JP2002273869A - Discharge method and its apparatus, electro-optic device, method and apparatus for manufacturing the device, color filter, method and apparatus for manufacturing the filter, device with substrate, and method and apparatus for manufacturing the device - Google Patents

Discharge method and its apparatus, electro-optic device, method and apparatus for manufacturing the device, color filter, method and apparatus for manufacturing the filter, device with substrate, and method and apparatus for manufacturing the device

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Publication number
JP2002273869A
JP2002273869A JP2001362740A JP2001362740A JP2002273869A JP 2002273869 A JP2002273869 A JP 2002273869A JP 2001362740 A JP2001362740 A JP 2001362740A JP 2001362740 A JP2001362740 A JP 2001362740A JP 2002273869 A JP2002273869 A JP 2002273869A
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JP
Japan
Prior art keywords
substrate
plurality
nozzles
droplet discharge
direction
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001362740A
Other languages
Japanese (ja)
Inventor
Satoru Kataue
Tsuyoshi Kitahara
Shinichi Nakamura
Yoshiaki Yamada
真一 中村
強 北原
善昭 山田
悟 片上
Original Assignee
Seiko Epson Corp
セイコーエプソン株式会社
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Filing date
Publication date
Priority to JP2001-6634 priority Critical
Priority to JP2001006634 priority
Application filed by Seiko Epson Corp, セイコーエプソン株式会社 filed Critical Seiko Epson Corp
Priority to JP2001362740A priority patent/JP2002273869A/en
Publication of JP2002273869A publication Critical patent/JP2002273869A/en
Application status is Pending legal-status Critical

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Abstract

(57) [Summary] [Problem] A filter element or EL of a color filter
Provided is an ejection device capable of shortening a scanning time of an inkjet head portion for forming a pattern such as a picture element pixel of the device. SOLUTION: An ink jet head 22 having a carriage 25 for arranging and holding six ink jet heads 20 forming a nozzle row 28 by providing a plurality of nozzles 27 in a row in a droplet discharge apparatus for manufacturing a color filter 1 is provided. Provide. Each inkjet head 20 is disposed such that the central axis K0 in the longitudinal direction is inclined with respect to the central axis K1 in the longitudinal direction of the carriage 25. While moving the inkjet head 22 in the main scanning direction X orthogonal to the central axis K1 of the carriage 25, the filter element material is appropriately discharged from the nozzles 27 to the mother substrate 12.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for discharging a liquid having fluidity. The present invention relates to an electro-optical device such as a liquid crystal device, an EL device, an electrophoretic device, an electron-emitting device, and a PDP device, a method of manufacturing an electro-optical device for manufacturing the electro-optical device, and an apparatus for manufacturing the same. Further, the present invention relates to a color filter used in an electro-optical device, a manufacturing method for manufacturing the color filter, and an apparatus for manufacturing the same. Further, the present invention provides an electro-optical member, a semiconductor device, an optical member,
The present invention relates to a device having a substrate such as a reagent test member, a method of manufacturing a device having the substrate, and an apparatus for manufacturing the device.

[0002]

2. Description of the Related Art In recent years, liquid crystal devices and electroluminescent devices (hereinafter referred to as ELs) have been mounted on display units of electronic devices such as mobile phones and portable computers.
e) A display device which is an electro-optical device such as a device is widely used. Recently, full-color display has been often performed by a display device. The full-color display by the liquid crystal device is performed, for example, by passing light modulated by a liquid crystal layer through a color filter. The color filter includes, for example, a so-called stripe arrangement or a delta arrangement of dot-like filter elements of R (red), G (green), and B (blue) on the surface of a substrate formed of glass, plastic, or the like. Alternatively, they are formed by arranging in a predetermined arrangement such as a mosaic arrangement.

[0003] Further, a full-color display by an EL device is as follows.
For example, R (red), G (green), and B (blue) dot-shaped EL light-emitting layers are formed on a surface of a substrate formed of glass, plastic, or the like in a predetermined manner such as a so-called stripe array, delta array, or mosaic array. These EL light emitting layers are sandwiched between a pair of electrodes to form picture element pixels. Then, by controlling the voltage applied to these electrodes for each pixel pixel, these pixel pixels emit light in a desired color to perform full color display.

Conventionally, when a filter element of each color such as R, G, B of a color filter is patterned,
It is known to use a photolithography method when patterning picture element pixels of each color such as R, G, and B of an EL device. However, when this photolithography method is used, the process is complicated,
Since a large amount of material or photoresist for each color is consumed, there is a problem that the cost is increased.

In order to solve this problem, a method of forming a dot-shaped array of filaments and EL light-emitting layers by discharging a filter element material, an EL light-emitting material, and the like in dots by an ink-jet method of discharging liquid droplets. Has been proposed.

Here, a method for forming a dot-shaped filament, an EL light-emitting layer, and the like by an ink-jet method will be described. In FIG. 50 (a), as shown in FIG. 50 (b), dots are formed in a large-area substrate formed of glass, plastic, or the like, that is, inside a plurality of panel regions 302 set on the surface of a so-called motherboard 301. Filter elements 3 arranged in a matrix
03 is formed based on the inkjet method. In this case, as shown in FIG. 50C, for example, an ink jet head 306 which is a droplet discharge head having a nozzle row 305 in which a plurality of nozzles 304 are arranged in a row is replaced with the ink jet head 306 shown in FIG. Arrow A1 and arrow A
As shown by 2, by performing main scanning a plurality of times (two times in FIG. 50) with respect to one panel region 302, ink or a filter material is selectively discharged from a plurality of nozzles during the main scanning. The filter element 303 is formed at a desired position.

As described above, the filter element 303 is formed by arranging each color such as R, G, and B in an appropriate arrangement such as a so-called stripe arrangement, delta arrangement, or mosaic arrangement.
From this, the ink ejection process by the inkjet head 306 shown in FIG. 50B is performed by setting the inkjet head 306 that ejects a single color of R, G, and B to R, G, and B.
The colors are provided in advance. Then, a three-color array of R, G, B, and the like is formed on one mother board 301 by sequentially using these inkjet heads 306.

By the way, the ordinary ink jet head 3
The number of nozzles provided in 06 is about 160 to 180. Further, the normal motherboard 301 has a larger area than the inkjet head 306. Therefore, when forming the filter element 303 on the surface of the motherboard 301 using the inkjet head 306, the inkjet head 306 is
It is necessary to move the motherboard 301 a plurality of times in the main scanning direction with the inkjet head 306 while moving in the sub-scanning direction relative to 1 and to perform drawing by performing ink ejection during each main scanning.

However, such a method has a problem that the number of scans of the ink jet head 306 with respect to the motherboard 301 is large and the drawing time, that is, the manufacturing time of the color filter is long. In order to solve this problem, for example, Japanese Patent Application No. 11-279752 proposes a configuration in which a plurality of heads are linearly arranged and held by a holding member to increase the substantial number of nozzles.

According to this method, for example, as shown in FIG. 51A, a plurality of, for example, six head portions 306 are linearly held by a holding member 307. Then, while moving the holding member 307 in the sub-scanning direction Y in the sub-scanning direction, the main scanning is performed a plurality of times as indicated by arrows A1, A2,. Discharge. According to this method, the ink can be supplied to a wide area by one main scan, so that the manufacturing time of the color filter can be shortened.

[0011]

By the way, FIG.
In the conventional method shown in FIG.
Are arranged in parallel with the sub-scanning direction Y to form a straight nozzle row. Therefore, the interval between a plurality of nozzles, that is, the nozzle pitch is equal to the interval between the filter elements 303 on the motherboard 301 side, ie, the element pitch. It needs to be the same. However, it is very difficult to form an inkjet head such that the pitch between nozzles is equal to the pitch between elements.

In order to solve this problem, as shown in FIG. 51B, the holding member 307 is inclined at an angle θ with respect to the sub-scanning direction Y, so that the pitch between nozzles of the head unit 306 and the size of the motherboard 301 are reduced. A method of matching the pitch between the elements can be considered. However, in this case, the nozzle rows formed by the head units 306 arranged in a row are shifted with the dimension Z in the main scanning direction X, and the main scanning time for ink ejection is lengthened by the shift amount. The problem occurs. In particular,
When a head unit having a six-row structure as shown in FIG. 51B is used, the length of the nozzle row becomes longer, so that the above-mentioned displacement dimension also becomes longer. Therefore, there arises a problem that the main scanning time must be further extended.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and when a droplet discharge head such as an ink jet head is used, a pattern such as a filter element of a color filter or a picture element pixel of an EL device is formed. Method and Apparatus for Reducing the Scanning Time of a Droplet Discharge Head Part for Performing, Electro-Optical Apparatus, Manufacturing Method and Manufacturing Apparatus, Color Filter, Manufacturing Method and Manufacturing Apparatus, and Device Having Base Material , A manufacturing method thereof, and a manufacturing apparatus thereof.

[0014]

(1) According to the present invention, a plurality of nozzles for discharging a liquid material having fluidity onto an object to be discharged are arranged in an array, and the nozzles are arranged along the arrangement direction of the nozzles. A droplet discharge head having a longitudinal direction, and a plurality of the droplet discharge heads arranged side by side with one surface on which the nozzles of the droplet discharge head are provided facing a surface of the discharge target with a gap therebetween. Means for moving at least one of the holding means and the object to be ejected relative to the surface of the object to be ejected by the droplet ejection head; The droplet discharge heads are arranged side by side in a direction intersecting a direction in which the plurality of droplet discharge heads relatively move along the surface of the discharge target, and a nozzle of each droplet discharge head is The arrangement direction is Characterized in that it intersects obliquely with respect to the relative movement direction between the substrate and the droplet ejection head.

According to the present invention, a plurality of nozzles are provided so as to be arranged, have a longitudinal direction along the arrangement direction of the nozzles, and are arranged in a direction obliquely intersecting the longitudinal direction. In a state where one surface on which the nozzles of these droplet discharge heads are provided faces the surface of the discharge object with a gap therebetween, in a direction intersecting the longitudinal direction of the droplet discharge head, The liquid material is relatively moved along the surface of the object to be ejected in a direction intersecting the arrangement direction of the droplet ejection heads, and the liquid material is ejected from the nozzle onto the object to be ejected. According to this configuration, the liquid material can be discharged from the plurality of droplet discharge heads during the movement along the surface of the discharge target by the holding unit that holds the plurality of droplet discharge heads. Scanning time is shortened and ejection efficiency is improved as compared with the case where the surface of an object to be ejected is moved using a long droplet ejection head. In addition, since each droplet discharge head is moved in a state of being inclined with respect to the moving direction, the pitch between the nozzles of the droplet discharge head coincides with the pitch between dots of, for example, a filter element formed on an object to be discharged. Can be done. Furthermore, since the individual droplet discharge heads are not tilted but tilted, the distance between the nozzle closer to the object to be ejected and the nozzle farther from the object is equal to the holding means. Is reduced as compared with the case where the whole is inclined, and the scanning time, which is movement along the object to be ejected, by the holding means is reduced.

Note that the inclination angles of the droplet discharge heads may not be equal, and the inclination directions may be different between plus and minus.

In the present invention, it is preferable that the plurality of droplet discharge heads have substantially the same shape. With this configuration, even a single type of droplet discharge head can correspond to a region for discharging a liquid material, and the configuration is simplified, manufacturability is improved, and cost is reduced.

Further, according to the present invention, the plurality of droplet heads include:
It is preferred to have the same number of nozzles. With this configuration, since the number of nozzles of each droplet discharge head is the same, as a configuration in which a plurality of droplet discharge heads are arranged side by side, for example, a stripe type, a mosaic type, a delta type, etc.
It becomes easy to draw a configuration having a predetermined regularity.

Furthermore, in the present invention, it is preferable that the plurality of droplet discharge heads have the same nozzle forming position. With this configuration, it is preferable that the formation positions of the nozzles of the plurality of droplet discharge heads be the same. With this configuration, as a configuration in which a plurality of droplet discharge heads are arranged side by side, it is easy to draw a configuration having a predetermined regularity such as a stripe type, a mosaic type, or a delta type.

In the present invention, it is preferable that the plurality of droplet discharge heads are arranged side by side in such a manner that their longitudinal directions are substantially parallel and inclined in the same direction. With this configuration,
A state in which the plurality of droplet discharge heads are inclined in the same direction with respect to the direction in which the surface of the discharge target relatively moves is formed, and the same plurality of discharge regions of the liquid material are easily formed in one region, Body discharge efficiency is improved.

In the present invention, it is preferable that the plurality of droplet discharge heads are arranged in a plurality of rows. With this configuration, for example, when a plurality of rows are provided in the movement direction, it is easy to discharge the liquid material from different droplet discharge heads to the same location, and the discharge amount is averaged by being repeatedly discharged, so Discharge can be obtained. Further, for example, in the case of a substantially staggered shape that does not form a plurality of rows in the moving direction, there is no area where the liquid material is not ejected between the droplet ejection heads without interference between adjacent droplet ejection heads, and continuous And excellent discharge of a liquid material can be obtained.

Furthermore, in the present invention, it is preferable that the plurality of droplet discharge heads are arranged in a plurality of rows in a substantially staggered manner. With this configuration, the droplet discharge heads are not formed in a plurality of rows in the moving direction, and there is no area where the liquid material is not discharged between the droplet discharge heads without interference between adjacent droplet discharge heads. And excellent discharge of a liquid material can be obtained.

(2) In the present invention, an electro-optical device is manufactured by using a liquid containing an EL luminescent material as a liquid to be discharged and discharging the liquid onto a substrate as an object to be discharged to form an EL luminescent layer. This is particularly convenient.

(3) In the present invention, a liquid material containing a color filter material is used as a liquid material to be discharged, and a color filter is formed by discharging the liquid material onto one of a pair of substrates sandwiching a liquid crystal as an object to be discharged. It is convenient to manufacture an optical device.

(4) In the present invention, a liquid material containing a color filter material is used as a liquid material to be discharged, and it is convenient to manufacture a color filter exhibiting different colors by discharging the liquid material onto a substrate which is an object to be discharged. is there.

(5) In the present invention, it is convenient to manufacture a device having a base material by discharging a liquid material having fluidity onto a base material which is an object to be discharged.

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) Hereinafter, a method of manufacturing a color filter of the present invention, a basic method of an apparatus for manufacturing the same, and manufacturing thereof will be described. First, before describing the manufacturing method and the manufacturing apparatus, a color filter manufactured by using the manufacturing method and the like will be described. FIG. 6A schematically shows a planar structure of an embodiment of a color filter. FIG. 7D shows a cross-sectional structure along the line VII-VII in FIG. 6A.

In the color filter 1 of the present embodiment, a plurality of filter elements 3 are formed on the surface of a rectangular substrate (also referred to as a “base” in the present invention) 2 formed of glass, plastic, or the like. Dot pattern,
In the present embodiment, they are formed in a dot matrix shape. Further, the color filter 1 is formed by laminating a protective film 4 on the filter element 3 as shown in FIG. FIG. 6A is a plan view showing the color filter 1 from which the protective film 4 has been removed. That is, in the present embodiment, the filter element 3 as a color pattern formed by inkjet is exemplified.

The filter element 3 is formed by filling a plurality of rectangular regions which are partitioned by partition walls 6 formed in a lattice-like pattern with a resin material having no translucency and arranged in a dot matrix form with a coloring material. It is formed.
Each of these filter elements 3 is
It is formed of a color material of any one of R (red), G (green), and B (blue), and the filter elements 3 of those colors are arranged in a predetermined arrangement. As this arrangement, for example, a so-called stripe arrangement shown in FIG. 8A, a so-called mosaic arrangement shown in FIG.
A so-called delta arrangement shown in (c) is known.
In the present invention, the term “partition wall” is used as a word including the meaning of “bank”, and is viewed from a substrate having a side surface having a substantially vertical angle as viewed from the substrate or a side surface having an angle of approximately 90 ° or more. Refers to the convex part.

The stripe arrangement is an arrangement in which all columns of the matrix have the same color. The mosaic arrangement is a color arrangement in which any three filter elements 3 arranged on a vertical and horizontal straight line have three colors of R, G, and B. further,
In the delta arrangement, the arrangement of the filter elements 3 is stepped, and any three adjacent filter elements 3 have R,
This is a color arrangement of three colors G and B.

The size of the color filter 1 is, for example, about 4.57 cm (1.8 inches). The size of one filter element 3 is, for example, 30 μm × 1
00 μm. The interval between the filter elements 3, that is, the so-called element pitch is, for example, 75
μm.

When the color filter 1 of the present embodiment is used as an optical element for full-color display, R, R
G, B three filter elements 3 are formed as one unit to form one pixel, and light is selectively passed through any one of R, G, B or a combination thereof in one pixel, thereby providing full color. Display. At this time,
The partition 6 formed of a non-light-transmitting resin material functions as a black mask.

The above color filter 1 is, for example, shown in FIG.
A large-area mother substrate 12 which is a substrate as shown in FIG.
It is cut out from. Specifically, first, the mother substrate 12
A pattern for one color filter 1 is formed on each surface of the plurality of color filter forming regions 11 set in the area. Further, the color filter forming region 1
By forming cutting grooves around the substrate 1 and cutting the mother substrate 12 along these grooves, individual color filters 1 are formed.

The color filter 1 shown in FIG.
The manufacturing method and the manufacturing apparatus for manufacturing the same will be described.

FIG. 7 schematically shows a method of manufacturing the color filter 1 in the order of steps. First, the partition walls 6 are formed in a lattice pattern on the surface of the mother substrate 12 using a non-translucent resin material as viewed in the direction of arrow B. The portion 7 of the lattice hole of the lattice pattern is a region where the filter element 3 is formed, that is, a filter element formation region. The planar dimension of each filter element forming region 7 formed by the partition walls 6 when viewed from the direction of arrow B is, for example, about 30 μm × 100 μm.

The partition 6 has a filter element forming region 7
Element material 1 as a liquid supplied to the filter
3 has a function of blocking the flow and a function of a black mask. The partition 6 is formed by an arbitrary patterning method, for example, a photolithography method.
Further, it is heated and fired by a heater as needed.

After the partition walls 6 are formed, as shown in FIG. 7 (b), the droplets 8 of the filter element material 13 are supplied to each filter element formation region 7, so that each filter element formation region 7 is filtered. 13
Fill with. In FIG. 7B, reference numeral 13R is R (red).
Reference numeral 13 denotes a filter element material having a color of
G indicates a filter element material having a G (green) color, and reference numeral 13B indicates a filter element material having a B (blue) color. In the present invention, “droplets” are also referred to as “inks”.

When a predetermined amount of the filter element material 13 is filled in each filter element forming area 7, the mother substrate 12 is heated to, for example, about 70 ° C. by a heater to evaporate the solvent of the filter element material 13.
Due to the evaporation, the volume of the filter element material 13 is reduced as shown in FIG. When the volume is drastically reduced, the supply of the droplets 8 of the filter element material 13 and the heating of the droplets 8 are repeatedly performed until a sufficient film thickness as the color filter 1 is obtained.
By the above processing, finally the filter element material 1
Only the solid content of 3 remains to form a film, whereby the filter element 3 of each desired color is formed.

As described above, after the filter elements 3 are formed, a heating process is performed at a predetermined temperature for a predetermined time in order to completely dry the filter elements 3. Thereafter, the protective film 4 is formed by using an appropriate method such as a spin coating method, a roll coating method, a ripping method, or an inkjet method. This protective film 4 is formed for protecting the filter element 3 and the like and for flattening the surface of the color filter 1. In the embodiment of the present invention, the resin of the partition 6 is made non-light-transmitting and a black matrix is used. However, the resin of the partition 6 is made of a light-transmitting material, and a Cr having a size slightly larger than the resin is formed below the resin. Alternatively, a partition having a multilayer structure in which a light-shielding layer made of a metal such as a metal is formed may be used.

FIG. 9 shows one component device constituting a color filter manufacturing apparatus, and is an embodiment of a droplet discharge device for performing a supply process of the filter element material 13 shown in FIG. 7B. Is shown. The droplet discharge device 16 converts the filter element material 13 of one of R, G, and B colors, for example, the R color, as the ink droplet 8 into each color in the mother substrate 12 (see FIG. 6B). This is a device for discharging and attaching to a predetermined position in the filter formation region 11. Droplet ejection devices 16 for the G color filter element material 13 and the B color filter element material 13 are also prepared.
Since they can be the same as those described above, the description of them will be omitted.

