JP2011174862A - Substrate holding device and defect correction device using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate holding device that can hold a substrate by a simpler structure, and to provide a defect correction device to which the substrate holding device is applied. <P>SOLUTION: In the defect correction device 1, a pair of substrate end supporting tables 3 is arranged on which a glass substrate 99 is placed. In a region sandwiched by the pair of substrate end supporting tables 3, a plurality of roller mechanisms 4 for supporting the substrate are provided to support the glass substrate 99 from the lower part. A substrate suction table 26 is fitted to the roller mechanism 4 for supporting the substrate in order to suck the lower surface of the placed glass substrate 99 and hold it. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a substrate holding device and a defect correction device using the same, and more particularly to a substrate holding device that sucks and holds a substrate, and a defect correction device that corrects a pattern defect using such a substrate holding device. It is about.

  In the manufacturing process of a liquid crystal display, a defect may occur in a fine pattern formed on a substrate. In particular, defects that occur in the color filter process include a defect called a white defect in which the color of a pixel is lost and a defect called a black defect in which the color of a pixel is mixed. In addition, there is a foreign matter defect in which foreign matter or the like adheres to the surface of the pixel.

  In the defect correction apparatus, the substrates are aligned based on the inspection result data obtained in advance by the inspection apparatus. Next, the operator confirms the size and shape of the defect by the observation optical system and determines the correction condition. At this time, it is indispensable to grasp the state of the defect by irradiating the defect with predetermined light and observing the transmitted light transmitted through the substrate. In addition, observation with transmitted light is indispensable in order to confirm the corrected state after correcting the defect.

  Here, a general defect correction apparatus provided with an observation optical system using such transmitted light will be described. As shown in FIG. 27, in the defect correction apparatus 101, an illumination light source 103 that emits predetermined light toward the substrate is disposed below the transparent stage 102 on which the substrate is mounted. Above the stage 102, an observation optical system 104 for observing transmitted light that has passed through the substrate is disposed.

  In recent years, in order to cope with an increase in the screen size of a liquid crystal display, the size of a glass plate (mother glass) used has increased, and for example, a glass plate of 2850 × 3050 mm has been used. In order to correct a defect generated in a glass plate having such a size, a size larger than the size of the glass plate is required as the stage size of the defect correcting device. As this stage, a transparent glass plate is usually employed. However, the thickness and size of the glass plate are also limited, and it is becoming difficult to form a stage with a single glass plate.

  Recently, a stage in which a plurality of glass plates are connected has been proposed. However, in such a stage, when observing with transmitted light, a portion where the glass plate and the glass plate are joined may become a shadow, and accurate observation may not be performed. Further, in order to fix the substrate to the stage, it is necessary to form a vacuum suction groove on the glass plate serving as the stage. However, this groove may also obstruct the observation by being shaded when observing with transmitted light.

  Further, when a substrate is carried in or out of the defect correction apparatus, the substrate is often delivered by a robot hand. As shown in FIG. 28, in a stage 102 using a transparent glass plate as a stage, a through hole is provided in the stage (glass plate) 102, and a lifter pin 111 is provided so as to be able to be inserted into the through hole. . When the substrate is carried in, the following operation is performed.

  First, the lifter pin 111 is protruded from the through hole of the stage 102. Next, the substrate 199 is disposed above the lifter pins. Next, the robot hand 110 is lowered to place the substrate 199 on the lifter pin 111. Next, the robot hand 110 is further lowered to retract the robot hand 110. Then, the lifter pin is lowered to place the substrate on the stage. On the other hand, when the substrate is carried out, an operation opposite to the above-described operation is performed.

  In the defect correction apparatus to which such a substrate holding device is applied, it is necessary to incorporate a mechanism for operating the lifter pin for transferring the substrate into the substrate holding device, which is structurally complicated. Further, it is necessary to synchronize the operation of the lifter pin and the operation of the robot hand, and there is a limit to shortening the time for transferring the substrate.

  As a defect correction apparatus that solves the above problems, Patent Document 1 proposes a defect correction apparatus to which a substrate holding apparatus that does not use a transparent stage is applied. Since the substrate holding device of this defect correction apparatus does not use a transparent stage, the entire surface of the substrate can be observed with transmitted light. Further, since a transparent stage is not used, a mechanism for delivering the substrate is not required when the substrate is carried in or out of the substrate holding device, and the substrate delivery operation is relatively simple. In other words, the time required for delivery of the substrate can be shortened.

