ink 5 and the ink 5 accumulated in the slit groove 4 are connected to each other, so that the ink 5 accumulated in the slit groove 4 is capillary phenomenon, and the result is shown in FIG. As shown in Fig. 1), it flows out to the contact portion between the coating needle 1 and the substrate 7. Since the quantity of the ink 5 which flows out into this contact part increases with time, the quantity of the ink 5 which flows out from the coating needle 1 to the surface of the board | substrate 7 makes the coating needle 1 the board | substrate 7 Can be managed by the time to keep in contact with. The amount of the ink 5 is set according to the area and the thickness of the laser cut color filter film 9.

The ink 5 leaked to the contact portion between the coating needle 1 and the substrate 7 is spread over the entire laser cut portion 10 so as to be sucked by the capillary phenomenon at the stepped corner portion of the laser cut color filter film 9. , Is charged. For this reason, even if the application position shifts slightly, the ink 5 can be filled in the whole laser cut part 10, and the edge of the application needle 1 does not scratch the peripheral top part, either. Therefore, defects of high quality can be corrected even if the application position precision is not as high as conventional. As shown in Figs. 12 (d) and 12 (e), when the coating needle 1 is moved upward, the ink layer 11 is formed in the laser cut portion 10, and the color filter film 9 is corrected. To exit.

13 (a) and 13 (b) are cross-sectional views showing yet another operation of applying the ink 5 to the surface of the substrate 7 using the application needle 1. In FIGS. 13A and 13B, the coating needle 1 and the substrate 7 in a relatively horizontal direction in a state where the flat surface 3 at the tip of the coating needle 1 is in contact with the surface of the substrate 7. By moving, it becomes possible to apply | coat the ink 5 to the surface of the board | substrate 7 in line shape.

14 (a), (b) and 15 (a), (b) are diagrams showing comparative examples of the embodiment, and FIGS. 1 (a), (b) and 2 (a), (( This is in contrast to b). 14 (a), (b) and 15 (a), (b), the cross-sectional area of the coating needle 15 toward the proximal end from the tip of the coating needle 15 at the tip end of the coating needle 15. A tapered portion 16 which is gradually enlarged is provided, and a flat surface 17 is provided at the tip of the coating needle 15. However, the slit groove 4 like the coating needle 1 is not formed. By providing the tapered portion 16 and the flat surface 17 at the tip portion as described above, when the coating needle 15 is pulled up from the ink tank, residual ink is generated on the upper portion of the tapered portion 16 due to the surface tension. The flat surface 17 and its vicinity are covered with a thin ink layer.

16A to 16E are sectional views showing an operation in which the ink 5 is applied to the surface of the substrate 7 using the application needles 15 shown in FIGS. 14A and 14B. 16 (f) to (j) are enlarged views of the tip of the coating needle 15 shown in Figs. 16 (a) to (e), respectively.

First, as shown in FIGS. 16A and 16F, the coating needle 15 having the ink 5 attached to the tip end is held perpendicular to the surface of the substrate 7, and the coating needle 15 is further applied. Position the tip of the to a predetermined position. Subsequently, as shown in Figs. 16 (b), (c), (g), and (h), the flat surface 17 at the tip of the coating needle 15 is held in contact with the surface of the substrate 7. Thereby, the ink 5 adhering to the flat surface 17 at the tip of the coating needle 15 is extruded to the outer circumference of the flat surface 17. At this time, even if the contact holding time of the coating needle 15 and the substrate 7 is lengthened, the amount of the ink 5 flowing out of the contact portion between the coating needle 15 and the substrate 7 hardly changes. This is because only the ink 5 attached to the flat surface 17 at the tip of the coating needle 15 is transferred and coated. As shown in Figs. 16 (d), (e), (i), and (j), when the coating needle 15 is moved upward, the ink layer 18 is formed on the surface of the substrate 7. In this coating needle 15, even when the contact holding time of the coating needle 15 and the board | substrate 7 is extended, the quantity of the ink 5 which flows out into the contact part of the coating needle 15 and the board | substrate 7 changes substantially. Since it is not, the ink coating as shown in Figs. 12 (a) to (j) and 13 (a) and (b) cannot be performed.

