KR101309269B1 - Improved Coating Apparatus and Coating Method - Google Patents

Abstract

The present invention discloses an improved coating apparatus and coating method.
The coating apparatus according to the present invention comprises: a jig provided with a plurality of accommodating parts accommodating a plurality of substrates and a plurality of discharging ports provided under the plurality of accommodating parts, for discharging the plurality of substrates; A suction table on which the jig is mounted; A nozzle device located on the suction table, for completely applying a coating liquid onto the plurality of substrates; And a gantry for mounting the nozzle device and reciprocating the nozzle device on the jig.

Description

Improved Coating Apparatus and Coating Method

The present invention relates to an improved coating apparatus and coating method.

More specifically, the present invention utilizes a jig for accommodating a plurality of substrates of a specific size and also applies a coating liquid onto the plurality of substrates in a front coating, divided coating, intermittent coating, and divided and intermittent coating methods, thereby providing various substrates. Improved coating apparatus and coating methods capable of fabricating substrates corresponding to size, eliminating dead areas of the substrate, significantly reducing overall manufacturing cost and time, and easily responding to market / consumer preferences or preferences. It is about.

In general, a flat panel display (FPD) including PDP, LCD, OLED, etc. is used to manufacture a flat panel display (FPD) using a nozzle dispenser or slit die nozzle (hereinafter referred to as "nozzle device") on a substrate such as glass. A coating apparatus for applying a coating liquid to the is used.

More specifically, FIG. 1A is a schematic illustration of a table coating apparatus used to manufacture a flat panel display (FPD).

Referring to FIG. 1A, in a table coating apparatus 100 (hereinafter referred to as a "coating apparatus") used to manufacture a flat panel display (FPD), the substrate G is placed on a suction table 112. After moving the nozzle device 120 attached to the gantry 125 in the horizontal direction, for example, to form a pixel consisting of R, G, B cells formed on the substrate (G) or The coating method of the coating liquid including the operation | movement which apply | coats the protective coating layer for protecting the some coating layer formed in the board | substrate G sequentially, etc. is used.

More specifically, in order to apply the coating liquid onto the substrate G, the substrate G must first be transferred onto the suction table 112. Thereafter, the substrate G is maintained on the suction table 112 by an adsorption unit (not shown) formed in the suction table 112 and a vacuum device (not shown) connected to the adsorption unit. Thereafter, the coating liquid is applied onto the substrate G through the nozzle portion 122 formed below the nozzle device 120.

FIG. 1B is a plan view and a side view schematically showing the coating apparatus shown in FIG. 1A.

Referring to FIG. 1B, in the coating method using the coating apparatus 100 according to the related art, the coating liquid is applied to the front surface of the nozzle apparatus 120 to form the coating layer 130 while moving in the direction of the arrow on the substrate G. When the whole surface coating of coating liquid is completed, the board | substrate G is cut | disconnected to a required size and the some panel P is obtained. More specifically, for example, when the substrate G is a high definition TV (HDTV), a plurality of panels for the TV are obtained by cutting to a required size (for example, 40 inches, 50 inches, 60 inches, etc.), In the case of a touch screen panel (TSP) for a smartphone such as an iPhone (i-pon) using Direct Patterned Window (DPW) technology, a plurality of touch screen panels (TSP) are cut by cutting to a required size. ) Is obtained. In the present specification, a plurality of TV panels or a plurality of touch screen panels (TSPs) will be collectively referred to as a panel (P).

In the above-described prior art, after applying the coating liquid onto the substrate G using the nozzle apparatus 120 in a state where the substrate G is positioned on the suction table 112, it is necessary to cut it to the required size. The same problem occurs.

1. For example, in the case of a mobile phone liquid crystal panel, not only one manufacturer (for example, Samsung Electronics) but also various manufacturers (for example, Samsung Electronics, Motorola, Nokia, etc.) It is done. In order to mass-produce liquid crystal panels of various sizes, expensive manufacturing facilities including coating devices 100 different from each other by size of liquid crystal panels should be used. Therefore, a separate manufacturing facility must be used for each size of the various types of liquid crystal panels, thereby greatly increasing the overall manufacturing cost.

2. In the prior art, since the front coating method is used on the substrate G, the coating liquid must be applied over the entire area of the substrate G. After that, since only a plurality of panels P cut into the final product are used, as shown in FIG. 1B, a dead area (DR) of the substrate G is generated. The substrate G is an expensive component, and the manufacturing cost increases considerably due to the occurrence of such a dead region DR.

In addition, the unnecessary coating liquid 131 applied on the dead region DR should be removed after being removed using a separate cleaning process. Therefore, a separate cleaning process for removing unnecessary coating liquid 131 on the dead region DR and disposal of the coating liquid 311 further increase manufacturing cost and manufacturing time.

