JP2009268982A - Coating needle, and coating mechanism, defect correcting device and coating method, using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coating needle capable of accurately, quickly and easily applying a liquid material. <P>SOLUTION: In a coating needle 1, its tip end is formed in a tapered shape, a flat surface 3 is provided at the tip, and a slit groove 4 is formed to divide the tip end into plural parts. When the flat surface 3 at the tip is brought into contact with a substrate 7, ink 5 stored in the upper part of a tapered part 2 and in the slit groove 4 is flowed to the tip by a capillary phenomenon. Accordingly, a significant amount of ink 5 can be quickly and easily applied. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an application needle, an application mechanism using the same, a defect correcting apparatus, and an application method, and in particular, for applying the liquid material by attaching a liquid material to the tip of the needle and bringing the tip into contact with a substrate. The present invention relates to a coating needle, a coating mechanism using the same, a defect correcting device, and a coating method.

  In recent years, the number of pixels has increased with the increase in size and resolution of LCDs (liquid crystal displays), making it difficult to manufacture LCDs without defects, and the probability of occurrence of defects has also increased. Under these circumstances, in order to improve the yield, a defect correcting apparatus that corrects a defect that occurs in the manufacturing process of an LCD color filter has become indispensable for a production line.

  Recently, a 65-inch LCD is commercially available. As shown in FIGS. 19A and 19B, the size of one pixel is about 350 μm × 130 μm to 740 μm × 240 μm of a small panel, and the area ratio is about 4 It has doubled and is becoming very large. As the pixel size increases, the defect size increases and the correction size also increases. In such a situation, even with the correction quality that was not a problem with the conventional small correction size, it may become a problem because it becomes an area that can be seen with a large correction size.

  20A to 20C are diagrams showing defects that occur in the manufacturing process of the color filter of the LCD. 20A to 20C, the color filter includes a transparent substrate, a lattice pattern called a black matrix 50 formed on the transparent substrate, a plurality of sets of R (red) pixels 51, and G (green). A pixel 52 and a B (blue) pixel 53. In the color filter manufacturing process, the white defect 54 in which the color of the pixel or the black matrix 50 is lost as shown in FIG. 20A, or the color of the adjacent pixel is mixed as shown in FIG. 20B. Or a black defect 55 in which the black matrix 50 protrudes from the pixel, or a foreign substance defect 56 in which a foreign substance adheres to the pixel as shown in FIG.

  As a method for correcting the white defect 54, ink having the same color as that of the pixel in which the white defect 54 is present is attached to the tip of the application needle, the ink layer on the circular flat surface at the tip of the needle is transferred to the white defect 54, and the circular defect There is a method of covering the white defect 54 with an ink layer (see, for example, Patent Document 1).

  Further, as a method of correcting the black defect 55 and the foreign matter defect 56, the defective portion is laser-cut to form a rectangular white defect 54, and the rectangular white defect 54 is formed using a coating needle having a rectangular tip flat surface. There is a method of transferring a rectangular ink layer (see, for example, Patent Document 2).

Also, a method is provided in which a groove or the like is formed on the surface of the tip of the application needle, and ink accumulated in the groove or the like is supplied to the contact portion between the tip of the application needle and the substrate due to an imbalance of surface tension caused by contact between the tip of the application needle and the substrate (See, for example, Patent Document 3).
Japanese Patent Laid-Open No. 9-61296 JP-A-9-262520 JP 2007-94341 A

  However, in the method of Patent Document 1, as shown in FIG. 21, since the white defect 54 is covered with a circular ink layer larger than the white defect 54, the ink is also applied to the normal part around the white defect 54. The overlapping portion 57 occurs. As described above, when the correction size increases, the overlapping portion 57 may be determined to be defective by visual inspection.

  In addition, since only the ink adhered to the flat surface at the tip of the application needle is transferred and applied, there is a problem that the amount of ink that can be applied at one time is small. Although it is possible to increase the amount of ink applied by applying a plurality of times, it is necessary to reciprocate the application needle between the ink tank and the defect each time it is applied, and the correction time becomes longer.

