CN100570439C - Applying mechanism and coating method, defect correction device and defect correcting method - Google Patents
Applying mechanism and coating method, defect correction device and defect correcting method Download PDFInfo
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- CN100570439C CN100570439C CNB2006100741201A CN200610074120A CN100570439C CN 100570439 C CN100570439 C CN 100570439C CN B2006100741201 A CNB2006100741201 A CN B2006100741201A CN 200610074120 A CN200610074120 A CN 200610074120A CN 100570439 C CN100570439 C CN 100570439C
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- liquid material
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Abstract
The invention provides a kind of application needle that can correctly, fast, easily apply liquid material.This application needle (1) forms taper at leading section, is provided with tabular surface (3) at front end, at the outer peripheral face formation groove (4) of leading section.When the tabular surface (3) of front end and substrate (6) when contacting, the printing ink (5) that stockpiles in (2) top, tapering and groove (4) flows out because of the capillarity forward end.Therefore, can easily apply a large amount of printing ink (5) fast.
Description
(1) technical field
The present invention relates to a kind of application needle, use applying mechanism, defect correction device, coating method and the display panels of application needle defect correcting method, especially relate to leading section and be attached with liquid material, front end and contact defect correcting method with fine zone on the substrate with the application needle that applies liquid material, the applying mechanism that uses this application needle, defect correction device, coating method and display panels usefulness color filter with color filter.
(2) background technology
Maximization, height along with LCD (LCD) becomes more meticulous in recent years, and number of picture elements also increases, thereby is difficult to make flawless LCD, and the probability that defective takes place increases gradually.Under these circumstances in order to improve the qualification rate of product, the defect correction device that the defective that the color filter of LCD is taken place in manufacturing process is revised is absolutely necessary concerning production line.
And, also sell the LCD of 37～45 inches degree recently on the market, the size of 1 pixel also increases to about 200 μ m * 600 μ m from about the 60 μ m * 200 μ m of small panel.Along with the increase of pixel size, flaw size also increases gradually, revises size and also increases gradually.Under these circumstances, unquestioned correction quality will become visual visible zone during in the past little correction size when big correction size, thereby the situation that becomes problem presents gradually.
Figure 45 (a)～(c) is the figure that is illustrated in the defective that takes place in the color filter manufacturing process of LCD.In Figure 45 (a)～(c), color filter comprises: transparency carrier; The cancellate pattern that is called black matrix" 300 that forms on its surface; Organize R (redness) pixels 301, G (green) pixel 302 more, reach B (blueness) pixel 303.In the manufacturing process of color filter, the color that pixel shown in Figure 45 (a) or black matrix" 300 can take place comes off and shown in the white defective 304 that causes, Figure 45 (b) be exuded in the pixel with neighboring pixels blend of colors or black matrix" 300 and the foreign material shown in the black defective 305 that causes, Figure 45 (c) attached on the pixel and the foreign material defective 306 that causes etc.
The existing following method of revising white defective 304: will with the leading section of printing ink attached to application needle of the pixel same color that has white defective 304 on, the ink lay transfer printing of the circular, flat face of pin front end on white defective 304, is covered white defective 304 (for example with reference to patent documentation 1) with the ink lay of circle.The method that black defective 305 of following correction and foreign material defective 306 are also arranged: defect part is carried out forming behind the laser ablation the white defective 304 of rectangle, utilize to have of the ink lay transfer printing on the white defective 304 of rectangle (for example with reference to patent documentation 2) of the application needle of rectangle front end tabular surface with rectangle.
[patent documentation 1] Japanese patent laid-open 9-61296 communique
[patent documentation 2] Japanese patent laid-open 9-262520 communique
But, in the method for patent documentation 1, as shown in figure 46, cover white defective 304 because use than white defective 304 big circular ink laies, so the normal part around the white defective 304 also is coated with printing ink, produce overlapping 307 of printing ink.As mentioned above, when revising the size increase, occur this overlapping 307 sometimes and in visual examination, be judged as underproof situation.
And, only will carry out the transfer printing coating, so the few problem of quantity of ink that existence can apply for 1 time attached to the printing ink on the tabular surface of application needle front end.If repeat to apply the coating amount that repeatedly then can increase printing ink, but each coating, application needle all need move back and forth between ink tank and defective, thus the correction time is elongated.
In the method for patent documentation 2, because the shape of application needle front end has been made rectangle, thereby printing ink can be applied as the shape identical, but the application needle front end need be positioned in the laser ablation portion accurately with laser ablation portion.But in recent years along with the maximization of substrate, carrying out high-precision location on whole of substrate is not that part is easy to thing.
Because the size by the application needle front end decides the coating size, so when the laser ablation size changes, need to change application needle, the operation convenience is poor.
Identical with patent documentation 1, only will carry out the transfer printing coating, so the few problem of quantity of ink that existence can apply for 1 time attached to the printing ink on the tabular surface of application needle front end.
(3) summary of the invention
Fundamental purpose of the present invention is to provide a kind of defect correcting method that can correctly, fast, easily apply the application needle of liquid material, the applying mechanism that uses this application needle, defect correction device, coating method and display panels with color filter.
Applying mechanism of the present invention comprises: application needle; The container that keeps liquid material; The drive division that application needle is moved, application needle is attached with under the situation of liquid material at leading section, front end is contacted with fine zone on the substrate with the coating liquid material, be formed with the tapering that attenuates towards front end at leading section, be formed with tabular surface at front end, be formed with in the tapering and be used for to supply with the liquid material supply unit of front end attached to the liquid material on the leading section.
It is characterized in that, offer diameter and the roughly the same through hole of application needle in the bottom of container, drive division makes application needle relatively move with respect to container along its axis direction, makes the leading section of application needle stop at following at least 2 positions: the position of readiness that the liquid material in the leading section of application needle and the container contact and the leading section of application needle pass the coating position that through hole stretches out below the bottom of container.
The liquid material supply unit of application needle is groove preferably.The part of groove be preferably formed as into the width than the groove of other parts big.The liquid material supply unit is tabular surface preferably.Tabular surface preferably is divided into a plurality of zones, is provided with step between a plurality of zones.The liquid material supply unit is concave curved surface preferably.Concave curved surface preferably is divided into a plurality of zones, is provided with step between a plurality of zones.The tapering preferably is divided into a plurality of parts, and the liquid material supply unit is provided in a side of the step between a plurality of parts.
The drive division of applying mechanism preferably has the retaining member that application needle is kept with the form that tilts with predetermined angular with respect to substrate, and the tabular surface of application needle front end forms, and is parallel with substrate when application needle is kept obliquely by retaining member.
In the defect correction device of the present invention, the fine zone on the substrate is formed in the defective part of the fine pattern on the substrate.This defect correction device is characterized in that, comprising: trimming head has described applying mechanism, is used to observe the viewing optical system, irradiating laser of defective part to remove the laser radiation mechanism of defective part; Put the substrate platform of substrate; And the detent mechanism that makes trimming head and substrate platform relatively move and position, will be coated on the defective part attached to the liquid material of application needle leading section and revise.
The drive division of applying mechanism preferably includes: the 1st secondary drive division that application needle is moved along its axis direction or the direction vertical with substrate; And the 2nd secondary drive division that moves, at position of readiness, the front end of application needle is outside the visual field of viewing optical system, and in the coating position, the front end of application needle is in the visual field of viewing optical system. with making application needle and substrate almost parallel
Coating method of the present invention, it is characterized in that, make on the leading section of liquid material attached to the application needle of described applying mechanism, after making top, tapering produce hydrops portion by surface tension, make the front end and the substrate contacts of application needle, the liquid material of application needle front end is attached on the substrate and to produce surface tension inhomogeneous, from hydrops portion by the contact site supply liquid material of liquid material supply unit to application needle front end and substrate.
Preferably under the state of the front end of application needle and substrate contacts, application needle and substrate are relatively moved, wire ground coating liquid material on substrate.
Preferably make on the application needle leading section that tilt to keep with predetermined angular with respect to substrate and adhere to liquid material, by making the application needle front end in the visual field of viewing optical system and substrate contacts, thereby while observe coating state and apply.
