JPH0954206A - Device and method for recovering color filter - Google Patents

Abstract

PURPOSE: To make it possible to easily apply a suitable amt. of a resist liquid on a defect, such as white void, formed by drop-out of the applied resist in the microregion of a color filter. CONSTITUTION: The front end of a capillary 106 is brought near to the defect 134 of the color filter F in repairing the defect 134, such as white void, formed by the drop-out of the resist 132 applied on the substrate surface of a transparent glass plate 130 by applying the resist liquid thereon. The resist liquid is then fed to this capillary 106 and the liquid drop 136 of the resist liquid is formed at the front end of the capillary 106. The liquid drop 136 is thereafter stuck to the front end of the capillary 106 and is applied in this state on the defect 134 of the color filter F. The applied resist liquid is then cured by exposure.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color filter repairing apparatus and a color filter repairing method, and more particularly to a white area or the like caused by a lack of a resist coated on a substrate surface in a minute area of the color filter. As a drawback, the present invention relates to a color filter repairing apparatus and a color filter repairing method for coating and repairing a resist.

[0002]

2. Description of the Related Art A color filter which constitutes a color liquid crystal display device in combination with a liquid crystal for controlling the amount of light transmitted or reflected is a resist liquid prepared by mixing a photosensitive resin with a pigment on a transparent substrate such as a glass plate. After the application, the applied resist solution is exposed and cured, and the uncured portion is removed by development. However, in the manufacturing process, due to the adhesion of dust to the mask or the color filter surface, in the minute area of the obtained color filter,
In some cases, the applied resist may be partially lost to cause defects such as white spots or white spots. Conventionally, a color filter having such a defect cannot be used in a color liquid crystal display device, and it has been necessary to dispose of it or to apply a resist solution again to a transparent substrate from which all resist has been peeled off. Therefore, the present inventors have tried to apply the resist solution only to defects such as white spots and white spots caused by the lack of the resist in the minute area of the color filter.

[0003]

As described above, if the resist solution can be applied only to the white defects and the white spots, it is an economically effective method without peeling off all the resist. However, the white spots or white spots that occur in the color filter are extremely small, so that it is extremely difficult to adjust the amount of resist solution applied to the white spots or white spots. That is,
When applying the resist solution from the tapered capillary to the white spots or unevenness of the color filter, if you try to let the droplets of the resist solution fall naturally from the tip of the capillary,
Due to the surface tension of the resist solution, etc., the amount of the liquid droplets falling from the tip becomes larger than the amount of the resist solution required for coating white spots or white spots, and the resist solution adheres to unnecessary locations,
It easily causes color spots. Further, when the tip of the tapered capillary is brought into contact with a white defect or unevenness of the color filter to apply the resist solution, the tip of the capillary may be broken. Therefore, an object of the present invention is to provide a color filter restoration device and a color filter capable of easily applying an appropriate amount of resist solution to defects such as white spots caused by the lack of applied resist in a minute area of the color filter. It is to provide a method for repairing a filter.

[0004]

Means for Solving the Problems As a result of repeated studies to achieve the above-mentioned object, the present inventors have found that a droplet of a resist solution formed on the tip of a capillary is colored in a state of being attached to the tip of the capillary. Defects such as white spots in the filter (hereinafter,
We have found that the amount of the resist solution can be easily adjusted by applying to the defect), and the droplet can be applied to the defect without contacting the tip of the capillary with the color filter, and arrived at the present invention. .

That is, the present invention is a color filter repairing apparatus for repairing defects such as white defects caused by the lack of the resist applied on the substrate surface in a minute area of the color filter by applying a resist solution. A capillary for forming a droplet of a resist solution applied on the defect of the color filter at the tip, and a moving means for moving the color filter and the capillary so that the tip of the capillary reaches a defect position of the color filter, Liquid feeding means for feeding a resist solution so that a droplet of a predetermined size is formed at the tip of the capillary, and coating for applying the droplet of the resist solution formed at the tip of the capillary to the defect of the color filter. Means and an exposing means for exposing and curing the resist liquid applied to the defects of the color filter. In repair device of a color filter. Further, the present invention, in the minute area of the color filter, defects such as white defects caused by the lack of the resist applied to the substrate surface, when applying and repairing the resist solution,
The tip of the capillary to which the resist solution is sent is brought close to the defect of the color filter, and then the resist solution is sent to the capillary to form a droplet of the resist solution at the tip of the capillary. Apply it to the defects of the color filter while attached to the tip of the capillary,
Then, the method for repairing a color filter is characterized by exposing and curing the applied resist solution.