  In the method of Patent Document 2, since the shape of the tip of the application needle is rectangular, it is possible to apply ink in the same shape as the laser cut portion. However, the tip of the application needle is positioned with high accuracy in the laser cut portion. There is a need to. However, since the size of the substrate is increasing in recent years, it is not easy to perform highly accurate positioning over the entire surface of the substrate.

  Further, since the application size is determined by the dimensions of the tip of the application needle, when the laser cut size is changed, it is necessary to replace the application needle, resulting in poor workability.

  Further, similarly to Patent Document 1, since only the ink adhered to the flat surface at the tip of the application needle is transferred and applied, there is a problem that the amount of ink that can be applied at one time is small.

  In addition, in the method of Patent Document 3, it is possible to apply ink accumulated in a groove or the like on the surface of the tip of the application needle, but the amount of ink that can be applied at one time is not sufficient, and in order to correct a large defect It was necessary to apply several times.

  Therefore, a main object of the present invention is to provide an application needle capable of accurately and easily applying a liquid material, an application mechanism using the same, a defect correcting apparatus, and an application method.

  The application needle according to the present invention is such that a liquid material is attached to the tip portion, and a taper portion that narrows toward the tip is formed at the tip portion in the application needle for applying the liquid material by bringing the tip into contact with the substrate. A flat surface is formed at the tip, and a liquid material supply portion is formed to store and supply the liquid material to the tip, and the liquid material supply portion is divided into a plurality of tapered portions from the flat surface to the upper portion of the tapered portion. 1 or 2 or more slit grooves formed over the entire surface.

  Preferably, the liquid material supply unit further includes a through-hole penetrating the coating needle in the radial direction at the upper portion of the tapered portion, and the slit groove is formed from the flat surface to the through-hole.

  Preferably, the interval between the side walls of the slit groove is the same or extends upward from the tip to the upper portion of the tapered portion.

  Further, the coating mechanism according to the present invention is characterized by comprising the above-described coating needle, and a driving means for applying the liquid material by attaching the liquid material to the tip of the coating needle and bringing the tip into contact with the substrate. To do.

  Further, the defect correcting apparatus according to the present invention includes the coating mechanism, an observation optical mechanism for observing the substrate, a laser irradiation mechanism for removing the defective portion of the substrate, and a liquid material applied to the defective portion by the coating mechanism. And a positioning mechanism that moves the coating mechanism, the observation optical mechanism, the laser irradiation mechanism, and the ink curing mechanism relative to each other in a direction perpendicular to and parallel to the substrate.

  Further, the coating method according to the present invention applies the liquid material by attaching the liquid material to the tip of the coating needle and holding the coating needle perpendicular to the substrate while bringing the tip of the coating needle into contact with the substrate. It is characterized by doing.

  Preferably, the application amount of the liquid material is adjusted according to the time during which the tip of the application needle contacts the substrate.

  Preferably, the liquid material is applied in a line by moving the application needle and the substrate relative to each other while the tip of the application needle is in contact with the substrate.

  In the applicator needle according to the present invention, a liquid material supply part that stores liquid material and supplies it to the tip is formed. One or two or more slit grooves are formed. Therefore, when the flat surface at the tip of the application needle is brought into contact with the substrate, the liquid material accumulated in the upper portion of the taper portion and the slit groove is supplied to the tip by capillary action and applied to the substrate. Therefore, more liquid materials than before can be applied accurately and easily. For example, when applying ink to the white defect of the color filter, the ink can be accurately and easily applied to the entire white defect by bringing the tip of the application needle into contact with the white defect.

  Fig.1 (a) is a front view which shows the front-end | tip part of the applicator needle 1 by one embodiment of this invention, The figure (b) is the IB-IB sectional view taken on the line of the figure (a). 2A is a front view showing a state where the ink 5 is attached to the tip of the coating needle 1, and FIG. 2B is a cross-sectional view taken along the line IIB-IIB in FIG.

  1 (a) and 1 (b), a tip portion of the application needle 1 is provided with a tapered portion 2 in which the cross-sectional area of the application needle 1 gradually increases from the distal end of the application needle 1 toward the proximal end. A flat surface 3 is provided at the tip of 1, and a slit groove 4 having a predetermined dimension is formed from the flat surface 3 to the upper portion of the tapered portion 2 so as to divide the tapered portion 2 into two.

