JP2002273868A - Device and method for discharging material, apparatus and method for manufacturing color filter, apparatus and method for manufacturing liquid crystal device, apparatus and method for manufacturing el device, and electronic device to be manufactured by the methods - Google Patents

Abstract

PROBLEM TO BE SOLVED: To shorten a scanning time of an ink jet head part for forming patterns such as filter elements of a color filter, picture element pixels of an EL device, etc. SOLUTION: The apparatus for manufacturing the color filter comprised of a plurality of filter elements arranged on a substrate has a plurality of head parts 20 each including a nozzle array 28 of a plurality of arranged nozzles 27, an ink supply unit for supplying a filter element material to the head parts 20, a carriage 25 for supporting the head parts 20 side by side, a horizontal scanning driving device for horizontally scanning and moving the carriage 25 in an X direction, and a vertical scanning driving device for vertically scanning and moving the carriage 25 in a Y direction. The carriage 25 supports the plurality of head parts 20 individually in a tilt state with an in-plane inclination angle θ.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a material discharging apparatus and a material discharging method for discharging a material to an object.
More specifically, the present invention relates to a manufacturing apparatus and a manufacturing method for manufacturing a color filter used for an optical device such as a liquid crystal device. Further, the present invention relates to an apparatus and a method for manufacturing a liquid crystal device having a color filter. Further, the present invention relates to a manufacturing apparatus and a manufacturing method of an EL device for performing display using an EL light emitting layer. In addition, the present invention relates to an electronic device manufactured using the method.

[0002]

2. Description of the Related Art In recent years, display devices such as liquid crystal devices and electroluminescence devices (hereinafter referred to as EL devices) have been widely used for display units of electronic devices such as portable telephones and portable computers. Recently, full-color display is often performed by a display device.
Full-color display by a liquid crystal device is performed, for example, by passing light modulated by a liquid crystal layer through a color filter. Then, the color filter is, for example, R
It is formed by arranging dot-shaped (red), G (green), and B (blue) color filter elements in a predetermined arrangement such as a stripe arrangement, a delta arrangement, or a mosaic arrangement.

When full-color display is performed by an EL device, electrodes are arranged on the surface of a substrate formed of, for example, glass, plastic, or the like, and R (red), G (green), for example, are arranged thereon. , B (blue) dot-shaped EL light-emitting layers are arranged in a predetermined arrangement, and these EL light-emitting layers emit light of a desired color by controlling the voltage applied to the electrodes, thereby displaying a full-color display. Do.

[0004] Conventionally, when patterning each color filter element such as R, G, B of a color filter, or by EL
It is known to use a photolithography method when patterning each color picture element pixel such as R, G, B of the apparatus. However, when this photolithography method is used, there are problems that the process is complicated and the cost is increased because a large amount of each color material and photoresist are consumed.

In order to solve this problem, a filter material or an EL light emitting material or the like is ejected in the form of dots by an ink-jet method, so that a filament or EL having a dot arrangement is formed.
A method for forming a light emitting layer and the like has been proposed.

[0006] For example, in FIG.
As shown in FIG. 22B, a plurality of filter elements arranged in a dot pattern are formed in a large-area substrate formed of plastic or the like, that is, inside a plurality of panel regions 302 set on the surface of a so-called motherboard 301. 3
03 is formed based on the inkjet method. In this case, for example, as shown in FIG.
Nozzle row 30 in which a plurality of nozzles 304 are arranged in a row
The ink jet head 306 having No. 5
As shown by arrows A1 and A2 in (b), one panel region 302 is repeated a plurality of times (2 in FIG. 22 (b)).
While the main scanning is performed, the filter element 303 is formed at a desired position by selectively discharging ink, that is, a filter element material from a plurality of nozzles during the main scanning.

The filter element 303 is formed by arranging each color of R, G, B and the like in an appropriate arrangement such as a stripe arrangement, a delta arrangement, a mosaic arrangement, etc., and is shown in FIG. The ink ejection process by the inkjet head 306 is performed by setting the inkjet head 306 that ejects a single color of R, G, and B to R, G, and B.
The three color arrangements of R, G, B, etc. are formed in advance on one motherboard 301 by using the ink jet heads 306 in order for three colors such as B.

By the way, the ordinary ink jet head 3
The number of nozzles provided in 06 is about 160 to 180. Further, the normal motherboard 301 has a larger area than the inkjet head 306. Therefore, when forming the filter element 303 on the surface of the motherboard 301 using the inkjet head 306, the inkjet head 306 is
It is necessary to draw the image by performing ink discharge during each main scan by moving the motherboard 301 a plurality of times in the main scan by the inkjet head 306 while moving the sub-scan relative to the main scan.

However, such a method has a problem that the number of scans of the ink jet head 306 with respect to the motherboard 301 is large and the drawing time, that is, the manufacturing time of the color filter is long. In order to solve this problem, the present applicant has proposed in Japanese Patent Application No. 11-279752 an invention in which the number of nozzles is substantially increased by supporting a plurality of heads in a straight line with a support member. .

If this method is used, for example, FIG.
As shown in FIG. 7, a plurality of, for example, six head units 306 are linearly supported by a support member 307,
7 while moving in the sub-scanning direction Y in the sub-scanning direction.
The main scanning is performed a plurality of times as in A2,..., And ink is selectively ejected from each nozzle 304 during each main scanning. According to this method, the ink can be supplied to a wide area by one main scan, so that the manufacturing time of the color filter can be shortened.

[0011]

By the way, FIG.
In the conventional method shown in FIG.
Are arranged in parallel with the sub-scanning direction Y to form a straight nozzle row. Therefore, the interval between the plurality of nozzles, that is, the nozzle pitch is equal to the interval between the filter elements 303 on the motherboard 301 side, that is, the element pitch. It was necessary to be the same. However, it has been very difficult to form an inkjet head such that the pitch between nozzles is equal to the pitch between elements.

To solve this problem, as shown in FIG. 23B, the support member 307 is inclined at an angle θ with respect to the sub-scanning direction Y so that the pitch between nozzles of the head unit 306 and the inside of the motherboard 301 can be reduced. A method of matching the pitch between the elements can be considered. However, in this case, the nozzle rows formed by the head units 306 arranged in a row are shifted with the dimension Z in the main scanning direction X, and the main scanning time for ink ejection is lengthened by the shift amount. The problem occurs. In particular,
In the case of using a head unit having a six-row structure as shown in FIG. 23 (b), since the length of the nozzle row becomes longer, the above-mentioned displacement dimension also becomes longer, so that the main scanning time must be further lengthened. appear.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and reduces the scanning time of an ink-jet head for forming a pattern such as a filter element of a color filter or a picture element pixel of an EL device. The purpose is to make.

[0014]

In order to achieve the above object, a material discharging apparatus according to the present invention comprises a material discharging apparatus for discharging a material onto an object, comprising a nozzle array having a plurality of nozzles arranged therein. Having a plurality of heads, a support mechanism for supporting the plurality of heads, and a mechanism for scanning one of the object and the support mechanism with respect to the other, and The nozzle row is inclined. More specifically, the plurality of heads are supported by being inclined with respect to the longitudinal direction of the support mechanism. Here, “scanning” indicates one or both of a main scanning direction and a sub-scanning direction intersecting with the main scanning direction.

According to the material discharging apparatus of the present invention, the substrate is scanned by the support means supporting a plurality of heads,
Material can be discharged from these multiple heads,
Therefore, the scanning time can be reduced as compared with the case where the object is scanned using one head unit.

In the present invention, the pitch between nozzles of the nozzle row is substantially equal in the plurality of heads, and the magnitude of the inclination angle of the nozzle row is substantially equal in the plurality of heads. preferable. By doing so, it becomes possible to discharge the discharge material regularly on the target object, and control for drawing a regular pattern is facilitated.

Since each head scans in an inclined state, the pitch between nozzles of a plurality of nozzles belonging to each head can be made to match the pitch between filter elements formed on an object.

Further, since the individual head portions are inclined instead of the entire supporting means, the distance between the nozzle closer to the substrate and the nozzle farther from the substrate is determined by the case where the entire supporting means is inclined. Therefore, the time for scanning the substrate by the support means can be reduced.

Further, according to the material discharging apparatus of the present invention, in a material discharging apparatus for discharging a material onto an object, a plurality of heads having a nozzle row in which a plurality of nozzles are arranged, and the plurality of heads are supported. A support mechanism, a mechanism for scanning one of the object and the support mechanism with respect to the other, and a mechanism for controlling an angle between at least one nozzle row and the scanning direction. It is characterized by the following. Preferably, the apparatus further includes a mechanism for controlling an interval between the nozzle rows.

According to the material discharging apparatus having the above-described structure, the same effect as that provided by the above-described material discharging apparatus can be obtained by setting the nozzle row to the inclined state by the nozzle row angle control mechanism. Further, according to the material discharging apparatus, the heads supported by one supporting mechanism can be easily matched with different element pitches by the function of the nozzle array angle control mechanism. Moreover, in this case, the spacing between one nozzle row and the adjacent nozzle row can be accurately adjusted by the function of the nozzle row spacing control mechanism so that those nozzle rows are continuous at a constant nozzle pitch.

The nozzle row angle control mechanism and the nozzle row interval control mechanism are not limited to those having special structures, but can be achieved by any structure capable of achieving the above functions. For example, the nozzle array angle control mechanism is as follows, that is, each head section is attached to the support mechanism so as to be rotatable in-plane, and those head sections are used as a power source such as a pulse motor or a servo motor that can control the rotation angle. It can be configured by connecting directly or indirectly via a power transmission mechanism or the like. According to this configuration, the tilt angle of each nozzle row can be adjusted to a desired value by controlling the output angle value of the power source, and the output shaft of the power source after the adjustment is held in a locked state. Thus, the inclination angle of each nozzle row can be fixedly held at a desired value.

Further, the nozzle array interval control mechanism is not limited to a special structure, but can be achieved by any structure capable of achieving the above functions. For example, the center of the in-plane rotation of each head may be slidably attached to a support member, and the heads may be connected to a reciprocating slide drive unit. The reciprocating slide movement driving unit is configured using a slide drive device that uses a rotating device such as a pulse motor or a servo motor that can control the rotation angle as a power source, or a linear drive source such as a linear motor. It can be constituted by a slide drive device.

In the mechanism for controlling the angle between the nozzle row and the scanning direction, the pitch between nozzles of the nozzle row and the magnitude of the inclination angle of the nozzle row are substantially equal in the plurality of heads. It is preferable that such control can be performed.

According to a method of discharging a material according to the present invention, in the method of discharging a material onto an object, a plurality of heads having a nozzle row in which a plurality of nozzles are arranged, and a support for supporting the plurality of heads are provided. Scanning one of the mechanisms with respect to the other, and discharging the material onto the object, wherein at least one of the nozzle rows is inclined with respect to the scanning direction. Features.
In this case, one of the object and the support member is scanned with respect to the other in the main scanning direction, the sub-scanning direction intersecting with the main scanning direction, or both.

It is preferable that the pitch between the nozzles of the nozzle row and the magnitude of the inclination angle of the nozzle row be substantially equal in the plurality of heads.

Further, the method may further include a step of controlling an angle between the at least one nozzle row and the scanning direction, and a step of controlling an interval between the plurality of nozzle rows. Good.

