JP2006088091A - Drawing method for liquefied body, drawing apparatus for liquefied body, production method for electrooptical apparatus, electrooptical apparatus, driving method for electrooptical apparatus and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drawing method for a liquefied body, a drawing apparatus for the liquefied body and a production method for an electrooptical apparatus by which ink is discharged after confirming a shape of a partition wall when the ink is discharged into a pixel region surrounded by the partition wall provided on a substrate and thereby yield at the time of production is improved and production cost is reduced, and further to provide the electrooptical apparatus, a driving method for the electrooptical apparatus and electronic equipment. <P>SOLUTION: In the drawing apparatus for the liquefied body 50, the liquefied body 50 is discharged into pixel regions 118R, 118G, 118B surrounded by the liquid-repellent partition wall 255 formed on the substrate to draw a picture. The drawing apparatus is provided with a detection means 41 for detecting the shape of the partition wall 255 at a predetermined position and a storage means 43 for storing a standard established in advance and further is provided with a comparison means 44 for comparing detection result by the detection means 41 with the standard stored in the storage means 43 and discriminating whether the shape is normal or not. Further, the drawing apparatus is provided with a drawing decision means 45 for deciding stop of discharge of the liquefied body 50 when discriminating result by the comparison means 44 is abnormal. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a liquid drawing method, a liquid drawing device, an electro-optical device manufacturing method, an electro-optical device, an electro-optical device driving method, and an electronic apparatus.

In recent years, electro-optical devices have been used in a wide range of applications such as displays for personal computers and mobile phones. As such an electro-optical device, a liquid crystal display device, an organic EL device, a PDP (plasma display panel), an FED (electron emission display), and the like are known.
By the way, in the manufacture of an electro-optical device, a droplet discharge method (ink jet method) is used for reasons such as simplification of processes. For example, in a liquid crystal display device, a droplet discharge method is used when manufacturing a color filter. Specifically, a technique is known in which RGB inks are accurately applied to a pixel region surrounded by an ink-repellent partition wall by a droplet discharge method (see, for example, Patent Document 1).
JP 2000-221319 A

By the way, in the process of manufacturing the color filter, the ink (liquid material) is discharged to the pixel region and then dried. Then, the volume of the liquid material decreases due to drying. Therefore, when ink is ejected into the pixel region, it is necessary to eject a sufficient amount of ink to the pixel region so that the film thickness does not become insufficient when dried.
However, if a sufficient amount of ink is ejected in this way, the ink may overflow from the pixel area. Therefore, ink is prevented from overflowing by imparting ink repellency to the partition walls, and mixing with the ink in the adjacent pixel region is prevented. For example, when the side edge portion of the partition wall is substantially perpendicular, the ink cannot get over the corner portion even when a sufficient amount of ink is ejected to the pixel region. Therefore, ink does not flow into the adjacent pixel area by being held in the pixel area.

However, the partition wall is formed by, for example, applying a photosensitive resin on a substrate (glass substrate) and then using a photolithography method, and the shape of the partition wall obtained varies depending on conditions such as etching. End up.
For example, when the side edge of the partition wall is rounded and becomes gentle, even if the partition wall has high ink repellency and the contact angle of ink is high, the ink flows into the area of the adjacent pixel. . Therefore, the color filter cannot express an accurate color by mixing with the ink in the adjacent pixel region, resulting in a failure. Even if the corners of the partition walls are not rounded, if foreign matter such as fine dust or dirt is present on the partition walls, the ink will flow out from the partition walls through the foreign matter, resulting in color mixing with the ink of the adjacent pixels. There is a risk of failure.

Therefore, it is preferable to confirm the shape of the partition before ejecting ink to the pixel region. However, in order to investigate the ink repellency of the partition wall, it can be confirmed only by actually ejecting ink onto the substrate on which the partition wall is formed, and the substrate once ejected with ink cannot be reused.
Moreover, it takes much time to measure the shape of all the partition walls formed on the substrate, which is not practical. Therefore, in the current ink jet method, there is a problem that the manufacturing yield decreases and the manufacturing cost increases because the liquid droplets are ejected and drawn without inspecting the state of the formed partition wall. .

  The present invention has been made in view of the above circumstances, and when ink is ejected to a pixel region surrounded by a partition provided on a substrate, the yield during manufacturing is confirmed by ejecting the ink after confirming the shape of the partition. An object of the present invention is to provide a liquid drawing method, a liquid drawing apparatus, an electro-optical device manufacturing method, an electro-optical device, an electro-optical device driving method, and an electronic apparatus.

  In order to solve the above problems, in the liquid material drawing method of the present invention, the liquid material drawing method for discharging and drawing the liquid material on the pixel region surrounded by the liquid repellent partition formed on the substrate Detecting the shape of the partition wall at a predetermined position, comparing the detection result of the shape with a preset reference, and determining whether the shape is normal, and the determination result And a step of discharging the liquid material to the pixel region when it is normal and stopping discharging the liquid material to the pixel region when the determination result is not normal. And

According to the liquid material drawing method of the present invention, after detecting the shape of a predetermined position of the partition wall, the detection result is compared with a preset reference, so that the partition wall is discharged before the liquid material is discharged to the pixel region. If the shape of the partition is determined to be abnormal, such as when the height of the partition is low compared to the reference, or when the side edge of the partition is rounded and smooth, Discontinue the discharge.
Therefore, since the liquid material is not discharged to the pixel region surrounded by the abnormally shaped partition wall, the liquid material is prevented from overflowing from the pixel region and mixing with the liquid material in the adjacent pixel region. it can. Further, the shape defect of the partition wall constituting the pixel region is determined before the liquid material is discharged, and the liquid material is not discharged to the pixel region. Therefore, the liquid material is applied only to the pixel region including the normal shape partition wall. Thus, the production yield can be improved and the production cost can be reduced.
Moreover, by limiting the position where the shape of the partition wall is detected to a predetermined position, the amount of partition wall shape data can be reduced, and the determination time for comparison with a preset reference can be shortened.

In addition, when the pixel region is rectangular, elliptical, or oval when viewed in plan, the predetermined position is preferably a position corresponding to the central portion of the long axis in the pixel region.
When the pixel region has a rectangular shape (rectangular shape) in a plan view, it has been experimentally confirmed that the position where the liquid material is most likely to overflow is the center of the long side (long axis) of the rectangle. Therefore, by detecting the shape of the partition wall corresponding to the central portion, it is possible to efficiently prevent the liquid material from overflowing from the pixel region. In addition, when the pixel region is in the shape of an ellipse or an ellipse in a plan view, the shape of the partition corresponding to the circumference of the large curvature or the central portion of the straight line portion is detected, and the rectangular shape described above is detected. As in the case, it is possible to efficiently prevent the liquid material from overflowing.

In addition, when the pixel area is a convex polygon in a plan view, the predetermined position is preferably a position corresponding to the center of the longest side in the pixel area.
In this way, it is possible to efficiently prevent the liquid material from overflowing from the pixel region, as in the case of the rectangular shape, the elliptical shape, and the elliptical shape.

