JP2006130436A - Droplet ejection apparatus, droplet ejection method, manufacturing method of electro-optic device, and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a droplet ejection method or the like, which optimizes the relation of a pixel distance and a droplet strike distance easily, and at the same time, promotes the efficiency of a printing (discharge) processing. <P>SOLUTION: In a droplet ejection apparatus IJ provided with an ejection head 20 where a plurality of nozzles are arranged in rows, the ejection head 20 and a substrate K having a plurality of imaging target domains G are arranged to have a determined angle within a surface substantially perpendicular to a direction where the ejection head 20 and the substrate K scan relatively. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a droplet discharge device, a droplet discharge method, a method for manufacturing an electro-optical device, and an electronic apparatus.

In recent years, a light emitting material such as an organic fluorescent material is converted into an ink, and this ink is patterned on a substrate by an inkjet method, and then dried, so that a light emitting layer made of a light emitting material is sandwiched between, for example, an anode and a cathode. A technique for manufacturing a color organic electroluminescence device (organic EL device) having a structure is widespread. Similarly, in the manufacture of color filters for liquid crystal displays, a manufacturing technique using an inkjet method has become widespread. When an organic EL device or a liquid crystal color filter is manufactured using such an ink jet method, a method of discharging ink to a large number of pixels at a time is used for efficiency.
Usually, since the relationship between the interval between each pixel (pixel pitch) and the interval between nozzles that eject ink (nozzle pitch) is not taken into consideration, streaky irregularities may occur on the manufactured display. That is, since the droplet landing interval is not defined in accordance with the pixel interval, the number of droplets that land on each pixel and the position of the droplets in each pixel become non-uniform, and in such a state, in a certain direction If droplet discharge is performed while scanning, streaky irregularities occur. In order to solve this problem, the pixel interval needs to be a natural number multiple of the nozzle interval. However, when manufacturing various types of displays, the nozzle interval is adjusted according to the pixel interval of the display to be manufactured. It is inefficient to adjust the interval.
For this reason, a technique has been proposed in which the droplet landing interval is adjusted to a natural number multiple by tilting the nozzle head on which the nozzles are formed with respect to the scanning direction in a plane parallel to the substrate. ing.
Japanese Patent No. 3459812 (FIG. 7) JP 2000-89019 A (FIG. 1)

  However, in the above-described technique, the nozzle head is inclined with respect to the scanning direction, so that the distance over which the nozzle head is scanned with respect to the substrate is inevitably increased. In addition, since complicated calculation processing is required to obtain print data to be applied to the nozzle head from image information to be printed, there is a restriction on the scanning speed of the nozzle head during ejection. For this reason, there is a problem that the printing (discharge) processing time becomes long.

  The present invention has been made in view of the above-described circumstances, and can easily optimize the relationship between the pixel interval and the droplet landing interval and improve the efficiency of the printing (discharge) process. An object is to propose an ejection method, a droplet ejection apparatus, and the like.

The droplet discharge device, the droplet discharge method, the electro-optical device manufacturing method, and the electronic apparatus according to the present invention employ the following means in order to solve the above-described problems.
According to a first aspect of the present invention, in the droplet discharge apparatus including the discharge head in which the plurality of nozzles are arranged in a line, the discharge head and the substrate having the plurality of drawing target regions are relatively scanned by the discharge head and the substrate. It was arranged so as to form a predetermined angle in a plane substantially perpendicular to the direction to be formed.
According to the present invention, since the relationship between the drawing target area interval and the droplet landing interval can be easily optimized, the number and landing positions of the droplets that land in each drawing target area are made uniform, A uniform drawing target region can be formed. Further, compared to the case where the droplet discharge head is tilted in the scanning direction, the droplet discharge time can be shortened and the drawing data processing can be simplified. Therefore, the drawing process (droplet discharge process) can be performed efficiently.
In addition, the predetermined angle is defined based on the interval between the plurality of nozzles and the interval between the plurality of drawing target regions, and the relationship between the drawing target region interval and the droplet landing interval is optimized, resulting in unevenness. It is possible to form a drawing target area without any object.