JP 2009-2928 A

  However, the substrate holding device of the conventional defect correcting apparatus described above has the following problems. In the substrate holding apparatus, a method of supporting a substrate with a large number of support members is employed instead of using a transparent stage. That is, an adsorption stand is installed below the substrate, and the support member is separated from the substrate by contacting the contact portion installed on the adsorption table with the cam roller on the support member side, and the adsorption stand is placed below the substrate through the gap. A moving method is adopted.

  For this reason, it is necessary to form the shape of the contact portion with a complicated curved surface in order to mitigate the impact when the contact portion of the suction stand and the cam roller on the support member side come into contact. In addition, in order to adjust the return speed of the support member according to the position of the support member, it is necessary to adjust the strength according to each position using a spring or a shock absorber. As a result, there is a problem that the mechanism and the adjustment work become very complicated.

  The present invention has been made to solve the above-described problems, and one object is to provide a substrate holding apparatus that can hold a substrate with a simpler structure, and another object is to provide such a substrate. It is an object of the present invention to provide a defect correcting device to which a holding device is applied.

  The substrate holding device according to the present invention is a substrate holding device applied to defect correction of a pattern formed on a predetermined substrate, and includes a pair of substrate end support bases, a substrate support roller mechanism, and a substrate suction base. Have. The pair of substrate end support bases extend in the first direction at intervals from each other, and support opposite ends of a predetermined substrate from below. The substrate support roller mechanism is disposed in a region sandwiched between the pair of substrate end support bases, and supports the substrate placed on the pair of substrate end support bases from below, in the first direction and the first direction. It can be moved in the opposite direction. The substrate adsorption platform is attached to the substrate support roller mechanism and is movable together with the substrate support roller mechanism, and adsorbs the lower surface of the substrate placed on the pair of substrate end support platforms. The roller mechanism for supporting a substrate includes a roller body and a roller body guide part. The roller body includes a plurality of roller members, a plurality of roller support shafts that rotatably support each of the plurality of roller members, and a roller support shaft connecting plate that connects the plurality of roller support shafts in an endless manner. . The roller body guide portion arranges the roller body at a first position having a predetermined height for supporting the substrate placed on the pair of substrate end support bases from below by the roller member, and is lower than the first position. The roller body is disposed at the position, and the roller body is guided between the first position and the second position so as to be rotatable endlessly.

  A defect correction apparatus according to the present invention is a defect correction apparatus including the substrate holding apparatus according to any one of claims 1 to 8, wherein an observation optical unit, a laser light source, an ink application unit, a first drive mechanism, and a first drive mechanism are provided. 2 drive mechanism, 3rd drive mechanism, and a control part are provided. A defect generated in the substrate is observed by the observation optical unit. The laser light source removes defects generated on the substrate by irradiating the laser beam. The ink application unit corrects the defect by applying a predetermined ink to the defective part generated on the substrate. The first drive mechanism moves the observation optical unit, the laser light source unit, and the ink application unit in a direction perpendicular to the surface of the substrate placed on the pair of substrate support bases. The second drive mechanism moves the observation optical unit, the laser light source unit, and the ink application unit along the second direction in parallel with the surface of the substrate. The third drive mechanism moves the observation optical unit, the laser light source unit, and the ink application unit along the first direction in parallel to the surface of the substrate. The control unit includes control of the first drive mechanism, the second drive mechanism, and the third drive mechanism.

  In the substrate holding apparatus according to the present invention, the substrate adsorption platform for adsorbing the substrate is attached to a substrate supporting roller mechanism including a roller body that is rotatably guided by the roller body guide portion. As a result, the structure for holding the substrate is simplified, and the complicated work of adjusting members such as cams, springs, and shock absorbers is performed in accordance with the position and speed of the substrate suction table as compared with the conventional substrate holding device. There is no need. In addition, since the structure is simple, the assembly work can be performed in a relatively short time.

  Further, in the defect correction apparatus to which the substrate holding apparatus according to the present invention is applied, when a defect is observed with transmitted light, there is no shadow portion like the conventional defect correction apparatus. Thereby, observation with transmitted light can be reliably performed in any part of the substrate.