The material discharging apparatus and material discharging method described above include, for example, a color filter manufacturing apparatus and a color filter manufacturing method for discharging a filter material to a substrate, and an EL device for discharging an EL luminescent material to a substrate. The present invention can be used for a device manufacturing apparatus, a manufacturing method, and the like, but is not limited to these, and various technical application ranges can be considered. In particular, components manufactured using a manufacturing method including the above-described material discharging method are used for electronic devices such as mobile phones and portable computers.

Further, the color filter manufacturing apparatus according to the present invention has a plurality of heads having a nozzle row in which a plurality of nozzles are arranged, and a support mechanism for supporting the plurality of head portions. The mechanism supports the plurality of heads in an inclined state.

In the above configuration, the filters may be, for example, three primary colors of R (red), G (green), B (blue),
Each color material such as three primary colors (cyan), Y (yellow), and M (magenta) can be considered.

According to the color filter manufacturing apparatus,
The filter material can be ejected from the plurality of heads during the main scanning of the substrate by the support means supporting the plurality of heads. Therefore, when scanning the substrate surface using one head, In comparison, the scanning time can be reduced.

Further, since each head performs the main scanning in an inclined state, the pitch between the nozzles of the plurality of nozzles belonging to each head can be made to match the pitch between the elements of the filter element formed on the substrate. Furthermore, since the individual head portions are inclined instead of inclining the entire support means, the distance between the nozzle on the side closer to the substrate and the nozzle on the far side from the substrate is smaller than when the entire support means is inclined. The time required to scan the substrate by the support means can be reduced. Thereby, the manufacturing time of the color filter can be reduced.

In the color filter manufacturing apparatus having the above-mentioned structure, the support means can support the head portion in a fixed state, or support the head portion so that the inclination angle and / or the distance between the head portions can be changed. You can also.

Further, in the color filter manufacturing apparatus having the above-described structure, it is preferable that the pitch between nozzles of the nozzle rows belonging to the plurality of heads is substantially equal, and that the inclination angles of the nozzle rows are also substantially equal. . This makes it possible to easily control the supply of the filter material to a desired position.

It is sufficient that the plurality of nozzle rows have the same inclination angle, and the inclination direction may be different between plus and minus. Further, here and hereinafter, “substantially” means a case where a slight difference occurs due to a manufacturing error or the like and a large difference does not occur in terms of operation.

The color filter manufacturing apparatus according to the present invention includes a plurality of heads having a nozzle row in which a plurality of nozzles are arranged, a mechanism for supplying a filter material to the heads, and a support for supporting the plurality of heads. A mechanism, a main scanning mechanism for moving the supporting mechanism in a main scanning direction, a sub-scanning mechanism for moving the supporting means in a sub-scanning direction, a nozzle row angle control mechanism for controlling an inclination angle of the plurality of nozzle rows, and a plurality of the plurality of nozzle rows. A nozzle row interval control mechanism for controlling the interval between nozzle rows.

According to the color filter manufacturing apparatus of this configuration, by setting each of the plurality of nozzle rows in the inclined state by the nozzle row angle control mechanism, the same effect as the above-described color filter manufacturing apparatus can be obtained. The effect can be obtained.

Further, according to the second color filter manufacturing apparatus, each head portion supported by one supporting means can easily be made to coincide with a different element pitch by the function of the nozzle array angle control mechanism. it can. Moreover, in this case, the spacing between one nozzle row and the adjacent nozzle row can be accurately adjusted by the function of the nozzle row spacing control mechanism so that those nozzle rows are continuous at a constant nozzle pitch.

The nozzle array angle control mechanism, the nozzle array interval control mechanism, and the nozzle array interval control mechanism are not limited to those having a special structure, but can be achieved by any structure capable of achieving the above functions. For example, the materials described in the above-described material discharging apparatus can be used.

In the above color filter manufacturing apparatus,
A pitch between nozzles of a nozzle row belonging to the plurality of heads,
It is desirable that the inclination angles of the nozzle rows are substantially equal to each other.

Next, the method for manufacturing a color filter according to the present invention is the method for manufacturing a color filter, wherein a head having a nozzle array in which a plurality of nozzles are arranged is moved in the main scanning direction while moving the head from the plurality of nozzles. A step of discharging the filter material to form the filter element on the substrate, wherein the plurality of heads are provided side by side and are arranged in an inclined state.

According to this manufacturing method, a plurality of heads can be simultaneously moved in the main scanning direction and the filter material can be discharged from each of the heads, so that the substrate surface can be scanned using only one head. And the scanning time can be reduced.

Further, since each head performs main scanning in an inclined state, the pitch between nozzles of a plurality of nozzles belonging to each head can be matched with the pitch between elements of a filter element formed on a substrate. Further, since a plurality of heads are arranged in a line and the heads are individually inclined instead of inclining the one row,
The distance between the nozzle closer to the substrate and the nozzle farther from the substrate is smaller than when the entire row is inclined,
Therefore, the time for scanning the substrate by the plurality of nozzle arrays can be reduced. Thereby, the manufacturing time of the color filter can be reduced.

In the method of manufacturing a color filter having the above-described structure, it is preferable that, in the plurality of heads, the pitch between the nozzles of the nozzle row is substantially equal, and the inclination angle of the nozzle row is substantially equal. .

Next, a liquid crystal device manufacturing apparatus according to the present invention is the liquid crystal device manufacturing apparatus, wherein a plurality of heads having a nozzle row in which a plurality of nozzles are arranged, a mechanism for supplying a filter material to the heads, A support mechanism that supports the plurality of heads; a main scanning mechanism that moves the support mechanism in a main scanning direction; and a sub-scanning mechanism that moves the support mechanism in a sub-scanning direction. It is characterized by being supported in an inclined state.

According to the liquid crystal device manufacturing apparatus, the ink, that is, the filter element material can be discharged from the plurality of heads during the main scanning of the substrate by the support means supporting the plurality of heads. (1) The scanning time can be reduced as compared with the case where the substrate surface is scanned using only one head unit.

Further, since each head performs main scanning in an inclined state, the pitch between nozzles of a plurality of nozzles belonging to each head can be matched with the pitch between filter elements formed on the substrate. Furthermore, since the individual head portions are inclined instead of inclining the entire support means, the distance between the nozzle on the side closer to the substrate and the nozzle on the far side from the substrate is smaller than when the entire support means is inclined. The time required to scan the substrate by the support means can be reduced. Thereby, the manufacturing time of the color filter can be reduced.

Next, in the method of manufacturing a liquid crystal device according to the present invention, the filter material is discharged from the plurality of nozzles while moving a head having a nozzle row in which a plurality of nozzles are arranged in the main scanning direction. A step of forming the filter element on a substrate, wherein a plurality of the heads are provided side by side and arranged in an inclined state.

According to this manufacturing method, the ink can be ejected from each head by simultaneously moving the plurality of heads in the main scanning direction, so that the substrate surface can be scanned using only one head. Scanning time can be reduced.

Further, since each head performs main scanning in an inclined state, the pitch between the nozzles of the plurality of nozzles belonging to each head can be made to match the pitch between the filter elements formed on the substrate. Further, since a plurality of heads are arranged in a line and the heads are individually inclined instead of inclining the one row,
The distance between the nozzle closer to the substrate and the nozzle farther from the substrate is smaller than when the entire row is inclined,
Therefore, the time for scanning the substrate by the plurality of nozzle arrays can be reduced. As a result, the manufacturing time of the color filter and thus the manufacturing time of the liquid crystal device can be reduced.

Next, an apparatus for manufacturing an EL device according to the present invention comprises: a plurality of heads each having a nozzle row in which a plurality of nozzles are arranged; a mechanism for supplying an EL light emitting material to the heads;
A support mechanism for arranging and supporting the plurality of heads, a main scanning mechanism for moving the support mechanism in a main scanning direction, a sub-scanning mechanism for moving the supporting means in a sub-scanning direction, and a nozzle for controlling an inclination angle of the plurality of nozzle rows A row angle control mechanism and a nozzle row interval control mechanism for controlling the interval between the plurality of nozzle rows are provided.

According to the EL device manufacturing apparatus, the ink, that is, the EL luminescent material can be discharged from the plurality of heads during the main scanning of the substrate by the support means supporting the plurality of heads. (1) The scanning time can be reduced as compared with the case where the substrate surface is scanned using only one head unit.

Further, since each head section performs the main scanning in an inclined state, the pitch between the nozzles of the plurality of nozzles belonging to each head section can be made to match the pitch between the pixel pixels formed on the substrate. Furthermore, since the individual head portions are inclined instead of inclining the entire support means, the distance between the nozzle on the side closer to the substrate and the nozzle on the far side from the substrate is smaller than when the entire support means is inclined. The time required to scan the substrate by the support means can be reduced. Thereby, the manufacturing time of the El device can be reduced.

Next, in the method of manufacturing an EL device according to the present invention, while moving a head having a nozzle row in which a plurality of nozzles are arranged in the main scanning direction, an EL light emitting material is discharged from the plurality of nozzles. A step of forming the EL light emitting layer on the substrate, wherein a plurality of the heads are provided side by side and arranged in an inclined state.

According to this manufacturing method, a plurality of heads can be simultaneously moved in the main scanning direction to eject ink, that is, an EL light emitting material from each head. Therefore, when scanning the substrate surface using only one head, The scanning time can be shortened as compared with.

Further, since each head performs the main scanning in an inclined state, the pitch between the nozzles of the plurality of nozzles belonging to each head can be made to match the pitch between the picture elements formed on the substrate. Further, since a plurality of heads are arranged in one line and the heads are inclined individually instead of inclining one line, the nozzles closer to the substrate and the nozzles farther from the substrate are not inclined. Distance is 1
Smaller than if you tilt the entire row, and therefore
The time for scanning the substrate by the plurality of nozzle rows can be reduced. Thereby, the manufacturing time of the EL device can be reduced.

[0056]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) An embodiment of a method for manufacturing a color filter and an apparatus for manufacturing the same will be described below. First, before describing the manufacturing method and the manufacturing apparatus, a color filter manufactured by using the manufacturing method and the like will be described. FIG. 6A schematically shows a planar structure of one embodiment of a color filter. Also, FIG. 7D shows VII-VI of FIG.
2 shows a cross-sectional structure according to line I.

The color filter 1 of the present embodiment is a rectangular substrate 2 made of glass, plastic, or the like.
Are formed by forming a plurality of filter elements 3 in a dot pattern shape, in this embodiment, in a dot matrix shape, and further, by laminating a protective film 4 thereon as shown in FIG. 7D. I have. FIG. 6A is a plan view showing the color filter 1 with the protective film 4 removed. That is, in the present embodiment, the filter element 3 is illustrated as a color pattern formed by inkjet.

The filter element 3 is formed by filling a plurality of rectangular regions which are partitioned by partitions 6 formed in a lattice pattern with a resin material having no translucency and arranged in a dot matrix form with a coloring material. It is formed.
Each of these filter elements 3 is
It is formed of any one of R (red), G (green), and B (blue) color materials, and the respective color filter elements 3 are arranged in a predetermined arrangement. As this arrangement, for example, a stripe arrangement shown in FIG.
A mosaic arrangement shown in FIG. 8B and a delta arrangement shown in FIG. 8C are known.

The stripe arrangement is a color arrangement in which all columns of the matrix have the same color. In the mosaic arrangement, any three filter elements arranged on a vertical and horizontal line are R, G,
B is a three-color arrangement. The delta arrangement is a color arrangement in which the arrangement of the filter elements is different, and any three adjacent filter elements have three colors of R, G, and B.

