JP4627618B2 - Film forming method and film forming apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a film forming method and a film forming apparatus for forming a thin film by applying a solution to a substrate using an ink jet head.
[0002]
[Prior art]
In general, in a manufacturing process of a liquid crystal display device or a semiconductor device, there is a film forming process for forming a circuit pattern on a substrate such as a glass substrate or a semiconductor wafer. In this process, a functional thin film such as a resist or an alignment film is formed on the plate surface of the substrate.
[0003]
In the case of forming a functional thin film on a substrate, a film forming apparatus using an ink jet method is known in which a solution for forming the functional thin film is ejected from a nozzle formed on a head with dots and applied to the substrate.
[0004]
An inkjet film forming apparatus has a transport table for transporting a substrate, and above the transport table, a plurality of heads on which the nozzles are formed extend along a direction substantially orthogonal to the transport direction of the substrate. It is installed side by side. Each head is supplied with a solution from a solution tank connected via a supply pipe. Thereby, the solution sprayed from the nozzle is applied by dots on the upper surface of the substrate conveyed in a predetermined direction.
[0005]
The interval between the nozzles formed on the head is inevitably set to be about several times the nozzle diameter in machining. When the interval between adjacent nozzles is about several times the nozzle diameter, a gap is generated between the dots of the solution sprayed onto the substrate.
[0006]
In order to form a thin film uniformly over the entire surface of the substrate, it is required to fill the gaps between the dots. As a method for filling the gaps between the dots, there are a method in which the dots of the solution applied to the substrate are flowed and filled, a method in which the substrate or head is moved, and a solution dot is further sprayed and applied to the portion between the dots.
[0007]
In the former case, the flow of the solution greatly depends on the surface state of the substrate. For example, the contact angle between the substrate and the solution is sufficiently small, and the flow of the solution fills the gap between the dots corresponding to the nozzle interval. In practice, it is difficult to satisfy such a condition.
[0008]
In the latter case, if a plurality of dots are first sprayed onto the substrate at a predetermined interval, the head or the substrate is driven in a predetermined direction so that the plurality of dots are adjacent to the first sprayed dot at that interval. The gap between the dots is filled by sequentially ejecting the solution between the pair of dots in a predetermined direction.
[0009]
[Problems to be solved by the invention]
For example, as shown in FIG. 7 (a), a pair of dots d first spray-applied at a predetermined interval L in a predetermined direction. ₁ Consider a case in which the interval is filled with the next three spray coatings. The first pair of dots d applied by spraying first ₁ In between, each dot d as shown in FIG. ₁ Next to the second dot d ₂ Is applied by spraying, as shown in FIGS. 7C and 7D, the third and fourth dots d ₂ , D ₃ Are spray-applied sequentially adjacent to each other along a predetermined direction. In that case, the dot d sprayed and applied in the last fourth time ₄ Is the first pair of dots d ₁ Next to the other.
[0010]
It should be noted that a plurality of dots d are respectively provided in the direction intersecting the predetermined direction. ₁ ~ D ₄ Are continuously sprayed and applied. That is, a plurality of first dots d ₁ Is applied in a direction crossing the predetermined direction, and then a plurality of second to fourth dots d are applied. ₂ ~ D ₄ Are sequentially sprayed.
[0011]
If the ejection time of each dot is, for example, 1 second, the time lag of adjacent dots is 1 second, but the other of the first pair of dots d1 (indicated by A in FIG. 7 (d)), The time lag with the fourth dot d4 (indicated by B in FIG. 7D) adjacent to the other dot d1 is 3 seconds It becomes.
[0012]
Thus, the adjacent dot d ₁ , D ₄ When a large time lag occurs, the first applied dot d ₁ Change over time such as drying occurs, so the dot d ₁ And the fourth dot d ₄ The affinity with may decrease.
[0013]
Adjacent dot d ₁ , D ₄ If the affinity is reduced, these dots are difficult to mix uniformly, and the film thickness may be extremely nonuniform, or gaps may be formed between the dots and a film may not be formed.
[0014]
Further, when a plurality of dots are ejected sequentially adjacent to the substrate, the solutions of the adjacent dots may interfere, that is, attract each other. Therefore, a pair of dots d ₁ Are applied at predetermined intervals, and then a pair of these dots d ₁ Dot d by sequentially adjoining along a predetermined direction from one side between ₂ ~ D ₄ When spraying is applied, it is repeated that the solution of the next applied dot is attracted to the already applied dot, so a pair of dots d as shown in FIG. ₁ In between, there is a tendency that the film thickness becomes thinner as the application proceeds.
