JP2010139461A - Visual inspection system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a means capable of easily recognizing where the region is on the monitor screen in observing a defect region on a large substrate using a monitor device for visual inspection, and to provide a visual inspection system including the means. <P>SOLUTION: A visual inspection system includes: a means for accumulating in defect information database information on defect of a pattern acquired with an automatic defect inspection device; a means for accumulating in the defect information database information on defect of a pattern acquired with a visual inspection device; a means for browsing with a monitor device equipped with a visual inspection assisting system the accumulated information on defect of a pattern; a means for displaying in a monitor device equipped with the visual inspection device photographed image of a pattern formed on a substrate to be inspected; and a means for irradiating with a laser pointer a defect region of a pattern formed on the substrate to be inspected based on information accumulated in the defect information database. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a visual inspection system used for observing defects on a large substrate on which a pattern is formed, such as a color filter substrate.

  For color filter substrates and wiring boards used for large displays such as liquid crystal displays and plasma displays, insulating layers, transparent electrodes, black matrix, orientation control ribs, color filters, photo spacers, etc. are sequentially applied as required by the photo method, ink jet It is formed by law. In general, each time the respective members are formed, the formed pattern is inspected by using an automatic defect inspection apparatus without any manual intervention for occurrence of defects.

  If a defect is detected and it is determined that it cannot be repaired, the processing is interrupted at that point and the process is regenerated, but if it is determined that repair is possible, mechanical polishing, laser ablation, The defect repairing device including a repair device corresponding to the detected defect characteristic such as ink dripping is used to repair and repair the defective portion, thereby effectively utilizing resources and improving the manufacturing yield. In most cases, the judgment as to whether or not to repair is based on human power using a visual inspection device.

  When all the members on the substrate are formed and repair processing is completed, it is common to determine whether or not the product can be shipped by performing a final visual inspection called a macro inspection as a shipping inspection. These visual inspections are usually performed by irradiating the product substrate with reflected or transmitted light to check again whether the physically repaired defects have been recovered normally, and there are no oversights such as unevenness in appearance. This is a test to reconfirm whether it has happened using human eyes.

An automatic defect inspection device and a visual inspection device are used in combination, and for defects detected by these devices, the relative position from the reference point on the substrate, appearance features such as shape, concentration, size, etc. Are obtained, categorized and stored in the database. These data are statistically processed and used for process improvement, and can be accessed online via a LAN (Local Area Network). The defect correction device obtains desired information and searches for a defect site to be corrected. It is systematized so that it can be used to select a correction method.
JP 2002-257734 A

In general, in visual inspection, information (position, shape of defect, etc.) related to a target substrate to be inspected is easily separated from a monitor for visual inspection of the target substrate. In general, a visual inspection is performed while preparing a monitor and displaying it as character data on the monitor.
From the displayed character information, the position on the board of the part that was the defect or the original defect can be known as coordinates, but where the actual position is on the board displayed on the observation monitor provided in the visual inspection device Is often not exactly known. In particular, there is a problem that it is difficult to find when the substrate size is large. This may cause a reduction in work efficiency and oversight of defective parts.
Therefore, the present invention provides a means for easily recognizing where the relevant part is on the monitor screen when observing a defective part on a large substrate using a monitor device for visual inspection, and a visual inspection provided with this means. The purpose was to provide a system.

  The present invention achieves such a problem, and at least an automatic defect inspection apparatus, a defect information database, a visual inspection apparatus, a visual inspection support system, a laser pointer, and a laser pointer for inspecting a defect of a pattern formed on a substrate It is a visual inspection system comprising a LAN connected to these, a means for accumulating information on pattern defects acquired by an automatic defect inspection apparatus in a defect information database, and information on pattern defects acquired by a visual inspection apparatus. Means for accumulating in the database, means for browsing information on the accumulated defects of the pattern by a monitor device provided in the visual inspection support system, and a monitor provided in the visual inspection device for an image of the pattern formed on the substrate to be inspected Means for displaying on the apparatus, and defective part of the pattern formed on the substrate to be inspected And on the basis of the defect information data stored in the database, it is obtained by a visual inspection system, comprising: means for irradiating a laser pointer, a.

  According to the present invention, since the defective portion on the substrate is irradiated with the laser, when the pattern image is projected on the monitor device, the defective portion looks brighter than the surroundings, so that it can be easily identified. As a result, even if it is a large-sized board | substrate, the oversight of a defective part is lose | eliminated, the working efficiency of visual inspection improves, and the time which visual inspection requires can be saved significantly.

