JP4749159B2 - Coating device and substrate position adjusting method in coating device - Google Patents

Description

  The present invention relates to a coating apparatus that applies a flowable material to a substrate, and a substrate position adjusting method in the coating apparatus.

  2. Description of the Related Art Conventionally, an organic EL display device using an organic EL (Electro Luminescence) material has been developed. For example, in the production of an active matrix drive type organic EL display device using a polymer organic EL material, a glass substrate is used. (Hereinafter simply referred to as “substrate”), formation of TFT (Thin Film Transistor) circuits, formation of ITO (Indium Tin Oxide) electrodes as anodes, formation of barrier ribs, fluid materials including hole transport materials (Hereinafter referred to as “hole transport liquid”), formation of a hole transport layer by heat treatment, flowable material containing an organic EL material (hereinafter referred to as “organic EL liquid”), heat treatment The organic EL layer, the cathode, and the insulating film are sequentially sealed.

  In manufacturing an organic EL display device, as one of devices for applying a hole transport liquid or an organic EL liquid to a substrate, as shown in Patent Document 1, a plurality of nozzles that continuously discharge a fluid material are provided on a substrate. On the other hand, there is known an apparatus for applying a fluid material in stripes to grooves between partition walls formed in an application region on a substrate by relatively moving in the main scanning direction and the sub-scanning direction.

In the apparatus of Patent Document 1, an alignment mark formed on a substrate is picked up by two alignment mark detectors, and the position of the substrate is determined based on image data of the alignment mark and layout data such as grooves on the substrate. The position is adjusted and the substrate is positioned at the application start position. Further, in Patent Document 2, a coating material (that is, a line of the coated fluid material) is imaged by applying a flowable material to a test coating mask, and an image of the coating track is recorded on a groove on the substrate. A technique for adjusting the relative positional relationship between the substrate and the nozzle by moving the substrate so that the application locus and the groove overlap with each other after comparison with the image is disclosed.
JP 2002-75640 A JP 2004-74050 A

  By the way, there are various types of flowable materials applied to the substrate in such an apparatus, and when the position of the substrate is adjusted by imaging the flowable material that has been trial-coated as in Patent Document 2, the application is started from the application. If the elapsed time until imaging is inadequate, the line of fluid material applied on the substrate dries out or its shape collapses, making it difficult to recognize the line in image processing, There is a possibility that the center line (that is, a line parallel to the trajectory of the nozzle) cannot be accurately obtained. As a result, it becomes difficult to improve the detection accuracy in detecting the positional relationship between the locus of the nozzle and the imaging unit, or it is difficult to obtain the positional relationship itself, and the relative position of the substrate to the nozzle can be adjusted with high accuracy. It becomes impossible to do.

  The present invention has been made in view of the above problems, and easily and highly accurately obtains the positional relationship between the trajectory of the nozzle in the main scanning direction and the two imaging units, and thereby the relative position of the substrate to the nozzle. The purpose of this is to perform adjustment with high accuracy.

  The invention according to claim 1 is a coating apparatus for applying a fluid material to a substrate, a substrate holding portion for holding the substrate, a nozzle for continuously discharging the fluid material toward the substrate, A main scanning mechanism that relatively moves the nozzle in a main scanning direction parallel to the main surface of the substrate, and the substrate is moved in the main scanning direction with respect to the nozzle each time the nozzle moves A sub-scanning mechanism that moves relatively in a sub-scanning direction perpendicular to the substrate, a substrate rotation mechanism that rotates the substrate holder around a rotation axis that is perpendicular to the main surface, and the main scan above the substrate holder. A first imaging unit and a second imaging unit that are arranged substantially parallel to a direction and that respectively capture the first imaging region and the second imaging region on the substrate held by the substrate holding unit; and the first imaging unit and By controlling the second imaging unit When a predetermined imaging delay time elapses after a portion of the fluid material line applied on the position adjustment substrate included in the first imaging region is applied to the first imaging region. At the time when the imaging delay time has elapsed after application of the flowable material to the second imaging region, the part included in the second imaging region of the line An imaging control unit that captures images and stores them as a second image, and a shift amount in the sub-scanning direction between the first imaging unit and the second imaging unit based on the first image and the second image A deviation amount calculation unit, an image of a substrate held by the substrate holding unit acquired by the first imaging unit and the second imaging unit, and the deviation amount obtained by the deviation amount calculation unit Based on said sub-scanner And and a substrate position adjusting unit for adjusting the relative position with respect to the nozzle of the substrate by controlling the rotation mechanism.

  Invention of Claim 2 is a coating device of Claim 1, Comprising: The imaging part moving mechanism which moves the said 2nd imaging part relatively to the said subscanning direction with respect to the said 1st imaging part In addition, when the substrate position is adjusted by the substrate position adjustment unit, the image pickup unit moving mechanism is controlled by the substrate position adjustment unit based on the deviation amount obtained by the deviation amount calculation unit, and the second imaging unit Is moved relative to the first imaging unit in the sub-scanning direction, so that the relative positions of the first imaging unit and the second imaging unit with respect to the nozzle are equal to each other in the sub-scanning direction. .

  A third aspect of the present invention is the coating apparatus according to the first or second aspect, wherein the imaging control unit is configured to control the first imaging region and the second imaging device based on a position of the nozzle in the main scanning direction. Detecting application of the fluid material to each of the imaging regions, and imaging instructions to each of the first imaging unit and the second imaging unit after the imaging delay time has elapsed since the detection of the application of the fluid material give.

  A fourth aspect of the present invention is the coating apparatus according to any one of the first to third aspects, wherein the nozzle starts moving on one side of the substrate in the main scanning direction, the first imaging unit, The distance in the main scanning direction is equal to the distance in the main scanning direction between the movement start position of the nozzle on the other side of the substrate and the second imaging unit.

  A fifth aspect of the present invention is the coating apparatus according to any one of the first to fourth aspects, wherein the nozzle is moved on the first imaging region and the second in the relative movement of the nozzle by the main scanning mechanism. The nozzle moves at a constant speed on the imaging region.

  A sixth aspect of the present invention is the coating apparatus according to any one of the first to fifth aspects, wherein the database is a set of data elements in which the key information including the type of the flowable material is associated with the imaging delay time. Is further stored in the database storage unit, and the imaging control unit extracts the imaging delay time associated with the key information including the type of the flowable material applied to the substrate from the database, and sets the imaging delay time as the imaging delay time. Based on this, the first image and the second image are acquired.

  A seventh aspect of the present invention is the coating apparatus according to the sixth aspect, further comprising a database update unit for adding a new data element to the database.

  The invention according to claim 8 is the coating apparatus according to any one of claims 1 to 7, wherein the flowable material is continuously discharged toward the substrate and the nozzle and the substrate together with the nozzle. Another nozzle that moves relatively in the main scanning direction and the sub-scanning direction is further provided.

  The invention described in claim 9 is the coating apparatus according to any one of claims 1 to 8, wherein the fluid material includes a pixel forming material for a flat display device.

  A tenth aspect of the present invention is the coating apparatus according to the ninth aspect, wherein the pixel forming material is an organic EL material or a hole transport material for an organic EL display device.

