JP2007279513A - Defect correction method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To securely correct a defect of a pattern formed on a substrate surface and to shorten the correction time. <P>SOLUTION: A method of correcting a defect part of a pixel of a black matrix formed on the surface of a color filter substrate 6 by coating the defect part with a correcting material 27 includes a stage of fitting a small resin-made piece formed in the same shape with the pixel and having one flat surface to a tip part 23a of a coating needle 23 with the flat surface 25a down, a stage of sticking the correcting material 27 on the flat surface 25a of the small piece 25, and a stage of pressing the small piece 25 against the defective pixel 28a to transfer the correcting material 27. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a method for correcting a defect portion by applying a correction material to a defect portion of a pattern formed on a substrate surface. More specifically, the present invention relates to a defect correction method for surely correcting a defect and reducing a correction time. It is concerned.

  In the conventional defect correction method, for example, in the defect correction method of a color filter, when the defective part of the color filter is removed by laser light irradiation, the diameter of the laser beam is set to a circular correction region including the defective part, and the circular correction is performed. After removing the color filter coating in the area, for example, ink as a correction material is dropped on the upper surface of the circular correction area by an ink discharge device such as an ink jet device, and then the ink is cured and contracted by an ink curing device. (For example, refer to Patent Document 1).

  Another defect correction method is a defect correction method for repairing by forming a conductive film at the disconnection portion of the substrate, and the paste is attached to a needle having a flat tip shape as desired. The conductive film is patterned by bringing the paste into contact with a substrate repair location and applying the paste to a minute portion (see, for example, Patent Document 2).

Furthermore, another defect correction method uses a paste application nozzle that includes a tip portion formed with a flat surface, and a paste hole that contains paste and has an opening in the flat surface of the tip portion. The flat surface at the tip of the paste application nozzle is pressed against the surface of the application object, whereby the paste stored in the paste hole is applied to the surface of the application object (for example, Patent Document 3). reference).
JP 2001-66418 A Japanese Patent No. 2983879 JP 2004-216290 A

  However, in such a conventional defect correction method, the defect correction method described in Patent Document 1 can be applied to the defect correction of the color filter, but for example, for the defect correction of the alignment film of the liquid crystal display element. Could not be applied. That is, the defect of the alignment film of the liquid crystal display element is caused by the poor wettability of the alignment film material due to a local surface state change of the base material, and the alignment film material cannot be applied. Even if the alignment film material for correction is discharged to the defect portion, the alignment film material is repelled, and the defect portion cannot be filled. Therefore, the defect correction method described in Patent Document 1 cannot correct the defects in the alignment film of the liquid crystal display element.

  On the other hand, the defect correction method described in Patent Document 2 is a method in which paste is attached to the tip of a needle formed on a flat tip surface and brought into contact with the defect, and the paste at the tip is transferred to the defect. Therefore, the present invention can be applied to defect correction of the alignment film of the liquid crystal display element. Further, the defect correction method described in Patent Document 3 applies the paste stored in the paste hole of the nozzle by applying the flat surface of the tip of the paste application nozzle to the surface of the application object. Since it is applied to the surface of an object, it can also be applied to the defect correction of the alignment film. However, in any of the defect correction methods described above, if the needle or nozzle is not accurately attached to the defect correction apparatus main body, the flat surface of the tip of the needle or nozzle and the ground surface of the defective portion are not parallel. In other words, both planes cannot be brought into uniform surface contact. In particular, in the defect correction method described in Patent Document 3, since the tip of the nozzle is formed of a hard metal or ore, the processing of the flat surface of the nozzle tip or the attachment of the nozzle to the defect correction device main body is further performed. If it is not performed accurately, the flat surface of the nozzle and the surface of the coating object cannot be brought into uniform surface contact. Therefore, in any defect correction method, there is a problem that the correction material cannot be reliably transferred to the defective portion. Further, if the contact pressure of the needle or nozzle is increased to bring the two flat surfaces into surface contact, the needle or nozzle may be damaged.

  In the color filter defect correction method described in Patent Document 1, the size of the circular correction area is set in accordance with the size of the defect portion of the color filter, so that the size of the defect portion is recognized. Time to set the circular correction area, time to adjust the diameter of the trimming laser beam according to the size of the set circular correction area, time to calculate the ejection amount of the correction material according to the size of the circular correction area There is a problem that the modification time becomes longer.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a defect correction method that addresses such problems and reliably corrects defects and shortens the correction time.

  In order to achieve the above object, a defect correction method according to the present invention is a method for correcting a defect portion by applying a correction material to a defect portion of a pattern formed on a substrate surface, which is formed in the same shape as the pattern. A step of attaching a small resin piece having a flat surface to the tip of the needle with the flat surface down, attaching the correction material to the flat surface of the small piece, and a pattern having the defect portion. And pressing the small piece to transfer the correction material.

