JP4931620B2 - Liquid material application unit and fine pattern defect correction device - Google Patents

Description

  The present invention relates to a liquid material application unit and a fine pattern defect correction apparatus for correcting a defect by applying a liquid material to a fine region on a substrate, and more specifically, applying a liquid material to a defective portion of a substrate. The present invention relates to a liquid material application unit and a fine pattern defect correction apparatus capable of moving an application mechanism for the movement in a Z-axis direction that is a direction intersecting a substrate.

  In a manufacturing process of a color filter of a liquid crystal display (Liquid Crystal Display, LCD), a defect may occur in a colored layer. 6 to 8 are plan views showing a color filter in which a defect has occurred. As shown in FIGS. 6 to 8, for example, in a color filter including an R (red) pixel 101, a G (green) pixel 102, and a B (blue) pixel 103 as a colored layer, a part of the colored layer loses color. The white defect 104 (see FIG. 6), the black defect 105 mixed with the adjacent pixel (see FIG. 7), and the foreign object defect 106 (see FIG. 8) to which foreign matters are attached. The white defect 104 shown in FIG. 6 is corrected by applying the same color ink to the part where the color is missing. The black defect 105 and the foreign substance defect 106 shown in FIGS. 7 and 8 are corrected by removing the defective part with a laser and applying the same color ink to the removed part.

  In recent years, with the increase in size and resolution of LCDs, the number of pixels has increased and the probability of occurrence of defects in the colored layer has increased, making it difficult to manufacture without defects. In addition, as the size of the LCD increases, the pixel size increases, so the size of the defect to be corrected also increases. Under such circumstances, an apparatus for correcting defects for improving the yield is indispensable for the production line.

  Conventionally, there are four color ink tanks of R (red), G (green), B (blue), and Bk (black), which are necessary for the correction of the color filter, and the missing color of the colored layer in which white defects exist There has been proposed a defect correction apparatus that corrects a defect by adhering the same color ink to the tip of the coating needle and then bringing the tip of the coating needle into contact with the defect to adhere the ink to the defect (for example, a patent) Reference 1).

  FIG. 9 is a schematic perspective view showing an ink application mechanism of a conventional defect correcting apparatus proposed in Patent Document 1. In FIG. With reference to FIG. 9, the conventional ink application mechanism proposed in Patent Document 1 will be described.

  Referring to FIG. 9, the ink application mechanism includes an application needle 113 for applying ink and an application needle driving cylinder 110 for driving the application needle 113 in the vertical direction. The application needle 113 is provided at the tip of the drive shaft of the application needle drive cylinder 110 via the application needle holder 112.

  The ink application mechanism includes an ink pot table 117 provided horizontally, and a plurality of ink pots 118, a cleaning mechanism 115, and a purge mechanism 116 that are sequentially arranged on the ink pot table 117 in the circumferential direction. A rotation shaft is provided upright at the center of the ink pot table 117. Further, the ink pot table 117 is formed with a notch 114 for allowing the application needle 113 to pass therethrough during ink application. The ink pot 118 is appropriately filled with RGB and black inks and a solvent for preventing ink sticking.

  As shown in FIG. 10, the cleaning mechanism 115 includes a cleaning container 121 that stores the cleaning liquid 122, a rotatable stirring blade 124 that stirs the cleaning liquid 122 in the cleaning container 121 and enhances the cleaning effect, and a stirring blade 124. And a motor 126 for driving. Here, FIG. 10 is a schematic diagram showing a cleaning mechanism in a conventional ink application mechanism. In FIG. 10, a schematic plan view of the cleaning mechanism is shown on the upper side, and a schematic side view is shown on the lower side. Referring to FIG. 10, a small hole is opened in cleaning container lid 123 constituting the upper surface of cleaning container 121. The application needle 113 is immersed and cleaned in the cleaning liquid 122 through this small hole.

