CN1914551A - Spacer forming method and spacer fabricating device - Google Patents

Abstract

The invention relates to a method for forming a spacer used to keep constant a liquid crystal filled gap between a pair of substrates used in a liquid crystal panel. In the method droplets of an ink (7) in which granular spacer is dispersed are dripped onto each of the spacer forming positions (crossings of the grid-like black-matrix (5) forming the pixels (RGB)) on one substrate of the substrates by an ink-jet method. By the method, a required number of spacers can be reliably formed within the areas not spreading to the pixels. Consequently, the thickness of the liquid crystal layer can be kept constant, and further the influence of the spacers on the display quality can be suppressed, thus improving the quality of the liquid crystal panel.

Description

Spacing body formation method forms device with spacing body

Technical field

The present invention relates to the formation method that the liquid crystal between a pair of substrate that liquid crystal display is used is enclosed the certain spacing body of gap maintenance, in detail, relate to be distributed to and drip to the spacing body method of formationing and spacing body formation device that spacing body on the substrate forms the position under the ink in the solvent with ink-jet method.

Background technology

The desired response characteristic of liquid crystal display, the thickness of liquid crystal layer is depended at contrast and visual angle to a great extent.For this reason, the gap between a pair of substrate of enclosing liquid crystal by being set between this substrate, spacing body is controlled so that the thickness of liquid crystal layer keeps certain.As the formation method of spacing body is known the method that forms cylindrical member and the method for the spherical spacing body that distributes etc. are arranged on a plate base.

The method that spacing body is formed column need be with operations such as photoetching process film forming and etchings, and this just has process number many, problems such as expensive and effort.The wet type distribution of spraying is arranged and the powdery spacing body directly is distributed in dry type distribution on the substrate etc. as method with the air-flows such as dried nitrogen of pressurization in the spherical spacing body that distributes on the substrate, but spacer distribution all can be subtracted to pixel region fall brightness or make brightness disproportionation, also have spacer distribution unequal problem in gap between inequality on the substrate or substrate sometimes.

, for example in Patent Document 1, proposed for this reason, on the color filter black matrix of non-pixel region, formed the technology of spacing body easily with ink-jet method.The method will contain the spherical spacing body of dispersion in solvent ink drips on the black matrix" under nozzle, solvent evaporated and stay remaining spacing body on black matrix".

In this ink-jet method, when inaccessible owing to nozzle or in the nozzle plate that forms as opening with nozzle, produced damage and wait to cause and spray when unusual, will on substrate, produce the formation location dislocation of the part that do not have spacing body (spacing body is left out) or spacing body, so just might make the uneven thickness of liquid crystal layer and reduce the quality of display image.For example in Figure 17, when the 8th and the 17th nozzle in 32 nozzles establishing a row row takes place when unusual, in spacing body formation position, just can produce the linear spacer defect part corresponding to the 8th row on substrate 1 of this abnormal nozzle and the 17th row.

In order to prevent to form defective, in Patent Document 2,, measure the jet velocity and the injection direction of this ejection ink with the ink of video camera or the ejection of image processing apparatus observation nozzle because of spraying the spacing body that causes unusually.Then, if being the decidable injection, this measured value carries out nozzle cleaning unusually outside setting range.

Patent Document 1: the spy opens flat 11-24083 communique

Patent Document 2: the spy opens flat 11-316380 communique

In ink-jet method, when 1 time the amount of dripping many, drop range of scatter after dripping will become big, the position has only slightly deviation (general even drip, the error of eject position reaches several μ m～tens μ m sometimes in the ink-jet method), the possibility that has influence on the pixel of overflowing from black matrix" uprises, and might also form spacing body in pixel or have influence on solvent, causes image quality to reduce.Like this, consider the diffusion of the drop after dripping, though as the few method of the amount of dripping is preferably accommodated spacing body in the preset range,, do not contain any spacing body in the drop after might causing dripping when the amount of dripping very little the time.

In addition, in order to form the little amount of dripping and to form the branch bulk density that spacing body can consider to strengthen spacing body in the solvent reliably, but can change the mobile of ink like this or in ink, cause and produce cohesion between the spacing body particle, this might have influence on the discharge performance of nozzle, owing to can change the characteristic of ink itself thereby be the method that should not adopt.

On the other hand, go to clean meeting reduction production efficiency in order to eliminate nozzle.For example, one or two unusual nozzle can have a strong impact on efficient because suspending to produce to clean.Having, when owing to inaccessible serious nozzle is arranged or have when damage taking place in nozzle plate cause the unusual nozzle of ink jet direction generation, is to be difficult to get back to normal condition by common cleaning again.

Summary of the invention

The present invention proposes in view of the above problems, and its purpose is to provide the spacing body formation method that can form spacing body in specialized range reliably.

Another object of the present invention is to provides, even do not clean when produce spraying unusual nozzle, also can form the position from normal nozzles drip the spacing body method of formationing and spacing body formation device of the ink that contains spacing body for all spacing bodies.

In order to address the above problem, the present invention adopts following structure.

Specifically, the feature of spacing body formation method of the present invention is, enclose the ink of the certain granular spacing body of gap maintenance with being dispersed with the liquid crystal that is used for forming between a pair of substrate, dripping many in the everywhere of a plurality of spacing bodies formation position on the plate base forms spacing body on each spacing body formation position.

Form for each spacing body among the present invention that required quantity of ink is not to gather once to drip on position, drip but be divided into some, thereby can reduce the amount of dripping of each, the diffusion after can suppressing to drip, the desirable narrow range of dripping reliably.In addition,, do not contain spacing body in the ink that when once dripping, is dripped sometimes because each amount of dripping of dripping is few, even but have this situation, but owing to be many and drip and just can prevent the situation that a spacing body does not comprise.

Can cause liquid crystal aligning difference and light leak etc. in the time of in spacing body is present in as the number zone, become the reason that image quality is significantly descended, thereby preferably form not directly to showing the non-pixel region of usefulness.Particularly when dripping ink on the cross part of the non-pixel region of clathrate that is surrounding each pixel, even this cross part also has bigger area in non-pixel region, the ink that drips also is difficult for running off and influencing pixel from this cross part.

