JP2008080231A - Conveyance base - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a conveyance base capable of easily conveying a plurality of coating needles and a plurality of containers at a time. <P>SOLUTION: This conveyance base is provided with a conveyance base block 1 and a coating needle holder fixing plate 2. The fixing plate 2 includes four magnets M4 for holding four coating needle holders 4. The conveyance base block 1 includes two magnets M2 for holding the fixing plate 2, and four magnets M1 for holding four ink containers 5. As a result, four coating needles 3 and the four ink containers 5 can easily be conveyed at a time. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a transport table, and more particularly to a transport table for transporting a plurality of application needles and a plurality of containers for correcting a defect by applying a liquid material to a fine region on a substrate.

  In recent years, with the increase in size and resolution of LCDs (liquid crystal displays), the number of pixels has increased, making it difficult to manufacture LCDs without defects, and the probability of occurrence of defects has also increased. Under such circumstances, in order to improve the yield, a defect correcting device for correcting defects generated in the manufacturing process of the color filter of the LCD has become indispensable for the production line.

  12A to 12C are diagrams showing defects that occur in the manufacturing process of the color filter of the LCD. 12A to 12C, the color filter includes a transparent substrate, a lattice pattern called a black matrix 51 formed on the surface thereof, a plurality of sets of R (red) pixels 52, and G (green). A pixel 53 and a B (blue) pixel 54. In the manufacturing process of the color filter, the white defect 55 in which the color of the pixel or the black matrix 51 is lost as shown in FIG. 12A, or the color of the adjacent pixel is mixed as shown in FIG. 12B. Or a black defect 56 in which the black matrix 51 protrudes from the pixel, or a foreign substance defect 57 in which a foreign substance adheres to the pixel as shown in FIG.

  As a method of correcting the white defect 55, an ink having the same color as that of the pixel in which the white defect 55 exists is attached to the tip of the application needle by the ink application mechanism, and the ink attached to the tip of the application needle is applied to the white defect 55. There is a method to correct by applying. Further, as a method of correcting the black defect 56 and the foreign object defect 57, after the defective portion is laser-cut to form a rectangular white defect 55, the ink applied to the tip of the application needle is removed by the ink application mechanism. There is a method in which the defect 55 is applied and corrected.

  FIG. 13 is a partially omitted perspective view showing the configuration of a conventional ink application mechanism. In FIG. 13, the ink application mechanism includes an application needle 61 for applying ink and an application needle drive cylinder 62 for driving the application needle 61 vertically. The application needle 61 is provided at the tip of the drive shaft 63 of the application needle drive cylinder 62 via the application needle holder 64 and the fixed base 65.

  In addition, the ink application mechanism includes a rotary table 66 provided horizontally, and a plurality of ink tanks 67 to 70 are sequentially arranged on the rotary table 66 in the circumferential direction. A device 71 and an air purge device 72 are provided. A rotating shaft 73 is erected at the center of the rotary table 66. Further, the rotary table 66 is formed with a notch 74 for allowing the application needle 61 to pass when ink is applied. R (red), G (green), B (blue), and black ink are appropriately injected into the ink tanks 67 to 70, respectively. The cleaning device 71 is for removing ink attached to the application needle 61, and the air purge device 72 is for blowing off the cleaning liquid attached to the application needle 61.

  Further, the ink application mechanism includes an index motor 75 for rotating the rotary shaft 73 of the rotary table 66, an index plate 76 that rotates together with the rotary shaft 73, and the rotation of the rotary table 66 via the index plate 76. An index sensor 77 for detecting the position and an origin return sensor 78 for detecting that the rotational position of the rotary table 66 has returned to the origin via the index plate 76 are provided. The motor 75 is controlled based on the outputs of the sensors 77 and 78, and rotates the rotary table 66 so that any one of the notch 74, the ink tanks 67 to 70, the cleaning device 71, and the air purge device 72 is placed below the application needle 61. Position.

  Next, the operation of this ink application mechanism will be described. First, the tip of the application needle 61 is positioned at a predetermined position above the defective portion of the color filter substrate by a positioning device (not shown). Next, the rotary table 66 is rotated by the motor 75, and a desired ink tank (for example, 67) is moved below the application needle 61. Next, the application needle 61 is driven up and down by the application needle drive cylinder 62, and ink is attached to the tip of the application needle 61.

  Next, the rotary table 66 is rotated by the motor 75, and the notch 74 is moved below the application needle 61. Next, the application needle 61 is driven up and down by the application needle driving cylinder 62, and the ink adhering to the tip of the application needle 61 is applied to the defective portion of the color filter substrate.

