JP2002333725A - Device for modifying pattern - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device for modifying pattern which permits automatic exchange of an application needle, shortens exchange time of the application needle, maintains the quality of the application needle and unnecessitates a cleaning process. SOLUTION: The application needle 11 is held by an application needle holder 12, the application needle holder 12 is fitted to an application needle chuck part 13 by a negative pressure and the application needle holder 12 is released from the application needle chuck part 13 by applying a positive pressure.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pattern repairing apparatus, and more particularly, to a pattern repairing apparatus for repairing a defect occurring in a process of manufacturing an LCD (Liquid Crystal Display).

[0002]

2. Description of the Related Art A method of applying a paste to an electrode defect (open defect) in which an electrode of an LCD is missing to correct the defect is disclosed in, for example, Japanese Patent Application Laid-Open Nos.
Japanese Unexamined Patent Publication No. Hei 9-61296 proposes a defect repairing device proposed in Japanese Patent Application Laid-Open No. Hei 9-61296.

FIG. 5 is a view showing a paste application mechanism used in each of the above-mentioned correction devices. In FIG. 5, a paste pot 21 into which pastes of red (R), green (G), blue (B) and black (Bk) are individually poured, a washing tank 24 and a drying tank 25 are provided. Are provided.

When correcting a defect, the application needle 11 is lifted upward by the application needle drive cylinder 22, the paste pot table 23 is rotated, and the paste pot 21 into which the paste to be applied is injected is positioned below the application needle 11. Moved to The application needle 11 is driven downward by the application needle drive cylinder 22 and is inserted into the paste pot 21 so that a desired paste is attached to the application needle 11, the application needle 11 is brought into contact with a defective portion of the substrate, and the paste is removed. It is applied to the defect. After application of the paste, the application needle 11 is pulled up, the cleaning tank 24 is moved below the application needle 11, the application needle 11 is inserted into the cleaning tank 24, and unnecessary paste is removed from the application needle 11 by the cleaning liquid. . Thereafter, the drying tank 25 is moved below the application needle 11, and the application needle 11 is inserted into the drying tank 25 and dried.

[0005]

As described above, the conventional pattern correction apparatus has only one coating needle 11, and for example, when applying a red paste and then applying a blue paste, It was necessary to wash the paste adhered to the application needle 11 with the cleaning liquid in the cleaning tank 24. In the case of the liquid crystal color filter substrate correction, there are four color correction targets of R, G, B, and Bk on the color filter substrate. Was a big problem. This problem occurs not only when the color filters of the liquid crystal are corrected but also when a plurality of correction pastes are used.

Further, the application needle 11 is fixed to the application needle drive cylinder 22 by a screw, and when the application needle 11 is so dirty or damaged that it cannot be washed with the cleaning liquid, the operator manually replaces the application needle 11. I was In this method, it takes time to replace the application needle 11, and the needle may be damaged during the operation.

SUMMARY OF THE INVENTION Therefore, a main object of the present invention is to provide a pattern correcting apparatus which makes it possible to automatically change coating needles, shortens coating needle replacement time, maintains the quality of coating needles, and eliminates the conventional cleaning process. It is to be.

[0008]

According to the present invention, there is provided a pattern comprising a coating needle for applying a correction liquid to a defective portion of a substrate, a container for storing the correction liquid, and a driving means capable of moving the coating needle up and down. The correction device is characterized in that an attaching / detaching mechanism that allows the application needle to be automatically attached to / detached from the driving means is provided.

[0009] Further, it is characterized by including a control computer for instructing attachment and detachment of the application needle.

The attachment / detachment mechanism includes a holder for holding the application needle, holding means for detachably holding the holder to the driving means by a chuck, and detaching means for detaching the holder from the holding means. .

Further, the holding means fixes the holder at a predetermined position by sucking the holder with a negative pressure, and the releasing means releases the holding of the holder with a positive pressure.

Further, the chuck and the holder have an engaging portion with each other. The engaging portion includes an engaging groove formed in the holder and an engaging element provided on the chuck side and pressing the engaging groove.