When employing has the ink gun of a plurality of nozzles and ink droplet during down to the formation position of a plurality of spacing bodies, can be formed spacing body simultaneously and obtains good throughput rate on many positions.Have again, concern that carrying out many melted inks drips if change the correspondence position of each nozzle and each spacing body formation position, and the spacing body that makes a place is when forming the position and not accepting to drip many melted inks by same nozzle, even then when a part of nozzle is inaccessible, also can prevent to generate the spacing body that one of ink containing spacing body do not drip and form the position, also can form spacing body reliably in the formation position of each spacing body.

On the other hand, spacing body formation method of the present invention has following step: before the ink jet that contains spacing body is formed the position to the spacing body on the substrate, be used to confirm to have or not and spray unusual examination injecting step; In this examination is sprayed, exist when spraying unusual nozzle, from then on do not spray the ink that unusual nozzle ejection contains spacing body, form the step of position and spray from normal nozzles under the ink droplet contain spacing body to spacing body, to stagger with respect to the correspondence position that each spacing body forms each nozzle of position, make normal nozzle corresponding to forming the position corresponding to the spacing body that sprays unusual nozzle in the previous step, from then on spray the ink contain spacing body in the normal nozzles, the spacing body that makes it to drip forms the step of position.

Spacing body of the present invention forms device to have: observation contains the injection observation device of the ink of spacing body from the nozzle ejection; Judge the unusual injection abnormality juding portion of spraying based on this observed result that sprays observation device; Do not carry out spraying the ink that unusual nozzle ejection contains spacing body from being judged to be, when the ink that contains spacing body from normal nozzles ejection and after the spacing body on the substrate that drips forms on the position, ink gun and substrate are relatively moved, move each nozzle forms the position with respect to each spacing body correspondence position, allow normal nozzles form the position, ink jet that normal nozzles from then on will contain spacing body is gone out and the spacing body that drips forms the control part of position corresponding to the pairing spacing body of the previous injection abnormal nozzle that sprays.

When having abnormal nozzle in the above-mentioned ink gun, move the correspondence position of the spacing body formation position on this abnormal nozzle and the substrate, simultaneously carry out repeatedly ink jet with respect to substrate, each spacing body forms position to be had at least and once accepts can prevent that from the dripping of normal nozzles spacing body from forming defective part and forming wire corresponding to the abnormal nozzle position.

According to spacing body formation method of the present invention contain the ink of spacing body owing to form at a plurality of spacing bodies all to drip several on each of position, just spacing body can be accommodated in the scope that does not influence pixel, and can form reliably must number spacing body.Decapacitation as a result makes the thickness of liquid crystal layer keep certain, can also suppress the influence of spacing body to image quality itself, and can seek to improve the quality of liquid crystal display.

According to the present invention, be when the spacing body on abnormal nozzle and the substrate being formed corresponding position, position moving, to carry out repeatedly ink jet with respect to substrate, thereby can not cause reducing production efficiency because of cleaning, the result can keep the thickness of liquid crystal layer certain, obtains superior display quality.

Description of drawings

Fig. 1 shows the planimetric map of the ink that contains spacing body of bright the invention process form to the position of dripping (spacing body formation position) of substrate.

Fig. 2 shows that bright each nozzle from ink gun is with the sectional view to the substrate under the ink droplet.

Fig. 3 is the mode view that shows the spacing body generation type of bright the present invention's second form of implementation.

Fig. 4 shows bright 1 (1), 2 times (2) of ink, 3 times (3) when dripping, to be contained the curve map of the probability of n spacing body in the drop after dripping.

Fig. 5 is the mode view of the spray pattern of illustration the present invention the 3rd form of implementation.

Fig. 6 is the mode view of the spray pattern of illustration the present invention the 4th form of implementation.

Fig. 7 is the mode view of the spray pattern of illustration the present invention the 5th form of implementation.

Fig. 8 is the mode view of the spray pattern of illustration the present invention the 6th form of implementation.

Fig. 9 shows that the spacing body of bright the present invention's the 7th form of implementation forms the block diagram of apparatus structure.

Figure 10 shows that the spacing body of bright the present invention's the 7th form of implementation forms the process flow diagram of method flow.

The spray pattern (one) of Figure 11 illustration the present invention the 7th form of implementation.

The spray pattern (its two) of Figure 12 illustration the present invention the 7th form of implementation.

The spray pattern (its three) of Figure 13 illustration the present invention the 7th form of implementation.

The spray pattern (its four) of Figure 14 illustration the present invention the 7th form of implementation.

The spray pattern (its five) of Figure 15 illustration the present invention the 7th form of implementation.

The spray pattern (its six) of Figure 16 illustration the present invention the 7th form of implementation.

Figure 17 is the mode view of the spray pattern in the existing example of illustration.

The meaning of each label is as follows among the figure:

1 substrate

3 ink guns

5 black matrix"s

7 contain the ink of spacing body

10 treating apparatus

11 control parts

12 spray pattern formation portions

13 spray abnormality juding portion

14 memory storages

15 spray observation device

N1～n9 nozzle

The red pixel of R

The G green pixel

The blue pixel of B

Embodiment

Use concrete form of implementation of the present invention below with reference to description of drawings.Have, the present invention is not limit and can be done all distortion by technological thought according to the present invention by following form of implementation again.

(first form of implementation)

Liquid crystal display is to constitute by liquid crystal being enclosed in the approximate number μ m gap that forms between a pair of substrate.This is to being to constitute by form polaroid, color filter, counter electrode, oriented film etc. on glass substrate one of in the substrate.And the opposing party forms formations such as polaroid, pixel capacitors, driving transistors, oriented film on glass plate.

Two substrates are that mutual oriented film is fitted mutually backward.Be used for two blocks of baseplate-laminating all-in-one-piece encapsulants are applied on the plate base and spacing body be formed at another plate base of uncoated encapsulant.

Spacing body is formed on the color filter side group plate with color filter usually.This color filter has cancellate black matrix" as shown in Figure 1 and is formed at red pixel R, green pixel G and blue pixel B in each grid hole respectively.Black matrix" 5 is the peripheries that surround R, G, each pixel of B with the black border, and is irrelevant with the on/off that liquid crystal cell is applied voltage, often covers the non-pixel region of bias light.

