JP3931111B2 - Substrate holding device and substrate inspection device - Google Patents

Substrate holding device and substrate inspection device Download PDF

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JP3931111B2
JP3931111B2 JP2002157941A JP2002157941A JP3931111B2 JP 3931111 B2 JP3931111 B2 JP 3931111B2 JP 2002157941 A JP2002157941 A JP 2002157941A JP 2002157941 A JP2002157941 A JP 2002157941A JP 3931111 B2 JP3931111 B2 JP 3931111B2
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substrate holder
substrate
base
fulcrum
jack
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JP2003344294A5 (en
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守 安田
暢夫 藤崎
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Olympus Corp
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Priority to KR10-2004-7001004A priority patent/KR20050005390A/en
Priority to PCT/JP2003/006611 priority patent/WO2003102561A1/en
Priority to CNB038007347A priority patent/CN100483115C/en
Priority to TW092114436A priority patent/TWI313039B/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/021—Special mounting in general

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  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
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  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

【０００１】
【発明の属する技術分野】
本発明は、例えば大型の液晶ディスプレイ（ＬＣＤ）やプラズマディスプレイパネル（ＰＤＰ）などのフラットパネル等のガラス基板の欠陥検査を行うときにガラス基板を保持しすると共に揺動させえる基板保持装置及び検査装置に関する。
【０００２】
【従来の技術】
近年、ＬＣＤやＰＤＰといったフラットパネルディスプレイの分野では、画面の大型化やコスト削減といった要望に対応するために、フラットパネルディスプレイ製造工程において多面取りするためにガラス基板のサイズが益々大型化する傾向にある。
【０００３】
このようなフラットパネルディスプレイ製造工程で製造された大型のガラス基板に対しては欠陥検査が行われており、この欠陥検査の一つの手法としてマクロ検査とミクロ検査とを併用することが行われている。マクロ検査は、ガラス基板に照明光を照射してガラス基板で反射する光を目視観察し、ミクロ検査は、マクロ検査で特定した欠陥部分を顕微鏡で拡大観察する。
【０００４】
このような欠陥検査装置として例えば特開平１１−９４７５６号公報に記載された技術があり、この公報には、マクロ検査時にガラス基板をホルダ上に載せて観察者に向って起き上げて目視によるマクロ検査を行い、ミクロ検査時にガラス基板を水平状態に保持し、欠陥部分を顕微鏡で拡大観察することが記載されている。なお、マクロ検査時の照明は、例えば特開２０００−１４６８４６に記載されている投光装置が用いられる。
【０００５】
【発明が解決しようとする課題】
フラットパネルディスプレイ製造工程で製造されるガラス基板のサイズは、画面の大型化やコスト削減といった要望に対応するために、益々大型化する傾向にあり、例えば１２５０×１１００ｍｍの大型サイズが出現している。
【０００６】
このような大型のガラス基板を上記公報に記載されている欠陥検査装置を用いて欠陥検査すると、マクロ検査時に、ホルダの下辺を中心にして所定の傾斜角度に起がらせることになる。
【０００７】
ところが、このホルダに保持された大型ガラス基板を起き上げると、起き上げたときの大型ガラス基板の上端部分が観察者の目の位置よりも高くなってしまい、観察者の目から大型ガラス基板の上端部分までの距離が遠くなり、大型ガラス基板の上端部分が見えにくくなる。
【０００８】
又、大型ガラス基板を起き上げたときの大型ガラス基板の上端部分が高い位置になるために、大型ガラス基板の揺動に必要な高さ空間が増大し、装置が大型化する。
【０００９】
そこで本発明は、大型ガラス基板を起き上げてもその上端部分が高くならず、省スペース化を実現できる基板保持装置及び基板検査装置を提供することを目的とする。
【００１０】
【課題を解決するための手段】
本発明は、ベースと、前記ベース上に設けられ、大型基板を保持する基板ホルダと、
前記基板ホルダの両側に設けられた直線ガイドと、前記ベースの前側両端部に設けられ、前記直線ガイドをスライド移動可能に支持する揺動支点と、前記基板ホルダに連結し、前記揺動支点を支点として前記基板ホルダを起き上がらせるジャッキとを有し、前記直線ガイド、前記揺動支点及び前記ジャッキにより揺動機構を構成し、前記揺動機構は、前記ジャッキにより前記基板ホルダを前記揺動支点を支点として起き上がる方向に回動させることにより、この基板ホルダの回動に伴って前記直線ガイドが前記揺動支点に対してスライド移動すると共に、前記基板ホルダが前記揺動支点を支点として回動しながら前記ベースの前側縁部より前方にせり出すことを特徴とする基板保持装置である。
また、本発明は、ベースと、前記ベース上に設けられ、大型基板を保持する基板ホルダと、前記基板ホルダの両側に設けられた直線ガイドと、前記ベースの前側両端部に設けられ、前記直線ガイドをスライド移動可能に支持する揺動支点と、前記基板ホルダに連結し、前記揺動支点を支点として前記基板ホルダを起き上がらせるジャッキとを有し、前記ジャッキにより前記揺動支点を支点として前記基板ホルダを回動させると共に、前記直線ガイドを前記揺動支点に対してスライド移動させることにより、前記ベースに載置された水平状態と前記ベースの前方にせり出した垂直状態との角度範囲内で前記基板ホルダを回動移動させ、前記基板ホルダを略垂直方向に起こした状態で前記大型基板を載せ換え、前記基板ホルダ上に保持された前記大型基板を前記ベース上に搬送することを特徴とする基板保持装置である。