In the present invention having such a structure, the coating work can be easily performed by providing the enlarged monitor means so as to monitor the coating work for coating the droplets of the resist liquid on the defect of the color filter. . Further, by providing the minute moving means that allows the capillary to move minutely, the tip of the capillary can be accurately positioned at the defect position of the color filter. As such a capillary, a plurality of capillaries are used, and by providing a micro-moving means for individually micro-moving each of the capillaries, each tip of the capillaries to which different resist solutions are fed can be individually and accurately located at the defective position of the color filter. Can be positioned. Further, by additionally providing a defect removing means for removing defects such as protrusions generated in a minute area of the color filter, the resist liquid can be applied to the removal trace after removing the defects such as protrusions. As the defect removing means, it is preferable to provide a resist stripping section and / or a projection removing section. Incidentally, when the applied resist solution is exposed and cured, it is possible to prevent the resist solution in the capillary from being cured by moving the capillary to a position where it is not exposed and then exposing the resist solution.

[0007]

According to the present invention, since the resist liquid droplets formed on the tip of the capillary are applied to defects such as white defects of the color filter, the amount of resist liquid applied to the defect is formed on the tip of the capillary. The size of the droplet can be easily adjusted, and the droplet of the resist liquid can be applied to the defect without contacting the tip of the capillary with the color filter. Therefore, the possibility that the tip of the capillary is broken due to contact with the color filter can be eliminated. As a result, an appropriate amount of resist solution can be easily applied only to defects such as white defects in the color filter.

[0008]

The present invention will be described in more detail with reference to the drawings.
FIG. 1 is a front view of a color filter repairing apparatus according to the present invention. An in-cassette loader is mounted on the left and right sides of a repairing apparatus main body 10 in which an in-cassette 12 for storing a color filter to be repaired is placed. 14 and an out-cassette loader 18 that moves up and down by mounting the out-cassette 16 in which the restored color filter is stored.
On the front side of the repairing apparatus main body 10, there are a control panel 20, a display 22 for displaying the operation status inside the repairing apparatus main body 10, a monitor CRT 24 for monitoring application work, and a capillary to which a resist solution described later is sent. A joystick 26 for minute movement, an exposure light source 28, and an air pressure adjusting valve group 30 used for sending a resist solution and the like are provided.

In the repair device body 10 shown in FIG.
The color filter moving device shown in FIG. 10 and the capillary moving device shown in FIG. 10 are provided. The color filter moving device shown in FIG. 2 includes an in-cassette 12 (FIG. 1).
Among the color filters to be repaired stored in the inside, an infork 32 is provided which moves one color filter and moves to a predetermined position. When the infork 32 is stopped, the infork 32 rises to the infork 32. A pair of front lifters 34, 35 for lifting the mounted color filter are provided so as to be vertically movable. Of the pair of front lifters 34, 35, a front view of the front lifter 34 is shown in FIG.
Shown in The front lifter 34 is provided with a lift plate 3 by a lifter cylinder 36 mounted on the base of the apparatus body 10.
8 is provided so as to be movable up and down, and positioning cylinders 40a and 40b for positioning the color filter F are provided at both ends on the back surface side of the lift plate 38. An arm 41 rotatably attached to the end of the lift plate 38.
The tip ends of the rods of the positioning cylinders 40a and 40b are axially attached to a and 41b. Therefore, by driving the positioning cylinders 40a and 40b to expand and contract each rod, as shown in FIG.
b rotates, and the positioning pins 42a and 42b erected on the arms 41a and 41b are rotated from the positioning position to the positioning release position (the position indicated by the one-dot chain line in FIG. 3) or from the positioning release position to the positioning position. Can move.