3. As described above, even though panels of various sizes are manufactured using expensive individual manufacturing facilities, the final product (eg, high-definition TV or smartphone, etc.) is successfully sold according to the preference or preference of the market / consumer. If not, the existing expensive individual manufacturing equipment is not available for the production of panels of different sizes. Therefore, the coating apparatus 100 and the coating method using the same according to the prior art are not suitable for use in the production of panels of various sizes in small quantities and various types in terms of productivity and business feasibility.

Therefore, a new method for solving the above-mentioned problems is required.

SUMMARY OF THE INVENTION The present invention is directed to solving at least one or more of the problems of the prior art described above, using a jig for accommodating a plurality of substrates of a particular size, and also in the form of front coating, split coating, intermittent coating, and split and intermittent coating. By coating the coating liquid on a plurality of substrates, it is possible to manufacture a substrate corresponding to various substrate sizes, to eliminate dead areas of the substrate, to significantly reduce the overall manufacturing cost and time, and to facilitate the preference or preference of the market / consumer It is an object of the present invention to provide an improved coating apparatus and coating method that can be easily responded to.

According to a first aspect of the present invention, a coating apparatus includes: a jig provided with a plurality of accommodating parts accommodating a plurality of substrates and a plurality of discharging ports provided under the plurality of accommodating parts, for discharging the plurality of substrates; A suction table on which the jig is transportably mounted; A nozzle device located on the suction table, for completely applying a coating liquid onto the plurality of substrates; A gantry mounted with the nozzle device, for reciprocating the nozzle device on the jig; And a transfer device for transferring the jig for subsequent operation when the application of the coating liquid onto the plurality of substrates is completed.

According to a second aspect of the present invention, there is provided a coating apparatus, including: a jig having a plurality of accommodating parts accommodating a plurality of substrates and a plurality of discharging ports provided under the plurality of accommodating parts, for discharging the plurality of substrates; A suction table on which the jig is transportably mounted; A nozzle device positioned on the suction table and having a plurality of nozzle portions for separately applying the coating liquid to form a plurality of coating layers along the application direction of the coating liquid onto the plurality of substrates; A gantry mounted with the nozzle device, for reciprocating the nozzle device on the jig; And a transfer device for transferring the jig for subsequent operation when the application of the coating liquid onto the plurality of substrates is completed.

According to a third aspect of the present invention, there is provided a coating apparatus, comprising: a jig having a plurality of accommodation portions accommodating a plurality of substrates and a plurality of outlets provided under the plurality of accommodation portions and for discharging the plurality of substrates; A suction table on which the jig is transportably mounted; A nozzle device positioned on the suction table and intermittently applying the coating solution onto the plurality of substrates to form a plurality of coating layers along a direction perpendicular to the coating direction of the coating solution; A gantry mounted with the nozzle device, for reciprocating the nozzle device on the jig; And a transfer device for transferring the jig for subsequent operation when the application of the coating liquid onto the plurality of substrates is completed, wherein the nozzle device includes a front end portion of the plurality of substrates along a column direction of the plurality of substrates. Immediately before and immediately after the rear end is characterized in that the starting and discharging of the coating liquid are sequentially performed.

According to a fourth aspect of the present invention, a coating apparatus includes: a jig provided with a plurality of accommodating parts accommodating a plurality of substrates and a plurality of outlets provided under the plurality of accommodating parts, for discharging the plurality of substrates; A suction table on which the jig is transportably mounted; A nozzle device disposed on the suction table and having a plurality of nozzle portions for dividing and intermittently applying a coating liquid to form a coating layer on the plurality of substrates, respectively; A gantry mounted with the nozzle device, for reciprocating the nozzle device on the jig; And a transfer device for transferring the jig for subsequent operation when the application of the coating liquid on the plurality of substrates is completed, wherein the nozzle apparatus includes the coating liquid to have respective widths in the column directions of the plurality of substrates. The coating is applied, and at the same time, immediately before the front end and immediately after the rear end of the plurality of substrates, the starting and discharging of the coating liquid are sequentially performed.

According to a fifth aspect of the present invention, there is provided a coating method comprising the steps of: a) receiving a plurality of substrates into a plurality of receiving portions provided in a jig; b) mounting the jig on a suction table; c) applying a coating solution onto the plurality of substrates while reciprocating the nozzle device on the jig using a gantry mounted on the suction table and equipped with a nozzle device; And d) when the coating of the coating liquid is completed on the plurality of substrates, transferring the jig for subsequent operation.

Using the improved coating apparatus and coating method according to the invention the following advantages are achieved.

