JP2007185603A - Liquid droplet ejection head and liquid droplet ejection device, ejection method of liquid material, manufacturing method of device, manufacturing method of color filter and manufacturing method of organic el light-emitting element, and electro-optical apparatus and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid droplet ejection head and a liquid droplet ejection device which can reduce the number of times of vertical scannings and suppress ejecting irregularity, an ejecting method of liquid material using this liquid droplet ejection device, a manufacturing method of device, a manufacturing method of color filter and a manufacturing method of organic EL light-emitting element, and an electro-optical apparatus and electronic equipment. <P>SOLUTION: The liquid droplet ejection head 20 has two nozzle arrays of 22a and 22b in which a plurality of nozzles 22 are arranged at almost regular intervals (P<SB>1</SB>), and one nozzle array 22b is arranged shifting from the other nozzle array 22a so that the plurality of nozzles 22 are arranged alternatingly with each other at different intervals (P<SB>2</SB>, P<SB>3</SB>) when viewed from the direction crossing the nozzle arrays 22a and 22b at a right angle. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a droplet discharge head capable of discharging a liquid as droplets, a droplet discharge apparatus including the droplet discharge device, a liquid discharge method, a device manufacturing method, a color filter manufacturing method, and an organic EL light emitting device The present invention relates to a method, an electro-optical device, and an electronic apparatus.

  As a droplet discharge device including a droplet discharge head capable of discharging a liquid material as droplets, a holding unit that holds a plurality of droplet discharge heads capable of discharging the same liquid material toward an object to be discharged; There is known a discharge device including a holding unit and a moving unit that relatively moves an object to be discharged (Patent Document 1).

  In this discharge apparatus, the nozzle rows of the respective droplet discharge heads are arranged in directions that obliquely intersect the relative movement direction. In the nozzle row, a plurality of nozzles are arranged at substantially equal intervals.

  Such an ejection apparatus can eject the same liquid material from a plurality of nozzles of each droplet ejection head over a wide range. In addition, a dedicated droplet discharge head corresponding to the size of the discharge target is not required, and a plurality of standard droplet discharge heads are arranged to correspond to various discharge targets.

  In addition, a droplet discharge apparatus and a device manufacturing method are known in which a liquid material having fluidity is discharged so that a functional thin film having a fine pattern can be accurately formed on a substrate (Patent Document 2). .

  In this device manufacturing method, the optimal liquid discharge conditions are determined based on the results of continuous imaging of the liquid droplet behavior when landing on the substrate using a camera provided in the droplet discharge device. Is going to be able to decide.

JP2003-159786A, page 2, page 7 JP 2004-290799 A, page 3

  In the case where the liquid material is discharged onto a substrate as an object to be discharged using the above-described discharge device, it is possible to discharge so that droplets continuously land in the relative movement direction of the holding means and the object to be discharged. However, the plurality of nozzles are arranged at approximately equal intervals, and even if the droplet discharge heads are arranged in a direction obliquely intersecting with the relative movement direction, the droplets are orthogonal to the relative movement direction. Is difficult to land continuously. Therefore, in order to eject the required amount of liquid droplets more uniformly, a line feed operation is required in which the holding means is shifted in a direction orthogonal to the relative movement direction.

  As the area to which the liquid material is to be ejected increases, there is a problem that it is necessary to repeatedly perform so-called main scanning and line feed operation (sub scanning) for ejecting droplets in the relative movement direction.

  In addition, the behavior of the liquid droplets upon landing on the substrate actually depends on the surface state of the landing substrate and the discharge amount. If the surface treatment for making the substrate surface lyophilic to spread the landed droplets wet is uneven, the droplets do not partially spread and become isolated. If the discharge amount of droplets discharged from multiple nozzles varies, even if a subsequent droplet is discharged so as to be connected to the droplet that landed first by performing a line feed operation, a small discharge amount of droplets However, there was a risk that the discharge would become isolated and cause uneven discharge.

  The present invention has been made in consideration of the above-described problems. A droplet discharge head and a droplet discharge device capable of reducing the number of sub-scans and suppressing discharge unevenness, and the droplet discharge device are used. It is an object of the present invention to provide a liquid material discharge method, a device manufacturing method, a color filter manufacturing method, an organic EL light emitting device manufacturing method, an electro-optical device, and an electronic apparatus.

  The droplet discharge head of the present invention is a droplet discharge head capable of discharging a filled liquid material as droplets, and includes a nozzle row composed of a plurality of nozzles, as viewed from a direction orthogonal to the nozzle row. Sometimes, the plurality of nozzles are alternately arranged at different intervals.

  According to this configuration, when viewed from the direction orthogonal to the nozzle row, the plurality of nozzles are alternately arranged at different intervals. Therefore, the interval between adjacent nozzles is different, and the other interval is narrower than one interval. Therefore, if a liquid material is ejected as droplets from a nozzle arranged at a narrow interval onto an object to be ejected, at least two droplets are landed closer to each other than when a plurality of nozzles are arranged at equal intervals. be able to. If a plurality of droplets are ejected in synchronism with the main scanning in which the object to be ejected and the droplet ejection head of the present invention are arranged opposite to each other and moved relative to each other in the direction intersecting the nozzle row direction, they are orthogonal to the main scanning direction. At least two droplets close to each other in the sub-scanning direction can be landed at a predetermined interval. Since there is a higher probability that droplets that have landed closer will spread and coalesce, droplets can be easily spread in the sub-scanning direction. That is, the number of sub-scans in which the object to be ejected and the liquid droplet ejection head are relatively moved to further eject liquid droplets in the sub-scanning direction is reduced, and the surface condition of the object to be ejected and variations in the amount of ejected liquid droplets It is possible to provide a droplet discharge head that can suppress discharge droplets from being partially isolated and causing uneven discharge. Hereinafter, a direction intersecting with the direction of the nozzle row is referred to as a main scanning direction, and discharging a droplet in the main scanning direction is referred to as main scanning. Further, the sub-scanning will be described as the sub-scanning direction being a direction orthogonal to the main scanning direction, and the relative movement of the droplet discharge head and the discharge target in the sub-scanning direction.

  In addition, at least two nozzle rows in which the plurality of nozzles are arranged at substantially equal intervals, and when viewed from a direction orthogonal to the nozzle rows, the plurality of nozzles are alternately arranged at different intervals, The other nozzle row may be shifted from the one nozzle row.

  According to this configuration, since there are more nozzles than in the case of having one nozzle row, droplets can be landed at a higher density in the sub-scanning direction by one main scanning. Furthermore, since the plurality of nozzles are alternately arranged at different intervals, among the droplets that landed at a higher density in the sub-scanning direction, the droplets ejected at a narrow interval are more likely to be combined and spread more easily. The number of sub-scans can be reduced.

  Furthermore, three or more nozzle rows may be provided, and at least one nozzle row may have a plurality of nozzles alternately arranged at different intervals. According to this, the number of nozzles that can eject droplets by one main scan is increased, and a plurality of nozzles in at least one nozzle row are alternately arranged at different intervals. Can be reduced.

  In addition, among the different intervals of the plurality of nozzles, it is preferable that the narrower interval has a length of 2/3 or more and less than 1 with respect to the nozzle diameter. The landing diameter of the droplet discharged from the nozzle depends not only on the discharge amount and discharge speed but also on the nozzle diameter. According to this, the narrower nozzle interval is not less than two-thirds and less than one length with respect to the nozzle diameter, so that when the droplets land on the discharged object, they are brought into contact with each other and united. Becomes easy. Therefore, droplets ejected at a narrow interval can be quickly combined and spread easily, and the number of sub-scans can be further reduced.

  The droplet discharge device of the present invention has a nozzle row composed of a plurality of nozzles, and a droplet discharge head in which a plurality of nozzles are alternately arranged at different intervals when viewed from a direction orthogonal to the nozzle row And a moving means for relatively moving the droplet discharge head and the work in opposition to each other, and in synchronization with the relative movement by the moving means, the liquid material is discharged as droplets from the plurality of nozzles of the droplet discharge head onto the work. It is characterized by doing.

  According to this configuration, the liquid droplet ejection head having a nozzle row composed of a plurality of nozzles and in which the plurality of nozzles are alternately arranged at different intervals when viewed from a direction orthogonal to the nozzle row, and the liquid And a moving means for relatively moving the droplet discharge head and the workpiece opposite to each other. Droplets ejected from adjacent nozzles at narrower intervals of the droplet ejection head have a higher probability of joining after landing on the workpiece. Since the combined droplets spread in the sub-scanning direction, the droplet discharge device can efficiently discharge the liquid material as droplets while reducing the number of sub-scans and suppressing discharge unevenness on the workpiece. Can be provided.