Further, the mounting surface of the lift plate 38 on which the color filter F is mounted is provided with protrusions 44, 44 so that the mounted color filter F and the mounting surface of the lift plate 38 come into contact with each other. It is a point contact. The front lifter 35 having the same structure as the front lifter 34 is provided in parallel with the front lifter 34 as shown in FIG. Therefore, as shown in FIG. 4, the color filter F placed on the infork 32 and conveyed is positioned by the positioning pins 42a, 42.
Positioned by b, 43a, 43b. The front lifters 34, 35 are arranged such that the gap between the front lifters 34, 35 is wider than the infork 32.

The color filter F lifted by the front lifters 34 and 35 is held by a hand 46 that is movable in a direction perpendicular to the moving direction of the infork 32, and is movable in the XY directions. It is transferred in the direction of the table 56 provided in the. The hand 46 has a movable plate 48 movably provided in the direction of the table 56 by a hand drive device 47 (FIG. 2) at the tip portion thereof.
The mounting plates 49 and 50 are mounted orthogonally to the moving plate 48, as shown in FIG. The mounting plates 49, 50 are parallel to each other, and gripping cylinders 51a, 51b, 52a, 52b for gripping the color filter F are mounted at the tips thereof. Among such gripping cylinders, a gripping cylinder 51a is shown in FIG. This gripping cylinder 51a
The tip of the rod 52 is connected to a gripping arm 54 that is attached to the tip of the mounting plate 49. Therefore, due to the expansion and contraction of the rod 52, the bent distal end portion of the gripping arm 54 rotates, and the gripping of the color filter F or the gripping of the color filter F can be released.

In this way, the color filter F gripped by the hand 46 is placed on the table 56 which is provided so as to be movable in the XY directions. As shown in FIG. 7, an opening 57 having an opening area smaller than the area of the color filter F is formed in the center of the table 56, and the lift plate 62 of the rear lifter 58 is repaired in the opening 57. Device body 10
It is provided so as to be movable up and down by a rear lifter cylinder 60 fixed to the. Support plates 63 and 64, which are orthogonal to the lift plate 62 and support the color filter F, are attached to both ends of the lift plate 62 that moves up and down in the opening 57, and the color filters of the support plates 63 and 64 are attached. Also on the bearing surface side of F, the protrusion 6 that makes point contact with the color filter F
6, 67 are provided. When the hand 46 holding the color filter F moves onto the opening 57 of the table 56, the support plates 63 and 64 of the rear lifter 58 are driven by the rear lifter cylinder 60 as shown in FIG. It rises up on the table 56, and the projections 66 and 67 of the support plates 63 and 64 contact the back surface side of the color filter F. Next, the grip of the color filter F by the hand 46 is released, and after the color filter F is supported by the support plates 63 and 64, the rear lifter cylinder 60 is driven to lower the support plates 63 and 64 below the table 56. To do.

At this time, since the opening area of the opening 57 is smaller than the area of the color filter F, the color filter F is placed and positioned on the table 56. Such a table 56 is shown in FIG. The table 56 has openings 5
7 along the opening edge of the positioning pins 68a, 68b, 6
8c, 68d and positioning cylinders 70a, 70b, 70
c and are provided. These positioning cylinders 70
a, 70b, 70c are positioning jigs 71a, 71
b, 71c are moved back and forth, two sides of the color filter F placed on the table 56 are pressed, and the other two sides are brought into contact with the positioning pins 68a, 68b, 68c, 68d, thereby positioning the color filter F. I do. Among such positioning cylinders, positioning cylinders 70a, 70b
Positioning jigs 71a and 71b are attached to the respective rods. Among these positioning jigs, the positioning jig 71a is shown in FIG. 9 (a). This positioning jig 71a is
The pressing member 73a attached to the other end of the rod body 72a whose one end is attached to the tip of the rod moves along the concave groove 56a formed in the table 56, and the color filter F
Press the side edge of. On the other hand, a positioning jig 71c is attached to the rod of the positioning cylinder 70c. This positioning jig 71c is shown in FIG. 9 (b). The positioning jig 71c is provided with two pressing members 73 provided at both ends of a rod body 72c having a midway portion attached to the rod tip.
c and 73c are concave grooves 5 formed on the table 56.
It moves along 6c and 56c and presses the side end of the color filter F together with the pressing member 73a.

