CN1703122A - Method of manufacturing color filter substrate, method of manufacturing electro-optical device, electro-optical device, and electronic apparatus - Google Patents

Abstract

A method of manufacturing an electro-optical device according to the present invention comprises a step of forming a first partition wall portion 112a and a second partition wall portion 112b, and a step of ejecting a liquid substance for each of openings of each of the partition wall portions using a liquid droplet ejecting method, the liquid substance including functional materials composing the electro-optical layers. The ejected liquid substance has different viscosities for each electro-optical layer. In the partition wall portion formation step, a surface area of a portion of the first partition wall portion 112a projecting from the second partition wall portion 112b becomes relatively small in a position at which the liquid substance having relatively low viscosity is ejected, and the surface area of the portion of the first partition wall portion 112a projecting from the second partition wall portion 112b becomes relatively large in a position at which the liquid substance having relatively high viscosity is ejected.

Description

The manufacture method of colour filtering chip basic board, electro-optical device and manufacture method thereof, electronic equipment

Technical field

The present invention relates to manufacture method, the manufacture method of electro-optical device, electro-optical device, the electronic equipment of colour filtering chip basic board.

Background technology

In recent years, carrying out the exploitation of the color organic electroluminescence device (organic El device) of following structure, promptly, adopt and utilize the liquefaction of luminescent materials such as organic fluorescence materials China ink, and the ink-jet method that should China ink liquid on matrix, sprays, carry out the method for the pattern formation of luminescent material, between anode and negative electrode, clamping has the luminescent layer (for example with reference to patent documentation 1) that is made of described luminescent material.

[patent documentation 1] spy opens the 2002-252083 communique

But, under the situation of using described ink-jet method manufacturing organic El device, with the characteristics of luminescence (brightness, the colour purity etc.) homogenizing that is arranged each pixel (light-emitting component) of formation is very important, and the manufactured materials utilance of organic El device is had a significant impact.With the described characteristics of luminescence homogenizing time, need be between pixel evenly and be formed flatly each luminescent layer, particularly the uniformity of thickness and flatness be owing to can produce very cataclysm because of the drying condition of the black liquid that is coated with, so this drying condition just becomes the inhomogeneity crucial factor that improves described light-emitting component.In the patent documentation 1 in front, though, in fact will pass through following operation and carry out the formation of luminescent layer not for the clear and definite record of the drying process of the black liquid that on substrate, drips.

At first, preparation has formed pixel capacitors, has divided the substrate in the cofferdam of each pixel area, in by the cofferdam area surrounded, utilizes ink-jet method to form hole injection/transfer layer earlier., to the substrate that formed hole injection/transfer layer, the red light emitting layer that be filled in ink gun with black liquid to by cofferdam area surrounded in dripped, then, make black liquid that this quilt drips dry and form red light emitting layer thereafter.In the same manner, use ink gun that green light emitting layer is configured on the substrate with black liquid fixed point, form green light emitting layer through drying process.Then, use ink gun that blue light-emitting layer is configured on the substrate with black liquid fixed point in the same manner, form blue light-emitting layer through drying process.Like this, by on substrate, red light emitting layer, green light emitting layer, blue light-emitting layer being carried out pattern arrangement, just produced the color organic EL device.

Like this, under the situation that forms the different luminescent layer of illuminant colour, generally adopt following manufacture method, that is, behind the black liquid of a kind of color that dripped, carry out drying, form the luminescent layer of other color thereafter.This be because, as a rule because in the different luminescent layer of illuminant colour, the constituent material difference of black liquid, so the formation of its solvent is also different, drip thus and dry optimum condition also different concerning every kind of color.

But, owing to like this every kind of color is carried out the dripping of black liquid, drying successively, so the expensive during fabrication time, in addition, for example after having formed red light emitting layer, in the operation that forms green light emitting layer, dry red light emitting layer is exposed in the solvent atmosphere once more owing to be through with, and dissolves because of solvent types makes red light emitting layer sometimes, consequently again, might in luminescent layer, produce and go bad, cause the deterioration of characteristic.

Summary of the invention

The present invention finishes in order to solve described problem, its purpose is, the manufacturing efficient that can improve the colour filtering chip basic board that possesses multiple dyed layer significantly is provided, and can makes the film thickness uniformity of formed each dyed layer and the manufacture method of the colour filtering chip basic board that flatness also improves.In addition, its purpose also is, the manufacturing efficient that can improve the electro-optical device that possesses electro-optic layer such as multiple luminescent layer significantly is provided, and can makes the film thickness uniformity of formed each electro-optic layer and the manufacture method of the electro-optical device that flatness improves.

In order to solve described problem, the manufacture method of colour filtering chip basic board of the present invention is the manufacture method that possesses the colour filtering chip basic board of a plurality of multi-color coloring layers with predetermined pattern, it is characterized in that, comprise: the wall part that forms the 1st wall part and the 2nd wall part on substrate forms operation, wherein the 1st wall part possesses the 1st peristome in the formation zone that constitutes described dyed layer, the 2nd wall part is positioned on the 1st wall part, and possesses the 2nd peristome in the formation zone that constitutes described dyed layer equally; With in each peristome of described each wall part, utilize drop ejection method to be ejected in the ejection operation of dissolving or be dispersed with the aqueous body of each coloured material that constitutes described dyed layer in the solvent, wherein, the aqueous body of described ejection is for having the aqueous body of different viscosities respectively to dyed layer of all kinds, form in the operation at described wall part, to form described the 1st wall part from the outstanding shape of the opening inner face of described the 2nd wall part, in the peristome of the aqueous body that sprays relatively low viscosity, make the central surface area of described the 1st wall part less relatively from the outstanding part of the 2nd wall part, on the other hand, in the peristome of the aqueous body that sprays relative viscosity higher, make the central surface area of described the 1st wall part relatively large from the outstanding part of the 2nd wall part.

The inventor in view of described problem and the repeatedly result of research is, finds that because the viscosity difference of aqueous body, the thickness of formed dyed layer becomes inhomogeneous.Promptly, when the viscosity of employed aqueous body is high, the thickness that is formed at the dyed layer in the opening of wall part just has at central part and becomes big tendency, on the other hand, when the viscosity of aqueous body was low, the thickness that is formed at the dyed layer in the opening of wall part just has at circumference (near a side of wall part) went up the tendency that becomes big.

In addition, the inventor's result of study finds that because the surface area difference of the part (protuberance) of giving prominence in the middle of the 1st wall part, the thickness of formed dyed layer becomes inhomogeneous from the opening inner face of the 2nd wall part.Promptly, when the surface area of the described protuberance of the 1st wall part hour, the thickness that is formed at the dyed layer in the opening of wall part just has at central part and becomes big tendency, on the other hand, when the surface area of the described protuberance of the 1st wall part was big, the thickness that is formed at the dyed layer in the opening of wall part just has at circumference (near a side of wall part) went up the tendency that becomes big.

In addition, based on this kind result of study, the inventor has successfully found every kind of pattern is had under the various situation in the viscosity of employed aqueous body, can make the uniform film thickness of dyed layer and smooth method.Promptly, by as described manufacture method of the present invention, accordingly the area of the protuberance of the 1st wall part being adjusted rightly with the viscosity of aqueous body, specifically, by in the peristome of the aqueous body that sprays relatively low viscosity, make the surface area of protuberance of the 1st wall part less relatively, in addition, in the peristome of the aqueous body of the relative viscosity higher of ejection, make the surface area of protuberance of the 1st wall part relatively large, just can make the thickness of each dyed layer even and smooth respectively.

In addition, in order to solve described problem, the manufacture method of electro-optical device of the present invention is the manufacture method that possesses the electro-optical device of a plurality of multiple electro-optic layer with predetermined pattern, it is characterized in that, comprise: the wall part that forms the 1st wall part and the 2nd wall part on substrate forms operation, wherein the 1st wall part possesses the 1st peristome in the formation zone that constitutes described electro-optic layer, the 2nd wall part is positioned on the 1st wall part, and possesses the 2nd peristome in the formation zone that constitutes described electro-optic layer equally; With in each peristome of described each wall part, utilize drop ejection method to be ejected in the ejection operation of dissolving or be dispersed with the aqueous body of each functional material that constitutes described electro-optic layer in the solvent, wherein, the aqueous body of described ejection is for having the aqueous body of different viscosities respectively to various electro-optic layer, form in the operation at described wall part, to form described the 1st wall part from the outstanding shape of the opening inner face of described the 2nd wall part, in the peristome of the aqueous body that sprays relatively low viscosity, make the central surface area of described the 1st wall part less relatively from the outstanding part of the 2nd wall part, on the other hand, in the peristome of the aqueous body that sprays relative viscosity higher, make the central surface area of described the 1st wall part relatively large from the outstanding part of the 2nd wall part.