It is a perspective view which shows the defect correction apparatus which concerns on Embodiment 1 of this invention. FIG. 2 is a top view showing a substrate holding part applied to the defect correction apparatus shown in FIG. 1 in the same embodiment. FIG. 2 is a front view showing a substrate holding part applied to the defect correction apparatus shown in FIG. 1 in the same embodiment. In the same embodiment, it is a fragmentary perspective view which shows the board | substrate support roller mechanism applied to the board | substrate holding | maintenance part. In the same embodiment, it is a partial side view showing a substrate support roller mechanism applied to the substrate holding unit. FIG. 6 is a cross-sectional view taken along a cross-sectional line VI-VI shown in FIG. 5 in the same embodiment. FIG. 7 is a partial enlarged cross-sectional view showing an enlarged view of a dotted line frame shown in FIG. 6 in the same embodiment. FIG. 4 is a partially enlarged side view showing a substrate suction stand attached to a substrate support roller mechanism in the same embodiment. In the same embodiment, it is the 1st perspective view which shows the board | substrate holding part for demonstrating operation | movement of a defect correction apparatus. In the same embodiment, it is the 2nd perspective view which shows the board | substrate holding part for demonstrating operation | movement of a defect correction apparatus. FIG. 10 is a partial plan view showing a first example of a defect to be corrected by the defect correcting device in the embodiment. In the same embodiment, it is a partial top view which shows the 2nd example of the defect used as the object of correction by a defect correction apparatus. In the same embodiment, it is a partial top view which shows the 3rd example of the defect used as the object of correction by a defect correction apparatus. In the same embodiment, it is a partial top view which shows the mode after the defect correction by the defect correction apparatus. In the same embodiment, it is a 3rd perspective view which shows the board | substrate holding part for demonstrating operation | movement of a defect correction apparatus. In the same embodiment, it is the 4th perspective view which shows the board | substrate holding part for demonstrating operation | movement of a defect correction apparatus. It is a top view which shows the board | substrate holding part applied to the defect correction apparatus which concerns on Embodiment 2 of this invention. It is a front view which shows the board | substrate holding part applied to the defect correction apparatus in the embodiment. In the same embodiment, it is the elements on larger scale which show the substrate end support part which is applied to the substrate holding part. In the same embodiment, it is a partial side view showing a state where the substrate end support portion supports the end portion. In the same embodiment, it is a partial side view showing a state where the substrate end support portion is retracted. It is a top view which shows the board | substrate holding part applied to the defect correction apparatus which concerns on Embodiment 3 of this invention. It is a front view which shows the board | substrate holding part applied to the defect correction apparatus in the embodiment. 4 is a partially enlarged side view showing a substrate end support head applied to a substrate holding unit in the embodiment. FIG. In the same embodiment, it is a partial side view showing a state in which the substrate end support head supports the end portion. In the same embodiment, it is a partial side view showing a state in which the substrate end support head is retracted. It is a perspective view which shows the conventional defect correction apparatus. It is a figure which shows a series of conveyance work of the board | substrate in the conventional defect correction apparatus.

Embodiment 1
A substrate holding device according to an embodiment of the present invention and a defect correcting device to which the substrate holding device is applied will be described. As shown in FIGS. 1, 2, and 3, in the defect correction apparatus 1, a substrate holding unit (apparatus) 15 that holds a glass substrate is provided on the upper surface of a stage 2 having a predetermined height. The glass substrate is held by the substrate suction table 26 provided in the substrate holding unit 15. Details of the substrate holder 15 will be described later. A Y-axis table 10 that is movable along the Y-axis direction is provided on the upper surface of the stage 2 so as to straddle the glass substrate 99 held by the substrate holding unit 15. An X-axis table 9 that can move along the X-axis direction is provided on the Y-axis table 10, and a Z-axis table 11 that can move along the Z-axis direction is provided on the X-axis table 9. Is provided.