The display panels of the present invention defect correcting method of color filter, be the method for utilizing the application needle of described applying mechanism that display panels is revised with the defective of color filter, display panels contains the color filter film that is formed on the substrate with color filter.This defect correcting method, it is characterized in that, utilize laser to remove the color filter film in zone bigger than the tabular surface of application needle front end and that contain defectiveness, leading section is attached with revise application needle front end with liquid material in the zone of removing inboard and in the front end of application needle and zone on every side normally the discontiguous position of part contact, will apply with liquid material with the correction of the big or small corresponding amount of the color filter film of removing.
Another display panels of the present invention defect correcting method of color filter, it is the method for utilizing the application needle of described applying mechanism that display panels is revised with the defective of color filter, it is characterized in that, display panels contains the color filter film that is formed on the substrate with color filter, utilize laser to remove the color filter film in zone bigger than the tabular surface of application needle front end and that contain defectiveness, make leading section be attached with the application needle front end of revising with liquid material and contact, the front end edge substrate surface of application needle is relatively moved use liquid material with coating correction in the regional inboard of removing.
Application needle of the present invention forms towards the tapering that front end attenuates at leading section, and front end is formed with tabular surface, is formed with the liquid material supply unit that is used for attached to the supply of the liquid material forward end on the leading section in the tapering.Therefore, make the tabular surface and substrate contacts of application needle front end after, then stockpile at the liquid material on top, tapering and will supply with, thereby be coated on the substrate by liquid material supply unit forward end.Therefore, and only the existing method of the liquid material transfer printing on the tabular surface of application needle front end on substrate compared, can be fast, easily a large amount of liquid materials are applied.For example, when printing ink being coated on the white defective of color filter, contact by making in application needle front end and the white defective, just can be correctly, fast, easily printing ink is coated on the whole white defective.
(4) description of drawings
Fig. 1 is the figure of formation of the application needle leading section of expression example 1 of the present invention.
Fig. 2 is the figure of the variation of expression example 1.
Fig. 3 is the figure of another variation of expression example 1.
Fig. 4 is the figure of a variation again of expression example 1.
Fig. 5 is the figure that the printing ink coating method of the illustrated application needle of Fig. 1～Fig. 4 has been used in expression.
Fig. 6 is another figure that the printing ink coating method of the illustrated application needle of Fig. 1～Fig. 4 has been used in expression.
Fig. 7 is the figure again that the printing ink coating method of the illustrated application needle of Fig. 1～Fig. 4 has been used in expression.
Fig. 8 is the another figure that the printing ink coating method of the illustrated application needle of Fig. 1～Fig. 4 has been used in expression.
Fig. 9 is the figure that the printing ink coating method of application needle has as a comparative example been used in expression.
Figure 10 is another figure that the printing ink coating method of application needle has as a comparative example been used in expression.
Figure 11 is the figure of formation that the printing ink applying mechanism of the illustrated application needle of Fig. 1～Fig. 8 has been used in expression.
Figure 12 is that expression has the figure that the integral body of the defect correction device of printing ink applying mechanism shown in Figure 11 constitutes.
Figure 13 is the figure of the printing ink coating method of expression example 2 of the present invention.
Figure 14 is the figure that is used to illustrate the effect of printing ink coating method shown in Figure 13.
Figure 15 is the figure of the interference avoiding method of expression application needle shown in Figure 14 and object lens.
Figure 16 is the figure that the integral body of the defect correction device of expression example 3 of the present invention constitutes.
Figure 17 is the formation of expression printing ink applying mechanism shown in Figure 16 and the figure of action.
Figure 18 is the figure of formation of the application needle leading section of expression example 4 of the present invention.
Figure 19 is the figure of the printing ink attachment state of expression application needle leading section shown in Figure 180.
Figure 20 is the figure of the variation of expression example 4.
Figure 21 is the figure of the printing ink attachment state of expression application needle leading section shown in Figure 20.
Figure 22 is the figure of another variation of expression example 4.
Figure 23 is the figure of the printing ink attachment state of expression application needle leading section shown in Figure 22.
Figure 24 is the figure of a variation again of expression example 4.
Figure 25 is the figure of the printing ink attachment state of expression application needle leading section shown in Figure 24.
Figure 26 is the figure of manufacture method that is used to illustrate the application needle of Figure 18～shown in Figure 25.
Figure 27 is another figure of manufacture method that is used to illustrate the application needle of Figure 18～shown in Figure 25.
Figure 28 is the figure of the another variation of expression example 4.
Figure 29 is the figure of the printing ink attachment state of expression application needle leading section shown in Figure 28.
Figure 30 is the figure of the another variation of expression example 4.
Figure 31 is the figure of the printing ink attachment state of expression application needle leading section shown in Figure 30.
Figure 32 is the figure of formation of the application needle leading section of expression example 5 of the present invention.
Figure 33 is the figure of the printing ink attachment state of expression application needle leading section shown in Figure 32.
Figure 34 is the figure of formation of the application needle leading section of expression example 6 of the present invention.
Figure 35 is the figure of the printing ink attachment state of expression application needle leading section shown in Figure 34.
Figure 36 is the figure of the variation of expression example 6.
Figure 37 is the figure of the printing ink attachment state of expression application needle leading section shown in Figure 36.
Figure 38 is the figure that expression utilizes the white defective that the pattern correction method of example 7 of the present invention revises.
Figure 39 is the figure that is used to illustrate the problem that exists when white defective shown in Figure 38 revised.
Figure 40 is another figure that is used to illustrate the problem that exists when white defective shown in Figure 38 revised.
Figure 41 is the figure of the pattern correction method of expression example 7 of the present invention.
Figure 42 is the figure of the variation of expression example 7.
Figure 43 is the figure of another variation of expression example 7.
Figure 44 is the figure that is used to illustrate the problem that exists when white defective shown in Figure 43 revised.
Figure 45 is the figure of the defective that produces on the color filter of expression.
Figure 46 is the figure of the existing existing problem of printing ink coating method of expression.
(component symbol explanation)
1,11,91,95,96 application needle, 2,12,92 taperings
3,13,51,93,94 tabular surfaces, 4 grooves
5 printing ink, 6,105 substrates
7,10,14,52 ink laies, 8 color filter films
9 12a of laser ablation portion, 12b part
12c, 94c, 97c step 21,65 printing ink applying mechanisms
22 application needle drive cylinder body 23 driving shafts
24,54 retaining members, 25 universal stages
26 turning axles, 27 notch parts
28～31 ink tank, 32 decontaminating apparatus
33 air purge apparatus, 34 motor
35 index plates, 36 calibration sensors
37 original point return sensing 40,62 viewing optical systems
43 ink solidifications illumination 44Z axle objective table
45X axle objective table 46Y axle objective table
47,69 control computers, 48 guidance panels
53 object lens, 55 secondary X-axis objective tables
61 defect correction devices, 63 monitors
Laser portion 66 substrate heating parts are used in 64 excisions
67 image processing parts, 68 principal computers
70XY objective table 71 clamping parts
72Z objective table 73 coating cylinder bodies
73a, 80a output shaft 74 coating assemblies
75 linear steering device 75a rail portion
78 container 78a, 78b hole
80 cylinder body portions, 81 housings
12a, 12b, 94a, 94b, 97a, 97b zone 100,300 black matrix"s
101,301R pixel 102,302G pixel
103,303B pixel 104,304 white defectives
305 black defective 306 foreign material defectives
307 overlapping portions
(5) embodiment
(example 1)
Fig. 1 (a) is the front view of leading section of the application needle 1 of expression example 1 of the present invention, Fig. 1 (b) is its upward view, Fig. 1 (c) is the A portion enlarged drawing of Fig. 1 (b), and Fig. 1 (d) is the ID-ID line cut-open view of Fig. 1 (a), and Fig. 1 (e) is the B portion enlarged drawing of Fig. 1 (d).
In Fig. 1 (a)～(e), leading section in this application needle 1 is provided with tapering 2, this tapering 2 is in the length range that not influenced by ink surface tension, the sectional area that makes application needle 1 enlarges towards cardinal extremity gradually from the front end of application needle 1, front end in application needle 1 is provided with tabular surface 3, and on the leading section outer peripheral face of application needle 1, the groove 4 of given size is formed at 2 top to the tapering from front end.