[0015]
An object of the present invention is to provide a film forming method and a film forming apparatus capable of making the film thickness uniform when a thin film is formed by spray-coating a solution with dots by an ink jet method.
[0016]
[Means for Solving the Problems]
The present invention relates to a film forming method in which a solution is spray-applied to a substrate with dots having a diameter smaller than the interval between adjacent nozzles from a plurality of nozzles formed in a predetermined direction on a head.
A step of spraying and applying a plurality of dots from each nozzle to the substrate along the relative movement direction while relatively moving the head and the substrate in a direction perpendicular to the arrangement direction of the nozzles;
The head and the substrate are moved relative to each other in the predetermined direction, and are first ejected from a pair of nozzles at a predetermined interval. Formed by dots A pair of dots Column A step of painting a portion in between with a plurality of dots,
The portion between a pair of dot rows that was first sprayed onto the substrate at a predetermined interval is the dot that was sprayed first. Column The last sprayed dot Column Are formed by a plurality of dots in an order that does not adjoin each other.
[0017]
The present invention provides a film forming apparatus that sprays and applies a solution to a substrate with dots having a diameter smaller than the interval between adjacent nozzles from a plurality of nozzles formed at predetermined intervals in a head in a predetermined direction.
Driving means for relatively driving the head and the substrate in the predetermined direction and a direction orthogonal to the predetermined direction;
After spraying and applying a plurality of dots of solution spaced from the nozzle of the head to the substrate at a predetermined interval in the predetermined direction and continuous in a direction perpendicular to the predetermined direction, Formed by this spray coating A pair of adjacent dots at a predetermined interval Column The first part between of Spray coating Formed by Dot Column Last of Spray coating Formed by Dot Column Control means for controlling the driving means so as to be filled with a plurality of dots in an order in which they are not adjacent to each other;
The film forming apparatus is characterized by comprising:
[0021]
According to the present invention, when a film is formed by filling a plurality of dots between dots ejected from a pair of nozzles, the first dot and the last dot are not adjacent to each other. It becomes possible to make the film thickness uniform.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of the present invention will be described below with reference to the drawings. The film forming apparatus of the present invention shown in FIGS. 1 and 2 has a substantially rectangular parallelepiped base 1. Legs 2 are provided at predetermined positions on the lower surface of the base 1 to support the base 1 horizontally.
[0024]
At both ends in the width direction of the upper surface of the base 1, mounting plates 3 are provided along the longitudinal direction. Guide members 4 are respectively provided along the longitudinal direction at one end of the mounting plate 3 in the width direction of the base 1. On the upper surface side of these guide members 4, a substantially rectangular plate-like transport table 5 is slidably supported via a slide member 6 having a substantially inverted U-shaped cross section provided in parallel on both sides of the lower surface.
[0025]
A drive device (not shown) is connected to the transport table 5, and the transport table 5 can be driven along the guide member 4 by operating the drive device.
[0026]
A substrate W such as a glass substrate used in a liquid crystal display device is detachably held on the upper surface of the transfer table 5 by holding means such as an electrostatic chuck or a vacuum chuck. The substrate W is transported along the longitudinal direction of the base 1 by being held on the upper surface of the transport table 5.
[0027]
A gate-shaped support body 7 is erected in the longitudinal direction of the base 1 so as to straddle the pair of guide members 4. A mounting member 8 made of a prism is horizontally installed on both sides of the support 7. The mounting member 8 is provided with a head table 31 that is driven along a direction orthogonal to the transport table 5. The head table 31 is driven by a drive source 32 provided on one side in the width direction of the support 7.
[0028]
On one side surface of the head table 31, a plurality of inkjet heads 9 are arranged in a line with respect to the transport direction of the substrate W. In this embodiment, for example, as shown in FIG. 5, seven heads 9 are arranged in two rows in a staggered manner.
[0029]
As shown in FIGS. 3 and 4, each of the heads 9 includes a head body 11. The head body 11 has an opening 12 communicating from the upper surface side to the lower surface side, and the lower surface opening is closed by a flexible plate 13. The flexible plate 13 is covered with a nozzle plate 14. Accordingly, a liquid chamber 15 is formed between the flexible plate 13 and the nozzle plate 14 on the lower surface side of the head body 11.
