JP2002071939A - Method of correcting defect in color filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of automatically correcting a white defect and a black defect of a color filter with a relatively simple mechanism. SOLUTION: A defective part of the color filter is recognized with a picture processing mechanism 2. The recognized defective part of the color filter is removed by making a fundamental harmonic or a higher harmonic irradiate it with a laser irradiation mechanism 5. Subsequently, an ink is applied thereto with an ink applying needle of an ink applying mechanism 9. The ink applied thereto is hardened with an ink hardening mechanism 10. An unnecessary part of the ink applied thereto is removed with laser irradiation from the laser irradiation mechanism 5.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for correcting a defect in a color filter, and more particularly to a method for correcting a defect in a black matrix portion and a colored portion of a color filter.

[0002]

2. Description of the Related Art A color filter, which is a component of a liquid crystal display, is formed with a lattice-like pattern (material such as chromium, chromium oxide, resin) and a colored portion called a black matrix. The defects at the stage of forming the black matrix include a black defect in which the black matrix protrudes to the color filter portion (no color at this stage) and a white defect in which a part of the black matrix is missing. In addition, even after coloring, black defects where colors are mixed,
There are white defects with missing colors. Conventionally, a method is employed in which an operator corrects such a black defect and a white defect by using a laser beam while viewing the camera image, or by filling the white defect with ink.

[0003]

However, the conventional method has a drawback that requires much labor and time.

SUMMARY OF THE INVENTION Accordingly, a main object of the present invention is to provide a defect repair method capable of automatically correcting a white defect and a black defect of a color filter with a relatively simple configuration.

[0005]

According to the present invention, there is provided a method for repairing a defect of a color filter containing a resin material, the method comprising the steps of:
Then, the removed portion is irradiated with a harmonic having a wavelength of m or less, and thereafter, the removed portion is applied by contacting the ink attached to the tip of the needle, and the applied ink is cured to correct the ink.

[0006] This makes it possible to easily repair a defective portion of the resin material of the color filter without requiring labor and time.

According to another aspect of the present invention, there is provided a method of repairing a defect of a color filter containing a metal material, wherein the defect of the metal material portion of the color filter is removed by irradiating a fundamental wave of a laser. The ink attached to the tip of the needle is applied by contact, and the applied ink is cured and corrected.

Thus, the defective portion of the metal material of the color filter can be easily corrected without requiring labor and time.

Further, another aspect of the present invention is a method of correcting a defect of a color filter, wherein a defect is removed by outputting a fundamental wave and a harmonic with a single laser according to a use by a material of a defective portion of the color filter. Thereafter, the removed portion is applied by contacting the ink attached to the tip of the needle, and the applied ink is cured and corrected.

[0010] This makes it possible to easily correct a defective portion of the resin material portion or the metal material portion of the color filter as required without requiring labor and time.

[0011]

FIG. 1 is a diagram showing an entire configuration of an embodiment of the present invention. In FIG. 1, the defect repairing apparatus of this embodiment is roughly classified into a laser irradiation mechanism 5 composed of a laser and its optical system, and an ink application mechanism 9 composed of ink for filling in white hole defects and a needle for applying the ink. An ink curing mechanism 10 including a light source and a condenser lens for curing ink, an image processing mechanism 2 for recognizing defects, and a host computer 1 for controlling the entire apparatus. X to be mounted
A Y table 6, a chuck table 7 for holding a work on the XY table 6, and a Z for driving the laser irradiation mechanism 5 up and down.
An axis table 4 and a monitor 8 are provided.

FIG. 2 is a view showing a specific example of the laser irradiation mechanism 5 and the ink curing mechanism 10 shown in FIG. Laser 50
In general, a YAG laser is used as 1 and this laser 5
01, the data laser beam is expanded by the beam expanding mechanism 502, and then the filter 503, the beam splitter 504,
Slit mechanism 505, beam splitter 506, imaging lens 507, beam splitter 508, objective lens 50
9 and is irradiated on the work. Beam expansion mechanism 5
Numeral 02 is provided for correcting a large area defect with a sufficient laser beam diameter and a uniform energy intensity distribution. The laser beam diameter is usually about 2 mm, and is expanded about 3 to 5 times by the beam expanding mechanism 502. Further, by enlarging the laser beam, the energy difference between the center and the periphery of the beam is reduced, thereby fulfilling the above-mentioned role. A CCD camera 511 is provided in association with the beam splitter 506, and the reflected light from the work is imaged.