Like this, by tapering 2, tabular surface 3 and groove 4 are set at leading section, when with application needle 1 when ink tank is mentioned, the top in tapering 2 stockpiles portion because of surface tension produces printing ink, near tabular surface 3 and covered by thin ink lay has stockpiled printing ink in the groove 4.When the tabular surface 3 that makes application needle 1 front end contacts with substrate surface, because of printing ink produces capillary unbalancedly attached to substrate surface, stockpile on the top in tapering 2 and the printing ink in the groove 4 and supply with and be coated on the substrate by groove 4 forward end because of capillarity.For example, when printing ink being coated on the white defective of color filter, contact with white defective central portion by the front end that makes application needle 1, can be correctly, fast, easily printing ink is coated on the whole white defective.
The cross sectional shape of groove 4 is the square shown in Fig. 1 (a)～(e) both, the also semicircle shown in Fig. 2 (a), and the also wedge shape shown in Fig. 2 (b), Any shape can.
The number of groove 4 can be 1 shown in Fig. 1 (a)～(e) both, can be 2 shown in Fig. 3 (a) also, also 3 shown in Fig. 3 (b), and 4 shown in Fig. 3 (c) are also more than 5.The quantity of ink that the number increase of groove 4 then stockpiles in groove 4 increases, and increases to the quantity of ink of application needle 1 with the contact site outflow of substrate.Can in the shorter time, flow out a large amount of printing ink, also can shorten the correction time.
The width of groove 4 both can be shown in Fig. 1 (a)～(e), and was identical on the total length of groove 4, also can enlarge gradually towards cardinal extremity by the front end from application needle 1 shown in Fig. 4 (a).Also can be shown in Fig. 4 (b), form polygonal wide width part at the central portion of groove 4, also can be shown in Fig. 4 (c), form circular wide width part at the central portion of groove 4.Like this,, the volume of groove 4 can be increased, the identical effect of situation can be obtained with the number of above-mentioned increase groove 4 by the width of enlarged slot 4.In the method for the number that increases groove 4, the point diameter of application needle 1 hour, the number of groove 4 is restricted.Under these circumstances, like this at the width of the top enlarged slot 4 of application needle 1 front end, just can increase the quantity of ink that stockpiles in 1 groove 4 by this method.
Fig. 5 (a) is illustrated in the cut-open view that is attached with the state of printing ink 5 on the leading section of application needle 1 of Fig. 1～shown in Figure 4, and Fig. 5 (b) is the VB-VB line cut-open view of Fig. 5 (a).As application needle 1, illustration the structure shown in Fig. 3 (a) with 2 grooves 4.After the leading section in application needle 1 was stained with printing ink 5,2 top produced stockpiling of printing ink in the tapering because of surface tension, and printing ink 5 enters in the groove 4 that is formed on the leading section outer peripheral face, became the state of printing ink 5 savings in groove 4.
Fig. 6 (a)～(e) is that expression utilizes the application needle 1 of Fig. 5 (a) shown in (b) that printing ink 5 is coated in the cut-open view of substrate 6 lip-deep actions, and Fig. 6 (f)～(j) is respectively the enlarged drawing of application needle 1 front end shown in Fig. 6 (a)～(e).
At first, as Fig. 6 (a) (f) shown in, the application needle 1 that leading section is attached with printing ink 5 with respect to the Surface Vertical of substrate 6 kept, and the front end of application needle 1 for example is positioned at the central portion top of white defective.Then, as Fig. 6 (b) (g) shown in, the tabular surface 3 of application needle 1 front end contacted with the surface of substrate 6 and kept.Thus, be pressed against the periphery of tabular surface 3 attached to the printing ink 5 on the tabular surface 3 of application needle 1 front end.At this moment, the printing ink 5 that stockpiles in the printing ink 5 that is extruded and the groove 4 links to each other, it is unbalanced that thereby the surface tension of printing ink 5 produces, the printing ink 5 that stockpiles in printing ink that stockpiles and the groove 4 because of capillarity as Fig. 6 (c) (h) shown in to the contact site outflow of application needle 1 with substrate 6.As time goes on the amount of the printing ink 5 that flows out to this contact site increases, and can manage from the amount of application needle 1 to the printing ink 5 of the surface of substrate 6 outflow by application needle 1 contact maintenance with substrate 6 time.
As Fig. 6 (d) (e) (i) (j) shown in, after application needle 1 is moved towards the top, will form ink laies 7 on substrate 6 surfaces.Application needle 1 moves towards the top when making, between the tabular surface 3 of substrate 6 surface and application needle 1 front end during the generation gap, printing ink 5 also flows in this gap.This moment printing ink 5 flowing velocity by the viscosity of printing ink 5 with respect to characteristics such as the wettability decision on substrate 6 surfaces, by according to these situations, regulate the speed that application needle 1 moves towards the top, be coated in the amount of substrate 6 lip-deep printing ink 5 and the thickness of ink lay 7 with regard to scalable.
As mentioned above, groove 4 lower ends (end of the preceding extreme direction of application needle 1) are as long as be formed up to the lower part, promptly, might not connect to the tabular surface 3 of application needle 1 front end application needle 1 being remained the printing ink 5 and the part that the printing ink 5 that stockpiles in groove 4 can fully link to each other that contacting when, can guarantee to press to periphery from tabular surface 3 with substrate 6 surface.
Fig. 7 (a)～(e) is that expression utilizes the application needle 1 of Fig. 5 (a) shown in (b) printing ink 5 to be coated in the cut-open view of lip-deep another action of substrate 6.In Fig. 7 (a)～(e), be formed with color filter film 8 on the surface of substrate 6, for example black defective makes after by laser ablation the part of color filter film 8 be removed and forms rectangle.Be to utilize application needle that circular ink lay is carried out transfer printing covering laser ablation portion 9 with circular, flat face bigger than laser ablation portion 9 in the past, or utilize the application needle that has with the rectangular planar face of laser ablation portion 9 same sizes with the transfer printing of rectangle ink lay in laser ablation portion 9.Among the present invention, use application needle 1 with tabular surface 3 littler than laser ablation portion 9.
At first, shown in Fig. 7 (a), with leading section be attached with the application needle 1 of the printing ink 5 of color filter film 8 same colors with respect to the Surface Vertical of substrate 6 kept, and the front end of application needle 1 is positioned at the central portion top of laser ablation portion 9.Then, shown in Fig. 7 (b), the tabular surface 3 of application needle 1 front end is contacted with the surface of substrate 6 and kept.Thus, be pressed against the periphery of tabular surface 3 attached to the printing ink 5 on the tabular surface 3 of application needle 1 front end.At this moment, the printing ink 5 that stockpiles in the printing ink 5 that is extruded and the groove 4 links to each other, and stockpiles at the printing ink in the groove 45 to flow out to the contact site of application needle 1 with substrate 6 shown in Fig. 7 (c) because of capillarity.As time goes on the amount of the printing ink 5 that flows out to this contact site increases, and can manage from the amount of application needle 1 to the printing ink 5 of the surface of substrate 6 outflow by application needle 1 contact maintenance with substrate 6 time.The amount of printing ink 5 is to set according to the area and the thickness of the color filter film 8 of laser ablation.
In the step bight of the color filter film 8 after the printing ink 5 that the contact site of application needle 1 and substrate 6 flows out is inhaled into laser ablation by capillarity, and in whole laser ablation portion 9, spread, filling.Therefore, even the coating position has some deviations also printing ink 5 can be filled in the whole laser ablation portion 9, the normal portion around the front end of application needle 1 can not damage.Therefore, even the coating positional precision is not that such in the past high precision also can realize high-quality defect correction.As Fig. 7 (d) (e) shown in, application needle 1 is moved towards the top, finish the correction of color filter film 8.
Fig. 8 (a) is that expression utilizes the application needle 1 of Fig. 5 (a) shown in (b) printing ink 5 to be coated in the cut-open view of the lip-deep another action of substrate 6 (b).Fig. 8 (a) (b) in, under the tabular surface 3 of application needle 1 front end and substrate 6 surperficial state of contact, make application needle 1 and substrate 6 relative to moving towards horizontal direction, can on the surface of substrate 6, apply printing ink 5 in wire ground.
