KR101247399B1 - Application needle fixing method and liquid state material application apparatus and defect correction apparatus - Google Patents

Abstract

assignment

Provided is a method for fixing a coating needle that can easily and easily reapply the coating needle to the drive shaft of the driving apparatus.

Solution

In this ink application mechanism 4, the magnets M1 and M2 are provided in the application needle holder 24 and the fixed base 25, respectively, and the application needle holder 24 is formed by the magnetic attraction force between the magnets M1 and M2. ) And the end surfaces (E1, E2) of the coating needle holder (24) by the centripetal force between the magnets (M1, M2) while adsorbing the back surface of the fixed base (25) to the reference surface (F) of the fixed base (25). Press firmly on the reference cross sections (E3, E4). Therefore, the coating needle holder 24 can be easily attached to the fixed base 25 with good reproducibility.

Applicator

Description

APPLICATION NEEDLE FIXING METHOD AND LIQUID STATE MATERIAL APPLICATION APPARATUS AND DEFECT CORRECTION APPARATUS}

BRIEF DESCRIPTION OF THE DRAWINGS The figure which shows the whole structure of the defect correction apparatus by one Embodiment of this invention.

FIG. 2 is a diagram showing the configuration of the ink application mechanism shown in FIG. 1. FIG.

FIG. 3 is a view showing the configuration and fixing method of the applicator holder and the fixing base shown in FIG. 2; FIG.

4 is a view for explaining the centripetal force between two magnets shown in FIG.

FIG. 5 is a diagram showing the positional relationship of two magnets shown in FIG. 3; FIG.

6 is a diagram illustrating a comparative example of the embodiment.

7 is a diagram illustrating a modification of the embodiment.

8 is a diagram illustrating a defect occurring in a color filter.

<Code description>

1: observation optical system 2: CCD camera

3: laser 4: ink application mechanism

5: illumination for curing ink 6: color filter substrate

7: Z axis table 8: X axis table

9: Y axis table 10: Control computer

l1: operation panel 21: coating needle

22: coating needle drive cylinder 23: drive shaft

24, 50: coating needle holder 25, 51: fixed base

26: rotation table 27-30: ink tank

31 cleaning device 32 air purge device

33: rotation axis 34, 40: notch

35: motor 36: index plate

37: index sensor 38: reference point return sensor

M1, M2: Magnet E1, E2: Cross section

E3, E4: reference section F: reference plane

41: screw hole 42: fixing screw

100: black matrix 101: R pixels

102: G pixel 103: B pixel

104: white defect 105: black defect

106: foreign body defect

Technical field

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for fixing a coating needle, a liquid material applying mechanism, and a defect correction device, and in particular, a method for fixing a coating needle for applying a liquid material to a micro area on a substrate to a drive shaft of a driving device, and using the same. A liquid material application mechanism and a defect correction apparatus.

Conventional technology

In recent years, with the increase in size and precision of LCDs (liquid crystal displays), the number of pixels has increased, and manufacturing LCDs without defects has become difficult, and the probability of occurrence of defects has also increased. In such a situation, in order to improve the yield, a defect correction apparatus for correcting defects occurring in the manufacturing process of the color filter of the LCD has been indispensable in the production line.

(A)-(c) is a figure which shows the defect which arises at the manufacturing process of the color filter of LcD. 8 (a) to 8 (c), the color filter includes a transparent substrate, a lattice pattern called a black matrix 100 formed on the surface thereof, a plurality of sets of R (red) pixels 101 and G ( Green) pixel 102, and B (blue) pixel I03. In the manufacturing process of the color filter, as shown in Fig. 8A, the white defect 104 in which the color of the pixel and the black matrix 100 is missing, or as shown in Fig. 8B, The black defect 105 in which the pixel and the color are mixed or the black matrix 100 is projected out of the pixel, or the foreign defect 106 in which foreign matter adheres to the pixel as shown in FIG. Occurs.

As a method for correcting the white defect 104, an ink applying mechanism attaches ink of the same color as the pixel where the white defect 104 exists to the tip of the coating needle, and white ink the ink attached to the tip of the coating needle. There is a method of applying and correcting to 104 (see, for example, Japanese Patent Laid-Open No. 9-236933). In addition, as a method of correcting the black defect 105 or the foreign matter defect 106, the defect portion is laser cut to form a rectangular white defect 104, and then attached to the tip of the coating needle by an ink applying mechanism. There is a method of applying ink to the white defect 104 and correcting it (see, for example, Japanese Patent Laid-Open No. 0-262520).

