TW201031968A - Stage for a dispenser and method for controlling movements of the stage and a dispensing head unit in the dispenser - Google Patents

Abstract

There is provided a stage for a dispenser, including, a plate; a plurality of support poles, provided on the plate, on which to mount a substrate; and a compressed-air supply unit supplying compressed air to the lower surface of the substrate, to support the substrate. Physical support of the stage by only the support poles can minimize occurrence of static electricity when the robot lifts up the substrate from the stage. And, there is provided a method for controlling movements of a stage and a dispensing head unit in a dispenser, comprising moving the stage and at the same time moving the dispensing head unit with a nozzle in the direction opposite to the direction in which the stage is moved. Simultaneous movements of the stage and the dispensing head unit in opposite directions enable the stage or the dispensing head unit to travel shorter distance direction than the stage or the dispensing head unit would do otherwise.

Description

201031968 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a platform for a coater and a method for controlling the platform of the coater and the movement of the coating head unit. [Prior Art] Liquid crystal is an intermediate phase between a crystalline solid and an isotropic liquid, and combines some characteristics of a crystal structure and a deformed fluid. Liquid crystal displays (LCDs) utilize the anisotropy associated with the fluidity and crystallization characteristics of liquid crystals. LCD monitors are used in mobile phones, portable computers, desktop monitors, and u:D TVs. The liquid crystal display is composed of a τρτ array substrate and a color filter array substrate which are attached to each other by a glue (or sealant) pattern, and the liquid crystal layer is interposed between the TFT array substrate and the color filter array substrate. By controlling the voltage applied to the liquid crystal layer of each pixel, a different amount of light can be allowed to pass through, thereby generating an image. The manufacture of the liquid crystal display is briefly described below. A plurality of TFT arrays are formed on one of the substrates. The plurality of color calender arrays 2 are formed on another substrate. A seal coater coats the glue to form a glue pattern on either of the two substrates. The glue pattern comprises four linear glues having a corner angle of 9 degrees each having the same length as the opposite. A liquid crystal (LC) coater coats the liquid crystal in a droplet form to a panel region defined by a substrate sizing pattern. The two substrates are combined into a mother substrate. At this time, the two substrates are attached to each other as an adhesive. The mother substrate is subsequently cut into discrete LCd panels. The platform can be provided in a seal coater as well as a liquid crystal coater. For the sake of brevity, a liquid crystal coater (hereinafter referred to as "coater") is used as an example of a coater, and 201031968 is used to illustrate the platform. Figure 1 is a perspective view of an example of a coater. As shown in FIG. 2, the applicator includes a main frame 100, a platform 200, a first driving unit 3A, a coating head unit branch frame 400, a second driving unit 500, a coating head unit 6〇〇, and a Three drive unit 700.

平台 The platform 200 is provided on the main frame 1〇〇, so that the platform 2〇〇 can be moved linearly. The platform 200 can be fixedly provided to the main frame 1〇〇. The first drive unit 3 is provided to the main frame 100. The first driving unit 3 〇〇 moves the platform 2 〇〇. The coating head unit support frame 400 includes two vertical portions 410 spaced apart from each other, and a horizontal portion 42A connected between the upper portions of the two vertical portions 41. The coated unit support frame 400 is provided to the main frame 1〇〇, so that the coating head unit support frame 400 can be linearly moved. The platform 2〇〇 is located between the two vertical portions 41〇. The first driving unit 500 moves the coating head unit support frame 4A. The coating head unit 600 is provided on the horizontal portion 420' of the coating head unit support frame 4'' to allow the coating head unit (4) to be linearly ore. The third driving unit is provided in the horizontal portion of the coating head unit support frame_. The third driving unit 700 moves the coating head unit 6A. The coating head unit support frame 4GG is moved in the γ-axis direction, and the coating unit 600 is moved in the X-axis direction. The coating head unit 600 includes a nozzle (not shown). The 220 shown in Fig. 2 is spaced apart from the bottom plate 21 by a predetermined distance. The platform 200 includes a bottom plate 210, an upper surface combination of one or more support blocks. The support blocks are configured to have a vacuum passage 22 ί internally with respect to each other, and have a plurality of holes 222 connected to the vacuum passage 22I 221 on the upper side. . Vacuum generator (not shown) connected true