また、本発明は、ベースと、前記ベース上に設けられ、大型基板を保持する基板ホルダと、前記基板ホルダの両側に設けられた直線ガイドと、前記ベースの前側両端部に設けられ、前記直線ガイドをスライド移動可能に支持する揺動支点と、前記基板ホルダに連結し、前記揺動支点を支点にして前記基板ホルダを起き上がらせるジャッキと、前記基板ホルダに保持された前記大型基板の表面にマクロ照明光を照射するマクロ照明装置とを有し、前記直線ガイドにより前記基板ホルダの前側端部を前記ベース上面の前側縁部より下降させて前方にせり出させると共に、前記ベースの前側縁部に設けられた揺動支点を支点として前記基板ホルダを所定の角度に起き上がらせた状態で前記マクロ照明光を照射して前記大型基板上の欠陥を検査することを特徴とする基板検査装置である。
また、本発明は、ベースと、前記ベース上に設けられ、大型基板を保持する基板ホルダと、前記基板ホルダの両側に設けられた直線ガイドと、前記ベースの前側両端部に設けられ、前記直線ガイドをスライド移動可能に支持する揺動支点と、前記基板ホルダに連結し、前記揺動支点を支点にして前記基板ホルダを起き上がらせるジャッキと、前記ベース上に水平に置かれた前記基板ホルダの両側に沿って移動可能に設けられた門型アームと、前記門型アームの水平アームに沿って移動可能に設けられた顕微鏡と、前記基板ホルダの前側縁部にローラ付基準ピンを設け、前記基板ホルダの横側一端部に基準ピンを設け、前記基板ホルダの前記横側一端部と対向する横側他端部に押付けピンを設けてなる基板位置決め機構とを有し、前記ジャッキにより前記基板ホルダを略垂直に起こした状態で前記ローラ付基準ピンに前記大型基板を載せ、前記押付けピンにより前記大型基板を前記基準ピンに押し付けて位置決めた状態で前記ジャッキにより前記基板ホルダを前記ベース上に移動して水平に戻し、前記基板ホルダ上に位置決めされた前記大型基板を前記顕微鏡で検査することを特徴とする基板検査装置である。
【００１１】
【発明の実施の形態】
以下、本発明の第１の実施の形態について図面を参照して説明する。
【００１２】
図１は本発明の基板保持装置を基板検査装置に適用した断面構成図である。架台１は、脚２及びこの脚２上に設けられたベース３からなっている。このベース３上に大型ガラス基板４を保持する基板ホルダ５が設けられている。この基板ホルダ５の水平状態の高さは、搬送ロボットの受け渡し高さに設定される。ベース３の上面は、水平に設けられている。
【００１３】
基板ホルダ５には、図２に示すように開口部６が形成されると共に、この開口部６の各辺に沿って大型ガラス基板４の基準位置を決める各基準ピン７と、ローラ付基準ピン８と、押付けピン９とが設けられている。押付けピン９は、大型ガラス基板４を基準ピン７側に押し付ける方向に移動可能に設けられている。
【００１４】
この基板ホルダ５は、ベース３の上面に対して、以下に説明する揺動機構（揺動支点であるヒンジ１０、せり出し機構としての直線ガイド１５、リンク機構１７）によってヒンジ１０を揺動軸として、基板ホルダ５を起き上げる又は水平状態に戻す方向（矢印イ方向）に揺動可能に設けられている。このヒンジ１０は、基板保持装置を正面側から見てベース３の両端側にそれぞれ設けられている。
【００１５】
ベース３に上面の正面側における縁部分１１の両端には、図３に示すようにそれぞれヒンジ支持部材１２が設けられている。これらヒンジ支持部材１２には、それぞれ各ヒンジ１０が回動自在に設けられている。これらヒンジ１０の回動軸１３は、基板ホルダ５を起き上げる又は水平状態に戻す方向（矢印イ方向）に揺動させるために正面側から見て水平方向（Ｙ方向）に設けられている。
【００１６】
ヒンジ１０には、移動ブロック１４が設けられている。この移動ブロック１４には、基板ホルダ５の裏面に設けられた直線ガイド１５に嵌合する摺動用溝１６が形成されている。
【００１７】
直線ガイド１５は、基板ホルダ５を起き上げたときに摺動用溝１６内を摺動して基板ホルダ５を正面側にせり出させ、ヒンジ１０は回転軸１３を支点として基板ホルダ５を揺動させることで、基板ホルダ５の下端をベース３上面の縁部分１１よりも下降させるもので、直線ガイド１５、ヒンジ１０によりせり出し機構を構成する。
【００１８】
この直線ガイド１５は、基板ホルダ５の下面の両端側にそれぞれ設けられ、ベース３の両端の各移動ブロック１４に形成された各摺動用溝１６内に載っている。これら直線ガイド１５は、基板ホルダ５を起き上げたときに摺動用溝１６内を摺動して基板ホルダ５を正面側にせり出させ、かつ基板ホルダ５の下端側となる縁をベース３上面の縁部分１１よりも下降させるのに十分必要な長さ、例えば基板ホルダ５の下端側から中央部よりやや上まで形成されている。
【００１９】
これら直線ガイド１５の上端側には、ストッパ１５ａが設けられている。これらストッパ１５ａは、基板ホルダ５を起き上げたときに、基板ホルダ５が予め設定された最大傾斜角度より傾き過ぎないように、基板ホルダ５の傾きを制限するために設けられている。
【００２０】
リンク機構１７は、基板ホルダ５をベース３上で水平状態又は起き上げ方向に揺動させる機能を有するもので、リンク１８とジャッキ１９とからなる。リンク１８は、固定された長さに形成され、ベース３から下方に延出された延出端部２０と基板ホルダ５の下部に設けられた支持部材２１との間に設けられている。このリンク１８は、延出端部２０と支持部材２１とに対してそれぞれ各支点２２、２３で回転可能となっている。
【００２１】
ジャッキ１９は、伸縮ロッド１９ａを有し、リンク１８における支持部材２１側と脚２の水平梁２ａとの間に設けられている。このジャッキ１９は、伸縮ロッド１９ａの先端がリンク１８に対して支点２４に回転可能に連結されると共に、ジャッキ１９の下端が水平梁２ａに対して支点２５に回転可能に連結されている。
【００２２】
リンク機構１７は、基板保持装置を正面側から見て基板ホルダ５の両端側にそれぞれ設けられている。
【００２３】
従って、ジャッキ１９の伸縮ロッド１９ａが伸びると、このジャッキ１９の伸縮ロッド１９ａの先端は、リンク１８における支持部材２１側に押圧を与える。このとき、ジャッキ１９の他端が脚２の水平梁２ａに設けられ、かつリンク１８の長さが固定なので、ジャッキ１９の伸縮ロッド１９ａが伸びるに従って、ジャッキ１９は支点２５を中心に回転すると共に、リンク１８は、ジャッキ１９の伸縮ロッド１９ａの伸びにより支点２２を中心にして回転する。
【００２４】
リンク１８が支点２２を中心にして回転すると、リンク１８は長さが固定なので、リンク１８と基板ホルダ５の支持部材２１との間で連結される支点２３は、リンク１８の長さを半径として支点２２を中心とした円弧上を移動する。
【００２５】
従って、リンク１８が支点２２を中心として回転すると、基板ホルダ５は、ヒンジ１０を揺動中心として矢印イ方向に起き上げられる。このような基板ホルダ５の起き上げが行われると、リンク１８の両端部の各支点２２、２３の間隔は固定であり、かつリンク１８の支点２２とヒンジ１０との間隔も固定である。これにより各支点２２、２３及びヒンジ１０の３点からなる三角形を考えると、リンク１８が支点２２を中心として回転するに従って支点２３とヒンジ１０との間隔が次第に短くなることが分る。