  By providing the tapered portion 2, the flat surface 3, and the slit groove 4 at the tip portion as described above, when the application needle 1 is pulled up from the ink tank, as shown in FIGS. An ink pool is generated in the upper part of the portion 2, the flat surface 3 and its vicinity are covered with a thin ink layer, and the ink 5 is collected in the slit groove 4. When the flat surface 3 at the tip of the application needle 1 is brought into contact with the substrate surface, the ink 5 adheres to the substrate surface, causing an imbalance in surface tension, and the ink 5 accumulated in the upper portion of the taper portion 2 or in the slit groove 4. Is supplied to the tip through the slit groove 4 by capillary action and applied to the substrate. For example, when the ink 5 is applied to the white defect of the color filter, the ink 5 can be accurately and easily applied to the entire white defect by bringing the tip of the application needle 1 into contact with the center of the white defect. .

  FIGS. 3A and 3B to FIG. 10A and FIG. 10B are diagrams showing a modification of the embodiment. 3 (a) (b), FIG. 5 (a) (b), FIG. 7 (a) (b), and FIG. 9 (a) (b) are compared with FIG. 1 (a) (b). 4 (a) (b), FIG. 6 (a) (b), FIG. 8 (a) (b), and FIG. 10 (a) (b) are shown in FIG. It is a figure contrasted with b).

  3 (a) (b) and 4 (a) (b), two slits 4 are formed in a cross shape, and FIGS. 5 (a) (b) and 6 (a) (b) 3), three slits 4 are formed at intervals of 120 degrees. As the number of slit grooves 4 increases, the amount of ink stored in the slit grooves 4 increases, so the amount of ink 5 flowing out to the contact portion between the application needle 1 and the substrate increases. Further, a large amount of ink 5 can be discharged in a shorter time, and the correction time can be shortened.

  7 (a), 7 (b) and 8 (a), 8 (b), a cylindrical through hole penetrating the application needle 1 in the radial direction (direction perpendicular to the center line) at the upper portion of the tapered portion 2. 6 is formed, and the slit groove 4 is formed from the flat surface 3 to the through hole 6. In this modified example, since the ink 5 is also stored in the through hole 6, the ink application amount increases. Therefore, it can be applied to a larger area or applied to a longer line. Further, when the diameter of the flat surface 3 at the tip of the application needle 1 is reduced, forming a plurality of slit grooves 4 as shown in FIGS. 3 (a) and 3 (b) and FIGS. 5 (a) and 5 (b) Difficult due to dimensional constraints. This modification is effective for increasing the ink application amount in such a case.

  9A, 9B, and 10A, 10B, the slit groove 4 is formed in a wedge shape in which the width (interval between the side walls) gradually increases toward the top of the application needle 1. ing. In this modified example, it becomes possible to store more ink 5 in the slit groove 4 than in the modified examples in FIGS.

  FIGS. 11A to 11E are cross-sectional views showing the operation of applying the ink 5 to the surface of the substrate 7 using the application needle 1, and FIGS. 11F to 11J are respectively shown in FIG. It is an enlarged view of the front-end | tip of the applicator needle 1 shown to (e).

  First, as shown in FIGS. 11 (a) and 11 (f), the application needle 1 with the ink 5 attached to the tip is held perpendicular to the surface of the substrate 7, and the tip of the application needle 1 is, for example, a white defect. Position above the center. Next, as shown in FIGS. 11B and 11G, the flat surface 3 at the tip of the application needle 1 is brought into contact with and held on the surface of the substrate 7. Thereby, the ink 5 attached to the flat surface 3 at the tip of the application needle 1 is pushed out to the outer periphery of the flat surface 3. At this time, since the extruded ink 5 and the ink 5 stored in the slit groove 4 are connected, an imbalance occurs in the surface tension of the ink 5, and the ink stored in the ink reservoir and the slit groove 4. 5 flows out to the contact portion between the application needle 1 and the substrate 7 as shown in FIGS. Since the amount of the ink 5 flowing out to the contact portion increases with time, the amount of the ink 5 flowing out from the coating needle 1 to the surface of the substrate 7 can be managed by the time for holding the coating needle 1 in contact with the substrate 7.

