JP2008068190A - Liquid droplet discharging method - Google Patents

Liquid droplet discharging method Download PDF

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JP2008068190A
JP2008068190A JP2006248166A JP2006248166A JP2008068190A JP 2008068190 A JP2008068190 A JP 2008068190A JP 2006248166 A JP2006248166 A JP 2006248166A JP 2006248166 A JP2006248166 A JP 2006248166A JP 2008068190 A JP2008068190 A JP 2008068190A
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orifices
adherend
orifice
discharge head
droplet
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JP4923890B2 (en
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Osamu Machida
治 町田
Yoshinari Suzuki
能成 鈴木
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Ricoh Printing Systems Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid droplet discharging method capable of dispersing the difference between discharge amounts. <P>SOLUTION: A discharge head 3 having a large number of orifices 11 linearly arranged thereto, an adherend 31 receiving the liquid droplets discharged from the orifices 11 to form dot rows, a moving means for relatively reciprocally moving the discharge head 3 and the adherend 31 are provided. The orifices 11 of the discharge head 3 are successively divided into a plurality of groups along the arranging direction of the orifices 11 so as to discharge the liquid droplets from the orifices 11 at every group. The discharge head 3 and the adherend 31 are relatively moved by the moving means so that the dot rows are formed on the adherend 31 in order different from the order of the groups of the discharge head 3. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は液滴吐出装置の液滴吐出方法に係り、特にインクジェット方式の液滴吐出方法に関するものである。   The present invention relates to a droplet discharge method for a droplet discharge device, and more particularly to an inkjet droplet discharge method.

インクジェット方式はオリフィスから必要なときに液滴を吐出できることから、任意のパターンを容易に形成でき、しかも無駄に排出される溶液が少ないため環境面からも有利である。   Since the ink jet method can eject droplets from the orifice when necessary, an arbitrary pattern can be easily formed, and since there are few solutions that are wasted and discharged, it is advantageous from the environmental viewpoint.

このインクジェット方式による液滴吐出装置の応用例として、液晶表示装置のカラーフィルタ製造技術がある。このカラーフィルタは一般には、現像、露光、エッチングなどの多くのフォトリソグラフィ工程をR,G,Bの3色毎に繰返すことによって製造していたため、多くのプロセスが必要であった。これに対してインクジェット方式でカラーフィルタを製造する場合、R,G,Bの3色のインクを各インクジェットヘッドに充填し、必要な位置に必要な量だけインクを吐出して、硬化させるだけで製造できる。   As an application example of the ink jet type droplet discharge device, there is a color filter manufacturing technique for a liquid crystal display device. Since this color filter is generally manufactured by repeating many photolithography processes such as development, exposure, and etching for each of the three colors R, G, and B, many processes are required. On the other hand, when manufacturing a color filter by the ink jet method, each ink jet head is filled with inks of three colors R, G, and B, and only a necessary amount is ejected to a necessary position and cured. Can be manufactured.

また液晶表示装置では、2枚の液晶基板の間隔を一定に維持するため、微粒子状のスペーサを液晶基板の間に配置している。従来はスプレー式散布装置などを用いてスペーサを液晶基板上に散布していたが、この方法はスペーサが不均一に散布され易く、液晶基板の間隔を一定に維持できず、表示品質の低下を招く。   Further, in the liquid crystal display device, in order to keep the interval between the two liquid crystal substrates constant, a particulate spacer is disposed between the liquid crystal substrates. Conventionally, spacers were sprayed on the liquid crystal substrate using a spray-type spraying device, etc., but this method tends to spray the spacers non-uniformly, so that the distance between the liquid crystal substrates cannot be kept constant and the display quality deteriorates. Invite.

このような欠点を解消するため、インクジェット方式による液滴吐出装置でスペーサを含有した塗布液を液晶基板上に吐出して、スペーサを付着することが行なわれている。この液滴吐出装置によれば、所定の位置にスペーサを配置することができ、また多数のオリフィスを有する吐出ヘッドを用いれば、多数の指定位置に同時にスペーサを配置することができ、生産効率が良好である。   In order to eliminate such disadvantages, a spacer is attached by discharging a coating liquid containing a spacer onto a liquid crystal substrate with an ink jet type droplet discharge device. According to this droplet discharge device, the spacer can be arranged at a predetermined position, and if a discharge head having a large number of orifices is used, the spacer can be disposed at a large number of designated positions at the same time. It is good.

インクジェット方式によるスペーサ塗布に関しては、下記の特許文献を挙げることができる。   The following patent documents can be mentioned about the spacer application by an inkjet system.

特開平11−240873号公報JP-A-11-240873

ところでこの種の液滴吐出装置は多数のオリフィスを列設した吐出ヘッドが用いられているが、オリフィス間、例えば吐出ヘッドの上流部と中間部と下流部のオリフィスの間で液滴吐出量に差が出ることがある。そのため前記カラーフィルタを製造する場合、オリフィス間の液滴吐出量の差がインク濃度差として現れ、表示パネル上にスジムラが形成されることがある。   By the way, this type of droplet discharge device uses a discharge head in which a large number of orifices are arranged, but the amount of droplet discharge is reduced between the orifices, for example, between the upstream, intermediate and downstream orifices of the discharge head. There may be a difference. Therefore, when the color filter is manufactured, a difference in droplet discharge amount between the orifices appears as an ink density difference, and stripes may be formed on the display panel.

また前記スペーサ塗布の場合、液と共に吐出されるスペーサの個数は吐出量にほぼ比例するから、吐出量の差はスペーサ個数のバラツキとして現れ、液晶基板を貼り合わせた際にギャップに差が生じることがある。このギャップの差は表示パネル上において色ムラやスジムラとして現れ、液晶表示装置の品質低下を招く。   In the case of the spacer application, the number of spacers discharged together with the liquid is almost proportional to the discharge amount, so the difference in discharge amount appears as a variation in the number of spacers, and a difference occurs in the gap when the liquid crystal substrates are bonded together. There is. This gap difference appears as color unevenness or unevenness on the display panel, leading to a deterioration in the quality of the liquid crystal display device.

