JP2007079145A - Correction liquid application unit - Google Patents

Correction liquid application unit Download PDF

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JP2007079145A
JP2007079145A JP2005267105A JP2005267105A JP2007079145A JP 2007079145 A JP2007079145 A JP 2007079145A JP 2005267105 A JP2005267105 A JP 2005267105A JP 2005267105 A JP2005267105 A JP 2005267105A JP 2007079145 A JP2007079145 A JP 2007079145A
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application
needle
ink
application needle
needles
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JP4732092B2 (en
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Kazunari Maeda
和成 前田
Yasuyuki Fujita
康之 藤田
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NTN Corp
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NTN Corp
NTN Toyo Bearing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a correction liquid application unit in which application needles can be easily and rapidly exchanged. <P>SOLUTION: An ink application unit is equipped with two application needles 21, 22 having different tip diameters, an operation panel 13 to select one application needle of the application needles 21, 22 according to the dimension of a defective portion, and a switching device 25 to allow the application needle selected by the operation panel 13 to protrude downward. Therefore, the application needles 21, 22 can be easily and rapidly exchanged compared to a conventional unit provided with only one application needle. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

この発明は修正液塗布ユニットに関し、特に、基板の欠陥部に修正液を塗布して修正する修正液塗布ユニットに関する。   The present invention relates to a correction liquid application unit, and more particularly to a correction liquid application unit that applies correction liquid to a defective portion of a substrate to correct the correction liquid.

従来より、液晶表示パネルの電極が欠けた電極欠陥(オープン欠陥)に塗布針を用いて導電性ペーストを塗布したり、液晶表示パネル用カラーフイルタの色抜け欠陥に塗布針を用いてインクを塗布することにより、基板の欠陥部を修正する修正液塗布ユニットが提案されている(たとえば特許文献1〜3参照)。
特開平8−292442号公報 特開平9−236933号公報 特開平9−61296号公報
Conventionally, a conductive paste is applied to an electrode defect (open defect) in which an electrode of a liquid crystal display panel is missing, or an ink is applied to a color loss defect of a color filter for a liquid crystal display panel using an application needle. Thus, there has been proposed a correction liquid application unit that corrects a defective portion of the substrate (see, for example, Patent Documents 1 to 3).
JP-A-8-292442 JP 9-236933 A Japanese Patent Laid-Open No. 9-61296

このような修正液塗布ユニットでは、欠陥部の寸法と塗布針の先端径とが大きく異なる場合、欠陥部の寸法に合せて塗布針を交換する必要がある。しかし、従来の修正液塗布ユニットでは、1本の塗布針のみがネジで塗布針駆動シリンダに取付けられていたので、塗布針を交換する場合は、ネジを緩めて塗布針を外し、他の塗布針を取付けてネジを締め、塗布針の先端と基板の当たり具合を微調整する必要があり、塗布針の交換に手間と時間がかかるという問題があった。   In such a correction liquid application unit, when the dimension of the defective part and the tip diameter of the application needle differ greatly, it is necessary to replace the application needle in accordance with the dimension of the defective part. However, in the conventional correction liquid application unit, only one application needle is attached to the application needle drive cylinder with a screw, so when replacing the application needle, loosen the screw and remove the application needle, It is necessary to attach the needle and tighten the screw to finely adjust the contact state between the tip of the application needle and the substrate, and there is a problem that it takes time and effort to replace the application needle.

それゆえに、この発明の主たる目的は、塗布針を容易かつ迅速に交換することが可能な修正液塗布ユニットを提供することである。   Therefore, a main object of the present invention is to provide a correction liquid application unit capable of easily and quickly changing the application needle.

この発明に係る修正液塗布ユニットは、基板の欠陥部に修正液を塗布して修正する修正液塗布ユニットであって、複数の塗布針と、修正液が収容された容器と、複数の塗布針のうちのいずれかの塗布針を選択する選択手段と、複数の塗布針のうちの選択手段によって選択された塗布針の先端部に容器内の修正液を付着させ、その塗布針の先端に付着した修正液を欠陥部に塗布する駆動手段とを備えたことを特徴とする。   A correction liquid application unit according to the present invention is a correction liquid application unit for applying a correction liquid to a defective portion of a substrate for correction, and includes a plurality of application needles, a container containing the correction liquid, and a plurality of application needles. A selection means for selecting one of the application needles, and a correction liquid in the container is attached to the tip of the application needle selected by the selection means of the plurality of application needles, and is attached to the tip of the application needle And a driving means for applying the corrected liquid to the defective portion.