Spacing body is contained in the ink usually, and the ink 7 that contains this spacing body drips by ink-jet method on many cross parts (spacing body formation position) of clathrate black matrix" 5.The ink 7 that contains spacing body is not directly to drip on the black matrix" 5, but on the middle pairing positions of black matrix" 5 cross sections (position overlapped) of substrate 1 relative with another substrate partly (oriented film) that form spacing body of dripping to.

The ink 7 that contains spacing body comprises that water or ethanol are equal solvent and are distributed to spacing body in this solvent.Spacing body is the spherical plastics, glass, quartz of the suitable two substrates spacing of institute's tool diameter (liquid crystal is enclosed the spacing in gap, for example about 4～5 μ m) etc.The spacing body that contains in ink 7 its viscosity, flowability, volatility and the solvent of spacing body divides bulk density etc. will regulate to adapt to the operation of dripping of ink-jet method.

The ink 7 that contains spacing body as shown in Figure 2, dripping with the shower nozzle with a plurality of (in this example being 9) nozzle n1～n9, a plurality of spacing bodies form on the position on the substrate 1.In the example of Fig. 2,9 spacing bodies that for example ink 7 that contains spacing body can be dripped simultaneously form on the position and form spacing body.

In the time of in the ink 7 that contains spacing body drips spacing body formation position, solvent can spontaneous evaporation or heating evaporation face remaining spacing body down on spacing body formation position.At this moment, the drop peripheral part that forms the position from the spacing body that drips makes solvent evaporation slowly, and the central part that is accompanied by drop diminishes, and spacing body also focuses on central part, and like this, spacing body just is configured near the central part.

In this form of implementation, form the position at each spacing body, not the ink 7 that the spacing body that forms desired number must quantity to be gathered drip, drip but be divided into many.Also promptly each spacing body is formed position ink 7 that repeatedly drips.This can reduce the amount of dripping of each compared with the past, thereby just suppresses the diffusion of the ink 7 that drips, spacing body can be received into reliably in the scope (zone of black matrix" 5) of regulation.As a result, can prevent that spacing body is formed in the permeation parts R, the G that help the light that shows, each pixel of B, has suppressed the reduction of image quality.

Situation for many melted inks 7 that drip a spacing body formation position, because the volatility of ink 7 and drop time that each drips are at interval with surrounding environment etc., sometimes be the droplet drying (solvent evaporation) of the ink 7 that formerly drips next drop that drips before, and be to drip after the droplet drying that formerly drips sometimes.

In addition, also ink 7 can be dripped linear parts beyond the cross part of black matrix" 5.But in general, compare with the width of the linear parts of black matrix" 5, the cross part of the grid of this black matrix" 5 also forms the TFT (thin film transistor (TFT)) that is used to operate liquid crystal shutter sometimes, and planar dimension is general to become big.Even but in the zone of black matrix" 5, the wider cross part of scope if the ink 7 that will contain spacing body drips, spacing body also is difficult to be diffused in the pixel.

If can keep the substrate distance of homogeneous Cheng Ding with respect to the direction of substrate surface, then there is no need in all cross parts of black matrix" 5, to form spacing body.In addition, necessary spacing body number is also different because of the size of base plan size on the whole base plate.

Have again, in this form of implementation, 1 of ink 7 time the amount of dripping (1 amount) average out to 5.5pl for example, and on average comprise 1.3 spacing bodies in each time drip (1).Do not diffuse in the pixel in order to make ink 7 and spacing body be received into the regional interior of black matrix" 5,1 time the amount of dripping (1 amount) is preferably in below the 10pl.But then may also not comprise by 1 spacing body in this 1 if 1 amount is too little, thereby 1 time the amount of dripping (1 amount) is preferably in more than the 5pl.

The curve map of Fig. 4 is a ink 7 that expression will contain spacing body when dripping 1 time (1), 2 times (2), 3 times (3) in same place, forms the curve map of the probability of n spacing body.Specifically, the probability (percent) that contains the spacing body of number shown in the transverse axis in the ink 7 after representing to drip with the longitudinal axis.If the amount of dripping of per 1 time (1) is about 5.5pl.

According to this curve map, the spacing body number is that the situation that in 0 the drop after promptly dripping also there is not 1 spacing body is to take place with about 29% probability in 1 time drip.But when dripping for 2 times, spacing body is probability≤10% of 0 situation, and when dripping for 3 times, spacing body is probability≤2% of 0 situation.

When using with identical in the past ink 7, in this form of implementation, make 1 amount than lacking in the past for the diffusion after suppressing to drip, though the possibility height that 1 of spacing body does not also contain when the dripping of 1 time (1), but as can be known from the result of Fig. 4, even 1 time the amount of dripping is few, but the same spacing body that drips for 2 times～3 times forms the position, does not contain the probability of spacing body in the drop after just significantly reducing to drip, so can form spacing body reliably in the formation position of each spacing body.

(second form of implementation)

The following describes second form of implementation of the present invention, wherein identical with above-mentioned first form of implementation structure division is attached to omit its detailed description with same numeral.

In ink-jet method, drip in order to make the extremely narrow zone of ink 7 aimings of containing spacing body, the bore of nozzle is just very little, also causes obturation with regard to easily blocking for ink.The ink 7 that blocked nozzle can not drip and contain spacing body, thereby in certain spacing body formation position, though be the 1st time, the 2nd time ... so that the n time, for accept the structure that ink 7 drips from same nozzle at every turn, if when forming the nozzle obturation of position corresponding to this spacing body, then 1 of ink 7 this spacing body that also can not drip forms the position, can not form spacing body so form the position at this spacing body.

For this reason, this form of implementation is not in order to form the position from repeatedly ink 7 is dripped one spacing body of same nozzle, and change in per 1 time drips as shown in Figure 3, in the change shower nozzle 3 on each nozzle n1～n9 and the substrate 1 each spacing body form corresponding position, position and concern.

