JP2005172928A - Method for manufacturing electrooptical device, and method and apparatus for manufacturing substrate for electrooptical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an electrooptical device that can accurately apply liquid particles at a desired position and can accurately form a substrate for the electrooptical device in the manufacture of the substrate for the electrooptical device, and to provide a method for manufacturing the substrate for the electrooptical device and an apparatus for manufacturing the substrate for the electrooptical device. <P>SOLUTION: A piston rod 48 receives force of a pressure actuator to apply prescribed pressure on a filter material in a cylinder 43 by the piston. The liquid particles 8 are formed on edge parts 42 of a plurality of liquid particle forming members 31 by the pressure of the pressure actuator. When an applying head 15 is moved to a main scanning direction (X), it is lowered at each time when it reaches a prescribed position, and the liquid particles 8 formed on the plurality of the liquid particle forming members 41 is applied on a sub-pixel region in a mother substrate. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a manufacturing method and a manufacturing apparatus for manufacturing a substrate for an electro-optical device used in an electro-optical device. The present invention also relates to a material application method for applying a material to an object and a material application apparatus.

  In recent years, liquid crystal display devices have been widely used as electro-optical devices in display units of electronic devices such as mobile phones and portable computers. In addition, the display unit can usually perform color display. Color display by the liquid crystal display device is performed, for example, by passing light modulated by the liquid crystal layer through a color filter that is a substrate for an electro-optical device. The color filter is formed by arranging, for example, R (red), G (green), and B (blue) dot-shaped sub-pixels on the surface of a substrate formed of glass, plastic, or the like.

  In addition, with the recent trend toward high image quality and high resolution, it is necessary to reliably discharge a small amount of liquid droplets to a predetermined region for pixels with finer pixels.

  Conventionally, as a method of forming each color sub-pixel of R, G, B, etc. of a color filter, for example, a method of ejecting droplets in which a filter agent, which is a dye functional liquid, is made very small by utilizing deformation of a diaphragm has been proposed. (For example, Patent Document 1).

  In addition, a method of ejecting droplets using an inkjet method has been proposed (for example, Patent Document 2).

JP 2001-63035 A JP 2002-221616 A

  However, for example, when droplets are ejected, there is an interval of about 1 to 3 mm between the ejection port and the substrate on which the color filter is formed. Therefore, the landing position of the filter agent due to environmental changes such as airflow generated in the air Has changed. Further, the landing position is also changed by the variation in the interval of about 1 to 3 mm. If the droplets become smaller, the floating time becomes longer due to air resistance, and the landing position changes greatly, and there is also a problem that the landing does not occur at a desired position.

  Furthermore, since the ejection head for ejecting the filter agent moves at a high speed, there has been a problem that the landing position of the filter agent changes even if the speed varies slightly due to fluctuations in the operation of a driving belt such as a timing belt. For example, if the material lands outside the predetermined area or lands on a floating surface, the film thickness may vary.

  Further, the variation in the film thickness of the filter agent has caused a serious problem that the planar light transmission characteristics of the color filter become non-uniform. The conventional manufacturing method does not solve the above-described problem that the planar light transmission characteristics of the color filter are non-uniform in a fine pixel.

  The present invention provides an electro-optical device manufacturing method and an electro-optical device capable of accurately applying a liquid particle to a desired position and forming an electro-optical device substrate with high accuracy in the manufacture of an electro-optical device substrate. It is an object of the present invention to provide a substrate manufacturing method and an electro-optical device substrate manufacturing apparatus.

  The method for manufacturing an electro-optical device substrate according to the present invention is a method for manufacturing a substrate for an electro-optical device, in which a dye functional liquid is applied to a substrate and a plurality of colored layers are arranged. The gist of the invention is that it includes a step of forming a liquid droplet of a functional liquid, and a step of applying the liquid particle formed on the liquid particle forming member to a predetermined region of the substrate.

  According to this, since the liquid particle formed in the predetermined site | part of the liquid particle formation member is apply | coated to the predetermined area | region of a board | substrate, a liquid particle is apply | coated (attached) correctly. Therefore, it is possible to form a necessary film thickness within a predetermined region with high accuracy.

  In the method of manufacturing the substrate for an electro-optical device, in the step of applying to the predetermined region, the liquid amount of the liquid particle is determined so that the total liquid amount necessary for the predetermined region can be applied in a plurality of times. The gist is to control the amount applied to the predetermined region by the number of times of applying the liquid droplets.

  According to this, the required amount of liquid is controlled in film thickness by the number of times of applying liquid droplets a plurality of times. Therefore, it becomes possible to form a required amount of film thickness with high accuracy.

  The gist of this method for manufacturing a substrate for an electro-optical device includes a step of measuring the weight of the liquid droplets and determining the number of times of application of the liquid droplets.

  According to this, since the required amount of liquid particles determines the number of times of application of the required liquid particles after measuring the weight of the liquid particles, the required liquid amount is applied with high accuracy. Therefore, it becomes possible to form a required amount of film thickness with high accuracy.

  In the method for manufacturing the substrate for an electro-optical device, the liquid particles formed on the liquid particle forming member in a first application out of a plurality of applications are in contact with the substrate, and the application is performed in a final application. The gist is to perform the application a plurality of times by lowering the liquid particle forming member to a height at which the liquid particle forming member does not touch the already applied liquid surface on the substrate.

  According to this, since the liquid particle is applied at a constant height that does not touch the applied liquid surface from the first application to the final application, a predetermined point such as the tip of the liquid particle forming member is applied at the time of application. The part does not touch the liquid level. Therefore, the liquid particle forming member touching the liquid surface can prevent the problem that the liquid adheres to the liquid particle forming member and cannot be applied to the required amount.

  In the method for manufacturing the substrate for an electro-optical device, the liquid particles are formed on the liquid particle forming member by pressurizing the dye functional liquid in the liquid storage portion by a pressurizing unit. Is summarized in that the pressurizing means controls the pressurizing time for pressurizing the dye functional liquid.

  According to this, since the liquid amount of the liquid particles is controlled by the time for pressurizing the dye functional liquid, a predetermined amount of liquid particles can be formed. Therefore, it is possible to apply a predetermined amount of liquid droplets at different application time intervals, that is, at any application timing.

  In this method of manufacturing a substrate for an electro-optical device, the liquid amount of the liquid particles is controlled by a pressure value for pressurizing the dye functional liquid by the pressurizing unit and a time interval for coating. This is the gist.

  According to this, the amount of liquid particles is controlled by the pressurization value and the application time interval. Therefore, it is difficult to accurately control the liquid volume only by the pressurization time, but if the liquid is applied at the determined time interval while maintaining the fixed pressure, the liquid volume will be accurate. Can be applied.

  This electro-optical device substrate manufacturing method is characterized in that at least the predetermined portion of the liquid particle forming member is formed of a material having higher liquid repellency than the substrate.

  According to this, the predetermined part of the liquid particle forming member that holds the liquid particles is formed of a material having liquid repellency from the substrate, so that the liquid particles can be reliably applied to the substrate side. Therefore, it becomes possible to form a required film thickness with high accuracy.

  The electro-optical device substrate manufacturing method includes a plurality of the liquid droplet forming members, and in the step of applying to the predetermined region, the liquid droplets are simultaneously applied by the liquid droplet forming members. It is said.

  According to this, a plurality of liquid particles are formed by the plurality of liquid particle forming members, and the plurality of liquid particles can be applied simultaneously. Therefore, it is possible to apply a necessary amount of liquid in a predetermined area in a short time.

  The gist of the electro-optical device substrate manufacturing method is that a plurality of the liquid droplet forming members communicate with the common liquid storage portion.

  According to this, since the plurality of liquid particle forming members and the liquid storage portion are communicated with each other, the liquid particles of the plurality of liquid particle forming members can be formed by the same pressurizing means. Therefore, the liquid amount of each liquid particle applied simultaneously becomes difficult to vary.

  The gist of a method for manufacturing an electro-optical device according to the present invention includes the method for manufacturing a substrate for an electro-optical device according to any one of claims 1 to 9.

  According to this, the method for manufacturing an electro-optical device includes a method for manufacturing a substrate for an electro-optical device. Accordingly, since the liquid particles formed at the predetermined portion of the liquid particle forming member are applied to the predetermined region of the substrate, the liquid particles are accurately applied (attached). Therefore, it becomes possible to form the required film thickness in the predetermined region with high accuracy.

  An apparatus for manufacturing an electro-optical device substrate according to the present invention includes: a liquid storage unit that stores a dye functional liquid to be applied to a substrate to form the electro-optical device substrate; and a liquid particle containing the dye functional liquid in the liquid storage unit A liquid particle forming member, a pressurizing unit that pressurizes the dye functional liquid in the liquid storage portion to form the liquid particle on the liquid particle forming member, and at least the liquid particle forming member and the substrate The gist is provided with moving means for applying the liquid particles to a predetermined region on the substrate by bringing one of them close.

  According to this, since the liquid particle formed in the predetermined site | part of the liquid particle formation member is apply | coated to the predetermined area | region of a board | substrate, a liquid particle is apply | coated (attached) correctly. Therefore, it is possible to form a necessary film thickness within a predetermined region with high accuracy.

(First embodiment)
Hereinafter, a method for manufacturing a color filter, which is a substrate for an electro-optical device, and a manufacturing apparatus thereof will be described with reference to the drawings according to a first embodiment of the present invention. First, prior to explaining these production methods and production apparatuses, color filters produced using those production methods and the like will be explained.

  FIG. 1A is a schematic plan view showing a planar structure of the color filter 1. FIG. 1B is a schematic plan view showing a planar structure of a mother substrate 12 as a substrate.

  The color filter 1 of the present embodiment forms a plurality of sub-pixels 3 as colored layers on a surface of a rectangular substrate 2 formed of glass, plastic, or the like in a dot pattern, in this embodiment a dot matrix, 1A is a plan view of the color filter 1 with the protective film 4 (see FIG. 2D) removed.

  The sub-pixel 3 is formed by filling a plurality of rectangular regions, which are partitioned by partition walls 6 formed in a lattice pattern with a resin material having no translucency and are arranged in a dot matrix, with a color material. Each of the sub-pixels 3 is formed of a color material of any one color of R (red), G (green), and B (blue), and each of the color sub-pixels 3 is arranged in a predetermined arrangement. Are listed.

  The size of the color filter 1 is, for example, 1.8 inches. Further, the size of one sub-pixel 3 is, for example, 30 μm × 100 μm. Further, the interval between the sub-pixels 3, that is, the so-called sub-pixel pitch is, for example, 75 μm.

