TW201006560A - Coating needle and coating mechanism, defect correcting device and coating method using the coating needle - Google Patents

Abstract

This invention is to provide a coating needle capable of accurately, quickly and easily applying liquid material. In a coating needle 1, its tip end is formed in a tapered shape, a flat surface 3 is provided at the tip, and a slit groove 4 is formed to divide the tip end into plural parts. When the flat surface 3 at the tip is brought into contact with a substrate 7, ink stored in the upper part of a tapered part 2 and in the slit groove 4 is flowed out of the tip due to a capillary phenomenon. Accordingly, a significant amount of ink 5 can be quickly and easily applied.

Description

201006560 VI. Description of the Invention: [Technical Field] The present invention relates to a coating needle, a coating mechanism using the above coating needle, a missing device, a correction device, and a coating method, and more particularly, for attaching a liquid material A coating needle for applying the liquid material to the tip end portion of the tip end portion, a coating means for applying the coating needle, a defect correcting device, and a coating method. [Prior Art] In recent years, with the increase in size and high definition of LCD (liquid crystal display), the number of pixels has increased, and it has become difficult to manufacture a defect-free LC]), and the probability of occurrence of defects has gradually increased. In order to improve the yield under the above conditions, the defect correction device for correcting the defects generated in the process of the color filter of the LCD becomes indispensable on the production line. Recently, even 65-inch LCDs have been sold in the market, as shown in Figures WU(19) and 19(b), a pixel size of 74〇/zmx24{Uni and 350-mxl 30 for small panels. // The area ratio around m is about 4 times, and it becomes very large. As the size of the pixel increases, the size of the defect also becomes larger, and the size of the correction becomes larger and larger. In the above case, the correction level which does not cause a problem in the conventionally corrected size is a problem in which a large correction size becomes a visually visible field and becomes a problem. Figures 20(a) to 20(c) are diagrams showing defects occurring in the process of color filters of LCDs. In the 20th (a)th and 0th (c), the color filter is a lattice-shaped pattern called a black matrix 5〇3 201006560, and a complex array R including a transparent substrate and a surface formed on the transparent substrate. (Red) pixels 51, G (green) pixels 52, and B (blue) pixels 5 hearts in the color filter process, will appear as shown in Figure 20 (a) pixel or black The white defect 54 caused by the decolorization of the matrix 5〇, the adjacent pixel color mixture as shown in the 20th (b) diagram, and/or the black matrix 50 exceeds the black defect 55 caused by the pixel, such as the 20th ( c) The foreign matter attached to the figure shows the foreign matter defect caused by the pixel 56. The method of correcting the white defect 54 is to adhere the ink of the same color as the pixel having the white defect 54 to the tip end portion of the coating needle, and to transfer the ink layer of the circular flat surface at the tip end of the needle to the white defect 54. The white defect 54 is covered with a circular ink layer (for example, please refer to the patent document}). In addition, the correction method for the black defect 55 or the foreign matter defect 56 is to form a rectangular white defect 54 by laser removing the defective portion, and then transfer the rectangular ink layer to the white using a coating needle having a rectangular front end flat surface. Within the defect 54 (for example, refer to Patent Document 2). Still another method is to form a groove or the like on the surface of the tip end of the coating needle, and to supply the ink accumulated in the groove or the like to the imbalance of the surface tension caused by the contact between the tip end of the coating needle and the substrate, to A contact portion between the tip end of the coating needle and the substrate is applied (for example, refer to Patent Document 3). [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei No. Hei 9-262520 (Patent Document 3) JP-A-2007-94341 [Patent Document 3] [Problems to be Solved by the Invention] 201006560 However In the method of Patent Document 1, as indicated by the 21st circle, since the white defect 54 is covered with a circular ink layer larger than the white defect 54, the normal portion around the white defect 54 is also coated with the ink. An overlapping portion 57 of the ink is produced. If the corrected size becomes larger as described above, the overlapping portion 57 may be judged to be defective by visual inspection. Further, since only the ink that has adhered to the front end surface of the coating needle is transferred and applied, there is a problem that the amount of ink that can be applied at one time is small. Although it is possible to increase the amount of ink application if the coating is repeated several times, the coating needle must be moved back and forth between the ink tank and the defect each time the coating is applied, so that the correction time becomes long. Further, in the method towel of the patented wire 2, since the tip end of the (four) needle is in the shape of (four)', it is possible to apply the oil in the same shape as the laser removing portion, but it is necessary to perform the laser removing portion and the tip end of the coating needle. Accuracy = surface However, since the substrate has been continuously enlarged in recent years, it is not easy to perform high-precision positioning on the entire substrate. In addition, since the coating size is determined by the size of the coating end of the coating needle, the size of the laser is removed. 'The 涂布 & 0 side is to change the coating needle, which is unfavorable because only the transfer coating has been attached. On the other hand, in the case where the amount of ink that can be applied once is different from that of Patent Document 1, there is a problem that the amount of ink on the flat surface of the tip end of the needle is small. In addition, in the method of Patent Document 3, the groove on the front end surface of the needle is insufficient, and in the method of correcting a large defect, it is also possible to apply a coating of "ink" but the amount of ink that can be applied at one time is still It must be applied several times. 5 201006560 The objective is to provide a coating method that can be used correctly and quickly, using the above-mentioned coating needle. Therefore, the coating cloth mechanism, the defect correcting device, and the coating method for applying the liquid material in the main speed and simpleness of the present invention are the means for solving the problem. ▲ The coating needle according to the present invention is applicable to The liquid material is applied to the end portion of the liquid material, and the liquid material is applied to the front end portion, and a tapered portion which is tapered toward the front end is formed in the front end portion, and is formed at the front end. a flat surface; j, .. $1 has a liquid material supply portion for storing the liquid material and supplying the liquid material to the end; and the liquid material supply portion package And < a* or one or more slits formed to pass through the flat surface to the tapered portion, and divide the tapered portion into a plurality of portions. Further, the above-mentioned (four) material supply unit further includes a through hole that passes through the application needle in the θ portion of the tapered portion, and the slit groove 疋 is formed to pass from the flat surface to the through hole. Further, it is preferable that the end of the side wall of the slit groove is gradually widened by the opening of the upper portion of the tapered portion. The medium uniformity is the same or the upward direction is characterized in that: the liquid material is attached to the rigid end of the substrate to be in contact with the substrate, and the coating mechanism of the present invention relates to a coating needle and a driving tool. The tip end portion of the needle is applied, and the coating needle is applied to the liquid material. Further, the defect correction apparatus according to the present invention is provided with the above-mentioned coating mechanism; the observation μ" is characterized by including: an observation mechanism, an observation mechanism for using an ink curing mechanism, and a laser irradiation mechanism to remove the defect portion of the substrate. The liquid material applied to the defective portion by the coating mechanism is cured; and the positioning mechanism' causes the coating mechanism, the observation optical mechanism, the laser irradiation mechanism, and the ink curing mechanism to be Further, the substrate is subjected to a relative movement in the vertical direction and the horizontal direction. Further, the coating method according to the present invention is characterized in that a liquid material is adhered to the front end portion of the coating needle, and the coating needle is held by the _ surface.