  When cleaning the application needle 61, the rotary table 66 is rotated by the motor 75, and the cleaning device 71 is moved below the application needle 61. Next, the application needle 61 is driven up and down by the application needle driving cylinder 62, and the ink adhering to the application needle 61 is washed. Next, the rotary table 66 is rotated by the motor 75, and the air purge device 72 is moved below the application needle 61. Next, the application needle 61 is driven up and down by the application needle drive cylinder 62, and the cleaning liquid adhering to the application needle 61 is blown off.

FIG. 14A is a plan view of the cleaning device 71, and FIG. 14B is a cross-sectional view of the cleaning device 71. 14A and 14B, the cleaning device 71 includes a cleaning container 82 that stores the cleaning liquid 81, a lid 83 of the cleaning container 82, and an agitation blade 84 that agitates the cleaning liquid 81 in the cleaning container 82 to enhance the cleaning effect. And a motor 85 that rotationally drives the stirring blade 84. A small hole is opened in the lid 83. The application needle 61 is immersed and cleaned in the cleaning liquid 81 through a small hole (see, for example, Patent Document 1).
JP 9-236933 A

  However, in the conventional ink application mechanism, since only one application needle 61 is provided, it is necessary to clean the application needle 61 every time the color of ink to be applied changes, and the correction tact becomes longer due to this cleaning time. There was a problem to say.

  As a countermeasure, four sets of application needles 61 and ink tanks are provided corresponding to the four colors of ink to eliminate the cleaning process of the application needles 61 when changing the color of the applied ink, and from the ink application mechanism to the cleaning device 71. A method of reducing the size of the ink application mechanism by removing the air purge device 72 can be considered.

  However, even in this method, it is necessary to periodically clean or replace the application needle 61 and replenish or replace the ink in the ink tank. In this case, in the method in which the application needle and the ink tank are individually transferred from the correction device to the work table and from the work table to the defect correction device, the transfer work becomes complicated and takes time, and it is dropped during the transfer. There is a possibility of damaging the application needle and the ink tank.

  Therefore, a main object of the present invention is to provide a transport table that can easily transport a plurality of application needles and a plurality of containers at a time.

  A transport table according to the present invention includes a plurality of application needles for applying a plurality of liquid materials, and a plurality of containers for storing a plurality of liquid materials, respectively. In a liquid material coating apparatus for coating a material on a fine region on a substrate, a plurality of first magnets for holding a plurality of coating needles, each of which is a transport table for transporting a plurality of coating needles and a plurality of containers And a plurality of second magnets for holding a plurality of containers, respectively.

  Preferably, each of the plurality of application needles is erected on the plurality of application needle holders, each of the plurality of application needle holders is fixed with a plurality of third magnets, and each of the plurality of third magnets is attracted to each of the plurality of first magnets. The plurality of applicator needles are held on the carriage, and each of the plurality of containers is provided with a plurality of ink container fixing pins, and each of the plurality of ink container fixing pins is attracted to each of the plurality of second magnets. It is held on the transfer table.

Preferably, a protective wall for protecting a plurality of application needles is provided.
Preferably, the apparatus includes a transport base block to which a plurality of second magnets are fixed, and an application needle holder fixing plate that is detachably provided on the transport base block and to which the plurality of first magnets are fixed.

  Further preferably, the fourth magnet is fixed to the transport table block, the fifth magnet is fixed to the application needle holder fixing plate, the fifth magnet is attracted to the fourth magnet, and the application needle holder fixing plate is held by the transport table block. Is done.

  In the transport table according to the present invention, a plurality of first magnets for holding a plurality of application needles, respectively, and a plurality of second magnets for holding a plurality of containers, respectively. Therefore, a plurality of application needles and a plurality of containers can be conveyed at a time. In addition, since each of the application needle and the container is held by a magnet, it can be easily attached and detached, and the possibility of dropping during transportation is low.

  FIG. 1 (a) is a plan view showing a configuration and a method of using a transport table according to an embodiment of the present invention, FIG. 1 (b) is a front view thereof, and FIG. 1 (c) is a side view thereof. It is. 1A to 1C, the transport table includes a transport table block 1 and an application needle holder fixing plate 2. The application needle holder fixing plate 2 is detachably held on the surface of the transport block 1.