In the ink application mechanism, the application needle is fixed to the application needle holder, a fixed base is provided at the distal end of the drive shaft of the drive cylinder, and the application needle holder is attached to the fixed base with a fixed screw. Moreover, in order to ensure the reproducibility of the coating needle position at the time of application | coating needle replacement, the coating needle holder is fixed to the fixed base in the state which pressed the cross section of the coating needle holder to the reference cross section of the fixed base. After the application of the coating needle holder, it is necessary to confirm the tip position of the coating needle in advance in order to determine the application position of the ink. At this time, when the coating needle tip position is greatly shifted at the time of fixing the coating needle holder, it takes a very long time to confirm the tip position of the coating needle.

In general, the production of color filters is performed in a clean room in order to prevent the occurrence of defects due to dust (foreign matter). In a clean room, it is mandatory for workers to wear clean wear, to mount masks, and to wear thin rubber gloves in order to suppress the occurrence of extreme dust.

In such a working style, the work of attaching the small applicator holder by using a small fixing screw while pressing the reference cross section of the fixing base is not easy, and for unfamiliar workers, the fixing position of the applicator holder is shifted. There is a case. In addition, the coating needle holder may be dropped to damage the coating needle.

Then, the main object of this invention is to provide the coating needle fixing method which can attach | attach a coating needle easily and reproducibly to the drive shaft of a drive apparatus, a liquid material application | coating mechanism, and a defect correction apparatus using the same.

Means for solving the problem

The coating needle fixing method according to the present invention is a coating needle fixing method for fixing a coating needle for applying a liquid material to a fine region on a substrate to a drive shaft of a driving apparatus, wherein the proximal end of the coating needle is fixed to the coating needle holder. And a fixed base having a second reference plane at the distal end of the drive shaft, a first magnet and a second magnet provided at the coating needle holder and the fixed base, respectively, and having a magnet between the first and second magnets. The application needle holder is attracted to the first reference plane by the suction force, and the centripetal force between the first and second magnets caused by the displacement of the first and second magnets in the direction parallel to the first reference plane is It is characterized in that the end face of the coating needle holder is pressed against the second reference plane.

Moreover, the liquid material application | coating mechanism which concerns on this invention is a liquid material application | coating mechanism which apply | coats the liquid material adhering to the front-end | tip part of a coating needle to the micro area | region on a board | substrate, The drive apparatus which has a drive shaft which drives a coating needle, The base end part has the applicator holder fixed, the fixed base provided in the front-end | tip part of a drive shaft with the 1st and 2nd reference planes, and the 1st and 2nd magnet provided in the immersion holder and the fixed base, respectively, And the first and second magnets generated by the positional displacement of the first and second magnets in a direction parallel to the first reference plane while adsorbing the applicator holder to the first reference plane by the magnetic attraction force between the second magnets. The cross section of the coating needle holder is pressed against the second reference plane by the centripetal force between the second magnets.

Preferably, the stationary base also has a third reference plane, and the first and second magnets press the two cross sections of the applicator holder onto the second and third reference planes respectively by centripetal force.

Also preferably, the applicator holder and the fixed base are made of a nonmagnetic material.

In the defect correction apparatus according to the present invention, the minute region on the substrate is a defect portion of a fine pattern formed on the substrate, the liquid material is a correction liquid for correcting the defect portion, and the liquid material applying mechanism and the defect portion for It is characterized by including the correction head which also contains an observation optical system, and the positioning mechanism which performs positioning by moving a board | substrate and a correction head relatively.

