JPH0933395A - Inspection shipping device for view finder color filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection shipping device for view finder color filter in which all kinds of defects can be inspected without manual operation, and only good products can be loaded on a shipping vessel. SOLUTION: This device has a defect inspecting part 100 capable of detecting all kinds of defects, a cutting shipping line 300 for cutting and separating a sheet 120 having a plurality of view finder color filters 110 after defect inspection adhered thereto every view finder color filter 110 pasted, followed by washing, and loading only a prescribed one to a prescribed shipping vessel, and a transfer means 200 for loading the sheet onto the defect inspecting part 100, and transferring it from the defect inspecting part 100 to the cutting shipping line 300. It also has a control means 160 for operation-controlling the defect inspecting part 100, the transfer means 200, and the cutting shipping line 300 in relation.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for automatically inspecting and shipping appearance defects of a viewfinder color filter, and more particularly, to a plurality of viewfinder color filters provided on one sheet in a manufacturing line. The present invention relates to a device capable of carrying out an appearance inspection of the manufactured product and cutting it into color filters for each viewfinder, and then mounting only non-defective products compatible with the appearance inspection into a shipping container.

[0002]

2. Description of the Related Art Conventionally, as a visual inspection method for a color filter for a viewfinder, a human visual inspection method using a light projector and a microscopic inspection method for fine defects that are difficult to visually inspect have been used. . However, in recent years, for the viewfinder-color filter, higher quality, smaller size, and mass production have been increasingly demanded. With the improvement of quality and miniaturization, it is increasingly required to detect even fine defects, and it is necessary for humans to perform conventional visual inspection using a light projector or a microscope. Due to problems in difference and reproducibility, automated inspection methods that are not manual are required. An automated inspection method has been demanded even for mass production. Also, in the color filter for the viewfinder, it is difficult to inspect all kinds of defects because almost the entire front and back surface of the product is the inspection target area, and all the front and back defects can be inspected by one inspection device. It has been desired to detect defects in a state of being as compact as possible, and it has been demanded to deal with such defects. Further, the color filter for the viewfinder is small in size and difficult to handle, and the product may become soiled or damaged if it is manually handled. Therefore, an inspection and shipping device that can perform inspections and shipments without human intervention is required. Came.

[0003]

Under these circumstances, in response to the mass production of color filters for viewfinders, it is possible to detect all kinds of defects on the front and back sides of the color filters for viewfinders without human intervention. There has been a demand for an inspection / shipment apparatus that can be carried out at once by a compact automatic visual inspection unit and that can be transferred to a shipping container or the like when it is determined that the product is good. INDUSTRIAL APPLICABILITY The present invention is capable of detecting defects of all kinds of color filters for viewfinders without human intervention, and has a means for transferring a product determined to be a non-defective product to a shipping container without human intervention. It is intended to provide an automatic defect inspection and shipping device for a color filter for a finder.

[0004]