本発明の目的は、液滴吐出量の差が分散できる液滴吐出方法を提供することにある。   An object of the present invention is to provide a droplet discharge method capable of dispersing a difference in droplet discharge amount.

前記目的を達成するため本発明の第1の手段は、
多数のオリフィスを直線上に配列した吐出ヘッドと、
その吐出ヘッドのオリフィスから吐出された液滴を着弾して前記オリフィスの配列方向に沿ってドット列を形成する被着体と、
前記吐出ヘッドと被着体とを前記オリフィスの配列方向ならびにその配列方向と直交する方向に沿って相対的に往復移動する移動手段とを備え、
前記移動手段により前記吐出ヘッドと被着体とを相対的に移動させて、前記オリフィスから液滴を吐出して前記被着体上にドット列を形成する液滴吐出方法において、
前記吐出ヘッド上のオリフィスをその配列方向に沿って順番に複数のグループに分けて、そのグループ毎にオリフィスから液滴を吐出するようにしており、
前記吐出ヘッドのグループの順番とは異なる順番で前記ドット列が前記被着体上に形成されるように、前記移動手段により前記吐出ヘッドと被着体とを相対的に移動させて前記オリフィスから液滴を吐出することを特徴とするものである。
In order to achieve the above object, the first means of the present invention is as follows:
A discharge head in which a large number of orifices are arranged in a straight line;
An adherend for landing a droplet discharged from the orifice of the discharge head to form a dot row along the direction of arrangement of the orifice;
Moving means for relatively reciprocating the discharge head and the adherend along the direction in which the orifices are arranged and the direction perpendicular to the arrangement direction;
In the droplet discharge method of forming a dot row on the adherend by discharging the droplet from the orifice by relatively moving the discharge head and the adherend by the moving means,
The orifices on the ejection head are divided into a plurality of groups in order along the arrangement direction, and droplets are ejected from the orifices for each group.
The moving means relatively moves the discharge head and the adherend from the orifice so that the dot rows are formed on the adherend in an order different from the order of the groups of the discharge heads. It is characterized by discharging droplets.

本発明の第2の手段は、
多数のオリフィスを直接上に配列した吐出ヘッドと、
その吐出ヘッドのオリフィスから吐出された液滴を着弾して前記オリフィスの配列方向に沿って延びるドット列を前記オリフィスの配列方向と直交する方向に多数並設する被着体と、
前記吐出ヘッドと被着体とを前記オリフィスの配列方向ならびにその配列方向と直交する方向に沿って相対的に往復移動する移動手段とを備え、
前記移動手段により前記吐出ヘッドと被着体とを相対的に移動させて、前記オリフィスから液滴を吐出して前記被着体上にドット列を形成する液滴吐出方法において、
前記吐出ヘッド上のオリフィスをその配列方向に沿って複数のグループに分けて、そのグループ毎にオリフィスから液滴を吐出するようになっており、
前記吐出ヘッドのグループの順番とは異なる順番で前記ドット列が形成され、
かつ、隣り合う前記ドット列の配列方向と直交する方向のドット部分が、前記吐出ヘッドの異なるグループによって形成されるように、
前記移動手段により前記吐出ヘッドと被着体とを相対的に移動させて前記オリフィスから液滴を吐出することを特徴とするものである。
The second means of the present invention is:
A discharge head in which a large number of orifices are arranged directly above;
An adherend in which a large number of dot rows that land along droplets discharged from the orifices of the discharge head and extend in the direction in which the orifices are arranged are arranged in a direction perpendicular to the direction in which the orifices are arranged;
Moving means for relatively reciprocating the discharge head and the adherend along the direction in which the orifices are arranged and the direction perpendicular to the arrangement direction;
In the droplet discharge method of forming a dot row on the adherend by discharging the droplet from the orifice by relatively moving the discharge head and the adherend by the moving means,
The orifices on the ejection head are divided into a plurality of groups along the arrangement direction, and droplets are ejected from the orifices for each group.
The dot rows are formed in an order different from the order of the groups of the ejection heads,
And the dot portion in the direction orthogonal to the arrangement direction of the adjacent dot rows is formed by different groups of the ejection heads,
The moving means relatively moves the discharge head and the adherend to discharge droplets from the orifice.

本発明の第3の手段は前記第1の手段または第2の手段において、
前記被着体が液晶基板であって、その2枚の液晶基板の隙間を維持するためのスペーサ粒子を含有した液滴を前記オリフィスから前記液晶基板の表面に向けて吐出することを特徴とするものである。
According to a third means of the present invention, in the first means or the second means,
The adherend is a liquid crystal substrate, and droplets containing spacer particles for maintaining a gap between the two liquid crystal substrates are discharged from the orifice toward the surface of the liquid crystal substrate. Is.

本発明は前述のような構成になっており、被着体上での液滴吐出量の差が分散でき、良好な液滴の吐出が可能となる。   The present invention is configured as described above, and the difference in the droplet discharge amount on the adherend can be dispersed, so that excellent droplet discharge is possible.

次に本発明の実施形態を図と共に説明する。図10は本発明の実施形態に係る液滴吐出装置の全体の概略構成図、図11はその装置に搭載する吐出ヘッドの一部拡大断面図である。   Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 10 is a schematic configuration diagram of an entire droplet discharge apparatus according to an embodiment of the present invention, and FIG. 11 is a partially enlarged cross-sectional view of a discharge head mounted on the apparatus.