Specifically, at first the spacing body of corresponding the 1st row forms the position respectively, the 2nd row spacing body forms the position for nozzle n7, n8, n9, the spacing body of the 3rd row forms the position and locatees, form line direction (among the figure the laterally) configuration of position along spacing body, to be in the ink gun 3 of starting position (the 1st position), move according to the ink gun direction of scanning shown in the arrow.Like this, the drip spacing body of the 1st row of the ink 7 that will contain spacing body from nozzle n7 forms the position, and the drip spacing body of the 2nd row of the ink 7 that will contain spacing body from nozzle n8 forms the position, and the drip spacing body of the 3rd row of the ink 7 that will contain spacing body from nozzle n9 forms the position.

The number of nozzle, line number and columns that spacing body forms the position are not limited to the number shown in Fig. 3 example.In addition, ink gun 3 can be the structure that can relatively move with substrate 1, also can make ink gun 3 not along the direction of arrow move and allow substrate 1 along arrow show to oppositely move.

Secondly ink gun 3 is begun to follow direction (right the figure) 3 nozzles that stagger from the starting position, nozzle n4, n5, n6, n7, n8, n9 are individually set to the 2nd position of locating corresponding to the 1st spacing body formation position that is listed as, the 2nd row spacing body formation position, the 3rd row spacing body formation position, the 4th row spacing body formation position, the 5th row spacing body formation position, the 6th row spacing body formation position, and this ink gun 3 is moved along the ink-jet direction of scanning shown in the arrow.Like this, the ink 7 that will contain spacing body from nozzle n4 the 1st row spacing body that drips forms the position, the ink 7 that will contain spacing body from nozzle n5 the 2nd row spacing body that drips forms the position, the ink 7 that will contain spacing body from nozzle n6 the 3rd row spacing body that drips forms the position, the ink 7 that will contain spacing body from nozzle n7 the 4th row spacing body that drips forms the position, the ink 7 that will contain spacing body from nozzle n8 the 5th row spacing body that drips forms the position, and the ink 7 that will contain spacing body from nozzle n9 the 6th row spacing body that drips forms the position.Though the spacing body of the 1st～3 row forms the position and accepts under the 2nd time the ink droplet, what accept respectively is from being different from the ink that nozzle dripped of the nozzle that previous acceptance drips.

Then ink gun is for example followed direction (right the figure) from the 2nd position and move 3 nozzles, nozzle n1, n2, n3, n4, n5, n6, n7, n8, the spacing body that n9 is individually set to corresponding to the 1st row forms the position, the spacing body of the 2nd row forms the position, the spacing body of the 3rd row forms the position, the spacing body of the 4th row forms the position, the spacing body of the 5th row forms the position, the spacing body of the 6th row forms the position, the spacing body of the 7th row forms the position, the spacing body of the 8th row forms the position, the spacing body of the 9th row forms the 3rd position that locate the position, and this ink gun 3 is moved along the ink gun direction of scanning shown in the arrow.Like this, the ink 7 that will contain spacing body from nozzle n1 the 1st row spacing body that drips forms the position, the ink 7 that will contain spacing body from nozzle n2 the 2nd row spacing body that drips forms the position, the ink 7 that will contain spacing body from nozzle n3 the 3rd row spacing body that drips forms the position, the ink 7 that will contain spacing body from nozzle n4 the 4th row spacing body that drips forms the position, the ink 7 that will contain spacing body from nozzle n5 the 5th row spacing body that drips forms the position, the ink 7 that will contain spacing body from nozzle n6 the 6th row spacing body that drips forms the position, the ink 7 that will contain spacing body from nozzle n7 the 7th row spacing body that drips forms the position, the ink 7 that will contain spacing body from nozzle n8 the 8th row spacing body that drips forms the position, and the ink 7 that will contain spacing body from nozzle n9 the 9th row spacing body that drips forms the position.Though the spacing body of the 1st～3 row forms the position and accepts under the 3rd time the ink droplet, be respectively accept with accept the 1st time, the second time in the different ink that nozzle dripped of nozzle that drips.Carry out under the ink droplet of identical number with respect to spacing body positions all on the substrate 1 in the same manner below.

According to the above, can form the position with respect to spacing body, from different nozzles (many) ink that repeatedly drips, even certain nozzle obturation can not produce the spacing body formation position that 1 melted ink 7 does not all drip yet.Produce the possibility that 1 all inchoate spacing body of spacing body forms the position so can reduce.

Have again, the method that changes the correspondence position relation of each nozzle n1～n9 and each spacing body formation position is not limited to the above, also ink gun 3 can be formed the column direction setting of position and follows scanning direction along spacing body, can move nozzle along column direction this moment for dripping each time.Or also can be after column direction scanning is dripped the direction change of ink gun 3 be followed scanning direction for 90 ° and drip.

(the 3rd form of implementation)

The following describes the 3rd form of implementation of the present invention.Here the part that same structure is arranged with above-mentioned first form of implementation is attached omits its detailed description with identical label.

The ink 7 that contains spacing body as shown in Figure 2, a plurality of spacing bodies that drip on the substrate 1 with the ink gun 3 of the line ink-jet head dummy with a plurality of nozzle n1～n9 that line up 1 row form on the position.The ink 7 that contains spacing body can be dripped simultaneously and form the position and form spacing body along a plurality of spacing bodies of the orientation of nozzle n1～n9.

In this form of implementation, injector head 3 relatively moves along the direction with nozzle and column direction quadrature with substrate 1, simultaneously the ink 7 that drips and contain spacing body from each nozzle n1～n9.For example substrate 1 is relatively moved along the direction with nozzle and column direction quadrature with respect to static ink gun 3.Ink gun 3 is moved with respect to static substrate 1, also the two all can be moved.

The concrete formation step of spacing body now is described.

Before the ink that will contain spacing body sprayed with respect to the substrate of intending becoming goods, at first dummy substrate being tried to spray had no abnormal with the ink jet of confirming each nozzle.Observe the ink jet of each nozzle by spraying observation device this moment.