Further, in a droplet discharge apparatus including a plurality of discharge heads in which a plurality of nozzles are arranged in a row, at least one of the discharge heads is configured to make the discharge head and a substrate having a plurality of drawing target regions relative to each other. In a plane substantially perpendicular to the scanning direction, the substrate is inclined with respect to the substrate so as to form a predetermined angle.
According to the present invention, even when a plurality of ejection heads are provided, the relationship between the drawing target area interval and the droplet landing interval can be easily optimized. As a result, the number of landing droplets and landing positions in each drawing target area can be made uniform, and a uniform drawing target area can be formed.
In addition, the predetermined angle is defined based on the interval between the plurality of nozzles and the interval between the plurality of drawing target regions, and the relationship between the drawing target region interval and the droplet landing interval is optimized, resulting in unevenness. It is possible to form a drawing target area without any object.
Further, the plurality of ejection heads can be arranged such that each ejection head is inclined in the same rotation direction, or each ejection head is inclined so that the rotation directions are alternate.

According to a second aspect of the present invention, there is provided a droplet discharge method in which droplets are discharged from a discharge head in which a plurality of nozzles are formed in a row to a substrate. When scanning, droplets were ejected while tilting at a predetermined angle in a plane substantially perpendicular to the scanning direction.
According to the present invention, since the relationship between the drawing target area interval and the droplet landing interval can be easily optimized, the number and landing positions of the droplets that land in each drawing target area are made uniform, A uniform drawing target region can be formed.
In addition, the predetermined angle is defined so that the same number of droplets can be disposed at substantially the same position from the ejection head with respect to each drawing target region. Thus, a uniform drawing target region can be formed.

The third invention is manufactured by the second invention as a method of manufacturing the electro-optical device.
According to the present invention, an electro-optical device as a uniform and high-definition display device can be efficiently manufactured.

According to a fourth aspect of the invention, an electronic apparatus includes the electro-optical device manufactured by the method of manufacturing the electro-optical device according to the third aspect of the invention.
According to the present invention, an electronic apparatus including a uniform and high-definition display unit can be obtained.

  Hereinafter, embodiments of a droplet discharge device, a droplet discharge method, a method of manufacturing an electro-optical device, and an electronic apparatus according to the present invention will be described with reference to the drawings.

[Droplet discharge device]
FIG. 1 is a schematic perspective view showing a droplet discharge device IJ of the present invention.
The droplet discharge device IJ is a device capable of arranging droplets on the surface (predetermined surface) of the substrate K, and includes a base 12, a stage ST provided on the base 12 and supporting the substrate K, A liquid containing an organic functional layer forming material with respect to a substrate K supported by the first moving device IJ4 (not shown) interposed between the stage ST and movably supporting the stage ST. A droplet discharge head 20 capable of quantitatively discharging (dropping) droplets and a second moving device IJ6 (not shown) that movably supports the droplet discharge head 20 are provided. The operation of the droplet discharge device IJ including the droplet discharge operation of the droplet discharge head 20 and the movement operations of the first moving device IJ4 and the second moving device IJ6 is controlled by the control device CONT.

  The first moving device IJ4 is installed on the base 12, and is positioned along the Y-axis direction. The second moving device IJ6 is supported above the first moving device IJ4 by support columns 16A and 16A that are erected on the rear portion 12A of the base 12. The X-axis direction of the second moving device IJ6 is a direction orthogonal to the Y-axis direction of the first moving device IJ4. Here, the Y-axis direction is a direction along the front 12B and rear 12A directions of the base 12. On the other hand, the X-axis direction is a direction along the left-right direction of the base 12 and is horizontal. The Z-axis direction is a direction perpendicular to the X-axis direction and the Y-axis direction.

The first moving device IJ4 is configured by, for example, a linear motor, and includes two guide rails 40 and a slider 42 that can move along the guide rails 40 and 40.
The slider 42 of the linear motor type first moving device IJ4 can be positioned by moving along the guide rail 40 in the Y-axis direction. The slider 42 includes a motor 44 for rotating around the Z axis (θZ). The motor 44 is a direct drive motor, for example, and the rotor of the motor 44 is fixed to the stage ST. Thereby, by energizing the motor 44, the rotor and the stage ST can rotate along the θZ direction to index the stage ST (rotation index). That is, the first moving device IJ4 can move the stage ST in the Y-axis direction and the θZ direction.