  The Z-axis table is equipped with a correction head unit 16 that observes and corrects defects. The correction head unit 16 includes an observation optical system 5 for observing a defect, a CCD camera 12 for converting the observed image into an electrical signal, a laser light source 6 for removing a defective part by irradiating a laser beam, and ink in the defective part. An ink application mechanism 8 is provided. The observation optical system 5 is equipped with an objective lens 7, an attenuator (not shown) for controlling the power of the laser beam emitted from the laser light source, and a laser beam for irradiating the defective portion with an arbitrary shape. The slit mechanism (not shown) is incorporated. In addition, the correction head unit 16 includes infrared illumination or ultraviolet illumination (not shown) for drying or curing the applied ink. Further, a control computer 13 for controlling a series of operations of the defect correction apparatus is disposed on the side of the stage 2.

  Next, the substrate holding unit (substrate holding device) 15 applied to the defect correcting device 1 will be described in detail. As shown in FIGS. 2 and 3, a pair of substrate end support bases 3 on which the glass substrate 99 is placed are disposed on the upper surface of the stage 2. The pair of substrate end support bases 3 extend in the Y-axis direction in such a manner as to support opposite ends of the glass substrate 99 from below, and are spaced from each other in the X-axis direction. In the region of the stage 2 sandwiched between the pair of substrate end support bases 3, a plurality of substrate support roller mechanisms 4 that support the glass substrate 99 placed on the substrate end support base 3 from below are disposed. Yes. Each of the plurality of substrate supporting roller mechanisms 4 is disposed along the Y-axis direction and spaced from each other in the X-axis direction. The substrate support roller mechanism 4 is provided with a substrate suction table 26 that sucks and holds the lower surface of the placed glass substrate 99.

  Next, the substrate supporting roller mechanism 4 will be described in more detail. As shown in FIGS. 4, 5, 6, and 7, in the substrate support roller mechanism 4, each of the plurality of substrate support rollers 20 that support the glass substrate is a roller support bearing 22 that is mounted on a roller support shaft. Is supported rotatably. Further, each of the plurality of substrate support rollers 20 is connected endlessly in a ring shape by a roller support shaft connecting plate 21 mounted on both end portions of each roller support shaft via a slide bearing.

  The substrate support roller mechanism 4 is provided with a guide portion 35 that guides the movement of the plurality of substrate support rollers connected endlessly. As shown in FIGS. 6 and 7, a pair of transfer plates 24 are disposed so as to sandwich the substrate support roller 20 from one side and the other side of the substrate support roller 20 in the roller support axis direction. The roller support shaft is mounted with a pair of roller support shaft transfer bearings 23 that movably support the roller support shaft at the respective upper ends of the pair of transfer plates 24. Further, in order to prevent the roller support shaft transfer bearing 23 from falling off the transfer plate 24, the pair of roller support shaft transfer bearings 23 and the pair of transfer plates 24 are connected to one side in the roller support shaft direction. A pair of transfer auxiliary plates 25 are disposed so as to be sandwiched from the other side.

  The pair of transfer plates 24 and the pair of transfer auxiliary plates 25 include a predetermined position A (height) at which the substrate support roller 20 can support the placed glass substrate from below and an upper surface (position B) of the stage 2. It is arranged. The plurality of substrate support rollers 20 connected to the endless endlessly rotate between the position A and the position B.

  Next, the substrate suction table that holds the glass substrate will be described in more detail. As shown in FIGS. 4 and 8, the substrate adsorption platform 26 is attached to the substrate supporting roller mechanism 4 and moves in accordance with the movement of the Y-axis table. The substrate support roller mechanism 4 is movable in accordance with the movement of the substrate suction platform 26 in the Y-axis direction. A substrate suction groove 27 for sucking and fixing the glass substrate is formed in the substrate suction table 26. The glass substrate is fixed to the substrate suction table 26 by setting the substrate suction groove 27 to a negative pressure.

  In addition, when the substrate suction table 26 is moved in the Y-axis direction, the substrate suction table 26 is sprayed with compressed air to prevent contact with the glass substrate, for example, about 500 μm. A substrate floating groove 28 for forming a gap is formed. Furthermore, the substrate suction stand 26 includes an illumination light source 29 that emits light for observing a defective portion and a cylindrical lens 30 that collects the light emitted from the illumination light source 29 along the X-axis direction. Are arranged in a line. At the time of the correction work, the substrate suction table 26 is disposed at a position directly below the observation optical system 5 so that the glass substrate is sucked and fixed, and predetermined light is emitted from the illumination light source 29 in this state. Then, the transmitted light transmitted through the glass substrate is observed by the observation optical system 5.