[0030]
A supply hole 17 communicating with the liquid chamber 15 is formed at one longitudinal end of the head body 11. From the supply hole 17, a solution for forming a functional thin film such as a resist or an alignment film is supplied to the liquid chamber 15 through a supply pipe 17a. Thereby, the inside of the liquid chamber 15 is filled with the solution.
[0031]
As shown in FIG. 4, the nozzle plate 14 has a plurality of nozzles 16 in a predetermined direction along substantially the center in the width direction orthogonal to the longitudinal direction of the head body 11, that is, the direction orthogonal to the transport direction of the substrate W. It is drilled in a line at a predetermined interval. As shown in FIG. 3, piezoelectric elements 18 are provided on the upper surface of the flexible plate 13 so as to face the nozzles 16.
[0032]
The plurality of heads 9 are arranged such that the nozzles 16 formed on the nozzle plate 14 of each head 9 are at regular intervals along the width direction orthogonal to the transport direction of the substrate W. Thereby, the interval between the nozzles 16 formed on the nozzle plates 14 of the adjacent heads 9 is set constant over the entire length in the width direction orthogonal to the transport direction of the substrate W.
[0033]
A driving voltage is supplied to each piezoelectric element 18 via a driving unit 20 provided in the opening 12. Thereby, the solution is sprayed and applied to the substrate W on the transport table 5 from the nozzle 16 corresponding to the driven piezoelectric element 18.
The piezoelectric elements 18 are provided in a zigzag pattern, and the piezoelectric elements 18 On placement Correspondingly, the nozzles 16 may be formed in a staggered pattern on the flexible plate 13.
[0034]
As shown in FIG. 3, a recovery hole 19 communicating with the liquid chamber 15 is formed at the other longitudinal end of the head body 11. From the recovery hole 19, the solution supplied to the liquid chamber 15 is recovered through a drain pipe 19a. That is, each head 9 not only ejects the solution supplied to the liquid chamber 15 from each nozzle 16 but also circulates in the liquid chamber 15 to be collected from the collection hole 19.
[0035]
As shown in FIG. 5, the drive of the drive unit 20 provided in each head 9 is controlled by a control device 21. That is, the control device 21 stores the X and Y coordinates of each nozzle 16 formed in the plurality of heads 9. The X and Y coordinates of each nozzle 16 are set based on the mounting position of the head 9 after the head 9 is mounted on the mounting member 8, for example. In FIG. 5, the drive unit 20 is shown separated from the head 9, but in this embodiment, the drive unit 20 is accommodated in the head 9 as shown in FIG.
[0036]
The control device 21 also performs driving of the table 5 on which the substrate W is placed and driving of the head table 31 provided with the head 9 by the driving source 32.
[0037]
Next, the operation in the case where a thin film is formed by spraying a solution onto the substrate W by the film forming apparatus having the above configuration will be described.
[0038]
As shown in FIG. 4, the diameter of the nozzle 16 formed on the head 9 is r, and the interval between a pair of adjacent nozzles 16 is 4r, which is four times the diameter of the nozzle 16. When the table 5 is driven in a predetermined direction (this direction is the Y direction, and the X and Y directions are shown in FIG. 6A) and the substrate W reaches a predetermined position below the head 9, The piezoelectric element 18 is driven by the drive unit 20 in accordance with the drive signal.
[0039]
As a result, as shown in FIG. 6A, the solution is supplied to the substrate W from the nozzle 16 at a position corresponding to each piezoelectric element 18 to the first dot d. ₁ Are spray-coated on the substrate W at intervals corresponding to a pair of adjacent nozzles 16. The first dot d at this time ₁ If the diameter r is the same as the diameter of the nozzle 16, a pair of adjacent first dots d ₁ Is 4r. By driving the substrate W in the −Y direction from the initial position in the Y direction, the first dots d separated by a predetermined interval in the X direction ₁ Are continuously arranged in the Y direction, in this embodiment, six first dots d ₁ Is continuously sprayed in the Y direction.
[0040]
When the first spray application of the solution is completed, the control device 21 returns the substrate W to the initial position in the Y direction, and then moves the head table 31 in the + X direction by a distance of (3r). A second spray application of the solution is performed while driving in the -Y direction. Second dot d ejected for the second time ₂ Is a pair of first dots d as shown in FIG. ₁ One of the first dots d located in the + X direction ₁ Adjacent to the left side of At this time, since the substrate W is driven in the −Y direction from the initial position in the Y direction, the substrate W is continuous in the Y direction and one of the first dots d. ₁ 6 second dots d adjacent to ₂ Is formed.