In FIG. 9, a droplet discharge device 16 is a head unit 26 having an inkjet head row 22 used in a printer or the like as an example of a droplet discharge head.
A head position control device 17 for controlling the position of the inkjet head array 22, a substrate position control device 18 for controlling the position of the mother substrate 12, and an inkjet head array 2
Main scanning drive unit 19 as a main scanning drive unit that moves the inkjet head 2 in the main scanning direction with respect to the mother substrate 12, and a sub-scanning drive unit as a sub-scanning drive unit that moves the inkjet head array 22 in the sub-scanning direction with respect to the mother substrate 12 21, a substrate supply device 23 that supplies the mother substrate 12 to a predetermined working position in the droplet discharge device 16, and a control device 24 that controls the entire droplet discharge device 16.

The head position control device 17, the substrate position control device 18, and the inkjet head row 22 are connected to the mother substrate 12
The main scanning drive device 19 and the sub-scanning driving device 21 for main scanning movement with respect to are mounted on the base 9. Each of those devices is covered with a cover 14 as needed.

As shown in FIG. 2, for example, as shown in FIG. 2, a plurality of, in this embodiment, six, ink-jet head rows 22 are used as the ink-jet heads 20 as the droplet discharge heads, and as holding means for holding these ink-jet heads 20 side by side. Carriage 25. Carriage 2
5 has holes or recesses slightly larger than the ink jet heads 20 at positions where the ink jet heads 20 are to be held, and each ink jet head 20 is inserted into those holes, and further, screws, adhesives, other fastening means, etc. Is fixed by the combination of When the position of the inkjet head 20 with respect to the carriage 25 is accurately determined, the inkjet head 20 may be fixed by simply press-fitting without using any special fastening means.

The ink jet head 20 is, for example, as shown in FIG.
As shown in FIG. 1, there is provided a nozzle row 28 formed by arranging a plurality of nozzles 27 in a row. Nozzle 27
Is 180, for example, the hole diameter of the nozzle 27 is, for example, 28 μm, and the nozzle pitch between the nozzles 27 is, for example, 141 μm. 6A and 6B, the main scanning direction X and the sub-scanning direction Y orthogonal to the color filter 1 and the mother substrate 12 are shown in FIG.
1 is set as shown.

In FIG. 2, each ink jet head 2
0 is such that the extending direction K0 (longitudinal direction) of the nozzle row 28 of the nozzles is inclined at an angle θ with respect to the central axis K1 (or the arrangement direction axis of the inkjet heads 20) of the carriage 25 in the longitudinal direction. It is attached to the carriage 25. Further, the inkjet head row 22 includes:
As shown in FIG. 1, the center axis K1 of the carriage 25 is
Are set so as to extend in a direction intersecting with the main scanning direction X, that is, in a perpendicular direction in the present embodiment. That is, each nozzle row 28 is set in a state of being inclined at an angle θ with respect to the sub-scanning direction Y which is perpendicular to the main scanning direction.

The inkjet head array 22 performs main scanning on the mother substrate 12 by moving in parallel with respect to the mother substrate 12 in the X direction. During this main scanning, the filter element material 13 as ink is supplied to each inkjet substrate. By selectively discharging from a plurality of nozzles 27 in the head 20, a filter element material is attached to a predetermined position in the mother substrate 12. In addition, the inkjet head row 22 moves parallel by a predetermined distance in the sub-scanning direction Y, for example, a length of six or less than or longer than the length of the Y component of the nozzle row 28 in the sub-scanning direction. Thus, the main scanning position by the inkjet head row 22 can be shifted at a predetermined interval.

Each of the ink jet heads 20 has, for example, an internal structure shown in FIGS. 13 (a) and 13 (b). Specifically, the inkjet head 20 includes, for example, a nozzle plate 29 made of stainless steel, a vibration plate 31 facing the nozzle plate 29, and a plurality of partition members 32 that join them together. Nozzle plate 29 and diaphragm 31
Between the plurality of ink chambers 33 by the partition member 32.
And a liquid reservoir 34 are formed. The plurality of ink chambers 33 and the liquid reservoir 34 communicate with each other via a passage 38.

An ink supply hole 36 is formed at an appropriate position on the vibration plate 31, and an ink supply device 37 is formed in the ink supply hole 36.
Is connected. The ink supply device 37 supplies the filter element material M of one of R, G, and B, for example, the R color to the ink supply hole 36. The supplied filter element material M fills the liquid reservoir 34 and further fills the ink chamber 33 through the passage 38.

The nozzle plate 29 is provided with nozzles 27 for jetting the filter element material M from the ink chamber 33 in a jet shape. The ink chamber 3 is provided on the back surface of the diaphragm 31 on which the ink chamber 33 is formed.
3, an ink pressurizing member 39 is attached. As shown in FIG. 13B, the ink pressurizing member 39 includes a piezoelectric element 41 and a pair of electrodes 4 sandwiching the piezoelectric element 41.
2a and 42b. The piezoelectric element 41 has electrodes 42a, 4
When the power is supplied to 2b, it is bent and deformed so as to protrude outward as indicated by arrow C, thereby increasing the volume of the ink chamber 33. Then, the filter element material M corresponding to the increased volume flows from the liquid reservoir 34 through the passage 38 into the ink chamber 33.

Next, when the current supply to the piezoelectric element 41 is released, both the piezoelectric element 41 and the diaphragm 31 return to their original shapes. As a result, the ink chamber 33 also returns to its original volume, so that the pressure of the filter element material M inside the ink chamber 33 increases, and the filter element moves from the nozzle 27 toward the mother substrate 12 (see FIG. 6B). The material M is ejected as droplets 8. In addition, an ink-repellent layer 43 made of, for example, a Ni-tetrafluoroethylene eutectoid plating layer is provided around the nozzle 27 in order to prevent the liquid crystal 8 from bending or flying and clogging the hole of the nozzle 27.

In FIG. 10, the head position control device 17
An α motor 44 for rotating the inkjet head array 22 in-plane, a β motor 46 for swinging and rotating the inkjet head array 22 around an axis parallel to the sub-scanning direction Y,
It has a γ motor 47 for swinging and rotating the inkjet head array 22 around an axis parallel to the main scanning direction, and a Z motor 48 for moving the inkjet head array 22 up and down in parallel.

The board position control device 18 shown in FIG. 9 uses a table 49 on which the mother board 12 is placed as shown in FIG.
And a θ motor 51 for rotating the table 49 in-plane as indicated by an arrow θ. Further, as shown in FIG. 10, the main scanning drive device 19 shown in FIG. 9 has an X guide rail 52 extending in the main scanning direction X, and an X slider 53 containing a pulse-driven linear motor. The X slider 53 translates in the main scanning direction along the X guide rail 52 when the built-in linear motor operates.

The sub-scanning driving device 21 shown in FIG.
Has a Y guide rail 54 extending in the sub-scanning direction Y, and a Y slider 56 having a built-in pulse-driven linear motor, as shown in FIG. When the built-in linear motor operates, the Y slider 56
Along the sub-scanning direction Y.

The linear motor pulse-driven in the X slider 53 and the Y slider 56 can precisely control the rotation angle of the output shaft by a pulse signal supplied to the motor, and is therefore supported by the X slider 53. The position of the inkjet head row 22 in the main scanning direction X and the position of the table 49 in the sub-scanning direction Y can be controlled with high precision. Note that the position control of the inkjet head row 22 and the table 49 is not limited to the position control using a pulse motor, but can also be realized by feedback control using a servomotor or any other control method.

The substrate supply device 23 shown in FIG. 9 includes a substrate accommodating section 57 for accommodating the mother substrate 12 and a mother substrate 12.
And a robot 58 for transporting. The robot 58
A base 59 placed on an installation surface such as a floor or the ground, an elevating shaft 61 that moves up and down with respect to the base 59, and an elevating shaft 61
A first arm 62 that rotates about
A second arm 63 rotating with respect to the second arm 63;
And a suction pad 64 provided on the lower surface of the tip. The suction pad 64 can suction the mother substrate 12 by air suction or the like.

In FIG. 9, the ink jet head row 2 driven by the main scanning drive device 19 and moved in the main scanning direction
2, the capping device 76 and the cleaning device 77 are located at one side position of the sub-scanning driving device 21.
Is arranged. An electronic balance 78 is provided at the other side position. The cleaning device 77 is a device for cleaning the inkjet head row 22. The electronic balance 78 is a device that measures the weight of the ink droplets 8 ejected from the individual nozzles 27 (see FIG. 11) in the inkjet head row 22 for each nozzle. The capping device 76 is a device for preventing the nozzle 27 from drying when the inkjet head row 22 is in a standby state.

In the vicinity of the ink jet head row 22,
A head camera 81 is provided so as to move integrally with the inkjet head row 22. Further, a board camera 82 supported by a support device (not shown) provided on the base 9 is disposed at a position where the motherboard 12 can be photographed.

The control device 24 shown in FIG. 9 includes a computer main body 66 containing a processor, a keyboard as an input device 67, and a CRT as a display device.
(Cathode-Ray Tube) display 68. As shown in FIG. 14, the processor has a CPU (Central Processing Unit) 69 for performing arithmetic processing, and a memory for storing various information, that is, an information storage medium 71.

The head position control device 17, the substrate position control device 18, the main scanning drive device 19, the sub-scanning drive device 21, and the piezoelectric element 41 in the ink jet head row 22 shown in FIG. 9 (see FIG. 13B). 14 are connected to a CPU 69 via an input / output interface 73 and a bus 74 in FIG. Further, the substrate supply device 23, the input device 67, the CRT
Display 68, electronic balance 78, cleaning device 7
7 and the capping device 76 are also connected to the CPU 69 via the input / output interface 73 and the bus 74.

The memory as the information storage medium 71 is RA
M (Random Access Memory), ROM (Read Only Memo)
ry), hard disk, C
This is a concept including an external storage device such as a D-ROM reader, a disk-type storage medium, and the like. Functionally, the storage region stores program software in which a control procedure of the operation of the droplet discharge device 16 is described. Various Rs shown in FIG.
A storage area for storing, as coordinate data, a discharge position in the mother substrate 12 (see FIG. 6) of one of R, G, and B for realizing the G and B arrangements, and a sub-scanning direction in FIG. A storage area for storing the amount of sub-scanning movement of the mother substrate 12 in the Y direction, an area functioning as a work area for the CPU 69 and a temporary file, and other various storage areas are set.

The CPU 69 controls the ejection of ink, that is, the filter element material 13 onto the mother substrate 12 at a predetermined position on the surface of the mother substrate 12 in accordance with program software stored in a memory serving as the information storage medium 71. As a specific function realizing unit, a cleaning arithmetic unit for performing an arithmetic for realizing the cleaning process, a capping arithmetic unit for realizing the capping process,
It has a weight measurement calculation unit for performing calculation for realizing weight measurement using the electronic balance 78 (see FIG. 9), and a drawing calculation unit for performing calculation for drawing the filter element material 13 by discharging droplets.

If the drawing calculation unit is divided in detail, a drawing start position calculation unit for setting the ink jet head row 22 to the initial position for drawing, and the inkjet head row 22 are scanned at a predetermined speed in the main scanning direction X. A main scanning control calculation unit for calculating a control for moving;
A sub-scanning control calculation unit for calculating a control for shifting the scanning element 2 in the sub-scanning direction Y by a predetermined sub-scanning amount; It has various function calculation units such as a nozzle discharge control calculation unit that performs calculation for controlling whether to discharge the material.

In this embodiment, each of the above functions is realized by software using the CPU 69.
When each of the above functions can be realized by a single electronic circuit that does not use the CPU 69, such an electronic circuit can be used.

Hereinafter, the droplet discharge device 16 having the above configuration will be described.
Will be described based on the flowchart shown in FIG.

When the droplet discharge device 16 is operated by turning on the power by the operator, first, in step S1, initialization is realized. Specifically, the head unit 2
6, the substrate supply device 23, the control device 24, and the like are set to predetermined initial states.

Next, when the weight measurement timing comes (YES in step S2), the head unit 2 shown in FIG.
6 is moved to the position of the electronic balance 78 in FIG. 9 by the main scanning drive device 19 (step S3), and the amount of ink ejected from the nozzles 27 is measured using the electronic balance 78 (step S4). Then, the voltage applied to the piezoelectric element 41 corresponding to each nozzle 27 is adjusted according to the ink ejection characteristics of the nozzle 27 (step S5).

Thereafter, when the cleaning timing comes (YES in step S6), the head unit 26 is moved to the cleaning device 77 by the main scanning drive device 19 (step S7), and the ink jet head is moved by the cleaning device 77. The row 22 is cleaned (Step S8).

If the weight measurement timing or the cleaning timing has not arrived (N in steps S2 and S6)
O) Or, when those processes are completed, the motherboard 12 is supplied to the table 49 by operating the substrate supply device 23 of FIG. Specifically, the mother substrate 12 in the substrate housing portion 57 is
4. Hold by suction. Next, the elevating shaft 61, the first arm 62 and the second arm 63 are moved to
2 is conveyed to the table 49, and is further pressed against positioning pins 50 (see FIG. 10) provided in advance at appropriate places on the table 49. In order to prevent the mother substrate 12 from being displaced on the table 49, it is desirable to fix the mother substrate 12 to the table 49 by means such as air suction.

Next, while observing the mother board 12 with the board camera 82 shown in FIG. 9, the output shaft of the θ motor 51 shown in FIG. Rotate the mother board 12
Is positioned (step S10). Thereafter, while observing the mother substrate 12 with the head camera 81 of FIG. 9, the position at which drawing is started by the inkjet head row 22 is determined by calculation (step S11). Then, the main-scanning driving device 19 and the sub-scanning driving device 21 are appropriately operated to move the inkjet head row 22 to the drawing start position (step S12).

At this time, the ink jet head row 22
Is a central axis K of the carriage 25, as shown in FIG.
1 is set so as to be a direction perpendicular to the main scanning direction X. For this reason, the nozzle row 28 is disposed so as to be inclined at an angle θ with respect to the sub-scanning direction Y of the inkjet head row 22. This is, in the case of a normal droplet discharge device, an inter-nozzle pitch that is an interval between adjacent nozzles 27,
In many cases, the element pitch, which is the interval between the adjacent filter elements 3, that is, the filter element formation areas 7, is different. When the inkjet head row 22 is moved in the main scanning direction X, the pitch between the nozzles in the sub-scanning direction Y This is a measure for ensuring that the dimension component is geometrically equal to the element pitch.

When the ink jet head array 22 is placed at the drawing start position in step S12 in FIG. 15, the main scanning in the main scanning direction X is started in step S13 in FIG. 15, and the discharge of ink is started at the same time. . In particular,
When the main scanning drive device 19 in FIG. 10 is operated, the inkjet head row 22 linearly scans and moves at a constant speed in the main scanning direction X in FIG. 1, and during the movement, the filter element forming region 7 to which ink is to be supplied. When the nozzle 27 corresponding to the filter element 3 reaches the nozzle 27, the ink, that is, the filter element material is ejected from the nozzle 27 to fill the filter element formation region 7 and the filter element 3 is formed.

When the main scanning for one line with respect to the mother substrate 12 is completed (YES in step S14), the inkjet head row 22 reversely moves to return to the initial position (a) (step S15). Further, the inkjet head row 22 is driven by the sub-scanning drive device 21 and has a predetermined sub-scanning amount in the sub-scanning direction Y, for example, only the sub-scanning direction Y component of the total length of the six nozzle rows 28. Move (step S16). Then, the main scanning and the ink ejection are repeatedly performed, so that the filter element forming region 7 becomes the filter element material 1.
3 to form a filter element 3 (step S13).

The ink jet head row 22 as described above
Drawing of the filter element 3 by the mother substrate 1
2 is completed for all areas (YE in step S17).
S) In step S18, the processed mother substrate 12 is discharged to the outside by the substrate supply device 23 or another transport device. Thereafter, as long as the operator does not give an instruction to end the processing (NO in step S1), the process returns to step S2 to return to another mother board 12
Is repeated for one of R, G, and B.

When there is an instruction to end the work from the operator (YES in step S19), the CPU 69 sets the capping device 76 in FIG.
And the capping device 76 performs capping on the inkjet head row 22 (step S20).

As described above, the patterning for the first color, for example, the R color among the three colors R, G, and B constituting the color filter 1 is completed. Thereafter, the mother substrate 12 is transported to the droplet discharge device 16 using the second color of R, G, and B, for example, G color as a filter element material, and the G color is patterned. Further, finally, the third color of R, G, and B, for example, B is conveyed to the droplet discharge device 16 using the filter element material, and the B color is patterned. Thus, a mother substrate 12 on which a plurality of color filters 1 (FIG. 6A) having a desired R, G, B dot arrangement such as a stripe arrangement is manufactured. By cutting the mother substrate 12 for each color filter forming area 11, a plurality of one color filters 1 are cut out.

If the present color filter 1 is used for color display of a liquid crystal device, an electrode, an alignment film and the like are further laminated on the surface of the present color filter 1. In such a case, if the mother substrate 12 is cut and the individual color filters 1 are cut out before the electrodes and the alignment films are stacked, the subsequent steps of forming the electrodes and the like become very troublesome. Therefore, in such a case, it is desirable to cut the mother substrate 12 after completing necessary additional steps such as electrode formation and alignment film formation, instead of cutting the mother substrate 12.

As described above, according to the color filter manufacturing method and the manufacturing apparatus according to the present embodiment, as shown in FIG. 1, the mother substrate is held by the carriage 25 as the holding means holding the plurality of ink jet heads 20. 1
Since the filter element material 13 as ink is ejected from the nozzle rows 28 of the plurality of ink jet heads 20 during the main scanning of the ink jet head 2, compared to the case where the surface of the mother substrate 12 is scanned using only one head portion. As a result, the scanning time can be reduced, and thus the manufacturing time of the color filter 1 can be reduced.

Further, since each of the ink jet heads 20 performs main scanning in an inclined state at an angle θ with respect to the sub-scanning direction Y, the pitch between a plurality of nozzles 27 belonging to each of the ink jet heads 20 is determined by a filter on the mother substrate 12. The distance between the element forming regions 7, that is, the pitch between the elements can be matched. If the pitch between the nozzles and the pitch between the elements are geometrically matched in this manner, it is advantageous because the position of the nozzle row 28 does not need to be controlled in the sub-scanning direction Y.

In this embodiment, since the ink jet head 20 is fixed to the carriage 25, the inclination angle θ is one type for one carriage 25. Therefore, when the pitch between the elements on the mother board 12 changes, it is necessary to use another carriage 25 that can realize the inclination angle θ corresponding to the pitch between the elements.

Further, in this embodiment, the carriage 2
Since the individual inkjet heads 20 are inclined instead of the entirety of the nozzles 5, the nozzles 27 closer to the mother substrate 12 and the nozzles 27 farther from the mother substrate 12 are inclined.
The distance T to the carriage 25 is significantly smaller than when the entire carriage 25 is inclined. Therefore, the time for scanning the mother substrate 12 by the inkjet head row 22 can be significantly reduced. Thereby, the manufacturing time of the color filter 1 can be reduced. Further, since the inkjet heads 20 are inclined and arranged side by side in a direction intersecting the main scanning direction, the inkjet head row 22 and the carriage 25 holding the inkjet head row do not increase in size. It does not need to be converted.

It should be noted that, in the color filter manufacturing apparatus and the manufacturing method of the present embodiment, the ink jet array 22 is used.
Since the filter element 3 is formed by ink discharge using the method, it is not necessary to go through a complicated process such as a method using a photolithography method, and there is no waste of material.

In the first embodiment, a resin material having no translucency is used for the partition 6.
Of course, it is also possible to use a translucent resin material. In this case, a black mask may be provided by separately providing a light-shielding metal film or a resin material at a position corresponding to between the filter elements 3, for example, above the partition 6, below the partition 6, or the like. Alternatively, the partition 6 may be formed of a light-transmitting resin material without a black mask.