  Next, the operation of the defect correction apparatus provided with the substrate holding unit will be described. First, the defect which generate | occur | produced in the glass substrate is detected by the inspection apparatus beforehand. Information on the position of the detected defect on the glass substrate is input to the defect correcting apparatus.

  As shown in FIG. 9, the glass substrate 99 that has been inspected by the inspection apparatus is carried into a defect correction apparatus by a predetermined robot hand 61. At this time, the substrate suction stand 26 is disposed at a predetermined retreat position. The arm of the robot hand 61 moves between adjacent substrate supporting roller mechanisms 4 to a predetermined placement position along the Y-axis direction. When the arm reaches the placement position, the robot hand 61 is lowered, and the glass substrate 99 is placed on the pair of substrate end support bases 3 in such a manner that the end portion is supported by the substrate end support base 3. Thereafter, the robot hand 61 moves away from the defect correcting device.

  Next, as shown in FIG. 10, the Y-axis table 10 and the X-axis table are set so that the correction head 16 reaches directly above the position where the defect to be corrected is located based on the information regarding the position of the defect inputted in advance. 9 and the Z-axis table 11 are driven. Further, the substrate suction stand 26 also moves to a predetermined position in the Y-axis direction where the defect is located in synchronization with the movement of the correction head 16. When the substrate adsorption platform 26 moves, a gap is formed between the substrate adsorption platform 26 and the glass substrate 99 by ejecting compressed air from the substrate floating groove 28 (see FIG. 8) of the substrate adsorption platform 26. The glass substrate 99 is prevented from being damaged by contacting the glass substrate. Further, while the substrate suction table 26 moves, the substrate support roller 20 of the substrate support roller mechanism 4 supports the glass substrate 99 from below while rotating.

  When the substrate suction table 26 reaches a predetermined position in the Y-axis direction, the compressed air is stopped. Next, negative pressure air is supplied to the substrate suction groove 27, and the glass substrate 99 is suction-fixed to the substrate suction stand 26. Next, predetermined light is emitted from an illumination light source 29 provided on the substrate adsorption platform 26, condensed by a cylindrical lens 30, and irradiated onto the glass substrate 99. The operator observes the transmitted light that has been irradiated onto the glass substrate 99 and transmitted through the glass substrate 99 with the observation optical system 5, whereby the size and shape of the defect generated on the glass substrate 99 are confirmed. Then, based on the observation result, a correction condition for correcting the defect is determined.

  Next, the defect is corrected based on the determined correction condition. As shown in FIG. 11, among the R pixel 51, the G pixel 52, and the B pixel 53 as defects, for example, as a technique for correcting a white defect in which the color of the G pixel 52 is lost, There is a method of correcting by applying green ink of the same color from the ink application mechanism 8. As another method, there is a method of correcting by irradiating a laser beam from the laser light source 6 to a portion where the color has been lost and applying the same color ink after adjusting the shape of the portion where the color has been lost. . As shown in FIG. 14, after the ink is applied, when the portion 57 to which the ink is applied is thermally cured, the ink is irradiated with infrared rays. Further, when the portion 57 to which the ink is applied is cured with ultraviolet rays, the ultraviolet rays are irradiated, and then infrared rays are further irradiated as necessary. Thus, the white defect is corrected.

  In addition, as shown in FIG. 12, when correcting a black defect 55 in which the color of the pixel is mixed as a defect, or further, correcting a foreign object defect 56 in which a foreign object or the like adheres to the surface of the pixel as shown in FIG. In some cases, the black defect 55 and the foreign object defect 56 are removed by irradiating each with a laser beam. After the black defect 55 or the foreign object defect 56 is removed, the ink of the corresponding color is applied and the defect is corrected by curing the portion where the ink is applied, as in the case of the white defect.

  When the correction of one defect is completed, as shown in FIG. 15, the substrate suction stand 26 moves together with the substrate supporting roller mechanism 4 to a predetermined position in the Y-axis direction where another defect is located. Next, similarly to the method described above, another defect is observed by the observation optical system, and the other defect is corrected based on the observation result.