Further, the chuck and the holder are complementarily fitted to each other, and are formed so as to be relatively non-rotatable.

Further, the holder functions as a lid for hermetically closing the container containing the correction fluid.

Furthermore, a plurality of application needles are provided.

[0016]

FIG. 1 is an external view showing the entire structure of an embodiment of the present invention. In FIG. 1, a pattern correction apparatus includes a laser 1 for removing foreign matter defects of a color filter, a CCD camera 2 for observing a defective portion, and a Z-axis mounted with the laser 1 and the CCD camera 2 and movable in the Z direction. Table 3 and X with this Z-axis table 3 mounted
X-axis table 4 that can be moved in the direction
A Y-axis table 5 that is mounted and is movable in the Y direction;
An ink application mechanism 20 for applying a paste or ink as a correction liquid to a defective portion; an ultraviolet light 6 for light-curing the applied ink or a halogen lamp light 7 for heat-curing the applied ink; And a control panel 9 serving as a user interface. Each mechanism is driven by an instruction from the control computer 9, and the control computer 9 instructs replacement of the application needle 11 described later.

FIG. 2 is a view showing a mounted state of the coating needle according to one embodiment of the present invention, and FIG. 3 is a view showing a state where the coating needle is fixed.

As shown in FIG. 2A, the application needle 11 is attached to the tip (lower end) of an application needle holder 12, and is provided corresponding to pastes of various colors. The applicator needle holder 12 is formed in a conical shape as shown in FIGS. The slide mechanism 14 has an application needle chuck 1 having a concave portion for holding the application needle holder 12.
3 are formed, and the vacuum pipe 30 is connected.

In response to a command from the control computer 9,
The application needle chuck unit 13 sucks the application needle holder 12 by the negative pressure air from the vacuum pipe 30 so that the application needle 11 is mounted on the ink application mechanism 20. The applicator needle holder 12 and the applicator needle chuck 13 have an engaging portion with each other. That is, as shown in FIG. 3, the coating needle holder 12 is formed with a rotation direction regulating flat surface 15 and a coating needle holder fixing groove 16. Coating needle chuck 13
As shown in FIG. 3, a needle pin 17 is provided so as to press the application needle holder 12 by a spring 18.
The spring 18 is fixed by a spring retainer 19.

Application needle holder 1 holding application needle 11
When the application pin chuck 2 is sucked into the application needle chuck section 13 by negative pressure air, the needle pin 17 is fitted into the application needle holder fixing groove 16, and the application chuck section 1 is pressed by the spring 18.
Fixed to 3. Therefore, even if the negative pressure air is no longer supplied to the application needle chuck portion 13, the application needle holder 12 does not drop.

At the time of removal, a positive pressure air is supplied from the vacuum pipe 30 instead of the negative pressure air in accordance with a command from the control computer 9, so that the application needle holder fixing groove 16 and the needle pin 17 are fitted. It is released, and the application needle holder 12 can be replaced. In addition, the fitting position of the coating needle holder fixing groove 16 and the needle pin 17 restricts the rotational position of the coating needle holder 12, so that the reproducibility of the mounting position in the rotating direction when the coating needle 11 is replaced can be maintained. Becomes Accordingly, it is not necessary to mechanically make the tip of the application needle 11 touch the rotation center of the application needle holder 12, and it is possible to manufacture the device at low cost.

If the rotation direction is not restricted, it is necessary to reduce the contact of the tip of the application needle 11 with the rotation center of the application needle holder 12 in order to reduce the displacement of the application position due to the replacement of the application needle 11.

Further, as shown in FIG. 4, the unused coating needle holder 12 functions as a lid of the paste pot 21, so that deterioration in the paste pot 21 can be prevented.

If the application needles 11 are formed as described above and provided in plurality corresponding to the pastes for each color, the step of individually cleaning when applying the paste for each color to the defective portion can be omitted, and the correction tact time can be reduced. Can be shortened. In addition, application needle 1
The replacement of 1 can be performed very simply by simply switching from negative pressure to positive pressure by the vacuum pipe 30 according to a command from the control computer 9.

