CN103962275A - Coating unit, coating device using the coating unit and coating method - Google Patents
Coating unit, coating device using the coating unit and coating method Download PDFInfo
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- CN103962275A CN103962275A CN201410045271.9A CN201410045271A CN103962275A CN 103962275 A CN103962275 A CN 103962275A CN 201410045271 A CN201410045271 A CN 201410045271A CN 103962275 A CN103962275 A CN 103962275A
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- 238000000576 coating method Methods 0.000 title claims abstract description 373
- 239000011248 coating agent Substances 0.000 title claims abstract description 351
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Abstract
A coating unit is disclosed and can be used for accurately coating liquid state materials on a large coated area in a high-efficiency manner. The base ends (3b) of a plurality of coating needles (3) are fixed on a needle supporting face (19a) of a needle seat component (19) by the coating unit (2), and the front ends (3a) of the plurality of coating needles (3) are arranged in such a way that the front ends (3a) correspond to the shape of a coated area. Through adjustment of the shape, the size and the separation distance of the coating needles, correction ink (11) can be coated to accurately form a shape of the coated area in such a way that expected thickness and a small coating number are realized.
Description
Technical field
The present invention relates to coater unit, use coating process and the apparatus for coating of this coater unit, especially, relate to coater unit, the apparatus for coating that uses this coater unit and the coating process towards the coating of electrode pattern substrate, semiconductor element or the coating of top layer material etc. for the rgb pixel correction of liquid crystal panel filter substrate, electrode paste.
Background technology
In recent years, because the large screen of FPD (flat-panel monitor) makes the large shape of Pixel Dimensions of filter substrate, the area that need to revise the picture element flaw that the coating of ink revises by liquid material also has the tendency of expansion.
Now, need to coat the area that diameter is hundreds of μ m by revising ink.In addition, in the coating purposes towards electrode pattern, element part, sometimes also need to coat by revising ink the area that diameter is several mm.
As existing apparatus for coating, exist a kind of shape by a coating needle of change, size or change viscosity etc. to revise the character of ink, thereby regulate adaptably with defect part the device (for example, with reference to patent documentation 1) that is coated with shape or thickness etc.
In addition, also known have a kind of shape of the front end face that makes coating needle and need the shape in the applied region of revising to be consistently made as the modification method (for example, with reference to patent documentation 2) of the rectangle such as rectangle, square.
Prior art document
Patent documentation
Patent documentation 1: Japanese Patent Laid-Open 2007-94341 communique
Patent documentation 2: Japanese Patent Laid-Open 2002-258025 communique
But, using a coating needle coating to revise ink to carry out in the device of correction of defect, limited the component of the correction ink that once can be coated with as patent documentation 1.Therefore, make applied region be formed as larger area situation according to defect or thickness need be in the situation that certain size be above, must make coating needle move back and forth and be coated with repeatedly correction ink.In the time that above-mentioned coating number of times increases, for revising required consuming time elongated in the applied region at a position, place, the deterioration of efficiency of coating operation.
In addition, become large at the area in applied region, and set correspondingly in the situation of shape of the front end face of a coating needle, the shape of this front end face is different because revising the characteristic of ink or the shape in applied region, but the applied one-tenth of existence correction ink is compared to the thick tendency of thickness of target, sometimes cannot be coated with into the thickness of target.In addition, in applied region be square in the situation that, even if the shape maintains of the front end face of coating needle is increased circularly, be sometimes also difficult for making flowing into from the correction ink of the front end coating of coating needle the bight etc. in applied region, thereby cannot arrive.
In addition, the shape in the shape of the front end face of coating needle and applied region being consistently made as in the coating process of square or rectangular as patent documentation 2, exist because revising characteristic, the spreading area of ink and cannot be coated with quadrate or rectangle, the correction ink expansion of coating and become circle or oval such problem.
Summary of the invention
Therefore, the object of the present invention is to provide a kind of preferably coater unit of efficiency that can exactly liquid material be coated to the applied region of larger area and coating operation, use apparatus for coating and the coating process of this coater unit.
Coater unit of the present invention is coated liquid material in the applied region of regulation shape, comprising: many coating needle, and the liquid material that is attached to their leading sections is coated applied region by these many coating needle; And needle stand member, this needle stand member keeps multiple coating needle.The front end of multiple coating needle is aligned to the shape corresponding with applied region, and the cardinal extremity of multiple coating needle is fixed on needle stand member.
According to coater unit of the present invention, the cardinal extremity of many coating needle is fixed on needle stand member, and the front end of many coating needle is aligned to the shape corresponding with applied region.Therefore, can increase the component of the liquid material that can simultaneously be coated with applied region, even if applied region is larger area, also can with once or less number of times to carry out the coating of homogeneous consuming time to shorten, thereby can improve the efficiency of coating operation.
In addition, many coating needle are arranged in to the shape corresponding with applied region, therefore, without the size of the front end of coating needle monomer being set large or being changed shape.In addition, also without the characteristic such as viscosity that changes liquid material, even if for the bight etc. in applied region that is difficult at present coating, also can, directly from coating needle coating liquid material, can easily control thickness.Therefore, can exactly liquid material be coated to the applied region of larger area.
Brief description of the drawings
Fig. 1 is the figure that represents the overall structure of apparatus for coating and the major part of coater unit of embodiment of the present invention one.
Fig. 2 is the figure of the structure of the coater unit shown in presentation graphs 1.
Fig. 3 is the figure for the action of coater unit the applied regional dip in the situation that is described.
Fig. 4 represents to use the coater unit shown in Fig. 2 correction ink to be coated to the figure of the operation of surface of the work.
Fig. 5 is the figure that represents the comparative example one of embodiment one.
Fig. 6 is the figure that represents the comparative example two of embodiment one.
Fig. 7 is the figure that represents the comparative example three of embodiment one.
Fig. 8 is the figure that represents the comparative example four of embodiment one.
Fig. 9 is the side view that represents the major part of the coater unit of embodiment of the present invention two.
Figure 10 is the figure from the coater unit shown in beneath Fig. 9.
Figure 11 is the side view that represents the major part of the coater unit of embodiment of the present invention three.
Figure 12 is the figure from the coater unit shown in beneath Figure 11.
Figure 13 is the figure that represents the major part of the coater unit of embodiment of the present invention four.
Figure 14 is the figure that represents the major part of the coater unit of embodiment of the present invention five.
Figure 15 is the figure that represents the major part of the coater unit of embodiment of the present invention six.
Figure 16 is the figure that represents the major part of the coater unit of embodiment of the present invention seven.
Figure 17 is the figure that represents the comparative example of embodiment eight.
Figure 18 represents to use the coater unit shown in Figure 17 and the top view of the shape of applied correction ink.
Figure 19 is the figure that represents the major part of the coater unit of embodiment of the present invention eight.
Figure 20 represents to use the coater unit shown in Figure 19 and the top view of the shape of applied correction ink.
Figure 21 is the figure that represents the major part of two coater units that use in the coating process of embodiment of the present invention nine.
Figure 22 is the figure that represents to use the coating process of two coater units shown in Figure 21.
Figure 23 is the figure that represents the major part of the coater unit using in the coating process of embodiment of the present invention ten.
Figure 24 is the figure that represents to use the coating process of the coater unit shown in Figure 23.
Figure 25 is the figure of the object of the coater unit for embodiment of the present invention 11 is described.
Figure 26 is another figure of the object of the coater unit for embodiment of the present invention 11 is described.
Figure 27 is the another figure of the object of the coater unit for embodiment of the present invention 11 is described.
Figure 28 is the figure that represents the major part of the coater unit of embodiment of the present invention 11.
Figure 29 is the figure that represents the action of the coater unit shown in Figure 28.
Figure 30 is the structure of major part and the figure of action that represents the coater unit of embodiment of the present invention 12.
Figure 31 is the figure that represents the major part of the coater unit of embodiment of the present invention 13.