The inventor in view of described problem and the repeatedly result of research is, finds that because the viscosity difference of aqueous body, the thickness of formed electro-optic layer becomes inhomogeneous.Promptly, when the viscosity of employed aqueous body is high, the thickness that is formed at the electro-optic layer in the opening of wall part just has at central part and becomes big tendency, on the other hand, when the viscosity of aqueous body was low, the thickness that is formed at the electro-optic layer in the opening of wall part just has at circumference (near a side of wall part) went up the tendency that becomes big.

In addition, the inventor's result of study finds that because the surface area difference of the part (protuberance) of giving prominence in the middle of the 1st wall part, the thickness of formed electro-optic layer becomes inhomogeneous from the opening inner face of the 2nd wall part.Promptly, when the surface area of the described protuberance of the 1st wall part hour, the thickness that is formed at the electro-optic layer in the opening of wall part just has at central part and becomes big tendency, on the other hand, when the surface area of the described protuberance of the 1st wall part was big, the thickness that is formed at the electro-optic layer in the opening of wall part just has at circumference (near a side of wall part) went up the tendency that becomes big.

In addition, based on this kind result of study, the inventor has successfully found every kind of pattern is had under the various situation in the viscosity of employed aqueous body, can make the uniform film thickness of electro-optic layer and smooth method.Promptly, by as described manufacture method of the present invention, accordingly the area of the protuberance of the 1st wall part being adjusted rightly with the viscosity of aqueous body, specifically, by in the peristome of the aqueous body that sprays relatively low viscosity, make the surface area of protuberance of the 1st wall part less relatively, in addition, in the peristome of the aqueous body that sprays relative viscosity higher, make the surface area of protuberance of the 1st wall part relatively large, just can make the thickness of each electro-optic layer even and smooth respectively.

Form in the operation at described wall part, can be in the peristome of the aqueous body that sprays relatively low viscosity, make from the outstanding length of outstanding described the 1st wall part of the opening inner face of described the 2nd wall part less relatively, on the other hand, in the peristome of the aqueous body that sprays relative viscosity higher, make the outstanding length of described the 1st wall part outstanding from described the 2nd wall part relatively large.By setting like this, just can adjust the surface area of protuberance simply.

In addition, among the present invention, can comprise drying process, after described ejection operation, make the aqueous body of ejection side by side dry respectively for various electro-optic layer.By like this drying of each electro-optic layer being carried out together, just can make the manufacturing efficient raising significantly compared with the past of electro-optical device.And, make each electro-optic layer side by side under the dry situation, though preferably use identical solvent for each electro-optic layer, when for the identical separately solvent of different functional material uses, the viscosity of each aqueous body will dissimilate.So,, just can prevent or suppress the generation of the unequal problem of thickness of the electro-optical device that the difference because of the viscosity of aqueous body causes by adopting method of the present invention in such cases.

Described drying process is preferably the vacuumize operation.By in order to make the liquid dryer of coating on the described substrate, and use vacuumize, just can control drying condition subtly, thereby can make the film thickness uniformity of dried electro-optic layer and flatness good.

In addition, the feature of electro-optical device of the present invention is, utilizes described manufacture method to obtain, and in addition, the feature of electronic equipment of the present invention is for example to possess this electro-optical device as display part.This kind electro-optical device and electronic equipment become device and the equipment that cost is low and reliability is high.

Description of drawings

Fig. 1 is the circuit diagram of the organic El device of expression present embodiment.

Fig. 2 be the expression present embodiment organic El device overlook pie graph.

Fig. 3 is the section pie graph of viewing area of the organic El device of expression present embodiment.

Fig. 4 is the process chart of the manufacture method of explanation execution mode.

Fig. 5 is the process chart of the manufacture method of explanation execution mode.

Fig. 6 is the process chart of the manufacture method of explanation execution mode.

Fig. 7 is the process chart of the manufacture method of explanation execution mode.

Fig. 8 is the process chart of the manufacture method of explanation execution mode.

Fig. 9 is the process chart of the manufacture method of explanation execution mode.

Figure 10 is the process chart of the manufacture method of explanation execution mode.

Figure 11 is the schematic diagram that the stromatolithic structure of inorganic matter cofferdam layer and organic substance cofferdam layer is amplified expression.

Figure 12 is the key diagram that expression is formed at a mode of the layer in the cofferdam.

Figure 13 is the key diagram that expression is formed at the different mode of the layer in the cofferdam.

Figure 14 be execution mode shower nozzle overlook pie graph.

Figure 15 be execution mode ink discharge device overlook pie graph.

Figure 16 is the three-dimensional composition figure of an example of expression electronic equipment.

Figure 17 is the generalized section of relation of the outstanding width in the viscosity of expression shape of formed film and liquid composition and cofferdam.

Figure 18 is the generalized section of relation of the outstanding width in the viscosity of expression shape of formed film and liquid composition and cofferdam.

Figure 19 is the generalized section of relation of the outstanding width in the viscosity of expression shape of formed film and liquid composition and cofferdam.

Figure 20 is the generalized section of relation of the outstanding width in the viscosity of expression shape of formed film and liquid composition and cofferdam.

Figure 21 is the generalized section of relation of the outstanding width in the viscosity of expression shape of formed film and liquid composition and cofferdam.

Figure 22 is the generalized section of relation of the outstanding width in the viscosity of expression shape of formed film and liquid composition and cofferdam.

Figure 23 is the generalized section of relation of the outstanding width in the viscosity of expression shape of formed film and liquid composition and cofferdam.

Figure 24 is the generalized section of relation of the outstanding width in the viscosity of expression shape of formed film and liquid composition and cofferdam.

Among the figure: the 2-substrate, 110-organic EL layer (electro-optic layer), 110a-hole injection/transfer layer, the 110b-luminescent layer, the 111-pixel capacitors, 112-cofferdam (wall part), 112a-inorganic matter cofferdam layer (the 1st wall part), 112b-organic substance cofferdam layer (the 2nd wall part), 112e-the 1st laminate part (protuberance).

Embodiment

Below will be to describing as the organic El device of an execution mode of electro-optical device of the present invention and the manufacture method of this organic El device.

Fig. 1 is the key diagram of Wiring construction of the organic El device of expression present embodiment, and Fig. 2 is the schematic top plan view of the organic El device of present embodiment, and Fig. 3 is the generalized section of viewing area of the organic El device of present embodiment.

(organic El device)

As shown in Figure 1, the organic El device of present embodiment have many signal line 102 of having laid multi-strip scanning line 101 respectively, having extended along the direction of intersecting with scan line 101, along with the formation of many power lines 103 of holding wire 102 direction extension arranged side by side, and near each intersection point of scan line 101 and holding wire 102, be provided with pixel area P.

On holding wire 102, be connected with possess shift register, the data side drive circuit 104 of level shifter, video line and analog switch.In addition, on scan line 101, be connected with the scan-side drive circuit 105 that possesses shift register and level shifter.

In addition, among each pixel area P, be provided with thin-film transistor 122 from scan line 101 to gate electrode that supply with the switching usefulness of sweep signal by, maintenance is switched the maintenance electric capacity cap of the thin-film transistor 122 of usefulness by the pixel signal of holding wire 102 supplies by this, to keep the thin-film transistor 123 of the pixel signal of electric capacity cap maintenance by this, when being electrically connected with power line 103 with thin-film transistor 123, flow into the pixel capacitors (electrode) 111 of drive currents from this power line 103 by this driving to the driving usefulness of gate electrode supply, sandwiched the organic EL layer 110 between this pixel capacitors 111 and the negative electrode (opposite electrode) 12.Utilize electrode 111, opposite electrode 12 and organic EL layer 110, constitute light-emitting component.

When scan line 101 is driven and the thin-film transistor 122 that switches usefulness when becoming ON, the current potential of the holding wire 102 of this moment is held electric capacity cap and keeps, and keeps the state decision of electric capacity cap to drive the ONOFF state of the thin-film transistor 123 of usefulness according to this.In addition, through the passage of the thin-film transistor 123 of the usefulness of overdriving, electric current flows to pixel capacitors 111 from power line 103, passes through organic EL layer 110 then, current direction negative electrode 12.In the organic EL layer 110, produce luminous accordingly with current amount flowing.

The organic El device of present embodiment possesses as shown in Figure 3: the transparent substrate of being made by glass etc. 2, possess and be configured to rectangular light-emitting component and be formed at light-emitting component portion 11 on the substrate 2, be formed at the negative electrode 12 in the light-emitting component portion 11.Here, utilize light-emitting component portion 11 and negative electrode 12 to constitute display element 10.

Substrate 2 for example is transparency carriers such as glass, as shown in Figure 2, be divided into the central authorities that are positioned at substrate 2 viewing area 2a, be positioned at the periphery of substrate 2 and surround the non-display area 2c of viewing area 2a.And viewing area 2a serves as reasons and is configured to the zone that rectangular light-emitting component forms.

In addition, in non-display area 2c, be equipped with described power line 103 (103R, 103G, 103B).In the both sides of viewing area 2a, dispose described scan-side drive circuit 105,105.In addition, in the both sides of scan-side drive circuit 105,105, be provided with the drive circuit control signal distribution 105a and the drive circuit power supply wiring 105b that are connected with scan-side drive circuit 105,105.Dispose at the diagram upside of viewing area 2a and to carry out in the manufacture process or the check circuit 106 of the inspection of the quality of display unit when dispatching from the factory, defective.