Fig. 9 (a) represents that the leading section of application needle 11 as a comparative example is attached with the cut-open view of the state of printing ink 5, and Fig. 9 (b) is the IXB-IXB line cut-open view of Fig. 9 (a).Fig. 9 (a) (b) in, leading section in this application needle 11 is provided with tapering 12, this tapering 12 is in the length range of the effect of surface tension that is not subjected to printing ink 5, and the sectional area that makes application needle 11 enlarges towards cardinal extremity gradually from the front end of application needle 11, is provided with tabular surface 13 at the front end of application needle 11.But, do not form the such groove of application needle 1.Like this, by tapering 12 and tabular surface 13 are set at leading section, in case application needle 11 is mentioned from ink tank, then 12 top produces printing ink and stockpiles portion in the tapering because of surface tension, and the ink lay that tabular surface 3 and near quilt thereof are thin covers.
Figure 10 (a)～(e) is that expression utilizes the application needle 11 of Fig. 9 (a) shown in (b) that printing ink 5 is coated in the cut-open view of the lip-deep action of substrate 6, and Figure 10 (f)～(j) is respectively the enlarged drawing of application needle 11 front ends shown in Figure 10 (a)～(e).
At first, as Figure 10 (a) (f) shown in, the application needle 11 that leading section is attached with printing ink 5 with respect to the Surface Vertical of substrate 6 kept, and the front end of application needle 11 is positioned at assigned position.Then, as Figure 10 (b) (c) (g) (h) shown in, the tabular surface 3 of application needle 11 front ends contacted with the surface of substrate 6 and kept.Thus, be pressed against the periphery of tabular surface 3 attached to the printing ink 5 on the tabular surface 3 of application needle 11 front ends.At this moment, even the retention time that contacts of application needle 11 and substrate 6 prolongs, the amount that flows to application needle 11 and the printing ink 5 of the contact site of substrate 6 does not almost change yet.This is owing to only will carry out the cause of transfer printing coating attached to the printing ink on the tabular surface 13 of application needle 11 front ends 5.As Figure 10 (d) (e) (i) (j) shown in, when making application needle 11 when mobile, form ink lay 14 on the surface of substrate 6 towards the top.When adopting this application needle 11, even prolong the retention time that contacts of application needle 11 and substrate 6, the amount that flows to application needle 11 and the printing ink 5 of the contact site of substrate 6 does not almost change yet, thereby can't carry out Fig. 7 and printing ink as shown in Figure 8 applies.
Figure 11 is the stereographic map after the part of formation of the printing ink applying mechanism 21 of the expression application needle 1 coating printing ink 5 that utilizes Fig. 1～shown in Figure 8 is omitted.In Figure 11, this printing ink applying mechanism 21 comprises that printing ink is coated with application application needle 1, the application needle that is used for vertical drive application needle 1 drives cylinder body 22.Application needle 1 is arranged on the leading section of driving shaft 23 that application needle drives cylinder body 22 by retaining member 24.
This printing ink applying mechanism 21 comprises horizontally disposed universal stage 25, along the circumferential direction disposes a plurality of ink tank 28～31 on universal stage 25 successively, and, on universal stage 25, be provided with decontaminating apparatus 32 and air purge apparatus 33.The upright turning axle 26 that is provided with at the center of universal stage 25.The notch part 27 that is used to pass pin 1 when in addition, on universal stage 25, forming the printing ink coating.In ink tank 28～31, inject the printing ink 5 of R (red), G (green), B (indigo plant) and black respectively aptly.Decontaminating apparatus 32 is used to remove attached to the printing ink on the application needle 15, and air purge apparatus 33 is used to blow off the detergent remover attached on the application needle 1.
The calibration that this printing ink applying mechanism 21 also has turning axle 26 rotations that are used to make universal stage 25 also is provided with motor 34: the calibration that the position of rotation that detects universal stages 25 with the index plate 35 of turning axle 26 rotations, by index plate 35 is used revert to the original point return sensor 37 that initial point is used with sensor 36, the position of rotation that detects universal stages 25 by index plate 35.Motor 34 is controlled according to the output of sensor 36,37, makes universal stage 25 rotations, makes any 1 below that is positioned at application needle 1 in notch part 27, ink tank 28～31, decontaminating apparatus 32 and the air purge apparatus 33.
Application needle drives cylinder body 22 and motor 34 is fixed on the Z axle objective table (not shown), Z axle objective table and carry out relative positioning as the color filter substrate of the defect correction object XY objective table (not shown) by application needle 1 below.
Then the action to this printing ink applying mechanism 21 describes.At first, drive XY objective table and Z axle objective table, the front end of application needle 1 is positioned on the assigned position of defective part top of color filter substrate.Then, make universal stage 25 rotation, make required ink tank (for example 28) move to the below of application needle 1 by motor 34.Then, drive cylinder body 22 by application needle and drive application needle 1 up and down, make the leading section of application needle 1 be attached with printing ink 5.
Then, make universal stage 25 rotations, make notch part 27 move to the below of application needle 1 by motor 34.Then, utilize application needle to drive cylinder body 22 and drive application needle 1 up and down, will be coated on the defective part of color filter substrate attached to the printing ink 5 on application needle 1 leading section.
When application needle 1 is cleaned, utilize motor 34 to make universal stage 25 rotations, make decontaminating apparatus 32 move to the below of application needle 1.Then, utilize application needle to drive cylinder body 22 and drive application needle 1 up and down, clean attached to the printing ink on the application needle 15.Then, utilize motor 34 to make universal stage 25 rotations, make air purge apparatus 33 move to the below of application needle 1.Then, utilize application needle to drive cylinder body 22 and drive application needle 1 up and down, blow off attached to the detergent remover on the application needle 1.
Figure 12 is that the figure that the integral body of the defect correction device of printing ink applying mechanism 21 shown in Figure 11 constitutes has been loaded in expression.In Figure 12, this defect correction device rough classification comprises: by viewing optical system 40, CCD camera 41, laser 42, printing ink applying mechanism 21 and ink solidification with the illumination the 43 defect correction heads that constitute; Make this defect correction head with respect to substrate 6 (Z-direction) mobile Z axle objective table 44 vertically; Load Z axle objective table 44 and make it move the X-axis objective table 45 of usefulness along X-direction; Mounting substrate 6 also makes it move the Y-axis objective table 46 of usefulness along Y direction; To installing the control computer 47 that whole action is controlled; To be input to the guidance panel of using in the control computer 47 48 from operating personnel's instruction.
Viewing optical system 40 is used to observe the surface state of substrate 6 and the printing ink coating state that carries out with printing ink applying mechanism 21.Utilize viewing optical system 40 observed images to be transformed to electric signal, be presented on the monitoring image of control computer 47 by CCD camera 41.Ink solidification is with illumination 43 irradiates lights so that by printing ink 5 curing after 21 coatings of printing ink applying mechanism.If printing ink 5 is ultraviolet hardenings, then select ultraviolet lighting to be loaded on the device with illumination 43 as ink solidification.And when printing ink 5 is thermohardening type, then select the halogen illumination to be loaded on the device with illumination 43 as ink solidification.Laser 42 is used to remove black defective and foreign material defective.By the formation of this device, can revise the white defective that produces on the color filter, black defective, foreign material defective.
In this example 1, when the tabular surface 3 of application needle 1 front end with after substrate 6 surfaces contact, the printing ink 5 that stockpiles in the groove 4 of application needle 1 leading section flows to contact site because of capillarity.Therefore, printing ink 5 fillings can be coated in the laser ablation portion 9, the ink lay that did not in the past become problem is overlapping with normal portion, can carry out high-quality defect correction.
The quantity of ink that flows to contact site so do not need like that repeatedly to apply in the past, can shorten the correction beat along with application needle 1 prolongs and increases the duration of contact with substrate 6.