  With such a configuration, a small resin piece formed in the same shape as the pattern formed on the substrate surface and flat on one side is attached to the tip of the needle with the flat surface down, and a correction material is applied to the flat surface of the small piece. Then, a small piece is pressed against the pattern having the defect portion to transfer the correction material, thereby correcting the defect portion.

  The small piece attaching step to the tip of the needle includes a tube having both ends open and a thin tip. The needle is filled with liquid resin and the liquid resin is applied to the recess having the same shape as the pattern. The small piece is formed by injecting and curing the liquid resin in a state where the tip of the needle is in contact with the liquid resin. As a result, a liquid resin filled in the needle tube is injected into a recess having the same shape as the pattern from a tubular needle having both ends open and a thin tip, and the tip of the needle is brought into contact with the liquid resin. In this state, the liquid resin is cured, and a small piece is attached to the tip of the needle.

  Further, in the step of attaching the small piece to the tip of the needle, the liquid resin is injected into a recess having the same shape as the pattern, and the tip of the needle made of a bar or wire having a thin tip is formed in the liquid resin. The liquid resin is cured in the contacted state to form the small piece. Thereby, the liquid resin is injected into the concave portion having the same shape as the pattern, and the liquid resin is cured in a state in which the tip of the needle made of a rod or wire with a thin tip is contacted with the liquid resin, Attach a small piece to the tip of the needle.

  The small piece attaching step to the tip of the needle comprises a tube having both ends open and a thin tip, and the liquid resin is discharged onto a flat surface from a needle filled with the liquid resin in the tube. The liquid resin is cured while the tip of the needle is in contact with the liquid resin, and the cured resin is trimmed to the same shape as the pattern to form the small piece. Thus, a liquid resin filled in the needle tube is discharged onto a flat surface from a tubular needle having both ends open and a thin tip, and the tip of the needle is in contact with the liquid resin. To cure the liquid resin. Thereafter, the cured resin is trimmed to the same shape as the pattern to form a small piece, and the small piece is attached to the tip of the needle.

  Further, in the small piece attaching step to the tip of the needle, the liquid resin is discharged onto a flat surface, and the tip of the needle made of a bar or wire having a thin tip is formed in contact with the liquid resin. In this state, the liquid resin is cured, and the cured resin is trimmed to the same shape as the pattern to form the small pieces. As a result, the liquid resin is discharged onto a flat surface, and the liquid resin is cured in a state where the tip of the needle or wire made of a thin tip is in contact with the discharged liquid resin. . Thereafter, the cured resin is trimmed to the same shape as the pattern to form a small piece, and the small piece is attached to the tip of the needle.

  Furthermore, the small piece attaching step to the tip of the needle comprises a tube having both ends open and a thin tip, and the liquid resin is discharged onto a flat surface from a needle filled with the liquid resin in the tube. After the liquid resin is cured, the cured resin is trimmed to the same shape as the pattern to form the small piece, and an appropriate amount of the liquid resin is discharged onto the upper surface of the small piece, and the tip of the needle is applied to the liquid resin. The liquid resin is cured in a state where it is contacted. As a result, the liquid resin filled in the needle tube is discharged onto a flat surface from a tubular needle having both ends open and a thin tip, thereby curing the liquid resin. Thereafter, the cured resin is trimmed to the same shape as the pattern to form small pieces. Further, an appropriate amount of the liquid resin is discharged from the needle onto the top surface of the small piece, and the liquid resin is cured in a state where the tip of the needle is in contact with the liquid resin, and the small piece is attached to the tip of the needle.

  Then, in the step of attaching the small piece to the tip of the needle, the liquid resin is discharged onto a flat surface, and after the liquid resin is cured, the cured resin is trimmed to the same shape as the pattern to remove the small piece. Forming, discharging an appropriate amount of the liquid resin on the top surface of the small piece, and curing the liquid resin in a state where the tip of the needle made of a rod or wire rod having a thin tip is contacted with the liquid resin It is. Thereby, a liquid resin is discharged on a flat surface and the liquid resin is cured. Thereafter, the cured resin is trimmed to the same shape as the pattern to form small pieces. Further, an appropriate amount of the liquid resin is discharged onto the upper surface of the small piece, and the liquid resin is cured in a state where the tip of the needle made of a rod or wire with a thin tip is brought into contact with the liquid resin. Attach a small piece to the tip.

  The small piece attaching step to the tip of the needle includes injecting a liquid resin into a recess having the same shape as the pattern, and a tube having both ends open and a thin tip formed in the liquid resin. The liquid resin is cured to form the small piece with the tip of the needle filled with the correction material having different curing characteristics from the liquid resin inserted until the tip reaches the bottom surface of the recess. is there. Thereby, liquid resin is inject | poured into the recessed part of the same shape as a small piece. Thereafter, the liquid resin is formed of a tube having both ends open and a thin tip, and the tip of the needle filled with a correction material having a different curing property from the liquid resin is inserted into the tube. Insert until it reaches the bottom, and in this state, the liquid resin is cured and a small piece is attached to the tip of the needle.

