JP3758892B2 - Defect correction method and defect correction apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a defect correction method and a defect correction apparatus, and more particularly to a defect correction method and a defect correction apparatus for correcting pattern defects on a substrate such as an LCD (liquid crystal display), a PDP (plasma display), and a mask.
[0002]
[Prior art]
When a pattern such as a mask in an LCD or PDP is created, defects such as disconnection or omission of the substrate pattern may occur due to excessive etching or contamination with foreign matter. Such a defect is corrected by, for example, applying a paste to the defective portion and correcting the defect with an apparatus described in Japanese Patent Application Laid-Open No. 8-292442.
[0003]
[Problems to be solved by the invention]
FIG. 6 is a view showing a state of a conventional application needle portion and paste. When a paste having a viscosity that can be applied in a short standby time such as 2 to 3 seconds with a coating needle 21 as shown in FIG. Is about 0.1 μm. However, the application diameter is 70 μm, the paste type is an ultrafine gold paste, the viscosity is 10000 cps 4% dilution, and the shrinkage during firing is about 1/10.
[0004]
If a substrate with a high electrode height (electrode height 2 μm, width 70 μm) is corrected under these conditions, a crack will be formed between the electrode and the paste during firing.
[0005]
In order to solve this, it is necessary to increase the coating film thickness. As a method of increasing the film thickness, there is a method of increasing the viscosity of the paste. However, when a conventional paste coating apparatus is used, a coating needle 21 as shown in FIG. After the paste 22 is adhered to the surface, if it is applied to the application surface as shown in FIG. 6C, an excessive amount of paste is applied as shown in FIG. 6D.
[0006]
Therefore, as shown in FIG. 6B, after the paste is attached to the application needle 21, if the state is maintained for a certain time, the paste 22 is pulled upward by the surface tension of the application needle 21, and the state shown in FIG. As shown, the tip of the application needle 21 protrudes from the paste 22. When the application needle 21 is brought into contact with the application surface as shown in FIG. 6 (f) in this state, the paste adhering to the tip portion of the application needle 21 is applied as shown in FIG. 6 (g). Good results are obtained.
[0007]
However, in this method, as shown in FIG. 6 (e), there may be a case where a standby time until it becomes ready for application becomes long or stable application becomes difficult.
[0008]
Another object of the present invention is to provide a defect correction method and defect correction device capable FIG Rukoto to shorten the application time of the correction fluid.
[0009]
[Means for Solving the Problems]
The defect correction method according to the present invention is a defect correction method in which a correction liquid is applied to a defect portion of a pattern on a substrate using an application needle having a flat tip shape , and the defect correction method corrects the defect portion. near by movable its needle the relative longitudinal to the auxiliary member along the needle, after forming the reservoir correction fluid by supplying correction fluid between the tip of coating the needle with the auxiliary member The auxiliary member is moved relative to the base end side of the application needle together with the correction liquid reservoir so that the tip of the application needle is exposed from the correction liquid reservoir, the correction liquid adhering to the tip of the application needle is applied to the defective portion, and the auxiliary member is The correction liquid is continuously applied by repeating the step of moving the correction liquid pool relative to the distal end side of the application needle together with the correction liquid reservoir and bringing the correction liquid reservoir into contact with the distal end of the application needle .
[0010]
Preferably , the application needle and the auxiliary member are lowered, and the auxiliary member comes into contact with the fixing member, so that the auxiliary member relatively moves to the proximal end side of the application needle.
[0011]
Further, defect correction device according to the present invention is a defect correction apparatus for correcting by applying a correction fluid to the defective portion of the pattern on the substrate, board is placed, the XY table movable in a horizontal direction includes a correction fluid application mechanism for applying a correction fluid to the defective portion on the substrate placed on the XY table, a Z table movable correction fluid application mechanism in the vertical direction, correction fluid application mechanism, the supplying a coating needle having a flat portion at the distal end, and an auxiliary member provided movable relative to the vertical I along its needle in the vicinity of the coating needles, the correction fluid between the tip of coating the needle with the auxiliary member Then, the correction liquid supply means for forming the correction liquid reservoir and the auxiliary member are relatively moved upward together with the correction liquid reservoir to expose the flat portion of the application needle from the correction liquid reservoir, and the correction liquid attached to the exposed flat portion is Auxiliary members are corrected after being applied to defective parts Reservoir contacting the reservoir correction fluid is relatively moved to the lower side of the flat portion of the coating needle with those comprising a drive means for supplying correction fluid on the flat portion.