In the first embodiment, R, G, and B are used as the filter elements 3. However, the filter elements are not limited to R, G, and B. For example, C (cyan), M (Magenta) and Y (yellow) may be adopted. In such a case, filter element materials having C, M, and Y colors may be used instead of the R, G, and B filter element materials.

Further, in the first embodiment,
The partition 6 was formed by photolithography, but, like the color filter 1, the partition 6 was formed by an inkjet method.
It is also possible to form

(Second Embodiment) FIG. 3 shows a method of manufacturing a color filter and an apparatus for manufacturing the same according to another embodiment of the present invention. The case where ink, that is, the filter element material 13 is supplied to each filter element forming area 7 in the area 11 by ejection is schematically shown.

The general steps performed by the present embodiment are the same as the steps shown in FIG. 7, and the droplet discharge apparatus used for discharging ink is mechanically similar to the apparatus shown in FIG. Is the same.

This embodiment is different from the previous embodiment shown in FIG. 1 in that the structure for holding the ink jet head 20 by the carriage 25 is modified. Specifically, in FIG.
0 with respect to the carriage 25
, Which is rotatable about the central axis K2 as shown by the arrow N, that is, the inner surface is rotatable. Further, the individual inkjet heads 20 are held so as to be slidable with respect to the carriage 25 as shown by an arrow P, that is, in-plane parallel movement. Further, a nozzle array angle control device 83 and a nozzle array interval control device 84 are additionally provided on the carriage 25.

The nozzle array angle control device 83 controls the inner surface inclination angles θ of the plurality of nozzle arrays 28 individually or collectively. The nozzle array angle control device 83 can be constituted by an arbitrary structure. For example, the inkjet head 20 mounted on the carriage 25 as a casing so as to be rotatable in a plane as indicated by an arrow N can be rotated by a rotation angle such as a pulse motor or a servomotor. It can be configured by connecting directly to a controllable power source or indirectly via a power transmission mechanism or the like. According to this configuration, the tilt angle θ of each nozzle row 28 can be adjusted to a desired value by controlling the output angle value of the power source, and the output shaft of the power source after the adjustment is held in a locked state. By doing so, the inclination angle θ of each nozzle row 28 can be fixedly held at a desired value.

The nozzle row interval control device 84 controls the intervals between the plurality of nozzle rows 28 individually or collectively for each individual interval. This nozzle row interval control device 8
4 can be constituted by an arbitrary structure.
The inkjet head 20 slidably mounted on the carriage 25 as a casing as described above is a slide drive device using a rotary device such as a pulse motor or a servo motor capable of controlling the rotation angle as a power source, or a linear motor or the like. It can be configured by connecting to a slide drive device configured using a dynamic drive source.

According to the present embodiment, the nozzle array angle control device 83 shown in FIG. 4 is operated to rotate the ink jet head 20 in the plane as shown by the arrow N in FIG. is adjusted so that the pitch between nozzles of the nozzle row 28 is
The pitch between the elements in the upper filter element forming region 7 is made to match. Further, by operating the nozzle row interval control device 84 in FIG. 4 to adjust the interval between the ink jet heads 20 in FIG. 3, the distance between the nozzles of the end portions of the nozzle rows 28 adjacent to each other is adjusted to the mother board 12 side. The pitch between the elements.

As described above, the six nozzle rows 28 can be formed as continuous long nozzle rows having a nozzle pitch corresponding to the element pitch. in this way,
According to the present embodiment, by appropriately adjusting the pitch between nozzles in one inkjet head row 22,
The patterns having different pitches between the elements
Can draw on top.

(Third Embodiment) FIG. 5 shows an ink jet head array 22 according to still another embodiment of the method and apparatus for manufacturing a color filter according to the present invention.
Color filter forming region 1 in mother substrate 12 using
1 schematically shows a case where ink, that is, a filter element material 13 is supplied to each filter element formation region 7 in the nozzle 1 by discharging.

The general steps performed by the present embodiment are the same as the steps shown in FIG. 7, and the droplet discharge apparatus used for discharging ink is mechanically similar to the apparatus shown in FIG. Is the same.

This embodiment is different from the previous embodiments shown in FIGS. 1 and 3 in that the inclination angle θ of the nozzle row 28 is
This means that the size of each nozzle row 28 is the same, but the tilt direction alternates between plus and minus. Also according to this method, the six nozzle rows 28 can be formed into a continuous long nozzle row having a nozzle pitch corresponding to the element pitch on the mother substrate 12 side.

In this embodiment, the nozzle row 28 can be fixed as shown in FIG. 1, or the nozzle row 28 can be inclined as shown in FIG. It is also possible to adopt a structure in which the angle θ and the distance between nozzle rows can be adjusted.

(Fourth Embodiment) FIG. 12 shows a modification of the ink jet head 20 used in the present invention. The ink jet head 20 shown here differs from the ink jet head 20 shown in FIG. 11 in that two nozzle rows 28 are provided along the main scanning direction X. As a result, the two nozzles 27 on the same main scanning line
Thus, the filter element material 13 can be supplied to one filter element forming region 7. For this reason, the ink is ejected by two different nozzles 27 so as to be formed into a predetermined film thickness by receiving the ink ejection. Variations in the film thickness can be prevented, and therefore, the light transmission characteristics of the color filter 1 can be made uniform in a plane.

In this embodiment, since the center axis K0 of the inkjet head row 22 is inclined at an inner surface tilt angle θ with respect to the sub-scanning direction Y, the two-stage nozzle row 2
It is preferable that the nozzles 27 in 8 are not aligned in a direction perpendicular to the central axis K0 of the carriage 25, but are shifted from each other when viewed from the carriage 25 so as to be mounted in the main scanning direction X.

(Fifth Embodiment) FIG. 16 shows still another modification of the ink jet head 20 used in the present invention. This ink jet head 20 is different from the ink jet head 20 shown in FIG. 11 in that a nozzle row 28R for discharging the R color ink, a nozzle row 28G for discharging the G color ink, and a nozzle row 28 for discharging the B color ink.
Three types of nozzle rows such as B are formed in one inkjet head 20. Each of these three types is provided with the ink ejection system shown in FIG. 13A and FIG. 13B, and an R ink supply device 37R is connected to the ink ejection system corresponding to the R color nozzle row 28R. Nozzle row 28G
Is connected to the G ink supply device 37G, and the ink discharge system corresponding to the B nozzle row 28B is connected to the B ink supply device 37B.

The general steps performed by the present embodiment are the same as those shown in FIG. 7, and the droplet discharge apparatus used for discharging ink is basically the same as the apparatus shown in FIG. It is.

In the embodiment shown in FIG. 11, only one type of nozzle row 28 is provided in the ink jet head 20. And the like, the ink jet head rows 22 must be prepared for each of the three colors R, G, and B. On the other hand, when the inkjet head 20 having the structure shown in FIG. 16 is used, R, G, and R are obtained by one main scan in the main scan direction X of the inkjet head row 22 including the plurality of inkjet heads 20. B can be attached to the mother substrate 12 at the same time.
You only need to prepare one for 2. Further, when the interval between the nozzle rows 28 of each color matches the pitch of the filter element forming region 7 of the mother substrate 12, it is possible to simultaneously strike three colors of R, G, and B.

(Sixth Embodiment) FIG. 17 shows an embodiment of a manufacturing method using a liquid crystal device manufacturing apparatus as an example of the electro-optical device according to the present invention. FIG. 18 shows an embodiment of a liquid crystal device manufactured by the manufacturing method. FIG. 19 is a view similar to FIG.
3 shows a cross-sectional structure of the liquid crystal device according to line IX-IX. Prior to description of a method and an apparatus for manufacturing a liquid crystal device, first, a liquid crystal device manufactured by the method will be described with reference to an example. Note that the liquid crystal device of this embodiment is a transflective liquid crystal device which performs full-color display by a simple matrix method.

In FIG. 18, a liquid crystal device 101 includes a liquid crystal driving IC 1 as a semiconductor chip on a liquid crystal panel 102.
03a and the liquid crystal driving IC 103b are mounted, and an FPC (Flexible Printed Circuit) 1 is used as a wiring connection element.
04 is connected to the liquid crystal panel 102. Further, the liquid crystal device 101 includes a lighting device 106 on the back side of the liquid crystal panel 102.
Is provided as a backlight.

The liquid crystal panel 102 is formed by bonding a first substrate 107a and a second substrate 107b with a sealing material. The sealing material 108 is made of, for example, an epoxy resin by screen printing or the like.
It is formed by being annularly attached to the inner surface of the substrate 107a or the second substrate 107b. In addition, sealing material 1
As shown in FIG. 19, a conductive material 109 formed in a spherical or cylindrical shape by a conductive material is included in the inside of 08 in a dispersed state.

In FIG. 19, the first substrate 107a has a plate-like base member 111a made of transparent glass, transparent plastic, or the like. A reflective film 112 is formed on the inner surface (upper surface in FIG. 19) of the base material 111a, an insulating film 113 is laminated thereon, and a first electrode 114a is formed on the reflective film 112 in a stripe shape (see FIG. 19). FIG.
), And an alignment film 116a is further formed thereon. Further, a polarizing plate 117a is attached to the outer surface (the lower surface in FIG. 19) of the base material 111a by bonding or the like.

In FIG. 18, in order to make it easy to understand the arrangement of the first electrodes 114a, the spacing between the stripes of the first electrodes 114a is drawn much wider than the actual one. Therefore, the number of the first electrodes 114a is reduced. First electrode 114
As for a, a larger number are formed on the base material 111a.

In FIG. 19, the second substrate 107b has a plate-like base member 111b formed of transparent glass, transparent plastic, or the like. A color filter 118 is provided on the inner surface (the lower surface in FIG. 19) of the substrate 111b.
Is formed thereon, and the second electrode 114b is formed in a stripe shape (see FIG. 18) in a direction orthogonal to the first electrode 114a as viewed in the direction of arrow D, and an alignment film 116b is further formed thereon. . Further, a polarizing plate 117b is attached to the outer surface (upper surface in FIG. 19) of the base material 111b by sticking or the like.

In FIG. 18, in order to clearly show the arrangement of the second electrodes 114b, as in the case of the first electrodes 114a, the spacing between the stripes is drawn much wider than the actual one. Although the number of the second electrodes 114b is small, in practice, a larger number of the second electrodes 114b are formed on the base material 111b.

In FIG. 19, the first substrate 107a and the second
In a gap surrounded by the substrate 107b and the sealing material 108, a so-called cell gap, a liquid crystal such as STN
(Super Twisted Nematic) Liquid crystal L is enclosed.
A large number of minute and spherical spacers 119 are dispersed on the inner surface of the first substrate 107a or the second substrate 107b, and the thickness of the cell gap is maintained uniform by the presence of these spacers 119 in the cell gap. .

The first electrode 114a and the second electrode 114b are arranged cold and orthogonal to each other, and their intersections are arranged in a dot matrix when viewed from the direction of arrow D in FIG.
Then, each intersection in the dot matrix forms one picture element pixel. The color filter 118
It is formed by arranging the respective color elements (red), G (green), and B (blue) in a predetermined pattern, for example, a pattern such as a stripe arrangement, a delta arrangement, and a mosaic arrangement when viewed from the direction of arrow D. The one picture element pixel corresponds to each of R, G, and B, and the three color picture element pixels of R, G, and B form one unit to constitute one pixel.

By selectively emitting light from a plurality of picture element pixels arranged in a dot matrix, that is, pixels, an image such as a character or a number is displayed on the outside of the second substrate 107b of the liquid crystal panel 102. . The area where an image is displayed in this way is an effective pixel area, and the planar rectangular area indicated by arrow V in FIGS. 18 and 19 is the effective display area.

In FIG. 19, a reflection film 112 is formed of a light reflection characteristic material such as an APC alloy or Al (aluminum), and a first electrode 114a and a second electrode 114 are formed.
opening 1 at the position corresponding to each picture element pixel which is the intersection of b
21 are formed. As a result, the opening 121 is
, Are arranged in the same dot matrix as the picture element pixels.

First electrode 114a and second electrode 114b
Is, for example, ITO (Indium-Tin Oxi) which is a transparent conductive material.
de). In addition, the alignment films 116a, 11
6b is formed by depositing a polyimide resin in a film having a uniform thickness. These alignment films 116
a and 116b are subjected to the rubbing process, whereby the first
The initial alignment of the liquid crystal molecules on the surfaces of the substrate 107a and the second substrate 107b is determined.

In FIG. 18, the first substrate 107a is
The first substrate 107a has a larger area than the substrate 107b, and the first substrate 107a has a substrate overhang portion 107c that extends outside the second substrate 107b when these substrates are bonded to each other with the sealant 108. The substrate extension 107c is connected to the second electrode 114b on the second substrate 107b via a lead wire 114c extending from the first electrode 114a and a conductive material 109 (see FIG. 19) existing inside the seal member. A wiring 114d connected to an input terminal of the liquid crystal driving IC 103a, ie, an input terminal, and a liquid crystal driving IC.
Metal wiring 114f connected to input bump 103b
Various wirings such as are formed in an appropriate pattern.

In this embodiment, the lead-out wiring 114c extending from the first electrode 114a and the lead-out wiring 114d energizing the second electrode 114b are formed of ITO, which is the same material as those electrodes, that is, a conductive oxide. The metal wires 114e and 114f, which are wires on the input side of the liquid crystal driving ICs 103a and 103b, are formed of a metal material having a low electric resistance value, for example, an APC alloy. This APC alloy mainly contains Ag, and an alloy containing Pd and Cu concomitantly, for example, Ag 98%, Pd
This is an alloy composed of 1% and Cu 1%.

The liquid crystal driving ICs 103a and 103b
CF (Anisotropic Conductive Film) 1
By 22, it is bonded and mounted on the surface of the substrate overhang 107 c. That is, in this embodiment, a so-called COG structure in which a semiconductor chip is directly mounted on a substrate is used.
(Chip On Glass) type liquid crystal panel. In this COG mounting structure, ACF1
The liquid crystal driving I
Input-side bumps of C103a and 103b and metal wiring 114
e and 114f are conductively connected to each other, and the liquid crystal driving IC 103
a, 103b and the lead-out wiring 114c, 1
14d is conductively connected.

In FIG. 18, the FPC 104 has a flexible resin film 123, a circuit 126 including a chip component 124, and a metal wiring terminal 127. The circuit 126 is directly mounted on the surface of the resin film 123 by soldering or another conductive connection method. The metal wiring terminals 127 are formed of an APC alloy, Cr, Cu, or another conductive material. The portion of the FPC 104 where the metal wiring terminals 127 are formed is the first substrate 10
The ACF 122 is connected to a portion of the wiring 7a where the metal wirings 114e and 114f are formed. And ACF
By the action of the conductive particles contained in the interior of the metal layer 122, the metal wirings 114e and 114f on the substrate side and the metal wiring terminal 127 on the FPC side are conducted.

An external connection terminal 131 is formed on the opposite side end of the FPC 104, and the external connection terminal 131 is connected to an external circuit (not shown). Then, based on the signal transmitted from the external circuit, the liquid crystal driving IC 103 is used.
a and 103b are driven, and the first electrode 114a and the second
The scanning signal is supplied to one of the electrodes 114b, and the data signal is supplied to the other. Thus, the voltage of the pixel elements in the dot matrix arranged in the effective display area V is controlled for each pixel, and as a result, the orientation of the liquid crystal L is controlled for each pixel pixel.

In FIG. 18, a lighting device 106 functioning as a so-called backlight is provided as shown in FIG.
A light guide 132 made of acrylic resin or the like;
A diffusion sheet 133 provided on a light exit surface 132b of the light guide 132, a reflection sheet 134 provided on a surface opposite to the light exit surface 132b of the light guide 132, and an LED (Light Emitting Diode) as a light source. 136.

The LED 136 is held by an LED board 137, and the LED board 137 is mounted on, for example, a holding section (not shown) formed integrally with the light guide 132. LE
By mounting the D board 137 at a predetermined position of the holding unit, the LED 136 is placed at a position facing the light intake surface 132 a which is a side end surface of the light guide 132. Reference numeral 138 denotes a cushioning material for buffering an impact applied to the liquid crystal panel 102.

When the LED 136 emits light, the light is taken in from the light taking-in surface 132a and guided to the inside of the light guide 132, and is propagated while being reflected on the reflection sheet 134 and the wall surface of the light guide 132 while propagating. The light is emitted from the surface 132b through the diffusion sheet 133 to the outside as plane light.

Since the liquid crystal device 101 of this embodiment is configured as described above, if external light such as sunlight or indoor light is sufficiently bright, the second liquid crystal device shown in FIG.
External light is taken into the liquid crystal panel 102 from the substrate 107b side, and after the light passes through the liquid crystal L, the reflection film 11 is formed.
The light is reflected at 2 and supplied to the liquid crystal L again. The liquid crystal L is separated into R, G, B by electrodes 114a, 114b sandwiching the liquid crystal L.
The orientation is controlled for each pixel pixel. Therefore, the light supplied to the liquid crystal L is modulated for each pixel pixel, and an image such as a character or a number is displayed outside the liquid crystal panel 102 by the light that passes through the polarizing plate 117b and the light that cannot pass through the modulation. You. Thus, a reflective display is performed.

On the other hand, when the amount of external light is not sufficient, the LED 136 emits light to emit planar light from the light emitting surface 132b of the light guide 132, and the light is
The liquid crystal L is supplied to the liquid crystal L through an opening 121 formed in the liquid crystal L. At this time, similarly to the reflection type display, the supplied light is modulated for each pixel pixel by the liquid crystal L whose orientation is controlled. Thereby, an image is displayed to the outside, and a pass-type display is performed.

The liquid crystal device 101 having the above configuration is manufactured by, for example, a manufacturing method shown in FIG. In this manufacturing method, a series of steps P1 to P6 is a step of forming the first substrate 107a, and steps P11 to P1 are performed.
A series of steps 4 is a step of forming the second substrate 107b. Usually, each of the first substrate forming step and the second substrate forming step is independently performed.

First, the first substrate forming step will be described. The liquid crystal panel 1 is formed on the surface of a large-area mother material substrate formed of light-transmitting glass, light-transmitting plastic, or the like.
A plurality of reflective films 112 are formed by photolithography or the like. Further, an insulating film 11 is further formed thereon.
3 is formed by using a known film forming method (step P1). Next, the first electrode 11 is formed using a photolithography method or the like.
4a, lead wirings 114c and 114d and metal wiring 1
14e and 114f are formed (step P2).

Thereafter, an alignment film 116a is formed on the first electrode 114a by coating, printing, or the like (step P3).
Further, the rubbing process is performed on the alignment film 116a to determine the initial alignment of the liquid crystal (step P4). Next, the sealing material 108 is screen-printed, for example.
Is formed in an annular shape (Step P5), and a spherical spacer 119 is dispersed thereon (Step P6). Thus, a large area mother board having a plurality of panel patterns on the first substrate 107a of the liquid crystal panel 102 is formed. One substrate is formed.

In addition to the above-described first substrate forming step, a second substrate forming step (steps P11 to P14 in FIG. 17) is performed. First, a large-area mother material base made of a light-transmitting glass, a light-transmitting plastic, or the like is prepared, and a plurality of color filters 118 of the liquid crystal panel 102 are formed on the surface thereof (step P11). The process of forming the color filter 118 is performed by using the manufacturing method shown in FIG. 7, and the formation of each of the R, G, and B color filter elements in the manufacturing method is performed by using the droplet discharge device 16 of FIG. It is executed according to the control method of any one of the inkjet head rows 22 shown in FIGS. The method of manufacturing these color filters and the method of controlling the inkjet head row 22 are the same as those already described, and therefore, description thereof will be omitted.

As shown in FIG. 7D, when the color filter 1 or the color filter 118 is formed on the mother substrate 12 or the mother raw material base, the second electrode 114b is then formed by photolithography. (Step P12). Further, an alignment film 116b is formed by coating, printing, or the like (Step P13). Next, a rubbing process is performed on the alignment film 116b to determine the initial alignment of the liquid crystal (Step P14). Thus, a large-area mother second substrate having a plurality of panel patterns on the second substrate 107b of the liquid crystal panel 102 is formed.