[0041]
The third spray application of the solution is performed by moving the head table 31 from the second position in the −X direction by a distance of (2r). This third dot d ₃ Is one first dot d located in the + X direction as shown in FIG. ₁ And the other first dot d ₁ It will be adjacent to the right side. Also at this time, since the substrate W is driven in the −Y direction from the initial position in the Y direction, the pair of first dots d is formed on the substrate W. ₁ 6 third dots d adjacent to the right side of each ₃ Are formed adjacent to each other in the Y direction.
[0042]
In the fourth spray application of the solution, the head table 31 is moved in the + X direction from the third position. (R) Move it at a distance of As shown in FIG. 6D, one fourth dot d4 located on the + X side is adjacent to the second dot d2 and the third dot d3. The other fourth dot d4 located on the −X side is also provided so that both sides are adjacent to the second dot d2 and the third dot d3. Also at this time, since the substrate W is driven in the −Y direction from the initial position in the Y direction, six fourth dots d4 are formed on the substrate W adjacent to each other in the Y direction.
[0043]
Thus, a pair of first dots d ₁ Between the second to fourth dots d ₂ ~ D ₄ By spray coating, a pair of first dots d applied at intervals corresponding to a pair of adjacent nozzles 16 ₁ Between the second to fourth dots d ₂ ~ D ₄ Can be buried.
[0044]
Each of the first to fourth dots d1 to d4 is Y direction Time for spray coating in a row Takes 1 second Then, as shown in FIG. 6 (b), the time until the second dot d2 is applied adjacent to one first dot d1 is 1 second, and as shown in FIG. 6 (c). The time required for the third dot d3 to be applied adjacent to the other first dot d1 is 2 seconds. As shown in FIG. 6D, it takes 1 second for the fourth dot d4 to be applied adjacent to the third dot d3, and 2 seconds for the second dot d2. That is, when the space between the pair of first dots d1 is filled with the second to fourth dots d2 to d4, the maximum time until the adjacent dots are applied can be set to 2 seconds.
[0045]
As shown in FIGS. 7A to 7D, a pair of first dots d ₁ 2nd to 4th dot d from one end in between ₂ ~ D ₄ Are sprayed by adjoining one another in sequence, the fourth dot d ₄ Is one of the first dots d ₁ It takes 3 seconds to be sprayed adjacent to the surface.
[0046]
Therefore, when the space between a pair of dots is filled with a plurality of dots, according to the method of the present invention, compared to the method shown in FIGS. It is possible to reduce the maximum time required for coating by 1 second.
[0047]
Therefore, before the dots of each solution greatly lose their affinity due to changes over time, the dots adjacent to the previously applied dots can be sprayed and applied, so the affinity of the dots adjacent in the X direction is improved. It is possible to form a thin film having a uniform thickness.
[0048]
A plurality of first to fourth dots d along the Y direction, respectively. ₁ ~ D ₄ Since the coating is continuously sprayed, the affinity in this direction is hardly impaired by the change with time.
[0049]
In the above embodiment, the positions of the second dot and the third dot may be reversed. In short, the dot that is sprayed and applied last may be adjacent to the dot that is sprayed and coated first. If the ejection order of a plurality of dots is set so that there is no such problem, the object of the present invention can be achieved. In addition, the number of dots filling the portion between the first ejected dots is not limited to three, and the number is determined by the diameter of the nozzle formed in the head and the interval between a pair of adjacent nozzles. The invention can be applied to at least three or more.
[0050]
On the other hand, as shown in FIGS. 7A to 7D, first, a pair of first dots d at a predetermined interval. ₁ Is applied, the second to fourth dots d are applied. ₂ ~ D ₄ One of the first dots d ₁ In some cases, the films are applied adjacently from the side. For example, when a solution whose affinity does not easily deteriorate with time is applied by spraying, such a coating method hardly causes a problem.
[0051]
In that case, adjacent dots attract each other, and the thickness of the thin film along the X direction is one of the first dots d as shown in FIG. ₁ The first dot d on the other side ₁ It may be thicker than the side. That is, the film thickness tends to be thicker on the side where the dots are first applied adjacently than on the side where the dots are applied later.