1. Small quantity of various kinds of panels of various sizes can be easily manufactured.

2. In order to manufacture panels of various sizes, only the jig which can accommodate substrates for panels of different sizes needs to be replaced, so the installation cost of manufacturing equipment is greatly reduced. In addition, since only one manufacturing facility needs to be installed to manufacture panels of various sizes, the cost required for the entire manufacturing facility is significantly reduced compared to the prior art in which the installation of individual manufacturing facilities is required for each panel size.

3. Since the jig containing a plurality of substrates is used, unlike the prior art, the dead area of the substrate does not occur, so the manufacturing cost is significantly reduced. In addition, since the use of the divided coating method, the intermittent coating method, and the divided and intermittent coating method, in addition to the front coating method, unnecessary use of the coating liquid is reduced, minimized or eliminated, thereby further reducing manufacturing cost and manufacturing time.

4. Even if the market / consumer's preferences or preferences change, it is very easy to manufacture panels of different sizes through jig replacement, so that they can easily respond in terms of productivity and business.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

1A is a schematic illustration of a coating apparatus used to fabricate a flat panel display (FPD).
A plan view and one side view schematically showing the coating apparatus shown in FIG. 1A.
2A is a plan view and a side view schematically showing a coating apparatus according to a first embodiment of the present invention.
2B is a plan view and a side view schematically showing a coating apparatus according to a second embodiment of the present invention.
Figure 2c is a plan view and one side view schematically showing a coating apparatus according to a third embodiment of the present invention.
Figure 2d is a plan view and a side view schematically showing a coating apparatus according to a fourth embodiment of the present invention.
3 is a flowchart showing a coating method according to an embodiment of the present invention.

Hereinafter, the present invention will be described in detail with reference to embodiments and drawings.

The coating apparatus 200 according to all embodiments of the present invention described below with reference to FIGS. 2A to 2D uses a jig 240 for receiving a plurality of substrates Ga, Gb, and Gc, and various coating solutions. The prior art coating apparatus shown in Figs. 1A and 1B, except that a coating method (specifically, any one of a front coating method, a divided coating method, an intermittent coating method, and a divided and intermittent coating method) is used. It should be noted that it is substantially the same as (100). In addition, in the coating apparatus 200 according to all embodiments of the present invention, it should be noted that the plurality of substrates Ga, Gb, and Gc correspond to the panel P of the prior art shown in FIGS. 1A and 1B. do.

In addition, in the embodiment of the present invention shown in FIGS. 2A to 2D to be described later, Ga, Gb, and Gc, which are reference numerals representing a plurality of substrates, will be collectively referred to as G when necessary.

2A is a plan view and a side view schematically showing a coating apparatus according to a first embodiment of the present invention.

Referring to FIG. 2A together with FIGS. 1A and 1B, a coating apparatus 200 according to a first embodiment of the present invention may include a plurality of receiving portions 242 and a plurality of receiving portions 242 for receiving a plurality of substrates Ga, Gb, and Gc. A jig 240 provided below the plurality of accommodation parts 242 and having a plurality of discharge ports 244 for discharging the plurality of substrates Ga, Gb, and Gc; A suction table 212 to which the jig 240 is transportably mounted; A nozzle device (220) positioned on the suction table (212) for applying the coating liquid to the entire surface to form a coating layer (230) on the substrates (Ga, Gb, Gc); And the nozzle device 220 is mounted, and includes a gantry 125 for reciprocating the nozzle device 220 on the jig 240.

Hereinafter, each configuration and operation of the coating apparatus 200 according to the first embodiment of the present invention will be described in detail.

Referring again to FIG. 2A in conjunction with FIGS. 1A and 1B, the coating apparatus 200 according to the first embodiment of the present invention includes a jig 240 having a plurality of receiving portions 242. In the plurality of housing portions 242 of the jig 240, a plurality of substrates G corresponding to panels of a required size are accommodated. For example, when the production of panels of different sizes is required, it is obvious that a jig 240 having a plurality of receiving portions 242 adapted to the size of the substrate G corresponding to the panel size should be used.

In addition, the jig 240 according to the first embodiment of the present invention is a plurality of substrates (Ga, Gb, Gc) from the jig 240 after the coating of the coating solution is completed on the plurality of substrates (Ga, Gb, Gc) A plurality of outlets 244 are provided in the lower portion of the plurality of receiving portion 242 to discharge. The reason why the plurality of discharge ports 244 are provided under the plurality of accommodation parts 242 is that the plurality of substrates Ga, Gb, and Gc are adsorbed from the upper surface by using, for example, vacuum or the like. This is to prevent the coating layer 230 formed by the coating liquid applied on (Ga, Gb, Gc) from being damaged.