FIG. 17 shows the configuration of the ink application mechanism 21 for applying the ink 5 using the application needle 1 shown in FIGS. 1A, 13B, 13B, 13B, and 13B. Some omitted perspective views are shown. In FIG. 17, the ink application mechanism 21 includes an application needle 1 for applying ink and an application needle drive cylinder 22 for vertically driving the application needle 1. The coating needle 1 is provided at the distal end of the drive shaft 23 of the coating needle driving cylinder 22 via the supporting member 24.

The ink application mechanism 21 includes a rotary table 25 provided horizontally, and on the rotary table 25 a plurality of ink tanks 28 to 31 are sequentially arranged in the circumferential direction, and the rotary table ( The cleaning apparatus 32 and the air purge apparatus 33 are provided on 25. The rotating shaft 26 is erected at the center of the rotating table 25. Moreover, the notch part 27 for passing the needle 1 at the time of ink application | coating is formed in the rotary table 25. As shown in FIG. Ink 5 of each color of R (red), G (green), B (blue), and black is appropriately injected into the ink tanks 28 to 31, respectively. The cleaning device 32 is for removing the ink 5 attached to the coating needle 1, and the air purge device 33 is for blowing off the cleaning liquid attached to the coating needle 1.

The ink application mechanism 21 further includes an index plate 35 which includes an index motor 34 for rotating the rotary shaft 26 of the rotary table 25, and which rotates together with the rotary shaft 26. And the index sensor 36 for detecting the rotational position of the rotary table 25 through the index plate 35 and the rotational position of the rotary table 25 returned to the origin through the index plate 35. An origin return sensor 37 is provided. The motor 34 is controlled based on the outputs of the sensors 36 and 37, and rotates the rotary table 25 to form the notches 27, the ink tanks 28 to 31, the cleaning device 32, and the air purge device. Any one of (33) is positioned below the coating needle 1.

In addition, the coating needle drive cylinder 22 and the motor 34 are fixed to a Z-axis table (not shown), and the Z-axis table and the color filter substrate targeted for defect correction are XY below the coating needle 1. It is relatively positioned by a table (not shown).

Next, the operation of this ink application mechanism 21 will be described. First, an XY table and a Z-axis table are driven, and the front-end | tip of the coating needle 1 is positioned in the predetermined position above the defect part of a color filter substrate. Subsequently, the rotary table 25 is rotated by the motor 34 so that the desired ink tank (for example, 28) is moved under the coating needle 1. Next, the coating needle 1 is driven up and down by the coating needle driving cylinder 22, and the ink 5 adheres to the front end of the coating needle 1.

Subsequently, the rotary table 25 is rotated by the motor 34, and the notch part 27 is moved below the coating needle 1. Next, the coating needle 1 is driven up and down by the coating needle driving cylinder 22, and the ink 5 attached to the tip of the coating needle 1 is applied to the defective portion of the color filter substrate.

At the time of washing | cleaning of the coating needle 1, the rotating table 25 is rotated by the motor 34, and the washing | cleaning apparatus 32 is moved below the coating needle 1. As shown in FIG. Next, the coating needle 1 is driven up and down by the coating needle driving cylinder 22, and the ink 5 adhering to the coating needle 1 is washed. Subsequently, the rotary table 25 is rotated by the motor 34, and the air purge device 33 is moved below the coating needle 1. Next, the coating needle 1 is driven up and down by the coating needle driving cylinder 22, and the cleaning liquid attached to the coating needle 1 is blown off.