[0052]
When the amount of solution spray from the nozzle 16, that is, the dot size is controlled in three stages of large, medium, and small, the first dot d ₁ And the second dot d ₂ The size is medium. Third dot d ₃ And the fourth dot d ₄ The size is medium. The size of the dots can be changed by controlling the drive voltage and drive frequency of the piezoelectric element 18 driven by the drive unit 20 with the control device 21.
[0053]
First dot d ₁ And the second dot d ₂ Is strongly attracted, the thickness tends to increase at that portion, but the first dot d ₁ The size of the second dot d is small ₂ Because these dots are inside, even if these dots are attracted, the first and second dots d ₁ , D ₂ It is possible to prevent the film thickness of this portion from becoming too thick.
[0054]
Second dot d ₂ Is the first dot d ₁ The second dot d ₂ The solution of the portion of the ₃ Can be compensated for. Thereby, the first to third dots d ₁ ~ D ₃ The film thickness is almost uniform.
[0055]
4th dot d ₄ Is inside. Therefore, this fourth dot d ₄ Is the first to third dots d ₁ ~ D ₃ A thin film is formed with substantially the same thickness as this part. As a result, the film thickness along the X direction can be made uniform as shown in FIG. That is, as shown in FIG. 8A, the film thickness along the X direction can be made uniform as compared with the case where dots of the same size are sequentially ejected adjacently.
[0056]
In the second embodiment, the first to fourth dots d1 to d4 are not adjacently sprayed and applied in the X direction, and are not applied in the X direction as shown in FIGS. 6 (a) to 6 (d). for Out of order Even if it is a case where it injects in, it is applicable.
[0057]
FIG. 9 shows a third embodiment of the present invention. In the second embodiment, the case where the solution is spray-applied from one head 9 so that the dots are adjacent along the Y direction has been described. However, in the third embodiment shown in FIG. A plurality of heads along the Y direction, in this embodiment, the first to fourth heads 9a to 9d are provided with their positions shifted in the X direction so that the dots of the solution ejected from the nozzles 16 are adjacent to each other. ing.
[0058]
The first dot d ejected from the first head 9a ₁ , That is, the second dot d ejected from the second head 9b. ₂ Is a third dot d ejected from the third head 9c. ₃ The size of the dot d is ejected from the fourth head 9d ₄ The size of is set to medium.
[0059]
In this way, multiple heads Y direction If the substrate W is provided along with Y direction If the solution is spray-applied from the nozzle 16 of each head while driving in the same manner as in the second embodiment, even if adjacent dots attract each other in the X direction, the film thickness along the X direction is the same as in the second embodiment. Can be made uniform.
[0060]
10A to 10C show a fourth embodiment of the present invention. In the fourth embodiment, as shown in the third embodiment, the solution is applied to the substrate W using the first to fourth heads 9a to 9d, and sprayed from the nozzle 16 of each head. The size of the dots is the same.
[0061]
However, since the dimension along the X direction of the substrate W is large, the four heads 9a to 9d are moved along the Y direction of the substrate W to apply the solution, then shifted in the X direction and then again along the Y direction. Repeat moving several times. Thereby, not only the Y direction of the substrate W but also the X direction was applied over the entire length. In FIG. 10A, the first to fourth heads 9a to 9d are shifted three times in the X direction so that the solution is applied to the entire length of the substrate W in the X direction as shown in FIG. An example is shown.
[0062]
After applying the solution while moving the four heads 9a to 9d along the Y direction, the solution is applied multiple times by shifting in the X direction and moving again in the Y direction, three times in this embodiment. In the case of repetition, a large time lag occurs between the first application and the second application along the X direction, and a time lag also occurs between the second day application and the third application.
[0063]
When a time lag occurs, the affinity between adjacent dots in the X direction among a plurality of dots applied first along the Y direction and a plurality of dots applied next along the Y direction decreases. The solution thickness becomes non-uniform at the boundary between adjacent dots. That is, the thickness of the solution at the boundary portion is thinner than the other portions.
[0064]
Therefore, in the fourth embodiment, when the four heads 9a to 9d are moved along the Y direction to apply the solution, and then shifted in the X direction and applied again along the Y direction, the application is performed first. Different volume d ₁ ~ D ₄ Next, d is applied to one or two rows of dots located at one end in the X direction among the eight dots ₁ ~ D ₄ Among the eight dots, one or two rows of dots positioned at the other end in the X direction are overlapped.