Meanwhile, the jig 240 accommodating the plurality of substrates Ga, Gb, and Gc is mounted on the suction table 212. The nozzle device 220 mounted on the gantry 125 may reciprocate on the jig 240 by the gantry 125. The nozzle apparatus 220 moves on the jig 240 along the arrow direction to apply a coating liquid onto the plurality of substrates Ga, Gb, and Gc to form the coating layer 230.

In addition, in the coating apparatus 200 according to the first embodiment of the present invention, the coating liquid is applied by the front coating method. In this case, the nozzle device 220 has a value equal to or larger than the width W2 of the plurality of substrates Ga, Gb, and Gc along a direction perpendicular to the coating direction of the coating liquid (direction perpendicular to the arrow direction in FIG. 2A). And a nozzle portion 222 having a width W1. Therefore, in the coating apparatus 200 according to the first embodiment of the present invention, the dead region DR does not occur with respect to the plurality of substrates Ga, Gb, and Gc. Unnecessary coating liquid 231 is applied.

2B is a plan view and a side view schematically showing a coating apparatus according to a second embodiment of the present invention.

Referring to FIG. 2B together with FIGS. 1A and 1B, the coating apparatus 200 according to the second embodiment of the present invention may include a plurality of accommodating parts 242 accommodating a plurality of substrates Ga, Gb, and Gc. A jig 240 provided below the plurality of accommodation parts 242 and having a plurality of discharge ports 244 for discharging the plurality of substrates Ga, Gb, and Gc; A suction table 212 to which the jig 240 is transportably mounted; Located on the suction table 212, the coating liquid is divided onto the plurality of substrates Ga, Gb, and Gc to form a plurality of coating layers 230a, 230b, and 230c along a coating direction of the coating liquid. Nozzle device 220; And the nozzle device 220 is mounted, and includes a gantry 125 for reciprocating the nozzle device 220 on the jig 240.

The coating apparatus 200 according to the second embodiment of the present invention described above is the first embodiment of the present invention illustrated in FIG. 2A except that a divided coating method is used for a plurality of substrates Ga, Gb, and Gc. It is substantially the same as the coating apparatus 200 according to the embodiment. Therefore, hereinafter, the divided coating method of the coating apparatus 200 according to the second embodiment of the present invention will be described in detail.

Referring again to FIG. 2B along with FIGS. 1A and 1B, in the coating apparatus 200 according to the second embodiment of the present invention, the coating liquid is applied in a split coating manner. In this case, the nozzle device 220 includes a plurality of nozzle portions 222a, 222b, and 222c. In the embodiment of FIG. 2B, three nozzle parts 222a, 222b, and 222c are exemplarily illustrated. However, those skilled in the art will appreciate that the number of nozzle parts 222a, 222b, and 222c may include a plurality of substrates Ga, It will be understood that less than three or more than four may correspond to the number of the column directions (direction perpendicular to the arrow direction in FIG. 2B) of Gb, Gc).

Meanwhile, the widths of the nozzles 222a, 222b, and 222c respectively correspond to the widths Wa, Wb, and Wc of the plurality of substrates Ga, Gb, and Gc along a direction perpendicular to the coating direction of the coating liquid. Have the same or larger value. Therefore, since the coating apparatus 200 according to the second embodiment of the present invention uses the divided coating method, the dead region DR does not occur for the plurality of substrates Ga, Gb, and Gc, but on the jig 240. Unnecessary application of the coating liquid 231 is performed along the coating liquid application direction. In this case, the amount of unnecessary coating liquid 231 on the jig 240 according to the second embodiment of the present invention is less than the amount of unnecessary coating liquid 231 on the jig 240 according to the first embodiment of the present invention. Self-explanatory

Figure 2c is a plan view and one side view schematically showing a coating apparatus according to a third embodiment of the present invention.

Referring to FIG. 2C together with FIGS. 1A and 1B, the coating apparatus 200 according to the third exemplary embodiment of the present invention may include a plurality of receiving portions 242 that accommodate a plurality of substrates Ga, Gb, and Gc. A jig 240 provided below the plurality of accommodation parts 242 and having a plurality of discharge ports 244 for discharging the plurality of substrates Ga, Gb, and Gc; A suction table 212 to which the jig 240 is transportably mounted; The coating solution is positioned on the suction table 212 to form a plurality of coating layers 230a, 230b, and 230c along a direction perpendicular to the coating direction of the coating solution onto the substrates Ga, Gb, and Gc. A nozzle device 220 for intermittent application; And the nozzle device 220 is mounted, and includes a gantry 125 for reciprocating the nozzle device 220 on the jig 240.