In addition, after the discharge of the liquid material is stopped according to the determination result, a step of changing the discharge method of the liquid material to the previously performed discharge method may be provided.
In this way, by changing to an optimum liquid material discharge method according to the shape of the partition walls constituting the pixel region, the occurrence of defects due to the overflow of the liquid material is eliminated and the reliability is improved. Yield can be improved.

Further, as a change in the ejection method, it is preferable to reduce the amount of the liquid material ejected to the pixel region.
In this way, for example, when the amount of the normal liquid material is discharged to the pixel region, and the liquid material overflows and mixes with the liquid material of the adjacent pixel region, the amount of the liquid material to be discharged is reduced. Thus, the liquid material can be prevented from overflowing from the pixel region. Therefore, it is possible to prevent a defect due to color mixture from occurring in the pixel region and improve the yield.

Moreover, as a change of the said discharge method, you may discharge the other liquid body different from the liquid body discharged previously.
In this way, for example, by discharging a liquid suitable for the shape of the partition to a pixel region having an abnormal shape of the partition, for example, a defect due to overflow of the liquid can be prevented.

The other liquid material may be blacker than the previously discharged liquid material.
For example, when a color filter is manufactured, if the discharged liquid material overflows from the pixel region, it mixes with the liquid material in the adjacent pixel region, resulting in a defective pixel. Therefore, by ejecting a black liquid material, the pixel area is intentionally set as a defective pixel, thereby preventing a color defect due to color mixture of the liquid material. At this time, the defective pixel is black, but even if, for example, several portions in the pixel group constituting the large screen are black, this is not visually recognized as a defective pixel, and thus there is no problem in practical use.

The other liquid material may be thinner than the previously discharged liquid material.
In this way, for example, when manufacturing a color filter, it is possible to reduce the influence of color mixing when the liquid material overflows and mixes with the liquid material in the adjacent pixel region by discharging a thin liquid material.

Further, as the other liquid material, a material having higher transparency than the previously discharged liquid material may be used.
In this way, for example, when a color filter is manufactured, the influence of color mixture with the liquid material in the adjacent pixel region can be further reduced by discharging the liquid material with high transparency. If the shape of the partition walls is not normal, the subsequent process may be affected if the liquid material is not discharged to the pixel region. Therefore, the film thickness and surface state can be adjusted by drawing a liquid material with high transparency. it can.

Moreover, as said other liquid body, a viscosity may be higher than the liquid body discharged previously.
In this way, since the viscosity of the discharged liquid material is high, the liquid material from the pixel region can be prevented from overflowing, the occurrence of defects can be prevented, and the yield can be improved.

Moreover, it is preferable to use light as a means for detecting the shape.
In this way, for example, the shape of the partition can be easily detected by reflecting the light on the surface of the partition and receiving the reflected light by the light receiving unit or the like.

Moreover, it is preferable that the said light is a wavelength which does not reduce the liquid repellency which the said partition has.
In this way, even if light is used for detecting the shape of the partition wall, the liquid repellency of the partition wall is not lowered, and therefore light can be employed as the detection means.

The light is preferably laser light.
In this way, since the laser light has a short wavelength, only light having a wavelength that does not deteriorate the liquid repellency of the partition wall as described above can be used for detecting the shape of the partition wall. Further, since the laser light has a small range of light irradiation, the shape of the partition wall at the pinpoint can be accurately detected.

  In the liquid material drawing apparatus of the present invention, in the liquid material drawing device for discharging and drawing the liquid material from the droplet discharge head to the pixel region surrounded by the liquid-repellent partition formed on the substrate, The detection means for detecting the shape of the partition at a predetermined position, the storage means for storing a preset reference, the detection result by the detection means and the reference by the storage means are compared, and the shape is normal. Comparing means for determining whether or not there is present, and drawing determining means for determining whether or not to discharge the liquid material when the determination result is not normal based on the result of the comparing means.

  According to such a liquid material drawing apparatus, after the shape of the predetermined position of the partition wall is detected by the detection unit, the comparison result is compared with the reference stored in the storage unit in the comparison unit, and the shape of the partition wall When the liquid is not normal, the discharge of the liquid material to the pixel area formed by the partition wall is stopped, so that the liquid material overflows from the pixel area and is mixed with the liquid material in the adjacent pixel area, thereby generating a defect. Can be prevented. Further, it is detected that the shape of the partition wall constituting the pixel region is not normal before discharging the liquid material, and the liquid material is not discharged to this pixel region. Only the liquid material can be discharged, the manufacturing yield can be improved, and the manufacturing cost can be reduced.

Further, when the droplet discharge head relatively moves on the substrate, the detection means moves relative to the substrate in conjunction with the droplet discharge head. It is preferably supported directly or indirectly.
According to this configuration, when the droplet discharge head relatively moves on the pixel area formed on the substrate, the detection unit relatively moves on the pixel area by interlocking with the droplet discharge head. Since it moves, the shape of the partition wall that forms the pixel region can be detected easily and reliably.

The electro-optical device manufacturing method of the present invention is characterized by using the liquid material drawing method of the present invention.
According to such an electro-optical device manufacturing method, for example, in the case of a pixel region surrounded by partitions lower than the reference, the pixel region is configured such that the amount of the liquid material is reduced to prevent the liquid material from overflowing. Since the liquid material can be discharged in accordance with the shape of the partition wall to be formed, the yield can be improved and the manufacturing cost can be reduced.

The electro-optical device obtained by the method for manufacturing an electro-optical device of the present invention may be a liquid crystal display device.
In this way, for example, when a color filter is manufactured in a liquid crystal display device, if the present invention is adopted, it is possible to prevent the liquid material from being discharged into a pixel region including a partition having an abnormal shape. Therefore, by preventing the occurrence of defects such as color mixing with the liquid material in the adjacent pixel region due to overflow of the discharged liquid material, the yield at the time of manufacturing the color filter is improved, and the liquid crystal display device including the same is manufactured. Cost can be reduced and reliability can be improved.

The electro-optical device obtained by the method for manufacturing an electro-optical device of the present invention may be an organic EL display device.
In this way, for example, when a functional layer such as a light emitting layer in an organic EL display device is manufactured, if the present invention is adopted, the discharged liquid material overflows into a region surrounded by a partition having an abnormal shape. Therefore, it can be prevented from becoming defective. Therefore, it is possible to improve the reliability of the organic EL display device by improving the yield at the time of manufacturing the organic EL device and further including a functional layer that prevents defects.

In the driving method of the electro-optical device according to the aspect of the invention, when the discharge of the liquid material to the pixel region is stopped or the discharge method is changed, the position data of the pixel region where the stop or the discharge method is changed is obtained. Based on the stored position data, the pixel corresponding to the position data is driven to be different from other pixels.
In such a driving method of the electro-optical device, when the discharge of the liquid material to the pixel region is stopped or the discharge method is changed, the position data of the pixel region where the stop or the discharge method is changed is obtained. Since the storage is performed, the electro-optical device can be reliably driven by adopting a driving method suitable for the pixel area in which the cancellation or the ejection method is changed based on the content of the cancellation or the change. .

Moreover, it is preferable that the electronic apparatus of the present invention includes the electro-optical device.
In the electronic apparatus according to the present invention, the yield at the time of manufacture is improved and the electro-optical device having high reliability is provided. Therefore, the electronic apparatus has high reliability.

