JP2003307613A - Method for forming film, device for forming film, device for discharging liquid, method for manufacturing color filter, display device provided with color filter, method for manufacturing display device, display device and electronic apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device and a method for forming a film by discharging a liquid material with a liquid discharge head or the like, such as an ink jet head, which can reduce unevenness resulting from variation of the amount of the discharged liquid material, and to provide a device and a method for forming a film by discharging a liquid material, which can increase process efficiency while suppressing the increase of the cost, even if the liquid material is discharged onto various objects. <P>SOLUTION: When a color filter is manufactured, nozzles 27 of the liquid discharge head 22 discharge filter element materials as liquid drops onto filter element forming regions 7. In this instance, one color of the filter element materials is discharged while the liquid discharge head 2 is swept in the longitudinal direction L of a mother substrate 12. The other colors are discharged while the liquid discharge head 22 is swept in the width direction M of the mother substrate 12. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film forming method, a film forming apparatus, a droplet discharge device, a color filter manufacturing method, a display device having a color filter, a display device manufacturing method, a display device, and an electronic device. The present invention relates to a device, and more particularly to a technique for discharging a liquid material to form a film.

[0002]

2. Description of the Related Art In general, various display devices using an electro-optical device such as a liquid crystal display device and an electroluminescence device (hereinafter, simply referred to as an EL device) as display means, or a mobile phone equipped with these display devices. Electronic devices such as and portable information terminals are known. In such a display device, since color display is becoming common in recent years, R (red), G (green), and B (blue) are displayed on the surface of a substrate made of glass or plastic.
There is a case of using a color filter in which the dot-shaped filter elements are arranged in a predetermined arrangement pattern such as a stripe arrangement, a delta arrangement, or a mosaic arrangement.

Further, in an EL device capable of color display, dot-like EL emission of R (red), G (green), and B (blue) is performed on the surface of a substrate made of glass or plastic. The layers are arranged in a predetermined arrangement pattern such as a stripe arrangement, a delta arrangement, or a mosaic arrangement, and a display dot is formed by sandwiching these EL light emitting layers with a pair of electrodes. Then, by controlling the voltage applied to these electrodes for each display dot, each display dot is caused to emit light in a predetermined color and gradation.

When manufacturing various kinds of display devices as described above, it is general to pattern the filter elements of each color of the color filter and the light emitting layers of each color of the EL device by using a photolithography method. is there. However, the patterning process using this photolithography method requires complicated and time-consuming processing such as material coating, exposure, and development.
Since a large amount of each color material, resist, etc. is consumed, there is a problem that the cost becomes high.

In order to solve this problem, a filter element material and an EL light emitting material are ejected as droplets of a liquid material to which a solvent or the like has been added by an ink jet method and landed on the surface of the substrate to form dots. A method of arraying filter elements and light emitting layers has been proposed. Here, by this ink jet method, as shown in FIG.
As shown in FIG. 1 (a), a large area substrate made of glass or plastic, so-called mother board 3
A case will be described in which the filter elements 303 arranged in a dot pattern as shown in FIG. 61B are formed inside the plurality of unit areas 302 set on the surface of 01.

In this case, for example, as shown in FIG. 61 (c), an ink jet head 306 which is a droplet discharge head having a nozzle row 305 in which a plurality of nozzles 304 are arranged is shown in FIG. 61 (b). As indicated by the arrows A1 and A2, while linearly scanning one unit area 302 a plurality of times (twice in FIG. 61), the ink, that is, the filter material is selectively ejected from the plurality of nozzles 304 in each scanning period. Is discharged to form the filter element 303 at a desired position.

As described above, the filter element 303 is formed by arranging each color of R, G, B, etc. in an appropriate array pattern such as a so-called stripe array, delta array, mosaic array, or the like. Therefore, the inkjet heads 306 of R, G, and B colors are usually prepared for each color, and the inkjet heads 3 of the respective colors are prepared.
By sequentially using 06, one motherboard 30
A color filter having a predetermined color arrangement is formed on the first color filter 1.

By the way, in the ink jet head 306, generally, the ink ejection amount of the plurality of nozzles 304 constituting the nozzle row 305 is uneven. For example,
As shown in FIG. 62 (a), the nozzles 304 at the positions corresponding to both ends of the nozzle row 305 have a large discharge amount, and the nozzle 304 at the central position has the second largest discharge amount. The ink ejection characteristic Q is such that the ejection amount of a certain nozzle is the smallest.

Therefore, when the filter element 303 is formed by the ink jet head 306 as shown in FIG. 61 (b), as shown in FIG. 62 (b), the position P1 corresponding to the end of the ink jet head 306 or A streak having a high density, that is, a striped color unevenness is formed at the central position P2 or both P1 and P2. Therefore, there is a problem that the planar light transmission characteristics of the color filter become non-uniform.

For this reason, each filter element 303 is formed by ejecting a plurality of droplets, and the position of the droplet supply head 306 is sequentially shifted while gradually shifting in the feed direction (the horizontal direction in FIG. 61B). There is known a method (hereinafter, simply referred to as “error dispersion method”) of reducing film formation unevenness caused by variations in the appropriate liquid ejection amount by performing scanning on the surface (for example, Patent Document 1 below). See).

However, when the error dispersion method is used as described above, the number of scans is drastically increased, the manufacturing time is increased, and the production efficiency is reduced, even if the same manufacturing target is used. There is a point. Therefore, in order to solve this problem, a plurality of heads whose postures can be adjusted are mounted on a common carriage, and the range in which processing is performed in a single scan is widened to enable efficient manufacturing. Possible devices have been proposed (see, for example, Patent Document 2 below).

[0012]

[Patent Document 1] Japanese Patent Laid-Open No. 2002-221616

[Patent Document 2] Japanese Patent Laid-Open No. 2002-273868

[0013]

As described above, attempts have been made to reduce the unevenness of film formation and to suppress the decrease in manufacturing efficiency by various methods as described above. It is difficult to sufficiently reduce the striped film-formation unevenness extending in the scanning direction, and in particular, the more the scanning speed is increased and the productivity is improved, the method described in the above publication is adopted. However, there is a problem that it becomes difficult to reduce the striped unevenness.

On the other hand, when a plurality of unit areas 302 are formed on the mother board 301, different color arrangement patterns (stripe arrangement, delta arrangement, mosaic arrangement, etc.) are arranged in the unit areas 302 in order to correspond to the screen size or screen shape of the display device. May be set, or in order to increase the number of unit areas 302 in the mother board 301, the number of arranged display dots of the same color along a certain direction on the mother board 301 and the arrangement interval may be different from each other. Different for each. Therefore, if the inkjet heads are made to uniformly scan the various mother boards 301 in this way, there is a problem that the processing efficiency becomes poor. In this case, a method of increasing the processing efficiency by preparing an inkjet head having a different structure for each model can be considered, but the cost increases by preparing a large number of inkjet heads.

Therefore, the present invention solves the above-mentioned problems, and it is an object of the present invention to reduce film formation unevenness in a film forming method and a film forming apparatus which are carried out by ejecting droplets by a droplet ejecting means. To provide the technology. Also,
An object of the present invention is to provide an apparatus and method capable of reducing unevenness due to variations in the discharge amount of a liquid material when a liquid material is discharged by using a droplet discharge head such as an inkjet head to form a film. Further, it is another object of the present invention to provide an apparatus and a method capable of improving processing efficiency while suppressing an increase in cost even for various objects to be ejected in a film forming technique by ejecting a liquid material.

[0016]

In order to solve the above problems, the film forming method of the present invention is a film forming method in which liquid droplets of a liquid material are discharged onto a surface of an object by a droplet discharging means to form a film. A first scanning step of sequentially ejecting a plurality of the droplets while scanning the droplet ejecting means with respect to the object in a first direction along the surface; and the droplet ejecting means. A second scanning step of sequentially ejecting the plurality of droplets while scanning the object in a second direction along the surface different from the first direction.

According to the present invention, the scanning directions of the object by the liquid droplet ejecting means in the first scanning step and the second scanning step are different from each other, so that there are two different directions. Since a plurality of droplets are ejected sequentially while scanning to form a film, it is possible to reduce film formation unevenness due to the scanning direction. In particular, even if stripe-shaped film formation unevenness that extends in the scanning direction occurs due to individual scanning, the film-formation unevenness becomes less noticeable due to stripe-shaped film formation unevenness that extends in different directions, and the two cancel each other out. It is possible to obtain a film formation state with higher uniformity.

In the present invention, the first direction and the second direction are crossed with each other by rotating the object in the first scanning step and the second scanning step so as to have different postures. It is preferable to set in the direction. By rotating the object and changing its posture,
Since it is not necessary to change the scanning direction of the droplet discharge means,
It is possible to form a film with a simple structure without using a large mechanism.

Next, in the film forming apparatus of the present invention, a droplet discharge means for discharging droplets of the liquid material onto the surface of the object, and the object and the droplet discharge means along the surface. A film forming apparatus having a moving means for relatively moving the
The droplet discharge means can be moved relative to the object in at least two mutually different directions along the surface, and a plurality of the droplet discharge means can be moved during any movement in the two directions. It is characterized in that droplets can be sequentially ejected.

According to the present invention, it is possible to select in which of at least two directions the droplets are to be ejected while scanning according to the film forming pattern to be formed on the object. Further, by sequentially ejecting droplets while scanning the object in at least two directions, it is possible to reduce unevenness in film formation due to the scanning direction.

In the present invention, it is preferable to have posture positioning means capable of setting the object in at least two postures by rotating the object. According to this, by rotating the object by the attitude positioning means and setting the attitude, it is possible to realize a simple structure in which the device is not upsized and the moving means can scan only in one direction. Therefore, it is possible to reduce the size and cost of the device as a whole.

Next, the droplet discharge device of the present invention is a droplet discharge device for discharging a liquid material onto an object to be discharged, and a droplet discharge head for discharging the liquid material, and the liquid discharge head. The droplet discharge head and the discharge target are opposed to each other, and a moving unit that relatively moves in a direction along the surface of the discharge target and a posture positioning unit that positions the planar posture of the discharge target. However, the posture positioning means is configured to be capable of positioning the discharged object in two or more different plane postures.

According to the present invention, the posture positioning means for positioning the plane posture of the discharged substance is different from that of the discharged substance.
By being configured to be able to be positioned in the above-described plane posture, the relative scanning direction of the droplet discharge head with respect to the discharge target is set to two or more in accordance with the arrangement mode of the regions where the droplets should be landed on the discharge target. Since it is possible to select from among the directions, the processing efficiency can be improved. Further, by changing the plane posture of the discharged object, it becomes possible to change the scanning direction of the droplet discharge head by the moving means to two or more different directions with respect to the discharged object.
By causing the droplet discharge heads to scan one discharge target in different two directions and discharging droplets to form a film,
It is possible to reduce the striped material unevenness caused by the scanning direction during droplet ejection.

In the present invention, the posture positioning means has a plurality of observing means for observing different portions of the discharged object, and the observing means different from each other in the two or more different plane postures are used. Is preferably provided.

According to the present invention, when the objects to be ejected are in different plane postures, the different observation means are used, so that the observation range is not widened.
Alternatively, since the observation can be performed without moving the observation means, the device can be inexpensively constructed and the observation accuracy can be improved.

In the present invention, it is preferable that the observing means is capable of observing a plurality of parts of the object to be ejected.

According to the present invention, each of the plurality of observing means observes a plurality of parts of the object to be ejected,
It is possible to detect the plane posture of the discharged object with high accuracy. As an observing means capable of observing a plurality of parts in this way, for example, an observing means composed of two imaging devices can be used.

In the present invention, the observation position of the observation means is preferably fixed in the device.

According to the present invention, since the observation position of the observation means is fixed in the apparatus, a moving mechanism for moving the observation means is not required, so that the observation accuracy can be improved.

In the present invention, the two or more different plane postures are preferably two plane postures rotated by about 90 degrees around the normal line of the surface of the object to be ejected.

According to the present invention, since it is possible to scan the droplet discharge head in two directions orthogonal to each other with respect to the object to be ejected, it is caused by the scanning direction of the droplet discharge head with respect to the object to be ejected. The striped material unevenness that occurs as a result can be most effectively reduced.

Next, another droplet discharge device of the present invention is a droplet discharge device for discharging a liquid material onto an object to be discharged, and a droplet discharge head for discharging the liquid material, Moving means for relatively moving the droplet discharge head and the discharge target object in a direction along the surface of the discharge target object; and posture positioning means for positioning the planar posture of the discharge target object. A scanning direction in which the droplet discharge head moves while discharging droplets of the liquid material onto the discharge target, and a planar orientation of the discharge target positioned by the posture positioning unit. It is characterized in that it can be set in two or more different positional relationships.

According to this aspect of the invention, the scanning direction in which the droplet discharge head moves while discharging droplets of the liquid material onto the object to be ejected and the plane posture of the object to be ejected which is positioned by the posture positioning means are set. By being configured so that two or more different positional relationships can be set, the relative scanning direction of the droplet discharge head with respect to the discharged object is determined in accordance with the arrangement mode of the regions where the droplets should be landed on the discharged object. Can be selected from two or more directions, so that processing efficiency can be improved. Further, the scanning direction of the droplet discharge head can be changed to two or more different directions with respect to the discharge target, so that two different discharge directions with respect to one discharge target.
By causing the droplet discharge head to scan in the direction and discharging the droplets to form a film, it is possible to reduce striped material unevenness caused by the scanning direction during droplet discharge.

In the present invention, the posture positioning means has a plurality of observing means for observing different parts of the discharged object, and the observing means different from each other in the two or more different positional relationships are used. Is preferably provided.

According to the present invention, the different observation means are used when the objects to be ejected are in different plane postures.
Alternatively, since the observation can be performed without moving the observation means, the device can be inexpensively constructed and the observation accuracy can be improved.

In the present invention, it is preferable that the observing means is capable of observing a plurality of portions of the object to be ejected.

According to the present invention, each of the plurality of observing means observes a plurality of parts of the object to be ejected,
It is possible to detect the plane posture of the discharged object with high accuracy. As an observing means capable of observing a plurality of parts in this way, for example, an observing means composed of two imaging devices can be used.

In the present invention, the observation position by the observation means is preferably fixed in the apparatus.

According to the present invention, since the observation position by the observation means is fixed in the apparatus, a moving mechanism for moving the observation means is unnecessary, and therefore the observation accuracy can be improved.

In the present invention, the two or more different positional relations are two positional relations obtained by rotating the plane posture with respect to the scanning direction by about 90 degrees around the normal line of the surface of the object to be ejected. Is preferred.

According to the present invention, since it is possible to scan the droplet discharge head in two directions orthogonal to each other with respect to the object to be discharged, it is caused by the scanning direction of the droplet discharge head with respect to the object to be discharged. The striped material unevenness that occurs as a result can be most effectively reduced.

Next, still another droplet discharge apparatus of the present invention is a droplet discharge apparatus for discharging a liquid material onto an object to be discharged to form a film, and a liquid for discharging the liquid material. A droplet discharge head, a moving unit that relatively moves the droplet discharge head and the discharge target in a direction along the surface of the discharge target, and a plane posture of the discharge target are positioned. The position of the liquid droplet ejection head while ejecting liquid droplets of the liquid material onto the object to be ejected, and the position of the liquid droplet ejecting head is determined by the orientation positioning device during processing. It is characterized in that it can be changed in different directions with respect to the discharged object.

According to the present invention, the scanning direction of the droplet discharge head can be changed to a different direction with respect to the object to be ejected during the process, so that two different directions can be applied to one object to be ejected. By causing the droplet discharge head to scan and discharge droplets to form a film, it is possible to reduce striped material unevenness caused by the scanning direction during droplet discharge.

In the present invention, the posture positioning means has a plurality of observing means for observing different parts of the discharged object, and the observing means different from each other before and after the change of the scanning direction are used. Is preferably provided.

According to the present invention, the observation means which are different from each other are used before and after the scanning direction with respect to the object to be ejected is changed. Since the observation can be performed without moving, the device can be constructed at low cost and the observation accuracy can be improved.

In the present invention, it is preferable that the observing means is capable of observing a plurality of portions of the object to be ejected.

According to the present invention, each of the plurality of observing means observes a plurality of parts of the object to be discharged,
It is possible to detect the plane posture of the discharged object with high accuracy. As an observing means capable of observing a plurality of parts in this way, for example, an observing means composed of two imaging devices can be used.

In the present invention, the observation position by the observation means is preferably fixed in the apparatus.

According to the present invention, since the observation position by the observation means is fixed in the apparatus, a moving mechanism for moving the observation means is unnecessary, and therefore the observation accuracy can be improved.

In the present invention, the change angle in the scanning direction is preferably an angle of about 90 degrees around the normal to the surface of the material to be ejected.

According to the present invention, since it is possible to scan the droplet discharge head in two directions orthogonal to each other with respect to the object to be discharged, it is caused by the scanning direction of the droplet discharge head with respect to the object to be discharged. The striped material unevenness that occurs as a result can be most effectively reduced.

In the present invention, as the liquid material,
Examples thereof include a liquid filter material capable of forming a filter element film on the target object and a liquid light emitting material capable of forming an EL light emitting layer on the target object. This makes it possible to improve the quality of the color display of color filters, EL elements, and the like that form the display device.

Next, the method for producing a color filter of the present invention is a method for producing a color filter, which comprises an ejection film forming step of forming a filter element by ejecting a liquid material onto an object to be ejected. A first ejection step of continuously ejecting liquid droplets of the liquid material onto the ejection target along one scanning direction; and a second scanning direction different from the first scanning direction. A second discharging step of continuously discharging the droplets of the liquid material onto the discharged material.

According to the present invention, when the filter element of the color filter is formed by ejecting liquid droplets of the liquid material, scanning is performed by scanning in two different scanning directions of the first scanning direction and the second scanning direction. Stripe-like color unevenness caused by the direction can be reduced.

In the present invention, in the first discharging step,
A first filter element having a first hue is formed with respect to a first region of the discharged object, and a second filter element different from the first region of the discharged object is formed in the second discharging step.
It is preferable that a second filter element having a second hue different from the first hue is formed on the region.

According to the present invention, by forming the filter elements of different hues in different scanning directions,
Since the manner of occurrence of color unevenness between hues can be mutually changed, the color unevenness as a whole can be reduced.

In the present invention, the filter element having the hues of three colors is formed, and the filter element having the hue which causes the largest color unevenness due to the scanning direction of the droplets of the liquid material, and the other two It is preferable to form the filter element exhibiting a hue of color at a different ejection stage.

According to the present invention, the filter element exhibiting the hue that causes the largest color unevenness and the filter element exhibiting the hues of the other two colors are formed in mutually different scanning directions. Differences in color unevenness due to differences in the scanning directions are easily canceled by each other, and color unevenness as a whole can be further reduced.

In the present invention, it is preferable that the filter element is formed by droplets discharged in the first discharging step and droplets discharged in the second discharging step.

According to the present invention, since the filter element is formed by a plurality of droplets ejected in different scanning directions, it is possible to reduce variations in the amount of filter element material due to the scanning direction. Stripe-shaped color unevenness due to the scanning direction can be further reduced.

In the present invention, it is preferable that the first scanning direction and the second scanning direction are two directions having an angle of about 90 degrees around a normal line to the surface of the object to be ejected.

According to the present invention, since it is possible to eject droplets while scanning in two directions orthogonal to each other with respect to the object to be ejected, it is possible to cause the direction of scanning of the droplet ejection head with respect to the object to be ejected. The striped material unevenness that occurs as a result can be reduced most effectively.

Next, a display device provided with a color filter of the present invention is a display device provided with a color filter having a filter element formed by ejecting a liquid material onto an object to be ejected to form a film. The color filter is formed of droplets of the liquid material that are continuously discharged along a plurality of different scanning directions.

According to the present invention, the droplets of the liquid material continuously ejected along a plurality of different scanning directions, that is, the droplets ejected continuously along a certain scanning direction,
Since it has a color filter formed by mixing with droplets continuously ejected along another scanning direction,
Stripe-like color unevenness caused by the scanning direction when ejecting droplets can be reduced, and a higher quality image can be displayed.

According to the invention, the color filter comprises:
It is preferable to have a plurality of types of filter elements having different hues, which are composed of droplets of the liquid material that are continuously ejected along mutually different scanning directions.

According to the present invention, a plurality of types of filter elements exhibiting different hues are formed by the liquid material droplets that are continuously ejected along mutually different scanning directions, so that they are ejected continuously. Striped color unevenness caused by the scanning direction of the droplets can be reduced.

In the present invention, the filter element having the three color hues and having the hue that causes the largest color unevenness due to the scanning direction of the liquid material droplets, and the other two It is preferable that the filter element exhibiting a hue of color is continuously formed along a different scanning direction.

According to the present invention, the largest color unevenness of a certain hue is mixed with the color unevenness of the other two hues, whereby the color unevenness can be further reduced as a whole.

In the present invention, it is preferable to have the filter element formed by mixing droplets of the liquid material continuously discharged along different scanning directions.

According to the present invention, since the filter element is formed by a plurality of droplets ejected in different scanning directions, it is possible to reduce variations in the amount of filter element material due to the scanning direction. The striped color unevenness due to the scanning direction can be further reduced.

In the present invention, the different scanning directions are
It is preferable that there are two directions having an angle of about 90 degrees around the normal to the surface of the color filter.

According to the present invention, since the color filter is formed by ejecting droplets while scanning in two directions orthogonal to each other, stripe-shaped material unevenness caused by the scanning direction of droplets is generated. It can be reduced most effectively.

An example of the display device of the present invention is an electro-optical device capable of displaying with an electro-optical substance.
The electro-optical device may include, for example, a liquid crystal panel that planarly overlaps the color filter, or may include an EL light emitting layer that planarly overlaps the color filter.

Next, an electronic apparatus of the present invention has a display device having any one of the color filters described above. The electronic device of the present invention is not particularly limited, but for example, it is preferably a portable information device such as a mobile phone, a portable computer, a portable electronic device such as an electronic wristwatch.

Next, a method of manufacturing a display device according to the present invention is a method of manufacturing a display device having a discharge film forming step of discharging a liquid material onto a base material to form a film. A first discharge step of continuously discharging liquid droplets of the liquid material onto the base material along the first and second liquid directions on the base material along a second scanning direction different from the first scanning direction. A second discharging step of continuously discharging droplets of the material.

According to the present invention, two different substrates are used.
By forming a film by ejecting droplets while scanning in one scanning direction, it is possible to reduce striped material unevenness caused by the scanning direction during droplet ejection. In particular, it is effective as a method of manufacturing an electro-optical device.

In the present invention, it is preferable that display dots are formed by the liquid droplets of the liquid material.

According to the present invention, the material unevenness of the display dots due to the scanning direction can be reduced, so that the display unevenness can be reduced and high quality display can be performed.

In the present invention, the display dot is formed by a plurality of droplets, a part of the plurality of droplets is ejected in the first ejecting step, and the plurality of droplets is ejected in the second ejecting step. It is preferable that the rest of the above is discharged.

According to the present invention, since the display dot is formed by a plurality of liquid droplets ejected in different scanning directions, it is possible to further reduce the material unevenness, and thus it is possible to further improve the display quality. .

In the present invention, the display dots are EL
It may have a light emitting layer. In this case, it is preferable that the EL light emitting layer is formed by the droplets. Further, the display dot may be composed of an EL light emitting layer, a hole transporting layer, and a pair of electrodes sandwiching these. In this case, the case where at least one of the EL light emitting layer, the hole transport layer, and the pair of electrodes is formed by the droplet is also included.

In the present invention, it is preferable that the first scanning direction and the second scanning direction are two directions having an angle of about 90 degrees around the normal line of the surface of the base material.

According to the present invention, by discharging droplets while scanning along two scanning directions which are orthogonal to each other, it is possible to effectively reduce overall material unevenness.