SUMMARY OF THE INVENTION An inspection and shipping apparatus for a viewfinder color filter according to the present invention detects a defect for each viewfinder color filter on a sheet having a plurality of viewfinder color filters provided on its surface. It is an inspection and shipping device for the viewfinder color filter that cuts and separates each color filter for each viewfinder after the defect inspection, and mounts only the desired one on the shipping container according to the defect inspection result. A sheet having a plurality of color filters for viewfinders mounted thereon is mounted on a transparent holding plate on an XY stage whose XY drive is controlled, and a color filter for each viewfinder is provided by using transmission illumination means and / or reflection illumination means. It is obtained by taking an image with a pixel dividing element such as a CCD element for each A defect inspection unit that detects a defect by image-processing a signal by an image processing unit, and at least a sheet having a plurality of defect-inspected color filters for a viewfinder is cut and separated for each viewfinder color filter. A sheet with a cut shipping line that cleans each separated viewfinder color filter and mounts only the specified items into a specified shipping container, and multiple viewfinder color filters before inspection. And a transfer means for transferring a sheet having a plurality of viewfinder color filters, which have been inspected by the defect inspection section, to a cutting and shipping line, And a control unit for controlling the operation in association with the inspection unit, the cutting and shipping line, and the transfer unit. Is shall. The defect inspection section is characterized in that it is provided with an observing means such as a microscope for observing the viewfinder color filter on the transparent holding plate by using transmission or reflection illumination means. Further, the defect inspection unit in the above is to mount a sheet having a plurality of viewfinder color filters on a holding plate with the colored surface facing upward, and when mounting the sheet on the holding plate, On the colored surface side of the color filter for the viewfinder, facing the color filter for the viewfinder, a first image pickup means composed of a pixel dividing element such as a CCD and a color for the viewfinder on the image receiving surface of the first image pickup means. First image forming means for forming an image of a filter, and first illumination for forming a specularly reflected light image on the first image forming means by vertical epi-illumination on a color filter surface for a viewfinder. The color filter for the viewfinder is provided with CC means facing the color filter for the viewfinder on the non-colored surface side.
Second image pickup means composed of a pixel dividing element such as D, second image forming means for forming an image of the viewfinder color filter on the image receiving surface of the second image pickup means, and vertical incident on the viewfinder color filter surface. Second illumination means for illuminating and forming a transmitted light image on the first imaging means by the first imaging means, and non-colored surface side of the viewfinder color filter are reflected and dark-field illuminated to scatter scattered light. A second illuminating means for forming an image on the second image pickup means, illuminating the color filter for the viewfinder through the transmission dark field, and forming an image of the diffracted light or scattered light on the first image pickup means; and image processing The means performs image processing on the image signal picked up by each image pickup means. Then, in the above, the first illuminating means uses the light from the first light source for the viewfinder by the first image forming means via the first half mirror located between the first image forming means and the first image forming means. The second illuminating means is an illuminating means that vertically illuminates the color filter surface and forms an image of the specular reflection light on the first imaging means by the first imaging means. The light from the two light sources is vertically incident on the color filter surface for the viewfinder by the second image forming means and the second half mirror between the second image forming means and the second image forming means. It is characterized in that it is an illumination means for forming an image of the transmitted light image on the first imaging means by the first imaging means, wherein the third illumination means is a ring type light source.
The non-colored surface side of the viewfinder color filter is subjected to reflective darkfield illumination, and the viewfinder color filter is subjected to transmitted darkfield illumination.

Further, the inspection / shipment apparatus for the color filter for the viewfinder of the present invention is provided with the information recording medium for storing the inspection result information of the sample obtained by the image processing means, and the XY stage, The image processing means and the transfer means are associated with each other and are controlled by a control means that controls the operation. Based on the inspection result information of the sample of the information recording medium, the control means determines that the sample is defective. It is characterized in that the X and Y stages are controlled so that the exposed portion enters the visual field of the observation means, and the inspection result information of the sample of the information recording medium is changed according to the result of observing the observation visual field. It is characterized by that. Also, the cutting and shipping line in the above is
Based on the inspection result information of the sample obtained by the image processing means or the inspection result information stored in the recording medium, which is changed according to the observation result, only the predetermined sample is loaded in the shipping container. It is characterized by being controlled by a control means.

In the defect inspection section of the inspection and shipping apparatus of the present invention, the white defect on the colored surface side is formed by forming an image on the first image pickup means by the first illumination means, the second illumination means and the third illumination means. , Black defects can be detected, and defects such as stains and scratches on the glass surface can be detected by forming an image on the second image pickup means by the third illumination means, and finally, from the first image pickup means and the second image pickup means. The resulting image signal enables detection of all types of appearance defects of the viewfinder color filter.
Here, in dark-field illumination, the optical axis of the illumination light does not coincide with the optical axis of the light-receiving portion of the imaging means, and in bright-field illumination, the optical axis of the illumination light coincides with the optical axis of the light-receiving portion of the imaging means. I am trying. The first illuminating means and the second illuminating means are reflective bright field illumination and transmissive bright field illumination, respectively. The cross section of the colored pixel portion of the viewfinder color filter, which is the sample, is generally as shown in FIG. 9B, and the sample is held transparent with the colored layer side (colored surface side) facing up. Place on a board and inspect. Incidentally, FIG. 9A is a plan view of the color filter for the viewfinder.