As shown in Fig. 4, the substrate G is placed on the upper surface of the support block 22''. The vacuum generator operates to create a vacuum in the working channel 221 and the plurality of holes 222, thereby sucking the lower surface of the substrate tightly to the upper surface of the support block 220. There is a space 223 between the adjacent branch blocks 220. The space 223 is mechanical (not shown) where the substrate G must be positioned on the platform 2 (9) where the substrate G is lifted. The operation of the coater will now be described. The mechanical arm picks up the substrate G, and then places the substrate G on the stage 2〇〇. The vacuum generator operates 'to create a vacuum in the vacuum channel 221 and the plurality of holes 222' thereby sucking the lower surface of the substrate G to the upper side of the support block 22''. As shown in Fig. 3, the -th crane unit 3 (8) moves linearly = the axial direction to the financial distance, and the coating head unit support frame is guaranteed = crystal droplets. ::22〇〇〇〇3 period two coating head unit _ through the nozzle dripping liquid (:) γ axis square / two cloth head early _ (10) moving direction is defined as positively defined as 贞 ^; ^ fine seam cloth fresh elements 6 (8) (four) the direction of the shaft, the second drive, the early 7-inch linear movement coating _ Yu Zheng (10) axis direction to the predetermined distance. When moving, apply g = nozzle to drop the liquid crystal droplets. Platform or coating head unit _ from the direction of Lu = right to the direction of the positive (+) χ axis. Platform ς Unit _ right to left _ direction money is negative (1) X financial head 6 201031968 As shown in Fig. 5, the first driving unit 3 〇〇 linear moving platform 2 〇〇 in the negative (1) Y-axis direction to a predetermined distance. During the movement of the platform 2, the coating head unit 600 drops liquid crystal droplets through the nozzle. As shown in Fig. 6, the third driving unit 7 linearly moves the coating head unit 600 to a positive (+) x-axis direction to a predetermined distance. When moving, the coating head unit 600 drops liquid crystal droplets through the nozzle. As shown in Fig. 7, the first driving unit 3 〇〇 linearly moves the platform 2 to the positive (+) Υ axis direction to a predetermined distance, and the coating head unit support frame 4 〇〇 remains stationary. When moving, the coating head unit _ drops the liquid crystal droplets through the nozzle. As described above, the stage 2 and the coating head unit 6 are moved in a repeated manner until the coating head unit _ drops a predetermined number of liquid crystal droplets onto the respective panel regions defined on the substrate g. The stage 200 and the coating head unit 6 must be moved at high speed in the γ-axis direction and the 轴-axis direction, respectively, to shorten the number of the panel areas defined on the liquid crystal droplet substrate G by the coating head unit. At this time, through the application vacuum, the lower surface of the substrate G must be sucked down tightly to the upper surface of the platform. As a result, the substrate is fixed even when the platform 2 is moving rapidly. However, only the platform 200 moves in the gamma axis direction. Therefore, the longer the distance traveled by the platform 2〇〇 in the x-axis direction, the longer the main frame length 2 of the platform platform 200 must be. This increases the size of the main frame, which in turn increases the size of the applicator. When the flat, table 200 or coating head unit reaches the turning point, it must be greatly slowed down by 2s to leave the turning point, and the speed must be greatly increased. The pinch point is that the platform 200 moving in the Y-axis direction must be stopped and the coating head sheet 7 201031968 starts moving in the x direction, or the axis in the x-axis direction must stop and the platform _ must start moving at γ = 200 or Coating fresh elements (4) because the turning point (four) is larger or increases the speed, and the vibration and the occurrence of impurities _, _ the heavier the weight of the particles, the platform is reducing or increasing the speed of the speed