In the method of fixing the coating needle according to the present invention, the liquid material applying mechanism and the defect correcting apparatus using the same, the base end of the coating needle is fixed to the coating needle holder, and the fixed base having the first and second reference planes is attached to the distal end of the drive shaft. The first and second magnets are provided in the applicator holder and the fixed base, respectively, and the applicator holder is adsorbed to the first reference plane by the magnetic attraction force between the first and second magnets. The cross section of the coating needle holder is pressed against the second reference plane by the centripetal force between the first and second magnets caused by the positional displacement of the first and second magnets in the direction parallel to the reference plane of one. Therefore, the application needle can be easily attached to the drive shaft of the drive device with good reproducibility, compared with the conventional art provided by using a small fixing screw while pressing the application needle holder on the reference cross section of the fixed base.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the whole structure of the defect correction apparatus by one Embodiment of this invention. In FIG. 1, the defect correcting apparatus is classified into a largely divided into an observation optical system 1, a CCD camera 2, a laser 3, an ink application mechanism 4, and an ink curing illumination 5. The X-axis is mounted with a Z-axis table 7 and a Z-axis table 7 for moving the correction head portion, the defect correction head portion in a vertical direction (Z-axis direction) with respect to the color filter substrate 6 to be corrected. An X-axis table 8 for moving in the direction, a Y-axis table 9 for mounting the color filter substrate 6 and moving in the Y-axis direction, a control computer 10 for controlling the operation of the entire apparatus, and And an operation panel 11 for inputting a command from the operator to the control computer 10.

The observation optical system 1 is for observing the surface state of the color filter board | substrate 6 and the state which apply | coated the ink with the ink application | coating mechanism 4. The image observed by the observation optical system 1 is converted into an electrical signal by the CCD camera 2 and displayed on the monitor screen of the control computer 10. The ink application mechanism 4 applies the ink to the whiteness of the surface of the color filter substrate 6 and corrects it. The ink curing illumination 5 irradiates light for curing the ink applied by the ink application mechanism 4. When the ink is of ultraviolet curing type, ultraviolet light is selected as the ink curing light 5 and mounted on the device. When the ink is of the thermosetting type, halogen illumination is selected as the ink curing illumination 5 and mounted in the apparatus. The laser 3 is used for whitening by removing black defects and foreign defects. By the arrangement of this apparatus, white defects, black defects and foreign matter defects generated in the color filter can be corrected.

2 is a partially omitted perspective view showing the configuration of the ink application mechanism 4. In FIG. 2, the ink application mechanism 4 includes an application needle 21 for applying ink and an application needle drive cylinder 22 for vertically driving the application needle 21. The coating needle 21 is provided at the tip end of the drive shaft 23 of the coating needle driving cylinder 22 via the coating needle holder 24 and the fixed base 25.

In addition, the ink application mechanism 4 includes a rotary table 26 provided horizontally, and on the rotary table 26 a plurality of ink tanks 27 to 30 are sequentially arranged in the circumferential direction and rotated further. The cleaning device 31 and the air purge device 32 are provided on the table 26. At the center of the rotary table 26, a rotary shaft 33 is erected. Moreover, the notch part 34 for passing the coating needle 21 at the time of ink application | coating is formed in the rotary table 26. As shown in FIG. Inks of respective colors of R (red), G (green), B (blue) and black are appropriately injected into the ink tanks 27 to 30, respectively. The cleaning apparatus 31 is for removing the ink adhering to the coating needle 21, and the air purging device 32 is for blowing off the cleaning liquid attached to the coating needle 21.

In addition, the ink application mechanism 4 includes an index plate 36 which also includes an index motor 35 for rotating the rotary shaft 33 of the rotary table 26, and which rotates together with the rotary shaft 33. And the index sensor 37 for detecting the rotational position of the rotary table 26 through the index plate 36 and the rotational position of the rotary table 26 returned to the origin through the index plate 36. A reference point return sensor 38 is provided. The motor 35 is controlled based on the outputs of the sensors 37 and 38, and rotates the rotary table 26 to notches 34, ink tanks 27 to 30, the cleaning device 31, and the air purge device. Any one of (32) is positioned below the coating needle 21.

In addition, the coating needle driving cylinder 22 and the motor 35 are fixed to the Z-axis table 7, and the color filter substrate 6 to which the Z-axis table 7 and the defect correction are made is an X-axis table ( 8) and Y-axis table 9 for relative positioning.

Next, the operation of this ink application mechanism 4 will be described. First, the X-axis table 8, the Y-axis table 9, and the Z-axis table 7 are driven, and the tip of the coating needle 21 is positioned at a predetermined position above the defective portion of the color filter substrate 6. do. Subsequently, the rotary table 26 is rotated by the motor 35, and the ink tank (for example, 27) to be fired is moved below the coating needle 21. Next, the coating needle 21 is driven up and down by the coating needle driving cylinder 22, and ink adheres to the tip of the coating needle 21.