【００２６】
しかるに、支点２３とヒンジ１０との間隔が次第に短くなることから基板ホルダ５は、直線ガイド１５上を正面側に摺動し、基板ホルダ５の下端側となる縁がベース３上面の縁部分１１よりも正面側にせり出す。
【００２７】
そして、ジャッキ１９の伸縮ロッド１９ａの伸びが大きくなるに従って、リンク１８の回転量が大きくなり、基板ホルダ５の起き上がり角度が大きくなるに従って、基板ホルダ５の下端側となる縁のベース３上面の縁部分１１からのせり出量が大きくなる。
【００２８】
このように基板ホルダ５の起き上がり角度が大きくなると、基板ホルダ５の下端側となる縁のせり出量が大きるなることから、基板ホルダ５の下端側となった縁は、ベース３上面の縁部分１１よりも下降する。
【００２９】
この基板ホルダ５の下端縁部分１１の下降する距離は、リンク１８の長さ、直線ガイド１５の長さ、伸縮ロッド１９ａの伸びの長さを変更することで任意に設定される。
【００３０】
すなわち、上記各支点２２、２３及びヒンジ１０の３点からなる三角形を考えると、伸縮ロッド１９ａの伸びの長さに応じて各支点２２、２３を通る辺と支点２３及びヒンジ１０を通る辺との成す角度が小さくなる程、基板ホルダ５の起き上がり角度が大きくなり、当該角度や伸縮ロッド１９ａの伸びの長さを調整することで、基板ホルダ５の起き上がり角度及び基板ホルダ５の下端縁部分１１の下降する距離を任意に設定できる。
【００３１】
なお、基板ホルダ５は、ヒンジ支持部材１１、ヒンジ１０及び移動ブロック１４からなる部分と、支持部材２１とによってベース３上に水平状態に載置されるものとなり、ヒンジ支持部材１１、ヒンジ１０及び移動ブロック１４の高さと支持部材２１の高さとが同一に形成されている。
【００３２】
基板ホルダ５の上方には、マクロ照明装置３０が設けられている。このマクロ照明装置３０は、マクロ照明光を放射するマクロ光源３１と、このマクロ光源３１から放射されたマクロ照明光を反射する反射ミラー３２と、この反射ミラー３２で反射されたマクロ照明光を収束するフレネルレンズ３３とからなる。マクロ光源３１は例えば水平方向（Ｘ方向）にマクロ照明光を放射するように設けられ、反射ミラー３２は水平方向に対して約５０度に傾けて設けられ、照明光軸を起き上げた大型ガラス基板側に折り曲げる。
【００３３】
ミクロ検査装置４０は、ベース３上にＸ方向に移動可能に設けられた門型アーム４１と、この門型アーム４１の水平アームに沿ってＹ方向に移動可能に設けられた顕微鏡４２とからなる。
【００３４】
制御装置４３は、ジャッキ１９の伸縮動作を制御する機能と、マクロ光源３１の点灯制御を行う機能と、顕微鏡ステージ４１のＸ方向に対する移動制御と顕微鏡４２のＹ方向に対する移動制御とを行って顕微鏡４２の観察視野がマクロ検査で特定された大型ガラス基板４上の欠陥部分を捉える位置に移動させる機能とを有する。
【００３５】
次に、上記の如く構成された装置の作用をマクロ検査及びミクロ検査の場合について説明する。
【００３６】
検査開始前、ジャッキ１９は縮んでおり、大型ガラス基板４を載置する基板ホルダ５は水平状態にある。
【００３７】
マクロ検査を行う場合、制御装置４３の制御によりジャッキ１９の伸縮ロッド１９ａが伸び、リンク１８が支点２２を中心として回転する。このジャッキ１９の伸縮ロッド１９ａの伸び及びリンク１８の回転により、基板ホルダ５の起き上げが開始される。
【００３８】
このとき、基板ホルダ５は、当該基板ホルダ５下面の各直線ガイド１５が各摺動用溝１６内を摺動し、図４に示すようにベース３の縁部分１１よりも前方側にせり出されると共に、ヒンジ１０を揺動中心として起き上げられる。
【００３９】
さらに、ジャッキ１９の伸縮ロッド１９ａが伸びるに従って基板ホルダ５は、起き上げられて下端側となった基板ホルダ５の縁がベース３上面の縁部分１１よりも下降する。
【００４０】
マクロ検査を行うときは、観察者によってジャッキ１９の伸縮ロッド１９ａの伸びが調整され、基板ホルダ５がマクロ観察しやすい任意の起き上げ角度に調整される。
【００４１】
このように起き上げられた基板ホルダ５は、その下端側となった縁がベース３上面の縁部分１１よりも下降しているので、基板ホルダ５が架台１上に設けられていても、大型ガラス基板４の全面が観察者に近付き、特に大型ガラス基板４の上端部分の高さが従来よりも低くなり、大型ガラス基板４の上端部分と観察者との距離が短くなる。
【００４２】
この状態に、マクロ光源３１からマクロ照明光が放射されると、このマクロ照明光は、反射ミラー３２で反射され、フレネルレンズ３３により収束されて基板ホルダ５上の大型ガラス基板４に照射される。
【００４３】
観察者は、大型ガラス基板４で反射する光を目視観察してマクロ検査するが、このとき大型ガラス基板４の上端部分の高さが従来よりも低いので、大型ガラス基板４の上端部分を見上げることなく、かつ大型ガラス基板４の全面に亘って、例えば傷やむらなどの欠陥部分の方向によって異なる反射方向の光を捉えて、大型ガラス基板４に存在する欠陥部分を確実に特定できる。
【００４４】
又、マクロ検査を行うときには、例えば基板ホルダ５がマクロ観察しやすい任意の起き上げ角度に調整された状態で、かつ各ジャッキ１９の伸縮ロッド１９ａが予め設定された伸縮長さで伸縮動作を繰り返す。この伸縮動作の繰り返しにより基板ホルダ５は、所定周期で矢印イ方向に連続して揺動する。
【００４５】
この揺動する基板ホルダ５の起き上がり角度範囲は、制御装置４３に予め設定しておく。この制御装置４３は、予め設定された起き上がり角度範囲に応じて各ジャッキ１９の伸縮ロッド１９ａの伸縮長さを決定する。
【００４６】
このように基板ホルダ５が連続して揺動すれば、例えば傷やむらなどの欠陥部分の方向によって異なる反射方向の光が観察者の視界に入るようになり、観察者は視点の動きを少なくして上記例えば傷やむらなどの欠陥部分を特定できる。
【００４７】
なお、マクロ検査により特定された大型ガラス基板４上の欠陥部分の座標データは、制御装置４３にインプットされる。
【００４８】
次に、ミクロ検査を行う。ジャッキ１９は、制御装置４３の制御により伸縮ロッド１９ａが縮み、これに応動してリンク１８が支点２２を中心として基板ホルダ５の起き上げ時とは逆方向に回転し、基板ホルダ５が元の水平状態に戻る。
【００４９】
基板ホルダ５がベース３上に降りて水平状態になると、制御装置４３は、マクロ検査時にインプットされた欠陥部分の座標データに基づいて顕微鏡ステージ４１をＸ方向に移動制御すると共に、顕微鏡４２を顕微鏡ステージ４１上でＹ方向に移動制御し、顕微鏡４２の観察視野をマクロ検査で特定された大型ガラス基板４上の欠陥部分を捉える位置に移動させる。顕微鏡４２により拡大された欠陥部分の像は、例えばＣＣＤカメラにより撮像され、モニタテレビジョンに表示される。観察者は、モニタテレビジョンに表示された欠陥部分の拡大像を観察する。
【００５０】
なお、制御装置４３は、顕微鏡ステージ４１をＸ方向に移動制御すると共に、顕微鏡４２を顕微鏡ステージ４１上でＹ方向に移動制御し、顕微鏡４２の観察視野を大型ガラス基板４の全面を走査するようにしてもよい。
【００５１】