  The step of attaching the small piece to the tip of the needle is performed on a plane substantially the same as the installation surface of the substrate when correcting the pattern having the defective portion. Thereby, when correcting the pattern which has a defect part, a small piece is attached to the front-end | tip part of a needle | hook on the substantially the same plane as the installation surface of a board | substrate.

  According to the first aspect of the present invention, since the small piece made of resin is attached to the tip of the needle, the flexibility of the resin is used even if the needle is not strictly attached to the defect correcting device body. Thus, the flat surface of the small piece can be brought into surface contact with the surface of the correction region uniformly. Therefore, both the defect correction of the alignment film of the liquid crystal display element and the defect correction of the color filter can be reliably performed. In addition, since the correction material is attached to a small piece formed in the same shape as the pattern and transferred to the pattern having the defect portion, the size of the transfer region of the correction material is always the entire pattern, and the size of the defect portion. Therefore, it is not necessary to adjust the diameter of the trimming laser beam in accordance with the size of the trimming laser beam and calculate the discharge amount of the correction material according to the size of the trimmed defect portion. Further, the correction material can be applied to the entire pattern having a defective portion by a single transfer operation. Therefore, it is possible to shorten the time for correcting the defective portion.

  According to the second aspect of the present invention, the liquid resin is injected into the concave portion using a needle having both ends opened and the tip portion formed narrow and filled with the liquid resin, and the resin is cured. Thus, the small piece can be attached to the tip end of the needle at the same time as the small piece is molded. Therefore, the small piece can be easily attached to the tip of the needle, and the working time can be shortened.

  Furthermore, according to the invention which concerns on Claim 3, the said small piece can be attached to the front-end | tip part end of the needle | hook which consists of a bar or a wire simultaneously with injecting | pouring liquid resin into a recessed part and performing a mold shaping. Therefore, it is possible to easily attach the small piece to the tip of the needle made of a bar or wire.

  Furthermore, according to the invention of claim 4, the liquid resin filled in the tube of the needle on a plane is discharged from a tubular needle having both ends opened and the tip portion narrowed, and the discharged liquid resin The liquid resin can be cured while the tip of the needle is in contact with the substrate, and the cured resin can be trimmed to form small pieces having the same shape as the pattern. Therefore, it is possible to shorten the time for attaching the small piece to the tip of the needle, and it is possible to easily form the small piece.

  According to the fifth aspect of the invention, the liquid resin is cured in a state where the tip of the needle made of a rod or wire is in contact with the liquid resin discharged on a flat surface, and the cured resin is trimmed. Thus, a small piece having the same shape as the pattern can be formed. Therefore, the small pieces can be easily formed.

  According to the invention of claim 6, the liquid resin filled in the needle tube is discharged onto a flat surface from a tubular needle having both ends opened and the tip portion narrowed to cure the cured resin. The trimmed resin can be trimmed to the same shape as the pattern to form a small piece, which can then be attached to the tip of the needle. Accordingly, it is possible to shorten the time for attaching the small piece to the tip of the needle, and the trimming laser beam does not interfere with the needle, making it easier to form the small piece and improving the accuracy of forming the small piece. be able to

  Further, according to the invention of claim 7, after the discharged liquid resin is cured and trimmed to the same shape as the pattern to form a small piece, the small piece is attached to the tip of a needle made of a bar or wire. Therefore, the trimming laser beam does not interfere with the needle, the formation of the small piece becomes easier, and the formation accuracy of the small piece can be improved.

  According to the invention of claim 8, for example, if the small piece is formed of an ultraviolet curable resin and the correction material is a liquid thermosetting resin, the liquid thermosetting resin filled in the tube of the tubular needle is obtained. Defect correction can be performed while supplying the flat surface of the small piece as appropriate. Therefore, even when there are multiple defective parts, it is not necessary to attach the correction material to the flat surface of the small piece by attaching the small piece to the ridge that stores the correction material each time each defect is corrected. can do.

  According to the ninth aspect of the invention, since the small piece is attached to the tip of the needle on the same plane as the installation surface of the substrate, the precision of attaching the small piece to the tip of the needle is improved. Can do. Therefore, the flat surface of the small piece and the surface of the correction area can be brought into close contact with each other, and defect correction can be performed more reliably.

  Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a front view showing an example of the configuration of a defect correction apparatus used directly for carrying out a defect correction method according to the present invention. This defect correction apparatus corrects a defect portion by applying a correction material to a defect portion of a pattern formed on a substrate surface, and includes a stage 1, an observation optical system 2, an illumination optical system 3, and a laser optical system. 4 and a coating device 5 are provided. Hereinafter, the case where the substrate is, for example, the color filter substrate 6 of the liquid crystal display device will be described.

  The stage 1 has a color filter substrate 6 mounted thereon and moves in the X-axis and Y-axis (axis parallel to the surface of the stage 1 and orthogonal to the X-axis) direction. Are driven by being controlled by a control means (not shown). The stage 1 includes a black matrix of the color filter substrate 6 as shown in a partial enlarged plan view indicated by a symbol P ′ in FIG. 1 in the region P outside the installation region 1 a of the color filter substrate 6. A recess 7 having the same shape as the pixel (pattern) is provided. Further, a flange 26 (see FIG. 2E) storing a correction material for the color filter substrate 6 is provided in the vicinity of the concave portion 7.

  An observation optical system 2 is provided above the stage 1. This observation optical system 2 picks up an image of a pixel of the color filter substrate 6 and detects a defective portion such as a foreign substance or a white spot. The observation optical system 2 includes an observation CCD camera 8 for picking up an image and observing the pixel. The half mirrors 9a and 9b and the imaging lens 10 are disposed in the optical system mechanism unit 11, provided at the lower end of the optical system mechanism unit 11, and movable in the direction parallel to the surface of the color filter substrate 6. The lens holder 12 is provided with five objective lenses 13a, 13b, 13c, 13d, and 13e having low to high magnifications in a detachable state.

  Here, the half mirror 9a is for superimposing the optical path of the observation optical system 2 and the optical path of the laser optical system 4 described later on the same optical path, and the half mirror 9b is the optical path of the observation optical system 2 and described later. This is for superimposing the optical path of the illumination optical system 3 on the same optical path. In FIG. 1, reference numeral 17a denotes a reflection mirror.

  Further, the imaging lens 10 cooperates with any one of the objective lenses 13 a to 13 e to form an image of the defective portion of the pixel formed on the color filter substrate 6 on the light receiving surface of the observation CCD camera 8. belongs to. Furthermore, the objective lenses 13a to 13e are for enlarging a pixel image, and the five objective lenses 13a to 13e constitute an objective lens group. The objective lenses 13a to 13e of the objective lens group are selected by moving the lens holder 12 in the X and Y axis directions by motors 14A and 14B driven by control means (not shown). The optical axes of the objective lenses 13a to 13e and the optical axis of the optical path of the observation optical system 2 are made to coincide with each other, and images with different magnifications can be acquired.

  In addition to the motors 14A and 14B, the moving means in the X and Y axis directions include a ball screw 15 for converting the rotational operation of the motors 14A and 14B into a linear motion of the lens holder 12, and a guide rail (not shown). Prepare and configure. Further, an objective lens 13e having a coating device 5 to be described later on the outer surface has the same focal point as the other objective lenses 13a to 13d, and the working distance of the objective lens 13e is the working distance of the other objective lenses 13a to 13d. Since the length is longer, an interval is provided in which the coating needle 23 can freely move between the lower surface of the objective lens 13e and the color filter substrate 6 surface.

  When observing a defective portion using the objective lenses 13a to 13e, the Z-axis moving means 16 is controlled by the control means so that the image planes of the objective lenses 13a to 13e coincide with the surface of the color filter substrate 6. The optical system mechanism unit 11 is moved up and down. In this case, as a matter of course, the positional relationship in the Z-axis direction between the position of the imaging surface of the objective lens 13e and the imaging surfaces of the other objective lenses 13a to 13d is the same as that of the surface of the color filter substrate 6. The other objective lenses 13a to 13d are in positions that do not contact the substrate.

  An illumination optical system 3 is provided in common with the optical path of the observation optical system 2. The illumination optical system 3 illuminates the surface of the color filter substrate 6 and enables the observation CCD camera 8 to image pixels of the color filter substrate 6. A reflection mirror 17b that reflects the illumination light introduced from the outside with an optical fiber to the inside and a field lens 18 for uniformly illuminating the observation area by the observation CCD camera 8 are provided. In FIG. 1, the optical path from the objective lens 13e) to the surface of the color filter substrate 6 is the same as the optical path of the observation optical system 2.

  A laser optical system 4 is provided with a part of the optical path of the imaging optical system in common. This laser optical system 4 trims a defective portion to enlarge a correction area, or cures a correction material applied to the correction area, and trims to emit a pulse wave of, for example, 532 nm or 355 nm for trimming. A laser light source 19 for curing and a curing laser light source 20 that emits a continuous wave of, for example, 355 nm for drying the correction material are provided at the upper end of the optical system mechanism unit 11, and the half mirror 9 c and the aperture adjustment unit 21 are provided. The optical path from the half mirror 9a through the objective lens (object lens 13e in FIG. 1) to the surface of the color filter substrate 6 is the same as the optical path of the observation optical system 2 provided in the optical system mechanism unit 11. It has become. When the curing laser light source 20 that irradiates ultraviolet rays is used, a correction material having ultraviolet curing properties is used.