Next, the display device of the present invention is a display device provided with display dots formed by ejecting a liquid material onto an object to be ejected to form a film. It is preferable that the liquid material is composed of droplets of the liquid material that are continuously discharged along the direction.

According to the present invention, two different substrates are used.
Display dots are formed by ejecting droplets while scanning in one scanning direction to form a film, so it is possible to reduce striped material unevenness caused by the scanning direction during droplet ejection. It becomes possible to improve the display quality. In particular, it is effective when it is an electro-optical device such as a liquid crystal device or an EL device.

In the present invention, it is preferable that the display dots are formed by mixing droplets of the liquid material that are continuously ejected along different scanning directions.

According to the present invention, since the display dot is formed by a plurality of liquid droplets ejected in different scanning directions, it is possible to reduce the variation in the amount of material due to the scanning direction, and thus the scanning is performed. Stripe-shaped display unevenness due to the direction can be further reduced.

In the present invention, the display dots are EL
It may have a light emitting layer. In this case, it is preferable that the EL light emitting layer is formed by the droplets. Further, the display dot may be composed of an EL light emitting layer, a hole transporting layer, and a pair of electrodes sandwiching these. In this case, the case where at least one of the EL light emitting layer, the hole transport layer, and the pair of electrodes is formed by the droplet is also included.

In the present invention, the different scanning directions are
It is preferable that there are two directions having an angle of about 90 degrees around the normal to the surface of the color filter.

According to the present invention, since the display dots are formed by ejecting the liquid droplets while scanning in the two directions orthogonal to each other, the striped material unevenness caused by the scanning direction of the liquid droplets is formed. Can be reduced most effectively.

Next, the electronic equipment of the present invention has the display device described in any of the above. The electronic device of the present invention is not particularly limited, but for example, it is preferably a portable information device such as a mobile phone, a portable computer, a portable electronic device such as an electronic wristwatch.

[0092]

BEST MODE FOR CARRYING OUT THE INVENTION Next, with reference to the accompanying drawings, a film forming method, a film forming apparatus, a droplet discharge device, a color filter manufacturing method, a display device having a color filter, and a display device according to the present invention will be described. Embodiments of the manufacturing method, the display device, and the electronic device will be described in detail.

[Droplet Ejecting Device] First, embodiments of the film forming apparatus and the droplet ejecting device according to the present invention will be described. The droplet discharge device 16 of this embodiment, as shown in FIG.
A head unit 26 equipped with a droplet discharge head 22 which is a droplet discharge means composed of an inkjet head used in a printer or the like as an example of the droplet discharge head.
A head position controller 17 for controlling the head position for controlling the position of the droplet discharge head 22, a substrate position controller 18 for controlling the position of the mother substrate 12, and the droplet discharge head 22 for the mother substrate 12. And a feed driving device 21 for feeding the droplet discharge heads 22 to the mother substrate 12 in a feed direction Y intersecting (orthogonal to) the scanning direction.
A substrate supply device 23 for supplying the mother substrate 12 to a predetermined work position in the droplet discharge device 16, and the droplet discharge device 16
And a control device 24 that controls the overall control of.

The head position control device 17, the substrate position control device 18, the scanning drive device 19, and the feed drive device 21 are installed on the base 9. Further, each of these devices is covered with a cover 14 as needed.
Here, the head position control device 17, the scanning drive device 19, and the feed drive device 21 constitute a moving means.

The droplet discharge head 22 has a nozzle row 28 in which a plurality of nozzles 27 are arranged, for example, as shown in FIG. The number of nozzles 27 is, for example, 180, the hole diameter of the nozzles 27 is, for example, 28 μm, and the pitch t of the nozzles 27 is, for example, 141 μm. The short side direction M shown in FIG. 10 indicates the standard scanning direction of the droplet discharge head 22, and the arrangement direction T indicates the arrangement direction of the nozzles 27 in the nozzle row 28.

The droplet discharge head 22 is, for example, as shown in FIG.
As shown in (a) and (b), a nozzle plate 29 made of stainless steel or the like and a diaphragm 31 facing the nozzle plate 29.
And a plurality of partition members 23 that join them together. Between the nozzle plate 29 and the vibration plate 31,
A plurality of ink chambers 33 and a liquid pool 3 are formed by the partition member 32.
And 4 are formed. These ink chamber 33 and liquid pool 34
And communicate with each other via a passage 38.

Ink supply holes 36 are formed at appropriate places on the vibration plate 31. An ink supply device 37 is connected to the ink supply hole 36. The ink supply device 37 is
One color of G and B, for example, R color filter element material M is supplied to the ink supply hole 36. The filter element material M supplied in this way fills the liquid pool 34 and further fills the ink chamber 33 through the passage 38.

The nozzle plate 29 is provided with nozzles 27 for ejecting the filter element material M in a jet form from the ink chamber 33. An ink pressurizing member 39 is attached to the back surface of the vibration plate 31 facing the ink chamber 33 so as to correspond to the ink chamber 33. As shown in FIG. 12B, the ink pressurizing body 39 has a piezoelectric element 41 and a pair of electrodes 42a and 42b sandwiching the piezoelectric element 41. The piezoelectric element 41 includes electrodes 42a and 42a.
By energizing b, it is flexibly deformed so as to project to the outside as indicated by arrow C, and the volume of the ink chamber 33 increases. Then, the filter element material M corresponding to the increased volume flows from the liquid pool 34 into the ink chamber 33 through the passage 38.

Thereafter, when the energization of the piezoelectric element 41 is released, both the piezoelectric element 41 and the vibrating plate 31 return to their original shapes, and the ink chamber 33 also returns to its original volume. The pressure of the filter element material M inside is increased, and the filter element material M is ejected as droplets 8 from the nozzle 27. An ink repellent layer 43 made of, for example, a Ni-tetrafluoroethylene eutectoid plating layer is provided in the peripheral portion of the nozzle 27 in order to prevent flight deflection of the droplet 8 and clogging of the nozzle 27.

Next, with reference to FIG. 9, a head position control device 1 arranged around the above-mentioned droplet discharge head 22.
7, the substrate position control device 18, the scanning drive device 19, the feed drive device 21, and other means will be described. The head position control device 17 swings the droplet discharge head 22 around an axis parallel to the feed direction Y and an α motor 44 that rotates the droplet discharge head 22 attached to the head unit 26 in a plane (horizontal plane). Beta motor 46 for dynamic rotation
A γ motor 47 that swings and rotates the droplet discharge head 22 around an axis parallel to the scanning direction X, and the droplet discharge head 22.
And a Z motor 48 that translates in the vertical direction.

The substrate position control device 18 has a table 49 on which the mother substrate 12 is placed and a θ motor 51 for rotating the table 49 in a plane (horizontal plane). In addition, the scan driving device 19 has X extending in the scanning direction X.
It has a guide rail 52 and an X slider 53 incorporating a pulse-driven linear motor, for example. The X slider 53 moves in parallel in the scanning direction X along the X guide rail 52 by the operation of a built-in linear motor, for example.

Further, the feed drive device 19 is arranged in the feed direction Y.
It has a Y guide rail 54 extending to and a Y slider 56 incorporating a pulse-driven linear motor, for example.
The Y slider 56 moves in parallel in the feed direction Y along the Y guide rail 54 by the operation of a built-in linear motor, for example.

The linear motor pulse-driven in the X-slider 53 and the Y-slider 56 can precisely control the rotation angle of the output shaft by the pulse signal supplied to the motor. Therefore, the position of the droplet discharge head 22 supported by the X slider 53 in the scanning direction X, the position of the table 49 in the feed direction Y, and the like can be controlled with high accuracy. The position control of the droplet discharge head 22 and the table 49 is not limited to the position control using the pulse motor, but may be realized by feedback control using a servo motor or any other method.

The table 49 is provided with positioning pins 50a and 50b for restricting the planar position of the mother board 12. The mother substrate 12 is moved to the positioning pins 50a and 50b in the scanning direction X by the substrate supply device 23 described later.
Side and the end face on the feed direction Y side are brought into contact with each other, and are positioned and held. It is desirable to provide the table 49 with a known fixing means such as air suction (vacuum suction) for fixing the mother substrate 12 held in such a positioned state.

In the droplet discharge device 16 of this embodiment, as shown in FIG. 9, a plurality of sets (two sets in the illustrated example) of image pickup devices 91R, 91L and 92 are provided above the table 49.
R and 92L are arranged. Here, the imaging device 91
R, 91L and 92R, 92L show only the lens barrel in FIG. 9, and other portions and their supporting structures are omitted.
A CCD camera or the like can be used as the image pickup device as these observation means. It should be noted that illustration of these image pickup devices is omitted in FIG. 8.

Here, the configuration of the image pickup devices 91R, 91L and 92R, 92L in the present embodiment will be described in more detail. 22A and 22B are plan views showing a state in which the mother substrate 12 is positioned and held on the table 49. As shown in FIG. 22A, the mother substrate 12 can be held on the table 49 in a plane posture in which the longitudinal direction L thereof coincides with the scanning direction X of the apparatus, and as shown in FIG. 22B. As described above, the mother substrate 12 can be held in a plane posture in which the longitudinal direction L matches the feeding direction Y. Here, in the illustrated example, the positioning pin 50a is configured to move to the left and right in the drawing in accordance with the plane posture of the mother substrate 12, and the positioning pin 50b is fixed to the table 49. However, each of the positioning pins 50a and 50b may be fixed to the table 49 like 50b or may be movable like 50a.

On the mother substrate 12, two sets of four alignment marks 12ar, 12al and 1 are provided on the periphery of the mother substrate 12.
2br and 12bl are formed in advance. Here, the alignment marks 12ar and 12al correspond to the mother substrate 12
Are formed at both ends in the longitudinal direction L. Also,
The alignment marks 12br and 12bl are formed on the mother substrate 12 in the direction in which the short sides extend, that is, at both ends in the short side direction M, respectively. As shown in FIG. 22 (a),
When the mother substrate 12 is held on the table 49 with the longitudinal direction L thereof aligned with the scanning direction X, the image pickup devices 91R and 91L have the alignment marks 12a.
r and 12al can be photographed respectively.
In addition, as shown in FIG. 22B, the table 4 is placed with the mother substrate 12 with its longitudinal direction L aligned with the feeding direction Y.
9 is held on the image pickup device 92R,
The 92L can photograph the alignment marks 12br and 12bl, respectively.

The image pickup devices 91R, 91L and 92 described above.
Both R and 92L are directly or indirectly fixed to a fixed portion (for example, the base 9) of the droplet discharge device 16. Then, by observing the mother substrate 12 using these fixed image pickup devices, the table 49
The position of the upper mother substrate 12 can be accurately detected.

Returning to FIG. 8 again, the description will be continued. The substrate supply device 23 shown in FIG. 8 has a substrate accommodation portion 57 that accommodates the mother substrate 12, and a substrate transfer mechanism 58 such as a robot that conveys the mother substrate 12. The substrate transfer mechanism 58 is
Base 59 and lifting shaft 61 that moves up and down with respect to the base 59
And a first arm 62 that rotates around the lifting shaft 61.
And a second arm 63 that rotates with respect to the first arm 62.
And a suction pad 64 provided on the lower surface of the tip of the second arm 63. The suction pad 64 is configured to be capable of suction-holding the mother substrate 12 by air suction (vacuum suction) or the like.

Further, as shown in FIG. 8, a capping device 76 and a cleaning device 77 are arranged at one side of the feed drive device 21 under the scanning locus of the droplet discharge head 22. . Further, the feed drive device 21
An electronic balance 78 is installed at the other side position. Here, the capping device 76 is a device for preventing the nozzle 27 (see FIG. 10) from drying when the droplet discharge head 22 is in a standby state. The cleaning device 77 is
This is a device for cleaning the droplet discharge head 22. The electronic balance 78 includes the individual nozzles 27 in the droplet discharge head 22.
This device measures the weight of ink droplets 8 ejected from each nozzle. Further, a head camera 81 that moves integrally with the droplet discharge head 22 is attached near the droplet discharge head 22.

The control device 24 shown in FIG. 8 has a computer main body 66 containing a processor, an input device 67 such as a keyboard, and a display device 68 such as a CRT. The computer main body 66 has a CP shown in FIG.
A U (central processing unit) 69 and an information recording medium 71 which is a memory for storing various information are provided.

The above-mentioned head position control device 17, substrate position control device 18, scanning drive device 19, feed drive device 21,
In addition, the piezoelectric element 41 in the droplet discharge head 22 (see FIG.
Each device of the head drive circuit 72 for driving (see (b)) has an input / output interface 73 as shown in FIG.
Also, it is connected to the CPU 69 via the bus 74. In addition, the substrate supply device 23, the input device 67, the display device 68,
The capping device 76, the cleaning device 77, and the electronic balance 78 are also input / output interfaces 73 in the same manner as above.
Also, it is connected to the CPU 69 via the bus 74.

The memory as the information recording medium 71 is an RA
The concept includes a semiconductor memory such as M (random access memory) and ROM (read only memory), and an external storage device such as a hard disk, a CD-ROM reading device, and a disk type recording medium. A storage area for storing program software in which the control procedure of the operation of the ejection device 16 is described, a storage area for storing the ejection position of ink in the mother substrate 12 by the droplet ejection head 22 as coordinate data, and FIG.
A storage area for storing the feed movement amount of the mother board 12 in the feed direction Y in the above, a work area for the CPU 69, an area functioning as a temporary file, and other various storage areas are set.

The CPU 69 performs control for ejecting ink to a predetermined position on the surface of the mother substrate 12 according to program software stored in the memory which is the information storage medium 71. As a concrete function realization part,
As shown in FIG. 14, a cleaning calculation unit that performs a calculation for realizing a cleaning process, a capping calculation unit for realizing a capping process, and a weight measurement that performs a calculation for realizing weight measurement using the electronic balance 78. It has a calculation unit and a drawing calculation unit for causing the ink to land on the surface of the mother substrate 12 by droplet ejection and draw in a predetermined pattern.

The drawing operation unit includes a droplet discharge head 22.
A drawing start position calculation unit for setting the initial position for drawing, a scanning control calculation unit for calculating control for moving the droplet discharge head 22 in the scanning direction X at a predetermined speed, and the mother substrate 12. To control which of the plurality of nozzles 27 in the droplet ejection head 22 is operated to eject ink, a feed control calculation unit that calculates control for shifting a predetermined feed movement amount in the feed direction Y. It has various function calculation units such as a nozzle discharge control calculation unit that performs the calculation.

In the above embodiment, each of the above-mentioned functions is realized by the program software using the CPU 69. However, when each of the above-mentioned functions can be realized by an electronic circuit which does not use the CPU, such a function is realized. An electronic circuit may be used.

Next, the droplet discharge device 16 having the above-mentioned structure.
The operation will be described based on the flowchart shown in FIG. When the droplet discharge device 16 is activated by turning on the power by the operator, first, the initial setting is realized in step S1. Specifically, the head unit 26, the substrate supply device 23, the control device 24, etc. are set to a predetermined initial state.

Next, when the weight measurement timing comes (step S2), the head unit 26 shown in FIG. 9 is moved to the electronic balance 78 shown in FIG. 8 by the scanning drive device 19 (step S3). Then, the amount of ink ejected from the nozzle 27 is measured using the electronic balance 78 (step S4). Further, the voltage applied to the piezoelectric element 41 of each nozzle 27 is adjusted according to the ink ejection characteristics of the nozzle 27 thus measured (step S).
5).

After that, when the cleaning timing comes (step S6), the head unit 26 is moved to the cleaning device 77 by the scanning drive device 19 (step S7), and the droplet discharge head 22 is moved by the cleaning device 77. Cleaning is performed (step S8).

When the weight measurement timing or the cleaning timing has not come, or when the weight measurement or the cleaning has ended, the substrate supply device 23 shown in FIG. 8 is operated in step 9 to supply the mother substrate 12 to the table 49. To do. Specifically, the mother substrate 12 in the substrate housing portion 57 is suction-held by the suction pad 64, and the lifting shaft 61, the first arm 62 and the second arm 63 are moved to convey the mother substrate 12 to the table 49, Further, a positioning pin 50 provided in advance at an appropriate place on the table 49
a, 50b (see FIG. 9). In order to prevent displacement of the mother substrate 12 on the table 49, it is desirable to fix the mother substrate 12 to the table 49 by means such as air suction (vacuum suction).

Next, the image pickup devices 91R and 91L shown in FIG.
While observing the mother board 12 by the
The table 49 is rotated in a plane (horizontal plane) by rotating the output shaft of 1 by a small angle unit to position the mother substrate 12 (step S10). More specifically, the alignment marks 12ar, 12al, 12br, 12 formed on the left and right ends of the mother substrate 12, respectively.
bl is a pair of the image pickup devices 91R and 91L shown in FIG.
Alternatively, the mother substrate 12 is photographed by 92R and 92L, respectively, and image pickup positions of these alignment marks are used.
Is calculated and obtained, and the table 49 is rotated according to this plane attitude to adjust the angle θ.

After that, while observing the mother substrate 12 by the head camera 81 shown in FIG. 8, the position at which drawing is started by the droplet discharge head 22 is determined by calculation (step S11). Then, the scanning drive device 19 and the feed drive device 21 are appropriately operated to move the droplet discharge head 22 to the drawing start position (step S12).

At this time, the droplet discharge head 22 is operated as shown in FIG.
The reference direction S shown in FIG. 3 may be in a posture that matches the scanning direction X, or the posture in which the reference direction S is inclined at angles φ1 and φ2 with respect to the scanning direction as shown in FIGS. You may comprise so that it may become. This angle φ1, φ2
In many cases, the pitch of the nozzles 27 is different from the pitch of the position on the surface of the mother substrate 12 at which ink is to be landed, and when the droplet discharge heads 22 are moved in the scanning direction X, they are arranged in the arrangement direction T. This is a measure to make the dimension component of the pitch of the nozzles 27 in the feed direction Y geometrically equal to the pitch of the landing positions of the mother substrate 12 in the feed direction Y.

When the droplet discharge head 22 is placed at the drawing start position in step S12 shown in FIG. 15, step S13 is performed.
In, the droplet discharge head 22 is linearly moved in the scanning direction X at a constant speed. During this scanning, ink droplets are continuously ejected from the nozzles 27 of the droplet ejection head 22 onto the surface of the mother substrate 12.

The ejection amount of the ink droplets at this time may be set so that the entire amount is ejected in the ejection range which can be covered by the droplet ejection head 22 by one scanning. For example, as will be described later with reference to FIGS. 3 and 4, it is configured to eject a fraction (for example, a quarter) of ink that should be originally ejected by one scan, and a droplet is formed. When the ejection head 22 is scanned a plurality of times, the scanning ranges are set so as to partially overlap each other in the feed direction Y, and ink is ejected several times (for example, four times) in all the regions. You may.

When the scanning of the mother substrate 12 for one line is completed (step S14), the droplet discharge head 22 moves in the reverse direction and returns to the initial position (step S1).
5) Move in the feed direction Y by a predetermined amount (only the set feed movement amount) (step S16). Each time, step S
The ink is ejected again by scanning at 13, and thereafter, the above operation is repeated to scan over a plurality of lines. Here, as will be described later with reference to FIG.
When the scanning of the line is completed, the scanning direction may be alternately inverted, such that the line is moved in the feeding direction Y by a predetermined amount, is inverted, and is scanned in the opposite direction.

Here, as will be described later, the mother substrate 12
The case where a plurality of color filters are formed inside will be described. The ink ejection is completed for one row of the color filter area in the mother substrate 12 (step S1).
7), the droplet discharge head 22 moves in the feed direction Y by a predetermined amount, and the operations of steps S13 to S16 are repeated again as described above. Then, finally, when the ejection of ink to the color filter regions of all the rows on the mother substrate 12 is completed (step S18), the substrate supplying device 23 or another carrying-out mechanism at step S20 causes the processed mother substrate to be processed. 12 is discharged to the outside. After that, unless the operator gives an instruction to finish the work, as described above, the mother board 1
The supply of 2 and the ink discharge work are repeated.

When the operator gives an instruction to finish the work (step S21), the CPU 69 conveys the droplet discharge head 22 to the capping device 76 in FIG. Capping processing is performed (step S22).

Droplet discharging device 16 constructed as described above
In the first embodiment, the entire surface of the mother substrate 12 is obtained by continuously ejecting ink droplets while scanning the droplet ejection head 22 in the scanning direction X and repeating this scanning through the movement in the feeding direction Y. Ink can be landed on top. In the present embodiment, FIG.
22B, the mother substrate 12 can be positioned by placing the mother substrate 12 on the table 49 and photographing the alignment marks 12ar, 12al by the image pickup devices 91R, 91L, and as shown in FIG. Then, the mother substrate 12 is placed on the table 49 in different plane postures (a posture rotated by 90 degrees around the normal line of the substrate surface), and the mother substrates 1 are photographed by the alignment marks 12br and 12bl by the image pickup devices 92R and 92L.
Since it is possible to perform the positioning of 2, the mother substrate 12
Scan direction X with respect to two different directions (two orthogonal to each other)
Direction) can be set to perform processing.

Generally, it is assumed that the mother substrate 12 in which the positions where ink should be landed is different is supplied to the droplet discharge device 16. For example, as shown in FIG.
When a plurality of unit areas 11 are arranged on the mother board 12, there are differences in the size of the unit areas 11 and the pattern of the dot arrangement depending on the model of the product, and the number of the unit areas 11 is increased as much as possible for production. In order to improve the sex, the arrangement manner of the unit regions 11 may also be different. Therefore,
Mother substrate 1 in which unit areas 11 are arranged as shown in FIG.
In the case of 2, the mother substrate 1 as shown in FIG.
Although it is convenient to make the longitudinal direction L of 2 coincide with the scanning direction X of the droplet discharge head 22 for efficient processing, as shown in FIG. 23, another unit area 11 ′ is arranged. In the case of the mother substrate 12 ′ having the same shape, or in the case where the unit regions 11 are arranged in a posture different from that of FIG. 22 in the mother substrate, as shown in FIG. Matching L with the feed direction Y may be convenient for efficient processing.

Therefore, the droplet discharge device 1 of this embodiment
6, the processing is performed so that the mother substrate 12 can be processed in any of two different plane orientations (two directions orthogonal to each other in the illustrated example) as shown in FIGS. 22 and 23. The mother substrate 12 is placed on the table 49 in a plane posture suitable for the arrangement of the positions where the ink should land.
It can be installed on top, and as a result, it becomes possible to efficiently perform processing depending on the form of the mother substrate 12 that is the object to be discharged.

Since the substrate supply device 23 is used to dispose the mother substrate 12 on the table 49 in the above embodiment, the plane posture of the mother substrate 12 on the table 49 is shown in FIGS. 22 and 23. In order to set in either of the two different directions, the supply attitude of the substrate supply device 23 can be changed. However, using the rotation mechanism of the table 49,
The table 49 is configured so that it can be rotated once.
After the mother board 12 is supplied on the upper side, the table 49 may be rotated to select whether or not to change the plane posture of the mother board 12.

By the way, the distribution of the ink ejection amounts of the plurality of nozzles 27 forming the nozzle row 28 of the droplet ejection head 22 becomes nonuniform, for example, several nozzles present at both ends of the nozzle row 28 (for example, 10 nozzles). As described above with reference to FIG. 56, the ink ejection amount of the individual nozzles 27 is particularly large. As described above, it is not preferable to use the nozzles 27 that eject more ink than the other nozzles 27 in order to make the film thickness formed by ejecting ink uniform. Therefore, for example, as shown in FIG.
Among the plurality of nozzles 27 forming the nozzle row 28, some, for example, about 10 nozzles existing at both ends E of the nozzle row 28 are set in advance not to eject ink, and are present in the remaining portion F. It is desirable to use the nozzle 27 that does.

The thickness of the formed film is formed by forming a film by a plurality of liquid droplets instead of forming a film by a single liquid droplet discharged from the liquid droplet discharging head 22 in a predetermined region. Variation in depth can be reduced. That is, when film formation is performed for each of a plurality of regions, even if there is some variation in the amount of individual droplets, film formation in one region is performed by a plurality of droplets Variations in the thickness of the formed film are reduced.