Further, both the white defect and the black defect of the color filter for the viewfinder can be detected by the transmitted bright field illumination and the reflected bright field illumination. In the present invention, the dark field illumination is also used. ing. Imaging is performed using transmitted dark field illumination and reflected dark field illumination, and the image signal obtained by the image processing is processed to improve the sensitivity of defect detection as compared with the case of imaging using only bright field illumination. Since the optical axis of the transmitted dark field light does not coincide with the optical axis of the light receiving portion of the image pickup means, the light transmitted by the dark field illumination to the light receiving portion is the light transmitted through the opening portion of the periodic pattern or the substantially periodic pattern portion. Since it is not incident on, only the diffracted light or scattered light is detected, and the S / N becomes larger than that in the case of the transmitted bright field. Similarly, with respect to the reflected dark-field light, almost only scattered light is detected, and the S / N becomes large as compared with the case of the reflected bright-field light. Therefore, when the image is captured using the dark field light alone, the S /
It goes without saying that N is improved. Even when the image is captured by using the dark field light and the bright field light at the same time, the S / N ratio is improved as compared with the case of using the bright field light alone. In the defect inspection section, the reason why the non-colored surface side of the viewfinder color filter is reflected and dark-field illuminated is that when the sample viewfinder color filter is placed on a transparent holding plate, the backside specular illumination image is Because you can't get
When the side of the sample viewfinder color filter is held and the non-colored surface side is specularly illuminated, the reflectance varies depending on the part of the sample viewfinder color filter, so the imaging is divided into multiple times. On the other hand, when the reflection dark-field illumination is used, the imaging is required only once, and the inspection tact can be shortened. Further, when an attempt is made to inspect the colored surface side by reflection dark-field illumination, the projection defect and the ITO pinhole defect as shown in FIG. 8B have different illumination angles at which the defect can be detected, which is not suitable for automatic inspection. The colored side should be illuminated with specular light.

In the defect inspection section of the inspection and shipping apparatus of the present invention, a sheet having a plurality of viewfinder color filters is placed on a transparent holding plate or the like with the colored surface side facing up. , The front and back of the color filter are illuminated and images are taken for each viewfinder color filter. A sheet with multiple viewfinder color filters is usually XY with a holding plate.
The position is controlled on a drive-controllable stage. Specifically, as shown in FIG. 2, the defect inspection unit of the inspection and shipping apparatus of the present invention vertically illuminates the light from the light source 105 through the half mirror 108 onto the viewfinder color filter surface by the lens 103. It has an illuminating means for forming a specularly reflected light image of the light on the camera 101 by the lens 103. The light from the light source 106 is vertically incident on the viewfinder color filter surface by the lens 104 via the half mirror 109. It has a transillumination means for forming an image of the light from the illuminated bright field illumination on the camera 101 by the lens 103. Then, the light source 107
A diffracted light or scattered light by the transmitted dark field illumination is formed by the camera 101, and a scattered light by the reflected dark field illumination by the light source 107 is formed by the camera 102. CCD as the imaging means
An image pickup camera using a pixel dividing element such as an element is particularly preferable, which has an electronic shutter and can adjust the exposure time. Examples of the light source of the illumination means include a xenon light source and the like, but the light source is not particularly limited thereto. An annular (ring-shaped) light source with a hole larger than the sample is used as a light source for reflecting dark-field illumination on the non-colored surface side of the viewfinder color filter and at the same time for transmitting viewfinder color filter. It is suitable for both reflective dark field illumination and transmissive dark field illumination, and in the case of this shape, the light from the second light source is between the first image pickup means and the second image formation means (lens system). Through the second half mirror, the second image forming means (lens system) vertically illuminates the color filter surface for the viewfinder, and the transmitted light image is first image forming means (lens system) by the first image forming means. A second transmitted illumination means for forming an image on the
Can be easily combined. Usually, a ring type fiber light source is used.