As described above, after the mother first substrate and the mother second substrate having a large area are formed, the mother substrates are aligned with each other with the sealing material 108 interposed therebetween, that is, are aligned and bonded to each other (step P2
1). As a result, an empty panel structure including the panel portions for a plurality of liquid crystal panels and in which the liquid crystal is not yet sealed is formed.

Next, a scribe groove, that is, a cutting groove is formed at a predetermined position of the completed empty panel structure, and the panel structure is broken, that is, cut based on the scribe groove (step P22). As a result, the liquid crystal injection opening 11 of the sealing material 108 of each liquid crystal panel portion is formed.
A so-called strip-shaped empty panel structure in which 0 (see FIG. 18) is exposed to the outside is formed.

Thereafter, liquid crystal L is injected into each liquid crystal panel through the exposed liquid crystal injection openings 110, and each liquid crystal injection opening 110 is sealed with a resin or the like (step P23). In a normal liquid crystal injection process, for example, a liquid crystal is stored in a storage container, and the storage container storing the liquid crystal and a strip-shaped empty panel are put into a chamber or the like. After the chamber or the like is evacuated, a strip-shaped empty panel is immersed in liquid crystal inside the chamber. This is then done by opening the chamber to atmospheric pressure. At this time, since the inside of the empty panel is in a vacuum state, the liquid crystal pressurized by the atmospheric pressure is introduced into the inside of the panel through the liquid crystal injection opening. Since liquid crystal adheres around the liquid crystal panel structure after the liquid crystal injection, the strip-shaped panel after the liquid crystal injection processing is subjected to a cleaning process in step P24.

Thereafter, a scribe groove is formed again at a predetermined position in the strip-shaped mother panel after the liquid crystal injection and the cleaning are completed. Further, the strip-shaped panel is cut based on the scribe groove. Thereby, the plurality of liquid crystal panels 102 are individually cut out (step P2).
5). As shown in FIG. 18, the liquid crystal driving IC 103a,
By mounting the lighting device 106 as a backlight and connecting the FPC 104,
The target liquid crystal device 101 is completed (Step P26).

The above-described method of manufacturing a liquid crystal device and the manufacturing apparatus thereof have the following features, particularly at the stage of manufacturing the color filter 1. That is, any one of the structures shown in FIG. 1 to FIG. 5 is adopted as the ink jet head row 22 and the main board 12 is main-scanned by the carriage 25 as the holding means holding the plural ink jet heads 20. The scanning time can be reduced as compared with the case where the surface of the mother substrate 12 is scanned using only the plurality of inkjet heads 20, and therefore, the manufacturing time of the color filter 1 can be reduced.

Further, since each of the ink jet heads 20 performs main scanning in an inclined state at an angle θ with respect to the sub-scanning direction Y, the pitch between the plurality of nozzles 27 belonging to each of the ink jet heads 20 is determined by the filter on the mother substrate 12. The distance between the element forming regions 7, that is, the pitch between the elements can be matched. If the pitch between the nozzles and the pitch between the elements are geometrically matched in this manner, it is advantageous because the position of the nozzle row 28 does not need to be controlled in the sub-scanning direction Y.

Further, since the individual ink jet heads 20 are inclined instead of the entire carriage 25, the distance T between the nozzle 27 closer to the mother substrate 12 and the nozzle 27 farther from the mother substrate 12 is equal to the carriage T. 25 is significantly reduced as compared with the case where the entirety is inclined, so that the time for scanning the mother substrate 12 by the inkjet head row 22 can be significantly reduced. Thereby, the manufacturing time of the color filter 1 can be reduced.
Further, since the inkjet heads 20 are inclined and arranged side by side in a direction intersecting the main scanning direction, the inkjet head row 22 and the carriage 25 holding the inkjet head row do not increase in size. It does not need to be converted.

In the liquid crystal device manufacturing method and the manufacturing apparatus according to the present embodiment, the inkjet head array 22 is used.
Since the filter element 3 is formed by ink ejection using the method, there is no need to go through a complicated process such as a method using a photolithography method, and the material is not wasted.

(Seventh Embodiment) FIG. 20 shows an embodiment of a manufacturing method using an EL device manufacturing apparatus as an example of an electro-optical device according to the present invention. FIG. 21 shows the main steps of the manufacturing method and the main sectional structure of the EL device finally obtained. As shown in FIG. 21D, in the EL device 201, a pixel electrode 202 is formed on a transparent substrate 204, and a bank 2 is provided between the pixel electrodes 202.
05 are formed in a lattice shape when viewed from the direction of arrow G. A hole injection layer 220 is formed in these lattice-shaped recesses, and an arrow G is formed.
The R-color light-emitting layer 203R, the G-color light-emitting layer 203G, and the B-color light-emitting layer 203B are formed in each lattice-shaped recess so as to have a predetermined arrangement such as a stripe arrangement when viewed from the direction. Furthermore, the EL device 201 is formed by forming the counter electrode 213 thereon.

The pixel electrode 202 is connected to a TFD (Thin Film).
When driven by a two-terminal type active element such as a diode (thin film diode) element, the counter electrode 213 is formed in a stripe shape when viewed in the direction of arrow G. In addition, the pixel electrode 202 is connected to a TFT (Thin Film Transi
In the case of driving by a three-terminal type active element such as a stor (thin film transistor), the above-described counter electrode 2 is used.
13 is formed as a single plane electrode.

The region sandwiched between each pixel electrode 202 and each counter electrode 213 is one picture element pixel.
The pixel pixels of G and B colors become one unit and become one unit.
To form one pixel. By controlling the current flowing through each picture element pixel, a desired one of the plurality of picture element pixels is selectively caused to emit light, whereby a desired full-color image can be displayed in the direction of arrow H.

The EL device 201 is manufactured by, for example, a manufacturing method shown in FIG. That is, the process P5
1 and an active element such as a TFD element or a TFT element is formed on the surface of the transparent substrate 204 as shown in FIG.
Further, a pixel electrode 202 is formed. As a formation method,
For example, a photolithography method, a vacuum deposition method, a sputtering method, a pyrosol method, or the like can be used. The material of the pixel electrode 202 is ITO (Indium-Tin Oxid
e), tin oxide, a composite oxide of indium oxide and zinc oxide, or the like can be used.

Next, as shown in a step P52 and FIG. 21A, a partition wall, that is, a bank 205 is formed by using a well-known patterning method, for example, a photolithography method.
Fill between the two. Thereby, it is possible to improve the contrast, prevent color mixture of the luminescent material, and prevent light leakage between pixels. The material of the bank 205 is not particularly limited as long as it has durability with respect to the solvent of the EL light emitting material, but can be made into Teflon (registered trademark) by fluorocarbon gas plasma treatment, for example, acrylic resin, epoxy resin, photosensitive resin Organic materials such as conductive polyimide are preferred.

Next, immediately before applying the ink for the hole injection layer as a functional liquid, the transparent substrate 204 is subjected to a continuous plasma treatment of oxygen gas and fluorocarbon gas plasma (step P53). Thereby, the polyimide surface is made water-repellent, the ITO surface is made hydrophilic, and the wettability on the substrate side for finely patterning the droplets can be controlled. As a device for generating plasma, a device for generating plasma in a vacuum or a device for generating plasma in the atmosphere can be used in the same manner.

Next, as shown in step P54 and FIG. 21 (a), the ink for the hole injection layer is applied to the droplet discharging device 1 shown in FIG.
The ink is ejected from the sixth inkjet head row 22 and patterning coating is performed on each pixel electrode 202. As a specific control method of the inkjet head row 22, any one of the methods shown in FIGS. 1, 2, 3, and 4 is used. After the application, the solvent is removed under vacuum (1 torr) at room temperature for 20 minutes (step P55). After this,
The hole injection layer 220 which is not compatible with the light emitting layer ink by heat treatment at 20 ° C. (on a hot plate) for 10 minutes in the air.
Is formed (Step P56). Under the above conditions, the film thickness is 40
nm.

Next, as shown in step P57 and FIG. 21 (b), a functional liquid EL light emitting material is formed on the hole injection layer 220 in each filter element formation region 7 by using an ink jet method. The R light emitting layer ink and the G light emitting layer ink as an EL light emitting material which is a functional liquid material are applied. Also in this case, each light emitting layer ink is discharged from the inkjet head row 22 of the droplet discharge device 16 in FIG. One of the methods shown in FIGS. 1 to 4 is used as a control method of the inkjet head row 22. According to the inkjet method, fine patterning can be performed easily and in a short time. Further, the film thickness can be changed by changing the solid content concentration and the ejection amount of the ink composition.

After applying the light emitting layer ink, vacuum (1 torr)
During r), the solvent is removed under conditions such as room temperature and 20 minutes (step P58). Subsequently, in a nitrogen atmosphere, 150 ° C., 4
The R color light emitting layer 203R and the G color light emitting layer 203G are formed by conjugation by heat treatment for a long time (step P59). Under the above conditions, the film thickness was 50 nm. The light emitting layer conjugated by the heat treatment is insoluble in the solvent.

Before forming the light emitting layer, the hole injection layer 2
20 may be subjected to continuous plasma processing of oxygen gas and fluorocarbon gas plasma. Thereby, the hole injection layer 2
By forming a fluorinated layer on the substrate 20 and increasing the ionization potential, the hole injection efficiency is increased and an organic EL device with high luminous efficiency can be provided.

Next, as shown in step P60 and FIG. 21C, B as an EL luminescent material which is a functional liquid is used.
The color light emitting layer 203B is replaced with the R color light emitting layer 20 in each picture element pixel.
It was formed on the 3R / G color light emitting layer 203G and the hole injection layer 220. Accordingly, not only the three primary colors of R, G, and B are formed, but also the level difference between the bank 205 and the R color light emitting layer 203R and the G color light emitting layer 203G can be filled and flattened. As a result, a short circuit between the upper and lower electrodes can be reliably prevented. By adjusting the thickness of the B color light emitting layer 203B, the B color light emitting layer 203B becomes
In the laminated structure with the 3R and G color light emitting layers 203G,
It acts as an electron injecting and transporting layer and does not emit light in the B color.

As a method for forming the B-color light-emitting layer 203B as described above, for example, a general spin coating method as a wet method can be employed, or the R-color light-emitting layer 2B can be used.
An inkjet method similar to the method of forming the 03R and G color light emitting layers 203G can be employed.

Thereafter, as shown in a step P61 and FIG. 21D, the target EL device 201 is manufactured by forming the counter electrode 213. Counter electrode 213
If it is a plane electrode, for example, Mg, Ag,
It can be formed using Al, Li, or the like as a material by a film forming method such as an evaporation method or a sputtering method. In addition, the counter electrode 2
When the electrode 13 is a stripe-shaped electrode, the formed electrode layer can be formed by using a patterning method such as a photolithography method.

According to the method of manufacturing the EL device 201 and the manufacturing apparatus described above, any one of the structures shown in FIG. 1 to FIG. Ink is ejected from the nozzle rows 28 of the plurality of inkjet heads 20 during main scanning of the mother substrate 12 by the carriage 25 as a supporting means that supports the surface of the mother substrate 12 using only one head unit. The scanning time can be reduced as compared with the case of scanning, and therefore, the manufacturing time of the EL device 201 can be reduced.

Since each ink jet head 20 performs main scanning in an inclined state at an angle θ with respect to the sub-scanning direction Y, the nozzle pitch of the plurality of nozzles 27 belonging to each ink jet head 20 is set to the EL pitch on the mother substrate 12. The distance between the picture element pixel forming regions, that is, the pitch between the elements can be matched. If the pitch between the nozzles and the pitch between the elements are geometrically matched in this manner, it is advantageous because the position of the nozzle row 28 does not need to be controlled in the sub-scanning direction Y.

Further, since the individual ink jet heads 20 are inclined instead of the entire carriage 25, the distance T between the nozzle 27 closer to the mother substrate 12 and the nozzle 27 farther from the mother substrate 12 is equal to the carriage T. 25 is significantly reduced as compared with the case where the entirety is inclined, so that the time for scanning the mother substrate 12 by the inkjet head row 22 can be significantly reduced. Thereby, the manufacturing time of the EL device 201 can be reduced. Further, since the inkjet heads 20 are inclined and arranged in a direction intersecting the main scanning direction, the inkjet head row 22 and the carriage 2 holding the inkjet head row 22 are arranged.
5 does not increase in size, so the EL device 2 which is a droplet discharge device
01 does not need to be enlarged.

In the method of manufacturing the EL device 201 according to the present embodiment and the manufacturing device, since pixel pixels are formed by ink ejection using the ink jet head row 22, a complicated method such as a method using a photolithography method is employed. There is no need to go through a complicated process and no waste of material.

(Eighth Embodiment) Next, still another embodiment of the color filter manufacturing apparatus of the present invention will be described with reference to the drawings. First, prior to description of the color filter manufacturing apparatus, a color filter to be manufactured will be described. FIG. 33 is a partially enlarged view showing a color filter, FIG. 33 (A) is a plan view, and FIG.
34 is a sectional view taken along line XX of FIG. In the color filter shown in FIG. 33, the same components as those of the color filter 1 of the first embodiment shown in FIG.

[Structure of Color Filter] In FIG. 33A, the color filter 1 has a plurality of pixels 1A arranged in a matrix. The boundaries between these pixels 1A are separated by partition walls 6. Each one of the pixels 1A
First, a color filter material, that is, a filter element material 13 is introduced as a liquid material, which is any of red (R), green (G), and blue (B) inks. In the color filter shown in FIG. 33, the arrangement of red, green, and blue has been described as a so-called mosaic arrangement.
Any arrangement such as a stripe arrangement or a delta arrangement can be applied.

As shown in FIG. 33B, the color filter 1 includes a light-transmitting substrate 2 and a light-transmitting partition wall 6. The part where the partition 6 is not formed, that is, the removed part constitutes the pixel 1A. The filter element material 13 of each color introduced into the pixel 1A constitutes a filter element 3 to be a colored layer. On the upper surfaces of the partition 6 and the filter element 3, a protective film 4 as a protective layer and an electrode layer 5 are formed.

[Structure of Color Filter Manufacturing Apparatus] Next, the structure of the color filter manufacturing apparatus will be described with reference to the drawings. FIG. 22 is a partially cutaway perspective view showing a droplet discharge processing apparatus of the color filter manufacturing apparatus according to the present invention.

The color filter manufacturing apparatus includes a color filter 1 constituting a color liquid crystal panel as an electro-optical device.
To manufacture. This color filter manufacturing apparatus includes a droplet discharge device (not shown).

[Structure of Droplet Discharge Processing Apparatus] The droplet discharge apparatus includes three droplet discharge processing apparatuses 40 as shown in FIG.
5R, 405G, and 405B. The droplet discharge processing devices 405R, 405G, and 405B are provided with three types of R, G, and B for discharging, for example, R, G, and B filter element materials 13 that are inks as liquids, that is, color filter materials, to the mother substrate 12. It corresponds to the color. Note that these droplet discharge processing devices 405R and 405R
G and 405B are arranged substantially in series to constitute a droplet discharge device. Further, each of the droplet discharge processing devices 405R, 405
G and 405B are integrally provided with a control device (not shown) for controlling the operation of each component.

Note that each of the droplet discharge processing devices 405R, 405R
5G and 405B include these droplet discharge processing devices 405.
Transfer robots (not shown) for loading and unloading the mother substrates 12 one by one are connected to R, 405G, and 405B, respectively. Further, each of the droplet discharge processing devices 405R, 405
G and 405B are connected to a multi-stage bake furnace (not shown) that can accommodate, for example, six mother substrates 12 and heat-treats the mother substrates 12, for example, heats the mother substrate 12 at 120 ° C. for 5 minutes to dry the discharged filter element material 13. ing.

Then, each of the droplet discharge processing devices 405R, 405R
As shown in FIG. 22, each of 05G and 405B has a thermal clean chamber 422, which is a hollow box-shaped main body case. The inside of this thermal clean chamber 422
The interior is adjusted to, for example, 20 ± 0.5 ° C. so that dust can not enter from the outside so that stable and good drawing by the ink jet method can be obtained. In the thermal clean chamber 422, an ink jet processing main body 423 is provided.

The main body 423 of the ink jet processing is shown in FIG.
As shown, an X-axis air slide table 424 is provided. On the X-axis air slide table 424, a main scanning drive device 425 provided with a linear motor (not shown) is provided. This main scanning drive 425
Has a pedestal portion (not shown) for mounting and fixing the mother substrate 12 by suction, for example, and moves the pedestal portion in the main scanning direction with respect to the mother substrate 12 which is the X-axis direction.

The ink-jet processing main body 423 has the structure shown in FIG.
As shown in FIG. 2, a sub-scanning drive device 427 as a Y-axis table is disposed above the X-axis air slide table 424. This sub-scanning driving device 427
Moves the head unit 420 that discharges the filter element material 13 along, for example, the vertical direction in the sub-scanning direction with respect to the mother substrate 12 that is the Y-axis direction. In FIG. 22, the head unit 420 is indicated by a solid line while being floating in the air in order to clarify the positional relationship.

Further, the position of the ink jet head 421 and the mother substrate 1 are provided in the ink jet processing main body 423.
Various cameras (not shown), which are position recognizing means for recognizing the position for controlling the position of the camera 2, are provided. In addition,
The position control of the head unit 420 and the pedestal portion can be realized by position control using a pulse motor, feedback control using a servomotor, or any other control method.

As shown in FIG. 22, the ink jet processing main body 423 is provided with a wiping unit 481 for wiping the surface of the head unit 420 from which the filter element material 13 is discharged. The wiping unit 481 winds one end of a wiping member (not shown) in which a cloth member and a rubber sheet are integrally laminated, for example, and sequentially wipes a surface from which the filter element material 13 is discharged on a new surface. I have. Thus, the filter element material attached to the discharge surface is removed, so that nozzle clogging does not occur.

Further, the ink jet processing main body 423 is provided with an ink system 482 as shown in FIG. The ink system 482 includes an ink tank 483 for storing the filter element material 13, a supply pipe 478 through which the filter element material 13 can flow, and the filter element material 13 from the ink tank 483 to the head unit 420 via the supply pipe 478. It has a pump (not shown) for supplying. In FIG. 22, the piping of the supply pipe 478 is schematically shown, and is wired to the sub-scanning driving device 427 side so as not to affect the movement of the head unit 420 from the ink tank 483, and scans the head unit 420. Sub-scanning driving device 4
The filter element material 13 is supplied to the head unit 420 from above.

The ink jet processing main body 423 has a weight measuring unit 4 for detecting the discharge amount of the filter element material 13 discharged from the head unit 420.
85 are provided.

Further, the inkjet processing main body 423 has, for example, an optical sensor (not shown) and a head unit 4.
A pair of dot missing detection units 487 for detecting the ejection state of the filter element material 13 from the nozzle 20 is provided. In the dot missing detection unit 487, a light source and a light receiving unit of an optical sensor (not shown) are ejected from the head unit 420 along a direction intersecting the direction in which the liquid material is ejected from the head unit 420, for example, along the X-axis direction. They are arranged to face each other with a space through which the liquid drops pass. In addition, it is disposed on the Y-axis direction side which is the transport direction of the head unit 420, and detects the ejection state each time the head unit 420 is moved in the sub-scanning direction to eject the filter element material 13 to eliminate dot omission. To detect.

As will be described in detail later, the head unit 420 is provided with two rows of head devices 433 for discharging the filter element material 13. For this reason, a pair of dot missing detection units 487 are provided for detecting the ejection state for each head device in each row.

[Structure of Head Unit] Next, the structure of the head unit 420 will be described. FIG. 23 is a plan view showing a head unit provided in the droplet discharge processing apparatus. FIG. 24 is a side view showing the head unit. FIG. 25 is a front view showing the head unit. FIG. 26 is a sectional view showing the head unit.

As shown in FIGS. 23 to 26, the head unit 420 has a head main body 430 and an ink supply section 431. Also, the head main body 430
Is a flat carriage 426 and the carriage 42
6 and a plurality of head devices 433 having substantially the same shape.