  The color filter 1 is cut out from a mother substrate 12 having a large area as shown in FIG. Specifically, first, a pattern for one color filter 1 is formed on the surface of each of the plurality of color filter forming regions 11 set in the mother substrate 12, and the surroundings of these color filter forming regions 11 are further formed. By forming grooves for cutting, and further cutting the mother substrate 12 along these grooves, individual color filters 1 are formed.

  Hereinafter, a manufacturing method and a manufacturing apparatus for manufacturing the color filter 1 shown in FIG.

  FIG. 2 is a schematic view showing a method of manufacturing the color filter 1 in the order of steps. 2D shows a cross-sectional structure according to the VI-VI line of FIG. Further, as shown in FIG. 2 (d), a protective film 4 is laminated thereon.

  When the color filter 1 of the present embodiment is used as an optical element for color display, one pixel is formed with R, G, B3 sub-pixels 3 as one unit, and R, G in one pixel is formed. , B, or a combination thereof, color is displayed by selectively allowing light to pass through. At this time, the partition 6 formed of a resin material having no translucency functions as a black matrix.

  First, the partition walls 6 are formed on the surface of the mother substrate 12 in a lattice pattern as viewed from the direction of the arrow B with a resin material having no translucency. The lattice hole portion of the lattice pattern is a region where the sub-pixel 3 is formed, that is, the sub-pixel region 7. The planar dimensions of the individual sub-pixel regions 7 formed by the partition walls 6 when viewed from the direction of the arrow B are, for example, about 30 μm × 100 μm.

  The partition wall 6 has a function of blocking the flow of the filter agent 13 as a dye functional liquid supplied to the sub-pixel region 7 and a function of a black matrix. Moreover, the partition 6 is formed by arbitrary patterning methods, for example, a photolithography method, and is further heated and baked with a heater as needed.

  After the partition wall 6 is formed, each sub-pixel region 7 is filled with the filter agent 13 by supplying the liquid particles 8 of the filter agent 13 to each sub-pixel region 7 as shown in FIG. Reference numeral 13R denotes a filter agent having an R (red) color, reference numeral 13G denotes a filter agent having a G (green) color, and reference numeral 13B denotes a filter agent having a B (blue) color. .

  When a predetermined amount of the filter agent 13 is filled in each sub-pixel region 7, the mother substrate 12 is heated to, for example, about 70 ° C. by a heater to evaporate the solvent of the filter agent 13. By this evaporation, as shown in FIG. 2C, the volume of the filter agent 13 is reduced and flattened. When the volume is drastically reduced, the supply of the liquid particles 8 of the filter agent 13 and the heating of the liquid particles 8 are repeatedly performed until a sufficient film thickness is obtained for the color filter 1. By the above processing, only the solid content of the filter agent 13 is finally left to form a film, thereby forming each desired color sub-pixel 3.

  After the sub-pixels 3 are formed as described above, a heat treatment is performed at a predetermined temperature for a predetermined time in order to completely dry the filaments. Thereafter, the protective film 4 is formed using an appropriate method such as a spin coating method, a roll coating method, a ripping method, or an ink jet method. This protective film 4 is formed for protecting the sub-pixel 3 and the like and for flattening the surface of the color filter 1.

  FIG. 3 is a diagram illustrating an exemplary arrangement of sub-pixels.

  As this arrangement, for example, a stripe arrangement shown in FIG. 3A, a mosaic arrangement shown in FIG. 3B, a delta arrangement shown in FIG.

  The stripe arrangement is a color scheme in which all columns of the matrix are the same color (3R, 3G, 3B). The mosaic arrangement is a color scheme in which any three sub-pixels 3 arranged on a vertical and horizontal straight line have three colors of R (3R), G (3G), and B (3B). The delta arrangement is a color arrangement in which the arrangement of the sub-pixels 3 is made different, and any three adjacent sub-pixels 3 are R (3R), G (3G), and B (3G).

  FIG. 4 shows an apparatus for supplying the filter agent 13 to the color filter 1 shown in FIG.

  A liquid particle application device 14 which is a manufacturing apparatus of the color filter 1 uses one of R, G and B, for example, an R color filter agent 13 as a liquid particle 8, and is a mother substrate 12 (see FIG. 1B). It is an apparatus for applying and adhering to a predetermined position in each color filter forming region 11. Liquid droplet coating devices for the G color filter agent 13 and the B color filter agent 13 are also prepared for each, but their structures can be the same as those in FIG. Omitted.

  In FIG. 4, the liquid droplet coating device 14 includes a head unit 16 having a coating head 15, a head position control device 17 as a moving unit that controls the position of the coating head 15, and a substrate that controls the position of the mother substrate 12. A position control device 18, a main scanning drive device 19 for moving the coating head 15 with respect to the mother substrate 12 (X), and a sub-scanning drive for moving the coating head 15 with respect to the mother substrate 12 (Y). A device 21, a substrate supply device 23 that supplies the mother substrate 12 to a predetermined work position in the liquid droplet applying device 14, and a control device 24 that controls the liquid droplet applying device 14 in general. Further, the liquid droplet application device 14 includes a head camera 25 that monitors the application start position and a substrate camera 26 that positions the mother substrate 12. The substrate position control device 18 includes a table 27 on which the mother substrate 12 is placed.

  The head position control device 17, the substrate position control device 18, the main scanning drive device 19 for moving the coating head 15 in the main scanning movement (X) with respect to the mother substrate 12, and the sub-scanning drive device 21 are arranged on the base 28. Installed. Each of these devices is covered with a cover 29 as necessary.

  The substrate supply device 23 illustrated in FIG. 4 includes a substrate accommodating portion 23 a that accommodates the mother substrate 12 and a robot 23 b that conveys the mother substrate 12. The robot 23b includes a base 23c placed on an installation surface such as a floor and the ground, a lift shaft 23d that moves up and down relative to the base 23c, a first arm 23e that rotates about the lift shaft 23d, and a first arm A second arm 23f that rotates relative to 23e, and a suction pad 23g provided on the lower surface of the tip of the second arm 23f. The suction pad 23g can suck the mother substrate 12 by air suction or the like.

  In FIG. 4, an electronic balance 30 is disposed under the trajectory of the coating head 15 driven by the main scanning driving device 19 and moving in the main scanning (X) and at one side position of the sub-scanning driving device 21.

  The electronic balance 30 is a device that measures the weight of the liquid particles 8 of the filter agent 13 applied from the individual liquid particle forming members 41 (see FIG. 6) in the coating head 15 for each liquid particle forming member 41.

  The control device 24 includes a computer main body 24a that accommodates a processor, a keyboard 24b as an input device, and a CRT (Cathode Ray Tube) display 24c as a display device. As shown in FIG. 7 described later, the processor includes a CPU (Central Processing Unit) 51 that performs arithmetic processing, and a memory that stores various types of information, that is, an information storage medium 52.

  FIG. 5 is an enlarged view showing the periphery of the coating head 15 and the mother substrate 12 of the liquid droplet coating apparatus 14 shown in FIG.

  In FIG. 5, the head position control device 17 includes an α motor 33 that rotates the coating head 15 in-plane, a β motor 34 that swings and rotates the coating head 15 about an axis parallel to the sub-scanning direction (Y), and coating. A γ motor 35 that swings and rotates the head 15 about an axis parallel to the main scanning direction (X) and a z motor 36 that moves the coating head 15 in the vertical direction are provided.

  4 includes a table 27 on which the mother substrate 12 is placed and a θ motor 37 that rotates the table 27 in-plane as indicated by an arrow θ in FIG. 5. 4 has a guide rail 19a extending in the main scanning direction (X) and a slider 19b incorporating a pulse-driven linear motor, as shown in FIG. The slider 19b moves in the main scanning direction (X) along the guide rail 19a when the built-in linear motor operates.

  Further, as shown in FIG. 5, the sub-scanning drive device 21 shown in FIG. 4 has a guide rail 21a extending in the sub-scanning direction (Y) and a slider 21b incorporating a pulse-driven linear motor. The slider 21b moves in the sub-scanning direction (Y) along the guide rail 21a when the built-in linear motor operates.

  The table 27 is provided with positioning pins 38 for positioning the mother board 12.

  The linear motor that is pulse-driven in the slider 19b and the slider 21b can finely control the rotation angle of the output shaft by the pulse signal supplied to the motor, and therefore, the main of the coating head 15 supported by the slider 19b. The position in the scanning direction (X), the position of the table 27 in the sub-scanning direction (Y), and the like can be controlled with high definition. The position control of the coating head 15 and the table 27 is not limited to the position control using the pulse motor, but can be realized by feedback control using a servo motor or any other control method.

  FIG. 6 is a diagram illustrating the coating head 15 that forms the liquid particles 8 of the filter agent 13. (A) is the perspective view which looked at the coating head 15 from diagonally downward, (b) is the internal cross-section figure which looked at the coating head 15 shown to (a) from the main scanning direction (X) side.

  The coating head 15 is a head for forming the liquid particles 8 from one of R, G, and B, for example, an R color filter agent 13R. Coating heads for the G color filter agent 13G and the B color filter agent 13B are also prepared for each, but their structures can be the same as those in FIG. .

  In the coating head 15, for example, four liquid particle forming members 41 that form four minute liquid particles 8 are arranged in a line in the sub-scanning direction (Y). The four liquid particle forming members 41 have, for example, a micro cylindrical shape such as a painless needle. In this embodiment, for the sake of illustration, it is drawn in an inverted conical shape. A tip portion 42 as a predetermined portion of the liquid particle forming member 41 has a minute hole 42 a for discharging the liquid particle 8 of the filter agent 13. At least the front end portion 42 of the liquid particle forming member 41 is formed of a material having higher liquid repellency than the mother substrate 12, and makes it easy to separate (easy to peel off) the liquid particles 8 when applied to the substrate.

  The four liquid particle forming members 41 are fixed to, for example, screws, in a cylinder 43 that is a liquid storage portion in which the filter agent 13 is stored. The inside of the liquid particle forming member 41 communicates with the inside of the cylinder 43, and the filter material 13 is filled from the inside of the liquid particle forming member 41 to the inside of the cylinder 43. The cylinder 43 is connected to a pressure sensor 46 through a tube 45 from a hole 44 provided in the side wall thereof. And the pressure to the filter agent 13 accommodated in the cylinder 43 is detected by the pressure sensor 46, and the pressure applied to the filter agent 13 is controlled based on the detected value.

  The filter agent 13 accommodated in the cylinder 43 is pressurized by the piston 47 in the cylinder 43. The piston rod 48 receives a force of a pressurizing actuator 58 (see FIG. 7) as pressurizing means, and applies a predetermined pressure to the filter agent 13 in the cylinder 43 by the piston 47. Then, the liquid particles 8 are formed at the tip portions 42 of the plurality of liquid particle forming members 41 by pressurizing the filter agent 13 by the piston 47. The filter agent 13 inside the cylinder 43 is sealed with a sealant (not shown) or the like at the sliding portion between the piston rod 48 and the cylinder 43 so as not to leak outside the cylinder 43.