In the section pie graph of Fig. 3, figure is shown with 3 pixel area A.In the organic El device of present embodiment, on substrate 2, stack gradually the circuit element portion 14 that has formed circuit such as TFT, the light-emitting component portion 11 that has formed organic EL layer 110 and negative electrode 12, penetrate to the downside (observer's side) of substrate 2 to light transmission circuit element portion 14 that substrate 2 sides are sent and substrate 2 from organic EL layer 110, and the light that sends to an opposite side of substrate 2 from organic EL layer 110 is reflected by negative electrode 12, sees through circuit element portion 14 and substrate 2 and penetrates to the downside (observer's side) of substrate 2.

And, as described negative electrode 12,, the light that sends from cathode side is penetrated if use material transparent.As transparent cathode material, can enumerate ITO (indium tin oxide), Pt, Ir, Ni or Pd.

In circuit element portion 14, on substrate 2, be formed with the base protective film 2c that constitutes by silicon oxide layer, on this base protective film 2c, be formed with the semiconductor film 141 of the island that constitutes by polysilicon.On semiconductor film 141, utilize the high concentration phosphorus ion to inject and be formed with source region 141a and drain region 141b.The part that does not import described phosphonium ion becomes passage area 141c.

In addition; be formed with the transparent gate insulating film 142 that covers described base protective film 2c and semiconductor film 141; on gate insulating film 142, be formed with the gate electrode 143 (scan line 101) that constitutes by Al, Mo, Ta, Ti, W etc., on gate electrode 143 and gate insulating film 142, be formed with the 1st transparent interlayer dielectric 144a and the 2nd interlayer dielectric 144b.Gate electrode 143 is located at the position corresponding with the passage area 141c of semiconductor film 141.In addition, run through the 1st, the 2nd interlayer dielectric 144a, 144b, be formed with respectively and the source of semiconductor film 141, the contact hole 145,146 that drain region 141a, 141b are connected.

In addition, on the 2nd interlayer dielectric 144b, handled and form by pattern with the shape of regulation by the transparent pixel capacitors 111 that ITO etc. makes, a side contact hole 145 is connected with this pixel capacitors 111.In addition, the opposing party's contact hole 146 is connected with power line 103.Like this, in circuit element portion 14, just form the thin-film transistor 123 of the driving usefulness that is connected with each pixel capacitors 111.

Light-emitting component portion 11 by based at organic EL layer stacked separately on a plurality of pixel capacitors 111... 110, be located between each pixel capacitors 111 and the organic EL layer 110 and divide the cofferdam 112 of each organic EL layer 110 and constitute.On organic EL layer 110, dispose negative electrode 12.Utilize these pixel capacitors 111, organic EL layer 110 and negative electrode 12 to constitute light-emitting component.Here, pixel capacitors 111 is for example formed by ITO, is treated to by pattern and overlooks approximate rectangular shape.Has cofferdam 112 with the shape of separating this each pixel capacitors 111....

Cofferdam 112 has possessed stacked as inorganic matter cofferdam layer (the 1st cofferdam layer) 112a that is positioned at the 1st wall part of substrate 2 sides, as the formation that is positioned at organic substance cofferdam layer (the 2nd cofferdam layer) 112b of the 2nd wall part of the position of leaving substrate 2 as shown in Figure 3.Inorganic matter cofferdam layer 112a is for example by TiO ₂Or SiO ₂Deng formation, organic substance cofferdam layer 112b is for example formed by acrylic resin, polyimide resin etc.

Inorganic matter, organic substance cofferdam layer 112a, 112b are ridden on the circumference of pixel capacitors 111 and are formed.See with overlooking, form pixel capacitors 111 around and inorganic matter cofferdam layer 112a by the structure that disposes with overlapping.In addition, organic substance cofferdam layer 112b is also identical, by with a part of plane earth overlay configuration of pixel capacitors 111.Inorganic matter cofferdam layer 112a compares with the marginal end of organic substance cofferdam layer 112b in addition, is formed highlightedly by the center side to pixel capacitors 111 more.Like this, each the 1st laminate part (protuberance) 112e by at the inboard of pixel capacitors 111 formation inorganic matter cofferdam layer 112a is provided with the lower openings portion 112c corresponding with the formation position of pixel capacitors 111.

In addition, in organic substance cofferdam layer 112b, be formed with the 112d of upper opening portion.The 112d of this upper opening portion is provided with accordingly by formation position and the 112c of lower openings portion with pixel capacitors 111.The 112d of upper opening portion as shown in Figure 3, be made into wideer than the frontal width of the 112c of lower openings portion, narrower than pixel capacitors 111.In addition, the mode that also roughly is in same position by the end according to the position on the top that makes the 112d of upper opening portion and pixel capacitors 111 sometimes forms.At this moment, as shown in Figure 3, the section of the 112d of upper opening portion of organic substance cofferdam layer 112b just becomes the shape of inclination.Like this, in cofferdam 112, just form the peristome 112g that the 112c of lower openings portion and the 112d of upper opening portion have been communicated with.

In addition, in cofferdam 112, be formed with zone that shows lyophily and the zone that shows lyophobicity.The zone that shows lyophily is the 1st laminate part 112e of inorganic matter cofferdam layer 112a and the electrode surface 111a of pixel capacitors 111, and these zones are lyophily by the plasma treatment that is processing gas with surface treatment with oxygen.The zone that shows lyophobicity in addition is the wall of the 112d of upper opening portion and the top 112f of organic substance cofferdam layer 112, and these zones are served as that the plasma treatment of handling gas is carried out fluorination treatment (being treated to lyophobicity) with the surface with tetrafluoride methane, tetrafluoromethane or carbon tetrafluoride.

Organic EL layer 110 constitutes by be layered in the hole injection/transfer layer 110a on the pixel capacitors 111, the luminescent layer 110b that is adjacent to form on the injection/transfer layer 110a of hole.

Hole injection/transfer layer 110a has the function to luminescent layer 110b injected hole, and has the function in injection/transfer layer 110a delivered inside hole, hole.By this kind hole injection/transfer layer 110a is located between pixel capacitors 111 and the luminescent layer 110b, element characteristics such as the luminous efficiency of luminescent layer 110b, life-span improve.In addition, among the luminescent layer 110b,, carry out luminous by hole injection/transfer layer 110a injected holes and compound at luminescent layer by negative electrode 12 injected electrons.

Hole injection/transfer layer 110a is formed at par 110a1 on the pixel capacitors face 111a by being positioned at the 112c of lower openings portion, be positioned at the 112d of upper opening portion and the circumference 110a2 that is formed on the 1st laminate part 112e of inorganic matter cofferdam layer constitutes.In addition, hole injection/transfer layer 110a only is formed on the pixel capacitors 111 because of structural factor, and between inorganic matter cofferdam layer 112a (112c of lower openings portion) (mode that only is formed on the foregoing par is also arranged).

In addition, par 110a1 and circumference 110a2 that luminescent layer 110b is spreaded all over hole injection/transfer layer 110a upward form, and the thickness on the 110a1 of par is set to the scope of 50nm～80nm.Luminescent layer 110b have redness sent (R) light red light emitting layer 110b1, send the green light emitting layer 110b2 of green (G) light and send these 3 kinds of the blue light-emitting layer 110b3 of blueness (B) light, as shown in Figure 2, each luminescent layer 110b1～110b3 is become the striated configuration.

Owing on the 1st laminate part 112e of inorganic matter cofferdam layer, be formed with the circumference 110a2 of uneven thickness, therefore circumference 110a2 forms by the state of the 1st laminate part 112e and pixel capacitors 111 insulation, and luminescent layer 110b can not injected from circumference 110a2 in the hole.Like this, electric current from pixel capacitors 111 only flows into par 110a1, the hole is carried to luminescent layer 110b equably from par 110a1, can only make the middle body of luminescent layer 110b luminous, and can make the luminous quantity of luminescent layer 110b keep certain.

In addition, because the center side that inorganic matter cofferdam layer 112a compares with organic substance cofferdam layer 112b more to pixel capacitors 111 extends out, therefore can utilize this inorganic matter cofferdam layer 112a that the shape of the bonding part of pixel capacitors 111 and par 110a1 is repaired, thereby can suppress the inequality of the luminous intensity between each luminescent layer 110b.

In addition, because the electrode surface 111a of pixel capacitors 111 and the 1st laminate part 112e of inorganic matter cofferdam layer show lyophily, therefore organic EL layer 110 connects airtight equably with pixel capacitors 111 and inorganic matter cofferdam layer 112a, not attenuation terrifically of organic EL layer 110 on inorganic matter cofferdam layer 112a, thus the short circuit of pixel capacitors 111 and negative electrode 12 can be prevented.

In addition, because the wall of the top 112f of organic substance cofferdam layer 112b and the 112d of upper opening portion shows lyophobicity, therefore can organic EL layer 110 and the connecting airtight property reduction of organic substance cofferdam layer 112b, the situation that organic EL layer 110 overflows from peristome 112g.