In this way, the table 56 on which the color filter F is positioned and placed is moved in the XY directions so that the defect of the color filter F is included in the visual field of the zoom type camera 78 shown in FIG. To do. An illumination lamp 80 shown in FIG. 2 is located below the zoom camera 78 to brighten the field of view of the zoom camera 78. The situation photographed by the zoom camera 78 can be displayed on the monitor CRT 24 (FIG. 1) for monitoring. In the vicinity of the zoom type camera 78, a capillary holder 80 for holding a capillary to which a resist solution to be applied to the defect of the color filter is sent is provided. It is held so that it can be moved while being kept at °. Therefore, the tip of the capillary can be brought as close as possible to the predetermined defect of the color filter F. In addition, in the vicinity of the illumination lamp 79,
As shown in FIG. 2, an exposure lamp 110 is also provided.

Capillary moving device 82 shown in FIG.
A cylinder 84 provided with a rod 85 that extends and contracts in the vertical direction is attached to a slide table 83 that moves horizontally and that is provided in a frame 81 that forms the restoration device main body 10, and the tip of the rod 85 is attached. A table 86 is attached to the. Therefore, the table 86 can move in the horizontal direction and the vertical direction. The table 86 is connected to the slide table 83 by rods 88, 88 as shown in FIG. 11 in addition to the rod 85 of the cylinder 84 shown in FIG. These rods 88, 88 have
Bushings 90 and 90 in which a spring 91 is installed are provided, and the table 86 is urged downward by the spring 91. Therefore, when the supply of fluid such as compressed air that drives the cylinder 84 is stopped and the rod 85 is in the open state, the table 86 is located at the lowest position by the urging force of the spring 91. This table 86 has XY
A Z stage 92 is provided. XYZ stage 92
Include a Z-axis manipulator motor 94 that slightly moves the main body 93 in the Z-axis direction, an X-axis manipulator motor 95 that slightly moves the main body 93 in the X-axis direction, and a Y-axis manipulator motor that slightly moves the main body 93 in the Y-axis direction. (Not shown) are provided and these motors are connected to the joystick 26.
(FIG. 1). Therefore, the tip of the capillary can be manually brought close to a predetermined defect of the color filter F while being monitored by the monitor CRT 24.

Main body 9 of XYZ stage 92 shown in FIG.
3, a tilt cylinder 96 tilted at 45 ° with respect to the horizontal plane is provided, and one end of a holder 98 holding a capillary holder 80 is connected to a slide plate 97 that slides along the tilt cylinder 96. . Therefore, the capillary holder 80 close to the color filter F
Can be rapidly moved above the color filter F by 45 °, and after the resist solution is applied, the exposure lamp 1
10 (FIG. 2), the color filter F
It is possible to avoid the exposure of the resist solution filled in the capillaries by increasing the distance between the capillary holding tool 80 and the above-mentioned disadvantage. In the field of view of the zoom type camera 78, a fluid nozzle 100 that blows out a drying fluid such as dry air may be provided in order to accelerate the drying of the resist solution applied to the defects of the color filter F.

The capillary holder 80 used in this embodiment is, as shown in FIG. 12, a stainless steel tube 1.
It is constituted by two-way connectors 102 and 104 connected by 03. This stainless steel tube 10
3 is a part held by the holder 98 (FIG. 10). A synthetic resin tube 105 is connected to the two-way connector 102, and a glass capillary 106 is connected to the two-way connector 104. These stainless steel tubes 103 and synthetic resin tubes 10
5, and the capillary 106 and the two-way connector 102, 1
As shown in FIG. 12, the connection with the connecting member 108
a, 108b, 108c, 108d.
The cross-sectional shape of such a connecting member is a substantially triangular shape, as shown in FIG. Since these connecting members have different sizes but have substantially the same shape, FIG. 13 shows a sectional view of the connecting member 108a.