(symbol description)
1 apparatus for coating
2,2A, 2B coater unit
3,13,23,33 coating needle
3a front end
3b cardinal extremity
4 ink supplying mechanisms
5 base travel mechanisms
10 linear stage
11 revise ink
12 print cartridges
14 scraper plates
15 rail portion
16 sliding components
17,17A mobile base member
18 elastic supporting parts
19 needle stand members
19a pin bearing-surface
20 cutting laser portions
30 master computers
31 guidance panels
40 XY worktables
43 auxiliary needles
50 CCD cameras
60 Z workbench
70 viewing optical systems
80,90 coating needle connectors
81,91 connecting portions
82,92,93 recesses
100 coating
111,111A XY guide part
112,112A, 114,114A rail portion
113,115 sliding parts
120 actuators
121 arms
Detailed description of the invention
Below, with reference to accompanying drawing, embodiments of the present invention are described.In the following description, for the identical symbol of identical components marking.Their title and function are also identical.Therefore, do not repeat the detailed description to them.
(embodiment one)
As shown in Figure 1, the apparatus for coating 1 of embodiment of the present invention one comprises: coater unit 2, and this coater unit 2 uses multiple coating needle 3 and correction ink 11 is coated to defect; Viewing optical system 70, this viewing optical system 70 is observed the surface of filter substrate (hereinafter referred to as workpiece W); Laser portion 20 for cutting, this cutting is carried out laser cutting by viewing optical system 70 to the surperficial defect of workpiece W with laser portion 20; Master computer 30, this master computer 30 is controlled installing entirety; XY worktable 40 loads the defective workpiece W of tool on this XY worktable 40; And Z workbench 60, this Z workbench 60 drives viewing optical system 70, CCD camera 50 together with coater unit 2 on above-below direction.
XY worktable 40 makes to need to be coated with the position of revising on the surface of workpiece W and moves to the below of coater unit 2, or makes position that on the surface of workpiece W, wish is observed move to the below of viewing optical system 70.This XY worktable 40 adopts the mode that this member of workpiece W is moved.But, be accompanied by the large shape of size of workpiece W and in the following ways more: workpiece W is held in the chuck segment being fixed wtih of non-movable part, and makes to be called as flame XY worktable and move in fixing chuck segment.The flame Y workbench that adopts door type shape is set as the shape across chuck segment, loads X-axis the structure of loading the Z workbench driving along Z axis on this X-axis workbench on door type top.The structure of XY worktable 40 and Z workbench 60 is not defined, and XY worktable 40 and Z workbench 60 are also defined as the member that can make viewing optical system 70, coater unit 2 relatively move with respect to workpiece W.
The action of these coater units 2, XY worktable 40 and Z workbench 60 etc. is used as the master computer 30 of control part and controls.
This master computer 30 is connected with guidance panel 31 grades of the input part as input driving instruction, thereby can expect the drive actions of operation.
Fig. 2 is the figure that represents the structure of coater unit 2.In Fig. 2, coater unit 2 makes to be attached to as the correction ink 11 of liquid material the front end 3a of multiple coating needle 3, and this correction ink 11 is coated to the applied region of the filter substrate (being designated as below workpiece W) as applied thing.Be installed on the coater unit 2 of apparatus for coating 1 of present embodiment one using defect parts such as the White Defects of workpiece W as applied region, and by correction ink 11 being coated to this applied region, defect part revised.
Coater unit 2 comprises: ink supplying mechanism 4; Be provided with the needle stand member 19 of multiple coating needle 3; And make needle stand member 19 in base travel mechanism 5 close, that above move away from the direction (Z direction) of workpiece W.
Ink supplying mechanism 4 has: linear stage 10: and load in the upper surface of linear stage 10 and accommodate the print cartridge 12 of revising ink 11.
Linear stage 11 can be with respect to relatively upper movement of horizontal direction (being designated as below XY direction) of at least either party in left and right directions (being designated as below directions X) and fore-and-aft direction (being designated as below Y-direction) of needle stand member 19.Except print cartridge 12, in linear stage 10, also can load decontaminating apparatus, air cleaning unit etc., as the travel mechanism of replacing that is accompanied by above-mentioned member, also can load centered by rotating shaft and the turntable being driven in rotation.
Print cartridge 12 is formed as the planar disc of storing, keeping revising ink 11, comprises the peristome of opening towards upper surface side.This peristome forms the size corresponding with the area of needle stand member 19, can make the multiple coating needle 3 that are fixed on needle stand member 19 come in and go out simultaneously.In addition, can also make correction ink 11 in print cartridge 12 be attached to the front end 3a of multiple coating needle 3 simultaneously.
Base travel mechanism 5 makes sliding component 16 slide along rail portion 15, and this rail portion 15 is extended along Z direction.Be fixed wtih mobile base member 17 in the side of sliding component 16.
Be fixed wtih the upper surface of the elastic supporting part 18 being formed by rubber component that can strain etc. at the lower surface of mobile base member 17.In addition be fixed wtih, the upper surface of needle stand member 19 at the lower surface of the side contrary to upper surface of this elastic supporting part 18.In the pin bearing-surface 19a of this needle stand member 19 side with certain multiple coating needle 3 that are being spaced.
Therefore, multiple coating needle 3 so that each front end 3a from the pin bearing-surface 19a of the needle stand member 19 that hanging by elastic supporting part 18 outstanding setting of state downward.In addition, multiple coating needle 3 are accompanied by the slip in Z direction for the affixed sliding component 16 of mobile base member 17 and drive and move up in Z side, thereby can be close, away from print cartridge 12 or applied thing.
Linear stage 10 be configured to can supply with revise between ink 11 and retreating position along XY direction linearity mobile.In addition, the movement of the linearity by linear stage 10 in XY direction, makes the peristome of print cartridge 12 move to the lower position of multiple coating needle 3.Then, multiple coating needle 3 are driven by base travel mechanism 5, and decline together with needle stand member 19, to adhere to, to supply with correction ink 11 towards each front end 3a.
As shown in Figure 1, from be formed at needle stand member 19 lower face side pin bearing-surface 19a with the mode relative with object workpiece (applied thing) W towards below the outstanding many coating needle 3 that are provided with.The cardinal extremity 3b of each coating needle 3 is fixed on pin bearing-surface 19a.Be positioned at from pin bearing-surface 19a and give prominence to each coating needle 3 is set away from the mode the same plane of the position of given size with the front end 3a of many coating needle 3.Therefore the front end 3a that, is arranged in the many coating needle 3 on pin bearing-surface 19a is taking the surface of the workpiece W height identical as benchmark is arranged in.
Needle stand member 19 is held in mobile base member 17 by 18 of elastic supporting parts that are made up of elastic component, and this mobile base member 17 is fixed in sliding component 16.In addition, when this sliding component 16 is because the driving of base travel mechanism 5 is in the time that upper and lower upward sliding moves, the distance that the front end 3a that is arranged in the multiple coating needle 3 on pin bearing-surface 19a can remain to till workpiece W is on one side equidistant, on one side close, away from workpiece W.In the time utilizing base travel mechanism 5 that multiple coating needle 3 are declined towards workpiece W, the correction ink 11 that is attached to the front end of multiple coating needle 3 is coated with, and is essentially rectangular shape to be coated with out the shape identical with the applied portion shape of the workpiece W as object.
Fig. 3 is the figure that represents the action of coater unit 2 in the situation that applied region WV tilts.While being located at a part of front end 3a in the front end 3a of many coating needle 3 of needle stand member 19 lower face side surperficial butt with applied region WV more first than other front end 3a, be passed to elastic supporting part 18 via needle stand member 19 from the pressing force of the coating needle 3 of elder generation and front end 3a butt.The periphery of the elastic supporting part 18 directly over the coating needle 3 of the pressing force that transmission comes to first butt is pressed so that its strain.Thus, needle stand member 19 tilts along applied region WV with respect to mobile base member 17, and parallel with the surface of applied region WV.Therefore, the front end 3a of all coating needle 3 including the front end 3a of coating needle 3 and the front end 3a of other coating needle 3 of first butt and the surface butt equably of applied region WV.
Therefore,, even if the surface tilt of applied region WV, the front end 3a of all coating needle 3 is also impartial and because the elasticity of elastic supporting part 18 is to have the mode Elastic Contact of resiliency of expectation.