In FIG. 6, the size of the color filter 1 is, for example, 1.8 inches. The size of one filter element 3 is, for example, 30 μm × 100
μm. The interval between the filter elements 3, that is, the so-called element pitch is, for example, 75 μm.
It is.

When the color filter 1 of this embodiment is used as an optical element for full-color display, R, R
One pixel is formed by using the three G and B filter elements 3 as one unit, and light is selectively passed through any one of R, G, and B or a combination thereof in one pixel, thereby providing full color. Display. At this time, the partition 6 formed of a non-translucent resin material acts as a black mask.

The above color filter 1 is, for example, as shown in FIG.
It is cut out from a large-area mother substrate 12 as shown in FIG. Specifically, first, a pattern for one color filter 1 is formed on each surface of the plurality of color filter forming regions 11 set in the mother substrate 12, and further, around the color filter forming regions 11. The color filters 1 are formed by forming cutting grooves on the substrate and cutting the mother substrate 12 along the grooves.

The color filter 1 shown in FIG.
A manufacturing method and a manufacturing apparatus for manufacturing the same will be described.

FIG. 7 schematically shows a method of manufacturing the color filter 1 in the order of steps. First, the partition walls 6 are formed in a lattice pattern on the surface of the mother substrate 12 using a non-translucent resin material as viewed in the direction of arrow B. The portion 7 of the lattice hole of the lattice pattern is a region where the filter element 3 is formed, that is, a filter element formation region. The planar dimension of each filter element forming region 7 formed by the partition walls 6 when viewed from the direction of arrow B is, for example, about 30 μm × 100 μm.

The partition 6 has a filter element forming region 7
Has a function of preventing the flow of the ink, that is, the filter element material supplied to the filter, and a function of a black mask. The partition 6 is formed by an arbitrary patterning method, for example, a photolithography method, and is further heated and baked by a heater as necessary.

After the partition 6 is formed, as shown in FIG. 7 (b), a droplet 8 of the filter element material is supplied to each filter element formation region 7, so that each filter element formation region 7 is filtered. Fill with. In FIG. 7B, reference numeral 13R denotes a filter element material having an R (red) color, reference numeral 13G denotes a filter element material having a G (green) color,
Reference numeral 13B indicates a filter element material having a color of B (blue).

When each filter element forming region 7 is filled with a predetermined amount of filter element material, the mother substrate 12 is heated to, for example, about 70 ° C. by a heater to evaporate the solvent of the filter element material. Due to the evaporation, the volume of the filter element material 13 is reduced as shown in FIG. When the volume is drastically reduced, the supply of the droplets of the filter element material and the heating of the droplets are repeatedly performed until a sufficient film thickness as a color filter is obtained. By the above processing, only the solid content of the filter element material is finally left to form a film, whereby the desired color filter element 3 is formed.

After the filter elements 3 are formed as described above, a heating process is performed at a predetermined temperature for a predetermined time to completely dry the filaments 3. Thereafter, the protective film 4 is formed by using an appropriate method such as, for example, a spin coating method, a roll coating method, a ripping method, or an inkjet method. The protective film 4 is formed for protecting the filter element 3 and the like and flattening the surface of the color filter 1.

FIG. 9 shows an embodiment of an ink-jet apparatus for carrying out the supply process of the filter element material shown in FIG. ing. The ink-jet device 16 converts the filter element material of one of R, G, and B colors, for example, the R color, into ink droplets in each color filter forming region 11 in the mother substrate 12 (see FIG. 6B). Is a device for discharging and attaching to a predetermined position. Ink jet devices for the G filter element material and the B filter element material are also prepared, respectively, but their structures can be the same as those in FIG. 9, so description thereof will be omitted. .

In FIG. 9, the ink jet device 16
A head unit 26 having an inkjet head 22; a head position controller 17 for controlling the position of the inkjet head 22; a substrate position controller 18 for controlling the position of the mother substrate 12;
A main scanning drive device 19 that moves the inkjet head 22 in the main scanning direction with respect to the mother substrate 12, a sub scanning driving device 21 that moves the inkjet head 22 in the sub scanning direction with respect to the mother substrate 12,
A substrate supply device 23 for supplying the mother substrate 12 to a predetermined working position in the inkjet device 16; and a control device 2 for controlling the overall control of the inkjet device 16
And 4.

The head position control device 17, substrate position control device 18, main scanning driving device 19, and sub-scanning driving device 2
Each device of 1 is installed on the base 9. Each of those devices is covered with a cover 14 as needed.

The ink jet head 22 is, for example, as shown in FIG.
As shown in the figure, a plurality of, in this embodiment, six head units 2
And a carriage 25 as support means for supporting the head units 20 side by side. Carriage 25
Has holes or recesses slightly larger than the head portion 20 at positions where the head portion 20 is to be supported, and each head portion 20 is inserted into those holes and further fixed by screws, adhesives or other fastening means. Is done. Also, the carriage 25
If the position of the head section 20 with respect to the head section 20 is accurately determined, the head section 20 may be fixed by simple press-fitting without using any special fastening means.

The head section 20 has a nozzle row 28 formed by arranging a plurality of nozzles 27 in a row, for example, as shown in FIG. The number of the nozzles 27 is, for example, 180, the hole diameter of the nozzles 27 is, for example, 28 μm, and the nozzle pitch between the nozzles 27 is, for example, 141 μm.
It is. 6A and 6B, the main scanning direction X and the sub-scanning direction Y orthogonal to the color filter 1 and the mother substrate 12 are set as shown in FIG.

In FIG. 2, each head unit 20 has a carriage 25
Is attached to the carriage 25 so as to be inclined at an angle θ with respect to a central axis K1 in the longitudinal direction of the carriage. In addition, as shown in FIG.
The position of the carriage 25 is set so that the center axis K1 of the carriage 25 extends in a direction intersecting the main scanning direction X, that is, in the present embodiment, at right angles. That is, each nozzle row 28 is set at a position inclined at an angle θ with respect to the sub-scanning direction Y which is perpendicular to the main scanning direction.

The ink jet head 22 performs main scanning on the mother substrate 12 by moving in parallel in the X direction. During this main scanning, a filter element material as ink is selectively supplied from a plurality of nozzles 27 in each head unit 20. The filter element material adheres to a predetermined position in the mother substrate 12 by discharging the filter element material. Further, the inkjet head 22 moves in parallel in the sub-scanning direction Y by a predetermined distance, for example, a length of six or less than or longer than the length of the Y component of the nozzle row 28 in the sub-scanning direction. Thus, the main scanning position of the inkjet head 22 can be shifted at a predetermined interval.

Each head section 20 is, for example, shown in FIG.
It has the internal structure shown in FIG. 13A and FIG. Specifically, the head unit 20 includes, for example, a nozzle plate 29 made of stainless steel, a diaphragm 31 facing the nozzle plate 29, and a plurality of partition members 32 that join them together. A partition member 32 is provided between the nozzle plate 29 and the diaphragm 31.
Thus, a plurality of ink chambers 33 and a liquid pool 34 are formed. The plurality of ink chambers 33 and the liquid reservoir 34 communicate with each other via a passage 38.

An ink supply hole 36 is formed at an appropriate position on the vibration plate 31, and an ink supply device 37 is formed in the ink supply hole 36.
Is connected. The ink supply device 37 supplies the filter element material M of one of R, G, and B, for example, R, to the ink supply hole 36. The supplied filter element material M fills the liquid reservoir 34 and further fills the ink chamber 33 through the passage 38.

The nozzle plate 29 is provided with nozzles 27 for jetting the filter element material M from the ink chamber 33 in a jet shape. The ink chamber 33 is provided on the back surface of the diaphragm 31 on which the ink chamber 33 is formed.
The ink pressurizing member 39 is attached so as to correspond to.
As shown in FIG. 13B, the ink pressurizing body 39
It has a piezoelectric element 41 and a pair of electrodes 42a and 42b sandwiching the same. The piezoelectric element 41 has electrodes 42a and 42
When the electric current is supplied to b, the ink chamber 33 bends and deforms so as to protrude outward as indicated by the arrow C, thereby increasing the volume of the ink chamber 33. Then, the filter element material M corresponding to the increased volume flows from the liquid reservoir 34 through the passage 38 into the ink chamber 33.

Next, when the current supply to the piezoelectric element 41 is released, both the piezoelectric element 41 and the diaphragm 31 return to their original shapes. As a result, the pressure of the filter element material M inside the ink chamber 33 increases because the ink chamber 33 also returns to the original volume, and the mother substrate 12 (FIG.
The filter element material M is ejected as droplets 8 toward (b). In the vicinity of the nozzle 27,
An ink-repellent layer 43 made of, for example, a Ni-tetrafluoroethylene eutectoid plating layer is provided in order to prevent the flight of the droplet 8 and the clogging of the hole of the nozzle 27.

In FIG. 10, the head position controller 17
Is an α motor 44 for rotating the inkjet head 22 in a plane, a β motor 46 for swingingly rotating the inkjet head 22 about an axis parallel to the sub-scanning direction Y, and an axis parallel to the main scanning direction X. A γ motor 47 for swinging and rotating around, and a Z motor 48 for horizontally moving the inkjet head 22 in a vertical direction
And

The board position control device 18 shown in FIG. 9 uses a table 49 on which the mother board 12 is placed as shown in FIG.
And a θ motor 51 for rotating the table 49 in-plane as indicated by an arrow θ. Further, as shown in FIG. 10, the main scanning drive device 19 shown in FIG. 9 includes a guide rail 52 extending in the main scanning direction X and a slider 53 containing a pulse-driven linear motor. The slider 53 is used to move the guide rail 5 when the built-in linear motor operates.
2 along the main scanning direction.

The sub-scanning driving device 21 shown in FIG.
Has a guide rail 54 extending in the sub-scanning direction Y and a slider 56 containing a pulse-driven linear motor, as shown in FIG. The slider 56 moves in the sub-scanning direction Y along the guide rail 54 when the built-in linear motor operates.

A linear motor driven by a pulse in the slider 53 or the slider 56 can precisely control the rotation angle of the output shaft by a pulse signal supplied to the motor. 22 in the main scanning direction X and the table 4
9 can be controlled with high definition in the sub-scanning direction Y. The position control of the ink jet head 22 and the table 49 is not limited to the position control using a pulse motor, but can also be realized by feedback control using a servo motor or any other control method.

The substrate supply device 23 shown in FIG. 9 includes a substrate accommodating portion 57 for accommodating the mother substrate 12 and a mother substrate 12.
And a robot 58 for transporting. The robot 58
A base 59 placed on an installation surface such as a floor, the ground, etc .; an elevating shaft 61 moving up and down with respect to the base 59; a first arm 62 rotating about the elevating shaft 61;
And a suction pad 64 provided on the lower surface of the distal end of the second arm 63. The suction pad 64 can suction the mother substrate 12 by air suction or the like.

In FIG. 9, the ink jet head 22 which is driven by the main scanning driving device 19 and moves in the main scanning.
A capping device 76 and a cleaning device 77 are disposed below the locus and at one side position of the sub-scanning driving device 21. An electronic balance 78 is provided at the other side position. The cleaning device 77 is a device for cleaning the inkjet head 22. The electronic balance 78 is a device that measures the weight of ink droplets ejected from the individual nozzles 27 (see FIG. 11) in the inkjet head 22 for each nozzle. The capping device 76 is a device for preventing the nozzle 27 from drying when the inkjet head 22 is in a standby state.