The image processing means in the defect inspection section of the inspection / shipment apparatus for a color filter for a viewfinder according to the present invention performs first-order or second-order differentiation of an image signal obtained by image pickup in the X direction or the Y direction of a pixel. Due to
The defect is detected by performing a highlighting process such as obtaining a signal change and identifying a defect. As the defect detection process, the image signal is illuminated by transmission illumination and / or reflection illumination, and the video signals captured by the first and second image capturing means (cameras) enter the image processing device, and the defect is detected by performing enhancement processing or the like. However, an example of the emphasis process for defect detection will be described below with reference to FIG. 7. In order to simplify the explanation, in the case of automatically inspecting a sample by transparent bright-field illumination, that is, in FIG. 2, the light source 106 is turned on, and vertical illumination is performed from the non-colored surface side of the viewfinder color filter 110. Image processing in the case of capturing an image with 101 will be described with reference to FIG. 7. First, the same portion of the sample is imaged a plurality of times by the imaging means to obtain an image signal, and the obtained image signals for a plurality of times are integrated and averaged. This is because the light transmittance distribution as shown in (a) of FIG. 7 is obtained for the portion including the defective portion, but the video signal from the image pickup apparatus has the pattern illumination unevenness and the image pickup surface as shown in (b). Slow signal change (shading) due to uneven sensitivity of the image and random noise generated in the video signal circuit,
And it corresponds to a signal that includes a local change of the signal due to dust adhering to the optical system, at the same location, imaged by the imaging means a plurality of times to obtain an image signal, The obtained image signals for a plurality of times are integrated and averaged. As a result, when the number of additions is N as shown in (c), the ratio of random noise is 1 / N ^1/2 . Where A1, B1, A2, B
Reference numeral 2 indicates a defective portion, and C indicates a local change of the signal due to dust or the like attached to the optical system. Then, by slightly shifting the image pickup position and similarly performing integration and averaging, a signal (d) obtained by slightly displacing the signal (c) can be obtained. When the difference signal is obtained, it becomes as shown in (e), and the signal component that does not change due to the gradual signal change (shading) or the movement of the imaging position is removed. Here, only the signal component due to the change in light transmittance and the reduced random noise component remain, but when the signal (e) is further subjected to subtraction or differentiation of the neighborhood average value, , The gradual signal change (shading) component is also removed, and as a result,
It can be seen that in the obtained signal (f), only the portion corresponding to the defective portion locally changes and is emphasized.
For binarization by slice processing, the signal (f)
Is processed at a predetermined slice level SL, and only the defective portion is judged and binarized. Incidentally, FIG. 7 (e)
The type of defect (white defect, black defect) can be identified by the order of signal inversion in the defect portion in. In addition, here
White defects refer to pinholes or pattern defects in the colored pattern part, and black defects refer to extra colored parts or light-shielded parts other than the predetermined pattern in the colored pattern part, and also stains and scratches on the glass part. It is detected as a black defect. The above-described processing is performed for both the image obtained by the transmission dark-field illumination of the sample colored surface and the specular reflection, and the image obtained by the reflection dark-field illumination of the non-colored surface of the sample, and the transmission bright-field imaging. Applicable.

As an example, a defect in which the video signal level is lower than that of the surroundings due to the lack of the outer peripheral portion of the substrate is detected by the imaging camera
When an image is formed over the light receiving element of the D area sensor and three pixels in four directions, sum-of-products calculation is performed on the image information as a smoothing process using a filter as shown in FIG. When the pixel of interest is at the center, the product-sum calculation method is the image data group F (X _ij obtained as a result of the product-sum calculation of the image data group f (x _ij ) using the filter shown in FIG. 8B. ) Is shown in FIG.
It becomes as shown in (c). In the differential processing, for example, the smoothed image data obtained by the smoothing processing for three pixels,
Shift to the left and obtain the primary differential image data by subtracting the image data before the shift from the shifted image data for each pixel. Then, the primary differential image data is binarized at a predetermined slice level, and the inspection is performed. By masking the non-target portion, it is possible to detect only defects in a predetermined area. Defects of different sizes are smoothed by local averaging of the number of pixels corresponding to the respective sizes, and the smoothed image is subjected to the first-order differentiation, and the first-order differentiated image is binarized at a predetermined slice level to be inspected. Only the defects can be detected by masking the other parts.

[0011]