In addition, as elastic supporting part 18, as long as rubber system, leaf spring system etc. with the front end 3a of multiple coating needle 3 can with the surface in the applied region member of the mode generation strain of butt equably, form elastic supporting part 18 member shape, quantity and material not Bei Te Do limit.
Fig. 4 (a1)～Fig. 4 (d2) is the figure that represents the coating action of apparatus for coating 1.As shown in Fig. 4 (a1), Fig. 4 (a2), on the pin bearing-surface 19a of needle stand member 19, arrange many coating needle 3 are installed.First, the front end 3a of many coating needle 3 is fixed on the position relative with the liquid level of the correction ink 11 of print cartridge 12.
Then, drive base travel mechanism 5 that needle stand member 19 and many coating needle 3 are declined, as shown in Fig. 4 (a1), the front end 3a of many coating needle 3 is immersed in the correction ink 11 in print cartridge 12.Now, the front end 3a of each coating needle 3 is immersed in and revises in ink 11 with the degree of depth of regulation.
Then, drive base travel mechanism 5 to make needle stand member 19 and many coating needle 3 increase, the front end 3a of each coating needle 3 is moved to the top of print cartridge 12.As shown in Fig. 4 (b1), around the front end 3a of the each coating needle 3 from print cartridge 12 interior liftings, be attached with the correction ink 11 of desired amount.Correction ink 11 maintenances of the front end 3a of each coating needle 3 and the independently state of correction ink 11 of the front end 3a of other coating needle 3.
As shown in Fig. 4 (b2), be attached with roughly spherical correction ink 11 at the front end 3a from each coating needle 3 of print cartridge 12 interior liftings.
Then, as shown in Fig. 4 (c1), use the XY worktable 40 of being controlled by master computer 30, make the applied region of workpiece W relatively move to the below of the pin bearing-surface 19a of needle stand member 19.Then,, in the time that the coating needle 3 that drives base travel mechanism 5 to make to be fixed on needle stand member 19 declines, the front end 3a of each coating needle 3 and the surperficial butt of workpiece W, to coat applied region by correction ink 11.
Now, as shown in Figure 3, the elastic supporting part 18 between insertion needle stand member 19 and mobile base member 17 absorbs the power of the front end that puts on coating needle 3 by strain.Thus, can reduce the possibility that makes the front end distortion of coating needle 3 etc. because of load partially.
,, in the coater unit 2 of embodiment one, as shown in Figure 3, even if in the situation that workpiece W tilts, also can tilt because of the inclination that the strain of elastic supporting part 18 makes needle stand member 19 follow workpiece W.Therefore, the front end 3a of coating needle 3 respectively with the surperficial approximate equality ground butt in the applied region of workpiece W.In addition, in Fig. 3, show the workpiece W under normal level with double dot dash line, show the workpiece W being inclined relative to horizontal with solid line.
Thus, it is impartial that the pressing force of the front end 3a of many coating needle 3 becomes, thereby can not apply uneven load to the front end 3a of a part of coating needle 3.Therefore, can be coated with in heterogeneity correction ink 11 in the surperficial applied region from the front end 3a of many coating needle 3 towards workpiece W.
After just coating, in the time driving base travel mechanism 5 to make coating needle 3 increase, as shown in Fig. 4 (c2), revise the surface that ink 11 is point-like and residues in workpiece W.
As shown in Fig. 4 (d1), Fig. 4 (d2), when from coating during through the stipulated time, the surperficial correction ink 11 of coating workpiece W flows, adjacent correction ink 11 each other fit, mix and be integrated, and become the membranaceous ink layer with uniform thickness.Finally, make this ink layer dry, curing, and finish the correction of defect part.
[comparative example one]
Fig. 5 is the top view that represents the comparative example one of embodiment one.
In this comparative example one, as shown in Figure 5, use a coating needle 3 to be coated with the surperficial applied region W1 entirety of workpiece W.In the case of utilize coating needle 3 coating revise the coating diameter of inks 11 less than applied region W1, must repeatedly repeatedly be coated with action.
Therefore, exist for the required such problem of increase consuming time of revising that is coated with.
[comparative example two]
Fig. 6 is the top view that represents the comparative example two of embodiment one.
In this comparative example two, as shown in Figure 6, large in order to make coating once revise the surperficial applied region W1 of Area Ratio workpiece W of ink 11, the front end area of coating needle 3 is set greatlyr.
Like this, in the time making to be coated with diameter and become larger, coating film thickness has the tendency thickening, and sometimes can not be coated with into target thickness.Therefore, be difficult to use the correction ink of current use like this, must change the characteristic of ink.
In addition, as shown in Figure 6, be rectangle at the surperficial applied region W1 of workpiece W, revise ink 11 and be difficult to flow into bight WC1, be coated with the gap portion between the part of revising ink 11.
In order to make ink flow into the gap of the part of bight WC1, coating, the mobility of ink, the inflow that capillarity produces are utilized, but in the time that the front end area of coating needle is set greatlyr, it is large that the area of bight WC1, gap portion WC2 becomes, and is difficult to make ink to arrive Zone Full.
[comparative example three]
Fig. 7 is the figure that represents the comparative example three of embodiment one, and it is the end view drawing that the coating needle 13 that represents quadrangular shape is formed as the front end of square shape and is attached to the ink of this front end.
In this comparative example three, show the shape in bight with applied region etc. consistently, the shape of the leading section of coating needle 13 is formed as to the situation of square or rectangular etc.
This coating needle 13 is, by being once coated with the mode that just correction ink 11 can be coated to the surperficial applied region W1 of workpiece W, making the shape of front end and the surperficial applied region W1 of workpiece W consistent.But, exist the characteristic such as viscosity because revising ink 11 to make the outer shape of correction ink 11 of the front end that is attached to coating needle 13 rounded or oval etc., and with the not such problem of fit such as bight.
; when the mode in the bight easily to flow into applied region W1 changes when revising the characteristic of ink 11 and improving mobility; even if the front end shape of coating needle 13 is made as to rectangular shape; the shape that correction ink 11 is coated with is not rectangle or the square of expectation yet; but rounded, elliptical shape, thereby now produce the difficult such problem of coating shape of determining.
[comparative example four]
Fig. 8 is the figure that represents the comparative example four of embodiment one, its be represent the coating needle 23 of quadrangular shape toroidal front end and be attached to the end view drawing of correction ink 11 of this front end.
In this comparative example four, the shape of adhering to of revising ink 11 is the circle roughly the same with the outer shape of the coating needle 23 shown in Fig. 8, revises ink 11 under this circular state, in addition also because surperficial guarantor's fluidity in applied region is expanded coating on one side on one side with the shape similar to this circle towards outside.In the time that the coating needle of above-mentioned comparative example 3 13 is compared with the coating needle 23 of comparative example four, even if it is square etc. that the shape of front end face is changed into from circle, the outer shape of correction ink 11 that is attached to front end is also rounded, thus with the not fit such as the bight in applied region.
Then, the coater unit to present embodiment one, use the apparatus for coating of this coater unit and the effect of coating process to describe.As shown in Figure 2, according to the coater unit 2 of this apparatus for coating 1, the cardinal extremity 3b of many coating needle 3 is individually fixed in the pin bearing-surface 19a of needle stand member 19, and accordingly the front end 3a of many coating needle 3 is arranged in to the shape of regulation with the shape of applied region WV.
Therefore, by regulating the spacing of shape, size and arrangement of many coating needle 3, can be easily corresponding to the shape in the applied region on workpiece W surface.For example, form thin layer in the defect for needs correction, by using and the size of defect and the many coating needle 3 that shape is consistently arranged, can once the correction ink 11 of expecting component be coated to defect, and can form exactly the film of expecting thickness with less coating number of times.
In addition, make to revise ink 11 and be attached to the front end 3a of many coating needle 3.Therefore, and be coated with and revise compared with the situation of ink 11 by a coating needle as prior art, can increase the component of the correction ink 11 that once coating can adhere to and be coated with.