A head camera 81 is arranged near the ink jet head 22 so as to move integrally with the ink jet head 22. Further, the substrate camera 8 supported by a supporting device (not shown) provided on the base 9.
2 is arranged at a position where the mother substrate 12 can be photographed.

The control device 24 shown in FIG. 9 includes a computer main body 66 containing a processor, a keyboard 67 as an input device, and a CRT as a display device.
(Cathode Ray Tube) display 68. As shown in FIG. 14, the processor has a CPU (Central Processing Unit) 69 for performing arithmetic processing, and a memory for storing various information, that is, an information storage medium 71.

The head position control device 17, substrate position control device 18, main scan drive device 19, sub-scan drive device 21, and piezoelectric element 41 in the ink jet head 22 shown in FIG. 9 (see FIG. 13B). 14 are connected to the CPU 69 via the input / output interface 73 and the bus 74 in FIG. Further, each device of the substrate supply device 23, the input device 67, the display 68, the electronic balance 78, the cleaning device 77, and the capping device 76 is also connected to the CPU 69 via the input / output interface 73 and the bus 74.

The memory 71 has a random access memory (RAM).
mory), semiconductor memory such as ROM (Read Only Memory), hard disk, CD-ROM reader,
This is a concept including an external storage device such as a disk-type storage medium and the like. Functionally, a storage area for storing program software in which a control procedure of the operation of the ink jet device 16 is described, and various R and R shown in FIG. A mother board 12 of one color of R, G, B for realizing the G, B arrangement (FIG.
10), a storage area for storing the amount of sub-scanning movement of the mother substrate 12 in the sub-scanning direction Y in FIG. 10, and a work area for the CPU 69. And an area functioning as a temporary file or the like, and other various storage areas are set.

The CPU 69 controls the ejection of ink, that is, the filter element material, to a predetermined position on the surface of the mother substrate 12 according to the program software stored in the memory 71. A cleaning operation unit for performing an operation for implementing the cleaning process, a capping operation unit for implementing the capping process, and an operation for implementing weight measurement using the electronic balance 78 (see FIG. 9). It has a weight measurement calculation unit and a drawing calculation unit that performs calculation for drawing the filter element material by the inkjet.

If the drawing calculation section is divided in detail, a drawing start position calculation section for setting the ink jet head 22 to an initial position for drawing, and an ink jet head 2
A main scanning control calculation unit for calculating a control for moving the scanning substrate 2 in the main scanning direction X at a predetermined speed, and a control for shifting the mother board 12 in the sub scanning direction Y by a predetermined sub scanning amount. A sub-scanning control operation unit, and a nozzle ejection control operation unit that performs an operation for controlling which of the plurality of nozzles 27 in the inkjet head 22 is operated to eject ink, that is, the filter element material. It has various function calculation units.

In this embodiment, each of the above functions is implemented by C
Although the software is realized by using the PU 69, when each of the above functions can be realized by a single electronic circuit without using the CPU, such an electronic circuit can be used.

Hereinafter, the operation of the ink jet apparatus 16 having the above configuration will be described with reference to the flowchart shown in FIG.

When the ink-jet device 16 is operated by turning on the power by the operator, first, in step S1, initialization is executed. Specifically, the head unit 26, the substrate supply device 23, the control device 24, and the like are set to a predetermined initial state.

Next, when the weight measurement timing comes (YES in step S2), the head unit 2 shown in FIG.
6 is moved to the position of the electronic balance 78 in FIG. 9 by the main scanning drive device 19 (step S3), and the amount of ink ejected from the nozzles 27 is measured using the electronic balance 78 (step S4). Then, the voltage applied to the piezoelectric element 41 corresponding to each nozzle 27 is adjusted according to the ink ejection characteristics of each nozzle 27 (step S5).

Next, when the cleaning timing comes (YES in step S6), the head unit 26 is moved to the cleaning device 77 by the main scanning drive device 19 (step S7), and the ink jet head is moved by the cleaning device 77. 22 is cleaned (step S8).

When the weight measurement timing or the cleaning timing has not arrived (N in steps S2 and S6)
O) Or, when those processes are completed, the motherboard 12 is supplied to the table 49 by operating the substrate supply device 23 of FIG. Specifically, the mother substrate 12 in the substrate housing portion 57 is
Then, the mother substrate 12 is transported to the table 49 by moving the elevating shaft 61, the first arm 62, and the second arm 63, and the positioning pins 50 ( (See FIG. 10). The mother substrate 12 on the table 49
It is desirable to fix the mother substrate 12 to the table 49 by means such as air suction in order to prevent the displacement of the position.

Next, while observing the mother board 12 with the board camera 82 shown in FIG. 9, the output shaft of the θ motor 51 shown in FIG. 10 is rotated in minute angle units to thereby rotate the table 49 in minute angle units. Then, the mother substrate 12 is positioned (Step S10). Next, while observing the mother substrate 12 with the head camera 81 of FIG. 9, the position at which drawing is started by the inkjet head 22 is determined by calculation (step S11), and the main scanning driving device 19 and the sub-scanning driving device 21 are determined. Is operated to move the inkjet head 22 to the drawing start position (step S12).

At this time, the ink jet head 22
As shown in FIG. 1, the center axis K1 of the carriage 25 is
Is set in a direction perpendicular to the main scanning direction X. For this reason, the nozzle row 28 is
The second sub-scanning direction Y is arranged to be inclined at an angle θ. This is because, in the case of a normal ink jet apparatus, the pitch between nozzles, which is the interval between adjacent nozzles 27, and the element pitch, which is the interval between adjacent filter elements 3, that is, the filter element formation region 7, are different. This is a measure for making the dimension component of the pitch between nozzles in the sub-scanning direction Y geometrically equal to the element pitch when the inkjet head 22 is moved in the main scanning direction X.

When the ink-jet head 22 is placed at the drawing start position in step S12 in FIG.
In step S13, the main scanning in the X direction is started, and at the same time, the ejection of ink is started. Specifically, the main scanning drive device 19 shown in FIG.
1 moves linearly in the main scanning direction X in FIG. 1 at a constant speed, and during the movement, when the nozzle 27 corresponding to the filter element forming area 7 to which ink is to be supplied arrives, the ink from the nozzle 27 That is, the filter element material is ejected to fill the area 7 to form the filter element 3.

After one main scan of the mother substrate 12 is completed (step S1).
(YES at 4), and reversely move to return to the initial position (step S15). And further, the inkjet head 2
No. 2 is driven by the sub-scanning driving device 21 and moves in the sub-scanning direction Y by a predetermined sub-scanning amount, for example, the total length of the six nozzle rows 28 in the sub-scanning direction Y component (step S16). . Then, the main scanning and the ink ejection are repeatedly performed to fill the filter element forming region 7 with the filter element material, thereby forming the filter element 3 (step S13).

The drawing operation of the filter element 3 by the ink jet head 22 as described above is performed by the mother substrate 12.
Is completed for all areas (YE in step S17).
S) In step S18, the processed mother substrate 12 is discharged to the outside by the substrate supply device 23 or another transport device. Thereafter, unless the operator gives an instruction to end the processing (step S
1 is NO), the process returns to step S2, and another mother substrate 12
, The ink ejection operation for one of R, G, and B colors is repeatedly performed.

When an instruction to end the work is given by the operator (YES in step S19), CPU 69 transports ink jet head 22 to capping device 76 in FIG. 9 and caps ink jet head 22 by capping device 76. Processing is performed (step S20).

As described above, the patterning of the first color, for example, the R color of the three colors R, G, and B constituting the color filter is completed.
The second color of G and B, for example, G is conveyed to the ink jet device 16 which uses G as a filter element material to perform patterning of G color, and finally, the third color of R, G and B, for example, B color is filtered. The material is conveyed to the ink jet device 16 as an element material, and is subjected to B color patterning. As a result, a mother substrate 12 on which a plurality of color filters 1 (FIG. 6A) having a desired R, G, B dot arrangement such as a stripe arrangement is formed. By cutting the mother substrate 12 for each color filter region 11, a plurality of one color filters 1 are cut out.

If the present color filter 1 is used for color display of a liquid crystal device, an electrode, an alignment film and the like are further laminated on the surface of the present color filter 1. In such a case, if the mother substrate 12 is cut and the individual color filters 1 are cut out before laminating the electrodes and the alignment films, the subsequent steps of forming the electrodes and the like become very troublesome. Therefore, in such a case, after the color filter 1 is completed on the mother substrate 12, the necessary additional processes such as electrode formation and alignment film formation are completed, instead of cutting the mother substrate 12 immediately. It is desirable to cut the mother substrate 12 later.

As described above, according to the method and the apparatus for manufacturing a color filter according to the present embodiment, as shown in FIG. Since ink is ejected from the nozzle rows 28 of the plurality of head units 20 during scanning, the scanning time can be reduced as compared with the case where the surface of the substrate 12 is scanned using only one head unit. Filter manufacturing time can be reduced.

Further, since each head unit 20 performs main scanning in an inclined state at an angle θ with respect to the sub-scanning direction Y, the inter-nozzle pitch of a plurality of nozzles 27 belonging to each head unit 20 is set to The distance between the formation regions 7, that is, the pitch between the elements can be matched.
If the pitch between the nozzles and the pitch between the elements are geometrically matched in this manner, the position of the nozzle row 28 need not be controlled in the sub-scanning direction Y, which is advantageous.

In this embodiment, since the head section 20 is fixed to the carriage 25, the inclination angle θ is one type for one carriage 25. Therefore, when the pitch between the elements on the substrate 12 changes, it is necessary to use another carriage 25 that can realize the inclination angle θ corresponding to the pitch between the elements.

Further, in this embodiment, the carriage 25
Is not inclined, but the individual head units 20 are inclined. Therefore, the distance T between the nozzle 27 on the side closer to the substrate 12 and the nozzle 27 on the side farther from the substrate 12 is smaller than the distance T when the entire carriage 25 is inclined. Compared to the substrate 1 by the inkjet head 22.
2 can significantly reduce the scanning time. Thereby, the manufacturing time of the color filter can be reduced.

In the manufacturing apparatus and the manufacturing method of the present embodiment, since the filter element 3 is formed by ink discharge using the ink jet head 22, there is no need to go through a complicated process such as a method using a photolithography method. Also, no material is wasted.

In the first embodiment, a resin material having no translucency is used for the partition 6. However, a resin material having a translucency may be used for the partition 6. In that case, a black mask may be provided by separately providing a light-shielding metal film or a resin material at a position corresponding to between the filter elements, for example, above the partition 6, below the partition 6, or the like. Alternatively, the partition 6 may be formed of a light-transmitting resin material without a black mask.

In the first embodiment, R, G, and B are used as filter elements.
However, for example, C (cyan), M (magenta), and Y (yellow) may be adopted. In that case, filter element materials having C, M, and Y colors may be used instead of the R, G, and B filter element materials.

(Second Embodiment) FIG. 3 shows another embodiment of a method and an apparatus for manufacturing a color filter according to the present invention.
2 schematically shows a case in which ink, that is, a filter element material is supplied to each filter element forming region 7 in a color filter forming region 11 in a discharge 2 by discharging.

The outline steps performed by the present embodiment are the same as the steps shown in FIG. 7, and the ink jet apparatus used for discharging ink is mechanically the same as the apparatus shown in FIG.