FIG. 3 shows an example of the slit mechanism. The pixel shape of the black matrix is not limited to a rectangle,
Since it is impossible to correct this by combining rectangles in terms of time and accuracy, a fixed slit similar in shape to a pixel (for example, a 20-times objective lens has a slit 20 times the pixel shape) The defect can be corrected by a single laser irradiation, and the correction time can be reduced and the accuracy can be satisfied.

FIG. 4 is a view showing a slit mounting mechanism. The slit mounting mechanism 600 is for mounting the slit mechanism 505 shown in FIG. 3, and by manually operating the θ-direction movement adjustment knob 601 and the X-direction movement adjustment knob 602, the XY-θ It is movable in the direction. Such an XY-θ moving mechanism may be manual or automatic, and may be of a rotary type or a lateral swing type if a plurality of slits are required.

The type and location of the light source for curing the ink are appropriately selected according to the type of the ink and whether it is necessary to cure the work from the front or back. When the ink is an ultraviolet curable resin, an ultraviolet light source is used, and when the ink is a thermosetting resin, a visible or infrared light source may be used. The installation position is set at the position of the curing light source A in FIG. 2 when irradiating from below the work, and is set to one of the positions of the curing light source B or the curing light source C in FIG. Should be placed at In the case of the B position, it has a role as a light source for recognizing the slit shape, and
Only the slit-shaped portion can be cured.

FIG. 5 is a diagram showing details of the ink application mechanism. In FIG. 5, an ink application positioning cylinder 91 and an ink tank index motor 94 are mounted so as to move together with the Z axis. An ink application needle 92 and an ink level detection sensor 93 are attached to the tip of an ink application positioning cylinder 91, and an ink tank table 98 having a plurality of ink tanks is connected to the tip of an ink tank index motor 94. I have. In the vicinity of the ink tank index motor 94, the ink tank index sensor 95 for detecting the position of the ink tank by the ink tank index plate 97 which rotates with the rotation of the motor, and the ink tank returning to the origin. And an ink tank return-to-origin sensor 96 for detecting the origin.

By processing the tip of the ink application needle 92 into a flat shape or controlling the tip of the ink application needle 92 using the ink level detection sensor 93 to be always at a constant depth from the ink surface. In addition, a certain amount of minute ink can be surely applied to a defective portion. The plurality of ink tanks are appropriately filled with a solvent for preventing each of the RGB and black color tanks and the color from sticking.

FIGS. 6 and 7 are views for explaining a method of specifying a defective pixel by the image processing mechanism 2 shown in FIG. The image processing mechanism 2 specifies a defective pixel by pattern matching and outputs coordinates for positioning. FIG. 6 shows an example of a pixel pattern to be corrected, and FIG. 7 shows a method of registering pattern matching data. First, the registration pattern shown in FIG. 7 is registered as a normal pixel. Pattern matching is performed on a large number of pixels as shown in FIG. 6 based on the registered pattern, and a pattern whose correlation value is equal to or less than a certain threshold value is recognized as a defect. For the positioning, a point where a target pixel has periodicity is used. That is, a pattern around a pixel, such as the pattern shown in FIG. 7, is registered in advance, and positioning is performed based on the relative distance between the position coordinates of the peripheral pattern and the defect coordinates.

FIG. 8 is a diagram showing a method and a flow of correcting a white defect of a black matrix by image processing, and FIG. 9 is a diagram showing a method of extracting a defective portion.

First, the XY table 6 is moved to the defect position based on the defective pixel position data from the preceding inspection apparatus. In this state, a search for a normal pixel registration pattern shown in FIG. 8A is performed, and defective pixels are recognized. When a defective pixel cannot be recognized in the field of view of the CCD camera 511 shown in FIG.
A defective pixel as shown in (b) is detected. When a defective pixel is recognized, information on an area indicated by a broken line shown in FIG. 8B is stored, and as shown in FIG. 9, information on a normal pixel in the same area is compared with, for example, exclusive OR operation. And the area and position of the defect (white defect in this case) can be calculated.