  Here, the half mirror 9c matches the optical path of the trimming laser light source 19 and the optical path of the curing laser light source 20 provided separately. The aperture adjusting unit 21 regulates the beam shape of the laser beam according to the shape of trimming the defective portion and the size thereof. In this embodiment, an aperture having the same shape as the color filter pixel is provided. ing.

  A coating device 5 is detachably provided on the outer surface of the objective lens 13e. The application device 5 is for applying a correction material to the defective portion, and includes a cartridge 22 and an application needle 23 as shown in FIG.

  The cartridge 22 holds the application needle 23 so as to be movable up and down, and is detachably attached to the objective lens 13e. The application needle 23 is for applying a correction material to the defective part, and is formed of, for example, a glass tube having both ends opened and the tip part formed narrow. The tube is filled with a liquid resin from the rear end, and an appropriate amount of the liquid resin can be discharged from the front end by air pressure. In this case, the tip of the application needle 23 is positioned on the optical axis of the objective lens 13e. The vertical movement of the application needle 23 may be performed by driving an actuator provided in the cartridge 22 or may be performed using air pressure. In addition, the filling of the liquid resin into the tube may be performed from the tip using a capillary phenomenon.

  Next, the defect correction method of the present invention implemented using the defect correction apparatus configured as described above will be described with reference to FIGS. The defect correction method of the present invention is a method of correcting a defect portion by applying a correction material to a defect portion of a pixel of a color filter formed on a substrate surface, and a step of attaching a small piece to a tip portion of a needle, The correction material adhering step and the correction material transfer step to the defective portion.

  The step of attaching the small piece to the tip of the needle is a step of attaching a small resin piece formed in the same shape as the pixel of the color filter substrate 6 to the tip of the application needle 23 with the flat surface down. First, the stage 1 is moved in the X and Y axis directions, and the pixels of the color filter substrate 6 provided in the region P outside the installation region 1a of the color filter substrate 6 as shown in FIG. The tip 23a of the application needle 23 is positioned in the concave portion 7 having the same shape as shown in FIG. At this time, the tube of the application needle 23 is preliminarily filled with, for example, an ultraviolet curable liquid resin 24.

  Next, the application needle 23 is lowered to approach the recess 7, and the liquid resin 24 is injected into the recess 7 from the tip 23 a of the application needle 23 as shown in FIG. 2B or 3 B. Then, as shown in FIG. 2C or FIG. 3C, the liquid resin 24 is cured by irradiating the liquid resin 24 with ultraviolet rays UV in a state where the tip portion 23a of the application needle 23 is in contact with the liquid resin 24. As a result, as shown in FIG. 2D, a resin small piece 25 having the same shape as the pattern and having a flat surface can be attached to the tip 23 a of the application needle 23.

  Next, in the step of attaching the correction material to the small piece, the small piece attached to the tip portion 23a of the application needle 23 on the flange 26 provided in the vicinity of the concave portion 7 by moving the stage 1 in the X and Y axis directions. Position 25. Then, as shown in FIG. 2 (e), the application needle 23 is lowered to attach the small piece 25 to the correction material 27 stored in the ridge 26, and the correction material 27 is attached to the flat surface 25 a of the small piece 25.

  Next, the process proceeds to the correction material transfer stage to the defective part. In the correction material transfer stage to the defect portion, first, the motor 14B of the defect correction apparatus shown in FIG. 1 is driven to move the lens holder 12 in the X-axis direction, and any of the low-magnification objective lenses 13a to 13c. Or one is selected. Further, in order to make the optical axis of the selected objective lenses 13a to 13c coincide with the optical axis of the optical path of the observation optical system 2, the lens holder 12 is moved in the Y-axis direction by the motor 14A as necessary. At the same time, the stage 1 is controlled by the control means (not shown) based on the position coordinate data of the defect portion that has been measured and stored in advance, and is moved in the X and Y axis directions, and the visual field of the selected objective lenses 13a to 13c. The defective portion is accommodated in the inside.

  Next, the pixel of the color filter substrate 6 is imaged by the observation CCD camera 8 and image processing is performed based on the captured image, and at the same time, the optical system mechanism unit 11 is moved up and down so that the image becomes clear. The position of the imaging plane of the selected objective lenses 13a to 13c is adjusted.

  When a defective portion is detected in this way, an image of a pixel having the defective portion (hereinafter referred to as “defective pixel”) is positioned at the center of the observation region of the observation CCD camera 8. At this time, the center of the defective pixel coincides with the optical axis of the selected objective lenses 13a to 13c.