A case in which the synthetic resin tube 105 is connected to the two-way connector 102 using the connecting member 108a shown in FIG. 13 will be described with reference to FIG. The connecting member 108a is made of a resin such as a fluorine resin,
The two-way connector 102 is inserted into the recess formed at the inlet of the liquid passage 112, and the connecting member 108 is provided on the reverse taper surface of the recess.
The taper surface 116 of "a" closely contacts. One end of the synthetic resin tube 105 is inserted into a hole 118 formed in the center of the connecting member 108a inserted into the recess, and the cap 10
When 9a is screwed onto the two-way connector 102, the cap 10
The connecting member 108a is deformed by 9a, and one end of the resin tube 105 is tightened, so that the synthetic resin tube 10
5 can be connected to the two-way connector 102. Similarly, the stainless steel tube 103 and the capillary 106 can be connected to the two-way connectors 102 and 104.

FIG. 14 is an enlarged vertical sectional view of the capillary 106 used in this embodiment. The capillary 106 is made of transparent glass, and the nozzle portion 120 is tapered. Capillary 106
Has a front length of 50 mm and a nozzle portion 120 of 20 mm.
It is. The thickness of the nozzle portion 120 is determined in relation to the size of the defect of the color filter F, etc.
Since the coating width of the resist solution is about 100 μm, the outer diameter is preferably 20 to 30 μm and the inner diameter is preferably 10 to 15 μm. Such a capillary 106 has an outer diameter of 1.2 mm.
Can be formed by heating and softening a glass tube having an inner diameter of about 0.3 mm and then stretching it.

By the way, as shown in FIG. 10, a holder 98 for holding the capillary holder 80 is mounted on a table 86 which constitutes the capillary moving device 82.
Even if one YZ stage 92 is mounted, the defect of the color filter F can be repaired. However, since the hue bands of three colors of red, blue, and green are usually formed on the color filter F, three XYZ stages 92 are formed as shown in FIG.
By mounting a, 92b, 92c, red, blue,
Each green resist solution can be sent to the capillaries that are individually held by each XYZ stage, and defects of different hue bands can be repaired without replacing the capillaries.

The XYZ stages 92a, 92 shown in FIG.
Each of b and 92c has a capillary 10 shown in FIG.
6a, 106b, and 106c are held, and resist liquids having different hues are supplied to the capillaries shown in FIG.
The liquid is sent according to the flow shown in. Ie red, blue,
The resist liquid of each hue of green is stored in the resist tank 126a,
Air pressure is applied to each resist tank via compressed air piping 123, which are individually stored in 126b and 126c, and through precision pressure reducing valves 30a, 30b, and 30c (provided on the front side of the restoration device body 10). ing. In addition, an electromagnetic three-way valve 128 is provided between each tank and each capillary.
a, 128b, 128c are provided, and by pressing a selection button (provided on the front side of the repair apparatus main body 10) for the resist liquid to be used, one of the electromagnetic three-way valves is turned ON, and The resist solution can be sent to a predetermined capillary. Here, when the electromagnetic three-way valve 128a is turned on, the resist solution in the resist tank 126a can be sent to the capillary 106a. At this time, the nozzle portion 12 of the capillary 106a
The size of the droplet formed at the tip of 0 is the tank 126a.
Depends on the air pressure applied to. Therefore, it is preferable that the air pressure applied to the tank 126a is adjusted by the precision pressure reducing valve 30a so that the desired droplet size is obtained.

By the way, the capillary 10 shown in FIG.
As described above, the nozzle portion 120 of No. 6 is extremely thin, and the resist solution easily solidifies. Therefore, in the present embodiment, in order to prevent solidification of the resist liquid in the capillary 106, particularly in the nozzle portion 120,
The compressed air for purging the resist solution in the capillaries 106 can be supplied to each capillary via a precision pressure reducing valve 30d (provided on the front side of the repair apparatus body 10) provided in the compressed air pipe 124. Further, since the resist solution stored in the resist tanks 126a, 126b, 126c is also deteriorated, it is necessary to regularly replace the resist solution. For this reason, in this embodiment, the resist tanks 126a, 126a and
The air pressure in 6b and 126c can be purged through the electromagnetic two-way valve 121 provided in the purge pipe 122.