好ましくは、駆動手段は、複数の塗布針のうちの選択手段によって選択された塗布針のみを下方に突出させる第1の駆動装置と、第1の駆動装置を上下動させて、選択手段によって選択された塗布針の先端部に容器内の修正液を付着させ、その塗布針の先端に付着した修正液を欠陥部に塗布する第2の駆動装置とを含む。   Preferably, the driving means selects the first driving device that causes only the application needle selected by the selection means among the plurality of application needles to project downward, and the first driving device to move up and down to select by the selection means. And a second driving device that attaches the correction liquid in the container to the tip of the applied needle and applies the correction liquid attached to the tip of the application needle to the defective part.

また好ましくは、各塗布針の先端には平坦面が形成されており、各塗布針の平坦面の寸法は、他の塗布針の寸法と異なる。   Preferably, a flat surface is formed at the tip of each application needle, and the dimension of the flat surface of each application needle is different from the dimensions of the other application needles.

この発明に係る修正液塗布ユニットでは、複数の塗布針と、それらのうちのいずれかの塗布針を選択する選択手段と、選択手段によって選択された塗布針を用いて基板の欠陥部に修正液を塗布する駆動手段とが設けられる。したがって、塗布針を容易かつ迅速に交換することができる。   In the correction liquid application unit according to the present invention, a plurality of application needles, a selection means for selecting one of these application needles, and a correction liquid on a defective portion of the substrate using the application needle selected by the selection means And a driving means for applying. Therefore, the application needle can be replaced easily and quickly.

図1は、この発明の一実施の形態による微細パターン修正装置の全体構成を示す図である。図1において、この微細パターン修正装置は、大きく分類すると、観察光学系1、CCDカメラ4、レーザ5、インク塗布ユニット6、およびインク硬化用光源7から構成される欠陥修正ヘッド部と、この欠陥修正ヘッド部を修正対象ガラス基板8に対して垂直方向(Z軸方向)に移動させるZ軸テーブル9と、Z軸テーブル9を搭載してX軸方向に移動させるためのX軸テーブル10と、修正対象ガラス基板8を搭載してY軸方向に移動させるためのY軸テーブル11と、装置全体の動作を制御する制御用コンピュータ12と、制御用コンピュータ12に作業者からの指令を入力するための操作パネル13から構成される。   FIG. 1 is a diagram showing an overall configuration of a fine pattern correction apparatus according to an embodiment of the present invention. In FIG. 1, this fine pattern correction apparatus can be roughly classified into a defect correction head portion including an observation optical system 1, a CCD camera 4, a laser 5, an ink application unit 6, and an ink curing light source 7, and the defect. A Z-axis table 9 for moving the correction head portion in a direction perpendicular to the glass substrate 8 to be corrected (Z-axis direction), an X-axis table 10 for mounting the Z-axis table 9 and moving it in the X-axis direction, A Y-axis table 11 for mounting the correction target glass substrate 8 and moving it in the Y-axis direction, a control computer 12 for controlling the operation of the entire apparatus, and an instruction from the operator to the control computer 12 The operation panel 13 is configured.

観察光学系1は、落射照明用光源2、対物レンズ3、図示しない透過照明用光源などを含み、修正対象ガラス基板8の表面状態や、インク塗布ユニット6でインク塗布している状態を観察するためのものである。観察光学系1によって観察される画像は、CCDカメラ4により電気信号に変換され、制御用コンピュータ12のモニタ画面に表示される。レーザ5は、修正対象ガラス基板8上のカラーフィルタの色抜け欠陥部に塗布したインクのうちの不要部分や、修正対象ガラス基板8上のショート欠陥にレーザ光を照射し、その熱エネルギーでインクや電極材料を昇華または飛散させて除去する。   The observation optical system 1 includes an epi-illumination light source 2, an objective lens 3, a transmission illumination light source (not shown), and the like, and observes the surface state of the correction target glass substrate 8 and the ink application unit 6. Is for. An image observed by the observation optical system 1 is converted into an electrical signal by the CCD camera 4 and displayed on the monitor screen of the control computer 12. The laser 5 irradiates an unnecessary portion of the ink applied to the color defect defect portion of the color filter on the correction target glass substrate 8 or a short defect on the correction target glass substrate 8 with laser light, and uses the thermal energy for the ink. And electrode material is removed by sublimation or scattering.