  When the defective pixel is positioned at the center of the observation region of the observation CCD camera 8, the motor 14B is driven to move the lens holder 12 to select the high-magnification objective lens 13d, for example. At the same time, the focus adjustment is performed in the same manner as described above using the image captured by the observation CCD camera 8. Further, the stage 1 is moved so that the defective pixel is positioned at the center of the observation area of the observation CCD camera 8.

  In this state, the trimming laser light source 19 is activated to emit a pulse wave of, for example, 532 nm. This pulse wave is shaped into the same shape as the pixel of the color filter substrate 6 by the aperture adjusting unit 21, and is irradiated to the defective pixel of the color filter substrate 6 through the objective lens 13d. Thereby, the coating film of the color filter of the defective pixel is removed, and the correction area of the defective portion is enlarged to the size of the pixel.

  Next, the motor 14B is driven in the same manner as described above to move the lens holder 12, and for example, the objective lens 13e having the same magnification as the objective lens 13d and having the coating device 5 on the outer surface is selected. In this case, the imaging surface of the objective lens 13e is positioned above the imaging surfaces of the other objective lenses 13a to 13d. Therefore, when the objective lens 13e is selected, the optical system mechanism is selected. The part 11 is moved downward to lower the objective lens 13e. Then, as shown in FIG. 3D, the focus adjustment is performed so that the imaging surface of the objective lens 13e coincides with the surface of the color filter substrate 6 while measuring the sharpness of the image captured by the pixel 28 by the observation CCD camera 8. At this time, since the tip of the application needle 23 is positioned on the optical axis of the objective lens 13e, the small pieces 25 attached to the tip of the application needle 23 are defective pixels as shown in FIG. It will be positioned above 28a. In FIG. 3D, the small piece 25 is shown in a state shifted from the defective pixel 28a so that the defective pixel 28a can be seen. However, as in FIG. It is positioned on 28a.

  Next, as shown in FIG. 2G or FIG. 3E, the application needle 23 is lowered and the small piece 25 is pressed against the defective pixel 28a. Thereby, as shown in FIG. 2 (h) or FIG. 3 (f), the correction material 27 is transferred to the defective pixel 28a.

  Then, while raising the optical system mechanism part 11, the motor 14B is driven, the lens holder 12 is moved, and the said objective lens 13e is switched to the objective lens 13d. Then, after adjusting the focus of the objective lens 13d while measuring the sharpness of the image captured by the pixel 28 by the observation CCD camera 8, the curing laser light source 20 is activated to irradiate the defective pixel 28a with a continuous wave of 355 nm, for example. Then, the correction material 27 transferred to the defective pixel 28a is cured. This completes the defect correction.

  In the above embodiment, the case where the stage 1 is moved in the X and Y axis directions has been described. However, the present invention is not limited to this, and the optical mechanism unit 11 side may be moved in the X and Y axis directions. Moreover, in the said embodiment, a laser beam is irradiated to a defective part, the correction area | region of a defective part is expanded to the same shape as a pixel, and the case where the correction material 27 adhering to the small piece 25 is transferred to the defective pixel 28a is demonstrated. However, the present invention is not limited to this, and when the defective portion is, for example, a pinhole or the like, the correction material 27 may be transferred to the defective pixel 28a without enlarging the defective portion.

  FIG. 4 is an explanatory view showing another example of attachment for attaching a small piece to the tip of the needle. In this mounting example, as shown in FIG. 4A, after injecting, for example, an ultraviolet curable resin as a liquid resin 24 from the dispenser 33 into the concave portion 7 having the same shape as the pixel, as shown in FIG. Both ends of the liquid resin 24 are open and the tip portion 23a is formed thin. The tip portion 23a is, for example, a tube cut obliquely so as to be parallel to the bottom surface 7a of the concave portion 7. The ultraviolet ray UV is irradiated in the state where the distal end portion 23a of the application needle 23 filled with, for example, a thermosetting correction material 27 having a curing characteristic different from that of the resin 24 is inserted until the distal end portion 23a reaches the bottom surface 7a of the concave portion 7. The liquid resin 24 is cured to form the small piece 25. In this case, the correction of the defect is performed by discharging the correction material 27 of the application needle 23 from the tip end portion 23a to adhere to the flat surface 25a on the back side of the small piece 25, and transferring the correction material 27 to the defective pixel 28a. At this time, the correction material 27 is cured by heating, not by irradiation with the ultraviolet rays UV as described above. The tip 23a of the application needle 23 is not limited to the one cut obliquely as shown in FIG. 4B, and may be perpendicular to the central axis of the tube. In this case, a small amount of correction material 27 is ejected from the application needle 23 with the tip 23a of the application needle 23 being inserted into the liquid resin 24 to form a liquid pool at the tip 23a of the application needle 23, and then the liquid state. The resin 24 may be cured to form the small piece 25. As a result, a hole for guiding the correction material 27 from the application needle 23 to the flat surface 25 a of the small piece 25 is formed in a portion corresponding to the tip portion 23 a of the application needle 23 of the small piece 25.