The stage ST holds the substrate K and positions it at a predetermined position. Further, the stage ST has a suction holding device 50, and when the suction holding device 50 is operated, the substrate K is sucked and held on the stage ST through a suction hole 46A provided in the stage ST.
The second moving device IJ6 is constituted by a linear motor, and is capable of moving in the X-axis direction along the column 16B fixed to the columns 16A and 16A, the guide rail 62A supported by the column 16B, and the guide rail 62A. And a supported slider 60.
The slider 60 can be positioned by moving in the X-axis direction along the guide rail 62 </ b> A, and the droplet discharge head 20 is attached to the slider 60.

  The droplet discharge head 20 has motors 62, 64, 66, and 68 as swing positioning devices. When the motor 62 is operated, the droplet discharge head 20 can be positioned by moving up and down along the Z axis. The Z axis is a direction (vertical direction) orthogonal to the X axis and the Y axis. The droplet discharge head 20 is swung along the β direction around the Y axis by the motor 64, and the droplet discharge head 20 is swung in the γ direction around the X axis by the motor 66. Is swung in the α direction around the Z axis. That is, the second moving device IJ6 supports the droplet discharge head 20 so as to be movable in the X-axis direction and the Z-axis direction, and supports the droplet discharge head 20 so as to be movable in the θX direction, the θY direction, and the θZ direction. .

  As described above, the droplet discharge head 20 can be positioned by linearly moving in the Z-axis direction on the slider 60 and can be positioned by swinging along the α, β, and γ directions. The discharge surface 20P can accurately control the position or posture with respect to the substrate K on the stage ST side. A plurality of nozzles for discharging droplets are provided on the discharge surface 20P of the droplet discharge head 20.

FIG. 2 is a diagram showing a droplet discharge head 20 provided in the droplet discharge device IJ.
As shown in FIG. 2A, the droplet discharge head 20 is fitted with a nozzle plate 80 having a plurality of nozzles 81, a pressure chamber substrate 90 having a vibration plate 85, and the nozzle plate 80 and the vibration plate 85. And a housing 88 that is supported. The main structure of the droplet discharge head 20 is a structure in which a pressure chamber substrate 90 is sandwiched between a nozzle plate 80 and a vibration plate 85 as shown in FIG. The nozzles 81 of the nozzle plate 80 correspond to the pressure chambers (cavities) 91 formed in the pressure chamber substrate 90, respectively. The pressure chamber substrate 90 is provided with a plurality of cavities 91 so that each can function as a pressure chamber by etching a silicon single crystal substrate or the like. The cavities 91 are separated from each other by a side wall 92.
Each cavity 91 is connected to a reservoir 93 which is a common flow path via a supply port 94. Moreover, the diaphragm 85 is comprised by the thermal oxide film etc., for example.

  The diaphragm 85 is provided with a tank port 86 so that an arbitrary amount of liquid material can be supplied from the tank 30 shown in FIG. A piezoelectric element 87 is disposed at a position corresponding to the cavity 91 on the vibration plate 85. The piezoelectric element 87 has a structure in which a piezoelectric ceramic crystal such as a PZT element is sandwiched between an upper electrode and a lower electrode (not shown). The piezoelectric element 87 is configured to be able to generate a volume change corresponding to the ejection signal supplied from the control device CONT.

  In order to eject droplets from the droplet ejection head 20, the control device CONT supplies an ejection signal for ejecting the droplets to the droplet ejection head 20. The liquid material flows into the cavity 91 of the droplet discharge head 20, and in the droplet discharge head 20 to which the discharge signal is supplied, the voltage applied to the piezoelectric element 87 between the upper electrode and the lower electrode. Causes a volume change. This volume change deforms the diaphragm 85 and changes the volume of the cavity 91. As a result, a droplet is discharged from the nozzle 81 of the cavity 91. The liquid material reduced by the discharge is newly supplied from the tank 30 to the cavity 91 from which the droplet has been discharged. The liquid droplet ejection head 20 provided in the liquid droplet ejection apparatus IJ according to the present embodiment is configured to cause a volume change in a piezoelectric element to eject liquid droplets, but heat is applied to a liquid material by a heating element. The configuration may be such that droplets are ejected by the expansion.