A drive unit 300 and a third drive unit each require a high capacity horse. This is because the first drive unit _ and the third drive unit 7 (8) must move the platform 200 and the coating head unit 6 分别 at a constant speed. After the vacuum is released from the vacuum passage 221 and the plurality of holes 222 of the support block 200, static electricity is generated when the robot arm lifts the substrate G from the stage 200. SUMMARY OF THE INVENTION It is an object of the present invention to reduce the vibration of a platform as much as possible during a coating operation. Another object of the present invention is to avoid the generation of static electricity when the substrate is lifted from the platform. According to an aspect of the present invention, there is provided a platform for a coater comprising: a triple complex support column provided on a board on which a substrate is mounted, and a compressed air supply unit supplies compressed air to a lower surface of the substrate, To support the substrate. The plate may have an air passage in the interior and a hole in the upper surface, each of the air being connected to each of the holes, and the compressed air supply unit supplies the compressed air to the lower surface of the substrate through the passage and the hole. 8 201031968 Ion-generated Cuiyuan can connect plates and generate ions between the plates and the substrate. The two sides of the coating head include the platform of the coating head and the coating head unit in the direction of movement of the platform; the side: the phase with the nozzle is moved: the coating head unit with the nozzle and the nozzle can be moved separately The phase of the (10) ❿ = = coating head unit having a mouth can be respectively moved in the X-axis direction defined =: the area coated with the cloth head unit drops a predetermined number of liquid crystal droplets onto the substrate, the number of coating head units can be "2" According to another aspect of the invention, the method for moving the head unit comprises: 1 controlling the platform of the coater and the platform of the coated plate in the γ-axis direction U.fr step, moving the coating on the base for the skirt The cloth head unit moves in the platform-pre-step: step, the movement has the mouth = the second two predetermined distance; the third step, the I-axis direction to the coating head unit moves on the platform with the nozzle four steps, the coating of the shaft material The distance; the first distance; and the fifth step two are fortunately from the direction to the sixth pre-four steps, but the last line number repeats the first step to the vanadium step from the first step to the third step. 9 201031968 The panel area defined by the predetermined number of liquids is dropped through the nozzle 'coating head unit.目的 The purpose, characteristics, viewpoints, and advantages of dropping onto the substrate will be more clearly understood by reference to the drawings.

[Embodiment] An example is given. Referring to the details of the preferred embodiment of the present month, and the description of the accompanying drawings, Fan Tuyou, = main frame 100, platform 800, first drive unit 3, coating head early support frame 400, second drive Unit 5_, and third drive unit 7(8). Recording brain 3〇〇, coating head single from the brace frame, second drive unit, coating ^ J;

The foregoing and other detailed descriptions of the present invention and the third driving unit 700 are the same as those described in the "Prior Art". The second cloth machine may further include a fourth driving unit (not _), and (4) the platform is in the 乂 axis direction. As shown in Fig. 8, the platform according to the present invention comprises a plate 81, a plurality of support columns 820, and a compressed air supply unit 83A. The plate 810 has a plurality of grooves 811 on the upper surface. The plurality of grooves 8 ι are arranged to be apart from each other by a predetermined distance. Each groove 811 is a straight line. The depth and width of the groove 811 are uniform.四个 Four support columns 820 are provided at the four corners of the board 810, and each corner is set to 201031968. The upper portion of the support column 820 can be horizontally curved. Top. Lifting the base substrate G by the four support columns or the self-supporting post 820 is mounted on the four support posts 82 820 to support the substrate G ′ to prevent static electricity from occurring when the substrate G plate G is mounted. Each of the pillars 820 can have perforations along its length. In such cases, the plate 810 has a channel' connection __ hole (not shown) connection channel inside. Supply