液滴吐出装置は図10に示すように、マザー基板1を保持する基板ホルダー2がY方向に往復移動可能に設置され、マザー基板1の上方に吐出ヘッド3がZ方向に往復移動可能に設置されている。   As shown in FIG. 10, in the droplet discharge device, a substrate holder 2 holding the mother substrate 1 is installed so as to be able to reciprocate in the Y direction, and an ejection head 3 is installed above the mother substrate 1 so as to be able to reciprocate in the Z direction. Has been.

吐出ヘッド3はZ方向の移動ガイド5を介してX方向の移動ガイド4に支持されているとともに、フレキシブルな溶液供給パイプ6を介して溶液タンク(図示せず)に接続されている。吐出ヘッド3の待機位置にヘッド保全部7が設けられている。   The discharge head 3 is supported by the movement guide 4 in the X direction via the movement guide 5 in the Z direction, and is connected to a solution tank (not shown) via a flexible solution supply pipe 6. A head maintenance unit 7 is provided at the standby position of the ejection head 3.

吐出ヘッド3は図11に示すような断面構造を有している。図中の11はオリフィス、12は加圧室、13は振動板、14は圧電素子、15a,15bは信号入力端子、16は圧電素子固定板、17は共通塗布液供給管18と加圧室12に連通して加圧室12への塗布液の流入を制御するリストリクタ、18は共通塗布液供給管、19はフィルタ、20は振動板13と圧電素子14を接着する接着剤、21はリストリクタプレート、22は加圧室プレート、23はオリフィスプレート、24は振動板13を補強する支持板、25はハウジング、26はフィルタプレートである。   The discharge head 3 has a cross-sectional structure as shown in FIG. In the figure, 11 is an orifice, 12 is a pressurizing chamber, 13 is a diaphragm, 14 is a piezoelectric element, 15a and 15b are signal input terminals, 16 is a piezoelectric element fixing plate, 17 is a common coating liquid supply pipe 18 and a pressurizing chamber. 12 is a restrictor that controls the flow of the coating liquid into the pressurizing chamber 12, 18 is a common coating liquid supply pipe, 19 is a filter, 20 is an adhesive that bonds the diaphragm 13 and the piezoelectric element 14, and 21 is The restrictor plate, 22 is a pressurizing chamber plate, 23 is an orifice plate, 24 is a support plate for reinforcing the diaphragm 13, 25 is a housing, and 26 is a filter plate.

スペーサ微粒子を混合分散した塗布液は吐出ヘッド3の上流側から下流側へ向かって流れ、共通塗布液供給管18の途中で、フィルタ19を通過して、リストリクタ17、加圧室12、オリフィス11の順に流れる。圧電素子14は信号入力端子15a,15b間に電圧が印加れたときに伸縮し、電圧を印加しないと元の状態に戻る。この圧電素子14の変形により加圧室12内の塗布液に圧力が加わり、オリフィス11からスペーサ微粒子を含有した液滴が吐出する。   The coating liquid in which the spacer fine particles are mixed and dispersed flows from the upstream side to the downstream side of the ejection head 3, passes through the filter 19 in the middle of the common coating liquid supply pipe 18, and then the restrictor 17, the pressure chamber 12, and the orifice. It flows in order of 11. The piezoelectric element 14 expands and contracts when a voltage is applied between the signal input terminals 15a and 15b, and returns to its original state when no voltage is applied. Due to the deformation of the piezoelectric element 14, pressure is applied to the coating liquid in the pressurizing chamber 12, and droplets containing spacer fine particles are discharged from the orifice 11.

吐出ヘッド3は図10に示すようにX方向移動ガイド4ならびにZ方向移動ガイド5に沿ってX方向ならびにZ方向に移動でき、さらに基板ホルダー2上のマザー基板1はY方向に移動できるから、ヘッド駆動制御部(図示せず)からの信号に基いてマザー基板1上の任意の位置にスペーサ微粒子を含有した塗布液を吐出することができる。吐出ヘッド3のX方向とZ方向の移動ならびにマザー基板1のY方向の移動は、それぞれエンコーダ付きのモータ(図示せず)によってなされる。   The discharge head 3 can move in the X direction and the Z direction along the X direction movement guide 4 and the Z direction movement guide 5 as shown in FIG. 10, and the mother substrate 1 on the substrate holder 2 can move in the Y direction. Based on a signal from a head drive control unit (not shown), a coating liquid containing spacer fine particles can be discharged to an arbitrary position on the mother substrate 1. The movement of the ejection head 3 in the X direction and the Z direction and the movement of the mother substrate 1 in the Y direction are each performed by a motor (not shown) with an encoder.

図12は、吐出ヘッド3とスペーサを付着する液晶用カラーフィルタ基板31との関係を示す平面図である。この基板31は、ガラス板からなる大きなマザー基板1(図10参照)上に所定の間隔をおいて複数区画形成されている。同図に示すように基板31の表面にはR,G,Bの画素セル32が規則正しく成形されている。各画素セル32を分割するように網目状に遮光膜33が形成され、遮光膜33の交叉部分に複数個(例えば3〜5個)のスペーサ微粒子からなるスペーサ集合体34が付着している。   FIG. 12 is a plan view showing the relationship between the ejection head 3 and the color filter substrate 31 for liquid crystal to which spacers are attached. The substrate 31 is formed in a plurality of sections at a predetermined interval on a large mother substrate 1 (see FIG. 10) made of a glass plate. As shown in the figure, R, G, B pixel cells 32 are regularly formed on the surface of the substrate 31. A light shielding film 33 is formed in a mesh shape so as to divide each pixel cell 32, and a spacer aggregate 34 composed of a plurality (for example, 3 to 5) of spacer fine particles is attached to the intersection of the light shielding film 33.

吐出ヘッド3上に多数のオリフィス11がP1のピッチで一直線上に形成されているのに対して、基板31上に付着されるスペーサ集合体34のピッチP2は液晶表示装置の種類などによって、オリフィス11のピッチP1と異なることがある。その場合吐出ヘッド3の傾斜角度θを調整して、スペーサ集合体34のピッチP2に合わせている。   While a large number of orifices 11 are formed on the discharge head 3 in a straight line with a pitch of P1, the pitch P2 of the spacer assembly 34 attached on the substrate 31 depends on the type of liquid crystal display device. 11 pitch P1 may be different. In this case, the inclination angle θ of the ejection head 3 is adjusted to match the pitch P2 of the spacer aggregate 34.