With the above-described structure, the inspection / shipment apparatus for the viewfinder color filter according to the present invention can perform all kinds of appearance defect inspections in one defect inspection section without human intervention. Only the shipping container can be mounted in the shipping container, and the mass production can be supported. Specifically, the defect inspection section, the transfer means,
By having a cutting and shipping line and a control means for associating and controlling these operations, it is possible to automate the inspection and shipment of the manufactured color filter for viewfinder, and after the inspection, it is judged as a good product. It is possible to transfer only items to shipping containers without human intervention. The defect inspection unit is equipped with an observing means such as a microscope for observing the color filter for the viewfinder on the transparent holding plate by using the transmissive or reflective illuminating means. It enables elimination of false inspection defects. Further, it is equipped with an information recording medium for storing the inspection result information of the sample obtained by the image processing means, the inspection result information can be changed, and only the desired one is mounted in the shipping container. Is possible. Further, the defect inspection unit can detect with high sensitivity by using dark field illumination, and by arranging the illumination means and the image pickup means on the front and back sides respectively as described above, Defects can be detected at once. Further, by using the ring type light source, the transmission dark field illumination to the colored surface side image pickup means and the reflected dark field illumination to the non-colored surface side image pickup means are achieved by one light source, and the colored surface side image pickup means is achieved. The transparent bright-field illumination and the image pickup means can be easily arranged to make the whole compact.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a color filter inspection and shipping device for a viewfinder according to the present invention will be described below with reference to the drawings. FIG. 1 is a schematic view of the apparatus in the embodiment. In FIG.
100 is a defect inspection unit, 101 and 102 are imaging cameras, 1
10 is a color filter for viewfinder, 120
Is a sheet, 130 is a holding plate, 140 is an X, Y stage,
141 is an X and Y stage control device, 150 is an image processing device, 160 is a host computer (control unit), 161 is a host computer monitor, 180 is an information recording medium,
200 is a transfer device (robot), and 300 is a cutting and shipping line. The viewfinder color filter inspection / shipment apparatus is a viewfinder color filter inspection / shipment apparatus having a defect inspection unit 100, a transfer device (robot) 200, and a cutting / shipping line 300, and was manufactured in the manufacturing process. A sheet on which a plurality of viewfinder color filters are attached is inspected by the defect inspection unit 100 for each viewfinder color filter, and sent to a cutting and shipping line, and only the desired product corresponding to the inspection result is shipped. To be installed on.

In the defect inspection section 100 of the apparatus of the present embodiment, the image of each viewfinder color filter 110 picked up by the image pickup cameras 101 and 102 is subjected to image processing by the image processing apparatus 150 to find a defect. To be detected. The inspection result information is recorded and saved in the information recording medium 180 via the host computer 160, and the host computer 160 causes the X, Y stage control device 141 to operate.
To control the X, Y stage 140 so that the portion determined to be the defect of the sample is in the visual field of the microscope observing means based on the inspection result information of the information recording medium 180. The observer needs the inspection result information recorded in the information recording medium 180 in order to observe the inside of the visual field of the microscope and confirm whether or not there is a defect at a portion determined to be a defect and remove the pseudo defect. If it is correct, change it. Then, based on the inspection result information recorded on the information recording medium 180,
The host computer 160 uses the sheet 1 which is the inspection object.
Color filter 110 for each viewer in 20
Information indicating whether the product is a good product or a defective product is sent to the shipping and loading robot of the cutting and shipping line 300 shown in FIG.

FIG. 4A shows a transfer device (robot) 20.
0 and the flow (arrow) of the sheet 120 having a plurality of viewfinder color filters 110 attached thereto, and FIG. 4B shows a sample viewfinder color filter 110 provided with a plurality of faces. Sheet 12
0 from the cassette 201 to the holding plate 130,
FIG. 3 is a schematic configuration diagram of a transfer device (robot) 200 for transferring from the to the cutting and shipping line 300. A sheet 120 on which a plurality of viewfinder color filters 110, which are samples brought in from the manufacturing process, are attached.
Is a transfer device (robot) 200 from the cassette 201 or the like.
Are transferred to the holding plate 130. A sheet 120 having a plurality of viewfinder color filters 110 attached thereto has a structure in which the viewfinder color filters 110 are arranged in order, for example, as shown in FIG. Defect inspection is performed. After inspecting all the color filters 110 for viewfinder,
20 is transferred to the cutting and shipping line 300 by the transfer device (robot) 200. In this case, the sheets 120 are temporarily transferred to a cassette provided on the cutting and shipping line 300 side, and then processed one by one.