The lower channel and the lower surface of the support post 820 are drawn down tightly to the vacuum supply unit operation, while a vacuum is created in the perforations in the plate 810. As a result, the substrate G is supported on top of the column 820. A compressed air supply unit 830 is provided on the plate 81A. The plate 81 has an air passage 812 inside, and has a hole 813 on the upper surface, and each air passage 812 connects the holes 813. The compressed air supply unit supplies compressed air to the lower surface of the substrate G through the air passage 812 and the hole 813 to support the substrate g. The compressed air supply unit 830 connects the air passages 812 in the plate 81A. In one example, the compressed air supply unit 83 includes an air compressor 831 and a line 832 that connects the air passages 812. A fan (not shown) can be provided in the main frame 1〇〇. As the compressed air continues to flow out of the aperture of the plate 810 and a swirling vortex occurs around the platform, the fan acts to force the air to circulate naturally. Plate 810 can be coupled to an ion generating unit (not shown). In such a case, the plate 810 has an ion channel 840 inside and has an ion hole in the surface of the above table 201031968, and each ion channel 840 is connected to each ion hole. The ion generating unit is connected to the ion channel 840. The compressed air supply unit 83 passes through the ion channel 84 and the ion hole to supply ions to the lower surface of the substrate G, and (4) the static electricity generated between the robot arm and the substrate G. A first embodiment of a method of controlling the platform of a coater and the movement of a coating head according to the present invention will now be described. The substrate G is mounted on a platform 8A according to the present invention.

The platform 800 moves in the positive (+) γ-axis direction as shown in Fig. 9 'The first driving unit 3 〇〇 the moving platform _ γ is sleeved in the negative (-) Υ axis direction. While the coating head unit 600 is not moved, the platform 800 6 〇〇 moves in the positive (+) γ-axis direction. It may be moved in the negative (-) γ-axis direction, and the number of the coating head unit contending elements may be two or more. _ moves to the positive (the price of the coating head unit 600 drops the liquid crystal coating head unit through the nozzle when the platform moves in the negative (one) Υ axis direction, while the coating head unit 600 is finished in the coating head unit 60 滴After a predetermined number of liquid crystals are dropped onto the panel areas defined on the substrate 12 201031968, the robot arm picks up the substrate G from the platform 8 and transfers the substrate G to the machine of the subsequent program. A first driving unit 300 moves the platform 800 to In the axial direction, the second driving unit 700 moves the coating head unit 6 having the nozzle in the opposite direction of the movement direction of the platform 8. The method for controlling the movement of the coating machine platform and the coating head unit is described. Two embodiments.

The substrate G is mounted on the platform according to the present invention. As shown in FIG. 10, the first driving unit 3 (8) moves the platform _ to the positive (1) Y ^ square ^ - predetermined distance ' while the second driving unit · the mobile coating head frame 400 and the coating The head unit _ in the negative (1) γ-axis direction to the second head unit _ nozzle is just above the substrate G == punctuation (step - step). The first-predetermined distance can be

Crystal moving axis direction 'Knowledge head unit _ drop. When the member () is in the Y-axis direction, the coating head unit passes through the nozzle dripping liquid as shown by 圚U. The level of the frame 400 is Λρ 42 (^: early 7〇0 is supported along the coating head unit to the third predetermined distance (10) Axis direction WX axis step). The coating head unit _ moves in the positive axis direction %, can drop liquid crystal droplets through the nozzle, or can be 13 201031968 ^ shown in FIG. 12 'the third driving unit 3 (8) moves the platform _ at the negative (one) γ distance ' while the second driving unit 500 moves The coating head and the coating head unit are oriented in the positive (+) γ-axis direction to the first