And, form material as hole injection/transfer layer, for example can use the mixture of polythiofuran derivative such as polyethylene dioxythiophene and polystyrolsulfon acid etc.In addition, material as luminescent layer 110b, for example can use (gathering) phenylenevinylene to support derivative, polyphenylene derivatives, poly-fluorene derivative, polyvinylcarbazole, polythiofuran derivative, hexichol embedding benzene class dyestuff, Coumarins dyestuff, rhodamine class dyestuff or the rubrene that in these macromolecular materials, mixes, hexichol embedding benzene, 9, uses such as the 10-diphenyl is feared, tetraphenylbutadiene, Nile red, coumarin 6, quinoline a word used for translation (two) ketone.

Negative electrode 12 be formed on light-emitting component portion 11 comprehensively on, with pixel capacitors 111 in pairs and the effect of electric current is flow through in performance in organic EL layer 110.This negative electrode 12 is for example stacked and constitute with calcium layer and aluminium lamination.At this moment, on negative electrode, the low material of work function is set preferably, particularly in this mode, directly contacts with luminescent layer 110b and bring into play the effect of in luminescent layer 110b, injecting electronics near a side of luminescent layer.

In addition, between luminescent layer 110b and negative electrode 12, be formed for improving the LiF of luminous efficiency sometimes.And, be not limited to lithium fluoride for red and green luminescent layer 110b1,110b2, also can use other material.So also can only go up at blue (B) luminescent layer 110b3 and form the layer that is made of lithium fluoride, the material beyond stacked lithium fluoride on other red and green luminescent layer 110b1, the 110b2 this moment.In addition, can on red and green luminescent layer 110b1,110b2, not form lithium fluoride yet, and only form calcium.

In addition, the aluminium that forms negative electrode 12 is to make the light that sends from the luminescent layer 110b material to substrate 2 lateral reflections, and except the Al film, preferably the stack membrane by Ag film, Al and Ag constitutes.In addition, also can on aluminium, be provided with by SiO, SiO ₂, formation such as SiN oxidation prevent the protective layer of usefulness.

In light-emitting component portion 11 shown in Figure 3, in the organic El device of reality, has sealing.Sealing portion for example can be by being coated with sealing resin annularly around substrate 2, and then utilize hermetically sealed can to seal and form.Described sealing resin is preferably made by thermosetting resin or ultraviolet hardening resin etc., is especially preferably made by a kind of epoxy resin as thermosetting resin.Sealing portion is provided with for the oxidation that prevents negative electrode 12 or be formed at the luminescent layer in the light-emitting component portion 11.In addition, the gas absorbent that absorbs water, oxygen etc. can be set also in the inboard of described hermetically sealed can, thereby can absorb the water or the oxygen of the inside of invading hermetically sealed can.

(manufacture method of organic El device)

Below with reference to accompanying drawings the method for making described organic El device is described.

The manufacture method of present embodiment has (1) cofferdam and forms operation, (2) hole injection/transfer layer formation operation, (3) luminescent layer formation operation, (4) negative electrode formation operation and (5) sealing process etc.And Shuo Ming manufacture method is an example here, can append other operation as required or with the deletion of the part of described operation.And (2) hole injection/transfer layer forms operation, (3) luminescent layer and forms operation and be to use the liquid ejection method (ink-jet method) of having utilized droplet ejection apparatus to carry out.

In addition, in the manufacture method of present embodiment, form in the operation at (3) luminescent layer, by the liquid composition of ejection on substrate 2 is to form with liquid composition with luminescent layer of all kinds to use common mixed solvent to constitute, after the ejection of the liquid composition of described usefulness of all kinds is all over, carry out drying process together.

(1) cofferdam forms operation

Cofferdam forms in the operation, forms cofferdam 112 on the assigned position of substrate 2.Cofferdam 112 has following structure,, has formed inorganic matter cofferdam layer 112a as the 1st cofferdam layer that is, has formed organic substance cofferdam layer 112b as the 2nd cofferdam layer.

(1)-1 the formation of inorganic matter cofferdam layer 112a

At first, as shown in Figure 4, the assigned position on substrate forms inorganic matter cofferdam layer 112a.The position that forms inorganic matter cofferdam layer 112a is on the 2nd interlayer dielectric 144b and pixel capacitors 111.And the 2nd interlayer dielectric 144b is formed in the circuit element portion 14 that has disposed thin-film transistor, scan line, holding wire etc.Inorganic matter cofferdam layer 112a for example can use SiO ₂, TiO ₂Constitute etc. inorganic material.These materials for example utilize formation such as CVD method, cladding process, sputtering method, vapour deposition method.In addition, the scope of the preferred 50nm～200nm of thickness of inorganic matter cofferdam layer 112a, preferred especially 150nm.

Inorganic matter cofferdam layer 112a by interlayer dielectric 144 and pixel capacitors 111 comprehensively on form the inorganic matter film, utilize photoetching process etc. that the inorganic matter film is carried out pattern thereafter and handle, form with shape with peristome.This peristome is and the corresponding part in formation position of the electrode surface 111a of pixel capacitors 111, is used as the 112c of lower openings portion as shown in Figure 4 and is provided with.And at this moment, inorganic matter cofferdam layer 112a quilt so just can suppress the light-emitting zone on the plane of luminescent layer 110 according to forming with the local overlapping mode of the circumference of pixel capacitors 111.

(1)-2 the formation of organic substance cofferdam layer 112b

Then, formation is as the organic substance cofferdam layer 112b of the 2nd cofferdam layer.

Specifically, as shown in Figure 4, on inorganic matter cofferdam layer 112a, form organic substance cofferdam layer 112b.As the material that constitutes organic substance cofferdam layer 112b, use acrylic resin, polyimide resin etc. to have the material of thermal endurance, solvent resistance.Use these materials, utilize photoetching technique etc. to carry out pattern to organic substance cofferdam layer 112b and handle and form.And, when carrying out the pattern processing, on organic substance cofferdam layer 112b, form the upper opening 112d of portion.The 112d of upper opening portion is located on the position corresponding with electrode surface 111a and the 112c of lower openings portion.

The 112d of upper opening portion cans be compared to the 112c of lower openings portion that is formed on the inorganic matter cofferdam layer 112a most and forms widelyer as shown in Figure 4.In addition, the best cross sectional shape of organic substance cofferdam layer 112b forms taper, and it is narrower than the width of pixel capacitors 111 to be preferably in the bottom surface of organic substance cofferdam layer 112b, and is roughly the same with the width of pixel capacitors 111 in the top of organic substance cofferdam layer 112b.

Like this, the 1st laminate part 112e of the 112c of lower openings portion of encirclement inorganic matter cofferdam layer 112a just becomes than organic substance cofferdam layer 112b more to the outstanding shape of the center side of pixel capacitors 111.Like this, be communicated with, just form the peristome 112g that inorganic matter cofferdam layer 112a and organic substance cofferdam layer 112b are run through by the 112c of lower openings portion that makes the 112d of upper opening portion that is formed on the organic substance cofferdam layer 112b, be formed on the inorganic matter cofferdam layer 112a.And, in the present embodiment, adopt different value to the overhang of the outstanding part of the center side of pixel capacitors 111 for each pixel for described inorganic matter cofferdam layer 112a, specifically, adopt different separately overhangs for each luminescent layer 110b1,110b2,110b3.

In addition, the scope of the preferred 0.1 μ m of the thickness of organic substance cofferdam layer 112b～3.5 μ m is about preferred especially 2 μ m.Adopt shown in the reasons are as follows of this kind scope.

That is, if thickness less than 0.1 μ m, then because compare organic substance cofferdam layer 112b with the gross thickness of hole described later injection/transfer layer and luminescent layer thinner, luminescent layer 110b might overflow from the 112d of upper opening portion, thereby not ideal enough.In addition, when thickness surpasses 3.5 μ m, then, can't guarantee the step coverage rate of the negative electrode 12 on the 112d of upper opening portion because the ladder that the 112d of upper opening portion causes becomes big, therefore not ideal enough.In addition, if the thickness of organic substance cofferdam layer 112b is made as more than the 2 μ m, then consider it is desirable from the aspect that improves the negative electrode 12 and the insulation of the thin-film transistor 123 that drives usefulness.

In addition, the surface of formed cofferdam 112 and pixel capacitors 111 preferably utilizes plasma treatment to implement appropriate surface treatment, specifically, carries out the lyophoby processing on cofferdam 112 surfaces and the lyophily processing of pixel capacitors 111.

At first, the surface treatment of pixel capacitors 111 can utilize the O that has used oxygen ₂Plasma treatment is carried out, for example, just can the regional lyophilyization on pixel capacitors 111 surfaces will be comprised by under the condition of 70 ℃～90 ℃ of plasma power 100kW～800kW, oxygen flow 50ml/min～100ml/min, plate conveying speed 0.5mm/sec～10mm/sec, substrate temperatures, handling.In addition, also can utilize this O ₂Plasma treatment is carried out the cleaning on pixel capacitors 111 surfaces and the adjustment of work function simultaneously.