Thus, even if the correction position of larger area, also can with once or less number of times be coated with into the thickness of expectation, thereby can shorten consuming time.In addition, separating equally spaced for example, along the arrangement of XY direction many, 3 × 8=24 root coating needle 3, the outer shape of the front end 3a of 24 coating needle 3 is made as in rectangular situation, without as prior art the area of the front end of a coating needle and dispensing area consistently being set greatlyr, even if make coating needle 13 be positioned at the difficult bight being coated with etc., also can directly contact to be coated with.Therefore, without change the characteristic such as viscosity of revising ink 11 in the mode easily flowing into, can utilize current used correction ink 11 to be coated with operation, and can improve the efficiency of correction operation.
(embodiment two)
Fig. 9 is the figure that observes the major part of the coater unit of embodiment of the present invention two from front, and Figure 10 is the figure from beneath coater unit.In addition, for other structure and action effect, mark the symbol identical with embodiment one and not repeat specification.In this coater unit, use the coating needle 23 of cylindrical shape, for example 3 × 8=24 root coating needle 23 separates the pin bearing-surface 19a that is equally spaced arranged in the lower surface of needle stand member 19 along XY direction.24 coating needle 23 have identical lengthwise dimension, and from front end to cardinal extremity, are formed as identical thickness (radial dimension).The thickness of coating needle 23, the interval of coating needle 23 according to revise ink viscosity, characteristic, coating time required thickness and being set rightly.
(embodiment three)
Figure 11 is the figure that observes the major part of the coater unit of embodiment of the present invention three from front, and Figure 12 is the figure from beneath coater unit.In addition, for other structure and action effect, mark the symbol identical with embodiment one, two and not repeat specification.The coating needle 33 of this coater unit forms slightlyer than the coating needle 23 of the cylindrical shape shown in embodiment two, and its leading section is formed as taper (along with the shape attenuating towards front end from base end side).
On this coater unit, for example 3 × 8=24 root coating needle 33 is arranged in the pin bearing-surface 19a of needle stand member 19 along XY direction.Front end 33a in coating needle 33 is formed with circular tabular surface.24 coating needle 33 have identical lengthwise dimension, and are formed as identical thickness (radial dimension) from the latter end of the cone-shaped of front end to cardinal extremity.In addition, the tapering of 24 coating needle 33 forms identical length with identical angle of inclination.In addition, the tabular surface of the front end 33a of 24 coating needle 33 is formed as identical area.
The interval of the thickness of coating needle 33, the coating needle of disposed adjacent 33 and coating needle 33 or shape, quantity and material according to revise ink viscosity, characteristic, coating time required thickness set.
In addition, the shape of the tabular surface of the front end 33a of coating needle 33 is not limited to circle, can be also to comprise square, rectangle, parallelogram, trapezoidal square configuration, triangle or other more than pentagon polygonal shape etc.
(embodiment four)
Figure 13 (a) is the figure that observes the major part of the coater unit of embodiment of the present invention four from front, and Figure 13 (b) is the figure from beneath coater unit.In Figure 13 (a), Figure 13 (b), be provided with three coating needle connectors 80 at the lower surface of the needle stand member 19 of this coater unit.Each coating needle connector 80 comprises multiple coating needle 23 of the lower surface that is equally spaced arranged in needle stand member 19.In each coating needle connector 80, between two coating needle 23 of each disposed adjacent, be connected portion 81 and connect.
Be formed with respectively recess 82,82 in the two sides of each connecting portion 81, as shown in Figure 13 (b), the shape of the end face relative with applied region be made as to shrink regularly the wire that the mode that narrows forms.
In this embodiment four,, between two coating needle 23 of disposed adjacent, connect and mutually strengthened by connecting portion 81 one by one compared with independent fixing embodiment two with coating needle 23.In addition, if by being fixed on the lower surface of needle stand member 19 together with the base portion of each base end part of connecting portion 81 and coating needle 23, be further strengthened.Therefore, can increase the intensity of coater unit, and improve durability.
In addition, be formed with recess 82,82 in the two sides of connecting portion 81.Therefore, can be by utilizing recess 82,82 to regulate the amount of revising ink 11 to control thickness.In addition, for other structure and action effect, mark the symbol identical with the coating needle 23 of embodiment two and not repeat specification.
(embodiment five)
Figure 14 (a) is the figure that observes the major part of the coater unit of embodiment of the present invention four from front, and Figure 14 (b) is the figure from beneath coater unit.In Figure 14 (a), Figure 14 (b), be provided with three coating needle connectors 90 at the lower surface of the needle stand member 19 of this coater unit.Each coating needle connector 90 comprises multiple coating needle 13 of the lower surface that is equally spaced arranged in needle stand member 19.Each coating needle 13 is formed as quadrangular shape.In each coating needle connector 90, between two coating needle 13 of each disposed adjacent, be connected portion 91 and connect.
Be formed with respectively recess 92,92 in the two sides of each connecting portion 91.In addition, be formed with recess 93 at the end face of the lower face side relative with applied region of each connecting portion 91.
In this embodiment five, utilize connecting portion 91 to connect each two adjacent coating needle 13 and improve intensity, and improved durability.
In addition, can utilize the recess 92 of the two sides that are formed at connecting portion 91 and the recess 93 that is formed at lower face side to regulate the amount of revising inks 11, and thickness is controlled.In addition, for other structure and action effect, due to identical with the coating needle 13 of embodiment one and the coating needle connector 80 of embodiment four, therefore, mark identical symbol and not repeat specification.
(embodiment six)
Figure 15 (a), Figure 15 (b) are the structure of ink supplying mechanism 4 and the figure of action that represents that the coater unit of embodiment of the present invention six comprises.
In Figure 15 (a), Figure 15 (b), using the adjusting portion of revising ink supplying mechanism 4 that ink 11 is supplied to multiple coating needle 3 grades and regulating as the quantity delivered that correction ink 11 is supplied with towards coating needle 3, comprising: the print cartridge 12 that bottom surface sections 12a is made as to plane and unlimited upper surface; And the surperficial 11f that makes to be contained in the correction ink 11 in print cartridge 12 become smooth, and to from bottom surface sections 12a till the size of the thickness of surperficial 11f regulates to become uniform scraper plate 14.
As shown in Figure 15 (a), Figure 15 (b), use scraper plate 14, the surperficial 11f that revises ink 11 is become to smooth, and make to become impartial size from the bottom surface sections 12a of print cartridge 12 till revise the thickness of the surperficial 11f of ink 11.
Therefore,, in the time many coating needle 3 being inserted in print cartridge 12 from top and adhere to correction ink 11, by making front end 3a and the bottom surface sections 12a butt of many coating needle 3, can make the length dimension that immerses correction ink 11 become impartial.By this, by once adhering to operation, just can make the correction ink 11 of same amount be attached to the front end 3a of many coating needle 3.Other structure and action effect are identical to embodiment five with embodiment one, therefore, do not repeat identical explanation.
(embodiment seven)
Figure 16 (b1), Figure 16 (b2) are the figure that represents the major part of the coater unit of embodiment of the present invention seven.Figure 16 (b1) is the side view of coater unit, and Figure 16 (b2) is the figure from beneath coater unit.In addition, for the part that uses the structure identical with the coating needle 23 of the embodiment two shown in Fig. 9 and needle stand member 19, mark identical not repeat specification of symbol.
In the coater unit of the embodiment two shown in Figure 16 (a1), Figure 16 (a2), the component of the correction ink 11 being adhered to by the many coating needle 23 that are fixed with cardinal extremity on needle stand member 19 is sometimes few than the component of expecting.
In this case, by increasing the area of front end 23a of coating needle 23, or utilize and adhere to the front end 23a that ability is higher, material that improved so-called guarantor's fluidity forms coating needle 23 that revises ink 11, be attached to the component of the front end 23a of coating needle 23 thereby can increase correction ink 11.
In this embodiment seven, as shown in Figure 16 (b1), Figure 16 (b2), on the leading section 23a of each coating needle 23, be formed with the coating 100 of specific thickness.