  Further, the ink application mechanism includes an ink pot table driving motor mechanism 111 for rotating the rotating shaft of the ink pot table 117. The motor included in the ink pot table driving motor mechanism 111 rotates the ink pot table 117 to position any one of the notch 114, the ink pot 118, the cleaning mechanism 115, and the purge mechanism 116 below the application needle 113. Let

The conventional ink application mechanism shown in FIG. 9 has only one application needle 113 mounted thereon. Therefore, it is necessary to wash the ink adhering to the application needle 113 every time the colors of the four colors are changed. In the ink application mechanism shown in FIG. 9, the application needle 113 is cleaned by the cleaning mechanism 115, but this cleaning time is long and the correction tact is long.
JP 09-236933 A

  In view of this, the inventors have installed an ink as shown in FIG. 11 to FIG. 13 in which a plurality of configurations in which the application needle and the ink container are integrally supported are mounted in order to omit the application needle cleaning process at the time of color change. A coating mechanism is proposed. FIG. 11 is a schematic side view showing a support member that integrally supports an application needle and an ink container of an ink application mechanism proposed by the inventors. FIG. 12 is a schematic front view of the support member shown in FIG. FIG. 13 is a partial schematic view of a fine pattern defect correcting device including an ink application mechanism including the support member shown in FIGS. 11 and 12. The ink application mechanism proposed by the inventors will be described with reference to FIGS.

  As shown in FIGS. 11 and 12, the support member of the ink application mechanism proposed by the inventors is provided with holes at the top and bottom of the ink container 131, and the holes provided in the ink container 131 are applied. The application needle 113 and the ink container 131 are integrally supported so that the needle 113 penetrates. Specifically, in the support member, the ink container 131 is held at the tip of the ink container slide mechanism 132. Further, the application needle 113 arranged so as to penetrate the ink container 131 is held at the distal end portion of the application needle slide mechanism 133. When the application needle slide mechanism 133 moves relative to the ink container 131, the application needle 113 penetrates the ink container 131 and moves in the vertical direction. The ink application mechanism is provided with a plurality of support members (specifically, the number of types of ink is four). By adopting such a configuration, it is possible to dispense with the application needle cleaning process at the time of color change, which has been a problem with the technique disclosed in Patent Document 1.

  In the fine pattern defect correcting apparatus including the ink application mechanism 130 including the support member as described above, the application needle 113 is driven along the Y axis, the Z axis, the X1 axis, and the X2 axis as shown in FIG. It is possible. Specifically, a support member including two application needles 113 is installed on a member (X1 table) movable along the X1 axis, and two members (X2 table) movable along the X2 axis are installed. A support member including the application needle 113 is provided. In the ink application mechanism 130 shown in FIG. 13, it is possible to insert the application needle 113 under the objective lens 135 disposed below the optical barrel 134 constituting the observation optical system and apply ink to the observation position. It has become.

  In the ink application mechanism 130 shown in FIG. 13, application is performed so that the application needle 113 corresponding to the selected color among the four application needles 113 comes to the application position by the Y-axis table that moves along the Y-axis. The needle 113 is moved. Next, the application needle 113 is lowered to a height at which the application needle 113 can be inserted under the objective lens 135 using a Z-axis drive mechanism that moves the support member along the Z-axis. Then, the member on the side on which the selected application needle 113 is mounted, that is, the member movable along the X1 axis is moved so that the selected application needle 113 comes to the application position. Thereafter, the application needle 113 is protruded from the ink container 131 with an air cylinder. In this state, the application needle 113 is lowered using the Z-axis drive mechanism and brought into contact with the substrate to apply ink.

  In this application operation, the application needle 113 is lowered so that the application needle 113 contacts the substrate using the Z-axis drive mechanism, and then the support member including the application needle 113 is moved in the upward direction using the Z-axis drive mechanism. Let At this time, there is a problem that a phenomenon that the position of the tip of the application needle 113 is shifted on the substrate occurs.

  When this phenomenon occurs, as shown in FIG. 14, the position of the application needle 113 is shifted on the substrate, so that the shape of the applied ink becomes an ellipse like the ink application unit 142. For this reason, since the shape of the ink application region is changed from the circular shape like the ink application part 141 originally assumed, there is a problem in the quality of correction. FIG. 14 is a schematic diagram showing a normal application state and an application state when an application needle shift occurs with respect to the shape of the ink application region.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to suppress the occurrence of the problem of misalignment of the application needle on the substrate during the ink application operation. It is to provide a possible liquid material application unit and a fine pattern defect correction device.

  The inventors have intensively studied the cause of the problem of the displacement of the application needle 113 on the above-mentioned substrate, and as a result, completed the present invention. First, the cause of the above problem will be described with reference to FIG. FIG. 15 is a schematic diagram for explaining the cause of the problem of misalignment of the application needle on the substrate. In FIG. 15, the conventional ink application unit is shown as a schematic view seen from the direction of the X1 axis.