Next, the ink application mechanism 9 is driven to move the ink application needle 92 to the position of the defect, and the ink tank index motor 94 is driven to rotate the ink tank table 98 to select an appropriate tank. After that, the ink application positioning cylinder 91 is moved up and down to make the ink adhere to the ink application needle 92, and the ink is applied to the color filter in an appropriate amount. FIG. 8C shows a state where ink is applied to two places. In order to dry the ink, irradiation with ultraviolet light or other light is performed.

Since the coordinates of the defect position can be recognized at the stage shown in FIG. 8B, the position is moved to the laser irradiation center as shown in FIG. As shown in (e), unnecessary ink is removed and the defect is corrected. If there is a possibility that the area to be applied is widened as shown in FIG. 8 (c ') due to the viscosity of the ink and the like, pattern matching is again performed by image processing at this stage, and defective pixels are detected. The enlarged situation may be confirmed, and unnecessary ink may be removed as shown in FIG. 8 (e ') by performing laser irradiation twice, for example, according to the situation.

In the above description, a method for correcting a white defect has been described. However, since it is the same as the method for correcting a black defect except for the ink application step, it is needless to say that the method can be applied to the correction of a black defect.

Further, in the above description, the case where a white defect exists in the black matrix portion has been described. However, there are various methods for manufacturing a color filter, and the black matrix may be formed last. The fact that the same can be applied in this case will be described below.

FIG. 10 is a view showing the second embodiment, in which the hatched portions indicate the colored portions of the color filters, and the white portions are portions that become black matrices in a later process (uncoated at this time). It is. The steps up to laser irradiation are the same as those described with reference to FIG. That is, FIG.
As shown in (1), the part where the color is missing is recognized as a defect pattern, ink of a color corresponding to the missing part is applied, cured, and then corrected by a laser. The only difference is that, since the portion to be irradiated with the laser is a black matrix portion, the slit shape has a shape as shown in FIG. 11, contrary to FIG. FIG. 12 is a diagram for explaining a processing procedure according to the third embodiment of the present invention. In the above-described embodiment, the correction of the black matrix has been described. However, in the third embodiment, a defective portion after the formation of the black matrix and the colored portion is corrected. FIGS. 12A to 12D show a procedure for correcting a black defect, and FIGS. 12E to 12H show a procedure for correcting a white defect.

FIG. 13 is a flowchart for explaining the operation of the third embodiment. Next, the operation of the third embodiment of the present invention will be described with reference to FIGS. First, based on the defect position data from the inspection apparatus at the preceding stage, defect recognition in the camera field of view and defect correction are performed. That is, the XY table 6 is moved to the defect position based on the data from the preceding inspection apparatus. The image processing mechanism 2 performs pattern matching with a previously registered normal pixel, detects a defective pixel in the field of view, and performs centering to a defect correction position, as shown in FIGS. Subsequently, the laser irradiation mechanism 5 uses a slit (mask) similar to the pixel shape, and collectively cuts the entire pixel as shown in FIGS. 12B and 12F. In this method, the repair time can be reduced as compared with a method of performing laser cutting while adjusting to a defect shape with a small area. However, as shown in FIG.
If there is a white defect in the black matrix portion, it is corrected with its shape.

Next, the color of the defective pixel is determined from the surrounding pixels by the image processing mechanism 2. Then, as shown in FIGS. 12 (c) and 12 (g), the ink is applied to each of the ink application positions obtained by the calculation in the respective colors of R, G and B black. The applied ink is cured by irradiating light from below by the ink curing mechanism 10. If there are multiple defects on the same board,
The above correction operation is repeated. And the last figure 12
As shown in (d) and (h), the remaining ink is removed by washing.

The above-mentioned laser beam is suitably a YAG laser, and the processing by the fundamental wave (1064 nm) is fusing by heat, whereas the processing by the harmonics cuts intermolecular bonds or releases atoms. Or non-thermal processing. Therefore, a pattern such as a black matrix formed of a metal material such as Cr is removed by a fundamental wave, and a pattern formed of a polymer material such as a resin material (for example, a resin black matrix or a colored portion) Are the second harmonic (532 nm) and the third harmonic (35 nm).
5 nm), the fourth harmonic (266 nm) or the like. For this purpose, the light may be removed at the wavelength of each laser depending on the application. For example, with one laser, the fundamental wave and the second harmonic, and the second harmonic and the third harmonic
What is necessary is just to mount the laser which outputs a kind of wavelength.