The present embodiment differs from the previous embodiment shown in FIG. 1 in that the support structure of the head unit 20 by the carriage 25 is modified. Specifically, in FIG. 4, the individual head units 20 are supported on the carriage 25 so as to be rotatable about the central axis K2 of the head unit 20 as indicated by an arrow N, that is, rotatable in the plane. Further, the individual head units 20 are supported so as to be slidable with respect to the carriage 25 as indicated by the arrow P, that is, in-plane parallel movement. Further, a nozzle array angle control device 83 and a nozzle array interval control device 84 are additionally provided on the carriage 25.

The nozzle array angle control device 83 controls the in-plane inclination angles θ of the plurality of nozzle arrays 28 individually or collectively. The nozzle array angle control device 83 can be configured by an arbitrary structure. For example, the head unit 2 attached to the casing 25 so as to be rotatable in-plane as indicated by an arrow N
0 can be configured by connecting it directly to a power source such as a pulse motor or a servo motor capable of controlling the rotation angle or indirectly via a power transmission mechanism or the like. According to this configuration, the tilt angle θ of each nozzle row 20 can be adjusted to a desired value by controlling the output angle value of the power source, and the output shaft of the power source after the adjustment is held in a locked state. By doing so, the inclination angle θ of each nozzle row 20 can be fixedly held at a desired value.

The nozzle row interval control device 84 controls the intervals between the plurality of nozzle rows 20 individually or collectively for each individual interval. This nozzle row interval control device 8
4 can be constituted by an arbitrary structure.
A linear drive source such as a linear drive motor or a slide drive device using a rotary device such as a pulse motor or a servo motor as a power source for the head unit 20 slidably mounted on the casing 25 as described above. Can be configured by connecting to a slide drive device or the like configured using

According to the present embodiment, by operating the nozzle array angle control device 83 in FIG. 4 and rotating the head unit 20 in the plane as shown by the arrow N in FIG.
The in-plane tilt angle θ of the nozzle array 28 is adjusted to adjust the pitch between nozzles of the nozzle row 28 to the filter element formation region 7 on the substrate 12.
The pitch between the elements. Further, by operating the nozzle row interval control device 84 in FIG. 4 to adjust the interval between the head sections 20 in FIG. 3, the distance between the nozzles between the ends of the nozzle rows 28 adjacent to each other is set to the Match the pitch between elements.

As described above, the six nozzle rows 28 can be formed as continuous long nozzle rows having a nozzle pitch corresponding to the element pitch. in this way,
According to the present embodiment, one inkjet head 22
By appropriately adjusting the pitch between the nozzles, patterns having different pitches between the elements can be drawn on the substrate 12.

(Third Embodiment) FIG. 5 shows another embodiment of the apparatus and method for manufacturing a color filter according to the present invention.
2 schematically shows a case in which ink, that is, a filter element material is supplied to each filter element forming region 7 in a color filter forming region 11 in a discharge 2 by discharging.

The general steps performed by the present embodiment are the same as those shown in FIG. 7, and the ink jet apparatus used for discharging ink is mechanically the same as the apparatus shown in FIG.

This embodiment is different from the previous embodiment shown in FIGS. 1 and 3 in that the inclination angle θ of the nozzle rows 28 is the same between the nozzle rows 28, but the inclination direction is positive. It alternates between minus. According to this method as well, the six nozzle rows 28 can be formed into a continuous long nozzle row having a nozzle pitch corresponding to the element pitch on the substrate 12 side.

In this embodiment, the nozzle row 28 may be fixed as shown in FIG. 1, or the inclination angle θ and the inclination angle of the nozzle row 28 may be changed as shown in FIG. It is also possible to adopt a structure in which the distance between nozzle rows can be adjusted.

(Fourth Embodiment) FIG. 12 shows a modification of the head section 20 used in the present invention. The difference between the head unit 20 shown here and the head unit 20 shown in FIG.
That is, two nozzle rows 28 are provided along the main scanning direction X. Thereby, one filter element forming region 7 is formed by two nozzles 27 mounted on the same main scanning line.
Can be supplied with a filter element material.

In this embodiment, since the center axis K0 of the ink jet head 22 is inclined at an in-plane inclination angle θ with respect to the sub-scanning direction Y, the nozzles 27 in the two-stage nozzle row 28 When viewed from the carriage 25, it is desirable that they are arranged so as not to be arranged in a direction perpendicular to the central axis K0 but to be placed in the main scanning direction X when viewed from the carriage 25.

(Fifth Embodiment) FIG. 16 shows still another modification of the head section 20 used in the present invention. This head unit 20 is different from the head unit 20 shown in FIG. 11 in that a nozzle row 28R for discharging R-color ink, a nozzle row 28G for discharging G-color ink, and a nozzle row 28B for discharging B-color ink. FIG. 13 shows three types of nozzle rows formed on one head unit 20.
(A) and the ink ejection system shown in FIG.
An R ink supply device 37R is connected to the ink ejection system corresponding to the R nozzle row 28R, a G ink supply device 37G is connected to the ink ejection system corresponding to the G nozzle row 28G, and the B nozzle row 28B Is connected to a B ink supply device 37B.

The outline steps performed by the present embodiment are the same as those shown in FIG. 7, and the ink jet apparatus used for ejecting ink is basically the same as the apparatus shown in FIG.

In the embodiment shown in FIG.
Since only one type of nozzle row 28 is provided for each color, the inkjet head 22 shown in FIG.
It had to be prepared for each of the three colors G and B. On the other hand, when the head unit 20 having the structure shown in FIG. 16 is used, the R, G, and B of the ink jet head 22 having the plurality of head units 20 are subjected to one main scan in the X direction. Since the color can be attached to the mother substrate 12 at the same time, the ink jet head 22
It is enough to prepare only one.

(Sixth Embodiment) FIG. 17 shows an embodiment of a manufacturing method using the apparatus for manufacturing a liquid crystal device according to the present invention. FIG. 18 shows an embodiment of a liquid crystal device manufactured by the manufacturing method. FIG.
Shows a cross-sectional structure of the liquid crystal device taken along line XX in FIG. Prior to description of a method and an apparatus for manufacturing a liquid crystal device, first, a liquid crystal device manufactured by the manufacturing method will be described with reference to an example. The liquid crystal device of the present embodiment is a transflective liquid crystal device that performs full-color display by a simple matrix method.

In FIG. 18, a liquid crystal device 101 includes a liquid crystal driving IC 1 as a semiconductor chip on a liquid crystal panel 102.
03a and 103b are mounted, and F
It is formed by connecting a PC (Flexible Printed Circuit) 104 to the liquid crystal panel 102 and providing an illumination device 106 as a backlight on the back side of the liquid crystal panel 102.

The liquid crystal panel 102 is formed by bonding a first substrate 107a and a second substrate 107b with a sealing material. The sealing material 108 is formed by, for example, attaching an epoxy resin in an annular shape to the inner surface of the first substrate 107a or the second substrate 107b by screen printing or the like. In addition, the sealing material 10
As shown in FIG. 19, a conductive material 109 formed in a spherical or cylindrical shape by a conductive material is included in the inside of the conductor 8 in a dispersed state.

In FIG. 19, the first substrate 107a has a plate-like base member 111a made of transparent glass, transparent plastic, or the like. A reflective film 112 is formed on the inner surface (upper surface in FIG. 19) of the base material 111a, an insulating film 113 is laminated thereon, and a first electrode 114a is formed on the reflective film 112 in a stripe shape (see FIG. 19). FIG.
), And an alignment film 116a is further formed thereon. Further, a polarizing plate 117a is attached to the outer surface (the lower surface in FIG. 19) of the base material 111a by sticking or the like.

In FIG. 18, in order to clearly show the arrangement of the first electrodes 114a, the spacing between the stripes of the first electrodes 114a is drawn much wider than the actual one. Therefore, the number of the first electrodes 114a is reduced. In practice, the first electrode 11
As for 4a, a larger number are formed on the base material 111a.

In FIG. 19, the second substrate 107b has a plate-like substrate 111b made of transparent glass, transparent plastic, or the like. A color filter 118 is formed on the inner surface (the lower surface in FIG. 19) of the base material 111b, and the second electrode 114b is provided thereon with the first electrode 1b.
14a, is formed in a stripe shape (see FIG. 18) in the direction perpendicular to the direction of arrow D when viewed from the direction of arrow D, and furthermore the alignment film 1
16b are formed. Further, a polarizing plate 117b is attached to the outer surface (upper surface in FIG. 19) of the base material 111b by bonding or the like.

In FIG. 18, in order to clearly show the arrangement of the second electrodes 114b, as in the case of the first electrodes 114a, the spacing between the stripes is drawn much wider than the actual one. Although the number of the second electrodes 114b is small, in practice, a larger number of the second electrodes 114b are formed on the base material 111b.

In FIG. 19, the first substrate 107a and the second
In a gap surrounded by the substrate 107b and the sealing material 108, a so-called cell gap, a liquid crystal such as STN
(SuperTwisted Nematic) Liquid crystal L is sealed. A large number of minute and spherical spacers 119 are dispersed on the inner surface of the first substrate 107a or the second substrate 107b, and the thickness of the cell gap is kept uniform by the presence of these spacers 119 in the cell gap. .

The first electrode 114a and the second electrode 114b are arranged orthogonally to each other, and their intersections are arranged in a dot matrix when viewed from the direction of arrow D in FIG. Then, each intersection in the dot matrix forms one picture element pixel. The color filter 118
It is formed by arranging each color element of (red), G (green), and B (blue) in a predetermined pattern as viewed in the direction of arrow D, for example, a pattern such as a stripe arrangement, a delta arrangement, and a mosaic arrangement. The one picture element pixel corresponds to each of R, G, and B, and the three-color picture element pixels of R, G, and B form one unit to constitute one pixel.

By selectively emitting light from a plurality of picture element pixels arranged in a dot matrix, that is, pixels, images such as characters and numerals are displayed on the outside of the second substrate 107b of the liquid crystal panel 102. . The area in which an image is displayed in this way is an effective pixel area, and the planar rectangular area indicated by an arrow V in FIGS. 18 and 19 is an effective display area.

In FIG. 19, a reflection film 112 is formed of a light-reflective material such as an APC alloy or Al (aluminum), and corresponds to each pixel corresponding to an intersection between the first electrode 114a and the second electrode 114b. Opening 1
21 are formed. As a result, the opening 121 is
, Are arranged in the same dot matrix as the picture element pixels.

First electrode 114a and second electrode 114b
Is formed of, for example, ITO which is a transparent conductive material. The alignment films 116a and 116b are formed by attaching a polyimide resin to a film having a uniform thickness. By subjecting these alignment films 116a and 116b to the rubbing treatment, the initial alignment of the liquid crystal molecules on the surfaces of the first substrate 107a and the second substrate 107b is determined.

In FIG. 18, the first substrate 107a is
The first substrate 107a has a larger area than the substrate 107b, and the first substrate 107a has a substrate overhang portion 107c that extends outside the second substrate 107b when these substrates are bonded to each other with the sealant 108. The substrate extension 107c is connected to the second electrode 114b on the second substrate 107b via a lead wire 114c extending from the first electrode 114a and a conductive material 109 (see FIG. 19) existing inside the seal member. A wiring 114d that is electrically connected to the IC, a bump for input of the liquid crystal driving IC 103a, that is, a metal wiring 114e connected to an input terminal, and a liquid crystal driving IC.
Metal wiring 114f connected to input bump 103b
And the like are formed in an appropriate pattern.