ミクロ検査のとき、基板ホルダ５は、ヒンジ支持部材１１、ヒンジ１０及び移動ブロック１４からなる部分と、支持部材２１とによってベース３上に載置されるので、外部からの振動の影響を受けずに基板ホルダ５の安定性が高くなる。
【００５２】
本発明の基板保持装置は、マクロ検査時及びミクロ検査時に限らず、大型ガラス基板４を基板ホルダ５上に載置するときと、基板ホルダ５上から取り外すときの搬送装置としても使用できる。
【００５３】
例えば、大型ガラス基板４を基板ホルダ５上に載置するとき、制御装置４３の制御によりジャッキ１９の伸縮ロッド１９ａを伸ばすことにより、基板ホルダ５は、図４に示すようにベース３の縁部分１１よりも前方側にせり出しながらヒンジ１０を揺動中心として起き上げられ、かつ基板ホルダ５の下端側となった縁がベース３上面の縁部分１１よりも下降する。
【００５４】
このように基板ホルダ５が起き上げられると、大型ガラス基板４は、略垂直方向（Ｚ方向）に立てた状態で図２に示す各ローラ付基準ピン８上に載置され、押付けピン９により各基準ピン７に向って押し付けられ、基準位置にセットされる。この後、大型ガラス基板４は、基板ホルダ５に設けられた図示しない吸着孔からの吸引によって、基板ホルダ５表面上に吸着固定される。この後、ジャッキ１９の伸縮ロッド１９ａを縮め、基板ホルダ５をベース３上に移動させる。
【００５５】
一方、大型ガラス基板４を基板ホルダ５上から取り外すときは、上記載置するときと逆で、基板ホルダ５が起き上げられた状態に、大型ガラス基板４に対する吸着が解除され、大型ガラス基板４が略垂直方向（Ｚ方向）に立てられて基板ホルダ５から取り外される。
【００５６】
このような大型ガラス基板４の基板ホルダ５への載置又は取り外しのとき、基板ホルダ５は、その下端側の縁がベース３上面の縁部分１１よりも下降しているので、大型ガラス基板４を基板ホルダ５上に載置する場合、大型ガラス基板４を高い位置まで持ち上げる必要がなく、容易に大型ガラス基板４を基板ホルダ５に載置又は取り外しができる。又、大型ガラス基板４を立てた状態で位置決めすることで、大型ガラス基板４の自重によりローラ付基準ピン８に下辺が位置決めされるので、ローラ付基準ピン８に対向する押付けピンを省くことができ、かつ大型ガラス基板４と基板ホルダ５との間の面接触抵抗が小さくなり、押付けピン９の押圧力を小さくできる。
【００５７】
このように上記第１の実施の形態においては、架台１上で基板ホルダ５を水平状態又はジャッキ１９の伸縮動作により起き上げ方向に揺動可能で、当該揺動により基板ホルダ５を起き上がらせると、基板ホルダ５は直線ガイド１５のヒンジ１０に設けられた移動ブロック１４に対して摺動して、ベース３の縁部分１１より前方にせり出し、かつ起き上がりにより下端側となる基板ホルダ５の縁を架台１のベース３の縁部分１１よりも下降させるので、基板ホルダ５が架台１上に設けられていても、大型ガラス基板４の全面を観察者に近付けることができ、特に例えば１２５０×１１００ｍｍの大型ガラス基板４の上端部分の高さを従来よりも低くでき、大型ガラス基板４の上端部分と観察者との距離を短くでき、これによって観察者は大型ガラス基板４の上端部分を見上げることなく、かつ大型ガラス基板４の全面に亘って、例えば傷やむらなどの欠陥部分の方向によって異なる反射方向の光を捉えて、大型ガラス基板４に存在する欠陥部分を確実に特定できる。
【００５８】
又、大型ガラス基板４を起き上げたときの上端部分を従来よりも低くでき、これによりマクロ照明装置３０の設置位置も低くでき、基板検査装置全体の設置スペースを小さくできる。
【００５９】
又、マクロ検査を行うときには、例えば基板ホルダ５がマクロ観察しやすい任意の起き上げ角度に調整された状態で、各ジャッキ１９の伸縮ロッド１９ａの伸縮動作を連続して繰り返すことにより、観察者の視点の動きを少なくして、例えば傷やむらなどの欠陥部分の方向によって異なる反射方向の光を捉えてその欠陥部分を特定できる。この場合、基板ホルダ５を揺動させる角度範囲は、任意に制御装置４３に設定できるので、例えば傷やむらなどに限らず、欠け、汚れ、ダストなどの多種多様な欠陥部分を特定することが可能である。
【００６０】
ミクロ検査を行うときは、基板ホルダ５がヒンジ支持部材１１、ヒンジ１０及び移動ブロック１４からなる部分と、支持部材２１とによってベース３上に載置されるので、外部からの振動の影響を受けずに基板ホルダ５の安定性を高くでき、揺れのない顕微鏡４２の拡大像で欠陥部分を観察できる。
【００６１】
さらに、基板ホルダ５を起き上げて下端側となった縁をベース３の縁部分１１よりも下降させた状態で、基板ホルダ５上に対して大型ガラス基板４の載置又は取り外し使用すれば、大型ガラス基板４を高い位置まで持ち上げる必要がなく、容易に大型ガラス基板４の基板ホルダ５への載置又は取り外しができる。
【００６２】
又、基板ホルダ５をベース３の縁部分１１より前方側でせり出しながら基板ホルダ５を起き上がらせるので、マクロ照明光を遮ることなくがない。
【００６３】
揺動機構は、揺動支点であるヒンジ１０、せり出し機構としての直線ガイド１５、リンク機構１７などにより安価に構成できる。
【００６４】
次に、本発明の第２の実施の形態について図面を参照して説明する。なお、図１と同一部分には同一符号を付してその詳しい説明は省略する。
【００６５】
図５は本発明の基板保持装置を基板検査装置に適用した構成図である。この基板保持装置において、ヒンジ１０、ヒンジ支持部材１２、移動ブロック１４、直線ガイド１５、リンク１８、ジャッキ１９、延出端部２０及び支持部材２１は、上記第１の実施の形態で説明したように正面側から見てＹ方向の両端側にそれぞれ１組ずつ設けられており、本実施の形態では、これらを各ヒンジ１０，１０’、各ヒンジ支持部材１２，１２’、各移動ブロック１４，１４’、各直線ガイド１５，１５’、各リンク１８，１８’、各ジャッキ１９，１９’及び各支持部材２１，２１’の各符号を付して示す。
【００６６】
この基板保持装置には、図６に示すように基板ホルダ５の起き上げ方向での揺動の軸方向に対して垂直の軸方向で基板ホルダ５を揺動させる別方向揺動機構５０が設けられている。この別方向揺動機構５０には、基板ホルダ５の起き上げ方向の揺動軸方向に対して垂直な軸方向に回転（矢印ロ方向）させるヒンジユニット（回転支持部材）５１が設けられている。このヒンジユニット５１は、ヒンジ保持アーム５２と、このヒンジ保持アーム５２の両端にそれぞれ設けられた各ヒンジ支持片５２ａ、５２ｂと、ヒンジ保持アーム５２の底面における略中央部に設けられた回転軸５３とからなっている。このうち各ヒンジ支持片５２ａ、５２ｂには、それぞれ各ヒンジ１３、１３’が回転可能に設けられている。又、回転軸５３は、ベース３の正面側における略中央部に形成された回転用穴５４内に回転可能に設けられている。
【００６７】
制御装置４３は、各ジャッキ１９、１９’の各伸縮量をそれぞれ互いに異なる揺動量で制御する機能、例えば一方のジャッキ１９又は１９’を伸縮させずに他方のジャッキ１９’又は１９を伸縮させたり、又は一方のジャッキ１９又は１９’を伸ばし他方のジャッキ１９’又は１９を縮みさせる、さらにはこれらジャッキ１９、１９’の伸縮動作を同期して伸縮させる機能を有する。
【００６８】