The structure of the droplet discharge head 22 is not limited to the above, but various structures can be used. For example, the droplet discharge head 22A shown in FIG. 11 includes two nozzle rows 28, 28 arranged in the reference direction S. Each of these nozzle rows 28 includes a plurality of nozzles 27 as described above. The droplet discharge head 22B shown in FIG. 16 includes three nozzle rows 28R, 28G, and 28B arranged in the reference direction S. In any of these droplet ejection heads 22A and 22B, the material of the droplets ejected from the nozzles 27 of each nozzle row 28 may be the same or may be different from each other. For example, the droplet discharge head 22A shown in FIG.
16 is configured such that the same ink is ejected from the nozzles 27 of any of the two nozzle rows 28.
In the droplet discharge head 22B shown in FIG.
The inks ejected from the 28G and 28B nozzles 27 are different from each other, and are used so as to be, for example, filter element materials 13R, 13G, and 13B described later.

[Color Filter and Manufacturing Method Thereof] Next, an embodiment of a color filter manufacturing method according to the present invention will be described. In this embodiment, an example in which a color filter is performed by using the droplet discharge device 16 will be described, but the color filter manufacturing method of the present invention is not limited by the device structure used.

FIG. 5A schematically shows the planar structure of one embodiment of the color filter. In addition, FIG.
FIG. 5D shows a sectional structure taken along line VI-VI of FIG.

In the color filter 1 of this embodiment, a plurality of filter elements 3 are formed in a dot pattern, in the illustrated example, in a dot matrix shape on the surface of a rectangular substrate (base material) 2 formed of glass or plastic. Is forming. Further, in the color filter 1, as shown in FIG. 6D, the protective film 4 is laminated on the filter element 3. It should be noted that FIG. 5A shows the color filter 1 with the protective film 4 removed in a plan view.

The partition walls 6 formed in a grid pattern with a resin material having no translucency are formed on the surface of the substrate 2, and the rectangular area partitioned by the partition walls 6 is filled with a coloring material. The filter element 3 is formed. Further, each of these filter elements 3 is one of R (red), G (green), and B (blue).
The filter elements 3 of the respective colors are arranged in a predetermined array. As this array, for example, a stripe array shown in FIG. 7A (an array in which all columns of the matrix have the same color), a mosaic array shown in FIG. 7B (arbitrary three filters arranged in a vertical and horizontal linear shape) The element has three colors of R, G, B),
An example is a delta array shown in FIG. 7C (an array in which the filter elements 3 are arranged differently and three adjacent filter elements 3 are R, G, and B).
The "partition wall" in the present invention is used as a word including the meaning of "bank", and is not limited to a side surface having an angle substantially perpendicular to the substrate, but also includes a side surface having a certain inclination angle. , Refers to the convex portion when viewed from the substrate.

The size of the color filter 1 is, for example, about 4.57 cm (1.8 inches). Also, 1
The size of each filter element 3 is, for example, 30 μm.
m × 100 μm. The interval between the adjacent filter elements 3, that is, the element pitch is, for example, 75 μm.

When the color filter 1 of the present embodiment is used as an optical element for color display (full color display), a pixel is constructed by using R, G, B three filter elements 3 as one unit. R, G, in
Color display is performed by selectively transmitting light to any one of B or a combination thereof. At this time, the partition wall 6 formed of a non-translucent resin material can be configured to act as a black mask.

The above color filter 1 is shown in FIG.
A large area mother substrate 12 which is a substrate as shown in FIG.
Cut out from. Specifically, first, the mother substrate 12
A pattern for one color filter 1 is formed on the surface of each of the plurality of color filter forming areas (unit areas) 11 set therein. Then, grooves for division are formed around the color filter forming regions 11, and the mother substrate 12 is divided (broken) by a method such as applying stress along these grooves, so that FIG. The individual color filters 1 shown in are formed.

Next, a method of manufacturing the above-mentioned color filter 1 will be specifically described. FIG. 6 schematically shows the manufacturing method of the color filter 1 in the order of steps. First, the partition walls 6 are formed on the surface of the mother substrate 12 by a resin material having no light-transmitting property in a grid pattern as viewed from the direction of arrow B. The lattice hole portion 7 of the lattice pattern is a region where the filter element 3 is formed, that is, a filter element forming region. The plane dimensions of the individual filter element forming regions 7 defined by the partition walls 6 are, for example, about 30 μm × 100 μm when viewed in the direction of arrow B.

The partition wall 6 has a filter element forming region 7
Element material 1 as a liquid supplied to the
It also has the function of blocking the flow of 3 and the function of the black mask. Further, the partition wall 6 is an arbitrary patterning method,
For example, it is formed by a photolithography method, and if necessary, heated by a heater and fired.

After the formation of the partition wall 6, as shown in FIG. 6B, the droplets 8 of the filter element material 13 are supplied to the respective filter element forming areas 7 so that the respective filter element forming areas 7 are formed. Thirteen
Fill with. This is performed, for example, by ejecting droplets 8 of ink (filter element material 13) from the droplet ejection head 22 of the above-described droplet ejection device 16 and landing them in the filter element formation region 7. Figure 6
In (b), reference numeral 13R indicates a filter element material having a color of R (red), and reference numeral 13G indicates G.
A filter element material having a color of (green) is shown, and a reference numeral 13B shows a filter element material having a color of B (green).

When each filter element forming region 7 is filled with a predetermined amount of the filter element material 13, the mother substrate 12 is heated to about 70 ° C. by the heater to evaporate the solvent of the filter element material 13.
As a result of this evaporation, the volume of the filter element material 13 is reduced and flattened, as shown in FIG. 6 (c). When the volume is remarkably reduced, the supply of the droplets 8 of the filter element material 13 and the heating of the droplets 8 are repeatedly performed until the film thickness sufficient for the color filter 1 is obtained. By the above processing, finally the filter element material 13
Only the solid content remains to form a film, whereby the filter element 3 of each desired color is formed.

After the filter elements 3 are formed as described above, in order to completely dry each filter element 3, a heat treatment is performed at a predetermined temperature for a predetermined time. After that, the protective film 4 is formed by using an appropriate method such as a spin coating method, a roll coating method, a dipping method, or an inkjet method. The protective film 4 is formed to protect the filter element 3 and the like and to flatten the surface of the color filter 1.
In this embodiment, the resin of the partition wall 6 is made non-translucent and has a light shielding function (black matrix). However, instead of using the translucent resin as the resin of the partition wall 6. In addition, a light shielding layer made of a metal such as Cr having a size slightly larger than that of the resin may be formed under the resin.

In the present embodiment, as shown in FIG. 6B, the filter element material 13 is used as ink, and the droplet 8 of the ink is landed on each filter element forming region 7 by the droplet discharge device 16. Due to
The filter element 3 is formed. In this case, 3 for forming the filter element 3 of 3 colors
Seed filter element materials 13R, 13G, 13B
Are ejected while scanning the droplet ejection head 22 in the same scanning direction X with respect to the mother substrate 12 as a whole, as described above, the variation in the ejection amount between the nozzles 27 of the droplet ejection head 22 and the droplet ejection Stripe-like color unevenness may occur in the scanning direction X due to changes in the ink ejection amount of the nozzles 27 of the head 22 over time.

Therefore, in the present embodiment, one of the three color filter element materials 13R, 13G, and 13B is used as the droplet discharge head 22 in a scanning direction different from that of the other color materials. The ejection is performed while scanning. For example, as shown in FIG. 22A, two color materials (for example, 13R and 13R) among the above three color materials are used.
G) is ejected in a state where the scanning direction X of the droplet ejection head 22 is aligned with the longitudinal direction L of the mother substrate 12, and as shown in FIG. 22B, the remaining one-color material (for example, 1
3B) is ejected in a state in which the scanning direction X of the droplet ejection head 22 is orthogonal to the longitudinal direction L of the mother substrate 12 (that is, the feeding direction Y coincides with the longitudinal direction L of the mother substrate 12). On the contrary, as shown in FIG. 23A, two color materials (for example, 13R) of the above three color materials are used.
And 13G) in a state in which the scanning direction X of the droplet discharge head 22 is orthogonal to the longitudinal direction L of the mother substrate 12 (that is, the feeding direction Y matches the longitudinal direction L of the mother substrate 12). As shown in FIG. 23B, the remaining one-color material (for example, 13B) is used for the droplet discharge head 2
The ejection may be performed in a state where the scanning direction X of 2 coincides with the longitudinal direction L of the mother substrate 12.

With the above arrangement, the scanning direction when discharging one of the three color filter element materials 13R, 13G, and 13B and the scanning direction when discharging the remaining materials are the mother substrate 12. Since they are different from each other (orthogonal to each other), striped color unevenness due to one material and striped color unevenness due to the remaining material are generated in different directions, and thus the color filter 1 as a whole. It is possible to make the unevenness of color less noticeable and to substantially reduce the unevenness.

FIGS. 1 to 4 are explanatory views showing the procedure for ejecting the above filter element materials 13R, 13G, 13B from the nozzles 27 of the droplet ejection head 22 onto the mother substrate 12. In addition, FIG. 24 is a schematic configuration diagram schematically showing a device configuration of a manufacturing apparatus when the processing is performed in the above procedure.

(Processing Mode 1) As shown in FIG. 24, a manufacturing apparatus for forming a color filter includes a first step portion 16R including a droplet discharge device 16 which is substantially the same as that described above. It has a second step portion 16G and a third step portion 16B. However, the substrate accommodation portion 57 is arranged only in the first step portion 16R, and is not arranged in the second step portion 16G and the third step portion. Further, between the first step portion 16R and the second step portion 16G, between the second step portion 16G and the third step portion 16B, and at the rear stage of the third step portion 16B, the liquid of each base stage is respectively provided. A temporary drying device 96 having a hot plate for temporarily drying the ink (filter element material) ejected and attached on the mother substrate 12 in the droplet ejection device is arranged. Further, the substrate transfer mechanism 58 for supplying the mother substrate 12 to each step portion, and the substrate transfer mechanism 95 for taking out the mother substrate 12 from the droplet discharge device at the previous stage and transferring it to the temporary drying device 96 immediately after that. And are provided for each stage. Further, the mother substrate is taken out from the temporary drying device 96 provided in the subsequent stage of the third stage portion 16B, and the substrate accommodation portion 9
A substrate ejecting mechanism 97 for transferring to 8 is also provided.

In this manufacturing apparatus, the first step portion 16R
In FIG. 11, the R (red) filter element material 13R is discharged onto the mother substrate 12, and then the filter element material 13R is temporarily dried by the temporary drying device 96. After that, in the second step portion 16G, the G (green) filter element material 13G is discharged onto the mother substrate 12 and is also temporarily dried by the temporary drying device 96. Furthermore, the third step portion 1
6B B (blue) filter element material 13B
Are discharged onto the mother substrate 12 and temporarily dried by the temporary drying device 96. Then, after the filter elements 3R, 3G, 3B are finally formed for all the colors of R, G, B, they are stored in the substrate housing portion 98.

(Details of Processing Mode 1) FIG. 1 shows each step 1 applied to the mother substrate 12 by the above-mentioned manufacturing apparatus.
Specific examples of processing modes in 6R, 16G, and 16B will be shown. Note that in FIG. 1, for convenience of illustration, the position of the droplet discharge head 22 when moving in the feed direction is shown shifted in the scanning direction, and these are not necessarily the same as the scanning start position in each scan. Does not mean that.

In each color filter forming area (unit area) 11 of the mother substrate 12, filter element forming areas 7 are arranged in a dot matrix. The longitudinal direction L and the short side direction M of the mother substrate 12 are set as shown. Then, the filter element material 13
One or two colors of R, 13G and 13B (eg 13
R, or 13R and 13G), the material is continuously used as ink while scanning the droplet discharge head 22 along the longitudinal direction L from the outer position (initial position) at one end (left end in the drawing) of the mother substrate 12. The filter element forming region 7 in which the droplets are discharged and the droplets are arranged along the longitudinal direction L.
To land on. When the droplet discharge head 22 reaches the other end (the right end side in the drawing) of the mother substrate 12, which is not shown, the droplet discharge head 22 moves in the short side direction M of the mother substrate 12 by a predetermined feed movement amount, and again at one end of the mother substrate 12. Move to the outer position. Then, the droplet discharge head 22 is again moved in the longitudinal direction L.
The liquid droplets are ejected while being scanned along.

In this case, the filter element material 13
Regarding the material of two colors or one color (for example, 13G and 13B, or 13B) of the three colors of R, 13G, and 13B, contrary to the above, the initial position of the droplet discharge head 22 is set to the mother substrate 12. The droplet is ejected onto the mother substrate 12 while being positioned outside one end in the short side direction M and scanning the droplet discharge head 22 from the position in the short side direction M.
In this case, after the scanning of the droplet discharge head 22 is completed, the droplet discharge head 22 is moved in the longitudinal direction L by a predetermined feed movement amount, and then in the direction opposite to the scanning direction along the short side direction M. Then, the operation of returning to the outer position of one end of the mother substrate 12 in the short side direction M is repeated.
As a result, the three color filter element materials 13R,
At least one of 13G and 13B is ejected in a head scanning direction different from (orthogonal to) the material of the other color.

(Modification of Details of Processing Mode 1) FIG.
The other example of the processing mode 1 in each step part 16R, 16G, 16B of the mode different from the above is shown. Also in this case, as in the above, the filter element material 1
The material of one or two colors out of the three colors of 3R, 13G, and 13B is processed in such a manner that the scanning direction of the droplet discharge head 22 coincides with the longitudinal direction L, and the materials of the remaining colors are The processing is performed in such a manner that the scanning direction of the droplet discharge head 22 matches the short side direction M.

In this case, the method different from the method shown in FIG.
The scanning along the longitudinal direction L or the short side direction M of the droplet discharge head 22 from the position outside the one end of the mother substrate 12 to the other end is completed, and the feeding operation is performed at the position outside the other end of the mother substrate 12. After that, the droplet discharge head 22 is scanned with the scanning direction (longitudinal direction L or short side direction M) opposite to the previous direction from the outer position of the other end of the mother substrate 12 as it is,
That is, droplets are to be ejected. By repeating such an operation, the droplet discharge head 22
Scans the mother substrate 12 alternately in opposite directions, so that the returning operation of the droplet discharge head 22 is unnecessary, and the processing can be performed more efficiently.

In the details of the processing modes shown in FIGS. 1 and 2, the formation pitch of the filter element forming regions (unit regions) 11 on the mother substrate 12 is generally different between the longitudinal direction L and the short side direction M. Can happen. In such a case, as shown in FIGS. 1 and 2, in the case of performing scanning in the longitudinal direction L and the case of performing scanning in the short side direction M using the same droplet discharge head 22, as shown in FIGS. The angles φ1 and φ2 between the reference direction S of the droplet discharge head 22 and the scanning direction X (which coincides with the longitudinal direction L or the short side direction M in the illustrated example) may be mutually changed.

(Another Modification of Details of Processing Mode 1) FIG.
FIG. 6 is an explanatory diagram showing a scanning mode of the droplet discharge head 22 different from the above. Note that, in FIG. 3, for convenience of illustration, the droplet discharge head 22 when moving in the feed direction.
Are shown shifted in the scanning direction, and these do not necessarily mean that the scanning start position in each scanning is different. In this example, N (4 in the illustrated example) droplets 8 of ink (filter element material) ejected from the droplet ejection head 22 land on one filter element forming region 7 to form a filter element. The amount of the droplets 8 ejected from the droplet ejection head 22 and the volume of the filter element 3 are set in advance so that the droplets 3 can be formed.

In this case, when the scanning direction X of the droplet discharge head 22 is the short side direction M, the feed performed during each scan with respect to the width Wl of the nozzle row 28 of the droplet discharge head 22. Movement amount of movement ΔSl = Wl / N (W in the illustrated example
1/4). Further, when the scanning direction X of the droplet discharge head 22 is the long side direction L, with respect to the width Wm of the nozzle row 28 of the droplet discharge head 22, the feed movement amount ΔSm of the feeding operation performed during each scan. = Wm / N (Wm / N in the illustrated example
4). As a result, the amount of the filter element material discharged into the filter element forming region 7 by each scan is 1 / N (1/4 in the illustrated example) of the total amount, but N times for each filter element forming region 7 (see FIG. Since the droplets 8 are ejected 4 times each in the illustrated example), the entire amount of filter element material is filled in each filter element forming region 7.

In this example, similarly to the example shown in FIG. 2, the droplets 8 are reciprocally scanned with respect to the mother substrate 12 and the droplets 8 are ejected even when they are scanned in opposite directions.
May be discharged.

(Processing Mode 2) In the processing mode 1, as shown in FIG. 24, a plurality of stages of the droplet discharge devices 16R, 16G and 16B corresponding to the plurality of kinds of filter element materials 13R, 13G and 13B are provided. At least one stage of the droplet discharge head (inkjet head) 2 by installing and changing the supply posture of the mother substrate 12, for example.
The scanning direction of No. 2 is different from that of the other stages.
However, the present invention is not limited to such a method, and for example, a single droplet discharge device may sequentially discharge a plurality of types of filter element materials. That is, in the same droplet discharge device, the mother substrate 1
The relative directional relationship between 2 and the scanning direction of the droplet discharge head is changed. In this case, there is a method of changing the relative directional relationship by changing the scanning direction of the droplet discharge head on the way. In this case, for example, the droplet discharge head (inkjet head) 22 may be configured to scan not only in the scanning direction X shown in FIG. On the other hand, there is also a method of changing the relative directional relationship by changing the plane posture of the mother substrate 12 on the way. In the present invention, either method may be used, but the latter method will be specifically described below with reference to FIG.

FIG. 25 shows a state in which the mother substrate 12 is placed on the table 49 in the droplet discharge device 16 shown in FIGS. 8 and 9. In the case of this embodiment, a state in which the longitudinal direction L of the mother substrate 12 is aligned with the scanning direction X (states shown in FIGS. 25A and 25B),
The state in which the short side direction M of the mother substrate 12 matches the scanning direction X (the state shown in FIG. 25C) can be switched by rotating the table 49. As a result, it becomes possible to rotate the scanning direction X of the droplet discharge head 22 relative to the mother substrate 12 by 90 degrees.

For example, first, the substrate supply device 2 shown in FIG.
The mother substrate 12 is supplied onto the table 49 according to 3. At this time, as shown in FIG.
The mother substrate 12 is supplied so that the longitudinal direction L of the mother substrate 12 held on the substrate 9 coincides with the scanning direction X of the droplet discharge head 22 of the droplet discharge device 16. Then, as it is, the droplets of the filter element material 13R are ejected from the nozzles 27 while scanning the droplet ejection head 22 in the scanning direction X. Then, by repeating the scanning operation and the feeding operation in the same manner as described above, the material is filled in all the required filter element forming regions 7, and the filter element 3R is formed in each of them.

Then, in the same manner as described above, FIG.
As shown in, the filter element material 13G is discharged from the droplet discharge head 22 in the same state. At this time, by repeating the scanning operation and the feeding operation in the same manner as described above, the material is filled in all the required filter element forming regions 7, and the filter element 3G is formed in each of them.

Thereafter, as shown in FIG. 25C, the table 49 is rotated 90 degrees. As a result, the mother substrate 12 on the table 49 is held in a plane posture in which the short side direction M thereof matches the scanning direction X of the droplet discharge head 22. Then, in this state, the filter element material 13B is ejected from the droplet ejection head 22 in the same manner as above, and the scanning operation and the feeding operation are repeated in the same manner as above, whereby all the required filter element forming regions 7 are formed.
Is filled with material, and the filter element 3B is formed in each.

At this time, when a droplet discharge head capable of discharging a single filter element material such as the droplet discharge head 22 is used, the above three kinds of filter element materials 13R, 13G and 13B are used. It is possible to prepare three inkjet heads capable of ejecting each of the above, and to sequentially perform the three-step treatments 25 (a) to 25 (c). Further, in the droplet discharge head 22B shown in FIG. 16, three ink supply devices 37R, 37G,
37B to filter element materials 13R, 13G, 1
3B is supplied, and these three kinds of materials are discharged from the nozzles 27 belonging to the three nozzle rows 28R, 28G, and 28B. Therefore, in the case of this droplet discharge head 22B, it becomes possible to carry out the above-mentioned three-step processing even with only one.

For details regarding this processing mode 2, each method described in the above processing mode 1 with reference to FIGS. 1 to 3 can be similarly applied.

(Processing Mode 3) In the method described with reference to FIG. 3 above, a method of ejecting a plurality of droplets into one filter element forming region 7 has been described. In this case, the above filter element is used. Material 13R, 13G,
The mother substrate 12 for ejecting some of the plurality of droplets ejected to one filter element forming region 7 when ejecting at least one of 13B.
It is also possible to change the scanning direction with respect to and the scanning direction with respect to the mother substrate 12 when ejecting the remaining droplets. By doing so, in addition to the effect of reducing the variation in the ink amount by filling a plurality of droplets in one filter element forming region 7, it is possible to reduce the color unevenness caused by the scanning direction. become.

FIG. 26 shows an example of steps in the case where a plurality of droplets composed of the same material are discharged into one filter element forming region 7 as described above. For example, as shown in FIG. 26A, N (four in the illustrated example) droplets 8 ejected onto the filter element forming region 7 are formed.
For some (two in the illustrated example) of the liquid droplets, the inkjet head is scanned with the plane posture of the mother substrate 12 held so that the longitudinal direction L of the mother substrate 12 coincides with the scanning direction X. While being discharged. On the other hand, FIG.
As shown in FIG. 6B, for the remaining liquid droplets (two in the illustrated example), the planar orientation of the mother substrate 12 is maintained so that the short side direction M of the mother substrate 12 matches the scanning direction X. In this state, the ink is ejected while scanning the inkjet head.

In this way, some of the liquid droplets 8 contained in each filter element forming region 7 are ejected while the head scanning is performed in a different scanning direction with respect to the rest, so that the droplets 8 are discharged in the scanning direction. The resulting variation in material is further reduced, and the striped color unevenness of the filter element 3 formed therein is also reduced.

(Details of Processing Mode 3) Details of the method more specific than Processing Mode 3 will be described with reference to FIG. Note that, in FIG. 4, for convenience of illustration, the position of the droplet discharge head 22 when moving in the feed direction is shown shifted in the scanning direction, and these are not necessarily the same as the scanning start position in each scan. Does not mean that. In this example, in the processing stage shown in FIG. 26A, with respect to the width component Wm of the droplet discharge head 22 in the short side direction M, the feed movement amount ΔSm = Wm / I (Wm / I in the illustrated example.
2), the droplet 8 is ejected by repeating the same scanning operation in the scanning direction X (= longitudinal direction L) and the feeding operation in the feeding direction Y (= short side direction M). In addition, FIG.
In the processing stage shown in (b), the droplet discharge head 22
With respect to the width component Wl in the longitudinal direction L in FIG. 1, the feed movement amount ΔSl = Wl / K (Wl / 2 in the illustrated example), and the same scanning operation in the scanning direction X (= short side direction M) as described above, The droplet 8 is ejected by repeating the feeding operation in the feeding direction Y (= longitudinal direction L). Here, the number of droplets 8 to be ejected to one filter element forming region 7 is N (4 in the illustrated example), and N = I + K.

In the color filter manufacturing method described above, among the plurality of hues forming the color filter, only the hue in which the stripe-shaped color unevenness caused by the scanning direction is most noticeable is different from the other hues. It is preferable to form while scanning. As a result, it is possible to reduce the striped color unevenness that is recognized as a whole by mixing with the color unevenness of other hues. For example, in the case of the above three colors of R, G, and B, the striped color unevenness caused by the scanning direction appears most strongly in the B (blue) filter element 3B, so that when the B filter element 3B is formed. The scanning direction of the droplet discharge head may be set to a direction different from the scanning direction of the droplet discharge head when the other R (red) and G (green) filter elements 3R and 3G are formed (orthogonal direction). desirable.