[Droplet ejection method]
Next, a method for discharging droplets onto the substrate K using the above-described droplet discharge device IJ will be described.
FIG. 3 is a diagram showing the positional relationship between the pixel G on the substrate K and the nozzle 81 of the droplet discharge head 10. In FIG. 3, a black circle indicates a position where the droplet L has landed, and a white circle (broken line) indicates a position where the droplet L is not discharged.
Conventionally, as shown in FIG. 3A, when the droplet L is ejected from the droplet ejection device IJ toward the substrate K, the motors 62, 64, 66, and 68 of the droplet ejection head 20 are respectively set. By driving, the droplet discharge head 20 is made parallel to the substrate K, and the distance between the droplet discharge head 20 and the substrate K is kept constant at a predetermined distance. When the droplet L is ejected onto the pixel G on the substrate K in the state where the relative positional relationship between the droplet ejection head 20 and the substrate K is as described above, the droplet L is transformed into the pixel G as shown in FIG. Land in.
At this time, the arrangement interval (pixel pitch Pg) of the pixels G in the X direction is the interval between the landing positions of the droplets L (that is, the arrangement interval (nozzle pitch Pn) of the nozzles 81 formed in the droplet discharge head 20). If the natural number is not a multiple, the number of droplets L that land on the pixels G1 to G3 is not always the same. Even if the same number of droplets L land, the landing positions of the droplets L (the landing positions of the droplets L in the pixels) in the pixels G1 to G3 are different.
For this reason, for example, the distance between the droplet L that has landed closest to the pixel G2 in the pixel G1 and the droplet L that has landed closest to the pixel G1 in the pixel G2 increases, and the streaks appear when the substrate K is viewed from a distance. May be uneven.

In order to eliminate such irregular stripes, it is desirable to arrange the same number of droplets L at the same position in each of the pixels G1 to G3.
Accordingly, as shown in FIG. 3C, the droplet discharge head 20 is driven by driving the motor 64 of the droplet discharge head 20 to rotate the droplet discharge head 20 around the Y axis (β direction). Tilt to K. That is, the droplet discharge head 20 is tilted in a plane (XZ plane) orthogonal to the scanning direction (Y direction) so that the droplet discharge head 20 and the substrate K form a predetermined angle βx. That is, by tilting the droplet discharge head 20 with respect to the substrate K, the arrangement interval (X direction component Pnx of the nozzle pitch Pn) in the direction parallel to the substrate K (X direction) of the nozzle 81 can be changed. The pitch P of the landing positions of the droplets L can be a natural number times the arrangement interval (pixel pitch Pg) of the pixels G in the X direction.

Specifically, when the droplet discharge head 20 is tilted by the angle βx with respect to the substrate K, the horizontal component of the arrangement interval of the nozzles 81 (the X-direction component Pnx of the nozzle pitch Pn) is expressed by Expression (1). .
Pnx = Pn / cosβx (1)
In order for the X-direction component Pnx of the nozzle pitch Pn to be a natural number δ times the arrangement interval (pixel pitch Pg) of the pixel G in the non-scanning direction (X direction), Expression (2) is established.
Pg = δ · Pnx = δ (Pn / cosβx) (2)
Therefore, the angle βx that satisfies Expression (2) is expressed by Expression (3).
βx = cos ⁻¹ (δ · Pn / Pg) (3)
Note that the natural number δ needs to have a value of (δ · Pn / Pg) of 1 or less, and it is desirable to minimize the angle βx. Therefore, the natural number δ is the largest natural number of Pg / Pn or less.

  As described above, by driving the motor 64 of the droplet discharge head 20, the droplet discharge head 20 is tilted with respect to the substrate K so that the pixel pitch Pg is a natural number multiple of the horizontal component Pnx of the nozzle pitch Pn. As shown in FIG. 3D, the number of droplets L that land on the pixels G1 to G3 is the same, and the landing positions of the droplets L in the pixels G are also substantially uniform. Therefore, when the substrate K is viewed from a distance, uniform pixels without streaks are formed.

The liquid droplet ejection head 20 is driven to rotate the droplet ejection head 20 around the Z axis and tilt with respect to the scanning direction (Y direction) to land on the pixels G1 to G3. The number of droplets L and the landing position can be made substantially uniform.
However, the scanning distance between the droplet discharge head 20 and the substrate K increases. In addition, the calculation of ejection data becomes complicated, and as a result, there is a problem that the scanning speed cannot be increased.
On the other hand, when the motor 64 of the droplet discharge head 20 is driven and the droplet discharge head 20 is rotated about the Y axis and tilted with respect to the substrate K as in the above-described embodiment, The scanning distance between the ejection head 20 and the substrate K does not increase, and the computation of ejection data is also easily required. Therefore, it is possible to increase the scanning speed. Therefore, it is possible to efficiently perform the discharge process.