  In this way, after all the defects generated in the glass substrate 99 are corrected, the glass substrate 99 is carried out of the defect correcting device 1. At this time, first, the substrate suction stand 26 is disposed at a predetermined retreat position. Next, as shown in FIG. 16, the arm of the robot hand 61 moves between adjacent substrate supporting roller mechanisms 4 to a predetermined position (mounting position) along the Y-axis direction. When the arm reaches that position, the robot hand 61 is raised, and the glass substrate 99 is placed on the arm so as to be lifted. Thereafter, the robot hand 61 moves away from the defect correcting device, and the glass substrate 99 is carried out. The glass substrate 99 carried out from the defect correction apparatus is sent to the next step. As described above, the defect generated in the glass substrate 99 is corrected by the defect correcting apparatus 1.

  In the defect correction apparatus 1 including the substrate holding unit 15 described above, the substrate suction table 26 is attached to the substrate support roller mechanism 4 in which the rotatable substrate support roller 20 is connected endlessly by the roller support shaft connecting plate 21. . As a result, the substrate support roller 20 of the substrate support roller mechanism 4 rotates while moving under the glass substrate 99 and supports the glass substrate 99 as the substrate suction table 26 moves.

  For this reason, in the substrate holding part (substrate holding device) 15 of the present defect correction apparatus 1, it is not necessary to secure a gap (space) for moving the substrate suction stand 26 unlike the conventional defect correction apparatus. There is no member that moves in contact with the substrate suction table 26. As a result, it is possible to hold the glass substrate 99 with a simpler structure without the need for adjustment according to the position and speed of the substrate suction table 26.

  Further, in this substrate holding unit 15, the robot hand 61 that conveys the glass substrate 99 is moved to a predetermined placement position and then lowered to place the glass substrate 99 on the substrate holding unit 15 and carry it in. Complete. On the contrary, after the robot hand 61 is raised and the glass substrate 99 is placed on the arm, the robot hand 61 is retracted, whereby the unloading of the glass substrate 99 is completed.

  Thereby, when carrying in and carrying out the glass substrate 99, a lifter pin mechanism is not required, and it is not necessary to synchronize operation | movement with a lifter pin. As a result, the glass substrate 99 can be carried in and out with a simpler mechanism, and the time required for the carrying in and out can be easily reduced.

  Further, since the glass substrate 99 is suction-fixed to the substrate suction stand 26, the position of the glass substrate 99 is not shifted when the defect is corrected, and the glass substrate 99 is not bent. Corrections can be made reliably. In addition, since the illumination light source 29 and the condensing cylindrical lens 30 are incorporated in the substrate suction table 26, the state of the defect and the state of the correction are confirmed by observing the transmitted light before and after the defect correction. I can. Furthermore, there is no joint between the stage on which the glass substrate is placed and a suction groove for fixing the glass substrate as in the conventional defect correction apparatus, so that a shadow or the like is generated when performing observation with transmitted light. This makes it possible to observe more reliably.

Embodiment 2
A defect correction apparatus according to Embodiment 2 of the present invention will be described. As shown in FIGS. 17 and 18, in the substrate holding unit (substrate holding device) of the defect correction apparatus, a pair of end portions of the glass substrate 99 held by the substrate holding unit 15 (see FIG. 3). A substrate end support portion 41 that supports an end portion that is not supported by the substrate end support 3 is disposed. Since the configuration other than this is the same as that of the defect correction apparatus (FIG. 1 and the like) described in the first embodiment, the same members are denoted by the same reference numerals and the description thereof will not be repeated.

  As shown in FIG. 19, the substrate end support portion 41 is attached to the substrate support roller mechanism 4, and the substrate end support portion 41 is provided with a substrate end support roller 42 that supports the end portion of the glass substrate 99 from below. ing. This substrate end support roller 42 is separated from the position where the end of the glass substrate 99 shown in FIG. 20 is supported from below by a predetermined distance from the end of the glass substrate 99 shown in FIG. The drive motor 44 and the drive screw 43 can move between the retracted positions.

  In the defect correction apparatus described above, the following effects can be obtained in addition to the effects of the defect correction apparatus described in the first embodiment. First, the glass substrate 99 supported by the pair of substrate end support 3 is bent by its own weight. When the glass substrate 99 bends, the position of the end portion of the glass substrate 99 on the side not supported by the substrate end support 3 is lowered, and the substrate support roller 20 of the substrate support roller mechanism 4 circulates and moves. It is assumed that the substrate support roller 20 collides with the end when entering directly below the end.