吐出ヘッドの上流部、中間部、下流部などで吐出量に差が出て、その差に基いて表示品質が低下するなどの問題がある。本発明はこの問題点を解消するため、吐出ヘッドによる分散吐出方式を採用した。   There is a problem that a difference occurs in the discharge amount at an upstream portion, an intermediate portion, a downstream portion, or the like of the discharge head, and display quality is deteriorated based on the difference. In order to solve this problem, the present invention employs a distributed ejection system using an ejection head.

図1と図2は、その第1実施形態を説明するための図である。図1は吐出ヘッド上の分割領域を示す図であり、本実施形態は吐出ヘッド3上に128個のオリフィスが直線上に設けられている例を示しており、このオリフィス群は図1に示すように、オリフィスの配列方向に沿ってA〜Dの4つのグループに等分され、各グループのオリフィスの数は夫々32個である。各グループでのオリフィスNo.を示せば下記の通りである。オリフィスNo.は同図に示すように、吐出ヘッド3の図に向かって左側から右側に向けて順番に付した番号である。   FIG. 1 and FIG. 2 are diagrams for explaining the first embodiment. FIG. 1 is a diagram showing divided areas on the ejection head, and this embodiment shows an example in which 128 orifices are provided on a straight line on the ejection head 3, and these orifice groups are shown in FIG. As described above, the groups are equally divided into four groups A to D along the arrangement direction of the orifices, and the number of orifices in each group is 32. Orifice No. in each group Is as follows. Orifice No. As shown in the figure, reference numerals are given in order from the left side to the right side in the drawing of the ejection head 3.

Aグループ:オリフィスNo.1〜32
Bグループ:オリフィスNo.33〜64
Cグループ:オリフィスNo.65〜96
Dグループ:オリフィスNo.97〜128
図2(a)と(b)は各オリフィスで液滴を吐出する手順を説明するための図であり、図(a−1)〜(a−4)はその手順を往路と復路に分けてオリフィスグループ単位で示した図、同図(b−1)〜(b−4)はその手順を往路と復路に分けてオリフィスNo.で示した図である。なお、同図(b−1)〜(b−4)は基板塗布領域左端部の一部を示している。
Group A: Orifice No. 1-32
Group B: Orifice No. 33-64
Group C: Orifice No. 65-96
D group: Orifice No. 97-128
2 (a) and 2 (b) are diagrams for explaining a procedure for discharging a droplet from each orifice, and FIGS. (A-1) to (a-4) divide the procedure into a forward path and a return path. The diagrams shown in units of orifice groups, (b-1) to (b-4) in FIG. It is the figure shown by. In addition, the same figure (b-1)-(b-4) has shown a part of board | substrate application | coating area | region left end part.

図2(a−1)において、図示している基板31よりも左側部分は、それより外れたマザー基板1の部分35であり、最初はその外れた部分35から基板31の左端部にかけてスペーサ集合体34を塗布する。同図(a−1)中のX方向とY方向は、図10に示すX方向とY方向と符合しており、本実施形態の場合は吐出ヘッド3のX方向への2回の往復移動により、基板31の所定領域に液滴を塗布する例を示している。   2A-1, the left side portion of the illustrated substrate 31 is a portion 35 of the mother substrate 1 that is disengaged from the substrate 31. Initially, the spacer assembly extends from the dislocated portion 35 to the left end portion of the substrate 31. The body 34 is applied. The X direction and the Y direction in FIG. 10A coincide with the X direction and the Y direction shown in FIG. 10, and in this embodiment, the reciprocating movement of the ejection head 3 twice in the X direction is performed. Thus, an example in which droplets are applied to a predetermined region of the substrate 31 is shown.

なお同図(a)中の「A」〜「D」のアルファベットは図1に示すオリフィスのグループを示しており、「1」,「2」は往復の回数を示し、その数の右上にダッシュが付いていないものは往路時の塗布を示し、ダッシュが付いているものは復路時の塗布を示している。同図(b)中の数字は、塗布に関与したオリフィスNo.を示している。このことは後述の他の実施形態においても同じである。   Note that the alphabets “A” to “D” in FIG. 4A indicate the orifice groups shown in FIG. 1, and “1” and “2” indicate the number of reciprocations, and a dash at the upper right of the number. Those not marked with indicate coating on the forward trip, and those with a dash indicate coating on the return trip. The numbers in FIG. 4B indicate the orifice No. involved in the application. Is shown. This also applies to other embodiments described later.

1回目のスタート時は図2(a−1)に示すように、AグループからCグループまでの各オリフィス(オリフィスNo.1〜96)が前述の外れた部分35と対向し、Dグループの各オリフィス(オリフィスNo.97〜128)が基板31の左端の一部分と対向するように吐出ヘッド3が配置される。図3は、基板31に対する吐出ヘッド3のスタート時の配置状態を示している。   At the first start, as shown in FIG. 2 (a-1), each of the orifices (orifices No. 1 to 96) from the A group to the C group is opposed to the above-described removed portion 35, and each of the D group The ejection head 3 is arranged such that the orifice (orifices No. 97 to 128) faces a part of the left end of the substrate 31. FIG. 3 shows an arrangement state at the start of the ejection head 3 with respect to the substrate 31.