  Referring to FIG. 15, the ink application unit includes a member 213 (X1 table) that can move the support member on which the application needle is installed in the X1 axis direction, and a member 214 (X2 table) that can move along the X2 axis. The Z-axis working plate 228 that supports the members 213 and 214, the ball screw 223 connected to the Z-axis working plate 228, the motor 221 and the brake 222 for controlling the rotation of the ball screw 223, and the Z-axis working plate And a linear guide including a rail 230 and a moving block 231 for restricting the movement of 228 in the Z-axis direction. The linear guide rail 230 is installed on the surface of a base plate 227 connected to the motor 221. In the configuration of FIG. 15, the cross-sectional shape of the upper part of the Z-axis working plate 228 is L-shaped, and the Z-axis working plate 228 and the ball screw 223 are connected at the end of the portion bent in this L-shape.

  In the case of the device configuration as shown in FIG. 15, the position of the moving block 231 of the linear guide and the position of the connecting portion between the Z-axis operating plate 228 and the ball screw 223 are separated. Further, the moving axis of the connecting portion (the axis overlapping the extending direction of the ball screw 223) and the moving axis of the linear guide (the axis overlapping the extending direction of the rail 230 of the linear guide) are offset. Therefore, when the ball screw 223 is driven to lower the Z-axis working plate 228 to bring the application needle into contact with the substrate, the Z-axis working plate 228 is lifted (moved away from the substrate). The direction of the force applied to the operating plate 228 is upward. As a result, the Z-axis working plate 228 is slightly bent in the direction indicated by the arrow in FIG. When this deflection occurs, the members 213 and 214 attached to the Z-axis working plate 228 are also inclined. As a result, the position of the tip of the application needle attached to the members 213 and 214 is shifted on the substrate, and the ink application shape becomes an elliptical shape as shown by the ink application part 142 in FIG.

The inventor completed the present invention on the basis of the knowledge about the cause of the problem as described above. That is, the liquid material application unit according to the present invention is a liquid material application unit that applies a liquid material to a defective portion of a fine pattern formed on a substrate, and is an application mechanism, a Z-axis drive mechanism, a connection mechanism, and a linear mechanism. A guide and a linear guide base plate are provided. The application mechanism applies a liquid material to the defective portion of the substrate. The Z-axis drive mechanism includes a drive shaft for moving the coating mechanism in the Z-axis direction that intersects the surface of the substrate. The connection mechanism connects the Z-axis operation plate of the coating mechanism and the drive shaft of the Z-axis drive mechanism. The linear guide includes a rail extending in the Z-axis direction and a guide block movably connected to the rail for restricting movement of the coating mechanism in the Z-axis direction. The linear guide base plate is installed to face the Z-axis operation plate. The connection mechanism includes a Z-axis working plate and a connecting plate fixed at the connecting portion. A guide block is installed on the surface of the Z-axis working plate facing the connecting plate. A rail is installed on the surface of the linear guide base plate facing the Z-axis working plate. A gap is formed between the Z-axis working plate and the connecting plate at a portion other than the connecting portion .

  In this manner, even when the connection mechanism is deflected when the application mechanism is moved in the Z-axis direction by the Z-axis drive mechanism, the attitude of the application mechanism is affected by the deflection of the connection mechanism. That is, it is possible to suppress the change in the position of the member (for example, the application needle) for applying the liquid material to the defective portion due to the change in the posture of the application mechanism. This is due to the following reasons. In other words, since the connection mechanism is partially connected to the Z-axis operation plate of the coating mechanism and there is a gap in the other part, even if a deflection occurs in the connection mechanism, the influence of the deflection is absorbed by this gap. . For this reason, the deformation | transformation of a coating shape resulting from the bending of a connection mechanism and generation | occurrence | production of a distortion can be prevented.

In the liquid material application unit , the position of the guide block and the position of the connecting portion in the Z- axis direction may be the same.

  In this case, by installing the linear guide, the application mechanism can be moved more reliably and smoothly in the Z-axis direction. In addition, since the position of the guide block and the position of the connecting portion are the same position (overlapping) in the Z-axis direction, the operation of the guide block on the linear guide is affected even when the connection mechanism is bent. The degree of receiving can be reduced.