According to the color filter restoration apparatus shown in FIGS. 1 to 16 described above, the table 56 on which the color filter F is placed is moved in the XY directions, and the table 56 shown in FIG.
As shown in FIG. 3, a defect is put in the color filter F within the field of view of the zoom type camera 78, and the defect is confirmed by the monitor CRT 24. Next, the slide table 83 and the cylinder 8
4 is adjusted, the capillary holder is moved to the vicinity of the defect of the color filter F, and then the selection switch of the capillary to which the resist liquid of a desired hue is fed is pressed,
Tilt cylinder 9 provided on the selected XYZ stage
6 (FIG. 10) is driven. Therefore, the selected capillary holder 80 descends at 45 °,
The tip of the nozzle portion 120 of No. 6 enters the field of view of the zoom camera 78. Furthermore, the Z-axis manipulator motor 94, the X-axis manipulator motor 95, and the Y-axis manipulator motor are driven by the joystick 26 (FIG. 1) to move the XYZ stage 92 minutely, and the tip of the nozzle portion of the capillary 106 of the color filter F. Get close to the shortcomings.

Thereafter, the desired electromagnetic three-way valve is turned on,
As shown in FIG. 17 (a), the resist solution is capillary 1
After forming a droplet 136 of a size matching the size of the defect on the color filter F at the tip of the nozzle portion of 06, the electromagnetic three-way valve is turned off. In this way, the capillary 106
The droplet 136 formed at the tip of the nozzle portion of the XYZ stage 92 is driven by the joystick 26 (FIG. 1) to drive the Z-axis manipulator motor 94, the X-axis manipulator motor 95, and the Y-axis manipulator motor shown in FIG. By moving, the defect 134 is applied. The resist liquid 138 applied to the defect 134 [see FIG.
7 (b)] is a fluid nozzle 100 (see FIG.
After drying by blowing dry air from 0), it is exposed by the exposure lamp 110 (FIG. 2). Although the exposure is performed from below the transparent glass plate 130 in this embodiment, the exposure may be performed from above the resist solution 138. At the time of such exposure, it is preferable to drive the tilt cylinder 96 (FIG. 10) and raise the capillary holder 80 upward by 45 ° so that the capillary 106 is not exposed.
The exposure lamp 110 is preferably provided with a diaphragm so that only the resist solution 138 is exposed and a timer for controlling the exposure time.

As described above, the defect of the color filter F is coated with the resist solution and the repair is completed.
Are positioning cylinders 70a, 70b, 70 shown in FIG.
After the positioning by c is released, the rear lifter 58
It is lifted by (FIG. 7), gripped by the hand 46 (FIG. 5), and transferred to the front lifters 34, 35 (FIG. 4).
Color filters F mounted on the front lifters 34 and 35
Are stored in the out cassette 16 (FIG. 1) by the out fork 140 (FIG. 2).

In the above-described embodiment, the case has been described in which defects such as white defects formed by defects in the resist applied to the color filter F are filled with the resist solution to be repaired. When the protrusion formed on the resist is removed by a foreign substance such as, for example, and repaired, a metal needle such as tungsten or a metal needle such as diamond or quartz for removing the protrusion is used instead of the capillary 106 shown in FIG. It can be done by mounting. Alternatively, the resist stripping solution may be sent to the capillary 106 to strip the resist to remove the protrusions. In this way, it goes without saying that the resist liquid may be sent to the capillary 106 and filled with the resist liquid to be repaired by the removal mark after the protrusion is removed.

[0027]

According to the present invention, the defect generated in the color filter can be easily repaired, so that it is possible to avoid discarding the color filter in which the defect has occurred, and to effectively use the resources. Can be achieved.

[Brief description of drawings]

FIG. 1 is a front view of a color filter restoration device according to the present invention.

FIG. 2 is an explanatory diagram for explaining a color filter moving means of the color filter restoration device according to the present invention.

FIG. 3 is a front view of a front lifter constituting the moving means shown in FIG.

FIG. 4 is a top view of a front lifter constituting the moving means shown in FIG.