FIG. 18: is a figure which shows the whole structure of the defect correction apparatus in which the ink application mechanism 21 shown in FIG. 17 was mounted. In FIG. 18, this defect correcting apparatus is classified into a largely divided into an observation optical system 40, a CCD camera 41, a laser 42, an ink application mechanism 21, and an ink curing illumination 43. A crystal head portion, a Z axis table 44 for moving the defect correction head portion in a vertical direction (Z axis direction) with respect to the substrate 7, and a Z axis table 44 for mounting and moving in the X axis direction. The X-axis table 45, the Y-axis table 46 for mounting the substrate 7 and moving in the Y-axis direction, the control computer 47 for controlling the operation of the entire apparatus, and the control computer 47 It consists of an operation panel 48 for inputting an instruction from an operator.

The observation optical system 40 is for observing the surface state of the board | substrate 7 and the state apply | coated by the ink application | coating mechanism 21. FIG. The image observed by the observation optical system 40 is converted into an electrical signal by the CCD camera 41 and displayed on the monitor screen of the control computer 47. The ink curing illumination 43 irradiates light for curing the ink 5 applied by the ink application mechanism 21. When the ink 5 is an ultraviolet curing type, ultraviolet light is selected as the ink curing light 43 and mounted on the apparatus. When the ink 5 is of the thermosetting type, halogen illumination is selected as the ink curing illumination 43 and mounted in the apparatus. The laser 42 is used to remove black defects and foreign defects. By the arrangement of this apparatus, white defects, black defects and foreign matter defects generated in the color filter can be corrected.

In this embodiment, when the flat surface 3 of the tip of the coating needle 1 is brought into contact with the surface of the substrate 7, the ink 5 accumulated in the slit groove 4 of the tip of the coating needle 1 is capillary phenomenon. By the outflow to the contact portion. Therefore, it is possible to fill and apply the ink 5 into the laser cut portion 10, and high quality defect correction without overlapping the top portion of the ink layer, which has been a conventional problem, becomes possible.

Moreover, since the ink amount which flows into a contact part increases with the contact time of the coating needle 1 and the board | substrate 7, it does not need to apply | coat several times like conventionally, and a correction tact is shortened.

In addition, when the ink 5 is filled and applied in the laser cut part 10, the filled ink 5 is sucked by the capillary phenomenon in the four corners of the laser cut color filter film 9, and a laser cut part (10) Since it spreads to the whole, the ink application position by the application needle 1 should just be near the center in the laser cut part 10, and it does not need the positioning of the high precision application position like conventionally, and the whole apparatus is inexpensive It becomes possible to produce with.

In addition, even when the coating needle 1 is brought into contact with the substrate 7 and the substrate 7 is slidably moved to apply the ink 5 in a line shape, it is possible to apply a longer distance than before. . In addition, since the application of a long distance is performed, even when correcting a large pixel, it is possible to correct by one slide coating, and the correction tact can be shortened. In addition, since correction can be performed by one slide application, unlike the case where the application is repeated a plurality of times, the ink 5 rarely dries on the way, so that the fluidity of the applied ink 5 is ensured and is uniform. Application of the film is possible, and the crystal quality is also improved.

It should be thought that embodiment disclosed this time is an illustration and restrictive at no points. The scope of the present invention is shown by above-described not description but Claim, and it is intended that the meaning of a claim and equality and all the changes within a range are included.

BRIEF DESCRIPTION OF THE DRAWINGS The figure which shows the structure of the front-end | tip part of the coating needle which concerns on one Embodiment of this invention.

FIG. 2 is a view showing a state in which ink adheres to the tip end of the coating needle shown in FIG. 1; FIG.

3 is a diagram illustrating a modification of the embodiment.

FIG. 4 is a view showing a state in which ink adheres to the tip portion of the coating needle shown in FIG. 3. FIG.

5 is a diagram showing another modified example of the embodiment.

FIG. 6 is a view showing a state in which ink adheres to the tip end of the coating needle shown in FIG. 5; FIG.

FIG. 7 is a diagram showing another modified example of the embodiment; FIG.