  The present invention will be described in detail below. In the following description, the drawing of the liquid material means that the liquid material is arranged in a desired pattern on the substrate as described later by combining discharge and non-discharge of the liquid material.

First, the liquid material drawing apparatus 30 of the present invention will be described.
FIG. 1 is a diagram showing an example of a liquid material drawing apparatus 30 according to the present invention.
As shown in FIG. 1, the liquid material drawing device 30 includes a base 31, a substrate moving unit 32, a head moving unit 33, and a head carriage 42. On the base 31, the substrate moving means 32 and the head moving means 33 are installed. Further, the droplet discharge head 34 for discharging the liquid material is integrally attached to the head carriage 42 so that it can be moved on the glass substrate S to be processed by the head moving means 33 described later. ing. Note that a liquid material supply means (not shown) for supplying the liquid material 50 to be discharged is connected to the droplet discharge head 34 via a tube or the like. Further, the droplet discharge head 34 is schematically shown in FIG. 1, and illustration of detection means to be described later is omitted.

The substrate moving means 32 has guide rails 36 arranged along the Y-axis direction in the figure. The substrate moving means 32 is configured to move the slider 37 along the guide rails 36 and 36 by, for example, a linear motor (not shown). For example, the slider 37 can be moved in the length direction of the guide rails 36, 36, that is, in the Y-axis direction in the drawing in units of 1 μm, for example, and such movement is performed by a control device (not shown) including a computer. )). Further, the position information of the slider 37 is held by the control device.
A stage 39 is fixed on the slider 37, and the stage 39 is for positioning and holding a glass substrate (substrate) S for discharging the liquid material. That is, the stage 39 has a known suction holding means (not shown), and the glass substrate S is sucked and held on the stage 39 by operating the suction holding means.

The head moving means 33 includes a pair of mounts 33a and 33a standing on the rear side of the base 31, and a travel path 33b provided on the mounts 33a and 33a. It is arranged along the middle X-axis direction, that is, the direction perpendicular to the Y-axis direction of the substrate moving means 32 in the drawing. The travel path 33b is formed by having a holding plate 33c passed between the gantry 33a and 33a and a pair of guide rails 33d and 33d provided on the holding plate 33c. A head carriage 42 provided with a droplet discharge head 34 is movably held in the length direction 33d.
The head carriage 42 travels on the guide rails 33d and 33d by the operation of a linear motor (not shown) or the like, and based on such a configuration, the droplet discharge head 34 together with the head carriage 42 in the X-axis direction in the figure. To move to. Similarly to the slider 37, the head carriage 42 can be moved, for example, in units of 1 μm in the X-axis direction in the drawing by a control device (not shown) composed of a computer or the like which will be described later. The position information of the head carriage 42 is held by the control device.

  FIG. 2 is an enlarged side view of the head carriage 42 and the peripheral portion of the droplet discharge head 34 attached to the head carriage 42. As will be described later, the droplet discharge head 34 discharges liquid materials 50R, 50G, and 50B corresponding to RGB colors to predetermined positions (pixel regions) of the glass substrate S held on the stage 39 shown in FIG. Head nozzle portions 34R, 34G, and 34B are formed. The nozzle holes for discharging the liquid material 50 are omitted in FIG.

As will be described later, the head carriage 42 is provided with detection means 41 for detecting the shape of the partition of the glass substrate S that is the object to be processed. In the present embodiment, the detection means 41 includes a light emitting part 40a for emitting laser light from a laser light source and a light receiving part 40b for receiving the reflected light.
The laser light source is not formed on the head carriage 42, but is provided at a position other than the head carriage 42. The laser light source is guided to the emitting portion 40a on the head carriage 42 by using, for example, an optical fiber or other optical system mechanism. You may make it utilize as the detection means 41. FIG.

  The detecting means 41 is connected to a control device C composed of a computer or the like. In this control device C, storage means 43 for storing a preset reference, detection data of the shape of the partition wall detected by the detection means 41, and a reference stored in the storage means 43 are stored. Comparing means 44 for determining whether or not the shape of the partition wall is normal by comparison is provided. Further, the control device C is provided with a discharge data calculation unit 45 serving as a drawing determination unit for determining whether to stop discharging the liquid material based on the result of the comparison unit 44. The ejection data calculation unit 45 is electrically connected to a head control unit 46 for controlling the ejection of the liquid material 50 of the droplet ejection head 34. Accordingly, a command is given to the head control unit 46 according to the calculation result of the discharge data calculation unit 45 to control the pattern in which the droplet discharge head 34 discharges the liquid material 50.

(Liquid crystal display device)
Next, the structure of a liquid crystal display device which is an electro-optical device manufactured by the liquid material drawing device 30 of the present invention will be described. The liquid material drawing device 30 is used in a process of forming a color filter layer (color filter) 120 on a color filter substrate 220 constituting a liquid crystal display device.
FIG. 3A is a plan view of the liquid crystal display device, and reference numeral 200 in the drawing denotes the liquid crystal display device. In FIG. 3A, a part of the color filter substrate 220 is not shown. FIG. 3B is a side cross-sectional view of the liquid crystal display device 200 taken along line HH ′ in FIG.
As shown in FIG. 3B, the liquid crystal display device 200 is obtained by enclosing a liquid crystal 250 in a space formed by a TFT array substrate 210, a color filter substrate 220, and a sealing material 252.

  As shown in FIGS. 3A and 3B, the TFT array substrate 210 is formed by forming a thin film transistor (TFT) as a switching element of each pixel on the surface of a substrate made of glass. A plurality of scanning lines extending from the gate electrode of each TFT are connected to a scanning line driving circuit 204 formed on the peripheral edge of the substrate. An interlayer insulating film is formed above each TFT, and a plurality of data lines are formed on the surface thereof. The source of each TFT is connected to a data line through a through hole, and each data line is connected to a data line driving circuit 201 formed on the peripheral edge of the substrate. Note that a terminal 202 for connecting the scanning line driving circuit 204 and the data line driving circuit 201 to the outside is formed on the peripheral edge of the substrate. Further, an interlayer insulating film is formed above the data line, and a pixel electrode is formed on the surface thereof. The drain of each TFT is connected to the pixel electrode through a through hole. In addition, an alignment film of liquid crystal molecules is formed above the pixel electrode.

  3A, a sealing material 252 made of a thermosetting resin or the like is formed so as to surround the image display area of the TFT array substrate 210. The sealing material 252 is formed all around the TFT array substrate 210. The liquid crystal 250 is sealed inside the seal material 252 as described above. Further, the TFT array substrate 210 and the color filter substrate 220 are bonded to each other through the sealing material 252. As a result, the liquid crystal 250 is sealed in the space formed by the TFT array substrate 210 and the color filter substrate 220 and the sealing material 252. In addition, if a polarizing film is formed on the outer surfaces of the TFT array substrate 210 and the color filter substrate 220, the liquid crystal display device 200 is configured. A plurality of pixels are formed in a matrix in the image display area of the liquid crystal display device 200.