  As shown in FIGS. 11D, 11E, 11I, and 11J, when the application needle 1 is moved upward, an ink layer 8 is formed on the surface of the substrate. When the application needle 1 is moved upward and a gap is formed between the surface of the substrate 7 and the flat surface 3 at the tip of the application needle 1, the ink 5 flows into this gap. Since the flow speed of the ink 5 at this time is determined by characteristics such as the viscosity of the ink 5 and the wettability with respect to the surface of the substrate 7, the surface of the substrate 7 is adjusted by adjusting the speed at which the coating needle 1 is moved upward. The amount of ink 5 applied to the ink and the thickness of the ink layer 8 can be adjusted.

  12A to 12E are cross-sectional views illustrating other operations for applying the ink 5 to the surface of the substrate 7 using the application needle 1. 12A to 12E, a color filter film 9 is formed on the surface of the substrate 7. For example, a black defect is laser-cut and a part of the color filter film 9 is removed in a rectangular shape. Conventionally, a circular ink layer is transferred so as to cover the laser cut portion 10 by using an application needle having a circular flat surface larger than the laser cut portion 10 or an application having a rectangular flat surface having the same dimensions as the laser cut portion 10. The rectangular ink layer was transferred into the laser cut portion 10 using a needle. In the present invention, the application needle 1 having a flat surface 3 smaller than the laser cut portion 10 is used.

  First, as shown in FIG. 12A, the application needle 1 with the ink 5 of the same color as the color filter film 9 attached to the tip is held perpendicular to the surface of the substrate 7, and the tip of the application needle 1 is The laser cutting unit 10 is positioned above the central part. Next, as shown in FIG. 12B, the flat surface 3 at the tip of the application needle 1 is brought into contact with the surface of the substrate 7 and held. Thereby, the ink 5 attached to the flat surface 3 at the tip of the application needle 1 is pushed out to the outer periphery of the flat surface 3. At this time, since the extruded ink 5 and the ink 5 stored in the slit groove 4 are connected, the ink 5 stored in the slit groove 4 is caused by capillary action as shown in FIG. To the contact portion between the application needle 1 and the substrate 7. Since the amount of the ink 5 flowing out to the contact portion increases with time, the amount of the ink 5 flowing out from the coating needle 1 to the surface of the substrate 7 can be managed by the time for holding the coating needle 1 in contact with the substrate 7. The amount of the ink 5 is set according to the area and thickness of the laser-cut color filter film 9.

  The ink 5 that has flowed out to the contact portion between the coating needle 1 and the substrate 7 spreads and fills the entire laser cut portion 10 so as to be sucked into the step corner of the laser cut color filter film 9 by capillary action. For this reason, even if the application position is slightly deviated, it is possible to fill the entire laser cut portion 10 with the ink 5, and the tip of the application needle 1 does not damage the surrounding normal portion. Therefore, even if the application position accuracy is not as high as the conventional one, high-quality defect correction is possible. As shown in FIGS. 12D and 12E, when the application needle 1 is moved upward, the ink layer 11 is formed in the laser cut portion 10, and the correction of the color filter film 9 is completed.

  FIGS. 13A and 13B are cross-sectional views showing still another operation of applying the ink 5 to the surface of the substrate 7 using the application needle 1. 13 (a) and 13 (b), the surface of the substrate 7 is moved by moving the coating needle 1 and the substrate 7 relatively horizontally in a state where the flat surface 3 at the tip of the coating needle 1 is in contact with the surface of the substrate 7. It becomes possible to apply the ink 5 in a line shape.

  14 (a) (b) and 15 (a) (b) are diagrams showing comparative examples of the embodiment, and FIG. 1 (a) (b), FIG. 2 (a) (b) and FIG. It is a figure compared. 14A, 14B, 15A, and 15B, the cross-sectional area of the application needle 15 gradually increases from the distal end of the application needle 15 toward the proximal end of the application needle 15. A tapered portion 16 is provided, and a flat surface 17 is provided at the tip of the application needle 15. However, the slit groove 4 like the application needle 1 is not formed. By providing the tapered portion 16 and the flat surface 17 at the distal end in this manner, when the application needle 15 is pulled up from the ink tank, an ink pool is generated in the upper portion of the tapered portion 16 due to the surface tension, and the flat surface 17 and its vicinity are formed. Is covered with a thin ink layer.