(Structure of Head Device) FIG. 27 is an exploded perspective view showing the head device provided in the head unit.

As shown in FIG. 27, the head device 433 has a strip-shaped printed circuit board 435. Various electric components 436 are mounted on the printed board 435, and electric wiring is provided. Also, the printed circuit board 435
, A window portion 437 is formed at one end side (the right side in FIG. 27) in the longitudinal direction. Further, the printed circuit board 435 has a filter element material 13 which is ink.
Are provided on both sides of the window portion 437.

One side (the lower side in FIG. 27) of the printed circuit board 435 is substantially at one end in the longitudinal direction (FIG. 27).
The ink jet head 421 is integrally mounted by a mounting member 440 at a position (middle right side). The inkjet head 421 is formed in a long rectangular shape.
The printed circuit board 435 is attached so that its longitudinal direction is along the longitudinal direction. In addition, each inkjet head 421 in each head device 433 has substantially the same shape,
In other words, for example, the product may be a product of a predetermined standard and selected to a predetermined quality. Specifically, it is efficient that these inkjet heads 421 have the same number of nozzles, which will be described later, and that the nozzles are formed at the same position, when assembling the inkjet heads 421 with respect to the carriage. Is also preferred. Furthermore, if products manufactured through the same manufacturing / assembly process are used, there is no need to manufacture a special product, and the cost can be reduced.

The other side of the printed circuit board 435 (FIG. 2)
7, a connector 441 that is located at substantially the other end in the longitudinal direction (the left side in FIG. 27) and is electrically connected to the inkjet head 421 by electric wiring is integrally attached. As shown schematically in FIG. 22, these connectors 441 are connected to electric wiring (including power supply wiring and signal wiring) 442 wired to the sub-scanning drive device 427 so as not to affect the movement of the head unit 420. You. The electric wiring 442 connects the control unit (not shown) and the head unit 420. That is, these electric wirings 442 are on both sides in the arrangement direction of the two rows of head units 433 of the head unit 420 from the sub-scanning drive unit 427, as schematically shown by two-dot chain lines in FIGS. Wired around the outer periphery of the head unit 420 and connected to the connector 441, no electrical noise is generated.

Further, on the other surface side (upper surface side in FIG. 27) of the printed circuit board 435, an ink introduction portion 443 is attached corresponding to the ink jet head 421 at substantially one end side in the longitudinal direction (right side in FIG. 27). I have. This ink introduction part 4
43 is a printed circuit board 435 provided on the mounting member 440.
And a positioning claw portion 446 for engaging with a printed circuit board 435.

The ink introduction portion 443 is provided with a pair of substantially cylindrical connecting portions 448 having a tapered tip. These connecting portions 448 have openings (not shown) at their base ends on the side of the printed circuit board 435 and communicate with the flow passages 438 of the printed circuit board 435 in a substantially liquid-tight manner, and have not-shown openings at the distal ends through which the filter element material 13 can flow. Has holes.

In addition, these connecting portions 448 are
As shown in FIGS. 27 to 27, seal connecting portions 450 are respectively mounted at the distal ends. These seal connecting portions 450 are formed in a substantially cylindrical shape in which the connecting portions 448 are fitted in a substantially liquid-tight manner on the inner peripheral side.
Is provided.

(Configuration of Inkjet Head) FIG. 28
FIG. 2 is an exploded perspective view showing an inkjet head. FIG. 29 is a schematic diagram for explaining the operation of discharging the filter element material of the ink jet head corresponding to the cross section of the ink jet head. FIG. 29A shows a state before the filter element material is discharged, and FIG. FIG. 29C shows a state in which the piezoelectric element is contracted to discharge the filter element material, and FIG. 29C shows a state immediately after the filter element material is discharged. FIG. 30 is an explanatory diagram illustrating the discharge amount of the filter element material in the inkjet head. FIG. 31 is a schematic diagram illustrating the arrangement of the inkjet heads. FIG. 32 is a partially enlarged view of FIG.

The ink jet head 421 has a substantially rectangular holder 451 as shown in FIG. The holder 451 is provided with two rows of, for example, 180 piezoelectric vibrators 452 such as piezo elements along the longitudinal direction. The holder 451 has a through hole 45 through which the filter element material 13 as ink flows in the flow path 438 of the printed circuit board 435 and in the approximate center of both sides in the longitudinal direction.
3 are provided.

As shown in FIG. 28, a sheet-like elastic plate 455 made of synthetic resin is integrally provided on the upper surface of the holder 451 on which the piezoelectric vibrator 452 is located. . The elastic plate 455 has a through hole 45.
3 are provided with communication holes 456 respectively.
The elastic plate 455 has an engaging hole 45 that engages with a positioning claw 457 protruding from approximately four corners of the upper surface of the holder 451.
8 are provided, are positioned on the upper surface of the holder 451, and are integrally attached.

Further, on the upper surface of the elastic plate 455, a flat channel forming plate 460 is provided. The flow path forming plate 460 includes 180 nozzle grooves 461 provided in two rows in series in the longitudinal direction of the holder 451 corresponding to the piezoelectric vibrators 452 in a longitudinal direction in the width direction of the holder 451. On one side of 461, an opening 462 provided in the longitudinal direction of the holder in a longitudinal direction and a flow hole 463 connected to the communication hole 456 of the elastic plate 455 are provided. And the elastic plate 4
55 is provided with an engagement hole 458 that engages with a positioning claw 457 protruding from approximately four corners of the upper surface of the holder 451, and is positioned and integrally attached to the upper surface of the holder 451 together with the elastic plate 455. .

A substantially flat nozzle plate 465 is provided on the upper surface of the flow path forming plate 460. A substantially circular nozzle 466 corresponding to the nozzle groove 461 of the flow path forming plate 460 has a holder 451 on the nozzle plate 465.
Are arranged in series in a longitudinal range of 25.4 mm (1 inch) with 180 pieces in the longitudinal direction. In addition, the nozzle plate 465 is provided with an engagement hole 458 that engages with a positioning claw 457 protruding from approximately four corners of the upper surface of the holder 451, and is provided on the upper surface of the holder 451 together with the elastic plate 455 and the flow path forming plate 460. It is positioned and attached integrally.

The openings 462 of the flow path forming plate 460 are formed by the elastic plate 455, the flow path forming plate 460, and the nozzle plate 465, as schematically shown in FIG.
And a liquid reservoir 467 is formed in the nozzle groove 461.
Continuous through. As a result, the ink-jet head 421 increases the pressure in the nozzle groove 461 by the operation of the piezoelectric vibrator 452, and causes the filter element material 13 to pass through the nozzle at a rate of 7 ± 2 m / s at a droplet volume of 2 to 13 pl, for example, about 10 pl. Discharge. That is, as shown in FIG. 29, by applying a predetermined application voltage Vh in a pulse shape to the piezoelectric vibrator 452, the piezoelectric vibrator 452 shown in FIGS.
As shown in (C), by appropriately expanding and contracting the piezoelectric vibrator 452 in the direction of arrow Q, the filter element material 13 as ink is pressurized and ejected from the nozzle 466 as a predetermined amount of droplets 8.

In addition, the ink jet head 421
As described in the above embodiment, there is a variation in the discharge amount in which the discharge amount at both ends in the arrangement direction increases as shown in FIG. For this reason, for example, the nozzle 466 within a range where the variation in the discharge amount is within 5%, that is, 1
Control is performed so that the filter element material 13 is not ejected from the nozzles 466 each of 0.

As shown in FIGS. 22 to 26, the head main body 430 constituting the head unit 420 has a head device 4 having an ink jet head 421.
33 are arranged side by side. As shown schematically in FIG. 31, the arrangement of the head device 433 on the carriage 426 is Y in the sub-scanning direction.
It is in a state of being arranged while being offset in a direction inclined toward the X-axis direction which is a main scanning direction orthogonal to the Y-axis than the axial direction. That is, for example, six pieces of walking are arranged side by side in a direction slightly inclined from the Y-axis direction, which is the sub-scanning direction, and a plurality of such rows are arranged, for example, two rows. This is because the width of the head device 433 in the short side direction is wider than that of the inkjet head 421 and the inkjet heads 421 adjacent to each other are different.
This is an arrangement method conceived from the situation where the arrangement interval between the nozzles cannot be narrowed, but the rows of the nozzles 466 must be continuously arranged in the Y-axis direction.

Further, the head main body 430 is positioned such that the head device 433 is in a state where the longitudinal direction of the ink jet head 421 is inclined in a direction intersecting the X-axis direction, and the connector 441 is on the opposite side to the opposite direction. They are arranged approximately point-symmetrically in a state where they do. The inclined arrangement state of the head device 433 is, for example, the inkjet head 421.
Is inclined by 57.1 ° with respect to the X-axis direction.

The head devices 433 are arranged so as not to be substantially staggered, that is, not to be arranged in parallel in the arrangement direction. 23 to 26 and FIG.
As shown in FIG. 1, twelve inkjet heads 421
The ink-jet heads 421 are arranged in two rows and arranged alternately in the Y-axis direction so that the nozzles 466 are continuously arranged in the Y-axis direction.

More specifically, this will be described in detail with reference to FIGS. 31 and 32. Here, in the inkjet head 421, the arrangement direction of the nozzles 466, which is the longitudinal direction, is inclined with respect to the X-axis direction. For this reason, in the first row of the two rows of nozzles 466 provided in the inkjet head 421, 11
On the straight line in the X-axis direction where the nozzle 466 is located, 2
There is a region A where the other of the nozzles 466 in the row is located within 10 positions where no ejection is performed (A in FIG. 32). That is, 1
In one inkjet head 421, a region A where two nozzles 466 do not exist on a straight line in the X-axis direction occurs.

Therefore, as shown in FIGS. 31 and 32, the area B (FIG. 32) where two nozzles 466 are located on a straight line in the X-axis direction with one ink jet head 421.
In B) in the middle, the head devices 433 in a row are not arranged in a parallel state in the X-axis direction. Further, only one area A is located on a straight line in the X-axis direction of one row of head devices 433, and only one area is located on a straight line in the X-axis direction of the other row of head devices 433. The region A is located in parallel with each other in the X-axis direction, and the inkjet heads 421 in one row and the inkjet heads 4 in the other row
21 and a total of two nozzles 46 on a straight line in the X-axis direction.
6 is located. That is, in the area where the inkjet heads 421 are arranged, the nozzles 466 are arranged in a staggered manner so that a total of two nozzles 466 are always located on a straight line in the X-axis direction at any position. The region X of the nozzle 466 that does not discharge the filter element material 13 is
It is not counted as the number of the two nozzles 466 on the straight line in the X-axis direction.

As described above, two nozzles 466 for ejecting ink in the X-axis direction in which the main scanning is performed are located on a straight line. As will be described later, ink is ejected from the two nozzles to one location. It will be ejected. If one element is constituted only by ejection from one nozzle, the variation in the ejection amount between nozzles leads to the variation in the characteristic of the element and the deterioration of the yield. Thus, if one element is formed by ejection from different nozzles, In addition, the dispersion of the discharge between the nozzles can be dispersed, and the characteristics can be made uniform between the elements and the yield can be improved.

(Configuration of Ink Supply Unit) Ink supply unit 43
23. As shown in FIGS. 23 to 26, a pair of flat mounting plates 471 provided corresponding to two rows of the head main body 430, and a plurality of supply main bodies mounted on these mounting plates 471, respectively. 472. The supply main body 472 has an advancing and retreating portion 474 having a substantially elongated cylindrical shape. The advancing / retracting portion 474 is attached movably along the axial direction with the attachment jig 473 penetrating the attachment plate 471. Further, the advancing / retreating portion 474 of the supply main body 472 is provided.
Is mounted on the mounting plate 4 by a coil spring 475, for example.
It is urged and attached in a direction to advance from 71 to the head device 433. In FIG. 23, for convenience of explanation, the ink supply unit 431 includes two rows of head devices 43.
3 is shown only for one column, and the other is omitted.

A flange 476 is provided at an end of the advancing / retreating portion 474 on the side facing the head device 433. The flange portion 476 protrudes in a flange shape on the outer peripheral edge of the advance / retreat portion 474, and the end surface thereof is attached to the seal member 449 of the ink introduction portion 443 of the head device 433 by the coil spring 475.
Abuts almost liquid-tight against the urging of. In addition, the advance / retreat unit 474
A joint 477 is provided at the end opposite to the side where the flange 476 is provided. This joint 477 is connected to one end of a supply pipe 478 through which the filter element material 13 flows, as schematically shown in FIG.

As described above, this supply pipe 478 is wired to the sub-scanning driving device 427 so as not to affect the movement of the head unit 420 as schematically shown in FIG. As schematically indicated by a chain line arrow, the sub-scanning driving device 427
20, a pipe is provided at substantially the center between the ink supply units 431 arranged in two rows from above, and furthermore, a radial pipe is provided, and the leading end is connected to the joint 477 of the ink supply unit 431.

Then, the ink supply section 431 supplies the filter element material 13 flowing through the supply pipe to the ink introduction section 443 of the head device 433. Further, the filter element material 1 supplied to the ink introduction portion 443
3 is supplied to the ink-jet head 421, and is discharged from the nozzles 466 of the electrically controlled ink-jet head 421 in the form of droplets 8 as appropriate.

[Color Filter Manufacturing Operation] (Preprocessing) Next, the operation of forming the color filter 1 using the color filter manufacturing apparatus of the above embodiment will be described with reference to the drawings. FIG. 34 is a manufacturing process sectional view for explaining a procedure for manufacturing the color filter 1 using the above-described color filter manufacturing apparatus.

First, the surface of a mother substrate 12, which is a transparent substrate made of non-alkali glass having a thickness of 0.7 mm, a vertical dimension of 38 cm, and a horizontal dimension of 30 cm, is heated with concentrated sulfuric acid and 1 mass of hydrogen peroxide solution. Wash with the washing solution to which% has been added. After this washing, it is rinsed with pure water and air-dried to obtain a clean surface. A chromium film having an average thickness of 0.2 μm is formed on the surface of the mother substrate 12 by, for example, a sputtering method to obtain the metal layer 6a (procedure S1 in FIG. 34).

After drying the mother substrate 12 on a hot plate at 80 ° C. for 5 minutes, a photoresist layer (not shown) is formed on the surface of the metal layer 6a by, for example, spin coating. For example, a mask film (not shown) in which a required matrix pattern shape is drawn is brought into close contact with the surface of the mother substrate 12, and is exposed to ultraviolet light. next,
The exposed mother substrate 12 is immersed in an alkali developing solution containing, for example, potassium hydroxide at a ratio of 8% by mass,
The unexposed portion of the photoresist is removed, and the resist layer is patterned. Subsequently, the exposed metal layer 6a is removed by etching using, for example, an etching solution containing hydrochloric acid as a main component. Thus, the light-shielding layer 6b, which is a black matrix having a predetermined matrix pattern, is obtained (procedure S2 in FIG. 34). The thickness of the light shielding layer 6b is approximately 0.2 μm, and the width of the light shielding layer 6b is approximately 22 μm.
μm.

The mother substrate 1 provided with the light shielding layer 6b
Further, a negative transparent acrylic-based photosensitive resin composition 6c is formed on the second resin 2 by, for example, a spin coating method (FIG. 3).
Step S3). After prebaking the mother substrate 12 provided with the photosensitive resin composition 6c at 100 ° C. for 20 minutes,
Ultraviolet light exposure is performed using a mask film (not shown) in which a predetermined matrix pattern shape is drawn. Then, the unexposed portion of the resin is developed with, for example, the alkaline developer described above, rinsed with pure water, and then spin-dried.
After baking as final drying, for example, at 200 ° C. for 3 hours
0 minutes, the resin portion is sufficiently cured, and the bank layer 6
forming d. The average thickness of the bank layer 6d is about 2.
7 μm and the width is about 14 μm. This bank layer 6d
The light-shielding layer 6b and the light-shielding layer 6b form the partition 6 (procedure S4 in FIG. 34).

The light shielding layer 6b and the bank layer 6 obtained above
In order to improve the ink wettability of the filter element forming region 7 (particularly the exposed surface of the mother substrate 12), which is the colored layer forming region partitioned by d, dry etching, that is, plasma treatment is performed. Specifically, for example, a high voltage is applied to a mixed gas obtained by adding 20% of oxygen to helium, an etching spot is formed by plasma treatment, and etching is performed by passing the etching spot where the mother substrate 12 is formed. Twelve pretreatment steps are performed.

(Discharge of Filter Element Material)
The filter element material of red (R), green (G), and blue (B) is inkjet-printed in the filter element forming region 7 formed by partitioning the partition 6 of the mother substrate 12 on which the above-described pretreatment is performed. It is introduced, that is, discharged by the method (procedure S5 in FIG. 34).

In discharging the filter element material by the ink jet method, the head unit 420 is assembled and formed in advance. Then, in each of the droplet discharge processing devices 405R, 405G, and 405B of the droplet discharge device, the discharge amount of the filter element material 13 discharged from one nozzle 466 of each inkjet head 421 is set to a predetermined amount, for example, about 10 pl. Adjust it to On the other hand, the partition walls 6 are formed in a grid pattern on one surface of the mother substrate 12 in advance.

Then, the mother substrate 12, which has been pre-processed as described above, is first carried into the R-color droplet discharge processing device 405R by a transfer robot (not shown), and is placed on the base in the droplet discharge processing device 405R. Place on. The mother substrate 12 placed on the pedestal portion is positioned and fixed by, for example, suction. The pedestal holding the mother substrate 12 is checked by various cameras or the like for the position of the mother substrate 12, and the main scanning drive device 4 is set to a predetermined position as appropriate.
25 is controlled and moved. Also, the sub-scanning driving device 427
The head unit 420 is moved as appropriate to recognize its position. Thereafter, the head unit 420 is moved in the sub-scanning direction, and the ejection state from the nozzle 466 is detected by the missing dot detection unit 487, and it is moved to the initial position after recognizing that no ejection failure has occurred.

Thereafter, the mother substrate 12 held on the pedestal portion moved by the main scanning drive device 425 is scanned in the X direction, and the head unit 420 is moved relative to the mother substrate 12 while being appropriately moved. Inkjet head 4
The filter element material 13 is appropriately discharged from a predetermined nozzle 466 of 21, and is filled in a concave portion defined by the partition 6 of the mother substrate 12. The discharge from the nozzle 466 is performed by a control device (not shown) in the nozzle 4 shown in FIG.
The filter element material 13 is controlled not to be discharged from a predetermined region X located at both ends in the disposing direction of 66, for example, ten nozzles 466 at both ends, and a relatively uniform discharge amount is located at an intermediate portion. It discharges from 160 pieces.

Also, the ejection from the nozzles 466 is performed on a straight line in the scanning direction, that is, two nozzles 46 on a scanning line.
6 is located, so that one nozzle 46
Since two droplets are ejected as six to two dots, more specifically, one dot from one nozzle 466, a total of eight droplets are ejected. At each one scanning movement, the ejection state is detected by the dot missing detection unit 487 to check whether dot missing has occurred.

When the dot missing is not recognized, the operation of moving the head unit 420 in the sub-scanning direction by a predetermined amount and moving the pedestal holding the mother substrate 12 again in the main scanning direction and discharging the filter element material 13 is repeated. The filter element 3 is formed in a predetermined filter element forming area 7 of a predetermined color filter forming area 11.

(Drying / Curing) The mother substrate 12 from which the R-color filter element material 13 has been discharged is taken out of the droplet discharge processing device 405R by a transfer robot (not shown) and is subjected to a multi-stage bake furnace (not shown). The filter element material 13 is dried at, for example, 120 ° C. for 5 minutes. After the drying, the transport robot takes out the mother substrate 12 from the multi-stage baking furnace and transports it while cooling. Thereafter, the droplet discharge processing device 405G for G color and the droplet discharge processing device 4 for B color sequentially from the droplet discharge processing device 405R.
The filter element material 13 is conveyed to 05B, and the G and B color filter element materials 13 are sequentially discharged to a predetermined filter element formation region 7 in the same manner as in the case of forming the R color. Then, the mother substrate 12 from which the filter element materials 13 of each of the three colors are discharged and dried is collected, and heat treatment is performed, that is, the filter element materials 13 are solidified and fixed by heating (FIG. 34).
Middle procedure S6).