The coating apparatus 200 according to the third embodiment of the present invention described above is the first embodiment of the present invention shown in FIG. 2A except that an intermittent coating method is used for the plurality of substrates Ga, Gb, and Gc. It is substantially the same as the coating apparatus 200 according to the embodiment. Therefore, hereinafter, the intermittent application method of the coating apparatus 200 according to the third embodiment of the present invention will be described in detail.

Referring back to FIG. 2C together with FIGS. 1A and 1B, in the coating apparatus 200 according to the third embodiment of the present invention, the coating liquid is applied in an intermittent application manner. In this case, the width W1 of the nozzle unit 222 of the nozzle apparatus 220 is a plurality of substrates Ga, Gb, Gc along the direction perpendicular to the coating direction of the coating liquid (the direction perpendicular to the arrow direction in FIG. 2C). Has a value equal to or greater than the width W2.

On the other hand, the nozzle device 220 starts discharging the plating liquid immediately before the front end of the first column substrates Ga1, Gb1, Gc1 among the plurality of substrates Ga, Gb, Gc through the nozzle unit 222, and Discharge of the coating liquid is stopped immediately after the rear ends of the single-row substrates Ga1, Gb1, Gc1. Thereafter, the nozzle apparatus 220 continues to move by the gantry 125, and the front end of the second row substrates Ga2, Gb2, and Gc2 of the plurality of substrates Ga, Gb, and Gc through the nozzle unit 222. Immediately before the discharge of the coating liquid, and immediately after the rear end of the second row substrates Ga2, Gb2, and Gc2, the discharging of the coating liquid is stopped. Thereafter, the nozzle apparatus 220 continues to move by the gantry 125, and the front end of the third row substrates Ga3, Gb3, and Gc3 of the plurality of substrates Ga, Gb, and Gc through the nozzle unit 222. Immediately before the discharge of the coating liquid, the discharging of the coating liquid is stopped immediately after the rear end of the third row substrates Ga3, Gb3, and Gc3. That is, the nozzle device 220 immediately before and immediately after the rear end of the plurality of substrates Ga, Gb and Gc along the column direction of the plurality of substrates Ga, Gb and Gc perpendicular to the coating direction of the coating liquid. Starts and discharges of the coating liquid in sequence. This coating liquid coating method is called an intermittent coating method. In FIG. 2C, a plurality of substrates Ga, Gb, and Gc are exemplarily illustrated as having three rows, but those skilled in the art will appreciate that the plurality of substrates Ga, Gb, and Gc may have two or fewer columns or four or more columns. It will be understood that it can have. The coating apparatus 200 according to the third embodiment of the present invention may further include a controller (not shown) in which a control program for controlling the start and stop of discharging the coating liquid according to the intermittent coating method is incorporated. Such a controller (not shown) may be implemented by, for example, a microprocessor or a personal computer (PC), and the control program may be programmed in advance.

In the coating apparatus 200 according to the third embodiment of the present invention as described above, the dead region DR does not occur with respect to the plurality of substrates Ga, Gb, and Gc. Unnecessary application of the coating liquid 231 is performed on the 240. In this case, the amount of unnecessary coating liquid 231 on the jig 240 according to the third embodiment of the present invention is less than the amount of unnecessary coating liquid 231 on the jig 240 according to the first embodiment of the present invention. Self-explanatory

Figure 2d is a plan view and a side view schematically showing a coating apparatus according to a fourth embodiment of the present invention.

Referring to FIG. 2D together with FIGS. 1A and 1B, the coating apparatus 200 according to the fourth exemplary embodiment of the present invention may include a plurality of accommodating parts 242 accommodating a plurality of substrates Ga, Gb, and Gc. A jig 240 provided below the plurality of accommodation parts 242 and having a plurality of discharge ports 244 for discharging the plurality of substrates Ga, Gb, and Gc; A suction table 212 to which the jig 240 is transportably mounted; A nozzle device (220) positioned on the suction table (212) for dividing and intermittently applying a coating solution to form a coating layer (230) on the plurality of substrates (Ga, Gb, Gc); And the nozzle device 220 is mounted, and includes a gantry 125 for reciprocating the nozzle device 220 on the jig 240.

In the coating apparatus 200 according to the fourth embodiment of the present invention described above, a division and intermittent coating method is used for a plurality of substrates Ga, Gb, and Gc. It is substantially the same as the coating apparatus 200 according to the first embodiment. Therefore, hereinafter, the division and intermittent application of the coating apparatus 200 according to the fourth embodiment of the present invention will be described in detail.