Subsequently, the rotary table 26 is rotated by the motor 35, and the notch part 34 is moved below the coating needle 21. Next, the coating needle 21 is driven up and down by the coating needle driving cylinder 22, and the ink adhering to the distal end of the coating needle 21 is applied to the defective portion of the color filter substrate 6.

At the time of washing | cleaning the coating needle 21, the rotating table 26 is rotated by the motor 35, and the washing | cleaning apparatus 31 is moved below the coating needle 21. As shown in FIG. Next, the coating needle 21 is driven up and down by the coating needle driving cylinder 22, and the ink adhering to the coating needle 21 is washed. Subsequently, the rotary table 26 is rotated by the motor 35, and the air purge device 32 is moved below the coating needle 21. Next, the coating needle 21 is driven up and down by the coating needle driving cylinder 22, and the cleaning liquid attached to the coating needle 21 is blown off.

Fig.3 (a)-(c) is a figure which shows the coating needle fixing method which is a characteristic of an apparatus to this defect number. In FIGS. 3A to 3C, the coating needle holder 24 is formed in a rectangular flat plate shape. The coating needle 21 is oriented in the same direction as the long side of the coating needle holder 24, and the proximal end thereof is fixed to one short side of the coating needle holder 24. The end surface E1 of the other short side of the coating needle holder 24, and the end surface E2 of the one long side side are used for the alignment of the coating needle 21. As shown in FIG. The corners of the cross section (E1 and E2) are cut away. A magnet (permanent magnet) M1 is embedded at a predetermined position on the surface of the coating needle holder 24.

The fixed base 25 has a shape in which one corner portion of a rectangular thick plate is shaved by the size of the coating needle holder 24, and is fixed to the distal end of the drive shaft 23 with its long side vertically directed. have. The fixed base 25 has a reference surface F on which the back surface of the application needle holder 24 is in close contact with the reference surfaces E3 and E4 on which end faces E1 and E2 of the application needle holder 24 are pressed. Include. The reference plane F is located at a lower portion obliquely to the left in the drawing of the fixed base 25, and is provided vertically. The reference cross section E3 is arranged along the short side of the upper side in the drawing of the reference plane F, and the reference cross section E4 is arranged along the long side of the right side in the drawing of the reference plane F. As shown in FIG. The magnet M2 is embedded in the predetermined position of the reference plane F. As shown in FIG.

The N pole (or S pole) of the magnet M1 is the same as the back surface of the application needle holder 24 so that a magnetic attraction force acts between the back surface of the application needle holder 24 and the reference surface F of the fixed base 25. The magnet M1 is assembled to the applicator holder 24 so as to face the direction, and the magnet S (or N pole) of the magnet M2 faces the same direction as the reference plane F of the fixed base 25. M2) is assembled to the fixed base 25. Therefore, when the front surface of the coating needle holder 24 is brought close to the reference surface F of the fixed base 25 with the front end of the coating needle 21 down, the coating needle holder is formed by the magnetic attraction force between the magnets M1 and M2. The rear surface of 24 is adsorbed to the reference surface F of the fixed base 25.

In addition, the end faces E1 and E2 of the coating needle holder 24 are fixed by the centripetal force between the magnets M1 and M2 caused by the displacement of the magnets M1 and M2 in a direction parallel to the reference plane F. The magnets M1 and M2 are disposed so as to be pressed against the reference cross sections E3 and E4 at 25.

That is, as shown in (a) and (b) of FIG. 4, the magnets M1 and M2 are moved to a distance such that the S pole of the magnet M1 and the N pole of the magnet M2 pull each other on the magnetic attraction force. In close proximity, the magnetic flux from the N pole of magnet M2 is directed straight to the S pole of magnet M1. In addition, as there is a force to be reduced in the stretched rubber band, a force is also applied to the magnetic flux. By this force, as illustrated in FIGS. 4C and 4D, the magnets M1 and M2 whose centers are shifted from each other try to move to a position where the centers of each other coincide with each other. This force is called centripetal force.

FIG. 5: is a figure which shows the upper and lower relationship of the magnets M1 and M2 when the coating needle holder 24 is in close contact with the fixed base 25. As shown in FIG. In Fig. 5, when the applicator holder 24 is in close contact with the fixed base 25, the magnet M1 is disposed obliquely below the left side of the magnet M2. In other words, the magnet M1 is disposed below the magnet M2 by ΔZ and disposed on the left side of the magnet M2 by ΔX. For this reason, the centripetal force by the position shift of the magnets M1 and M2 demonstrated in FIG.4 (a)-(d) arises in the direction of the arrow A in the figure, and the cross section E1 of the coating needle holder 24 is carried out. , E2) is fixed in the form of being pressed against the reference sections E3 and E4 of the fixed base 25.

