JP2005000721A5 - - Google Patents
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- Publication number
- JP2005000721A5 JP2005000721A5 JP2003163690A JP2003163690A JP2005000721A5 JP 2005000721 A5 JP2005000721 A5 JP 2005000721A5 JP 2003163690 A JP2003163690 A JP 2003163690A JP 2003163690 A JP2003163690 A JP 2003163690A JP 2005000721 A5 JP2005000721 A5 JP 2005000721A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003163690A JP4627618B2 (en) | 2003-06-09 | 2003-06-09 | Film forming method and film forming apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003163690A JP4627618B2 (en) | 2003-06-09 | 2003-06-09 | Film forming method and film forming apparatus |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009092296A Division JP4673417B2 (en) | 2009-04-06 | 2009-04-06 | Film forming method and film forming apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005000721A JP2005000721A (en) | 2005-01-06 |
| JP2005000721A5 true JP2005000721A5 (en) | 2006-07-27 |
| JP4627618B2 JP4627618B2 (en) | 2011-02-09 |
Family
ID=34090728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003163690A Expired - Fee Related JP4627618B2 (en) | 2003-06-09 | 2003-06-09 | Film forming method and film forming apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4627618B2 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4749016B2 (en) * | 2005-03-29 | 2011-08-17 | 芝浦メカトロニクス株式会社 | Inkjet coating apparatus and inkjet head cleaning method |
| JP4852257B2 (en) * | 2005-04-08 | 2012-01-11 | 芝浦メカトロニクス株式会社 | Solution coating apparatus and coating method |
| US8707890B2 (en) | 2006-07-18 | 2014-04-29 | Asml Netherlands B.V. | Imprint lithography |
| JP4470945B2 (en) | 2007-02-05 | 2010-06-02 | セイコーエプソン株式会社 | Film forming method and alignment film forming method |
| RU2481607C2 (en) * | 2008-11-21 | 2013-05-10 | Шарп Кабусики Кайся | Method of injecting droplet of levelling material and apparatus for realising said method |
| NL2003875A (en) | 2009-02-04 | 2010-08-05 | Asml Netherlands Bv | Imprint lithography method and apparatus. |
| JP5492289B2 (en) * | 2010-03-26 | 2014-05-14 | シャープ株式会社 | Film forming apparatus and film forming method |
| JP6339553B2 (en) * | 2015-12-24 | 2018-06-06 | Ａｉメカテック株式会社 | Thin film forming equipment |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3124718B2 (en) * | 1995-03-31 | 2001-01-15 | キヤノン株式会社 | Method and apparatus for manufacturing color filter and method for reducing color unevenness in filter element row of color filter |
| JPH1044398A (en) * | 1996-08-07 | 1998-02-17 | Fuji Xerox Co Ltd | Ink jet recording head and ink jet recorder |
| JP4065475B2 (en) * | 1998-09-02 | 2008-03-26 | キヤノン株式会社 | Color filter manufacturing method, liquid crystal element using the color filter manufactured by this manufacturing method, and inkjet head |
| JP3697131B2 (en) * | 2000-02-21 | 2005-09-21 | キヤノン株式会社 | Manufacturing method of color filter, manufacturing apparatus, manufacturing method of display device including color filter, and manufacturing method of device including the display device |
| JP2001353857A (en) * | 2000-06-15 | 2001-12-25 | Seiko Epson Corp | Ink jet head and ink jet printer |
| JP4372984B2 (en) * | 2000-09-27 | 2009-11-25 | 東京エレクトロン株式会社 | Coating apparatus and coating method |
| GB2379414A (en) * | 2001-09-10 | 2003-03-12 | Seiko Epson Corp | Method of forming a large flexible electronic display on a substrate using an inkjet head(s) disposed about a vacuum roller holding the substrate |
| JP2003080130A (en) * | 2001-09-11 | 2003-03-18 | Shibaura Mechatronics Corp | Coating apparatus and coating method |
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2003
- 2003-06-09 JP JP2003163690A patent/JP4627618B2/en not_active Expired - Fee Related