Referring again to FIG. 2D in conjunction with FIGS. 1A and 1B, in the coating apparatus 200 according to the fourth embodiment of the present invention, the coating liquid is applied in a divided and intermittent application manner. In this case, the nozzle part of the nozzle apparatus 220 is comprised by the some nozzle part 222a, 222b, 222c similarly to the case of FIG. 2B. In the embodiment of FIG. 2D, three nozzle parts 222a, 222b, and 222c are exemplarily illustrated, but those skilled in the art will appreciate that the number of nozzle parts 222a, 222b, and 222c may include a plurality of substrates Ga, It will be fully understood that less than three or more than four may correspond to the number of column directions (direction perpendicular to the arrow direction in FIG. 2D) of Gb, Gc).

Meanwhile, the widths of the nozzles 222a, 222b, and 222c respectively have widths Wa and Wb in the column direction (the direction perpendicular to the arrow direction in FIG. 2D) of the substrates Ga, Gb, and Gc. Has a value equal to or greater than Wc).

In the coating apparatus 200 according to the fourth embodiment of the present invention described above, the nozzle apparatus 220 proceeds along the coating direction (the arrow direction in FIG. 2D) of the coating liquid, and the plurality of substrates Ga, Gb, and Gc. Immediately before each front end of each of the first column (Ga1, Gb1, Gc1) to the third column (Ga3, Gb3, Gc3) of the first through the plurality of nozzles (222a, 222b, 222c) to start the discharge of the coating liquid Discharge of the coating liquid is stopped immediately after each rear end of each of the first row (Ga1, Gb1, Gc1) to the third row (Ga3, Gb3, Gc3). That is, in the fourth embodiment of the present invention, each of the widths Wa, Wb, and Wc in the column direction of the plurality of substrates Ga, Gb, and Gc is along the direction perpendicular to the coating direction of the coating liquid. The coating liquid is applied in a divided coating method so as to have a length, and at the same time, to each length L1, L2, L3 of the row direction (arrow direction in FIG. 2D) of the plurality of substrates Ga, Gb, Gc along the coating direction of the coating liquid. The coating liquid is applied by an intermittent coating method. Such a coating liquid application method is called a division | segmentation and an intermittent application method. The coating apparatus 200 according to the fourth embodiment of the present invention may further include a controller (not shown) in which a control program for controlling the start and stop of discharging the coating liquid according to the division and intermittent coating methods is incorporated. . Such a controller (not shown) may be implemented by, for example, a microprocessor or a personal computer (PC), and the control program may be programmed in advance.

In addition, in the fourth embodiment of the present invention illustrated in FIG. 2D, each of the widths of the plurality of nozzle parts 222a, 222b, and 222c has a width Wa in the column direction of the plurality of substrates Ga, Gb, and Gc. It is exemplarily shown that the coating liquid is intermittently applied over the respective lengths L1, L2, L3 in the row direction of the plurality of substrates Ga, Gb, Gc, having the same value as Wb and Wc. However, those skilled in the art will have a larger value than the respective widths Wa, Wb, and Wc in the column direction of the plurality of substrates Ga, Gb, and Gc. It will be fully understood that the coating liquid may be intermittently applied slightly beyond the respective lengths L1, L2, L3 in the row direction of the plurality of substrates Ga, Gb, Gc.

In the coating apparatus 200 according to the fourth embodiment of the present invention as described above, since the dead region DR does not occur for the plurality of substrates Ga, Gb, and Gc, and the division and intermittent coating methods are used, the jig Application of unnecessary coating liquid on 240 is minimized or eliminated. Therefore, it is obvious that the fourth embodiment of the present invention is the most preferred embodiment.

The coating apparatus 200 according to the first to fourth embodiments of the present invention as described above, when the application of the coating liquid on the plurality of substrates Ga, Gb, and Gc is completed, the jig 240 is suction table 212. May further include a transfer device (not shown) for transferring for subsequent operation. Such a transfer device (not shown) may be implemented with, for example, a robotic arm, and moves another jig (not shown) on the suction table 212 in which another plurality of substrates (not shown) is accommodated. Thereafter, the coating apparatus 200 may perform the coating operation of the coating liquid as described above with respect to another plurality of substrates on another jig.

In addition, the coating apparatus 200 according to the first to fourth embodiments of the present invention is connected to the plurality of outlets 244 to inject air into the plurality of outlets 244 of the jig 240 transferred by the transfer apparatus. It may further include an air supply pipe and an air blower (air blower) or a lifting device (not shown) having a plurality of lifting bars (bar) that can be lifted in the plurality of outlets (244). The plurality of substrates Ga, Gb, and Gc may be separated from the jig 240 by an air injection operation using an air supply pipe and a blower or a lifting operation of a plurality of lifting bars using a lifting device. Then, as shown in FIGS. 2A to 2C, in the case of the first to third embodiments of the present invention, the unnecessary plating liquid 231 remaining on the jig 240 is removed through a cleaning process, and another plurality of substrates are removed. (Not shown) is received on the jig 240. The jig 240 can then be moved back onto the suction table 212 and used to apply the plating liquid onto another plurality of substrates (not shown).