  In the liquid material application unit, the connection mechanism may be constituted by one member. Alternatively, in the liquid material application unit, the connection mechanism may be composed of a plurality of members.

  A fine pattern defect correcting apparatus according to the present invention includes the liquid material application unit. In this way, when the liquid material is applied to the defective portion, it is possible to suppress the occurrence of a problem that the applied shape of the liquid material is distorted (for example, becomes an elliptical shape), so that the fine pattern having excellent correction quality of the defective portion. A defect correcting device can be realized.

  Thus, according to the present invention, it is possible to prevent the deformation of the applied shape of the applied liquid material and the occurrence of distortion caused by the deflection of the connection mechanism.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, the same or corresponding parts are denoted by the same reference numerals, and description thereof will not be repeated.

(Embodiment 1)
FIG. 1 is a schematic diagram showing the entirety of a first embodiment of a fine pattern defect correcting apparatus according to the present invention. FIG. 2 is a schematic diagram showing a liquid material application unit of the fine pattern defect correcting apparatus shown in FIG. 3 is a schematic cross-sectional view taken along line III-III in FIG. With reference to FIGS. 1-3, Embodiment 1 of the fine pattern defect correction apparatus and liquid material application unit according to the present invention will be described. 2 is a schematic view of the liquid material application unit as viewed from the direction along the X axis, and the left side of FIG. 2 is a schematic view of the liquid material application unit as viewed from the direction along the Y axis. FIG. FIG. 3 is a schematic view of a cross section taken along line III-III of the liquid material application unit shown on the right side of FIG. 2 from the direction along the Z axis (from above).

  As shown in FIG. 1, a fine pattern defect correcting apparatus 1 is a liquid for correcting a defective portion by applying a liquid material such as ink to a defective portion of a fine pattern formed on a substrate 2 such as a color filter substrate. A material application unit 10 is provided. Further, the fine pattern defect correcting apparatus 1 includes an objective lens 3 for observing the surface of the substrate 2, an optical barrel 4 that is a cylindrical molded body to which a plurality of objective lenses 3 are attached, and the observed substrate 2. A monitor 6 that displays an image of the surface, an image processing unit 7 that recognizes a defective portion, a host computer 8 that controls the entire apparatus, and a control computer 9 that controls the operation of the liquid material application unit 10 are provided. Furthermore, the fine pattern defect correcting apparatus 1 includes a cutting laser unit that irradiates the substrate 2 with laser light and cuts unnecessary portions, a substrate heating unit that heats and dries the liquid material applied to the defective portions, and the like. Also good. Note that the surface of the substrate 2 that is observed by the objective lens 3 and that is the surface on which the liquid material is applied to the defective portion of the fine pattern is defined as the surface of the substrate 2.

  The liquid material application unit 10 includes a container 11 into which a liquid material for correcting a defective portion is injected, and an application needle 12 for applying the liquid material to the defective portion. In addition, an X1 table 13, an X2 table 14, a Y table 15, and a Z table 16 are included as drive mechanisms that allow the application needle 12 to move relative to the substrate 2. The container 11 and the application needle 12 can be moved three-dimensionally by a drive mechanism (that is, the X1 table 13, the X2 table 14, the Y table 15 and the Z table 16). The X1 table 13 and the X2 table 14 move along the X-axis direction shown in FIG. The Y table 15 moves along the Y-axis direction shown in FIG. The Z table 16 moves along the Z-axis direction shown in FIG. The detailed configuration of the Z table 16 of the liquid material application unit 10 will be described later.

  Further, the liquid material application unit 10 includes two sets of the structure in which the container 11 and the application needle 12 are integrally supported in the X1 table 13, and two sets of the structure in the X2 table 14. That is, the liquid material application unit 10 includes a total of four application needles 12 in which two application needles 12 are mounted on the X1 table 13 and two application needles 12 are mounted on the X2 table 14. The four application needles 12 are inserted under the objective lens 3 for observing the surface of the substrate 2 and can apply a liquid material to the observation position. When the substrate 2 is a color filter substrate, the four containers 11 are ink tanks filled with R (red), G (green), B (blue), and Bk (black) inks, respectively.

  As shown in FIGS. 2 and 3, the Z table 16 shown in FIG. 1 includes a motor mounting plate 24 installed on the Y table, a motor 21 fixed to the motor mounting plate 24, a brake 22, and a ball screw. 25.