  In the defect correction apparatus described above, when the substrate suction table 26 is not located at the end of the glass substrate 99, the position of the end of the glass substrate 99 is adjusted by the pair of substrate end support 3 by the substrate end support 41. Lifted to the supported position. Thereby, the impact at the time of the board | substrate support roller 20 contacting the edge part of the glass substrate 99 can be relieve | moderated. The substrate end support portion 41 can exert its power particularly when the plate thickness of the glass substrate 99 is reduced and the amount of bending thereof is increased.

  In the substrate end support portion 41, the case where the substrate end support roller 42 is moved by the drive motor 44 and the drive screw 43 has been described. However, if the substrate end support roller 42 can be moved between the two positions, the drive motor and the drive screw can be used. Not limited.

Embodiment 3
In the third embodiment, other end portions of the glass substrate 99 held by the substrate holding portion 15 (see FIG. 3) are supported by the other end portions that are not supported by the pair of substrate end support bases 3. An example will be described. As shown in FIGS. 22 and 23, in the substrate holding portion (substrate holding device) of the defect correcting apparatus, a substrate is used as a mechanism for supporting the end portion of the glass substrate 99 that is not supported by the pair of substrate end support bases 3. An end support head 45 is provided. Since the configuration other than this is the same as that of the defect correction apparatus (FIG. 1 and the like) described in the first embodiment, the same members are denoted by the same reference numerals and the description thereof will not be repeated.

  As shown in FIG. 24, the substrate end support head 45 is attached to the substrate support roller mechanism 4 in such a manner as to support the end portion of the glass substrate 99 from below. The substrate end support head 45 has a predetermined position in a position substantially supporting the end of the glass substrate 99 shown in FIG. 25 from the lower side and a substantially vertical (vertical) direction from the end of the glass substrate 99 shown in FIG. It is possible for the air cylinder 46 to move between the retracted positions separated from each other.

  In the defect correction apparatus described above, the following effects can be obtained in addition to the effects of the defect correction apparatus described in the first embodiment. That is, similarly to the defect correction apparatus described in the second embodiment, when the substrate suction table 26 is not positioned at the end of the glass substrate 99, the position of the end of the glass substrate 99 is changed by the substrate end support head 45. The substrate is lifted up to a position supported by the pair of substrate end supporters 3. Thereby, the impact at the time of the board | substrate support roller 20 contacting the edge part of the glass substrate 99 can be relieve | moderated. Further, like the substrate end support portion 41, the substrate end support head 45 can exert its power when the thickness of the glass substrate 99 is reduced and the amount of bending thereof is increased.

  In the substrate end support head 45, the case where the substrate end support head 45 is moved up and down by the air cylinder 46 has been described. However, the substrate end support head 45 is not limited to the air cylinder as long as it can be moved between the two positions.

  In addition, the substrate holding device (substrate holding unit) has been described by taking the case of application to a defect correction device as an example, but the substrate holding device can be used in, for example, an inspection device and a review device in addition to the defect correction device. It is possible to apply.

  The embodiment disclosed this time is an example, and the present invention is not limited to this. The present invention is defined by the terms of the claims, rather than the scope described above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  DESCRIPTION OF SYMBOLS 1 Defect correction apparatus, 2 stage, 3 substrate end support stand, 4 substrate support roller mechanism, 5 observation optical system, 6 laser light source, 7 objective lens, 8 ink application mechanism, 9 X-axis table, 10 Y-axis table, 11 Z-axis table, 12 CCD camera, 13 control computer, 15 substrate holding unit, 16 correction head unit, 20 substrate support roller, 21 roller support shaft connecting plate, 22 roller support bearing, 23 roller support shaft transfer bearing, 24 rolls Traveling plate, 25 Rolling auxiliary plate, 26 Substrate adsorption table, 27 Substrate adsorption groove, 28 Substrate floating groove, 29 Line illumination light source, 30 Cylindrical lens, 31 Substrate adsorption table support linear guide, 32 Substrate adsorption table drive motor , 35 Guide part, 41 Substrate end support part, 42 Substrate end support roller, 43 Drive screw, 44 Drive motor, 45 Substrate end support Head, 46 an air cylinder, 51 R pixel, 52 G pixel, 53 B pixel, 54 white defect, 55 black defect, 56 defective foreign matter, 57 ink application portion, 99 substrate.