この状態で1個おきの奇数番号のオリフィス(オリフィスNo.1,3,・・・,127)から液滴を吐出する。そのため図2(b−1)に示されているように、基板31上にはオリフィスNo.97,99,・・・127から吐出されたスペーサ集合体34が着弾されて、Y方向において1画素おきに無塗布部分36が形成される。吐出ヘッド3は図3に示すようにX方向に移動しながら1画素おきに前述の塗布がなされ、その結果X方向においても1画素おきに無塗布部分36が形成される。図2(a−1)と(b−1)は1回目往路の塗布状態を示している。   In this state, droplets are ejected from every other odd-numbered orifice (orifice No. 1, 3,..., 127). Therefore, as shown in FIG. The spacer aggregate 34 ejected from 97, 99,... 127 is landed, and uncoated portions 36 are formed every other pixel in the Y direction. As shown in FIG. 3, the ejection head 3 is applied in every other pixel while moving in the X direction. As a result, an uncoated portion 36 is formed in every other pixel in the X direction. FIGS. 2A-1 and 2B-1 show the application state of the first outbound path.

このようにして1回目往路の塗布が終了すると、吐出ヘッド3をその位置から基板31に対してX方向に1列分、Y方向に2グループ分移動して、図3に点線の矢印で示すように吐出ヘッド3を復路方向に移動しながら、塗布した画素の下側に塗布しつつ1回目の復動を行なう。図2(a−2)と(b−2)は1回目復路の塗布状態を示しており、図2(b−2)に示しているように、1回目往路で既に塗布したオリフィスNo.97,99,・・・127の下側にオリフィスNo.33,35,・・・63の塗布を行なう。   When the first forward application is thus completed, the ejection head 3 is moved from that position by one row in the X direction and two groups in the Y direction with respect to the substrate 31, and is indicated by a dotted arrow in FIG. In this way, the first return is performed while moving the ejection head 3 in the backward direction and applying it to the lower side of the applied pixel. 2 (a-2) and 2 (b-2) show the application state of the first return path, and as shown in FIG. 2 (b-2), the orifice No. already applied in the first outbound path is shown. 97, 99,... 127 below orifice No. Application of 33, 35,... 63 is performed.

このようにして1回目復路の塗布が終了すると、吐出ヘッド3をその位置から基板31に対してさらにX方向に1列分、Y方向に2グループ分移動して、吐出ヘッド3を往路方向に移動しながら1画素おきに前述と同様に塗布を行なう。図2(a−3)と(b−3)は、2回目往路の塗布状態を示している。   When the application of the first return pass is thus completed, the discharge head 3 is further moved from the position to the substrate 31 by one row in the X direction and two groups in the Y direction, and the discharge head 3 is moved in the forward direction. While moving, coating is performed every other pixel in the same manner as described above. 2 (a-3) and 2 (b-3) show the application state of the second outbound path.

このようにして2回目往路の塗布が終了すると、吐出ヘッド3をその位置から基板31に対してさらにX方向に1列分、Y方向に2グループ分移動して、吐出ヘッド3を復路方向に移動しながら1画素おきに前述と同様に塗布を行なう。図2(a−4)と(b−4)は2回目復路の塗布状態を示している。   When application of the second forward path is completed in this manner, the ejection head 3 is further moved from the position to the substrate 31 by one row in the X direction and two groups in the Y direction, and the ejection head 3 is moved in the backward direction. While moving, coating is performed every other pixel in the same manner as described above. FIGS. 2A-4 and 2B-4 show the application state of the second return pass.

この吐出ヘッド3の2回の往復移動が終了すると図3に示す基板31の左端部の塗布が終了するから、吐出ヘッド3をその吐出ヘッド3の塗布領域分だけY方向に移動して(一点鎖線で表示)、前述と同様に2回の往復移動を行なう。なお、図2(a−4)の状態では所々に無塗布部分36が残っているが、この無塗布部分36は次の吐出ヘッド3の往復移動時に塗布されて無塗布部分36ではなくなる(後述の図4参照)。この吐出ヘッド3の往復移動と塗布領域分だけのY方向の移動を数回繰返しながら、基板31の全面にスペーサ集合体34を着弾させる。   When the two reciprocating movements of the ejection head 3 are completed, the application of the left end portion of the substrate 31 shown in FIG. 3 is completed. Therefore, the ejection head 3 is moved in the Y direction by the application area of the ejection head 3 (one point). (Represented by a chain line), reciprocating twice as described above. In the state of FIG. 2A-4, the non-application portion 36 remains in some places, but this non-application portion 36 is applied when the next ejection head 3 is reciprocated and is not the non-application portion 36 (described later). FIG. 4). The spacer assembly 34 is landed on the entire surface of the substrate 31 while repeating the reciprocating movement of the ejection head 3 and the movement in the Y direction corresponding to the coating area several times.

図4は、このようにして塗布が終了した後の基板31の塗布状態(一部)を示す図である。前述のように吐出ヘッド3と基板31を相対的にX,Y方向に移動しながら液滴を吐出すると、図4に示すように例えば「A−2′」の領域(ドット部分)と隣接する周囲には「C−2」,「A−1」,「C−1′」,「A−1」,「C−2」,「D−1」,「B−1′」,「D−1」の領域(ドット部分)が形成され、互いに異なるオリフィスグループによってドット部分が形成されるから、液滴重量の差(すなわちスペーサ個数の差)が基板31の全面においてランダムに分散されることになる。   FIG. 4 is a diagram showing the application state (part) of the substrate 31 after the application is completed in this way. As described above, when droplets are ejected while the ejection head 3 and the substrate 31 are moved relatively in the X and Y directions, as shown in FIG. 4, for example, adjacent to the area (A-2 ′) (dot portion). There are "C-2", "A-1", "C-1 '", "A-1", "C-2", "D-1", "B-1'", "D-" around 1 ”region (dot portion) is formed, and the dot portion is formed by different orifice groups, so that the difference in droplet weight (that is, the difference in the number of spacers) is randomly distributed over the entire surface of the substrate 31. Become.