When being coated in printing ink 5 fillings in the laser ablation portion 9, the printing ink 5 that is filled with is sucked into by the bight on four limits of the color filter film 8 behind the laser ablation because of capillarity, and to the 9 whole diffusions of laser ablation portion, so the printing ink of application needle 1 coating position is as long as near the approximate centre in laser ablation portion 9, do not need like that accurately the coating position to be positioned in the past, can make whole device at an easy rate.
(example 2)
Figure 13 (a)～(k) is the figure of the printing ink coating method of expression example 2 of the present invention, especially Figure 13 (a)～(f) is that expression utilizes application needle 1 printing ink 5 to be coated in the cut-open view of the lip-deep action of substrate 6, Figure 13 (b) is the XIIIB-XIIIB line cut-open view of Figure 13 (a), and Figure 13 (g)～(k) is the enlarged drawing of application needle 1 front end shown in Figure 13 (a)～(f).
In Figure 13 (a)～(k), in this printing ink coating method, application needle 1 with respect to the surface of substrate 6 be not vertical but at an angle (for example the angle between the surface of the central shaft of application needle 1 and substrate 6 be 45 spend) kept obliquely and applied.Form tabular surface 51 at the front end of application needle 1, tabular surface 51 and substrate 6 is surperficial parallel when application needle 1 is tilted to keep.Form groove 4 at the leading section of application needle 1, this groove 4 along the tabular surface 51 that application needle 1 is tilted to keep and make application needle 1 front end during with substrate 6 surperficial butts the line near substrate 6 surfaces form.
At first, as Figure 13 (a) (b) shown in (g), the application needle 1 that leading section is attached with printing ink 5 is kept with respect to the angle tilt ground with regulation, the surface of substrate 6, and application needle 1 front end for example is positioned at above the central portion of white defective.Then, as Figure 13 (c) (h) shown in, the tabular surface 51 of application needle 1 front end contacted with the surface of substrate 6 and kept.Thus, be pressed against the periphery of tabular surface 51 attached to the printing ink 5 on the tabular surface 51 of application needle 1 front end.At this moment, the printing ink 5 that stockpiles in the printing ink 5 that is extruded and the groove 4 links to each other, and stockpiles at the printing ink in the groove 45 to flow out to the contact site of application needle 1 with substrate 6 shown in (i) as Figure 13 (d) because of capillarity.As time goes on the amount of the printing ink 5 that flows out to this contact site increases, and can manage amount to the printing ink 5 of the surface applied of substrate 6 by application needle 1 contacts maintenance with substrate 6 time.As Figure 13 (e) (f) (j) (k) shown in, after application needle 1 is moved towards the top, will form ink laies 52 on substrate 6 surfaces.
Like this, though application needle 1 be not vertical with respect to the surface of substrate 6 but tilt to install, also can be by keeping contacting of application needle 1 and substrate 6 surfaces, coating is from the printing ink 5 of groove 4 outflows.
Figure 14 is the figure of the effect of expression printing ink coating method shown in Figure 13.As shown in figure 14, by making application needle 1 not be vertically but maintenance obliquely with respect to the surface of substrate 6, the object lens 53 of viewing optical system 40 can be configured in the top of the leading section of the application needle 1 that contacts with substrate 6 surfaces, can observe the state that utilizes 1 pair of substrate 6 surface applied printing ink 5 of application needle.Thus, during defect correction, can monitor the filling state of 5 pairs of defective part of printing ink etc., improve the operation convenience.
Figure 15 is the application needle 1 of expression inclination maintenance and the figure of the interference avoiding method of the object lens of viewing optical system 30.In Figure 15, the retaining member 54 that the application needle that is installed in printing ink applying mechanism 21 drives driving shaft 23 lower ends of cylinder body 22 is kept application needle 1 with predetermined angular obliquely with respect to substrate 6 surfaces.When utilizing the application needle 1 that so tilts to keep to carry out the printing ink coating in object lens 53 visuals field, if application needle 1 is in the visual field of object lens 53 all the time, application needle 1 can be interfered with object lens 53 when then object lens 53 were changed.For this reason, setting makes printing ink applying mechanism 21 along the secondary X-axis objective table 55 that X-direction moves, and can make printing ink applying mechanism 21 applying position P1 and and between the position of readiness P2 of object lens 53 generation interference moving, and can prevent the interference of application needle 1 and object lens 53.Secondary X-axis objective table 55 is loaded on the Z axle objective table 44.
(example 3)
Figure 16 is the figure that the integral body of the defect correction device 61 of expression example 3 of the present invention constitutes.In Figure 16, these defect correction device 61 rough classification comprise: the viewing optical system 62 of observing substrate surface, show the monitor 63 of viewed image, excision laser portion 64 by viewing optical system 62 laser ablation substrate surface defects, utilize application needle 1 that printing ink 5 is coated in printing ink applying mechanism 65 on the defective, carry out the substrate heating part 66 of heat drying to being coated in printing ink 5 on the defective, the image processing part 67 of defect recognition, to installing the principal computer 68 that integral body is controlled, the control computer 69 that the action of equipment mechanism portion is controlled.And, be provided with in addition: the XY objective table 70 of the defective substrate 6 of carrier tape, substrate is remained on clamping part 71 on the XY objective table 70, drives the Z objective table 72 etc. of viewing optical system 62 and printing ink applying mechanism 65 up and down.
XY objective table 70 is used to make substrate 6 to relatively move to coating to revise the desired position or want the position that utilizes viewing optical system 62 to observe, is the mode of moving substrate 6 itself.But,, adopt in the time of more substrate 6 is remained on the fixing clamping part 71 that becomes non-movable part, makes the mode that flame XY objective table moves that is called on fixing clamping part 71 along with the maximization of substrate 6 sizes.Flame being meant is arranged to the shape across clamping part 71, the structure of loading X-axis on door type top, loading the Z axle on this X-axis objective table with the Y objective table of door type shape.Therefore, be not limited to the formation of XY objective table 70 shown in Figure 16, XY objective table 70 is defined as the structure that viewing optical system 62 and printing ink applying mechanism 65 are relatively moved with respect to substrate 6.
Figure 17 (a)～(d) is the formation of expression printing ink applying mechanism 65 shown in Figure 16 and the figure of action.The situation that Figure 17 (a)～(d) expression is revised the laser ablation portion 9 of the color filter film 8 that is formed at substrate 6 surfaces.Printing ink applying mechanism 65 is made of coating cylinder body 73 and coating assembly 74, and the output shaft 73a of coating cylinder body 73 can vertically advance and retreat with respect to substrate 6.The rail portion 75a of the linear steering device 75 that can directly move and output shaft 73a are fixed on the output shaft 73a of coating cylinder body 73 concurrently, and coating assembly 74 is fixed on the sliding part 75b of linear steering device 75.The output shaft 73a of coating cylinder body 73 has the function that coating assembly 74 is moved up and down in vertical direction with respect to substrate 6, can use electronic cylinder body or cylinder as coating cylinder body 73, but when requiring to apply precision, preferably use cylinder body by straight dynamic bearing guiding.
By adopting said structure, the sliding part 75b of linear steering device 75 is owing to the deadweight of sliding part 75b and coating assembly 74 descends, and becomes and in order not make sliding part 75b deviate from and be arranged on the state of limiter 76 butts of rail portion 75b end from rail portion 75a.If give the function that prevents that sliding part 75b from deviating to linear steering device 75 in advance, then do not need to be provided with limiter 76.At this, rail portion 75a is fixed on output shaft 73a side, but also sliding part 75b can be fixed on the output shaft 73, and coating assembly 74 is fixed on the rail portion 75a.
On the upper surface of container 78 and bottom surface, offer hole 78a, the 78b that application needle 1 can run through coaxially, can use resin such as teflon or the metal material that can not corrode because of printing ink 5 as the material of container 78 or in the inner coating that forms resins such as teflon of canister.Hole 78a, the 78b of container 78 is bigger slightly than the external diameter of application needle 1, plays the function of the slide-and-guide face that does not make application needle 1 inclination.
The external diameter of application needle 1 is below 1mm, and the diameter of the tabular surface 3 of its front end is about 30 μ m to 70 μ m.The external diameter of normally used application needle 1 is about 0.7～0.4mm.Offer porose 78b in the bottom surface of container 78, but this hole 78b is very small, the viscosity ratio water of printing ink 5 is big because the surface tension of printing ink 5 and with not the being stained with property of container 78, printing ink 5 can not leak from hole 78b.