  In a Z table 16 (see FIG. 1) as a Z-axis drive mechanism according to the present invention, a brake 22 is incorporated in a Z-axis drive motor 21 as shown in FIG. The brake 22 maintains the rotational position of the motor 21 when the power is turned off, and functions to prevent the Z-axis operation plate 28 from descending. The motor 21 is fixed to the motor mounting plate 24 with screws. The tip of the driving ball screw 23 is fixed to the ball screw connecting plate 25 with a screw. Further, the ball screw connecting plate 25 is fixed to the connecting plate 26 with screws. The ball screw coupling plate 25 and the coupling plate 26 constitute a connection mechanism. The connection plate 26 is configured to be fixed to the Z-axis operation plate 28 with screws at the connection portion 29.

  The connecting plate 26 and the Z-axis working plate 28 are configured with a certain gap except for the connecting portion 29. Further, the connecting plate 26 is configured to have a certain gap with the linear guide base plate 27.

  The surface of the Z-axis working plate 28 that faces the connecting plate 26 extends along the Z-axis direction (the direction in which the ball screw 23 extends). A base member is connected to the upper part of the Z-axis working plate 28, and the X1 table 13 and the X2 table 14 are slidably connected to the base member in the X-axis direction. On the surface of the Z-axis operating plate 28 facing the connecting plate 26, a linear guide operating portion 31 that is a region where a guide block slidably connected to the rail 30 of the linear guide is installed. Two linear guide operating portions 31 are arranged so as to sandwich the connecting portion 29. Further, the position of the linear guide operating portion 31 in the Z-axis direction is arranged at the same position as the position of the connecting portion 29. The rails 30 of the linear guide are installed on the surface of the linear guide base plate 27 installed on the motor 21 (the surface facing the Z-axis operation plate 28). The extending direction of the rail 30 is a direction along the Z axis.

  When the Z-axis working plate 28 is lowered, the motor 21 rotates and the ball screw 23 is housed on the motor 21 side, so that the ball screw connecting plate 25 is lowered. As a result, the connecting plate 26 connected to the ball screw connecting plate 25 is also lowered, and the Z-axis operation plate 28 connected to the connecting plate 26 via the connecting portion 29 is also lowered. On the other hand, when the Z-axis working plate 28 is raised, the motor 21 rotates and the ball screw 23 protrudes from the motor 21 side, whereby the ball screw connecting plate 25 is raised. As a result, the connecting plate 26 is also raised, and the Z-axis operation plate 28 connected to the connecting plate 26 via the connecting portion 29 is also raised.

  In the Z-axis drive mechanism of the present invention, as described above, the connecting plate 26 is screwed with the Z-axis operating plate 28 and the connecting portion 29 on the application mechanism side, and in the other portions, the Z-axis operating plate 28 and the linear guide base are fixed. Since the gap is provided between the plate 27 and the Z-axis working plate 28, when the Z-axis working plate 28 is lowered or raised, even if the ball screw connecting plate 25 and the connecting plate 26 are bent as shown in FIG. Can be absorbed in the gap. As a result, the deflection does not affect the inclination of the Z-axis working plate 28. This eliminates the occurrence of deviation of the application needle on the substrate and eliminates the occurrence of the oval application state.

(Embodiment 2)
FIG. 4 is a schematic diagram showing a second embodiment of the liquid material application unit of the fine pattern defect correcting device according to the present invention. FIG. 5 is a schematic cross-sectional view taken along line VV in FIG. With reference to FIG. 4 and FIG. 5, Embodiment 2 of the fine pattern defect correction apparatus and liquid material application unit according to the present invention will be described. 4 and 5 correspond to FIGS. 2 and 3, respectively.

  The liquid material application unit shown in FIGS. 4 and 5 and the fine pattern defect correction apparatus including the liquid material application unit are basically the same as the liquid material application unit and the fine pattern defect correction apparatus shown in FIGS. However, the connecting plate 36 as a connecting mechanism for connecting the ball screw 23 and the Z-axis working plate 28 is configured as one member. Also with the liquid material application unit and the fine pattern defect correction device having such a configuration, the same effects as those of the liquid material application unit and the fine pattern defect correction device shown in FIGS. 1 to 3 can be obtained.