In this embodiment, the lead wiring 114c extending from the first electrode 114a and the lead wiring 114d conducting to the second electrode 114b are formed of ITO, that is, a conductive oxide, which is the same material as those electrodes. The metal wires 114e and 114f, which are wires on the input side of the liquid crystal driving ICs 103a and 103b, are formed of a metal material having a low electric resistance value, for example, an APC alloy.
APC alloys are alloys that mainly contain Ag and concomitantly contain Pd and Cu, for example, 98% Ag, 1% Pd, Cu
1% alloy.

Liquid Crystal Driving IC 103a and Liquid Crystal Driving I
C103b is an ACF (Anisotropic Conductive Fil)
m: anisotropic conductive film) 122
It is mounted by being adhered to the surface of c. That is, in the present embodiment, a so-called COG (Chip On Glass) liquid crystal panel having a structure in which a semiconductor chip is directly mounted on a substrate is formed. In this COG type mounting structure, the input side bumps of the liquid crystal driving ICs 103a and 103b and the metal wirings 114e and 114f are conductively connected by the conductive particles contained in the ACF 122, and the output side of the liquid crystal driving ICs 103a and 103b. The bumps and the lead wirings 114c and 114d are conductively connected.

In FIG. 18, the FPC 104 has a flexible resin film 123, a circuit 126 including a chip component 124, and a metal wiring terminal 127. The circuit 126 is directly mounted on the surface of the resin film 123 by soldering or another conductive connection method. The metal wiring terminals 127 are formed of an APC alloy, Cr, Cu, or another conductive material. The portion of the FPC 104 where the metal wiring terminals 127 are formed is the first substrate 10
The ACF 122 is connected to a portion of the wiring 7a where the metal wiring 114e and the metal wiring 114f are formed. Then, due to the function of the conductive particles contained in the ACF 122, the metal wirings 114e and 114f on the substrate side and the metal wiring terminal 127 on the FPC side are conducted.

An external connection terminal 131 is formed at the opposite end of the FPC 104, and the external connection terminal 131 is connected to an external circuit (not shown). Then, based on the signal transmitted from the external circuit, the liquid crystal driving IC 103a
And 103b are driven, and a scanning signal is supplied to one of the first electrode 114a and the second electrode 114b, and a data signal is supplied to the other. Thereby, the voltage of the pixel elements in the dot matrix arranged in the effective display area V is controlled for each pixel, and as a result, the orientation of the liquid crystal L is controlled for each pixel element.

In FIG. 18, a lighting device 106 functioning as a so-called backlight is provided as shown in FIG.
A light guide 132 made of acrylic resin or the like, a diffusion sheet 133 provided on a light exit surface 132b of the light guide 132, and a reflection sheet provided on a surface opposite to the light exit surface 132b of the light guide 132 134 and L as a light source
ED (Light Emitting Diode) 136.

The LED 136 is supported on an LED substrate 137, and the LED substrate 137 is mounted on a support (not shown) formed integrally with the light guide 132, for example. LE
When the D substrate 137 is mounted at a predetermined position on the support, the LED 136 is placed at a position facing the light intake surface 132 a, which is a side end surface of the light guide 132. Reference numeral 138 denotes a cushioning material for buffering an impact applied to the liquid crystal panel 102.

When the LED 136 emits light, the light is taken in from the light taking-in surface 132a and guided to the inside of the light guide 132, and is propagated while being reflected by the reflection sheet 134 and the wall surface of the light guide 132 while being propagated. The light is emitted from the surface 132b through the diffusion sheet 133 to the outside as plane light.

Since the liquid crystal device 101 of this embodiment is configured as described above, if the external light such as sunlight or indoor light is sufficiently bright, the external light from the second substrate 107b in FIG. Is taken into the liquid crystal panel 102, the light passes through the liquid crystal L, is reflected by the reflection film 112, and is supplied to the liquid crystal L again. The orientation of the liquid crystal L is controlled for each of the R, G, and B picture elements by the electrodes 114a and 114b sandwiching the liquid crystal L.
The light supplied to the liquid crystal panel 102 is modulated for each pixel pixel, and an image such as a character or a number is displayed outside the liquid crystal panel 102 by the light that passes through the polarizing plate 117b and the light that cannot pass through the modulation. Thus, a reflective display is performed.

On the other hand, when the amount of external light is not sufficient, the LED 136 emits light to emit planar light from the light emitting surface 132b of the light guide 132, and the light is
The liquid crystal L is supplied to the liquid crystal L through an opening 121 formed in the liquid crystal L. At this time, similarly to the reflection type display, the supplied light is modulated for each pixel by the liquid crystal L whose orientation is controlled, whereby an image is displayed outside. As a result, a transmissive display is performed.

The liquid crystal device 101 having the above configuration is manufactured by, for example, a manufacturing method shown in FIG. In this manufacturing method, a series of steps P1 to P6 is a step of forming the first substrate 107a, and steps P11 to P1 are performed.
A series of steps 4 is a step of forming the second substrate 107b. Usually, each of the first substrate forming step and the second substrate forming step is independently performed.

First, the first substrate forming step will be described. The liquid crystal panel 10 is formed on the surface of a large-area mother raw material base made of a light-transmitting glass, a light-transmitting plastic or the like.
A plurality of reflective films 112 are formed by photolithography or the like, and an insulating film 113 is further formed thereon by a known film forming method (step P1). Using the first electrode 114a and the wiring 1
14c, 114d, 114e and 114f are formed (Step P2).

Next, an alignment film 116a is formed on the first electrode 114a by coating, printing, or the like (step P3), and rubbing is performed on the alignment film 116a to determine the initial alignment of the liquid crystal. (Step P4). next,
For example, the sealing material 108 is formed in a ring shape by screen printing or the like (Step P5), and the spherical spacers 119 are dispersed thereon (Step P6). As described above, a large-area mother first substrate having a plurality of panel patterns on the first substrate 107a of the liquid crystal panel 102 is formed.

A second substrate forming step (steps P11 to P14 in FIG. 17) is performed separately from the above-described first substrate forming step. First, a large-area mother raw material base formed of a light-transmitting glass, a light-transmitting plastic, or the like is prepared, and a plurality of color filters 1 of the liquid crystal panel 102 are provided on the surface thereof.
18 are formed (Step P11). The formation process of this color filter is performed by using the manufacturing method shown in FIG. 7, and the formation of each of the R, G, and B color filter elements in the manufacturing method is performed by using the ink jet device 16 of FIG. It is executed according to the control method of the ink jet head shown in FIG. 2, FIG. 3, FIG. 4, FIG. The method of manufacturing these color filters and the method of controlling the ink jet head are the same as those already described, and thus description thereof will be omitted.

As shown in FIG. 7D, when the color filter 1, ie, the color filter 118, is formed on the mother substrate 12, ie, the mother raw material base, the second electrode 114b is then formed by photolithography. (Step P12) Further, the alignment film 1 is formed by coating, printing, or the like.
16b is formed (step P13), and the alignment film 1
Rubbing treatment is performed on 16b to determine the initial alignment of the liquid crystal (step P14). Thus, a large-area mother second substrate having a plurality of panel patterns on the second substrate 107b of the liquid crystal panel 102 is formed.

After the mother first substrate and the mother second substrate having a large area are formed as described above, the mother substrates are aligned with each other with the sealing member 108 interposed therebetween, that is, are aligned and bonded to each other (step P21). ). As a result, an empty panel structure including the panel portions for a plurality of liquid crystal panels and in which the liquid crystal is not yet sealed is formed.

Next, a scribe groove, that is, a cutting groove is formed at a predetermined position of the completed empty panel structure, and the panel structure is broken, that is, cut based on the scribe groove (step P22). As a result, the liquid crystal injection opening 11 of the sealing material 108 of each liquid crystal panel portion is formed.
A so-called strip-shaped empty panel structure in which 0 (see FIG. 18) is exposed to the outside is formed.

Thereafter, the liquid crystal L is injected into each liquid crystal panel through the exposed liquid crystal injection opening 110, and each liquid crystal injection port 110 is sealed with a resin or the like (step P23). In a normal liquid crystal injection process, for example, a liquid crystal is stored in a storage container, and the storage container storing the liquid crystal and a strip-shaped empty panel are placed in a chamber or the like, and the chamber or the like is evacuated, and then the chamber is evacuated. This is performed by immersing a strip-shaped empty panel in the liquid crystal inside the device, and then opening the chamber to atmospheric pressure. At this time, since the inside of the empty panel is in a vacuum state, the liquid crystal pressurized by the atmospheric pressure is introduced into the inside of the panel through the liquid crystal injection opening. Since the liquid crystal adheres around the liquid crystal panel structure after the liquid crystal injection, the strip-shaped panel after the liquid crystal injection processing is subjected to a cleaning process in step 24.

After that, a scribe groove is formed again at a predetermined position on the strip-shaped mother panel after the liquid crystal injection and the cleaning are completed, and the strip-shaped panel is cut with reference to the scribe groove to obtain a plurality of pieces. The individual liquid crystal panels are cut out individually (step P25). As shown in FIG. 18, liquid crystal driving ICs 103a and 103b are mounted on each of the liquid crystal panels 102 thus manufactured, and a lighting device 106 is mounted as a backlight.
By connecting the liquid crystal device 104 to the target liquid crystal device 10
1 is completed (Step P26).

The above-described method and apparatus for manufacturing a liquid crystal device have the following features, particularly at the stage of manufacturing a color filter. That is, the structure shown in FIG. 1, FIG. 2, FIG. 3, FIG. 4, or FIG. 5 is adopted as the ink jet head, and the substrate 12 is main-scanned by the carriage 25 supporting the plurality of head units 20. During this time, ink is ejected from the nozzle rows 28 of the plurality of head units 20, so that the scanning time can be reduced as compared with the case where the surface of the substrate 12 is scanned using only one head unit. Manufacturing time can be reduced.

Since each head unit 20 performs main scanning in an inclined state at an angle θ with respect to the sub-scanning direction Y, the inter-nozzle pitch of the plurality of nozzles 27 belonging to each head unit 20 is set to The distance between the formation regions 7, that is, the pitch between the elements can be matched.
If the pitch between the nozzles and the pitch between the elements are geometrically matched in this manner, the position of the nozzle row 28 need not be controlled in the sub-scanning direction Y, which is advantageous.

Further, since the individual head portions 20 are inclined instead of the entire carriage 25, the distance T between the nozzle 27 closer to the substrate 12 and the nozzle 27 farther from the substrate 12 is smaller than the carriage 25. Is significantly reduced as compared with the case where the whole is tilted, so that the time for scanning the substrate 12 by the inkjet head 22 can be significantly reduced. Thereby, the manufacturing time of the color filter can be reduced.

In the manufacturing apparatus and the manufacturing method of the present embodiment, since the filter element 3 is formed by ink discharge using the ink jet head 22, there is no need to go through a complicated process such as a method using a photolithography method. Also, no material is wasted.