In addition, the jig 240 used in the coating apparatus 200 according to the first to fourth embodiments of the present invention is a glass material; Metal materials such as steel, stainless steel, or aluminum (Al); And a non-metallic material such as PTFE (poly-tetrafluoroethylene) resin (trade name: Teflon).

Meanwhile, as shown in FIG. 2D, since the unnecessary coating liquid remaining on the jig 240 does not substantially exist in the fourth embodiment of the present invention, the cleaning process of the jig 240 is also unnecessary. Thus, after another plurality of substrates (not shown) are immediately received on the jig 240, the jig 240 is moved back onto the suction table 212 to deposit the plating solution on another plurality of substrates (not shown). Can be used to apply.

As described in detail above, in the present invention, since the jig 240 that can accommodate the plurality of substrates Ga, Gb, and Gc of a predetermined size is used, the plating liquid is applied onto the plurality of substrates Ga, Gb, and Gc. The dead region DR is not generated during application, and unlike the prior art, the cutting process of the substrate is unnecessary after the application of the coating liquid is completed.

Meanwhile, in the case of the second and third embodiments of the present invention shown in FIGS. 2B and 2C, the coating liquid is applied in a divided coating method and an intermittent coating method, respectively, so that the coating liquid 231 is unnecessary compared to the front coating method. The amount is reduced. In addition, in the case of the fourth embodiment of the present invention shown in FIG. 2D, since the coating is applied in a divided and intermittent coating method, use of unnecessary coating liquid 231 is minimized or eliminated as compared to the front coating method.

3 is a flowchart showing a coating method according to an embodiment of the present invention.

Referring to FIG. 3 together with FIGS. 1A, 1B, and 2A to 2D, the coating method 300 according to an embodiment of the present invention may include a) a plurality of receiving portions 242 provided in the jig 240. Receiving (310) a plurality of substrates (Ga, Gb, Gc) into the substrate; b) mounting (320) the jig (240) on the suction table (212); c) The plurality of substrates (Ga) located on the suction table 212 and reciprocating the nozzle device 220 on the jig 240 using the gantry 125 on which the nozzle device 220 is mounted. (330) applying a coating liquid onto Gb, Gc); And d) transferring the jig 240 for subsequent operation when the coating of the coating liquid is completed on the plurality of substrates Ga, Gb, and Gc (340).

The coating method 300 according to the embodiment of the present invention described above may further include e) separating the plurality of substrates Ga, Gb, and Gc from the plurality of receiving portions 242. Can be. In this case, step e) is an operation of injecting air or an air blower using an air supply pipe and an air blower connected to a plurality of outlets 244 provided below the plurality of accommodation portions 242. It can be performed by the lifting operation of the elevating member having a plurality of lifting bars (bar) corresponding to the outlet 244 of the.

In addition, in the coating method 300 according to an embodiment of the present invention described above, the coating liquid in the step c) is any one of a front coating method, a split coating method, an intermittent coating method, and a split and intermittent coating method. Can be done.

In addition, in the case of the intermittent application method or the division and intermittent application method, the discharge start and discharge stop of the coating liquid can be controlled by a controller (not shown) in which a control program is embedded.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

100,200: coating apparatus 112,212: suction table
120,220: nozzle apparatus 125: gantry 222,222a, 222b, 222c: nozzle part
230,230a, 230b, 230c: coating layer 131,231: unnecessary coating liquid
240 Jig 242 Receiving part 244 Outlet G, Ga, Gb, Gc: Substrate
DR: Dead area P: Panel W, Wa, Wb, Wc: Nozzle part width

Claims (18)