FIG. 8 is a view showing a state in which ink adheres to the tip portion of the coating needle shown in FIG. 7. FIG.

9 is a diagram showing still another modification of the embodiment.

FIG. 10 is a view showing a state in which ink adheres to the tip end of the coating needle shown in FIG. 9; FIG.

FIG. 11 is a view showing an ink application method using the application needle described in FIGS. 1 to 10.

Fig. 12 is another view showing the ink application method using the applicator needle described in Figs. 1 to 10;

FIG. 13 is yet another view showing the ink application method using the applicator described in FIGS. 1 to 10.

14 is a diagram illustrating a comparative example of the embodiment.

FIG. 15 is a view showing a state in which ink adheres to the tip portion of the coating needle shown in FIG. 14; FIG.

FIG. 16 is a view showing an ink application method using the applicator needle shown in FIG. 15.

FIG. 17 is a diagram illustrating a configuration of an ink application mechanism using the application needle described in FIGS. 1 to 10.

FIG. 18 is a diagram showing an overall configuration of a defect correction apparatus having the ink application mechanism shown in FIG. 17.

19 is a diagram illustrating a problem of color filters.

20 is a diagram illustrating a defect that occurs in a color filter.

Fig. 21 is a diagram showing a problem of the conventional ink application method.

(Explanation of symbols for the main parts of the drawing)

1, 15: coating needles 2, 16: tapered portion

3, 17: flat surface 4: slit groove

5: ink 6: through hole

7: substrate 8, 11, 18: ink layer

9 color filter film 10 laser cut portion

21: ink application mechanism 22: coating needle drive cylinder

23: drive shaft 24: support member

25: rotation table 26: rotation axis

27 notch part 28 to 31 ink tank

32: cleaning device 33: air purge device

34: motor 35: index plate

36: index sensor 37: home return sensor

40: observation optical system 41: CCD camera

42 laser 43 light for curing ink

44: Z axis table 45: X axis table

46: Y axis table 47: control computer

48: operation panel 50: black matrix

51: R pixel 52: G pixel

53: B pixel 54: white defect

5: black defect 56: foreign body defect

57: overlap

Claims (8)

In the coating needle for attaching a liquid material to the tip part, and contacting the tip to a substrate to apply the liquid material, A tapered portion tapering toward the tip is formed at the tip, A flat surface is formed at the tip, A liquid material supply unit for accumulating the liquid material and supplying the liquid material to the tip is formed, And said liquid material supply part comprises one or two or more slit grooves formed from said flat surface to the upper portion of said taper portion by dividing said taper portion into a plurality. The method of claim 1, The liquid material supply portion further includes a through hole penetrating the coating needle in the radial direction from the upper portion of the tapered portion, The slit groove is formed over the through hole from the flat surface. The method of claim 1, The spacing of the side walls of the slit grooves is widened from the front end to the same or upward from the tip portion to the upper portion of the tapered portion. The coating needle according to any one of claims 1 to 3, And a driving means for adhering the liquid material to the distal end of the coating needle and bringing the distal end into contact with the substrate to apply the liquid material. The coating apparatus of Claim 4, Observation optics for observing the substrate, A laser irradiation mechanism for removing a defective portion of the substrate; An ink curing mechanism for curing the liquid material applied by the coating mechanism; And a positioning mechanism for relatively moving said application mechanism, said observation optical mechanism, said laser irradiation mechanism, and said ink curing mechanism in a direction perpendicular to and parallel to said substrate. The tip of the coating needle is brought into contact with the substrate while the liquid material is attached to the tip portion of the coating needle according to any one of claims 1 to 3, while the coating needle is held perpendicular to the substrate. Coating method characterized by apply | coating a liquid material. The method of claim 6, The coating method of the said coating material is adjusted by the time which makes the front-end | tip of the said coating needle contact the said board | substrate. The method of claim 6, And applying the liquid material in a line shape by moving the coating needle and the substrate relative to each other in a state where the tip of the coating needle is in contact with the substrate.

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