[0012]
Preferably, the driving means includes a positioning actuator having the application needle attached thereto, a slide portion attached to the actuator so as to be slidable, and having an auxiliary member attached thereto, and a stopper which comes into contact with the slide portion and positions .
[0013]
Preferably, the auxiliary member has a plate shape.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a diagram showing the overall configuration of an embodiment of the present invention, FIG. 2 is a diagram showing a paste application mechanism, and FIG. 3 is a diagram showing an application needle portion.
[0015]
In FIG. 1, the correction device is roughly classified into an observation optical system 1 including a paste firing laser unit, a paste application mechanism unit 2 including a needle for applying a conductive paste or defect correction ink, and an apparatus mechanism unit. The control computer 3 for controlling the operation, the XY table 4 on which the work is mounted, the chuck base 5 for holding the work on the XY table 4, and the optical system 1 and the paste application mechanism unit 2 are driven up and down. A Z-axis table 6 and a monitor 7 are provided.
[0016]
The paste application mechanism 2 is configured as shown in FIG. 2, and the positioning actuator 15 and the motor 30 are attached so as to move up and down together with the Z-axis table 6 of FIG. An application needle portion 8 is attached to the distal end portion of the positioning actuator 15. Further, as shown in FIG. 3, a slide portion 19 is slidably attached to the Z-axis table 6 with respect to the positioning actuator 15, and the slide portion 19 is adjacent to the application needle 17 in the vicinity of the application needle 17. The needle | hook or board 18 is attached as an auxiliary member which can move along and adjusts the adhesion state of a paste. Further, a stopper 16 is attached to the positioning actuator 15 so that the slide portion 19 contacts and is positioned.
[0017]
The motor 30 rotates the rotary disk 10. The rotating disk 10 includes a notch 9 in a part thereof, and a plurality of ink tanks 11 to 14 are mounted thereon. Each of these ink tanks 11 to 14 contains a coating paste, a cleaning agent, and the like.
[0018]
FIG. 4 is a view for explaining the operation of the application needle portion, and FIG. 5 is a view showing the state of the application needle portion and the paste according to one embodiment of the present invention.
[0019]
Next, with reference to FIGS. 1-5, the specific operation | movement of one Embodiment of this invention is demonstrated. First, a display substrate (not shown) is attached to the chuck base 5 and placed on the XY table 4. To correct a so-called open defect that lacks a pattern, the XY table 4 is driven, the paste application mechanism 2 is moved to the position of the defect, the paste tanks 11 to 14 are rotated by the rotating disk 10, and an appropriate tank is selected. Thereafter, the coating positioning actuator 15 is moved up and down in the state shown in FIG. At this time, the paste is adhered to the needles 17 and 18 as shown in FIG.
[0020]
Next, the application positioning actuator 15 is lowered, and the needle 18 is brought into contact with the stopper 16 and moved upward as shown in FIG. 4B, whereby the paste in the vicinity of the tip of the needle 17 is pulled up. As shown in (c), the coating is made possible and the Z-axis table 6 is lowered to apply the paste at the correction position.
[0021]
Further, by raising the positioning actuator 15, the needle 18 is relatively lowered and the paste is supplied to the tip of the needle 17 as shown in FIG. 5B, and then the positioning actuator 15 is lowered and the needle 18 is pushed against the stopper 16. By making the contact and move relatively upward, as shown in FIG. Thereby, continuous application | coating of several times-dozens of times can be performed, without going to replenish a paste to a paste tank. However, the continuous number of times varies depending on the paste viscosity, the shape of the needle 18, the angle of the slide portion 19, and the like.