In addition, in order to generate the centripetal force between the magnets M1 and M2 more effectively, it is more preferable to form the application needle holder 24 and the fixed base 25 with a nonmagnetic material. When the coating needle holder 24 and the fixed base 25 are formed of a magnetic material, the magnetic flux emitted from the magnets M1 and M2 is spread to the magnetic material portions of the outer periphery of the magnets M1 and M2, so that the centripetal force is increased. It is because it weakens.

In this embodiment, the magnets M1 and M2 are provided in the application needle holder 24 and the fixed base 25, respectively, and the back surface of the application needle holder 24 is formed by the magnetic attraction force between the magnets M1 and M2. Is applied to the reference surface F of the fixed base 25 and applied by centripetal force between the magnets M1 and M2 caused by the positional displacement of the magnets M1 and M2 in a direction parallel to the reference surface F. End faces E1 and E2 of the needle holder 24 are pressed against the reference end faces E3 and E4 of the fixed base 25. Therefore, even if the worker is equipped with clean wear, a mask, and rubber gloves in the clean room, the application needle holder 24 can be easily and reproducibly attached to the fixed base 25.

6 (a) to 6 (c) are diagrams showing a comparative example of this embodiment, which are contrasted with FIGS. 3 (a) to 3 (c). In (a) to (c) of FIG. 6, this comparative example differs from the coating needle fixing method in FIGS. 3A to 3C to assemble the magnet M1 to the coating needle holder 24. Instead, the notch 40 is formed, and instead of assembling the magnet M2 in the fixed base 25, a screw hole 41 is formed, and the applicator holder 24 is fixed to the fixed base 25. It is fixed at (42).

In this comparative example, the worker wearing the cleanwear, mask, and rubber gloves presses the end faces E1 and E2 of the application needle holder 24 against the reference end faces E3 and E4 of the fixing base 25, It is necessary to tighten (42), and it was not easy to provide the applicator holder 24 in the fixed base 25 with high reproducibility. A gap is formed between the end faces E1 and E3 or between the end faces E2 and E4, and the reproducibility of the tip position of the applicator 24 before and after the replacement of the applicator 24 is deteriorated, or the applicator holder is There is a problem in that the coating needle 21 is broken by dropping (24).

On the other hand, in this invention, it is not necessary to tighten the fixing screw 42, and workability improves. Further, the end faces E1 and E2 of the applicator holder 24 need not be firmly fixed to the reference end faces E3 and E4 of the fixed base 25, so that even an unfamiliar operator can reliably apply the applicator holder ( 24) it becomes possible to fix it. In addition, when the applicator holder 24 is brought close to the fixed base 25, the applicator holder 24 is attracted to the fixed base 25 by the magnetic attraction force of the magnets M1 and M2. The possibility of damaging the coating needle 21 by dropping 24) also becomes low. Moreover, when removing the coating needle holder 24, it is only necessary to remove it from the fixed base 25, and workability improves very much.

7A to 7D are views showing a modification of this embodiment, which are contrasted with FIGS. 3A and 3B. In FIGS. 7A to 7D, the modification is different from the method of fixing the needle of FIG. 3, wherein the needle holder 24 and the fixed base 25 are respectively applied to the needle holder 50 and the fixed base. It is a point substituted by (51). The coating needle holder 50 is formed in a rectangular flat plate shape. The coating needle 21 is oriented in a direction perpendicular to the surface of the coating needle holder 50, and the proximal end thereof is fixed to one short side of the rear surface. The end surface E1 of the other short side of the coating needle holder 50 and the end surface E2 of one long side of the coating needle holder 50 are used for the alignment of the coating needle 21. The edge where the cross sections E1 and E2 intersect is cut off. The magnet M1 is embedded at a predetermined position on the back surface of the coating needle holder 50.