In the above-described embodiment, the case where the droplet discharge head 20 is rotated by the motor 64 has been described. However, the present invention is not limited to this. For example, the droplet discharge head 20 may be fixed in a state where it is inclined at a predetermined angle βx. Further, the substrate K may be tilted with respect to the droplet discharge head 20 without tilting the droplet discharge head 20. It may be a case where both the droplet discharge head 20 and the substrate K are tilted.
Further, the method of tilting the droplet discharge head 20 is not limited to the method using the center of the droplet discharge head 20 as the center of rotation, but may be a method using the end of the droplet discharge head 20 as the center of rotation.

Further, when the droplet discharge head 20 is tilted, it is conceivable that the landing accuracy of the droplet L is deteriorated (flight bend), but the droplet L is only from a nozzle whose distance from the substrate K is within a predetermined range. This can be prevented by limiting the discharge of the liquid.
In addition, when the substrate K is tilted, it is considered that the droplet L that has landed in the pixel G leaks out. For example, the viscosity of the droplet L is adjusted or the height of the bank that forms the pixel G is adjusted. This can be prevented by adjusting.

In the above-described embodiment, the case where there is one droplet discharge head 20 has been described. However, a plurality of droplet discharge heads 20 may be provided. When a plurality of droplet discharge heads 20 are arranged in the X direction, the distance between the droplet discharge head 20 disposed on the outside and the substrate K is increased, and the flying bending of the droplets L is likely to occur. The landing accuracy of the droplet L is deteriorated.
Therefore, when a plurality of droplet discharge heads 20 are provided, the droplet discharge heads 20 are all inclined in the same direction as shown in FIG. 4A, or the droplet discharge heads 20 as shown in FIG. 4B. May be tilted alternately.
Further, it is not necessary to incline all of the plurality of droplet discharge heads 20, and only a predetermined droplet discharge head 20 may be inclined as shown in FIG.
As described above, when a plurality of liquid droplet ejection heads 20 are provided, the number and directions of tilting can be arbitrarily selected. Thereby, a plurality of droplet discharge heads 20 can be efficiently arranged.

Electro-optical device
Next, an example of an electro-optical device manufactured using the droplet discharge device IJ of the above embodiment will be described with reference to FIG. In the present embodiment, an organic EL device will be described as an example of an electro-optical device.
FIG. 5 is a main cross-sectional view showing the manufacturing process of the organic EL device according to the embodiment of the present invention.

As shown in FIG. 5D, the organic EL device 201 forms pixel electrodes 202 on a transparent substrate 204, and forms banks 205 between the pixel electrodes 202 in a lattice shape when viewed from the direction of the arrow V.
A hole injection layer 220 is formed in the lattice-shaped concave portions, and the R color light emitting layer 203R, the G color light emitting layer 203G, and the B color light emission are formed so as to have a predetermined arrangement such as a stripe arrangement as seen from the arrow V direction. Layer 203B is formed in each grid-like recess. Furthermore, the organic EL device 201 is formed by forming the counter electrode 213 on them.

  When the pixel electrode 202 is driven by a two-terminal active element such as a TFD (Thin Film Diode) element, the counter electrode 213 is formed in a stripe shape when viewed from the arrow V direction. Further, when the pixel electrode 202 is driven by a three-terminal active element such as a TFT (Thin Film Transistor), the counter electrode 213 is formed as a single surface electrode.

A region sandwiched between each pixel electrode 202 and each counter electrode 213 forms one picture element pixel, and R, G, and B three color pixel pixels form one unit to form one pixel.
By controlling the current flowing through each pixel pixel, a desired one of the plurality of pixel pixels can be selectively emitted, and thereby a desired full-color image can be displayed in the arrow W direction.

The organic EL device 201 is manufactured by the following manufacturing method, for example. That is, as shown in FIG. 5A, an active element such as a TFD element or a TFT element is formed on the surface of the transparent substrate 204, and a pixel electrode 202 is further formed. As a formation method, for example, a photolithography method, a vacuum evaporation method, a sputtering method, a pyrosol method, or the like can be used.
As a material of the pixel electrode 202, ITO (Indium-Tin Oxide), tin oxide, a composite oxide of indium oxide and zinc oxide, or the like can be used.