  A small amount of the liquid particles 8 formed at the tip portions 42 of the four liquid particle forming members 41 are configured by applying a predetermined pressure (pressurized value) for a predetermined time by the pressurizing actuator 58. Since the four liquid particles 8 pressurize the filter agent 13 by the common piston 47, they are each formed into liquid particles having a small amount of variation. For convenience of illustration, the shape of the liquid droplet 8 is drawn in a spherical shape.

  When the liquid particles 8 formed by the liquid particle forming member 41 reach the predetermined position for application when moving in the main scanning direction (X), the application head 15 is lowered and the mother substrate 12 (FIG. 1A). Are sequentially attached to predetermined positions in the reference). Further, by moving the table 27 by a predetermined distance in the sub-scanning direction (Y), the main scanning position by the coating head 15 can be shifted at a predetermined interval.

  FIG. 7 is a block diagram showing an electrical system for forming the color filter 1.

  The head position control device 17 and the substrate position control device 18 shown in FIG. 4 are connected to the CPU 51 via the input / output interface 53 and the bus 54. The main scanning drive pulse motor 55 is controlled via the first driver 56a, and the sub-scanning drive motor 57 is controlled via the second driver 56b. The pressure actuator 58 is controlled via the third driver 56c. The main scanning driving pulse motor 55, sub-scanning driving pulse motor 57, and pressurizing actuator 58 are connected to the CPU 51 via the input / output interface 53 and the bus 54 in FIG. 7.

  The board supply device 23, the input device 24b, the display 24c, the electronic balance 30, the head camera 25, the board camera 26, and the pressure sensor 46 are also connected to the CPU 51 via the input / output interface 53 and the bus 54. .

  The memory 52 is a concept including a semiconductor memory such as a RAM (Random Access Memory) and a ROM (Read Only Memory), an external storage device such as a hard disk, a CD-ROM reader, and a disk-type storage medium. Is a storage area for storing program software in which the control procedure of the operation of the liquid droplet applying device 14 is described, and among the R, G, B for realizing the various R, G, B arrangements shown in FIG. A storage area for storing the application position in one color mother substrate (see FIG. 1) 12 as coordinate data, and the amount of sub-scanning movement (Y) of the mother substrate 12 in the sub-scanning direction (Y) in FIG. A storage area for storage, a work area for the CPU 51, an area that functions as a temporary file, and other various storage areas are set.

  The CPU 51 performs control for applying the filter agent 13 to a predetermined position on the surface of the mother substrate 12 in accordance with program software stored in the memory 52. The CPU 51 applies the liquid particle 8 by a weight measurement calculation unit that performs calculation for realizing weight measurement using the electronic balance (see FIG. 4) 30 and a liquid particle forming member 41 as a specific function realization unit. A liquid particle application calculating unit that performs an operation for the purpose, a pressure calculating unit that performs an operation for pressurizing the filter agent 13 in the cylinder 43 to a predetermined amount, a time during which the filter agent 13 is pressurized, and an application timing of the liquid particle 8 It has a timer to manage.

  More specifically, the coating calculation unit calculates a coating start position calculation unit for setting the coating head 15 to an initial position for coating, and a control for moving the coating head 15 in the main scanning direction (X). A main scanning control calculation unit, a sub scanning control calculation unit for calculating control for shifting the mother substrate 12 in the sub scanning direction (Y) by a predetermined sub scanning amount, and the coating head 15 in the height direction (Z). Various function calculation units such as a liquid particle application control calculation unit that calculates control for movement are provided.

  In the present embodiment, each of the above functions is realized by software using the CPU 51. However, if each of the above functions can be realized by a single electronic circuit that does not use the CPU, such electronic It is also possible to use a circuit.

  FIG. 8 is a diagram showing a coating pattern and a coating order for coating the liquid particles 8 on the sub-pixel region 7.

  The application of the liquid droplet 8 shown in FIG. 8 shows an example in which one color of the R, G, and B sub-pixel regions 7, for example, the R liquid particle 8 is applied. Although the application of the G liquid droplets and the B color liquid particles is also performed, the application thereof can be the same as that shown in FIG.

  In the arrangement of the sub-pixel areas 7 shown in FIG. 8, for example, the sub-pixel areas 7 having the stripe arrangement described with reference to FIG. In this arrangement, R, G, and B sub-pixel regions 7 are repeatedly formed in the main scanning direction (X), and sub-pixels having the same arrangement as the arrangement formed in the first row in the sub-scanning direction (Y). A plurality of regions 7 are formed.

  Four liquid particles 8 formed by the four liquid particle forming members 41 are applied to the sub-pixel region (R) 7 at the start of application. The four liquid particles 8 are formed by a liquid particle forming member 41 as shown in FIG. 6A, and the four liquid particles 8 are simultaneously formed in the sub-pixel region 7 by lowering the application head 15 to the application position (Z direction). Two liquid droplets 8 are applied to the substrate.

  When the application of the liquid particles 8 is completed in the subpixel region 7 where the application is started, the application head 15 moves to the subpixel region (R) 7 which is the next application position. Then, four liquid particles 8 are simultaneously applied to the sub-pixel region 7.

  Thereafter, the movement and application operation in the main scanning direction (X) are repeated, and the application of the first row of the color filter 1 is completed. When application of the first row is completed, application is performed from the first column of the second row by the sliding operation of the application head 15 and the mother substrate 12. Then, the application of liquid droplets is repeated for all rows of the color filter 1 to complete the application to one color filter 1.

  FIG. 9 is a time chart showing the application operation. FIG. 4A is a diagram showing the relationship between the pressure applied to pressurize the filter agent 13 and the pressurizing time, and FIG. 4B shows the height (Z direction) of the coating head 15 and the coating position (X). It is a diagram showing a relationship with (direction), and is a time chart diagram corresponding to each of FIGS.

  First, the coating head 15 moves to the coating start position. In the meantime, the filter agent 13 accommodated in the cylinder 44 is pressurized for a predetermined time (pressurization time) (t0) by the piston 47, and a predetermined amount of the formed amount is formed at the tip 42 of the liquid particle forming member 41. Liquid droplets 8 are retained. Then, after a predetermined time (t0), the coating head 15 descends to the position of Z0 which is the coating height (predetermined height from the substrate), and the liquid particles 8 held at the tip 42 of the liquid particle forming member 41 are: It is applied to the sub-pixel region 7 on the substrate. After the application to the sub-pixel region 7 is completed, the application head 15 is raised to the original height (Z1), and the filter agent 13 is pressurized again by the piston 47 for a predetermined time (t0). Then, the application head 15 moves to the next application position (main scanning direction (X)) and stands by, and after a predetermined time (t0) has elapsed, the predetermined amount of the liquid droplet 8 is formed as the liquid particle forming member 41. While being held at the tip end portion 42, it is lowered to the application position (Z0). Then, the coating head 15 rises to the position (Z1) after the liquid particles 8 are coated on the substrate, and moves to the next coating position. Thereafter, the same coating operation is repeated to perform coating on the sub-pixel region 7.

  FIG. 10 is a flowchart showing the operation of forming the color filter 1 of the present embodiment.

  The operation of forming the color filter 1 is an operation of forming a liquid particle 8 of one color of R, G, B, for example, R, and applying the liquid particle 8 to a predetermined region in the mother substrate 12. Explains. There are also flows for performing the application operation of the G liquid droplets and the application operation of the B color liquid droplets, but these operations can be the same as those in FIG. To do.

  First, the liquid droplet applying device 14 is activated by power-on by an operator.

  In step S1, initial setting of the liquid droplet applying device 14 is executed. Specifically, the head unit 16, the substrate supply device 23, the control device 24, and the like are set in a predetermined initial state.

  In step S2, it is determined whether or not the weight measurement of the liquid droplet 8 is executed. If it is the timing of the weight measurement, the process proceeds to step S3. If it is not the timing of the weight measurement, the process proceeds to step S6.

  In step S <b> 3, the coating head 15 is moved to the electronic balance 30. This moves the head unit 16 of FIG. 5 to the position of the electronic balance 30 of FIG. 4 by the main scanning drive device.

  In step S <b> 4, the weight of the liquid particle 8 applied from the liquid particle forming member 41 is measured using the electronic balance 30.

  In step S5, the amount of pressurization for pressurizing the filter agent 13 stored in the cylinder 43 is determined based on the measurement result obtained in step S4 and the amount of liquid required in the predetermined region to be coated. That is, when a predetermined number of drops are applied, the initial pressurization amount is increased if the required liquid amount is not satisfied, and the initial pressurization amount is decreased if the required number of drops is exceeded. Determine the amount of pressure. The amount of pressurization is determined by the pressurization value and the pressurization time. In this embodiment, the pressurization amount is determined by changing the pressurization time while keeping the pressurization value constant. For this reason, in step S5, the pressurization time is determined in detail. Of course, the pressurization time can be made constant and the pressurization value can be made variable.

  In step S <b> 6, the substrate supply device of FIG. 4 is operated to supply the mother substrate 12 to the table 27. At this time, the mother board 12 is set with reference to positioning pins 38 (see FIG. 5) provided on the table. Specifically, the mother substrate 12 in the substrate housing portion 23a is sucked and held by the suction pad 23g, and then the elevating shaft 23d, the first arm 23e, and the second arm 23f are moved to move the mother substrate 12 to the table 27. Then, it is pressed against a positioning pin 38 (see FIG. 5) provided in advance at an appropriate position on the table 27. In order to prevent displacement of the mother substrate 12 on the table 27, it is desirable to fix the mother substrate 12 to the table 27 by means such as air suction.

  In step S7, the mother substrate 12 is positioned in the θ direction. While observing the mother substrate 12 with the substrate camera 26 of FIG. 4, the table 27 is rotated in the plane by the minute angle unit by rotating the output shaft of the θ motor 37 of FIG. Position.

  In step S8, the application start position is determined. While observing the mother substrate 12 with the head camera 25 in FIG. 4, the position at which coating is started by the coating head 15 is determined by calculation.

  In step S9, the coating head 15 is moved to the coating start position. The main scanning drive device 19 and the sub-scanning drive device 21 are appropriately operated to move the coating head 15 to the coating start position. At this time, as shown in FIG. 6A, the coating head 15 is disposed so that the column direction of the liquid particle forming members 41 coincides with the sub-scanning direction (Y).

  In step S10, the filter agent 13 is pressurized for the pressurization time (t0) determined in step S5 in order to form a very small amount of liquid particles 8. Then, a small amount of liquid droplet 8 is formed and held at the tip of the liquid particle forming member 41 (see FIG. 6).