Spraying observation device is made up of laser optical system, video camera and image processing apparatus etc.Spray observation device and be located in the ink gun bearing position, the ink droplets of spraying when making ink gun shift to the injection observation position is glimmered with laser at interval according to official hour, tries to achieve as ink by shooting and circles in the air track as rest image.Handle this image by image processing apparatus, calculate the jet velocity of ink and spray angle etc., based on these values judge whether spray unusual.Can not shift to assigned position yet and will spray the observation position that observation device is shifted to set injector head.The ink that observation splashes on the dummy substrate from the nozzle ejection judges whether be to spray unusually.Blocking fully and not have the situation of injection at all for nozzle, is the image that can not get the track that circles in the air of ink.It is unusual that nature, this situation belong to injection.The ink form that nozzle ejection can also be gone out is taken as live image, and moving image data is calculated jet velocity and spray angle in view of the above.

When spraying unusual judgement, the threshold value of jet velocity Vd of for example establishing the ink of nozzle is the threshold value of 5.0m/sec ± 5%, spray angle θ during for ± 0.5 °, establish tried to achieve table 1 the result then decidable nozzle N0.8 and 17 be abnormal nozzle.The nozzle of nozzle No.17 does not spray ink fully, can not observe jet velocity and spray angle.Have again, the spacing body that above-mentioned spray angle θ is equivalent to nozzle center and nozzle correspondence therewith form the position the center be connected straight line (from the vertical line of nozzle) with respect to the circle in the air inclination angle of track of ink down to substrate.

Table 1

Nozzle No.	Jet velocity	Spray angle	Spray regime
					1	5.0m/ second ± 5%	±0.5°	Normally
...
				7	5.0m/ second ± 5%	±0.5°	Normally
8	4.0m/ second ± 15%	±2.5°	Unusually
				9	5.0m/ second ± 5%	±0.5°	Normally
...
				16	5.0m/ second ± 5%	±0.5°	Normally
17	-	-	Unusually
				18	5.0m/ second ± 5%	±0.5°	Normally
...

Also can splash down the amount of position deviation reference position (splash to nozzle under position) and spray unusual judgement according to ink.

For example, relatively move the direction of direction when taking each row nozzle with video camera from being parallel to ink gun and substrate, the side-play amount of position of splashing down on the direction that relatively moves the therewith orthogonal directions is represented with D * tan θ.D wherein is along the bee-line of vertical direction between nozzle-substrate (connect the center of nozzle and the straight length of the corresponding spacing body formation of nozzle place-centric) therewith, for example be 0.5mm, θ for from the line of the spacing body formation place-centric of nozzle center and corresponding this nozzle with respect to the circle in the air inclination angle of track of ink.

From relatively moving the direction of direction quadrature when taking the ink circle in the air, represent with Vs * D/Vd along splashing down the side-play amount of position on the direction of this direction that relatively moves with video camera with ink gun and substrate.Vs wherein is the translational speed of substrate with respect to static ink gun, for example is 200mm/sec, and D and Vd are then as above-mentioned.

Also can spray unusual judgement according to the value of D * tan θ+Vs * D/Vd.

When having when spraying unusual nozzle, from then on do not spray the injection of unusual nozzle, only carry out the injection of normal nozzles with respect to substrate (the actual substrate that should become goods), if, just can not spray ink from abnormal nozzle to making piezoelectric element apply voltage corresponding to the indoor pressure generation change of the ink pressure of abnormal nozzle.Or, just must stock the chamber heat supply to ink in the situation of heated type ink gun.

For example in Fig. 5, for the nozzle No.8 in 32 nozzles and 17 these two situations that nozzle is an abnormal nozzle, at first do not carry out the ink jet of No.8 and 17 nozzles, and only substrate is sprayed ink by other normal nozzles (nozzle No.1～7,9～16,18～32).In this example, with respect to static ink gun 3 towards the illustrated direction of arrow (with the direction of nozzle and column direction quadrature) moving substrate, simultaneously from each nozzle ejection ink, the spacing body that drips on the substrate 1 forms on the position, sprays ending phase for this 1st time and be to be in corresponding to abnormal nozzle to form the position and do not have the state that ink and the contained spacing body of ink drip being arranged in the spacing body of the 8th row with the 17th row.

Then ink gun 3 is moved right in Fig. 5 size of 1 nozzle forms the normal nozzles of position corresponding to No.7 at the 8th row spacing body, forms the normal nozzles of position corresponding to No.16 in the 17th row spacing body.Nozzle and substrate 1 can relatively be shifted along nozzle and column direction, also can be mobile ink gun 3 and substrate 1 one of among both.

Form at above-mentioned nozzle and spacing body under the state of position corresponding relation, the second time ink is sprayed to substrate 1 with the 1st time identical carrying out.Only carry out the ink-jet of the nozzle of No.7 and 16 this moment, do not carry out the ink-jet of other nozzles.

As a result, forming the position for all spacing bodies has carried out under the ink droplet of each 1 time (1).In Fig. 5, nozzle ● the nozzle that ink-jet is carried out in expression, the nozzle that the ink-jet of ink-jet is not carried out in zero expression.On the substrate 1 ● the expression spacing body forms the position, as mentioned above, each spacing body forms the position and respectively accepts respectively so just can prevent that the part that does not form spacing body from forming wire corresponding to unusual nozzle location under 1 time the ink droplet, can stably keep desirable liquid crystal to enclose the spacing in gap.

(the 4th form of implementation)

Below with reference to Fig. 6 the 4th form of implementation of the present invention is described, wherein the part that same structure is arranged with above-mentioned first form of implementation is attached omits its detailed description with identical label.Among Fig. 6, ● expression normal nozzles, zero expression abnormal nozzle.Under numeral on the substrate 1 has been carried out several times the ink droplet of (several) in the formation position of each substrate.

Among Fig. 6, the No.8 in 32 nozzles and 17 these two nozzles at first do not carry out the injection of No.8 and 17 these two nozzles when spraying unusual nozzle, by No.6-7,9～16,18～32 these normal nozzles to substrate 1 ink-jet.Be that substrate 1 is moved along the diagram directions of arrow (with the direction of nozzle and column direction quadrature) with respect to static ink gun 3 in this example, form the position from No.6～7,9～16, normal nozzles such as 18～32 with the spacing body to the substrate 1 under the ink droplet simultaneously.In the ending phase that this sprays for the first time, ink is in the ink that contains spacing body and does not drip and the 3rd row of the corresponding location of abnormal nozzle and the state of the spacing body formation position of the 12nd row.