  The liquid material discharge method of the present invention uses the liquid droplet discharge device of the above invention and performs a scanning operation in which the liquid droplet discharge head and the work are opposed to each other, thereby liquid in a plurality of partitioned areas on the work. An ejection method for ejecting a body as droplets, wherein at least one scan is performed so that a plurality of droplets are landed on a single partitioned region from a plurality of nozzles of a droplet ejection head, and at different intervals. It is characterized in that the liquid droplets discharged from adjacent nozzles are discharged so as to be partially connected at a narrower interval.

  According to this method, using the droplet discharge device of the above invention, droplets discharged from adjacent nozzles at a narrower interval among different intervals are discharged so as to be partially connected. Therefore, droplets ejected at a narrow ejection interval in the sub-scanning direction are combined and spread, and the number of sub-scans is reduced to apply a liquid material in a state where ejection unevenness is suppressed in a plurality of partitioned regions. Can do.

  In addition, it is preferable that the nozzle row of the droplet discharge head is disposed so as to be substantially parallel or inclined with respect to the longitudinal direction of the partition region, and the liquid material is discharged as droplets from a plurality of nozzles.

  According to this method, so-called horizontal drawing is performed in which the droplet discharge head and the workpiece move relative to each other in a direction orthogonal to the longitudinal direction of the partition region, so that the number of sub-scans in the longitudinal direction is reduced. In addition, the liquid material can be applied to the plurality of partition regions in a state where the discharge unevenness is suppressed in the longitudinal direction of the partition regions. That is, it is possible to reduce discharge unevenness that is streaked in the main scanning direction.

  The device manufacturing method of the present invention is a device manufacturing method having a work and a thin film formed in a plurality of partitioned regions on the work, and using the liquid material discharge method of the present invention, A thin film is formed by discharging and drying the liquid material to be contained in a plurality of partitioned regions.

  According to this method, since the liquid material is applied in a state in which the discharge unevenness is suppressed in the plurality of partitioned areas by reducing the number of sub-scans, a thin film can be formed more uniformly in the partitioned areas.

  The method for producing a color filter of the present invention is a method for producing a color filter having a substrate and a plurality of colored layers formed in a plurality of partitioned regions on the substrate, the method for discharging a liquid material of the invention described above. A plurality of types of liquid materials containing different colored layer forming materials are discharged to a plurality of partitioned regions and dried to form a plurality of colored layers.

  According to this method, since the liquid material is applied in a state where the discharge unevenness is suppressed in the plurality of partitioned areas by reducing the number of sub-scans, the uneven color due to the discharge unevenness is reduced in the partitioned areas, and more uniform. A color filter having a colored layer can be produced.

  The organic EL light-emitting device manufacturing method of the present invention is a method for manufacturing an organic EL light-emitting device having a substrate and a functional layer including an organic light-emitting layer formed in a plurality of partitioned regions on the substrate. An organic light emitting layer is formed by discharging a liquid containing a light emitting layer forming material to a plurality of partition regions and drying using a liquid discharge method.

  According to this method, since the liquid material is applied in a state in which the discharge unevenness is suppressed in the plurality of partitioned areas by reducing the number of sub-scans, the uneven light emission due to the discharge unevenness is reduced in the partitioned areas, and more uniform. An organic EL light emitting device having an organic light emitting layer can be produced.

  An electro-optical device of the present invention includes a pair of substrates and a liquid crystal as an electro-optical material sandwiched between the pair of substrates, and one of the pair of substrates is manufactured by the method for manufacturing a color filter of the invention. It is characterized by that. According to this, since one of the pair of substrates is manufactured by the method for manufacturing a color filter of the present invention, it is possible to provide a liquid crystal display device as an electro-optical device with little color unevenness and high display quality. it can.

  Another electro-optical device of the present invention is an electro-optical device including a substrate on which a plurality of organic EL elements are formed and a sealing substrate that seals the substrate. It was manufactured using the manufacturing method of an organic EL light emitting element. According to this, since the organic EL light-emitting element is manufactured using the method for manufacturing an organic EL light-emitting element of the above invention, an organic EL display device as an electro-optical device having high display quality with little emission unevenness is provided. can do.

  An electronic apparatus according to the present invention includes the electro-optical device according to the present invention. According to this, since the electro-optical device according to the invention is mounted, an electronic apparatus having high display quality can be provided.

(Embodiment 1)
<Droplet ejection device>
First, the droplet discharge device of this embodiment will be described with reference to FIG. FIG. 1 is a schematic perspective view showing a droplet discharge device. The configuration of each part is appropriately scaled and displayed.

  As shown in FIG. 1, the droplet discharge device 10 of this embodiment forms a film made of a liquid material on a work W by discharging the liquid material as droplets. A stage 4 on which the workpiece W is placed and a head unit 1 having a plurality of droplet discharge heads 20 (see FIG. 2) for discharging a liquid material as droplets onto the placed workpiece W are provided.

  The droplet discharge device 10 includes an X-direction guide shaft 2 for driving the head unit 1 in the sub-scanning direction (X direction) and an X-direction drive motor 3 for rotating the X-direction guide shaft 2. Further, a Y-direction guide shaft 5 for guiding the stage 4 in the main scanning direction (Y direction) and a Y-direction drive motor 6 that engages and rotates with the Y-direction guide shaft 5 are provided. A base 7 having an X-direction guide shaft 2 and a Y-direction guide shaft 5 disposed at the top is provided, and a controller 8 is provided at the bottom of the base 7.

  Furthermore, a cleaning mechanism 9 for cleaning (recovering) a plurality of droplet discharge heads 20 of the head unit 1 and a heater 12 for heating the discharged liquid material and evaporating and drying the solvent are provided. The cleaning mechanism 9 is also provided with a Y-direction drive motor 11.

  The head unit 1 includes a plurality of liquid droplet ejection heads 20 (see FIG. 2) that eject a liquid material from nozzles 22 (ejection ports) and apply them to the workpiece W. The plurality of droplet discharge heads 20 can individually discharge the liquid according to the discharge voltage supplied from the control unit 8. The droplet discharge head 20 and its arrangement will be described later.

  The X-direction drive motor 3 is not limited to this, but is a stepping motor, for example. When a drive pulse signal in the X-axis direction is supplied from the control unit 8, the X-direction guide shaft 2 is rotated to The head unit 1 engaged with the direction guide shaft 2 is moved in the X direction.

  Similarly, the Y-direction drive motors 6 and 11 are not limited to this, but are stepping motors, for example. When a drive pulse signal in the Y-axis direction is supplied from the control unit 8, the Y-direction drive shaft 5 The stage 4 and the cleaning mechanism 9 including the Y-direction drive motors 6 and 11 are moved in the Y-axis direction by engaging and rotating.

  When cleaning the droplet discharge head 20, the cleaning mechanism 9 moves to a position facing the head unit 1, and closes the nozzle surface of the droplet discharge head 20 so as to suck an unnecessary liquid material. Wiping for wiping off the nozzle surface to which the liquid is adhered, preliminary discharge for discharging the liquid material from all nozzles of the droplet discharge head 20, or processing for receiving and discharging the liquid material that is no longer needed. Details of the cleaning mechanism 9 are omitted.

  Although not limited to this, the heater 12 is a means for heat-treating the workpiece W by, for example, lamp annealing, and performs a heat treatment for evaporating and drying the liquid material discharged onto the workpiece W and converting it into a film. To do. The controller 8 also controls the power on and off of the heater 12.

  In the application operation of the droplet discharge device 10, a predetermined drive pulse signal is sent from the control unit 8 to the X direction drive motor 3 and the Y direction drive motor 6, and the head unit 1 is moved in the sub-scanning direction (X direction) to the stage 4 Are relatively moved in the main scanning direction (Y direction). Then, a discharge voltage is supplied from the control unit 8 in synchronization with the relative movement, and the liquid material is discharged as droplets onto a predetermined region of the work W from the droplet discharge head 20 of the head unit 1 for coating.

  The ejection amount of the droplets ejected from the droplet ejection head 20 can be adjusted by the magnitude of the ejection voltage supplied from the control unit 8.