The embodiments disclosed this time are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

[0026]

As described above, according to the present invention, the application needle for applying the correction liquid to the defective portion of the substrate, the container for storing the correction liquid, and the driving means for moving the application needle up and down are provided. In the provided pattern correction device, since the application needle is provided with an attachment / detachment mechanism that can be automatically attached / detached to / from the driving means, it is not necessary to clean the needle tip when exchanging the correction liquid to be attached to the needle tip. The correction tact can be greatly reduced by the minute. Further, the replacement of the application needle can be performed extremely easily, so that the replacement time can be reduced and the quality of the application needle can be maintained.

The attachment / detachment mechanism includes a holder for holding the application needle, holding means for detachably holding the holder to the driving means by a chuck, and detaching means for detaching the holder from the holding means. Since the holder is fixed at a predetermined position by sucking the holder with a negative pressure, and the releasing means releases the holding of the holder with a positive pressure,
Control for replacing the application needle can be performed relatively easily.

Further, since the chuck and the holder are fitted in a complementary manner and formed so as to be relatively non-rotatable, it is possible to reproduce the mounting position including the rotation direction when changing the coating needle. This makes it possible to reduce the amount of displacement of the application position due to needle replacement, eliminating the need to set the application needle position every time.

Further, an unused holder among the plurality of holders can be used as a lid of a container for storing the correction liquid, thereby preventing deterioration of the correction liquid.

[Brief description of the drawings]

FIG. 1 is an external view showing an entire configuration of an embodiment of the present invention.

FIG. 2 is a view showing a mounted state of an application needle according to an embodiment of the present invention.

FIG. 3 is a diagram showing a state in which an application needle is fixed.

FIG. 4 is a diagram showing a state where an unused coating needle holder functions as a lid of a paste pot.

FIG. 5 is a diagram showing a paste application mechanism used in the correction device.

[Explanation of symbols]

1 laser, 2 CCD camera, 3 Z axis table, 4
X axis table, 5 Y axis table, 6 UV illumination, 7
Halogen lamp illumination, 8 substrate to be repaired, 9 control computer, 10 operation panel, 11 coating needle, 1
2 Coating needle holder, 13 Coating needle chuck, 14 Slide mechanism, 15 Rotation direction regulating flat surface, 16
Coating needle holder fixing groove, 17 needle pin, 18 spring, 19 spring holding, 20 ink applying mechanism, 21 paste pot, 26 paste, 30 vacuum pipe.

Claims (9)

[Claims] 1. A pattern correction apparatus comprising: an application needle for applying a correction liquid to a defective portion of a substrate; a container for storing the correction liquid; and driving means for moving the application needle up and down. A pattern correcting device, comprising: an attaching / detaching mechanism for automatically attaching / detaching a needle to / from the driving means. 2. The pattern correcting apparatus according to claim 1, further comprising a control computer for instructing attachment and detachment of the application needle. 3. The attachment / detachment mechanism includes: a holder for holding the application needle; holding means for detachably holding the holder with the driving means by a chuck; and detaching means for detaching the holder from the holding means. The pattern correction device according to claim 1, wherein the pattern correction device includes: 4. The apparatus according to claim 1, wherein the holding means fixes the holder at a predetermined position by sucking the holder with a negative pressure, and the releasing means releases the holding of the holder with a positive pressure. 3. The pattern correcting device according to 3. 5. The pattern correction device according to claim 3, wherein the chuck and the holder have engagement portions with each other. 6. The engaging portion includes an engaging groove formed in the holder, and an engaging member provided on the chuck side and pressing the engaging groove. The pattern correction device according to any one of the above. 7. The chuck according to claim 3, wherein the chuck and the holder are fitted in a complementary manner, and are formed so as to be relatively non-rotatable. The pattern correction device according to the above. 8. The pattern correction apparatus according to claim 3, wherein the holder functions as a lid for sealing a container containing the correction liquid. 9. The pattern correction apparatus according to claim 1, wherein a plurality of the application needles are provided.