Then with ink gun 3 in Fig. 6 in the size of 5 nozzle correspondences that moves to right, will form position and primary staggering corresponding to the spacing body of abnormal nozzle.Form at such nozzle and spacing body under the state of corresponding relation of position, identically with the above-mentioned first time carry out the ink-jet second time with respect to substrate 1.Only carried out ink-jet and do not carried out ink-jet from other nozzles by No.1～7,9～16,18～27 normal nozzles this moment.

The result, for the first time with the second time ink-jet time, carried out under twice the ink droplet (carried out 2 ink droplet under) forming the position with the corresponding spacing body of normal nozzles, and the 1st time with certain of the 2nd time in can carry out corresponding to the spacing body formation position of abnormal nozzle under 1 time the ink droplet.Owing to do not exist jointly to form the position with the 2nd time the 1st time corresponding to the spacing body of abnormal nozzle, just can prevent that the part that does not form spacing body from forming wire corresponding to the abnormal nozzle position, can stably keep the spacing in desirable liquid crystal inclosure gap.

Form the position for the spacing body that has 2 melted inks to drip, be not be will for form ink that desired number spacing body must measure gather (becoming 1) drip, drip but be divided into 2, so can make per 1 amount of dripping few, the ink diffusion that so just can suppress to drip is able to spacing body is received in the scope (zone of black matrix" 5) of regulation reliably.The result can prevent that spacing body is formed in each pixel of R.G.B. that helps light transmissive portion, has suppressed the reduction of image quality.

Be preferably in each spacing body formation position and be in about 3～7 spacing bodies of formation in the certain limit.Spacing body number in per 1 can be with the spacing body concentration in the ink, variations such as drop size, but because at the spacing body that only drips and do not contain spacing body sometimes fully 1 time or do not contain desired number sometimes,, preferably each spacing body is formed position many melted inks that drip from preventing the viewpoint of this situation.

(the 5th form of implementation)

Below with reference to Fig. 7 the 5th form of implementation is described, wherein the part that same structure is arranged with above-mentioned each form of implementation is attached omits its detailed description with same label.Among Fig. 7 ● the expression normal nozzles, zero expression abnormal nozzle.Numeral on the substrate 1 forms the ink droplet that has carried out how many times (what drip) on the position at each spacing body and drips.

Be that 32 nozzles have No.8 and 17 two situations that nozzle ejection is unusual among Fig. 7, at first do not carry out, and only substrate 1 is sprayed by No.7,9～16,18～32 these a few normal nozzles from the ink-jet of No.8 and 17 liang of nozzles.

3 nozzle segments that then ink gun 3 moved to right in Fig. 7 will form the position and stagger mutually with primary corresponding to the spacing body of abnormal nozzle.Form under the corresponding relation state of position at such nozzle and spacing body, in the same manner substrate is carried out the ink-jet second time with the above-mentioned first time, at this moment, only from nozzle No.4～7,9～16,18～29 normal nozzles sprays, and do not carry out ink-jet from other nozzles.

After this second time, 3 nozzle segments that again ink gun 3 moved to right in Fig. 7 stagger the spacing body corresponding to abnormal nozzle with forming position and the first time and the second time mutually.Form at such nozzle and spacing body under the state of position corresponding relation, with above-mentioned the 1st time, for the second time identical substrate is carried out the 3rd ink-jet.At this moment just No.1～7,9～16, these normal nozzles of 18～26 are carried out ink-jet, and do not carry out ink-jet from other nozzles.

According to above result, when spraying for the 1st～3 time, form the position in the spacing body of corresponding normal nozzles and carried out under 3 times the ink droplet (having carried out dripping of 3 melted inks), and anyly in the 1st～3 time once form the position and carried out under 2 times the ink droplet (carried out 2 ink droplet under) corresponding to the spacing body of abnormal nozzle.In this form of implementation owing to also be that correspondence position with abnormal nozzle and spacing body formation position staggers and carried out repeatedly ink-jet, so can prevent that the part that does not form spacing body from having formed wire corresponding to the abnormal nozzle position, can stably keep the spacing in desirable liquid crystal inclosure gap constant.

Also all accepted many melted inks,, spacing body can be accommodated in reliably in the scope (zone of black matrix" 5) of regulation so can suppress the diffusion of ink because all spacing bodies form the position.Can to reduce the spacing body number in addition be O or do not reach the probability of wishing number.

(the 6th form of implementation)

With reference now to Fig. 8, the 6th form of implementation of the present invention is described, wherein the part that same structure is arranged with aforementioned each form of implementation is attached omits its detailed description with identical label.Among Fig. 8, for the first time in injector head position and the injector head position for the second time ● the expression normal nozzles, zero expression abnormal nozzle is for the third time in the injector head position ● the normal nozzles that ink-jet is carried out in expression, zero represents the nozzle (comprising abnormal nozzle) of not ink-jet.The ink droplet that numeral on the substrate 1 is carried out how many times (what drip) in each spacing body formation position drips.

No.8 and 17 is two and sprays unusual nozzles in 32 nozzles of Fig. 8, and at first do not carry out ink-jet from the nozzle of No.8 and 17 this moment, and only by No.7,9～16,18～32 each normal nozzles to substrate 1 ink-jet.

Secondly 3 nozzle segments that ink gun 3 moved to right in Fig. 8 make spacing body corresponding to abnormal nozzle form the position and stagger for the 1st time.Form at such nozzle and spacing body under the state of position corresponding relation, primaryly identical substrate 1 is carried out the ink-jet second time with above-mentioned.At this moment, just No.4～7,9～16,18～29 each normal nozzles are carried out ink-jet, and do not carry out ink-jet from other nozzles.

3 nozzle segments that again ink gun 3 moved to right in Fig. 8 in back for the second time, will form corresponding to the spacing body of unusual spray the position with the 1st time with the 2nd time stagger mutually.Form under the state of position corresponding relation at such nozzle and spacing body,, substrate 1 is carried out ink-jet for the third time with aforementioned the 1st time, for the second time identical.Only carry out the ink-jet of No.2,5,11, normal nozzles such as 14 this moment, and do not carry out ink-jet from other nozzles.