(Formation of Color Filter) Thereafter, the protective film 4 is formed on substantially the entire surface of the mother substrate 12 on which the filter elements 3 are formed. Further, I
The electrode layer 5 is formed in a required pattern by TO (Indium-Tin Oxide). Thereafter, the color filter forming region 11 is separately formed.
A plurality of color filters 1 are cut out and formed every time (step S7 in FIG. 34). The substrate on which the color filter 1 is formed is, as described in the embodiment above,
It is used as one of a pair of substrates in a liquid crystal device as shown in FIG.

[Effects of Color Filter Manufacturing Apparatus] According to the eighth embodiment shown in FIGS.
The following operational effects are obtained in addition to the operational effects of the above embodiments.

That is, a plurality of nozzles 466 are provided on a substantially straight line, and a plurality of ink jet heads 421 arranged in a predetermined direction in a rectangular shape having a longitudinal direction in the arrangement direction of the nozzles 466 are arranged in the ink jet head. In a state in which one surface of the head 421 on which the nozzle 466 is provided is opposed to the surface of the mother substrate 12 which is an object to be ejected with a predetermined gap therebetween, in a direction intersecting the longitudinal direction of the inkjet head 421, and The head 421 is relatively moved along a direction intersecting the arrangement direction of the heads 421 along the surface of the mother substrate 12 so as to be moved from the nozzle 466 to the surface of the mother substrate 12 with a liquid material having fluidity. A certain filter element material 13 is discharged. For this reason, the carriage element 426 holding the plurality of inkjet heads 421 can discharge the filter element material 13 from the plurality of inkjet heads 421 during the movement along the surface of the mother substrate 12. The scanning time can be reduced, the ejection efficiency can be improved, and the manufacturing time of the electro-optical device such as the color filter 1 can be reduced, as compared with the case where the surface of the mother substrate 12 is moved using an ink-jet head having a rectangular shape.

Further, it is possible to substitute a plurality of conventional standard products without using a special long (long) ink jet head, thereby reducing costs. Since the production yield of an inkjet head with a long dimension is extremely low,
Although it will be an expensive component, the production yield of the inkjet head 421 having a short dimension is better than that,
In the present invention, since only a plurality of the ink jet heads are used and arranged so as to form a substantially long ink jet head, the cost can be significantly reduced. Furthermore, for example, the arrangement direction and the number of the inkjet heads 421 arranged side by side, the number and the interval of the nozzles 466 used for ejection (the pitch of the pixels can be adjusted by using one or every other nozzle 466) By setting) as appropriate, it becomes possible to correspond to the area where the filter element material 13 is ejected even for the color filters 1 having different sizes, pixel pitches and arrangements, thereby improving versatility. In addition, since the inkjet heads 421 are arranged side by side in a direction intersecting the main scanning direction by being inclined, the inkjet head row 22 and the carriage 426 holding the inkjet head row 426 are not increased in size. It does not need to be converted.

Since each of the ink jet heads 421 is moved in a state of being inclined with respect to the moving direction, the pitch between the nozzles 466 of the ink jet head 421 is formed on the mother substrate 12. The pitch can be matched.
If the pitch between the nozzles and the pitch between the elements are geometrically matched in this manner, it is advantageous since the position of the arrangement direction of the nozzles 466 need not be controlled in the sub-scanning direction Y. Further, since the filter element material 13 is inclined, the pitch, which is the interval at which the filter element material 13 is ejected, becomes narrower than the pitch between the nozzles. When used for a display device as a device, a more detailed display mode can be obtained, and a favorable display device can be obtained. Then, by appropriately setting the inclination angle, the dot pitch for drawing is appropriately set, and versatility can be improved.

Further, since the individual ink jet heads 421 are not tilted, but the entire carriage 426 is tilted, the nozzles 466 closer to the mother substrate 12 and the nozzles 466 farther from the mother substrate 12 are not tilted. The distance is smaller than in the case where the entire carriage 426 is inclined, and the time for scanning, which is movement along the mother substrate 12, by the carriage 426 can be reduced.

Then, the plurality of ink jet heads 42
By using one having substantially the same shape as 1,
Even if one kind of the ink jet heads 421 is arranged side by side as appropriate, it is possible to correspond to a region where the filter element material 13 is discharged, so that the configuration can be simplified, manufacturability can be improved, and cost can be reduced. In addition, the fact that these ink jet heads 421 have the same number of nozzles 466 and that the nozzles 466 are formed at the same position is more efficient when assembling the ink jet head 421 with respect to the carriage 426, and the assembling accuracy is increased. Therefore, it is preferable. Furthermore, if products manufactured through the same manufacturing / assembly process are used, there is no need to manufacture a special product, and the cost can be reduced.

Further, a plurality of ink jet heads 421
Are inclined in the same direction with respect to the direction in which the surface of the mother substrate 12 relatively moves, so that the same discharge region of the plurality of filter element materials 13 can be easily formed in one region. Discharge efficiency can be improved.

Further, for example, since a plurality of ink jet heads 421 are arranged so as to form a plurality of rows in a zigzag manner in the moving direction, a ready-made ink jet head 421 is used without using a special long ink jet head. Also, there is no region where the filter element material 13 is not ejected between the inkjet heads 421 without interference between the adjacent inkjet heads 421, and continuous ejection of the filter element material 13 in good condition, that is, continuous drawing can be performed. Note that, for example, by disposing a plurality of filters in the moving direction, it becomes easy to discharge the filter element material 13 from different inkjet heads 421 to the same location, and the discharge amount is averaged by being discharged repeatedly. As a result, it is possible to obtain an electro-optical device which can obtain good discharge, can be made uniform in a plane, and can obtain a good display image and the like.

Further, a plurality of ink jet heads 421 provided on a surface with a plurality of nozzles 466 for discharging the filter element material 13 which is, for example, ink as a liquid material having fluidity are used.
In a state where one surface provided with one nozzle 466 is opposed to the surface of the mother substrate 12 as an object to be ejected through a predetermined gap, the surface is relatively moved along the surface of the mother substrate 12,
The same filter element material 13 is discharged from each nozzle 466 of the plurality of inkjet heads 421 onto the surface of the mother substrate 12. For this reason, for example, it is possible to discharge the filter element material 13 over a wide range using the inkjet head 421 of substantially the same standard product, and a plurality of conventional standard products can be used without using a special long inkjet head. The use can be substituted, and the cost can be reduced. Further, for example, by appropriately setting the number of arrangement directions in which the ink jet heads 421 are arranged side by side, it is possible to correspond to the region where the filter element material 13 is discharged, and the versatility can be improved.

Also, by using the ink jet head 421 in which the nozzles 466 are arranged on a straight line at substantially equal intervals, for example, a stripe type, a mosaic type, a delta type, etc.
It is possible to easily draw a configuration having a predetermined regularity.

Further, in the configuration of the ink jet head 421 in which the nozzles 466 are arranged linearly at substantially equal intervals, the nozzles 466 are provided linearly at substantially equal intervals along the longitudinal direction of the long rectangular ink jet head 421. Therefore, the size of the ink jet head 421 can be reduced, and for example, interference with the adjacent ink jet heads 421 and other parts can be prevented, and the size can be easily reduced.

The plurality of ink-jet heads 421 are arranged in such a manner that the directions of the nozzles 466 are substantially parallel to each other.
Are arranged on the carriage 426 to form the head unit 420, so that a plurality of ejection regions of the same filter element material 13 can be easily formed in one region without using a special long inkjet head. further,
It is possible to discharge the filter element material 13 from one of the different inkjet heads 421 in one place in a superposed manner, so that the discharge amount in the discharge region can be easily averaged, and stable and good drawing can be obtained.

Further, since the nozzles 466 are provided at substantially equal intervals, a substantially uniform dot matrix is formed in the ejection area, and for example, a stripe type, a mosaic type, a delta type, etc.
Drawing of a configuration having a predetermined regularity can be easily obtained.

Then, the ink jet head 421 provided with a plurality of nozzles 466 for discharging the filter element material 13 which is a liquid material having fluidity, for example, ink, is mounted on the nozzle 4 of the ink jet head 421.
The mother board 1 as an object to be ejected is provided with one surface provided with 66.
2 is moved along the surface of the mother substrate 12 in a state of facing the surface of the mother substrate 12 with a predetermined gap therebetween, and a plurality of, for example, two nozzles 466 positioned on a straight line along the relative movement direction. The filter element material 13 is discharged. Therefore, a configuration in which the filter element material 13 is discharged from two different nozzles 466 in an overlapping manner is obtained,
Even if there is a variation in the discharge amount among the plurality of nozzles 466, the discharge amount of the discharged filter element material 13 is averaged, the dispersion can be prevented, and a uniform discharge can be obtained in a planar manner. An electro-optical device with uniform quality and good characteristics can be obtained.

Further, an ink jet head 421 provided with a plurality of nozzles 466 for discharging the filter element material 13 on one surface in a substantially straight line is used, and one surface of the ink jet head 421 provided with the nozzles 466 is provided on a mother substrate as an object to be discharged. 12 is moved along the surface of the mother substrate 12 in a state of facing the surface of the ink jet head 421 with a predetermined gap therebetween, and each nozzle 466 of the inkjet head 421 is moved.
Of the nozzles 466, the surface of the mother substrate 12 is located at a predetermined region XX at both ends in the disposing direction, for example, from the nozzles 466 located at an intermediate portion other than the predetermined region XX without discharging from the ten nozzles 466 on both sides. The filter element material 13 is discharged. With this configuration, a predetermined area located at both ends in the disposing direction of the nozzle 466 where the discharge amount is particularly large is not discharged from the ten nozzles 466 at both ends, and an intermediate portion where the discharge amount is relatively uniform The nozzle element 466 is used to discharge the filter element material 13, so that the color filter 1 can be discharged uniformly on the surface of the mother substrate 12 in a plane, and the color filter 1 having a uniform quality in the plane can be obtained. Good display can be obtained with a display device that is an electro-optical device.

The nozzle 46 having a discharge amount that is at least 10% larger than the average discharge amount of the filter element material 13
Since the liquid is not ejected from the liquid material 6, even if a functional liquid material such as a filter element material 13 of the color filter 1, an EL light emitting material, or an electrophoresis device containing charged particles is used as the liquid material, the characteristics do not vary. As a result, good characteristics can be reliably obtained as an electro-optical device such as a liquid crystal device or an EL device.

Further, since the filter element material 13 is discharged from each nozzle 466 within ± 10% of the average value of the discharge amount, the discharge amount is relatively uniform, and the discharge amount is relatively uniform. An electro-optical device that is uniformly discharged and has good characteristics can be obtained.

Further, a dot missing detection unit 487 is provided, and the filter element material 13 from the nozzle 466 is provided.
Since the discharge of the filter element material 13 is detected, the discharge unevenness of the filter element material 13 can be prevented.

Then, an optical sensor is provided in the dot missing detection unit 487, and the passage of the filter element material 13 in a direction intersecting the discharge direction of the filter element material 13 is detected by this optical sensor. Even during the process of discharging the filter element, the discharge state of the filter element material 13 can be reliably recognized with a simple configuration, the discharge unevenness of the filter element material 13 can be prevented, and a drawing that is a reliable and good discharge of the filter element material 13 can be obtained. Can be.

Furthermore, the mother substrate 12 is
Before and after the step of discharging the filter element material 13, the dot missing detection unit 487 detects the discharge of the filter element material 13, so that the discharge state immediately before and immediately after the discharge of the filter element material 13 can be detected. Can reliably be recognized, and dot omission can be reliably prevented to obtain good drawing. It should be noted that the discharge may be performed only before or after the discharge configuration.

Further, since the missing dot detection unit 487 is provided on the main scanning direction side of the head unit 420, the distance for moving the head unit 420 for detecting the ejection state of the filter element material is short, and the ejection distance is small. Can be simply configured to continue moving in the main scanning direction, and dot missing detection can be efficiently and simply configured.

The plurality of ink jet heads 42
1 are arranged in the same direction while being inclined in a direction intersecting with the main scanning direction, so that the pitch, which is the interval at which the filter element material 13 is discharged, is narrower than the pitch between the nozzles.
When the mother substrate 12 onto which 3 is discharged is used for a display device or the like, a more detailed display mode can be obtained. Furthermore, interference between adjacent inkjet heads 421 can be prevented, and miniaturization can be easily achieved. Then, by appropriately setting the inclination angle, the dot pitch for drawing is appropriately set, and versatility can be improved.

Further, since the ink jet heads 421 are arranged in two rows in a point-symmetric manner, the filter element material 13
The supply pipe 478 for supplying the nozzles can be integrated to the vicinity of the head unit 420, and the assembly and maintenance of the apparatus can be easily performed. Further, the wiring of the electric wiring 442 for controlling the ink jet head 421 is formed on both sides of the head unit 420, so that the influence of electric noise due to the wiring can be prevented, and good and stable drawing can be obtained.

Furthermore, a plurality of ink jet heads 42
1 is disposed on one end of the strip-shaped printed circuit board 435 and the connector 441 is disposed on the other end, so that even if the connectors are arranged on a plurality of straight lines, the connectors 441 can be disposed without interference and downsizing can be achieved. At the same time, a position where the nozzle 466 does not exist in the main scanning direction is not formed, and an array of continuous nozzles 466 can be obtained, and there is no need to use a special inkjet head having a long dimension.

Since the connector 441 is disposed symmetrically with respect to the point so as to be located on the opposite side, the influence of electric noise at the connector 441 can be prevented, and good and stable drawing can be obtained.

The functions and effects of the eighth embodiment have the same corresponding functions and effects as long as they have the same configuration in the first to seventh embodiments.

(Ninth Embodiment) Next, a method of manufacturing an electro-optical device according to the present invention will be described with reference to the drawings.
Note that an active matrix display device using an EL display element will be described as an electro-optical device. Prior to the description of the method of manufacturing the display device, the configuration of the manufactured display device will be described.

[Structure of Display Device] FIG. 35 is a circuit diagram showing a part of an EL device in an apparatus for manufacturing an electro-optical device according to the present invention. FIG. 36 is an enlarged plan view illustrating a planar structure of a pixel region of the display device.

That is, in FIG. 35, reference numeral 501 denotes EL
The display device 501 is an active matrix type display device using an EL display element as a device. The display device 501 has a plurality of scanning lines 503 on a transparent display substrate 502 which is a substrate, and intersects the scanning lines 503. A plurality of signal lines 504 extending in the direction and a plurality of common power supply lines 505 extending in parallel to the signal lines 504 are arranged. A pixel region 501A is provided at each intersection of the scanning line 503 and the signal line 504.

For the signal line 504, a data side drive circuit 507 having a shift register, a level shifter, a video line, and an analog switch is provided. For the scanning line 503, a scanning driver circuit 508 having a shift register and a level shifter is provided. In each of the pixel regions 501A, a switching thin film transistor 509 in which a scanning signal is supplied to a gate electrode through a scanning line 503 and an image signal supplied from a signal line 504 through the switching thin film transistor 509 are stored and held. Storage capacity cap
The current thin film transistor 510 in which the image signal held by the storage capacitor cap is supplied to the gate electrode
And a common power supply line 50 when electrically connected to the common power supply line 505 through the current thin film transistor 510.
A pixel electrode 511 into which a drive current flows from 5, and a light emitting element 513 sandwiched between the pixel electrode 511 and the reflective electrode 512 are provided.

With this configuration, when the scanning line 503 is driven and the switching thin film transistor 509 is turned on,
The potential of the signal line 504 at that time is held in the storage capacitor cap. The on / off state of the current thin film transistor 510 is determined according to the state of the storage capacitor cap. Then, a current flows from the common power supply line 505 to the pixel electrode 511 through the channel of the current thin film transistor 510, and further, a current flows to the reflection electrode 512 through the light emitting element 513. Thus, the light emitting element 513 emits light according to the amount of current flowing therethrough.

Here, the pixel region 501A is
As shown in FIG. 36 which is an enlarged plan view in a state in which the light emitting element 12 and the light emitting element 513 are removed, four sides of the pixel electrode 511 having a rectangular planar state are formed by a signal line 504, a common power supply line 505, a scanning line 503, and not shown. The arrangement is surrounded by the scanning lines 503 for the other pixel electrodes 511.

[Manufacturing Process of Display Device] Next, a procedure of a manufacturing process for manufacturing an active matrix type display device using the EL display element will be described. FIG. 37 to FIG. 39 are manufacturing process sectional views showing the procedure of the manufacturing process of an active matrix type display device using an EL display element.

(Pretreatment) First, as shown in FIG. 37 (A), tetraethoxysilane (TEOS) is applied to a transparent display substrate 502 as necessary.
CVD (Chem.
ical Vapor Deposition) method with a thickness of about 20
A base protection film (not shown), which is a silicon oxide film having a thickness of 00 to 5000 angstroms, is formed. Next, the display substrate 5
02 is set to about 350 ° C., and the semiconductor film 5 which is an amorphous silicon film having a thickness of about 300 to 700 Å is formed on the surface of the underlying protective film by a plasma CVD method.
20a is formed. Thereafter, a crystallization step such as laser annealing or a solid phase growth method is performed on the semiconductor film 520a to crystallize the semiconductor film 520a into a polysilicon film. Here, in the laser annealing method, for example, a line beam having a beam length of about 400 nm using an excimer laser is used, and the output intensity is about 200 mJ / cm 2 . With respect to the line beam, the line beam is scanned such that a portion corresponding to about 90% of the peak value of the laser intensity in the short dimension direction overlaps each region.

Then, as shown in FIG. 37B, the semiconductor film 520a is patterned to form an island-shaped semiconductor film 520.
b is formed. On the surface of the display substrate 502 on which the semiconductor film 520b is provided, a thickness of about 600 to 600 μm is formed by a plasma CVD method using TEOS or oxygen gas as a source gas.
A gate insulating film 521a of 1500 angstrom silicon oxide film or nitride film is formed. Although the semiconductor film 520b serves as a channel region and a source / drain region of the current thin film transistor 510, a semiconductor film (not shown) serving as a channel region and a source / drain region of the switching thin film transistor 509 is formed at different cross-sectional positions. ing. That is, in the manufacturing process shown in FIGS. 37 to 39, two types of switching thin film transistors 509 and current thin film transistors 510 are formed at the same time, but since they are formed in the same procedure, only the current thin film transistor 510 will be described below. The description of the switching thin film transistor 509 is omitted.

Thereafter, as shown in FIG. 37C, a conductive film which is a metal film of aluminum, tantalum, molybdenum, titanium, tungsten or the like is formed by a sputtering method and then patterned to form a gate electrode shown in FIG. 51
OA is formed. In this state, high-temperature phosphorus ions are implanted into the semiconductor film 520b in a self-aligned manner with respect to the gate electrode 510A.
b is formed. Note that a portion where the impurity is not introduced becomes the channel region 510c.

Next, as shown in FIG. 37D, after an interlayer insulating film 522 is formed, contact holes 523,5 are formed.
24, and these contact holes 523, 524
Relay electrodes 526 and 527 are buried therein.

Further, as shown in FIG. 37E, a signal line 504, a common power supply line 505, and a scanning line 503 (not shown in FIG. 37) are formed on the interlayer insulating film 522. At this time, each wiring of the signal line 504, the common power supply line 505, and the scanning line 503 is formed to be sufficiently thick without being limited to a thickness required for the wiring. Specifically, each wiring may be formed to have a thickness of, for example, about 1 to 2 μm. Here, the relay electrode 527 and each wiring may be formed in the same step. At this time, the relay electrode 52
6 is formed of an ITO film described later.

Then, an interlayer insulating film 530 is formed so as to cover the upper surface of each wiring, and a contact hole 532 is formed at a position corresponding to the relay electrode 526. An ITO film is formed so as to fill the contact hole 532,
By patterning the TO film, a pixel electrode 511 electrically connected to the source / drain region 510a is formed at a predetermined position surrounded by the signal line 504, the common power supply line 505, and the scanning line 503.