インク塗布ユニット6は、修正対象ガラス基板8上のカラーフィルタの色抜け欠陥部に塗布針を用いてインクを塗布したり、修正対象ガラス基板8上の電極のオープン欠陥に塗布針を用いて導電性ペーストを塗布する。インク硬化用光源7は、インク塗布ユニット6で塗布されたインクを硬化させるための光を照射する。インクが紫外線硬化タイプの場合は、紫外線光源がインク硬化用光源7として選択されて装置に搭載される。インクが熱硬化タイプの場合は、ハロゲン光源がインク硬化用光源7として選択されて装置に搭載される。   The ink application unit 6 applies ink to the color loss defect portion of the color filter on the correction target glass substrate 8 using an application needle, or conducts using the application needle to open defects of electrodes on the correction target glass substrate 8. Apply a functional paste. The ink curing light source 7 irradiates light for curing the ink applied by the ink application unit 6. When the ink is of an ultraviolet curing type, the ultraviolet light source is selected as the ink curing light source 7 and mounted on the apparatus. When the ink is a thermosetting type, a halogen light source is selected as the ink curing light source 7 and is mounted on the apparatus.

次に、この微細パターン修正装置の動作について説明する。X軸テーブル10およびY軸テーブル11をそれぞれX軸方向およびY軸方向に移動させ、かつZ軸テーブル9をZ軸方向に移動させ、観察光学系1によって修正対象ガラス基板8の表面を観察するとともに、CCDカメラ4によって撮像する。撮像した画像は制御用コンピュータ12のモニタ画面に表示され、オペレータはその表示を見て色抜け欠陥、ショート欠陥、オープン欠陥があるか否かを目視によって判断する。ただし、目視によらず、画像処理によって判断してもよい。   Next, the operation of this fine pattern correction apparatus will be described. The X-axis table 10 and the Y-axis table 11 are moved in the X-axis direction and the Y-axis direction, respectively, and the Z-axis table 9 is moved in the Z-axis direction, and the surface of the correction target glass substrate 8 is observed by the observation optical system 1. At the same time, the image is taken by the CCD camera 4. The captured image is displayed on the monitor screen of the control computer 12, and the operator looks at the display to visually determine whether there is a color defect, short defect, or open defect. However, it may be determined by image processing instead of visual observation.

カラーフィルタの色抜け欠陥の存在を判別した場合は、インク塗布ユニット6によって欠陥部にインクを塗布し、インク硬化用光源7によって硬化させる。硬化したインクによって不要部が生じた場合は、レーザ5から不要部にレーザ光を照射し、レーザ光の熱エネルギーで昇華または飛散させる。ショート欠陥は、隣接する電極パターン同士がエッチング不良により短絡してしまうものである。電極のショート欠陥の存在を判別した場合は、レーザ装置1から短絡部分にレーザ光を照射し、繋がった部分をレーザ光の熱エネルギーで昇華または飛散させる。オープン欠陥は、電極パターンの一部が過度のエッチングにより欠如したものである。オープン欠陥の存在を判別した場合は、インク塗布ユニット4によって欠陥部分に導電性ペーストなどを塗布し、硬化させる。   When the presence of a color defect in the color filter is determined, ink is applied to the defective portion by the ink application unit 6 and is cured by the ink curing light source 7. When an unnecessary portion is generated by the cured ink, the laser 5 is irradiated with laser light from the laser 5, and is sublimated or scattered by the thermal energy of the laser light. A short defect is a short circuit between adjacent electrode patterns due to defective etching. When the presence of a short defect in the electrode is determined, the laser device 1 is irradiated with laser light from the laser device 1, and the connected portion is sublimated or scattered by the thermal energy of the laser light. Open defects are those in which part of the electrode pattern is missing due to excessive etching. When the presence of an open defect is determined, a conductive paste or the like is applied to the defective portion by the ink application unit 4 and cured.

図2は、インク塗布ユニット6の構成を示す一部省略した斜視図である。図2において、このインク塗布ユニット6は、インク塗布用の2本の塗布針21,22と、塗布針21と22を切換えるための切換装置25と、切換装置25を介して塗布針21,22を垂直駆動させるための塗布針駆動シリンダ26とを含む。塗布針21,22は、それぞれ保持部材23,24を介して切換装置25に取付けられる。切換装置25は、塗布針駆動シリンダ26の駆動軸27の先端部に設けられる。   FIG. 2 is a partially omitted perspective view showing the configuration of the ink application unit 6. In FIG. 2, the ink application unit 6 includes two application needles 21 and 22 for applying ink, a switching device 25 for switching the application needles 21 and 22, and application needles 21 and 22 via the switching device 25. And an application needle driving cylinder 26 for vertically driving the nozzle. The application needles 21 and 22 are attached to the switching device 25 via holding members 23 and 24, respectively. The switching device 25 is provided at the tip of the drive shaft 27 of the application needle drive cylinder 26.