  FIG. 5 and FIG. 6 are explanatory views showing still other attachment examples for attaching the small piece to the tip of the needle. In this mounting example, as shown in FIG. 5 (a), the distal end portion of the application needle 23 is composed of a tube having both ends open and the distal end portion formed narrow, and the tube is filled with, for example, a liquid resin 24 of an ultraviolet curable resin. The liquid resin 24 is discharged from the surface 23a onto the flat surface 34, and the UV light UV is irradiated in a state where the tip 23a of the application needle 23 is in contact with the discharged liquid resin 24 as shown in FIG. The liquid resin 24 is cured. Then, as shown in FIG. 6A, the cured liquid resin 24 is trimmed into a pixel shape, and small pieces 25 are formed as shown in FIG. 6B.

  In this case, it may be performed as follows. That is, after discharging the liquid resin 24 from the tip 23a of the application needle 23 onto the flat surface 34, the application needle 23 is temporarily retracted to cure the liquid resin 24, and then the cured liquid resin 24 is removed. A small piece 25 is formed by trimming into a pixel shape. Then, the retracted application needle 23 is moved forward again to bring the tip 23a of the application needle 23 into contact with the upper surface of the small piece 25. In this state, an appropriate amount of the liquid resin 24 sufficient to join the two is added. Discharge and cure as is. Thereby, when trimming the cured liquid resin 24, the trimming laser beam does not interfere with the application needle 23, so that the pattern-shaped small piece 25 can be easily formed.

  FIG. 7 is an explanatory view showing still another attachment example of attaching a small piece to the tip of the needle. In this mounting example, the application needle 23 is composed of a tube 29 having both ends opened and a tip portion 29a formed narrow, and a cylindrical cover member 30 is placed on the tip end side of the tube 29 with the central axis of the cover member 30 being used. It is aligned with the central axis of the pipe 29 and is provided so as to be able to advance and retreat in the directions of arrows A and B along the central axis of the pipe 29. In the gap 31 between the outer peripheral surface of the pipe 29 and the inner peripheral surface of the cover member 30 A liquid resin can be held.

  In order to attach the small piece 25 to the distal end portion 29a of the tube 29 of the coating needle 23 configured as described above, the coating needle is placed with the cover member 30 positioned at the distal end of the tube 29 as shown in FIG. The tip of 23 is inserted into a tank 32 in which the correction material 27 is stored, and the correction material 27 is sucked into the gap 29 between the pipe 29 and the outer peripheral surface of the pipe 29 and the inner peripheral surface of the cover member 30 by capillary action. Next, as shown in FIG. 2B, the cover member 30 is advanced in the direction of arrow A to the position where the tip 29 a of the tube 29 fits inside the cover member 30, and the correction material 27 held inside the cover member 30. The tip 29a of the tube 29 is positioned inside to prevent drying of the correction material 27 in the tube 29. Thereafter, as shown in FIG. 5C, the cover member 30 is retracted in the direction of arrow B to expose the distal end portion 29a of the tube 29, the distal end portion 29a is positioned in the recessed portion 7, and the correction material 27 in the tube 29 is disposed. Is applied with air pressure in the direction of arrow C, and the correction material 27 is discharged into the recess 7. Then, the correction material 27 is cured in a state where the tip portion 29 a of the tube 29 is in contact with the correction material 27 in the concave portion 7, thereby forming the small piece 25. Thereby, the resin small piece 25 can be attached to the tip of the application needle 23.

  In this case, adhesion of the correction material 27 to the small piece 25 is performed by moving the cover member 30 forward in the direction of arrow A to the position where the distal end portion 29a of the tube 29 is accommodated inside the cover member 30, as shown in FIG. The small piece 25 is buried in the correction material 27 held by the cover member 30. As a result, the cover member 30 is moved back and forth in the directions of arrows A and B at the position of the defective pixel, the correction material 27 is attached to the small piece 25, and the small piece 25 is pressed against the defective pixel to transfer the correction material 27 to the defective pixel. Can be made. Therefore, it is possible to omit the time for moving the application needle 23 between the wrinkles storing the correction material 27 and the defective pixel, and the correction time can be shortened.

  In the above-described embodiment, the case where the application needle 23 is made of a tube having a thin tip portion has been described. However, the present invention is not limited to this, and a bar or wire having a thin tip portion may be used. Good. In this case, the dispenser 33 is used to inject the liquid resin 24 into the recess 7 or to discharge the liquid resin 24 onto the flat surface 34.