図5は、本発明の第2実施形態を説明するための図である。本実施形態もオリフィス群がそれの配列方向に沿ってA〜Dの4つのオリフィスグループに等分されている(図1参照)。   FIG. 5 is a diagram for explaining a second embodiment of the present invention. Also in this embodiment, the orifice group is equally divided into four orifice groups A to D along the arrangement direction thereof (see FIG. 1).

図5(a−1)〜(a−4)は各オリフィスで液滴を吐出する手順をオリフィスグループ単位で示した図であり、往路と復路を一緒に記載している。また図5(b)は塗布が終了した後の基板31の一部をオリフィスNo.で示した図である。この実施形態の場合、往路ならびに復路で3画素おきに塗布し、往路と復路の切替時には基板31に対して吐出ヘッド3をY方向に2グループ分、X方向に1列分移動して、4回の往復操作を繰返すことにより、図5(a−4)ならびに図5(b)に示すようなランダムな塗布状態にする。   FIGS. 5 (a-1) to (a-4) are diagrams showing a procedure for ejecting droplets from each orifice in units of orifice groups, and the forward path and the backward path are described together. FIG. 5B shows a part of the substrate 31 after the application is finished. It is the figure shown by. In the case of this embodiment, the coating is applied every 3 pixels in the forward path and the backward path, and when switching between the forward path and the backward path, the ejection head 3 is moved by two groups in the Y direction and by one row in the X direction with respect to the substrate 31. By repeating the reciprocating operation a number of times, a random application state as shown in FIGS. 5 (a-4) and 5 (b) is obtained.

図6は、本発明の第3実施形態ならびに第4実施形態で使用する吐出ヘッド上の分割領域を示す図であり、吐出ヘッド3上に128個のオリフィスが直線上に設けられており、このオリフィス群はオリフィスの配列方向に沿ってA〜Hの8つのグループに等分され、各グループのオリフィスの数は夫々16個である。各グループでのオリフィスNo.を示せば下記の通りである。   FIG. 6 is a diagram showing a divided region on the ejection head used in the third embodiment and the fourth embodiment of the present invention, and 128 orifices are provided on the ejection head 3 in a straight line. The orifice groups are equally divided into eight groups A to H along the arrangement direction of the orifices, and the number of orifices in each group is sixteen. Orifice No. in each group Is as follows.

Aグループ:オリフィスNo.1〜16
Bグループ:オリフィスNo.17〜32
Cグループ:オリフィスNo.33〜48
Dグループ:オリフィスNo.49〜64
Eグループ:オリフィスNo.65〜80
Fグループ:オリフィスNo.81〜96
Gグループ:オリフィスNo.97〜112
Hグループ:オリフィスNo.113〜128
図7(a−1)〜(a−4)は本発明の第3実施形態において各オリフィスで液滴を吐出する手順をオリフィスグループ単位で示した図であり、往路と復路を一緒に記載している。また図7(b)は塗布が終了した後の基板31の一部をオリフィスNo.で示した図である。この実施形態の場合、Y方向に3画素おきに、すなわちオリフィスNo.で示すと例えば図7(b)に示す如くオリフィスNo.113,117・・・のように、また往路ならびに復路で1画素おきに塗布し、往路と復路の切替時には基板31に対して吐出ヘッド3をY方向に4グループ分、X方向に1列分移動して、4回の往復操作を繰返すことにより、図7(a−4)ならびに図7(b)に示すようなランダムな塗布状態にする。
Group A: Orifice No. 1-16
Group B: Orifice No. 17-32
Group C: Orifice No. 33-48
D group: Orifice No. 49-64
E group: Orifice No. 65-80
F group: Orifice No. 81-96
G group: Orifice No. 97-112
H group: Orifice No. 113-128
FIGS. 7 (a-1) to (a-4) are diagrams showing a procedure for discharging droplets at each orifice in the third embodiment of the present invention in units of orifice groups, and the forward path and the return path are described together. ing. FIG. 7B shows a part of the substrate 31 after the application is completed. It is the figure shown by. In this embodiment, every three pixels in the Y direction, that is, orifice No. For example, as shown in FIG. 113, 117... Are applied every other pixel in the forward path and the backward path, and when switching between the forward path and the backward path, the ejection heads 3 for four groups with respect to the substrate 31 in the Y direction and for one row in the X direction. By moving and repeating the reciprocating operation four times, a random application state as shown in FIG. 7 (a-4) and FIG. 7 (b) is obtained.

図8(a−1)〜(a−4)ならびに図9(a−5)〜(a−8)は本発明の第4実施形態において各オリフィスで液滴を吐出する手順をオリフィスグループ単位で示した図であり、往路と復路を一緒に記載している。また図9(b)は塗布が終了した後の基板31の一部をオリフィスNo.で示した図である。この実施形態の場合、Y方向に3画素おきに、また往路ならびに復路で3画素おきに塗布し、往路と復路の切替時には基板31に対して吐出ヘッド3をY方向に4グループ分、X方向に1列分移動して、8回の往復操作を繰返すことにより、図9(a−8)ならびに図9(b)に示すようなランダムな塗布状態にする。   FIGS. 8 (a-1) to (a-4) and FIGS. 9 (a-5) to (a-8) show the procedure for discharging droplets at each orifice in the fourth embodiment of the present invention in units of orifice groups. It is the figure shown, and the outward path and the return path are described together. FIG. 9B shows a part of the substrate 31 after the application is completed. It is the figure shown by. In this embodiment, coating is performed every 3 pixels in the Y direction, and every 3 pixels in the forward path and the backward path. When switching between the forward path and the backward path, the ejection heads 3 for the four groups in the Y direction with respect to the substrate 31 are X direction. In this way, a random application state as shown in FIG. 9 (a-8) and FIG. 9 (b) is obtained by repeating the reciprocating operation 8 times.