FIG. 5A shows the cutting and shipping line 3 shown in FIG.
00 is a diagram showing a schematic functional configuration of the device 00, and FIG. 5B shows a cutting and shipping line 300.
It will be explained according to the following. In FIG. 5, 310 is a roller, 32
0 is a table with an adsorber, 321 is a suction cup, 330 is a cutting part, 3
Reference numeral 40 is a water jet jet, 350 is a cleaning unit, 360 is a shipping and loading robot, and 370 is a shipping container. The sheets 120 to which the inspected color filters 110 for the viewfinder are provided on a plurality of surfaces are conveyed one by one by the roller 310, and the back surface is adsorbed and fixed at a predetermined position of the adsorber-equipped base 320, and the cutting unit 330 Using the high-pressure water jet 340, after cutting each color filter 110 for the viewfinder, it is washed in the cleaning unit 350, and only the color filter 110 for the viewfinder which is judged to be a good product by the inspection result is shipped. The shipping container 370 is handled by the loading robot 360 without human intervention.
Transferred to. The table 320 with the suction device is a table for fixing the sheet 120 on which the inspected viewfinder color filters 110 are plurally attached, and the suction cup 321 fixes the sheet at a position corresponding to each viewfinder color filter 110. Therefore, each viewfinder color filter 110 is cut and processed,
Even if the color filter 110 is cleaned by the cleaning unit 350, the color filters 110 do not come apart and do not collide with each other and are not damaged. Then, the positional relationship corresponding to the inspection result is maintained. Cutting part 330
Is an inspected color filter for viewfinder 1
A sheet 120 having a plurality of impositions 10 is cut and processed using a high-pressure water jet 340. While flowing the water jet 340, the nozzle is driven vertically and horizontally with respect to the in-plane direction of the sheet 120. Make a cut. Cleaning unit 35
Reference numeral 0 denotes a cleaning process for the viewfinder color filter 110 after cutting, which is performed by washing glass powder and the like generated during cutting with water. Shipping container 370
Is a container for transferring the viewfinder color filter 110 determined to be a non-defective product for shipment. From the washed viewfinder color filter 110,
Only those that are judged to be non-defective by the inspection result are transferred to this container by the shipping and loading robot 360.

The host computer (control unit) 160 is
Defect inspection section 100, transfer means 200, cutting and shipping line 3
00 is associated with each other to control the operation. As described above, the entire apparatus is controlled so that only the products which are judged to be non-defective by the defect inspection unit 100 can be mounted in the shipping container 310.

FIG. 2 shows a schematic structure of the defect detection section of the defect inspection section 100. In FIG. 2, 101 and 102 are imaging cameras, 103 and 104 are lenses, and 105 and 10.
6 and 107 are light sources, 110 is a color filter for viewfinder, 108 and 109 are half mirrors, 130
Is a holding plate, 150 is an image processing device, and 140 is an XY stage. Viewfinder color filter 11
0 is placed on the holding plate 130 with the colored surface up,
The holding plate 130 is mounted on the XY stage 140.
The image pickup cameras 101 and 102 used CCD area sensors with variable exposure times. The lens 103 is adjusted so that the image of the colored surface of the sample viewfinder color filter 110 is formed on the image receiving surface of the image pickup camera 101, and the lens 104 is the non-colored surface of the sample viewfinder color filter 110. Image of the camera 10
It is adjusted so as to form an image on the two image receiving surfaces. Light source 10
Numeral 5 specularly illuminates a viewfinder color filter 110, which is a sample, through a half mirror 108 and a lens 103. The light source 106 illuminates the sample-viewer color filter 110, which is a sample, through the half mirror 109 and the lens 104. Light source 107
Uses a ring-type fiber light source to illuminate a color filter 110 for a viewfinder, which is a sample, with a transmitted dark field illumination and a non-colored surface side with reflected illumination.

FIG. 3 is a view showing the schematic arrangement of the observation means of the defect inspection section 100. In FIG. 3, 110 is a color filter for a viewfinder, 130 is a holding plate, 140
Is an X, Y stage, 401 is an imaging camera, 402 is a monitor, 410 is a lens system (microscope), and 421 and 422 are light sources. An observing unit is provided at a position different from the defect detecting unit described above, and a lens system (microscope) 410 is provided based on the information recorded in the information recording medium 180 at the position determined to be the defective position by the defect detection. The image of the imaging camera 401 taken through the monitor 402 is observed on the monitor 402, and the defect inspection information of the information recording medium 180 is changed by the observation so as to eliminate the pseudo defects. The monitor 40
2 and the host computer 161 may be used in combination.

The image pickup method in this apparatus will be briefly described below with reference to FIG. When the viewfinder color filter 110, which is a sample, is transmitted and bright-field illuminated for imaging, the light source 106 is turned on, reflected by the half mirror 109, condensed by the lens 104, and transmitted through the viewfinder color filter 110. It is illuminated, and the transmitted light is condensed by the lens 103 to form an image on the light receiving surface of the image pickup camera 101 to pick up an image. When the color filter 110 for the viewfinder is illuminated with dark field illumination, the light source 1 is used.
07 is turned on to illuminate the viewfinder color filter 110 through the transmission dark field, and when the viewfinder color filter 110 has a minute white defect, the diffracted light is condensed by the lens 103 and is formed on the light receiving surface of the image pickup camera 101. Image and image. Then, for imaging with the specular illumination of the colored surface of the viewfinder color filter 110, the light source 105 is turned on and the half mirror 108 is turned on.
The sample colored surface is specularly reflected and illuminated by the lens 103, and the reflected light is imaged on the light receiving surface of the image pickup camera 101 by the lens 103 to pick up an image. Further, in the imaging by the reflection dark-field illumination on the non-colored surface side of the viewfinder color filter 110, the light source 107 is turned on to illuminate the sample non-colored surface with the reflection dark-field illumination, and the scattered light due to the unevenness of the surface of the sample 104 To form an image on the light-receiving surface of the image pickup camera 102 and take an image.