  To summarize the characteristic configuration of the liquid material application unit 10 described above, the liquid material application unit 10 applies a liquid material to a defective portion of a fine pattern formed on the substrate 2, and includes an application mechanism (Z-axis operation). Plate 28, X1 table 13, X2 table 14, container 11 and application needle 12), Z-axis drive mechanism (motor 21 and ball screw 23 as Z table 16) and connection mechanism (ball screw connection plate 25, connection plate 26). Prepare. The application mechanism applies a liquid material (ink) to the defective portion of the substrate 2. The Z-axis drive mechanism includes a drive shaft (ball screw 23) for moving the coating mechanism in the Z-axis direction that intersects the surface of the substrate 2. The connection mechanism connects the Z-axis working plate 28 of the coating mechanism and the drive shaft (ball screw 23). The Z-axis operation plate 28 of the coating mechanism is connected to the connection mechanism at a part (the coupling portion 29), and a gap is formed between the connection mechanism and the part other than the part (the Z-axis operation plate 28 of the application mechanism). Is a region where a gap is formed between a connecting portion (connecting portion 29) connected to the connecting mechanism and a portion other than the connecting portion and the connecting mechanism (the connecting portion 29 of the Z-axis working plate 28 and the linear guide). Area other than the operating unit 31).

  In this way, even when the Z-axis operation plate 28 is moved in the Z-axis direction by the Z-axis drive mechanism, even if the ball screw connection plate 25 and the connection plates 26 and 36 as the connection mechanism are bent. The attitude of the Z-axis working plate 28 is affected by the deflection of the connection mechanism (that is, the position of the application needle 12 for applying the liquid material to the defective portion is changed by changing the attitude of the Z-axis working plate 28. Can be suppressed. That is, the connecting plates 26 and 36 are connected by the connecting portion 29 that is a part of the surface (Z-axis direction surface) of the Z-axis working plate 28, and between the region other than the connecting portion 29 and the connecting plates 26 and 36. Since the gap is formed, the deflection of the connecting plates 26 and 36 can be absorbed by the gap. Therefore, the influence of the deflection of the ball screw connecting plate 25 and the connecting plates 26 and 36 on the posture of the Z-axis operating plate 28 can be reduced. For this reason, the deformation | transformation of the application | coating shape of the applied ink resulting from the bending of the connection plates 26 and 36, and generation | occurrence | production of a distortion can be prevented.

  The liquid material application unit further includes a linear guide. The linear guide is for restricting movement in the Z-axis direction of the coating mechanism including the Z-axis operating plate 28, and a rail 30 extending in the Z-axis direction and a guide block movably connected to the rail 30 It is made up of. The guide block is installed in a linear guide operating portion 31 that is a surface of the Z-axis operating plate 28 facing the rail 30. The rail 30 is disposed so as to face the Z-axis working plate 28. The position of the guide block (position of the linear guide operating part 31) and the position of the connecting part (connecting part 29) are arranged at the same position in the Z-axis direction. Further, the occupied area of the linear guide operating part 31 in the Z-axis operating plate 28 may be larger than the occupied area of the connecting part 29.

  In this case, by installing the linear guide, the Z-axis working plate 28 can be moved more reliably and smoothly in the Z-axis direction. Further, since the linear guide operating portion 31 and the connecting portion 29 are in the same position in the Z-axis direction, the operation of the guide block on the linear guide has an influence even when the connecting plates 26 and 36 are bent. The degree of receiving can be reduced.

  In the liquid material application unit 10, as shown in FIG. 4, the connection mechanism that connects the ball screw 23 and the Z-axis working plate 28 may be configured by a single member. Alternatively, in the liquid material application unit 10, as shown in FIG. 2, the connection mechanism for connecting the ball screw 23 and the Z-axis working plate 28 may be composed of a plurality of members (ball screw connecting plate 25 and connecting plate 26). Good.

  The fine pattern defect correcting device 1 according to the present invention includes the liquid material application unit 10. In this way, when the liquid material (ink) is applied to the defective portion, it is possible to suppress the occurrence of a problem that the applied shape of the liquid material is distorted (for example, becomes an elliptical shape), so that the quality of the defective portion corrected is deteriorated. Can be prevented.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above-described embodiment but by the scope of claims, and is intended to include all modifications within the meaning and scope equivalent to the scope of claims.