On the other hand, the nozzle of the coated fresh element is set to be positioned above the other target point of the substrate G (third step). The fourth predetermined distance may be the same as the fifth predetermined distance. level. 800 moves in the negative (a) γ-axis direction, while the coating head unit is deleted = in the positive (+) Υ rich direction, the coating material element _ transmitting nozzle drops the liquid crystal droplet 0 as shown in Fig. 13, the third driving unit 7〇 〇 moving the coating head unit 6 along the horizontal (42) axis direction of the coating head unit support frame 400 to a sixth predetermined distance, and the nozzle is fixed to the panel area of the substrate G. Above the other target point (fourth step). When the coating head unit 6 is moved in the positive (+) X-axis direction, the liquid crystal droplets may be dropped through the nozzle, or may not be used. The first step to the fourth step are repeatedly executed a predetermined number of times, but the first step to the third step (fifth step) are performed last time. The predetermined number of times in the fifth step differs depending on the predetermined number of drop panel liquid droplets to the respective panel regions defined on the substrate G. In the second step, the third driving unit 7 can move the coating head unit 6 in the positive (+) x-axis direction to half of the third predetermined distance along the horizontal portion 420 of the coating head unit support frame 400. At the same time, the fourth driving unit (not shown) can move the platform 800 to the negative (a) X-axis direction to half of the third predetermined distance' while the nozzle of the coating head unit 600 is positioned just in the panel area of the substrate 14 14 2010 31968 Above the punctuation. In the fourth step, the third driving unit 700 can move the coating head unit 600 along the horizontal (420) direction of the coating head unit support frame 4 to half of the sixth predetermined distance, and simultaneously The fourth driving unit movable platform 8 is disposed at a negative (-PC axis direction to a half of a sixth predetermined distance, and the nozzle of the coating unit 600 is positioned just above another target point of the panel region of the substrate G. '' The number of the coating head units 600 may be one or more. The coating head unit 600 finishes dropping a predetermined number of liquid crystal droplets onto the panel areas defined on the substrate, and the robot arm is from the platform 8〇〇 Pick up the substrate G and transfer the substrate G to the machine of the subsequent program. The platform 800 and the coating head unit 6〇〇 can be moved linearly or curvedly. The method for controlling the movement of the coating machine platform and the coating head unit will now be described. Third Embodiment The third embodiment includes a first step, a second step, and a third step. The first to third steps in the third embodiment are the same as the first to third steps in the second embodiment Therefore, for the sake of brevity, A description of the first to third steps of the third embodiment. A fourth embodiment of a method of controlling the movement of the coating machine platform and the coating head unit will now be described. The fourth embodiment comprises a first step and a second step. The third step, the fourth step, and the fifth step. In the fourth actual step, the first step to the fourth step 15 201031968 are the same as the first step to the fourth step in the second embodiment. Therefore, for the sake of simplicity The description of the first to fourth steps of the fourth embodiment is omitted. In the fifth step, only the first step is performed again. Step by step, the platform and the coating head unit for controlling the coater according to the present invention are explained. The advantages of the method of moving.

The platform 800 and the coating head unit _ ah move in the direction of the γ-axis direction, so that the platform or the coating head is simpler than the platform and the coating head unit _ eight of the - non-moving platform and coating head unit _, marching Shorter distance. The main frame 1 of the support platform _ can be manufactured to have a smaller size because the platform surface travels a shorter distance in the γ-axis direction than the conventional platform. Furthermore, the platform 800 and the coating head unit _ can be moved at a lower speed than only one of them, and the nozzle of the coating head _ is positioned just above the fascia of the panel area of the substrate because of the platform _ and the coating head Single = 6 〇〇 in the opposite direction - half of the predetermined series. The low speed of the platform _ and 涂: yuan _, so that there is a small degree of vibration when reaching or leaving the turning point: thus, avoiding the generation of particles due to the platform _ wear, and avoiding the liquid crystal bribe because the mouth of the coating head unit 6 (8) is shaken Wrong ρ 巧 = unit: the low speed 'make the first drive unit 3 〇〇, the second drive: =, and 苐 three drive private scales should require a smaller capacity " platform surface and coating head unit _ When moving at a high speed, the coating head drops a predetermined amount of liquid crystal droplets to less than % of each panel of the substrate G. The four support posts 82G cut the substrate g to avoid static electricity when the substrate 16 is mounted on the top of the four support columns 820 or the support columns 820 are lifted from the four support posts 820. While the present invention may be embodied in many forms without departing from the spirit and essential characteristics thereof, it should be understood that the invention is not limited to the details of the description, but should be in the spirit of the appended claims. And the scope and spirit of the scope of the invention and the equivalents and modifications of the scope of the scope of the invention are intended to be encompassed. Attached to the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings are included to provide a In the drawings: Figure 1 is a perspective view of a coating machine example; φ Figure 2 is a perspective view of a conventional platform of a coater; Figures 3 to 7 are diagrams showing a platform cloth head unit when the coater is operated by a conventional method; Figure 8 is a front view of a platform embodiment of the coater according to the present invention (4); Figure 9 is a view showing a moving direction of the stage and the coating head unit of the method for operating the coater by the present invention; FIG. 1A to FIG. 13 are diagrams showing the movement direction of the platform and the coating head unit when the embodiment of the present invention is used, and FIG. 13 is a diagram showing the method and the coating head for performing the coating machine using the present invention. An enlarged view of the direction in which the unit moves. , 17 201031968

