JPH06289350A - Device for correcting color filter substrate - Google Patents

Abstract

PURPOSE:To improve a non-defective rate and to reduce a cost by thermocompression bonding a color filter to the defective part of a color filter substrate by means of a bonding head, thereby facilitating the correction of the color filters. CONSTITUTION:A camera 12 is mounted opposite to the bonding head 1 in the lower part of an X-Y stage part 10. This X-Y stage part 10 is provided with a heater 11 for heating the substrate. The colored photosensitive dry film 5 is supplied between the bonding head 1 and the color filter substrate 2 by a reel supply section 13. The defective (decolored) part of the color filters is positioned to the part right under the bonding head 1 where the bonding head 1 is warmed up by the heater 11 for heating the substrate; thereafter, the bonding head is pressed onto the color filter substrate 2 via the dry film 5, by which the film is compression bonded to the substrate under heating. The heater 11 for heating the substrate is thereafter turned off and the hydrophilic dry film 5 of the color filter substrate 2 is cooled.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a repair device for repairing a defect (color loss) portion which occurs in a manufacturing process of a color filter substrate which is a basic component of a color liquid crystal panel.

[0002]

2. Description of the Related Art In order to perform color display in color liquid crystal panels which have recently been used in various fields, a method of incorporating a color filter substrate is often used, and the color filter substrate is an important member of the color liquid crystal panel. ing. An example of the color arrangement of the color filters is shown in FIG.

The color filter substrate is red on a transparent substrate,
The blue and green color filters are provided in a matrix form as shown in FIG. 5A, or in a stripe form as shown in FIG. 5B, and color filters are provided on the transparent substrate 22 as shown in FIG. 5C. The layer 21 is formed. Further, a color filter layer sandwiched between a transparent substrate provided with a transparent electrode and a polarizing plate is also used. Further, a transparent substrate having a transparent electrode provided on the entire surface may be used as a transparent substrate for a color filter, and red, blue, and green color filters may be provided in a matrix on the transparent electrode surface or the opposite substrate surface. . In the case of FIG. 5A, one picture element is (0.1 × 0.3) to (0.15 ×).
Each color is arranged at about 0.35) mm ² .

The method for producing a color filter substrate is to prepare colored images of red, blue and green on a temporary support by exposing, developing and dyeing a photoresist as described in JP-A-61-279802. A photosensitive resin sheet is prepared, and the sheet is transferred to a transparent support to produce a color filter substrate.
As disclosed in JP-A-44005, a colored photosensitive resin solution containing a photosensitive resin and a coloring material is prepared, and the resin solution is formed into a film to prepare a colored photosensitive dry film, and the dry film is transferred onto a glass substrate. Then, using a photolithography technique, a colored pattern is formed, and this process is repeated to form a predetermined pattern of each color of red, green, and blue, and then a transparent electrode film and a polyimide alignment film are sequentially formed to form a color pattern. A color filter substrate can be easily manufactured by a transfer method such as manufacturing a filter substrate.

By the way, one liquid crystal panel has about 900,000 picture elements each having a size of about 10 inches, and it is a very difficult process to manufacture a complete color filter substrate due to factors such as dust. Therefore, the repair work is performed on the completed color filter substrate according to the type of the defect of the color filter substrate. Apply the resist solution containing the dye material of the same color to the needle tip,
The correction is performed by coating the defective portion under a microscope.

[0006]

However, in the above method, it is difficult to control the thickness of the filter, and the variation of the light transmittance of the corrected portion causes unevenness. Further, it takes time because of the manual work, and the work of applying the resist material only to the necessary portion requires a high degree of skill and the production efficiency was poor.

[0007]

In a color filter repair apparatus, an optical means for identifying a defective portion on a color filter substrate and a defective portion of the color filter substrate are moved to a lower portion of a vertically movable bonding head. It has a table part and a color film supply means, and a heating heater is built in the bonding head and the table part, and the bonding head thermocompresses the color film to the defective part of the color filter substrate.

Further, a vacuum unit is provided in the color filter substrate defect part repairing section.

[0009]

The defective portion of the color filter substrate can be confirmed by the optical means provided on the lower surface of the hollow table having the built-in heater and the color filter substrate mounted thereon. By moving the table, the defect of the color filter substrate can be confirmed. By positioning a vertically movable bonding head with a built-in heater on the part, supplying a colored photosensitive dry film to the lower part of the bonding head, and thermocompression bonding the film to the defective part of the color filter substrate, It is possible to correct color filters with a high yield rate.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows the structure of the present invention.

