JP3491155B2 - Material discharging method and apparatus, color filter manufacturing method and manufacturing apparatus, liquid crystal device manufacturing method and manufacturing apparatus, EL device manufacturing method and manufacturing apparatus - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a material discharging method for discharging a material onto an object and a material discharging apparatus.
Further, the present invention relates to a manufacturing method and a manufacturing apparatus for manufacturing a color filter used in an optical device such as a liquid crystal device. The present invention also relates to a method and apparatus for manufacturing a liquid crystal device having a color filter. Further, the present invention relates to a manufacturing method and a manufacturing apparatus of an EL device that performs display using an EL light emitting layer. Furthermore, the present invention relates to an electronic device equipped with a liquid crystal device or an EL device manufactured by using these manufacturing methods.

[0002]

2. Description of the Related Art In recent years, display devices such as liquid crystal devices and EL devices have been widely used for display units of electronic devices such as mobile phones and portable computers. Also recently
Display devices are often used for full-color display. Full-color display by the liquid crystal device is performed, for example, by passing light modulated by the liquid crystal layer through a color filter. Then, the color filter is formed on the surface of the substrate made of glass, plastic, or the like.
For example, it is formed by arranging dot-shaped color filter elements of R (red), G (green), and B (blue) in a predetermined arrangement such as a stripe arrangement, a delta arrangement, or a mosaic arrangement.

Further, when full color display is performed by an EL device, for example, R (red) and G are formed on the surface of a substrate formed of glass, plastic or the like.
(Green) and B (blue) dot-shaped EL light emitting layers of respective colors are arranged in a predetermined arrangement such as a stripe arrangement, a delta arrangement, or a mosaic arrangement, and the EL light emitting layers are sandwiched by a pair of electrodes to form pixel pixels. By forming and controlling the voltage applied to these electrodes for each picture element pixel, the picture element pixel is caused to emit light of a desired color, thereby performing full-color display.

Conventionally, when patterning each color filter element such as R, G, B of a color filter, or EL
It is known to use a photolithography method when patterning each color pixel pixel such as R, G, B of a device. However, when this photolithography method is used, there are problems that the process is complicated and that the cost is high because a large amount of each color material, photoresist, etc. is consumed.

To solve this problem, a dot-like array of filaments or EL is formed by ejecting a filter material, an EL light-emitting material, or the like in a dot shape by an ink jet method.
A method of forming a light emitting layer or the like has been proposed.

Now, in FIG. 22 (a), a large area substrate formed of glass, plastic or the like, an internal area of a plurality of panel areas 302 set on the surface of a so-called mother board 301, and FIG. As shown, consider a case where a plurality of filter elements 303 arranged in a dot shape are formed based on an inkjet method. In this case, for example, as shown in FIG. 22C, an inkjet head 306 having a nozzle row 305 formed by arranging a plurality of nozzles 304 in a row is shown by arrows A1 and A2 in FIG. 22B. As shown, one panel area 3
While performing main scanning a plurality of times with respect to No. 02 (twice in FIG. 22), the filter element 303 is formed at a desired position by selectively ejecting ink, that is, the filter material, from a plurality of nozzles during the main scanning.

Since the filter element 303 is formed by arranging each color of R, G, B, etc. in an appropriate arrangement form such as a stripe arrangement, a delta arrangement, a mosaic arrangement, etc., it is shown in FIG. The ink ejection processing by the ink jet head 306 is performed by the ink jet head 306 that ejects R, G, B single colors.
The ink jet heads 306 are provided in advance for three colors such as B, and three color arrays of R, G, B, etc. are formed on one motherboard 301 by using them in order.

[0008]

By the way, as for the ink jet head 306, generally, the nozzle row 305 is used.
23, there are variations in the ink ejection amount of the plurality of nozzles 304 that make up the nozzle array 304. For example, as shown in FIG. It has an ink ejection characteristic Q such that the ejection amount is large and the ejection amount in the middle portion thereof is small.

Therefore, when the filter element 303 is formed by the ink jet head 306 as shown in FIG. 22 (b), as shown in FIG. 23 (b), the position P1 corresponding to the end portion of the ink jet head 306 or the center is formed. There is a problem that streaks having a high density are formed on the portion P2 or both P1 and P2, and the planar light transmission characteristics of the color filter become non-uniform.

The present invention has been made in view of the above problems, and has optical characteristics of an optical member such as light transmission characteristics of a color filter, color display characteristics of a liquid crystal device, and light emission characteristics of an EL light emitting surface. An object of the present invention is to provide a manufacturing method and a manufacturing apparatus for each optical member that can be made uniform in a plane. Another object of the present invention is to provide a general industrial technique capable of discharging some material from a nozzle onto an object such as a substrate and accurately attaching the material to the object.

[0011]

In order to achieve the above object, a method of discharging a material according to the present invention is directed to a head in which a plurality of nozzles are arranged and one of an object and a main scanning direction with respect to the other. A method for ejecting a material from at least one of the nozzles to the object while moving the nozzle row, wherein the nozzle row in which the plurality of nozzles are arranged is Four groups, each of which has the same number of nozzles as the nozzle row, except for the nozzle located at the end of the nozzle row that is controlled so as not to eject the material and has ejection characteristics with a small ejection amount in the middle portion. Sub-scanning one of the head and the target to the other so that the material is ejected to the same portion of the target by the nozzles included in each group. It is moved by said group one minute countercurrent, while moving one of the head and the object in the main scanning direction relative to the other, characterized by discharging the material from the nozzle. A material discharging method according to the present invention is a material discharging method of discharging a material onto an object, wherein a head having a nozzle row in which a plurality of nozzles are arranged, and one of the object are provided with respect to the other. And discharging the material from at least one of the plurality of nozzles while moving in the main scanning direction. In the step, the nozzle located at the end of the nozzle row does not discharge the material. Is preferably controlled as follows.

In this case, it is preferable that the plurality of nozzles located at the end of the nozzle row be controlled so as not to discharge the material.

As described with reference to FIG. 23A, the material discharge distribution in the general head changes at the end portion of the nozzle row as compared with other portions. With regard to an inkjet head having such an ink discharge distribution characteristic, if a plurality of nozzles having a uniform ink discharge distribution is used excluding the plurality of nozzles at the end of the nozzle row where the change is large, the film thickness of the material Can be made uniform in a plane.

Furthermore, the nozzle array is virtually divided into a plurality of groups, and each head can scan the same part of the object in the main scanning direction so that each group can scan the same part in the main scanning direction. It is preferable to further include the step of sub-scanning one of the other with respect to the other.

With this structure, the material is 1 of the head.
Instead of being formed by scanning once, a plurality of nozzles belonging to different nozzle groups overlap each other to form a predetermined film thickness by receiving the material discharge. Therefore, the material discharge amount may vary among the plurality of nozzles. Even in the presence of the above, it is possible to prevent the film thickness from varying among a plurality of forming elements.

In the material coating method having the above structure, one of the head and the substrate can be moved in the sub-scan direction with respect to the other by a length that is an integral multiple of the length of the nozzle group in the sub-scan direction. In this way, a plurality of nozzle groups will overlap and scan the same portion of the object, and the material in each forming element area will be supplied in an overlapping manner by the nozzles in each nozzle group.

Further, in the method of discharging the material having the above-mentioned constitution,
The nozzle rows may be arranged so as to be inclined with respect to the sub-scanning direction. The nozzle row is formed by arranging a plurality of nozzles in a row. In this case, assuming that the arrangement state of the nozzle rows is parallel to the sub-scanning direction of the head, the distance between adjacent filter elements formed by the filter element material discharged from the nozzles, that is, the element pitch is , Which is equal to the pitch between the nozzles of the plurality of nozzles forming the nozzle row.

If the pitch between elements may be equal to the pitch between nozzles, the above may be maintained as it is. However, in such a case, it is a rare case, and normally, the pitch between elements and the nozzle At present, there are many cases where the pitch is different. When the element pitch is different from the nozzle pitch as described above, the nozzle row is inclined with respect to the sub-scanning direction of the head as in the above configuration, so that the inter-nozzle pitch is increased in the sub-scanning direction. The pitch can be adjusted to the pitch between elements. In this case, the positions of the nozzles forming the nozzle row are displaced forward and backward with respect to the main scanning direction. However, by shifting the discharge timing of the material from each nozzle, Material drops from can be delivered to the desired location.

Further, the nozzle row is virtually divided into n nozzle groups, and the length of the portion of the nozzle row excluding the nozzles controlled so as not to discharge the material is L, When the number of nozzle groups is n and the angle formed by the nozzle rows with the sub-scanning direction is θ, the sub-scanning movement amount δ is preferably δ (L / n) cos θ 2. The material discharging method according to the present invention is the material discharging method according to the present invention, wherein a length of a portion of the nozzle row excluding a nozzle controlled so as not to discharge the material is L, When the angle formed by the nozzle row and the sub-scanning direction is θ, the sub-scanning movement amount δ
Is characterized in that δ≈ (L / 4) cos θ.

According to this structure, the head can move a plurality of nozzles in the sub-scanning direction for each nozzle group. As a result, for example, considering the case where the nozzle row is divided into four nozzle groups, each part on the substrate has four parts.
Main scanning is performed in an overlapping manner by the individual nozzle groups.

Further, it is preferable that a plurality of heads are provided and different materials are ejected from the nozzle rows of each head. Further, it is preferable that the head is provided with a plurality of the nozzle rows, and different materials are ejected from the respective nozzle rows.

Next, in the material discharging apparatus according to the present invention, the material is discharged from at least one of the nozzles while moving one of the head in which a plurality of nozzles are arranged and the object in the main scanning direction with respect to the other. A material discharging device that discharges the material to the head, and a main scanning driving device that moves one of the head and the object in the main scanning direction with respect to the other. A sub-scanning drive unit that moves one of the head and the object in the sub-scanning direction with respect to the other, an ejection control unit that controls ejection of material from the plurality of nozzles, and a main scanning drive unit. A nozzle row having a plurality of nozzles arranged has a main scanning control unit for controlling the operation and a sub-scanning control unit for controlling the operation of the sub-scanning driving unit, with respect to its end and center. It Has a discharge characteristic that the discharge amount of the intermediate portion of the nozzle array is small, and the discharge control unit controls the nozzles located at the end portions of the nozzle row not to discharge the material, and the nozzles located at the end portions of the nozzle row. Except that the nozzle array is virtually divided into four groups each having the same number of nozzles, and the nozzles included in each group discharge the material to the same portion of the object. And the sub-scanning control means controls the operation of the sub-scanning driving means such that one of the objects is moved by one group in the sub-scanning direction with respect to the other, and the head and the The main scan control means moves the main scan drive means so as to discharge the material from the nozzle while moving one of the objects in the main scan direction with respect to the other. And controlling the. The material discharging apparatus according to the present invention is the material discharging apparatus according to the present invention, wherein the discharging control means controls a plurality of nozzles located at an end of the nozzle row so as not to discharge the material. It is characterized by doing. The material discharge device according to the present invention is a material discharge device that has a nozzle row in which a plurality of nozzles are arranged, and discharges the material from at least one nozzle of the plurality of nozzles. It is preferable to include a discharge control unit that controls discharge of the material from the nozzle, and the discharge control unit preferably controls the nozzle located at the end of the nozzle row so as not to discharge the material.