The above processing modes are not limited to the manufacture of color filters, but can be used in the manufacture of EL devices described later. Furthermore, various film forming methods and film forming devices described below can be used. It can also be adopted as a configuration. Further, in each of the above processing modes, the droplet discharge head 22 is repeatedly scanned while being fed by the discharge width, but the discharge amount between the plurality of nozzles provided in the droplet discharge head 22 is In order to reduce film formation unevenness due to variations, an error dispersion method may be employed in which the droplet discharge head 22 is fed at intervals smaller than the discharge width and repeatedly scanned. In this case, film formation unevenness can be further reduced.

[Display Device (Electro-Optical Device) with Color Filter and Manufacturing Method Thereof] FIG. 17 shows an example of a manufacturing method of the display device (electro-optical device) according to the present invention.
1 shows an embodiment of a method for manufacturing a liquid crystal device. Further, FIG. 18 shows an embodiment of a liquid crystal device as an example of a display device (electro-optical device) manufactured by the manufacturing method. Further, FIG. 19 shows a cross-sectional structure of the liquid crystal device taken along line IX-IX of FIG. First, the structure of an example of the liquid crystal device will be described with reference to FIGS. 18 and 19. An example of this liquid crystal device is a transflective liquid crystal device that performs full-color display by a simple matrix system.

As shown in FIG. 18, the liquid crystal device 101 is
A liquid crystal driving IC 103a and a liquid crystal driving IC 103b configured as semiconductor chips or the like are mounted on the liquid crystal panel 102, and an FPC (flexible printed circuit) 104 as a wiring connection element is connected to the liquid crystal panel 102. The liquid crystal device 101 is configured by providing a lighting device 106 as a backlight on the back surface side of the liquid crystal panel 102.

The liquid crystal panel 102 is formed by bonding the first substrate 107a and the second substrate 107b with the sealing material 108. The sealing material 108 is made of epoxy resin by screen printing or the like.
It is formed by being attached in an annular shape (circular shape) to the inner surface of the substrate 107a or the second substrate 107b. Also,
As shown in FIG. 19, a conductive material 109 formed of a conductive material in a spherical or cylindrical shape is contained in the seal material 108 in a dispersed state.

As shown in FIG. 19, the first substrate 107a has a plate-shaped base material 111a made of transparent glass, transparent plastic, or the like. A reflective film 112 is formed on the inner surface (upper surface in FIG. 19) of the base material 111a. In addition, an insulating film 113 is laminated on it,
A first electrode 114a is formed thereon in a stripe shape (see FIG. 18) when viewed in the direction of arrow D. Further, an alignment film 116a is formed on it. Also, the base material 111a
A polarizing plate 117a is attached to the outer surface (lower surface of FIG. 19) of the device by sticking or the like.

In FIG. 18, in order to make the arrangement of the first electrodes 114a easy to understand, the intervals between them are drawn much wider than they actually are. Therefore, a larger number of first electrodes 114a are actually formed on the base material 111 than the number of the first electrodes 114a illustrated in the drawing.

As shown in FIG. 19, the second substrate 107b has a plate-shaped base material 111b made of transparent glass or transparent plastic. The color filter 11 is formed on the inner surface (lower surface in FIG. 19) of the base material 111b.
8 is formed, and the second electrode 114 is formed thereon in a stripe shape (see FIG. 18) in the direction orthogonal to the first electrode 114a when viewed from the arrow D. Further, an alignment film 116b is formed on it. A polarizing plate 117b is attached to the outer surface (upper surface in FIG. 19) of the base material 111b by sticking or the like.

In FIG. 18, in order to make it easier to understand the arrangement of the second electrodes 114b, the spacing between them is drawn much wider than it actually is, as in the case of the first electrodes. Therefore, a larger number of first electrodes 114a are actually formed on the base material 111 than the number of the first electrodes 114a illustrated in the drawing.

As shown in FIG. 19, the first substrate 107a,
A liquid crystal L, for example ST, is provided in a so-called cell gap surrounded by the second substrate 107b and the sealing material 108.
N (super twisted nematic) liquid crystal is enclosed. A large number of minute and spherical spacers 119 are dispersed on the inner surface of the first substrate 107a or the second substrate 107b, and the presence of these spacers 119 in the cell gap ensures that the cell gap is uniformly maintained. Has become.

The first electrode 114a and the second electrode 114b are arranged so as to extend in directions orthogonal to each other. The portions where they intersect in a plane are arranged in a dot matrix when viewed in the direction of arrow D in FIG. And
Each intersection in the dot matrix form one display dot. Color filter 118 is R (red) / G
It is configured by arranging each color element (filter element) of (green) and B (blue) in a predetermined pattern when viewed from the direction of the arrow D, for example, a pattern such as a stripe arrangement, a delta arrangement, or a mosaic arrangement. The above-mentioned one display dot corresponds to each one of R, G, and B. Then, one pixel is composed of display dots of three colors of R, G, and B.

By selectively turning on the display dots arranged in a matrix, images such as letters and numbers are displayed on the outside of the second substrate 107b of the liquid crystal panel 102. The area in which the image is displayed in this way is the effective display area, and is indicated by an arrow V in FIGS. 18 and 19.

As shown in FIG. 19, the reflection film 112 is made of AP.
It is formed of a light-reflecting material such as C alloy or aluminum. In addition, openings 121 are formed in the reflective film 112 at positions corresponding to the respective display dots, which are the intersections of the first electrodes 114a and the second electrodes 114b. Therefore, the openings 121 are arranged in a matrix like the display dots when viewed from the arrow D in FIG.

First electrode 114a and second electrode 114b
Is formed of, for example, ITO (indium tin oxide) which is a transparent conductive material. In addition, the alignment films 116a,
116b is formed by attaching a polyimide resin in a film shape having a uniform thickness. These alignment films 11
By subjecting 6a and 116b to a rubbing treatment, the initial alignment of liquid crystal molecules on the surfaces of the first substrate 107a and the second substrate 107b is determined.

As shown in FIG. 18, the first substrate 107a is formed in a larger area than the second substrate 107b, and when these substrates are attached by the sealant 108, the first substrate 107a becomes the second substrate. It has a substrate projecting portion 107c projecting to the outside of 107b. Then, in the substrate overhanging portion 107c, the second electrode on the second substrate 107b is interposed via the lead wiring 114c extending from the first electrode 114a and the conductive material 109 (see FIG. 19) existing inside the sealing material 108. A lead wire 114d electrically connected to 114b, an input bump of the liquid crystal drive IC 103a, that is, a metal wire 114e connected to an input terminal, and a liquid crystal drive I.
Metal wiring 114 connected to the input bump of C103b
Various wirings such as f are formed in a predetermined pattern.

At this time, the lead-out wiring 114c extending from the first electrode 114a and the lead-out wiring 114d which conducts electricity to the second electrode 114b are made of the same material as those of the electrodes IT.
Formed by O. Further, the liquid crystal driving IC 103
a, the metal wiring 114e which is the wiring on the input side of 103b,
114f is a metal material having a low electric resistance value, such as APC
Formed by alloy. This APC alloy mainly contains Ag, and an alloy obtained by adding Pd and Cu thereto, for example, Ag; 98 wt%, Pd; 1 wt%, Cu; 1 wt.
% Alloy.

The liquid crystal driving ICs 103a and 103b are
The CF (anisotropic conductive film) 122 is used to extend the substrate 107.
It is mounted by being adhered to the surface of c. That is, in this embodiment, a so-called COG (chip on glass) type liquid crystal panel is formed in which a semiconductor chip is directly mounted on a substrate. In this COG type mounting structure, conductive particles contained inside the ACF 122 conductively connect the input side bumps of the liquid crystal driving ICs 103a and 103b to the metal wirings 114e and 114f.
The bumps on the output side of the liquid crystal driving ICs 103a and 103b are electrically connected to the lead wirings 114c and 114d.

In FIG. 18, the FPC 104 has a flexible resin film 123, a circuit 126 including a chip part 124, and a metal wiring terminal 127. The circuit 126 is directly mounted on the surface of the resin film 123 by soldering or other conductive connection method. The metal wiring terminal 127 is formed of an APC alloy, Cr, Cu or other conductive material. The portion of the FPC 104 where the metal wiring terminal 127 is formed is the first substrate 10
ACF 122 is connected to a portion of 7a where metal wirings 114e and 114f are formed. And ACF
Due to the conductive particles contained inside 122, the metal wirings 114e and 114f on the substrate side and the metal wiring terminal 12 on the FPC side are formed.
7 becomes conductive.

External connection terminals 131 are formed on the opposite side edges of the FPC 104, and the external connection terminals 131 are connected to an external circuit (not shown). Then, based on the signal transmitted from the external circuit, the liquid crystal driving IC 103
a and 103b are driven, and the scanning signal is supplied to one of the first electrode 114a and the second electrode 114b, and the data signal is supplied to the other. As a result, the display dots arranged in the effective display area V are individually voltage-controlled, and as a result,
The alignment of the liquid crystal L is individually controlled.

As shown in FIG. 19, the illumination device 106 shown in FIG. 18 includes a light guide body 132 made of acrylic resin and a diffusion sheet 133 provided on a light emitting surface 132b of the light guide body 132. It has a reflection sheet 134 provided on the opposite side of the light emitting surface 132b of the light guide body 132, and an LED (light emitting diode) 136 as a light emitting source.

The LED 136 is supported by the LED substrate 137, and the LED substrate 137 is mounted on, for example, a supporting portion (not shown) formed integrally with the light guide body 132. LE
By mounting the D substrate 137 at a predetermined position on the support portion, the LED 136 is placed at a position facing the light receiving surface 132a, which is the side end surface of the light guide body 132. Note that reference numeral 138 indicates a cushioning member for cushioning an impact applied to the liquid crystal panel 102.

When the LED 136 emits light, the light is taken in from the light receiving surface 132a and guided into the inside of the light guide body 132, and while being propagated while being reflected by the reflection sheet 134 and the wall surface of the light guide body 132, the light emission surface. It is emitted from the surface 132b through the diffusion sheet 133 to the outside as plane light.

The liquid crystal device 101 described above is
If the outside light such as room light is sufficiently bright,
In the liquid crystal panel 1, external light is emitted from the second substrate 107b side.
The light is taken into the inside of the liquid crystal display device 02, passes through the liquid crystal L, is reflected by the reflective film 112, and is supplied to the liquid crystal L again. The orientation of the liquid crystal L is controlled for each of the R, G, and B display dots by the electrodes 114a and 114b that sandwich the liquid crystal L. Therefore, the light supplied to the liquid crystal L is modulated for each display dot, and an image such as letters and numbers is displayed on the outside of the liquid crystal panel 102 by the light that passes through the polarizing plate 117b and the light that cannot pass through the modulation and is reflected. The type is displayed.

On the other hand, when the amount of external light is not sufficiently obtained, the LED 136 emits light and plane light is emitted from the light emitting surface 132b of the light guide 132, and the light is reflected.
It is supplied to the liquid crystal L through the opening 121 formed in 2. At this time, similarly to the reflective display, the supplied light is modulated for each display dot by the liquid crystal L whose alignment is controlled. As a result, an image is displayed to the outside and a transmissive display is performed.

The liquid crystal device 101 having the above structure is manufactured, for example, by the manufacturing method shown in FIG. In this manufacturing method, the series of steps P1 to P6 includes the first substrate 1
07a is a step of forming, and the steps P11 to P14
Is a process of forming the second substrate 107b. Usually, the first substrate forming step and the second substrate forming step are independently performed.

First, in the first substrate forming step, a plurality of reflective films 112 of the liquid crystal panel 102 are formed on the surface of a large-sized mother original substrate made of transparent glass, transparent plastic or the like by photolithography. And the like. Further, the insulating film 113 is formed thereon by a known film forming method (process P1). Next, the first electrode 114a and the lead wiring 114 are formed by using a photolithography method or the like.
c, 114d and metal wirings 114e, 114f are formed (process P2).

Thereafter, the alignment film 116a is formed on the first electrode 114a by coating, printing or the like (step P3),
Further, rubbing treatment is applied to the alignment film 116a to determine the initial alignment of the liquid crystal (process P4). Next, the sealing material 108 is formed, for example, by screen printing.
Are formed in an annular shape (step P5), and spherical spacers 119 are dispersed thereon (step P6). By doing so, a large-area mother substrate having a plurality of panel patterns on the first substrate 107a of the liquid crystal panel 102 is formed. One substrate is formed.

In addition to the above first substrate forming step, the second substrate forming step (step P11 to step P14 in FIG. 17) is performed. First, a large-area mother original substrate made of translucent glass, translucent plastic, or the like is prepared, and the surface thereof has a plurality of color filters 1 for the liquid crystal panel 102.
18 is formed (process P11). This color filter 1
The forming process of 18 is performed by using the manufacturing method shown in FIG. 6, and the formation of the R, G, and B color filter elements in the manufacturing method is performed by using the droplet discharge device 16 of FIG. This is executed according to the control method of the droplet discharge head 22 shown in FIG. Since the manufacturing method of these color filters and the control method of the droplet discharge head 22 are the same as those already described, the description thereof will be omitted.

As shown in FIG. 6D, when the color filter 1 or the color filter 118 is formed on the mother substrate 12 or the mother raw material base material, the second electrode 114b is then formed by the photolithography method. (Process P12). Further, the alignment film 116b is formed by coating, printing or the like (process P13). Next, the alignment film 116b is subjected to rubbing treatment to determine the initial alignment of the liquid crystal (process P14). As described above, a large-area mother second substrate having a plurality of panel patterns on the second substrate 107b of the liquid crystal panel 102 is formed.

After the large-area mother first substrate and mother second substrate are formed as described above, these mother substrates are aligned with each other with the sealing material 108 sandwiched therebetween, that is, aligned, and then bonded to each other (step P2
1). As a result, an empty panel structure including a plurality of liquid crystal panel panels and in which liquid crystal is not yet filled is formed.

Next, a scribe groove, that is, a dividing groove is formed at a predetermined position of the completed empty panel structure, and stress or heat is applied to the panel structure with the scribe groove as a reference, or light is irradiated. The substrate is divided by breaking (breaking) by a method such as
22). Thereby, the sealing material 10 of each liquid crystal panel portion
A so-called strip-shaped empty panel structure in which the liquid crystal injection opening 110 (see FIG. 18) 8 is exposed to the outside is formed.

Then, the liquid crystal L is injected into each liquid crystal panel portion through the exposed liquid crystal injection opening 110, and each liquid crystal injection opening 110 is sealed with resin or the like (process P23). A normal liquid crystal injection process is performed by depressurizing the inside of the liquid crystal panel portion and injecting liquid crystal by the difference in internal and external pressures. For example, a liquid crystal is stored in a storage container, the storage container storing the liquid crystal and a strip-shaped empty panel are placed in a chamber, etc., and the chamber is evacuated before the liquid crystal is stored inside the chamber. Immerse a strip of empty panel in. Then, when the chamber is opened to the atmospheric pressure, the liquid crystal pressurized by the atmospheric pressure is introduced into the panel through the liquid crystal injection opening because the inside of the empty panel is in a vacuum state. After that, since the liquid crystal is attached around the liquid crystal panel structure after the liquid crystal is injected, the strip-shaped panel after the liquid crystal injection is subjected to the cleaning process in step P24.

After that, the scribe groove is formed again at a predetermined position on the strip-shaped panel after the liquid crystal injection and cleaning are completed. Further, the strip-shaped panel is divided based on the scribe groove. As a result, the plurality of liquid crystal panels 102 are individually cut out (process P25). As shown in FIG. 18, liquid crystal driving ICs 103a and 103b are provided for the individual liquid crystal panels 102 thus manufactured.
Is mounted, the lighting device 106 is mounted as a backlight, and the FPC 104 is further connected to complete the target liquid crystal device 101 (process P26).

The liquid crystal device and the manufacturing method thereof described above are implemented by any one of the plurality of methods described in the color filter and the manufacturing method thereof, particularly in the step of manufacturing the color filter. Therefore, FIG.
Similar to the color filter 1 shown in FIG. 19A, when the color filter 118 shown in FIG. 19 is manufactured, a plurality of (two in the embodiment) directions in which the scanning directions of the droplets of the filter element material are different from each other. Processing is carried out so that the individual filter elements are formed. Therefore, similarly to the above, the striped color unevenness due to the scanning direction is reduced, so that the display quality of the liquid crystal device is improved.

Further, when the color filter is manufactured by the method shown in FIGS. 3 and 4, the individual filter elements 3 are not formed by one scan of the droplet discharge head 22. The ink is ejected repeatedly N times (for example, 4 times) by a plurality of scans to form a predetermined film thickness. Therefore, even if there is a variation in the ink ejection amount among the plurality of nozzles 27, it is possible to prevent variation in the film thickness between the plurality of filter elements 3 and further reduce the above-described striped color unevenness. Therefore, the light transmission characteristics of the color filter can be made uniform in the plane.

Further, in the liquid crystal device and the manufacturing method thereof according to this embodiment, the filter element 3 is formed by ejecting ink using the droplet ejection head 22 by using the droplet ejection device 16 shown in FIG. Therefore, it is not necessary to go through complicated steps such as the method using the photolithography method, and the material is not wasted.

In the above embodiments, a liquid crystal device having a liquid crystal panel as a display device has been described. However, as a display device having a color filter similar to the above, an electro-optical device other than the liquid crystal device, for example, It is also possible to apply to an EL element, a plasma display panel or the like provided with a color filter. That is, for example, E
In the case of the L element, the same effect as that of the above-described embodiment can be obtained by planarly overlapping the color filters having the filter elements corresponding to the plurality of display dots having the EL emission function.

[Display Device (Electro-Optical Device) Using EL Element and Manufacturing Method Thereof] FIG. 20 shows a display device (electro-optical device) according to the present invention and E as an example of the manufacturing method thereof.
1 shows an embodiment of an L device and a manufacturing method thereof. Further, FIG. 21 shows the main steps of the manufacturing method and the main cross-sectional structure of the EL device finally obtained. Figure 21
As shown in (d), the EL device 201 includes a transparent substrate 20.
4, the pixel electrodes 202 are formed, and the banks 205 are formed between the respective pixel electrodes 202 in a grid shape when viewed in the direction of arrow G.
The hole injection layer 220 is formed in the lattice-shaped recesses, and the R-color light emitting layer 203R, the G-color light emitting layer 203G, and the B-color light emitting layer 203R have a predetermined arrangement such as a stripe arrangement when viewed from the arrow G direction. A layer 203B is formed in each lattice depression. Further, the EL device 201 is formed by forming the counter electrode 213 on them.

When the pixel electrode 202 is driven by a two-terminal type active element such as a TFD (thin film diode) element, the counter electrode 213 is formed in a stripe shape when viewed from the arrow G direction. When the pixel electrode 202 is driven by a three-terminal active element such as a TFT (thin film transistor), the counter electrode 213 is formed as a single surface electrode.

The area sandwiched between each pixel electrode 202 and each counter electrode 213 becomes one display dot, and R,
The G and B three-color display dots form one unit to form one pixel. By controlling the current flowing through each display dot, a desired one of the plurality of display dots is selectively caused to emit light, whereby a desired full-color image can be displayed in the arrow H direction.

The EL device 201 is manufactured, for example, by the manufacturing method shown in FIG. That is, the process P5
1 and FIG. 21A, active elements such as TFD elements and TFT elements are formed on the surface of the transparent substrate 204,
Further, the pixel electrode 202 is formed. As a forming method,
For example, a photolithography method, a vacuum deposition method, a sputtering method, a pyrosol method or the like can be used. As a material of the pixel electrode 202, ITO, tin oxide, a composite oxide of indium oxide and zinc oxide, or the like can be used.

Next, as shown in process P52 and FIG. 21A, partition walls or banks 205 are formed by using a well-known patterning method, for example, a photolithography method, and the transparent pixel electrodes 202 are formed by the banks 205.
Fill in the gaps. As a result, it is possible to improve the contrast, prevent color mixture of the light emitting material, and prevent light leakage between pixels. The material of the bank 205 is not particularly limited as long as it has durability against the solvent of the EL light emitting material, but it can be converted to tetrafluoroethylene by fluorocarbon gas plasma treatment, for example, acrylic resin, epoxy resin. Organic materials such as photosensitive polyimide are preferred.

Immediately before the application of the hole injection layer ink as the functional liquid material, the transparent substrate 204 is subjected to continuous plasma treatment with oxygen gas and fluorocarbon gas plasma (process P53). As a result, the polyimide surface is rendered water repellent and the ITO surface is rendered hydrophilic, and the wettability on the substrate side for fine patterning of droplets can be controlled. As an apparatus for generating plasma, an apparatus for generating plasma in vacuum or an apparatus for generating plasma in the atmosphere can be used as well.

Next, as shown in step P54 and FIG. 21A, the hole injection layer ink is applied to the droplet discharge device 1 of FIG.
6 droplet ejection heads 22 eject each pixel electrode 202.
Patterning is applied on the top surface. As a specific method of controlling the droplet discharge head 22, any one of the methods shown in FIGS. 1, 2, 3, and 4 is used. After that application,
The solvent is removed under vacuum (1 torr) at room temperature for 20 minutes (step P55). After this, in the atmosphere, 20 ℃
(On the hot plate), a heat treatment for 10 minutes forms the hole injection layer 220 that is incompatible with the light emitting layer ink (process P56). Under the above conditions, the film thickness was 40 nm.

Next, as shown in step P57 and FIG. 21B, EL light emission, which is a functional liquid material, is applied onto the hole injection layer 220 in each filter element forming region 7 by using a droplet discharge method. The R light emitting layer ink as a material and the G light emitting layer ink as an EL light emitting material which is a functional liquid material are applied. Here again, the ink for each light emitting layer is ejected from the droplet ejection head 22 of the droplet ejection device 16 of FIG.
As a method of controlling the droplet discharge head 22, any one of the methods shown in FIGS. 1 to 4 is used in which the emission color of the EL light emitting material is applied instead of each hue of the color filter. According to the inkjet method, fine patterning can be easily performed in a short time. Also,
The film thickness can be changed by changing the solid content concentration and the ejection amount of the ink composition.

After applying the ink for the light emitting layer, a vacuum (1 torr)
In r), the solvent is removed under the conditions of room temperature, 20 minutes, etc. (step P58). Continuously, in a nitrogen atmosphere, 150 ° C, 4
The R color light emitting layer 203R and the G color light emitting layer 203G are conjugated with each other by heat treatment for a period of time (process P59). The film thickness was 50 nm under the above conditions. The luminescent layer conjugated by heat treatment is insoluble in the solvent.

The hole injection layer 2 is formed before forming the light emitting layer.
20 may be subjected to continuous plasma treatment with oxygen gas and fluorocarbon gas plasma. Thereby, the hole injection layer 2
A fluorinated layer is formed on 20 to increase the ionization potential, so that the hole injection efficiency is increased, and an organic EL device having high luminous efficiency can be provided.

Next, as shown in step P60 and FIG. 21C, B as an EL light emitting material which is a functional liquid material.
The color light emitting layer 203B is the R color light emitting layer 203 in each display dot.
It was formed so as to overlap the R and G color light emitting layers 203G and the hole injection layer 220. As a result, not only the three primary colors of R, G, and B can be formed, but also the steps between the R color light emitting layer 203R and the G color light emitting layer 203G and the bank 205 can be filled in and planarized. As a result, it is possible to reliably prevent a short circuit between the upper and lower electrodes. By adjusting the film thickness of the B color light emitting layer 203B, the B color light emitting layer 203B becomes the R color light emitting layer 203.
In the layered structure with the R and G color light emitting layers 203G, it functions as an electron injecting and transporting layer and does not emit B color light.