In addition, the mode that guarantor's fluidity of the part of exposing at base end side with each coating needle 23 is lower scolds the material of fluidity to form coating needle 23 by having in advance, or scolds the mode of fluidity to scold liquid processing to have given play at the outer surface of coating needle 23.
In addition, improved guarantor's fluidity (wettability) of the part of the leading section 23a formation coating 100 of coating needle 23.Therefore, guarantor's fluidity of the leading section 23a of each coating needle 23 is set highlyer than guarantor's fluidity of its base end part.
In this embodiment seven, be formed with the coating 100 of specific thickness at the leading section 23a of coating needle 23.Can utilize the thickness of this coating 100 to increase the surface area of leading section 23a, thereby can increase the once component of the correction ink 11 of coating.
In addition, to be configured to guarantor's fluidity of the base end part exposing than not applying coating 100 high for guarantor's fluidity of the leading section 23a of coating needle 23.Therefore, can increase the amount of the correction ink 11 that is attached to leading section 23a, and can prevent that unnecessary correction ink 11 is attached to base end part.
Therefore, when ink 11 is revised in present dynasty's applied region coating, can make to be attached to coating needle 23 and the amount of residual correction ink 11 reduces, and can effectively appropriate correction ink 11 be coated to applied region.
(embodiment eight)
Figure 17 (a) is the side view representing as the major part of the coater unit of the comparative example of embodiment of the present invention eight, and Figure 17 (b) is the figure that observes coater unit from lower face side.
In this comparative example, as shown in Figure 17 (a), remain certain mode with the length of many coating needle 13 each cardinal extremity 13b is fixed on to pin bearing-surface 19a.By this, in same plane, there is the front end 13a of many coating needle 13.
In this coater unit, as shown in Figure 17 (a), with in the time making to revise ink 11 and be attached to the front end 13a of many coating needle 13, be held in the mode that the correction ink 11 of the front end 13a of two adjacent coating needle 13 connects, set the viscosity of revising ink 11, and the size of 13 of each coating needle is set as to the size of regulation.
As shown in Figure 17 (b), be attached under the state of front end 13a of many coating needle 13 at correction ink 11, revise ink 11 and concentrate on central authorities, the front end 13a that is positioned at the coating needle 13 of outer peripheral edges exposes half.
In addition, Figure 18 represents to use the coater unit of comparative example and the top view of coating the shape of the correction ink 11 of the workpiece W being made up of glass substrate with applied region WV.
The correction ink 11 that is attached to the front end 13a of the many coating needle 13 shown in Figure 17 (a), Figure 17 (b) pools together and coats the applied region WV of workpiece W.
In this comparative example, the correction ink 11 that is held in the front end 13a of many coating needle 13 connects, becomes one and applied.Therefore, can increase the once total amount of the correction ink 11 of coating.
But in this comparative example, the many coating needle 13 that are positioned at outer peripheral edges are aligned to roughly consistent with the outer peripheral edges of the applied region WV expecting.In this case, as shown in Figure 17 (a), Figure 17 (b), the correction ink 11 that is attached to the front end 13a of many coating needle 13 concentrates on central authorities, and the correction ink 11 that is positioned at outer peripheral edges exposes half.In the time being coated with under this state, as shown in the solid line in Figure 18, revising ink 11 and be coated on than on the spreading area of the little circle of the area of the applied region WV expecting.
Figure 19 (a1)～Figure 19 (b2) is the figure that represents the major part of the coater unit of embodiment of the present invention eight, especially, Figure 19 (a1), Figure 19 (a2) are the side views of this coater unit, and Figure 19 (b1), Figure 19 (b2) are the figure from this coater unit of beneath.
In this coater unit, as shown in Figure 19 (a1), Figure 19 (b1), comprise many auxiliary needles 43, these many auxiliary needles 43 are in the position more in the outer part of many coating needle 13 than being positioned at outside, with separate predetermined distance and surround many coating needle 13 outside mode complete cycle arrange, the cardinal extremity 43b of these many auxiliary needles 43 is fixed on the pin bearing-surface 19a of needle stand member 19.Many auxiliary needles 43 length is separately configured to shorter than many coating needle 13 length separately.
As shown in Figure 19 (a2), Figure 19 (b2), be attached at correction ink 11 under the state of the front end 13 of whole coating needle 13 and the front end 43a of whole auxiliary needles 43, revise ink 11 and concentrate on central authorities, the front end 13a of each coating needle 13 is corrected ink 11 and covers completely, and the front end 43a of each auxiliary needle 43 exposes half.In addition, auxiliary needle 43 is shorter than coating needle 13, therefore, even if under the state of the front end 13a of coating needle 13 and the surperficial butt of applied region WV, the front end 43a of auxiliary needle 43 also not with the direct butt in surface of applied region WV.
Under this state, as shown in figure 20, in the time that correction ink 11 is coated to the workpiece W being made up of glass substrate with applied region WV, the shape of the correction ink 11 shown in solid line is roughly consistent with the shape of the applied region WV of expectation.
In this embodiment eight, as one man arrange many coating needle 13 with applied region WV, and arrange many auxiliary needles 43 around many coating needle 13, therefore, can cover the front end 13 of whole coating needle 13 with revising ink 11, and can coat exactly applied region WV by revising ink 11.
(embodiment nine)
Figure 21 (a1)～Figure 21 (b2) is the figure that represents the coating process of embodiment of the present invention nine.In this coating process, use two coater unit 2A, 2B.Figure 21 (a1) is the side view that represents the major part of coater unit 2A, and Figure 21 (b1) is the figure from this coater unit of beneath 2A.In addition, Figure 21 (a2) is the side view that represents the major part of coater unit 2B, and Figure 21 (b2) is the figure from this coater unit of beneath 2B.
Many coating needle 13 are arranged in zigzag by the interval that two coater unit 2A, 2B all separate regulation at the lower surface of needle stand member 19.But the Pareto diagram of the coating needle 13 of coater unit 2A, 2B staggers cycle of 1/2nd each other.
Figure 22 (c1)～Figure 22 (c3) is the figure that represents the coating process that uses coater unit 2A, 2B.In the time describing according to the order of painting process, first, make to revise ink 11 and be attached to the leading section of the many coating needle 13 of side's coater unit 2A, and this correction ink 11 is coated to the surperficial applied region of workpiece W.By this, as shown in Figure 22 (c1), the drop 11a that revises ink 11 is point-like or spot shape and coats the applied region of workpiece W with the pattern identical with the Pareto diagram of coating needle 13.
Then, make to revise ink 11 and be attached to the leading section of the many coating needle 13 of the opposing party's coater unit 2B, and this correction ink 11 is coated to the surperficial applied region of workpiece W.By this, as shown in Figure 22 (c2), except coating the uncoated part the part in applied region by side's coater unit 2A, be point-like or spot shape with the pattern identical with the Pareto diagram of coating needle 13 and be coated with the drop 11b that revises ink 11.
Then, under the final coating state shown in Figure 22 (c3), the correction ink 11 of coating is along the surface expansion of workpiece W, and each adjacent two drop 11a, 11b become one, thereby form the correction ink 11c of film-form.
In this embodiment nine, using side's coater unit 2A to revise after the drop 11a of ink 11 is point-like or spot shape and coats applied region, use the opposing party's coater unit 2B, the drop 11b that revises ink 11 is to point-like or spot shape and coats the uncoated part that has drop 11a in applied region.Therefore, can coat applied region WV by revising ink 11 exactly.
(embodiment ten)
Figure 23 (a1)～Figure 23 (b2) is the figure that represents the coating process of embodiment of the present invention ten.In this coating process, using after coater unit 2A is coated with, make 1/2nd cycles of Pareto diagram that coater unit 2A is only offset coating needle 13 to be again coated with.Figure 23 (a1) is the side view that represents the major part of coater unit 2A, and Figure 23 (b1) is the figure from this coater unit of beneath 2A.In addition, Figure 23 (a2) is the side view that represents to be offset the major part of the coater unit 2A after 1/2nd cycles, and Figure 23 (b2) is the figure from this coater unit of beneath 2A.