In view of the above, can form the position to all spacing body and make that number of times as one man is 2 times under the ink droplet, can suppress the fluctuation that the spacing body number distributes in the real estate.So just can guarantee more stable liquid crystal inclosure gap clearance.

In this form of implementation, all spacing bodies form the position can both receive many following melted ink.Thereby can suppress the diffusion of the ink that drips, spacing body can be received into reliably in the specialized range (zone of black matrix" 5).Also can reduce the spacing body number equally and be 0 or do not reach the probability of desired number.

(the 7th form of implementation)

The following describes the 7th form of implementation of the present invention, have with above-mentioned form of implementation wherein that the part of same structure is attached omits its explanation with same numeral.

Fig. 9 shows that bright form of implementation spacing body forms the block diagram of apparatus structure.This spacing body forms device and comprises the ink gun 3 (with reference to figure 2) with a plurality of nozzles that form a line, the ink gun mobile device 17 that moves this ink gun 3, substrate mobile device 18, injection observation device 19, cleaning device 20, memory storage 14, display device 15 and the treating apparatus 10 that they connected.

Ink gun mobile device 17 is a drive source with step motor or piezo-electric motor for example, and ink gun 3 is moved along the direction that is parallel to nozzle and column direction.Substrate mobile device 18 makes the stand of supporting substrates 1 move along the direction (direction of scanning) with nozzle and column direction quadrature.Spray observation device 19 and be as previously mentioned the laser optical system, video camera, image processing apparatus of observation nozzle ink jet form etc.Memory storage 14 is for example semiconductor memory, disks etc. of storage abnormal nozzle position.Treating apparatus 10 has control part 11, operational part (spray pattern formation portion 12, injection abnormality juding portion 13).

Also have, in above-mentioned each form of implementation, can be being used as substrate mobile device 18 along the mobile X-Y platform of the both direction (X-Y direction) of quadrature.Or substrate is fixed, can be used as ink gun mobile device 17 along the mobile X-Y platform of the both direction (X-Y direction) of quadrature.

Below referring to the spacing body formation method of this form of implementation of flowchart text of Figure 10.

At first begin flow process in step S1, it tries to spray inferior to step S2.Spray (step S3) by spraying this examination of observation device 19 observations.Observation data (jet velocity and spray angle) sends to treating apparatus 10, and unusual judgement is sprayed based on observation data by the injection abnormality juding portion 13 for the treatment of apparatus 10.

When this result of determination is that step S4 becomes " No " when not spraying unusual nozzle fully, carry out forming the injection (step S13) of all nozzles of position, process ends (step S17) corresponding to each row spacing body.Each spacing body form position can respectively spray 1 also can many.

When exist spraying unusual nozzle, become " YES " in step S4, judge that in next step S5 this abnormal nozzle number is whether below allowable value.Too much when the abnormal nozzle number, become " NO " in step S5, display device 15 is carried out mistake and is shown that (step 14), (step 15) is carried out the cleaning (step S16) of nozzle by cleaning device 20 to select cleaning way with automatic or manual.

When the abnormal nozzle number is under allowable value, become " YES " in step S5, the location storage of this abnormal nozzle is (step S6) in memory storage 14.For example in above each form of implementation, two nozzles of No.8 and 17 are stored as abnormal nozzle.

Based on this abnormal nozzle position and various setting value (number of scans, injection target revolution, minimum injecting times, minimum injection line-spacing), form portion 12 by spray pattern and form spray pattern (step S7).The spray pattern example is shown in Figure 11～16.Number of scans is to make ink gun and substrate number of relative along the direction with nozzle and column direction quadrature.Spraying targeted number is the number of targets of (several) ink several times of dripping in spacing body formation position, a place, what minimum injecting times showed is, because the existence of abnormal nozzle, form the position with respect to the spacing body under the ink droplet that can not accept to spray targeted number, the number under the ink droplet of minimum this number of times is guaranteed in plan.Minimum injection line-spacing is represented is not reach the degree that guarantee as far as possible at the interval between the row (OK) that the spacing body that drips that sprays targeted number forms the position as accepting number of times, and in the situation of adjacency, this line-spacing is 0.On the other hand, yet can not reach the spacing body that sprays targeted number and form that the row (OK) of position are several to be set as setting value accepting number of times.

In Figure 11～16, the normal nozzles that ink-jet is not carried out in zero expression, ◎ represents to carry out the normal nozzles of ink-jet, ● the abnormal nozzle that ink-jet is not carried out in expression.Among this external each figure the spacing body on the substrate is formed location tables and be shown in 1 row part of nozzle and column direction, express the number of times of accepting under the ink droplet simultaneously.

For the spray pattern that in step S7, forms, judge by step S8～S11 whether it satisfies above-mentioned setting value condition.When in step S8～S10, not satisfying the condition of each setting value, correct spray pattern in step S7.In addition, when not satisfying the imposing a condition of number of scans, because the increase of number of scans is unfavorable for throughput rate, in step S11, become " NO ", in display device 15, carry out mistake and show (step S14), select cleaning way (step S15) through automatic or manual, carry out nozzle cleaning (step S16) by cleaning device 20.

When the spray pattern of step S7 formation satisfies the condition of step S8～step S11 fully, based on this spray pattern, the operation of control part 11 control ink guns 3 and substrate, and control is carried out ink-jet by which nozzle, the spacing body that carries out under the ink droplet to the substrate forms position (step S12), process ends (step S17).

The injection scheme case of Figure 11 is only to drip 1 to make the injection scheme case of the minimum and row interbody spacer maximum of columns.

The injection scheme case of Figure 12 is only to drip 1 the interval of row is widened, and preferentially reduces the injection scheme case of its columns.

In the injection scheme case of Figure 13, form the dripping of 1 time (1) that the position is the setting value " 2 " that do not reach minimum injecting times with respect to substrate 1 the 11st row spacing body, and become mistake.Carry out the correcting of spray pattern in above-mentioned steps 7 this moment.If the ejection figure case of Figure 13 becomes amount of movement (amount of movement of nozzle location) that changes the 2nd later ink gun and the injection scheme case that has changed Figure 14 of nozzle selection, then can not produce error and satisfy setting value.