As a method of forming the B color light emitting layer 203B as described above, for example, a general spin coating method as a wet method can be adopted, or the R color light emitting layer 2 can be used.
The same inkjet method as the method of forming the 03R and G color light emitting layers 203G can also be adopted.

Thereafter, as shown in step P61 and FIG. 21D, the counter electrode 213 is formed to manufacture the target EL device 201. Counter electrode 213
When it is a surface electrode, for example, Mg, Ag,
It can be formed by using a film forming method such as a vapor deposition method or a sputtering method using Al, Li or the like as a material. In addition, the counter electrode 2
When 13 is a striped electrode, the formed electrode layer can be formed by using a patterning method such as a photolithography method.

According to the EL device 201 and the method of manufacturing the EL device 201 described above, any one of the control methods shown in FIGS. 1 to 4 is adopted as the control method of the ink jet head. Striped color unevenness can be reduced. In addition, the hole injection layer 220 and the R, G, and B light emitting layers 203R and 2 in each display dot in FIG.
In 03G and 203B, the hole injection layer and / or the light emitting layer of each color in one display dot is not formed by one scan of the inkjet head (see FIG. 1), but N times by a plurality of scans. A predetermined film thickness is formed by receiving (for example, four times) ink ejection. Therefore, even if there is a variation in the ink ejection amount among the plurality of nozzles 27, it is possible to prevent variation in the film thickness between the plurality of display dots, and it is possible to reduce the above-described striped color unevenness. The light emission distribution characteristic of the light emitting surface of the EL device 201 can be made uniform in a plane.

In addition, in the EL device and the manufacturing method thereof according to the present embodiment, by using the droplet discharge device 16 shown in FIG. 8, R, G, and B displays by ink discharge using the droplet discharge head 22. Since the dots are formed, there is no need to go through complicated steps such as a method using a photolithography method, and no material is wasted.

[Color Filter Manufacturing Method and Manufacturing Apparatus] Next, an embodiment of the color filter manufacturing method and manufacturing apparatus of the present invention will be described with reference to the drawings. First, prior to the explanation of this color filter manufacturing apparatus,
The manufactured color filter will be described. 38 is a partially enlarged view showing the color filter, FIG. 38 (A) is a plan view, and FIG. 38 (B) is a sectional view taken along line XX of FIG. 38 (A). In the color filter shown in FIG. 38, the same components as those of the color filter 1 of the embodiment shown in FIG. 5 will be described with the same reference numerals.

(Structure of Color Filter) In FIG. 38 (A), the color filter 1 is provided with a plurality of filter elements 3 arranged in a matrix. The boundaries of these filter elements 3 are separated by partition walls 6. To each of the filter elements 3, a color filter material, that is, a filter element material 13 as a liquid material which is any one of red (R), green (G), and blue (B) ink is introduced. In the color filter shown in FIG. 38, the arrangement of red, green and blue is described as a so-called mosaic arrangement, but as described above, any arrangement such as a stripe arrangement or a delta arrangement can be applied.

As shown in FIG. 38 (B), the color filter 1 comprises a transparent substrate 2 and a transparent partition wall 6. The portion where the partition wall 6 is not formed, that is, the removed portion constitutes a filter element forming region 7 in which the filter element 3 is arranged. A protective film 4 and an electrode layer 5, which are protective layers, are formed on the upper surfaces of the partition wall 6 and the filter element 3.

(Structure of Color Filter Manufacturing Apparatus) Next, the structure of a manufacturing apparatus for manufacturing the color filter will be described with reference to the drawings. FIG. 27 is a partially cutaway perspective view showing a droplet discharge device that constitutes the color filter manufacturing apparatus according to the present invention. The color filter manufacturing apparatus manufactures the color filter 1 that constitutes a color liquid crystal panel as an electro-optical device. This color filter manufacturing apparatus basically includes a droplet discharge device having the same basic function as the droplet discharge device 16 described above.

(Structure of Droplet Ejecting Device) This manufacturing device
As shown in FIG. 27, three droplet discharge devices 405R, 405R
It has 5G and 405B. These droplet discharge devices 40
5R, 405G, and 405B correspond to the three colors of R, G, and B, respectively, which eject ink as a liquid material, that is, R, G, and B filter element materials 13 that are color filter materials, respectively onto the mother substrate 12. . The droplet discharge devices 405R, 405G, and 405B are arranged in a substantially series to form a manufacturing device. Further, each of the droplet discharge devices 405R, 405G, 405B is integrally provided with a control device (not shown) that controls the operation of each component.

The droplet discharge devices 405R, 405
In G and 405B, these droplet discharge devices 405R and 40
5G and 405B are connected to unillustrated transfer robots for loading and unloading the mother substrates 12 one by one. In addition, each of the droplet discharge devices 405R, 405G, 405
For example, a multi-stage baking furnace (not shown) that can accommodate six mother substrates 12 and heats the mother substrates 12, for example, heats the mother substrate 12 for 5 minutes to dry the discharged filter element material 13 is connected to B. .

Then, the droplet discharge devices 405R, 405
As shown in FIG. 27, the G and 405B have a thermal clean chamber 422 which is a hollow box-shaped main body case. The inside of the thermal clean chamber 422 is adjusted to, for example, 20 ° C. plus or minus 0.5 ° C. so that dust can not enter from the outside so that stable and good drawing by an inkjet method can be obtained.
In the thermal clean chamber 422, a droplet discharge processing main body 423 is arranged.

As shown in FIG. 27, the droplet discharge processing main body 423 has an X-axis air slide table 424. A scanning drive device 425 in which a linear motor (not shown) is arranged on the X-axis air slide table 424
Is provided. The scan driving device 425 has a pedestal portion (not shown) that attaches and fixes the mother substrate 12 by suction, for example, and moves the pedestal portion in the scanning direction X with respect to the mother substrate 12.

As shown in FIG. 27, the droplet discharge processing main body 423 is provided with a feed drive device 427 as a Y-axis table located above the X-axis air slide table 424. The feed drive device 427 includes a head unit 420 for ejecting the filter element material 13 in the vertical direction, for example, in the Y-axis direction of the mother substrate 1.
2 is moved in the feed direction. Note that in FIG. 27, the head unit 420 is shown by a solid line in a state of floating in the air in order to clarify the positional relationship.

Further, the droplet discharge processing main body 423 is provided with an image pickup device such as various cameras (not shown) which is an observing means for recognizing the position of the ink jet head 421 and the position of the mother substrate 12. ing. The position control of the head unit 420 and the pedestal can be realized by position control using a pulse motor, feedback control using a servo motor, or any other control method. Various configurations including the image pickup device are basically the same as those of the droplet discharge device shown in FIGS. 8 and 9.

In addition, the main body 423 of the droplet discharge processing has a structure shown in FIG.
As shown in FIG. 7, a wiping unit 481 for wiping the surface of the head unit 420 that discharges the filter element material 13 is provided. In this wiping unit 481, for example, one end side of a wiping member (not shown) in which a cloth member and a rubber sheet are integrally laminated is appropriately wound, and the filter element material 1 is sequentially wound on a new surface.
3 is configured to be wiped on the surface on which 3 is discharged. As a result, the filter element material 1 attached to the ejection surface
No. 3 is removed so that clogging of the nozzle 466 described later does not occur.

Further, as shown in FIG. 27, an ink system 482 is provided in the droplet discharge processing main body 423. The ink system 482 includes an ink tank 483 that stores the filter element material 13, a supply pipe 478 through which the filter element material 13 can flow, and
It has a pump (not shown) that supplies the filter element material 13 from the ink tank 483 through the supply pipe 478 to the head unit 420. Note that, in FIG. 27, the piping of the supply pipe 478 is schematically shown, and is wired to the feed drive device 427 so as not to affect the movement of the head unit 420 from the ink tank 483, and feeds for scanning the head unit 420. The filter element material 13 is provided on the head unit 420 from above the driving device 427.
Are to be supplied.

Further, the droplet discharge processing main body 423 is provided with a weight measuring unit 485 for detecting the discharge amount of the filter element material 13 discharged from the head unit 420.

Further, in the droplet discharge processing main body 423, a pair of dot dropout detection units 487 having an optical sensor (not shown) for detecting the discharge state of the filter element material 13 from the head unit 420 are provided. . In this dot dropout detection unit 487, a light source and a light receiving unit of an optical sensor (not shown) are ejected from the head unit 420 along a direction intersecting a direction in which droplets are ejected from the head unit 420, for example, an X-axis direction. The droplets 8 are arranged so as to face each other with a space passing therebetween. Also, this missing dot detection unit 487
Is arranged on the Y-axis direction side, which is the transport direction of the head unit 420, and is configured to detect the ejection state and detect missing dots each time the head unit 420 is fed and moved to eject the filter element material 13. Has been done.

As will be described later in detail, the head unit 420 is provided with the head devices 433 for discharging the filter element material 13 in two rows. Therefore, a pair of dot dropout detection units 487 is provided in order to detect the ejection state for each column of each head device.

(Structure of Head Unit) Next, the structure of the head unit 420 will be described. FIG. 28 is a plan view showing a head unit provided in the droplet discharge device. FIG. 29 is a side view showing the head unit. FIG. 30 is a front view showing the head unit. Figure 31
FIG. 6 is a cross-sectional view showing a head unit.

As shown in FIGS. 28 to 31, the head unit 420 has a head main body portion 430 and an ink supply portion 431. In addition, the head body 430
Is a flat carriage 426 and the carriage 42.
6 and a plurality of head devices 433 having substantially the same shape.

FIG. 32 is an exploded perspective view showing the head device arranged in the head unit. The head device 433 is
As shown in FIG. 32, it has a strip-shaped printed board 435. Various electric components 436 are mounted on the printed board 435 and electric wiring is provided. Further, a window portion 437 is formed through the printed board 435 at one end side (right side in FIG. 32) in the longitudinal direction. Further, the printed circuit board 435 has a flow passage 438 through which the filter element material 13 which is ink can flow.
7 are provided on both sides.

On one surface side (lower surface side in FIG. 32) of the printed board 435, substantially one end side in the longitudinal direction (FIG. 32).
The inkjet head 421 is integrally mounted by a mounting member 440 at the center right side). The inkjet head 421 is formed in a rectangular shape with a long side,
The printed circuit board 435 is attached with its longitudinal direction aligned with the longitudinal direction. It should be noted that the inkjet heads in the head devices 433 may have substantially the same shape, that is, for example, products having a predetermined standard and sorted into a predetermined quality. Specifically, it is efficient that the inkjet heads 421 have the same number of nozzles, and the nozzles are formed at the same positions, when the inkjet heads are assembled to the carriage, and the assembling accuracy is improved. Is preferred. further,
If you use products made through the same manufacturing and assembly process,
There is no need to make a special product, and the cost can be reduced.

The other side of the printed board 435 (see FIG. 3)
A connector 441 that is located on the other end side in the longitudinal direction (on the left side in FIG. 32) and that is electrically connected to the inkjet head 421 by electrical wiring is integrally attached to the middle upper surface (2). As schematically shown in FIG. 27, these connectors 441 are connected with electric wirings (including power supply wirings and signal wirings) 442 wired in the feed drive device 427 so as not to affect the movement of the head unit 420. .
The electric wiring 442 connects the control unit (not shown) to the head unit 420. That is, these electric wirings 442 are heads on both sides in the arrangement direction of the two rows of head devices 433 from the feed drive device 427 to the head unit 420, as schematically shown by the two-dot chain line arrows in FIGS. 28 and 31. It is wired on the outer peripheral side of the unit 420 and connected to the connector 441 so that electrical noise does not occur.

Further, on the other surface side (upper surface side in FIG. 32) of the printed board 435, an ink introducing portion 443 is attached at substantially one end side in the longitudinal direction (right side in FIG. 32) corresponding to the ink jet head 421. There is. This ink introduction part 4
The printed circuit board 435 is provided on the mounting member 440.
It has a positioning cylindrical portion 445 having a substantially cylindrical shape that fits a positioning pin portion 444 penetrating therethrough, and a locking claw portion 446 that locks the printed board 435.

Further, the ink introducing portion 443 is provided with a pair of substantially cylindrical connecting portions 448 having a tapered tip. Each of these connecting portions 448 has an opening (not shown) communicating with the flow passage 438 of the printed circuit board 435 in a substantially liquid-tight manner at a base end portion on the printed circuit board 435 side, and a filter element material 13 through which the filter element material 13 can flow is provided at a front end portion. It has holes.

Further, these connecting portions 448 are shown in FIG.
As shown in FIG. 31 to FIG. 31, the seal connecting portions 450 are respectively attached to the tip end side. These seal connecting portions 450 are formed in a substantially cylindrical shape in which the connecting portion 448 is fitted in a substantially liquid-tight manner on the inner peripheral side, and a seal member 449 is provided at the tip end portion.

FIG. 33 is an exploded perspective view showing the ink jet head. FIG. 34 is a schematic diagram for explaining the operation of ejecting the filter element material of the inkjet head, corresponding to the cross section of the inkjet head.
Is a state before the filter element material is discharged, FIG.
FIG. 34B shows a state in which the piezoelectric vibrator is contracted to eject the filter element material, and FIG. 34C shows a state immediately after ejecting the filter element material. FIG. 35 is an explanatory diagram illustrating the discharge amount of the filter element material in the inkjet head. FIG. 36 is a schematic diagram illustrating an arrangement state of inkjet heads.
FIG. 37 is a partially enlarged view of FIG.

As shown in FIG. 33, the ink jet head 421 has a substantially rectangular holder 451. The holder 451 is provided with two rows of, for example, 180 piezoelectric vibrators 452 such as piezo elements along the longitudinal direction. Further, in the holder 451, a through hole 45 which communicates with the flow passage 438 of the printed circuit board 435 and through which the filter element material 13 which is ink flows is provided at approximately the center on both sides in the longitudinal direction.
3 are provided respectively.

As shown in FIG. 33, a sheet-like elastic plate 455 made of synthetic resin is integrally provided on the upper surface of the holder 451 on which the piezoelectric vibrator 452 is located. . The elastic plate 455 has a through hole 45.
3 are provided with communication holes 456 that are continuous with each other.
The elastic plate 455 has engagement holes 45 that engage with positioning claws 457 that are provided at four corners of the upper surface of the holder 451.
8 is provided, positioned on the upper surface of the holder 451 and integrally attached.

Further, on the upper surface of the elastic plate 455, a flat plate-shaped flow path forming plate 460 is provided. In this flow path forming plate 460, 180 nozzles 461 are provided in two rows in series in the longitudinal direction of the holder 451 that are long in the width direction of the holder 451 and correspond to the piezoelectric vibrator 452. On one side of 461, an opening 462 formed in a longitudinal shape in the longitudinal direction of the holder and a flow hole 463 continuous with the communication hole 456 of the elastic plate 455 are provided. And the elastic plate 4
55 is provided with engaging holes 458 that engage with positioning claw portions 457 that are provided at four corners of the upper surface of the holder 451. The engaging holes 458 are positioned and integrally attached to the upper surface of the holder 451 together with the elastic plate 455. .

A substantially flat plate-shaped nozzle plate 465 is provided on the upper surface of the flow path forming plate 460. In this nozzle plate 465, a substantially circular nozzle 466 corresponding to the nozzle groove 461 of the flow path forming plate 460 is provided in the holder 451.
There are 180 pieces in the longitudinal direction, and two rows are provided in series in a length range of 25.4 mm (1 inch). Further, the nozzle plate 465 is provided with engagement holes 458 that engage with the positioning claw portions 457 provided at the four corners of the upper surface of the holder 451, and together with the elastic plate 455 and the flow path forming plate 460 on the upper surface of the holder 451. It is positioned and integrally attached.

Then, the elastic plate 455, the flow path forming plate 460 and the nozzle plate 465 which are laminated are used to form an opening 462 of the flow path forming plate 460 as schematically shown in FIG.
A liquid reservoir 467 is formed by partitioning, and the liquid reservoir 467 is provided in each nozzle groove 461.
Through through. Accordingly, in the inkjet head 421, the pressure in the nozzle groove 461 is increased by the operation of the piezoelectric vibrator 452, and the filter element material 13 is ejected from the nozzle by 2 to 13 pl, for example, 7 m / s plus or minus 2 m at a droplet amount of about 10 pl. Discharge at / s. That is, as shown in FIG. 34, by applying a predetermined applied voltage Vh to the piezoelectric vibrator 452 in pulses,
As shown in (A), (B), and (C) in order, the piezoelectric element 452 is appropriately expanded and contracted in the arrow Q direction to pressurize the filter element material 13, which is ink, to drop a predetermined amount of the droplet 8 To eject from the nozzle 466.

Also, this ink jet head 421
As described in the above embodiment, there is a variation in the ejection amount such that the ejection amount on both ends in the arrangement direction becomes large as shown in FIG. From this, for example, the nozzle 466 in the range where the discharge amount variation is within 5%, that is,
It is controlled so that the filter element material 13 is not discharged from each of the nozzles 466.

As shown in FIGS. 27 to 31, the head main body portion 430 which constitutes the head unit 420 has the ink jet head 421 as the head device 4.
33 are arranged side by side with each other. As shown in FIG. 36, the arrangement of the head device 433 in the carriage 426 is offset in a direction inclined to the X-axis direction side which is the scanning direction orthogonal to the Y-axis direction rather than the Y-axis direction which is the feed direction. While being arranged. That is, for example, six pieces are arranged side by side in a direction slightly inclined from the Y-axis direction which is the feed direction, and this row is arranged in a plurality of rows, for example, two rows. This is because the width of the head device 433 in the short side direction is wider than that of the inkjet head 421, and it is not possible to reduce the arrangement interval between the inkjet heads 421 adjacent to each other, but the nozzle 4
This is an arrangement method considered from the situation that 66 rows must be arranged continuously in the Y-axis direction.

Further, in the head main body portion 430, the head device 433 is inclined in a direction in which the longitudinal direction of the ink jet head 421 intersects the X-axis direction, and the connector 441 is located on the opposite side to the opposite direction. Are arranged in a substantially point symmetrical manner. The inclined arrangement state of the head device 433 is, for example, the inkjet head 421.
The arrangement direction of the nozzles 466, which is the longitudinal direction of, is inclined 57.1 degrees with respect to the X-axis direction.

Further, the head devices 433 are arranged in a substantially zigzag manner, that is, they are not arranged in parallel with respect to the arrangement direction. That is, FIGS. 28 to 31 and FIG.
As shown in FIG. 6, 12 inkjet heads 421
The inkjet heads 421 are arranged in two rows so that the nozzles 466 of the above are continuously arranged in the Y-axis direction, and the arrangement order in the Y-axis direction is alternately arranged.

Concretely, it will be described in more detail with reference to FIGS. 36 and 37. Here, in the inkjet head 421, the arrangement direction of the nozzles 466, which is the longitudinal direction, is inclined with respect to the X-axis direction. Therefore, the filter element material 13 is discharged in the first row of the two rows of nozzles 466 provided in the inkjet head 421.
2 on the straight line in the X-axis direction where the second nozzle 466 is located
The other side of the nozzles 466 in the row has a region A within 10 nozzles (A in FIG. 37). Ie 1
In one inkjet head 421, a region A where two nozzles 466 do not exist is formed on a straight line in the X-axis direction.

Therefore, as shown in FIGS. 36 and 37, a region B (FIG. 37) in which two nozzles 466 are located on a straight line in the X-axis direction with one ink jet head 421.
In B), the head devices 433 in a row are not positioned in parallel in the X-axis direction. Further, only one area A is located on the straight line in the X-axis direction of the head device 433 forming one row, and only one area A is located on the straight line in the X-axis direction of the head device 433 forming the other row. The region A is located in parallel with each other in the X-axis direction, and the inkjet heads 421 in one row and the inkjet heads 4 in the other row are arranged.
21 and a total of two nozzles 46 on a straight line in the X-axis direction.
6 is positioned. That is, in the area where the inkjet heads 421 are arranged, the nozzles 466 are arranged in a staggered manner so that a total of two nozzles 466 are always located on a straight line in the X-axis direction at any position. The region X of the nozzle 466 that does not discharge the filter element material 13 is
The number of the two nozzles 466 on the straight line in the X-axis direction is not counted. As described above, the two nozzles 466 for ejecting ink in the X-axis direction to be scanned are positioned on a straight line, and as will be described later, the two nozzles 466 to 1
Ink will be ejected at one location. If one element is configured only by the ejection from one nozzle 466, the variation in the ejection amount between the nozzles 466 leads to the characteristic variation of the element and the deterioration of the yield. By forming the above, it is possible to disperse the variation in the discharge between the nozzles 466, and to make the characteristics uniform among the elements and improve the yield.

The ink supply section 431 is shown in FIGS.
As shown in FIG. 1, a pair of flat plate-shaped mounting plates 471 respectively provided corresponding to the two rows of the head main body 430, and a plurality of supply main units 47 attached to these mounting plates 471.
2 and. The supply main body 472 has an advancing / retreating portion 474 having a substantially elongated cylindrical shape. This forward / backward part 47
4 is attached by an attachment jig 473 so as to be movable along the axial direction while penetrating the attachment plate 471. Further, the advancing / retreating part 474 of the supply main body part 472 is provided from the mounting plate 471 to the head device 43 by a coil spring 475 or the like.
It is attached by being urged in the direction of advancing toward 3.
In FIG. 28, for convenience of explanation, the ink supply unit 4
31 is shown only for one of the two rows of head devices 433, and the other is omitted.

A flange portion 476 is provided at an end portion of the advancing / retreating portion 474 on the side facing the head device 433. The flange portion 476 protrudes like a collar on the outer peripheral edge of the advancing / retreating portion 474, and the end surface of the flange portion 476 is attached to the seal member 449 of the ink introducing portion 443 of the head device 433 and the coil spring 475.
It comes into contact in a substantially liquid-tight manner against the bias of. In addition, the advance / retreat unit 474
A joint portion 477 is provided at the end opposite to the side where the flange portion 476 is provided. This joint portion 477 is connected to one end of a supply pipe 478 through which the filter element material 13 flows, as schematically shown in FIG.

As described above, the supply pipe 478 is wired to the feed drive device 427 so as not to affect the movement of the head unit 420, as schematically shown in FIG.
As schematically shown by a dashed-dotted arrow in FIGS. 28 and 30, pipes are provided in the approximate center between the feed drive device 427 and the ink supply portions 431 arranged in two rows from above the head unit 420, and further radially. The end of the pipe is connected to the joint portion 477 of the ink supply unit 431 and then piped.

Then, the ink supply section 431 supplies the filter element material 13 flowing through the supply tube to the ink introduction section 443 of the head device 433. In addition, the filter element material 1 supplied to the ink introducing portion 443
3 is supplied to the inkjet head 421 and is appropriately ejected in the form of droplets 8 from each nozzle 466 of the inkjet head 421 which is electrically controlled.

(Operation During Color Filter Manufacturing) Next, the operation of the apparatus when forming the color filter 1 using the color filter manufacturing apparatus of the above-described embodiment will be described with reference to the drawings. FIG. 39 is a sectional view of a manufacturing process for explaining the procedure for manufacturing the color filter 1 using the color filter manufacturing apparatus.

First, the surface of the mother substrate 12, which is a transparent substrate of non-alkali glass having a film thickness of 0.7 mm, a vertical dimension of 38 cm, and a horizontal dimension of 30 cm, is mixed with hot concentrated sulfuric acid in an amount of 1 mass of hydrogen peroxide solution. % Wash with the added washing solution. After this cleaning, rinse with pure water and air dry to obtain a clean surface. A chromium film is formed on the surface of the mother substrate 12 by, for example, a sputtering method to have an average film thickness of 0.2 μm to obtain a metal layer 6a (step S1 in FIG. 39).