<Droplet ejection head>
Next, a droplet discharge head according to an embodiment of the present invention will be described with reference to FIGS. 2 is a schematic perspective view showing the main structure of the droplet discharge head, and FIG. 3 is a perspective view showing the droplet discharge head.

  As shown in FIG. 2, the liquid droplet ejection head 20 includes a nozzle plate 21 having a plurality of nozzles 22, and a reservoir in which a liquid material flow path including a partition portion 24 that divides the nozzle plate 22 corresponding to each nozzle 22 is formed. This is a so-called piezo-type inkjet head having a three-layer structure including a plate 23 and a diaphragm 28 having a piezoelectric element (piezo) 29 as energy generating means. A plurality of pressure generating chambers 25 are configured by the partition portion 24 and the vibration plate 28 of the nozzle plate 21 and the reservoir plate 23. Each nozzle 22 communicates with each pressure generation chamber 25. A plurality of piezoelectric elements 29 are arranged on the diaphragm 28 so as to correspond to the respective pressure generation chambers 25.

  The reservoir plate 23 is provided with a common flow path 27 for temporarily storing a liquid material supplied from a tank (not shown) through a supply hole 28 a formed in the vibration plate 28. The liquid filled in the common flow path 27 is supplied to each pressure generating chamber 25 through the supply port 26.

  When a drive waveform as an electrical signal is applied to the piezoelectric element 29, the droplet discharge head 20 deforms the diaphragm 28 by distorting the piezoelectric element 29 itself. As a result, the volume of the pressure generating chamber 25 is changed, and the liquid material filled in the pressure generating chamber 25 is pressurized by the pumping action, and the liquid material can be discharged as droplets L from the nozzle 22. The energy generating means for discharging the liquid material as the droplets L from the nozzle 22 is not limited to the piezoelectric element 29, and may be a heater as a heating element, an electrostatic actuator as an electromechanical conversion element, or the like.

As shown in FIG. 3, the droplet discharge head 20 has two nozzle rows 22a and 22b in which a plurality of nozzles 22 are arranged on a nozzle plate 21 at substantially equal intervals (nozzle pitch P ₁ ). Further, when viewed from the direction orthogonal to the nozzle rows 22a and 22b, the one nozzle row 22a is arranged so that the plurality of nozzles 22 are alternately arranged at different intervals (nozzle pitch P ₂ and nozzle pitch P ₃ ). The other nozzle row 22b is displaced.

In this case, 180 nozzles 22 are arranged in each nozzle row 22a, 22b, and 360 nozzles 22 are alternately arranged at different intervals when viewed from the direction orthogonal to the nozzle rows 22a, 22b. Has been. That is, the plurality of nozzles 22 are arranged at unequal intervals. The diameter of the nozzle 22 is approximately 30 μm. The nozzle pitch P ₁ is approximately 140 μm, the nozzle pitch P ₂ is approximately 30 μm, and the nozzle pitch P ₃ is approximately 110 μm. The interval between the nozzle row 22a and the nozzle row 22b is approximately 2.54 mm.

By arranging the plurality of nozzles 22 at different intervals in this way, when the droplets L ejected from the adjacent nozzles 22 with a narrower interval (nozzle pitch P ₂ ) land on the workpiece W, they come into contact with each other. It is easy to unite. As a result, after the same type of liquid material is discharged from each nozzle and landed, the droplets come together to reduce wetting and spread unevenness. The landing diameter of the discharged droplet L depends on the surface state of the workpiece W, the discharge amount of the droplet L, the discharge speed, the nozzle diameter, and the like. Since the discharge amount and discharge speed of the droplet L depend on the physical properties of the discharged liquid material, the nozzle pitch P _{2 is set} to the diameter of the nozzle 22 in order to merge the landed droplet L more actively. On the other hand, the length is preferably 2/3 or more and less than 1. In addition, if the surface of the workpiece W is lyophilic, the landed liquid is likely to wet and spread. Therefore, the nozzle pitch P ₂ may be expanded beyond the diameter of the nozzle 22 in consideration of the behavior of the droplet L after landing. .

  Next, the arrangement of the plurality of droplet discharge heads 20 provided in the head unit 1 will be described. FIG. 4 is a schematic plan view showing the arrangement of the droplet discharge heads.

  As shown in FIG. 4, the head unit 1 has a substantially parallelogram-shaped carriage 1 a that holds a plurality (six) of droplet discharge heads 20 toward a work. In the carriage 1a, each droplet discharge head 20 is arranged in a stepped manner so that the nozzle rows 22a and 22b are orthogonal to the main scanning direction (Y direction). As described above, the droplet discharge head 20 has 360 nozzles 22. The nozzle length is Ln. In actual discharge of the liquid material, the ten nozzles 22 on both ends of the nozzle rows 22a and 22b are not used. This is because the discharge amount from the nozzles 22 located on both ends is less stable than the other nozzles 22. Therefore, the effective nozzle length is Lnp. The six droplet discharge heads 20a, 20b, 20c, 20d, 20e, and 20f arranged in a stepwise manner in the Y direction are arranged so that the effective nozzle length Lnp is continuous in the X direction. Such an arrangement of the droplet discharge head 20 is intended to discharge the droplet L in the X direction (sub-scanning direction) by making the maximum use of the effective nozzle length Lnp. Depending on the size and arrangement of the film formation area of the workpiece W, the nozzle rows 22a and 22b are arranged in the main scanning direction (Y) in consideration of the ejection amount of droplets L to land on the film formation area and the landing density by one main scanning. The droplet discharge heads 20 may be arranged so as to be inclined to the carriage 1a so as to intersect the direction).

  Further, the number of droplet discharge heads 20 mounted on the carriage 1a is not limited to this. Further, the head unit 1 may be provided with a plurality of carriages 1a at a predetermined interval.

  FIG. 5 is a block diagram illustrating an electrical configuration of the control unit and each unit related to the control unit. As shown in FIG. 5, the control unit 8 has an input buffer memory 13 that receives liquid discharge data from an external information processing apparatus, and discharge data temporarily stored in the input buffer memory 13 in a storage unit (RAM) 14. A processing unit 15 that expands and sends control signals to the related units is provided. In addition, a scanning drive unit 16 that receives a control signal from the processing unit 15 and sends a position control signal to the X-direction drive motor 3 and the Y-direction drive motor 6, and a droplet discharge head that receives a control signal from the processing unit 15 as well. And a head drive unit 17 for sending a drive voltage pulse (drive waveform) to 20.

  The discharge data received by the input buffer memory 13 includes data indicating the relative position of the film formation region on the workpiece W, data indicating the landing density of liquid droplets on the film formation region, and Data specifying which nozzle 22 is driven (ON-OFF) of the nozzle rows 22a and 22b of the droplet discharge head 20 is included.

  The processing unit 15 sends a position control signal related to the film formation region to the scan driving unit 16 from the ejection data stored in the storage unit 14. Upon receiving this control signal, the scanning drive unit 16 sends a position control signal to the X-direction drive motor 3 to move the head unit 1 (droplet ejection head 20) in the X-axis direction that is the sub-scanning direction. Further, a position control signal is sent to the Y-direction drive motor 6 to move the stage 4 holding the workpiece W in the Y-axis direction that is the main scanning direction. Thus, the head unit 1 and the workpiece W are relatively moved so that the liquid droplets are discharged from the droplet discharge head 20 to a desired position of the workpiece W.

  Further, the processing unit 15 uses 4-bit discharge for each nozzle 22 to indicate the landing density of the liquid droplets in the film formation region from the discharge data stored in the storage unit 14. It is converted into bitmap data and sent to the head drive unit 17. In addition, a drive voltage pulse applied to the piezoelectric element 29 of the droplet discharge head 20 based on data designating which nozzle 22 of the nozzle rows 22a and 22b of the droplet discharge head 20 is driven (ON-OFF). Is sent to the head drive unit 17 as a “timing detection signal” as a “timing detection signal”. The head drive unit 17 receives these control signals and sends an appropriate drive voltage pulse to the droplet discharge head 20 to discharge the liquid droplet L from the nozzle 22.