Under the holding state that does not carry out the printing ink coating, shown in Figure 17 (a), application needle 1 runs through the hole 78a of container 78 upper surfaces, and the front end 1a of application needle 1 is in the state in the liquid that is immersed in printing ink 5.Printing ink 5 is filled in the container 78 use dilution to be adjusted to optimum viscosity in order to be suitable for coating after.For example, the viscosity of printing ink 5 is set in about 30cP (centipoise).The fill-up of printing ink 5 is that the degree that application needle front end 1a immerses gets final product, and it is pl (picoliter) unit that employed printing ink 5 is revised in 1 coating, seldom, thus as long as the amount that can apply during is necessarily arranged, for example, the trace that filling 1ml is following.
When carrying out the printing ink coating, shown in Figure 17 (b), the output shaft 80a of cylinder body portion 80 is descended, the front end 1a of application needle 1 is stretched out from the hole 78b on the bottom surface of container 78.At this moment, the front end 1a in application needle 1 is attached with printing ink 5.When application needle 1 was stretched out from the hole 78b that is located at container 78 bottom surfaces, this hole 78b played the function of guiding application needle 1, and wiping is attached to the printing ink 5 of application needle 1 side, so can suppress printing ink 5 to container 78 external leakages.
Under the state that application needle 1 is stretched out, shown in Figure 17 (c), the output shaft 73a of coating cylinder body 73 is descended, contact with substrate 6 surfaces that the central portion of laser ablation portion 9 exposes up to application needle front end 1a.The slippage of output shaft 73a is set at bigger slightly than the distance on application needle front end 1a and substrate 6 surfaces, after application needle front end 1a and substrate 6 surfaces contact, sliding part 75b on the rail portion 75a of linear guides 75 towards above move forward into the row dodge, coating assembly 74 also rises accordingly, so application needle front end 1a can not push substrate 6 with excessive power, substrate 6 can be not damaged yet.The load that act on application needle front end 1a this moment is the total weight of sliding part 75b and coating assembly 74.
The output shaft 73a of coating cylinder body 73 is the standby stipulated time under the state of the end that descends most that arrives target.Thus, printing ink 5 is supplied with in laser ablation portion 9 by the groove 4 of application needle 1, and printing ink 5 is filled in the laser ablation portion 9.After this, shown in Figure 17 (d), make output shaft 73a rise to original position, application needle front end 1a is returned in the printing ink 5, finish 1 coating.
Like this, during except corrective action, application needle front end 1a is in the printing ink 5, so can prevent printing ink 5 dryings of adhering on the application needle front end 1a.Printing ink 5 is except being sealed the hole 78a, the 78b that offer on the upper surface of container 78 and the bottom surface, the hole 78a of the upper surface of container 78 is in the state that application needle 1 is inserted with minim gap all the time, so can reduce printing ink 5 and the area that atmosphere directly contacts, prevent the evaporation of printing ink 5.Therefore, can prolong printing ink 5 spendable fates, reduce the maintenance times of defect correction device 61.
(example 4)
Figure 18 (a) is the side view of leading section of the application needle 91 of expression example 4 of the present invention, Figure 18 (b) is its front view, Figure 18 (c) is its upward view, Figure 18 (d) is the XVIIID-XVIIID line cut-open view of Figure 18 (b), Figure 18 (e) is the XVIIIE-XVIIIE line cut-open view of Figure 18 (b), and Figure 18 (f) is the XVIIIF-XVIIIF line cut-open view of Figure 18 (b).Figure 19 (a) is the front view of leading section that expression is attached with the application needle 91 of printing ink 5, Figure 19 (b) is the XIXB-XIXB line cut-open view of Figure 19 (a), Figure 19 (c) is the XIXC-XIXC line cut-open view of Figure 19 (a), and Figure 19 (d) is the XIXD-XIXD line cut-open view of Figure 19 (a).
In Figure 18 (a)～(f), leading section in this application needle 91 is provided with tapering 92, this tapering 92 is in the length range of the effect of surface tension that is not subjected to printing ink, the sectional area that makes application needle 91 enlarges towards cardinal extremity gradually from the front end of application needle 91, front end in application needle 91 is provided with tabular surface 93, and on the outer peripheral face in tapering 92, the tabular surface 94 of given size is formed at 92 top to the tapering from front end.
Like this, by tapering 92 and tabular surface 93,94 are set at leading section, when with application needle 91 when ink tank is mentioned, shown in Figure 19 (a)～(d), the top in tapering 92 stockpiles portion because of surface tension produces printing ink, near the tabular surface 93 of front end and by thin ink lay covering, the surface tension because of printing ink 5 on the tabular surface 94 in tapering 92 keeps more printing ink 5 than the outer peripheral face beyond the tabular surface 94.The viscosity of printing ink 5 is high more, and to remain on the amount of the printing ink 5 on the tabular surface 94 just many more, and the amount of printing ink 5 just reduced when the viscosity of printing ink 5 was low.
When the tabular surface 93 that makes application needle 91 front ends contacts with substrate surface, owing to printing ink 5 is capillary unbalanced attached to producing on the substrate surface, the tabular surface 93 that remains on the top in tapering 92 and printing ink 5 forward end on the tabular surface 94 is supplied with and is coated on the substrate with the contact site of substrate.
This example 4 also can obtain the effect identical with example 1.
Among Figure 18 (a)～(f), 92 outer peripheral face is provided with 1 tabular surface 94 in the tapering, but a plurality of tabular surfaces 94 also can be set.Promptly, both can be shown in Figure 20 (a)～(f) and Figure 21 (a)～(d), 92 outer peripheral face is provided with 2 tabular surfaces 94 in the tapering, also can shown in Figure 22 (a)～(f) and Figure 23 (a)～(d), 3 tabular surfaces 94 be set, also can shown in Figure 24 (a)～(f) and Figure 25 (a)～(d), 4 tabular surfaces 94 be set.When 3 tabular surfaces 94 were set, the tabular surface 93 of front end became triangle, and when 4 tabular surfaces 94 were set, the tabular surface 93 of front end became square.By increasing the number of tabular surface 94, the printing ink 5 that then remains on the tabular surface 94 will increase, and the amount of the printing ink 5 of the surface of contact of supply application needle 91 front ends and substrate 6 also increases, and can supply with a large amount of printing ink 5 in the shorter time.
But, also can be shown in Figure 28 (a)～(f) and Figure 29 (a)～(d), directly form 4 tabular surfaces 94 at the columned leading section of pin 91.Thus, the operation that the front end of pin 91 is processed into taper can be saved, application needle 91 can be made more at an easy rate.Use utilizes 91 pairs of substrates of application needle, the 6 coating printing ink 5 of the manner processing, has the inking ability identical with the application needle 91 of Figure 24 (a)～(f).
Figure 30 (a)～(f) and Figure 31 (a)～(e) are the figure of the variation of expression example 4, are the figure with Figure 18 (a)～(f) and Figure 19 (a)～(d) contrast.The difference of this variation and example 4 is, tabular surface 94 is divided into the regional 94a of base end side of application needle 91 and the regional 94b of front, on the border of 2 regional 94a, 94b, the regional 94b of front forms lowlyer than the regional 94a of base end side, forms step 94c between 2 regional 94a, the 94b.In this variation, also maintain printing ink 5,, can keep more printing ink 5 so compare with the situation of no step 94c at step 94c.
In this variation, the tabular surface 94 in tapering 92 is divided into 2 regional 94a, 94b, but also tabular surface 94 can be divided into zone more than 3 along the length direction of application needle 91, on the border in each 2 adjacent zone, make regional low that the zone of front forms than base end side, between 2 zones, step is set.
(example 5)
Figure 32 (a) is the front view of leading section of the application needle 95 of expression example 5 of the present invention, Figure 32 (b) is its upward view, Figure 32 (c) is the XXXIIC-XXXIIC line cut-open view of Figure 32 (a), and Figure 32 (d) is the XXXIID-XXXIID line cut-open view of Figure 32 (a).Figure 33 (a) is the front view of leading section that expression is attached with the application needle 95 of printing ink 5, and Figure 33 (b) is the XXXIIIB-XXXIIIB line cut-open view of Figure 33 (a), and Figure 33 (c) is the XXXIIIC-XXXIIIC line cut-open view of Figure 33 (a).