  The application needle 3 is erected perpendicularly to one corner of the application needle holder 4 on the flat plate. The four application needle holders 4 are detachably held on the application needle holder fixing plate 2. The ink container 5 is provided with a rectangular holding part 6, and an ink container fixing pin 7 is fixed to the holding part 6. The four ink containers 5 are detachably held on the surface of the transport block 1 via the holding unit 6 and the ink container fixing pin 7.

  2A is a plan view showing the configuration of the transport block 1, FIG. 2B is a front view thereof, and FIG. 2C is a side view thereof. 2A to 2C, an ink container escape groove 10 is formed along one side of the surface of the transport block 1, and four ink container positioning pins 11 are provided along the ink container escape groove 10. The ink container fixing magnet M1 is embedded between the ink container positioning pins 11 and the ink container escape groove 10 with the surface exposed, and is opposed to each magnet M1 with the groove 10 interposed therebetween. Ink container positioning pins 12 are erected.

  As shown in FIGS. 1A and 1B, grooves 6 a having substantially the same diameter as the pins 11 and 12 are formed on both end surfaces of the holding portion 6 of the ink container 5. When the holding portion 6 is inserted between the pins 11 and 12 so that the ink container positioning pins 11 and 12 are inserted into the grooves 6a at both ends of the holding portion 6, the ink container fixing pin 7 exposed on the back surface of the holding portion 6 is magnetized. While being adsorbed by M1, the bottom of the ink container 5 is inserted into the ink container escape groove 10. In this way, each ink container 5 is held on the transport table.

  Also, as shown in FIGS. 2A to 2C, the application needle storage groove 13 deeper than the length of the application needle 3 along one side opposite to the ink container escape groove 10 on the surface of the transport block 1. Is formed. A portion between the application needle storage groove 13 and one side of the surface of the transport block 1 serves as an application needle guard (protective wall) 14 that protects the application needle 3. The application needle guard 14 is formed with a plurality (two in the figure) of notches for making it easier to attach and detach the application needle 3.

  An application needle holder fixing plate fixing portion 15 is recessed along the groove 13 on the opposite side of the application needle storage groove 13 from the application needle guard 14. The application needle holder fixing plate fixing portion 15 has a shape obtained by scraping the surface of the transport block 1 by the width and thickness of the application needle holder fixing plate 2, and the end surface on the long side of the fixing plate 2 is brought into contact therewith. And an end surface E2 with which the end surface on the short side of the fixing plate 2 is brought into contact. In addition, two application needle holder fixing plate fixing magnets M2 are embedded in the bottom surface of the application needle holder fixing plate fixing portion 15 with their surfaces exposed.

  3A is a diagram showing the configuration of the application needle holder 4, FIG. 3B is a plan view showing the configuration of the application needle holder fixing plate 2, and FIG. 3C is four application needle holders. 4 is a plan view showing the application needle holder fixing plate 2 holding 4, FIG. 3 (d) is a front view of FIG. 3 (c), and FIG. 3 (e) is a bottom view of FIG. 3 (c). .

  As shown in FIG. 3A, the application needle 3 is erected perpendicularly to one corner of the surface of the application needle holder 4, and the surface of the application needle holder 4 is exposed by the magnet M3 for application needle holder. It is buried in the state.

  Moreover, as shown in FIG.3 (b), the three application needle holder fixing | fixed parts 16-18 are recessedly provided by the predetermined space | interval along the long side of the surface of the application needle holder fixing plate 2. As shown in FIG. Each of the application needle holder fixing portions 16 to 18 has a shape obtained by scraping the surface of the fixing plate 2 by the thickness of the application needle holder 4, a bottom surface with which the surface of the application needle holder 4 comes into contact, and an application needle An end surface E3 on which the end surface on the short side of the holder 4 abuts and an end surface E4 on which the end surface on the long side of the applicator needle holder 4 abuts are formed. The application needle holder fixing portions 16 and 18 are each embedded with an application needle holder fixing magnet M4 with the surface exposed one by one, and the application needle holder fixing 17 includes two application needle holder fixing magnets M4. It is buried with the surface exposed.

  As shown in FIGS. 3 (c) and 3 (d), the application needle holder fixing portions 16 and 18 hold one application needle holder 4 one by one, and the application needle holder fixing portion 17 holds two application needle holders 4. Is done. Each application needle holder 4 has an application needle holder fixing plate due to the attraction between the application needle holder magnet M3 embedded in the surface thereof and the application needle holder fixing magnet M4 embedded in the corresponding application needle holder fixing portion. 4 is fixed.