Then, the surface treatment of cofferdam 112 can utilize the CF that has used tetrafluoromethane ₄Plasma treatment is carried out, for example by under the condition of 70 ℃～90 ℃ of plasma power 100kW～800kW, tetrafluoromethane flow 50ml/min～100ml/min, substrate transferring speed 0.5mm/sec～10mm/sec, substrate temperatures, handling, just can with the 112d of upper opening portion of cofferdam 112 and above the 112f lyophobyization.

(2) hole injection/transfer layer forms operation

Then, form in the operation, at first on pixel capacitors 111, form hole injection/transfer layer at light-emitting component.

Hole injection/transfer layer forms operation, by use for example ink discharge device as droplet ejection apparatus, will comprise hole injection/transfer layer and form the liquid composition of material to upward ejection of electrode surface 111a.Carry out dried and heat treatment, forming hole injection/transfer layer 110a on the pixel capacitors 111 and on the inorganic matter cofferdam layer 112a thereafter.And here, hole injection/transfer layer 110a also has the mode that is not formed on the 1st laminate part 112e,, the mode that only forms hole injection/transfer layer on pixel capacitors 111 is arranged also that is.

The manufacture method of utilizing ink-jet to carry out is as follows.That is, as shown in Figure 5, ejection comprises the liquid composition that hole injection/transfer layer forms material a plurality of nozzles on being formed at ink gun H1.Here, though, also can be undertaken by scanning substrate 2 by scanning ink-jet head filled compositions in each pixel.In addition, also can filled compositions by ink gun and substrate 2 are relatively moved.And, in the operation that use ink gun after this carries out, identical aspect above-mentioned.

The ejection that utilizes ink gun to carry out is as follows.That is,, from nozzle H2, spray liquid composition with being formed at the configuration over the ground of practising physiognomy of jetting nozzle H2 on the ink gun H1 and electrode surface 111.Around pixel capacitors 111, be formed with the cofferdam 112 of dividing the lower openings 112c of portion, ink gun H1 is faced mutually with the pixel capacitors face 111a that is positioned at the 112c of this lower openings portion, when this ink gun H1 and substrate 2 are relatively moved, from jetting nozzle H2 to electrode surface 111a ejection Be Controlled the drop 110c of liquid composition of each liquid measure of dripping.

As employed liquid composition in this operation, for example can use mixture with polyethylene dioxythiophene polythiofuran derivatives such as (PEDOT) and polystyrolsulfon acid (PSS) etc. to be dissolved in composition in the polar solvent.As polar solvent, for example can enumerate isopropyl alcohol (IPA), n-butanol, gamma-butyrolacton, N-methyl pyrrolidone (NMP), 1, glycol ethers such as 3-dimethyl-2-imidazolidinone (DMI) and derivative thereof, acetic acid carbitol ester, acetic acid butyl carbitol ester etc.

As forming more specifically, can list PEDOT/PSS mixture (PEDOT/PSS=1: 20): the example of 12.52 weight %, IPA:10 weight %, NMP:27.48 weight %, DMI:50 weight %.And, about the preferred 1mPas～20mPas of the viscosity of described liquid composition, about preferred especially 4mPas～15mPas.

By using described liquid composition, just can in jetting nozzle H2, not produce and stop up ground ejection stably.And hole injection/transfer layer forms material both can use identical materials for red (R), green (G), blue (B) each luminescent layer 110b1～110b3, also can use each luminescent layer conversion.In the present embodiment, use different hole injection/transfer layer to form material, make viscosity difference to the liquid composition of each luminescent layer 110b1～110b3 ejection for red (R), green (G), blue (B) each luminescent layer 110b1～110b3.

Here, when the liquid composition of ejection different viscosities, because the difference of its viscosity, the thickness that the has a formed hole injection/transfer layer uneven situation that becomes.Specifically, as shown in figure 12, when the viscosity low (for example being 1mPas) of employed liquid composition, the thickness of formed layer 201 just has at circumference (being the side near inorganic matter cofferdam layer 112a here) goes up the tendency that becomes big, on the other hand, when the viscosity height (for example being 20mPas) of liquid composition, then as shown in figure 13, the thickness of formed layer 202 has at central part and becomes big tendency.

On the other hand, with viscosity independently, sometimes because of the surface area of outstanding part (the 1st laminate part) 112e from organic substance cofferdam layer 112b among the inorganic matter cofferdam layer 112a, make the thickness of the formed hole injection/transfer layer uneven situation that becomes.Specifically, when the surface area of the described protuberance 112e of inorganic matter cofferdam layer 112a is big, the thickness of formed layer just has in the big tendency of circumference (near a side of wall part) change, on the other hand, when the surface area of the protuberance 112e of inorganic matter cofferdam layer 112a hour, the thickness of formed layer just has at central part and becomes big tendency.In addition, specifically, when the outstanding width (amplitude L1 shown in Figure 11) of the described protuberance 112e of inorganic matter cofferdam layer 112a is the 5 μ m left and right sides, the thickness of formed layer just has in the big tendency (with reference to Figure 12) of circumference (near a side of wall part) change, on the other hand, when the outstanding width (amplitude L1 shown in Figure 11) of the protuberance 112e of inorganic matter cofferdam layer 112a was the 1 μ m left and right sides, the thickness of formed layer just had at central part and becomes big tendency (with reference to Figure 13).

So, in the present embodiment, viscosity difference owing to the liquid composition that sprays to luminescent layer 110b1 of all kinds～110b3, therefore the surface area of protuberance 112e that makes inorganic matter cofferdam layer 112a in advance is for each luminescent layer 110b1～110b3 (being pixel of all kinds) difference, thereby prevents or suppress to form uneven hole injection/transfer layer.Specifically, have in the pixel of liquid composition of relative viscosity higher in ejection, increase the overhang of protuberance 112e, and increase the surface area of this protuberance 112e, have in the pixel of liquid composition of relatively low viscosity in ejection, reduce the overhang of protuberance 112e, and reduce the surface area of this protuberance 112e.

Get back to Fig. 5, the drop 110c of the composition that is sprayed launches on electrode surface 111a that has been carried out the lyophily processing and the 1st laminate part 112e, is filled in bottom, the 112c of upper opening portion, the 112d.If the 1st composition drop 110c departs from the ejection position of regulation and is gone up ejection by 112f upward, above 112f also can not soaked into by the 1st composition drop 110c, the 1st composition drop 110c that is flicked rolls in bottom, the 112c of upper opening portion, the 112d.

The amount that goes up the composition of ejection to electrode surface 111a forms decisions such as concentration of material by the thickness of the size of bottom, the 112c of upper opening portion, 112d, the hole injection/transfer layer that will form, the hole injection/transfer layer of liquid composition.In addition, the drop 110c of liquid composition only sprays 1 time, goes up ejection but be divided into for several times to identical electrode surface 111a.At this moment, the amount of the liquid composition of each time both can be identical, also can change liquid composition at every turn.In addition, not only can also can spray described liquid composition to the same position ejection of electrode surface 111a in the different positions of each time in electrode surface 111a.

For the structure of ink gun, can use shower nozzle H as shown in figure 14.In addition, preferably dispose as shown in figure 15 about the configuration of substrate and ink gun.

Among Figure 14, symbol H7 possesses a plurality of ink gun H1 for supporting the supporting substrate of described ink gun H1 on this supporting substrate H7.

On the black liquid ejection face (face relative) of ink gun H1, along the length direction Cheng Liezhuan ground of shower nozzle and draw back the compartment of terrain along the Width of shower nozzle and be listed as with 2 and be provided with a plurality of (for example 180 nozzles of 1 row add up to 360 nozzles) jetting nozzle with substrate.In addition, this ink gun H1 with jetting nozzle towards substrate-side, and approximate down along X-direction Cheng Liezhuan ground and drawing back predetermined distance ground along the Y direction and be listed as under the state that disposes with 2 by the state of the predetermined angular that tilted with respect to X-axis (or Y-axis), overlooked on the approximate rectangular supporting bracket 20 with a plurality of positions (be 6 of 1 row among Figure 14, add up to 12) positioning supports.

In inkjet head device shown in Figure 15, symbol 1115 is for placing the stand of substrate 2 in addition, and symbol 1116 is with the guide rail of stand 1115 along x direction of principal axis (main scanning direction) guiding among the figure.In addition, shower nozzle H can utilize guide rail 1113 to move along y direction of principal axis among the figure (secondary main scanning direction) by supporting member 1111, in addition, shower nozzle H can rotate along θ direction of principal axis among the figure, thus the angle that can make ink gun H1 tilt to stipulate with respect to main scanning direction.Like this, by with ink gun with respect to the scanning direction tilted configuration, just can make injector spacing corresponding with pixel pitch.In addition, by carrying out the angle of inclination adjustment, just can make it corresponding to any pixel pitch.