  The invention according to claim 11 is a coating apparatus for applying a fluid material to a substrate, a substrate holding unit for holding the substrate, a nozzle for continuously discharging the fluid material toward the substrate, and A main scanning mechanism that relatively moves the nozzle in a main scanning direction parallel to the main surface of the substrate, and the substrate is moved in the main scanning direction with respect to the nozzle each time the nozzle is moved in the main scanning direction. A sub-scanning mechanism that moves relatively in a sub-scanning direction perpendicular to the substrate, a substrate rotation mechanism that rotates the substrate holder around a rotation axis that is perpendicular to the main surface, and the main scan above the substrate holder. A first imaging unit and a second imaging unit, which are arranged substantially parallel to a direction and image the first imaging region and the second imaging region on the substrate held by the substrate holding unit, respectively, and the second imaging unit. The sub-scanning direction with respect to the first imaging unit The first imaging area and the second imaging area were coated on the position adjustment substrate by controlling the imaging section moving mechanism that moves relatively, the first imaging section, and the second imaging section. An imaging control unit that acquires a first image and a second image of a line of fluid material, and the sub-between the first imaging unit and the second imaging unit based on the first image and the second image A shift amount in the scanning direction is obtained, and the second image pickup unit is moved relative to the first image pickup unit by controlling the image pickup unit moving mechanism based on the shift amount. The first image pickup unit and the second image pickup unit are held by the image pickup position adjustment unit that makes the relative positions of the nozzles equal to each other, and the substrate holding unit acquired by the first image pickup unit and the second image pickup unit. Printed circuit board And a substrate position adjusting unit for adjusting the relative position with respect to the nozzle of the substrate by controlling the scanning mechanism and the rotating mechanism based on.

The invention according to claim 12, a substrate for said product by relatively moving the nozzle relative to the substrate for said product continuously while ejecting flowable material toward the substrate for the product from the nozzle A position adjusting method for adjusting a relative position of the product substrate with respect to the nozzle in an application apparatus for applying the flowable material, wherein a) the flowable material is continuously discharged toward the position adjusting substrate. Applying a line of the flowable material by moving a nozzle relative to the position adjusting substrate in a main scanning direction parallel to a main surface of the position adjusting substrate; b) a first of the lines Imaging a part included in the first imaging region of the imaging unit at a time when a predetermined imaging delay time has elapsed after application of the fluid material to the first imaging region, and storing as a first image; C) said lie A part included in the second imaging region of the second imaging unit is imaged at the time when the imaging delay time has elapsed after application of the flowable material to the second imaging region, and is stored as a second image. And d) obtaining a shift amount in the sub-scanning direction perpendicular to the main scanning direction between the first imaging unit and the second imaging unit based on the first image and the second image; e) a step of imaging a product substrate by the first imaging unit and the second imaging unit; f) the shift amount; and the product acquired by the first imaging unit and the second imaging unit . The product substrate is moved relative to the nozzle in the sub-scanning direction based on the image of the substrate, and the product substrate is rotated about a rotation axis perpendicular to the main surface of the product substrate. by, said of the substrate for the product Roh And a step of adjusting the relative position with respect to le.

  The invention according to claim 13 is the position adjustment method according to claim 12, wherein the step f) includes the step of f1) moving the second imaging unit relative to the first imaging unit based on the shift amount. A step of making the relative positions of the first imaging unit and the second imaging unit with respect to the nozzles equal to each other in the sub-scanning direction by relatively moving in the sub-scanning direction;

  The invention according to claim 14 is the position adjustment method according to claim 13, wherein the step d) includes: d1) outputting the first image and the second image to a monitor; d2) the step A step of obtaining respective distances between the line in the first image and the line in the second image and a reference line on the monitor, and obtained in the step d2) in the step f1). By moving the first imaging unit and the second imaging unit in the sub-scanning direction based on the respective distances, the line in the first image, the line in the second image, and the monitor The reference line above is overlaid.

  A fifteenth aspect of the present invention is the position adjustment method according to any one of the twelfth to fourteenth aspects, wherein in the step a), the relative movement of the nozzles causes the first imaging region and the position to be adjusted. The nozzle moves at a constant speed on the second imaging region.

  A sixteenth aspect of the present invention is the position adjusting method according to any one of the twelfth to fifteenth aspects, wherein the fluid material includes a pixel forming material for a flat display device.

  The invention according to claim 17 is the position adjusting method according to claim 16, wherein the pixel forming material is an organic EL material or a hole transport material for an organic EL display device.

  In the present invention, the positional relationship between the trajectory of the nozzle in the main scanning direction and the first imaging unit and the second imaging unit is obtained easily and with high accuracy, thereby adjusting the relative position of the substrate with respect to the nozzle with high accuracy. Can be done. According to the second, eleventh and thirteenth aspects of the present invention, it is possible to simplify the calculation of the movement amount of the substrate when adjusting the position of the substrate. In the invention of claim 6, the imaging delay time can be appropriately set according to the type of the fluid material.

  FIG. 1 is a plan view showing a configuration of a coating apparatus 1 according to an embodiment of the present invention, and FIG. 2 is a front view of the coating apparatus 1. The coating apparatus 1 is an apparatus that applies a fluid material containing a pixel forming material to a glass substrate (hereinafter simply referred to as “substrate”) 9 for a flat display device. In the present embodiment, in the coating apparatus 1, a fluid material containing an organic EL material (hereinafter referred to as “organic EL liquid”) is provided on a substrate 9 for an organic EL (Electro Luminescence) display device of an active matrix driving system. Applied.

  As shown in FIG. 2, the coating apparatus 1 includes a substrate holding unit 11 that holds the substrate 9 and a substrate 9 that is centered on a rotation axis that faces a direction perpendicular to the main surface of the substrate 9 (that is, the Z direction). A substrate rotating mechanism 13 that rotates together with the holding unit 11 is provided. The substrate holding unit 11 includes a heating mechanism (not shown) using a heater. As shown in FIGS. 1 and 2, the coating apparatus 1 also has a predetermined direction parallel to the main surface of the substrate 9 (that is, the Y direction in FIG. 1, hereinafter referred to as “sub-scanning direction”). )), A substrate moving mechanism 12 that horizontally moves the substrate 9 together with the substrate holding unit 11, and a coating mechanism that continuously discharges the organic EL liquid from the three nozzles 17 toward the substrate 9 on the substrate holding unit 11. The head 14 and the coating head 14 are horizontally moved in a direction parallel to the main surface of the substrate 9 and perpendicular to the sub-scanning direction (that is, the X direction in FIG. 1 and hereinafter referred to as “main scanning direction”). The head moving mechanism 15 that is provided on both sides of the substrate holding unit 11 in the main scanning direction, receives two organic EL liquids from the coating head 14, and the same type of organic EL liquid in the nozzles 17 of the coating head 14. Fluid material supply Parts 18 and, includes a control unit 2 for controlling these constituent (shown only in FIG. 1).