  In step S11, the coating head 15 is moved in the main scanning direction (X) and stopped when the next predetermined area is reached. The coating head 15 is lowered to apply the liquid particles 8 formed at the tip, and thereafter Ascend and return to the original position. Then, coating is repeated on one line (main scanning direction (X)) of the mother substrate 12.

  In step S12, the coating head 15 determines whether or not the coating of one line in the mother substrate 12 has been completed. If the application has been completed, the process proceeds to step S13. If the application has not been completed, the process proceeds to step S10 to apply the next sub-pixel region 7 in the same line (steps S10, S11, S12). That is, coating is repeatedly performed on one line (main scanning direction (X)) of the mother substrate 12. And when application | coating is complete | finished, it transfers to step S13.

  In step S13, the return movement of the coating head 15 is performed. That is, when the main scanning for one line with respect to the color filter 1 is completed, the coating head 15 is reversed and returned to the initial position.

  In step S14, the coating head 15 is driven by the sub-scanning driving device 21 and moves in the sub-scanning direction (Y) by a predetermined sub-scanning amount δ.

  In step S15, it is determined whether or not the main scanning (application of the liquid droplet 8) for one column of the color filter forming region 11 in the mother substrate 12 has been completed. If completed, the process proceeds to step S16. If not completed, the process proceeds to step S10. Each time the coating head 15 performs the sub-scanning movement (Y), the main scanning movement (X) and the application of the liquid particles 8 are repeated (Steps S10 to S15), and one row of the color filter forming region 11 of the mother substrate 12 is applied. The application process of the liquid droplet 8 is completed.

  In step S16, it is determined whether or not all the columns of the color filter forming region 11 in the mother substrate 12 have been completed. If completed, the process proceeds to step S18. If not completed, the process proceeds to step S17.

  In step S <b> 17, the coating head 15 is moved to the color filter formation region 11 in the next row. And the cycle of step S10-step S17 is repeated, and application | coating of the color filter formation area 11 of all the rows in the mother board | substrate 12 is complete | finished.

  In step S <b> 18, the mother substrate 12 after processing is discharged to the outside by the substrate supply device 23 or another transfer device.

  In step S19, it is determined whether or not the operator has instructed to end the process. If the end instruction is given, the process of forming the color filter 1 ends. If no end instruction is given, the process proceeds to step S2, and formation of the next color filter 1 is started.

  As described above in detail, according to the present embodiment, the following effects can be obtained.

  (1) The liquid particles 8 formed on the tip end portion 42 of the liquid particle forming member 41 are applied to a predetermined region (sub-pixel region 7) of the mother substrate 12. Therefore, the liquid particles 8 can be reliably applied, and variations in the amount applied to the sub-pixel region 7 are reduced. Therefore, the required film thickness in the sub-pixel region 7 can be formed with high accuracy.

  (2) The amount of the liquid particles 8 is controlled by the pressurization time for pressurizing the filter agent 13. Therefore, it is possible to form a predetermined amount of liquid droplet 8. Therefore, even if the application time interval from application at a certain position to application at the next position is different (at any application timing), a predetermined amount of liquid droplet 8 is applied to the sub-pixel region 7 of the substrate. be able to.

  (3) The plurality of liquid particle forming members 41 and the cylinder 43 communicate with each other, and the inside of the liquid particle forming member 41 and the inside of the cylinder 43 are filled with the same filter agent 13. Therefore, it is possible to simultaneously form liquid particles 8 on the plurality of liquid particle forming members 41 by pressurizing the filter agent 13 by the operation of one piston 47. Accordingly, since the liquid particles 8 are formed on the respective liquid particle forming members 41 with the same pressure, a plurality of liquid particles 8 with little variation can be formed simultaneously.

  (4) The tip 42 of the liquid particle forming member 41 is formed of a material having higher liquid repellency than the substrate with respect to the filter agent 13. Therefore, the liquid particles 8 can be reliably applied (stripped) to the substrate side.

  (5) One coating head 15 forms a plurality of liquid particles 8 by a plurality of liquid particle forming members 41. Therefore, it becomes possible to apply the plurality of liquid droplets 8 to the substrate side at the same time. Therefore, it is possible to apply a necessary amount of liquid in a predetermined area in a short time.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to the drawings.

  FIG. 11 is a diagram illustrating a configuration of the coating head 15 in the second embodiment. 2A is a perspective view of the coating head 15 as viewed obliquely from below, and FIG. 2B is an internal sectional view of the coating head 15 shown in FIG. 2A as viewed from the main scanning direction (X) side. It is.

  The coating head 15 of the present embodiment is different from the first embodiment in that, for example, three rows (B, C, D rows) of liquid particle forming members 41 are arranged in the sub-scanning direction (Y). For example, four liquid particle forming members 41 are arranged in each of the three rows of liquid particle forming members 41.

  In the present embodiment, the liquid amount of the liquid particles 8 is not controlled by the pressurization time for pressurizing the filter agent 13 described in the first embodiment, but the pressurization value for pressurizing the filter agent 13 The point which controls the liquid quantity of the liquid particle 8 with the application | coating time to apply | coat differs from 1st Embodiment.

  The interval between the columns of the liquid droplet forming member 41 is set to a suitable distance depending on the area of the sub-pixel region to which the liquid droplet 8 is applied.

  Further, as in the first embodiment, the plurality of liquid particles 8 pressurize the filter agent 13 by the common piston 47 and are formed in a small amount at the tip portions 42 of the plurality of liquid particle forming members 41. A very small amount of the liquid droplet 8 is formed by the balance between the pressure applied by the pressure actuator 58 and the surface tension of the liquid particle 8.

  In the present embodiment, a plurality of liquid particles 8 formed by three liquid particle forming members (B, C, D rows) 41 are applied simultaneously in one sub-pixel region 7.

  FIG. 12 is a time chart showing the application operation. FIG. 5A is a diagram showing the relationship between the applied pressure and the pressurizing time. FIG. 2B is a diagram showing the relationship between the position in the height direction (Z direction) of the coating head 15 and the coating position (X direction).

  Initially, the filter agent 15 accommodated in the cylinder 43 is held at a predetermined amount of pressure by the pressing force of the piston 47. At the same time, the coating head 15 moves to the coating start position. The liquid particles 8 formed after a predetermined time (t0) from the pressurization are held at the tip of the liquid particle forming member 41. When the application head 15 moves to the application position, the application head 15 descends to the application position (predetermined height from the substrate), and the liquid particles 8 held at the tip of the liquid particle forming member 41 are applied to the sub-pixel region 7 on the substrate. Is done. After the application to the sub-pixel region 7, the application head 15 is raised to the original height (Z1). Since the filter agent 13 is continuously pressurized by the piston 47 at the tip end portion 42 of the droplet forming member 41, the formation of the liquid particles 8 is started simultaneously with the application to the substrate. The coating head 15 then moves to the next coating region and descends to the coating position within a predetermined time (t0) to apply the droplet 8 to the predetermined region. The amount of the liquid droplet 8 reaches a predetermined amount at the time of application. Then, the necessary amount of filter agent 13 is accurately applied to the sub-pixel region 7. Thereafter, the filter agent 13 is continuously pressurized by the piston 47 at a constant pressure, and the formation of the liquid particles 8 is continued. The coating head 15 repeatedly moves and moves up and down within a predetermined time (t0), and a predetermined amount of liquid droplets 8 are sequentially applied to the sub-pixel region 7.

  And the pressurization to the filter agent 13 is stopped when the application of the liquid particles 8 is completed.

  Hereinafter, the operation of the liquid droplet applying apparatus 14 having the above configuration will be described.

  FIG. 13 is a flowchart showing the operation of the liquid droplet applying device 14.

  Note that detailed description of operations similar to those in the first embodiment will be omitted, and only different operations will be described.

  In step S5, the pressurizing amount for pressurizing the filter agent 13 stored in the cylinder 43 is determined based on the measurement result performed in step S4 and the liquid amount (applying amount) required in the predetermined area to be applied. decide. That is, when the weight of one drop is applied to a predetermined number of drops, if the value is less than the required liquid amount (application amount), the amount of pressurization is increased to exceed the required liquid amount (application amount). If so, the pressurization amount is reduced and the pressurization amount to be employed is determined. The amount of pressurization is determined by the pressurization value and the pressurization time. In this embodiment, a method of changing the pressurization value while keeping the pressurization time constant is adopted. For this reason, in step S5, a pressurization value is determined in detail.

  In step S10, pressurization of the pressurization value determined in steps S2 to S5 is started, and liquid droplets 8 are formed.

  In step S11, the application head 15 is moved in the main scanning direction (X) and stopped when the next predetermined area is reached, and the application head 15 is lowered to apply the liquid particles 8 formed at the tip. In the operation until this application, the next liquid droplet 8 is applied after a predetermined time (t0) (see FIG. 12) from the previous application. The predetermined amount of liquid droplets 8 is determined by this application time interval. The liquid droplets 8 are always formed in the same size (the same amount) by a predetermined time (t0) determined in advance. When the application is completed, the application head 15 rises and returns to the original position. Then, coating is repeated on one line (main scanning direction (X)) of the mother substrate 12.

  Thereafter, the processes of Step S11 to Step S17 are repeated, and the application to the color filter forming regions 11 in all rows in the mother substrate 12 is completed. Then, pressurization of the filter agent is stopped in step S18, and the formation of the liquid droplet 8 is completed. Then, when the substrate is discharged in step S19, if there is no instruction to end step S20, formation of the next color filter 1 is started.

  As described above in detail, according to the present embodiment, the effects (1), (3), and (4) in the first embodiment can be obtained similarly, and the following effects can be obtained.

  (6) The liquid amount of the liquid droplet 8 is controlled by the pressurization value applied by the pressurization actuator 58 and the application time interval. Therefore, it is difficult to accurately control the liquid amount of the liquid droplets 8 only by the pressurization time, but if the liquid is applied at a predetermined time interval in a state where the liquid is held at a predetermined constant pressure, an accurate amount can be obtained. The liquid amount of the liquid droplet 8 can be applied.

  (7) More liquid droplets 8 than the coating head 15 of the first embodiment are formed by the plurality of rows of liquid particle forming members 41. Therefore, by simultaneously applying the plurality of liquid droplets 8, for example, the color filter 1 having a large screen and a large area of the sub-pixel region 7 (large sub-pixel 7) can be manufactured in a short time.

(Third embodiment)
Next, a third embodiment of the present invention will be described with reference to the drawings.
In the application of the liquid droplet 8 of the present embodiment, a predetermined film thickness is formed on one subpixel by a plurality of times of application, and the same height (in the Z direction) is applied in the first application to the last application. The point of application at position H is different from the first embodiment and the second embodiment.