Next, in the method of manufacturing a color filter according to the present invention, a color filter in which a plurality of filter elements are arranged on a substrate is used, and one of the head in which a plurality of nozzles are arranged and the substrate is the other. A method of manufacturing a color filter by discharging a filter material from at least one of the nozzles onto the substrate while moving in the main scanning direction, wherein the nozzle row in which the plurality of nozzles are arranged is Except for the nozzles located at the ends of the nozzle row that have a discharge characteristic that the discharge amount of the intermediate portion is small with respect to the end portion and the central portion, and are controlled so as not to discharge the filter material, the nozzles The row is virtually divided into four groups each having the same number of nozzles, and the nozzles in each group allow the filter material to be applied to the same portion of the substrate. So that one of the head and the substrate is moved relative to the other by one group in the sub-scanning direction with respect to the other, and one of the head and the substrate is moved with respect to the other. The filter material is discharged from the nozzle while moving in the main scanning direction. A method of manufacturing a color filter according to the present invention is a method of manufacturing a color filter in which a plurality of filter elements are arranged, the head having a nozzle row in which a plurality of nozzles are arranged, and the substrate. Discharging a filter material from at least one nozzle of the plurality of nozzles while moving one of them in the main scanning direction with respect to the other,
In the step, it is preferable that the nozzle located at the end of the nozzle row is controlled so as not to eject the filter material.

Next, in the color filter manufacturing apparatus according to the present invention, a color filter having a plurality of filter elements arranged on a substrate is provided, and one of the head having a plurality of nozzles and the substrate is the other. A color filter manufacturing apparatus that manufactures by discharging a filter material from at least one of the nozzles while moving in the main scanning direction, the material supplying means supplying the filter material to the head, the head and the A main-scanning drive means for moving one of the substrates in the main-scanning direction with respect to the other; a sub-scanning drive means for moving one of the head and the substrate in the sub-scanning direction with respect to the other; Discharge control means for controlling discharge of material from the nozzle, main scan control means for controlling operation of the main scan drive means, and movement of the sub scan drive means. And a sub-scanning control unit for controlling the sub-scanning control means, wherein the nozzle row in which the plurality of nozzles are arranged has ejection characteristics such that the ejection amount in the middle portion thereof is smaller than that in the end portion and the central portion. The control unit controls the nozzles located at the ends of the nozzle array so as not to discharge the filter material, and the nozzle arrays each have the same number of nozzles except the nozzles located at the ends of the nozzle array.
One of the head and the substrate is subdivided in the sub-scanning direction with respect to the other so that the nozzles included in each group virtually discharge the filter material to the same portion of the substrate. The sub-scanning control means controls the operation of the sub-scanning driving means so as to move the head by one group at a time, and moves one of the head and the substrate in the main scanning direction with respect to the other. While doing so, the main scan control means controls the operation of the main scan drive means so as to discharge the filter material from the nozzle. A color filter manufacturing apparatus of the present invention has a nozzle row in which a plurality of nozzles are arranged, and is a color filter manufacturing apparatus that discharges a filter material from at least one nozzle of the plurality of nozzles, It is preferable to include a discharge control unit that controls discharge of the filter material from the nozzles, and the discharge control unit preferably controls the nozzles located at the ends of the nozzle row so as not to discharge the filter material. Next, a method for manufacturing a liquid crystal device according to the present invention is characterized by including the method for manufacturing a color filter according to the present invention. A method for manufacturing a liquid crystal device according to the present invention is a method for manufacturing a liquid crystal device having a pair of substrates holding a liquid crystal therebetween and a color filter formed by arranging a plurality of filter elements on at least one of the substrates. A head having a nozzle row in which nozzles are arranged, and a step of ejecting a filter material from at least one nozzle of the plurality of nozzles while moving one of the substrates in the main scanning direction with respect to the other. In the step, it is preferable that the nozzles located at the ends of the nozzle row are controlled so as not to eject the filter material. Next, a liquid crystal device manufacturing apparatus according to the present invention is characterized by including the color filter manufacturing apparatus according to the present invention. A liquid crystal device manufacturing apparatus of the present invention includes a nozzle row in which a plurality of nozzles are arranged, and a liquid crystal device manufacturing apparatus that discharges a filter material from at least one nozzle of the plurality of nozzles, It is preferable to include a discharge control unit that controls discharge of the filter material from the nozzle, and the discharge control unit preferably controls the nozzle located at the end of the nozzle row so as not to discharge the filter material.

Next, the manufacturing method of the EL device according to the present invention is as follows.
An EL device in which a plurality of pixel pixels including an EL light-emitting layer are arranged on a substrate is provided at least while moving one of a head having a plurality of nozzles and the substrate in the main scanning direction with respect to the other. A method of manufacturing an EL device for manufacturing an EL device by ejecting an EL light emitting material from one nozzle to the substrate, wherein a nozzle row in which the plurality of nozzles are arranged is The nozzle row has the same number of nozzles, except for the nozzles located at the ends of the nozzle row controlled so as not to eject the EL light-emitting material. One of the head and the substrate is divided into two groups so that the EL light emitting material is ejected to the same portion of the substrate by the nozzles included in each group. In contrast to the above, the EL light emitting material is ejected from the nozzle while moving the group one by one in the sub-scanning direction and moving one of the head and the substrate in the main scanning direction with respect to the other. It is characterized by The manufacturing method of the EL device of the present invention is
What is claimed is: 1. A method of manufacturing an EL device comprising a plurality of pixel pixels including an EL light emitting layer arranged on a substrate, comprising: a head having a nozzle row in which a plurality of nozzles are arranged; The step of ejecting the EL light emitting material from at least one of the plurality of nozzles while moving in the main scanning direction, wherein the nozzle located at the end of the nozzle row is the EL element. It is preferable to control so as not to eject the light emitting material.

Next, an EL device manufacturing apparatus according to the present invention is
An EL device in which a plurality of pixel pixels including an EL light-emitting layer are arranged on a substrate is provided at least while moving one of a head having a plurality of nozzles and the substrate in the main scanning direction with respect to the other. An EL device manufacturing apparatus for manufacturing an EL device by ejecting an EL light emitting material from one nozzle, comprising: a material supply means for supplying the EL light emitting material to the head; and one of the head and the substrate with respect to the other. Main scanning drive means for moving in the main scanning direction, a sub-scanning driving means for moving one of the head and the substrate in the sub-scanning direction with respect to the other, and control of material ejection from the plurality of nozzles. Discharge control means for controlling the operation of the main scanning drive means, and sub-scanning control means for controlling the operation of the sub-scanning drive means. The nozzle array thus formed has ejection characteristics such that the ejection amount in the middle portion between the end portion and the central portion is small, and the ejection control means is configured such that the nozzles located at the end portion of the nozzle row are made of the EL light emitting material. Control not to discharge,
Except for the nozzles located at the ends of the nozzle rows, the nozzle rows are virtually divided into four groups each having the same number of nozzles, and the nozzles included in each group apply the EL elements to the same portion of the substrate. The sub-scanning control means is configured to move one of the head and the substrate by one group in the sub-scanning direction with respect to the other so that the light-emitting material is ejected. While controlling one of the head and the substrate in the main scanning direction with respect to the other, the main scanning control unit controls the main scanning controller to eject the EL light emitting material from the nozzle. It is characterized in that the operation of the scan driving means is controlled. An EL device manufacturing apparatus of the present invention includes a nozzle row in which a plurality of nozzles are arranged, and the EL device manufacturing apparatus discharges an EL light emitting material from at least one of the plurality of nozzles. And a discharge control unit that controls discharge of the EL light emitting material from the nozzle, and the discharge control unit may control a nozzle located at an end of the nozzle row so as not to discharge the EL light emitting material. preferable.

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION (First Embodiment) An embodiment of a color filter manufacturing method and a manufacturing apparatus thereof will be described below. First, before describing the manufacturing method and manufacturing apparatus thereof, a color filter manufactured by using the manufacturing method and the like will be described. FIG. 5A schematically shows the planar structure of one embodiment of the color filter. Further, FIG. 6D shows a sectional structure taken along line VI-VI of FIG.

The color filter 1 of the present embodiment is a rectangular substrate 2 made of glass, plastic, or the like.
A plurality of filter elements 3 are formed in a dot pattern shape, in the present embodiment, a dot matrix shape on the surface of, and further formed by laminating a protective film 4 thereon as shown in FIG. 6D. . Note that FIG. 5A shows the color filter 1 in a plan view with the protective film 4 removed.

The filter element 3 is formed by filling a plurality of rectangular regions, which are partitioned by partition walls 6 formed in a grid pattern with a non-translucent resin material and arranged in a dot matrix, with a coloring material. To be done. Further, each of these filter elements 3 has an R
It is formed of a color material of any one color of (red), G (green), and B (blue), and the respective color filter elements 3 are arranged in a predetermined array. For this array,
For example, the stripe arrangement shown in FIG. 7A and the stripe arrangement shown in FIG.
7 is known, and the delta array shown in FIG. 7C is known.

The stripe arrangement is a color arrangement in which all the columns of the matrix have the same color. The mosaic array has three filter elements R, G,
The color scheme is B, which is three colors. The delta arrangement is a color arrangement in which the filter elements are arranged differently and three adjacent filter elements have three colors of R, G, and B.

The size of the color filter 1 is, for example,
It is 1.8 inches. The size of one filter element 3 is, for example, 30 μm × 100 μm.
The interval between the filter elements 3, so-called element pitch, is, for example, 75 μm.

When the color filter 1 of this embodiment is used as an optical element for full color display, R,
One pixel is formed by using three G and B filter elements 3 as one unit, and light is selectively passed through any one of R, G, and B in one pixel or a combination thereof to obtain a full-color image. Display. At this time, the partition wall 6 made of a resin material having no light-transmitting property acts as a black matrix.

The color filter 1 is, for example, as shown in FIG.
The mother substrate 12 having a large area as shown in (b) is cut out. Specifically, first, a pattern for one color filter 1 is formed on the surface of each of the plurality of color filter forming regions 11 set in the mother substrate 12, and the surroundings of the color filter forming regions 11 are further formed. The individual color filters 1 are formed by forming grooves for cutting on the substrate and further cutting the mother substrate 12 along the grooves.

Hereinafter, the color filter 1 shown in FIG.
A manufacturing method and a manufacturing apparatus for manufacturing the same will be described.

FIG. 6 schematically shows a method of manufacturing the color filter 1 in the order of steps. First, the partition walls 6 are formed on the surface of the mother substrate 12 by a resin material having no light-transmitting property in a grid pattern as viewed from the direction of arrow B. The portion 7 of the lattice hole of the lattice pattern is a region where the filter element 3 is formed, that is, a filter element region. Individual filter element regions 7 formed by the partition walls 6
The plane dimension when viewed from the arrow B direction is, for example, 30 μm.
It is formed to have a size of about m × 100 μm.

The partition wall 6 has both the function of blocking the flow of the filter element material supplied to the filter element region 7 and the function of the black matrix. Also,
The partition wall 6 is formed by an arbitrary patterning method, for example, a photolithography method, and further heated by a heater and fired if necessary.

After forming the partition walls 6, as shown in FIG. 6B, the filter element regions 7 are filled with the filter element material 13 by supplying the droplets 8 of the filter element material to the filter element regions 7. . In FIG. 6B, reference numeral 13R indicates a filter element material having an R (red) color, and reference numeral 13G indicates G (green).
13B indicates a filter element material having a color of B, and reference numeral 13B indicates a filter element material having a color of B (blue).

When each filter element region 7 is filled with a predetermined amount of filter element material, the mother substrate 12 is heated to about 70 ° C. by the heater to evaporate the solvent of the filter element material. By this evaporation, as shown in FIG. 6C, the filter element material 1
The volume of 3 is reduced and flattened. When the volume is drastically reduced, the supply of droplets of the filter element material and the heating of the droplets are repeated until a sufficient film thickness is obtained for the color filter. By the above processing, only the solid content of the filter element material remains to form a film, whereby the desired color filter element 3 is obtained.
Is formed.