  In the coating head 14, the three nozzles 17 are arranged substantially linearly with respect to the X direction (ie, the main scanning direction) in FIG. 1 and in the Y direction (ie, the sub scanning direction) in FIG. 1. The organic EL liquid that is disposed slightly shifted and is ejected from these nozzles 17 is applied to the grooves between the partition walls 92 extending in the main scanning direction and formed in advance in the application region 91 of the substrate 9 shown in FIG. The In the present embodiment, the distance in the sub-scanning direction between the two adjacent nozzles 17 is equal to three times the pitch between the partition walls 92 (hereinafter referred to as “partition wall pitch”). As shown in FIG. 3, two cross-shaped position adjustment marks (so-called alignment marks) 93 used for position adjustment of the substrate 9 to be described later are formed outside the application region 91 of the substrate 9. . The position adjustment mark 93 is formed in the same process as the partition wall 92, and a virtual straight line (indicated by a two-dot chain line in FIG. 3) 931 connecting the centers of the two position adjustment marks 93 is formed. And parallel to the groove between the partition walls 92.

  The coating apparatus 1 is further arranged above the substrate 9 and the substrate holding unit 11 so as to be substantially parallel to the main scanning direction and to image a predetermined imaging region on the substrate, respectively. And a first image pickup unit moving mechanism 193 and a second image pickup unit moving mechanism 194 that move the first image pickup unit 191 and the second image pickup unit 192 independently of each other in the sub-scanning direction. 2 is controlled. In the following description, an imaging area by the first imaging unit 191 is referred to as a “first imaging area”, and an imaging area by the second imaging unit 192 is referred to as a “second imaging area”. In the coating apparatus 1, the first imaging unit moving mechanism 193 serves as a moving mechanism that moves the second imaging unit 192 relative to the first imaging unit 191 in the sub-scanning direction (the second imaging unit moving mechanism 194 also). The same).

  In the coating apparatus 1, the standby position of the coating head 14 on the (−X) side of the substrate 9 and the substrate holder 11 (that is, the position indicated by the solid line in FIGS. 1 and 2), the coating head 14 is (+ X). The distance in the main scanning direction between the first imaging unit 191 and the first imaging unit 191 is the standby position of the coating head 14 on the (+ X) side of the substrate 9 and the substrate holding unit 11 (that is, 1 and FIG. 2, the position indicated by the two-dot chain line, and the main scanning direction between the second imaging unit 192 and the movement start position when the coating head 14 moves in the (−X) direction. The first imaging unit 191 and the second imaging unit 192 are arranged so as to be equal to the distance.

  In the coating apparatus 1, before the organic EL liquid is applied to the substrate 9, first, the line of the organic EL liquid applied to the substrate prepared for position adjustment (hereinafter referred to as “position adjustment substrate”). Are imaged by the first imaging unit 191 and the second imaging unit 192, and the positions of the first imaging unit 191 and the second imaging unit 192 are adjusted based on the acquired image. A detailed flow of position adjustment and the like will be described later.

  By the way, there are various types of fluid materials such as organic EL liquids, and in order to recognize the lines with high accuracy in the image processing of the fluid material lines applied on the substrate, from the application of the fluid material. It is necessary to make the elapsed time until imaging (hereinafter referred to as “imaging delay time”) appropriate for the type of flowable material. FIG. 4 is a diagram illustrating a database 30 that is a set of data elements 301 in which key information including the type of fluid material and imaging delay time are associated. The coating apparatus 1 illustrated in FIG. 1 stores the database 30. The database storage unit 31 and the database update unit 32 that adds a new data element 301 to the database 30 are further provided.

  When the position adjustment of the first imaging unit 191 and the second imaging unit 192 is completed, the product substrate 9 is carried into the coating apparatus 1 and the position adjustment with respect to the coating head 14 is performed. Subsequently, each time the coating head 14 moves in the main scanning direction while discharging the organic EL liquid continuously by the head moving mechanism 15, and the movement of the coating head 14 in the main scanning direction is performed once, the substrate moving mechanism 12, the substrate 9 is stepped in the sub-scanning direction. Then, the relative movement of the nozzle 17 relative to the substrate 9 in the main scanning direction and the sub-scanning direction is repeated, so that the organic EL liquid is applied to the substrate 9 in a stripe shape. In the coating apparatus 1, the head moving mechanism 15 and the substrate moving mechanism 12 serve as a main scanning mechanism and a sub scanning mechanism that move the three nozzles 17 relative to the substrate 9 in the main scanning direction and the sub scanning direction.

  Normally, in the coating apparatus 1, the organic EL liquid is sequentially applied to the plurality of substrates 9, but the position adjustment of the first imaging unit 191 and the second imaging unit 192 must be performed before applying to each substrate 9. It ’s not. After the position adjustment of the image pickup unit is performed before application to the first substrate 9, the position of the image pickup unit is shifted due to vibration of the application device 1 or the maintenance of the application device 1 or the like. To be done.

  Next, the flow of position adjustment of the first imaging unit 191 and the second imaging unit 192 in the coating apparatus 1 will be described, and then the flow of position adjustment of the substrate 9 and application of the organic EL liquid will be described. FIG. A and FIG. B is a diagram illustrating a flow of position adjustment of the first imaging unit 191 and the second imaging unit 192. FIG. FIG. A and FIG. As shown in B, when the position adjustment of both imaging units is performed, first, the position adjustment substrate is carried into the coating apparatus 1 and is placed and held on the substrate holding unit 11 (step S11). In the position adjusting substrate, unlike the product substrate 9, no partition wall is formed in the application region.

  When the substrate for position adjustment is held, the flowable material supply unit 18 is controlled by the control unit 2, and in advance from the nozzle 17 in the coating head 14 positioned at the standby position indicated by the solid line in FIGS. 1 and 2. The discharge of the organic EL liquid is started (step S12). Then, the head moving mechanism 15 is controlled by the control unit 2, and the movement of the coating head 14 in the main scanning direction is started (step S13). In the coating apparatus 1, the nozzle 17 that continuously discharges the organic EL liquid toward the position adjustment substrate moves in the main scanning direction, whereby the lines of the organic EL liquid are striped on the main surface of the position adjustment substrate. Applied. In the coating apparatus 1, the first imaging unit moving mechanism 193 and the second imaging unit moving mechanism 194 are used in advance so that the nozzle 17 passes above the first imaging region and the second imaging region on the position adjustment substrate. The positions of the first imaging unit 191 and the second imaging unit 192 in the sub-scanning direction are roughly adjusted. The first image pickup unit moving mechanism 193 and the second image pickup unit moving mechanism 194 include a pulse motor as a drive source, and the control unit 2 indicates the number of pulses from the origin position of the pulse motor when rough position adjustment is performed. By memorizing, it is possible to easily perform rough position adjustment of both imaging units for the second and subsequent times.

  FIG. 6 is a diagram illustrating a moving speed when the coating head 14 moves in the main scanning direction. The horizontal axis in FIG. 6 indicates the position of the coating head 14 in the main scanning direction. Further, circles 101 and 102 in FIG. 6 indicate positions corresponding to the first imaging region and the second imaging region in the main scanning direction, respectively. As shown in FIG. 6, when the nozzle 17 is moved by the head moving mechanism 15, the nozzle 17 moves at a constant speed on the first imaging region and the second imaging region.