Substrate 2 shown in Figure 15 is formed on the structure that has disposed a plurality of chips on the mother substrate.That is, the zone of 1 chip is equivalent to 1 display unit.Here, though be formed with 3 viewing area 2a, be not limited thereto.For example, when the 2a coating composition of the viewing area in the left side on substrate 2, by guide rail 1113 shower nozzle H left side in figure is moved, and make substrate 2 in figure, go up side shifting, in scanning substrate 2, be coated with by guide rail 1116.For the viewing area 2a that is positioned at right-hand member also with described identical.And shower nozzle H shown in Figure 14 and ink discharge device shown in Figure 15 are not only and are used for the device that hole injection/transfer layer forms operation, also are to be used for the device that luminescent layer forms operation.

Then, carry out as shown in Figure 6 drying process.That is, the 1st composition after the ejection is carried out dried, make solvent evaporation contained in the 1st composition, form hole injection/transfer layer 110a.When carrying out dried, the evaporation of contained solvent mainly is to cause that with the evaporation of solvent, hole injection/transfer layer is concentrated and separates out after near inorganic matter cofferdam layer 112a and organic substance cofferdam layer 112b in the liquid composition.So just as shown in Figure 6, on the 1st laminate part 112e, form and form the circumference 110a2 that material constitutes by hole injection/transfer layer.The wall of this circumference 110a2 and the 112d of upper opening portion (organic substance cofferdam layer 112b) connects airtight, and its thickness is in the side attenuation near electrode surface 111a, in the side away from electrode surface 111a, promptly near the side thickening of organic substance cofferdam layer 112b.

In addition, meanwhile,, so just on electrode surface 111a, form and form the par 110a1 that material constitutes by hole injection/transfer layer because of dried also causes the evaporation of solvent on electrode surface 111a.Because the evaporation rate of solvent is even basically, so the formation material of hole injection/transfer layer just concentrated on electrode surface 111a equably, so just forms the par 110a1 of homogeneous thickness on electrode surface 111a.Like this, just form the hole injection/transfer layer 110a that constitutes by circumference 110a2 and par 110a1.And, also can be not to be formed on the circumference 110a2, and only on electrode surface 111a, form the mode of hole injection/transfer layer.

Described dried is for example in nitrogen atmosphere, under the room temperature, be made as pressure for example and carry out about 133.3Pa (1Torr).When hypotony, because the drop 110c bumping of composition is therefore not ideal enough.In addition, when temperature being made as room temperature when above, the evaporation rate of polar solvent raises, and can't form smooth film.After the dried,, preferably, the polar solvent or the water that remain in the injection/transfer layer 110a of hole are removed in a vacuum in the heat treatment of heating under 200 ℃ about 10 minutes by in nitrogen.

Described hole injection/transfer layer forms operation, the drop 110c of the composition that is sprayed is filled in bottom, the 112c of upper opening portion, 112d, on the other hand, liquid composition is flicked and is rolled in bottom, the 112c of upper opening portion, the 112d in the organic substance cofferdam layer 112b that has been carried out the lyophoby processing.Like this, just the drop 110c of the composition that sprayed must be filled in bottom, the 112c of upper opening portion, the 112d, thereby can on electrode surface 111a, form hole injection/transfer layer 110a.

(3) luminescent layer forms operation

Luminescent layer formation operation forms material ejection operation by luminescent layer and drying process constitutes.

Identical with described hole injection/transfer layer formation operation, the liquid composition that utilizes ink-jet method luminescent layer to be formed usefulness is gone up ejection to hole injection/transfer layer 110a., the liquid composition that sprayed carried out dried (and heat treatment), on the injection/transfer layer 110a of hole, form luminescent layer 110b thereafter.

Fig. 7 represents to utilize the ink-jet ejection to comprise the ejection operation that luminescent layer forms the liquid composition of using material.As shown in the figure, ink gun H5 and substrate 2 are relatively moved, ejection contains the liquid composition of (for example being blue (B) here) of all kinds luminescent layer formation material the jetting nozzle H6 on being formed at ink gun.

In ejection, jetting nozzle is faced mutually with the hole injection/transfer layer 110a that is positioned at bottom, the 112c of upper opening portion, 112d, when ink gun H5 and substrate 2 are relatively moved, the ejection liquid composition.The liquid measure that each of the liquid measure that sprays from jetting nozzle H6 is dripped is controlled.Like this Be Controlled the liquid of liquid measure (liquid composition drop 110e) from jetting nozzle, sprayed, this liquid composition drop 110e is gone up ejection to hole injection/transfer layer 110a.

In the present embodiment, with the configuration of described liquid composition drop 110e continuously, carry out the ejection of the liquid composition that other luminescent layer uses.That is, as shown in Figure 8, do not make the liquid composition drop 110e drying of on substrate 2, dripping, and carry out the ejection configuration of liquid composition drop 110f and 110g.In the dripping of the liquid composition drop 110e～110g that is used to form luminescent layer 110b1～110b3 of all kinds like this, both a plurality of shower nozzles of having filled the liquid composition of usefulness of all kinds respectively can have been scanned respectively independently and carried out the configuration of the liquid composition drop 110e～110g on substrate 2, also can roughly side by side carry out the configuration of liquid composition 110e～110g by described a plurality of shower nozzles are scanned integratedly.

As shown in Figure 8, each the liquid composition 110e～110g that is ejected launches on the injection/transfer layer 110a of hole and riddles in bottom, the 112c of upper opening portion, the 112d.On the other hand, even be carried out lyophoby handle above on the 112f, each liquid composition drop 110e～110g departs from the ejection position of regulation and is sprayed on the 112f upward, top 112f can not soaked into by liquid composition drop 110e～110g yet, and liquid composition drop 110e～110g rolls in bottom, the 112c of upper opening portion, the 112d.

Go up the liquid composition amount of ejection by the thickness of the size of bottom, the 112c of upper opening portion, 112d, the luminescent layer 110b that will form, the decisions such as luminescent layer concentration of material of liquid composition to each hole injection/transfer layer 110a.In addition, liquid composition 110e～110g only sprays 1 time, goes up ejection but be divided into for several times to identical hole injection/transfer layer 110a.At this moment, the amount of the liquid composition of each time both can be identical, also can change the liquid measure of liquid composition at every turn.In addition, not only can inject/ejection of the same position of transfer layer 110a, also can spray liquid composition in the different positions of each time in the injection/transfer layer 110a of hole to the hole.

Form material as luminescent layer, can use poly-fluorenes family macromolecule derivative, (gathering) phenylenevinylene to support derivative, polyphenylene derivatives, polyvinylcarbazole, polythiofuran derivative, perylene kinds dyestuff, Coumarins dyestuff, rhodamine class dyestuff, or in described macromolecule, mix and use organic EL Material.For example can be by doping rubrene, perylene, 9, the 10-diphenyl is feared, tetraphenylbutadiene, Nile red, coumarin 6, quinoline a word used for translation (two) ketone etc. and use.In addition, be used for these luminescent layers are formed the solvent of the solvent of material dissolves or dispersion for luminescent layer use identical type of all kinds.

Here, identical with the formation operation of hole injection/transfer layer, when the liquid composition that ejection is made of different materials, when promptly ejection had each liquid composition of different viscosities, because the difference of its viscosity, it is inhomogeneous that the thickness of formed luminescent layer can become.So in the present embodiment, the surface area of protuberance 112e that makes inorganic matter cofferdam layer 112a in advance prevents or suppresses to form the situation of the luminescent layer of uneven thickness for each luminescent layer 110b1～110b3 (promptly for pixel of all kinds) difference.Specifically, in having the pixel of liquid composition of relative viscosity higher, ejection increases the overhang of protuberance 112e, the surface area of this protuberance 112e is increased, in ejection has the pixel of liquid composition of relatively low viscosity, reduce the overhang of protuberance 112e, the surface area of this protuberance 112e is reduced.

Then, after the position configuration that the liquid composition 110e～110g with described usefulness of all kinds is stipulating is finished, form luminescent layer 110b1～110b3 by carrying out dried together.That is, utilize the dry contained solvent evaporation among liquid composition drop 110e～110g that makes, form as shown in Figure 9 redness (R) luminescent layer 110b1, green (G) luminescent layer 110b2, blueness (B) luminescent layer 110b3.And, though among Fig. 9 the luminescent layer that sends red, green, blue is illustrated each one, can know from Fig. 1 or other figure and see that originally light-emitting component was formed with not shown a plurality of luminescent layers (with of all kinds corresponding) by with rectangular formation.

In addition, the drying of the liquid composition of luminescent layer preferably utilizes vacuumize to carry out, and the condition that if enumerate concrete example, then can utilize in the nitrogen atmosphere, under the room temperature pressure is made as about 133.3Pa (1Torr) is carried out.When hypotony, because the liquid composition bumping is therefore not ideal enough.In addition, when temperature being made as room temperature when above, then because the evaporation rate of solvent raises, luminescent layer forms material too much attached on the 112d of the upper opening portion wall, and is therefore not ideal enough.