Here, in FIG. 37E, the signal line 504
The portion sandwiched between the common power supply lines 505 corresponds to a predetermined position where the optical material is selectively disposed. A signal line 50 is provided between the predetermined position and its surroundings.
A step 535 is formed by 4 and the common power supply line 505. Specifically, the predetermined position is lower than its surroundings,
A concave step 535 is formed.

(Discharge of EL Light Emitting Material) Next, an EL light emitting material, which is a functional liquid, is discharged on the display substrate 502 on which the above-described pretreatment has been performed by an ink jet method. That is, as shown in FIG. 38A, the functionality for forming the hole injection layer 513A corresponding to the lower layer portion of the light emitting element 140 with the upper surface of the pre-processed display substrate 502 facing upward. The optical material 540A, which is a solution-like precursor dissolved in a solvent as a liquid, is ejected using the inkjet method, that is, the apparatus of each of the above-described embodiments, and is discharged into a predetermined position region surrounded by the step 535. Selectively apply.

As an optical material 540A for forming the hole injection layer 513A to be discharged, polyphenylenevinylene whose polymer precursor is polytetrahydrothiophenylphenylene, 1,1-bis- (4-N, N-diphenyl Tolylaminophenyl) cyclohexane, tris (8-hydroxyquinolinol) aluminum and the like are used.

In this discharge, the liquid optical material 540A having fluidity has a high fluidity similarly to the case where the filter element material 13 is discharged to the partition wall in each of the above-described embodiments. Try to spread in the plane direction,
Since the step 535 is formed so as to surround the position where the optical material 540A is applied, the optical material 540A may not have the step 53 unless the discharge amount per time of the optical material 540A is extremely large.
Spreading beyond the predetermined position beyond 5 is prevented.

Then, as shown in FIG. 38B, the solvent of the liquid optical material 540A is evaporated by heating or light irradiation to form a solid thin hole injection layer 513A on the pixel electrode 511. 38A and 38B are repeated a required number of times to form a hole injection layer 513A having a sufficient thickness as shown in FIG.

Next, as shown in FIG. 39A, with the upper surface of the display substrate 502 facing upward, a functional liquid for forming the organic semiconductor film 513B on the upper layer of the light emitting element 513 is used. The optical material 540B, which is a solution-type organic fluorescent material dissolved in the above-described solvent, is ejected using an inkjet method, that is, using the apparatus of each of the above-described embodiments, and the optical material 540B is discharged in a predetermined position surrounded by the step 535. Selectively. In addition, about this optical material 540B,
As described above, similarly to the ejection of the optical material 540A, it is possible to prevent the optical material 540A from spreading beyond the step 535 to the outside of the predetermined position.

As the optical material 540B for forming the organic semiconductor film 513B to be discharged, cyanopolyphenylenevinylene, polyphenylenevinylene, polyalkylphenylene, 2,3,6,7-tetrahydro-11-
Oxo-1H.5H.11H (1) Penzovirano [6,
7,8-ij] -quinolidine-10-carboxylic acid, 1,
1-bis- (4-N, N-ditolylaminophenyl) cyclohexane, 2-13.4′-dihydroxyphenyl) -3,5,7-trihydroxy-1-benzopyrylium perchlorate, tris (8- (Hydroxyquinolinol) aluminum, 2,3,6,7-tetrahydro-
9-methyl-11-oxo-1H.5H.11H (1)
Benzopyrano [6,7,8-ij] -quinolidine, aromatic diamine derivative (TDP), oxydiazole dimer (OXD), oxydiazole derivative (PB
D), distilarylene derivative (DSA), quinolinol-based metal complex, beryllium-benzoquinolinol complex (Bebq), triphenylamine derivative (MTDAT)
A), distyryl derivatives, pyrazoline dimers, rubrene, quinacridone, triazole derivatives, polyphenylene, polyalkylfluorene, polyalkylthiophene, azomethine zinc complex, polyfilin zinc complex, benzoxazole zinc complex, phenanthroline europium complex and the like are used.

Next, as shown in FIG. 39B, the solvent of the optical material 540B is evaporated by heating or light irradiation to form a thin organic semiconductor film 513B on the hole injection layer 513A. . 39A and 39B are repeated a required number of times, and as shown in FIG. 39C, an organic semiconductor film 513B having a sufficient thickness is formed. The light-emitting element 513 includes the hole injection layer 513A and the organic semiconductor film 513B. Finally, as shown in FIG. 39D, the reflective electrode 512 is formed on the entire surface of the display substrate 502 or in a stripe shape, and the display device 501 is manufactured.

In the embodiment shown in FIGS. 35 to 39, the same operation and effect can be obtained by implementing the same ink-jet system as in the above-described embodiments. Furthermore, when the functional liquids are selectively applied, they can be prevented from flowing out to the surroundings, and can be patterned with high precision.

In the embodiments shown in FIGS. 35 to 39, an active matrix type display device using an EL display element for color display has been described. For example, as shown in FIG. 40, FIG. 39 can be applied to a display device of a single color display.

That is, the organic semiconductor film 513B may be formed uniformly over the entire surface of the display substrate 502. However, even in this case, in order to prevent crosstalk, the hole injection layer 513A must be selectively arranged at each predetermined position, and thus, application using the step 111 is extremely effective. Note that in FIG. 40, FIGS.
The same reference numerals are given to the same configuration as the embodiment shown in FIG.

Further, the display device using the EL display element is not limited to the active matrix type.
A passive matrix type display device as shown in FIG. FIG. 41 shows an EL device in the apparatus for manufacturing an electro-optical device according to the present invention. FIG. 41A shows a plurality of first bus lines 550 and a plurality of second bus lines arranged in a direction perpendicular to the first bus lines 550. FIG. 41B is a plan view showing an arrangement relationship between the wiring 560 and FIG. 41B is a cross-sectional view taken along the line BB of FIG.
In FIG. 41, the same components as those of the embodiment shown in FIGS. 35 to 39 are denoted by the same reference numerals, and duplicate description will be omitted. Further, detailed manufacturing steps and the like are the same as those of the embodiment shown in FIGS. 35 to 39, and therefore illustration and description thereof are omitted.

In the display device of the embodiment shown in FIG. 41, an insulating film 570 such as SiO 2 is provided so as to surround a predetermined position where the light emitting element 513 is provided.
Thus, a step 535 is formed between the predetermined position and the periphery thereof. Therefore, when the functional liquids are selectively applied, they can be prevented from flowing out to the surroundings, and patterning can be performed with high precision.

Further, the active matrix type display device is not limited to the structure of the embodiment shown in FIGS. That is, any configuration such as the configuration shown in FIG. 42, the configuration shown in FIG. 43, the configuration shown in FIG. 44, the configuration shown in FIG. 45, or the configuration shown in FIG. But you can.

The display device shown in FIG.
By forming the step 535 by using the above, patterning can be performed with high accuracy. FIG.
FIG. 40 is a cross-sectional view of a stage in the course of the manufacturing process of manufacturing the display device. The steps before and after the step are substantially the same as those of the embodiment shown in FIGS. 35 to 39, and thus illustration and description thereof are omitted.

In the display device shown in FIG. 42, the pixel electrode 511 is formed thicker than usual, thereby forming a step 535 between the periphery and the periphery. That is, FIG.
In the display device shown in (1), a convex step is formed in which the pixel electrode 511 to which an optical material is applied later is higher than its surroundings. 35 to 39 described above.
Similarly to the embodiment shown in FIG. 1, the hole injection layer 51 corresponding to the lower layer of the light emitting element 513 is formed by the ink jet method.
An optical material 540A, which is a precursor for forming 3A, is discharged and applied to the upper surface of the pixel electrode 511.

However, unlike the embodiment shown in FIGS. 35 to 39, the display substrate 502 is turned upside down, that is, the upper surface of the pixel electrode 511 to which the optical material 540A is applied is directed downward. In the state, the optical material 540
A is applied by discharging. This allows the optical material 54
0A accumulates on the upper surface (the lower surface in FIG. 41) of the pixel electrode 511 due to gravity and surface tension, and does not spread around the pixel electrode 511. Therefore, if solidified by heating or light irradiation,
A thin hole injection layer 513A similar to that in FIG. 38B can be formed, and by repeating this, the hole injection layer 513A is formed. An organic semiconductor film 513B is also formed in a similar manner. For this reason, patterning can be performed with high accuracy using the convex steps. The amounts of the optical materials 540A and 540B may be adjusted not only by gravity and surface tension but also by inertia such as centrifugal force.

The display device shown in FIG. 43 is also an active matrix type display device. FIG. 43 is a cross-sectional view in the middle of a manufacturing process of manufacturing a display device. In the stages before and after this, the same as in the embodiment shown in FIGS. 35 to 39, and the illustration and description thereof are omitted.

In the display device shown in FIG. 43, first, a reflective electrode 512 is formed on a display substrate 502, and an insulating film 570 is formed on the reflective electrode 512 so as to surround a predetermined position where a light emitting element 513 will be arranged later. This forms a concave step 535 in which the predetermined position is lower than its surroundings.

In the same manner as in the embodiment shown in FIGS. 35 to 39, the optical material 5 which is a functional liquid material is provided in the region surrounded by the step 535 by the ink jet method.
The light emitting element 513 is formed by selectively discharging and applying 40A and 540B.

On the other hand, the release layer 58 is provided on the release substrate 580.
1, the scanning line 503, the signal line 504, the pixel electrode 5
11, a switching thin film transistor 509, a current thin film transistor 510, and an interlayer insulating film 530 are formed. Finally, a peeling substrate 580 is provided on the display substrate 502.
This is for transferring the structure peeled from the upper peeling layer 581.

In the embodiment shown in FIG.
3, signal line 504, pixel electrode 511, switching thin film transistor 509, current thin film transistor 510
And optical materials 540A and 540 for interlayer insulating film 530
Damage due to the application of B can be reduced. Note that the present invention can be applied to a passive matrix display element.

The display device shown in FIG. 44 is also an active matrix type display device. FIG. 44 is a cross-sectional view in the middle of the manufacturing process of manufacturing the display device. In the stages before and after this, the embodiment is the same as the embodiment shown in FIGS. 35 to 39, and the illustration and description thereof are omitted.

In the display device shown in FIG. 44, a concave step 535 is formed using the interlayer insulating film 530. For this reason, without increasing the number of new processes,
Since the interlayer insulating film 530 can be used, it is possible to prevent the manufacturing process from being significantly complicated. The interlayer insulating film 530 is made of SiO 2
With UV, O 2 , CF 3 ,
Irradiation with plasma such as Ar is performed, and then the surface of the pixel electrode 511 is exposed.
A, 540B may be selectively discharged and applied. As a result, a strong lyophobic distribution is formed along the surface of the interlayer insulating film 530, and the optical materials 540A and 540B accumulate at predetermined positions due to the action of both the step 535 and the lyophobic property of the interlayer insulating film 530. It will be easier.

In the display device shown in FIG. 45, the hydrophilicity of the liquid material optical material 540A, 540B at a predetermined position to which the liquid material is applied is made relatively stronger than the surrounding hydrophilicity, so that the applied optical material is obtained. The material 540A, 540B is prevented from spreading around. FIG. 45 is a cross-sectional view in the middle of the manufacturing process of manufacturing the display device. In the stages before and after this, the embodiment is the same as the embodiment shown in FIGS. 35 to 39, and the illustration and description thereof are omitted.

In the display device shown in FIG. 45, after forming an interlayer insulating film 530, an amorphous silicon layer 590 is formed on the upper surface thereof. Since the amorphous silicon layer 590 has relatively higher water repellency than ITO forming the pixel electrode 511, the surface of the pixel electrode 511 has a relatively higher hydrophilicity than the surrounding hydrophilicity. A water-repellent / hydrophilic distribution is formed. Then, similarly to the embodiment shown in FIGS. 35 to 39, the upper surface of the pixel electrode 511 is
Liquid optical material 540A, 5 by ink jet method
The light emitting element 513 is formed by selectively discharging and applying 40B, and finally the reflective electrode 512 is formed.

The embodiment shown in FIG. 45 can also be applied to a passive matrix type display element. Further, as in the embodiment shown in FIG. 43, a step of transferring a structure formed over a separation substrate 580 with a separation layer 581 to the display substrate 502 may be included.

The distribution of water repellency and hydrophilicity may be formed of metal, an anodic oxide film, an insulating film such as polyimide or silicon oxide, or another material. In addition,
In the case of a passive matrix type display element, the first bus wiring 550 may be used. In the case of an active matrix type display element, the first bus wiring 550 may be formed using the scanning line 503, the signal line 504, the pixel electrode 511, the insulating film 530, or the light shielding layer 6b. .

The display device shown in FIG. 46 does not improve the patterning accuracy by using the step 535 or the distribution of lyophobic or lyophilic properties, but uses the attractive force or repulsive force due to the potential to improve the patterning accuracy. It is intended to improve. FIG.
FIG. 5 is a cross-sectional view at a stage during the manufacturing process of manufacturing the display device. At the stages before and after this, the illustration and description thereof are omitted as in the embodiment shown in FIGS.

In the display device shown in FIG. 46, signal line 5
By driving the transistor 04 and the common power supply line 505 and appropriately turning on / off a transistor (not shown), a potential distribution is formed in which the pixel electrode 511 has a negative potential and the interlayer insulating film 530 has a positive potential. Then, a positively charged liquid optical material 540A is selectively ejected to a predetermined position by an ink-jet method to form a coating. Thus, since the optical material 540A is charged, not only spontaneous polarization but also a charged charge can be used, and the patterning accuracy can be further improved.

The embodiment shown in FIG. 46 can also be applied to a passive matrix type display element. Further, as in the embodiment shown in FIG. 43, a step of transferring a structure formed over a separation substrate 580 with a separation layer 581 to the display substrate 502 may be included.

Although the potential is applied to both the pixel electrode 511 and the surrounding interlayer insulating film 530, the present invention is not limited to this. For example, as shown in FIG. A positive potential is applied only to the interlayer insulating film 530 without applying a potential, and the liquid optical material 540A
May be applied after being positively charged.
According to the configuration shown in FIG. 47, even after being applied, the liquid optical material 540A can be maintained in a positively charged state without fail. The material 540A can be more reliably prevented from flowing out to the surroundings.

(Other Embodiments) The present invention has been described with reference to the preferred embodiments. However, the present invention is not limited to the above embodiments, and the following modifications may be made. It can be set to any other specific structure and shape as long as the object of the present invention can be achieved.

For example, in each of the embodiments described above, six ink jet heads 20 are provided in the ink jet head row 22 as shown in FIG. 1, but the number of the ink jet heads 20 is smaller or larger. can do.

In the embodiment shown in FIG.
Although the case where a plurality of rows of color filter forming regions 11 are set in the mother substrate 12 is illustrated, the present invention can be applied to a case where one column of color filter forming regions 11 is set in the mother substrate 12. . In addition, the present invention can be applied to a case where only one color filter forming region 11 having substantially the same size as or substantially smaller than the mother substrate 12 is set in the mother substrate 12.

In the color filter manufacturing apparatus shown in FIGS. 9 and 10, for example, the inkjet head array 22 is moved in the main scanning direction X to scan the mother substrate 12 in the main scanning direction, and the mother substrate 12 is moved in the sub-scanning driving device. Y by 21
The main scanning is performed by moving the mother substrate 12 in the Y direction, but the main scanning is performed by moving the mother substrate 12 in the Y direction. The sub-scanning can also be performed by moving in the X direction. Further, the mother substrate 12 is moved without moving the inkjet head array 22, or at least one of the mother substrate 12 is moved relatively in the opposite direction. 12 can be any configuration that moves relatively along the surface.

Further, in the above embodiment, the ink jet head 421 having a structure in which ink is ejected by using the bending deformation of the piezoelectric element is used. However, an ink jet head having any other structure, such as a bubble generated by heating, is used. It is also possible to use an inkjet head or the like that discharges ink.

Further, in the embodiment shown in FIGS. 22 to 32, the ink jet head 421 has been described by providing two rows of nozzles 466 at substantially equal intervals in a substantially straight line. It can be. In addition, they may not be arranged at equal intervals, and may not be arranged in a line on a straight line.

The droplet discharge devices 16 and 401 are used for the production of the color filter 1 and the liquid crystal device 10.
1. EL device 201, FED (Field Emission Displa
y: Field emission display), PDP (Pl
asma Display Panel)
An electrophoretic device, that is, ink, which is a functional liquid material containing charged particles, is discharged into the recesses between the partition walls of each pixel, and a voltage is applied between electrodes arranged so as to sandwich each pixel up and down. A device that displays particles at each pixel by moving particles to one electrode side, a thin CRT, a CRT (Cathode-Ray Tu
It can be used for various electro-optical devices having a substrate (base material) such as a display (cathode ray tube display) and having a step of forming a predetermined layer in a region above the substrate.

The apparatus and method of the present invention can be used not only in an electro-optical device but also in a device having a substrate, and can be used in a process of manufacturing various devices in which a step of discharging droplets onto the substrate can be used. Can be. For example, in order to form electric wiring on a printed circuit board, a liquid metal, a conductive material, a metal-containing paint, etc. are discharged by an ink jet method to form a metal wiring, etc. A structure in which an optical member is formed by discharging a lens by an ink jet method, a structure in which a resist to be applied on a substrate is applied by an ink jet method so that only a necessary portion is applied, and a light is transmitted to a transparent substrate such as plastic. A structure in which a light scattering plate is formed by ejecting and forming scattered projections and minute white patterns by an ink jet method, and RNA (ribonucleic acid: ribonucleic acid) at a spike spot arranged in a matrix on a DNA (deoxyribonucleic acid) chip. ) Is ejected by an ink jet method to produce a fluorescent label probe, and DN
A sample, antibody, DNA (de) is placed in a dot-like position defined on the substrate, such as by hybridization on the A chip.
It can also be used in a configuration where a biochip is formed by ejecting oxyribonucleic acid (deoxyribonucleic acid) or the like by an inkjet method.

Also, as the liquid crystal device 101, a partition wall 6 surrounding a pixel electrode is formed, such as a transistor such as a TFT or an active matrix liquid crystal panel having a TFD active element in a pixel, and a recess formed by the partition wall 6 is formed. And a structure in which a color filter and a conductive material are mixed as ink on a pixel electrode by ejecting ink by an ink jet method to form a color filter 1 by an ink jet method. Any of the electro-optical systems of the liquid crystal device 101, such as a configuration in which the color filter 1 to be formed is formed as a conductive color filter, and a configuration in which spacer particles for maintaining a gap between substrates are ejected and formed by an inkjet method. Also applicable to parts.

Further, the present invention is not limited to the color filter 1,
The EL device 201 can be applied to any other electro-optical device such as the L device 201, and the EL device 201 has a stripe type in which ELs corresponding to three colors of R, G, and B are formed in a strip shape, and as described above, An active matrix display device including a transistor for controlling a current flowing through the light emitting layer for each pixel,
Or what is applied to passive matrix type,
Either configuration is possible.

The electronic apparatus into which the electro-optical device according to each of the above embodiments is incorporated is not limited to, for example, a personal computer 490 as shown in FIG.
Mobile phones 491 and PHS (Personal Handy
phones, electronic notebooks, pagers, POS (Point Of Sales) terminals, IC cards, minidisc players, LCD projectors, engineering work stations (Engineering Work Station:
The present invention can be applied to various electronic devices such as an EWS, a word processor, a television, a viewfinder type or a monitor direct-view type video tape recorder, an electronic desk calculator, a car navigation device, a device having a touch panel, a clock, and a game device.

In addition, specific structures and procedures for implementing the present invention may be other structures and procedures as long as the object of the present invention can be achieved.

[0291]

According to the present invention, a plurality of ink jet heads having a longitudinal direction in the direction of arrangement of a plurality of nozzles provided on a substantially straight line and having a plurality of ink jet heads arranged in a predetermined direction can be used. In a state crossing the longitudinal direction of the inkjet head in a state of facing the object with a gap in between,
And, in order to move relatively along the object to be ejected in a direction intersecting with the arrangement direction of the inkjet head and eject the liquid onto the object to be ejected from the nozzle, for example, one longitudinal Compared to moving the surface of the object using the inkjet head, the scanning time can be shortened, the ejection efficiency can be improved, and each inkjet head is moved in a state inclined with respect to the moving direction. The pitch between the nozzles of the head can be made to match the pitch between the ejected dots.
Further, since the individual inkjet heads are inclined with respect to the moving direction, the distance between the nozzle closer to the object and the nozzle farther from the object is smaller than when the whole is inclined. Thus, the scanning time can be reduced. Further, it is not necessary to increase the size of the entire apparatus.