  FIGS. 16A to 16E are cross-sectional views showing the operation of applying the ink 5 to the surface of the substrate 7 using the application needle 15 shown in FIGS. 14A and 14B. FIG. (J) is an enlarged view of the tip of the application needle 15 shown in FIGS. 16 (a) to (e), respectively.

  First, as shown in FIGS. 16A and 16F, the application needle 15 with the ink 5 attached to the tip is held perpendicular to the surface of the substrate 7, and the tip of the application needle 15 is positioned at a predetermined position. To do. Next, as shown in FIGS. 16 (b), (c), (g), and (h), the flat surface 17 at the tip of the application needle 15 is brought into contact with and held on the surface of the substrate 7. As a result, the ink 5 adhering to the flat surface 17 at the tip of the application needle 15 is pushed out to the outer periphery of the flat surface 17. At this time, even if the contact holding time between the application needle 15 and the substrate 7 is increased, the amount of the ink 5 flowing out to the contact portion between the application needle 15 and the substrate 7 hardly changes. This is because only the ink 5 attached to the flat surface 17 at the tip of the application needle 15 is transferred and applied. As shown in FIGS. 16D, 16E, 16I, and 16J, when the application needle 15 is moved upward, an ink layer 18 is formed on the surface of the substrate. In this application needle 15, even if the contact holding time between the application needle 15 and the substrate 7 is increased, the amount of the ink 5 flowing out to the contact portion between the application needle 15 and the substrate 7 hardly changes. j) and ink application as shown in FIGS. 13 (a) and 13 (b) cannot be performed.

  FIG. 17 is a partially omitted perspective view showing the configuration of the ink application mechanism 21 that applies the ink 5 using the application needle 1 shown in FIGS. 1 (a) (b) to 13 (a) (b). is there. In FIG. 17, the ink application mechanism 21 includes an application needle 1 for applying ink and an application needle drive cylinder 22 for driving the application needle 1 vertically. The application needle 1 is provided at the distal end portion of the drive shaft 23 of the application needle drive cylinder 22 via the holding member 24.

  The ink application mechanism 21 includes a rotary table 25 provided horizontally, and a plurality of ink tanks 28 to 31 are sequentially arranged on the rotary table 25 in the circumferential direction. 32 and an air purge device 33 are provided. A rotating shaft 26 is erected at the center of the rotary table 25. Further, the rotary table 25 is formed with a notch 27 for allowing the needle 1 to pass through when applying ink. Ink tanks 28 to 31 are appropriately filled with inks 5 of R (red), G (green), B (blue), and black, respectively. The cleaning device 32 is for removing the ink 5 attached to the application needle 1, and the air purge device 33 is for blowing off the cleaning liquid attached to the application needle 1.

  Further, the ink application mechanism 21 includes an index motor 34 for rotating the rotary shaft 26 of the rotary table 25, an index plate 35 that rotates together with the rotary shaft 26, and the rotary table 25 via the index plate 35. An index sensor 36 for detecting the rotational position and an origin return sensor 37 for detecting that the rotational position of the rotary table 25 has returned to the origin via the index plate 35 are provided. The motor 34 is controlled based on the outputs of the sensors 36 and 37, and rotates the rotary table 25 to place any one of the cutout portion 27, the ink tanks 28 to 31, the cleaning device 32, and the air purge device 33 below the application needle 1. Position.

  The application needle drive cylinder 22 and the motor 34 are fixed to a Z-axis table (not shown), and the Z-axis table and the color filter substrate to be subjected to defect correction are an XY table (not shown) below the application needle 1. )).

  Next, the operation of the ink application mechanism 21 will be described. First, the XY table and the Z-axis table are driven, and the tip of the application needle 1 is positioned at a predetermined position above the defective portion of the color filter substrate. Next, the rotary table 25 is rotated by the motor 34, and a desired ink tank (for example, 28) is moved below the application needle 1. Next, the application needle 1 is driven up and down by the application needle drive cylinder 22, and the ink 5 is attached to the tip of the application needle 1.