FIG. 4 is a side sectional view of the color filter substrate 220.
As shown in FIG. 4, the color filter substrate 220 includes a glass substrate S and a partition wall 255 formed on the glass substrate S. In each region surrounded by the partition wall 255, a pixel region 118 (118R, 118G, 118B) is formed. The pixel region 118 includes three regions of red (R), green (G), and blue (B). Color filter layers 120 (120R, 120G, 120B) of colors are formed. In addition, a protective film 256 covering the color filter layer 120 and the partition wall 255 is formed on the glass substrate S in order to flatten the glass substrate S and protect the color filter substrate 220.

FIG. 5 is a plan view showing the shape of the partition 255 formed on the glass substrate S. As shown in FIG.
As shown in FIG. 5, the pixel regions 118R, 118G, and 118B are rectangular in a plan view, and the pixel regions 118R, 118G, and 118B are arranged in a conventionally known stripe type in this embodiment. Has been.
The partition 255 may be a black matrix.
Specifically, the color filter layers 120R, 120G, and 120B including the pixel region 180 are arranged in a line along the X-axis direction in FIG. 5 and are further arranged in this order at a constant interval in the Y-axis direction. Arranged periodically. The distance between the color filter layers 120R at this time is a constant distance LRY along the Y-axis direction. Similarly, the color filter layer 120G and the color filter layer 120B are also arranged with constant intervals LRY and LBY along the Y-axis direction.
The arrangement pattern of the color filter layers 120R, 120G, and 120B and the pixel regions 118R, 118G, and 118B may be a mosaic type, a delta type, or a square type in addition to the stripe type.

Next, a method for manufacturing the color filter substrate 220 will be described with reference to FIGS.
First, a photosensitive resin is deposited on the entire surface of the glass substrate S by a spin coating method, and then portions corresponding to the color filter layers 120R, 120G, and 120B as shown in FIG. 6 by a photoresist method and an etching method. That is, the resin in the pixel region 118 is removed. As the resin, for example, urethane or acrylic photo-curing resin is used.
By patterning in this way, partition walls 255 for partitioning the glass substrate S in a matrix shape as shown in FIG. 5 in a plan view are formed, whereby each pixel region having a rectangular (rectangular) shape in plan view is formed. 118R, 118G, and 118B are formed.

Next, the glass substrate S is set on the stage 39 of the liquid material drawing device 30 as shown in FIG. Then, the liquid materials 50R, 50G, and 50B are drawn in the partition wall 255. FIG. 7 shows a state in plan view when the liquid material 50 is drawn on the partition wall 255. In FIG. 7, the head carriage 42 is not shown.
As shown in FIG. 7, the detection means 41 provided on the head carriage 42 is moved relative to the glass substrate S by moving the glass substrate S in the direction of the arrow in FIG. 7. Accordingly, the shape of the partition 255 forming the pixel regions 118R, 118G, and 118B at a predetermined position is detected by the detection unit 41, and the shape data in the partition 255 is held (step 1). A specific method for detecting the shape of the partition wall 255 will be described in detail in step 3 to be described later.
Note that the predetermined position for detecting the shape of the partition wall 255 is a position determined in advance by experiments or the like where the discharged liquid material is most likely to overflow.

  In the present embodiment, the shape of each pixel region 118 is a rectangular shape in plan view as described above. Further, the predetermined position in the step 1 is a rectangle (rectangular) that is a position obtained by an experiment in advance, that is, a position where the liquid material is most likely to overflow when the liquid material 50 is discharged to the rectangular pixel region 118. ) Is a partition wall 255 corresponding to the central portion of the long side. In this way, the amount of detected data is reduced by detecting the shape of the partition wall 255 that is most likely to overflow the liquid material 50.

Further, by moving the glass substrate S in the direction of the arrow in FIG. 7, the detection means 41 moves along a straight line passing through the central part of the long side of each pixel region 118R, 118G, 118B in conjunction with the movement of the head carriage 42. Move relative to each other. Therefore, the detection means 41 can easily and reliably detect the shape of the central part of the long side of the partition wall 255, thereby greatly reducing the scanning range. A plurality of light emitting portions 40a that emit the laser light may be arranged, or may be distributed from one laser light by using, for example, an optical fiber or a diffraction element.
The shape of the partition wall 255 that is not in a straight line may be detected by configuring the detection means 41 so that it can move independently on the head carriage 42.

Then, when detecting the shape of the partition wall 255, as shown in FIG. 8, the head carriage 42 is moved in the direction of the arrow in FIG. 8 while emitting laser light from the emitting portion 40a onto the partition wall 255.
Then, the laser beam emitted from the light emitting part 40 a is reflected on the surface of the partition wall 255. At this time, the laser light has a wavelength that does not decrease the liquid repellency of the partition 255, for example, a long wavelength (for example, an infrared region) that has little influence on the liquid repellency of the partition 255. .
The light reflected on the surface of the partition wall 255 is received by the light receiving unit 40b of the detecting means 41. At this time, as a method of detecting the shape of the partition wall 255, for example, a method of measuring a phase difference between the emitted laser beam and the laser beam reflected on the surface of the partition wall 255 with an interferometer, There is a method of examining the position of reflected light of obliquely incident light. The shape of the partition wall 255 can also be detected by focusing the light emitted from the light emitting section 40a on the surface of the partition wall 255 and detecting the focal position. Further, incoherent light or other non-contact height measurement methods may be used as long as the height of about 1 μm can be measured accurately instead of laser light.

In the present embodiment, the pixel region 118 is rectangular in plan view, but may be elliptical or oval. At this time, the predetermined position as described above is a position where the liquid material 50 obtained by the experiment is most likely to overflow, even when the pixel region 118 has an elliptical shape or an oval shape, Specifically, it is on the partition wall 255 corresponding to the central portion of the long axis of the ellipse or the straight line portion of the outer circumference of the ellipse.
For example, even when the pixel region 118 is a convex polygon in a plan view, the predetermined position where the shape of the partition wall 255 is detected is a position where the discharged liquid 50 is likely to overflow as described above. That is, the predetermined position is on the partition wall 255 corresponding to the center of the longest side.

  When detecting the shape of the partition wall 255, it is preferable to perform several pixels ahead of the pixel region 118 from which the liquid material 50 is discharged. The reason is that when the liquid 50 is discharged to the pixel region 118 immediately after the shape of the partition 255 is detected by the detection means 40, the shape data of the partition 255 must be processed in a short time. This is because the control device C having a high processing speed is very expensive and is not practically effective in terms of manufacturing cost.

  It is determined whether or not the shape of the detected partition wall 255 is normal by comparing the shape of the partition wall 255 detected by the detection unit 40 with the reference (preset standard) stored in the storage unit 43. (Step 2).

  The previously set standard is data obtained by obtaining the shape of the partition wall 255 where the discharged liquid 50 does not overflow by experimentation or the like. For example, the correlation between the height of the partition wall 255 or the position data of the laser beam reflected by the surface of the partition wall 255 and the discharge amount overflowing the liquid material 50 is measured, and a value (range) obtained from the relationship is measured. It is stored in the storage means 43 as a reference.