[0065]
In this embodiment, as shown in FIG. 10A, when the second application is performed by shifting the four heads 9a to 9d in the X direction, the fourth application is performed at the first application and the next application. One nozzle 16 of the head 9d and one nozzle 19 of the first head 9a are shown in FIG. ₁ The four heads 9a to 9d are shifted in the X direction so as to overlap each other at the overlap shown by
[0066]
As a result, as shown in FIG. 10B, in the boundary portion along the X direction between the first application and the next application, d of the first dots ₃ And d ₄ And d of the second dot ₁ And d ₂ Similarly, in the second and third coatings, some dots overlap. Due to the overlap, the solution can be applied with a uniform thickness along the width direction of the substrate W as shown in FIG.
In the fourth embodiment, relative driving in the X direction between the head and the substrate may be performed by driving either the head or the substrate.
[0067]
The present invention is not limited to the above embodiments. For example, in the first embodiment, after a plurality of dots are spray-coated along the Y direction of the substrate, a plurality of dots are spray-coated in a predetermined order along the X direction. After completing the spray application of the eyes, the spray application of the solution may be sequentially performed in the order of the second, third,.
[0068]
In the above embodiment, the substrate is driven in the Y direction and the head is driven in the X direction. However, the substrate may be driven not only in the Y direction but also in the X direction. It is not necessary to drive in the direction.
[0069]
【The invention's effect】
As described above, according to the present invention, when a film is formed by filling a space between dots ejected from a pair of nozzles with a plurality of dots, the first dot and the last dot are not adjacent to each other. The maximum time required for adjacently applied dots can be shortened compared to the conventional case.
[0070]
Accordingly, it is possible to suppress a decrease in affinity due to a change with time of adjacent dots, and thus it is possible to make the film thickness uniform.
[Brief description of the drawings]
FIG. 1 is a front view of a film forming apparatus according to a first embodiment of the invention.
FIG. 2 is a side view of a film forming apparatus.
FIG. 3 is a cross-sectional view of a head.
FIG. 4 is a bottom view of the head.
FIG. 5 is a block diagram of driving control of a head by a control device.
FIGS. 6A to 6D are explanatory views of a coating method according to the first embodiment of the present invention.
FIG. 7 is an explanatory diagram of a coating method according to a second embodiment of the present invention.
FIG. 8A is a diagram illustrating the state of film thickness when coating is performed without controlling the size of adjacent dots, and FIG. 8B is a diagram when coating is performed while controlling the size of adjacent dots. The figure explaining the state of film thickness.
FIG. 9 is an explanatory diagram of a coating method according to a third embodiment of the present invention.
FIGS. 10A and 10B show a fourth embodiment of the present invention, where FIG. 10A is an explanatory diagram showing a state in which a plurality of heads are displaced in a predetermined direction, and FIG. c) Explanatory drawing which shows the thickness of the solution apply | coated to a board | substrate.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 5 ... Table, 9 ... Head, 18 ... Piezoelectric element, 16 ... Nozzle, 21 ... Control apparatus, 20 ... Drive part, 31 Head table, 32 ... Drive source.

Claims (2)

In a film forming method of spraying and applying a solution to a substrate with dots having a diameter smaller than the interval between adjacent nozzles from a plurality of nozzles formed at predetermined intervals in a head in a predetermined direction,
A step of spraying and applying a plurality of dots from each nozzle to the substrate along the relative movement direction while relatively moving the head and the substrate in a direction perpendicular to the arrangement direction of the nozzles;
The head and the substrate are moved relative to each other in the predetermined direction, and a portion between a pair of dot rows formed by the dots first ejected from the pair of nozzles at a predetermined interval is filled with a plurality of dots. Comprising steps,
A portion between a pair of dot rows first sprayed on the substrate at a predetermined interval is formed by a plurality of dots in an order in which the dot row applied last is not adjacent to the dot row applied first. A film forming method characterized by painting. In a film forming apparatus that sprays and applies a solution to a substrate with dots having a diameter smaller than the interval between adjacent nozzles from a plurality of nozzles formed at predetermined intervals in a head in a predetermined direction.
Driving means for relatively driving the head and the substrate in the predetermined direction and a direction orthogonal to the predetermined direction;
A plurality of dots of the solution which are spaced apart from the nozzle of the head to the substrate at a predetermined interval in the predetermined direction and are continuous in a direction orthogonal to the predetermined direction are sprayed and then formed by the spray coating. to fill a plurality of dots by the order not to dot row that will be formed by the last injection coated portion between the pair of dot rows in the dot rows formed by the first jetting applicator adjacent to adjacent, the And a control means for controlling the drive means.

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