吐出ヘッド上でのオリフィスの数、グループの区分けの数ならびに基板上での吐出ヘッドの往復回数などは、前記実施形態に限定されるものではなく、適宜選択可能である。オリフィス群を小区分にして往復回数を増やせば、各グループ間のオリフィスによる吐出量の差はさらに分散されて、吐出量の差が目立たなくなる。   The number of orifices on the discharge head, the number of group divisions, the number of reciprocations of the discharge head on the substrate, and the like are not limited to the above-described embodiment, and can be selected as appropriate. If the orifice group is divided into small sections and the number of reciprocations is increased, the difference in discharge amount due to the orifices between the groups is further dispersed, and the difference in discharge amount becomes inconspicuous.

実施形態では例えば図9(b)に示すよう吐出ヘッドの往路時ならびに復路時とも奇数番号のオリフィスを使用したが、例えば吐出ヘッドの往路時に奇数番号のオリフィスを使用し、復路時に偶数番号のオリフィスを使用することも可能である。また、吐出ヘッドの複数回の往復操作において、前半の往復操作は奇数番号のオリフィスを使用し、後半の往復操作は偶数番号のオリフィスを使用することも可能である。   In the embodiment, for example, as shown in FIG. 9B, the odd-numbered orifices are used both when the ejection head is going forward and when the ejection head is going backward. Can also be used. In a plurality of reciprocating operations of the ejection head, it is possible to use odd numbered orifices for the first half of the reciprocating operation and even numbered orifices for the second half of the reciprocating operation.

実施形態では吐出ヘッドの傾斜角度θ(図12参照)を比較的大きくして1個おき(第1,2実施形態)または3個おき(第3,4実施形態)のオリフィスを使用したが、吐出ヘッドの傾斜角度θを比較的小さくして全オリフィスを吐出に使用すると、吐出ヘッドの使用効率を高めて、塗布時間の短縮を図ることが可能である。   In the embodiment, the inclination angle θ of the ejection head (see FIG. 12) is relatively large and every other (first and second embodiments) or every third (third and fourth embodiment) orifices are used. If all the orifices are used for discharge with a relatively small inclination angle θ of the discharge head, the use efficiency of the discharge head can be improved and the coating time can be shortened.

実施形態では吐出ヘッドをX,Z方向に移動し、基板をY方向に移動したが、本発明はこれに限定されるものではなく、吐出ヘッドまたはマザー基板の一方を互いに直交するX,Y,Z方向の3方向に移動することも可能である。   In the embodiment, the ejection head is moved in the X and Z directions and the substrate is moved in the Y direction. However, the present invention is not limited to this, and one of the ejection head and the mother substrate is orthogonal to each other. It is also possible to move in three directions of the Z direction.

実施形態では固体微粒子を混合分散した塗布液を吐出する場合について説明したが、本発明はこれに限定されるものではなく、固体微粒子を含有しない塗布液を吐出する場合にも適用可能である。   In the embodiment, the case where the coating liquid in which the solid fine particles are mixed and dispersed is described. However, the present invention is not limited to this, and the present invention is also applicable to the case where the coating liquid containing no solid fine particles is discharged.

また前記実施形態では液晶表示装置の製造の場合について説明したが、本発明はこれに限定されるものではなく、例えばエレクトロルミネッセンスの製造など他の技術分野においても適用可能である。   In the above-described embodiment, the case of manufacturing a liquid crystal display device has been described. However, the present invention is not limited to this, and can be applied to other technical fields such as the manufacture of electroluminescence.

本発明の第1実施形態ならびに第2実施形態に使用する吐出ヘッド中のオリフィスのグループ分けを示す図である。It is a figure which shows grouping of the orifice in the discharge head used for 1st Embodiment and 2nd Embodiment of this invention. 本発明の第1実施形態に係る液滴吐出の手順を説明するための図である。It is a figure for demonstrating the procedure of the droplet discharge which concerns on 1st Embodiment of this invention. 本発明の各実施形態での吐出ヘッドの移動を説明するための図である。It is a figure for demonstrating the movement of the discharge head in each embodiment of this invention. 本発明の第1実施形態において塗布が終了した後の基板の塗布状態(一部)をオリフィスグループで示した図である。It is the figure which showed the application state (part) of the board | substrate after application | coating is complete | finished in 1st Embodiment of this invention by the orifice group. 本発明の第2実施形態に係る液滴吐出の手順を説明するための図である。It is a figure for demonstrating the procedure of the droplet discharge which concerns on 2nd Embodiment of this invention. 本発明の第3実施形態ならびに第4実施形態に使用する吐出ヘッド中のオリフィスのグループ分けを示す図である。It is a figure which shows grouping of the orifice in the discharge head used for 3rd Embodiment and 4th Embodiment of this invention. 本発明の第3実施形態に係る液滴吐出の手順を説明するための図である。It is a figure for demonstrating the procedure of the droplet discharge which concerns on 3rd Embodiment of this invention. 本発明の第4実施形態に係る液滴吐出の手順を説明するための図である。It is a figure for demonstrating the procedure of the droplet discharge which concerns on 4th Embodiment of this invention. 本発明の第4実施形態に係る液滴吐出の手順を説明するための図である。It is a figure for demonstrating the procedure of the droplet discharge which concerns on 4th Embodiment of this invention. 本発明の実施形態に係る液滴吐出装置の全体の概略構成図である。1 is an overall schematic configuration diagram of a droplet discharge device according to an embodiment of the present invention. その液滴吐出装置に搭載する吐出ヘッドの一部拡大断面図である。It is a partial expanded sectional view of the discharge head mounted in the droplet discharge apparatus. 本発明の実施形態に係る吐出ヘッドとスペーサを付着する液晶用カラーフィルタ基板との関係を示す平面図である。It is a top view which shows the relationship between the discharge head which concerns on embodiment of this invention, and the color filter substrate for liquid crystals which adheres a spacer.