After the filter element 3 is formed as described above, a heating process is performed at a predetermined temperature for a predetermined time in order to completely dry the filaments 3. After that, the protective film 4 is formed by using an appropriate method such as a spin coating method, a roll coating method, a ripping method, or an inkjet method. The protective film 4 is formed to protect the filter element 3 and the like and to flatten the surface of the color filter 1.

FIG. 8 shows an embodiment of an ink jet device for performing the process of supplying the filter element material shown in FIG. 6 (b). This inkjet device 1
Reference numeral 6 denotes a mother substrate 12 in which one of R, G, and B, for example, R color filter element material is used as ink droplets.
(See FIG. 5B) Each color filter forming area 11
It is a device for discharging and adhering to a predetermined position inside.
Inkjet devices for the G-color filter element material and the B-color filter element material are also prepared respectively, but since their structures can be the same as those in FIG. 8, description thereof will be omitted. .

In FIG. 8, the ink jet device 16
Is a head unit 26 having an inkjet head 22, a head position controller 17 for controlling the position of the inkjet head 22, a substrate position controller 18 for controlling the position of the mother substrate 12, and the inkjet head 2.
A main scanning drive device 19 for moving the main scanning unit 2 in the main scanning direction with respect to the mother substrate 12, and a sub scanning driving device 21 for moving the inkjet head 22 in the sub scanning direction with respect to the mother substrate 12.
A substrate supply device 23 that supplies the mother substrate 12 to a predetermined work position in the inkjet device 16, and a control device 2 that controls the entire inkjet device 16.
4 and.

The head position control device 17, the substrate position control device 18, the main scanning drive device 19 for moving the ink jet head 22 with respect to the mother substrate 12 in the main scanning direction, and the sub-scanning drive device 21 are mounted on the base 9. Is installed. Also, each of these devices is covered with a cover 14 as needed.

The ink jet head 22 is shown in FIG.
As shown in 0, it has a nozzle row 28 formed by arranging a plurality of nozzles 27 in a row. Nozzle 27
Is 180, the hole diameter of the nozzles 27 is 28 μm, and the nozzle pitch between the nozzles 27 is 141 μm, for example. In FIGS. 5A and 5B, the main scanning direction x with respect to the color filter 1 and the mother substrate 12 and the sub-scanning direction Y orthogonal thereto are set as shown in FIG.

The ink jet head 22 is positioned such that its nozzle row 28 extends in a direction intersecting with the main scanning direction x, and while the nozzle head 28 is moving in parallel with this main scanning direction x, a plurality of filter element materials as ink are supplied. Nozzle 2
By selectively discharging from 7, the mother substrate 12
(See FIG. 5B) The filter element material is attached at a predetermined position in the inside. Further, the inkjet head 22 is moved in parallel in the sub-scanning direction Y by a predetermined distance,
The main scanning position of the inkjet head 22 can be shifted at a predetermined interval.

The ink jet head 22 has an internal structure shown in FIGS. 12 (a) and 12 (b), for example.
Specifically, the inkjet head 22 includes, for example, a nozzle plate 29 made of stainless steel, a vibrating plate 31 facing the nozzle plate 29, and a plurality of partition members 32 that join them together.
Have and. A plurality of ink chambers 33 and a liquid pool 34 are formed between the nozzle plate 29 and the vibration plate 31 by the partition member 32. A plurality of ink chambers 33 and liquid pools 34
And communicate with each other via a passage 38.

An ink supply hole 36 is formed at an appropriate position on the vibration plate 31, and an ink supply device 37 is provided in the ink supply hole 36.
Are connected. The ink supply device 37 supplies one of R, G, and B, for example, R color filter element material M to the ink supply hole 36. The supplied filter element material M fills the liquid pool 34 and further fills the ink chamber 33 through the passage 38.

The nozzle plate 29 is provided with nozzles 27 for jetting the filter element material M from the ink chamber 33 in a jet shape. The ink chamber 33 is formed on the back surface of the surface of the vibrating plate 31 where the ink chamber 33 is formed.
The ink pressurizing body 39 is attached corresponding to.
This ink pressurizing body 39, as shown in FIG.
The piezoelectric element 41 and a pair of electrodes 42a and 42b sandwiching the piezoelectric element 41 are provided. The piezoelectric element 41 includes electrodes 42a and 42a.
By energizing b, it is flexibly deformed so as to project to the outside as indicated by arrow C, and the volume of the ink chamber 33 increases. Then, the filter element material M corresponding to the increased volume flows from the liquid pool 34 into the ink chamber 33 through the passage 38.

Next, when the energization of the piezoelectric element 41 is released, both the piezoelectric element 41 and the diaphragm 31 return to their original shapes. As a result, the ink chamber 33 also returns to its original volume, so the pressure of the filter element material M inside the ink chamber 33 rises, and the nozzle 27 causes the mother substrate 12 (see FIG.
The filter element material M is ejected as droplets 8 toward (see (b)). In addition, in the peripheral portion of the nozzle 27,
An ink repellent layer 43 made of, for example, a Ni-tetrafluoroethylene eutectoid plating layer is provided in order to prevent flight deflection of the droplet 8 and clogging of the nozzle 27.

In FIG. 9, the head position control device 17
Is an α motor 44 that rotates the inkjet head 22 in-plane, a β motor 46 that swings and rotates the inkjet head 22 about an axis parallel to the sub-scanning direction Y, and an axis motor that rotates the inkjet head 22 about an axis parallel to the main scanning direction. It has a γ motor 47 that swings and rotates, and a Z motor 48 that translates the inkjet head 22 in the vertical direction.

The board position control device 18 shown in FIG. 8 includes a table 49 on which the mother board 12 is placed in FIG.
The table 49 has a θ motor 51 that rotates the table 49 in a plane as indicated by an arrow θ. Further, as shown in FIG. 9, the main scanning drive device 19 shown in FIG. 8 has a guide rail 52 extending in the main scanning direction x and a slider 53 incorporating a pulse-driven linear motor. The slider 53 moves in parallel in the main scanning direction along the guide rail 52 when the built-in linear motor operates.

Further, the sub-scanning drive device 21 shown in FIG.
As shown in FIG. 9, has a guide rail 54 extending in the sub-scanning direction Y and a slider 56 having a pulse-driven linear motor built therein. The slider 56 moves in parallel in the sub-scanning direction Y along the guide rail 54 when the built-in linear motor operates.

The linear motor pulse-driven in the slider 53 or the slider 56 can precisely control the rotation angle of the output shaft by the pulse signal supplied to the motor, and therefore the ink jet head supported by the slider 53. 22 main scanning direction x upper position and table 4
The position of 9 in the sub-scanning direction Y can be controlled with high precision. The position control of the inkjet head 22 and the table 49 is not limited to the position control using the pulse motor, and may be realized by feedback control using a servo motor or any other control method.

The substrate supply device 23 shown in FIG. 8 includes a substrate accommodation portion 57 for accommodating the mother substrate 12 and a mother substrate 12.
And a robot 58 for carrying the. The robot 58
A base 59 placed on an installation surface such as a floor or the ground, a lift shaft 61 that moves up and down with respect to the base 59, a first arm 62 that rotates about the lift shaft 61, and a first arm 62.
The second arm 63 rotates with respect to the second arm 63, and the suction pad 64 provided on the lower surface of the tip of the second arm 63. The suction pad 64 can suck the mother substrate 12 by air suction or the like.

In FIG. 8, an ink jet head 22 which is driven by a main scanning drive device 19 to move in the main scanning direction.
A capping device 76 and a cleaning device 77 are arranged at the side of one side of the sub-scanning drive device 21 under the locus. Further, an electronic balance 78 is arranged at the other side position. The cleaning device 77 is a device for cleaning the inkjet head 22. The electronic balance 78 is a device that measures the weight of ink droplets ejected from each nozzle 27 (see FIG. 10) in the inkjet head 22 for each nozzle. The capping device 76 is a device for preventing the nozzles 27 (see FIG. 10) from drying when the inkjet head 22 is in the standby state.

In the vicinity of the inkjet head 22, a head camera 81 is arranged so as to move integrally with the inkjet head 22. In addition, the substrate camera 8 supported by a supporting device (not shown) provided on the base 9.
2 is arranged at a position where the mother board 12 can be photographed.

The control device 24 shown in FIG. 8 includes a computer main body 66 containing a processor, a keyboard 67 as an input device, and a CRT as a display device.
(Cathode Ray Tube) display 68. As shown in FIG. 14, the processor includes a CPU (Central Processing Unit) 69 that performs arithmetic processing, and a memory that stores various information, that is, an information storage medium 71.

The head position control device 17, the substrate position control device 18, the main scanning drive device 19, the sub-scanning drive device 21, and the piezoelectric element 41 in the ink jet head 22 shown in FIG. 8 (see FIG. 12B). 14, each device of the head drive circuit 72 for driving is connected to the CPU 69 via an input / output interface 73 and a bus 74. Further, the substrate supply device 23, the input device 67, the display 68, the electronic balance 78, the cleaning device 77, and the capping device 76 are also connected to the CPU 69 via the input / output interface 73 and the bus 74.

The memory 71 is a RAM (Random Access Me
mory), a semiconductor memory such as a ROM (Read Only Memory), a hard disk, a CD-ROM reader,
This is a concept including an external storage device such as a disk type storage medium and the like, and functionally, a storage area for storing program software in which a control procedure of the operation of the inkjet device 16 is described, various Rs shown in FIG. A mother substrate 12 of one color of R, G, B for realizing the G, B array (see FIG.
Storage area for storing the ejection position as coordinate data, a storage area for storing the sub-scanning movement amount of the mother substrate 12 in the sub-scanning direction Y in FIG. 9, and a work area for the CPU 69. Areas that function as temporary files, temporary files, and other various storage areas are set.

The CPU 69 controls the discharge of ink, that is, the filter element material, to a predetermined position on the surface of the mother substrate 12 according to the program software stored in the memory 71, and a specific function realizing section. As a cleaning operation, a cleaning operation unit for performing the cleaning process, a capping operation unit for performing the capping process, and an operation for achieving weight measurement using the electronic balance 78 (see FIG. 8) are performed. It has a weight measurement calculation unit and a drawing calculation unit that performs calculation for drawing the filter element material by inkjet.

If the drawing calculation unit is divided in detail, the drawing start position calculation unit for setting the ink jet head 22 to the initial position for drawing and the ink jet head 2 will be described.
A main-scanning control calculation unit that calculates a control for scanning and moving 2 in the main-scanning direction x at a predetermined speed, and a control for shifting the mother substrate 12 in the sub-scanning direction Y by a predetermined sub-scanning amount. A sub-scanning control calculation unit, and a nozzle discharge control calculation unit that performs a calculation for controlling which of the plurality of nozzles 27 in the inkjet head 22 is operated to discharge the ink, that is, the filter element material. It has various function calculators.

In the present embodiment, each function described above is
Although the PU 69 is used to realize the function in software, if each of the functions described above can be realized by a single electronic circuit that does not use a CPU, such an electronic circuit can be used.

The operation of the ink jet device 16 having the above structure will be described below with reference to the flow chart shown in FIG.

When the ink jet device 16 is activated by turning on the power by the operator, first, the initial setting is executed in step S1. Specifically, the head unit 26, the substrate supply device 23, the control device 24, etc. are set to a predetermined initial state.

Next, if the weight measurement timing comes (YES in step S2), the head unit 26 of FIG.
Is moved to the electronic balance 78 of FIG. 8 by the main scanning drive device 19 (step S3), and the amount of ink ejected from the nozzle 27 is measured using the electronic balance 78 (step S4). Then, the voltage applied to the piezoelectric element 41 corresponding to each nozzle 27 is adjusted according to the ink ejection characteristics of the nozzle 27 (step S5).