  At this time, as shown in FIG. 4, the center of the application needle holder magnet M3 and the center of the application needle holder fixing magnet M4 are deviated by a predetermined distance. Thereby, the centripetal force F1 between the magnets M3 and M4 acts in the direction of the arrow in FIG. 4, and the application needle holder 4 is fixed in a state of being pressed against the two end faces E3 and E4 of the application needle holder fixing plate 2. .

  Here, the centripetal force of the magnets M3 and M4 will be described. As shown in FIGS. 5A to 5D, when the magnets M3 and M4 are brought close to a distance where the N pole of the magnet M3 and the S pole of the magnet M4 are attracted by the magnetic attractive force, the magnet M3 comes out of the N pole. The magnetic flux goes straight to the S pole of the magnet M4. Moreover, the force which tries to shrink | contract also acts on magnetic flux so that the stretched rubber thread may have the force to shrink. Due to this force, the magnets M3 and M4 whose centers are shifted from each other tend to move to positions where their centers coincide. This power is called centripetal power.

  Returning to FIG. 3 (e), two application needle holder fixing plate fixing magnets M <b> 5 are embedded on the back surface of the application needle holder fixing plate 2 with their surfaces exposed. The application needle holder fixing plate 4 has an adsorption force between an application needle holder fixing plate fixing magnet M5 embedded in the back surface thereof and an application needle holder fixing plate fixing magnet M2 embedded in the surface of the transport block 1. It is fixed to the carrier block 1.

  At this time, as shown in FIG. 6, the center of the magnet M2 and the center of the magnet M5 are configured to be shifted by a predetermined distance. Thereby, the centripetal force F2 between the magnets M2 and M5 acts in the direction of the arrow in FIG. 6, and the application needle holder fixing plate 2 is fixed in a state of being pressed against the two end surfaces E1 and E2 of the transport table block 1.

  The application needle holder 4 is fixed to the transport block 1 via the application needle holder fixing plate 2 when the application needle 3 is cleaned by an application needle cleaning mechanism (not shown). This makes it possible to transfer from the transport table to the application needle cleaning mechanism. Thereby, shortening of the application needle transfer time at the time of washing | cleaning is also attained.

  As described above, according to the present embodiment, the four application needle holders 4 and the four ink containers 5 can be mounted on the transport table and transported at a time. Therefore, the complexity of conveyance at the time of replacement | exchange of the application needle 3 and the ink container 5 is eliminated, and work efficiency improves. In addition, since the application needle holder 4 and the ink container 5 are fixed to the transport table with magnets, they do not fall due to vibration during transport. In addition, since the application needle guard 14 is provided on the transport table, the tip of the application needle 3 is not hit and damaged during the transport.

  In this embodiment, the four application needle holders 4 and the four ink containers 5 are transported in a lump. However, the number of these is not limited to four and may be less than four. Also good.

  FIGS. 7A to 7C are diagrams showing a configuration and a usage method of a transport table according to a modified example of this embodiment, and are compared with FIGS. 1A to 1C. FIGS. 8A to 8C are views showing the configuration of the transport block, and are compared with FIGS. 2A to 2C.

  With reference to FIGS. 7 (a) to (c) and FIGS. 8 (a) to (c), the difference between this conveyance table and the conveyance table of the above embodiment is that the application needle holder fixing plate 2 is removed. The application needle holder fixing portions 16 to 18 are formed directly on the surface of the transport block 1 along the application needle storage groove 13. The four application needle holders 4 are directly mounted on the surface of the transport block 1. Even in this modified example, the same effect as the embodiment can be obtained.

  FIG. 9 is a diagram showing a main part of the defect correcting apparatus provided with four coating needles 3 for R, G, B and black. In FIG. 9, the defect correcting apparatus includes an observation optical system 22 including an optical barrel 20 and an objective lens 21. The observation optical system 22 is mounted on the Z-axis table 23. The liquid crystal color filter substrate 24 to be corrected is mounted on an XY table (not shown) facing the objective lens 21. The objective lens 21 is moved to an arbitrary position on the surface of the substrate 24 by moving the substrate 24 in the XY direction (horizontal direction) by the XY table and moving the observation optical system 22 in the Z-axis direction (vertical direction) by the Z-axis table 23. It is possible to observe by enlarging and focusing.