  As shown in FIG. 1, the visual inspection system according to the present invention includes information on defects detected by a plurality of automatic defect inspection apparatuses 1, 2, 3 and an automatic defect inspection apparatus and visual inspection apparatuses 5, 6 described later. From the defect information database 4 to be collectively managed, the visual inspection devices 5 and 6 mainly including the microscope imaging device, the laser pointers 7 and 7 'for irradiating the defect position, and the visual inspection support system 8 for controlling the laser pointers 7 and 7'. It is configured. The visual inspection apparatus includes a stage (not shown) on which a substrate to be inspected is placed and which can be moved in the X, Y, and Z directions, and can observe the entire substrate to be inspected. The visual inspection devices 5 and 6 include a monitor device (not shown) for displaying an acquired image, and the visual inspection support system includes a monitor device 10 for displaying character information.

  All of the above devices are connected via the LAN 11, and defect information can be stored in the defect information database 4 or information stored in the database can be referred to.

  Automatic defect inspection devices 1, 2, and 3 make full use of pattern recognition technology for image information obtained by imaging an inspected substrate on which various patterns are formed with an imaging device such as a CCD camera or a line sensor. It is a device that automatically detects a defective part by analyzing. Since the image analysis method differs depending on the type of defect to be detected, such as disconnection, chipping, bridge, white drop, black drop, unevenness, mark defect, etc., a plurality of automatic defect inspection apparatuses 1 and 2 corresponding to a large number of defects. , 3 are provided.

  Each of the automatic defect inspection apparatuses 1, 2 and 3 divides the information on the defects detected from the inspected substrate that has circulated into the apparatus itself into the number of detected defects, for example, normal defect information and uneven defect information, Stored in the information database 4. Tables 1 and 2 show examples of the contents of the normal defect information table and the mura defect information table, respectively.

The visual inspection devices 5 and 6 include a stage for mounting a substrate to be inspected to be observed and a moving mechanism for moving the substrate (or a CCD camera equipped with a microscope) to the focal point of the imaging device (or substrate).
(Not shown). Based on the defect information, it is possible to align the vicinity of the target defect and display it on the monitor attached to the visual inspection apparatus. Image acquisition can be reflected or transmitted.

  Although the timing of visual inspection is set as appropriate, the visual inspection support system 8 is a special system that is used when imaging and observing a substrate to be inspected using the visual inspection devices 5 and 6. The visual inspection support system 8 uses the identification code of the substrate to be inspected put in the visual inspection devices 5 and 6, and uses the identification information of the substrate from the defect information database 4 to store the defect information related to the substrate through the LAN. The text information is developed on the attached monitor 10. The display format can be appropriately selected from a list format and a reduced map display.

  The visual inspection support system 8 displays defect information as character information on the monitor 10 to help the observer detect the corresponding actual defect on the monitor screen of the visual inspection apparatus. With reference to the position information on the upper position, the position of the stage on which the substrate to be inspected is mounted or the position of the laser pointer 7 is controlled, and the laser pointer 7 accurately irradiates the defective part. As a result, the visual inspection devices 5 and 6 display an image on which the defective portion is laser-exposed on the attached monitor, so that the observer can easily detect and confirm where the defective portion is. If an electric shutter is installed on the laser light path and blinks, it becomes easier to detect.

  Also, defects detected for the first time by visual inspection can be stored in the defect information database 4 as information related to the defects. This is no different from the automatic defect inspection apparatuses 1, 2, and 3. Such information can be referred to later, and defects can be corrected based on this information. Table 3 shows an example of information stored in the defect information database by the visual inspection apparatus.

It is a figure explaining schematic structure of a visual inspection system.

Explanation of symbols

1, 2, 3 ... Automatic inspection device 4 ... Defect information database 5, 6 ... Visual inspection device 7, 7 '... Laser pointer 8 ... Visual inspection support system 10 ... Second Monitor device 11 ... LAN

Claims (1)

A visual inspection system comprising at least an automatic defect inspection apparatus, a defect information database, a visual inspection apparatus, a visual inspection support system, a laser pointer, and a LAN connected to these, for inspecting defects in a pattern formed on a substrate. And
Means for accumulating information on the defect of the pattern acquired by the automatic defect inspection apparatus in the defect information database;
Means for accumulating information on the defect of the pattern acquired by the visual inspection apparatus in the defect information database;
Means for browsing information on the accumulated defects of the pattern with a monitor device provided in the visual inspection support system;
Means for displaying an imaged image of a pattern formed on the substrate to be inspected on a monitor device provided in the visual inspection device;
A visual inspection system comprising: means for irradiating a defective portion of a pattern formed on a substrate to be inspected with a laser pointer based on information stored in the defect information database.

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