Next, when the cleaning timing comes (YES in step S6), the head unit 26 is moved to the cleaning device 77 by the main scanning drive device 19 (step S7), and the inkjet head is driven by the cleaning device 77. 22 is cleaned (step S8).

When the timing of weight measurement or the timing of cleaning has not arrived (N in steps S2 and S6)
O) or when the processing is completed, the substrate supply device 23 of FIG. 8 is operated to supply the mother substrate 12 to the table 49 in step S9. Specifically, the mother substrate 12 in the substrate housing portion 57 is attached to the suction pad 6
4, the lifting / lowering shaft 61, the first arm 62 and the second arm 63 are moved to convey the mother substrate 12 to the table 49, and the positioning pin 50 ( Press on (Fig. 9). In order to prevent the mother substrate 12 from being displaced on the table 49, it is desirable to fix the mother substrate 12 to the table 49 by means such as air suction.

Next, while observing the mother board 12 with the board camera 82 of FIG. 8, the output shaft of the θ motor 51 of FIG.
The mother substrate 12 is positioned by rotating the substrate 9 in the unit of a minute angle (step S10). Next, while observing the mother substrate 12 by the head camera 81 of FIG. 8, the position at which drawing is started by the inkjet head 22 is determined by calculation (step S11), and the main scanning drive device 19 and the sub-scanning drive device 21 are determined. Are appropriately operated to move the inkjet head 22 to the drawing start position (step S12).

At this time, the ink jet head 22 is
As shown in the position (a) of FIG. 1, the nozzle row 28 is arranged so as to be inclined at an angle θ with respect to the sub-scanning direction Y of the inkjet head 22. This is because, in the case of an ordinary inkjet device, the nozzle pitch, which is the distance between the adjacent nozzles 27, and the element pitch, which is the distance between the adjacent filter elements 3, that is, the filter element forming regions 7, are different. This is a measure to make the dimension component of the nozzle pitch in the sub-scanning direction Y geometrically equal to the element pitch when the inkjet head 22 is moved in the main scanning direction x.

When the ink jet head 22 is placed at the drawing start position in step S12 of FIG. 15, the ink jet head 22 is placed at the position (a) in FIG. Then, in step S13 of FIG. 15, main scanning in the main scanning direction x is started, and at the same time, ink ejection is started. Specifically, the main scanning drive device 19 in FIG. 9 operates to cause the inkjet head 22 to linearly scan and move in the main scanning direction x in FIG. 1 at a constant speed, and a filter to which ink should be supplied during the movement. When the nozzle 27 corresponding to the element region 7 arrives, the ink, that is, the filter element material, is ejected from the nozzle 27.

The amount of ink ejected at this time is not an amount that fills the entire volume of the filter element region 7, but is a fraction of the total amount, which is ¼ of the total amount in this embodiment. This is because, as will be described later, each filter element region 7 is not filled by a single ink ejection from the nozzle 27, but by repeated ejection of several ink ejections, four ejections in this embodiment. This is because it is supposed to fill the entire volume.

When the main scanning for one line on the mother substrate 12 is completed (YES in step S14), the ink jet head 22 moves in the reverse direction and returns to the initial position (a) (step S15). Further, the inkjet head 22 is driven by the sub-scanning drive device 21 and moves in the sub-scanning direction Y by a predetermined sub-scanning amount δ (step S16).

In this embodiment, the CPU 69 conceptually divides the plurality of nozzles 27 forming the nozzle row 28 of the ink jet head 22 into a plurality of groups n in FIG. In the present embodiment, n = 4, that is, the nozzle array 28 of 180 nozzles 27 and having a length L is divided into four groups. As a result, one nozzle group is determined to have a length L / n including 180/4 = 45 nozzles 27, that is, L / 4. The sub-scanning amount δ is set to the length of the nozzle group length L / 4 in the sub-scanning direction, that is, (L / 4) cos θ.

Therefore, the ink jet head 22 which has returned to the initial position (a) after completing the main scanning for one line, moves in parallel in the sub scanning direction Y by the distance δ to the position (b). It should be noted that in FIG. 1, the position (a) and the position (b) are drawn with a slight deviation with respect to the main scanning direction x, but this is a measure for making the description easy to understand,
Actually, the position (a) and the position (b) are the same position in the main scanning direction x.

The ink-jet head 22 that has moved to the position (b) in the sub-scan repeats the main-scan movement and the ink ejection in step S13. During this main scanning movement,
Color filter forming area 11 on mother substrate 12
The line in the second row in the first nozzle group receives the ink ejection for the first time, and the line in the first column receives the second ink ejection by the second nozzle group from the first.

Thereafter, the ink jet head 22 is
The main scanning movement and the ink ejection are repeated while repeating the sub scanning movement from the position (c) to the position (k) (steps S13 to S16).
The ink adhesion process for one column of the second color filter formation region 11 is completed. In this embodiment, since the nozzle row 28 is divided into four groups and the sub-scanning amount δ is determined, when the main scanning and sub-scanning for one row of the color filter forming area 11 is completed, each filter element area is finished. 7 is once for each of the 4 nozzle groups, for a total of 4
After the ink ejection process is performed once, a predetermined amount of ink, that is, the filter element material, is entirely supplied into the entire volume.

Thus, 1 of the color filter forming area 11 is formed.
When the ink ejection for the column is completed, the inkjet head 22 is driven by the sub-scanning driving unit 21 to be conveyed to the initial position of the color filter forming region 11 of the next column (step S19), and the color filter forming region 11 of the column. On the other hand, the main scanning, the sub scanning and the ink ejection are repeated to form the filter element in the filter element forming area 7 (steps S13 to S16).

After that, when the filter elements 3 of one color of R, G, B, for example, R1 color are formed for all the color filter forming regions 11 in the mother substrate 12 (YES in step S18), the mother is processed in step S20. Board 1
The processed mother substrate 12 is discharged to the outside by the substrate supply device 23 or another transfer device. After that, unless the operator gives an instruction to end the process (NO in step S21), the process returns to step S2 to repeat the ink ejection work for the R1 color on another mother substrate 12.

When the operator gives an instruction to finish the work (YES in step S21), the CPU 69 conveys the inkjet head 22 to the capping device 76 in FIG. 8, and caps the inkjet head 22 with the capping device 76. Processing is performed (step S22).

As described above, the patterning for the first color, for example, the R color of the three colors of R, G, B constituting the color filter is completed.
The second color G, B, for example, the color G is conveyed to the ink jet device 16 using the filter element material as a filter element material to perform the patterning of the color G, and finally the third color R, G, B, for example the color B is filtered It is conveyed to the inkjet device 16 which is an element material, and B-color patterning is performed. As a result, the mother substrate 12 having a plurality of color filters 1 (FIG. 5A) having a desired R, G, B dot arrangement such as a stripe arrangement is manufactured. By cutting the mother substrate 12 for each color filter region 11, a plurality of one color filter 1 is cut out.

If the color filter 1 is used for color display of a liquid crystal device, an electrode, an alignment film, etc. are further laminated on the surface of the color filter 1. In such a case, if the mother substrate 12 is cut and individual color filters 1 are cut out before laminating the electrodes, the alignment film, and the like, the subsequent step of forming the electrodes and the like becomes very troublesome. Therefore, in such a case, after the color filter 1 is completed on the mother substrate 12, the mother substrate 12 is not immediately cut, but necessary additional steps such as electrode formation and alignment film formation are completed. It is desirable to cut the mother substrate 12 later.

As described above, according to the color filter manufacturing method and manufacturing apparatus of the present embodiment, the individual filter elements 3 in the color filter 1 shown in FIG.
Is not formed by one main scan x of the inkjet head 22 (see FIG. 1), but each one filter element 3 is n times by a plurality of nozzles 27 belonging to different nozzle groups, in the present embodiment. It is formed to have a predetermined film thickness by receiving ink discharge four times. Therefore, even if there is a variation in the ink ejection amount among the plurality of nozzles 27, it is possible to prevent variation in the film thickness between the plurality of filter elements 3, and therefore the light transmission characteristics of the color filter are flat. Can be made uniform uniformly.

Of course, in the manufacturing method of this embodiment, since the filter element 3 is formed by ink ejection using the ink jet head 22, there is no need to go through complicated steps such as the method using the photolithography method, and There is no waste of material.

By the way, the fact that the distribution of the ink ejection amounts of the plurality of nozzles 27 forming the nozzle row 28 of the ink jet head 22 becomes non-uniform is as described with reference to FIG. Further, in particular, several nozzles 27 present at both ends of the nozzle row 28, for example, 10 nozzles on one end side, are provided.
However, as described above, the ink ejection amount is particularly large. It is not preferable to use a nozzle that ejects a particularly large amount of ink as compared with the other nozzles in terms of making the ink ejection film, that is, the film thickness of the filter element uniform.

Therefore, desirably, as shown in FIG. 13, some of the plurality of nozzles 27 forming the nozzle row 28, which are present at both ends E of the nozzle row 28, for example, about 10 nozzles, do not eject ink in advance. It is preferable that the nozzles 27 existing in the remaining portion F are divided into a plurality of groups, for example, four groups, and the sub-scanning movement is performed in units of the nozzle groups.

In the first embodiment, the resin material having no translucency is used as the partition wall 6, but it is of course possible to use the translucent resin material as the transmissive partition wall 6. In that case, a black mask may be provided by separately providing a light-shielding metal film or a resin material at positions corresponding to the filter elements, for example, above the partition wall 6 or below the partition wall 6. Alternatively, the partition wall 6 may be formed of a translucent resin material and the black mask may not be provided.

In the first embodiment, R, G and B are used as the filter element, but of course R, G and B are used.
G. It is not limited to B, for example, C (cyan),
You may adopt M (magenta) and Y (yellow). In that case, the filter element materials of R, G, B may be replaced with the filter element materials having the colors of C, M, Y.

Further, in the first embodiment, the partition wall 6
However, it is also possible to form the partition wall 6 by an inkjet method similarly to the color filter.

(Second Embodiment) FIG. 2 shows a mother substrate 1 using an ink jet head 22 according to another embodiment of the method and apparatus for manufacturing a color filter according to the present invention.
2 schematically shows a case where ink, that is, filter element material, is supplied to each filter element forming area 7 in the color filter forming area 11 in 2 by ejection.

The schematic steps carried out by this embodiment are the same as the steps shown in FIG. 6, and the ink jet device used for ejecting ink is also mechanically the same as the device shown in FIG. Further, the CPU 69 of FIG. 14 conceptually divides the plurality of nozzles 27 forming the nozzle row 28 into n, for example, four nozzles, and lengths L of each nozzle group.
It is the same as the case of FIG. 1 that the sub-scanning amount δ is determined in correspondence with / n or L / 4.

The present embodiment is different from the previous embodiment shown in FIG. 1 in that the program software stored in the memory 71 in FIG. 14 is modified, and specifically, the main scanning performed by the CPU 69. This is a modification of the control calculation and the sub-scanning control calculation.

More specifically, referring to FIG.
The inkjet head 22 does not return to the initial position after the end of the scanning movement in the main scanning direction x, and immediately after the end of the main scanning movement in one direction, the movement amount δ corresponding to one nozzle group in the sub scanning direction. Just move and position (b)
After that, the scanning movement is performed in a direction opposite to the above-mentioned one direction of the main scanning direction ×, and the scanning is controlled to return to the position (b ′) which is deviated from the initial position (a) by the distance δ in the sub scanning direction. Note that ink is selectively ejected from the plurality of nozzles 27 during both the main scanning from the position (a) to the position (b) and the main scanning movement from the position (b) to the position (b ′). Of course, it is discharged.