  Next, as shown in FIG. 5A, a partition wall or bank 205 is formed by using a well-known patterning method, for example, photolithography, and the space between the transparent pixel electrodes 202 is filled with the bank 205. Thereby, it is possible to improve contrast, prevent color mixture of light emitting materials, and prevent light leakage from between pixels. The material of the bank 205 is not particularly limited as long as it has durability against the solvent of the EL light emitting material, but can be made Teflon (registered trademark) by fluorocarbon gas plasma treatment, for example, acrylic resin, epoxy resin, photosensitive Organic materials such as conductive polyimide are preferred.

  Next, immediately before applying the hole injection layer ink as the functional liquid, the transparent substrate 204 is subjected to continuous plasma treatment of oxygen gas and fluorocarbon gas plasma. Thereby, the polyimide surface is water-repellent, the ITO surface is hydrophilized, and the wettability on the substrate side for finely patterning droplets can be controlled. As an apparatus for generating plasma, an apparatus for generating plasma in a vacuum or an apparatus for generating plasma in the atmosphere can be used similarly.

  Next, as shown in FIG. 5A, the droplet 258 of the hole injection layer ink is ejected from the ejection head 20 of the droplet ejection apparatus IJ shown in FIG. I do. The droplets 258 are discharged by the droplet discharge method according to the present invention described above. Accordingly, the liquid droplets 258 land in a desired discharge region surrounded by the bank 205, that is, in each filter element formation region, with a uniform alignment without variation. After the coating, the solvent is removed in a vacuum (1 torr) at room temperature for 20 minutes. Thereafter, a hole injection layer 220 that is incompatible with the light emitting layer ink is formed by heat treatment in the atmosphere at 200 ° C. (on a hot plate) for 10 minutes. Under the above conditions, the film thickness was 40 nm.

  Next, as shown in FIG. 5 (b), an R light emitting layer ink and a functional liquid material as an EL light emitting material which is a functional liquid material are formed on the hole injection layer 220 in each filter element formation region. The G light emitting layer ink as an EL light emitting material is applied. Also in this case, each light emitting layer ink is ejected as droplets 258 from the ejection head 20 of the droplet ejection device IJ shown in FIG. 1 and landed in each filter element formation region. Since the droplets 258 are also ejected by the droplet ejection method according to the present invention, the droplets 258 are aligned and landed accurately in the respective filter element formation regions.

  After application of the light emitting layer ink, the solvent is removed in a vacuum (1 torr) at room temperature for 20 minutes. Subsequently, conjugation is performed by heat treatment at 150 ° C. for 4 hours in a nitrogen atmosphere to form an R color light emitting layer 203R and a G color light emitting layer 203G. Under the above conditions, the film thickness was 50 nm. The light-emitting layer conjugated by heat treatment is insoluble in the solvent.

  Note that before the light emitting layer is formed, the hole injection layer 220 may be subjected to continuous plasma treatment with oxygen gas and fluorocarbon gas plasma. As a result, a fluoride layer is formed on the hole injection layer 220 and the ionization potential is increased, whereby the hole injection efficiency is increased, and an organic EL device with high light emission efficiency can be provided.

  Next, as shown in FIG. 5C, the B-color light-emitting layer 203B as an EL light-emitting material that is a functional liquid is used as the R-color light-emitting layer 203R, the G-color light-emitting layer 203G, and the holes in each pixel pixel. Overlaid on the injection layer 220. Accordingly, not only the three primary colors of R, G, and B can be formed, but also the steps of the R light emitting layer 203R and the G color light emitting layer 203G and the bank 205 can be filled and flattened. Thereby, a short circuit between the upper and lower electrodes can be reliably prevented. By adjusting the film thickness of the B-color light emitting layer 203B, the B-color light-emitting layer 203B acts as an electron injecting and transporting layer in the stacked structure of the R-color light-emitting layer 203R and the G-color light-emitting layer 203G and emits light to the B color. do not do.

  As a method for forming the B color light emitting layer 203B as described above, for example, a general spin coating method can be adopted as a wet method, or a method for forming the R color light emitting layer 203R and the G color light emitting layer 203G can be adopted. A similar ink jet method can also be employed.