The liquid material is applied to the substrate while the front end of the coating needle is in contact with the substrate. Preferably, the coating amount of the liquid material is adjusted by the time when the tip end of the coating needle contacts the substrate. Further, it is preferable that the liquid material is applied linearly by moving the coating needle and the substrate in a shape L in which the tip end of the coating needle is brought into contact with the substrate. [Effect of the Invention] In the coating needle according to the present invention, a liquid material supply portion that stores a liquid material and supplies the liquid material to the front end is formed, and the liquid material supply portion includes one or two or more The slit groove is formed to pass from the flat surface to the upper portion of the tapered portion, and divides the tapered portion into a plurality of portions. Therefore, when the flat surface of the tip end of the coating needle is brought into contact with the substrate, the liquid material accumulated in the upper portion of the tapered portion and the slit groove is supplied to the tip end by capillary action, and is applied to the substrate. Because of &, more liquid materials than conventional techniques can be applied correctly, quickly and simply. For example, in the case where the white defect coating ink of the color filter is in contact with the white defect, the ink can be applied correctly, quickly, and simply in the white defect 7 201006560. [Embodiment] [Best Mode for Carrying Out the Invention] Fig. 1(a) is a front view showing a distal end portion of a coating needle 1 according to an embodiment of the present invention. (a) A cross-sectional view of the IB-IB line of the figure. In addition, the second (a) is a front view showing a state in which the ink 5 is attached to the distal end portion of the coating needle 1, and the second (b) is a sectional view taken along the ΠΒ_ΙΙΒ line in the second (a) drawing. . In the first (a) and (b) drawings, the distal end portion of the coating needle is provided with a tapered shape in which the cross-sectional area of the coating needle from the distal end of the coating needle 1 to the proximal end is gradually increased. The portion 2 is provided with a flat surface 3 at the tip end of the coating needle}, and a slit groove 4 having a predetermined size is formed, which is formed from the flat surface 3 to the upper portion of the tapered portion 2, and divides the tapered portion 2 into Two parts. By providing the tapered portion 2, the flat surface 3, and the slit groove 4 at the tip end portion as described above, if the coating needle 1 is taken back from the ink tank, as in the second (a), (b) circle, The ink is accumulated in the upper portion of the tapered portion 2 due to the surface tension, and the thin ink layer covers the flat surface 3 and its vicinity, and the ink 5 is accumulated in the slit groove 4. Once the flat surface 3 of the front end of the coating needle 1 is brought into contact with the substrate: the surface 'the surface tension will be accumulated due to the adhesion of the ink 5 to the surface of the substrate, and the ink 5 accumulated in the upper portion of the tapered portion 2 or the narrow groove 4 may be brown. a, % image is supplied to the front end via the slit groove 4, and is applied to