In this coater unit 2A, as shown in Figure 23 (a1), Figure 23 (b1), many coating needle 13 across the interval indentation of regulation be arranged in the pin bearing-surface 19a (lower surface) of needle stand member 19.
In this coating process, make the relative position with respect to applied region of coater unit 2A move to the position shown in solid line from the position shown in the double dot dash line of Figure 23 (a2), Figure 23 (b2), and in the position shown in this double dot dash line and the Zhe Liangge position, position shown in solid line, correction ink 11 is coated to applied region.
Figure 24 (c1)～Figure 24 (c3) is the figure that represents the coating process that uses coater unit 2A.In the time describing according to the order of painting process, first, make to revise ink 11 and be attached to the leading section of the many coating needle 13 of coater unit 2A, and this correction ink 11 is coated to the surperficial applied region of workpiece W.By this, as shown in Figure 24 (c1), the drop 11a that revises ink 11 is point-like or spot shape and coats the applied region of workpiece W with the pattern identical with the Pareto diagram of coating needle 13.
Then, make to revise ink 11 and be attached to the leading section of the many coating needle 13 of coater unit 2A, and make coater unit 2A move for 1/2nd cycles, correction ink 11 is coated to the surperficial applied region of workpiece W.By this, as shown in Figure 24 (c2), coating the uncoated part outside the part in applied region by coater unit 2A at first, be point-like or spot shape and be coated with the drop 11b that revises ink 11.
Then, under the final coating state shown in Figure 24 (c3), drop 11a, the 11b of the correction ink 11 of coating is along the surface expansion of workpiece W, and each adjacent two drop 11a, 11b become one, thereby form the correction ink 11d of film-form.
In this embodiment ten, compared with the situation that needs like that two coater unit 2A, 2B with embodiment nine, need not increase quantity and the kind of coater unit 2A, just the correction ink 11d of stratiform thinner thickness can be coated exactly to the applied region WV of workpiece W with a coater unit 2A.
(embodiment 11)
In the coater unit 2 of embodiment one, the front end 3a of many coating needle 3 along plane and the uneven situation of applied region WV under, utilize the strain of elastic supporting part 18 to carry out absorption dip, so that the surface butt equably of the front end 3a of many coating needle 3 and applied region WV.
But, strictly speaking, for absorption dip, need make the front end 3a of coating needle 3 move in the mode of sliding with respect to applied region WV, or the cardinal extremity 3b of coating needle 3 is moved in the horizontal direction.
For example, as shown in figure 25, suppose the only absorption dip of distortion of elastic supporting part 18, and there is fulcrum P in the central upper portion of elastic supporting part 18 in hypothesis.In addition, in Figure 25, in order to simplify accompanying drawing and explanation, omit the diagram of needle stand member 19, and represented multiple coating needle 3 with a quadrangle.In this case, when making elastic supporting part 18 and coating needle 3 in the time that the workpiece W tilting vertically declines, make the inclination variation of elastic supporting part 18 and coating needle 3 according to the inclination of workpiece W.Now, as shown in figure 25, the contact position of the front end 3a of coating needle 3 and the Surface Contact of workpiece W moves a certain apart from d1 from being coated with to when coating.In addition, if the front end 3a of coating needle 3 does not move, cannot absorb the inclination of workpiece W.
But in the time that the contact position of the front end 3a of coating needle 3 moves, the precision of coating position reduces, produce coating shape and become oval grade for harmful effect.In order to improve the reduction of coating precision, the variation of coating shape, as shown in figure 26, need make elastic supporting part 18 taking the front end 3a of the coating needle 3 that contacts at first as fulcrum moves a certain distance.
Also can consider that and longer material such as, by material, rubber, the Compress Spring etc. of movement of cardinal extremity 3b of inclination, coating needle 3 by absorbing workpiece W soft like that forms elastic supporting part 18, absorb the movement of the cardinal extremity 3b of inclination, the coating needle 3 of workpiece W.
But as shown in Figure 27 (a), Figure 27 (b), the reaction force F1 front end 3a of coating needle 3 being applied from workpiece W is divided into and can be used for the power F2 of absorption dip and can be used for absorbing the power F3 that move position, compared with F2, F3 is minimum.Therefore, need to use and can move forward into position the elastic supporting part 18 that row absorbs with less power, but have following shortcoming: vibration effect when this elastic supporting part 18 is easily subject to coating action, in addition, elastic force is difficult to be back to original position a little less than.
In addition, also can consider that the elastic supporting part 18 that is difficult to the hardness that is subject to vibration effect degree by use strengthens pressing force, thereby strengthen the power that move position that absorbs, if but in the time that the state of the front end 3a of coating needle 3 inclination is pressed energetically, workpiece W may be damaged.
Therefore,, in present embodiment 11, provide a kind of coater unit that can stablize and be coated with accurately with lighter pressing force correction ink 11.
Figure 28 is the figure that represents the major part of the coater unit of embodiment of the present invention 11, and it is the figure contrasting with Fig. 2.With reference to Figure 28, the difference of the coater unit of this coater unit and Fig. 2 is, has appended XY guide part 111 these points between mobile base member 17 and elastic supporting part 18.
XY guide part 111 comprises rail portion 112,114 and sliding part 113,115.Rail portion 112 is fixed on the lower surface of mobile base member 17 towards Y square (fore-and-aft direction).Sliding part 113 is installed on rail portion 112, and is set as and can slides in the Y direction along the lower surface of rail portion 112.Rail portion 114 is fixed on the lower surface of sliding part 113 towards X square (left and right directions).Sliding part 115 is installed on rail portion 114, and is set as and can on directions X, slides along the lower surface of rail portion 114.
Figure 29 (a), Figure 29 (b) are the figure that represents the action of this coater unit.In Figure 29 (a), Figure 29 (b), workpiece W with respect to the horizontal plane tilts slightly.In the drawings, show the right side situation slightly higher than left side of workpiece W.In this case, in the time utilizing base travel mechanism 5 that mobile base member 17 is declined, as shown in Figure 29 (a), first, the front end 3a of the coating needle 3 of right-hand member and the Surface Contact of workpiece W.In the time of further decline, sliding part 115 taking the front end 3a of the coating needle 3 of right-hand member the left in as fulcrum P towards figure mobile to (direction of arrow), and elastic supporting part 18 is out of shape, all front end 3a of coating needle 3 and Surface Contacts of workpiece W.
In addition, in Figure 29 (a), Figure 29 (b), the situation that workpiece W is only tilted towards directions X is illustrated, but in the situation that workpiece W only tilts towards Y-direction, sliding part 113 moves, in the situation that workpiece W tilts towards directions X and Y-direction, sliding part 113,115 these two sliding parts all move.
In this embodiment 11, be provided with elastic supporting part 18 is supported to the XY guide part 111 that can move up in XY side, therefore, can prevent from moving contiguously because of front end 3a and the applied region WV of coating needle 3 the coating positional precision reduction causing.In addition, needle stand member 19 can easily tilt, and can weaken the pressing force of the front end 3a of the coating needle 3 that puts on first butt.
(embodiment 12)
Figure 30 (a)～Figure 30 (d) is the major part of coater unit and the figure of action thereof that represents embodiment of the present invention 12, and it is the figure contrasting with Figure 29 (a), Figure 29 (b).With reference to Figure 30 (a)～Figure 30 (d), the difference of the coater unit of this coater unit and Figure 29 (a), Figure 29 (b) is, has appended four groups of actuators 120 and arm 121 these points.
Four groups of actuators 120 and arm 121 form the reset portion that coating needle 30 is reset to reference position.In addition, in Figure 30 (a)～Figure 30 (d), in order to simplify accompanying drawing and explanation, only show the two groups of actuators 120 and the arm 121 that are arranged on directions X (left and right directions), omitted two groups of actuators 120 being arranged in Y-direction (fore-and-aft direction) and the diagram of arm 121.
, mobile base member 17, elastic supporting part 18 and needle stand member 19 are formed as respectively rectangular-shaped.Left and right side in the figure of mobile base member 17, respectively being fixed with actuator 120 along the flexible mode of directions X.The one end that is fixed with the arm 121 of L font in the lower end of the leading section of each actuator 120, the other end of arm 121 is relative with the side of elastic supporting part 18.