  Thereafter, as shown in FIG. 5D, the target organic EL device 201 is manufactured by forming the counter electrode 213. When the counter electrode 213 is a surface electrode, the counter electrode 213 can be formed by using a film forming method such as a vapor deposition method or a sputtering method using, for example, Mg, Ag, Al, Li, or the like as a material. In the case where the counter electrode 213 is a striped electrode, the formed electrode layer can be formed using a patterning method such as a photolithography method.

  According to the manufacturing method of the organic EL device 201 described above, the hole injection layer ink and each light emitting layer ink are discharged as droplets 258 from the discharge head 20 of the droplet discharge device IJ shown in FIG. It can be landed in each filter element formation region. Therefore, according to this manufacturing method, it is possible to avoid problems such as the ink for hole injection layer or the ink for each light emitting layer being dispersedly applied on the bank 205, and a high-definition and high-quality image can be obtained on the entire large screen. A large-screen organic EL device 201 that can be displayed can be easily manufactured.

  Further, in the method of manufacturing the organic EL device according to the present embodiment, R, G, and B color pixel pixels are formed by ink discharge using the discharge head 20 by using the droplet discharge device IJ. There is no need to go through complicated steps as in the method using the method, and materials such as ink are not wasted.

Next, the circuit configuration of the EL device of this embodiment will be described with reference to FIGS.
FIG. 6 is a circuit diagram showing a part of a display device having the organic EL device manufactured by the manufacturing method shown in FIG. 5 as a constituent element. FIG. 7 is an enlarged plan view showing a planar structure of a pixel region in the display device shown in FIG.

  In FIG. 6, a display device 501 is an active matrix display device using an EL display element which is an organic EL device. The display device 501 includes a plurality of scanning lines 503, a plurality of signal lines 504 extending in a direction intersecting the scanning lines 503, and a plurality of signal lines 504 extending in parallel on a transparent display substrate 502. A common power supply line 505 is wired. A pixel region 501A is provided at each intersection of the scanning line 503 and the signal line 504.

  A data side driver circuit 507 having a shift register, a level shifter, a video line, and an analog switch is provided for the signal line 504. For the scanning line 503, a scanning side driving circuit 508 having a shift register and a level shifter is provided. In each of the pixel regions 501A, a switching thin film transistor 509 to which a scanning signal is supplied to the gate electrode via the scanning line 503 and an image signal supplied from the signal line 504 via the switching thin film transistor 509 are accumulated. The storage capacitor cap to be held, the current thin film transistor 510 to which the image signal held by the storage capacitor cap is supplied to the gate electrode, and the common supply line 505 when electrically connected to the common power supply line 505 through the current thin film transistor 510 A pixel electrode 511 into which a drive current flows from the electric wire 505 and a light emitting element 513 sandwiched between the pixel electrode 511 and the reflective electrode 512 are provided.

With this configuration, when the scanning line 503 is driven and the switching thin film transistor 509 is turned on, the potential of the signal line 504 at that time is held in the storage capacitor cap. The on / off state of the current thin film transistor 510 is determined according to the state of the storage capacitor cap. Then, current flows from the common power supply line 505 to the pixel electrode 511 through the channel of the current thin film transistor 510, and further current flows to the reflective electrode 512 through the light emitting element 513.
Thus, the light emitting element 513 emits light according to the amount of current flowing therethrough.

  Here, as shown in FIG. 7 which is an enlarged plan view of the display device 501 in a state where the reflective electrode 512 and the light emitting element 513 are removed, the pixel region 501A includes four sides of the pixel electrode 511 having a rectangular planar state. The line 504, the common power supply line 505, the scanning line 503, and a scanning line 503 for another pixel electrode 511 (not shown) are disposed.

  Since the display device 501 having such a configuration is manufactured using the above-described method for manufacturing an organic EL device, it displays a high-definition and high-quality image on the entire large screen while being relatively inexpensive. Can do.

〔Electronics〕
Next, an electronic apparatus including the electro-optical device according to the above embodiment will be described.
FIG. 8A is a perspective view showing an example of a mobile phone. In FIG. 8A, reference numeral 1000 denotes a mobile phone main body, and reference numeral 1001 denotes a display unit including the electro-optical device of the above embodiment.
FIG. 8B is a perspective view showing an example of a wristwatch type electronic device. In FIG. 8B, reference numeral 1100 denotes a watch body, and reference numeral 1101 denotes a display unit including the electro-optical device according to the embodiment.
FIG. 8C is a perspective view showing an example of a portable information processing apparatus such as a word processor or a personal computer. In FIG. 8C, reference numeral 1200 denotes an information processing apparatus, reference numeral 1202 denotes an input unit such as a keyboard, reference numeral 1204 denotes an information processing apparatus body, and reference numeral 1206 denotes a display unit including the electro-optical device of the above embodiment.