このような構成であれば、マクロ検査を行うときは、観察者によって各ジャッキ１９、１９’の各伸縮ロッド１９ａ、１９ａ’の各伸びが調整され、基板ホルダ５がマクロ観察しやすい任意の起き上げ角度に調整される。
【００６９】
この状態で、各ジャッキ１９、１９’の各伸縮ロッド１９ａ、１９ａ’を同期させて伸縮動作を繰り返しすれば、この伸縮動作の繰り返しにより基板ホルダ５は、所定周期で矢印イ方向に連続して揺動する。
【００７０】
又、各ジャッキ１９、１９’は、例えば一方のジャッキ１９又は１９’を伸縮させずに他方のジャッキ１９’又は１９を伸縮させたり、又は一方のジャッキ１９又は１９’を伸ばし他方のジャッキ１９’又は１９を縮みさせたり、さらにはこれらジャッキ１９、１９’の伸縮動作が連続して繰り返される。
【００７１】
このように各ジャッキ１９、１９’の伸縮動作を変えることにより基板ホルダ５は、図６に示すヒンジユニット５１が回転軸５３を中心として矢印ロ方向に回転することにより、正面側から見て左右方向（以下、首振り方向と称する）に揺動する。図７は一方のジャッキ１９又は１９’を伸縮させずに他方のジャッキ１９’又は１９を伸縮させて基板ホルダ５を正面側から見て左側に首振りした状態を示す。この首振り方向の揺動範囲は、制御装置４３に予め設定しておいてもよいし、観察者の操作で任意に設定してもよい。
【００７２】
このように上記第２の実施の形態によれば、基板ホルダ５を首振り方向に揺動して任意の首振り角度に設定したり、又は連続して揺動することができてマクロ検査のバリエーションを増やすことができ、これにより起き上がり方向（矢印イ方向）での揺動で検出できなかった傷やむらなどの欠陥部分からの反射光を観察者により検出でき、当該欠陥部分を特定できる。
【００７３】
又、基板ホルダ５の起き上がり方向の揺動と首振り方向の揺動とを同時に動作させて、基板ホルダ５をあらゆる角度方向に設定したり、連続的にあらゆる角度方向に揺動させてマクロ検査できる。
【００７４】
なお、本発明は、上記第１及び第２の実施の形態に限定されるものでなく、実施段階ではその要旨を逸脱しない範囲で種々に変形することが可能である。
【００７５】
さらに、上記実施形態には、種々の段階の発明が含まれており、開示されている複数の構成要件における適宜な組み合わせにより種々の発明が抽出できる。例えば、実施形態に示されている全構成要件から幾つかの構成要件が削除されても、発明が解決しようとする課題の欄で述べた課題が解決でき、発明の効果の欄で述べられている効果が得られる場合には、この構成要件が削除された構成が発明として抽出できる。
【００７６】
例えば、上記第１及び第２の実施の形態では、基板ホルダ５を起き上がらせるとき、基板ホルダ５をベース３の縁部分１１より前方にせり出しながら基板ホルダ５の下側となる縁を架台１のベース３の縁部分１１よりも下降させているが、これに限らず、先ずは基板ホルダ５をベース３の縁部分１１より前方にせり出させ、この後に基板ホルダ５をヒンジ１０の回転軸１３を中心にして回動させてベース３の縁部分１１よりも下降させてもよく、とにかく基板ホルダ５を水平状態から所定の傾斜角度に起き上がらせたときに、基板ホルダ５の下側となる縁をベース３の縁部分１１よりも下降させるように揺動させればよい。このような基板ホルダ５の揺動動作は、揺動機構の構成を種々変形することにより可能である。
【００７７】
又、各リンク１８、１８’の長さは、例えばジャッキに代えてもよく、これらジャッキに代えることにより、基板ホルダ５を起き上げた状態で当該ジャッキを伸縮させると、基板ホルダ５を上下方向に移動させることができ、大型ガラス基板上の目視観察したい領域を、観察者のマクロ検査し易い高さ位置に配置できる。
【００７８】
揺動機構は、揺動支点であるヒンジ１０、せり出し機構としての直線ガイド１５、リンク機構１７などから構成したが、これに限らず、他の如何なる機構を用いてもよく、例えば、基板ホルダ５の揺動支点となる各ヒンジ１０，１０’に揺動とスライド機能とを兼ね備えた構成にしてもよく、又、基板ホルダ５を円弧状の移動させる揺動機構を用いてもよい。
【００７９】
又、本発明の基板保持装置は、例えばフラットパネルディスプレイ製造工程で用いる基板検査装置に適用してマクロ検査とミクロ検査とを複合した構成について説明したが、これに限らず、マクロ検査の単体で用いてもよく、さらには大型ガラス基板４上の膜厚測定やパターン検査などの各種基板の検査装置に適用して、大型ガラス基板４の保持や大型ガラス基板４への載置、取り出しに用いることができる。
【００８０】
【発明の効果】
以上詳記したように本発明によれば、基板ホルダが揺動支点を支点として起き上がる方向にジャッキにより基板ホルダを回動させると、直線ガイドが基板ホルダの回動に伴って揺動支点に対してスライド移動すると共に、基板ホルダが揺動支点を支点として回動しながらベースの前側縁部より前方にせり出すので、大型ガラス基板を起き上げてもその上端部分が高くならず、省スペース化を実現できる基板保持装置及び基板検査装置を提供できる。
【図面の簡単な説明】
【図１】本発明に係わる基板保持装置の第１の実施の形態を示す構成図。
【図２】本発明に係わる基板保持装置の第１の実施の形態における基板ホルダの正面構成図。
【図３】本発明に係わる基板保持装置の第１の実施の形態におけるヒンジ部分の拡大図。
【図４】本発明に係わる基板保持装置の第１の実施の形態における基板ホルダの起き上がり動作を示す図。
【図５】本発明に係わる基板保持装置の第２の実施の形態を示す構成図。
【図６】本発明に係わる基板保持装置の第２の実施の形態における別方向揺動機構の構成図。
【図７】本発明に係わる基板保持装置の第２の実施の形態における基板ホルダの首振り方向の揺動を示す図。
【符号の説明】
１：架台
２：脚
２ａ：水平梁
３：ベース
４：大型ガラス基板
５：基板ホルダ
６：開口部
７：基準ピン
８：ローラ付基準ピン
９：押付けピン
１０，１０’：ヒンジ
１１：縁部分
１２，１２’：ヒンジ支持部材
１３：回動軸
１４，１４’：移動ブロック
１５，１５’：直線ガイド
１５ａ：ストッパ
１６：摺動用溝
１７：リンク機構
１８，１８’：リンク
１９，１９’：ジャッキ
１９ａ：伸縮ロッド
２０：延出端部
２１，２１’：支持部材
２２，２３：支点
２４，２５：支点
３０：マクロ照明装置
３１：マクロ光源
３２：反射ミラー
３３：フレネルレンズ
４０：ミクロ検査装置
４１：門型アーム
４２：顕微鏡
４３：制御装置
５０：別方向揺動機構
５１：ヒンジユニット
５２：ヒンジ保持アーム
５２ａ，５２ｂ：ヒンジ支持片
５３：回転軸
５４：回転用穴[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate holding device that holds and swings a glass substrate when performing a defect inspection of the glass substrate such as a flat panel such as a large liquid crystal display (LCD) or a plasma display panel (PDP). And inspection equipment About.