JBL· I By applying the ink 5 to the white defect of the Tuwei needle f-opifier, 'the end is in contact with the central part of the white defect, and the ink can be applied correctly, quickly and simply in the white defect 201006560. . The third (a), third (b) to ten (a), and first (1:) drawings are examples of changes in the embodiment. 3(a) and 3(b), 5(3) and 5(b), 7(a) and 7(b), and 9(a) and 9(b) are respectively associated with 1(a) A pattern compared with the 1(b) diagram; 4(a) and 4(b), 6(a) and 6(b), 8(a) and 8(b), and l〇(a) and 10 (b) The figure is a comparison with the second (a) and the second). In the variants of Figures 3(a), 3(b) and 4(a), 4(b), there are two slit grooves 4 in the shape of a cross; in 5(a), 5 In the variation of (b) and 6(a) and 6(b), three slit grooves 4 are formed at intervals of 12 degrees. Since the amount of ink accumulated in the slit groove 4 is increased as the number of the slit grooves 4 is increased, the amount of the ink 5 flowing out from the contact portion of the coating needle and the substrate is increased. In addition, a large amount of ink 5 can be discharged in a short period of time, and the correction time can be shortened. In the variation of the seventh (a), 7 (b: m, and 8 (a), 8 (b) diagrams, in the upper portion of the tapered portion 2, the radial direction (orthogonal to the center line) is formed. Direction) _ through the cylindrical through hole 6 of the coating needle 1, the slit groove 4 is formed to pass from the flat surface 3 to the through hole 6. In this variation, the oil star 5 is also accumulated in the through hole. The hole 6 is added to increase the amount of ink applied. Therefore, a longer line can be applied to a larger area. Further, if the diameter of the flat surface 3 of the front end of the coating needle 1 is reduced, as in the third The case where a plurality of slit grooves 4 are formed as shown in (a), 3 (b) or 5 (a) and 5 (b) may become difficult due to dimensional constraints. This variation can be effectively In the above case, the ink application amount is increased. In the variation of the figures 9(a), 9(b) and 10(a), 10(b), the width of the slit groove 4 (the spacing of the side walls) is narrow. The wedge shape is formed to gradually widen toward the upper side of the coating needle. In this modification, more of the variation of the seventh (a) and seventh (b) diagrams can be accumulated in the slit groove 4. Ink 5. Figures 11(a) to 11(e) are a series of cross-sectional views showing 1 in the operation of the ink applied to the surface of the substrate 7 5 The first u (f) ~ Shushu needle coating.) FIG respectively, the first ll (a) shown in FIG. ~ Ll (e) of FIG coated needle! A magnified view of the front end.