That is, in the present embodiment, the main scanning and the sub-scanning of the ink jet head 22 are continuously and alternately performed without interposing the returning operation, and thus the time spent for the returning operation is reduced. The work time can be shortened by omitting it.

(Third Embodiment) FIG. 3 shows a mother substrate 1 using an inkjet head 22 according to another embodiment of the method and apparatus for manufacturing a color filter according to the present invention.
2 schematically shows a case where ink, that is, filter element material, is supplied to each filter element forming area 7 in the color filter forming area 11 in 2 by ejection.

The schematic steps carried out by this embodiment are the same as those shown in FIG. 6, and the ink jet device used for ejecting ink is also mechanically the same as the device shown in FIG. It is also the same as in the case of FIG. 1 that the CPU 69 of FIG. 14 conceptually divides the plurality of nozzles 27 forming the nozzle row 28 into n, for example, four nozzles.

This embodiment differs from the previous embodiment shown in FIG. 1 in that when the ink jet head 22 is set at the drawing start position of the mother substrate 12 in step S12 of FIG. (A)
As shown in the position, the direction in which the nozzle row 28 extends is parallel to the sub-scanning direction Y. Such a nozzle arrangement structure is advantageous when the nozzle pitch for the inkjet head 22 and the element pitch for the mother substrate 12 are equal.

Also in this embodiment, the ink jet head 22 moves from the initial position (a) to the end position (k) in the main scanning direction x, in the main scanning direction x, in the initial position and in the sub-scanning direction Y. While repeating the sub-scanning movement with the movement amount δ, the ink, that is, the filter element material, is selectively ejected from the plurality of nozzles 27 during the period of the main scanning movement, whereby the color filter forming area 11 in the mother substrate 12 is formed. The filter element material is attached to the inside of the filter element forming region 7.

In this embodiment, since the nozzle row 28 is set parallel to the sub-scanning direction Y, the sub-scanning movement amount δ is the length L / n of the divided nozzle groups, that is, L / 4. Is set equal to.

(Fourth Embodiment) FIG. 4 shows a mother substrate 1 using an ink jet head 22 according to another embodiment of the method and apparatus for manufacturing a color filter according to the present invention.
2 schematically shows a case where ink, that is, filter element material, is supplied to each filter element forming area 7 in the color filter forming area 11 in 2 by ejection.

The schematic steps carried out by this embodiment are the same as those shown in FIG. 6, and the ink jet device used for ejecting ink is also mechanically the same as the device shown in FIG. It is also the same as in the case of FIG. 1 that the CPU 69 of FIG. 14 conceptually divides the plurality of nozzles 27 forming the nozzle row 28 into n, for example, four nozzles.

This embodiment differs from the previous embodiment shown in FIG. 1 in that when the ink jet head 22 is set at the drawing start position of the mother substrate 12 in step S12 of FIG. As shown in (a), the direction in which the nozzle row 28 extends is the sub-scanning direction Y.
2 is that the main scanning and sub-scanning of the inkjet head 22 are continuously and alternately performed without intervening the return operation as in the case of the embodiment of FIG.

In the present embodiment shown in FIG. 4 and the previous embodiment shown in FIG. 3, since the main scanning direction x is the direction perpendicular to the nozzle row 28, the nozzle row 28 is as shown in FIG. By providing two columns along the main scanning direction x,
1 by two nozzles 27 mounted on the same main scanning line
One filter element region 7 can be supplied with filter element material.

(Fifth Embodiment) FIG. 16 shows an ink jet head 22A used in still another embodiment of the color filter manufacturing method and manufacturing apparatus according to the present invention. The inkjet head 22A differs from the inkjet head 22 shown in FIG. 10 in that a nozzle row 28R for ejecting R color ink, a nozzle row 28G for ejecting G color ink, and a nozzle row 28B for ejecting B color ink.
12 is formed in one ink jet head 22A, and each of these three types is shown in FIG.
The ink discharge system shown in FIGS. 12A and 12B is provided,
The R ink supply device 37R is connected to the ink ejection system corresponding to the R color nozzle row 28R, the G ink supply device 37G is connected to the ink ejection system corresponding to the G color nozzle row 28G, and the B color nozzle row 28B. The B ink supply device 37B is connected to the ink ejection system corresponding to.

The schematic steps carried out by this embodiment are the same as those shown in FIG. 6, and the ink jet device used for ejecting ink is basically the same as the device shown in FIG. In addition, the CPU 69 of FIG. 14 conceptually divides the plurality of nozzles 27 forming the nozzle rows 28R, 28G, and 28B into n, for example, four groups, and moves the inkjet head 22A in the sub-scanning movement for each of these nozzle groups. The sub-scanning movement by the amount δ is also the same as in the case of FIG.

In the embodiment shown in FIG. 1, the ink jet head 22 is provided with only one type of nozzle row 28. Therefore, when forming a color filter with three colors of R, G and B, it is shown in FIG. Inkjet head 2
2 had to be prepared for each of the three colors R, G, B. On the other hand, when the inkjet head 22A having the structure shown in FIG. 16 is used, three colors of R, G, and B are simultaneously transferred to the mother substrate 12 by one main scan of the inkjet head 22A in the main scanning direction x. Since it can be attached, the inkjet head 2
You only need to prepare one for 2. Further, by matching the nozzle row intervals of the respective colors with the pitch of the filter element regions of the mother substrate, it is possible to simultaneously strike three colors of RGB.

(Sixth Embodiment) FIG. 17 shows an embodiment of a method for manufacturing a liquid crystal device according to the present invention. Also,
FIG. 18 shows an embodiment of a liquid crystal device manufactured by the manufacturing method. Further, FIG. 19 shows a cross-sectional structure of the liquid crystal device taken along the line I × -I × in FIG. Prior to the description of the manufacturing method and the manufacturing apparatus of the liquid crystal device, first, the liquid crystal device manufactured by the manufacturing method will be described by taking an example thereof. The liquid crystal device of this embodiment is a transflective liquid crystal device that performs full-color display with a simple matrix system.

In FIG. 18, a liquid crystal device 101 includes a liquid crystal panel 102 and a liquid crystal driving IC 1 as a semiconductor chip.
03a and 103b are mounted, and F as a wiring connection element
It is formed by connecting a PC (Flexible Printed Circuit) 104 to the liquid crystal panel 102 and further providing an illumination device 106 as a backlight on the back surface side of the liquid crystal panel 102.

The liquid crystal panel 102 is formed by bonding the first substrate 107a and the second substrate 107b with the sealing material 108. The sealing material 108 is formed by, for example, screen-printing or the like and attaching an epoxy resin to the inner surface of the first substrate 107a or the second substrate 107b in an annular shape. In addition, the sealing material 10
As shown in FIG. 19, a conductive material 109 formed of a conductive material in a spherical shape or a cylindrical shape is contained inside 8 in a dispersed state.

In FIG. 19, the first substrate 107a has a plate-shaped base material 111a made of transparent glass, transparent plastic, or the like. A reflective film 112 is formed on the inner surface (upper surface in FIG. 19) of the base material 111a, an insulating film 113 is laminated thereon, and the first electrode 114a is formed in a stripe shape (see FIG.
(Refer to FIG. 3), and an alignment film 116a is further formed thereon. A polarizing plate 117a is attached to the outer surface (lower surface of FIG. 19) of the base material 111a by sticking or the like.

In FIG. 18, in order to show the arrangement of the first electrodes 114a in an easy-to-understand manner, their stripe intervals are drawn much wider than they actually are, and thus the number of the first electrodes 114a is drawn smaller. In reality, the first electrode 11
A larger number of 4a are formed on the base material 111a.

In FIG. 19, the second substrate 107b has a plate-shaped base material 111b made of transparent glass or transparent plastic. A color filter 118 is formed on the inner surface (lower surface of FIG. 19) of the base material 111b, and the second electrode 114b is formed on the color filter 118.
14a is formed in a stripe shape (see FIG. 18) as viewed from the direction of arrow D in the direction orthogonal to 14a, and the alignment film 1 is further formed thereon.
16b is formed. A polarizing plate 117b is attached to the outer surface (upper surface in FIG. 19) of the base material 111b by sticking or the like.

In FIG. 18, in order to show the arrangement of the second electrodes 114b in an easy-to-understand manner, as in the case of the first electrodes 114a, their stripe intervals are drawn much wider than they actually are, and thus the second electrodes 114b are drawn. Although the number of the second electrodes 114b is illustrated to be small, in reality, a larger number of the second electrodes 114b are formed on the base material 111b.

In FIG. 19, the first substrate 107a and the second substrate 107a
A liquid crystal such as STN is provided in a gap surrounded by the substrate 107b and the sealing material 108, that is, a so-called cell gap.
(SuperTwisted Nematic) Liquid crystal L is enclosed. A large number of minute spherical spacers 119 are dispersed on the inner surface of the first substrate 107a or the second substrate 107b, and the presence of these spacers 119 in the cell gap maintains the thickness of the cell gap uniform. .

The first electrode 114a and the second electrode 114b are arranged in an orthogonal relationship with each other, and their intersections are arranged in a dot matrix when viewed in the direction of arrow D in FIG. Then, each intersection of the dot matrix forms one picture element pixel. The color filter 118 is R
It is formed by arranging each color element of (red), G (green), and B (blue) in a predetermined pattern when viewed in the direction of the arrow D, for example, a stripe arrangement, a delta arrangement, a mosaic arrangement, or the like. The above-mentioned one picture element pixel corresponds to each one of R, G, and B, and the three-color picture element pixels of R, G, and B form one unit to form one pixel.

By selectively illuminating a plurality of picture element pixels arranged in a dot matrix pattern, that is, pixels, an image such as letters and numbers is displayed on the outside of the second substrate 107b of the liquid crystal panel 102. . The area where the image is displayed in this way is the effective pixel area, and the planar rectangular area indicated by the arrow V in FIGS. 18 and 19 is the effective display area.

In FIG. 19, the reflection film 112 is formed of a light-reflective material such as APC alloy or Al (aluminum), and is located at a position corresponding to each picture element pixel which is an intersection of the first electrode 114a and the second electrode 114b. Opening 1
21 is formed. As a result, the opening 121 is shown in FIG.
When viewed in the direction of arrow D, the pixels are arranged in the same dot matrix as the picture element pixels.

First electrode 114a and second electrode 114b
Is formed of, for example, ITO which is a transparent conductive material. The alignment films 116a and 116b are formed by attaching a polyimide resin in a film shape having a uniform thickness. By subjecting these alignment films 116a and 116b to a rubbing treatment, the initial alignment of liquid crystal molecules on the surfaces of the first substrate 107a and the second substrate 107b is determined.

In FIG. 18, the first substrate 107a is the second
The first substrate 107a is formed to have a larger area than the substrate 107b, and when these substrates are attached to each other with the sealing material 108, the first substrate 107a has a substrate overhanging portion 107c that projects to the outside of the second substrate 107b. Then, in the substrate overhanging portion 107c, the second electrode 114b on the second substrate 107b is interposed via the lead wiring 114c extending from the first electrode 114a and the conductive material 109 (see FIG. 19) existing inside the sealing material 108. A lead-out wiring 114d electrically connected to the liquid crystal driving IC 103a, an input bump of the liquid crystal driving IC 103a, that is, a metal wiring 114e connected to an input terminal, and a liquid crystal driving IC.
Metal wiring 114f connected to the input bump of 103b
Various wirings such as, etc. are formed in an appropriate pattern.

In this embodiment, the lead-out wiring 114c extending from the first electrode 114a and the lead-out wiring 114d which is electrically connected to the second electrode 114b are formed of ITO which is the same material as those electrodes, that is, a conductive oxide. The metal wirings 114e and 114f, which are wirings on the input side of the liquid crystal driving ICs 103a and 103b, are formed of a metal material having a low electric resistance value, for example, an APC alloy.
APC alloys are alloys that mainly contain Ag, with concomitant Pd and Cu, such as Ag 98%, Pd 1%, Cu.
It is an alloy composed of 1%.