The effects of the first embodiment are as follows.
(1) The droplet discharge head 20 of the first embodiment includes two nozzle rows 22a and 22b in which a plurality of nozzles 22 are arranged at substantially equal intervals (nozzle pitch P ₁ ). The nozzle rows 22a, when viewed from a direction orthogonal to 22b, so that a plurality of nozzles 22 are alternately arranged at different intervals (nozzle pitch P ₂ and the nozzle pitch P _3), with respect to one nozzle row 22a The other nozzle row 22b is displaced. Therefore, when the droplets L are ejected from the adjacent nozzles 22 at a narrower interval (nozzle pitch P ₂ ) than when 360 nozzles 22 are arranged on the nozzle plate 21 at equal intervals, at least 2 The two droplets L can be landed on the workpiece W so as to be in contact with each other, and can be easily combined. That is, since the plurality of nozzles 22 are arranged in the sub-scanning direction (X direction), it is possible to wet and spread the droplets L that have landed in the sub-scanning direction.

  (2) In the droplet discharge device 10 of the first embodiment, the workpiece W is placed on the droplet discharge head 20 and the stage 4 and is opposed to the droplet discharge head 20 in the main scanning direction. A Y-direction drive motor 6 that moves in the (Y direction) and an X-direction drive motor 3 that moves the head unit 1 on which the droplet discharge head 20 is mounted in the sub-scanning direction are provided. A droplet discharge head 20 is arranged in the head unit 1 (carriage 1a) so that a plurality of nozzles 22 are arranged in the sub-scanning direction, and droplets L from adjacent nozzles 22 are arranged at a narrower interval of the droplet discharge heads 20. Can be combined so that at least two droplets L wet and spread in the sub-scanning direction. That is, the number of main scans to be ejected can be reduced so as to increase the density of the droplets L that land in the sub-scan and sub-scan directions of the droplet ejection head 20.

(Embodiment 2)
In the present embodiment, a liquid crystal display device as an electro-optical device and a method for manufacturing a color filter constituting the liquid crystal display device will be described as an example.

<Liquid crystal display device>
Next, a liquid crystal display device according to an embodiment of the present invention will be described with reference to FIG. FIG. 6 is a schematic cross-sectional view showing the main structure of the liquid crystal display device. As shown in FIG. 6, a liquid crystal display device 80 as an electro-optical device according to this embodiment is a passive matrix liquid crystal display device, and includes a color filter 60 and a counter substrate 67 as a pair of substrates, and these substrates 60. , 67 and a liquid crystal 70 interposed therebetween. Since such a liquid crystal display device 80 is a light-receiving display device, for example, an illumination device or the like is provided on the back side of the counter substrate 67. The liquid crystal display device 80 of the present embodiment is not limited to this, and is, for example, an active matrix liquid crystal display device in which the counter substrate 67 includes a switching element such as a TFT (Thin Film Transistor) or a TFD (Thin Film Diode). There may be.

  The counter substrate 67 uses, for example, soda glass or low alkali glass, and has a plurality of transparent electrodes 68 made of a conductive material on the surface on the liquid crystal 70 side. The electrode 68 extends in the Y direction perpendicular to the electrode 66 provided on the opposing color filter 60. That is, the liquid crystal display device 80 includes electrodes 66 and electrodes 68 that are opposed to each other and are orthogonally arranged in a grid pattern. A portion where the electrode 66 and the electrode 68 overlap at right angles is a display pixel region. Examples of the conductive material constituting the transparent electrodes 66 and 68 include ITO (Indium Tin Oxide) and IZO (Indium Zic Oxide).

  The color filter 60 is made of, for example, soda glass or low alkali glass, and a light shielding film 62 serving as a first bank opened on the surface of the transparent glass substrate 61 corresponding to the colored region, and on the light shielding film 62. The second bank 63 is provided. Further, the colored region partitioned by the second bank 63 has a colored layer 64 corresponding to R (red), G (green), and B (blue), and a planarizing layer that covers the colored layer 64 and the second bank 63. And an OC (overcoat) layer 65. The electrode 66 is formed on the OC layer 65.

  The light shielding film 62 is made of a metal such as Cr, Al, or Ni, or a metal compound thereof, and is provided so as to protrude inside the colored region defined by the second bank 63. The second bank 63 is made of an organic material such as acrylic resin. The opening 62a of the light shielding film 62 is formed so as to have substantially the same size for each colored region. Therefore, the aperture ratios of the colored layers 64R, 64G, and 64B of the color filter 60 are almost the same.

  The colored layer 64 is formed by applying three types (three colors) of liquid materials including a colored layer forming material to a colored region substantially partitioned by the second bank 63, and the colored layer 64 having the same color in the Y direction. Are arranged in a so-called stripe shape so as to be arranged.

  Such a color filter 60 is manufactured by using a color filter manufacturing method described later, and the colored layers 64R, 64G, and 64B have substantially flat (constant) cross-sectional shapes and substantially the same film thickness. It is formed in a state.

  In the liquid crystal display device 80, the color filter 60 and the counter substrate 67 are arranged to face each other at a predetermined interval through a gap material 69, and are joined using a seal material (not shown). Further, a liquid crystal 70 as an electro-optical material is sealed between a pair of substrates 60 and 67 by a sealing material. Note that an alignment film for aligning the liquid crystal 70 in a predetermined direction is provided on the side of the pair of substrates 60 and 67 facing the liquid crystal 70, but is omitted in FIG. Further, on the front and back surfaces of the liquid crystal display device 80, a polarizing plate for deflecting incident or outgoing light, a retardation film as an optical functional film for improving the viewing angle, etc. are usually arranged. These are also omitted.

  Since the liquid crystal display device 80 includes the color filter 60 as a substrate having the colored layers 64R, 64G, and 64B having substantially the same film thickness, the colored layers 64R, 64G, and 64B are not uniform. High display quality with little color unevenness caused by

<Color filter manufacturing method>
Next, a color filter manufacturing method will be described with reference to FIGS. FIG. 7 is a flowchart showing a method for manufacturing a color filter, and FIGS. 8A to 8E are schematic sectional views showing a method for manufacturing a color filter.

  As shown in FIG. 7, the manufacturing method of the color filter 60 of the present embodiment includes a step of forming a light shielding film 62 as a first bank on the surface of the glass substrate 61 (step S <b> 1), A step of forming the two banks 63 (step S2), and a step of surface-treating the colored region partitioned by the second banks 63 (step S3). In addition, a liquid material discharge step (step S4) for applying three kinds (three colors) of liquid materials containing different colored layer forming materials to the surface-treated colored regions, and the discharged liquid materials are dried to color a plurality of colors. A drying process (step S5) for forming the layer 64 and a planarization layer forming process (step S6) for forming the OC layer 65 so as to cover the second bank 63 and the colored layer 64 are provided.

  Step S1 in FIG. 7 is a first bank forming step. In step S1, a light shielding film 62 as a first bank is formed on the glass substrate 61 as shown in FIG. As the material of the light shielding film 62, for example, an opaque metal such as Cr, Al, or Ni, or a metal compound thereof can be used. As a method for forming the light shielding film 62, a film made of the above material is formed on the glass substrate 61 by vapor deposition or sputtering. The film thickness may be set in accordance with the material selected to maintain the light shielding property. For example, if Cr, 100 to 200 nm is preferable. Then, a portion other than the portion corresponding to the light shielding film 62 is covered with a resist by a photolithography method, and the film is etched using an etching solution such as an acid corresponding to the above material. Thereby, the light shielding film 62 having the opening 62a is formed. The width of the opening 62a is set to a constant value. Then, the process proceeds to step S2.

  Step S2 in FIG. 7 is a second bank forming step. In step S <b> 2, as shown in FIG. 8B, the second bank 63 is formed on the light shielding film 62. As the material of the second bank 63, a photosensitive resin material such as acrylic resin can be used. The photosensitive resin material preferably has a light shielding property. As a method for forming the second bank 63, for example, a photosensitive resin material is applied to the surface of the glass substrate 61 on which the light-shielding film 62 is formed by a roll coating method or a spin coating method, and is dried to a photosensitive thickness of about 2 μm. A conductive resin layer is formed. And the method of forming the 2nd bank 63 by exposing and developing the mask provided with the opening part by the magnitude | size corresponding to the coloring area | region D at the predetermined position with the glass substrate 61 is mentioned. Then, the process proceeds to step S3.

Step S3 in FIG. 7 is a surface treatment process. In step S3, plasma processing using O ₂ as a processing gas and plasma processing using a fluorine-based gas as a processing gas are performed. That is, the surface of the glass substrate 61 that is an inorganic material corresponding to the colored region D and the light shielding film 62 are subjected to lyophilic treatment, and then the surface (including the wall surface) of the second bank 63 made of an organic material is subjected to lyophobic treatment. Then, the process proceeds to step S4.