[Main component symbol description] 100 Main frame 200 Platform 210 Base plate 220 Support block 221 Vacuum channel 222 Sub L 223 Space 300 First drive unit 400 Coating head unit Branch frame 410 Vertical portion 420 Horizontal 500 Second drive unit 600 Coating Head unit 700 third drive unit 800 platform 810 plate 811 groove 812 air channel 813 hole 820 support column 830 compressed air supply unit 831 air compressor 832 line 840 ion channel G substrate 18

Claims (1)

201031968 VII. Patent application scope: 1. A coating machine platform comprising: a plate; a plurality of support columns 'provided on the plate for mounting a substrate; and a compressed air supply unit for supplying compressed air To the lower surface of the substrate 'to support the substrate. 2. The platform of claim 1, wherein the plate has an air passage in the !! ° 卩 and the hole is on the upper surface, each air passage is connected to each hole, and the compressed air supply unit is provided through the passage and the hole. Air should be compressed to the lower surface of the substrate. 3. The platform of claim 1, wherein an ion generating unit is coupled to the plate to generate ions between the plate and the substrate. 4. Including the Γ Γ 涂布 - coating machine - platform and - coating fresh element shift _ method, the package platform 2 has a nozzle of the coating head unit and the 5 yuan 1 a method for controlling the platform of the coating machine and the single movement of the coating head, wherein the platform and the control coating machine having the spray movement in the direction of the x-axis and the opposite direction of the cloth are as described in the second paragraph The platform and the coating _ moving in the X-axis direction of the phase:: 2 and the coating head unit having the nozzle respectively comprise a method for controlling a platform of a coating machine and a unit crane, package 19 201031968 a first step Moving the platform on which a substrate is mounted to a first predetermined distance in the γ-axis direction, and simultaneously moving the coating head unit having a nozzle in a direction opposite to the moving direction of the platform to a second predetermined distance; a second step of moving the coating head unit having the nozzle to a third predetermined distance in the X-axis direction; a second step of moving the platform in a direction opposite to the moving white of the platform in the first step to a fourth predetermined distance, and at the same time moving the tool Have the nozzle The coating head unit 70 is in the opposite direction of the moving direction of the platform to the first direction; a fourth step of moving the coating head unit having the nozzle to the sixth predetermined distance in the X-axis direction; and a fifth In the step, the first step to the fourth step are repeatedly performed a predetermined number of times, but the first step to the third step are performed last time. 8. The method for controlling the platform and the coating head of the controlled cloth machine according to claim 7, wherein in the second step, the coating having the nozzle is changed. The platform and coating head of the control coating machine described in item 7 are in the fourth step of 'moving the coating movement with the nozzle==:= the coating head unit having the nozzle and the cloth head coating The head unit moves to the positive (ten) γ axis = nozzle - the platform and the coating with the nozzle: 20 201031968 Negative:: the coating machine - the platform and a coating head unit moving method To the -Lth pre-action on which the platform for mounting the substrate is in the positive (+) 单元 unit in the direction of the coating head (_) γ wheel direction and positive (+) γ axis direction The axis direction is to the coating head unit of the nozzle to the home distance, and simultaneously move the sleeve direction to - fourth predetermined to - fifth predetermined distance. The coating head is in the direction of the positive WY axis twenty one