(Eighth Embodiment) FIG. 20 shows an embodiment of a manufacturing method performed by using an EL device manufacturing apparatus according to the present invention. FIG. 21 shows the main steps of the manufacturing method and the main cross-sectional structure of the finally obtained EL device. As shown in FIG. 21D, the EL device 201
Is a method of forming pixel electrodes 202 on a transparent substrate 204, forming banks 205 between the pixel electrodes 202 in a lattice shape as viewed from the direction of arrow G, and forming a hole injection layer 2 in the lattice-shaped concave portions.
20 are formed, and the R-color light-emitting layer 203R, the G-color light-emitting layer 203G, and the B-color light-emitting layer 203B are formed in each lattice-shaped recess so as to have a predetermined arrangement such as a stripe arrangement when viewed from the direction of arrow G. It is formed by forming the counter electrode 213 on them.

The pixel electrode 202 is connected to a TFD (Thin Film).
When driven by a two-terminal type active element such as a diode (thin film diode) element, the counter electrode 213 is formed in a stripe shape when viewed from the direction of arrow G. In addition, the pixel electrode 202 is connected to a TFT (Thin Film Transi
In the case of driving by a three-terminal type active element such as a stor (thin film transistor), the above-described counter electrode 21 is used.
3 is formed as a single plane electrode.

The area sandwiched between each pixel electrode 202 and each counter electrode 213 is one picture element pixel.
G, B three color picture element pixels become one unit and 1
To form one pixel. By controlling the current flowing through each picture element pixel, a desired one of the plurality of picture element pixels is selectively caused to emit light, whereby a desired full-color image can be displayed in the direction of arrow H.

The EL device 201 is manufactured by, for example, a manufacturing method shown in FIG. That is, the process P5
1 and an active element such as a TFD element or a TFT element is formed on the surface of the transparent substrate 204 as shown in FIG.
Further, a pixel electrode 202 is formed. As a formation method,
For example, a photolithography method, a vacuum deposition method, a sputtering method, a pyrosol method, or the like can be used. As a material for the pixel electrode, ITO (Indium Tin Oxide), tin oxide, a composite oxide of indium oxide and zinc oxide, or the like can be used.

Next, as shown in step P52 and FIG. 20A, a partition wall, that is, a bank 205 is formed by using a well-known patterning method, for example, a photolithography method, and the bank 205 separates between the transparent electrodes 202. buried. Thus, it is possible to improve contrast, prevent color mixing of light emitting materials, and prevent light leakage between pixels. The material of the bank 205 is not particularly limited as long as it has durability with respect to the solvent of the EL material, and can be made into a fluororesin by a fluorocarbon gas plasma treatment, for example, an acrylic resin, an epoxy resin, a photosensitive polyimide, or the like. Organic materials are preferred.

Next, immediately before the ink for the hole injection layer was applied, the substrate 204 was subjected to continuous plasma processing of oxygen gas and fluorocarbon gas plasma (step P53). Thereby, the polyimide surface is made water-repellent, the ITO surface is made hydrophilic, and the wettability on the substrate side for finely patterning the inkjet droplets can be controlled. As a device for generating plasma, a device for generating plasma in a vacuum or a device for generating plasma in the atmosphere can be used in the same manner.

Next, as shown in step P54 and FIG. 21A, the hole injection layer ink is discharged from the ink jet head 22 of the ink jet apparatus 16 in FIG. went. Specific control methods of the ink jet head are shown in FIGS.
The method shown in FIG. 4 or 5 was used. After the application, the solvent was removed under vacuum (1 torr) at room temperature for 20 minutes (step P55), and thereafter, the ink for the light emitting layer was heated at 20 ° C. (on a hot plate) for 10 minutes in air. The incompatible hole injection layer 220 was formed (Step P5).
6). The film thickness was 40 nm.

Next, as shown in Step P57 and FIG. 21B, the hole injection layer 22 in each filter element region is formed.
The ink for the R light emitting layer and the ink for the G light emitting layer were applied on 0 using an ink jet method. Again, each light emitting layer ink is ejected from the ink jet head 22 of the ink jet device 16 of FIG. 9, and the control method of the ink jet head is the method shown in FIG. 1, FIG. 2, FIG. 3, FIG. 4 or FIG. Followed. According to the inkjet method, fine patterning can be performed easily and in a short time. Further, the film thickness can be changed by changing the solid content concentration and the ejection amount of the ink composition.

After applying the light emitting layer ink, vacuum (1 torr)
r), the solvent is removed under the conditions of room temperature, 20 minutes, etc. (step P58), and then conjugated by heat treatment at 150 ° C. for 4 hours in a nitrogen atmosphere to form the R color light emitting layer 203R and the G color light emitting layer 203G. Was formed (Step P59). The film thickness is 50
nm. The light emitting layer conjugated by the heat treatment is insoluble in the solvent.

Before forming the light emitting layer, the hole injection layer 2
20 may be subjected to continuous plasma processing of oxygen gas and fluorocarbon gas plasma. Thereby, the hole injection layer 2
By forming a fluorinated layer on the substrate 20 and increasing the ionization potential, the hole injection efficiency is increased and an organic EL device with high luminous efficiency can be provided.

Next, as shown in step P60 and FIG. 21C, the B-color light-emitting layer 203B is replaced with the R-color light-emitting layer 203R, the G-color light-emitting layer 203G, and the hole injection layer 2 in each pixel.
20 and formed on top of each other. Accordingly, not only the three primary colors of R, G, and B can be formed, but also the level difference between the banks 205 and the R light emitting layers 203R and 203G and the bank 205 can be flattened. As a result, a short circuit between the upper and lower electrodes can be reliably prevented. By adjusting the thickness of the B-color light-emitting layer 203B, the B-color light-emitting layer 203B acts as an electron injection / transport layer in the laminated structure of the R-color light-emitting layer 203R and the G-color light-emitting layer 203G, and emits light of the B color. do not do.

As a method for forming the B-color light-emitting layer 203B, for example, a general spin coating method as a wet method can be adopted, or the R-color light-emitting layer 2B can be used.
An inkjet method similar to the method of forming the 03R and G color light emitting layers 203G can be employed.

Thereafter, as shown in step P61 and FIG. 21D, a target EL device 201 was manufactured by forming a counter electrode 213. When the counter electrode 213 is a plane electrode, for example, Mg, Ag, A
It can be formed using a film forming method such as a vapor deposition method or a sputtering method using l, Li or the like as a material. When the counter electrode 213 is a stripe-shaped electrode, the formed electrode layer can be formed by using a patterning method such as a photolithography method.

According to the manufacturing method and the manufacturing apparatus of the EL device described above, a plurality of head units are employed by adopting the structure shown in FIG. 1, FIG. 2, FIG. 3, FIG. While the main scanning of the substrate 12 is performed by the carriage 25 as a supporting means supporting the substrate 20, the ink is ejected from the nozzle rows 28 of the plurality of head units 20, so that the surface of the substrate 12 is formed using only one head unit. The scanning time can be reduced as compared with the case of scanning, and therefore, the manufacturing time of the EL device can be reduced.

Since each head unit 20 performs main scanning in an inclined state at an angle θ with respect to the sub-scanning direction Y, the pitch between the nozzles of the plurality of nozzles 27 belonging to each head unit 20 is set to the EL picture on the substrate 12. The distance between the element pixel forming regions 7, that is, the pitch between the elements can be matched. If the pitch between the nozzles and the pitch between the elements are geometrically matched in this manner, the position of the nozzle row 28 need not be controlled in the sub-scanning direction Y, which is advantageous.

Further, since the individual head portions 20 are inclined instead of the entire carriage 25, the distance T between the nozzle 27 closer to the substrate 12 and the nozzle 27 farther from the substrate 12 is smaller than the carriage 25. Is significantly reduced as compared with the case where the whole is tilted, so that the time for scanning the substrate 12 by the inkjet head 22 can be significantly reduced. Thereby, the manufacturing time of the EL device can be reduced. In the manufacturing apparatus and the manufacturing method according to the present embodiment, the pixel pixels 3 are formed by ink discharge using the inkjet head 22, so that it is not necessary to go through a complicated process such as a method using a photolithography method. No waste of material.

(Other Embodiments) The present invention has been described with reference to the preferred embodiments. However, the present invention is not limited to the embodiments, and various modifications may be made within the scope of the invention described in the claims. Can be modified to

For example, in the embodiment described above, six head units 20 are provided in the ink jet head 22 as shown in FIG. 1, but the number of head units 20 may be reduced or increased. it can.

In the embodiment shown in FIG. 1 and the like, a plurality of rows of the color filter forming regions 11 are formed in the mother substrate 12.
Is set, but the present invention can be applied to a case where one line of the color filter forming region 11 is set in the mother substrate 12. In addition, the present invention can be applied to a case where only one color filter forming region 11 having substantially the same size as or substantially smaller than the mother substrate 12 is set in the mother substrate 12.

In the color filter manufacturing apparatus shown in FIGS. 9 and 10, the inkjet head 22 is moved in the X direction to scan the substrate 12 in the main direction, and the substrate 12 is moved in the Y direction by the sub-scanning driving device 21. The main scanning is performed by moving the substrate 12 in the Y direction.
The sub-scanning can also be performed by moving in the X direction.

Further, in the above-described embodiment, the ink jet head having a structure in which the ink is ejected by using the bending deformation of the piezoelectric element is used, but an ink jet head having any other structure may be used.

Further, in the above embodiment, only the most general configuration in which the main scanning direction and the sub-scanning direction are orthogonal to each other is illustrated, but the relationship between the main scanning direction and the sub-scanning direction is not limited to the orthogonal relationship. It is only necessary that they intersect at any angle.

The material to be ejected can be variously selected according to the elements to be formed on the object such as the substrate. For example, in addition to the above-mentioned inks and EL luminescent materials, silica glass precursors, metal compounds, etc. The conductive material, the dielectric material, or the semiconductor material is mentioned as an example.

In the above embodiments, the method and apparatus for manufacturing a color filter, the method and apparatus for manufacturing a liquid crystal device, and the method and apparatus for manufacturing an EL device have been described by way of example. Without being limited,
The present invention can be used in general industrial techniques for performing fine patterning on an object.

For example, various semiconductor elements (thin film transistors, thin film diodes, etc.), various wiring patterns, formation of insulating films, and the like are given as examples of the application range.

The material to be ejected from the head can be variously selected according to the elements to be formed on the target such as the substrate. For example, in addition to the above-described ink and EL luminescent material, a silica glass precursor, metal A conductive material such as a compound, a dielectric material, or a semiconductor material is given as an example.

In the above-described embodiment, the ink jet head is referred to as an “ink-jet head” for simplicity. However, the ejected matter ejected from this ink-jet head is not limited to ink. It goes without saying that there are various kinds of conductive materials such as precursors and metal compounds, dielectric materials, and semiconductor materials. The liquid crystal device and the EL device manufactured by the manufacturing method of the above embodiment are
For example, it can be mounted on a display unit of an electronic device such as a mobile phone or a portable computer.

[0191]

According to the respective color filter, liquid crystal device, and EL device manufacturing apparatus and the manufacturing method thereof according to the present invention, ink is supplied from a plurality of head units during main scanning of the substrate by the plurality of head units. Can be ejected, so that the scanning time can be reduced as compared with the case where the substrate surface is scanned using one head unit.

Also, since each head performs main scanning in an inclined state, the pitch between nozzles of a plurality of nozzles belonging to each head must be matched with the pitch between elements of filter elements and picture elements formed on the substrate. Can be.