After drying this mother substrate 12 on a hot plate at 80 ° C. for 5 minutes, a photoresist layer (not shown) is formed on the surface of the metal layer 6a by, for example, spin coating. On the surface of the mother substrate 12, for example, a mask film (not shown) in which a required matrix pattern shape is drawn is brought into close contact, and exposed with ultraviolet rays. next,
The exposed mother substrate 12 is dipped in an alkali developing solution containing potassium hydroxide at a ratio of 8% by mass,
The photoresist in the unexposed portion is removed, and the resist layer is patterned. Subsequently, the exposed metal layer 6a is removed by etching with, for example, an etching solution containing hydrochloric acid as a main component. In this way, the light-shielding layer 6b which is a black matrix having a predetermined matrix pattern is obtained (step S2 in FIG. 39). The thickness of the light shielding layer 6b is about 0.2 μm, and the width dimension of the light shielding layer 6b is about 22 μm.
μm.

Mother substrate 1 provided with this light shielding layer 6b
Further, a negative transparent acrylic photosensitive resin composition 6c is applied and formed on the surface 2 by, for example, a spin coating method (FIG. 3).
Step S3 in 9). After prebaking the mother substrate 12 provided with the photosensitive resin composition 6c at 100 ° C. for 20 minutes,
UV exposure is performed using a mask film (not shown) in which a predetermined matrix pattern shape is drawn. Then, the resin in the unexposed portion is developed with, for example, the alkaline developer as described above, rinsed with pure water, and then spin-dried.
After baking as final drying, for example, at 200 ℃ 3
It is carried out for 0 minutes to fully cure the resin portion, and the bank layer 6
to form d. The bank layer 6d has an average film thickness of about 2.
The width is 7 μm and the width is about 14 μm. This bank layer 6d
The partition 6 is formed by the light shielding layer 6b and the light shielding layer 6b (step S4 in FIG. 39).

The above-obtained light-shielding layer 6b and bank layer 6
In order to improve the ink wettability of the filter element forming area 7 (particularly the exposed surface of the mother substrate 12) which is the colored layer forming area defined by d, dry etching, that is, plasma treatment is performed. Specifically, for example, a high voltage is applied to a mixed gas of helium and 20% oxygen, plasma treatment is performed to form etching spots, and the mother substrate 12 is etched by passing under the formed etching spots. Twelve pretreatment steps are performed.

Next, red (R), green (G), and blue (B) of red (R), green (G) and blue (B) are placed in the filter element forming region 7 which is formed by being partitioned by the partition wall 6 of the mother substrate 12 on which the above-mentioned pretreatment is performed. Each filter element material is introduced, that is, discharged by an inkjet method (procedure S5 in FIG. 39).

When the filter element material is discharged by the ink jet method, the head unit 420 is assembled and formed in advance. Then, in each of the droplet discharge devices 405R, 405G, and 405B of the droplet discharge device, one nozzle 46 of each inkjet head 421 is provided.
The discharge amount of the filter element material 13 discharged from 6 is adjusted to a predetermined amount, for example, about 10 pl. On the other hand, the partition wall 6 is previously formed on one surface of the mother substrate 12.
Are formed in a grid pattern.

Then, the mother substrate 12 which has been pretreated as described above is first carried into the droplet ejecting device 405R for R color by the transfer robot (not shown), and the droplet ejecting device 4 is supplied.
Place it on the pedestal in 05R. The mother substrate 12 placed on this pedestal is positioned and fixed by suction, for example. And the pedestal part holding the mother substrate 12 is
The position of the mother substrate 12 is confirmed by an image pickup device such as various cameras, and the scanning drive device 4 is set so as to be a predetermined position as appropriate.
Control 25 and move. Further, the feed drive device 427 appropriately moves the head unit 420 and recognizes its position. After that, the head unit 420 is moved in the feed direction, and the missing dot detection unit 487 causes the nozzle 46 to move.
The ejection state from 6 is detected, and it is recognized that ejection failure has not occurred and the ejection state is moved to the initial position.

After that, the mother substrate 12 held by the pedestal portion movable by the scanning drive device 425 is scanned in the X direction to move the head unit 420 relative to the mother substrate 12, and the ink jet is appropriately performed. Head 42
The filter element material 13 is appropriately discharged from one predetermined nozzle 466 to fill the concave portion defined by the partition wall 6 of the mother substrate 12. The discharge from the nozzle 466 is performed by the control device (not shown).
The filter element material 13 is controlled so as not to be discharged from a predetermined region X located at both ends in the arrangement direction of 66, for example, 10 nozzles 466 at each of both ends, and the discharge amount is relatively uniform at the intermediate portion. Discharge from 160 pieces.

The nozzle 466 discharges two nozzles 46 on a straight line in the scanning direction, that is, on a scanning line.
Since 6 is located, one nozzle 46 is provided in one recess during movement.
Two droplets of 8 minutes are ejected from 6 to 2 dots, more specifically, from one nozzle 466 as one dot, so that a total of 8 droplets of 8 minutes are ejected. For each scanning movement, the dot dropout detection unit 487 detects the ejection state to check whether dot dropouts have occurred.

When the dot omission is not recognized, the operation of moving the head unit 420 by a predetermined amount in the feeding direction and again moving the pedestal portion holding the mother substrate 12 in the scanning direction and discharging the filter element material 13 is repeated,
The filter element 3 is formed in the predetermined filter element forming area 7 of the predetermined color filter forming area 11.

Then, the R color filter element material 1
The mother substrate 12 from which 3 is discharged is taken out from the droplet discharge device 405R by a transfer robot (not shown), and the filter element material 13 is put in a multi-stage baking furnace (not shown).
Is dried at 120 ° C. for 5 minutes, for example. After this drying, the mother substrate 12 is taken out from the multi-stage baking furnace by the transfer robot and is transferred while being cooled. After this, the droplet discharge device 4
05R to G color liquid droplet ejecting devices 405G and B
The droplets are conveyed to the color droplet discharge device 405B, and G is formed in a predetermined filter element formation region 7 as in the case of forming the R color.
The color and B color filter element materials 13 are sequentially discharged. In this case, similarly to the above, for example, by changing the supply attitude of the mother substrate 12, one color material of the three color filter element materials is scanned in a scanning direction different from the other two color material. So that it is ejected when Then, the mother substrate 12 in which the filter element materials 13 of the respective three colors are discharged and dried is collected, heat-treated,
That is, the filter element material 13 is solidified and fixed by heating (step S6 in FIG. 39).

After that, the protective film 4 is formed on substantially the entire surface of the mother substrate 12 on which the filter element 3 is formed. Further, an electrode layer 5 is formed of ITO on the upper surface of the protective film 4 in a required pattern. After that, the plurality of color filters 1 are separately cut and formed for each color filter forming region 11 (step S7 in FIG. 39). This color filter 1
The substrate 12 on which is formed is used as one of a pair of substrates in a liquid crystal device as shown in FIG. 18, as described in the above embodiment.

(Effects of Color Filter Manufacturing Apparatus) According to the embodiments shown in FIGS. 27 to 39, in addition to the effects of the above-described embodiments, the following effects are exhibited.

That is, a plurality of nozzles 466 for ejecting the filter element material 13 which is a liquid material having fluidity, for example, ink as the liquid droplets 8 as the liquid droplets 8 are provided on one surface, and the plurality of ink jet heads 42 arranged side by side.
1 is the nozzle 46 of these inkjet heads 421.
In a state in which one surface provided with 6 faces the surface of the mother substrate 12 that is the object to be ejected with a predetermined gap, the surface is moved relatively along the surface of the mother substrate 12, and each of the plurality of inkjet heads 421 is moved. Nozzle 466 to mother board 1
The same filter element material 13 is discharged onto the surface of 2. Therefore, for example, it becomes possible to eject the filter element material 13 to a wide range of the mother substrate 12 by using the inkjet head 421 of substantially the same standard product, and a long (long) special inkjet head is used. Instead of using multiple standard products, the cost can be reduced. An inkjet head having a long dimension has a significantly low manufacturing yield and becomes an expensive component. However, since an inkjet head 421 having a short dimension has a good manufacturing yield, a plurality of inkjet heads are substantially used in the present invention. Since it is simply arranged so as to form a long inkjet head, the cost can be significantly reduced.

Further, for example, the ink jet head 42
The arrangement direction and the number of 1s arranged side by side, the number and the interval of the nozzles 466 used for discharging (the nozzles 466 can be used one by one or every several nozzles can be adjusted to the pitch of the pixels) as appropriate. As a result, the color filter 1 having different sizes, pixel pitches, and arrangements can be made to correspond to the region where the filter element material 13 is discharged, and the versatility can be improved.

The plurality of ink jet heads 42
By using those having substantially the same shape as 1,
Even one type of inkjet head 421 can be made to correspond to the region where the liquid material is ejected by appropriately arranging, the configuration can be simplified, the manufacturability can be improved, and the cost can be reduced.

By using the ink jet head 421 in which the nozzles 466 are arranged in a straight line at substantially equal intervals, for example, stripe type, mosaic type, delta type, etc.
It is possible to easily draw a structure having a predetermined regularity.

A plurality of ink jets are arranged along the inclined direction in which the substantially linear arrangement direction of the nozzles 466 intersects the scanning direction relatively moved along the surface of the mother substrate 12. Since the head 421 is moved relative to the surface of the mother substrate 12, the arrangement direction of the nozzles 466 of the plurality of inkjet heads 421 is inclined with respect to the scanning direction, which is the direction in which the nozzles 466 are moved along the surface of the mother substrate 12. Ready to go. Therefore, the pitch, which is the interval at which the filter element material 13 is ejected, becomes narrower than the pitch between the nozzles, and for example, the mother substrate 12 on which the filter element material 13 is ejected is used in a display device such as an electro-optical device such as a liquid crystal panel. When used, a more detailed display form can be obtained and a good display device can be obtained. Further, it is possible to prevent interference between the adjacent inkjet heads 421, and it is possible to easily reduce the size. Then, by appropriately setting the inclination angle, the dot pitch for drawing is appropriately set, and the versatility can be improved.

Further, in the construction of the ink jet head 421 in which the nozzles 466 are arranged in a straight line at substantially equal intervals, the nozzles 466 are provided in a straight line at substantially equal intervals in the longitudinal direction in the ink jet head 421 having a long rectangular shape. Therefore, the inkjet head 421 can be miniaturized, for example, interference between adjacent inkjet heads 421 and other parts can be prevented, and the inkjet head 421 can be easily miniaturized.

A plurality of ink jet heads 421 are arranged with the nozzles 466 arranged substantially parallel to each other.
Since the head unit 420 is configured by being disposed on the carriage 426, it is possible to easily form a plurality of ejection regions of the same liquid material in one region without using a special long inkjet head. Furthermore, it becomes possible to eject the filter element material 13 from one inkjet head 421 to another in an overlapping manner, and it is possible to easily average the ejection amounts in the ejection region and obtain stable and good drawing.

The plurality of ink jet heads 42
1 are inclined in a direction intersecting with the scanning direction X, and are arranged side by side in a direction different from the longitudinal direction of the inkjet head 421 so that the arrangement directions of all the nozzles 466 are parallel to each other. The discharge area can be easily enlarged without manufacturing a special inkjet head having Further, by setting the arrangement direction of the nozzles 466 to be inclined in a direction intersecting the scanning direction, as described above, the interval at which the filter element material 13 is discharged without the adjacent inkjet heads 421 interfering with each other. Is the nozzle 46
When the mother substrate 12 on which the filter element material 13 is discharged is used for a display device or the like, a more detailed display form can be obtained. Then, by appropriately setting the inclination angle, the dot pitch for drawing is appropriately set, and the versatility can be improved.

Further, a plurality of ink jet heads 421
Since a plurality of rows, for example, two rows are arranged in a substantially zigzag manner, without using a special long inkjet head 421,
Even when the inkjet heads 421 that are ready-made products are used, the adjacent filter heads 421 do not interfere with each other and a region where the filter element material 13 is not ejected does not occur between the inkjet heads 421. Discharge, that is, continuous drawing is possible.

Then, the ink jet head 421 having a plurality of nozzles 466 for ejecting the filter element material 13 which is a liquid material having fluidity, for example, ink, is provided in the nozzle 4 of the ink jet head 421.
One surface provided with 66 is a mother substrate 1 as an object to be discharged.
2 is relatively moved along the surface of the mother substrate 12 so as to face the surface of the second substrate via a predetermined gap, and a plurality of, for example, two nozzles 466 located on a straight line along the relative movement direction The filter element material 13 is discharged. Therefore, it is possible to obtain a configuration in which the filter element material 13 is discharged from two different nozzles 466 in an overlapping manner.
Even if the discharge amount varies among the plurality of nozzles 466, the discharge amount of the discharged filter element material 13 can be averaged to prevent the variation, and uniform discharge can be obtained in a plane. An electro-optical device having uniform characteristics and good characteristics can be obtained.

Further, the ink jet head 421 having a plurality of nozzles 466 for ejecting the filter element material 13 substantially linearly formed on one surface thereof, and the one surface of the ink jet head 421 on which the nozzles 466 are provided has a mother substrate as an object to be ejected. The nozzles 466 of the inkjet head 421 are moved relative to each other along the surface of the mother substrate 12 while facing the surface of the mother substrate 12 with a predetermined gap.
Of the nozzles 466 located in the predetermined regions X at both ends in the arrangement direction of the nozzles 466, for example, 10 nozzles 466 on both sides are not ejected, and the nozzles 466 located in an intermediate portion other than the predetermined region X are exposed to the surface of the mother substrate 12. Then, the filter element material 13 is discharged. With this configuration, the nozzles 466 each having a predetermined amount located at both ends in the arrangement direction of the nozzle 466 where the discharge amount is particularly large are not discharged from the nozzles 466, and the middle portion where the discharge amount is relatively uniform is not discharged. Since the filter element material 13 is ejected using the nozzle 466, it can be ejected uniformly on the surface of the mother substrate 12 in a plane, and the color filter 1 having a uniform quality in a plane can be obtained.
Good display can be obtained with a display device which is an electro-optical device using the color filter 1.

Then, the nozzle 46 which has a discharge amount that is 10% or more higher than the average discharge amount of the filter element material 13.
6 is not discharged, so that the characteristics do not vary even when a functional liquid material such as a filter element material 13 of the color filter 1, an EL light emitting material, or an electrophoretic device containing charged particles is used as a liquid material. It is possible to surely obtain good characteristics as an electro-optical device such as a liquid crystal device or an EL device.

Moreover, since the filter element material 13 is discharged from each nozzle 466 within ± 10% of the average value of the discharge amount, the discharge amount becomes relatively uniform, and the surface of the mother substrate 12 is flat. Evenly,
An electro-optical device having good characteristics can be obtained.

Further, a dot dropout detection unit 487 is provided, and the filter element material 13 from the nozzle 466 is provided.
Since the discharge is detected, it is possible to prevent the discharge unevenness of the filter element material 13, and it is possible to obtain reliable and good drawing of the discharge of the liquid material.

An optical sensor is provided in the dot dropout detection unit 487, and the passage of the filter element material 13 is detected by this optical sensor in the direction intersecting the discharge direction of the filter element material 13. Even in the step of discharging the ink, it is possible to recognize the discharge state of the filter element material 13 with a simple configuration, prevent the discharge unevenness of the filter element material 13, and obtain a drawing that is a reliable and good discharge of the filter element material 13. You can

Further, from the nozzle 466 to the mother substrate 12
Before and after the step of ejecting the filter element material 13, the ejection loss of the filter element material 13 is detected by the dot omission detection unit 487, so that the ejection states immediately before and after the ejection of the filter element material 13 can be detected. The ejection state of the ejection of the filter element material 13 can be surely recognized, dot omission can be surely prevented, and good drawing can be obtained. It should be noted that it may be performed only before or after the configuration for discharging.

Since the dot dropout detection unit 487 is arranged on the scanning direction side of the head unit 420, the distance for moving the head unit 420 for detecting the ejection state of ejection of the filter element material 13 is short and A simple configuration in which the movement in the scanning direction is continued as it is, and dot omission can be detected efficiently and in a simple configuration.

Then, the ink jet head 421 is set to 2
Filter element material 1 because it is arranged in a row with point symmetry
The supply pipe 478 for supplying the discharge of 3 is connected to the head unit 42.
It is possible to collect up to the vicinity of 0, and it is possible to easily assemble and maintain the device. Furthermore, the wiring of the electrical wiring 442 for controlling the inkjet head 421 is provided from both sides of the head unit 420, the influence of electrical noise due to the wiring can be prevented, and good and stable drawing can be obtained.

Furthermore, a plurality of ink jet heads 42
1 is disposed on one end side of the strip-shaped printed circuit board 435 and the connector 441 is disposed on the other end side thereof. Therefore, even if they are disposed on a plurality of straight lines, the connectors 441 can be disposed without interference and miniaturization can be achieved. At the same time, a position where the nozzle 466 does not exist in the scanning direction is not formed, an array of continuous nozzles 466 can be obtained, and it is not necessary to use a special inkjet head having a long dimension.

Since the connector 441 is arranged symmetrically so as to be located on the opposite side, the influence of electrical noise on the connector 441 portion can be prevented, and good and stable drawing can be obtained.

It should be noted that the operational effects of these embodiments have corresponding similar operational effects as long as each of the above-described embodiments has a similar configuration.

[Display Device (Electro-Optical Device) Using EL Element and Manufacturing Method Thereof] Next, a display device (electro-optical device) of the present invention and a manufacturing method thereof will be described with reference to the drawings. In the present embodiment, an active matrix type display device using an EL display element will be described as an electro-optical device among various display devices. Before describing the method for manufacturing the display device, the configuration of the manufactured display device will be described.

(Structure of Display Device) FIG. 40 is an equivalent circuit diagram showing a part of the organic EL device in the electro-optical device manufacturing apparatus of the invention. FIG. 41 is an enlarged plan view showing a planar structure of display dots (pixel regions) of the display device. This display device is an EL device, as shown in FIG.
This is an active matrix type display device 501 using a display element. The display device 501 includes a plurality of scanning lines 503, a plurality of signal lines 504 extending in a direction intersecting the scanning lines 503, and a plurality of signal lines 504 arranged in parallel with each other on a transparent display substrate 502 which is a substrate. It has a configuration in which a plurality of extending common power supply lines 505 are respectively wired. A pixel region (display dot) 501A is provided at each intersection of the scanning line 503 and the signal line 504.

For the signal line 504, a data side drive circuit 507 having a shift register, a level shifter, a video line, and an analog switch is provided. Further, a scan side driver circuit 508 having a shift register and a level shifter is provided for the scan line 503. Then, in each of the pixel regions 501A, a switching thin film transistor 509 to which a scanning signal is supplied to the gate electrode via the scanning line 503, and an image signal supplied from the signal line 504 via the switching thin film transistor 509 are accumulated. Storage capacity to hold cap
And the current thin film transistor 51 to which the image signal held by the storage capacitor cap is supplied to the gate electrode.
0 and the common power supply line 505 when electrically connected to the common power supply line 505 through the current thin film transistor 510.
A pixel electrode 511 into which a drive current flows from 05 and a light emitting element 513 sandwiched between the pixel electrode 511 and the reflective electrode 512 are provided.

With this structure, when the scanning line 503 is driven and the switching thin film transistor 509 is turned on,
The potential of the signal line 504 at that time is held in the storage capacitor cap. The on / off state of the current thin film transistor 510 is determined according to the state of the storage capacitor cap. Then, a current flows from the common power supply line 505 to the pixel electrode 511 via the channel of the current thin film transistor 510, and further a current flows to the reflective electrode 512 via the light emitting element 513. As a result, the light emitting element 513 emits light according to the amount of current flowing through it.

Here, the pixel region 501A is the reflective electrode 5
As shown in FIG. 41, which is an enlarged plan view of the state in which the light emitting element 12 and the light emitting element 513 are removed, four sides of the pixel electrode 511 having a rectangular planar state have a signal line 504, a common power supply line 505, a scanning line 503, and not shown. The arrangement is such that it is surrounded by the scanning lines 503 for the other pixel electrodes 511.

Next, the procedure of a manufacturing process for manufacturing an active matrix type display device using the above EL display element will be described. 42 to 44 are manufacturing process cross-sectional views showing the procedure of a manufacturing process of an active matrix type display device using an EL display element.

First, as shown in FIG. 42A, a transparent display substrate 502 is formed by a plasma CVD method using tetraethoxysilane (TEOS) or oxygen gas as a source gas, if necessary. The size is about 2000-50
A base protection film (not shown) which is a silicon oxide film of 00 angstrom is formed. Next, the temperature of the display substrate 502 is set to about 350 ° C., and plasma C is applied to the surface of the base protective film.
A semiconductor film 520a which is an amorphous silicon film having a thickness of about 300 to 700 angstrom is formed by the VD method. Then, the semiconductor film 520a is subjected to a crystallization process such as laser annealing or solid phase growth to crystallize the semiconductor film 520a into a polysilicon film. Here, in the laser annealing method, for example, an excimer laser is used as a line beam having a beam length of about 400 nm, and the output intensity is about 200 mJ / cm ² . With respect to the line beam, the line beam is scanned such that a portion corresponding to about 90% of the peak value of the laser intensity in the short direction overlaps each region.

Then, as shown in FIG. 42B, the semiconductor film 520a is patterned to form an island-shaped semiconductor film 520.
b is formed. On the surface of the display substrate 502 provided with the semiconductor film 520b, a thickness dimension of about 600 to about 600 is formed by a plasma CVD method using TEOS or oxygen gas as a source gas.
A gate insulating film 521a which is a 1500 angstrom silicon oxide film or a nitride film is formed. Although the semiconductor film 520b serves as a channel region and a source / drain region of the current thin film transistor 510, a semiconductor film (not shown) serving as a channel region and a source / drain region of the switching thin film transistor 509 is also formed at different cross-sectional positions. ing. That is, in the manufacturing process shown in FIGS. 42 to 44, two types of switching thin film transistors 509 and a current thin film transistor 510 are formed at the same time, but since they are formed in the same procedure, only the current thin film transistor 510 will be described in the following description. The description of the switching thin film transistor 509 is omitted.

After that, as shown in FIG. 42C, a conductive film which is a metal film of aluminum, tantalum, molybdenum, titanium, tungsten or the like is formed by a sputtering method and then patterned, and the gate electrode also shown in FIG. 51
Form 0A. In this state, phosphorus ions at a high temperature are implanted, and the semiconductor film 520b is self-aligned with the gate electrode 510A in the source / drain regions 510a and 510.
b is formed. The portion into which the impurities are not introduced becomes the channel region 510c.

Next, as shown in FIG. 42D, after forming an interlayer insulating film 522, contact holes 523, 5 are formed.
24 are formed, and these contact holes 523, 524 are formed.
Relay electrodes 526 and 527 are embedded and formed therein.

Further, as shown in FIG. 42E, a signal line 504, a common power supply line 505 and a scanning line 503 (not shown in FIG. 42) are formed on the interlayer insulating film 522. At this time, the wirings of the signal line 504, the common power supply line 505, and the scanning line 503 are formed sufficiently thick without being restricted by the thickness dimension required for the wiring. Specifically, each wiring may be formed to have a thickness of, for example, about 1 to 2 μm. Here, the relay electrode 527 and each wiring may be formed in the same process. At this time, the relay electrode 52
6 is formed of an ITO film described later.

Then, an interlayer insulating film 530 is formed so as to cover the upper surface of each wiring, and a contact hole 532 is formed at a position corresponding to the relay electrode 526. An ITO film is formed so as to fill the inside of this contact hole 532, and this I
The TO film is patterned to form a pixel electrode 511 electrically connected to the source / drain region 510a at a predetermined position surrounded by the signal line 504, the common power supply line 505 and the scanning line 503.

Here, in FIG. 42 (E), the signal line 504
The portion sandwiched by the common power supply line 505 corresponds to a predetermined position where the optical material is selectively arranged. The signal line 50 is provided between the predetermined position and its surroundings.
4 and the common power supply line 505 form a step 535. Specifically, the predetermined position is lower than its surroundings,
A concave step 535 is formed.