  Step S4 in FIG. 7 is a liquid discharge process. In step S4, as shown in FIG. 8C, the liquid bodies 51, 52, and 53 corresponding to each of the colored regions D that have been surface-treated are provided to form a colored layer 64 of a plurality of colors. The liquid 51 contains an R (red) colored layer forming material, the liquid 52 contains a G (green) colored layer forming material, and the liquid 53 forms a B (blue) colored layer forming material. Contains materials. In the method of applying each liquid material 51, 52, 53, the liquid droplet ejection head 20 is filled with each liquid material 51, 52, 53 and landed on the colored region D as a droplet L. Each liquid 51, 52, 53 is given a predetermined amount according to the area of the colored region D, spreads in the colored region D, and rises due to surface tension.

<Liquid material discharge method>
Here, a more detailed liquid material discharge method will be described. FIG. 9 is a schematic plan view showing a liquid discharge method. In addition, in order to explain the ejection method in an easy-to-understand manner, the drawings are appropriately enlarged and reduced. The liquid discharge method of the present embodiment uses the above-described droplet discharge device 10.

  First, as shown in FIG. 9A, a glass substrate as a work W so that the longitudinal direction of the colored region D as a partition region faces the droplet discharge head 20 in a state parallel to the nozzle rows 22a and 22b. 61 is placed on the stage 4. Then, a plurality of droplets L are ejected from a plurality of nozzles 22 applied to one coloring region D in synchronization with the main scanning in which the droplet ejection head 20 and the workpiece W are relatively moved in the Y direction. At this time, the droplets 51a and 51b discharged from the adjacent nozzles 22 at a narrower interval are discharged so as to be partially connected after landing. In this case, in one main scan, as shown in FIG. 9B, the liquid droplets 51c and 51d are further discharged so as to land on the colored region D in the same manner.

  Since the surface of the glass substrate 61 corresponding to the colored region D has been subjected to lyophilic treatment, the landed droplets 51a and 51b and the droplets 51c and 51d are combined with each other and spread. Then, as shown in FIG. 9C, a droplet 51e is formed in which the wet and spread liquid materials are further combined. Similarly, since droplets 51f formed by combining droplets that have landed in the sub-scanning direction (X direction) are formed adjacent to each other, as shown in FIGS. 9 (d) and 9 (e), each spreads and spreads. Thus, the combined liquid 51g is formed.

  Of course, in order to uniformly form the colored layer 64 having a predetermined thickness in one colored region D, it is necessary to discharge a predetermined amount of liquid. In the liquid material ejection method of the present embodiment, the liquid material can be widely spread and spread in the colored region D by one main scanning, so that the droplets L corresponding to the predetermined amount are continuously landed in the main scanning direction. By doing so, it is possible to apply the liquid material to the colored region D without any problem. In other words, in order to apply the liquid material to the colored region D without change, it is possible to change the drawing range and reduce the number of sub-scans and main scans for discharging droplets so that the landing density is increased in the sub-scan direction. It becomes.

  Such a liquid discharge method is not limited to this, and a predetermined amount of liquid may be applied to the colored region D by performing main scanning a plurality of times. For example, a plurality of liquid droplets L may be ejected to the extent that the colored region D is wetted and spread by at least one main scan, and then the remaining liquid material may be ejected so as to reach a predetermined amount. According to this, since the liquid material is further applied to the liquid material wetted and spread by the previous discharge by the subsequent discharge, it is possible to reduce the discharge unevenness and to apply the liquid material more uniformly.

  In practice, a plurality of color filters 60 are simultaneously formed using a larger workpiece W in which a plurality of colored regions D corresponding to one liquid crystal display device 80 are arranged in a matrix. Therefore, the range (drawing range) in which the plurality of droplet discharge heads 20 mounted on the head unit 1 can be discharged by one main scanning is smaller than the workpiece W, and all the colored regions D of the workpiece W are discharged. The liquid bodies 51, 52 and 53 corresponding to the above can be ejected by sub-scanning the head unit 1 and making a line feed. Then, the process proceeds to step S5.

  Step S5 in FIG. 7 is a drying process. In step S5, as shown in FIG. 8D, the liquids 51, 52, and 53 discharged to the colored regions D are dried and fixed to form the colored layers 64R, 64G, and 64B. As a drying method, a reduced pressure drying method is preferable in which the glass substrate 61 on which the liquid materials 51, 52, and 53 have been discharged is sealed in a chamber to be in a reduced pressure state, and the solvent is evaporated at a constant rate to dry. According to this, it is possible to obtain a uniform colored layer 64 that is dried evenly.

  In addition, the drying method of each provided liquid material 51,52,53 is not restricted to the method of lump-drying after giving all the liquid materials 51,52,53, The liquid materials 51,52,53 are provided individually. After drying, a method of performing drying may be used. Then, the process proceeds to step S6.

Step S6 in FIG. 7 is a planarization layer forming step. In step S <b> 6, as shown in FIG. 8E, the OC layer 65 is formed so as to cover the colored layer 64 and the second bank 63. As a material of the OC layer 65, a transparent acrylic resin material can be used. Examples of the forming method include spin coating and offset printing. The OC layer 65 is provided to alleviate unevenness on the surface of the glass substrate 61 on which the colored layer 64 is formed, and to flatten the electrode 66 to be filmed on the surface later. Further, a thin film such as SiO ₂ may be further formed on the OC layer 65 in order to ensure adhesion with the electrode 66.

  The color filter 60 thus completed has a colored layer 64 having a substantially constant film thickness. Further, when the liquid crystal display device 80 is manufactured using the color filter 60, the cross-sectional shape and the film thickness of each of the colored layers 64R, 64G, and 64B are almost constant, so that the color unevenness due to the film thickness unevenness of the colored layer 64 is small. , Good display quality can be obtained.

The effects of the second embodiment are as follows.
(1) The liquid material ejection method of the second embodiment is different by disposing the droplet ejection head 20 and the workpiece W so that the nozzle rows 22a and 22b are parallel to the longitudinal direction of the colored region D. The droplets L discharged from the adjacent nozzles 22 at the narrower interval are discharged so as to be partially connected after landing. When a plurality of nozzles 22 are arranged at equal intervals in the sub-scanning direction when viewed from the main scanning direction, the adjacent liquid droplets L that have landed on the work W are partially due to the surface state of the work W and variations in the discharge amount. May be isolated. In addition, since it is difficult to make it constant which droplet L is adjacent to each other in the sub-scanning direction, there is a possibility of uneven ejection. According to the above-described liquid material ejection method, the droplets ejected from the adjacent nozzles 22 at a narrower interval in the sub-scanning direction (X direction) coalesce, so that the landing density of the droplets L is reduced in the sub-scanning direction. The number of times of performing the sub-scanning and the main scanning can be reduced so as to increase. In addition, a plurality of droplets L can be landed in the longitudinal direction of the colored region D by at least one main scan, and the liquid material can be discharged in the longitudinal direction without unevenness.

  (2) In the method for manufacturing the color filter 60 of the second embodiment, in the colored layer forming step, the three types of liquid materials containing the colored layer forming material are applied to the corresponding colored regions D using the liquid material discharge method. Give. Therefore, the discharge unevenness is reduced, and when it is fixed in the drying process, the colored layer 64 having a substantially constant film thickness can be formed. That is, it is possible to manufacture the color filter 60 with a high yield by reducing defects such as color unevenness due to discharge unevenness.

  (3) In the liquid crystal display device 80 of the second embodiment, since the color filter 60 is manufactured using the manufacturing method of the color filter 60 of the pair of substrates, high display quality with less defects such as color unevenness is obtained. A liquid crystal display device 80 can be provided.

(Embodiment 3)
This embodiment is an example of an organic EL display device as an electro-optical device including a substrate on which a plurality of organic EL light emitting elements are formed and a sealing substrate for sealing the substrate, and a method for manufacturing the organic EL light emitting elements. Explained.