  The present invention is applied to a fine pattern defect correcting device used in a manufacturing process of a color filter of a liquid crystal display, and a connection structure between a coating mechanism and a Z-axis driving mechanism is an electrode generated in a manufacturing process of a flat panel display, for example. The present invention can also be applied to an apparatus for applying and correcting a paste to open defects of the above and rib (partition) defects generated on the back plate of the plasma display panel.

It is a schematic diagram which shows the whole Embodiment 1 of the fine pattern defect correction apparatus according to this invention. It is a schematic diagram which shows the liquid material application unit of the fine pattern defect correction apparatus shown in FIG. It is a cross-sectional schematic diagram in line segment III-III of FIG. It is a schematic diagram which shows Embodiment 2 of the liquid material application unit of the fine pattern defect correction apparatus according to this invention. It is a cross-sectional schematic diagram in line segment VV of FIG. It is a top view which shows the color filter which the defect generate | occur | produced. It is a top view which shows the color filter which the defect generate | occur | produced. It is a top view which shows the color filter which the defect generate | occur | produced. It is a perspective schematic diagram which shows the ink application | coating mechanism of the conventional defect correction apparatus. It is a schematic diagram which shows the washing | cleaning mechanism in the conventional ink application | coating mechanism. It is a side surface schematic diagram which shows the supporting member which integrally supports the application needle | hook and ink container of the ink application | coating mechanism which the inventor has proposed. It is a front schematic diagram of the support member shown in FIG. It is a partial schematic diagram of the fine pattern defect correction apparatus provided with the ink application | coating mechanism containing the supporting member shown in FIG.11 and FIG.12. It is a schematic diagram which shows a normal application state about the shape of the application | coating area | region of an ink, and an application state when an application needle shift | offset | difference occurred. It is a schematic diagram for demonstrating the cause of the problem of the position shift of the applicator needle on the substrate.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Fine pattern defect correction apparatus, 2 Substrate, 3,135 Objective lens, 4,134 Optical barrel, 6 Monitor, 7 Image processing part, 8 Host computer, 9 Control computer, 10 Liquid material application unit, 11 Container, 12 , 113 Application needle, 13 X1 table, 14 X2 table, 15 Y table, 16 Z table, 21, 221 Motor, 22, 222 Brake, 23, 223 Ball screw, 24 Motor mounting plate, 25 Ball screw connection plate, 26, 36 connection Plate, 27, 227 Linear guide base plate, 28, 228 Z-axis working plate, 29 connecting part, 30, 230 rail, 31 linear guide working part, 101 R pixel, 102 G pixel, 103 B pixel, 104 white defect, 105 Black defect, 106 foreign object defect, 110 coating needle drive cylinder, 1 DESCRIPTION OF SYMBOLS 1 Ink pot table drive motor mechanism, 112 Application needle holder, 114 Notch part, 115 Cleaning mechanism, 116 Purge mechanism, 117 Ink pot table, 118 Ink tank, 121 Cleaning container, 122 Cleaning liquid, 123 Cleaning container lid, 124 Stirring propeller , 126 Motor, 130 Ink application mechanism, 131 Ink container, 132 Ink container slide mechanism, 133 Application needle slide mechanism, 141, 142 Ink application part, 213, 214 member, 231 moving block.

Claims (3)

A liquid material application unit for applying a liquid material to a defective portion of a fine pattern formed on a substrate,
An application mechanism for applying a liquid material to a defective portion of the substrate;
A Z-axis drive mechanism including a drive shaft for moving the coating mechanism in a Z-axis direction that intersects the surface of the substrate;
A connection mechanism for connecting the Z-axis working plate of the coating mechanism and the drive shaft of the Z-axis drive mechanism ;
A linear guide comprising a rail extending in the Z-axis direction and a guide block movably connected to the rail for restricting movement of the coating mechanism in the Z-axis direction;
A linear guide base plate installed opposite to the Z-axis working plate ,
The connection mechanism includes a connecting plate fixed at the connecting portion with the Z-axis working plate,
The guide block is installed on the surface of the Z-axis working plate facing the connecting plate,
The rail is installed on the surface of the linear guide base plate facing the Z-axis working plate,
A liquid material application unit, wherein a gap is formed between the Z-axis working plate and the connecting plate in a portion other than the connecting portion . Before Symbol position and position of the connection portion of the guide block is the same position in the Z axis direction, the liquid material application unit according to claim 1.   A fine pattern defect correction apparatus comprising the liquid material application unit according to claim 1.

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