Next, the EL light emitting material, which is a functional liquid material, is discharged onto the display substrate 502 which has been subjected to the above-mentioned pretreatment, by an inkjet method. That is, as shown in FIG. 43A, the functionality for forming the hole injection layer 513A corresponding to the lower layer portion of the light emitting element 140 in a state where the upper surface of the display substrate 502 subjected to the pretreatment is directed upward. An optical material 540A, which is a solution-form precursor dissolved in a solvent as a liquid material, is ejected by using an inkjet method, that is, the device of each of the above-described embodiments, and is discharged into a region at a predetermined position surrounded by a step 535. Apply selectively.

As the optical material 540A for forming the discharged hole injection layer 513A, polyphenylene vinylene whose polymer precursor is polytetrahydrothiophenylphenylene, 1,1-bis- (4-N, N-diene) is used. Trilylaminophenyl) cyclohexane, tris (8-hydroxyquinolinol) aluminum and the like are used.

At the time of this discharge, since the liquid optical material 540A having a fluidity has a high fluidity as in the case of ejecting the filter element material 13 onto the partition wall of each of the above-described embodiments, I try to spread in the plane direction,
Since the step 535 is formed so as to surround the applied position, the optical material 540A has the step 53 unless the ejection amount of the optical material 540A per one time is extremely large.
It is prevented to extend beyond 5 beyond the predetermined position.

As shown in FIG. 43B, the solvent of the liquid optical material 540A is evaporated by heating or light irradiation to form a solid thin hole injection layer 513A on the pixel electrode 511. 43A and 43B are repeated a necessary number of times to form a hole injection layer 513A having a sufficient thickness dimension as shown in FIG. When a plurality of droplets are ejected to form the hole injection layer, the head scanning direction at the time of ejection is set to two or more different directions (for example, two orthogonal directions), so that material unevenness is caused. Will be reduced.

Next, as shown in FIG. 44A, as a functional liquid material for forming the organic semiconductor film 513B on the upper layer portion of the light emitting element 513 with the upper surface of the display substrate 502 facing upward. The optical material 540B, which is a solution-type organic fluorescent material dissolved in the solvent, is ejected by using the inkjet method, that is, the device of each of the above-described embodiments, and this is ejected in a region at a predetermined position surrounded by the step 535. Selectively apply to. In addition, regarding this optical material 540B,
As described above, similarly to the ejection of the optical material 540A, it is prevented from spreading over the predetermined position beyond the step 535.

As the optical material 540B for forming the discharged organic semiconductor film 513B, cyanopolyphenylenevinylene, polyphenylenevinylene, polyalkylphenylene, 2,3,6,7-tetrahydro-11-
Oxo-1H ・ 5H ・ 11H (1) Penzovirano [6
7,8-ij] -Quinolidine-10-carboxylic acid, 1,
1-bis- (4-N, N-ditolylaminophenyl) cyclohexane, 2-13.4'-dihydroxyphenyl) -3,5,7-trihydroxy-1-benzopyrylium perchlorate, tris (8- Hydroxyquinolinol) aluminum, 2,3,6,7-tetrahydro-
9-Methyl-11-oxo-1H ・ 5H ・ 11H (1)
Benzopyrano [6,7,8-ij] -quinolidine, aromatic diamine derivative (TDP), oxydiazole dimer (OXD), oxydiazole derivative (PB
D), distilarylene derivative (DSA), quinolinol-based metal complex, beryllium-benzoquinolinol complex (Bebq), triphenylamine derivative (MTDAT)
A), distyryl derivative, pyrazoline dimer, rubrene, quinacridone, triazole derivative, polyphenylene, polyalkylfluorene, polyalkylthiophene, azomethine zinc complex, polyfilin zinc complex, benzoxazole zinc complex, phenanthroline europium complex and the like are used.

Next, as shown in FIG. 44B, the solvent of the optical material 540B is evaporated by heating or light irradiation to form a solid thin organic semiconductor film 513B on the hole injection layer 513A. . These FIGS. 44 (A) and (B) are repeated a necessary number of times to form an organic semiconductor film 513B having a sufficient thickness as shown in FIG. 44 (C). When a plurality of droplets are ejected to form an EL light emitting layer which is an organic semiconductor film, the head scanning direction at the time of ejection is set to two or more different directions (for example, two orthogonal directions) as described above. , Material unevenness is reduced.

A light emitting element 513 is constituted by the hole injection layer 513A and the organic semiconductor film 513B.
Lastly, as shown in FIG. 44D, the reflective electrode 512 is formed over the entire surface of the display substrate 502 or in a stripe shape, so that the display device 501 is manufactured. Here, by forming the hole injection layer and the organic semiconductor film (EL light emitting layer) with droplets ejected in mutually different scanning directions, it is possible to reduce display unevenness due to material unevenness as described above.

Also in the embodiment shown in FIGS. 40 to 44, the same action and effect can be obtained by implementing the same ink jet method as that of the above-mentioned respective embodiments. Furthermore, when selectively applying the functional liquid,
They can be prevented from flowing out to the surroundings and can be patterned with high accuracy.

In the embodiments of FIGS. 40 to 44, the active matrix type display device using the EL display element in consideration of the color display has been described. However, as shown in FIG. Through FIG.
The configuration shown in can also be applied to a display device with a single color display.

That is, the organic semiconductor film 513B may be uniformly formed on the entire surface of the display substrate 502. However, even in this case, since the hole injection layer 513A must be selectively arranged at each predetermined position in order to prevent crosstalk, coating using the step 111 is extremely effective. Incidentally, in FIG. 45, the same components as those of the embodiment shown in FIGS. 40 to 44 are designated by the same reference numerals.

Further, the display device using the EL display element is not limited to the active matrix type, and for example, as shown in FIG.
A passive matrix type display device as shown in 6 can also be used. FIG. 46 shows an EL device in the electro-optical device manufacturing apparatus of the invention. FIG. 46A shows a plurality of first bus wirings 550 and a plurality of second buses arranged in a direction orthogonal to the first bus wirings 550. FIG. 46B is a cross-sectional view taken along the line BB of FIG. 46A, showing a positional relationship between the wiring 560 and the wiring 560.
In FIG. 46, the same components as those of the embodiment shown in FIGS. 40 to 44 are designated by the same reference numerals, and duplicated description will be omitted. Further, since detailed manufacturing steps are the same as those in the embodiment shown in FIGS. 40 to 44, their illustration and description will be omitted.

In the display device of the embodiment shown in FIG. 46, an insulating film 570 such as SiO ₂ is arranged so as to surround a predetermined position where the light emitting element 513 is arranged,
As a result, a step 535 is formed between the predetermined position and its surroundings. Therefore, when the functional liquid material is selectively applied, it is possible to prevent them from flowing out, and it is possible to perform patterning with high accuracy.

Further, the active matrix type display device is not limited to the configuration of the embodiment shown in FIGS. 40 to 44. That is, for example, the configuration shown in FIG. 47, the configuration shown in FIG. 48, the configuration shown in FIG. 49, the configuration shown in FIG. 50, the configuration shown in FIG. 51, or the configuration shown in FIG. Any configuration such as a configuration can be used.

The display device shown in FIG. 47 has a pixel electrode 511.
By forming the step 535 by utilizing, it is possible to perform patterning with high precision. FIG. 47 shows
FIG. 45 is a cross-sectional view at a stage in the middle of a manufacturing process for manufacturing the display device, and the stages before and after that are substantially the same as those of the embodiment shown in FIGS. 40 to 44, and therefore the illustration and description thereof will be omitted.

In the display device shown in FIG. 47, the pixel electrode 511 is formed thicker than usual, whereby a step 535 is formed between the pixel electrode 511 and the periphery thereof. That is, this FIG.
In the display device shown in (1), a convex step is formed in which the pixel electrode 511 to which the optical material is applied later is higher than its surroundings. Then, as in the embodiment shown in FIGS.
Hole injection layer 513A corresponding to the lower part of the light emitting element 513
The optical material 540A, which is a precursor for forming the film, is discharged and applied on the upper surface of the pixel electrode 511.

However, unlike the case of the embodiment shown in FIGS. 40 to 44, the display substrate 502 is turned upside down, that is, the upper surface of the pixel electrode 511 to which the optical material 540A is applied is directed downward. Optical material 540A in the state
Is discharged and applied. As a result, the optical material 540
Due to gravity and surface tension, A accumulates on the upper surface (lower surface in FIG. 47) of the pixel electrode 511 and does not spread around it. Therefore, if solidified by heating, light irradiation, or the like, a thin hole injection layer 513A similar to that in FIG. 43B can be formed, and by repeating this, the hole injection layer 513A is formed. The organic semiconductor film 513B is also formed by the same method. Therefore, it is possible to perform patterning with high accuracy by utilizing the convex step. Note that the amounts of the optical materials 540A and 540B may be adjusted by utilizing not only gravity and surface tension but also inertial force such as centrifugal force.

The display device shown in FIG. 48 is also an active matrix type display device. FIG. 48 is a cross-sectional view at a stage in the middle of the manufacturing process for manufacturing the display device, and the stages before and after this are the same as those of the embodiment shown in FIGS. 40 to 44, and the illustration and description thereof will be omitted.

In the display device shown in FIG. 48, first, the reflective electrode 512 is formed on the display substrate 502, and the insulating film 570 is formed on the reflective electrode 512 so as to surround a predetermined position where the light emitting element 513 is subsequently arranged. By this, a concave step 535 is formed so that the predetermined position is lower than the surroundings.

Then, similarly to the embodiment shown in FIGS. 40 to 44, the optical material 540 which is a functional liquid material is formed in the area surrounded by the step 535 by the ink jet method.
By selectively discharging and applying A and 540B,
The light emitting element 513 is formed.

On the other hand, the peeling layer 58 is formed on the peeling substrate 580.
1, the scanning line 503, the signal line 504, and the pixel electrode 5
11, a switching thin film transistor 509, a current thin film transistor 510 and an interlayer insulating film 530 are formed. Finally, a peeling substrate 580 is provided on the display substrate 502.
The structure peeled from the upper peeling layer 581 is transferred.

In the embodiment of FIG. 48, the scanning line 50
3, signal line 504, pixel electrode 511, switching thin film transistor 509, current thin film transistor 510
And optical materials 540A and 540 for the interlayer insulating film 530
It is possible to reduce the damage due to the coating formation of B. Note that it can be applied to a passive matrix type display element.

The display device shown in FIG. 49 is also an active matrix type display device. FIG. 49 is a cross-sectional view at a stage in the middle of the manufacturing process for manufacturing the display device, and the stages before and after this are the same as those of the embodiment shown in FIGS. 40 to 44, and the illustration and description thereof will be omitted.

In the display device shown in FIG. 49, interlayer insulation is performed.
A concave step 535 is formed using the film 530.
is there. Therefore, without adding new steps,
The interlayer insulating film 530 can be used, which greatly complicates the manufacturing process.
Can be prevented. The interlayer insulating film 530 is formed of SiO 2._Two
And the surface of the film_Two, C
F _Three, Plasma such as Ar
Liquid optical material exposing the surface of the elementary electrode 511
540A and 540B may be selectively discharged and applied.
Yes. As a result, along the surface of the interlayer insulating film 530,
A liquid-repellent distribution is formed, and the optical materials 540A, 54
0B is both the step 535 and the liquid repellency of the interlayer insulating film 530.
By the action of, it becomes easy to accumulate at a predetermined position.

In the display device shown in FIG. 50, the hydrophilicity at a predetermined position where the liquid optical materials 540A and 540B are applied is made relatively stronger than the hydrophilicity of the surroundings, so that the applied optical material is not affected. The materials 540A and 540B are arranged so as not to spread around. FIG. 50 is a cross-sectional view at a stage in the middle of the manufacturing process for manufacturing the display device, and the stages before and after this are the same as those of the embodiment shown in FIGS. 40 to 44, and the illustration and description thereof will be omitted.

In the display device shown in FIG. 50, after forming interlayer insulating film 530, amorphous silicon layer 590 is formed on the upper surface thereof. Since the amorphous silicon layer 590 is relatively more water repellent than the ITO forming the pixel electrode 511, the surface of the pixel electrode 511 has a hydrophilicity relatively stronger than the surrounding hydrophilicity. A water-repellent / hydrophilic distribution is formed. Then, similar to the embodiment shown in FIGS. 40 to 44, liquid optical materials 540A and 540 are formed toward the upper surface of the pixel electrode 511 by an inkjet method.
By selectively discharging and applying B, the light emitting element 5
13 is formed, and finally the reflective electrode 512 is formed.

The embodiment shown in FIG. 50 can also be applied to a passive matrix type display element. Further, as in the embodiment shown in FIG. 48, a step of transferring the structure formed over the peeling substrate 580 with the peeling layer 581 to the display substrate 502 may be included.

The water-repellent / hydrophilic distribution may be formed of a metal, an anodic oxide film, an insulating film such as polyimide or silicon oxide, or another material. In addition,
The display element may be formed of the first bus wiring 550 in the case of a passive matrix type display element and the scanning line 503, the signal line 504, the pixel electrode 511, the insulating film 530 or the light shielding layer 6b in the case of an active matrix type display element. .

The display device shown in FIG. 51 does not improve the patterning accuracy by utilizing the level difference 535 and the distribution of lyophobicity / lyophilicity, but by utilizing the attractive force or repulsive force due to the potential. It is intended to improve. Figure 5
1 is a cross-sectional view at a stage in the middle of the manufacturing process for manufacturing the display device, and at the stages before and after this, FIGS.
4 is the same as the embodiment shown in FIG.

In the display device shown in FIG. 51, the signal line 5
04 and the common power supply line 505, and a transistor (not shown) is appropriately turned on / off to form a potential distribution in which the pixel electrode 511 has a negative potential and the interlayer insulating film 530 has a positive potential. Then, an ink jet method is used to selectively discharge the positively charged liquid optical material 540A to a predetermined position to form a coating. As a result, since the optical material 540A is charged, not only the spontaneous polarization but also the charged charge can be used, and the patterning accuracy can be further improved.

The embodiment shown in FIG. 51 can also be applied to a passive matrix type display element. Further, as in the embodiment shown in FIG. 48, a step of transferring the structure formed over the peeling substrate 580 with the peeling layer 581 to the display substrate 502 may be included.

Further, the potential is applied to both the pixel electrode 511 and the interlayer insulating film 530 around the pixel electrode 511, but the invention is not limited to this. For example, as shown in FIG. A positive potential is applied only to the interlayer insulating film 530 without applying a potential, and a liquid optical material 540A
May be applied after being positively charged.
According to the configuration shown in FIG. 52, since the liquid optical material 540A can be surely maintained in the positively charged state even after being applied, the liquid optical material 540A is repulsed by the surrounding interlayer insulating film 530. The material 540A can be more reliably prevented from flowing out to the surroundings.

[Structural Example of Droplet Ejecting Means] Next, another structural example of the droplet ejecting means applicable to each of the above embodiments will be described. In each of the configuration examples described below, a plurality of droplet discharge heads 22 are arranged and fixed in a predetermined arrangement pattern and are integrally used as a droplet discharge unit. By using such a droplet discharge unit, it is possible to increase the size of the droplet discharge head 22 without increasing the size of the structure.
Moreover, it is possible to perform efficient processing for various objects without manufacturing a plurality of droplet discharge heads 22 having different structures. Hereinafter, a plurality of configuration examples will be sequentially described with reference to the drawings.

(Structural Example 1) FIG. 55 is a schematic plan view showing the structure of Structural Example 1 of the droplet discharge unit according to the present invention. In this configuration example 1, a plurality of droplet discharge heads 22 similar to those described in each of the above-described embodiments includes the nozzle row 2.
8 (indicated by 28A and 28B in the figure) are arranged in a line along the arrangement direction. The plurality of droplet discharge heads 22 are attached to the sub-carriage 25, respectively. Since the plurality of droplet discharge heads 22 are arranged in the extension direction of the nozzle rows 28 with a predetermined interval, the nozzles 27 are provided between the nozzle rows 28 having the discharge width t of each droplet discharge head 22. Is provided where s does not exist. Here, it is preferable that the interval s is configured to have the same width as the ejection width t of the droplet ejection head 22.

In the droplet discharge unit 25U, a rotation center 25a is set on the sub-carriage 25, and the sub-carriage 25 is rotatable about the rotation center 25a. For example, the sub-carriage 25 is attached to the head unit 26 of the above-described embodiment, and is configured to be rotatable about its rotation center 25a by a drive mechanism such as a motor, whereby the entire droplet discharge unit is set in the scanning direction X. It is configured to be positioned in a posture inclined at an inclination angle θ with respect to the orthogonal direction (feed direction Y). The rotation center 25a is preferably set at the center of the sub-carriage 25 as shown in the figure.

Each droplet discharge head 22 mounted on the sub-carriage 25 is fixed in a precisely positioned state with the alignment origin 25o provided on the sub-carriage 25 as a reference. The alignment origin 25o is preferably provided at both ends of the sub-carriage 25 in the extension direction of the nozzle row 28 as shown in the drawing. The alignment origin 25o is configured as a mark such as a fine print pattern, for example.

FIG. 56 shows the above-mentioned droplet discharge unit 25U.
It shows how to process the substrate 12 by using. On the substrate (mother substrate) 12, pattern formation regions (unit regions) 11 similar to the above are arranged vertically and horizontally. The droplet discharge unit 25U scans the substrate 12 as in the above-described embodiments, and in the process, the droplet discharge heads 2
Droplets are ejected from the second nozzle. At this time, in one scanning step, the droplets are ejected in the region overlapping the ejection width t of the droplet ejection head 22, but the interval s
Droplets are not ejected in the region overlapping with. Therefore, it becomes necessary to process an area that cannot be processed in one scan in another scan. For example, after performing the scanning step ST1 from the position of the droplet discharge unit 25U shown in the upper part of the drawing, the scanning step ST1 is performed again by shifting by δy in the feeding direction Y like the droplet discharge unit 25U shown in the lower part of the drawing.
Do 2. Here, δy is the ejection width t or the interval s.
Is preferred. Particularly, when the discharge width t = s, if δy = t = s, then two scanning steps ST
By 1 and ST2, it is possible to eliminate the area where the droplets are not ejected. In this case, as shown in FIGS. 57A and 57B, droplet ejection in the case of performing scanning in the short side direction M of the substrate 12 in accordance with the difference in the pattern arrangement period between the short side direction M and the long side direction L of the substrate 12. The inclination angle θa of the unit 25U and the inclination angle θb of the droplet discharge unit 25U when scanning in the longitudinal direction L may be set to mutually different angles.

In the present embodiment, even when the droplet discharge unit 25U is used, the step of scanning along the short side direction M of the substrate 12 and the longitudinal direction L thereof are the same as in the above embodiments. By performing any of the steps of scanning, film formation unevenness can be reduced. In addition, depending on whether scanning in the short side direction M or the long side direction L of the substrate 12 enables more efficient processing,
It is also possible to select one of the more preferable scanning directions and perform scanning only in that direction.

Also in this configuration example, the scanning mode by the error dispersion method can be used as in the above embodiment. In this case, the repetitive scanning step may be performed while feeding a predetermined amount in the feeding direction Y as in the above-mentioned embodiment.
The process of sequentially performing T2 is set as one set, and this set is performed while gradually shifting in the feed direction Y, or, for example, after performing only the scan step ST1 while gradually shifting in the feed direction Y, the scan step ST2 is performed. There is a method of gradually shifting in the feeding direction Y, and any method may be used.

(Structural Example 2) Next, with reference to FIG. 58, a structural example 2 of the droplet discharge unit will be described. In this droplet discharge unit 25V, a plurality of droplet discharge heads 22 are arranged at a predetermined interval, that is, each droplet discharge head 2
The structure 2 is the same as the configuration example 1 in that the sub-carriage 25 is provided with the alignment origin 25o. Therefore, the description of the same parts is omitted. This droplet discharge unit 25V is different from the configuration example 1 in that each droplet discharge head 22 is configured to be rotatable with respect to the sub-carriage 25.
Further, the plurality of droplet discharge heads 22 are configured so that the mutual intervals can be changed.

The subcarriage 25 is provided with a guide path 25c extending in the longitudinal direction thereof, and the mounting member 25d is movable along the guide path 25c. The droplet discharge head 22 is configured to be rotatable about the rotation center 22a with respect to the mounting member 25d. More specifically, the guide path 25c is formed of a groove or a ridge, and the mounting member 25d is fitted into the guide path 25c so that the guide path 25c can slide in the extension direction of the guide path 25c. The mounting member 25d can be fixed at an appropriate position on the guide path 25c after being adjusted by an adjusting means such as a micrometer. The droplet discharge head 22 is rotatably attached to the attachment member 25d, and can be fixed after being adjusted to an appropriate inclination angle θ by adjusting means such as a micrometer.

The configuration example 2 is the same as the configuration example 1 in that the discharge widths t of the droplet discharge heads 22 are arranged at intervals s. However, in the above configuration example 1,
Since each droplet discharge head 22 is fixed to the sub-carriage 25 and the predetermined inclination angle θ is set by the rotation of the entire sub-carriage 25, the inclination causes the droplets to be spread over a wide range in the scanning direction. Discharge head 22
Are dispersed and arranged, and in particular, in the droplet discharge head 22 that is away from the rotation center 25a, a long idling distance occurs after the start or end of the scanning step. On the contrary,
In the configuration example 2, since the droplet discharge heads 22 are individually rotated with respect to the sub-carriage 25 to obtain a predetermined inclination angle θ, the above-mentioned idle distance can be almost eliminated. it can. Therefore, it is possible to reduce the operation stroke by reducing the idling distance.

In this configuration example 2, since the individual droplet discharge heads 22 mounted on the sub-carriage 25 are rotated so as to be able to set a predetermined inclination angle θ, for example, the droplet discharge heads are used. In order to keep the ratio of the ejection width t of 22 to the interval s constant, it is necessary to correct the intervals of the individual droplet ejection heads 22 according to the change of the inclination angle θ. For example, if the substantial ejection width of the droplet ejection head 22 and the interval s are set to be the same, the inclination angle θ is 0.
However, when the inclination angle θ is not 0, the interval s must match the substantial ejection width t · cos θ. Therefore, when the inclination angle θ is set in accordance with the structural period of the pattern to be formed, each droplet discharge head 2 is adjusted in accordance with this inclination angle θ.
2 is moved along the guide path 25c, and the mutual distance is corrected to s = t · cos θ as described above.

(Structure Example 3) Next, the structure of the droplet discharge unit 25W which is the structure example 3 will be described with reference to FIG. The droplet discharge unit 25W is similar to the above-described configuration example 1 and configuration example 2 in that a plurality of droplet discharge heads 22 are arranged, but the arrangement mode is different. Also in the configuration example 3, the droplet discharge head 22 is attached to the sub-carriage 25. However, this configuration example 3 has two rows of the droplet discharge heads 22 that are offset in the direction orthogonal to the arrangement direction of the nozzles 28 (28A and 28B) (that is, the reference direction S). Since the droplet discharge heads 22 are arranged in a staggered manner, the droplet discharge unit 25W as a whole has a continuous and integrated nozzle row. That is, the droplet discharge heads 22 included in one row
Discharge width t of the droplet discharge heads 22 included in the other row
And the ejection width t of are adjacent to and continuous with each other.

In this configuration example 3, the droplet discharge unit 25
When viewed as W as a whole, it can be used in the same manner as in the case where a continuous single nozzle row is formed in an integrated droplet discharge head. Therefore, it is not necessary to form a new droplet discharge head having a different number of nozzles, and the number of nozzles can be increased only by using a plurality of existing droplet discharge heads 22. Further, unlike the configuration examples 1 and 2 described above, since the space s does not exist, it is not necessary to provide an extra scanning step for processing the unprocessed region corresponding to the space s.

Note that, also in the configuration example 3, the configuration example 1
As shown in, the entire droplet discharge unit 25W may be configured to be rotatable around a predetermined rotation center, and the required inclination angle θ may be set by this rotation. Further, as shown in the configuration example 2, the sub-carriage 25
The droplet discharge heads 22 are individually attached so as to be rotatable and translatable with respect to
The interval of the droplet discharge heads 22 corresponding to this may be set.