A method of detecting various defects in this apparatus will be briefly described below with reference to FIG. The entire surface of the viewfinder color filter 110, which is a sample, is covered by the light source 106.
And the transmission dark field illumination by the light source 107, and the image is taken by the imaging camera. As shown in FIG. 9 (a), the color filter 110 for the viewfinder is generally divided into three areas, that is, a colored pixel portion, an outer peripheral light-shielding portion, and an outermost peripheral transparent portion, and the transmittance is different for each area. The exposure time was adjusted by the electronic shutter of the camera in accordance with the transmittance of each area of the color filter 110, the desired area was photographed, the defect was detected in each desired area, and the defect was detected in the entire area. As a result, white defects and black defects on the colored surface side were detected. The image processing for detecting defects is as described above. Then, the light source 105
Then, the color filter 110 for the sample viewfinder was directly illuminated downward through the half mirror 108, and the reflected light image was formed on the image pickup camera 101 by the lens 103 to detect a defect. Thus, defects such as stains and scratches on the colored surface side were detected. The image processing in this case is also as described above. Next, the entire surface of the sample viewfinder color filter 110 was illuminated with transmitted light and reflected dark field by the light source 107, and the scattered light was imaged by the imaging camera 102 to detect defects. As a result, defects such as stains and scratches on the non-colored surface side, mainly on the glass surface, were detected. From the above, all kinds of appearance defect inspection of the color filter for the sample viewfinder could be automatically performed almost at one time only with this device. In the above, when the light source 105 is turned on and the reflected light image is taken by the camera 101 and the transmitted light image is taken by the camera 102, the operations are performed in parallel.

[0021]

EFFECTS OF THE INVENTION With the above-mentioned structure, the inspection / shipment apparatus for color filters for viewfinders according to the present invention can be used for all kinds of external appearances including stains and scratches on the front and back of the color filters for viewfinders without human intervention. It is possible to automatically inspect for defects and select only non-defective products and mount them in shipping containers.

[Brief description of drawings]

FIG. 1 is a schematic view of an inspection and shipping device for a color filter for a viewfinder according to an embodiment.

FIG. 2 is a diagram showing a configuration of an image pickup unit of a defect inspection unit.

FIG. 3 is a diagram showing a configuration of a microscope observing unit of a defect inspection unit.

FIG. 4 is a diagram showing a transfer device (robot).

[Fig.5] Block diagram of cutting and shipping line

FIG. 6 is a view showing an imposition state of a color filter for a viewfinder.

FIG. 7 is a diagram for explaining defect detection.

[Figure 8] Filter diagram

[Figure 9] Color filter diagram for viewfinder

[Explanation of symbols]

100 Defect inspection section 101, 102 Imaging camera 103, 104 Lens 105, 106, 107 Light source 110 Viewfinder color filter 108, 109 Half mirror 120 Sheet 130 Holding plate 140 X, Y stage 141 X, Y stage control device 150 Image processing Device 160 Host computer (control unit) 161 Monitor for host computer 180 Information recording medium 200 Transfer device (robot) 201 Cassette 300 Cutting and shipping line 310 Roller 320 is a table with suction device 330 Cutting unit 340 Water jet 350 Cleaning unit 360 Shipping and loading Robot 370 Shipping container 401 Imaging camera 402 Monitor 410 Lens system (microscope) 421, 422 Light source

Claims (10)