In Figure 32 (a)～(d), this application needle 95 is with the difference of Fig. 9 (a) application needle 11 (b), tapering 12 is divided into the part 12a of application needle 95 base end sides and the part 12b of front, on the border of 2 part 12a, 12b, the part 12b of front forms carefullyyer than the part 12a of base end side, forms step 12c between 2 part 12a, the 12b.
Like this, by tapering 12 and step 12c are set at leading section, with application needle 95 when ink tank is mentioned, shown in Figure 33 (a)～(c), 12 top stockpiles portion because of surface tension produces printing ink in the tapering, the ink lay that tabular surface 13 and near quilt thereof are thin covers, and because of the surface tension of printing ink 5, step 12c can keep more printing ink 5 than the outer peripheral face beyond the step 12c.
When the tabular surface 13 of application needle 95 front ends with after substrate surface contacts, printing ink 5 is attached on the substrate surface, it is unbalanced that surface tension produces, and the tabular surface 13 that remains on printing ink 5 forward end on the step 12c in tapering 12 is supplied with and is coated on the substrate with the contact site of substrate.
This example 5 also can obtain the effect identical with example 1.
In this example 5, tapering 12 is divided into 2 part 12a, 12b, but also tapering 12 can be divided into part more than 3 along the length direction of application needle 95, on each 2 adjacent portion boundary, make the part of front form, between 2 parts, step is set than the parts of fine of base end side.
(example 6)
Figure 34 (a) is the front view of leading section of the application needle 96 of expression example 6 of the present invention, Figure 34 (b) is its upward view, Figure 34 (c) is the XXXIVC-XXXIVC line cut-open view of Figure 34 (a), Figure 34 (d) is the XXXIVD-XXXIVD line cut-open view of Figure 34 (a), and Figure 34 (e) is the XXXIVE-XXXIVE line cut-open view of Figure 34 (a).Figure 35 (a) is the front view of leading section that expression is attached with the application needle 96 of printing ink 5, Figure 35 (b) is the XXXVB-XXXVB line cut-open view of Figure 35 (a), Figure 35 (c) is the XXXVC-XXXVC line cut-open view of Figure 35 (a), and Figure 35 (d) is the XXXVD-XXXVD line cut-open view of Figure 35 (a).
In Figure 34 (a)～(e), this application needle 96 is that with the difference of the application needle 91 of Figure 28 (a)～(e) tabular surface 94 is replaced by concave curved surface 97.Like this, by concave curved surface 97 and tabular surface 93 are set at leading section, when with application needle 96 when ink tank is mentioned, shown in Figure 35 (a)～(d), top in the tapering stockpiles portion because of surface tension produces printing ink, the ink lay that tabular surface 93 and near quilt thereof are thin covers, and because of the surface tension of printing ink 5, concave curved surface 97 can keep more printing ink 5 than the outer peripheral face beyond the concave curved surface 97.
When the tabular surface 93 of application needle 96 front ends with after substrate surface contacts, printing ink 5 is attached on the substrate surface, surface tension produces unbalanced, and the tabular surface 93 that remains on the top in tapering and printing ink 5 forward end on the concave curved surface 97 is supplied with and is coated on the substrate with the contact site of substrate.
This example 6 also can obtain the effect identical with example 1.
In this example 6, be provided with 4 concave curved surfaces 97, but 3 concave curved surfaces 97 or the concave curved surface more than 5 97 also can be set.Also available concave curved surface 97 is replaced the tabular surface 94 of the application needle 91 shown in Figure 18 (a)～Figure 25 (d).
Figure 36 (a)～(e) and Figure 37 (a)～(d) are the figure of the variation of expression example 6, are the figure with Figure 34 (a)～(e) and Figure 35 (a)～(d) contrast.The difference of this variation and example 6 is, concave curved surface 97 is divided into the regional 97a of application needle 96 base end sides and the regional 97b of front, on the border of 2 regional 97a, 97b, the regional 97b of front forms lowlyer than the regional 97a of base end side, forms step 97c between 2 regional 97a, the 97b.In this variation, on step 97c, also maintain printing ink 5,, can keep more printing ink 5 so compare with the situation of no step 97c.
In this variation, concave curved surface 97 is divided into 2 regional 97a, 97b, but also concave curved surface 97 can be divided into zone more than 3 along the length direction of application needle 96, on the border in each 2 adjacent zone, make regional low that the zone of front forms than base end side, between 2 zones, step is set.
(example 7)
Shown in Figure 38 (a), the color filter of LCD comprises transparency carrier, is formed at the cancellate pattern that is called black matrix" 100 on its surface, organizes R (redness) pixel 101 more, G (green) pixel 102, and B (blueness) pixel 103.In the manufacturing process of color filter, in G pixel 102, produce the foreign material defective, shown in Figure 38 (b), G pixel 102 integral body are by laser ablation, and G pixel 102 is transformed to white defective 104.In white defective 104, the transparency carrier 105 of color filter exposes.
When revising this big white defective 104, shown in Figure 39 (a)～(c), after making the front end of the application needle 1 that is attached with printing ink 5 and the center of defective 104 contacting in vain, though think once just printing ink 5 to be filled in the whole white defective 104, but under the situation of the flowability difference of the viscosity height of printing ink 5, printing ink 5, printing ink 5 elder generations extrude to black matrix" 100 grades of the narrow width direction of white defective 104, can not fully printing ink 5 be coated on the whole white defective 104.
Even under the situation of the flowability difference of the viscosity height of printing ink 5, printing ink 5, shown in Figure 40 (a)～(c), if the many places (being 3 places among the figure) in the big direction of the width of white defective 104 make the front end of application needle 1 contact and apply printing ink 5 with substrate 105, then printing ink 5 can be coated on the whole white defective 104.But, can with each position P of the preceding end in contact of application needle 1 on produce the protuberance of printing ink 5, the medicine for treating uneven integralization of printing ink 5 needs spended time, might be also not leveling just solidify.In case existing, the printing ink 5 of coating concavo-convexly will produce color spot, so printing ink 5 is applied as far as possible equably.
For this reason, in this example 7, shown in Figure 41 (a)～(c), the front end of application needle 1 is contacted with an end of white defective 104, make under this state application needle 1 direction big along the width of white defective 104 and with the direction of the surface level of substrate 105 on relatively move with respect to substrate 105, dialogue defective 104 integral body apply.At this, once contacted at the front end that makes application needle 1, began after the application needle 1 and the contact site of substrate 105 are supplied with printing ink 5 from the printing ink portion of stockpiling with the surface of substrate 105, even exist slightly the gap also can supply with printing ink 5 between application needle 1 and the substrate 105, so when application needle 1 is moved horizontally, do not need to make the front end of application needle 1 to contact fully with the surface of substrate 105.Thus, even under the situation of the flowability difference of the viscosity height of printing ink 5, printing ink 5, also printing ink 5 can be coated on the white defective 104 at short notice equably.
Also can be shown in Figure 42 (a)～(c), the front end of application needle 1 is contacted with an end of white defective 104, under this state, make application needle 1 move to the central authorities of white defective 104, printing ink 5 is coated on half zone of white defective 104, when after having replenished printing ink 5 on the application needle 1, the front end of application needle 1 is contacted with another end of white defective 104, under this state, make application needle 1 move to the central authorities of white defective 104, printing ink 5 is coated on half remaining zone of white defective 104.Also available application needle 91,95,96 replaces application needle 1.
Shown in Figure 43 (a), under to the part situation that laser ablation is revised for the white defective 104 of square back formation significantly with G pixel 102, if make the front end of application needle 1 only contact the words of primary coating printing ink 5 with the central authorities of white defective 104, then under the situation of the flowability difference of the viscosity height of printing ink 5, printing ink 5, printing ink 5 wants to diffuse to 104 of whole white defectives needs spended time.Therefore, as shown in figure 44, although can be coated on the whole white defective 104, the amount of the printing ink 5 of coating increases, and the central authorities of the printing ink 5 of coating become the state of protuberance.Under these circumstances, the color at correction position is darker than the color of normal portion on every side.The coating thickness also thickness than normal portion on every side is thick, revises quality and descends.