<Organic EL display device>
FIG. 10 is a schematic cross-sectional view showing the main structure of the organic EL display device. As shown in FIG. 10, an organic EL display device 100 as an electro-optical device according to this embodiment includes a substrate 101 having a light emitting element portion 117, and a sealing substrate 119 sealed with a space 120 separated from the substrate 101. It has. The substrate 101 includes a circuit element portion 103 on the element substrate 102, and the light emitting element portion 117 is formed so as to overlap the circuit element portion 103 and is driven by the circuit element portion 103. In the light emitting element portion 117, organic light emitting layers 117R, 117G, and 117B of three colors are formed in each partition region A and are in a stripe shape. The substrate 101 has three partition regions A corresponding to the three color organic light emitting layers 117R, 117G, and 117B as a set of picture elements, and these picture elements are arranged in a matrix on the circuit element portion 103 of the element substrate 102. It is a thing. In the organic EL display device 100 of this embodiment, light emitted from the light emitting element unit 117 is emitted to the element substrate 102 side.

  The sealing substrate 119 is made of glass or metal, and is bonded to the substrate 101 via a sealing resin. A getter agent 119a is attached to the sealed inner surface. The getter agent 119a absorbs water or oxygen that has entered the space 120 between the substrate 101 and the sealing substrate 119, and prevents the light emitting element portion 117 from being deteriorated by the water or oxygen that has entered. The getter agent 119a may be omitted.

  The substrate 101 has a plurality of partition regions A on the circuit element portion 103 of the element substrate 102, partitions the plurality of partition regions A, and has a two-layer bank 113 as a bank having a step on the wall surface; An electrode 112 formed in a plurality of partition regions A and a hole injecting and transporting layer 116 stacked on the electrode 112 are provided. In addition, a light emitting element portion 117 having organic light emitting layers 117R, 117G, and 117B formed by applying three kinds of liquid materials including a light emitting layer forming material in a plurality of partition regions A is provided. The two-layer bank 113 includes a lower-layer bank 114 and an upper-layer bank 115 that substantially partitions the partition region A. The lower-layer bank 114 is provided so as to protrude inside the partition region A, and A step is formed on the wall surface.

  The element substrate 102 is made of a transparent substrate such as glass, for example. A base protective film 102a made of a silicon oxide film is formed on the element substrate 102, and an island-like semiconductor film made of polycrystalline silicon is formed on the base protective film 102a. 104 is formed. Note that a source region 104a and a drain region 104b are formed in the semiconductor film 104 by high concentration P ion implantation. A portion where P ions are not introduced is a channel region 104c. Further, a transparent gate insulating film 105 covering the base protective film 102a and the semiconductor film 104 is formed. On the gate insulating film 105, a gate electrode 106 made of Al, Mo, Ta, Ti, W, or the like is formed. A transparent first interlayer insulating film 107 and a second interlayer insulating film 108 are formed on the gate insulating film 105. The gate electrode 106 is provided at a position corresponding to the channel region 104 c of the semiconductor film 104. Further, contact holes 109 and 110 are formed through the first interlayer insulating film 107 and the second interlayer insulating film 108 and connected to the source region 104a and the drain region 104b of the semiconductor film 104, respectively. A transparent electrode 112 made of ITO (Indium Tin Oxide) or the like is patterned and arranged in a predetermined shape on the second interlayer insulating film 108 (electrode formation process), and one contact hole 109 is formed in this electrode 112. It is connected. The other contact hole 110 is connected to the power line 111. In this manner, the driving thin film transistor 103 a connected to each electrode 112 is formed in the circuit element portion 103. In the circuit element portion 103, a storage capacitor and a switching thin film transistor are also formed, but these are not shown in FIG.

  The light emitting element unit 117 includes an electrode 112 as an anode, a hole injection / transport layer 116 sequentially stacked on the electrode 112, organic light emitting layers 117R, 117G, and 117B, an upper bank 115, and organic light emitting layers 117R and 117G. , 117B, and a cathode 118 laminated so as to cover them. In this case, the functional layer includes a hole injecting and transporting layer 116 and organic light emitting layers 117R, 117G, and 117B laminated thereon. Note that if the cathode 118, the sealing substrate 119, and the getter agent 119a are made of a transparent material, light emitted from the sealing substrate 119 side can be emitted.

  The organic EL display device 100 has a scanning line (not shown) connected to the gate electrode 106 and a signal line (not shown) connected to the source region 104a. Switching is performed by the scanning signal transmitted to the scanning line. When a thin film transistor (not shown) is turned on, the potential of the signal line at that time is held in the storage capacitor, and the on / off state of the driving thin film transistor 103a is determined according to the state of the storage capacitor. Then, a current flows from the power supply line 111 to the electrode 112 through the channel region 104c of the driving thin film transistor 103a, and further to the cathode 118 through the hole injection transport layer 116 and the organic light emitting layers 117R, 117G, and 117B. Current flows. Each organic light emitting layer 117R, 117G, 117B emits light according to the amount of current flowing through it. The organic EL display device 100 can display desired characters, images, and the like by such a light emission mechanism of the light emitting element unit 117. In addition, the light emitting element portion 117 including a plurality of organic EL light emitting elements is manufactured using a method for manufacturing an organic EL light emitting element described later, and the thickness of each organic light emitting layer 117R, 117G, 117B is substantially constant. In addition, it has high display quality with few defects such as uneven light emission and uneven brightness due to non-uniform film thickness.

<Method for Manufacturing Organic EL Light Emitting Element>
Next, a method for manufacturing an organic EL light emitting device will be described with reference to FIGS. FIG. 11 is a flowchart showing a method for manufacturing an organic EL light emitting device, and FIGS. 12A to 12G are schematic cross-sectional views showing a method for manufacturing an organic EL light emitting device. In FIGS. 12A to 12G, the circuit element portion 103 formed on the element substrate 102 is not shown.

  As shown in FIG. 11, in the method for manufacturing the organic EL light emitting device of this embodiment, a lower layer bank forming step (step S <b> 11) for forming a lower layer bank 114 on the element substrate 102, and an upper layer bank 115 is formed on the lower layer bank 114. And an upper bank forming step (step S12). Further, the method includes a step of performing a surface treatment of the partition region A partitioned by the upper layer bank 115 (step S13) and a step of forming the hole injection transport layer 116 in the surface-treated partition region A (step S14). . Then, a light emitting layer forming step of forming the respective organic light emitting layers 117R, 117G, and 117B by applying three types of liquid materials including a light emitting layer forming material to the partition region A in which the hole injecting and transporting layer 116 is formed ( Step S15). Further, a step (step S16) of forming the cathode 118 so as to cover the upper layer bank 115 and the respective organic light emitting layers 117R, 117G, and 117B is provided.

Step S11 in FIG. 11 is a lower layer bank forming step. In step S11, as shown in FIG. 12A, the lower layer bank 114 is formed so as to cover a part of the plurality of electrodes 112 of the element substrate. As a material of the lower layer bank 114, an insulating material such as insulating SiO ₂ (silicon oxide) is used. As a method of forming the lower layer bank 114, for example, the surface of each electrode 112 is masked using a resist or the like corresponding to each of the organic light emitting layers 117R, 117G, and 117B to be formed later. Then, there is a method of forming the lower layer bank 114 by putting the masked element substrate 102 into a vacuum apparatus and performing sputtering or vacuum deposition using SiO ₂ as a target or a raw material. Since the lower layer bank 114 is formed of SiO ₂ , the lower layer bank 114 has sufficient transparency if the film thickness is 200 nm or less. Later, the hole injection transport layer 116 and the organic light emitting layers 117R, 117G, Even if 117B is laminated, light emission is not inhibited. In addition, even if the cathode 118 is stacked later, the cathode 118 and the electrode 112 can be prevented from being directly short-circuited. Then, the process proceeds to step S12.

  Step S12 in FIG. 11 is an upper layer bank forming process. In step S12, as shown in FIG. 12B, each partition area A is substantially partitioned, and the upper bank 115 is placed on the lower bank 114 so that the lower bank 114 protrudes inside the partition area A. Form. As a material for the upper layer bank 115, an acrylic photosensitive resin material can be used. As a method for forming the upper layer bank 115, for example, a photosensitive resin material is applied to the surface of the element substrate 102 on which the lower layer bank 114 is formed by a roll coat method or a spin coat method, and dried to be a photosensitive layer having a thickness of about 2 μm. A resin layer is formed. Then, there is a method of forming the upper layer bank 115 by exposing and developing a mask provided with an opening having a size corresponding to the partition region A and facing the element substrate 102 at a predetermined position. Then, the process proceeds to step S13.