  FIG. 14 is a diagram showing application positions of the liquid particle forming member 41 and the liquid particles 8. FIG. 4A shows the positional relationship between the liquid particle forming member 41 and the substrate for the first application. FIG. 5B shows the positional relationship between the liquid particle forming member 41, the liquid surface, and the substrate in the final application.

  In FIG. 14A, the coating head 15 is at the first coating position. The application position (Z direction) is the height at which the liquid particles 8 formed on the liquid particle forming member 41 come into contact with the substrate, and as shown in FIG. 14B, the nth (final) application is performed. Thus, the tip end portion 42 of the liquid particle forming member 41 is required to have a height (H) that does not touch the applied liquid surface. And at the time of application | coating, always apply | coat the liquid particle 8 in this learning height (H). The liquid particles 8 formed at the tip end portion 42 of the liquid particle forming member 41 are applied to the substrate.

  Hereinafter, the operation of the liquid droplet applying apparatus 14 having the above configuration will be described.

  FIG. 15 is a flowchart showing the operation of the liquid droplet applying device 14.

  Note that detailed description of operations similar to those in the first embodiment will be omitted, and only different operations will be described.

  In step S5, the pressurizing amount for pressurizing the filter agent 13 stored in the cylinder 43 is determined based on the measurement result performed in step S4 and the liquid amount (applying amount) required in the predetermined area to be applied. decide. That is, when a predetermined number of drops are applied, if the required amount of liquid (application amount) is not reached, the amount of pressurization is increased. If the upper limit of the required amount of liquid (application amount) is exceeded, the initial pressure is applied. Decrease the amount and determine the amount of pressurization to be adopted. The pressurization amount is determined by the pressurization value and the pressurization time. In this embodiment, the pressurization amount is determined by changing the pressurization value while keeping the pressurization time constant. For this reason, in step S5, a pressurization value is determined in detail. In step S5, the number of times of applying the liquid droplet 8 to the sub-pixel region 7 is determined. The number of times of application is determined from the amount of liquid necessary for the sub-pixel region 7 and the amount of liquid particles 8 measured in step S4. Further, from the weight of the liquid particle 8 obtained in step S4, the spherical diameter when the liquid particle 8 is assumed to be spherical is also obtained.

  In step S9, it is determined whether or not it is time to learn the tip position (tip height) of the liquid particle forming member 41 of the coating head 15. If it is the learning timing, the process proceeds to step S10. If it is not the learning timing, the process proceeds to step S11, and the coating head 15 is moved to the coating start position.

  In step S10, the application height (application position) of the liquid particle forming member 41 of the application head 15 is calculated. From the spherical diameter of the liquid droplet 8 obtained in step S5 and the liquid thickness determined from the amount of liquid when (n-1) times of application, the application position (learning height) is determined as the height of the tip of the liquid particle forming member 41 from the substrate. ) Is calculated. And this application | coating position (learning height) H is the height which can adhere the liquid droplet 8 from the 1st application | coating, and the front-end | tip of the liquid particle formation member 41 is a liquid level also in the last application | coating (n times). It is calculated as a common height that does not touch. This height (learning height) is stored in the memory 52.

  In step S12, at the application start position, the height (learned height) learned in step S10 and stored in the memory 52 is read, and the application head 15 aligns the obtained height. That is, the liquid droplet forming member 41 is lowered until the tip end portion 42 is lightly touching the surface of the sub-pixel region 7, and the coating head 15 is raised from the position by the distance H. The position data in the Z direction at this time is stored in the memory 52. Thereafter, the coating head 15 returns to the original position. Thereafter, the application position is controlled based on the position data stored in the memory 52.

  In step S13, pressurization is started at the pressurization value obtained in step S5, and liquid droplets 8 are formed.

  In step S14, in a predetermined region, the coating head 15 is lowered to the coating height after a predetermined time from the previous coating (however, pressurization is started for the first time), and the liquid particles 8 formed at the tip are coated. Alternatively, 12 droplets 8 may be applied at a time using the application head 15 described in the second embodiment.

  In step S15, it is determined whether or not the coating has been performed a predetermined number of times (n times) calculated in advance. If the predetermined number of times of application has been completed, the process proceeds to step S16. If the predetermined number of times of application is not completed, the process proceeds to step S14, and the application of the liquid particles 8 is repeated until the predetermined number of times is reached. At this time, the coating head 15 performs coating a plurality of times at the same height as the first coating height. Specifically, the application position (Z direction) of the application head 15 is a height at which the liquid particles 8 formed on the liquid particle forming member 41 come into contact with the substrate, as shown in FIG. As shown in FIG. 14B, the tip end portion 42 of the liquid particle forming member 41 is required to have a height (H) that does not touch the applied liquid surface in the n-th (final) application. And at the time of application | coating, always apply | coat the liquid particle 8 in this height (H). Thereafter, the coating head 15 moves to the position of the next sub-pixel region 7.

  In step S16, it is determined whether scanning (coating) of one line in the mother substrate 12 has been completed. If the scanning of one line is completed, the process proceeds to step S18. If the scanning of one line is not completed, the process proceeds to step S17.

  In step S17, the coating head 15 moves to the next row. Then, steps after step S18 are performed, and the liquid particles 8 are applied to, for example, all R sub-pixel regions 7 in the mother substrate 12.

  Thereafter, the cycle of step S14 to step S22 is repeated, and the application of the color filter forming regions 11 in all rows in the mother substrate 12 is completed. Then, pressurization of the filter agent is stopped in step S23, and the formation of the liquid droplet 8 is completed. Then, when the substrate is discharged in step S24, formation of the next color filter 1 is started unless there is an instruction to end step S25.

  As described above in detail, according to this embodiment, the effects (1) and (4) in the first embodiment and the effect (6) in the second embodiment can be obtained in the same manner, and the following effects can be obtained. be able to.

  (8) From the first application to the final application, the liquid particles 8 are applied at a constant height that does not touch the applied liquid surface. Therefore, the tip end portion 42 that holds the liquid particles 8 of the liquid particle forming member 41 at the time of application can be applied without touching the applied liquid surface. Accordingly, it is possible to prevent a problem that the liquid particle forming member 41 touches the liquid surface and the liquid adheres to the liquid particle forming member 41 and cannot be applied to a required amount.

  (9) The weight of the liquid droplet 8 formed on the tip portion 42 of the liquid particle forming member 41 is measured, and based on the measurement result, the number of times of application is determined from the required liquid amount in a predetermined region. Therefore, the required amount of liquid can be applied with high accuracy. Therefore, a required amount of film thickness can be formed with high accuracy.

(Fourth embodiment)
Next, a fourth embodiment of the present invention will be described with reference to the drawings.

  FIG. 16 is an exploded perspective view of the liquid crystal display device 101. Note that this embodiment will be described using an example of a passive matrix liquid crystal display device.

  A liquid crystal display device 101 as an electro-optical device is mounted with liquid crystal driving ICs 103a and 103b as semiconductor chips on a liquid crystal display panel 102, and an FPC (Flexible Printed Circuit) 104 as a wiring connecting element is connected to the liquid crystal panel 102. Further, it is formed by providing a lighting device 106 as a backlight on the back side of the liquid crystal panel 102.

  The liquid crystal panel 102 is formed by bonding the first substrate 107 a and the second substrate 107 b with the sealant 108. The sealing material 108 is formed, for example, by attaching an epoxy resin to the inner surface of the first substrate 107a or the second substrate 107b in an annular manner by screen printing or the like. In addition, the inside of the sealing material 108 includes a conductive material 109 formed in a spherical shape or a cylindrical shape with a conductive material in a dispersed state (see FIG. 17).

  In FIG. 16, in order to show the arrangement of the first electrodes 114a in an easy-to-understand manner, the stripe interval is drawn much wider than the actual, and thus the number of the first electrodes 114a is shown to be small. A larger number of first electrodes 114a are formed on the substrate 111a.

  In FIG. 16, in order to clearly show the arrangement of the second electrodes 114b, as in the case of the first electrodes 114a, their stripe intervals are drawn much wider than actual, and therefore, the number of the second electrodes 114b. However, in reality, a larger number of second electrodes 114b are formed on the substrate 111b.

  The first substrate 107a is formed in an area larger than that of the second substrate 107b, and when these substrates are bonded together by the sealant 108, the first substrate 107a extends to the outside of the second substrate 107b. (See FIG. 17). The substrate overhanging portion 107c is connected to the second electrode 114b on the second substrate 107b via a lead wire 114c extending from the first electrode 114a and a conductive material 109 (see FIG. 17) existing inside the sealing material 108. There are various wirings such as a lead wiring 114d that conducts to the liquid crystal, an input bump of the liquid crystal driving IC 103a, that is, a metal wiring 114e connected to the input terminal, and a metal wiring 114f connected to the input bump of the liquid crystal driving IC 103b. It is formed with an appropriate pattern.

  In the present embodiment, the lead-out wiring 114c extending from the first electrode 114a and the lead-out wiring 114d conducting to the second electrode 114b are formed of ITO which is the same material as those electrodes, that is, a conductive oxide. Further, the metal wirings 114e and 114f, which are wirings on the input side of the liquid crystal driving ICs 103a and 103b, are formed of a metal material having a low electric resistance value, for example, an APC alloy. The APC alloy is an alloy mainly containing Ag and accompanyingly containing Pd and Cu, for example, an alloy composed of Ag 98%, Pd 1%, Cu 1%.

  The liquid crystal driving IC 103a and the liquid crystal driving IC 103b are mounted by being adhered to the surface of the substrate extension portion 107c by an ACF (Anisotropic Conductive Film) 122. That is, in the present embodiment, a so-called COG (Chip On Glass) liquid crystal panel having a structure in which a semiconductor chip is directly mounted on a substrate is formed. In this COG mounting structure, the input side bumps of the liquid crystal driving ICs 103a and 103b and the metal wirings 114e and 114f are conductively connected by the conductive particles contained in the ACF 122, and the output side of the liquid crystal driving ICs 103a and 103b. The bumps and the lead wires 114c and 114d are conductively connected.

  In FIG. 16, the FPC 104 includes a flexible resin film 123, a circuit 126 including a chip component 124, and a metal wiring terminal 127. The circuit 126 is directly mounted on the surface of the resin film 123 by soldering or other conductive connection method. The metal wiring terminal 127 is formed of an APC alloy, Cr, Cu or other conductive material. The portion of the FPC 104 where the metal wiring terminal 127 is formed is connected to the portion of the first substrate 107a where the metal wiring 114e and the metal wiring 114f are formed by the ACF 122. Then, the metal wires 114e and 114f on the substrate side and the metal wire terminal 127 on the FPC side are electrically connected to each other by the action of the conductive particles contained in the ACF 122.