When the shape of the partition wall 255 is normal by the discharge data calculation unit 45, the liquid material 50 is discharged to the pixel region 118 surrounded by the partition wall 255, and when the shape of the partition wall 255 is not normal. Then, it is decided to stop the discharge (step 3).

Here, a method for determining whether or not the shape of the partition wall 255 is normal will be described. In this embodiment, the shape of the partition 255 is, for example, the shape shown in FIG. 9A from the information on the amount of movement of the head carriage 42 or the substrate S and the height of the partition 255 detected by the detection means 41. It is obtained as follows.
At this time, in the present embodiment, the heights Z1, Z2, and Z3 of the partition wall 255 at the central portion (predetermined position) of the long side of the pixel region 118 are obtained. Z1 indicates the height of one side edge of the partition wall 255 from the surface of the glass substrate S, and Z3 indicates the height of the other side edge of the partition wall 255 from the glass substrate S. Z2 represents the height at the center of the partition wall 255 at the position described above.

FIG. 9B is a graph in which the vertical axis indicates the allowable liquid mass and the horizontal axis indicates the value of Z2.
As shown in FIG. 9B, the value of Z2 is originally within the allowable range of the design value, that is, within the range from the minimum (MIN) to the maximum (MAX). However, depending on the patterning conditions when forming the partition wall 255, the value may be lower than the allowable range. That is, when the value of Z2 is lower than the minimum (MIN) value in the design value range, the liquid material 50 overflows due to insufficient height of the partition wall 255 (the left region in FIG. 9B). ). In addition, foreign matter such as dust or dust may adhere to the partition wall 255, and the value of Z2 may be higher than the maximum (MAX) value in the allowable range. If foreign matter adheres to the partition wall 255, the liquid material 50 discharged when the liquid material 50 is discharged to the pixel region 118 may be transmitted to the pixel region 118, and the liquid material 50 may overflow from the pixel region 118. (A right side area | region in FIG.9 (b)). As the value of Z2 changes in this way, the allowable amount of liquid material that can be discharged to the pixel region 118 surrounded by the partition wall 255 changes. Therefore, when the value of Z2 falls within the range of the minimum (MIN) value to the maximum (MAX) value, the shape of the partition wall 255 is normal, and when the value is other than that, the shape of the partition wall 255 is not normal. judge.

FIG. 9C is a graph in which the vertical axis indicates the allowable liquid mass and the horizontal axis indicates the value of Z2-Z3 (or Z2-Z1). Here, also in the value of Z2-Z3 (Z2-Z1), the allowable range of the design value, that is, the range of the minimum (MIN) value to the maximum (MAX) is the same as in the case of the graph of FIG. Exists.
The value of Z2-Z3 (Z2-Z1) indicates the degree of roundness of the side edge of the partition wall 255, and the region of Z2-Z3 (Z2-Z1)> MAX is, for example, as shown in FIG. The state where the corners are rounded is shown. In the state of the partition wall 255 shown in FIG. 10A, it has been confirmed by experiments that the liquid 50 discharged into the pixel region 118 is likely to overflow (the right region in FIG. 9C). .

In the vicinity of Z2-Z3 = 0 (or Z2-Z1 = 0), that is, within the allowable range of the design value, as shown in FIG. 10B, the side edge of the partition wall 255 is formed at a substantially right angle. It has become.
In particular, in the region of MIN <Z2-Z3 <0, the height Z3 (Z1) of the side edge of the partition wall 255 is higher than the height Z2 of the center portion of the partition wall 255, so that the center portion of the partition wall 255 is dented. As a result, the side edges are sharpened, and the overflow of the liquid 50 is reliably prevented. Therefore, the liquid material 50 can be discharged most in the pixel region 188. However, if the value of Z2−Z3 (Z2−Z1) is smaller than the minimum value (MIN) even though the value of Z2 is within the allowable range, the foreign matter is attached to the partition wall 255 and Conceivable. That is, if foreign matter adheres to the partition wall 255, when the liquid material 50 is discharged to the pixel region 118 as described above, the discharged liquid material 50 is transmitted to the foreign material, so that the liquid material 50 is transferred from the pixel region 118. Overflow (region on the left side in FIG. 9C). Actually, the liquid 50 is a two-variable function of Z2 and Z3 (Z1) (details are omitted).
Therefore, when the value of Z2-Z3 (Z2-Z1) falls within the range of the minimum (MIN) value to the maximum (MAX) value, the shape of the partition wall 255 is normal, and in the case of other values, It is determined that the shape of the partition wall 255 is not normal.

The discharge data calculation unit 45 associates the values of Z1, Z2, and Z3 in FIG. 9A according to the shape of the partition wall 255 detected by the detection unit 41 with the graphs in FIGS. 9B and 9C. That is, it is determined whether or not the shape of the partition wall 255 is normal by comparing with an allowable range obtained from the graph.
For example, in the ejection data calculation unit 45, the values of Z2, Z2-Z3 (Z2-Z1) of the partition wall 255 detected by the detection means 41 are the design values shown in the graphs of FIGS. When both the ranges (minimum value to maximum value) are satisfied, it is determined that the shape of the partition wall 255 is normal. Then, the liquid material 50 is discharged to the pixel region 188 composed of the partition wall 255 having a normal shape by a normal discharge pattern.
Further, the discharge data calculation unit 45 determines that the values of Z2 and Z2-Z3 (Z2-Z1) of the partition wall 255 are within the two design value ranges shown in the graphs of FIGS. 9B and 9C. If not, it is determined that the shape of the partition wall 255 is not normal. Specifically, when the height Z2 of the partition wall 255 is smaller than the minimum (MIN) value in the graph of FIG. 9B, the shape of the partition wall 255 is not normal. Then, after stopping the discharge pattern of the normal liquid material 50 for the pixel region 188 composed of the partition wall 255 having an abnormal shape, the previous discharge pattern is changed.

  For example, when the overflow of the liquid material 50 from the pixel region 118 is prevented, the discharge pattern of the liquid material 50 is changed by reducing the amount of the liquid material 50 to be discharged. As a method for reducing the amount of the liquid material 50, for example, the amount of the liquid material 50 discharged from each nozzle of the droplet discharge head 34 is reduced, or the number of nozzles for discharging the liquid material 50 of the droplet discharge head 34 is used. Can be done by reducing

Further, as another change in the discharge method of the liquid material 50, a liquid material 60 different from the previously discharged liquid material 50 is discharged. The liquid material 60 is supplied and discharged from, for example, a liquid material supply means (not shown) provided in the droplet discharge device 30.
As the liquid material 60, for example, a black liquid material 60a is discharged as compared with the liquid material 50 discharged previously. By ejecting the black liquid 60a, the pixel region 118 is intentionally set as a defective pixel, and color defects due to color mixture of the liquid 60a are prevented. At this time, the defective pixel is black, but even if, for example, several portions in the pixel group constituting the large screen are black, this is not visually recognized as a defective pixel, and thus there is no problem in practical use.

Further, a method of discharging a liquid material 60b having a lighter color than the previously discharged liquid material 50 is also conceivable. By ejecting the liquid material 60b, even if the liquid material 50 in the adjacent pixel region 118 is mixed, the influence of the color mixture can be reduced.
Further, by discharging a liquid 60c that is more transparent than the previously discharged liquid 50, the influence when the liquid 50 is mixed with the liquid 50 in the adjacent pixel region 118 is reduced as in the case of the liquid 60b. The manufacturing process of the color filter substrate 220 by not discharging the liquid material 50 to the pixel region 118 may be prevented from being affected.