  In the coating apparatus 1, position information in the main scanning direction of the coating head 14 (that is, the nozzle 17) continues from the encoder (not shown) of the head moving mechanism 15 to the imaging control unit 21 (see FIG. 1) of the control unit 2. When the position information becomes equal to the value corresponding to the first imaging area, the imaging control unit 21 detects that the coating head 14 has passed above the first imaging area. In other words, the application of the organic EL liquid to the first imaging region is detected by the imaging control unit 21 based on the position of the nozzle 17 in the main scanning direction (step S14). Subsequently, when the position information of the coating head 14 becomes equal to the value corresponding to the second imaging area, the imaging control unit 21 applies the organic EL liquid to the first imaging area. Detection is performed in the same manner as in the application of the organic EL liquid (step S15).

  When the coating head 14 moves to the standby position indicated by the two-dot chain line in FIGS. 1 and 2, the movement of the coating head 14 in the main scanning direction is stopped (step S16), and the organic EL liquid from the nozzle 17 is stopped. Is stopped (step S17). In the present embodiment, the organic EL liquid is applied by starting the movement of the coating head 14 from the standby position on the (−X) side of the substrate holding unit 11 and moving in the (+ X) direction. The organic EL liquid may be applied by moving the coating head 14 in the (−X) direction from the standby position on the (+ X) side of the substrate holding unit 11.

  In the present embodiment, the position information of the nozzle 17 is obtained with the standby position of the coating head 14 on the (−X) side of the substrate holding unit 11 as the origin and the (+ X) side as positive. Thus, by obtaining the coordinates in the main scanning direction of the nozzle 17 with the main body of the coating apparatus 1 as a reference, and detecting the application of the organic EL liquid to the first imaging region and the second imaging region based on the coordinates, Even if the coating head 14 starts moving from either the (+ X) side or (−X) side standby position of the substrate holding unit 11 (that is, the nozzle 17 is in the (+ X) direction or (−X) direction). In any case, the application of the organic EL liquid to both imaging regions can be easily detected.

  Further, the position information of the nozzle 17 may be obtained by setting the movement direction of the coating head 14 as positive with the origin at the side where the movement of the coating head 14 is started out of both standby positions. In this case, the movement distance of the nozzle 17 from the standby position on the side where movement starts is obtained as position information. In the coating apparatus 1, the distance between the standby position on the (−X) side of the substrate holding unit 11 and the first imaging unit 191 is such that the standby position on the (+ X) side of the substrate holding unit 11 and the second imaging unit 192. Therefore, by detecting the application of the organic EL liquid based on the movement distance of the nozzle 17 from the standby position, even if the movement starts from either of the standby positions, Application of the organic EL liquid to both imaging regions can be easily detected at the same timing after the start of movement.

  In the coating apparatus 1, the imaging delay time associated with the key information including the type of fluid material applied to the substrate (in this embodiment, the type of organic EL liquid) is applied to the database 30 (see FIG. 4), and the imaging control unit 21 issues an imaging instruction to the first imaging unit 191 after the imaging delay time has elapsed since the detection of the application of the organic EL liquid to the first imaging region. Given. As described above, the first imaging unit 191 is controlled by the imaging control unit 21 when the imaging delay time has elapsed since the application of the organic EL liquid to the first imaging region, and the three coated on the position adjustment substrate. Of the organic EL liquid lines, a part included in the first imaging region of one line is imaged and stored in the imaging control unit 21 as a first image (step S18). FIG. 7 is a diagram showing the first image 81. In FIG. 7, a part (hereinafter referred to as “first part”) 71 included in the first imaging region of the line of the organic EL liquid is shown with parallel oblique lines.

  Subsequently, an imaging instruction is given to the second imaging unit 192 by the imaging control unit 21 after the imaging delay time has elapsed from the detection of the application of the organic EL liquid to the second imaging region (in other words, the organic EL liquid The imaging controller 21 controls the second imaging unit 192 when the imaging delay time has elapsed after application to the second imaging region), and the three organic EL liquid lines applied on the position adjustment substrate Among these, a part included in the second imaging area of the line imaged by the first imaging unit 191 is imaged and stored as a second image in the imaging control unit 21 (step S19).

  In the coating apparatus 1, when the imaging delay time is relatively short as compared with the time required for one movement of the coating head 14 in the main scanning direction, imaging by the first imaging unit 191 and the second imaging unit 192 (steps). S18 and S19) are performed before stopping the movement of the coating head 14 and stopping discharging the organic EL liquid (steps S16 and S17). Depending on the imaging delay time, the imaging by the first imaging unit 191 (step S18) is performed before the stop of the movement of the coating head 14 and the discharge of the organic EL liquid (steps S16 and S17), and the second imaging. The imaging by the unit 192 (step S19) may be performed after the movement of the coating head 14 is stopped and the discharge of the organic EL liquid is stopped (steps S16 and S17).

  When the first image and the second image are acquired based on the imaging delay time extracted from the database 30, both images are output to the monitor 20 (step S20). FIG. A is a diagram showing a first image 81 and a second image 82 output to the monitor 20. FIG. As shown in A, on the monitor 20, the first image 81 and the second image 82 are displayed side by side in the main scanning direction (that is, the X direction), and a reference line 201 extending in the X direction common to both images is displayed. Yes. FIG. In A, the organic EL liquid line (that is, a part included in the second imaging region of the organic EL liquid line, hereinafter referred to as “second part”) 72 of the second image 82 is included in the first 72. Similar to the part 71, it is shown with parallel oblique lines. Further, the reference line 201 is indicated by a one-dot chain line.

  When the first image 81 and the second image 82 are output to the monitor 20, image processing (for example, differential processing) is performed on the first image 81 by the deviation amount calculation unit 22 (see FIG. 1) of the control unit 2. The position where the pixel value changes in the Y direction (that is, the sub-scanning direction) is captured as the edges 711 on both sides of the first portion 71. Subsequently, an average value in the X direction of the coordinate values in the Y direction of each edge 711 is obtained, and a value obtained by further averaging the average values of both edges 711 is Y of the center line 712 extending in the X direction of the first portion 71. It is obtained as the coordinate value of the direction. Similarly, image processing is also performed on the second image 82, the edges 721 on both sides in the Y direction of the second part 72 are recognized, and the coordinate value in the Y direction of the center line 722 of the second part 72 is obtained. .

  Subsequently, based on the coordinate values in the Y direction of both center lines, the center line 712 of the first part 71 and the center line 722 of the second part 72 and the reference line 201 on the monitor 20 respectively. The distance (hereinafter referred to as “first distance” and “second distance”) is obtained by the deviation amount calculation unit 22. Further, a deviation amount (hereinafter referred to as “imaging part deviation amount”) between the first imaging unit 191 and the second imaging unit 192 in the sub-scanning direction (that is, the Y direction) is the first image and the second image. Is calculated as the sum of the first distance and the second distance (step S21).