First, as shown in Figs. 11(a) and 11(f), the coating needle 1 to which the ink 5 is attached at the distal end portion is perpendicular to the surface of the substrate 7, and the leading end of the coating needle is positioned, for example, for white defects. Above the central part. Next, as shown in Figs. 11(b) and 11(g), the flat surface 3 of the tip end of the coating needle is brought into contact with the surface of the substrate 7. Thereby, the ink 5 adhering to the flat surface 3 of the tip end of the coating needle is extruded to the outer ring of the flat surface 3. At this time, the ink 5 which has been extruded is associated with the ink 5 accumulated in the slit groove 4.

In the case of the connection, the surface tension of the ink 5 is unbalanced, and the accumulated ink 2 is stored in the slit groove 4 due to the capillary phenomenon as shown in Fig. 3 11 (c), 11 (h). The contact portion of the cloth needle i and the substrate 7 flows out. Since the amount of the ink 5 flowing out from the contact portion increases with time, the amount of the ink 5 that the phase coating needle 1 flows out to the surface of the substrate 7 can be coated by the cartridge. The time during which the cloth needle 1 is held in contact with the substrate 7 is managed. As shown in Figs. 11(d), 11(e), u(1), and u(1), when the coating needle 1 is moved upward, the ink layer 8 is formed on the surface of the substrate 7. When the coating needle 1 is moved upward, a gap is formed between the surface of the substrate 7 and the flat surface 3 of the coating needle U end: 'Ink 5 can also flow into this gap. Since the flow speed of the ink 5 at 201006560 is determined by the viscosity of the ink 5, its wettability to the surface of the substrate 7, and the like, by adjusting the speed at which the coating needle 1 moves upward in response to these characteristics, The amount of the ink 5 applied to the surface of the substrate 7 or the thickness of the ink layer 8 can be controlled. Figs. 12(a) to 12(e) are a series of cross-sectional views showing other operations of applying the ink 5 to the surface of the substrate 7 using the coating needle 1. In the 12th (a) to 12th (e), the color filter film 9 is formed on the surface of the substrate 7 in advance, and the state is that the black color defect is removed by laser and the shape of the color filter film 9 is rectangular. - The part has been removed. The conventional technique is to cover the laser removing portion 1 涂布 by using a coating needle having a flat surface of a laser-shaped removing portion, and transfer the circular ink layer or use the same size as the laser removing portion. The coating needle of the rectangular flat surface is transferred to the laser removing portion 10 by the rectangular ink layer. In the present invention, the coating needle 1 having the flat surface 3 of the laser beam removing portion 10 is removed. First, as shown in the 12th (in the figure, the front end of the ink 5 of the same color as the film 9 is attached to the front end, and the front end of the coating needle is held on the surface of the laser. The side of the central portion of the portion 1 is removed. Next, as shown in Fig. 12(b), the surface of the w-end of the flat surface 3/, and the surface of the substrate 7 are kept in contact with each other.丄 "The ink 5 attached to one side 3 of the coating needle 1 will be extruded to the flat twist at this time, by the outer ring of the surface 3. The straw is filled with the ink 5 which has been extruded and stored in the narrow ink 5 In the case of the oil splicing in the slit groove 4, the capillary in the slit groove 4 is stored in the slit groove 4, and if the ink 5 is not coated by the 12th (c), the coating is applied. The contact portion flows out. The amount of ink ς s ® b flowing out from the contact portion is increased from 11 201006560, and flows from the coating needle, ^ L 丞 plate 7 The amount of the ink 5 can be managed by the time during which the coating needle 1 is held in contact with a certain uncle or plate 7. The amount of the ink 5 is based on the color filter removed from the s ^ Λ 到 to the laser. Area and thickness of film 9 to be set.