[0002]
[Prior art]
In recent years, in the field of flat panel displays such as LCDs and PDPs, the size of glass substrates tends to increase more and more in order to meet the demands for larger screens and cost reductions in the flat panel display manufacturing process. is there.
[0003]
Defect inspection is performed on a large glass substrate manufactured in such a flat panel display manufacturing process, and a combination of macro inspection and micro inspection is performed as one method of this defect inspection. Yes. In the macro inspection, the glass substrate is irradiated with illumination light and the light reflected on the glass substrate is visually observed. In the micro inspection, the defect portion specified in the macro inspection is enlarged and observed with a microscope.
[0004]
As such a defect inspection apparatus, for example, there is a technique described in Japanese Patent Application Laid-Open No. 11-94756. In this publication, a glass substrate is placed on a holder at the time of macro inspection, is raised toward an observer, and is macroscopically observed. It describes that inspection is performed, the glass substrate is held in a horizontal state at the time of micro inspection, and the defect portion is enlarged and observed with a microscope. For the illumination during the macro inspection, for example, a light projecting device described in Japanese Patent Application Laid-Open No. 2000-146846 is used.
[0005]
[Problems to be solved by the invention]
The size of the glass substrate manufactured in the flat panel display manufacturing process tends to increase in size in order to meet the demands for larger screens and cost reductions. For example, a large size of 1250 × 1100 mm has appeared. .
[0006]
When such a large glass substrate is subjected to defect inspection using the defect inspection apparatus described in the above publication, it is caused to rise at a predetermined inclination angle around the lower side of the holder during macro inspection.
[0007]
However, when the large glass substrate held by the holder is raised, the upper end portion of the large glass substrate when raised is higher than the position of the observer's eyes. The distance to the upper end becomes longer, and the upper end of the large glass substrate becomes difficult to see.
[0008]
In addition, since the upper end portion of the large glass substrate when the large glass substrate is raised becomes a high position, the height space necessary for swinging the large glass substrate is increased, and the apparatus is increased in size.
[0009]
Accordingly, the present invention provides a substrate holding device that can realize space saving because the upper end portion of the large glass substrate is not raised even when the large glass substrate is raised. And board inspection equipment The purpose is to provide.
[0010]
[Means for Solving the Problems]
The present invention includes a base, a substrate holder provided on the base and holding a large substrate,
A linear guide provided on both sides of the substrate holder; a swing fulcrum provided at both front ends of the base for supporting the linear guide so as to be slidable; and connected to the substrate holder; And a jack that raises the substrate holder as a fulcrum, and the linear guide, the swing fulcrum and the jack constitute a swing mechanism, and the swing mechanism causes the substrate holder to be moved by the jack. As the substrate holder rotates, the linear guide slides with respect to the swing fulcrum, and the substrate holder rotates with the swing fulcrum as a fulcrum. In this case, the substrate holding device protrudes forward from the front edge of the base.
The present invention also provides a base, a substrate holder provided on the base and holding a large substrate, linear guides provided on both sides of the substrate holder, and both ends of the base on the front side. A swing fulcrum for slidably supporting the guide; and a jack that is connected to the substrate holder and raises the substrate holder with the swing fulcrum as a fulcrum. The substrate holder is rotated and the linear guide is slid relative to the swing fulcrum, so that an angle range between a horizontal state placed on the base and a vertical state protruding forward of the base is obtained. The substrate holder is rotated, and the large substrate is replaced with the substrate holder raised in a substantially vertical direction. Board holder The substrate holding apparatus is characterized in that the large substrate held on the substrate is transported onto the base.
The present invention also provides a base, a substrate holder provided on the base and holding a large substrate, linear guides provided on both sides of the substrate holder, and both ends of the base on the front side. A swing fulcrum that supports the guide in a slidable manner, a jack that is connected to the substrate holder and raises the substrate holder with the swing fulcrum as a fulcrum, and a surface of the large substrate held by the substrate holder A macro illumination device that irradiates macro illumination light, and the front end of the substrate holder is lowered from the front edge of the upper surface of the base by the linear guide and protrudes forward, and the front edge of the base Inspecting the defects on the large substrate by irradiating the macro illumination light in a state where the substrate holder is raised at a predetermined angle with the swing fulcrum provided on the fulcrum. A substrate inspection apparatus according to claim.
The present invention also provides a base, a substrate holder provided on the base and holding a large substrate, linear guides provided on both sides of the substrate holder, and both ends of the base on the front side. A swing fulcrum that supports the guide in a slidable manner, a jack that is connected to the substrate holder and raises the substrate holder using the swing fulcrum as a fulcrum, and a substrate holder that is horizontally placed on the base. A portal arm provided movably along both sides, a microscope movably provided along a horizontal arm of the portal arm, and a reference pin with a roller on the front edge of the substrate holder, A board positioning mechanism provided with a reference pin at one lateral end of the substrate holder and a pressing pin at the other lateral end opposite to the lateral end of the substrate holder; The large-sized substrate is placed on the reference pin with a roller in a state where the substrate holder is raised substantially vertically, and the large-sized substrate is pressed against the reference pin by the pressing pin and positioned with the jack. It is a board | substrate inspection apparatus characterized by moving on a base, returning horizontally, and inspect | inspecting the said large sized board | substrate positioned on the said board | substrate holder with the said microscope.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
[0012]
FIG. 1 is a cross-sectional configuration diagram in which a substrate holding apparatus of the present invention is applied to a substrate inspection apparatus. The gantry 1 includes a leg 2 and a base 3 provided on the leg 2. A substrate holder 5 for holding the large glass substrate 4 is provided on the base 3. The horizontal height of the substrate holder 5 is set to the delivery height of the transfer robot. The upper surface of the base 3 is provided horizontally.