  An external connection terminal 131 is formed at the opposite end of the FPC 104, and the external connection terminal 131 is connected to an external circuit (not shown). Then, the liquid crystal driving ICs 103a and 103b are driven based on a signal transmitted from the external circuit, a scanning signal is supplied to one of the first electrode 114a and the second electrode 114b, and a data signal is supplied to the other. As a result, the voltage of the pixel pixels in the dot matrix form arranged in the effective display area V is controlled for each pixel. As a result, the orientation of the liquid crystal L (see FIG. 17) is controlled for each pixel pixel. Be controlled.

  In FIG. 16, the lighting device 106 that functions as a so-called backlight includes a light guide 132 made of acrylic resin or the like, and a diffusion sheet 133 provided on a light emission surface 132 b (see FIG. 17) of the light guide 132. (See FIG. 17), a reflection sheet 134 (see FIG. 17) provided on the surface opposite to the light emitting surface 132b (see FIG. 17) of the light guide 132, and an LED (Light Emitting Diode) 136 as a light source. Have

  The LED 136 is supported by an LED substrate 137, and the LED substrate 137 is attached to a support portion (not shown) formed integrally with the light guide 132, for example. When the LED substrate 137 is mounted at a predetermined position of the support portion, the LED 136 is placed at a position facing the light capturing surface 132a (see FIG. 17) which is the side end surface of the light guide 132.

  FIG. 17 shows a cross-sectional structure of the liquid crystal display device according to the line IX-IX in FIG.

  In FIG. 17, the first substrate 107a has a plate-like base material 111a formed of transparent glass, transparent plastic, or the like. A reflective film 112 is formed on the inner surface of the substrate 111a (upper surface in FIG. 17), an insulating film 113 is laminated thereon, and a first electrode 114a is formed in a stripe shape when viewed from the direction of arrow D (see FIG. 17). 16), and an alignment film 116a is further formed thereon. Further, a polarizing plate 117a is attached to the outer surface (the lower surface in FIG. 17) of the substrate 111a by sticking or the like.

  In FIG. 17, the second substrate 107b has a plate-like substrate 111b formed of transparent glass, transparent plastic, or the like. A color filter 118 is formed on the inner surface (the lower surface in FIG. 19) of the base material 111b, and the second electrode 114b is formed in a stripe shape in the direction perpendicular to the first electrode 114a when viewed from the direction of the arrow D. (See FIG. 16), and an alignment film 116b is further formed thereon. A polarizing plate 117b is attached to the outer surface (upper surface in FIG. 17) of the substrate 111b by sticking or the like.

  In FIG. 17, liquid crystal, for example, STN (Super Twisted Nematic) liquid crystal L is sealed in a gap surrounded by the first substrate 107a, the second substrate 107b, and the sealing material 108, so-called cell gap. A large number of minute and spherical spacers 119 are dispersed on the inner surface of the first substrate 107a or the second substrate 107b, and the presence of these spacers 119 in the cell gap keeps the thickness of the cell gap uniform. .

  The first electrode 114a and the second electrode 114b are arranged orthogonal to each other, and their intersections are arranged in a dot matrix as seen from the direction of arrow D in FIG. Each intersection in the dot matrix form one pixel pixel. The color filter 118 arranges each color element of R (red), G (green), and B (blue) in a predetermined pattern when viewed from the direction of the arrow D, for example, a pattern such as a stripe arrangement, a delta arrangement, or a mosaic arrangement. Is formed by. The one picture element pixel corresponds to each one of R, G, and B, and the three color picture element pixels of R, G, and B constitute one unit to constitute one pixel.

  By selectively emitting light from a plurality of picture element pixels arranged in a dot matrix, and thus pixels, an image such as letters and numbers is displayed outside the second substrate 107b of the liquid crystal panel 102. The area where the image is displayed in this way is the effective pixel area, and the planar rectangular area indicated by the arrow V in FIGS. 16 and 17 is the effective display area.

  In FIG. 17, the reflective film 112 is formed of a light reflective material such as an APC alloy or Al (aluminum), and has an opening 121 at a position corresponding to each pixel pixel that is an intersection of the first electrode 114a and the second electrode 114b. Is formed. As a result, the openings 121 are arranged in the same dot matrix as the pixel pixels when viewed from the direction of arrow D in FIG.

  The first electrode 114a and the second electrode 114b are made of, for example, ITO which is a transparent conductive material. The alignment films 116a and 116b are formed by depositing a polyimide resin in a uniform thickness. When these alignment films 116a and 116b are subjected to a rubbing process, the initial alignment of liquid crystal molecules on the surfaces of the first substrate 107a and the second substrate 107b is determined.

  Further, when the LED 136 emits light, the light is taken in from the light taking-in surface 132a, guided to the inside of the light guide 132, and reflected while being reflected by the reflection sheet 134 or the wall surface of the light guide 132, and the light emitting surface 132b. Then, the light is emitted as planar light to the outside through the diffusion sheet 133.

  A buffer material 138 for buffering an impact applied to the liquid crystal panel 102 is provided between the base material 111a and the diffusion sheet 133.

  Since the liquid crystal display device 101 of the present embodiment is configured as described above, when external light such as sunlight or room light is sufficiently bright, in FIG. 17, external light is liquid crystal from the second substrate 107b side. The light is taken into the panel 102, the light passes through the liquid crystal L, is reflected by the reflective film 112, and is supplied to the liquid crystal L again. The orientation of the liquid crystal L is controlled for each of the R, G, and B pixel pixels by the electrodes 114a and 114b sandwiching the liquid crystal L. Therefore, the light supplied to the liquid crystal L is modulated for each pixel pixel. Images such as letters and numbers are displayed outside the liquid crystal panel 102 by the light that passes through the polarizing plate 117b and the light that cannot pass. Thereby, a reflective display is performed.

  On the other hand, when a sufficient amount of external light cannot be obtained, the LED 136 emits light, and planar light is emitted from the light emitting surface 132 b of the light guide 132, and the light passes through the opening 121 formed in the reflective film 112. Supplied to the liquid crystal L. At this time, similarly to the reflective display, the supplied light is modulated for each pixel by the liquid crystal L whose orientation is controlled, and an image is displayed to the outside. Thereby, a transmissive display is performed.

  FIG. 18 is a view showing process drawings of a method for manufacturing a liquid crystal display device.

  Prior to the description of the manufacturing method and the manufacturing apparatus of the liquid crystal display device 101, first, the liquid crystal display device 101 manufactured by the manufacturing method will be described with an example. The liquid crystal display device 101 of the present embodiment is a transflective liquid crystal display device 101 that performs color display using a simple matrix method.

  The liquid crystal display device 101 having the above-described configuration is manufactured by, for example, a manufacturing method shown in FIG. In this manufacturing method, a series of steps P1 to P6 is a step for forming the first substrate 107a, and a series of steps P11 to P14 is a step for forming the second substrate 107b. The first substrate forming step and the second substrate forming step are usually performed independently.

  First, the first substrate forming process will be described. A plurality of reflective films 112 of the liquid crystal panel 102 are formed on the surface of a large-area mother material substrate formed of translucent glass, translucent plastic, or the like by photolithography. Then, an insulating film 113 is formed thereon using a known film formation method (step P1), and then the first electrode 114a and the wirings 114c and 114d are formed using a photolithography method or the like. , 114e, 114f are formed (process P2).

  Next, an alignment film 116a is formed on the first electrode 114a by coating, printing, or the like (process P3), and the alignment film 116a is rubbed to determine the initial alignment of the liquid crystal (process P4). ). Next, the sealing material 108 is formed in an annular shape by, for example, screen printing (process P5), and spherical spacers 119 are further dispersed thereon (process P6). As a result, a large-area mother first substrate having a plurality of panel patterns on the first substrate 107a of the liquid crystal panel 102 is formed.

  Separately from the first substrate forming process described above, the second substrate forming process (process P11 to process P14 in FIG. 17) is performed. First, a large-area mother material substrate formed of translucent glass, translucent plastic, or the like is prepared, and a plurality of color filters 118 for the liquid crystal panel 102 are formed on the surface (process P11). The color filter forming process is performed using the manufacturing method shown in FIG. 2, and the formation of the R, G, and B color sub-pixels in the manufacturing method is performed using the liquid droplet applying device 14 shown in FIG. The Since the manufacturing methods of these color filters are the same as those already described, their description is omitted.

  When the color filter 1, that is, the color filter 118 is formed on the mother substrate 12, that is, the mother raw material base, as shown in FIG. 2D, the second electrode 114b is then formed by photolithography (process P12). Further, an alignment film 116b is formed by coating, printing, or the like (process P13), and the alignment film 116b is further rubbed to determine the initial alignment of the liquid crystal (process P14). As described above, a large mother second substrate having a plurality of panel patterns on the second substrate 107b of the liquid crystal panel 102 is formed.

  After the mother first substrate and the mother second substrate having a large area are formed as described above, the mother substrates 12 are aligned with each other with the sealant 108 interposed therebetween, that is, aligned, and then bonded to each other (process P21). As a result, an empty panel structure including a plurality of liquid crystal panel portions and not yet filled with liquid crystal is formed.

  Next, a scribe groove, that is, a cutting groove is formed at a predetermined position of the completed empty panel structure, and the panel structure is broken, that is, cut, with reference to the scribe groove (step P22). As a result, a so-called strip-shaped empty panel structure in which the liquid crystal injection opening 110 (see FIG. 16) of the sealing material 108 of each liquid crystal panel portion is exposed to the outside is formed.

  Thereafter, liquid crystal L is injected into each liquid crystal panel portion through the exposed liquid crystal injection opening 110, and each liquid crystal injection port 110 is sealed with a resin or the like (process P23). In the normal liquid crystal injection process, for example, liquid crystal is stored in a storage container, the storage container storing the liquid crystal and a strip-shaped empty panel are put into a chamber or the like, and the chamber or the like is evacuated and then the chamber This is performed by immersing a strip-shaped empty panel in the liquid crystal inside the chamber, and then opening the chamber to atmospheric pressure. At this time, since the interior of the empty panel is in a vacuum state, the liquid crystal pressurized by the atmospheric pressure is introduced into the panel through the liquid crystal injection opening. Since the liquid crystal adheres around the liquid crystal panel structure after the liquid crystal is injected, the strip-shaped panel after the liquid crystal injection process is subjected to a cleaning process in step 24.

  Thereafter, a scribe groove is formed again at a predetermined position on the strip-shaped mother panel after the liquid crystal injection and cleaning is completed, and the strip-shaped panel is cut with reference to the scribe groove, thereby a plurality of liquid crystals. Panels are cut out individually (step P25). As shown in FIG. 18, the liquid crystal driving ICs 103 a and 103 b are mounted on the individual liquid crystal panels 102 manufactured in this way, the lighting device 106 is mounted as a backlight, and the FPC 104 is connected to achieve the target. The liquid crystal device 101 is completed (process P26).