Further, a method of discharging a liquid material 60d having a higher viscosity than the liquid material 50 previously discharged can be considered.
The liquid material 60d has a higher viscosity than the liquid material 50 previously ejected on the partition wall 255, and thus is less likely to overflow from the pixel region 118. If the liquid 60d is discharged to all the pixel regions 118, problems such as productivity, maintenance, wettability at the periphery of the pixel, and the like may occur. Therefore, a pixel that may become a defective pixel due to the shape of the partition wall 255. It is preferable to discharge only to the region 118.

  In this embodiment, when measuring the shape data of the partition wall 255, the measurement is performed at three points Z1, Z2, and Z3. However, the accuracy is improved by increasing the number of measurement points. Also good. For example, if the number of measurement points is increased more than necessary, the processing amount of measurement data increases, so about 2 to 5 points are preferable.

  Then, based on the determination by the ejection data calculation unit 45, the liquid droplet ejection head 34 is driven via the head control unit 46 to draw the liquid material 50 as shown in FIG. 11 (step 4).

As shown in FIG. 11, from the head nozzle portions 34R, 34G, 34B for discharging the respective RGB colors provided in the droplet discharge head 34, the liquid material is located at the positions corresponding to the colors of the pixel regions 118R, 118G, 118B. 50R, 50G, and 50B are discharged. FIG. 11 shows a state in which a green (G) liquid 50G is discharged from the head nozzle portion 34G to the pixel region 118G.
After the liquid material 50G is discharged to the pixel region 118G, the blue (B) liquid material 50B is discharged to the adjacent pixel region 118B. Thereafter, the liquid materials 50R, 50G, and 50B are ejected onto the pixel regions 118R, 118G, and 118B regularly formed on the glass substrate S in the same manner, so that the liquid is applied to all the necessary pixel regions 118. The body 50 is discharged. As will be described later, the amount of the liquid 50 to be discharged is preferably a sufficient amount in consideration of the volume reduction of the liquid 50 in the heating process described later.
In FIG. 11, when the shape of the partition wall 255 that forms the pixel region 118B to be discharged next is not normal, the liquid pattern from the pixel region 188 is changed by changing the discharge pattern of the liquid material 50 as described above. The overflow of the body 50 can be prevented.

As another method, when the ejection data calculation unit 45 determines that the shape of the partition wall 255 is not normal, the position data of the pixel region 118 formed by being surrounded by the abnormal partition wall 255 is retained. The liquid material 50 is not discharged into the pixel region 118. In another step, the liquid material 50 may be discharged to the abnormal pixel region 118. For example, when foreign matter is attached to the partition wall 255, the liquid 50 may be discharged into the partition wall 255 after the foreign matter is removed.
Further, as another step, the liquid material 60 different from the liquid material 50 previously discharged to the pixel region 118 as described above may be discharged.

  When all the pixel regions 118 on the glass substrate S are filled with the droplets 254 in this way, a heat treatment is performed using a heater (not shown) so that the glass substrate S reaches a predetermined temperature (for example, about 70 ° C.). To do. By this heat treatment, as shown in FIG. 12A, the solvent of the liquid 50 is evaporated and the volume of the liquid 50 is reduced. At this time, when the volume reduction is large, the droplet discharge process and the heating process are repeated until a sufficient film thickness is obtained for the color filter layer 120. By this treatment, the solvent contained in the liquid 50 evaporates, and finally only the solid content contained in the liquid 50 remains to form a film, and the color filter layer 120 as shown in FIG. Become. Next, in order to flatten the glass substrate S and protect the color filter layer 120, a protective film 256 is formed on the glass substrate S so as to cover the color filter layer 120 and the partition wall 255 as shown in FIG. . The protective film 256 can be formed by a droplet discharge method in the same manner as the color filter layer 120 is formed. Further, instead of the droplet discharge method, a spin coating method, a roll coating method, a ripping method, or the like may be used. The color filter substrate 220 is obtained through the above steps.

As described above, when the color filter layer 120 is formed by changing the discharge pattern of the liquid material 50 to the pixel region 118 or changing the liquid material 50 to be discharged, the positional information of the color filter layer 120 is obtained. To keep.
When the liquid crystal display device 200 including the color filter layer 120 is driven, a driving method different from the other pixel portions is applied by correcting the display data of the pixel portion including the color filter layer 120 based on the position described above. Do. Specifically, when the color filter layer 120 is formed by discharging the light colored liquid 50 to the pixel region 118, the color filter layer 120 is increased by increasing the voltage applied to the pixel portion composed of the color filter layer 120. It is possible to employ a driving method that makes the 120 defects inconspicuous.

According to the drawing method of the liquid material 50 of the present invention, after detecting the shape of a predetermined position of the partition wall 255, the liquid material 50 is discharged to the pixel region 118 by comparing the detection result with a preset reference. The shape of the partition wall 255 is determined before the operation, and the shape of the partition wall 255 is not normal, for example, when the height of the partition wall 255 is lower than the reference or when the side edge of the partition wall 255 is rounded If it is determined, the discharge of the liquid 50 is stopped.
Accordingly, since the liquid material 50 is not discharged to the pixel region 118 surrounded by the partition wall 255 having an abnormal shape, the liquid material 50 overflows from the pixel region 118 and mixes with the liquid material 50 in the adjacent pixel region 118. It is possible to prevent the occurrence of defects. Also, before discharging the liquid material 50, the shape of the partition 255 constituting the pixel region 118 is determined to be defective. Since the liquid material 50 is not discharged to the pixel region 118, the pixel region 118 including the partition wall 50 having a normal shape. The liquid material 50 can be discharged only against the above, and the yield during manufacturing can be improved and the manufacturing cost can be reduced.
Further, by limiting the position where the shape of the partition 255 is detected to a predetermined position, the amount of shape data of the partition 255 can be reduced, and the determination time when compared with a preset reference can be shortened. .

  Further, when the pixel region 118 is rectangular (rectangular) in a plan view, the position where the liquid 50 is most likely to overflow is the center of the long side (long axis) of the rectangle as described above. It has been confirmed in. Therefore, by detecting the shape of the partition wall 255 corresponding to the central portion, it is possible to efficiently prevent the liquid material 50 from overflowing from the pixel region 118. Further, when the pixel region 118 has an elliptical shape or an oval shape in a plan view, the rectangular shape described above is detected by detecting the shape of the partition wall 255 corresponding to the circumference having a large curvature or the central portion of the straight line portion. As in the case of the shape, the liquid 50 can be efficiently prevented from overflowing.

  In addition, when the pixel region 118 is a convex polygon in a plan view, the predetermined position is a position corresponding to the center of the longest side in the pixel region 118. As in the case of the shape or oval shape, the liquid material 50 can be efficiently prevented from overflowing from the pixel region 118.