Then, if described vacuumize finishes, then preferably use heating arrangements such as heating plate to carry out the annealing in process of luminescent layer 110b.This annealing in process is carried out with the common temperature and time of the characteristics of luminescence of bringing into play each organic EL layer to greatest extent.

Like this, on pixel capacitors 111, just form hole injection/transfer layer 110a and luminescent layer 110b.

And, also can before forming material ejection operation, described luminescent layer be used for the surface of hole injection/transfer layer 110a is carried out the surface modification operation of surface modification.

In luminescent layer formed operation, in order to prevent the dissolving again of hole injections/transfer layer 110a, the solvent of the liquid composition of use preferably used the undissolved solvent to hole injection/transfer layer 110a in forming as luminescent layer.But, on the other hand, hole injection/transfer layer 110a is because low to the compatibility of solvent, go up ejection even will contain the liquid composition of solvent to hole injection/transfer layer 110a, hole injection/transfer layer 110a and luminescent layer 110b are connected airtight, perhaps can't be coated with luminescent layer 110b equably.So,, be preferably in luminescent layer and carry out the surface modification operation before forming for the surface of improving hole injection/transfer layer 110a forms the compatibility of material to solvent and luminescent layer.

The surface modification operation can be by will the solvent of employed liquid composition be identical when forming with luminescent layer the solvent or the similar surface modifying material of solvent with it, carry out drying after utilizing ink-jet method (drop ejection method), spin coating method or infusion process to be coated on the injections/transfer layer 110a of hole and carry out.As employed surface modifying material here, as the solvent identical with the solvent of liquid composition, then can list cyclohexyl benzene, isopropyl biphenyl, trimethylbenzene etc., as with the similar solvent of the solvent of liquid composition, then can enumerate durol first benzene,toluene,xylene etc.

(4) negative electrode forms operation

Then, as shown in figure 10, form the negative electrode 12 paired with pixel capacitors (anode) 111.That is, the zone on the substrate 2 that comprises luminescent layer 110b of all kinds and organic substance cofferdam layer 112b comprehensively on, for example form the negative electrode 12 of the formation that calcium layer and aluminium lamination are stacked gradually.Like this, on the formation regional integration of luminescent layer 110b of all kinds, just covered negative electrode 12, formed respectively and red, green, blue of all kinds corresponding organic EL.

Negative electrode 12 for example preferably utilizes formation such as vapour deposition method, sputtering method, CVD method, particularly utilizes vapour deposition method to form, and considers particularly preferred from the viewpoint of the damage of the luminescent layer 110b that can prevent to be caused by heat.In addition, also can on negative electrode 12, SiO be set for anti-oxidation ₂, protective layer such as SiN.

(5) sealing process

At last, the hermetic sealing substrate that has formed the substrate 2 of organic EL, prepare is in addition sealed by sealing resin.The sealing resin that for example is made of thermosetting resin or ultraviolet hardening resin is coated on the circumference of substrate 2, on sealing resin, disposes hermetic sealing substrate.Sealing process is preferably in the inert gas atmospheres such as nitrogen, argon gas, helium and carries out.When carrying out in atmosphere, owing to produce in negative electrode 12 under the situation of defectives such as aperture, water or oxygen etc. might be invaded and with negative electrode 12 oxidations from this defect part, and are therefore not ideal enough.

Thereafter, by the distribution of negative electrode 12 with substrate 2 is connected, and with the distribution of circuit element portion 14 be located at substrate 2 on or outside drive IC (drive circuit) be connected, finish the organic El device of present embodiment.

When utilizing aforesaid manufacture method, the viscosity of employed liquid composition for the different separately situation of luminescent layer of all kinds (promptly for each pixel) under, also can adjust rightly the area of the protuberance 112e of inorganic matter cofferdam layer 112a according to the viscosity of liquid composition.Consequently, can make the thickness of each luminescent layer 110b1～110b3 even separately and smooth, make the organic El device of excellent optical characteristics.And, in the described method, owing to only the overhang of the protuberance 112e of inorganic matter cofferdam layer 112a is adjusted, therefore very easy.

In the present embodiment, though organic El device and manufacture method thereof are illustrated, but the present invention also go for arranging the colour filtering chip basic board of the color material layer that has formed polychrome manufacture method, comprise the manufacture method of semiconductor device such as organic tft at interior device, in the manufacture method of the manufacture method of these colour filters of the present invention or device, the effect that can certainly obtain to make the flatness of formed color material layer or functional layer to improve.

Here, to the film shape (particularly surface configuration) that in described manufacturing process, is formed at each layer in the cofferdam layer 112, the relation of the overhang (outstanding width) of protuberance (the 1st laminate part) 112e of the viscosity of employed liquid composition and inorganic matter cofferdam layer 112a is described in detail in the formation of this film.

At first, Figure 17 (a)～(e) is on the substrate of the subtend cofferdam layer 112 that possessed identical formation, promptly on the substrate of the outstanding width L1 identical separately (L1=3 μ m here) of the protuberance 112e of inorganic matter cofferdam layer 112a, the generalized section that the difference of the shape of the film 200 of the gained during the different liquid composition of ejection viscosities il (mPas) is represented.When the liquid composition that sprays different viscosities like this and during film forming, because the difference of this viscosity, the surface configuration of the film 200 of gained will change.That is, for low viscous situation (Figure 17 (a) reaches (b)), film 200 becomes concavity, and its section shape becomes the U font, and in contrast, for full-bodied situation (Figure 17 (e) reaches (d)), film 200 becomes convex, and its section shape becomes reverse U shape.

On the other hand, Figure 18 (a)～(e) is to the identical viscosities (liquid composition of η=14mPas) here, on the substrate of the different cofferdam layers 112 that possessed different shape, i.e. the generalized section that the difference of the shape of the film 200 of the gained during ejection is represented on the different respectively substrate of the outstanding width L1 of the protuberance 112e of inorganic matter cofferdam layer 112a.When like this on the different substrate of the outstanding width L1 of protuberance 112e, when the liquid composition of ejection identical viscosities and film forming, also can be owing to the difference of this viscosity, the surface configuration of the film 200 of gained changes.That is, for the outstanding big situation (Figure 18 (a)) of width L1, film 200 becomes concavity, and its section shape becomes the U font, and in contrast, for the outstanding little situation (Figure 18 (e)) of width L1, film 200 becomes convex, and its section shape becomes reverse U shape.

When the variation of this kind Figure 17 and Figure 18 was investigated, discovery can utilize the viscosity of liquid composition, the overhang of protuberance 112e (being the surface area of protuberance 112e), and the shape of film 200 is carried out various controls.Promptly, this be because, though in Figure 17 and example shown in Figure 180, use the liquid composition of viscosities il=14mPas, and the outstanding width L1 of protuberance 112e is being made as under the situation of 3 μ m, can form the smooth film of surface configuration 200, but for example as shown in figure 19, using relatively low viscosity (under the situation of the liquid composition of η=4mPas),, can form the smooth film of surface configuration 200 by making outstanding width L1 less relatively (L1=1 μ m).On the other hand, for example as shown in figure 20, using relative viscosity higher (under the situation of the liquid composition of η=24mPas),, can form the smooth film of surface configuration 200 by making outstanding width L1 relatively large (L1=5 μ m).

But, on substrate, form picture as the present embodiment by 2 layers of cofferdam that constitutes when adopting, make the cofferdam of lower layer side become the formation of outstanding shape, and when in this cofferdam, utilizing drop ejection method to form the functional membrane of individual layer, the planarization of the surface configuration of this functional membrane can be realized as followsly.Specifically, as shown in figure 21, when forming colour filter as functional layer, in the operation that forms red color layer 200R, green layer 200G and cyan coloring layer 200B, if will utilize viscosity unification in R of all kinds, G, B of the liquid composition of drop ejection method ejection, then identical by the cofferdam shape that makes R of all kinds, G, B, just can obtain smooth colour filter.Promptly, by for the cofferdam that is used to form each chromatograph 200R, 200G, 200B, the outstanding width of the protuberance 112e of the 112a of its lower floor (inorganic matter cofferdam layer) is made as L2=L3=L4=3 μ m, for the liquid composition that is used to form each chromatograph 200R, 200G, 200B, its viscosity is made as η R=η G=η B=14mPas, just can be with each chromatograph 200R, 200G of gained, the surface configuration planarization of 200B.

And, because it is different separately to constitute the material of each chromatograph 200R, 200G, 200B, therefore the viscosity of liquid composition of all kinds is for example by making the solvent types difference for every kind of color, perhaps make the concentration difference for every kind of color, by according to circumstances and make the molecular weight difference of constituent material, just can unify respectively in addition for every kind of color.

On the other hand, if the viscosity of liquid composition of all kinds is shown in Figure 21 (b), be η R=4mPas, η G=14mPas, situation that η B=24mPas is different separately, be made as L2=L3=L4=3 μ m and under the unified situation at outstanding width with the protuberance 112e of the 112a of lower floor's (inorganic matter cofferdam layer) in cofferdam, the red color layer 200R that is formed by low viscous liquid composition will present the surface configuration of concavity, and the cyan coloring layer 200B that is formed by full-bodied liquid composition will present the surface configuration of convex.