In the coating apparatus,
A jig provided with a plurality of accommodating parts accommodating a plurality of substrates and a plurality of discharging ports provided under the plurality of accommodating parts for discharging the plurality of substrates;
A suction table on which the jig is transportably mounted;
A nozzle device located on the suction table, for completely applying a coating liquid onto the plurality of substrates;
A gantry mounted with the nozzle device, for reciprocating the nozzle device on the jig; And
Transfer device for transferring the jig for subsequent operation when the application of the coating liquid on the plurality of substrates is complete
Coating device comprising a. The method of claim 1,
And the nozzle apparatus includes a nozzle part having a width equal to or greater than the width of the plurality of substrates along a direction perpendicular to the coating direction of the coating liquid. In the coating apparatus,
A jig provided with a plurality of accommodating parts accommodating a plurality of substrates and a plurality of discharging ports provided under the plurality of accommodating parts for discharging the plurality of substrates;
A suction table on which the jig is transportably mounted;
A nozzle device positioned on the suction table and having a plurality of nozzle portions for separately applying the coating liquid to form a plurality of coating layers along the application direction of the coating liquid onto the plurality of substrates;
A gantry mounted with the nozzle device, for reciprocating the nozzle device on the jig; And
Transfer device for transferring the jig for subsequent operation when the application of the coating liquid on the plurality of substrates is complete
Coating device comprising a. The method of claim 3, wherein
And the plurality of nozzle portions have a width equal to or larger than the respective widths Wa, Wb, and Wc of the plurality of substrates in a direction perpendicular to the coating direction of the coating liquid. In the coating apparatus,
A jig provided with a plurality of accommodating parts accommodating a plurality of substrates and a plurality of discharging ports provided under the plurality of accommodating parts for discharging the plurality of substrates;
A suction table on which the jig is transportably mounted;
A nozzle device positioned on the suction table and intermittently applying the coating solution onto the plurality of substrates to form a plurality of coating layers along a direction perpendicular to the coating direction of the coating solution;
A gantry mounted with the nozzle device, for reciprocating the nozzle device on the jig; And
Transfer device for transferring the jig for subsequent operation when the application of the coating liquid on the plurality of substrates is complete
Lt; / RTI >
The nozzle apparatus sequentially discharges the coating liquid and stops discharging immediately after the front end and immediately after the rear end of the plurality of substrates along the column direction of the plurality of substrates.
Coating device. 6. The method of claim 5,
And the nozzle apparatus includes a nozzle part having a width equal to or greater than the width of the plurality of substrates along a direction perpendicular to the coating direction of the coating liquid. delete 6. The method of claim 5,
The coating apparatus further includes a controller in which a program for controlling the start and stop of the coating liquid is embedded. In the coating apparatus,
A jig provided with a plurality of accommodating parts accommodating a plurality of substrates and a plurality of discharging ports provided under the plurality of accommodating parts for discharging the plurality of substrates;
A suction table on which the jig is transportably mounted;
A nozzle device positioned on the suction table for dividing and intermittently applying a coating solution to form a coating layer on the plurality of substrates, respectively;
A gantry mounted with the nozzle device, for reciprocating the nozzle device on the jig; And
Transfer device for transferring the jig for subsequent operation when the application of the coating liquid on the plurality of substrates is complete
Lt; / RTI >
The nozzle device includes a plurality of nozzle portions having the same width as each of the plurality of substrates along a direction perpendicular to the coating direction of the coating liquid,
The nozzle apparatus sequentially starts discharging and discontinuing discharging of the coating liquid immediately before and immediately after the front end and the rear end of the plurality of substrates.
Coating device. delete delete The method of claim 9,
The coating apparatus further includes a controller in which a program for controlling the start and stop of the coating liquid is embedded. The method according to any one of claims 1, 3, 5, and 9,
The coating apparatus further includes an air supply pipe and a blower connected to the plurality of outlets to inject air into the plurality of outlets of the jig conveyed by the transfer device, or a plurality of elevable within the plurality of outlets. Coating apparatus further comprising a lifting device having a lifting bar (bar) of. The method according to any one of claims 1, 3, 5, and 9,
The jig is a glass material; Metal materials such as steel, stainless steel, or aluminum (Al); And a non-metallic material such as PTFE (poly-tetrafluoroethylene) resin. In the coating method,
a) receiving a plurality of substrates into a plurality of receiving portions provided in the jig;
b) transportably mounting said jig on a suction table;
c) applying a coating solution onto the plurality of substrates while reciprocating the nozzle device on the jig using a gantry mounted on the suction table and equipped with a nozzle device; And
d) transferring the jig for subsequent operation when the application of the coating liquid onto the plurality of substrates is complete;
≪ / RTI > 16. The method of claim 15,
The coating method further comprises e) separating the plurality of substrates from the plurality of receptacles. 17. The method of claim 16,
The step e) has an operation of injecting air by using an air supply pipe and a blower connected to a plurality of outlets provided in the lower portion of the plurality of accommodation units, or a plurality of lifting bars corresponding to the plurality of outlets. A coating method performed by the elevating operation of one elevating member. The coating method according to any one of claims 15 to 17, wherein the coating of the coating liquid in the step c) is performed by any one of a front coating method, a divided coating method, an intermittent coating method, and a divided and intermittent coating method.

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