符号の説明Explanation of symbols

1:マザー基板、2:基板ホルダー、3:吐出ヘッド、4:X方向移動ガイド、5:Z方向移動ガイド、6:溶液供給パイプ、7:ヘッド保全部、11:オリフィス、12:加圧室、13:振動板、14:圧電素子、15:信号入力端子、16:圧電素子固定板、17:リストリクタ、18:共通塗布液供給管、19:フィルタ、20:接着剤、21:リストリクタプレート、22:加圧室プレート、23:オリフィスプレート、24:支持板、25:ハウジング、26:フィルタプレート、31:液晶用カラーフィルタ基板、32:画素セル、33:遮光膜、34:スペーサ集合体、35:外れた部分、36:無塗布部分。   1: Mother substrate, 2: Substrate holder, 3: Discharge head, 4: X direction moving guide, 5: Z direction moving guide, 6: Solution supply pipe, 7: Head maintenance section, 11: Orifice, 12: Pressurizing chamber , 13: diaphragm, 14: piezoelectric element, 15: signal input terminal, 16: piezoelectric element fixing plate, 17: restrictor, 18: common application liquid supply pipe, 19: filter, 20: adhesive, 21: restrictor Plate: 22: Pressurizing chamber plate, 23: Orifice plate, 24: Support plate, 25: Housing, 26: Filter plate, 31: Color filter substrate for liquid crystal, 32: Pixel cell, 33: Light shielding film, 34: Spacer assembly Body, 35: detached part, 36: uncoated part.

Claims (3)

多数のオリフィスを直線上に配列した吐出ヘッドと、
その吐出ヘッドのオリフィスから吐出された液滴を着弾して前記オリフィスの配列方向に沿ってドット列を形成する被着体と、
前記吐出ヘッドと被着体とを前記オリフィスの配列方向ならびにその配列方向と直交する方向に沿って相対的に往復移動する移動手段とを備え、
前記移動手段により前記吐出ヘッドと被着体とを相対的に移動させて、前記オリフィスから液滴を吐出して前記被着体上にドット列を形成する液滴吐出方法において、
前記吐出ヘッド上のオリフィスをその配列方向に沿って順番に複数のグループに分けて、そのグループ毎にオリフィスから液滴を吐出するようにしており、
前記吐出ヘッドのグループの順番とは異なる順番で前記ドット列が前記被着体上に形成されるように、前記移動手段により前記吐出ヘッドと被着体とを相対的に移動させて前記オリフィスから液滴を吐出することを特徴とする液滴吐出方法。
A discharge head in which a large number of orifices are arranged in a straight line;
An adherend for landing a droplet discharged from the orifice of the discharge head to form a dot row along the direction of arrangement of the orifice;
Moving means for relatively reciprocating the discharge head and the adherend along the direction in which the orifices are arranged and the direction perpendicular to the arrangement direction;
In the droplet discharge method of forming a dot row on the adherend by discharging the droplet from the orifice by relatively moving the discharge head and the adherend by the moving means,
The orifices on the ejection head are divided into a plurality of groups in order along the arrangement direction, and droplets are ejected from the orifices for each group.
The moving means relatively moves the discharge head and the adherend from the orifice so that the dot rows are formed on the adherend in an order different from the order of the groups of the discharge heads. A droplet discharge method, wherein a droplet is discharged.
多数のオリフィスを直接上に配列した吐出ヘッドと、
その吐出ヘッドのオリフィスから吐出された液滴を着弾して前記オリフィスの配列方向に沿って延びるドット列を前記オリフィスの配列方向と直交する方向に多数並設する被着体と、
前記吐出ヘッドと被着体とを前記オリフィスの配列方向ならびにその配列方向と直交する方向に沿って相対的に往復移動する移動手段とを備え、
前記移動手段により前記吐出ヘッドと被着体とを相対的に移動させて、前記オリフィスから液滴を吐出して前記被着体上にドット列を形成する液滴吐出方法において、
前記吐出ヘッド上のオリフィスをその配列方向に沿って複数のグループに分けて、そのグループ毎にオリフィスから液滴を吐出するようになっており、
前記吐出ヘッドのグループの順番とは異なる順番で前記ドット列が形成され、
かつ、隣り合う前記ドット列の配列方向と直交する方向のドット部分が、前記吐出ヘッドの異なるグループによって形成されるように、
前記移動手段により前記吐出ヘッドと被着体とを相対的に移動させて前記オリフィスから液滴を吐出することを特徴とする液滴吐出方法。
A discharge head in which a large number of orifices are arranged directly above;
An adherend in which a large number of dot rows that land along droplets discharged from the orifices of the discharge head and extend in the direction in which the orifices are arranged are arranged in a direction perpendicular to the direction in which the orifices are arranged;
Moving means for relatively reciprocating the discharge head and the adherend along the direction in which the orifices are arranged and the direction perpendicular to the arrangement direction;
In the droplet discharge method of forming a dot row on the adherend by discharging the droplet from the orifice by relatively moving the discharge head and the adherend by the moving means,
The orifices on the ejection head are divided into a plurality of groups along the arrangement direction, and droplets are ejected from the orifices for each group.
The dot rows are formed in an order different from the order of the groups of the ejection heads,
And the dot portion in the direction orthogonal to the arrangement direction of the adjacent dot rows is formed by different groups of the ejection heads,
A droplet discharge method, wherein a droplet is discharged from the orifice by relatively moving the discharge head and the adherend by the moving means.
請求項1または2記載の液滴吐出方法において、前記被着体が液晶基板であって、その2枚の液晶基板の隙間を維持するためのスペーサ粒子を含有した液滴を前記オリフィスから前記液晶基板の表面に向けて吐出することを特徴とする液滴吐出方法。   3. The droplet discharge method according to claim 1, wherein the adherend is a liquid crystal substrate, and droplets containing spacer particles for maintaining a gap between the two liquid crystal substrates are discharged from the orifice to the liquid crystal. A droplet discharge method characterized by discharging toward the surface of a substrate.
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