  As described above in detail, according to the present embodiment, the following effects can be obtained.

  (10) The liquid particles 8 formed on the liquid particle forming member 41 can be reliably applied to the substrate without floating by application. Then, a necessary amount to be applied is adhered to the predetermined area. Therefore, in the stage of manufacturing the color filter, it is possible to prevent the film thickness from being varied among the plurality of sub-pixels, and therefore, the light transmission characteristics of the color filter can be made uniform in a plane. As a result, a clear color image without color unevenness can be displayed.

(Fifth embodiment)
FIG. 19 is a diagram illustrating a method of manufacturing an EL device as an electro-optical device according to main processes and a main cross-sectional structure diagram of the EL device finally obtained. This EL device is manufactured using the liquid particle coating device 14 described in FIG. The liquid crystal display panel 102 is applied with a different material. In this embodiment, the liquid crystal display panel 102 is applied using a material for an EL device.

  As shown in FIG. 19D, the EL device 201 forms pixel electrodes 202 on a transparent substrate 204, and banks 205 are formed between the pixel electrodes 202 in a lattice shape when viewed from the direction of the arrow G. A hole injection layer 220 is formed in the lattice-shaped recess, and the R-color light-emitting layer 203R, the G-color light-emitting layer 203G, and the B-color light-emitting layer 203B are arranged in a predetermined arrangement such as a stripe arrangement as viewed from the arrow G direction. It is formed by forming in the grid-like recesses and further forming the counter electrode 213 thereon.

  When the pixel electrode 202 is driven by a two-terminal active element such as a TFD (Thin Film Diode) element, the counter electrode 213 is formed in a stripe shape when viewed from the arrow G direction. When the pixel electrode 202 is driven by a three-terminal active element such as a TFT (Thin Film Transistor), the counter electrode 213 is formed as a single surface electrode.

  A region sandwiched between each pixel electrode 202 and each counter electrode 213 becomes one picture element pixel, and R, G, and B three-color picture element pixels form one unit to form one pixel. By controlling the current flowing through each pixel pixel, a desired one of the plurality of pixel pixels can be selectively emitted, and thereby a desired color image can be displayed in the arrow H direction.

  FIG. 20 shows a method for manufacturing an EL device.

  The EL device 201 is manufactured by, for example, a manufacturing method shown in FIG. That is, as shown in step P51 and FIG. 19A, an active element such as a TFD element or a TFT element is formed on the surface of the transparent substrate 204, and a pixel electrode 202 is further formed. As a formation method, for example, a photolithography method, a vacuum deposition method, a sputtering method, a pyrosol method, or the like can be used. As a material of the pixel electrode, ITO (Indium Tin Oxide), tin oxide, a composite oxide of indium oxide and zinc oxide, or the like can be used.

  Next, as shown in Step P52 and FIG. 19A, a partition wall, that is, a bank 205 was formed by using a well-known patterning method, for example, a photolithography method, and the space between the transparent electrodes 202 was filled with the bank 205. Thereby, it is possible to improve contrast, prevent color mixing of the light emitting material, and prevent light leakage from between the pixels. The material of the bank 205 is not particularly limited as long as it has durability against the solvent of the EL material, but can be treated with fluorine by fluorocarbon gas plasma treatment, for example, organic materials such as acrylic resin, epoxy resin, and photosensitive polyimide. Material is preferred.

  Next, immediately before applying the liquid particles for the hole injection layer, the substrate 204 was subjected to continuous plasma treatment with oxygen gas and fluorocarbon gas plasma (process P53). Thereby, the polyimide surface is water-repellent, the ITO surface is hydrophilized, and the wettability on the substrate side for finely patterning the liquid droplets can be controlled. As an apparatus for generating plasma, an apparatus for generating plasma in a vacuum or an apparatus for generating plasma in the atmosphere can be used similarly.

  Next, as shown in Step P54 and FIG. 19A, the liquid droplet 8 for the hole injection layer is applied from the liquid particle forming member 41 of the liquid particle applying apparatus 14 in FIG. The patterning application was performed. After the coating, the solvent is removed under conditions of room temperature and 20 minutes in a vacuum (1 torr) (step P55), and then heat treatment in the atmosphere at 20 ° C. (on a hot plate) for 10 minutes. A hole injection layer 220 incompatible with the grains was formed (process P56). The film thickness was 40 nm.

  Next, as shown in Step P57 and FIG. 19B, the liquid droplet 8 for the R light emitting layer and the G light emitting layer are formed on the hole injection layer 220 in each sub-pixel region by using a liquid particle coating method. The liquid droplet 8 was applied. Also here, the liquid particles for each light emitting layer were applied from the liquid particle forming member 41 of the liquid particle applying apparatus 14 of FIG. According to the liquid droplet coating method, fine patterning can be performed easily and in a short time. The film thickness can be changed by changing the solid content concentration and the coating amount of the liquid composition.

  After application of the liquid droplets for the light emitting layer, the solvent is removed under conditions of vacuum (1 torr), room temperature, 20 minutes, etc. (step P58), followed by conjugation by heat treatment at 150 ° C. for 4 hours in a nitrogen atmosphere. Thus, an R color light emitting layer 203R and a G color light emitting layer 203G were formed (Step P59). The film thickness was 50 nm. The light-emitting layer conjugated by heat treatment is insoluble in the solvent.

  Note that, before forming the light emitting layer, the hole injection layer 220 may be subjected to continuous plasma treatment with oxygen gas and fluorocarbon gas plasma. As a result, a fluoride layer is formed on the hole injection layer 220 and the ionization potential is increased, whereby the hole injection efficiency is increased, and an organic EL device with high light emission efficiency can be provided.

  Next, as shown in Step P60 and FIG. 19C, the B-color light emitting layer 203B is overlaid on the R-color light-emitting layer 203R, the G-color light-emitting layer 203G, and the hole injection layer 220 in each pixel pixel. Formed. Accordingly, not only the three primary colors of R, G, and B can be formed, but also the steps of the R light emitting layer 203R and the G light emitting layer 203G and the bank 205 can be filled and flattened. Thereby, a short circuit between the upper and lower electrodes can be reliably prevented. By adjusting the film thickness of the B-color light emitting layer 203B, the B-color light-emitting layer 203B functions as an electron injecting and transporting layer in the stacked structure of the R-color light-emitting layer 203R and the G-color light-emitting layer 203G and emits light to the B color. do not do.

  As a method for forming the B-color light-emitting layer 203B as described above, for example, a general spin coating method can be adopted as a wet method, or a method for forming the R-color light-emitting layer 203R and the G-color light-emitting layer 203G. A similar liquid particle coating method can also be employed.

  As a method for forming the B-color light-emitting layer 203B as described above, for example, a general spin coating method can be adopted as a wet method, or a method for forming the R-color light-emitting layer 203R and the G-color light-emitting layer 203G. A similar liquid particle coating method can also be employed.

  Moreover, in the manufacturing method and manufacturing apparatus of the EL device of the present embodiment, R, G, and B are applied by applying the liquid particles 8 formed on the liquid particle forming member 41 by using the liquid particle applying device 14 shown in FIG. Since each color picture element pixel is formed, it is not necessary to go through complicated steps such as a method using a photolithography method, and material is not wasted.

  As described above in detail, according to the present embodiment, the following effects can be obtained.

  (11) The liquid particles 8 formed on the liquid particle forming member 41 can be reliably applied to the substrate without being floated by application. Then, a necessary amount to be applied is adhered to the predetermined area. Therefore, it is possible to prevent variations in the film thickness of the plurality of R, G, B light emitting layers and the hole injection layer in the stage of manufacturing the light emitting layer. Therefore, the light emission distribution characteristic of the light emitting surface of the EL device can be made uniform in a plane, and as a result, a clear color display without color unevenness can be obtained.

  In addition, this embodiment is not limited above, It can also implement with the following forms.

  (Modification 1) In the above embodiment, the liquid particle forming member 41 has been described so as to protrude from the bottom surface of the cylinder 43. As shown in FIGS. 21A and 21B, the liquid particle forming member 41 may be formed not on the cylinder 43 but on the plate constituting the bottom. The liquid particle forming member 41 in FIG. 5A is formed with an inverted conical hole 41 a that constitutes the bottom surface of the cylinder 43. The liquid particle forming member 41 in FIG. 4B is formed as a plate on the bottom surface of the cylinder 41, and a cylindrical pore-shaped hole 41b is formed in the substantially central portion thereof. The liquid particles 8 in FIGS. 2A and 2B are formed at the center of the bottom surface of the cylinder 43. In this case, the liquid particle forming member 41 may not be fixed to the cylinder 43 with a screw.

  (Modification 2) In the above-described embodiment, the example in which the filter agent 13 in the cylinder 43 is pressurized by the pressure actuator 58 has been described. As shown in FIG. 22, the filter agent 13 in the liquid container 61 may be fed into the liquid container 61 using the water head difference E. The liquid container 61 is connected to the tank 65 via a tube 63 connected to the liquid introduction part 62. A valve 64 is interposed on the tube 63, and this valve 64 serves to interrupt the flow of the filter agent 13 in the tube 62. The height of the tank 65 from the upper surface of the substrate can be moved up and down by a tank lifting mechanism 66 and a motor 67. The tank 65 is provided with a liquid level sensor 68 that detects the height of the liquid level of the filter agent 13. The difference between the liquid level of the filter agent in the tank 65 and the height to the tip of the liquid particle forming member 41 becomes a water head difference E, and the tip 42 of the liquid particle forming member 41 is caused by the pressure corresponding to the water head difference E. Thus, the liquid particles 8 of the filter material 13 are formed.

  When the liquid particle 8 is applied to the substrate, the water head difference E, which is the difference between the liquid surface height of the filter agent 13 accommodated in the tank 65 and the height of the tip end portion 42 of the liquid particle forming member 41, is always constant. The height is controlled so that the pressure applied to the filter agent 13 in the liquid container 61 is always constant.

  The liquid droplets 8 on the substrate may be applied continuously with the valve 63 kept open. Alternatively, the liquid particles 8 may be formed with the valve 63 opened, and the valve 63 may be closed at a timing when the liquid particles 8 are formed to a predetermined liquid amount, and then the coating may be performed.

  (Modification 3) In the above embodiment, the liquid particle 8 has been described as being applied to the substrate by lowering the liquid particle forming member 41 side. Alternatively, the liquid particle 8 may be applied by raising the substrate side to the liquid particle forming member 41.