For this reason, in this variation, shown in Figure 43 (b)～(d), the front end that makes application needle 1 is being described circular arc with contact condition in white defective 104, with respect to substrate 105 relatively move one side apply printing ink 5 on one side.At this, once contacted at the front end that makes application needle 1, began after the application needle 1 and the contact site of substrate 105 are supplied with printing ink 5 from the printing ink portion of stockpiling with the surface of substrate 105, even exist slightly the gap also can supply with printing ink 5 between application needle 1 and the substrate 105, so do not need to make the front end of application needle 1 to contact fully when application needle 1 is moved with the surface of substrate 105.Thus, printing ink 5 is diffused on the whole white defective 104 at short notice, so shown in Figure 43 (c), can not have the uniform printing ink coating of protuberance.
In this variation, application needle 1 is done circular-arc mobile, but as long as printing ink 5 can spread on whole white defective 104, then can make application needle 1 carry out moving arbitrarily.For example, also can move as square along 4 limits of white defective 104.
Above-mentioned disclosed example only is an illustration, does not limit.Scope of the present invention is not limited to above-mentioned explanation, but as claimed in claim, comprises the meaning that is equal to claim and all changes in the claim.
Claims (16)
1, a kind of applying mechanism comprises: application needle; The container that keeps liquid material; And the drive division that described application needle is moved,
Described application needle is attached with under the situation of liquid material at leading section, front end is contacted to apply described liquid material with fine zone on the substrate, be formed with the tapering that attenuates towards described front end at described leading section, be formed with tabular surface at described front end, be formed with in described tapering and be used for and supply with the liquid material supply unit of described front end attached to the described liquid material on the described leading section
It is characterized in that, described applying mechanism offers diameter and the roughly the same through hole of described application needle in the bottom of described container, described drive division makes described application needle relatively move with respect to described container along its axis direction, makes the leading section of described application needle stop at following at least 2 positions: the position of readiness that the liquid material in the leading section of described application needle and the described container contact and the leading section of described application needle pass the coating position that described through hole stretches out below the bottom of described container.
2, applying mechanism as claimed in claim 1 is characterized in that, the described liquid material supply unit of described application needle is a groove.
3, applying mechanism as claimed in claim 2 is characterized in that, the part of the described groove of described application needle forms bigger than the width of other parts of described groove.
4, applying mechanism as claimed in claim 1 is characterized in that, the described liquid material supply unit of described application needle is a tabular surface.
5, applying mechanism as claimed in claim 4 is characterized in that, the described tabular surface of described application needle is divided into a plurality of zones, is provided with step between described a plurality of zones.
6, applying mechanism as claimed in claim 1 is characterized in that, the described liquid material supply unit of described application needle is a concave curved surface.
7, applying mechanism as claimed in claim 6 is characterized in that, the described concave curved surface of described application needle is divided into a plurality of zones, is provided with step between described a plurality of zones.
8, applying mechanism as claimed in claim 1 is characterized in that, the described wimble fraction of described application needle is slit into a plurality of parts,
Described liquid material supply unit is provided in a side of the step between described a plurality of part.
9, applying mechanism as claimed in claim 1 is characterized in that, described drive division has the retaining member that described application needle is kept with the form that tilts with predetermined angular with respect to described substrate,
The tabular surface of described application needle front end forms, and is parallel with described substrate when described application needle is kept obliquely by described retaining member.
10, a kind of defect correction device is applicable to and revises the defective part that is formed on the fine pattern on the described substrate, it is characterized in that, comprising:
Trimming head has the described applying mechanism of claim 1, the viewing optical system that is used to observe described defective part, irradiating laser to remove the laser radiation mechanism of described defective part;
Put the substrate platform of described substrate;
And the detent mechanism that makes described trimming head and described substrate platform relatively move and position,
To be coated on the described defective part attached to the described liquid material of described application needle leading section and revise.
11, defect correction device as claimed in claim 10 is characterized in that, described drive division comprises:
The 1st secondary drive division that described application needle is moved along its axis direction or the direction vertical with described substrate;
And the 2nd secondary drive division that moves, with making described application needle and described substrate almost parallel
At described position of readiness, the front end of described application needle is outside the visual field of described viewing optical system, and in described coating position, the front end of described application needle is in the visual field of described viewing optical system.
12, a kind of coating method, it is characterized in that, make on the leading section of liquid material attached to claim 1 application needle of each described applying mechanism to the claim 8, after making the top away from the front end of described application needle in tapering produce hydrops portion by surface tension, make the front end and the described substrate contacts of described application needle, the liquid material of described application needle front end is attached on the described substrate and to produce surface tension inhomogeneous, supplies with described liquid material by described liquid material supply unit to the contact site of described application needle front end and described substrate from described hydrops portion.
13, coating method as claimed in claim 12 is characterized in that, under the state of the front end of described application needle and described substrate contacts, described application needle and described substrate is relatively moved, the described liquid material of wire ground coating on described substrate.
14, coating method as claimed in claim 12, it is characterized in that, make with respect to adhering to described liquid material on the described application needle leading section of described substrate with predetermined angular inclination maintenance, by make described application needle front end in the visual field of viewing optical system with described substrate contacts, thereby while observe coating state and apply.
15, a kind of display panels is with the defect correcting method of color filter, is to utilize claim 1 method that the application needle of each described applying mechanism is revised with the defective of color filter display panels to the claim 8, it is characterized in that,
Described display panels contains the color filter film that is formed on the described substrate with color filter,
Utilize laser to remove described color filter film in zone bigger than the described tabular surface of described application needle front end and that contain described defective,
Leading section is attached with revise described application needle front end with liquid material in the zone of removing inboard and in described application needle front end and described zone on every side normally the discontiguous position of part contact, will apply with liquid material with the correction of the big or small corresponding amount of the color filter film of removing.
16, a kind of display panels is with the defect correcting method of color filter, is to utilize claim 1 method that the application needle of each described applying mechanism is revised with the defective of color filter display panels to the claim 8, it is characterized in that,
Described display panels contains the color filter film that is formed on the described substrate with color filter,
Utilize laser to remove described color filter film in zone bigger than the described tabular surface of described application needle front end and that contain described defective,
Make leading section be attached with the described application needle front end of revising with liquid material and contact in the regional inboard of removing, the described substrate surface of front end edge that makes described application needle in this inboard, zone relatively moves and uses liquid material with coating correction.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005091526 | 2005-03-28 | ||
| JP2005091526 | 2005-03-28 | ||
| JP2005251496 | 2005-08-31 | ||
| JP2005324987 | 2005-11-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1873477A CN1873477A (en) | 2006-12-06 |
| CN100570439C true CN100570439C (en) | 2009-12-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100741201A Expired - Fee Related CN100570439C (en) | 2005-03-28 | 2006-03-28 | Applying mechanism and coating method, defect correction device and defect correcting method |
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| CN (1) | CN100570439C (en) |
Cited By (1)
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|---|---|---|---|---|
| CN103962275A (en) * | 2013-02-01 | 2014-08-06 | Ntn株式会社 | Coating unit, coating device using the coating unit and coating method |
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|---|---|---|---|---|
| JP2013117615A (en) * | 2011-12-02 | 2013-06-13 | Ntn Corp | Defect correction device and defect correction method |
| KR20140101836A (en) * | 2011-12-13 | 2014-08-20 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | Contact coating by use of a manifold provided with capillary tubes |
| JP7164458B2 (en) * | 2019-02-08 | 2022-11-01 | Ntn株式会社 | Liquid application unit and liquid application device |
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| JP2001062370A (en) * | 1999-08-31 | 2001-03-13 | Hirano Tecseed Co Ltd | Application method and apparatus |
| JP2001219108A (en) * | 2000-02-09 | 2001-08-14 | Japan Steel Works Ltd:The | Gluing apparatus and gluing method |
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| CN1873477A (en) | 2006-12-06 |
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