  In the above description, the defect correction of the color filter substrate 6 has been described. However, the present invention is not limited to this, and it can be applied to the defect correction of the alignment film of the liquid crystal display element.

It is a front view which shows one structural example of the defect correction apparatus used directly for implementation of the defect correction method by this invention. It is sectional drawing explaining embodiment of the defect correction method by this invention. It is a top view explaining embodiment of the defect correction method by this invention. In the said defect correction method, it is explanatory drawing which shows another example of attachment about the small piece attachment to the front-end | tip part of a needle | hook. In the said defect correction method, it is explanatory drawing which shows another example of attachment about the small piece attachment to the front-end | tip part of a needle | hook, and is a figure which shows the first half part of the small-piece attachment stage to the front-end | tip part of a needle | hook. In the said defect correction method, it is explanatory drawing which shows another example of attachment about the small piece attachment to the front-end | tip part of a needle | hook, and is a figure which shows the second half part of the small-piece attachment stage to the front-end | tip part of a needle | hook. In the said defect correction method, it is explanatory drawing which shows another example of attachment about the small piece attachment to the front-end | tip part of a needle | hook. FIG. 8 is a cross-sectional view illustrating attachment of a correction material to a small piece in the attachment example of FIG. 7.

Explanation of symbols

6 ... Color filter substrate 7 ... Recess 7a ... Bottom of recess 23 ... Application needle 23a ... End of application needle 24 ... Liquid resin 25 ... Small piece 25a ... Flat surface of small piece 27 ... Correction material 28 ... Pixel (pattern)
28a ... defective pixel (pattern having a defective portion)
34 ... Flat surface

Claims (9)

A method of correcting a defective part by applying a correction material to a defective part of a pattern formed on a substrate surface,
A step of attaching a small piece of resin formed in the same shape as the pattern and flat on one surface to the tip of the needle with the flat surface down,
Attaching the correction material to the flat surface of the piece;
A step of pressing the small piece on the pattern having the defect portion and transferring the correction material;
A defect correction method characterized by:   The step of attaching the small piece to the tip of the needle consists of a tube having both ends open and a thin tip. The liquid resin is injected into a recess having the same shape as the pattern from a needle filled with the liquid resin in the tube. 2. The defect correcting method according to claim 1, wherein the small piece is formed by curing the liquid resin in a state where the tip of the needle is in contact with the liquid resin.   In the step of attaching a small piece to the tip of the needle, a liquid resin is injected into a recess having the same shape as the pattern, and the tip of the needle made of a bar or wire having a thin tip is formed in the liquid resin. The defect correction method according to claim 1, wherein the liquid resin is cured in a state of being formed to form the small piece.   The step of attaching the small piece to the tip of the needle consists of a tube having both ends open and a thin tip, and the liquid resin is discharged onto a flat surface from a needle filled with the liquid resin in the tube, The defect according to claim 1, wherein the liquid resin is cured in a state where the tip of the needle is in contact with the resin, and the cured resin is trimmed to the same shape as the pattern to form the small piece. How to fix.   In the step of attaching the small piece to the tip of the needle, the liquid resin is discharged onto a flat surface, and the tip of the needle made of a bar or wire having a thin tip is contacted with the liquid resin. The defect correction method according to claim 1, wherein the liquid resin is cured, and the cured resin is trimmed to the same shape as the pattern to form the small pieces.   The step of attaching the small piece to the tip of the needle consists of a tube having both ends open and a thin tip, and the liquid resin is discharged onto a flat surface from a needle filled with the liquid resin in the tube, After the resin is cured, the cured resin is trimmed into the pattern shape to form the small piece, and an appropriate amount of the liquid resin is discharged onto the upper surface of the small piece, and the tip of the needle is brought into contact with the liquid resin. The defect correction method according to claim 1, wherein the liquid resin is cured in a state.   In the step of attaching the small piece to the tip of the needle, the liquid resin is discharged onto a flat surface, the liquid resin is cured, and then the cured resin is trimmed to the same shape as the pattern to form the small piece. The liquid resin is discharged onto the upper surface of the small piece in an appropriate amount, and the liquid resin is cured in a state where the tip of a needle or wire made of a rod or wire with a thin tip is brought into contact with the liquid resin. The defect correction method according to claim 1.   The step of attaching a small piece to the tip of the needle comprises injecting a liquid resin into a recess having the same shape as the pattern, and the liquid resin comprises a tube having both ends open and a thin tip. The small piece is formed by curing the liquid resin in a state where the tip of the needle filled with the correction material having different curing characteristics from the liquid resin is inserted until the tip reaches the bottom surface of the recess. The defect correction method according to claim 1.   The small piece attaching step to the tip of the needle is performed on substantially the same plane as the installation surface of the substrate when correcting the correction region. Defect correction method described.

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