[0013]
The substrate holder 5 has an opening 6 as shown in FIG. 2, and each reference pin 7 for determining the reference position of the large glass substrate 4 along each side of the opening 6 and a reference pin with a roller. 8 and a pressing pin 9 are provided. The pressing pin 9 is provided so as to be movable in a direction in which the large glass substrate 4 is pressed against the reference pin 7 side.
[0014]
The substrate holder 5 has a hinge 10 as a swing axis with respect to the upper surface of the base 3 by a swing mechanism (a hinge 10 serving as a swing fulcrum, a linear guide 15 serving as a protruding mechanism, and a link mechanism 17) described below. The substrate holder 5 is provided so as to be able to swing in the direction in which the substrate holder 5 is raised or returned to the horizontal state (in the direction of arrow A). The hinges 10 are respectively provided on both end sides of the base 3 when the substrate holding device is viewed from the front side.
[0015]
As shown in FIG. 3, hinge support members 12 are respectively provided at both ends of the edge portion 11 on the front side of the upper surface of the base 3. Each hinge 10 is rotatably provided on each hinge support member 12. The pivot shafts 13 of the hinges 10 are provided in the horizontal direction (Y direction) when viewed from the front side in order to swing the substrate holder 5 in the direction of raising or returning it to the horizontal state (arrow A direction).
[0016]
The hinge 10 is provided with a moving block 14. The moving block 14 is formed with a sliding groove 16 that fits into a linear guide 15 provided on the back surface of the substrate holder 5.
[0017]
The linear guide 15 slides in the sliding groove 16 when the substrate holder 5 is raised to project the substrate holder 5 to the front side, and the hinge 10 swings the substrate holder 5 with the rotating shaft 13 as a fulcrum. By doing so, the lower end of the substrate holder 5 is lowered from the edge portion 11 on the upper surface of the base 3, and the linear guide 15 and the hinge 10 constitute a protruding mechanism.
[0018]
The linear guides 15 are provided on both ends of the lower surface of the substrate holder 5 and are placed in the sliding grooves 16 formed in the moving blocks 14 on both ends of the base 3. These linear guides 15 slide in the sliding groove 16 when the substrate holder 5 is raised to project the substrate holder 5 to the front side, and the edge that is the lower end side of the substrate holder 5 is the upper surface of the base 3. It is formed to have a length sufficiently lower than the edge portion 11, for example, from the lower end side of the substrate holder 5 to slightly above the center portion.
[0019]
A stopper 15 a is provided on the upper end side of these linear guides 15. These stoppers 15a are provided to limit the inclination of the substrate holder 5 so that the substrate holder 5 is not inclined more than a preset maximum inclination angle when the substrate holder 5 is raised.
[0020]
The link mechanism 17 has a function of swinging the substrate holder 5 on the base 3 in a horizontal state or in a rising direction, and includes a link 18 and a jack 19. The link 18 is formed in a fixed length, and is provided between an extended end 20 that extends downward from the base 3 and a support member 21 that is provided below the substrate holder 5. The link 18 is rotatable at the fulcrums 22 and 23 with respect to the extended end portion 20 and the support member 21, respectively.
[0021]
The jack 19 has a telescopic rod 19 a and is provided between the support member 21 side of the link 18 and the horizontal beam 2 a of the leg 2. In the jack 19, the tip of the telescopic rod 19a is rotatably connected to the fulcrum 24 with respect to the link 18, and the lower end of the jack 19 is rotatably connected to the fulcrum 25 with respect to the horizontal beam 2a.
[0022]
The link mechanisms 17 are provided on both end sides of the substrate holder 5 when the substrate holding device is viewed from the front side.
[0023]
Therefore, when the telescopic rod 19a of the jack 19 extends, the tip of the telescopic rod 19a of the jack 19 applies a pressure to the support member 21 side of the link 18. At this time, since the other end of the jack 19 is provided on the horizontal beam 2a of the leg 2 and the length of the link 18 is fixed, the jack 19 rotates around the fulcrum 25 as the telescopic rod 19a of the jack 19 extends. The link 18 rotates around the fulcrum 22 by the extension of the telescopic rod 19a of the jack 19.
[0024]
When the link 18 rotates around the fulcrum 22, the link 18 has a fixed length. Therefore, the fulcrum 23 connected between the link 18 and the support member 21 of the substrate holder 5 has the length of the link 18 as a radius. It moves on an arc centered on the fulcrum 22.
[0025]
Accordingly, when the link 18 rotates about the fulcrum 22, the substrate holder 5 is raised in the direction of arrow A with the hinge 10 as the swing center. When the substrate holder 5 is raised, the distance between the fulcrums 22 and 23 at both ends of the link 18 is fixed, and the distance between the fulcrum 22 of the link 18 and the hinge 10 is also fixed. Accordingly, when considering a triangle composed of the three fulcrum points 22 and 23 and the hinge 10, it can be seen that the distance between the fulcrum 23 and the hinge 10 gradually decreases as the link 18 rotates about the fulcrum 22.
[0026]
However, since the distance between the fulcrum 23 and the hinge 10 is gradually shortened, the substrate holder 5 slides on the straight guide 15 to the front side, and the edge on the lower end side of the substrate holder 5 is the edge portion 11 on the upper surface of the base 3. It protrudes to the front side.
[0027]
As the extension of the telescopic rod 19a of the jack 19 increases, the amount of rotation of the link 18 increases, and as the rising angle of the substrate holder 5 increases, the edge of the upper surface of the base 3 that is the lower end side of the substrate holder 5 increases. The amount of protrusion from the portion 11 increases.
[0028]
When the rising angle of the substrate holder 5 increases as described above, the protruding amount of the edge that becomes the lower end side of the substrate holder 5 increases, so the edge that becomes the lower end side of the substrate holder 5 is the edge of the upper surface of the base 3. Lower than part 11.
[0029]
The distance by which the lower end edge portion 11 of the substrate holder 5 descends is arbitrarily set by changing the length of the link 18, the length of the linear guide 15, and the length of extension of the telescopic rod 19a.
[0030]
That is, when considering a triangle composed of the three fulcrum points 22 and 23 and the hinge 10, the side passing through the fulcrum points 22 and 23 and the side passing through the fulcrum 23 and the hinge 10 according to the length of extension of the telescopic rod 19a The rising angle of the substrate holder 5 becomes larger as the angle formed by the movement of the substrate holder 5 becomes smaller, and the rising angle of the substrate holder 5 and the lower end edge portion 11 of the substrate holder 5 are adjusted by adjusting the angle and the length of extension of the telescopic rod 19a. Can be set arbitrarily.
[0031]
The substrate holder 5 is placed on the base 3 in a horizontal state by the support member 21 and the portion comprising the hinge support member 11, the hinge 10 and the moving block 14, and the hinge support member 11, the hinge 10 and The height of the moving block 14 and the height of the support member 21 are formed to be the same.