Further, since the individual heads are inclined rather than the entire support mechanism for supporting a plurality of heads, the distance between the nozzle closer to the substrate and the nozzle farther from the substrate is not supported. As compared with the case where the entire means is inclined, the time required for scanning the substrate by the support mechanism can be reduced. Thereby, the manufacturing time of a color filter, a liquid crystal device, an EL device, and the like can be reduced.

[Brief description of the drawings]

FIG. 1 is a plan view schematically showing main steps of a manufacturing method performed using an embodiment of a color filter manufacturing apparatus according to the present invention.

FIG. 2 is a perspective view of the inkjet head of FIG.

FIG. 3 is a plan view schematically showing main steps of a manufacturing method performed by using another embodiment of the color filter manufacturing apparatus according to the present invention.

FIG. 4 is a perspective view of the inkjet head of FIG. 3;

FIG. 5 is a plan view schematically showing main steps of a manufacturing method performed using still another embodiment of the color filter manufacturing apparatus according to the present invention.

FIG. 6A is a plan view illustrating an embodiment of a color filter according to the present invention, and FIG. 6B is a plan view illustrating an embodiment of a mother substrate on which the color filter is based.

FIG. 7 is a diagram schematically illustrating a color filter manufacturing process using a cross-sectional portion along the line VII-VII in FIG.

FIG. 8 is a diagram showing an example of the arrangement of picture element pixels of R, G, and B colors in a color filter.

FIG. 9 shows an embodiment of an ink jet apparatus which is a main part of each manufacturing apparatus such as a color filter manufacturing apparatus according to the present invention, a liquid crystal device manufacturing apparatus according to the present invention, and an EL device manufacturing apparatus according to the present invention. It is a perspective view.

10 is an enlarged perspective view showing a main part of the device of FIG. 9;

FIG. 11 is a perspective view showing one of the head units provided in the inkjet head of FIG. 1;

FIG. 12 is a perspective view showing a modified example of a head unit.

FIG. 13 is a diagram showing an internal structure of a head unit,
(A) shows a partially cutaway perspective view, (b) shows J- of (a).
3 shows a cross-sectional structure along the line J.

FIG. 14 is a block diagram showing an electric control system used in the ink jet apparatus of FIG.

FIG. 15 is a flowchart showing a flow of control executed by the control system of FIG. 14;

FIG. 16 is a perspective view showing still another modification of the head unit.

FIG. 17 is a process chart showing one embodiment of a method for manufacturing a liquid crystal device according to the present invention.

FIG. 18 is an exploded perspective view showing an example of a liquid crystal device manufactured by the method for manufacturing a liquid crystal device according to the present invention.

19 is a cross-sectional view showing a cross-sectional structure of the liquid crystal device according to line XX in FIG.

FIG. 20 is a process chart showing one embodiment of a method for manufacturing an EL device according to the present invention.

21 is a cross-sectional view of the EL device corresponding to the process diagram shown in FIG.

FIG. 22 is a diagram illustrating an example of a conventional color filter manufacturing method.

FIG. 23 is a diagram illustrating another example of a conventional method for manufacturing a color filter.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Color filter 2 Substrate 3 Filter element 4 Protective film 6 Partition wall 7 Filter element formation area 11 Color filter formation area 12 Mother substrate 13 Filter element material 16 Inkjet device 17 Head position control device 18 Substrate position control device 19 Main scanning drive device (main) (Scanning driving unit) 20 head unit 21 sub-scanning driving unit (sub-scanning driving unit) 22 inkjet head 25 carriage (supporting unit) 26 head unit 27 nozzle 28 nozzle array 37 ink supply unit (ink supply unit) 39 ink pressurizing member 41 Piezoelectric element 49 Table 76 Capping device 77 Cleaning device 78 Electronic balance 81 Head camera 82 Substrate camera 83 Nozzle array angle control device (nozzle array angle control means) 84 Nozzle array interval control device Liquid crystal panel 102 liquid crystal panel 107a, 107b substrate 111a, 111b base material 114a, 114b electrode 118 color filter 201 EL device 202 pixel electrode 203R, 203G, 203B light emitting layer 204 substrate 205 bank 213 counter electrode 220 positive Hole injection layer L Liquid crystal M Filter element material X Main scanning direction Y Sub scanning direction

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hiroshi Kiguchi 3-5-5 Yamato, Suwa-shi, Nagano Seiko Epson Corporation (72) Inventor Tatsuya Ito 3-5-3 Yamato, Suwa-shi, Nagano Seiko-Epson Inside (72) Inventor Tomoki Kawase 3-3-5 Yamato, Suwa-shi, Nagano Seiko Epson Corporation (72) Inventor Masaharu Shimizu 3-5-5, Yamato, Suwa-shi, Nagano Seiko Epson Corporation F Terms (reference) 2C056 EC08 EC35 EC78 FA10 FB01 HA10 HA22 2H091 FA02Y FC29 LA12

Claims (26)

[Claims] An apparatus for ejecting a material onto an object, comprising: a plurality of heads having a nozzle array in which a plurality of nozzles are arranged; a support mechanism for supporting the plurality of heads; And a mechanism for scanning one of the support mechanisms with respect to the other, wherein the nozzle row is inclined with respect to the scanning direction. 2. The material discharging apparatus according to claim 1, wherein the plurality of heads are supported to be inclined with respect to a longitudinal direction of the support mechanism. 3. The material discharging apparatus according to claim 1, wherein one of the object and the support mechanism intersects the other in the main scanning direction or the main scanning direction. An apparatus for discharging a material, which is scanned in a sub-scanning direction. 4. The material discharging apparatus according to claim 1, wherein a pitch between nozzles of the nozzle row is substantially equal in the plurality of heads, and a tilt angle of the nozzle row is An apparatus for discharging a material, wherein sizes of the plurality of heads are substantially equal. 5. A material discharging apparatus for discharging a material onto an object, comprising: a plurality of heads having a nozzle row in which a plurality of nozzles are arranged; a support mechanism for supporting the plurality of heads; A device for scanning any one of the support mechanisms with respect to the other; and a mechanism for controlling an angle between at least one of the nozzle rows and the direction of the scanning. . 6. The material discharging apparatus according to claim 5, further comprising a mechanism for controlling an interval between the plurality of nozzle rows. 7. The material discharging apparatus according to claim 5, wherein a mechanism for controlling an angle between the nozzle row and the scanning direction includes: a pitch between nozzles of the nozzle row; And a control device for controlling the magnitude of the inclination angle of the nozzle row to be substantially equal in the plurality of heads. 8. A material discharging method for discharging a material onto an object, comprising: a plurality of heads each having a nozzle row in which a plurality of nozzles are arranged; and a support mechanism that supports the plurality of heads, with respect to one another. A method for discharging a material, comprising: a step of scanning; and a step of discharging the material to the object, wherein at least one nozzle row is inclined with respect to the scanning direction. 9. The material discharging method according to claim 8, wherein one of the object and the support member is in a main scanning direction with respect to the other or in a sub-scanning direction intersecting the main scanning direction. A method for discharging a material, wherein the material is scanned. 10. The material discharging method according to claim 8, wherein a pitch between nozzles of the nozzle row and a magnitude of an inclination angle of the nozzle row are substantially equal in the plurality of heads. A material discharging method characterized by being substantially equal. 11. The method according to claim 8, further comprising a step of controlling an angle between at least one of the nozzle rows and the scanning direction. Of the material to be discharged. 12. The material discharging method according to claim 8, further comprising a step of controlling an interval between the plurality of nozzle rows. 13. A color filter, comprising: the discharge device according to claim 1; and discharging the color filter material as the material onto the substrate as the object. apparatus. 14. A manufacturing method of an EL device, comprising: the discharging device according to claim 1; and discharging an EL light-emitting material as the material onto the substrate as the object. apparatus. 15. An electronic device mounted with a component manufactured by using the manufacturing method including the material discharging method according to claim 10. 16. A color filter manufacturing apparatus, comprising: a plurality of heads having a nozzle row in which a plurality of nozzles are arranged; a mechanism for supplying a filter material to the head; and a support mechanism for supporting the plurality of head units. The color filter manufacturing apparatus, wherein the support mechanism supports the plurality of head portions in an inclined state. 17. The color filter manufacturing apparatus according to claim 16, wherein the support mechanism supports the head in a fixed state. 18. The apparatus for manufacturing a color filter according to claim 16, wherein a pitch between nozzles of the nozzle rows belonging to the plurality of heads is substantially equal, and further, the inclination angle of the nozzle rows is large. An apparatus for manufacturing a color filter, which is also substantially equal. 19. A color filter manufacturing apparatus, comprising: a plurality of heads having a nozzle row in which a plurality of nozzles are arranged; a mechanism for supplying a filter material to the head; a support mechanism for supporting the plurality of heads; A main scanning mechanism that moves the supporting mechanism in the main scanning direction; a sub-scanning mechanism that moves the supporting means in the sub-scanning direction; a nozzle row angle control mechanism that controls the inclination angles of the plurality of nozzle rows; An apparatus for manufacturing a color filter, comprising: a nozzle array interval control mechanism for controlling an interval. 20. The apparatus for manufacturing a color filter according to claim 19, wherein a pitch between nozzles of a nozzle row belonging to the plurality of heads,
And an apparatus for manufacturing a color filter, wherein the inclination angles of the nozzle rows are substantially equal. 21. A method of manufacturing a color filter, wherein a filter material is discharged from a plurality of nozzles while moving a head having a nozzle row in which a plurality of nozzles are arranged in a main scanning direction, and the filter element is formed on the substrate. Forming a color filter, wherein a plurality of the heads are provided side by side and arranged in an inclined state. 22. The method for manufacturing a color filter according to claim 21, wherein a pitch between the nozzles of the nozzle row is substantially equal, and a magnitude of an inclination angle of the nozzle row is substantially equal. A method of manufacturing a color filter. 23. An apparatus for manufacturing a liquid crystal device, comprising: a plurality of heads having a nozzle row in which a plurality of nozzles are arranged; a mechanism for supplying a filter material to the head; a support mechanism for supporting the plurality of heads; A main scanning mechanism that moves the supporting mechanism in a main scanning direction; and a sub-scanning mechanism that moves the supporting mechanism in a sub-scanning direction. The supporting mechanism supports the plurality of heads in an inclined state. Manufacturing equipment for liquid crystal devices. 24. A method of manufacturing a liquid crystal device, comprising: ejecting a filter material from a plurality of nozzles while moving a head having a nozzle row in which a plurality of nozzles are arranged in a main scanning direction; A method of manufacturing a liquid crystal device, comprising: a plurality of heads arranged side by side and arranged in an inclined state. 25. An EL device manufacturing apparatus, comprising: a plurality of heads having a nozzle row in which a plurality of nozzles are arranged; a mechanism for supplying an EL light emitting material to the head; and a support mechanism for arranging and supporting the plurality of heads. A main scanning mechanism for moving the support mechanism in a main scanning direction, a sub-scanning mechanism for moving the supporting means in a sub-scanning direction, a nozzle row angle control mechanism for controlling an inclination angle of the plurality of nozzle rows, and the plurality of nozzle rows. A manufacturing apparatus for an EL device, comprising: a nozzle row interval control mechanism for controlling an interval between nozzles. 26. A method of manufacturing an EL device, comprising: moving a head having a nozzle row in which a plurality of nozzles are arranged in the main scanning direction while moving a plurality of nozzles from the plurality of nozzles.
Forming an EL light emitting layer on the substrate by discharging a light emitting material, wherein a plurality of the heads are provided side by side and arranged in an inclined state.