In addition, the fixed base 51 has a shape in which one corner portion of the surface of the horizontal portion of the chair-shaped block is cut out by the size of the rear surface of the coating needle holder 50, and the rear surface of the vertical portion of the driving shaft 23 is formed. It is fixed to the tip. The fixed base 51 includes a reference plane F on which the back surface of the applicator holder 50 is in close contact, and reference planes E3 and E4 on which end faces E1 and E2 of the applicator holder 50 are pressed together, respectively. do. The reference plane F is provided horizontally. The magnet M2 is embedded in the predetermined position of the reference plane F. As shown in FIG.

The N pole (or S pole) of the magnet M1 is the same as the back surface of the application needle holder 50 so that a magnetic attraction force acts between the back surface of the application needle holder 50 and the reference surface F of the fixed base 51. The magnet M1 is assembled to the applicator holder 50 so as to face the direction, and the magnet S (or N pole) of the magnet M2 faces the same direction as the reference plane F of the fixed base 51. M2) is assembled to the fixed base 51. Therefore, when the front surface of the coating needle holder 50 is brought down to the reference surface F of the fixed base 51 with the front end of the coating needle 21 down, the coating needle holder is formed by the magnetic attraction force between the magnets M1 and M2. The back surface of 50 is attracted to the reference surface F of the fixed base 51.

In addition, the end faces E1 and E2 of the coating needle holder 50 are fixed by the centripetal force between the magnets M1 and M2 caused by the misalignment of the magnets M1 and M2 in a direction parallel to the reference plane F. The magnets M1 and M2 are disposed so as to be pressed against the reference end surfaces E3 and E4 of 51. The centripetal force is as described in FIGS. 4 and 5. Even with this modification, the same effects as in the embodiment can be obtained.

It should be thought that embodiment disclosed this time is an illustration and restrictive at no points. The scope of the present invention is shown by above-described not description but Claim, and it is intended that the meaning of a claim and equality and all the changes within a range are included.

In the method of fixing the coating needle according to the present invention, the liquid material applying mechanism and the defect correcting apparatus using the same, the base end of the coating needle is fixed to the coating needle holder, and the fixed base having the first and second reference surfaces is attached to the tip of the drive shaft. The first and second magnets are provided in the applicator holder and the fixed base, respectively, and the applicator holder is adsorbed to the first reference plane by the magnetic attraction force between the first and second magnets. The cross section of the coating needle holder is pressed against the second reference plane by the centripetal force between the first and second magnets caused by the positional displacement of the first and second magnets in the direction parallel to the reference plane of one. Therefore, the application needle can be easily attached to the drive shaft of the drive device with good reproducibility, compared with the conventional art provided by using a small fixing screw while pressing the application needle holder on the reference cross section of the fixed base.

Claims (5)

A method of fixing a coating needle for fixing a coating needle for applying a liquid material to a minute region on a substrate to a drive shaft of a driving device, Fixed the proximal end of the applicator to the applicator holder, A fixed base having first and second reference planes is provided at the distal end of the drive shaft, First and second magnets are provided on the applicator holder and the fixed base, respectively; The applicator holder is attracted to the first reference plane by a magnetic attraction force between the first and second magnets, and the positions of the first and second magnets in a direction parallel to the first reference plane. And a cross section of said coating needle holder is pressed against said second reference surface by a centripetal force between said first and second magnets caused by misalignment. A liquid material application mechanism for applying a liquid material adhering to the tip of a coating needle to a minute region on a substrate, A drive device having a drive shaft for driving the applicator, An applicator holder having a proximal end of the applicator fixed thereto; A fixed base having first and second reference planes, the fixed base being provided at the distal end of the drive shaft; Each of the first and second magnets provided in the coating needle holder and the fixed base; The applicator holder is attracted to the first reference plane by magnetic attraction between the first and second magnets, and the positions of the first and second magnets in a direction parallel to the first reference plane. A cross section of the coating needle holder is pressed against the second reference surface by a centripetal force between the first and second magnets caused by the misalignment. 3. The method of claim 2, The stationary base also has a third reference plane, And said first and second magnets press two end faces of said coating needle holder onto said second and third reference planes respectively by said centripetal force. 3. The method of claim 2, And the coating needle holder and the fixed base are made of a nonmagnetic material. The liquid region application mechanism according to any one of claims 2 to 4, wherein the minute region on the substrate is a defect portion of a fine pattern formed on the substrate, and the liquid material is a correction liquid for correcting the defect portion. A correction head including an observation optical system for observing the defect portion, And a positioning mechanism for positioning by moving the substrate and the correction head relative to each other.

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