The ink 5 flowing out from the contact portion of the coating needle 1 and the substrate 7 is sucked into the stepped angle portion of the laser-removed color filter film 9 due to the phenomenon of hairiness, and is widely divided and filled with lightning. The entire part of the shot removal unit. Therefore, even if there is a slight offset in the coating position, the ink 5 can be filled in the entire front end of the coating needle 1 of the laser removing portion 1G without damaging the normal portion of the periphery, which is required by the present invention. The coating position accuracy does not require the high precision required by the prior art, and the defect of a large grade can still be corrected. When the coating needle 1 is moved upward as shown in Figs. 12(4) and 12(e), the ink layer u is formed in the laser removing portion 10, and the correction of the color filter film 9 is completed. Figs. 13(a) and 13(b) are a series of cross-sectional views showing another operation of applying the ink 5 to the surface of the substrate 7 by using the coating needle 1. In the figures 13(a) and 13(b), the coating needle 丨 and the substrate 7 are relatively moved in the horizontal direction while the flat surface 3 of the tip end of the coating needle is brought into contact with the surface of the substrate 7. This can apply the ink 5 linearly on the surface of the substrate 7.

Figs. 14(a), 14(b) and 15(a) and 15(b) are diagrams showing a comparative example of the embodiment, and are respectively associated with the first (a), the first (b), and the second (a). , 2 (b) Figure comparison chart. In the figures 14(a), 14(b) and 15(a) and 15(b), the distal end portion of the coating needle 15 is provided with a coating needle from the front end to the base end of the coating needle 15. The tapered portion 51 of the cross-sectional area of 15 is gradually increased, and the flat surface 17 is provided at the rigid end of the coating needle 15, but the slit 12 201006560 slit groove 4 such as the coating needle 1 is not formed. By providing the tapered portion 16 and the flat surface I at the distal end portion, if the coating needle 15 is taken out from the ink tank, ink is accumulated in the upper portion of the tapered portion 16 due to the surface tension, and the thin ink layer is covered. Flat surface I? Near it. 16(a) to 16(e) are a series of cross-sectional views showing the action of applying the ink 5 on the surface of the substrate 7 by using the coating needle 15 shown in Figs. 14(a) and 14(b). . Figs. 16(f) to 16(j) are enlarged views of the distal end of the coating needle 15 shown in Figs. 16(a) to 6(e), respectively. First, as shown in Figs. 16(a) and 16(f), the coating needle 15 to which the ink 5 adheres to the distal end portion is perpendicular to the surface of the base & 7, and the distal end of the coating needle 15 is positioned at a predetermined position. position. Next, as shown in Fig. 16 (〇, 16 (magic, 16 (g), 16 (h) ,), the flat surface i7 of the tip end of the coating needle 15 is held in contact with the surface of the substrate 7. Thereby, it is attached to the coating The ink 5 on the flat surface 17 of the leading end of the cloth pin 15 is extruded to the outer ring of the flat surface 17. At this time, even if the contact time of the coating needle 15 with the substrate 7 is extended, the coating needle 15 and the substrate 7 are The amount of the ink 5 flowing out of the contact portion hardly changes because only the ink 5 adhered to the flat surface of the coating #15 is transferred and coated. For example, 16(4), 16(e), 16(1), 16(j) As shown in the figure, if the coating needle 15 is moved upward, the ink layer 18 is formed on the surface of the substrate 7. Since the coating needle 15 is used, the contact holding time of the coating needle 15 and the substrate 7 is extended from the coating needle. The amount of the ink 5 flowing out of the contact portion with the substrate 7 hardly changes, and the ink application as shown in Figs. 12(a) to 12(j) and 13(a) and 13(b) cannot be performed. Fig. 17 is a perspective view showing a configuration in which a part 13 201006560 of the ink application mechanism 21 is omitted, and the ink coater 21 uses the first (a), l (b) to 13 (a), L3(b) shows the figure' a; I I needle 1 to apply the ink 5. In the 17th figure, 'this ink coating mechanism 21 Lefei said d疋 has needle 1 for coating ink and is used for vertical drive coating to Qiubu The application needle of the needle 1 drives a cylinder in the cylinder 22. The needle is applied to the county. The rotating flat valley U, on the rotating platform 25, is arranged in the circumferential direction along the circumferential direction, in:

The rotary table 25 is further provided with a washing device Μ and air cleaning (airpurg (the device 33 is at the center of the rotating platform 25, and the rotation is set upright; 26. In addition, the rotating platform 25 is required to be ancient* r, The Keding mouth sighs a notch portion 27 for passing the coating needle 1 when the ink is applied. In the ink tanks 28 to 31, the appropriate amount is injected into the R (red), G (green), The oil S 5 of each of β (blue) and black. The cleaning 32 is used to remove the ink 5 adhering to the paint 1, and the heart wash is used to blow off the cleaning liquid adhering to the coating needle!

Further, the ink application mechanism 21 is an indexing motor % including an indexing shaft for rotating the rotating shaft 26, and an indexing plate 35 for rotating together with the _ shaft 26 for The indexing sensor 36 that detects the rotational position of the rotating platform 25 via the indexing plate, and the home position return sensing for detecting that the rotational position of the rotating platform 25 is restored to the origin via the indexing plate 35 H 37. The motor 34 is controlled based on the outputs of the sensors 36, 37, and the rotary table 25 is rotated to place any one of the notch portion 27, the ink grooves 28 to 31, the cleaning device 32, and the air cleaning device 33 at the coating needle 1. Below. 14 201006560 Coating needle drive steam rainbow 22 and motor shown). The z-axis platform 蛊你故# ^ 疋 夂 on the ζ axis platform (not β #, 乍 陷 修正 修正 修正 修正 修正 修正 修正 修正 涂 涂 涂 涂 涂 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 The position of the lamp platform below the needle i is not fixed. The following is the description of the action of the ink coating mechanism 藤, 藤叙 YVT, bait. First, the XY platform and the χ platform are driven, and the coating is applied. — The end of u ic w is positioned at a predetermined position above the defect of the color substrate. Next, take Ma Yuan

34. Rotate and rotate the flat table 25, and the gland cake is moved from the 丄~ 们 沾 25 to move the desired ink tank (for example, 28) to the lower side, and the ink 5 is attached to the front end portion of the coating needle 1. Next, the rotating platform 25 is rotated by the motor 34 to bring the notch portion _ to the lower side of the coating needle 1. Next, the coating needle i is driven up and down by using a coating needle to apply the coating needle i up and down, and the ink stone adhering to the tip end portion of the coating needle is applied to the defective portion of the color filter substrate. After washing the coating needle 1 _, the motor 34 rotates the rotary table 25 to move the cleaning device 32 to the coating needle! Below. Next, the coating needle is driven up and down using the applicator needle driving > flying cylinder 22, and the ink 5 adhering to the coating needle} is washed. Next, the motor 34 is rotated to rotate the table 25 to move the air washing device 33 below the coating needle i. Next, the coating needle drive cylinder 22 is used to drive the coating needle i up and down, and the cleaning liquid adhering to the coating needle 2 is blown. Fig. 18 is a view showing the entire defect correction device equipped with the ink application mechanism 21 shown in Fig. 17. In Fig. 18, the defect correction device is roughly classified by the following mechanism: a defect correction head which is composed of the observation optical system 40, the CCD camera 41, the laser 42, and the ink coating 15 201006560. 21 and an ink curing illumination 43; the z-axis stage 44 moves the defect correction head in a vertical direction (z-axis direction) with respect to the substrate 7; the X-axis stage 45' is used to mount the Z-axis stage 44 Moving in the X-axis direction; the Y-axis stage 46 for mounting the substrate 7 to move in the γ-axis direction; the control computer 47 for controlling the operation of the entire device; and the operation panel 48 for inputting commands from the operator to the control Use computer 4?. The observation optical system 40 is a state for observing the surface state of the substrate 7 or applying ink by the ink application mechanism 21. The image observed by the observation optical system 4 is converted into an electric signal by the CCD camera 41, and is displayed on the monitor screen of the control computer 47. The ink hardening illumination 43 is a light that is irradiated to cure the ink 5 applied by the ink application mechanism 21. In the case where the ink 5 is an ultraviolet curing type, the device is provided with ultraviolet ray illumination as the ink curing illumination 43. In the case where the ink 5 is a thermosetting type, the device is equipped with a device illumination as the ink curing illumination 43. The laser 42 is used to remove black defects or foreign matter defects. The white defect 'black defect, foreign matter defect occurring in the color filter can be corrected by the configuration of the device. In the present embodiment, when the flat surface 3 of the tip end of the coating needle 1 is brought into contact with the surface of the substrate 7 as the ink accumulated in the slit groove 4 at the tip end portion of the coating needle 1, the ink flows out from the contact portion due to the capillary phenomenon. Therefore, the ink 5 & true can be applied to the laser removing portion 1 without the problem that the ink layer of the prior art is heavy to the normal portion, and the defect of a large grade can be corrected. In addition, since the amount of ink flowing out of the contact portion is increased corresponding to the contact time of the coating needle 1 and the substrate 7, it is not necessary to perform a plurality of coatings as in the prior art, and the time required for the correction is shortened. Further, when the coating ink 5 is filled in the laser removing portion, the filled oil 5 is sucked to the corner portions of the four sides of the color filter film 9 subjected to the laser removal due to the capillary phenomenon. Since it is widely distributed and filled in the entire laser removing portion 1G, the ink application position using the coating needle can be in the vicinity of the approximate center of the laser removing portion 10, and it is not necessary.