  When the first distance and the second distance are obtained, the first imaging unit moving mechanism 193 and the second imaging unit moving mechanism 194 are controlled by the substrate position adjusting unit 23 (see FIG. 1) of the control unit 2, thereby Position adjustment in the sub-scanning direction of the first imaging unit 191 and the second imaging unit 192 is performed. Specifically, the first imaging unit moving mechanism 193 moves the first imaging unit 191 in the sub-scanning direction based on the first distance, and FIG. As shown in B, the first portion 71 in the first image 81 and the reference line 201 on the monitor 20 are overlapped, and the second imaging unit 192 moves in the sub-scanning direction based on the second distance. The second portion 72 in the two images 82 and the reference line 201 on the monitor 20 are overlapped (step S22). In other words, by moving the second imaging unit 192 relative to the first imaging unit 191 based on the imaging unit deviation amount, the organic EL liquid applied on the position adjustment substrate in the sub-scanning direction. The relative positions of the first imaging unit 191 and the second imaging unit 192 with respect to the line (that is, the relative positions of the two imaging units with respect to the nozzle 17) are made equal to each other. When the position adjustment of the first image pickup unit 191 and the second image pickup unit 192 is completed, the position adjustment substrate is unloaded from the coating apparatus 1 (step S23). Further, the coating head 14 is returned to the standby position indicated by the solid line in FIGS.

  Next, the flow of position adjustment of the product substrate 9 will be described. FIG. 9 is a diagram showing a flow of position adjustment of the substrate 9. As shown in FIG. 9, when the position adjustment of the substrate 9 is performed, first, the product substrate 9 is carried into the coating apparatus 1 (that is, the position adjustment substrate is replaced with the product substrate 9). Then, it is placed on the substrate holder 11 (step S31). As shown in FIG. 10, a holding position adjustment mechanism 111 that performs an approximate position adjustment (so-called pre-alignment) of the substrate 9 placed on the substrate holding unit 11 is provided around the substrate holding unit 11. Yes. When the substrate 9 is placed on the substrate holding part 11, the (+ Y) side and (−X) side edges of the substrate 9 are pushed by the piston 112 of the holding position adjusting mechanism 111, and the (−Y) of the substrate 9 is pressed. When the side and (+ X) side edges abut against the movement restricting portion 113, the position of the substrate 9 is roughly adjusted (step S32). As a result, the two position adjustment marks 93 (see FIG. 3) on the substrate 9 are positioned in the first imaging region of the first imaging unit 191 and the second imaging region of the second imaging unit 192, respectively. The substrate 9 is adsorbed (that is, held) by the substrate holding unit 11. In FIG. 10, the description of the configuration other than the substrate holder 11 and the holding position adjustment mechanism 111 is omitted.

  When the substrate 9 is held by the substrate holding unit 11, the first imaging unit 191 and the second imaging unit 192 are controlled by the imaging control unit 21, and 2 positioned in the first imaging region and the second imaging region on the substrate 9. Two position adjustment marks 93 are imaged (step S33). An image acquired by the first imaging unit 191 (hereinafter referred to as “third image”) and an image acquired by the second imaging unit 192 (hereinafter referred to as “fourth image”) are displayed on the monitor 20. (Step S34). FIG. A is a diagram showing a third image 83 and a fourth image 84 output to the monitor 20. FIG. As shown in A, on the monitor 20, the third image 83 and the fourth image 84 are displayed side by side in the main scanning direction (that is, the X direction), and a reference line 201 extending in the X direction common to both images is displayed. Yes. FIG. In A, the position adjustment marks 93 in the third image 83 and the fourth image 84 are shown with parallel diagonal lines.

  When the third image 83 and the fourth image 84 are output to the monitor 20, the substrate position adjustment unit 23 performs image processing on the third image 83 and the fourth image 84, and the position adjustment mark 93 in both images is displayed. Detection is performed based on a template image registered in advance in the substrate position adjustment unit 23 (so-called template matching is performed) (step S35). Subsequently, the distance in the sub-scanning direction between the centers of the two position adjustment marks 93 is obtained, and the rotation direction of the substrate 9 is determined based on the distance in the main scanning direction between the centers of the position adjustment marks 93 stored in advance. Displacement amount (that is, the inclination of the imaginary straight line 931 (see FIG. 3) between the position adjustment marks 93 with respect to the reference line 201). Then, the substrate rotation mechanism 13 is controlled by the substrate position adjusting unit 23 based on the amount of deviation of the rotation direction of the substrate 9 and the substrate 9 is rotated. As shown in B, the relative positions in the Y direction with respect to the reference line 201 of the two position adjustment marks 93 in the third image 83 and the fourth image 84 are made equal to each other (step S36).

  As described above, in the coating apparatus 1, the lines of the organic EL liquid in the first image 81 and the second image 82 (that is, the first portion 71 and the second portion 72) overlap the reference line 201 in the monitor 20. As described above, by moving the first imaging unit 191 and the second imaging unit 192 in the sub-scanning direction (that is, the Y direction), the nozzles 17 of the first imaging unit 191 and the second imaging unit 192 are discharged onto the substrate. The relative positions in the sub-scanning direction with respect to the line of the organic EL liquid applied to the same are made equal to each other. Accordingly, by making the relative positions of the two position adjustment marks 93 in the Y direction with respect to the reference line 201 equal to each other, the relative positions of the two position adjustment marks 93 with respect to the nozzle 17 in the sub-scanning direction are made equal to each other. That is, the groove (see FIG. 3) between the partition walls 92 of the application region 91 on the substrate 9 is parallel to the movement locus of the nozzle 17 in the main scanning direction.

  Next, a distance in the Y direction between the center of the position adjustment mark 93 and the reference line 201 is obtained. Then, the substrate moving mechanism 12 is controlled by the substrate position adjusting unit 23 based on the distance, and the substrate 9 is moved in the sub-scanning direction. As shown in C, two position adjustment marks 93 in the third image 83 and the fourth image 84 are superimposed on the reference line 201. Further, the substrate 9 is moved in the sub-scanning direction based on the distance in the sub-scanning direction between the position adjustment mark 93 and the groove of the coating region 91 stored in advance in the substrate position adjusting unit 23, whereby the substrate 9 is located at the application start position indicated by the solid line in FIG. 1, and the relative position in the sub-scanning direction between the most (+ Y) side groove and the most (+ Y) side nozzle 17 of the application region 91 is mutually. The position adjustment of the substrate 9 is completed after being equalized (step S37).

  In the coating apparatus 1, after the position adjustment of the substrate 9 is completed, the organic EL liquid is applied to the substrate 9. In the application of the organic EL liquid, first, the fluid material supply unit 18 is controlled to start the discharge of the organic EL liquid from the nozzle 17, and the head moving mechanism 15 is driven to start the movement of the application head 14. . In the coating apparatus 1, the same type of organic EL liquid is continuously discharged from the three nozzles 17 toward the substrate 9, and the nozzle 17 is moved in the (+ X) direction from the (−X) side in FIG. (In the main scanning direction), the organic EL liquid is applied to the three grooves between the partition walls 92 (see FIG. 3) formed in advance on the application region 91 of the substrate 9. Striped organic EL liquids applied to the three grooves are arranged at a pitch equal to three times the partition wall pitch in the sub-scanning direction. In other words, two grooves to which other types of organic EL liquids are to be applied (or applied) are sandwiched between two adjacent grooves to which the organic EL liquid is applied.