  Since the electronic apparatus illustrated in FIG. 8 includes the electro-optical device according to the above-described embodiment, a high-definition and high-quality image can be displayed on the display unit even when the display unit is enlarged.

  The technical scope of the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention, and the specific materials and layers mentioned in the embodiment can be added. The configuration is merely an example, and can be changed as appropriate. For example, in the above embodiment, an organic EL device is cited as an example of an electro-optical device, but the present invention is not limited to this, and the present invention is applied to various electro-optical devices such as a plasma display device and a liquid crystal device. The present invention can also be applied to the application of a coloring material for a color filter. In addition, the formation by the droplet discharge device according to the present invention is not limited to pixels, and wiring patterns, electrodes, various semiconductor elements, and the like can be formed using the droplet discharge device according to the present invention. it can.

It is a schematic perspective view which shows the droplet discharge apparatus IJ. It is a figure which shows the droplet discharge head 20 provided in the droplet discharge apparatus IJ. 3 is a diagram showing a positional relationship between a pixel G on a substrate K and a nozzle 81 of a droplet discharge head 10. FIG. FIG. 3 is a schematic diagram showing the arrangement of a plurality of droplet discharge heads 20. It is principal sectional drawing which shows the manufacturing process of an organic electroluminescent apparatus. It is a circuit diagram of an organic EL device. It is an enlarged plan view which shows the planar structure of the pixel area | region of an organic electroluminescent apparatus. It is a figure which shows an electronic device.

Explanation of symbols

IJ: Droplet ejection device, G: Pixel (drawing target area), K: Substrate, Pg ... Pixel pitch (interval of drawing target area), Pn ... Nozzle pitch (nozzle spacing), Pnx ... Horizontal component, L ... Droplet, 81 ... Nozzle, 20 ... Droplet discharge head (discharge head), 201 ... Organic EL device (electro-optical device), 1000 ... Mobile phone (electronic device), 1100 ... Wristwatch type electronic device (electronic device), 1200 ... Portable information processing equipment (electronic equipment)

Claims (10)

In a liquid droplet ejection apparatus provided with an ejection head in which a plurality of nozzles are arranged in a row,
The discharge head and the substrate having a plurality of drawing target regions are arranged to form a predetermined angle in a plane substantially orthogonal to a direction in which the discharge head and the substrate are relatively scanned. Droplet discharge device.   The droplet ejection apparatus according to claim 1, wherein the predetermined angle is defined based on an interval between the plurality of nozzles and an interval between the plurality of drawing target regions. In a droplet discharge apparatus including a plurality of discharge heads in which a plurality of nozzles are arranged in a row,
At least one of the ejection heads forms a predetermined angle with respect to the substrate in a plane substantially orthogonal to a direction in which the ejection head and the substrate having a plurality of drawing target regions are relatively scanned. A droplet discharge device, wherein the droplet discharge device is disposed at an inclination.   The droplet ejection apparatus according to claim 3, wherein the predetermined angle is defined based on an interval between the plurality of nozzles and an interval between the plurality of drawing target regions.   The droplet discharge device according to claim 3, wherein the discharge heads are arranged to be inclined in the same rotation direction.   5. The droplet discharge device according to claim 3, wherein the discharge heads are arranged so as to be inclined so that rotation directions are alternate. 6. In a droplet discharge method for discharging droplets to a substrate from an ejection head in which a plurality of nozzles are formed in a row,
When the substrate having a plurality of drawing target regions and the ejection head are relatively scanned, the droplets are ejected while being inclined at a predetermined angle in a plane substantially perpendicular to the scanning direction. A droplet discharge method characterized by the above.   8. The liquid droplet ejection according to claim 7, wherein the predetermined angle is defined so that the same number of liquid droplets can be arranged at substantially the same position from the ejection head with respect to each drawing target region. Method.   9. A method of manufacturing an electro-optical device, wherein the method is manufactured by the droplet discharge method according to claim 7. An electronic apparatus comprising the electro-optical device manufactured by the electro-optical device manufacturing method according to claim 9.

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