The positioning of the coating position with high precision as in the prior art is performed, and the entire apparatus can be produced inexpensively. Further, the coating needle is brought into contact with the substrate 7 to slide on the substrate 7 to apply oil in a linear form! In the case of 5, it is also possible to apply a coating which is longer than the conventional technique. In addition, since it is possible to apply a long distance, even in the case of correcting a large pixel, it can be corrected in a single sliding coating. The time required for the correction can be shortened. In addition, since the correction can be performed in a single sliding coating, which is different from the case of repeating the plurality of coatings, and the ink 5 is less in the middle of drying, the fluidity of the applied ink 5 is ensured and can be applied. The cloth--film can also improve the correction grade. The present invention has been described above with reference to the full scope of the preferred embodiments, and the scope of the present invention is not limited to the above description, and is not limited by the scope of the patent application. All changes within the scope and scope of the patent are subject to change. [Brief Description of the Drawings] Figs. 1(a) and 1(b) are views showing a configuration of a distal end portion of a coating needle according to an embodiment of the present invention. 17 201006560 The second (a) and (b) are views showing a state in which the ink adheres to the tip end portion of the thin needle shown in Fig. 1 . The third (a) and (b) drawings are diagrams showing a variation of the embodiment. Figs. 4(a) and 4(b) are diagrams showing a state in which the ink adheres to the tip end portion of the coating needle shown in Fig. 3. Figs. 5(a) and 5(b) are diagrams showing another modification of the embodiment. Figs. 6(a) and 6(b) are diagrams showing a state in which the ink adheres to the tip end portion of the coating needle shown in the fifth turn. Fig. 7 (a) and (b) are diagrams showing another modification of the embodiment. Figs. 8(a) and 8(b) are views showing a state in which the ink adheres to the tip end portion of the coating needle shown in Fig. 7. Figures 9(a) and (b) are diagrams showing another variation of the embodiment. The figure is a diagram showing a state in which the ink adheres to the tip end portion of the Tuwei needle shown in Fig. 9. Figs. 11(a) to 9(j) are diagrams showing an ink application method using the coating needle described in Figs. 1 to 1(). Figures 12(a) to (e) are other diagrams showing the ink application method of the coating needle described using the pH chart. Fig. 13(a)'(b) is another drawing showing the ink application method of the coating needle described using Fig. 1 . Figs. 14(a) and (b) are diagrams showing a comparative example of the embodiment. 201006560 The 15th (a) and (b) are diagrams in which the sea _ π shows no ink adhered to the tip end portion of the coating needle shown in Fig. 14 . Figs. 16(a) to 6(j) are diagrams showing the ink application method of the coating needle described in Fig. 15 . Fig. 17 is a view showing the configuration of an ink application mechanism using a coating needle described in the drawings of Figs. Fig. 18 is a view showing the overall configuration of a defect correction device having an ink application mechanism shown in Fig. 1r? Figures 19(a) and (b) are diagrams showing the problem points of the color filter. 20(a) to (c) are diagrams showing defects occurring in a color filter. Fig. 21 is a diagram showing a problem of a conventional ink application method. [Description of main component symbols] Bu coating needle 2 to tapered portion 3 to flat surface 4 to slit groove 5 to ink 6 to through hole 7 to substrate 8 to ink layer 9 to color filter film 1 0 to laser Removal portion 11 to ink layer 15 5 to coating needle 16 to tapered portion 17 to flat surface 18 to ink layer 21 to ink application mechanism 22 to coating needle driving cylinder 2 to driving shaft 24 to fixing member 2 5 ~ Rotating platform 19 201006560 26~Rotary shaft 28~Ink tank 30~Ink tank 32~Washing device 34~Motor 3 6 ~Sensor 40~Viewing optical system 42~Laser 44~Z-axis platform 46~Y-axis platform 48 〜 operation panel 51 to R pixel 53 to B pixel 5 5 to black defect 57 to overlap portion 27 to notch portion 29 to ink tank 31 to ink tank 33 to air cleaning device 3 5 to indexing plate 37 to sense 41~ CCD camera 43~ Ink curing illumination 45~X axis platform 47~Control computer 5 0~Black matrix 52~ G pixel 54~White defect 56~ Foreign object defect