  Next, the rotary table 25 is rotated by the motor 34, and the notch 27 is moved below the application needle 1. Next, the application needle 1 is driven up and down by the application needle drive cylinder 22, and the ink 5 attached to the tip of the application needle 1 is applied to the defective portion of the color filter substrate.

  When cleaning the application needle 1, the rotary table 25 is rotated by the motor 34, and the cleaning device 32 is moved below the application needle 1. Next, the application needle 1 is driven up and down by the application needle drive cylinder 22, and the ink 5 attached to the application needle 1 is washed. Next, the rotary table 25 is rotated by the motor 34, and the air purge device 33 is moved below the application needle 1. Next, the application needle 1 is driven up and down by the application needle drive cylinder 22, and the cleaning liquid adhering to the application needle 1 is blown off.

  FIG. 18 is a diagram showing an overall configuration of a defect correcting apparatus equipped with the ink application mechanism 21 shown in FIG. In FIG. 18, this defect correction apparatus can be roughly classified into a defect correction head unit including an observation optical system 40, a CCD camera 41, a laser 42, an ink application mechanism 21, and an ink curing illumination 43, and this defect correction. A Z-axis table 44 for moving the head portion in a direction perpendicular to the substrate 7 (Z-axis direction), an X-axis table 45 for mounting the Z-axis table 44 and moving it in the X-axis direction, and the substrate 7 are mounted. The Y-axis table 46 for moving in the Y-axis direction, a control computer 47 for controlling the operation of the entire apparatus, and an operation panel 48 for inputting commands from the operator to the control computer 47. The

  The observation optical system 40 is for observing the surface state of the substrate 7 and the state where ink is applied by the ink application mechanism 21. An image observed by the observation optical system 40 is converted into an electrical signal by the CCD camera 41 and displayed on the monitor screen of the control computer 47. The ink curing illumination 43 irradiates light for curing the ink 5 applied by the ink application mechanism 21. When the ink 5 is an ultraviolet curing type, the ultraviolet illumination is selected as the ink curing illumination 43 and mounted on the apparatus. When the ink 5 is a thermosetting type, the halogen illumination is selected as the ink curing illumination 43 and mounted on the apparatus. The laser 42 is used to remove black defects and foreign object defects. With this apparatus configuration, it is possible to correct white defects, black defects, and foreign matter defects generated in the color filter.

  In this embodiment, when the flat surface 3 at the tip of the application needle 1 is brought into contact with the surface of the substrate 7, the ink 5 accumulated in the slit groove 4 at the tip of the application needle 1 flows out to the contact portion by capillary action. Therefore, it is possible to fill and apply the ink 5 in the laser cut portion 10, and it is possible to correct a high-quality defect without overlapping the normal portion of the ink layer, which has been a problem in the past.

  Further, since the amount of ink flowing to the contact portion increases according to the contact time between the application needle 1 and the substrate 7, there is no need to apply a plurality of times as in the prior art, and the correction tact is shortened.

  When the ink 5 is filled and applied in the laser cut portion 10, the filled ink 5 is sucked into the corners of the four sides of the laser cut color filter film 9 by capillary action and spreads over the entire laser cut portion 10. Therefore, the ink application position by the application needle 1 need only be near the center of the laser cut unit 10, and it is not necessary to position the application position with high accuracy as in the conventional case, and the entire apparatus can be manufactured at low cost. Become.

  Even when the application needle 1 is brought into contact with the substrate 7 and is slid on the substrate 7 to apply the ink 5 in a line shape, it is possible to apply a longer distance than in the past. In addition, since long-distance application can be performed, even when correcting a large pixel, correction can be performed by one slide application, and correction tact can be shortened. In addition, since correction is possible with one slide application, unlike the case where the application is repeated a plurality of times, the ink 5 is less likely to dry during the process, so that the fluidity of the applied ink 5 is ensured and a uniform film is formed. Application is possible and the quality of the correction is improved.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