このインク塗布ユニット6は、水平に設けられた回転テーブル30を含み、回転テーブル30上には円周方向に複数のインクタンク33〜36が順次配置され、さらに、回転テーブル30上には洗浄装置37とエアパージ装置38とが設けられる。回転テーブル30の中心には回転軸31が立設されている。また、回転テーブル30には、インク塗布時に針21,22を通過させるための切欠部32が形成されている。インクタンク33〜36には、それぞれR(赤)、G(緑)、B(青)および黒の各色のインクが適宜注入されている。洗浄装置37は、塗布針21,22に付着したインクを除去するためのものであり、エアパージ装置38は塗布針21,22に付着した洗浄液を吹き飛ばすためのものである。インクタンク33〜36、洗浄装置37およびエアパージ装置38の上面には、2本の塗布針21,22を同時に挿入することが可能な孔が開口されている。   The ink application unit 6 includes a rotary table 30 provided horizontally, and a plurality of ink tanks 33 to 36 are sequentially arranged on the rotary table 30 in the circumferential direction. 37 and an air purge device 38 are provided. A rotary shaft 31 is erected at the center of the rotary table 30. Further, the rotary table 30 is formed with a notch 32 for allowing the needles 21 and 22 to pass when ink is applied. R (red), G (green), B (blue), and black inks are appropriately injected into the ink tanks 33 to 36, respectively. The cleaning device 37 is for removing ink adhering to the application needles 21 and 22, and the air purge device 38 is for blowing off the cleaning liquid adhering to the application needles 21 and 22. In the upper surfaces of the ink tanks 33 to 36, the cleaning device 37, and the air purge device 38, holes through which the two application needles 21 and 22 can be simultaneously inserted are opened.

さらに、このインク塗布ユニット6は、回転テーブル30の回転軸31を回転させるためのインデックス用モータ40を含み、さらに回転軸31とともに回転するインデックス板41と、インデックス板41を介して回転テーブル30の回転位置を検出するためのインデックス用センサ42と、インデックス板41を介して回転テーブル30の回転位置が原点に復帰したことを検出するための原点復帰用センサ43とが設けられる。モータ40はセンサ42,43の出力に基づいて制御され、回転テーブル30を回転させて切欠部32、インクタンク33〜36、洗浄装置37およびエアパージ装置38のうちいずれかを塗布針21,22の下方に位置させる。   Further, the ink application unit 6 includes an index motor 40 for rotating the rotary shaft 31 of the rotary table 30, an index plate 41 that rotates together with the rotary shaft 31, and the rotary table 30 via the index plate 41. An index sensor 42 for detecting the rotational position and an origin return sensor 43 for detecting that the rotational position of the rotary table 30 has returned to the origin via the index plate 41 are provided. The motor 40 is controlled based on the outputs of the sensors 42 and 43, and rotates the rotary table 30 so that any one of the notch 32, the ink tanks 33 to 36, the cleaning device 37, and the air purge device 38 is applied to the application needles 21 and 22. Position it below.

次に、このインク塗布ユニットの動作について説明する。まず、たとえば微細パターン修正装置の使用者が、選択手段である操作パネル13を操作して、欠陥部の寸法に応じて2本の塗布針21,22のうちのいずれかの塗布針(たとえば21)を選択する。これに応じて切換装置25は、選択された方の塗布針21を所定の距離だけ下方に突出させる。次いでテーブル9〜11が駆動され、カラーフィルタ基板の欠陥部の上方の所定位置に塗布針21の先端が位置決めされる。次いで、モータ40によって回転テーブル30が回転され、所望のインクタンク(たとえば33)が塗布針21の下に移動される。次に、塗布針駆動シリンダ26によって切換装置25を介して塗布針21が上下に駆動され、塗布針21の先端部にインクが付着される。   Next, the operation of this ink application unit will be described. First, for example, the user of the fine pattern correction device operates the operation panel 13 as selection means, and applies one of the two application needles 21 and 22 (for example, 21) according to the size of the defect portion. ) Is selected. In response to this, the switching device 25 projects the selected application needle 21 downward by a predetermined distance. Next, the tables 9 to 11 are driven, and the tip of the application needle 21 is positioned at a predetermined position above the defective portion of the color filter substrate. Next, the rotary table 30 is rotated by the motor 40, and a desired ink tank (for example, 33) is moved below the application needle 21. Next, the application needle 21 is driven up and down by the application needle driving cylinder 26 via the switching device 25, and ink is attached to the tip of the application needle 21.