  (Modification 4) In the first and second embodiments, the example in which the same sub-pixel region 7 is applied once (four drops in the first embodiment and 12 drops in the second embodiment) has been described. This may be applied to the same subpixel region 7 a plurality of times.

  (Modification 5) In the first embodiment, the example in which the four liquid particles 8 formed by the four liquid particle forming members 41 are applied to one sub-pixel region 7 has been described. This may be configured so that at least one of the four liquid droplet forming members 41 can be selectively pressurized, and a predetermined number of liquid droplets of one to four drops may be applied to the substrate. In the second embodiment, the example in which the twelve liquid particles 8 formed by the twelve liquid particle forming members 41 are applied to one sub-pixel region 7 has been described. This may be configured such that at least one of the 12 liquid particle forming members 41 can be selectively pressurized, and a predetermined number of liquid particles of 1 to 12 drops may be applied to the substrate. .

  (Modification 6) In the above-described embodiment, the plurality of liquid particle forming members 41 form the liquid particles and perform the application using the application head 15 arranged in a range suitable for the size of the sub-pixel region 7. It was. On the other hand, a mechanism that can change the interval between the plurality of liquid particle forming members 41 and adjust the arrangement range of the liquid particle forming members 41 according to the size of the sub-pixel region 7 may be adopted.

  (Modification 7) In the second embodiment, an example in which a plurality of liquid droplets 8 formed by three rows (B, C, D rows) of liquid droplet forming members is applied to one subpixel region 7. Explained. The color to be applied is determined for each column, and three color liquid droplets 8 may be simultaneously applied to one pixel (R, G, B subpixel) region by one application operation. . More specifically, the B row liquid droplet forming member 41 forms an R (red) liquid droplet 8, the C row liquid droplet forming member 41 forms a G (green) liquid droplet 8, and the D row liquid. The particle forming member 41 forms a B (blue) liquid particle 8. Then, liquid particles 8 of a corresponding color are applied to the sub-pixel regions (R, G, B) 7 by a single application operation. In this case, the cylinders that store the filter agents 13 are divided so that the three color filter agents 13 can be stored separately. According to this, it is possible to simultaneously apply the liquid droplets 8 corresponding to one pixel by one application operation.

  (Modification 8) In the second embodiment, the example in which the liquid particles 8 are continuously formed while being held at a constant pressure value, and the liquid particles 8 are applied to the substrate at constant time intervals has been described. This may be configured such that the set value of the pressurization value and the application interval time can be varied to an efficient combination. For example, when it is desired to increase the coating speed, a high pressure value is set. For example, when it is desired to reduce the coating speed, the pressurization value is set low.

  (Modification 9) In the third embodiment, the example in which the coating head 15 for coating is applied a plurality of times at a fixed position in the sub-pixel region 7 has been described. Alternatively, the plurality of liquid droplets 8 may be applied while shifting in the main scanning direction (X) direction within one sub-pixel region 7.

  (Modification 10) In the third embodiment, the tip position of the liquid particle forming member 41 during application is fixed to a predetermined height (H) set initially from the first application to the final application. It had been. From the first application to the final application, the tip of the liquid particle forming member 41 may be applied at a constant amount (according to the liquid surface height).

  (Modification 11) In the said 3rd Embodiment, in order to form the liquid particle 8 of the filter agent 13, it demonstrated in the example which pressurized the fixed amount. In the same manner as the pressurizing method in the first embodiment, the filter agent 13 is pressurized for a certain time, and after the predetermined liquid particle 8 is formed, the pressurization to the filter agent 13 is stopped. Also good. According to this, even when the application speed varies, the liquid amount per droplet does not vary, so that highly accurate application can be performed.

  (Modification 12) In the third embodiment, the example in which the coating height of the coating head 15 is obtained by calculation in the manufacturing process has been described. In this case, the coating height of the coating head 15 is not calculated and may be adjusted to a preset value.

  (Modification 13) In the fourth embodiment, the passive matrix type liquid crystal display device has been described as an example. This may be applied to an active matrix display device, for example, a liquid crystal display device including a TFD (thin film diode) and a TFT (thin film transistor) as a switching element.

FIG. 3 is a schematic plan view of a color filter and a mother substrate in the first embodiment. (A) is a schematic top view of the planar structure of a color filter. (B) is a schematic plan view which shows the planar structure of a mother board | substrate. The schematic diagram which shows the manufacturing method of a color filter typically in order of a process. The top view which shows the example of arrangement | sequence of a subpixel. The schematic perspective view of the liquid-particle coating device for supplying filter agent. FIG. 3 is an enlarged perspective view of the periphery of a coating head and a mother substrate of a liquid particle coating apparatus. Schematic which shows the structure of a coating head. (A) is a schematic perspective view of an application head. (B) is an internal structure figure of an application head. The block diagram which shows the electric system for forming a color filter. The schematic diagram which shows the application pattern and application | coating order which apply | coat a liquid grain. The time chart which shows the relationship between the applied pressure which pressurizes a filter agent, and pressurization time, and the relationship between the height of an application head, and an application position. The flowchart which shows the operation | movement in which a color filter is formed. The figure which shows the structure of the coating head in 2nd Embodiment. (A) is a perspective view of an application head. (B) is an internal structure figure of an application head. The time chart which shows the relationship between the applied pressure by a piston, and time, and the relationship between the application position of a liquid particle, and the application timing. The flowchart which shows the operation | movement in which a color filter is formed. Schematic which shows the application position of the liquid particle formation member and liquid particle in 3rd Embodiment. (A) is a schematic diagram which shows the positional relationship of the liquid-particle formation member of a 1st application | coating, and a board | substrate. (B) is a schematic diagram showing the positional relationship between the liquid particle forming member, the liquid surface, and the substrate in the final application. The flowchart which shows the operation | movement in which a color filter is formed. The disassembled perspective view of the liquid crystal display device in 4th Embodiment. FIG. 3 is a schematic diagram illustrating a cross-sectional structure of a liquid crystal display device. FIG. 5 is a process diagram showing a method for manufacturing a liquid crystal display device. FIG. 10 is a schematic cross-sectional view showing a method for manufacturing an EL device according to a fifth embodiment. Process drawing which shows the manufacturing method of EL apparatus. Sectional drawing which shows the modification of a liquid-particle formation member. The schematic cross section which shows the modification of the apparatus to pressurize.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Color filter as a substrate for electro-optical devices, 2 ... Substrate, 3 ... Sub pixel as a sub pixel, 7 ... Sub pixel region as a predetermined region, 8 ... Liquid particle, DESCRIPTION OF SYMBOLS 11 ... Color filter formation area | region, 12 ... Mother board | substrate, 13 ... Filter agent as a dye functional liquid, 13 (R) ... Filter agent (red) as a dye functional liquid, 13 (G) ... Filter agent (green) as a dye functional liquid, 13 (B) ... Filter agent (blue) as a dye functional liquid, 14 ... Liquid particle coating device, 15 ... Coating head, 30 ..Electronic balance, 41... Liquid droplet forming member, 41a, 41b... Hole, 42... Tip portion as a predetermined portion, 43. Hole, 46 ... Pressure sensor, 47 ... Piston, 48 ... Piston 58, a pressurizing actuator as a pressurizing means, 63, a tube constituting the pressurizing means, 65, a tank constituting the pressurizing means, 66, constituting a pressurizing means. Tank lift device, 67... Motor constituting pressurizing means, 68... Sensor constituting pressurizing means, 101... Liquid crystal display device as electro-optical device, 201. EL device 201.

Claims (11)

A method for manufacturing a substrate for an electro-optical device, wherein a dye functional liquid is applied to a substrate and a plurality of colored layers are arranged,
Forming liquid droplets of the dye functional liquid on a liquid particle forming member;
And a step of applying the liquid particles formed on the liquid particle forming member to a predetermined region of the substrate. A method for manufacturing a substrate for an electro-optical device according to claim 1,
In the step of applying to the predetermined area, the liquid amount of the liquid particle is determined so that the total liquid amount necessary for the predetermined area can be applied in a plurality of times, and the liquid area is applied to the predetermined area according to the number of times the liquid particle is applied. A method for manufacturing a substrate for an electro-optical device, wherein the amount to be applied is controlled. A method for manufacturing a substrate for an electro-optical device according to claim 2,
A method of manufacturing a substrate for an electro-optical device, comprising the step of measuring the weight of the liquid droplets and determining the number of times of application of the liquid droplets. A method for manufacturing a substrate for an electro-optical device according to claim 2 or 3,
Of the plurality of times of application, the liquid particles formed on the liquid particle forming member in the first application are in contact with the substrate, and the liquid particle forming member is already applied on the substrate in the final application. A method of manufacturing a substrate for an electro-optical device, wherein the coating is performed a plurality of times by lowering the liquid particle forming member to a height at which the liquid surface is not touched. A method for manufacturing a substrate for an electro-optical device according to claim 1,
The liquid droplet is formed on the liquid particle forming member by pressurizing the dye functional liquid in the liquid storage portion by a pressurizing unit, and the liquid amount of the liquid particle is determined by the pressurizing unit. A method for manufacturing a substrate for an electro-optical device, wherein the pressure is controlled by a pressurizing time. A method for manufacturing a substrate for an electro-optical device according to claim 1,
In the electro-optical device substrate, the liquid amount of the liquid particle is controlled by a pressurizing value for pressurizing the dye functional liquid by the pressurizing unit and a time interval for coating. Production method. A method for manufacturing a substrate for an electro-optical device according to claim 1,
The method for manufacturing a substrate for an electro-optical device, wherein at least the predetermined portion of the liquid particle forming member is formed of a material having liquid repellency than the substrate. A method for manufacturing a substrate for an electro-optical device according to any one of claims 1 to 7,
A method of manufacturing a substrate for an electro-optical device, comprising: a plurality of liquid droplet forming members, wherein in the step of applying to the predetermined region, a plurality of droplets of the liquid droplets are applied simultaneously by the plurality of liquid particle forming members. A method for manufacturing a substrate for an electro-optical device according to claim 8,
The method of manufacturing a substrate for an electro-optical device, wherein the plurality of liquid particle forming members are in communication with the common liquid container. 10. A method for manufacturing an electro-optical device, comprising the method for manufacturing a substrate for an electro-optical device according to claim 1. A liquid storage unit for storing a functional dye solution applied to the substrate to form an electro-optical device substrate;
A liquid particle forming member having the dye functional liquid in the liquid container as a liquid particle;
A pressurizing means for pressurizing the dye functional liquid in the liquid storage unit in order to form the liquid particle on the liquid particle forming member;
An apparatus for manufacturing a substrate for an electro-optical device, comprising: moving means for applying the liquid particles to a predetermined region on the substrate by bringing at least one of the liquid particle forming member and the substrate close to each other.

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