  When the coating head 14 moves above the liquid receiving part 16 on the (+ X) side of the substrate 9, the substrate moving mechanism 12 is driven, and the substrate 9 together with the substrate holding part 11 has a partition pitch in the (+ Y) direction in FIG. Move 9 times the distance. At this time, in the coating head 14, the organic EL liquid is continuously discharged from the nozzle 17 toward the liquid receiving unit 16. When the movement of the substrate 9 in the sub-scanning direction is completed, the coating head 14 moves from the (+ X) side of the substrate 9 to the (−X) side while discharging the organic EL liquid from the nozzle 17.

  In the coating apparatus 1, the main scanning and the sub scanning of the nozzle 17 with respect to the substrate 9 are repeated at high speed, whereby the organic EL liquid is applied on the substrate 9 in a stripe shape. And when the board | substrate 9 moves to the application completion position shown with a dashed-two dotted line in FIG. 1, discharge of the organic EL liquid from the nozzle 17 will be stopped, and application | coating of the organic EL liquid with respect to the board | substrate 9 will be complete | finished.

  As described above, in the coating apparatus 1, the line of the organic EL liquid applied on the position adjustment substrate is imaged by the first imaging unit 191 and the second imaging unit 192, and the first image 81 of the line and The imaging unit deviation amount (that is, the first distance and the second distance) is obtained from the second image 82 by the deviation amount calculation unit 22, and the first imaging unit 191 and the second imaging unit are further based on the imaging unit deviation amount. The relative positions of the 192 nozzles 17 in the sub-scanning direction are made equal to each other. Then, the product substrate 9 is imaged by the first imaging unit 191 and the second imaging unit 192 that have been adjusted in position, and the third of the position adjustment marks 93 acquired by the first imaging unit 191 and the second imaging unit 192 is used. The substrate moving mechanism 12 and the substrate rotating mechanism 13 are controlled by the substrate position adjusting unit 23 based on the image 83 and the fourth image 84, whereby the relative position of the substrate 9 with respect to the nozzle 17 is adjusted. That is, in the coating apparatus 1, the relative position of the substrate 9 with respect to the nozzle 17 is adjusted based on the third image 83, the fourth image 84, and the imaging unit displacement.

  In the coating apparatus 1, in the imaging of the organic EL liquid line on the position adjustment substrate, the elapsed time from the application of the organic EL liquid in the first imaging region to the acquisition of the first image 81 by the first imaging unit 191, The elapsed time from the application of the organic EL liquid in the two imaging regions to the acquisition of the second image 82 by the second imaging unit 192 is made equal to each other. In other words, the imaging delay times in the first imaging unit 191 and the second imaging unit 192 are made equal to each other, thereby the state of the organic EL liquid in the first image 81 and the state of the organic EL liquid in the second image 82. Is the same. Thus, the first image 81 and the second image 82 can be easily compared by making the conditions of the organic EL liquid at the time of imaging in the first image 81 and the second image 82 equal and appropriate. In addition, the positional relationship between the trajectory of the movement of the nozzle 17 in the main scanning direction and the first imaging unit 191 and the second imaging unit 192 can be obtained easily and with high accuracy. Then, the relative position of the substrate 9 with respect to the nozzle 17 is adjusted with high accuracy by imaging the position adjustment mark 93 on the substrate 9 by the first imaging unit 191 and the second imaging unit 192 and adjusting the position of the substrate 9. can do.

  In the coating apparatus 1, the nozzle 17 moves on the first imaging region and the second imaging region at a constant speed when applying the organic EL liquid to the position adjustment substrate. As described above, by equalizing the application conditions of the organic EL liquid in the first imaging area and the second imaging area, the imaging conditions of the first image 81 and the second image 82 are made to coincide with each other with higher accuracy, and in the main scanning direction. The positional relationship between the locus of movement of the nozzle 17 and the first imaging unit 191 and the second imaging unit 192 can be obtained more easily and with higher accuracy.

  In the coating apparatus 1, the imaging delay time corresponding to the fluid material applied to the position adjustment substrate by the imaging control unit 21 is extracted from the database 30 and stored in advance, and the position adjustment is performed based on the imaging delay time. The flowable material on the substrate is imaged. Thus, in the coating device 1, the imaging delay time can be set appropriately according to the type of the fluid material. As a result, the positional relationship between the movement trajectory of the nozzle 17 in the main scanning direction and the first imaging unit 191 and the second imaging unit 192 can be obtained more easily and with higher accuracy.

  When application of a fluid material whose imaging delay time is not registered in the database 30 is performed in the application apparatus 1, the application of the fluid material to the position adjustment substrate and the first imaging unit 191 and the second imaging unit 192 are performed. Acquisition of an image and image processing on the image are repeatedly performed by changing the imaging delay time, and an appropriate imaging delay time is determined. And the said imaging delay time is added to the database 30 by the database update part 32 as a new data element 301 with the kind of fluid material. As described above, since the imaging apparatus 1 can add an imaging delay time suitable for a new type of flowable material to the database 30, it can easily cope with the application of a new type of flowable material.

  If the position adjustment of the first imaging unit 191 and the second imaging unit 192 in the sub-scanning direction is not performed, the first imaging is performed when the substrate moving mechanism 12 and the substrate rotating mechanism 13 adjust the position of the substrate 9. With respect to the third image 83 and the fourth image 84 of the position adjustment mark 93 acquired by the unit 191 and the second imaging unit 192, the imaging unit deviation amounts of the first imaging unit 191 and the second imaging unit 192 are calculated. Need to be corrected. Specifically, when the distance in the sub-scanning direction between the centers of the two position adjustment marks 93 is obtained in step S36, the distance between the centers obtained from the third image 83 and the fourth image 84 is determined. The imaging unit shift amount is added (or subtracted).

  However, in the coating apparatus 1 as described above, when the substrate position adjustment unit 23 adjusts the position of the substrate 9, first, the first imaging unit 191 and the second imaging unit 192 move in the sub-scanning direction based on the imaging unit deviation amount. Thus, the relative positions with respect to the nozzle 17 are made equal to each other. For this reason, when the position of the substrate 9 is adjusted by the substrate moving mechanism 12 and the substrate rotating mechanism 13, it is not necessary to correct the imaging unit displacement amount by calculation, and thus the movement amount of the substrate 9 (that is, the rotation angle of the substrate 9). , And the amount of movement in the sub-scanning direction) can be simplified. In the coating apparatus 1, since the first image 81 and the second image 82 are output to the monitor 20 when adjusting the positions of the first imaging unit 191 and the second imaging unit 192, the positions of both imaging units are easily confirmed. Position adjustment can be performed.

  As mentioned above, although embodiment of this invention has been described, this invention is not limited to the said embodiment, A various change is possible.