[Example of Film Forming Pattern of Object] Next, an example of film forming pattern of the mother substrate 12 to be an object in each of the above-described embodiments and configuration examples will be described. FIG. 60 shows
6 is a partially enlarged plan view showing a film forming pattern of the mother substrate 12. FIG. On the mother substrate 12, pattern formation regions (unit regions) 11 similar to the above are formed vertically and horizontally, and a plurality of regions 7 are provided in the pattern formation region 11 in a predetermined array pattern. Here, the pattern formation region 1
When the color filter substrate is formed by separating 1 from each other, the area 7 becomes a filter element area, and for example, appropriate filter elements such as R (red), G (green), and B (blue) are formed. Are arranged in an appropriate arrangement pattern such as a stripe arrangement, a delta arrangement, or an oblique mosaic arrangement. Further, when a display device such as an EL device or a plasma display panel is formed by separating the pattern formation region 11, the above-mentioned region 7 becomes a display dot, and the light emitting layer and the phosphor are arranged in an appropriate array pattern. Are arranged.

In the mother substrate 12, the X direction between the pattern forming regions 11 (for example, the short side direction M described above).
The interval Dx seen in FIG. 3 is configured to be a natural number multiple of the array period dx seen in the X direction of the area 7 in each pattern formation area 11. In addition, Y between the pattern formation regions 11
The distance Dy when viewed in the direction (for example, the above-described longitudinal direction L) is
It is configured to be a natural number multiple of the array period dy seen in the Y direction of the area 7 in each pattern formation area 11.
With this configuration, the plurality of pattern forming regions 11 are formed by the rows of the nozzles 27 arranged at regular intervals.
Since it is possible to discharge the liquid droplets to each region 7 at a time over the above period, it is possible to perform the manufacturing more efficiently.

(Other Embodiments) The present invention has been described above with reference to the preferred embodiments. However, the present invention is not limited to the above-mentioned embodiments, and the following modifications are also possible. Any other specific structure and shape can be set as long as the object of the present invention can be achieved.

That is, for example, in the color filter manufacturing apparatus (droplet ejection apparatus) shown in FIGS. 8 and 9, the droplet ejection head 22 is moved in the scanning direction X to scan the mother substrate 12, and the mother substrate 12 is scanned. By moving 12 by the feeding drive device 21, the feeding operation of the droplet discharge head 22 to the mother substrate 12 is realized. On the contrary, by moving the mother substrate 12, scanning is performed,
The feeding operation can also be executed by moving the droplet discharge head 22. Further, at least one of the droplet discharge heads is relatively moved, for example, the mother substrate 12 is moved without moving the droplet discharge heads 22 or both are moved in opposite directions. Any configuration can be adopted as long as 22 moves relatively along the surface of the mother substrate 12.

Further, in the above embodiment, the droplet discharge means (inkjet head) 421 having a structure for discharging ink by utilizing the flexural deformation of the piezoelectric element is used, but an inkjet head having any other structure, for example, It is also possible to use an inkjet head of a type that ejects ink by bubbles generated by heating.

Further, in the embodiment shown in FIGS. 27 to 37, the ink jet head 421 has the nozzles 466 which are arranged substantially linearly in two lines in a substantially straight line. However, the invention is not limited to two lines and a plurality of lines may be used. Can be Further, they may not be evenly spaced, and may not be arranged in a straight line.

The droplet discharge devices 16 and 401 are used for manufacturing the color filter 1 and the liquid crystal device 10.
1. The FED is not limited to the EL device 201.
(Field Emission Display) and other electron emission devices, PDP (Plasma Displacement)
play panel: plasma display panel), an electrophoretic device, that is, an electrode disposed so as to eject ink, which is a functional liquid material containing charged particles, into the recesses between the partition walls of each pixel, and sandwich each pixel vertically. It has a substrate (base material) such as a device that applies a voltage between them to draw charged particles to one electrode side to display at each pixel, a thin cathode ray tube, a CRT (Cathode-Ray Tube) display, etc. However, it can be used for various display devices (electro-optical devices) having a step of forming a predetermined layer in a region above it.

The apparatus and method of the present invention is a device having a substrate (base material) including a color filter and a display device (electro-optical device), and a step of ejecting droplets 8 onto the substrate (base material). Can be used in the manufacturing process of various devices. For example, in order to form electric wiring of a printed circuit board, a liquid metal, a conductive material, a metal-containing paint, or the like is ejected by an inkjet method to form a metal wiring, or a fine microstructure formed on a base material. A structure in which an optical member is formed by ejecting a lens by an ink jet method, a composition in which an ink is ejected by an ink jet method so that a resist applied on a substrate is applied only to a necessary portion, and light is transmitted to a transparent substrate such as plastic A structure for forming a light-scattering plate by ejecting and forming projections or minute white patterns to be scattered by an inkjet method, DN
A (deoxyribonucleic acid) chip has RNA (ri
bonucleic acid: ribonucleic acid) is ejected by an inkjet method to produce a fluorescent labeled probe and hybridize on a DNA chip. Samples, antibodies, DNA (deoxyribonuc)
leic acid: deoxyribonucleic acid) can be ejected by an inkjet method to form a biochip.

Also, as the liquid crystal device 101, a partition wall 6 surrounding a pixel electrode such as an active matrix liquid crystal panel in which a pixel such as a transistor such as a TFT or an active element of TFD is formed, and a recess formed by this partition wall 6. Ink is ejected by an ink jet method to form the color filter 1, and a mixture of a color material and a conductive material as ink is ejected on the pixel electrode by an ink jet method to be ejected on the pixel electrode. Any of the electro-optical systems of the liquid crystal device 101, such as a configuration in which the color filter 1 to be formed is formed as a conductive color filter and a configuration in which particles of spacers for holding the gap between the substrates are ejected and formed by an inkjet method. It can also be applied to parts.

Furthermore, not limited to the color filter 1,
The present invention can be applied to any other electro-optical device such as the L device 201, and the EL device 201 also has a striped type in which ELs corresponding to the three colors of R, G, and B are formed in a strip shape, or as described above. An active matrix type display device including a transistor for controlling a current flowing through a light emitting layer for each pixel,
Or those applied to passive matrix type,
Either configuration is possible.

The electronic equipment in which the electro-optical device according to each of the above-described embodiments is incorporated is not limited to the personal computer 490 as shown in FIG. 53, but a portable telephone 491 or PHS (Personal Handy p as shown in FIG. 54).
mobile phone such as hone system), electronic notebook, pager, POS (Point Of Sales) terminal, IC card, mini disk player, liquid crystal projector, engineering work station (Engineering Work Station:
EWS), word processors, televisions, viewfinder or monitor direct-view video tape recorders, electronic desk calculators, car navigation devices, devices with touch panels, clocks, game machines, and various other electronic devices.

Besides, the specific structure and procedure for carrying out the present invention may be other structures and procedures within the range in which the object of the present invention can be achieved. For example, in the embodiment described with reference to FIGS. 28, 36, and 37, all of the inkjet heads 421 are arranged to be tilted in the same direction, but one of the two rows is tilted in the other row. The inkjet heads may be arranged in a direction rotated by 90 ° from the angle, and the two inkjet head arrays may be arranged in a “C” shape with an angle of 90 ° to each other. The matching heads may be arranged in a “C” shape with an angle of 90 ° to each other. As described above, various modifications are included in the scope of the present invention as long as they do not violate the spirit of the present invention.

The film forming method and the film forming apparatus of the present invention can be widely used for forming an arbitrary film on the surface of an arbitrary object. For example, when a film is uniformly formed on the surface of an object, a plurality of droplets are sequentially ejected along at least two different scanning directions, so that film formation unevenness due to the scanning direction can be reduced. . Examples of such a film include a photosensitive resist film and a protective coating film. Further, it can be used not only as a film but also when forming various structures on the surface of an object. For example, there is a case where columnar spacers are dispersedly formed on the surface of the substrate. A liquid crystal display device, an input pad device, and the like are used as a device using a substrate provided with such columnar spacers.

According to the present invention, it is possible to set two or more different scanning directions relative to the object to be ejected when ejecting droplets of the liquid material, so that various kinds of objects can be ejected. It is possible to efficiently attach the material. Further, by setting the scanning direction for the discharged object to two or more different directions, it is possible to reduce striped material unevenness due to the scanning direction.

[Brief description of drawings]

FIG. 1 is a plan view schematically showing main steps of an embodiment of a method for manufacturing a color filter according to the present invention.

FIG. 2 is a plan view schematically showing main steps of another embodiment of the color filter manufacturing method according to the present invention.

FIG. 3 is a plan view schematically showing main steps of still another embodiment of the method for manufacturing a color filter according to the present invention.

FIG. 4 is a plan view schematically showing main steps of still another embodiment of the color filter manufacturing method according to the present invention.

FIG. 5 is a plan view showing an embodiment of a color filter according to the present invention and an embodiment of a mother substrate which is a basis thereof.

FIG. 6 is a diagram schematically showing the manufacturing process of the color filter by using the cross-sectional portion taken along the line VI-VI of FIG.

FIG. 7 is a diagram showing an arrangement example of R, G, and B color display dots in a color filter.

8 is a main part of each manufacturing apparatus such as a droplet discharge apparatus according to the present invention, a color filter manufacturing apparatus, a liquid crystal device manufacturing apparatus according to the present invention, and an EL device manufacturing apparatus according to the present invention. It is a perspective view showing one embodiment of a drop discharge device.

9 is an enlarged perspective view showing a main part of the apparatus shown in FIG.

FIG. 10 is an enlarged perspective view showing an inkjet head which is a main part of the apparatus of FIG.

FIG. 11 is a perspective view showing a modified example of the inkjet head.

12A and 12B are diagrams showing the internal structure of the inkjet head, in which FIG. 12A is a partially cutaway perspective view, and FIG. 12B is a sectional structure taken along line JJ of FIG.

FIG. 13 is a plan view showing another modified example of the inkjet head.

14 is a block diagram showing an electrical control system used in the inkjet head device of FIG.

FIG. 15 is a flowchart showing the flow of control executed by the control system of FIG.

FIG. 16 is a perspective view showing still another modified example of the inkjet head.

FIG. 17 is a process drawing showing an embodiment of a method for manufacturing a liquid crystal device according to the present invention.

FIG. 18 is a perspective view showing an example of a liquid crystal device manufactured by the method for manufacturing a liquid crystal device according to the present invention in an exploded state.

19 is a cross-sectional view showing a cross-sectional structure of the liquid crystal device according to line IX-IX in FIG.

FIG. 20 is a process drawing showing the embodiment of the method for manufacturing the EL device according to the present invention.

21 is a cross-sectional view of an EL device corresponding to the process drawing shown in FIG.

FIG. 22 is a plan view (a) and (b) showing the attitude of the mother substrate on the table of the droplet discharge device according to the embodiment of the present invention.

FIG. 23 is a plan view (a) and (b) showing the posture of another mother substrate on the table of the droplet discharge device.

FIG. 24 is a schematic configuration diagram showing a configuration example of a manufacturing apparatus including a plurality of droplet discharge devices.

FIG. 25 is a schematic plan view (a) to (c) showing a method of changing the attitude of the mother substrate during the processing in the droplet discharge device.
Is.

FIG. 26 is a schematic plan view (a) and (b) showing another method of changing the attitude of the mother substrate during the process in the droplet discharge device.

FIG. 27 is a partially cutaway perspective view showing a droplet discharge device of a color filter manufacturing apparatus according to the present invention.

FIG. 28 is a plan view showing a head unit of the same droplet discharge device.

FIG. 29 is a side view of the above.

FIG. 30 is a front view of the same.

FIG. 31 is a sectional view of the same.

FIG. 32 is an exploded perspective view showing the same head device.

FIG. 33 is an exploded perspective view showing the inkjet head of the same.

FIG. 34 is an explanatory diagram illustrating an operation of ejecting the filter element material of the inkjet head of the same.

FIG. 35 is an explanatory diagram explaining the discharge amount of the filter element material of the inkjet head.

FIG. 36 is a schematic view illustrating an arrangement state of the inkjet heads.

FIG. 37 is a partially enlarged schematic view for explaining the arrangement state of the inkjet heads.

38A and 38B are schematic diagrams showing a color filter manufactured by the above-described color filter manufacturing apparatus, in which FIG. 38A is a plan view of the color filter, and FIG. 38B is a sectional view taken along line XX of FIG. is there.

FIG. 39 is a manufacturing step sectional view explaining the procedure for manufacturing the same color filter.

FIG. 40 is a circuit diagram showing a part of a display device using an EL display element according to the electro-optical device of the invention.

FIG. 41 is an enlarged plan view showing a planar structure of a pixel region of the same display device.

FIG. 42 is a manufacturing step sectional view showing the procedure of the pretreatment of the manufacturing step of the display device.

FIG. 43 is a manufacturing step sectional view showing the procedure of discharging the EL light emitting material in the manufacturing step of the same display device.

FIG. 44 is a manufacturing step sectional view showing the procedure of discharging the EL light emitting material in the manufacturing step of the display device.

FIG. 45 is an enlarged cross-sectional view showing a planar structure of a pixel region of a display device using an EL display element according to the electro-optical device of the invention.

FIG. 46 is an enlarged view showing a structure of a pixel region of a display device using an EL display element according to an electro-optical device of the present invention, where (A) is a planar structure and (B) is B- of (A). It is a B line sectional view.

FIG. 47 is a manufacturing process sectional view showing a manufacturing process for manufacturing a display device using an EL display element according to the electro-optical device of the present invention.

FIG. 48 is a manufacturing process sectional view showing a manufacturing process for manufacturing a display device using an EL display element according to the electro-optical device of the present invention.

FIG. 49 is a manufacturing process sectional view showing a manufacturing process for manufacturing a display device using an EL display element according to an electro-optical device of the present invention.

FIG. 50 is a manufacturing process sectional view showing a manufacturing process for manufacturing a display device using an EL display element according to an electro-optical device of the present invention.

FIG. 51 is a manufacturing process sectional view showing a manufacturing process for manufacturing a display device using an EL display element according to the electro-optical device of the present invention.

FIG. 52 is a manufacturing process sectional view showing a manufacturing process for manufacturing a display device using an EL display element according to the electro-optical device of the present invention.

FIG. 53 is a perspective view showing a personal computer which is an electric device including the electro-optical device of the above.

FIG. 54 is a perspective view showing a mobile phone which is an electric device including the electro-optical device of the above.

FIG. 55 is a plan view of a droplet discharge unit in which a plurality of droplet discharge heads are arranged.

FIG. 56 is an explanatory diagram showing a processing method using a droplet discharge unit.

57A is an explanatory diagram showing a posture of the droplet discharge unit with respect to the substrate 12. FIG.

FIG. 57B is an explanatory diagram showing a posture of the droplet discharge unit with respect to the substrate 12.

FIG. 58 is a plan view of a droplet discharge unit in which a plurality of droplet discharge heads are arranged.

FIG. 59 is a plan view of a droplet discharge unit in which a plurality of droplet discharge heads are arranged.

FIG. 60 is an explanatory diagram showing an arrangement mode of pattern formation regions on the mother substrate.

FIG. 61 is a diagram showing an example of a conventional color filter manufacturing method.

FIG. 62 is a diagram for explaining characteristics of a conventional color filter.

[Explanation of symbols]

1,118 ... Color filter, 2,107a, 10
7b Substrate that is an object to be ejected, 3 ... Filter element, 12 ... Mother substrate that is a substrate, 13 ... Filter element material as liquid material, 16 ... Droplet ejecting device (manufacture of color filter Device), 19, 42
Reference numeral 5 ... Scan drive device constituting moving means (head scanning means) 21, 427 ... Feed drive device constituting moving means (head feeding means), 25 ... Holding means for droplet discharge head A certain carriage, 27,466 ... Nozzle, 49 ... A table which is a means for holding an object to be discharged,
101 ... Liquid crystal device which is an electro-optical device, 102 ...
.Liquid crystal panels 111a and 111b which are electro-optical devices
... Substrate that is the object to be ejected, 114a, 114b ...
Electrode, 201 ... EL device which is an electro-optical device, 20
2 ... Pixel electrode, 204 ... Substrate transparent substrate,
213 ... Counter electrode, 405R (405G, 405
B) ... Device for manufacturing color filter as droplet discharge device, 421 ... Ink jet head which is droplet discharge head, 426 ... Carriage as holding means,
501 ... Display device which is an electro-optical device, 502 ...
.Display substrates 540A, 5 serving as substrates to be ejected
40B ... Optical material as functional liquid, L ...
Liquid crystal, M ... Filter element material,

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) H05B 33/14 H05B 33/14 A (72) Inventor Tatsuya Ito 3-3-5 Yamato, Suwa City, Nagano Prefecture Seiko Epson Corporation F-term (reference) 2H048 BA02 BA64 BB02 BB42 2H091 FA02Y FA03Y FA04Y FA14Y FA14Z FA23Z FA35Z FA45Z FC10 FC12 FC29 FD04 FD05 FD06 LA12 LA15 LA30 3K007 AB18 BB06 DB03 FA01 5G12 BB0712

Claims (28)

[Claims] 1. A film forming method for forming a film by ejecting droplets of a liquid material onto a surface of an object by a droplet ejecting means, wherein the droplet ejecting means forms a surface on the object. A first scanning step of sequentially ejecting the plurality of droplets while scanning in a first direction along a line, and the droplet ejecting means to the object along the surface different from the first direction. A second scanning step of sequentially ejecting the plurality of droplets while scanning in two directions. 2. A direction in which the first direction and the second direction intersect with each other by rotating the object in different postures in the first scanning step and the second scanning step. The film forming method according to claim 1, wherein 3. Droplet ejecting means for ejecting droplets of a liquid material onto the surface of an object, and moving means for relatively moving the object and the droplet ejecting means along the surface. A film forming apparatus having: a liquid discharge device capable of relatively moving the droplet discharge means in at least two mutually different directions along the surface with respect to the object; A film forming apparatus, wherein the plurality of droplets can be sequentially ejected during any movement. 4. A posture positioning means capable of setting the target object in at least two postures by rotating the target object.
The film forming apparatus according to. 5. A droplet ejection device for ejecting a liquid material onto an ejection target, the droplet ejection head ejecting the liquid material, and the droplet ejection head facing the ejection target. And a posture positioning unit that positions the plane posture of the discharge target in a state in which the discharge target relatively moves in a direction along the surface of the discharge target. A droplet discharge device, which is configured to be capable of positioning discharged substances in two or more different plane postures. 6. The posture positioning means has a plurality of observation means for observing different parts of the discharged object, and is configured to use the observation means different from each other in the two or more different plane postures. The droplet discharge device according to claim 5, wherein: 7. A droplet ejection device for ejecting a liquid material onto an object to be ejected, the droplet ejection head ejecting the liquid material, and the droplet ejection head and the object to be ejected facing each other. The liquid droplet ejection head includes a moving unit that relatively moves the ejected object in a direction along the surface of the ejected object and an attitude positioning unit that positions a planar attitude of the ejected object. It is possible to set the scanning direction in which the liquid material droplets are ejected to the ejected material while ejecting the liquid material, and the plane orientation of the ejection target object positioned by the orientation positioning means to two or more different positional relationships. A droplet discharge device characterized by being provided. 8. The posture positioning means has a plurality of observation means for observing different parts of the discharged object, and is configured to use the observation means different from each other in the two or more different positional relationships. The droplet discharge device according to claim 7, wherein 9. A droplet ejection device for ejecting a liquid material onto an ejection target to form a film, the droplet ejection head ejecting the liquid material, the droplet ejection head and the ejection target. And a posture positioning unit configured to position a plane posture of the discharge target, the moving unit relatively moving the discharge target in a direction along a surface of the discharge target in a state of facing the discharge target. The scanning direction in which the head moves while ejecting droplets of the liquid material onto the ejection target can be changed to a different direction with respect to the ejection target positioned by the posture positioning unit during processing. A droplet discharge device characterized by being provided. 10. The posture positioning means has a plurality of observation means for observing different portions of the discharged object, and is configured to use the observation means different from each other before and after the change of the scanning direction. The droplet discharge device according to claim 9, wherein 11. The liquid droplet ejecting apparatus according to claim 10, wherein the observing unit is configured to be capable of observing a plurality of portions of the object to be ejected. 12. A method of manufacturing a color filter, comprising: a discharge film forming step of discharging a liquid material onto an object to be ejected to form a filter element, the object being ejected along a first scanning direction. A first discharging step of continuously discharging the droplets of the liquid material, and a droplet of the liquid material on the object to be discharged along a second scanning direction different from the first scanning direction. A second discharging step of continuously discharging, and a method of manufacturing a color filter. 13. In the first discharging step, the first filter element having a first hue is formed in a first region of the discharged object, and in the second discharging step, the discharged object is formed. 13. The color according to claim 12, wherein the second filter element having a second hue different from the first hue is formed on a second area different from the first area. Filter manufacturing method. 14. The filter element that forms the filter element that exhibits three hues, and that exhibits the hue that causes the largest color unevenness due to the scanning direction of the droplets of the liquid material, and the other two colors. The method of manufacturing a color filter according to claim 13, wherein the filter element that exhibits a hue is formed at a different ejection stage. 15. The filter element is formed of a plurality of droplets, a part of the plurality of droplets is discharged in the first discharging step, and a portion of the plurality of droplets is discharged in the second discharging step. 15. The method of manufacturing a color filter according to claim 12, wherein the remaining portion of the color filter is ejected. 16. A display device comprising a color filter having a filter element formed by ejecting a liquid material onto an object to be ejected to form a film, wherein the color filter is arranged along a plurality of different scanning directions. A display device provided with a color filter, characterized in that the display device is composed of droplets of the liquid material that are continuously discharged. 17. The color filter has a plurality of types of filter elements having different hues, the filter elements being constituted by liquid droplets of the liquid material continuously ejected along mutually different scanning directions. Claim 1
A display device comprising the color filter according to item 6. 18. The filter element having the three color hues, the filter element having the hue that causes the largest color unevenness due to the scanning direction of the liquid material droplets, and the other two colors. The display device having a color filter according to claim 17, wherein the filter element exhibiting a hue is continuously formed along a different scanning direction. 19. The filter element according to claim 16, wherein the filter element is formed by mixing droplets of the liquid material that are continuously discharged along different scanning directions. A display device comprising the color filter according to item 1. 20. A display device having a color filter according to claim 16, further comprising a liquid crystal panel that planarly overlaps with the color filter. 21. A display device having a color filter according to claim 16, further comprising an EL light emitting layer that planarly overlaps with the color filter. 22. An electronic device having a display device provided with the color filter according to claim 16. 23. A method of manufacturing a display device, comprising a discharge film forming step of discharging a liquid material onto a base material to form a film, wherein the liquid material is formed on the base material along a first scanning direction. A first discharging step of continuously discharging the liquid droplets of the liquid crystal, and a first discharging step of continuously discharging the liquid material droplets onto the base material along a second scanning direction different from the first scanning direction. 2. A method of manufacturing a display device, comprising: 2 ejection steps. 24. The method of manufacturing a display device according to claim 23, wherein a display dot is formed by the droplet of the liquid material. 25. The display dots are formed by a plurality of droplets, some of the plurality of droplets are ejected in the first ejecting step, and some of the plurality of droplets are ejected in the second ejecting step. The remaining portion of the ink is discharged.
4. The method for manufacturing the display device according to 4. 26. A display device comprising display dots formed by discharging a liquid material onto an object to be discharged to form a film, wherein the display dots are continuously discharged along a plurality of different scanning directions. A display device, characterized in that the display device is constituted by the formed liquid droplets of the liquid material. 27. The display device according to claim 26, further comprising the display dot formed by mixing droplets of the liquid material that are continuously discharged along different scanning directions. 28. An electronic device having the display device according to claim 26 or 27.