5 is a partial plan view of a hand that constitutes the moving means shown in FIG. 2. FIG.

FIG. 6 is a partial side view of a hand that constitutes the moving means shown in FIG.

7 is a front view of a rear lifter that constitutes the moving means shown in FIG. 2. FIG.

FIG. 8 is a partial front view of a table forming the moving means shown in FIG.

9 is a partial cross-sectional view for explaining a positioning jig for the table shown in FIG.

FIG. 10 is an explanatory diagram for explaining the moving means of the capillaries of the color filter restoration device according to the present invention.

FIG. 11 is an explanatory view for explaining an elevating means of a table 86 which constitutes a moving means of the capillary shown in FIG.

FIG. 12 is a cross-sectional view for explaining the structure of a capillary holder that holds a capillary.

FIG. 13 is a cross-sectional view of a connecting member that constitutes a capillary holder.

FIG. 14 is a cross-sectional view of a capillary.

FIG. 15 is a top view showing an XYZ stage mounted on a table 86 that constitutes the moving means of the capillary shown in FIG.

FIG. 16 is an explanatory diagram illustrating a method of feeding a resist solution.

FIG. 17 is an explanatory diagram illustrating a method of applying a resist solution.

[Explanation of symbols]

 10 Repair Device Main Body 32 Infork 34, 35 Front Lifter 46 Hand 56 Table 58 Rear Lifter 78 Zoom Camera 80 Capillary Holder 82 Capillary Moving Device 92 XYZ Stage 94, 95 Manipulator Motor 106 Capillary

Continuation of the front page (72) Inventor Tetsuo Norimatsu 800 Miyake, Yasu-shi, Yasu-cho, Yasu-gun, Shiga Prefecture Aites Co., Ltd. (72) Inventor Tsutomu Morimoto 800 Miyake, Yasu-cho, Yasu-gun, Shiga Prefecture (72) ) Inventor Akihiko Takeda 800 Miyake, Yasu-cho, Yasu-gun, Shiga Prefecture Aites Co., Ltd.

Claims (8)

[Claims] 1. A color filter repairing apparatus for repairing defects such as white defects caused by the lack of a resist applied on a substrate surface in a minute area of the color filter by applying a resist solution. A capillary for forming a droplet of a resist liquid applied to the defect of the tip, a moving means for moving the color filter and the capillary so that the tip of the capillary reaches the defect position of the color filter, and the tip of the capillary A liquid feed means for feeding a resist solution so that a droplet of a predetermined size is formed on the coating solution; a coating means for coating the droplet of the resist solution formed on the tip of the capillary on the defect of the color filter; An exposure unit for exposing and curing the resist solution applied to the defects of the color filter. Other repair equipment. 2. The color filter repairing apparatus according to claim 1, wherein a magnifying monitor means is provided so that the coating work for coating the resist liquid droplets on the defect of the color filter can be monitored. 3. The color filter according to claim 1 or 2, further comprising fine moving means for finely moving the capillary so that the tip of the capillary is accurately positioned at the defect position of the color filter. Restoration device. 4. A micro-moving means for individually micro-moving each of the capillaries so that each tip of each of the capillaries is accurately positioned individually at a defect position of the color filter. The color filter restoration device according to claim 1. 5. The color filter restoration device according to claim 1, further comprising defect removing means for removing a defect such as a protrusion generated in a minute area of the color filter. 6. The color filter restoration device according to claim 5, wherein a resist stripping portion and / or a projection removing portion is provided as the defect removing means. 7. A capillary to which a resist solution is sent when a resist solution is applied to repair defects such as white spots caused by the lack of the resist applied to the substrate surface in a minute area of a color filter. The tip of each of them is close to the defect of the color filter, and then the resist solution is sent to the capillary to form a droplet of the resist solution at the tip of the capillary, and then the droplet is attached to the tip of the capillary. A method for repairing a color filter, which comprises applying to a defect of a color filter and then exposing and curing the applied resist solution. 8. The method of repairing a color filter according to claim 7, wherein, when the applied resist solution is exposed and cured, the capillary is moved to a position where it is not exposed, and then the resist solution is exposed.