  For example, in the position adjustment of the first image pickup unit 191 and the second image pickup unit 192, the organic EL liquid does not necessarily have to be applied to the position adjustment substrate, and an unnecessary portion of the product substrate 9 (that is, a product display area) The organic EL liquid is applied to a portion that is not used as the position adjustment mark 93 in FIG. 3 and is located on the (+ Y) side), and the line of the organic EL liquid on the unnecessary portion is imaged to obtain the first image. Position adjustment of the unit 191 and the second imaging unit 192 may be performed. In this case, the unnecessary portion of the product substrate 9 can be regarded as a position adjustment substrate. In addition, after the positions of the first imaging unit 191 and the second imaging unit 192 are adjusted, the position of the substrate 9 can be adjusted without replacing the substrate. In the position adjustment of the first imaging unit 191 and the second imaging unit 192, a part corresponding to the (−Y) side unnecessary part on the (+ Y) side of the substrate 9 in FIG. An organic EL liquid may be applied to the unnecessary portion. In this case, another unnecessary portion can be regarded as a position adjustment substrate.

  In the coating apparatus 1, the detection of the application of the organic EL liquid to the first imaging region and the second imaging region by the imaging controller 21 is not necessarily performed based on the position information of the coating head 14 sent from the encoder of the head moving mechanism 15. For example, the application of the organic EL liquid to each imaging region is detected by continuously monitoring each imaging region with an optical sensor or the like and detecting the passage of each nozzle 17 on each imaging region. Also good.

  Further, as the first imaging unit 191 and the second imaging unit 192, a digital video camera or the like that continuously images the first imaging region and the second imaging region may be provided. In this case, images corresponding to the time point when the imaging delay time has elapsed from the application detection are extracted as the first image 81 and the second image 82 among the plurality of images acquired continuously.

  In the coating apparatus 1, it is not always necessary to provide both the first imaging unit moving mechanism 193 and the second imaging unit moving mechanism 194. For example, only the second imaging unit moving mechanism 194 is provided and is based on the imaging unit deviation amount. Thus, the relative positions of the first imaging unit 191 and the second imaging unit 192 with respect to the nozzle 17 may be made equal by moving the second imaging unit 192 in the sub-scanning direction.

  In the coating apparatus 1, the position of the substrate 9 is adjusted by the substrate moving mechanism 12 and the substrate rotating mechanism 13 without adjusting the positions of the first imaging unit 191 and the second imaging unit 192 in the sub-scanning direction. The imaging unit deviation amounts of the first imaging unit 191 and the second imaging unit 192 may be corrected by calculation with respect to the third image 83 and the fourth image 84 of the adjustment mark 93. In this case, since the first image capturing unit moving mechanism 193 and the second image capturing unit moving mechanism 194 can be omitted, the structure of the coating apparatus 1 can be simplified. In the coating apparatus 1, the partition wall 92 and the groove of the coating region 91 of the substrate 9 may be imaged instead of the position adjustment mark 93, and the position of the substrate 9 may be adjusted based on these images.

  In the coating apparatus 1, three types of organic EL liquids each including three types of organic EL materials having different colors from red (R), green (G), and blue (B) from the three nozzles 17 of the coating head 14. May be simultaneously ejected and applied to the substrate 9. In this case, in the coating head 14, the distance in the sub-scanning direction between the two adjacent nozzles 17 is made equal to the partition wall pitch.

  In the coating head 14, the number of nozzles 17 is not necessarily limited to three, and one, two, or four or more nozzles 17 may be provided in the coating head 14. However, from the viewpoint of shortening the time required for applying the flowable material to the substrate 9, the flowable material is continuously discharged toward the substrate 9, and relative to the substrate 9 in the main scanning direction and the sub-scanning direction. Preferably, a plurality of nozzles that move in a moving manner (ie, one nozzle and one or more other nozzles that move with the nozzle) are provided.

  In the coating apparatus 1, a fluid material containing a hole transport material may be applied to the substrate 9. Here, the “hole transport material” is a material that forms a hole transport layer of an organic EL display device, and the “hole transport layer” is a positive electrode that is formed into an organic EL layer formed of an organic EL material. It means not only a narrowly defined hole transport layer that transports holes, but also includes a hole injection layer that injects holes. Further, the coating device 1 is not necessarily used only for coating a fluid material containing an organic EL material or a hole transport material for an organic EL display device. For example, the coating device 1 is a flat surface such as a liquid crystal display device or a plasma display device. It may be used when applying a flowable material containing other types of pixel forming materials such as a coloring material and a fluorescent material to a substrate for a display device, a glass substrate or a ceramic substrate for a magnetic disk or an optical disk, Or you may utilize for application | coating of the various kind of fluidity material with respect to various board | substrates, such as a semiconductor substrate.

It is a top view of a coating device. It is a front view of a coating device. It is a top view of a board | substrate. It is a figure which shows a database. It is a figure which shows the flow of a position adjustment of a 1st imaging part and a 2nd imaging part. It is a figure which shows the flow of a position adjustment of a 1st imaging part and a 2nd imaging part. It is a figure which shows the moving speed of a coating head. It is a figure which shows a 1st image. It is a figure which shows a 1st image and a 2nd image. It is a figure which shows a 1st image and a 2nd image. It is a figure which shows the flow of the position adjustment of a board | substrate. It is a top view which shows a holding | maintenance position adjustment mechanism. It is a figure which shows a 3rd image and a 4th image. It is a figure which shows a 3rd image and a 4th image. It is a figure which shows a 3rd image and a 4th image.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Coating device 9 Substrate 11 Substrate holding part 12 Substrate moving mechanism 13 Substrate rotating mechanism 15 Head moving mechanism 17 Nozzle 20 Monitor 21 Imaging control part 22 Deviation amount calculating part 23 Substrate position adjusting part 30 Database 31 Database storage part 32 Database update part 71 First part 72 Second part 81 First image 82 Second image 83 Third image 84 Fourth image 191 First imaging unit 192 Second imaging unit 193 First imaging unit moving mechanism 194 Second imaging unit moving mechanism 201 Reference line 301 Data elements S11 to S23, S31 to S37 Steps

Claims (17)