次いで、モータ40によって回転テーブル30が回転され、切欠部32が塗布針21の下に移動される。次に、塗布針駆動シリンダ26によって塗布針21が上下に駆動され、塗布針21の先端部に付着したインクがカラーフィルタ基板の欠陥部に塗布される。   Next, the rotary table 30 is rotated by the motor 40 and the notch 32 is moved below the application needle 21. Next, the application needle 21 is driven up and down by the application needle driving cylinder 26, and the ink adhering to the tip of the application needle 21 is applied to the defective portion of the color filter substrate.

塗布針21の洗浄時は、モータ40によって回転テーブル30が回転され、洗浄装置37が塗布針21の下に移動される。次に、塗布針駆動シリンダ26によって塗布針21が上下に駆動され、塗布針21に付着したインクが洗浄される。次いで、モータ40によって回転テーブル30が回転され、エアパージ装置38が塗布針21の下に移動される。次に、塗布針駆動シリンダ26によって塗布針21が上下に駆動され、塗布針21に付着した洗浄液が吹き飛ばされる。   When the application needle 21 is cleaned, the rotary table 30 is rotated by the motor 40 and the cleaning device 37 is moved below the application needle 21. Next, the application needle 21 is driven up and down by the application needle drive cylinder 26, and the ink adhering to the application needle 21 is washed. Next, the rotary table 30 is rotated by the motor 40, and the air purge device 38 is moved below the application needle 21. Next, the application needle 21 is driven up and down by the application needle drive cylinder 26, and the cleaning liquid adhering to the application needle 21 is blown off.

図3(a)は図2に示した切換装置25の構成を示す正面図であり、図3(b)は切換装置25の後面図であり、図3(c)は切換装置25の側面図である。図3(a)〜(c)において、切換装置25は、塗布針21,22のうちの選択された塗布針(図では21)を下方に突出させるための針切換シリンダ51,52を含む。針切換シリンダ51,52は、L字型金具53を介して支持板54の裏面に固定され、支持板54の上端は支持ブロック55を介して塗布針駆動シリンダ26の駆動軸27の下端に固定されている。支持板54の下部両端部には垂直方向の長孔54a,54bが開口されている。   3A is a front view showing the configuration of the switching device 25 shown in FIG. 2, FIG. 3B is a rear view of the switching device 25, and FIG. 3C is a side view of the switching device 25. It is. 3 (a) to 3 (c), the switching device 25 includes needle switching cylinders 51 and 52 for causing the selected application needle (21 in the figure) of the application needles 21 and 22 to protrude downward. The needle switching cylinders 51 and 52 are fixed to the back surface of the support plate 54 via an L-shaped bracket 53, and the upper end of the support plate 54 is fixed to the lower end of the drive shaft 27 of the application needle drive cylinder 26 via a support block 55. Has been. Long holes 54 a and 54 b in the vertical direction are opened at both lower ends of the support plate 54.

保持部材23,24の各々は、支持板54の表面に設けられた図示しないレールに沿って垂直方向に移動可能に設けられている。針切換シリンダ51の駆動軸51aの先端部と保持部材23は、長孔54aを通る連結部材56を介して結合されている。針切換シリンダ52の駆動軸52aの先端部と保持部材24は、長孔54bを通る連結部材57を介して結合されている。   Each of the holding members 23 and 24 is provided so as to be movable in the vertical direction along a rail (not shown) provided on the surface of the support plate 54. The distal end portion of the drive shaft 51a of the needle switching cylinder 51 and the holding member 23 are coupled via a connecting member 56 that passes through the long hole 54a. The tip of the drive shaft 52a of the needle switching cylinder 52 and the holding member 24 are coupled via a connecting member 57 that passes through the long hole 54b.

塗布針21を保持部材23に横から挿入してネジ23aを締めると塗布針21が保持部材23に固定され、ネジ23aを緩めると塗布針21が保持部材23から外れる。塗布針22を保持部材24に横から挿入してネジ24aを締めると塗布針22が保持部材24に固定され、ネジ24aを緩めると塗布針22が保持部材24から外れる。   When the application needle 21 is inserted into the holding member 23 from the side and the screw 23a is tightened, the application needle 21 is fixed to the holding member 23, and when the screw 23a is loosened, the application needle 21 is detached from the holding member 23. When the application needle 22 is inserted into the holding member 24 from the side and the screw 24a is tightened, the application needle 22 is fixed to the holding member 24, and when the screw 24a is loosened, the application needle 22 is detached from the holding member 24.