The embodiments disclosed this time are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

[0030]

As described above, according to the present invention, the defect of the resin-based material portion of the color filter is detected by the laser 532.
removal by irradiating a harmonic with a wavelength of nm or less,
Thereafter, the removed portion is applied by contacting the ink attached to the tip of the needle with the applied ink, and the applied ink is cured and corrected, so that the defective portion of the resin material of the color filter requires labor and time. Can be easily modified without the need.

Further, defects of the metal material portion of the color filter were removed by irradiating a fundamental wave of a laser, and then the removed portion was applied by contacting the ink attached to the tip of the needle with the application. By curing and correcting the ink, a defective portion of the metal material of the color filter can be easily corrected without requiring labor and time.

Further, the defect is removed by outputting a fundamental wave and a harmonic wave according to the application with one laser, and thereafter, the removed portion is applied by contacting ink attached to the tip of the needle, By curing and correcting the applied ink, defective portions of the resin material portion or the metal material portion of the color filter can be easily repaired as required without requiring labor and time.

Moreover, in any case, since a very small amount of ink attached to the tip of the needle can be applied, an appropriate amount of ink can be applied according to the area.

[Brief description of the drawings]

FIG. 1 is a diagram showing an overall configuration of a defect repairing apparatus according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a specific example of a laser irradiation mechanism and an ink curing mechanism shown in FIG.

FIG. 3 is a diagram illustrating an example of a slit shape used in the slit mechanism illustrated in FIG. 2;

FIG. 4 is a diagram illustrating an example of a slit mounting mechanism.

FIG. 5 is a diagram illustrating an example of an ink application mechanism.

FIG. 6 is a diagram illustrating an example of a pixel pattern to be corrected;

FIG. 7 is a diagram for explaining a method of registering pattern matching data.

FIG. 8 is a diagram for explaining a defect repair method according to the first embodiment of the present invention.

FIG. 9 is a diagram for explaining a method of extracting a defective portion.

FIG. 10 is a diagram for explaining a defect repair method according to a second embodiment of the present invention.

FIG. 11 is a diagram illustrating an example of a slit shape according to the second embodiment of the present invention.

FIG. 12 is a diagram illustrating a processing procedure according to a third embodiment of the present invention.

FIG. 13 is a flowchart for explaining the operation of the third embodiment of the present invention.

[Explanation of symbols]

Reference Signs List 1 host computer, 2 image processing mechanism, 3 control computer, 4Z axis table, 5 laser irradiation mechanism, 6 XY table, 7 chuck table, 8 monitor, 9
Ink application mechanism, 10 ink curing mechanism, 91 ink application positioning cylinder, 92 ink application needle, 9
3 Ink surface detection sensor, 94 ink tank index motor, 95 ink tank index sensor, 96 ink tank origin return sensor, 97 ink tank index plate, 98 ink tank table,
501 laser, 502 beam expanding mechanism, 503 filter, 504, 506, 508 beam splitter,
505 slit mechanism, 507 imaging lens, 509
Objective lens, 510 slit light illumination, 511 CCD camera, 512 epi-illumination.

Claims (3)

[Claims] 1. A method of repairing a defect in a color filter containing a resin material, wherein the defect in the resin material portion of the color filter is removed by irradiating a laser with a harmonic having a wavelength of 532 nm or less. A method for repairing a defect of a color filter, characterized in that the applied portion is applied by contacting ink adhered to the tip of a needle, and the applied ink is cured and corrected. 2. A method of repairing a defect of a color filter containing a metal material, the method comprising: removing a defect of a metal material portion of the color filter by irradiating a fundamental wave of a laser; A method of repairing a defect of a color filter, comprising: applying ink that has adhered to a surface of the ink, applying the ink, and curing and correcting the applied ink. 3. A method for repairing a defect of a color filter, comprising: removing a defect by outputting a fundamental wave and a harmonic with a single laser in accordance with a use by a material of a defective portion of the color filter; A method for repairing a defect of a color filter, characterized in that the applied portion is applied by contacting ink adhered to the tip of a needle, and the applied ink is cured and corrected.