  In addition, after the discharge of the liquid material 50 is stopped according to the determination result, the liquid material 50 overflows by changing to the optimal discharge method of the liquid material 50 according to the shape of the partition wall 255 constituting the pixel region 118. The occurrence of defects in the pixel region 118 due to the above can be eliminated, the reliability can be improved, and the yield can be improved.

  Further, when the amount of the normal liquid material 50 is discharged to the pixel region 118 and the liquid material 50 overflows and mixes with the liquid material 50 of the adjacent pixel region 118, the liquid material 50 to be discharged is changed as a change in the discharge method. By reducing the amount, the liquid material 50 can be prevented from overflowing from the pixel region 118. Therefore, it is possible to prevent a defect due to color mixture from occurring in the pixel region 118 and improve yield.

Occurrence of a defect in the pixel region 118 can be prevented by ejecting the liquid material 60 different from the liquid material 50 previously ejected to the pixel region 118 having an abnormal shape of the partition wall 255.
When the color filter layer 120 is manufactured, if the liquid 50 to be discharged overflows from the pixel region 118, the liquid 50 is mixed with the liquid 50 in the adjacent pixel region 118, resulting in a defective pixel. Therefore, by ejecting a black liquid material 60a different from the previously ejected liquid material 50, the pixel region 118 is intentionally set as a defective pixel, and the occurrence of color defects due to color mixture of the liquid material 50 is prevented. At this time, the defective pixel is black, but even if, for example, several portions in the pixel group constituting the large screen are black, this is not visually recognized as a defective pixel, and thus there is no problem in practical use.
Further, by discharging a thin liquid material 60b different from the previously discharged liquid material 50, the influence of the color mixture when the liquid material 60b overflows and mixes with the liquid material 50 in the adjacent pixel region can be reduced. .
Further, the influence of the color mixture with the liquid 60c in the adjacent pixel region 118 can be further reduced by discharging the liquid 60c having a higher transparency than the liquid 50 previously discharged. If the shape of the partition wall 118 is not normal and the liquid material 50 is not ejected to the pixel region 118, the subsequent manufacturing process may be affected. Therefore, the film thickness and the surface state are drawn by drawing the transparent liquid material 60c. Can be arranged.
In addition, by discharging the liquid material 60d having a high viscosity, the liquid material 60d from the pixel region 118 can be prevented from overflowing, the occurrence of defects can be prevented, and the yield can be improved.

In addition, since light is used as a means for detecting the shape of the partition wall 255, light is reflected on the surface of the partition wall 255, and the reflected light is received by the light receiving unit 40a or the like, so that the shape of the partition wall 255 can be easily detected. can do.
Since this light has a wavelength that does not decrease the liquid repellency of the partition wall 255, even when light is used to detect the shape of the partition wall 255 when a urethane-based photosensitive resin is used as the material of the partition wall 255, the partition wall The liquid repellency of 255 is not lowered.
Further, since laser light is used as light, the laser light has a short wavelength. Therefore, only light having a wavelength that does not reduce the liquid repellency of the partition 255 as described above can be used for detecting the shape of the partition 255. it can. Further, since the laser light has a small range of light irradiation, the shape of the partition wall 255 at the pinpoint can be accurately detected.

  In the liquid material drawing apparatus 30 according to the present invention, after the detection unit 40 detects the shape of the predetermined position of the partition wall 255, the comparison unit 44 compares the detection result with a reference stored in the storage unit 43, and the partition wall When the shape of 255 is not normal, the discharge of the liquid material 50 to the pixel region 118 formed by the partition wall 255 is stopped, so that the liquid material 50 overflows from the pixel region 118 and the liquid material in the adjacent pixel region 188. Generation of defects due to mixing with 50 can be prevented. Further, it is detected that the shape of the partition wall 255 constituting the pixel region 118 is not normal before the liquid material 50 is discharged, and the liquid material 50 is not discharged to the pixel region 118. Thus, the liquid material 50 can be discharged only to the pixel region 118, thereby improving the manufacturing yield and reducing the manufacturing cost.

  Further, when the droplet discharge head 34 moves on the pixel region 118, the detection means 41 relatively moves in conjunction with the droplet discharge head 34, so that the partition 255 that forms the pixel region 118 is formed. The liquid material 50 can be drawn by detecting the shape and discharging the liquid material 50 to the pixel region 118 according to the detection result or stopping the discharge.

The electro-optical device according to the present invention is formed by discharging the liquid material 50 in accordance with the shape of the partition wall 255 constituting the pixel region 118, thereby improving the yield and reducing the manufacturing cost.
In the liquid crystal display device 200 of the present invention, the discharged liquid 50 is overflowed from the partition 255 by changing the discharge pattern of the liquid 50 even to the pixel region 118 including the partition 255 having an abnormal shape. Since the color filter 120 that prevents the occurrence of defects is provided, the manufacturing cost is reduced and the reliability is improved.

  In the method for driving the liquid crystal display device 200 of the present invention, when the discharge of the liquid material 50 to the pixel region 118 is stopped or the discharge method is changed, the position data of the pixel region 118 where the stop or the discharge method is changed. Therefore, the liquid crystal display device 200 can be reliably driven by adopting a driving method suitable for the pixel region 118 based on the content of the stop or the ejection method.

  In the present embodiment, the color filter substrate 220 is formed by ejecting the liquid material 50 to all the pixel regions 118 and drying it. However, when the shape of the partition 255 is not normal, the pixel including the partition 255 is formed. Without discharging the liquid material 50 to the region 118, the liquid material 50 once discharged to the other pixel region 118 is dried, and then the liquid material 50 is discharged to the pixel region 118 that has not discharged the liquid material 50. May be. Then, the color filter substrate 220 may be formed by locally drying or baking the liquid material 50 in the pixel region 118 by using laser annealing or the like.

Next, as a second embodiment, a case where the liquid material drawing device 30 of the present invention is applied to manufacture of the organic EL device 301 will be described.
FIG. 13 is a side sectional view of an organic EL device 301 in which some components are manufactured by the liquid material drawing device 30. First, a schematic configuration of the organic EL device 301 will be described.
As shown in FIG. 13, this organic EL device 301 is composed of a substrate 311, a circuit element portion 321, a pixel electrode 331, a partition wall 341, a light emitting element 351, a cathode 361 (counter electrode), and a sealing substrate 371. A wiring of a flexible substrate (not shown) and a driving IC (not shown) are connected to the EL element 302. The circuit element portion 321 is formed on the substrate 311, and a plurality of pixel electrodes 331 are aligned on the circuit element portion 321. A partition wall 341 is formed in a lattice shape between the pixel electrodes 331, and a light emitting element 351 is formed in a recess opening 344 generated by the partition wall 341. The cathode 361 is formed on the entire upper surface of the partition wall 341 and the light emitting element 351, and a sealing substrate 371 is laminated on the cathode 361.

  The manufacturing process of the organic EL device 301 including an organic EL element includes a partition forming process for forming the partition 341, a plasma treatment process for appropriately forming the light emitting element 351, and a light emitting element forming process for forming the light emitting element 351. And a counter electrode forming step for forming the cathode 361, and a sealing step for sealing and sealing the sealing substrate 371 on the cathode 361.