It is a figure which shows the structure of the front-end | tip part of the applicator needle by one Embodiment of this invention. It is a figure which shows the state which the ink adhered to the front-end | tip part of the application needle | hook shown in FIG. It is a figure which shows the example of a change of embodiment. It is a figure which shows the state which the ink adhered to the front-end | tip part of the application needle | hook shown in FIG. It is a figure which shows the other example of a change of embodiment. It is a figure which shows the state which the ink adhered to the front-end | tip part of the application needle | hook shown in FIG. It is a figure which shows the further another example of a change of embodiment. It is a figure which shows the state which the ink adhered to the front-end | tip part of the application needle | hook shown in FIG. It is a figure which shows the further another example of a change of embodiment. FIG. 10 is a diagram illustrating a state where ink is attached to the tip of the application needle illustrated in FIG. 9. It is a figure which shows the ink application | coating method using the application | coating needle demonstrated in FIGS. It is another figure which shows the ink application | coating method using the application | coating needle demonstrated in FIGS. FIG. 11 is still another view showing an ink application method using the application needle described in FIGS. It is a figure which shows the comparative example of embodiment. It is a figure which shows the state which the ink adhered to the front-end | tip part of the application needle | hook shown in FIG. It is a figure which shows the ink application | coating method using the application needle | hook shown in FIG. It is a figure which shows the structure of the ink application | coating mechanism using the application needle | hook demonstrated in FIGS. It is a figure which shows the whole structure of the defect correction apparatus provided with the ink application | coating mechanism shown in FIG. It is a figure which shows the problem of a color filter. It is a figure which shows the defect which generate | occur | produces in a color filter. It is a figure which shows the problem of the conventional ink application method.

Explanation of symbols

  1,15 coating needle, 2,16 taper portion, 3,17 flat surface, 4 slit groove, 5 ink, 6 through hole, 7 substrate, 8, 11, 18 ink layer, 9 color filter film, 10 laser cut portion, 21 Ink application mechanism, 22 Application needle drive cylinder, 23 Drive shaft, 24 Holding member, 25 Rotary table, 26 Rotary shaft, 27 Notch, 28-31 Ink tank, 32 Cleaning device, 33 Air purge device, 34 Motor, 35 Index Plate, 36 Index sensor, 37 Origin return sensor, 40 Observation optical system, 41 CCD camera, 42 Laser, 43 Ink curing illumination, 44 Z-axis table, 45 X-axis table, 46 Y-axis table, 47 Control computer , 48 Operation panel, 50 Black matrix, 51 R pixel, 52 G pixel, 5 B pixels, 54 white defect, 55 black defect, 56 defective foreign matter, 57 overlap portion.

Claims (8)

In the application needle for applying the liquid material by attaching the liquid material to the tip, and contacting the tip to the substrate,
A tapered portion that narrows toward the tip is formed at the tip,
A flat surface is formed at the tip;
A liquid material supply unit is formed that stores the liquid material and supplies the liquid material to the tip,
The liquid material supply unit includes one or more slit grooves formed from the flat surface to the upper part of the taper portion so as to divide the taper portion into a plurality of portions. . The liquid material supply unit further includes a through hole penetrating the coating needle in a radial direction at an upper portion of the taper portion,
The coating needle according to claim 1, wherein the slit groove is formed from the flat surface to the through hole.   The coating needle according to claim 1 or 2, wherein the interval between the side walls of the slit groove is the same or extends upward from the tip to the upper portion of the tapered portion. An application needle according to any one of claims 1 to 3,
An application mechanism comprising: a driving unit that attaches the liquid material to a distal end portion of the application needle and applies the liquid material by bringing the liquid material into contact with the substrate. An application mechanism according to claim 4,
An observation optical mechanism for observing the substrate;
A laser irradiation mechanism for removing a defective portion of the substrate;
An ink curing mechanism for curing the liquid material applied by the application mechanism;
A defect correction apparatus comprising: a positioning mechanism that relatively moves the coating mechanism, the observation optical mechanism, the laser irradiation mechanism, and the ink curing mechanism in directions perpendicular to and parallel to the substrate. .   The liquid material is attached to the tip of the application needle according to any one of claims 1 to 3, and the tip of the application needle is held on the substrate while holding the application needle perpendicular to the substrate. And applying the liquid material in contact with a liquid.   The coating method according to claim 6, wherein the coating amount of the liquid material is adjusted according to the time during which the tip of the coating needle is brought into contact with the substrate.   The liquid material is applied in a line shape by relatively moving the application needle and the substrate in a state where the tip of the application needle is in contact with the substrate. Application method.

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