Claims (9)

A substrate holding device applied to defect correction of a pattern formed on a predetermined substrate,
A pair of substrate end support bases extending in the first direction at intervals and supporting opposite ends of a predetermined substrate from below;
The substrate is disposed in a region sandwiched between the pair of substrate end support bases and supports the substrate placed on the pair of substrate end support bases from below, and is opposite to the first direction and the first direction. A roller mechanism for supporting the substrate that is movable in each direction,
A substrate suction stand that is attached to the substrate support roller mechanism and is movable together with the substrate support roller mechanism, and sucks the lower surface of the substrate placed on the pair of substrate end support stands;
The substrate support roller mechanism is:
A roller body including a plurality of roller members, a plurality of roller support shafts for rotatably supporting each of the plurality of roller members, and a roller support shaft connecting plate for connecting the plurality of roller support shafts in an endless manner;
The roller body is arranged at a first position having a predetermined height for supporting the substrate placed on the pair of substrate end support bases from below by the roller member, and a second position lower than the first position. And a roller body guide portion that guides the roller body between the first position and the second position so as to be pivotable in an endless manner. The roller body guide part is
A pair of transfer plates arranged so as to sandwich the roller member from one side and the other side of the roller member in the roller support axis direction, and the roller member is set at a predetermined height for supporting the substrate from below. When,
A pair of roller support shaft transfer bearings mounted on the roller support shaft and movably supporting the roller support shaft at the respective upper ends of the pair of transfer plates;
A pair of transfer auxiliary plates arranged to sandwich the pair of transfer plates and the pair of roller support shaft transfer bearings from one side and the other side in the roller support shaft direction;
The substrate holding device according to claim 1, comprising: The substrate adsorption platform is
A linear illumination light source disposed so as to extend from one substrate support of the pair of substrate support to the other substrate support;
The substrate holding apparatus according to claim 1, further comprising: a line-shaped condensing lens that condenses light emitted from the illumination light source.   The substrate suction stand includes an air injection unit for preventing a contact with the substrate by forming a gap with the placed substrate when the substrate suction table moves. Item 4. The substrate holding device according to any one of Items 1 to 3.   The substrates placed on the pair of substrate end support bases are not supported by the pair of substrate end support bases and are positioned along a second direction intersecting the first direction and facing each other. The substrate holding apparatus according to any one of claims 1 to 4, further comprising a substrate end auxiliary support portion that supports each of the end portion and the second end portion from below. The substrate end auxiliary support part is
A support state in which the first end portion or the second end portion is supported from below when the substrate adsorption platform is located at a position other than the position immediately below the first end portion or the second end portion of the substrate. And
The substrate holding apparatus according to claim 5, wherein the substrate holding device is in a retracted state when the substrate suction stand is positioned immediately below the first end portion or the second end portion of the substrate. From the retracted state, the substrate end auxiliary support portion is moved in the horizontal direction and brought close to the substrate to become the support state,
The substrate holding apparatus according to claim 6, wherein, from the support state, the substrate end auxiliary support portion is moved in the horizontal direction and moved away from the substrate to enter the retracted state. From the retracted state, the substrate end auxiliary support portion is moved in the vertical direction and brought close to the substrate to be in the support state,
The substrate holding apparatus according to claim 6, wherein, from the support state, the substrate end auxiliary support portion is moved in a vertical direction and moved away from the substrate to be in the retracted state. A defect correction apparatus comprising the substrate holding apparatus according to claim 1,
An observation optical unit for observing defects generated in the substrate;
A laser light source for removing defects generated in the substrate by irradiating a laser beam;
An ink application part for correcting a defect by applying a predetermined ink to a defective part generated in the substrate;
A first drive mechanism that moves the observation optical unit, the laser light source unit, and the ink application unit in a direction perpendicular to the surface of the substrate placed on a pair of the substrate support;
A second drive mechanism for moving the observation optical unit, the laser light source unit, and the ink application unit in parallel with the surface of the substrate along the second direction;
A third drive mechanism for moving the observation optical unit, the laser light source unit, and the ink application unit in parallel with the surface of the substrate along the first direction; the first drive mechanism; and the second drive mechanism. And a defect correcting device comprising a control unit including control of the third drive mechanism.

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