[Claims] 1. A sheet having a plurality of viewfinder color filters attached thereto is subjected to defect detection for each viewfinder color filter, and after the defect inspection is cut and separated for each viewfinder color filter. An inspection and shipping device for a viewfinder color filter that mounts only desired ones on a shipping container according to an inspection result, and a sheet having a plurality of viewfinder color filters attached thereto is controlled by XY drive. It is mounted on a transparent holding plate on an XY stage, and imaged by a pixel division element such as a CCD element for each viewfinder color filter by using transmissive illumination means and / or reflected illumination means, and obtained by imaging. A defect inspection unit for detecting defects by image-processing the generated signal by image processing means; Even if it is not necessary, a sheet with a plurality of viewfinder color filters that have been inspected for defects is cut and separated for each viewfinder color filter, and the separated viewfinder color filters are washed, and only the specified one A cutting and shipping line that mounts the product into a specified shipping container, a sheet with multiple color filters for the viewfinder before inspection is mounted in the defect inspection unit, and the viewfinder that is defect-inspected by the defect inspection unit Means for transferring a sheet having a plurality of color filters for imposition to a cutting and shipping line, and a control means for controlling the operation in association with the defect inspection section, the cutting and shipping line, and the transferring means. The inspection and shipping device for the color filter for the viewfinder, which is equipped with. 2. The defect inspection section according to claim 1, further comprising an observation means such as a microscope for observing a viewfinder color filter on a transparent holding plate by using transmission or reflection illumination means. Inspection and shipping device for color filters for viewfinders. 3. The defect inspection section according to claim 2, wherein a sheet having a plurality of viewfinder color filters is mounted on a holding plate with the colored surface facing upward, and the sheet is held. When mounted on the upper side, the colored surface side of the viewfinder color filter faces the color filter for the viewfinder and has a first image pickup means composed of a pixel dividing element such as a CCD and an image receiving surface of the first image pickup means. First image forming means for forming an image of the color filter for the viewfinder on the upper side, and vertical epi-illumination on the color filter surface for the viewfinder, and the specular reflection light image is formed on the first image forming means by the first image forming means. And a first illuminating means for forming an image, on the non-colored side of the viewfinder color filter, facing the viewfinder color filter, Second image pickup means composed of a pixel dividing element such as CCD, second image forming means for forming an image of the viewfinder color filter on the image receiving surface of the second image pickup means, and vertical incident on the viewfinder color filter surface. Second illumination means for illuminating and forming a transmitted light image on the first imaging means by the first imaging means, and non-colored surface side of the viewfinder color filter are reflected and dark-field illuminated to scatter scattered light. A second illuminating means for forming an image on the second image pickup means, illuminating the color filter for the viewfinder through the transmission dark field, and forming an image of the diffracted light or scattered light on the first image pickup means; and image processing A means for inspecting and shipping a color filter for a viewfinder, characterized in that the means performs image processing on the image signal picked up by each image pickup means. 4. The first illumination means according to claim 3, wherein the light from the first light source is first imaged through a first half mirror between the first imaging means and the first imaging means. Of the viewfinder color filter by vertical epi-illumination, and the first image forming means forms an image of the specularly reflected light on the first image pickup means. Inspection and shipping device. 5. The second image forming device according to claim 3, wherein the second illuminating device forms the light from the second light source through a second half mirror provided between the second image forming device and the second image forming device. Means for illuminating the surface of the color filter for the viewfinder by vertical epi-illumination, and forming an image of the transmitted light image on the first imaging means by the first imaging means. Inspection and shipping device. 6. The third illuminating means according to claim 3, wherein the ring type light source illuminates the non-colored surface side of the viewfinder color filter with reflection darkfield illumination and the viewfinder color filter with transmission darkfield illumination. Inspection and shipping device for color filters for viewfinders. 7. The information recording medium according to claim 1, further comprising an information recording medium for storing the inspection result information of the sample obtained by the image processing means, and the XY stage, the image processing means and the transfer means are associated with each other. An inspection and shipping device for a color filter for a viewfinder, which is controlled by a control means for controlling the operation. 8. The control means controls the X and Y stages based on the inspection result information of the sample of the information recording medium according to claim 7 so that a portion determined to be a defect of the sample is in the visual field of the observation means. The inspection and shipping device of the characteristic color filter for the viewfinder. 9. The inspection / shipment apparatus for a viewfinder color filter according to claim 8, wherein the inspection result information of the sample of the information recording medium is changed according to the observation result of the observation visual field. 10. The cutting and shipping line according to any one of claims 1 to 9 is the inspection result information stored in the recording medium, which is changed according to the inspection result information of the sample obtained by the image processing means or the observation result. An inspection and shipping device for a color filter for a viewfinder, which is controlled by a control means so that only a predetermined sample is loaded in a shipping container.