The light emitting element forming step is to form the light emitting element 351 by forming the hole injection layer 352 and the light emitting layer 353 on the concave opening 344, that is, the pixel electrode 331. The hole injection layer forming step and the light emitting layer forming step It is equipped with. In the present embodiment, the hole injection layer forming step and the light emitting layer forming step were performed using the liquid material drawing device 30 of the present invention.
Specifically, in the hole injection layer forming step, a first composition (liquid material) for forming the hole injection layer 352 in the recessed opening 344 generated by the partition wall 341 is discharged onto each pixel electrode 331. 1 discharge process and the 1st drying process which dries the discharged 1st composition and forms hole injection layer 352. The light emitting layer forming step includes a second discharging step of discharging a second composition (liquid material) for forming the light emitting layer 353 onto the hole injection layer 352, and drying the discharged second composition. And a second drying step of forming the light emitting layer 353.

  Also in the manufacture of the organic EL device 301, when each film pattern such as the hole injection layer 352 and the light emitting layer 353 is formed, it is determined whether or not the shape of the partition 341 is normal. Since the first composition or the second composition for forming the hole injection layer 352 or the light emitting layer 353 is ejected according to the shape of the liquid crystal, the first composition or the second composition overflows from the partition wall 341. Defects can be prevented. Therefore, by preventing defects in the hole injection layer 352 and the light emitting layer 353 obtained as a film pattern, the yield in manufacturing the organic EL device 301 can be improved, and the manufacturing cost can be suppressed. Therefore, by forming the hole injection layer 352 and the light emitting layer 353 with a highly accurate pattern, the organic EL device 301 with favorable light emission characteristics can be manufactured. Note that when the discharge of the liquid material to the light emitting element 351 is stopped or the discharge pattern is changed, the driving method for the light emitting element 351 may be changed to drive the organic EL device reliably.

Further, the electronic apparatus of the present invention includes the liquid crystal display device 200 or the organic EL device 301 as an electro-optical device.
FIG. 14 is a perspective view illustrating an example of a mobile phone as an electronic apparatus. In FIG. 14, the mobile phone main body 600 includes a display unit 601 including, for example, a liquid crystal display device 200, an organic EL device 301, and the like.
According to the electronic apparatus of the present invention, since the electro-optical device with improved yield is provided, the reliability of the electronic apparatus including the electro-optical device is high.

The slope view of the liquid material drawing apparatus of this invention. The side view of a head carriage. (a) is a top view of a liquid crystal display device, (b) is a sectional side view of a liquid crystal display device. The side view explaining the structure of a color filter. The top view which shows the pattern of a partition. The side view of the partition formed on the glass substrate. The top view explaining the detection process of a partition shape. The side view explaining the detection process of a partition shape. (A)-(c) is a graph explaining the shape determination method of a partition. (A) is an abnormal partition shape, (b) is a figure which shows the shape of a normal partition. Explanatory drawing of the discharge process of the liquid body at the time of color filter manufacture. (A), (b) is explanatory drawing of the manufacturing process of a color filter. An organic EL device obtained by the method of manufacturing an electro-optical device according to this embodiment. A mobile phone that is an electronic device equipped with an electro-optical device.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 30 ... Liquid body drawing apparatus, 34 ... Droplet discharge head, 41 ... Detection means, 42 ... Head carriage, 43 ... Storage means, 44 ... Comparison means, 45 ... Discharge data calculating part (drawing determination means), 50 ... Liquid body 60 ... Liquid material, 118 ... pixel region, 120 ... color filter layer (color filter), 200 ... liquid crystal display device (electro-optical device), 220 ... color filter substrate, 301 ... organic EL device (electro-optical device), 255 ... partition wall, 600 ... mobile phone (electronic device), S ... glass substrate

Claims (20)

In a liquid material drawing method of discharging and drawing a liquid material on a pixel region surrounded by a liquid repellent partition formed on a substrate,
Detecting the shape of the partition wall at a predetermined position;
Comparing the detection result of the shape with a preset reference to determine whether the shape is normal;
Discharging the liquid material to the pixel area when the determination result is normal, and stopping discharging the liquid material to the pixel area when the determination result is not normal;
A method for drawing a liquid material, comprising:   The predetermined position is a position corresponding to a central portion of a major axis in the pixel region when the pixel region is rectangular, elliptical, or oval in a plan view. Item 2. The method for drawing a liquid according to Item 1.   2. The liquid according to claim 1, wherein when the pixel area is a convex polygon in a plan view, the predetermined position is a position corresponding to a central portion of the longest side in the pixel area. How to draw the body.   4. The method according to claim 1, further comprising a step of changing a discharge method of the liquid material to a previously performed discharge method after stopping the discharge of the liquid material according to the determination result. 2. A method for drawing a liquid material according to 1.   The liquid material drawing method according to claim 4, wherein the change in the discharge method is to reduce the amount of the liquid material discharged to the pixel region.   The liquid material drawing method according to claim 4, wherein as the change of the discharge method, another liquid material different from the previously discharged liquid material is discharged.   The method of drawing a liquid material according to claim 6, wherein the other liquid material is blacker than the previously discharged liquid material.   7. The liquid material drawing method according to claim 6, wherein the other liquid material has a lighter color than the previously discharged liquid material.   The method of drawing a liquid material according to claim 6, wherein the other liquid material has higher transparency than the liquid material discharged earlier.   The liquid material drawing method according to claim 6, wherein the other liquid material has a viscosity higher than that of the previously discharged liquid material.   The liquid drawing method according to claim 1, wherein light is used as means for detecting the shape.   12. The method for drawing a liquid material according to claim 11, wherein the light has a wavelength that does not decrease the liquid repellency of the partition wall.   The liquid drawing method according to claim 11, wherein the light is laser light. In a liquid material drawing apparatus for discharging and drawing a liquid material from a droplet discharge head to a pixel region surrounded by a liquid-repellent partition formed on a substrate,
The detection means for detecting the shape of the partition at a predetermined position, the storage means for storing a preset reference, the detection result by the detection means and the reference by the storage means are compared, and the shape is normal. A comparison unit for determining whether or not there is a drawing determination unit for determining whether to stop discharging the liquid material when the determination result is not normal based on a result of the comparison unit;
An apparatus for drawing a liquid material, comprising:   15. The liquid drawing apparatus according to claim 14, wherein when the droplet discharge head relatively moves on the substrate, the detection means moves relative to the substrate in conjunction with the droplet discharge head. An apparatus for drawing a liquid material, which is directly or indirectly supported by the droplet discharge head so as to move in a moving manner.   An electro-optic device manufacturing method using the liquid material drawing method according to claim 1.   The electro-optical device obtained by the method for manufacturing an electro-optical device according to claim 16 is a liquid crystal display device.   The electro-optical device obtained by the method for manufacturing an electro-optical device according to claim 16 is an organic EL device. The method of driving an electro-optical device according to claim 17 or 18,
When the discharge of the liquid material to the pixel area is stopped or the discharge method is changed, the position data of the pixel area where the stop or the discharge method is changed is stored, and based on the stored position data, A driving method of an electro-optical device, wherein a pixel corresponding to the position data is driven to be different from other pixels. An electronic apparatus comprising the electro-optical device according to claim 17.

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