[0022]
As described above, according to this embodiment, by moving the needle 18 as an auxiliary mechanism up and down along the application needle 17, it is not necessary to move the needle 17 to the paste tank in order to replenish the paste. It is possible to perform continuous application several times to several tens of times, and shorten the application time. In addition, the coating thickness can be increased by using a high-viscosity paste.
[0023]
It should be understood that the embodiment disclosed this time is illustrative in all respects and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.
[0024]
【The invention's effect】
As described above, according to the present invention, the auxiliary member is relatively moved up and down along the needle in the vicinity of the application needle having a flat tip shape, so that the correction liquid is continuously applied. No need to move the needle to the correction liquid tank for replenishment of correction liquid , continuous application can be performed several times to several tens of times, not only shortening the application time but also using high viscosity correction liquid By doing, the film thickness of application | coating can be thickened.
[Brief description of the drawings]
FIG. 1 is a diagram showing an overall configuration of an embodiment of the present invention.
FIG. 2 is a diagram showing a paste application mechanism.
FIG. 3 is a view showing an application needle portion.
FIG. 4 is a diagram for explaining the operation of an application needle part.
FIG. 5 is a view showing a state of a coating needle part and a paste according to one embodiment of the present invention.
FIG. 6 is a diagram showing a state of a conventional application needle portion and paste.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Optical system 2 Paste application | coating mechanism part 3 Control computer 4 XY table 5 Chuck stand 6 Z-axis table 7 Monitor 8 Coating needle part 9 Notch part 10 Rotating disc 11-14 Paste tank 15 Positioning actuator 16 Stopper 17, 18 Needle 19 Slide part

Claims (5)

In the defect correction method for applying the correction liquid to the defective portion of the pattern on the substrate using the application needle formed with a flat tip shape, and correcting the defective portion ,
Wherein an auxiliary member to be relative movement in the longitudinal direction of the needle along the needle in the vicinity of the coating needles,
After supplying the correction liquid between the tip of the application needle and the auxiliary member to form a correction liquid reservoir,
The auxiliary member is moved relative to the base end side of the application needle together with the correction liquid reservoir to expose the tip of the application needle from the correction liquid reservoir, and the correction liquid adhering to the tip of the application needle is applied to the defect portion. The correction liquid is continuously applied by repeating the step of applying and moving the auxiliary member relative to the tip side of the application needle together with the correction liquid reservoir to bring the correction liquid reservoir into contact with the tip of the application needle. characterized in that so as to, defect correction method. The said application member and the said auxiliary member descend | fall, and when this auxiliary member contact | abuts to a fixed member , the said auxiliary member moves relatively to the base end side of the said application needle , It is characterized by the above-mentioned. defect correction method. A defect correction apparatus for applying and correcting a correction liquid on a defective portion of a pattern on a substrate ,
The board is placed, XY table movable in a horizontal direction,
Wherein comprising a Z table movable correction fluid application mechanism, and the correction fluid coating mechanism in the vertical direction for applying the correction fluid to said defective portion on the substrate placed to the XY table,
The correction fluid application mechanism is
An applicator needle having a flat portion at its tip,
Auxiliary member which is relatively movable vertically me along the said needle in the vicinity of the coating needle,
A correction liquid supply means for supplying a correction liquid between the tip of the application needle and the auxiliary member to form a correction liquid reservoir; and
After the auxiliary member is relatively moved together with the correction liquid reservoir to expose the flat portion of the application needle from the correction liquid reservoir, and the correction liquid adhering to the exposed flat portion is applied to the defective portion Drive means for supplying the correction liquid to the flat portion by moving the auxiliary member together with the correction liquid reservoir downward to bring the correction liquid reservoir into contact with the flat portion of the application needle. to, defect correction device. The driving means includes
A positioning actuator equipped with the application needle;
A slide part attached slidably to the actuator and fitted with the auxiliary member;
The slide portion comes into contact, characterized in that it comprises a stopper for the positioning, defect correction device according to claim 3. It said auxiliary member is characterized by a plate-like, defect correction device according to claim 4.

Images