In the time that each actuator 120 shrinks, sliding part 113,115 position is separately reset to initial point, and in the time that each actuator 120 extends, sliding part 113,115 respectively can be in 121 movements of two arms.The initial point of sliding part 113,115 is respectively the center of the length direction of rail portion 112,114.In the time that sliding part 113,115 is positioned at initial point separately, elastic supporting part 18 is disposed at reference position.
Then, the action of this coater unit is described.In Figure 30 (a), Figure 30 (b), workpiece W with respect to the horizontal plane tilts slightly.In the drawings, show the right side situation slightly higher than left side of workpiece W.As shown in Figure 30 (a), before coating, each actuator 120 extends and makes sliding part 112,115 removable.In addition, elastic supporting part 18 is disposed at reference position.In the time utilizing base travel mechanism 5 that mobile base member 17 is declined, first, the front end 3a of the coating needle 3 of right-hand member and the Surface Contact of workpiece W.
In the time further making mobile base member 17 decline, as shown in Figure 30 (b), the left in as fulcrum P towards figure is to movement taking the front end 3a of the coating needle 3 of right-hand member for sliding part 115, and elastic supporting part 18 is out of shape, all front end 3a of coating needle 3 and Surface Contacts of workpiece W.
As shown in Figure 30 (c), after coating, utilize base travel mechanism 5 to make mobile base member 17 increase.Now, sliding part 115 is offset from initial point (rail portion 114 center) towards left side, and elastic supporting part 18 is offset towards left side from reference position.While carrying out being coated with next time under this state, coating position is offset from target location.
Therefore,, as shown in Figure 30 (d), after coating finishes, four actuators 120 are shunk.By this, the interval of four arms 121 dwindles, and sliding part 113,115 position is separately reset to initial point, and elastic supporting part 18 is back to reference position.By this, can prevent that in coating, being coated with position in next time is offset from target location.
In addition, in Figure 30 (a)～Figure 30 (d), the situation that workpiece W is only tilted towards directions X is illustrated, but in the situation that workpiece W only tilts towards Y-direction, sliding part 113 moves, in the situation that workpiece W moves towards directions X and Y-direction, sliding part 113,115 these two sliding parts all move.
In this embodiment 12, after coating finishes, sliding part 113,115 position is separately reset to initial point and makes elastic supporting part 18 be back to reference position, therefore, can prevent from being coated with position skew.
(embodiment 13)
Figure 31 is the figure that represents the major part of the coater unit of embodiment of the present invention 13, and it is the figure contrasting with Figure 29 (a), Figure 29 (b).With reference to Figure 31, the difference of the coater unit of this coater unit and Figure 29 (a), Figure 29 (b) is, mobile base member 17 by mobile base member 17A replace, XY guide part 111 replaced this point by XY guide part 111A.
Mobile base member 17A is the shape after the bottom oblique cutting of rectangular-shaped mobile base member 17., one of the lower surface of mobile base member 17A jiao lower than other three angles.In addition, in Figure 31, in order to simplify accompanying drawing, the state that the lower surface that shows mobile base member 17A only tilts at directions X, the right-hand member of lower surface is lower than left end.
In addition, XY guide part 111A replaces with rail portion 112A, 114A the guide part obtaining after the rail portion 112,114 of XY guide part 111.Rail portion 112A is the member that is provided with locating part (not shown) at the two ends of rail portion 112.Rail portion 114A is the member that is provided with locating part (having marked the part of oblique line) at the two ends of rail portion 114.
Therefore, in the case of mobile base member 17A be disposed at workpiece W above, an end that utilizes gravity to make the position of sliding part 113 be reset to rail portion 112A is initial point, and an end that utilizes gravity to make the position of sliding part 115 be reset to rail portion 114A is initial point.In the time that sliding part 113,115 is positioned at initial point separately, elastic supporting part 18 is disposed at reference position.Other structure and action are identical with the coater unit of embodiment 11, therefore, do not repeat its explanation.
In this embodiment 12, after coating finishes, sliding part 113,115 position is separately reset to initial point and makes elastic supporting part 18 be back to reference position, therefore, can prevent from being coated with position skew.
In addition, in the situation that sliding part 113,115 only cannot be back to initial point because of deadweight, spring sliding part 113,115 being pressed into initial point etc. also can be set.
Finally, referring again to accompanying drawing, embodiment described above is summarized.
As shown in Figures 1 and 2, in the coater unit 2 of this apparatus for coating 1, the cardinal extremity 3b of many coating needle 3 is individually fixed in the pin bearing-surface 19a of needle stand member 19, and accordingly the front end 3a of many coating needle 3 is arranged in to the shape of expectation with the shape in applied region.
Therefore, by regulating the spacing of shape, size and arrangement of coating needle 3, can be easily corresponding to the shape in applied region.For example, can thin layer be coated with the thickness of expecting and with less coating number of times to the rejected region that needs correction.
In addition, make to revise ink 11 and be attached to many coating needle 3 etc., therefore, use like that the coating of coating needle to revise compared with the situation of ink 11 with prior art, can increase the component by being once coated with the correction ink 11 that can be coated with.
Thus, even if the correction position of larger area, also can with once or less number of times will be coated with into the thickness of expectation, and can shorten consuming time.In addition, without the mode with consistent with applied region, multiple coating needle 13 of arranging are set for the front end of each coating needle 13 such as is processed greatlyr at the shape.Therefore, also can be directly coated with the bight etc. that is difficult at present coating by coating needle 13, without change the characteristic such as viscosity of revising ink 11 in the mode easily flowing into, thereby can improve the efficiency that is coated with operation.
In addition, as shown in figure 19, also comprise many auxiliary needles 43, these many auxiliary needles 43 are aligned to the outside that surrounds multiple coating needle 13, and the cardinal extremity 43b of these many auxiliary needles 43 is fixed on needle stand member 19.Many auxiliary needles 43 length is separately configured to shorter than many coating needle 13 length separately.By this, can not make the front end 13a of coating needle 13 expose, can consistently maintain and revise ink 11 with the shape of the applied region WV expecting.
In addition, as shown in Figures 1 and 2, comprise the elastic supporting part 18 that needle stand member 19 is supported.As shown in Figure 3, in the time of the front end 3a of many coating needle 3 and applied region WV butt, elastic supporting part 18 absorbs the inclination being present between needle stand member 19 and the surface in applied region by strain.
Therefore, load obliquely even if form the part of applied region WV, the front end 3a of coating needle 3 also equably with the surperficial butt in applied region, thereby can carry out impartial coating.
In addition, as shown in figure 28, also comprise XY guide part 111, this XY guide part 111 is supported to elastic supporting part 18 can move up in the orthogonal side of the direction of extending with multiple coating needle 3.XY guide part 111, by elastic supporting part 18 is moved up in the orthogonal side of the direction of extending with many coating needle 3, makes front end and the applied region butt of many coating needle 3.
In addition, as shown in Figure 30 (a)～Figure 30 (d), also comprise reset portion, this reset portion away from applied region, makes elastic supporting part 18 be back to reference position at the front end 3a of many coating needle 3.In this case, can prevent from being coated with position deviation target location.
In addition, in Figure 13 and Figure 14, the many coating needle 13 (or 23) that form coating needle connector 80 (or 90) are ranks shape and are arranged in needle stand member 19, and between each adjacent two coating needle 13,13 (or 23,23), are connected portion 81 (or 91) connection.In this case, can utilize connecting portion 81 (or 91) to strengthen coating needle 13,13 (or 23,23), to improve intensity and the durability of coating needle 13,13 (or 23,23).
In addition, form recess 82 (or 92,93) by least either party in end face or the lower surface of connecting portion 81 (or 91), can regulate the coating weight of revising ink 11.In embodiment four (or five), coating needle connector 80 (or 90) is arranged in the lower surface of needle stand member 19 to be equally spaced formed as the mode of wire of three row, but being not particularly limited to this, can be also the shape of the polygonal shapes such as triangle, square, rectangle, pixel or C word shape, L word shape.Coating needle connector 80 (or 90) is as long as connecting the member of many coating needle 3 (or 13), and quantity, shape and material are not specially limited.