Liquid crystal driving IC 103a and liquid crystal driving I
C103b is an ACF (Anisotropic Conductive Fil)
(m: anisotropic conductive film) 122, the substrate overhang 107
It is mounted by being adhered to the surface of c. That is, in this embodiment, a so-called COG (Chip On Glass) type liquid crystal panel having a structure in which a semiconductor chip is directly mounted on a substrate is formed. In this COG type mounting structure, the conductive particles contained inside the ACF 122 conductively connect the input side bumps of the liquid crystal driving ICs 103a and 103b to the metal wirings 114e and 114f, and the output side of the liquid crystal driving ICs 103a and 103b. The bumps and the lead wires 114c and 114d are conductively connected.

In FIG. 18, the FPC 104 has a flexible resin film 123, a circuit 126 including a chip part 124, and a metal wiring terminal 127. The circuit 126 is directly mounted on the surface of the resin film 123 by soldering or other conductive connection method. The metal wiring terminal 127 is formed of an APC alloy, Cr, Cu or other conductive material. The portion of the FPC 104 where the metal wiring terminal 127 is formed is the first substrate 10
ACF 122 is connected to the portion of 7a where the metal wiring 114e and the metal wiring 114f are formed. The metal particles 114e and 114f on the substrate side and the metal wiring terminal 127 on the FPC side are electrically connected by the action of the conductive particles contained inside the ACF 122.

An external connection terminal 131 is formed at the edge portion on the opposite side of the FPC 104, and this external connection terminal 131 is connected to an external circuit (not shown). Then, based on the signal transmitted from the external circuit, the liquid crystal driving IC 103a
And 103b are driven, and the scanning signal is supplied to one of the first electrode 114a and the second electrode 114b, and the data signal is supplied to the other. As a result, the dot-matrix-shaped picture element pixels arranged in the effective display area V are voltage-controlled for each pixel, and as a result, the orientation of the liquid crystal L is controlled for each picture element pixel.

In FIG. 18, the illumination device 106 functioning as a so-called backlight is, as shown in FIG.
A light guide body 132 made of acrylic resin or the like, a diffusion sheet 133 provided on the light exit plane 132b of the light guide body 132, and a reflection sheet provided on the opposite side of the light exit plane 132b of the light guide body 132. 134 and L as a light emitting source
ED (Light Emitting Diode) 136.

The LED 136 is supported by the LED substrate 137, and the LED substrate 137 is mounted on, for example, a supporting portion (not shown) formed integrally with the light guide body 132. LE
By mounting the D substrate 137 at a predetermined position on the support portion, the LED 136 is placed at a position facing the light receiving surface 132a, which is the side end surface of the light guide body 132. Note that reference numeral 138 indicates a cushioning material for cushioning the impact applied to the liquid crystal panel 102.

When the LED 136 emits light, the light is taken in from the light taking-in surface 132a and guided into the inside of the light guide body 132, and while being reflected while being reflected by the reflection sheet 134 and the wall surface of the light guide body 132, the light emitting surface. It is emitted from the surface 132b through the diffusion sheet 133 to the outside as plane light.

Since the liquid crystal device 101 of the present embodiment is configured as described above, when the external light such as sunlight and indoor light is sufficiently bright, the external light is emitted from the second substrate 107b side in FIG. Are taken into the liquid crystal panel 102, and the light passes through the liquid crystal L, is reflected by the reflection film 112, and is supplied to the liquid crystal L again. The orientation of the liquid crystal L is controlled for each pixel pixel of R, G, and B by the electrodes 114a and 114b sandwiching the liquid crystal L.
The light supplied to the pixel pixel is modulated for each pixel, and an image such as a character or a number is displayed on the outside of the liquid crystal panel 102 by the light that passes through the polarizing plate 117b and the light that cannot pass through the modulation. As a result, reflective display is performed.

On the other hand, when a sufficient amount of external light is not obtained, the LED 136 emits light and plane light is emitted from the light emitting surface 132b of the light guide 132, and the light is reflected.
It is supplied to the liquid crystal L through the opening 121 formed in 2. At this time, similarly to the reflection type display, the supplied light is modulated for each pixel by the liquid crystal L whose orientation is controlled, whereby an image is displayed to the outside. Thereby, transmissive display is performed.

The liquid crystal device 101 having the above structure is manufactured, for example, by the manufacturing method shown in FIG. In this manufacturing method, a series of steps P1 to P6 is a step of forming the first substrate 107a, and steps P11 to P1.
A series of steps 4 is a step of forming the second substrate 107b. Usually, the first substrate forming step and the second substrate forming step are independently performed.

First, the step of forming the first substrate will be described. The liquid crystal panel 10 is formed on the surface of a mother material base material having a large area formed of translucent glass, translucent plastic or the like.
Two reflective films 112 for two or more are formed by a photolithography method or the like, and an insulating film 113 is further formed thereon by a known film forming method (step P1), and then the photolithography method or the like. Using the first electrode 114a and the wiring 1
14c, 114d, 114e, 114f are formed (process P2).

Next, an alignment film 116a is formed on the first electrode 114a by coating, printing or the like (step P3), and the alignment film 116a is rubbed to determine the initial alignment of the liquid crystal. (Process P4). next,
For example, the sealing material 108 is formed in an annular shape by screen printing or the like (process P5), and spherical spacers 119 are further dispersed thereon (process P6). As described above, a large-area mother first substrate having a plurality of panel patterns on the first substrate 107a of the liquid crystal panel 102 is formed.

Apart from the above first substrate forming step, the second substrate forming step (step P11 to step P14 in FIG. 17) is performed. First, a large-area mother raw material base material made of translucent glass, translucent plastic, or the like is prepared, and the surface thereof has a plurality of color filters 1 for the liquid crystal panel 102.
18 is formed (process P11). This color filter forming step is performed by using the manufacturing method shown in FIG. 6, and the R, G, and B color filter elements in the manufacturing method are formed by using the inkjet device 16 shown in FIG. This is performed according to the control method of the inkjet head shown in FIG. 2, FIG. 3, FIG. Since the method of manufacturing these color filters and the method of controlling the inkjet head are the same as those already described, their description will be omitted.

When the color filter 1 or the color filter 118 is formed on the mother substrate 12 or the mother raw material base material as shown in FIG. 6D, the second electrode 114b is then formed by the photolithography method. (Process P12), and the alignment film 1 is further formed by coating, printing, etc.
16b is formed (process P13), and the alignment film 1 is further formed.
16b is subjected to a rubbing treatment to determine the initial alignment of the liquid crystal (process P14). As described above, a large-area mother second substrate having a plurality of panel patterns on the second substrate 107b of the liquid crystal panel 102 is formed.

After the large-sized mother first substrate and mother second substrate are formed as described above, these mother substrates are aligned with each other with the sealing material 108 sandwiched therebetween, that is, aligned, and then bonded to each other (step P21). ). As a result, an empty panel structure including a plurality of liquid crystal panel panels and in which liquid crystal is not yet filled is formed.

Next, a scribe groove, that is, a cutting groove is formed at a predetermined position of the completed empty panel structure, and the panel structure is broken or cut based on the scribe groove (step P22). As a result, the liquid crystal injection opening 11 of the sealing material 108 of each liquid crystal panel portion is formed.
A so-called strip-shaped empty panel structure in which 0 (see FIG. 18) is exposed to the outside is formed.

Then, the liquid crystal L is injected into each liquid crystal panel portion through the exposed liquid crystal injection opening 110, and each liquid crystal injection port 110 is sealed with resin or the like (process P23). A normal liquid crystal injection process is, for example, to store liquid crystal in a storage container, put the storage container in which the liquid crystal is stored and a strip-shaped empty panel into a chamber, etc., and then evacuate the chamber, etc. This is performed by immersing a strip-shaped empty panel in the liquid crystal inside the chamber and then opening the chamber to atmospheric pressure. At this time, since the inside of the empty panel is in a vacuum state, the liquid crystal pressurized by the atmospheric pressure is introduced into the inside of the panel through the liquid crystal injection opening. Since the liquid crystal is attached around the liquid crystal panel structure after the liquid crystal is injected, the strip-shaped panel after the liquid crystal injection is subjected to the cleaning process in step 24.

Thereafter, scribing grooves are formed again at predetermined positions on the strip-shaped mother panel after the liquid crystal injection and cleaning are completed, and the strip-shaped panels are cut based on the scribing grooves to form a plurality of strip-shaped panels. Individual liquid crystal panels are cut out (process P25). As shown in FIG. 18, liquid crystal driving ICs 103a and 103b are mounted on each liquid crystal panel 102 thus manufactured, and a lighting device 106 is mounted as a backlight.
By connecting 104, the target liquid crystal device 10
1 is completed (process P26).

The liquid crystal device manufacturing method and manufacturing apparatus described above have the following characteristics particularly at the stage of manufacturing a color filter. That is, the color filter 1 shown in FIG. 5A, that is, the color filter 11 shown in FIG.
The individual filter elements 3 in 8 are not formed by one main scan X of the inkjet head 22 (see FIG. 1), but each one filter element 3 is provided with a plurality of nozzles 27 belonging to different nozzle groups. In this way, the ink is ejected repeatedly n times, for example, four times to form a predetermined film thickness. Therefore, even if there is a variation in the ink ejection amount among the plurality of nozzles 27, it is possible to prevent variation in the film thickness between the plurality of filter elements 3, and therefore the light transmission characteristics of the color filter are flat. Can be made uniform uniformly. This means that in the liquid crystal device 101 of FIG. 19, a clear color display without color unevenness can be obtained.

Further, in the liquid crystal device manufacturing method and the manufacturing apparatus of the present embodiment, since the filter element 3 is formed by ejecting ink using the ink jet head 22 by using the ink jet device 16 shown in FIG. 8, the photolithography method is used. There is no need to go through complicated steps such as the method using, and no material is wasted.

(Seventh Embodiment) FIG. 20 shows an embodiment of a method for manufacturing an EL device according to the present invention. Also,
FIG. 21 shows the main steps of the manufacturing method and the main sectional structure of the EL device finally obtained. As shown in FIG. 21D, in the EL device 201, the pixel electrodes 202 are formed on the transparent substrate 204, and the bank 2 is provided between the pixel electrodes 202.
05 are formed in a lattice shape when viewed from the arrow G direction, the hole injection layer 220 is formed in the lattice-shaped recesses, and R color light emission is performed so as to have a predetermined array such as a stripe array when viewed from the arrow G direction. The layer 203R, the G-color light emitting layer 203G, and the B-color light emitting layer 203B are formed in each lattice-shaped recess, and the counter electrode 213 is formed thereon.

The pixel electrode 202 is replaced with a TFD (Thin Film).
When driven by a two-terminal active element such as a diode (thin film diode) element, the counter electrode 213 is formed in a stripe shape when viewed in the direction of arrow G. In addition, the pixel electrode 202 is connected to a TFT (Thin Film Transi
stor: thin film transistor) or the like, when driven by a three-terminal active element, the counter electrode 21
3 is formed as a single surface electrode.

The region sandwiched by each pixel electrode 202 and each counter electrode 213 becomes one pixel pixel, and R,
G and B pixel pixels of three colors become one unit 1
Form two pixels. By controlling the current flowing through each picture element pixel, a desired one of the plurality of picture element pixels is selectively caused to emit light, whereby a desired full-color image can be displayed in the arrow H direction.