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Claims (1)

201006560 VII. Patent application scope: 1. A coating needle, which is suitable for attaching a liquid material to a front end portion thereof, and then coating the liquid material with the crucible end contacting the substrate, wherein the liquid material is formed at the front end portion. a tapered portion which is tapered toward the front end. A flat surface is formed at the front end; a liquid material supply portion for storing the liquid material and supplying the liquid material to the front end is formed; and φ The liquid material supply portion includes one or two or more slit grooves formed to pass from the flat surface to an upper portion of the tapered portion, and divide the tapered portion into a plurality of portions. 2. The coating needle according to claim 1, wherein the liquid material supply portion further includes a through hole penetrating the coating needle in a radial direction in an upper portion of the tapered portion; The slit groove is formed to pass from the flat surface to the through hole. 3. The coating needle according to claim 1, wherein the interval between the side walls of the slit groove is the same from the front end to the upper jaw of the miscellaneous portion Or gradually widen toward the top. A coating mechanism, comprising: the coating needle according to any one of claims 1 to 3; and a driving tool for attaching the liquid material to a front end portion of the coating needle And coating the liquid material with the front end of the coating needle contacting the substrate. 5. A defect correction device, comprising: a coating mechanism according to claim 4; 21 201006560 an observation optical mechanism for observing the substrate; and a laser irradiation mechanism for removing the substrate a defect portion; an ink hardening mechanism for hardening the liquid material coated by the coating mechanism; and a positioning mechanism to make the coating mechanism, the observation optical mechanism, the laser irradiation mechanism, and the ink hardening mechanism Relative movement in the vertical and horizontal directions with respect to the substrate. 6. A coating method, characterized in that a liquid material is attached to a front end portion of a coating needle according to any one of claims 1 to 3, and the coating needle and the substrate are held while being held The liquid material is applied by vertically contacting the front end of the coating needle with the substrate. 7. The coating method according to claim 6, wherein the coating amount of the liquid material is adjusted by a time when the tip end of the coating needle contacts the substrate. 8. The coating method according to claim 6, wherein the coating needle is linearly coated by moving the coating needle relative to the substrate while the leading end of the coating needle is in contact with the substrate. The liquid material is clothed. ® 22