Step S13 in FIG. 11 is a step of surface-treating the partition region A. In step S13, the surface of the element substrate 102 on which the two-layer bank 113 is formed is first plasma-treated using O ₂ gas as a processing gas. As a result, the surface of the electrode 112, the overhanging portion of the lower layer bank 114, and the surface of the upper layer bank 115 (including the wall surface) are activated and subjected to lyophilic treatment. Next, plasma processing is performed using a fluorine-based gas such as CF ₄ as a processing gas. As a result, the fluorine-based gas reacts only on the surface of the upper layer bank 115 made of a photosensitive resin, which is an organic material, and the liquid repellent treatment is performed. Then, the process proceeds to step S14.

  Step S14 in FIG. 11 is a hole injection transport layer forming step. In step S14, as shown in FIG. 12C, a liquid material 130 containing a hole injection transport layer forming material is applied to the partition region A. As a method of applying the liquid material 130, the droplet discharge device 10 including the droplet discharge head 20 that can discharge the liquid material 130 as droplets is used. Further, the liquid 130 is discharged from the plurality of nozzles 22 based on the liquid discharge method of the second embodiment.

  As shown in FIG. 12C, the liquid 130 discharged from the droplet discharge head 20 lands on the electrode 112 of the element substrate 102 as a droplet and spreads wet. A necessary amount of the liquid 130 is ejected as droplets according to the area of the partition region A, and the liquid 130 is raised by the surface tension. Then, as shown in FIG. 12D, by heating the element substrate 102 by a method such as lamp annealing, the solvent component of the liquid 130 is dried and removed, and the step of the two-layer bank 113 of the electrode 112 is removed. A hole injection transport layer 116 is formed in the partitioned region. In this embodiment, PEDOT (Polyethylene Dioxy Thiophene) was used as the hole injection transport layer forming material. In this case, the hole injecting and transporting layer 116 made of the same material is formed in each partition region A, but the material of the hole injecting and transporting layer is changed for each partition region A corresponding to the material for forming the organic light emitting layer later. You may change it. Further, the hole injecting and transporting layer 116 may be formed by a vapor deposition method or the like regardless of the liquid material discharge method. Then, the process proceeds to step S15.

  Step S15 in FIG. 11 is a light emitting layer forming step. In step S15, as shown in FIG. 12E, three types of liquids 141, 142, and 143 containing a light emitting layer forming material are applied to the plurality of partition regions A. As a method for applying the liquid materials 141, 142, and 143, the liquid droplets ejection head 20 is filled with the liquid materials 141, 142, and 143 using the droplet ejection device 10 in the same manner as in the previous step S14. It is made to land on the corresponding division area A as a droplet. The liquid 141 includes a material that forms the organic light emitting layer 117R (red), the liquid 142 includes a material that forms the organic light emitting layer 117G (green), and the liquid 143 forms the organic light emitting layer 117B (blue). Contains material. The liquid bodies 141, 142, and 143 that have landed wet and spread in the partition region A, and the cross-sectional shape rises in an arc shape. Then, as shown in FIG. 12 (f), when the applied liquid bodies 141, 142, and 143 are collectively dried by a reduced pressure drying method, the liquid bodies 141, 142, and 143 are dried while maintaining a wet spread state to a protruding portion with better wettability. The organic light emitting layers 117R, 117G, and 117B having a substantially constant film thickness are formed. Then, the process proceeds to step S16.

Step S16 in FIG. 11 is a cathode forming step. In step S16, as shown in FIG. 12G, the cathode 118 is formed so as to cover the organic light emitting layers 117R, 117G, and 117B of the element substrate 102 and the surface of the upper layer bank 115. As a material for the cathode 118, it is preferable to use a combination of metals such as Ca, Ba, and Al and fluorides such as LiF. In particular, it is preferable to form a film of Ca, Ba, or LiF having a small work function on the side close to the organic light emitting layers 117R, 117G, and 117B and a film of Al or the like having a large work function on the far side. A protective layer such as SiO ₂ or SiN may be laminated on the cathode 118. In this way, oxidation of the cathode 118 can be prevented. Examples of the method for forming the cathode 118 include vapor deposition, sputtering, and CVD. In particular, the vapor deposition method is preferable in that the organic light emitting layers 117R, 117G, and 117B can be prevented from being damaged by heat.

  The light emitting element portion 117 thus completed has the organic light emitting layers 117R, 117G, and 117B having a substantially constant film thickness because the liquid material ejection method of the second embodiment is used. When the organic EL display device 100 is manufactured using the substrate 101 having such a light emitting element portion 117, the film thickness of each of the organic light emitting layers 117R, 117G, and 117B is substantially constant, so that the resistance is substantially constant. . In other words, when the circuit element unit 103 applies a driving voltage to the light emitting element unit 117 to emit light, the organic light emitting layers 117R, 117G, and 117B have less unevenness in brightness and unevenness in luminance due to unevenness in resistance, and display quality with good appearance. Is obtained.

The effects of the third embodiment are as follows.
(1) The manufacturing method of the organic EL light emitting device of the third embodiment applies three types of liquid materials including the light emitting layer forming material to the partition region A using the liquid material discharge method of the second embodiment. Therefore, when the discharge unevenness is reduced and dried and fixed, the organic light emitting layers 117R, 117G, and 117B having a substantially constant film thickness can be formed. That is, defects such as light emission unevenness due to discharge unevenness are reduced, and the light emitting element portion 117 can be manufactured with high yield.

  (2) In the organic EL display device 100 of the third embodiment, since the light-emitting element portion 117 of the substrate 101 is manufactured using the method for manufacturing the organic EL light-emitting element, high display quality with less defects such as uneven light emission is provided. The organic EL display device 100 having the above can be provided.

(Embodiment 4)
Next, a specific example of an electronic apparatus in which the liquid crystal display device of the second embodiment or the organic EL display device of the third embodiment is mounted will be described. FIG. 13 is a schematic perspective view showing a mobile phone as an electronic apparatus.

  As shown in FIG. 13, a mobile phone 1000 as an electronic apparatus according to the present embodiment includes a main body 1002 capable of inputting numbers and characters, and a display unit 1001 attached to the main body 1002 in a foldable state. Have. A liquid crystal display device 80 or an organic EL display device 100 is mounted on the display unit 1001.

The effects of the fourth embodiment are as follows.
(1) Since the mobile phone 1000 as the electronic device of the fourth embodiment includes the liquid crystal display device 80 of the second embodiment or the organic EL display device 100 of the third embodiment, problems such as color unevenness and light emission unevenness. Accordingly, it is possible to provide a mobile phone 1000 that can check information such as characters and images with high display quality with less image quality.

  As mentioned above, although embodiment of this invention was described, various deformation | transformation can be added with respect to the said embodiment in the range which does not deviate from the meaning of this invention. For example, modifications other than the above embodiment are as follows.

(Modification 1) The arrangement of the plurality of nozzles 22 in the droplet discharge head 20 of Embodiment 1 is not limited to this. FIG. 14 is a schematic view showing a droplet discharge head according to a modification. FIG. 1A is a perspective view, and FIG. For example, as shown in FIG. 14 (a), the liquid droplet ejection head 30 of the modified example has a row of nozzle array 32a in nozzle plate 31, the interval P ₄ nozzles a1 and nozzle a2 and a nozzle a2 nozzle They are arranged at unequal intervals so as to be narrower than the interval P ₅ of a3. As shown in FIG. 14B, the droplet discharge head 30 includes a plurality of pressure generation chambers 35 including a nozzle plate 31, a partition 33 that forms a liquid material flow path, and a vibration plate 34. ing. In addition, a piezo 39 corresponding to the plurality of pressure generating chambers 35 is provided. The piezo 39 includes a piezoelectric body 37 and an upper electrode 38. When a driving voltage is applied between the lower electrode 36 and the upper electrode 38 formed on the diaphragm 34, the diaphragm 34 is deformed to generate a pressure generating chamber. The liquid filled in 35 can be discharged from the nozzle 32 as droplets. As a method of disposing the nozzles a <b> 1 to a <b> 3, for example, a <b> 1 and a <b> 3 are formed so as to be positioned approximately at the center of the width C corresponding to the width C of the pressure generation chamber 35. The nozzle a2 is formed at a position close to the nozzle a1 deviating from the center of the width C. In this way, the plurality of nozzles 32 can be arranged at unequal intervals. In this state, the interval P ₄ is larger than the diameter of the nozzle 32. However, as a method of bringing the nozzle a1 and the nozzle a2 closer to each other, the nozzle array 32a is substantially inclined by intersecting with the main scanning direction. It is possible to make them close to each other. Further, if there are three or more nozzle rows of the droplet discharge head, at least one nozzle row is in a state where a plurality of nozzles are alternately arranged at different intervals, for example, in the nozzle row 32a of the droplet discharge head 30 Good. Further, a droplet discharge head having a plurality of nozzles arranged at substantially equal intervals is arranged on the carriage 1a shown in FIG. 4 alternately with a plurality of nozzles at different intervals when viewed from the main scanning direction (Y direction). A plurality of them may be arranged in the Y direction and shifted in the X direction.