The EL device 201 is manufactured, for example, by the manufacturing method shown in FIG. That is, the process P5
1 and FIG. 21A, active elements such as TFD elements and TFT elements are formed on the surface of the transparent substrate 204,
Further, the pixel electrode 202 is formed. As a forming method,
For example, a photolithography method, a vacuum deposition method, a sputtering method, a pyrosol method or the like can be used. The material of the pixel electrode is ITO (Indium Tin Oxide),
Tin oxide, a composite oxide of indium oxide and zinc oxide, or the like can be used.

Next, as shown in step P52 and FIG. 21A, partition walls or banks 205 are formed by using a well-known patterning method, for example, a photolithography method, and the banks 205 are formed between the transparent electrodes 202. buried. As a result, it is possible to improve the contrast, prevent color mixture of the light emitting material, and prevent light leakage between pixels. The material of the bank 205 is not particularly limited as long as it has durability against the solvent of the EL material, but can be treated with fluorine by fluorocarbon gas plasma treatment, for example, an organic resin such as an acrylic resin, an epoxy resin, or a photosensitive polyimide. Materials are preferred.

Immediately before the application of the hole injection layer ink, the substrate 204 was subjected to continuous plasma treatment of oxygen gas and fluorocarbon gas plasma (process P53). As a result, the polyimide surface is rendered water repellent and the ITO surface is rendered hydrophilic, and the wettability on the substrate side for fine patterning of inkjet droplets can be controlled. As an apparatus for generating plasma, an apparatus for generating plasma in vacuum or an apparatus for generating plasma in the atmosphere can be used as well.

Next, as shown in process P54 and FIG. 21A, the hole injection layer ink is ejected from the ink jet head 22 of the ink jet device 16 of FIG. 8 to perform patterning coating on each pixel electrode 202. went. As a specific method for controlling the inkjet head, the method shown in FIG. 1, FIG. 2, FIG. 3 or FIG. 4 was used. After the application, vacuum (1 t
ortho) at room temperature for 20 minutes to remove the solvent (process P55), and then heat-treated in the atmosphere at 20 ° C. (on a hot plate) for 10 minutes to inject holes that are incompatible with the light emitting layer ink. The layer 220 was formed (process P56).
The film thickness was 40 nm.

Next, as shown in Step P57 and FIG. 21B, the hole injection layer 22 in each filter element region.
The ink for the R light emitting layer and the ink for the G light emitting layer were applied on the surface of No. 0 by an inkjet method. Here again, the ink for each light emitting layer is ejected from the inkjet head 22 of the inkjet device 16 in FIG. 8, and the method for controlling the inkjet head is in accordance with the method shown in FIG. 1, FIG. 2, FIG. 3 or FIG. According to the inkjet method, fine patterning can be easily performed in a short time. Further, the film thickness can be changed by changing the solid content concentration and the ejection amount of the ink composition.

After applying the ink for the light emitting layer, a vacuum (1 torr)
In R), the solvent is removed under the conditions of room temperature, 20 minutes, etc. (process P58), followed by heat treatment in a nitrogen atmosphere at 150 ° C. for 4 hours to conjugate the R color emitting layer 203R and the G color emitting layer 203G. Was formed (process P59). Film thickness is 50
was nm. The luminescent layer conjugated by heat treatment is insoluble in the solvent.

The hole injection layer 2 is formed before the light emitting layer is formed.
20 may be subjected to continuous plasma treatment with oxygen gas and fluorocarbon gas plasma. Thereby, the hole injection layer 2
A fluorinated layer is formed on 20 to increase the ionization potential, so that the hole injection efficiency is increased, and an organic EL device having high luminous efficiency can be provided.

Next, as shown in step P60 and FIG. 21C, the B color light emitting layer 203B is formed into the R color light emitting layer 203R, the G color light emitting layer 203G and the hole injection layer 2 in each pixel pixel.
20 overlaid. As a result, not only the three primary colors of R, G, and B can be formed, but also the steps between the R color light emitting layer 203R and the G color light emitting layer 203G and the bank 205 can be filled and planarized. As a result, it is possible to reliably prevent a short circuit between the upper and lower electrodes. By adjusting the film thickness of the B-color light emitting layer 203B, the B-color light emitting layer 203B acts as an electron injecting and transporting layer in the laminated structure of the R color light emitting layer 203R and the G color light emitting layer 203G, and emits light of B color. do not do.

As a method for forming the B color light emitting layer 203B as described above, for example, a general spin coating method as a wet method can be adopted, or the R color light emitting layer 2 can be used.
An inkjet method similar to the method of forming the 03R and G color light emitting layers 203G can also be employed.

Thereafter, as shown in Step P61 and FIG. 21D, the counter electrode 213 is formed to manufacture the target EL device 201. The counter electrode 213 is, for example, Mg, Ag, A when it is a surface electrode.
It can be formed by using a film forming method such as a vapor deposition method or a sputtering method using l, Li or the like as a material. Further, when the counter electrode 213 is a stripe electrode, the formed electrode layer can be formed by using a patterning method such as a photolithography method.

According to the EL device manufacturing method and manufacturing apparatus described above, the control method shown in FIG. 1, FIG. 2, FIG. 3 or FIG. The hole injection layer 220 and the R, G, and B light emitting layers 203R and 203 in each pixel pixel
G and 203B are not formed by one main scan x of the inkjet head 22 (see FIG. 1), but the hole injection layer and / or each color light emitting layer in one pixel pixel are different nozzles. Multiple nozzles 2 belonging to a group
7, the ink is ejected repeatedly n times, for example, 4 times to form a predetermined film thickness. Therefore, even if there is variation in the ink ejection amount among the plurality of nozzles 27, it is possible to prevent variation in the film thickness between the plurality of pixel pixels, and therefore, the light emission distribution of the light emitting surface of the EL device. The characteristics can be made uniform in a plane.
This means that in the EL device 201 of FIG.
This means that a clear color display without color unevenness can be obtained.

Further, in the manufacturing method and the manufacturing apparatus of the EL device of this embodiment, by using the ink jet device 16 shown in FIG. 8, R, G, B color pixel pixels are ejected by ink ejection using the ink jet head 22. Since it is formed, there is no need to go through complicated steps such as a method using a photolithography method, and no material is wasted.

(Other Embodiments) The present invention has been described above with reference to the preferred embodiments, but the present invention is not limited to the embodiments and various modifications are possible within the scope of the invention described in the claims. Can be modified to

For example, in the color filter manufacturing apparatus shown in FIGS. 8 and 9, the ink jet head 22 is moved in the main scanning direction X to perform the main scanning of the substrate 12, and the substrate 12 is moved by the sub-scanning drive device 21. Accordingly, the substrate 12 is sub-scanned by the inkjet head 22, but conversely, the main scanning can be performed by moving the substrate 12 and the sub-scanning can be performed by moving the inkjet head 22.

Further, in the above embodiment, the ink jet head having a structure for ejecting ink by utilizing the flexural deformation of the piezoelectric element is used, but an ink jet head having any other structure may be used. Further, in the above embodiment,
Although only the most general configuration in which the main scanning direction and the sub-scanning direction are orthogonal has been illustrated, the relationship between the main scanning direction and the sub-scanning direction is not limited to the orthogonal relationship, and may intersect at any angle. . Further, in the above embodiments, the color filter manufacturing method and manufacturing apparatus, the liquid crystal device manufacturing method and manufacturing apparatus, and the EL device manufacturing method and manufacturing apparatus have been described as examples, but the present invention is not limited to these. Without being, it can be used for all industrial techniques for finely patterning an object. For example, various semiconductor elements (thin film transistors, thin film diodes, etc.), various wiring patterns, formation of insulating films, and the like can be cited as examples of the usage range. The material to be ejected from the head can be variously selected according to the elements formed on the object such as the substrate. For example, in addition to the above-described ink and EL light emitting material, a silica glass precursor, a metal compound, etc. Conductive material, dielectric material,
Alternatively, a semiconductor material can be given as an example. In addition, in the above-described embodiment, for the sake of simplicity, “inkjet head” is used.
Although the ejected material ejected from the inkjet head is not limited to ink, for example, the above-mentioned EL light emitting material, silica glass precursor, conductive material such as metal compound, dielectric material, or semiconductor. Needless to say, there are various materials. The liquid crystal device and the EL device manufactured by the manufacturing method of the above embodiment can be mounted on the display unit of an electronic device such as a mobile phone and a portable computer.

[0156]

According to the manufacturing method and the manufacturing apparatus of the color filter of the present invention, each filter element in the color filter is not formed by one scanning of the ink jet head, but one filter element is formed. Since the filter element is formed to have a predetermined film thickness by overlapping and receiving ink ejection by a plurality of nozzles belonging to different nozzle groups, even if the ink ejection amount varies among a plurality of nozzles, a plurality of filter elements are used. It is possible to prevent variations in the film thickness between the elements, and therefore, the light transmission characteristics of the color filter can be made uniform in a plane.

Further, since the present invention is a method using an ink jet head, there is no need to go through complicated steps like the method using a photolithography method, and no material is wasted.

Further, according to the manufacturing method and the manufacturing apparatus of the liquid crystal device according to the present invention, at the stage of manufacturing the color filter, each filter element in the color filter is formed by one scan of the ink jet head. Rather, each one filter element is formed to have a predetermined film thickness by overlapping ink ejection by a plurality of nozzles belonging to different nozzle groups, so that the ink ejection amount varies among the plurality of nozzles. Even if it exists, it is possible to prevent the film thickness from being varied among a plurality of filter elements, and therefore the light transmission characteristics of the color filter can be made uniform in a plane. As a result, a clear color image without color unevenness can be displayed.

Further, according to the manufacturing method and the manufacturing apparatus of the EL device according to the present invention, the R, G, B color light emitting layers in each pixel pixel are formed by one main scan of the ink jet head. Instead, the respective color light emitting layers are formed to have a predetermined film thickness by overlapping and receiving ink ejection by a plurality of nozzles belonging to different nozzle groups. Therefore, even if there is a variation in the ink ejection amount between the plurality of nozzles, it is possible to prevent the variation in the film thickness between the plurality of pixel pixels, and therefore,
The light emission distribution characteristics of the light emitting surface of the EL device can be made uniform in a plane, and as a result, a clear color display without color unevenness can be obtained.

Further, in the EL device manufacturing method and manufacturing apparatus of the present invention, since R, G, and B color pixel pixels are formed by ink ejection using an ink jet head, a method using a photolithography method is used. There is no need to go through complicated steps, and no material is wasted.

Further, according to the ink jet head controller of the present invention, each color pattern is not formed by one scan of the ink jet head, but each one color pattern is formed in a different nozzle group. Since a plurality of nozzles that belong to the nozzles repeatedly eject ink to form a predetermined film thickness, even if the ink ejection amount varies among the plurality of nozzles, the film thickness varies among the plurality of color patterns. Can be prevented, and therefore, the optical characteristics of the color pattern can be made uniform in the plane of the optical member.

As a result, the R, G, and B color filter elements as the color pattern in the color filter as the optical member can be formed with a planarly uniform film thickness. Further, it is possible to form the R, G, B light emitting layer and the hole injection layer as the color pattern in the EL element as the optical member with a planarly uniform film thickness.

[Brief description of drawings]

FIG. 1 is a plan view schematically showing main steps of an embodiment of a color filter manufacturing method according to the present invention.

FIG. 2 is a plan view schematically showing main steps of another embodiment of the color filter manufacturing method according to the present invention.

FIG. 3 is a plan view schematically showing main steps of still another embodiment of the color filter manufacturing method according to the present invention.

FIG. 4 is a plan view schematically showing main steps of still another embodiment of the color filter manufacturing method according to the present invention.

FIG. 5 is a plan view showing an embodiment of a color filter according to the present invention and an embodiment of a mother substrate which is a basis thereof.