塗布針21と22は、互いに異なる先端径を有する。たとえば塗布針21の先端径は、塗布針22の先端径よりも小さく設定されている。小さな色抜け欠陥部にインクを塗布する場合は先端径が小さな塗布針21を選択し、大きな色抜け欠陥部にインクを塗布する場合は先端径が大きな塗布針22を選択する。塗布針21を選択すると、針切換シリンダ51の駆動軸51aが突出し、塗布針21,22のうちの塗布針21のみが下方に突出される。また、塗布針22を選択すると、針切換シリンダ52の駆動軸52aが突出し、塗布針21,22のうちの塗布針22のみが下方に突出される。塗布針21,22のうちの下方に突出された塗布針21の先端にインクが付着され、その塗布針21の先端が欠陥部に接触されて欠陥部にインクが塗布される。   The application needles 21 and 22 have different tip diameters. For example, the tip diameter of the application needle 21 is set smaller than the tip diameter of the application needle 22. When applying ink to a small color loss defect portion, the application needle 21 having a small tip diameter is selected, and when applying ink to a large color loss defect portion, the application needle 22 having a large tip diameter is selected. When the application needle 21 is selected, the drive shaft 51a of the needle switching cylinder 51 protrudes, and only the application needle 21 of the application needles 21 and 22 protrudes downward. When the application needle 22 is selected, the drive shaft 52a of the needle switching cylinder 52 protrudes, and only the application needle 22 of the application needles 21 and 22 protrudes downward. Ink adheres to the tip of the application needle 21 protruding downward from the application needles 21 and 22, and the tip of the application needle 21 is brought into contact with the defective portion to apply ink to the defective portion.

なお、小さな色抜け欠陥部に先端径が大きな塗布針を用いてインクを塗布すると、色抜け部の周囲の正常な部分にもインクが塗布され、インクが重ね塗りされた部分の光透過率が小さくなる。また、大きな色抜け欠陥部に先端径が小さな塗布針を用いてインクを塗布すると、多数回塗布する必要が生じ、修正時間が長くなる。また、カラーフィルタの色付き部の色抜け欠陥は、ブラックマトリックスの色抜け欠陥に比べてはるかに大きい。   In addition, when ink is applied to a small missing color defect portion using an application needle having a large tip diameter, the ink is also applied to a normal portion around the missing color portion, and the light transmittance of the portion where the ink is overcoated is increased. Get smaller. In addition, when ink is applied to a large color defect defect portion using a coating needle having a small tip diameter, it is necessary to apply the ink many times, and the correction time becomes long. Further, the color loss defect in the colored portion of the color filter is much larger than the color loss defect in the black matrix.

図4(a)は塗布針21の先端部にインク60を付着させた状態を示す断面図であり、図4(b)は図4(a)のIVB−IVB線断面図である。図4(a)(b)において、この塗布針21の先端部には、インク60の表面張力に影響を受けない長さに亘って、塗布針21の先端から基端に向かって塗布針21の断面積が漸次拡大するテーパ部61が設けられ、塗布針21の先端には平坦面62が設けられている。このように先端部にテーパ部61と平坦面62を設けたことにより、塗布針21をインクタンクから引き上げると、表面張力によってテーパ部61の上部にインク溜まりが発生し、平坦面62およびその近傍は薄いインク層で覆われる。   4A is a cross-sectional view showing a state in which the ink 60 is attached to the tip of the application needle 21, and FIG. 4B is a cross-sectional view taken along the line IVB-IVB in FIG. 4A. 4 (a) and 4 (b), the application needle 21 is provided at the distal end portion of the application needle 21 from the distal end to the proximal end of the application needle 21 over a length that is not affected by the surface tension of the ink 60. A taper portion 61 whose cross-sectional area gradually increases is provided, and a flat surface 62 is provided at the tip of the application needle 21. By providing the tapered portion 61 and the flat surface 62 at the tip portion in this manner, when the application needle 21 is pulled up from the ink tank, an ink pool is generated in the upper portion of the tapered portion 61 due to surface tension, and the flat surface 62 and its vicinity are formed. Is covered with a thin ink layer.

図5(a)〜(d)は塗布針21を用いて基板8の表面にインク60を塗布する動作を示す断面図であり、図5(e)〜(h)はそれぞれ図5(a)〜(d)で示した塗布針21の先端の拡大図である。   FIGS. 5A to 5D are cross-sectional views showing the operation of applying the ink 60 to the surface of the substrate 8 using the application needle 21, and FIGS. 5E to 5H are respectively shown in FIG. It is an enlarged view of the front-end | tip of the application needle | hook 21 shown by (d).