  (Modification 2) A method of manufacturing a device having a thin film to which the liquid discharge method of Embodiment 2 can be applied includes a coloring layer 64 of a color filter 60, a hole injection transport layer 116 of an organic EL light emitting element, and organic light emission. The method for forming the layers 117R, 117G, and 117B is not limited. For example, the present invention can also be applied to a method for forming an alignment film of the liquid crystal display device 80 and a method for forming a metal wiring connected to the thin film transistor 103a of the organic EL display device 100.

  (Modification 3) The arrangement of the colored layers 64R, 64G, and 64B of the color filter 60 of the second embodiment is not limited to a stripe shape. For example, the liquid material discharge method of the present invention can be applied to a mosaic shape in which the colored layers 64 of the same color are arranged in an oblique direction or a delta shape in which the colored layers 64 are arranged at the apexes of a triangle. The same applies to the arrangement of the organic light emitting layers 117R, 117G, and 117B of the organic EL display device 100 of the third embodiment.

  (Modification 4) The liquid material ejection method of the second embodiment is a so-called horizontal drawing method in which the nozzle rows 22a and 22b are parallel to the longitudinal direction of the colored region D. However, the present invention can also be applied to a so-called vertical drawing method in which the nozzle rows 22a and 22b are parallel to each other.

  (Modification 5) The sealing substrate 119 of the organic EL display device 100 of Embodiment 3 is not necessarily required. For example, the light-emitting element portion 117 of the substrate 101 may be sealed with a sealing agent made of a light-shielding resin or the like.

  (Modification 6) The electronic device on which the liquid crystal display device 80 of the second embodiment or the organic EL display device 100 of the third embodiment is mounted is not limited to the mobile phone 1000 of the fourth embodiment. For example, portable information devices called PDA (Personal Digital Assistants), portable terminal devices, portable personal computers, word processors, digital still cameras, in-vehicle monitors, digital video cameras, liquid crystal televisions, viewfinder types, monitor direct view type videos Examples include tape recorders, car navigation devices, pagers, electronic notebooks, calculators, workstations, video phones, POS terminals, and other devices that use electro-optical devices such as liquid crystal display devices and organic EL display devices.

The schematic perspective view which shows a droplet discharge apparatus. FIG. 2 is a schematic perspective view showing a main part structure of a droplet discharge head. The perspective view which shows a droplet discharge head. FIG. 3 is a schematic plan view showing the arrangement of droplet discharge heads. The block diagram which shows an electric structure with each part relevant to a control part and a control part. FIG. 3 is a schematic cross-sectional view showing a main part structure of a liquid crystal display device. The flowchart which shows the manufacturing method of a color filter. (A)-(e) is a schematic sectional drawing which shows the manufacturing method of a color filter. (A)-(e) is a schematic plan view which shows the discharge method of a liquid. The schematic sectional drawing which shows the principal part structure of an organic electroluminescence display. The flowchart which shows the manufacturing method of an organic electroluminescent light emitting element. (A)-(g) is a schematic sectional drawing which shows the manufacturing method of an organic electroluminescent light emitting element. The schematic perspective view which shows a mobile telephone. FIG. 5A is a perspective view showing a modified droplet discharge head, and FIG. 5B is a schematic cross-sectional view showing the structure of a modified droplet discharge head.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Droplet discharge apparatus, 20, 30 ... Droplet discharge head, 22, 32 ... Nozzle, 22a, 22b, 32a ... Nozzle row, 51, 52, 53 ... Liquid body containing colored layer forming material, 60 ... Color filter 61 ... Glass substrate as substrate, 64, 64R, 64G, 64B ... Colored layer, 67 ... Counter substrate as a pair of substrates, 70 ... Liquid crystal, 80 ... Liquid crystal display device, 100 ... Organic EL display device, 101 ... Substrate DESCRIPTION OF SYMBOLS 117 ... Light emitting element part in which a plurality of organic EL light emitting elements are formed, 117R, 117G, 117B ... Organic light emitting layer, 119 ... Sealing substrate, 1000 ... Mobile phone as electronic device, A ... Partition area, D ... Partition area Colored regions as P ₂ , P _4, narrower spacing, W ... workpiece.

Claims (13)

A droplet discharge head capable of discharging a filled liquid as droplets,
A nozzle row comprising a plurality of nozzles is provided,
The droplet discharge head, wherein the plurality of nozzles are alternately arranged at different intervals when viewed from a direction orthogonal to the nozzle row. Comprising at least two nozzle rows in which the plurality of nozzles are arranged at substantially equal intervals;
When viewed from a direction orthogonal to the nozzle row, the other nozzle row is shifted from the one nozzle row so that the plurality of nozzles are alternately arranged at different intervals. The droplet discharge head according to claim 1. Comprising three or more nozzle rows,
The droplet discharge head according to claim 1, wherein the plurality of nozzles are alternately arranged at different intervals in at least one nozzle row.   4. The narrower interval among the different intervals of the plurality of nozzles is a length of 2/3 or more and less than 1 with respect to the diameter of the nozzle. 5. The droplet discharge head described. A droplet discharge head having a nozzle row composed of a plurality of nozzles, wherein the plurality of nozzles are alternately arranged at different intervals when viewed from a direction orthogonal to the nozzle row;
A moving means for moving the droplet discharge head and the workpiece opposite to each other, and
A liquid droplet ejection apparatus that ejects a liquid material as liquid droplets from the plurality of nozzles of the liquid droplet ejection head in synchronization with relative movement by the moving unit. Using the droplet discharge device according to claim 5, a liquid material is discharged as droplets onto a plurality of partitioned regions on the workpiece by performing a scanning operation in which the droplet discharge head and the workpiece are opposed to each other. A discharge method,
In at least one scan, the plurality of droplets are ejected from a plurality of nozzles of the droplet ejection head so that a plurality of droplets land on one partition region, and the nozzles adjacent to each other at a narrower interval among the different intervals. A method of discharging a liquid material, wherein the liquid droplets discharged from the liquid are discharged so as to be partially connected.   The nozzle row of the droplet discharge head is disposed so as to be substantially parallel or inclined with respect to the longitudinal direction of the partition region, and the liquid material is discharged as droplets from the plurality of nozzles. Item 7. The liquid discharge method according to Item 6. A method for manufacturing a device having a workpiece and a thin film formed in a plurality of partitioned regions on the workpiece,
8. A device manufacturing method comprising: forming a thin film by discharging a liquid containing a thin film forming material to the plurality of partition regions and drying the liquid using the method for discharging a liquid according to claim 6 or 7. Method. A method for producing a color filter having a substrate and a plurality of colored layers formed in a plurality of partitioned regions on the substrate,
Using the liquid material discharge method according to claim 6 or 7, the plurality of types of liquid materials containing different colored layer forming materials are discharged to the plurality of partition regions and dried to form the plurality of colored layers. A method for producing a color filter, comprising: A method for producing an organic EL light-emitting element comprising a substrate and a functional layer including an organic light-emitting layer formed in a plurality of partition regions on the substrate,
The method for discharging a liquid according to claim 6 or 7, wherein the organic light emitting layer is formed by discharging a liquid including a light emitting layer forming material to the plurality of partition regions and drying the liquid. Manufacturing method of organic electroluminescent light emitting element. A pair of substrates;
A liquid crystal as an electro-optical material sandwiched between the pair of substrates,
An electro-optical device, wherein one of the pair of substrates is manufactured by the color filter manufacturing method according to claim 9. An electro-optical device comprising a substrate on which a plurality of organic EL light emitting elements are formed and a sealing substrate for sealing the substrate,
An electro-optical device, wherein the organic EL light-emitting element is manufactured using the method for manufacturing an organic EL light-emitting element according to claim 10. An electronic apparatus comprising the electro-optical device according to claim 11.

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