[Brief description of the drawings]

FIG. 1 is a plan view schematically showing main steps of a manufacturing method performed using an embodiment of a color filter manufacturing apparatus according to the present invention.

FIG. 2 is a perspective view of the inkjet head of FIG.

FIG. 3 is a plan view schematically showing main steps of a manufacturing method performed by using another embodiment of the color filter manufacturing apparatus according to the present invention.

FIG. 4 is a perspective view of the inkjet head of FIG. 3;

FIG. 5 is a plan view schematically showing main steps of a manufacturing method performed using still another embodiment of the color filter manufacturing apparatus according to the present invention.

FIG. 6A is a plan view showing an embodiment of a color filter according to the present invention, and FIG. 6B is a plan view showing an embodiment of a mother substrate on which the color filter is based.

FIG. 7 is a diagram schematically showing a color filter manufacturing process using a cross-sectional portion along the line VII-VII in FIG. 6 (a).

FIG. 8 is a diagram showing an example of the arrangement of picture element pixels of R, G, and B colors in a color filter.

FIG. 9 shows a color filter manufacturing apparatus according to the present invention, a liquid crystal device manufacturing apparatus according to the present invention, and an EL according to the present invention.
FIG. 1 is a perspective view showing an embodiment of a droplet discharge device which is a main part of each manufacturing device such as a device manufacturing device.

FIG. 10 is an enlarged perspective view showing a main part of the apparatus of FIG. 9;

FIG. 11 is a perspective view showing one of the head units provided in the inkjet head of FIG. 1;

FIG. 12 is a perspective view showing a modification of the inkjet head.

13A and 13B are views showing the internal structure of the inkjet head, wherein FIG. 13A is a partially cutaway perspective view, and FIG. 13B is a cross-sectional structure taken along line JJ of FIG.

FIG. 14 is a block diagram showing an electric control system used in the ink jet head device of FIG.

FIG. 15 is a flowchart showing a flow of control executed by the control system of FIG. 14;

FIG. 16 is a perspective view showing still another modified example of the ink jet head.

FIG. 17 is a process chart showing one embodiment of a method for manufacturing a liquid crystal device according to the present invention.

FIG. 18 is an exploded perspective view showing an example of a liquid crystal device manufactured by the method for manufacturing a liquid crystal device according to the present invention.

19 is a cross-sectional view showing a cross-sectional structure of the liquid crystal device according to line IX-IX in FIG.

FIG. 20 is a process chart showing one embodiment of a method for manufacturing an EL device according to the present invention.

21 is a cross-sectional view of the EL device corresponding to the process diagram shown in FIG.

FIG. 22 is a partially cutaway perspective view showing a droplet discharge processing device of the droplet discharge device of the color filter manufacturing apparatus according to the present invention.

FIG. 23 is a plan view showing a head unit of the droplet discharge processing apparatus according to the third embodiment.

FIG. 24 is a side view of the same.

FIG. 25 is a front view of the same.

FIG. 26 is a sectional view of the same.

FIG. 27 is an exploded perspective view showing the head device.

FIG. 28 is an exploded perspective view showing the ink jet head.

FIG. 29 is an explanatory diagram illustrating an operation of discharging a filter element material of the ink jet head.

FIG. 30 is an explanatory diagram illustrating a discharge amount of a filter element material of the inkjet head.

FIG. 31 is a schematic diagram illustrating an arrangement state of the ink jet head.

FIG. 32 is a partially enlarged schematic view illustrating an arrangement state of the ink jet head.

FIG. 33 is a schematic view showing a color filter manufactured by the same color filter manufacturing apparatus, in which (A) is a plan view of the color filter and (B) is a cross-sectional view taken along line XX of (A). is there.

FIG. 34 is a manufacturing process sectional view for explaining the procedure for manufacturing the same color filter.

FIG. 35 is a circuit diagram showing a part of a display device using an EL display element according to the electro-optical device of the invention.

FIG. 36 is an enlarged plan view showing a planar structure of a pixel region of the display device.

FIG. 37 is a manufacturing process cross-sectional view showing a procedure in preprocessing of a manufacturing process of the display device.

FIG. 38 is a manufacturing process cross-sectional view showing a procedure in discharging the EL light-emitting material in the manufacturing process of the display device.

FIG. 39 is a manufacturing process cross-sectional view showing a procedure in discharging the EL light-emitting material in the manufacturing process of the display device.

FIG. 40 is an enlarged sectional view showing a planar structure of a pixel region of a display device using an EL display element according to the electro-optical device of the invention.

FIGS. 41A and 41B are enlarged views showing a structure of a pixel region of a display device using an EL display element according to the electro-optical device of the present invention, wherein FIG. 41A is a planar structure, and FIG. It is a B sectional view.

FIG. 42 is a manufacturing process sectional view showing a manufacturing process for manufacturing a display device using the EL display element according to the electro-optical device of the present invention.

FIG. 43 is a manufacturing process cross-sectional view showing a manufacturing process for manufacturing a display device using the EL display element according to the electro-optical device of the present invention.

FIG. 44 is a manufacturing process sectional view showing the manufacturing process for manufacturing a display device using the EL display element according to the electro-optical device of the present invention.

FIG. 45 is a manufacturing process cross-sectional view showing a manufacturing process for manufacturing a display device using the EL display element according to the electro-optical device of the present invention.

FIG. 46 is a manufacturing process cross-sectional view showing a manufacturing process for manufacturing a display device using the EL display element according to the electro-optical device of the present invention.

FIG. 47 is a manufacturing process sectional view showing the manufacturing process for manufacturing a display device using the EL display element according to the electro-optical device of the present invention.

FIG. 48 is a perspective view showing a personal computer which is an electric apparatus including the electro-optical device.

FIG. 49 is a perspective view showing a mobile phone as an electric apparatus including the electro-optical device.

FIG. 50 is a diagram illustrating an example of a conventional color filter manufacturing method.

FIG. 51 is a diagram illustrating characteristics of a conventional color filter.

[Explanation of symbols]

Reference Signs List 1,118 color filter 2,107a, 107b substrate to be ejected 3 filter element as pixel 12 mother substrate as substrate to be ejected 13 filter element material as liquid 16 color filter manufacturing apparatus as ejection device Droplet discharging device 19, 425 Main scanning drive device as main scanning drive device constituting moving means 20 Head section 21, 427 as ink jet head Sub-scanning driving device 25 as sub-scanning driving device constituting moving device , 426 Carriage as holding means 27, 466 Nozzle 28 Nozzle row 101 Liquid crystal device as electro-optical device 102 Liquid crystal panel 111a, 111b as electro-optical device Substrate 114a, 114b as object to be ejected Electrode 201 Electro-optical device EL device 202 pixel power 204 Transparent substrate as a substrate 205 Bank 213 Counter electrode 405R (405G, 405B) Droplet discharge processing device 421 as a color filter manufacturing device as a discharge device Inkjet head 501 Display device as an electro-optical device 502 As a discharge target Display substrate as a substrate 540A, 540B Optical material as functional liquid material L Liquid crystal M Filter element material

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme court ゛ (Reference) G02F 1/1335 505 G09F 9/00 338 5G435 G09F 9/00 338 B41J 3/04 101Z (72) Inventor Kitahara Strong 3-3-5 Yamato, Suwa-shi, Nagano Seiko Epson Corporation (72) Inventor Satoru Katagami 3-5-35 Yamato, Suwa-shi, Nagano Seiko Epson Corporation F-term (reference) 2C056 EA01 EA24 EB24 EB08 EB13 EB29 EB36 EC07 EC13 EC35 EC42 FA04 FA10 FB01 HA07 HA10 HA11 2H048 BA02 BA11 BA64 BB02 BB14 BB15 BB28 BB42 2H091 FA02Y FC29 4D075 AC09 AC84 AC88 AC93 CA47 CB08 DA06 DA32 DB13 DB31 DC21 DC24 EA05 A01 A17 A04 EA05 A17 A04 EA05 KK07 KK10 (54) [Title of the Invention] Discharge method and device, electric light Device, its manufacturing method and manufacturing apparatus, a color filter, its manufacturing method and manufacturing apparatus, and a device having a substrate, its manufacturing method and manufacturing apparatus

Claims (29)

[Claims]
1. A droplet discharge head having a plurality of nozzles for discharging a liquid material having fluidity on an object to be discharged, the droplet discharge head having a longitudinal direction along a direction in which the nozzles are disposed; Holding means for arranging a plurality of the droplet discharge heads in such a manner that one surface of the droplet discharge head on which the nozzles are provided is opposed to the surface of the discharge object via a gap, and the holding means and the discharge object Moving means for relatively moving at least one of the droplet ejection heads along a surface of the object to be ejected, wherein the plurality of droplet ejection heads discharges the plurality of droplets. The heads are arranged side by side along a direction intersecting the direction in which the heads are relatively moved along the surface of the object to be ejected, and the arrangement direction of the nozzles of each droplet ejection head is To be ejected A discharge device which obliquely intersects a relative movement direction of the discharge device.
2. The discharge device according to claim 1, wherein the plurality of droplet discharge heads have substantially the same shape.
3. The discharge device according to claim 1, wherein the plurality of droplet heads have the same number of nozzles.
4. The discharge device according to claim 1, wherein the plurality of droplet discharge heads have the same nozzle forming position.
5. The discharge device according to claim 1, wherein the plurality of droplet discharge heads are arranged in a state where their longitudinal directions are substantially parallel and inclined in the same direction. Discharge device.
6. The discharge device according to claim 1, wherein the plurality of droplet discharge heads are arranged in a plurality of rows.
7. The discharge device according to claim 6, wherein the plurality of droplet discharge heads are arranged in a plurality of rows in a substantially staggered manner.
8. An apparatus for manufacturing an electro-optical device comprising the ejection device according to claim 1, wherein the object to be ejected is a substrate on which an EL light emitting layer is formed,
While moving the plurality of droplet discharge heads relative to the substrate, a liquid material containing an EL light emitting material is discharged from predetermined nozzles of the plurality of droplet discharge heads onto the substrate, An apparatus for manufacturing an electro-optical device, wherein the EL light-emitting layer is formed thereon.
9. An apparatus for manufacturing an electro-optical device including the ejection device according to claim 1, wherein the object to be ejected is one of a pair of substrates sandwiching a liquid crystal, and While moving the droplet discharge head relative to the substrate, a liquid material containing a color filter material is discharged from predetermined nozzles of the plurality of droplet discharge heads onto the substrate, and the droplet is discharged onto the substrate. An apparatus for manufacturing an electro-optical device, wherein a color filter is formed.
10. An apparatus for manufacturing a color filter, comprising: the discharge device according to claim 1; wherein the object to be discharged is a substrate on which a color filter having a different color is formed; While moving a plurality of droplet discharge heads relatively to the substrate, a liquid material containing a color filter material is discharged from predetermined nozzles in the plurality of droplet discharge heads onto the substrate, An apparatus for manufacturing a color filter, wherein the color filter is formed.
11. An electro-optical device comprising: a substrate provided with a plurality of electrodes; and a plurality of EL light-emitting layers provided on the substrate corresponding to the electrodes, wherein the EL light-emitting layer includes an EL light-emitting layer. A plurality of nozzles for discharging a liquid material containing a material are arranged and provided, and have a longitudinal direction along an arrangement direction of the nozzles, and a plurality of droplets arranged in a direction different from the longitudinal direction In a state in which the ejection head faces one surface having the nozzle with the surface of the substrate via a gap, in a direction intersecting the longitudinal direction of the droplet ejection heads, and in a direction in which the droplet ejection heads are arranged. Along the direction intersecting with the substrate, while being relatively moved along the surface of the substrate, the liquid material is appropriately discharged from the nozzle to a predetermined position on the substrate and formed. Electro-optical equipment .
12. An electro-optical device comprising a substrate and a color filter of a different color formed on the substrate, wherein the color filter discharges a liquid containing a filter material of a predetermined color. Nozzles are arranged and have a longitudinal direction along the arrangement direction of the nozzles, and a plurality of droplet discharge heads arranged side by side in a direction different from this longitudinal direction, one surface having the nozzles In a state facing the surface of the substrate with a gap therebetween, in a direction intersecting with the longitudinal direction of these droplet discharge heads, and along a direction intersecting with the arrangement direction of these droplet discharge heads, An electro-optical device, wherein the liquid material is appropriately discharged from the nozzle to a predetermined position on the substrate while being relatively moved along a surface of the substrate, and is formed.
13. A color filter formed on a substrate so as to present different colors, wherein a plurality of nozzles for discharging a liquid material containing a filter material of a predetermined color are arranged and provided. A state in which a plurality of droplet discharge heads having a longitudinal direction along the disposition direction and arranged side by side in a direction different from the longitudinal direction oppose one surface having the nozzle to the surface of the substrate via a gap. In the direction intersecting with the longitudinal direction of these droplet discharge heads, and along the direction intersecting with the arrangement direction of these droplet discharge heads, they are relatively moved along the surface of the substrate. And a liquid filter formed by appropriately discharging the liquid material from the nozzle to a predetermined position on the substrate.
14. A plurality of nozzles for discharging a liquid material having fluidity are provided in an array, have a longitudinal direction along the direction in which the nozzles are arranged, and are arranged in a direction different from the longitudinal direction. The plurality of droplet discharge heads, with one surface of the droplet discharge heads provided with the nozzles facing the surface of the discharge target with a gap therebetween, with respect to the longitudinal direction of the droplet discharge heads. In the direction intersecting and along the direction intersecting with the arrangement direction of the droplet discharge heads, the droplets are relatively moved along the surface of the discharge target. A discharge method, comprising discharging the liquid material onto a discharge object.
15. The discharge method according to claim 14, wherein the plurality of droplet discharge heads are formed in substantially the same shape, and discharge the liquid material onto the discharge target from nozzles of the droplet discharge heads. A discharge method characterized by the above-mentioned.
16. The discharge method according to claim 14, wherein the plurality of droplet discharge heads have the same number of nozzles, and discharge the liquid from the nozzles of these droplet discharge heads onto an object to be discharged. Discharging method.
17. The discharge method according to claim 14, wherein the plurality of droplet discharge heads have the same nozzle forming position, and the droplets are ejected from the nozzles of the droplet discharge heads. A discharge method characterized by discharging on a discharge object.
18. The discharge method according to claim 14, wherein the plurality of droplet discharge heads are arranged side by side in a state where their longitudinal directions are substantially parallel and inclined in the same direction. A discharging method, comprising discharging a liquid material from a nozzle onto an object to be discharged.
19. The discharge method according to claim 14, wherein the plurality of droplet discharge heads are arranged in a plurality of rows, and a liquid material is ejected from a nozzle of the droplet discharge head onto an object to be discharged. Discharging method, characterized in that:
20. The ejection method according to claim 19, wherein the plurality of droplet ejection heads are arranged in a plurality of rows in a substantially staggered manner, and a liquid material is ejected from a nozzle of the droplet ejection head onto an object to be ejected. A discharging method characterized by discharging.
21. A method of manufacturing an electro-optical device for discharging a liquid material by the discharging method according to claim 14, wherein the liquid material contains an EL light emitting material, The object to be ejected is a substrate, and the liquid material is ejected from the nozzles to a predetermined position on the substrate as appropriate while moving the droplet ejection head relatively along the surface of the substrate. A method for manufacturing an electro-optical device, comprising forming a light emitting layer.
22. A method for manufacturing an electro-optical device for discharging a liquid material by the discharging method according to claim 14, wherein the liquid material contains a color filter material. The object to be ejected is a substrate, and while the droplet ejecting head is relatively moved along the surface of the substrate, the liquid is ejected from the nozzles to a predetermined position on the substrate as appropriate, and the color is ejected. A method for manufacturing an electro-optical device, comprising forming a filter.
23. A method for manufacturing a color filter for discharging a liquid material by the discharging method according to claim 14, wherein the liquid material contains a filter material, and The object is a substrate, and while the droplet discharge head relatively moves along the surface of the substrate, the liquid material is appropriately discharged from the nozzle to a predetermined position on the substrate to form a color filter. Forming a color filter.
24. A method of manufacturing an electro-optical device, comprising: a substrate provided with a plurality of electrodes; and an EL light-emitting layer provided on the substrate in a plurality corresponding to the electrodes. A plurality of nozzles for discharging a liquid material containing an EL light-emitting material are arranged and provided with a longitudinal direction along the direction in which the nozzles are arranged, and a plurality of nozzles arranged in a direction different from the longitudinal direction. In a direction intersecting the longitudinal direction of the droplet discharge heads, with one surface on which the nozzles are provided facing the surface of the substrate with a gap therebetween. While moving relatively along the surface of the substrate along a direction intersecting with the arrangement direction of the head, the liquid material is appropriately discharged from the nozzle to a predetermined position on the substrate while the EL is moved. Form the light emitting layer Method of manufacturing an electro-optical device, characterized in that.
25. A method for manufacturing an electro-optical device, comprising: a substrate; and a color filter of a different color formed on the substrate. A plurality of nozzles for ejecting a body are provided in an array and have a longitudinal direction along the arrangement direction of the nozzles, and a plurality of droplet ejection heads arranged in a direction different from the longitudinal direction, In a state in which one surface on which the nozzles are provided is opposed to the surface of the substrate with a gap therebetween, in a direction intersecting the longitudinal direction of the droplet discharge heads, and intersecting the arrangement direction of the droplet discharge heads. The color filter is formed by appropriately discharging the liquid material from the nozzle to a predetermined position on the substrate while relatively moving along the surface of the substrate along a direction in which the color filter is formed. Method of manufacturing an electro-optical device that.
26. A method for manufacturing a color filter for manufacturing a color filter formed to have different colors on a substrate, wherein a plurality of nozzles for discharging a liquid material containing a filter material of a predetermined color are arranged. A plurality of droplet discharge heads are provided and have a longitudinal direction along the direction in which the nozzles are arranged, and the plurality of droplet discharge heads are arranged in a direction different from the longitudinal direction. In a state in which one surface faces the surface of the substrate via a gap, in a direction intersecting with the longitudinal direction of these droplet discharge heads, and along a direction intersecting with the arrangement direction of these droplet discharge heads And causing the liquid material to be relatively moved along a surface of the substrate, and discharging the liquid material onto the substrate from a nozzle of the droplet discharge head.
27. A device having a base material and a base material formed by discharging a liquid having fluidity on the base, wherein a plurality of nozzles for discharging the liquid are arranged. A plurality of droplet discharge heads having a longitudinal direction along the direction in which the nozzles are provided, and arranged in a direction different from the longitudinal direction, the nozzles of these droplet discharge heads being provided. With one surface facing the surface of the base material with a gap therebetween, in a direction intersecting with the longitudinal direction of these droplet discharge heads, and along a direction intersecting with the arrangement direction of these droplet discharge heads The liquid material is relatively moved along a surface of the base material, and the liquid material is appropriately discharged from a nozzle of the droplet discharge head to a predetermined position on the base material to be formed. A device having a substrate.
28. The discharge device according to claim 1, wherein the object to be discharged is a substrate of a device, and in the step of forming a predetermined layer on the substrate, the plurality of objects to be discharged are provided. An apparatus for manufacturing a device having a base material, wherein a liquid material is discharged from the droplet discharge head onto the base material.
29. The method according to claim 14, wherein a predetermined layer is formed on the base material by discharging a liquid material onto the base material which is the object to be discharged. The manufacturing method of the device which has the base material made into.
JP2001362740A 2001-01-15 2001-11-28 Discharge method and its apparatus, electro-optic device, method and apparatus for manufacturing the device, color filter, method and apparatus for manufacturing the filter, device with substrate, and method and apparatus for manufacturing the device Pending JP2002273869A (en)

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