まず図5(a)(e)に示すように、先端部にインク60を付着させた塗布針21を基板8の表面に対して垂直に保持し、かつ塗布針21の先端を所定位置に位置決めする。次いで図5(b)(f)に示すように、塗布針21先端の平坦面62を基板8の表面に接触させる。これにより、塗布針21先端の平坦面62に付着したインク60は、基板8に転写塗布される。図5(c)(d)(g)(h)に示すように、塗布針21を上方に移動させると、基板8の表面にインク層63が形成される。インク層63の直径は、塗布針21先端の平坦面62と略同じ大きさになる。塗布針22は、塗布針21よりも平坦面62の直径が大きいだけで他の構成は同じであるので、その説明は繰り返さない。   First, as shown in FIGS. 5A and 5E, the application needle 21 with the ink 60 attached to the tip is held perpendicular to the surface of the substrate 8, and the tip of the application needle 21 is positioned at a predetermined position. To do. Next, as shown in FIGS. 5B and 5F, the flat surface 62 at the tip of the application needle 21 is brought into contact with the surface of the substrate 8. As a result, the ink 60 attached to the flat surface 62 at the tip of the application needle 21 is transferred and applied to the substrate 8. As shown in FIGS. 5C, 5 </ b> D, 5 </ b> G, and 5 </ b> H, when the application needle 21 is moved upward, an ink layer 63 is formed on the surface of the substrate 8. The diameter of the ink layer 63 is substantially the same as the flat surface 62 at the tip of the application needle 21. The application needle 22 has the same configuration except that the diameter of the flat surface 62 is larger than that of the application needle 21, and therefore the description thereof will not be repeated.

この実施の形態では、先端径の異なる2本の塗布針21,22と、欠陥部の寸法に応じて塗布針21,22のうちのいずれかの塗布針を選択する操作パネル13と、操作パネル13によって選択された塗布針を下方に突出させる切換装置25とを設けたので、塗布針21と22を容易かつ迅速に交換することができる。   In this embodiment, two application needles 21 and 22 having different tip diameters, an operation panel 13 for selecting one of the application needles 21 and 22 according to the size of the defective portion, and an operation panel Since the switching device 25 for projecting the application needle selected by 13 is provided downward, the application needles 21 and 22 can be exchanged easily and quickly.

なお、この実施の形態では、先端径の異なる2本の塗布針21,22を設けたが、先端の平坦面の形状や寸法の異なる3本以上の塗布針を設け、それらのうちの所望の塗布針を選択できるようにしてもよい。   In this embodiment, two application needles 21 and 22 having different tip diameters are provided. However, three or more application needles having different shapes and dimensions of the flat surface of the tip are provided, and a desired one of them is provided. An application needle may be selected.

今回開示された実施の形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は上記した説明ではなくて特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。   The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

この発明の一実施の形態による微細パターン修正装置の全体構成を示す斜視図である。1 is a perspective view showing an overall configuration of a fine pattern correction apparatus according to an embodiment of the present invention. 図1に示したインク塗布ユニットの構成を示す一部省略した斜視図である。FIG. 2 is a partially omitted perspective view showing the configuration of the ink application unit shown in FIG. 1. 図2に示した切換装置の構成を示す図である。It is a figure which shows the structure of the switching apparatus shown in FIG. 図3に示した塗布針の構成を示す図である。It is a figure which shows the structure of the application needle | hook shown in FIG. 図4に示した塗布針を用いたインク塗布方法を示す図である。It is a figure which shows the ink application | coating method using the application needle | hook shown in FIG.

符号の説明Explanation of symbols

1 観察光学系、2 落射照明用光源、3 対物レンズ、4 CCDカメラ、5 レーザ、6 インク塗布ユニット、7 インク硬化用光源、8 修正対象ガラス基板、9 Z軸テーブル、10 X軸テーブル、11 Y軸テーブル、12 制御用コンピュータ、13 操作パネル、21,22 塗布針、23,24 保持部材、23a,24a ネジ、25 切換装置、26 塗布針駆動シリンダ、27,51a,52a 駆動軸、30 回転テーブル、31 回転軸、32 切欠部、33〜36 インクタンク、37 洗浄装置、38 エアパージ装置、40 モータ、41 インデックス板、42 インデックス用センサ、43 原点復帰用センサ、51,52 針切換シリンダ、53 L字型金具、54 支持板、54a,54b 長孔、55 支持ブロック、56,57 連結部材、60 インク、61 テーパ部、62 平坦面、63 インク層。   DESCRIPTION OF SYMBOLS 1 Observation optical system, 2 Epi-illumination light source, 3 Objective lens, 4 CCD camera, 5 Laser, 6 Ink application unit, 7 Ink curing light source, 8 Correction object glass substrate, 9 Z-axis table, 10 X-axis table, 11 Y-axis table, 12 control computer, 13 operation panel, 21, 22 application needle, 23, 24 holding member, 23a, 24a screw, 25 switching device, 26 application needle drive cylinder, 27, 51a, 52a drive shaft, 30 rotations Table, 31 Rotating shaft, 32 Notch, 33-36 Ink tank, 37 Cleaning device, 38 Air purge device, 40 Motor, 41 Index plate, 42 Index sensor, 43 Origin return sensor, 51, 52 Needle switching cylinder, 53 L-shaped bracket, 54 support plate, 54a, 54b long hole, 55 support block , 56, 57 connecting member, 60 ink, 61 taper portion, 62 flat surface, 63 an ink layer.