  An ink application mechanism 25 is also mounted on the Z-axis table 23. As shown in FIGS. 10A and 10B, the ink application mechanism 25 includes four application units 26 to 29 for R, G, B, and black, and the application units 26 and 27 are mounted on the X1 table 30. The coating units 28 and 29 are mounted on an X2 table 31, and as shown in FIG. 9, the tables 30 and 31 are mounted on a Z-axis table 32, and the Z-axis table 32 is mounted on a Y-axis table 33.

  The application needle 3 selected for application is moved by the Y-axis table 33 so that the application needle 3 is positioned at the same position as the Y-direction position of the defect position to be applied, and then selected by the Z-axis table 32. Any of the application units 26 to 29 including the applied application needle 3 is lowered in the vertical direction so that it can be inserted under the objective lens 21, and the application needle 3 is applied at the same position as the X-direction position of the defect position where application is performed. The X1 table 30 or the X2 table 31 on which any of the application units 26 to 29 including the selected application needle 3 is moved in the direction of the objective lens 21 so that the objective lens 21 and the substrate 24 are It is possible to insert between them.

  The coating unit 26 includes two arms 40 and 41 as shown in FIGS. The application needle holder 4 is attached to the tip of the arm 40, the ink container 5 is attached to the tip of the arm 41, and the application needle 3 is inserted into the ink container 5.

  As shown in FIG. 11, a hole 5 a is opened at the bottom of the ink container 5, and the ink 43 is injected. The hole 5a is set to a small size so that the ink 43 does not flow out. A holding portion 6 is provided on a side portion of the ink container 5, and an ink container fixing pin 7 for fixing the ink container 5 to the distal end portion of the arm 41 via a magnet (not shown). Is provided. The opening of the ink container 5 is closed with a lid 45, and a hole 45 a is opened in the lid 45.

  The application needle 3 has a stepped shape including a small diameter portion 3b on the tip 3a side and a large diameter portion 3c fixed to the application needle holder 4, and the diameter of the small diameter portion 3b is the diameter of the hole 5a of the ink container 5. The diameter of the large diameter portion 3c is set slightly smaller than the diameter of the hole 45a of the lid 45.

  10A and 10B, the base end portion of the arm 41 is supported by the slide mechanism 46 so as to be vertically movable at the center portion of the arm 40, and the base end portion of the arm 40 is supported by the slide mechanism 47. It is supported so that it can move up and down. A stopper 49 that restricts the downward movement of the arms 40 and 41 is provided at the lower end of the support base 48, and a cylinder 50 that moves the lower end of the base end of the arm 40 up and down is mounted on the support base 48. .

  Next, the operation of this defect correction apparatus will be described. During standby, the arm 40 is held at the upper limit position by the cylinder 50, and the arm 41 is hung from the arm 40. At this time, the vertical distance between the arms 40 and 41 is the maximum, and the tip 3a of the application needle 3 is immersed in the ink 43 as shown in FIG.

  When a defect is found in the substrate 24 by the observation optical system 22, the ink 43 necessary for correcting the defect is selected. If the selected ink 43 is injected into the ink container 5 of the application unit 26, for example, the tables 30 to 33 are controlled so that the application needle 3 of the application unit 26 is placed between the objective lens 21 and the defect on the substrate 24. insert.

  Next, the arms 40 and 41 are lowered to the lower limit position by the cylinder 50 of the coating unit 26. At this time, the arm 41 contacts the stopper 49 before the arm 40, the vertical distance between the arms 40, 41 is minimized, and the tip 3a of the application needle 3 penetrates the hole 5a of the ink container 5. If the Z-axis table 32 is further lowered in the vertical direction, the tip 3a of the application needle 3 comes into contact with the defect. Ink 43 is attached to the tip 3a of the application needle 3 protruding from the bottom of the ink container 5, and the ink 43 is applied to the defect to correct the defect. When the Z-axis table 32 is raised in the vertical direction and the arms 40 and 41 are raised to the upper limit position by the cylinder 50, the tip 3a of the application needle 3 is accommodated in the ink container 5 as shown in FIG. The defect correction ends.