An application device for applying a flowable material to a substrate,
A substrate holder for holding the substrate;
A nozzle that continuously discharges a flowable material toward the substrate;
A main scanning mechanism that moves the nozzle relatively in a main scanning direction parallel to the main surface of the substrate;
A sub-scanning mechanism that moves the substrate relative to the nozzle in a sub-scanning direction perpendicular to the main scanning direction each time the main scanning direction is moved;
A substrate rotation mechanism for rotating the substrate holding portion around a rotation axis perpendicular to the main surface;
A first imaging unit and a second imaging unit that are arranged substantially parallel to the main scanning direction above the substrate holding unit and that respectively capture a first imaging region and a second imaging region on the substrate held by the substrate holding unit. An imaging unit;
By controlling the first imaging unit and the second imaging unit, a portion included in the first imaging region of the fluid material line applied on the position adjusting substrate is changed to the first part of the fluid material. When a predetermined imaging delay time has elapsed since application to one imaging region, the image is captured and stored as a first image, and the portion included in the second imaging region of the line is the part of the fluid material. An imaging control unit that captures an image when the imaging delay time has elapsed after application to the second imaging region and stores it as a second image;
A deviation amount calculation unit for obtaining a deviation amount in the sub-scanning direction between the first imaging unit and the second imaging unit based on the first image and the second image;
Based on the image of the substrate held by the substrate holding unit acquired by the first imaging unit and the second imaging unit, and the shift amount obtained by the shift amount calculation unit, the sub-scanning mechanism and the A substrate position adjusting unit for adjusting a relative position of the substrate to the nozzle by controlling a rotation mechanism;
A coating apparatus comprising: The coating apparatus according to claim 1,
An imaging unit moving mechanism that moves the second imaging unit relative to the first imaging unit in the sub-scanning direction;
When adjusting the position of the substrate by the substrate position adjusting unit, the imaging unit moving mechanism is controlled by the substrate position adjusting unit based on the deviation amount obtained by the deviation amount calculating unit, and the second imaging unit is moved to the first imaging unit. The relative positions of the first imaging unit and the second imaging unit with respect to the nozzle are made equal to each other with respect to the sub-scanning direction by moving relative to one imaging unit in the sub-scanning direction. A coating device. The coating apparatus according to claim 1 or 2,
The imaging control unit detects application of the fluid material to each of the first imaging region and the second imaging region based on the position of the nozzle in the main scanning direction, and the application of the fluid material A coating apparatus, wherein an imaging instruction is given to each of the first imaging unit and the second imaging unit after elapse of the imaging delay time from detection. The coating apparatus according to any one of claims 1 to 3,
The distance in the main scanning direction between the nozzle movement start position on one side of the substrate in the main scanning direction and the first imaging unit is the nozzle movement start position on the other side of the substrate and the first position. The coating apparatus characterized by being equal to the distance in the main scanning direction between two imaging units. The coating apparatus according to any one of claims 1 to 4,
The coating apparatus, wherein the nozzle moves at a constant speed on the first imaging area and the second imaging area when the nozzle is relatively moved by the main scanning mechanism. A coating apparatus according to any one of claims 1 to 5,
A database storage unit that stores a database that is a set of data elements in which key information including the type of the flowable material is associated with the imaging delay time;
The imaging control unit extracts an imaging delay time associated with key information including the type of fluid material applied to the substrate from the database, and based on the imaging delay time, the first image and the second image An applicator that acquires an image. The coating apparatus according to claim 6,
The coating apparatus further comprising a database update unit for adding a new data element to the database. A coating apparatus according to any one of claims 1 to 7,
The apparatus further comprises another nozzle that moves relative to the substrate in the main scanning direction and the sub-scanning direction together with the nozzle while continuously discharging a flowable material toward the substrate. Coating device. A coating apparatus according to any one of claims 1 to 8,
The coating apparatus, wherein the fluid material includes a pixel forming material for a flat display device. The coating apparatus according to claim 9, wherein
The coating device, wherein the pixel forming material is an organic EL material or a hole transport material for an organic EL display device. An application device for applying a flowable material to a substrate,
A substrate holder for holding the substrate;
A nozzle that continuously discharges a flowable material toward the substrate;
A main scanning mechanism that moves the nozzle relatively in a main scanning direction parallel to the main surface of the substrate;
A sub-scanning mechanism that moves the substrate relative to the nozzle in a sub-scanning direction perpendicular to the main scanning direction each time the main scanning direction is moved;
A substrate rotation mechanism for rotating the substrate holding portion around a rotation axis perpendicular to the main surface;
A first imaging unit and a second imaging unit that are arranged substantially parallel to the main scanning direction above the substrate holding unit and that respectively capture a first imaging region and a second imaging region on the substrate held by the substrate holding unit. An imaging unit;
An imaging unit moving mechanism that moves the second imaging unit relative to the first imaging unit in the sub-scanning direction;
By controlling the first imaging unit and the second imaging unit, in the first imaging region and the second imaging region, a first image and a first image of a line of fluid material applied on a position adjustment substrate An imaging control unit for acquiring two images;
Based on the first image and the second image, a deviation amount in the sub-scanning direction between the first imaging unit and the second imaging unit is obtained, and the imaging unit moving mechanism is controlled based on the deviation amount. Then, by moving the second imaging unit relative to the first imaging unit, the relative positions of the first imaging unit and the second imaging unit with respect to the nozzle in the sub-scanning direction are equal to each other. An imaging position adjustment unit to perform,
The relative position of the substrate with respect to the nozzle by controlling the sub-scanning mechanism and the rotation mechanism based on the image of the substrate held by the substrate holding unit acquired by the first imaging unit and the second imaging unit. A substrate position adjusting unit for adjusting
A coating apparatus comprising: An applicator for applying the flowable material to the product substrate by moving the nozzle relative to the product substrate while continuously discharging the flowable material from the nozzle toward the product substrate. In the position adjustment method of adjusting the relative position of the substrate for the product with respect to the nozzle,
a) The nozzle that continuously discharges the flowable material toward the position adjustment substrate is moved relative to the position adjustment substrate in a main scanning direction parallel to the main surface of the position adjustment substrate. Applying a flowable material line;
b) The part included in the first imaging region of the first imaging unit of the line is imaged at a time when a predetermined imaging delay time has elapsed after application of the flowable material to the first imaging region. Storing as one image;
c) imaging a part included in the second imaging region of the second imaging unit of the line at a time when the imaging delay time has elapsed after application of the fluid material to the second imaging region; Storing as an image;
d) obtaining a shift amount in the sub-scanning direction perpendicular to the main scanning direction between the first imaging unit and the second imaging unit based on the first image and the second image;
e) imaging a product substrate by the first imaging unit and the second imaging unit;
f) The product substrate is relative to the nozzle in the sub-scanning direction based on the shift amount and the image of the product substrate acquired by the first imaging unit and the second imaging unit. by rotating the substrate for the product as well as move around a vertical axis of rotation to the main surface of the substrate for the product, and adjusting the relative position with respect to the nozzle of the substrate for the product,
A position adjustment method comprising: The position adjustment method according to claim 12,
Step f)
f1) By moving the second imaging unit relative to the first imaging unit in the sub-scanning direction based on the shift amount, the first imaging unit and the second imaging unit in the sub-scanning direction. A position adjustment method comprising a step of making the relative positions of the imaging unit with respect to the nozzles equal to each other. The position adjustment method according to claim 13,
Step d)
d1) outputting the first image and the second image to a monitor;
d2) determining respective distances between the line in the first image and the line in the second image and a reference line on the monitor;
With
In the step f1), the first image pickup unit and the second image pickup unit are moved in the sub-scanning direction based on the respective distances obtained in the step d2). The position adjustment method, wherein the line and the line in the second image are overlapped with the reference line on the monitor. The position adjustment method according to any one of claims 12 to 14,
In the step a), the nozzle is moved at a constant speed on the first imaging area and the second imaging area when the nozzle is relatively moved. The position adjustment method according to any one of claims 12 to 15,
The position adjusting method, wherein the fluid material includes a pixel forming material for a flat display device. The position adjustment method according to claim 16,
The position adjusting method, wherein the pixel forming material is an organic EL material or a hole transport material for an organic EL display device.

Images