Claims (3)

基板の欠陥部に修正液を塗布して修正する修正液塗布ユニットであって、
複数の塗布針と、
前記修正液が収容された容器と、
前記複数の塗布針のうちのいずれかの塗布針を選択する選択手段と、
前記複数の塗布針のうちの前記選択手段によって選択された塗布針の先端部に前記容器内の修正液を付着させ、その塗布針の先端に付着した修正液を前記欠陥部に塗布する駆動手段とを備えたことを特徴とする、修正液塗布ユニット。
A correction liquid application unit that applies correction liquid to a defective portion of a substrate to correct it,
A plurality of application needles;
A container containing the correction fluid;
Selecting means for selecting any one of the plurality of application needles;
Driving means for attaching correction liquid in the container to the tip of the application needle selected by the selection means among the plurality of application needles, and applying the correction liquid attached to the tip of the application needle to the defective part And a correction fluid application unit.
前記駆動手段は、
前記複数の塗布針のうちの前記選択手段によって選択された塗布針のみを下方に突出させる第1の駆動装置と、
前記第1の駆動装置を上下動させて、前記選択手段によって選択された塗布針の先端部に前記容器内の修正液を付着させ、その塗布針の先端に付着した修正液を前記欠陥部に塗布する第2の駆動装置とを含むことを特徴とする、請求項1に記載の修正液塗布ユニット。
The driving means includes
A first drive device that projects downward only the application needle selected by the selection means among the plurality of application needles;
The first driving device is moved up and down to attach the correction liquid in the container to the tip of the application needle selected by the selection means, and the correction liquid attached to the tip of the application needle is applied to the defective part. The correction liquid application unit according to claim 1, further comprising a second driving device for applying the correction liquid.
各塗布針の先端には平坦面が形成されており、
各塗布針の平坦面の寸法は、他の塗布針の寸法と異なることを特徴とする、請求項1または請求項2に記載の修正液塗布ユニット。
A flat surface is formed at the tip of each application needle,
The correction liquid application unit according to claim 1 or 2, wherein the dimension of the flat surface of each application needle is different from the dimensions of the other application needles.
JP2005267105A 2005-09-14 2005-09-14 Correction fluid application unit Expired - Fee Related JP4732092B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009151261A (en) * 2007-11-27 2009-07-09 Lasertec Corp Defect correction device, defect correction method and method of manufacturing pattern substrate
JP2011131124A (en) * 2009-12-22 2011-07-07 V Technology Co Ltd Apparatus and method for chemical coating

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JPH08292442A (en) * 1995-04-24 1996-11-05 Ntn Corp Defect correcting method and defect correcting device for liquid crystal substrate
JPH09236933A (en) * 1996-02-29 1997-09-09 Ntn Corp Defect correction device
JP2001340984A (en) * 2000-05-31 2001-12-11 Toshiba Corp Laser repair equipment
JP2002333725A (en) * 2001-05-08 2002-11-22 Ntn Corp Device for modifying pattern
JP2005107318A (en) * 2003-09-30 2005-04-21 Dainippon Printing Co Ltd Manufacturing method of color filter and defect removing apparatus for color filter

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JPH08292442A (en) * 1995-04-24 1996-11-05 Ntn Corp Defect correcting method and defect correcting device for liquid crystal substrate
JPH09236933A (en) * 1996-02-29 1997-09-09 Ntn Corp Defect correction device
JP2001340984A (en) * 2000-05-31 2001-12-11 Toshiba Corp Laser repair equipment
JP2002333725A (en) * 2001-05-08 2002-11-22 Ntn Corp Device for modifying pattern
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009151261A (en) * 2007-11-27 2009-07-09 Lasertec Corp Defect correction device, defect correction method and method of manufacturing pattern substrate
JP2011131124A (en) * 2009-12-22 2011-07-07 V Technology Co Ltd Apparatus and method for chemical coating

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