So, under the different separately situation of the viscosity of liquid composition of all kinds, shown in Figure 21 (c), the outstanding width of the protuberance 112e of the 112a of lower floor's (inorganic matter cofferdam layer) by making the cofferdam just can form each chromatograph 200R, 200G, the 200B of smooth surface configuration for the shades of colour difference.Specifically, among the red color layer 200R of the liquid composition of use viscosities il R=4mPas, the outstanding width L2 in cofferdam is made as 1 μ m, among the green layer 200G of the liquid composition of use viscosities il G=14mPas, the outstanding width L3 in cofferdam is made as 3 μ m, use among the cyan coloring layer 200B of liquid composition of viscosities il B=24mPas, the outstanding width L4 in cofferdam is made as 5 μ m, just can realize optimization.And, because the viscosity of liquid composition is different because of ejection property, dissolubility, composition etc., therefore in general for each difference of formed functional membrane.Even in such cases, by as mentioned above, make outstanding width by lower floor's (inorganic matter cofferdam layer) in 2 layers of cofferdam that constitutes respectively for each difference of functional membrane, can form also that surface configuration separately is smooth, the functional membrane of uniform film thickness.

On the other hand, in the organic El device of described present embodiment, because the constituent material difference of luminescent layer 110b1～110b3 of all kinds, therefore under common condition (same solvent, same concentrations), the liquid composition that is used to form luminescent layer is for each color, and its viscosity will be different.On the other hand, be formed at the hole injection/transfer layer 110a of the lower floor of this luminescent layer 110b, because constituent material of all kinds is identical, therefore under common condition (same solvent, same concentrations), the liquid composition that is used to form this hole injection/transfer layer 110a is for each color, and viscosity will be by unification.

So, shown in Figure 22 (a), in order to obtain smooth film for hole injection/transfer layer 110aR, 110aG, 110aB, and the viscosity unification of its liquid composition is η aR=η aG=η aB=14mPas, and it is the outstanding width of inorganic matter cofferdam layer 112a is unified under the situation of L2=L3=L4=3 μ m, shown in Figure 22 (b), when forming luminescent layer 110b1,110b2,110b3, by unified, just can form the luminescent layer 110b that has possessed smooth surface configuration for the concentration with liquid composition of all kinds.And,,, use different kinds of liquid solvents here for liquid composition of all kinds for the viscosity of the liquid composition that will be used to form luminescent layer 110b1,110b2 of all kinds, 110b3 is made as η bR=η bG=η bB=14mPas.

As mentioned above with the outstanding width L2 of inorganic matter cofferdam layer 112a, L3, L4 to situation about having unified of all kinds under, just can inject/transfer layer 110a and luminescent layer 110b with the hole, by with the viscosity of employed liquid composition to unification of all kinds, and obtain smooth separately film shape.

In addition, on the other hand, when forming luminescent layer 110b1,110b2,110b3, under for the situation that the solvent of liquid composition usefulness identical type is constituted with same concentrations of all kinds, the liquid composition that this luminescent layer forms usefulness will become for the different composition of its viscosity of every kind of color.Specifically, as shown in figure 23, be luminescent layer 110bR viscosities il bR=4mPas, for the luminescent layer 110bG viscosities il bG=14mPas of green, for the situation of the luminescent layer 110bB viscosities il bB=24mPas of blueness for redness.In such cases, as shown in figure 23 the outstanding width of inorganic matter cofferdam layer 112a is being unified under the situation of L2=L3=L4=3 μ m, in the red light emitting layer 110b1 of low viscosity (η bR=4mPas), the surface just has concavity, and in the blue light-emitting layer 110b3 of high viscosity (η bB=24mPas), the surface just has convex.

So, the viscosity of liquid composition that forms usefulness at luminescent layer like this is under the different situation of every kind of color, as shown in figure 24, the outstanding width by making inorganic matter cofferdam layer 112a just can form the smooth luminescent layer of surface configuration for every kind of color difference in of all kinds.Specifically, can in the cofferdam that forms red light emitting layer, make L2=1 μ m, in the cofferdam that forms green light emitting layer, make L3=3 μ m, in the cofferdam that forms blue light-emitting layer, make L4=5 μ m.

And, when the outstanding width that makes the cofferdam like this for every kind of color not simultaneously, for the hole injection/transfer layer 110a of the lower floor that becomes luminescent layer 110b,, also need to make its viscosity for difference of all kinds for its liquid composition in order to form this layer 110a with smooth state.Here, shown in Figure 24 (a), hole injection/transfer layer 110aR for redness makes viscosities il aR=4mPas, makes viscosities il aG=14mPas for the hole injection/transfer layer 110aG of green, makes viscosities il aB=24mPas for the hole injection/transfer layer 110aB of blueness.For this hole injection/transfer layer 110a, also can obtain the smooth layer of surface configuration like this.In addition, by on the injection/transfer layer 110a of this hole, ejection possesses the liquid composition of described each viscosity, just can form each luminescent layer 110b1,110b2,110b3, also can obtain the smooth layer of surface configuration for this luminescent layer 110b.

(electronic equipment)

Figure 16 represents an execution mode of electronic equipment of the present invention.The electronic equipment of present embodiment possesses described organic El device as indication mechanism.Here, an example of portable phone is represented with stereogram, symbol 1000 expression portable phone main bodys, the display part of described organic El device 1 has been used in symbol 1001 expressions.In the electronic equipment of the organic El device that possesses present embodiment like this as indication mechanism, can obtain good luminescent characteristic.

Claims (7)

1. the manufacture method of a colour filtering chip basic board, this colour filtering chip basic board possesses a plurality of multi-color coloring layers with predetermined pattern, it is characterized in that, comprising:

The wall part that forms the 1st wall part and the 2nd wall part on substrate forms operation, wherein the 1st wall part possesses the 1st peristome in the formation zone that constitutes described dyed layer, the 2nd wall part is positioned on the 1st wall part, and possesses the 2nd peristome in the formation zone that constitutes described dyed layer equally; With

In each peristome of described each wall part, utilize drop ejection method to be ejected in the ejection operation of dissolving or be dispersed with the aqueous body of each coloured material that constitutes described dyed layer in the solvent,

Wherein, the aqueous body of described ejection is the aqueous body that dyed layer of all kinds is had different viscosities respectively,

Form in the operation at described wall part, to form described the 1st wall part from the outstanding shape of the opening inner face of described the 2nd wall part, in the peristome of the aqueous body that sprays relatively low viscosity, make the central surface area of described the 1st wall part less relatively from the outstanding part of the 2nd wall part, on the other hand, in the peristome of the aqueous body that sprays relative viscosity higher, make the central surface area of described the 1st wall part relatively large from the outstanding part of the 2nd wall part.

2. the manufacture method of an electro-optical device, this electro-optical device possesses a plurality of multiple electro-optic layer with predetermined pattern, it is characterized in that, comprising:

The wall part that forms the 1st wall part and the 2nd wall part on substrate forms operation, wherein the 1st wall part possesses the 1st peristome in the formation zone that constitutes described electro-optic layer, the 2nd wall part is positioned on the 1st wall part, and possesses the 2nd peristome in the formation zone that constitutes described electro-optic layer equally; With

In each peristome of described each wall part, utilize drop ejection method to be ejected in the ejection operation of dissolving or be dispersed with the aqueous body of each functional material that constitutes described electro-optic layer in the solvent,

Wherein, the aqueous body of described ejection is the aqueous body that various electro-optic layer is had different viscosities respectively,

Form in the operation at described wall part, to form described the 1st wall part from the outstanding shape of the opening inner face of described the 2nd wall part, in the peristome of the aqueous body that sprays relatively low viscosity, make the central surface area of described the 1st wall part less relatively from the outstanding part of the 2nd wall part, on the other hand, in the peristome of the aqueous body that sprays relative viscosity higher, make the central surface area of described the 1st wall part relatively large from the outstanding part of the 2nd wall part.

3. the manufacture method of electro-optical device according to claim 2, it is characterized in that, form in the operation at described wall part, in the peristome of the aqueous body that sprays relatively low viscosity, make from the outstanding length of outstanding described the 1st wall part of the opening inner face of described the 2nd wall part less relatively, on the other hand, in the peristome of the aqueous body that sprays relative viscosity higher, make from the outstanding length of outstanding described the 1st wall part of described the 2nd wall part relatively large.

4. according to the manufacture method of claim 2 or 3 described electro-optical devices, it is characterized in that contained solvent all is solvents of identical type for various electro-optic layer in the described aqueous body.

5. according to the manufacture method of any described electro-optical device in the claim 2 to 4, it is characterized in that, comprise drying process, after described ejection operation, make the aqueous body that is sprayed dry simultaneously respectively in various electro-optic layer.

6. an electro-optical device is characterized in that, uses any described manufacture method manufacturing in the claim 2 to 5.

7. an electronic equipment is characterized in that, possesses the described electro-optical device of claim 6.

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