  In such an ink application mechanism 25, it is not necessary to wash the application needle 3 every time the color of the ink 43 to be applied is changed as in the prior art, but if the ink 43 in the ink container 5 is insufficient or deteriorated, the application needle 3 is applied. It is necessary to remove the needle holder 4 and the ink container 5, clean the application needle 3 and the ink container 5, and replenish or replace the ink 43. At this time, a work table for cleaning the application needle and replenishing and replacing the ink is prepared, and the application needle 3 and the ink container 5 are transported from the defect correcting apparatus to the work table. It becomes necessary to transport the container 5 from the work table to the defect correcting device. However, the operator cannot carry the four application needles 3 and the four ink containers 5 at the same time, and it is necessary to carry them in a plurality of times, which makes the work complicated and takes time. The transport table of the present invention solves such a problem and can easily transport the four application needles 3 and the four ink containers 5 collectively as described above.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

It is a figure which shows the structure and usage method of the conveyance stand by one Embodiment of this invention. It is a figure which shows the structure of the conveyance stand block shown in FIG. It is a figure which shows the structure and usage method of the applicator needle holder fixing plate shown in FIG. It is a figure which shows the centripetal force between the magnets M3 and M4 shown in FIG. It is a figure for demonstrating the centripetal force shown in FIG. It is a figure which shows the centripetal force between the magnets M2 and M5 shown in FIG. 2 and FIG. It is a figure which shows the example of a change of embodiment. It is a figure which shows the structure of the conveyance stand block shown in FIG. It is a figure which shows the principal part of the defect correction apparatus which uses the four application needles shown in FIG. It is a figure which shows the structure of the application | coating unit shown in FIG. It is sectional drawing which shows the structure of the ink container shown in FIG. It is a figure which shows the defect which generate | occur | produces in a liquid crystal color filter substrate. It is a figure which shows the structure of the ink application | coating mechanism which corrects the white defect shown in FIG. It is a figure which shows the structure of the washing | cleaning apparatus shown in FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Carriage block, 2 Application needle holder fixing plate, 3,61 Application needle, 3a tip part, 3b Small diameter part, 3c Large diameter part, 4 Application needle holder, 5 Ink container, 5a Hole, 6 Holding part, 6a Groove, 7 Ink container fixing pin, 10 Ink container escape groove, 11, 12 Ink container positioning pin, 13 Application needle storage groove, 14 Application needle guard, 15 Application needle holder fixing plate fixing part, 16-18 Application needle holder fixing part, M1 -M5 magnet, E1-E4 end face, 20 optical lens barrel, 21 objective lens, 22 observation optical system, 23, 32 Z-axis table, 24 liquid crystal color filter substrate, 25 ink coating mechanism, 26-29 coating unit, 30 X1 table , 31 X2 table, 33 Y-axis table, 40, 41 arm, 43 ink, 45 lid, 45a hole, 46, 47 slice 48 mechanism, 48 support base, 49 stopper, 50 cylinder, 51 black matrix, 52 R pixel, 53 G pixel, 54 B pixel, 55 white defect, 56 black defect, 57 foreign object defect, 62 coating needle drive cylinder, 63 drive shaft , 64 Application needle holder, 65 Fixed base, 66 Rotary table, 67 to 70 Ink tank, 71 Cleaning device, 72 Air purge device, 73 Rotating shaft, 74 Notch, 75 Motor, 76 Index plate, 77 Index sensor, 78 Origin Return sensor, 81 cleaning liquid, 82 cleaning container, 83 lid, 84 stirring blade, 85 motor.

Claims (5)

A plurality of application needles each for applying a plurality of liquid materials; and a plurality of containers each containing the plurality of liquid materials, wherein any one of the plurality of liquid materials is finely formed on a substrate. In a liquid material application apparatus for applying to a region, a conveying table for conveying the plurality of application needles and the plurality of containers,
A plurality of first magnets each for holding the plurality of application needles;
A transport table comprising a plurality of second magnets for holding the plurality of containers. Each of the plurality of application needles is erected on a plurality of application needle holders,
A plurality of third magnets are respectively fixed to the plurality of application needle holders,
The plurality of third magnets are respectively attracted to the plurality of first magnets, and the plurality of application needles are held on the transport table,
Each of the plurality of containers is provided with a plurality of ink container fixing pins,
The transport table according to claim 1, wherein the plurality of ink container fixing pins are attracted to the plurality of second magnets, and the plurality of containers are held on the transport table.   The conveyance stand according to claim 1, further comprising a protective wall for protecting the plurality of application needles. A transport block on which the plurality of second magnets are fixed;
The application needle holder fixing plate, which is detachably provided on the transport table block and on which the plurality of first magnets are fixed, is provided, according to any one of claims 1 to 3. Transport table. A fourth magnet is fixed to the carriage block;
A fifth magnet is fixed to the application needle holder fixing plate,
5. The transport table according to claim 4, wherein the fifth magnet is attracted to the fourth magnet and the application needle holder fixing plate is held by the transport table block.

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