A position confirming camera 12 is attached to the lower portion of the XY stage unit 10 at a position facing the bonding head 1, and the XY stage unit 10 is a hollowing stage so that a defect position can be confirmed. Has become. Further, the XY stage unit 10 is provided with a substrate heater 11 for heating the color filter substrate 2 to be placed, and the bonding head 1 is also provided with a heater (not shown).

A colored photosensitive dry film 5 is supplied between the bonding head 1 and the color filter substrate 2 by a reel supply section 13. The R, G, and B film reels can be replaced depending on the color arrangement of the defective portion. The colored photosensitive dry film 5 used here is shown in FIG. The colored photosensitive dry film 5 is formed by forming a colored resist portion 52 on a base film 51 of polyethylene terephthalate, polyethylene or the like with a colored photosensitive resin solution by a known method such as a roll coating method or a curtain coating method.

FIG. 3 shows a process chart of the color filter correction work according to the present invention. The color filter substrate to be modified here has a matrix color arrangement (dimensions per pixel: 0.1 × 0.3 to 0.15 × 0.35 mm) and has a spindle shape with a diameter of 10φ. A bonding head will be used.

(1) The color filter defect (color loss) portion 6 is positioned directly below the bonding head 1 by moving the hollow XY stage portion 10.
(The color filter substrate 2 has been preheated by a substrate heater (not shown) attached to the XY table.) (2) After positioning, the bonding head 1 attached to a vertical drive actuator (not shown) Is heater 1b
After being warmed to a predetermined temperature with, through the dry film 5,
The color filter substrate 2 is pressed and heat-pressed.

(3) The heaters provided on the bonding head 1 and the XY stage 10 are turned off to cool the color filter substrate 2 and the dry film 5.

(4) After forming a predetermined color filter portion on the color filter defect portion 6, the bonding head 1 is raised and the dry film 5 is wound up.

Thus, the work of correcting the color filter defect (color loss) portion is completed.

In this embodiment, 0.1 per pixel is used.
A color filter substrate having a matrix color arrangement of × 0.3 to 0.15 × 0.35 mm ² was used, but the present invention is not limited to this, and the size and shape of the bonding head may be changed according to the color arrangement of the color filter substrate. May be.

The colored photosensitive dry film to be used may be provided with cuts in the colored resist of the dry film according to the color arrangement of the color filter substrate to be inspected so that it can be easily separated from the base film.

[0020]

Second Embodiment FIG. 4 shows a second embodiment of the present invention.

In this embodiment, a vacuum unit is provided around the color filter defect repair work section. In this case, as shown in the drawing, the bonding head 1 is inside the vacuum chamber 14 via the vacuum seal portion 15, and can be moved up and down by a vertical drive actuator (not shown). A soft elastic body such as rubber is attached to the bottom surface of the vacuum chamber 14 to prevent the color filter substrate 2 from being damaged when it comes into contact with the color filter substrate 2, and at the same time to improve the air blocking property. The dry film 5 also passes through the vacuum chamber 14 through the vacuum seal portion 15, and when the vacuum chamber 14 comes into contact with the color filter substrate 2,
It is attached so as to keep a distance of several mm.

[0022]

As described above, with the above-described correction device, the color filter can be easily corrected regardless of the skill level of the operator and the cost can be reduced by improving the non-defective rate.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a correction device according to an embodiment of the present invention.

FIG. 2 is a side view of a colored photosensitive dry film used in the present invention.

FIG. 3 is a motion course diagram according to an embodiment of the present invention.

FIG. 4 is a configuration diagram of another embodiment of the present invention.

FIG. 5 is a diagram showing a matrix color arrangement of a color filter (a) and a stripe color arrangement (b).
It is a figure (c) which shows the side view of a color filter substrate.

[Explanation of symbols]

 1 Bonding Head 1a Bonding Head Base 1b Bonding Heater 1c Bonding Head Tip Part 2 Color Filter Substrate 21 Color Filter 3 Transparent Substrate 4 Color Film 5 Colored Photosensitive Dry Film 6 Color Filter Defect 10 XY Stage 11 Substrate Heating Heater 12 Position Confirmation Camera 13 Reel Supply Section 14 Vacuum Chamber 15 Vacuum Seal Section

Claims (2)

[Claims] 1. A color filter substrate repairing apparatus, an optical means for identifying a defective portion on a color filter, a table portion for moving the defective portion of the color filter substrate below a vertically movable bonding head, and a coloring section. A color filter substrate having a photosensitive dry film supply means, wherein the bonding head and the table part have a built-in heater, and the bonding head thermocompresses the dry film to the defective part of the color filter substrate. Correction device. 2. The color filter substrate repairing device according to claim 1, wherein the color filter substrate repairing device includes a vacuum unit in a working portion of the color filter substrate defect repairing device.