In addition,, as shown in Figure 13 (a), between the coating needle 23 of this coating needle connector 80 with disposed adjacent, be roughly rectangular-shaped mode and connect by row by connecting portion 81.
Be formed with respectively recess 82,82 in the two sides of each connecting portion 81, as shown in Figure 13 (b), the shape of the end face relative with applied region be made as to shrink regularly the wire that the mode that narrows forms.
In addition,, as shown in Figure 16 (b1), Figure 16 (b2), on the leading section 23a of coating needle 23, be formed with the coating 100 of specific thickness.Can utilize coating 100 to increase the surface area of leading section 23a, thereby can increase the amount of the correction ink 11 that once can be coated with.
In addition, guarantor's fluidity of the leading section 23a of coating needle 23 is set highlyer than guarantor's fluidity of its base end part.Therefore, increased the amount of the correction ink 11 that is attached to leading section 23a, and unnecessary correction ink 11 can not be attached to base end part.
In addition, the coater unit 2 shown in Fig. 2 comprises and will revise ink 11 and be supplied to the print cartridge 12 as liquid material feed mechanism of coating needle 3,13 etc.Print cartridge 12 comprises the adjusting portion regulating revising the quantity delivered supplied with towards coating needle 3 of ink 11.Utilize this adjusting portion to regulate so that its equalization the quantity delivered of the correction ink 11 that is attached to multiple coating needle 3.In embodiment, utilization regulates the thickness of revising ink 11 as the scraper plate 14 of an example of adjusting portion.
In addition, apparatus for coating 1 shown in Fig. 1 is mainly made up of with laser portion 20 and master computer 30 coater unit 2, viewing optical system 70, cutting, wherein, above-mentioned coater unit 2 uses multiple coating needle 3 that correction ink 11 is coated to defect, above-mentioned viewing optical system 70 is observed the surface of workpiece W, above-mentioned cutting is carried out laser cutting by viewing optical system 70 to the defect of substrate surface with laser portion 20, and above-mentioned master computer 30 is controlled installing entirety.In addition, in this embodiment one, apparatus for coating 1 comprises the XY worktable 40 as location division and the Z workbench 60 that coater unit 2 grades are positioned to the defect of workpiece W.
In addition,, in the time utilizing viewing optical system 70 to observe the defect shape in applied region, carry out the shaping of the peripheral shape in the removal of the defect based on laser cutting, applied region according to the image being photographed by CCD camera 50.Now, by utilizing XY worktable 40 to position action, can easily carry out contraposition to the coating position of laser cutting position and coater unit 2.
This disclosed embodiment be illustration on a little, not will be understood that the present invention restricted.Scope of the present invention be represented by claims instead of represented by above-mentioned explanation, the present invention includes all changes in the meaning and the scope being equal to claims.
Claims (16)
1. a coater unit, coats liquid material in the applied region of regulation shape, it is characterized in that, comprising:
Many coating needle, the described liquid material that is attached to leading section is coated described applied region by these many coating needle; And
Needle stand member, this needle stand member keeps described many coating needle,
The front end of described many coating needle is aligned to the shape corresponding with described applied region, and the cardinal extremity of described many coating needle is fixed on described needle stand member.
2. coater unit as claimed in claim 1, is characterized in that,
Described coater unit also comprises many auxiliary needles, and these many auxiliary needles are aligned to the outside that surrounds described many coating needle, and the cardinal extremity of described many auxiliary needles is fixed on described needle stand member,
Described many auxiliary needles length is separately configured to shorter than described many coating needle length separately.
3. coater unit as claimed in claim 1, is characterized in that,
Described coater unit also comprises drive division, and this drive division moves described many coating needle by described needle stand member, so that the described liquid material of the front end that is attached to described many coating needle is coated to described dispensing area.
4. coater unit as claimed in claim 3, is characterized in that,
Described coater unit also comprises the elastic supporting part that described needle stand member is supported,
Described drive division moves described many coating needle by described elastic supporting part,
Described elastic supporting part makes front end and the described applied region butt of described many coating needle by strain.
5. coater unit as claimed in claim 4, is characterized in that,
Described coater unit also comprises XY guide part, and this XY guide part is supported to described elastic supporting part can move up in the orthogonal side of the direction of extending with described many coating needle,
Described drive division moves described many coating needle by described XY guide part,
Described XY guide part makes described elastic supporting part move up in the orthogonal side of the direction of extending with described many coating needle, so that the front end of described many coating needle and described applied region butt.
6. coater unit as claimed in claim 5, is characterized in that,
Described coater unit also comprises reset portion, and this reset portion away from described applied region, makes described elastic supporting part be back to reference position at the front end of described many coating needle.
7. coater unit as claimed in claim 5, is characterized in that,
Described XY guide part comprises:
The first rail portion, this first rail portion is combined with described drive division, and an end is disposed at the position lower than the other end;
The first sliding part, this first sliding part moves along described the first rail portion;
The second rail portion, this second rail portion is fixed on described the first sliding part, and an end is disposed at the position lower than the other end; And
The second sliding part, this second sliding part keeps described elastic supporting part, and moves along described the second rail portion,
At the front end of described many coating needle away from described applied region, utilize gravity to make described the first sliding part and described the second sliding part move to respectively an end of described the first rail portion and described the second rail portion, and make described elastic supporting part be back to reference position.
8. coater unit as claimed in claim 1, is characterized in that,
Described many coating needle are ranks shape and are arranged in described needle stand member,
Described coater unit also comprises connecting portion, and this connecting portion will connect between each two adjacent coating needle.
9. coater unit as claimed in claim 8, is characterized in that,
At least either party in side or the end face of described connecting portion is formed with recess.
10. coater unit as claimed in claim 1, is characterized in that,
Be formed with the coating of specific thickness at the leading section of each coating needle.
11. coater units as claimed in claim 1, is characterized in that,
Guarantor's fluidity of the leading section of each coating needle is higher than guarantor's fluidity of the base end part of each coating needle.
12. coater units as claimed in claim 1, is characterized in that,
Described coater unit also comprises liquid material feed mechanism, and described liquid material is supplied to described coating needle by this liquid material feed mechanism,
Described liquid material feed mechanism comprises adjusting portion, and the quantity delivered that this adjusting portion is supplied with towards described coating needle described liquid material regulates.
13. coater units as claimed in claim 12, is characterized in that,
Described adjusting portion has the scraper plate that the thickness of described liquid material is regulated.
14. 1 kinds of coating processes, is characterized in that,
Two groups of coater units claimed in claim 1 are set,
Described coating process comprises:
The Pareto diagram of the described many coating needle described in two groups in coater unit differs from one another, and uses described coater unit of the side described liquid material to be coated to the step in described applied region; And
Use the opposing party's described coater unit described liquid material to be coated to the step of the uncoated part in described applied region.
15. 1 kinds of coating processes, is characterized in that,
Coater unit claimed in claim 1 is set,
Described many coating needle are separated to being spaced of regulation,
Described coating process comprises:
Use described coater unit described liquid material to be coated to the step in described applied region; And
The position of described coater unit is moved, described liquid material is coated to the step of the uncoated part in described applied region.
16. 1 kinds of apparatus for coating, is characterized in that, comprising:
Claim 1 is to the coater unit described in any one in claim 13;
Viewing optics portion, this viewing optics portion is for observing the surface in described applied region; And
Location division, described coater unit is positioned described applied region by this location division.
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| Application Number | Priority Date | Filing Date | Title |
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| JP2013018135 | 2013-02-01 | ||
| JP2013-018135 | 2013-02-01 | ||
| JP2013181191A JP6242122B2 (en) | 2013-02-01 | 2013-09-02 | Coating unit, coating apparatus and coating method using the same |
| JP2013-181191 | 2013-09-02 |
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| CN103962275A true CN103962275A (en) | 2014-08-06 |
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| CN111940229A (en) * | 2019-05-14 | 2020-11-17 | 东京应化工业株式会社 | Coating device and coating method |
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