In the injection scheme case of Figure 15, the row (OK) of minimum injecting times " 2 " are given birth to error in abutting connection with time fecund, and the setting value at interval that can not satisfy minimum injection row is more than " 1 ".Correct spray pattern by above-mentioned steps 7 this moment.If the ejection figure case of Figure 15 is transformed to amount of movement (amount of movement of nozzle location) that changes the 2nd later ink gun and the injection scheme case that has changed Figure 16 of nozzle selection, then can produce error and satisfy setting value.

Claims (11)

1. spacing body formation method, enclose the ink of the constant granular spacing body of gap maintenance with being dispersed with the liquid crystal that is used for to form between a pair of substrate, form the position and form above-mentioned spacing body by drip a plurality of spacing bodies on the substrate in the above-mentioned a pair of substrate of ink-jet method, it is characterized in that, each above-mentioned spacing body is formed position many above-mentioned inks that drip.

2. spacing body formation method according to claim 1 is characterized in that: above-mentioned ink is to drip on the cross part of the non-pixel region of clathrate that surrounds each pixel.

3. spacing body formation method according to claim 1, it is characterized in that: use ink gun above-mentioned ink droplet is formed the position to above-mentioned a plurality of spacing bodies down with a plurality of nozzles, and do not accept by the same nozzle above-mentioned many melted inks that drip for the spacing body that makes a place forms the position, the correspondence position that changes above-mentioned each nozzle and above-mentioned each spacing body formation position concerns the above-mentioned many melted inks that drip.

4. spacing body formation method according to claim 1, it is characterized in that: use ink gun above-mentioned ink droplet is formed the position to above-mentioned a plurality of spacing bodies down with a plurality of nozzles, and accept by above-mentioned a plurality of nozzles above-mentioned ink that drips for the spacing body that makes a place forms the position, the correspondence position that changes above-mentioned each nozzle and above-mentioned each spacing body formation position concerns the above-mentioned many melted inks that drip.

5. spacing body formation method according to claim 1 is characterized in that: use the ink gun with a plurality of nozzles above-mentioned ink droplet is formed the position to above-mentioned a plurality of spacing bodies down, and comprise the steps:

Before forming position on to above-mentioned spacing body above-mentioned ink jet, confirm the examination injecting step that has or not injection unusual;

In above-mentioned examination is sprayed, exist when spraying unusual nozzle, do not spray the injection that unusual nozzle carries out above-mentioned ink thus, and spray above-mentioned ink, make the above-mentioned spacing body that drips form the position step from normal nozzles;

Form the correspondence position that above-mentioned each nozzle is moved in the position with respect to above-mentioned each spacing body, make that to form the position corresponding with normal nozzles corresponding to spraying the pairing spacing body of unusual nozzle in the abovementioned steps, normal nozzles is sprayed the above-mentioned ink step on the spacing body formation position that makes it to drip thus.

6. spacing body formation method according to claim 5 is characterized in that: it is no abnormal according to said nozzle the jet velocity of above-mentioned ink to be judged that above-mentioned injection has.

7. spacing body formation method according to claim 5 is characterized in that: splashing down the side-play amount of position according to above-mentioned ink, to judge that above-mentioned injection has no abnormal.

8. spacing body formation method according to claim 7, it is characterized in that: establishing said nozzle center and the corresponding spacing body of nozzle therewith, to form the length of straigh line that place-centric links to each other be D, the track that circles in the air of above-mentioned ink is θ with respect to the inclination angle of above-mentioned straight line, and then above-mentioned side-play amount of splashing down the position is represented by D * tan θ.

9. spacing body formation method according to claim 7, it is characterized in that: establishing said nozzle center and the corresponding spacing body of nozzle therewith, to form the length of straigh line that place-centric links to each other be D, the relative moving speed of above-mentioned ink gun and aforesaid substrate is that the spouting velocity of the above-mentioned ink of Vs, said nozzle is Vd, and the then above-mentioned position of splashing down is represented by Vs * D/Vd along the side-play amount of the above-mentioned direction that relatively moves.

10. spacing body formation method, enclose the ink of the constant granular spacing body of gap maintenance with being dispersed with the liquid crystal that is used for to form between a pair of substrate, form the position and form above-mentioned spacing body from drip a plurality of spacing bodies on the substrate the above-mentioned a pair of substrate of a plurality of nozzle ejection of ink gun, the method is characterized in that to comprise the steps:

Before forming position on to above-mentioned spacing body above-mentioned ink jet, confirm the examination injecting step that has or not injection unusual;

Exist when spraying unusual nozzle in above-mentioned examination is sprayed, do not spray the injection that unusual nozzle carries out above-mentioned ink thus, and spray above-mentioned ink from normal nozzles, the above-mentioned spacing body that drips forms the position step;

Form the correspondence position that above-mentioned each nozzle is moved in the position with respect to above-mentioned each spacing body, make that to form the position corresponding with normal nozzles corresponding to spraying the pairing spacing body of unusual nozzle in the abovementioned steps, normal nozzles is sprayed the above-mentioned ink step on the spacing body formation position that makes it to drip thus.

11. a spacing body forms device, it is useful on the ink that the liquid crystal inclosure gap that will form between a pair of substrate keeps constant and is distributed to the granular spacing body in the solvent containing, go out from a plurality of nozzle ejection of ink gun, the a plurality of spacing bodies on the substrate of dripping form on the position and form the position at above-mentioned spacing body and form above-mentioned spacing body, and this forms device and is characterised in that and comprises:

Spray observation device, the observation said nozzle sprays above-mentioned ink;

Spray abnormality juding portion, judge based on the observed result of above-mentioned injection observation device whether injection is unusual;

Control part, be used for not carrying out ink-jet from being judged to be the unusual nozzle of above-mentioned injection, after the above-mentioned spacing body that drips forms the position sprayed above-mentioned ink by normal nozzles, above-mentioned ink gun and aforesaid substrate are relatively moved, move above-mentioned each nozzle forms the position with respect to above-mentioned each spacing body correspondence position, when making normal nozzles corresponding to previous injection the and the corresponding spacing body formation of above-mentioned injection abnormal nozzle position, normal nozzles is sprayed above-mentioned ink and is dripped above-mentioned spacing body formation position thus.

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