FIG. 6 is a diagram schematically showing the manufacturing process of the color filter using the cross-sectional portion taken along the line VI-VI of FIG.

FIG. 7 is a diagram showing an arrangement example of R, G, and B three-color pixel pixels in a color filter.

FIG. 8 shows an embodiment of an inkjet device which is a main part of each manufacturing apparatus such as a color filter manufacturing apparatus according to the present invention, a liquid crystal device manufacturing apparatus according to the present invention, and an EL device manufacturing apparatus according to the present invention. It is a perspective view.

9 is an enlarged perspective view showing a main part of the apparatus shown in FIG.

10 is an enlarged perspective view showing an inkjet head which is a main part of the apparatus of FIG.

FIG. 11 is a perspective view showing a modified example of the inkjet head.

12A and 12B are diagrams showing the internal structure of the inkjet head, in which FIG. 12A is a partially cutaway perspective view, and FIG. 12B is a sectional structure taken along line JJ of FIG.

FIG. 13 is a plan view showing another modification of the inkjet head.

14 is a block diagram showing an electrical control system used in the inkjet head device of FIG.

15 is a flowchart showing the flow of control executed by the control system of FIG.

FIG. 16 is a perspective view showing still another modified example of the inkjet head.

FIG. 17 is a process chart showing an embodiment of a method for manufacturing a liquid crystal device according to the present invention.

FIG. 18 is a perspective view showing an example of a liquid crystal device manufactured by the method for manufacturing a liquid crystal device according to the present invention in an exploded state.

19 is a cross-sectional view showing a cross-sectional structure of the liquid crystal device, taken along the line I × -I × in FIG.

FIG. 20 is a process chart showing an embodiment of a method for manufacturing an EL device according to the present invention.

21 is a cross-sectional view of the EL device corresponding to the process drawing shown in FIG.

FIG. 22 is a diagram showing an example of a conventional color filter manufacturing method.

FIG. 23 is a diagram for explaining the characteristics of a conventional color filter.

[Explanation of symbols]

1 color filter 2 substrates 3 filter elements 4 protective film 6 partitions 7 Filter element forming area 11 Color filter forming area 12 mother board 13 Filter element material 16 Inkjet device 17 Head position controller 18 Substrate position control device 19 Main scanning drive 21 Sub-scanning drive device 22 Inkjet head 26 head unit 27 nozzles 28 nozzle row 39 Ink pressurizer 41 Piezoelectric element 49 table 76 capping device 77 Cleaning device 78 Electronic balance 81 head camera 82 Board camera 101 liquid crystal device 102 LCD panel 107a, 107b substrate 111a, 111b base material 114a, 114b electrodes 118 color filter 201 EL device 202 pixel electrode 203R, 203G, 203B Light emitting layer 204 substrate 205 banks 213 Counter electrode 220 hole injection layer L liquid crystal M filter element material × Main scanning direction Y sub-scanning direction

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI G02F 1/1335 505 H05B 33/10 H05B 33/10 33/12 B 33/12 33/14 A 33/14 B41J 3/04 101Z (72) Inventor Masaharu Shimizu 3-5 Yamato, Suwa City, Nagano Seiko Epson Corporation (72) Inventor Hiroshi Kiguchi 3-3 Yamato, Suwa City, Nagano Prefecture Seiko Epson Corporation (56 ) References JP-A 5-261918 (JP, A) JP-A 2-165962 (JP, A) JP-A 10-202851 (JP, A) JP-A 11-54270 (JP, A) JP 2000 -89019 (JP, A) JP 5-31919 (JP, A) JP 6-143618 (JP, A) JP 7-52465 (JP, A) JP 8-11298 (JP, A) ) (58) Fields surveyed (Int.Cl. ⁷ , DB name) B41J 2/01 B 05C 5/00 101 B05D 1/30 G02B 5/20 101 G02F 1/13 101 G02F 1/1335 505 H05B 33/10 H05B 33/12 H05B 33/14

Claims (11)

(57) [Claims] 1. A material discharging method for discharging a material from at least one of the nozzles to the object while moving one of a head and an object having a plurality of nozzles arranged in the main scanning direction with respect to the other. The nozzle row formed by arranging the plurality of nozzles has a discharge characteristic that the discharge amount in the middle portion thereof is small with respect to the end portion and the center portion, and is controlled so as not to discharge the material. Except for the nozzles located at the end of the nozzle row, the nozzle row is virtually divided into four groups each having the same number of nozzles, and the nozzles included in each group divide the nozzle row into the same portion of the object. In order to discharge the material, one of the head and the object is moved by one group in the sub-scanning direction with respect to the other, and the head and the object are moved. While one moving in the main scanning direction relative to the other of one of the materials the method of discharge, characterized by discharging the material from the nozzle. 2. The material discharging method according to claim 1, wherein a plurality of nozzles located at an end of the nozzle row is controlled so as not to discharge the material. Method. 3. The material discharging method according to claim 1, wherein a length of a portion of the nozzle row excluding nozzles controlled so as not to discharge the material is L, and the nozzle row is the When the angle formed with the sub-scanning direction is θ, the sub-scanning movement amount δ is δ≈ (L / 4) cos θ 2, which is the material discharging method. 4. A material discharge device for discharging a material from at least one of the nozzles while moving one of a head and an object in which a plurality of nozzles are arranged with respect to the other in the main scanning direction, A material supplying means for supplying a material to the head; a main scanning driving means for moving one of the head and the object in the main scanning direction with respect to the other; and one of the head and the object. A sub-scanning drive unit that moves in the sub-scanning direction with respect to the other, an ejection control unit that controls the ejection of the material from the plurality of nozzles, a main scanning control unit that controls the operation of the main scanning drive unit, and A sub-scanning control unit that controls the operation of the sub-scanning drive unit, and a nozzle row in which the plurality of nozzles are arranged has a small ejection amount in the middle portion between the end portion and the central portion. And the discharge control means controls the nozzles located at the end of the nozzle array so as not to discharge the material, and removes the nozzle array except for the nozzles located at the end of the nozzle array. One of the head and the target is divided into four groups having the same number of nozzles, and the nozzles included in each group discharge the material to the same portion of the target. The sub-scanning control means controls the operation of the sub-scanning driving means so as to move the group by one group in the sub-scanning direction with respect to the other, and one of the head and the object is moved to the other. On the other hand, the main scanning control means controls the operation of the main scanning driving means so that the material is discharged from the nozzle while moving in the main scanning direction. Ejection apparatus. 5. The material discharge device according to claim 4, wherein the discharge control means controls a plurality of nozzles located at an end of the nozzle row so as not to discharge the material. Discharge device for materials. 6. A color filter formed by arranging a plurality of filter elements on a substrate is at least one while moving one of the head having a plurality of nozzles and the substrate in the main scanning direction with respect to the other. A method of manufacturing a color filter by discharging a filter material from the nozzles to the substrate, wherein the nozzle row in which the plurality of nozzles are arranged has an intermediate portion between the end portion and the central portion. Of the nozzle row having the same number of nozzles, except for the nozzle located at the end of the nozzle row that is controlled so as not to eject the filter material. The head and the substrate are divided so that the filter material is ejected to the same portion of the substrate by nozzles included in each group virtually. While moving one of the groups by one group in the sub-scanning direction with respect to the other, and moving one of the head and the substrate in the main-scanning direction with respect to the other, the filter from the nozzle is moved. A method for manufacturing a color filter, which comprises discharging a material. 7. A color filter formed by arranging a plurality of filter elements on a substrate is at least one while moving one of a head having a plurality of nozzles and the substrate in the main scanning direction with respect to the other. A color filter manufacturing apparatus for manufacturing a filter material by discharging the filter material from the nozzle, wherein a material supplying unit that supplies the filter material to the head, and one of the head and the substrate is main-scanned with respect to the other. Main scanning drive means for moving in one direction, a sub-scanning driving means for moving one of the head and the substrate in the sub-scanning direction with respect to the other, and an ejection control for controlling ejection of material from the plurality of nozzles. Means, a main scanning control means for controlling the operation of the main scanning driving means, and a sub-scanning control means for controlling the operation of the sub-scanning driving means, A nozzle array in which a plurality of nozzles are arranged has ejection characteristics such that the ejection amount in the middle portion thereof is smaller than that in the end portion and the central portion, and the ejection control unit is configured so that the nozzles located at the end portions of the nozzle row are Control is performed so that the filter material is not discharged, and the nozzle row is virtually divided into four groups each having the same number of nozzles, except for the nozzles located at the ends of the nozzle row, and each group is included in each group. In order to eject the filter material to the same portion of the substrate by a nozzle, one of the head and the substrate is moved in the sub-scanning direction with respect to the other by one group at a time. While the scanning control means controls the operation of the sub-scanning driving means, and while moving one of the head and the substrate in the main scanning direction with respect to the other, Manufacturing apparatus of a color filter in which the main scanning control means from the nozzle to eject the filter material and controlling the operation of said main scanning driving means. 8. A method of manufacturing a liquid crystal device, comprising the method of manufacturing a color filter according to claim 6. 9. A liquid crystal device manufacturing apparatus comprising the color filter manufacturing apparatus according to claim 7. 10. An EL device in which a plurality of pixel pixels including an EL light emitting layer are arranged on a substrate, wherein one of the head having a plurality of nozzles and the substrate is arranged in the main scanning direction with respect to the other. Manufactured by ejecting an EL light emitting material from at least one of the nozzles onto the substrate while moving to
A method for manufacturing a device, wherein a nozzle row in which the plurality of nozzles are arranged has a discharge characteristic that discharge amount of an intermediate portion thereof is small with respect to an end portion and a central portion thereof, The nozzle row is virtually divided into four groups each having the same number of nozzles, except for the nozzles located at the ends of the nozzle row that are controlled so as not to discharge, and the substrate is divided by the nozzles included in each group. One of the head and the substrate is moved by one group in the sub-scanning direction with respect to the other so that the EL light emitting material is ejected to the same portion of the head and the substrate. A method of manufacturing an EL device, wherein the EL light emitting material is discharged from the nozzle while one of the two is moved in the main scanning direction with respect to the other. 11. An EL device in which a plurality of pixel pixels including an EL light emitting layer are arranged on a substrate, wherein a head having a plurality of nozzles and one of the substrate are arranged in the main scanning direction with respect to the other. A device for manufacturing an EL device, which is manufactured by ejecting an EL light emitting material from at least one of the nozzles while moving to a head, comprising: a material supplying means for supplying the EL light emitting material to the head; A main-scanning drive means for moving one in the main-scanning direction with respect to the other; a sub-scanning drive means for moving one of the head and the substrate in the sub-scanning direction with respect to the other; Discharge control means for controlling discharge of material, main scan control means for controlling operation of the main scan drive means, and sub scan control means for control operation of the sub scan drive means, A nozzle array in which a plurality of nozzles are arranged has ejection characteristics such that the ejection amount in the middle portion thereof is smaller than that in the end portion and the central portion, and the ejection control unit is configured so that the nozzles located at the end portions of the nozzle row are The nozzle array is controlled so as not to eject the EL light-emitting material, and the nozzle array is virtually divided into four groups each having the same number of nozzles except the nozzle located at the end of the nozzle array, and each group is included in each group. One of the head and the substrate is moved in the sub-scanning direction with respect to the other by one group so that the EL light-emitting material is ejected to the same portion of the substrate by the nozzle. While the sub-scanning control means controls the operation of the sub-scanning driving means, while moving one of the head and the substrate in the main scanning direction with respect to the other, Apparatus for producing a EL device the main scanning control means from the nozzle to discharge the EL luminescent material and controlling the operation of said main scanning driving means.