[0032]
A macro illumination device 30 is provided above the substrate holder 5. The macro illumination device 30 converges the macro light source 31 that emits macro illumination light, the reflection mirror 32 that reflects the macro illumination light emitted from the macro light source 31, and the macro illumination light reflected by the reflection mirror 32. And a Fresnel lens 33. The macro light source 31 is provided, for example, so as to radiate macro illumination light in the horizontal direction (X direction), and the reflection mirror 32 is provided with an inclination of about 50 degrees with respect to the horizontal direction, and a large glass that raises the illumination optical axis. Bend to the board side.
[0033]
The micro inspection apparatus 40 includes a portal arm 41 provided on the base 3 so as to be movable in the X direction, and a microscope 42 provided so as to be movable in the Y direction along the horizontal arm of the portal arm 41. .
[0034]
The control device 43 performs a function of controlling the expansion / contraction operation of the jack 19, a function of controlling the lighting of the macro light source 31, a movement control of the microscope stage 41 in the X direction, and a movement control of the microscope 42 in the Y direction. 42 has a function of moving the observation field of view to a position where a defective portion on the large glass substrate 4 identified by the macro inspection is captured.
[0035]
Next, the operation of the apparatus configured as described above will be described in the case of macro inspection and micro inspection.
[0036]
Before the start of the inspection, the jack 19 is contracted, and the substrate holder 5 on which the large glass substrate 4 is placed is in a horizontal state.
[0037]
When performing a macro inspection, the telescopic rod 19 a of the jack 19 extends under the control of the control device 43, and the link 18 rotates around the fulcrum 22. As the telescopic rod 19a of the jack 19 extends and the link 18 rotates, the substrate holder 5 starts to be raised.
[0038]
At this time, each linear guide 15 on the lower surface of the substrate holder 5 slides in each sliding groove 16 so that the substrate holder 5 protrudes forward from the edge portion 11 of the base 3 as shown in FIG. At the same time, it can be raised with the hinge 10 as the center of oscillation.
[0039]
Further, as the telescopic rod 19a of the jack 19 extends, the edge of the substrate holder 5 raised to the lower end side is lowered from the edge portion 11 on the upper surface of the base 3.
[0040]
When performing the macro inspection, the observer adjusts the extension of the telescopic rod 19a of the jack 19, and the substrate holder 5 is adjusted to an arbitrary rising angle at which macro observation is easy.
[0041]
Since the edge of the substrate holder 5 raised in this way is lower than the edge portion 11 on the upper surface of the base 3, even if the substrate holder 5 is provided on the gantry 1, it is large. The entire surface of the glass substrate 4 approaches the observer, and in particular, the height of the upper end portion of the large glass substrate 4 becomes lower than that of the conventional one, and the distance between the upper end portion of the large glass substrate 4 and the observer becomes shorter.
[0042]
In this state, when the macro illumination light is emitted from the macro light source 31, the macro illumination light is reflected by the reflection mirror 32, converged by the Fresnel lens 33, and irradiated onto the large glass substrate 4 on the substrate holder 5. .
[0043]
The observer visually observes the light reflected by the large glass substrate 4 and performs a macro inspection. At this time, the height of the upper end portion of the large glass substrate 4 is lower than that of the conventional one, so the upper end portion of the large glass substrate 4 is looked up. In addition, over the entire surface of the large glass substrate 4, it is possible to reliably identify the defective portion existing in the large glass substrate 4 by capturing the light in the reflection direction that differs depending on the direction of the defective portion such as scratches and unevenness.
[0044]
Further, when performing the macro inspection, for example, the expansion / contraction operation is repeated with the expansion / contraction rod 19a of each jack 19 in a state in which the substrate holder 5 is adjusted to an arbitrary rising angle that allows easy macro observation, and the expansion / contraction rod 19a of each jack 19 is set in advance. . By repeating this expansion / contraction operation, the substrate holder 5 continuously oscillates in the direction of the arrow A at a predetermined cycle.
[0045]
The range of the rising angle of the swinging substrate holder 5 is set in the control device 43 in advance. The control device 43 determines the extension / contraction length of the extension / contraction rod 19a of each jack 19 according to a preset rising angle range.
[0046]
If the substrate holder 5 is continuously swung in this way, light in a reflection direction that differs depending on the direction of a defective portion such as a scratch or unevenness, for example, enters the observer's field of view, and the observer moves the viewpoint less. Thus, for example, a defective portion such as a scratch or unevenness can be specified.
[0047]
The coordinate data of the defective portion on the large glass substrate 4 specified by the macro inspection is input to the control device 43.
[0048]
Next, a micro inspection is performed. In the jack 19, the telescopic rod 19 a contracts under the control of the control device 43, and in response to this, the link 18 rotates around the fulcrum 22 in the direction opposite to that when the substrate holder 5 is raised. Return to level.
[0049]
When the substrate holder 5 is lowered onto the base 3 and is in a horizontal state, the control device 43 controls the movement of the microscope stage 41 in the X direction based on the coordinate data of the defective portion input at the time of the macro inspection, and controls the microscope 42 with the microscope. The movement is controlled in the Y direction on the stage 41, and the observation visual field of the microscope 42 is moved to a position where a defective portion on the large glass substrate 4 specified by the macro inspection is captured. The image of the defect portion magnified by the microscope 42 is captured by, for example, a CCD camera and displayed on a monitor television. The observer observes an enlarged image of the defective portion displayed on the monitor television.
[0050]
The control device 43 controls the movement of the microscope stage 41 in the X direction and controls the movement of the microscope 42 in the Y direction on the microscope stage 41 so that the observation field of the microscope 42 scans the entire surface of the large glass substrate 4. It may be.
[0051]
At the time of the micro inspection, the substrate holder 5 is placed on the base 3 by the portion including the hinge support member 11, the hinge 10 and the moving block 14 and the support member 21, so that it is not affected by external vibration. In addition, the stability of the substrate holder 5 is increased.
[0052]
The substrate holding device of the present invention can be used not only at the time of macro inspection and at the time of micro inspection, but also as a transport device when placing the large glass substrate 4 on the substrate holder 5 and removing it from the substrate holder 5.
[0053]
For example, when the large glass substrate 4 is placed on the substrate holder 5, the substrate holder 5 is attached to the edge portion of the base 3 as shown in FIG. 4 by extending the telescopic rod 19 a of the jack 19 under the control of the control device 43. The edge that is raised from the hinge 10 as the center of swinging while protruding to the front side of the head 11 and becomes the lower end side of the substrate holder 5 is lowered from the edge portion 11 of the upper surface of the base 3.
[0054]
When the substrate holder 5 is raised as described above, the large glass substrate 4 is placed on the reference pins 8 with rollers shown in FIG. It is pressed toward each reference pin 7 and set at a reference position. Thereafter, the large glass substrate 4 is sucked and fixed on the surface of the substrate holder 5 by suction from a suction hole (not shown) provided in the substrate holder 5. Thereafter, the telescopic rod 19 a of the jack 19 is contracted, and the substrate holder 5 is moved onto the base 3.
[0055]
On the other hand, when removing the large glass substrate 4 from the substrate holder 5, the adsorption to the large glass substrate 4 is released in a state where the substrate holder 5 is raised, contrary to the case of placing the large glass substrate 4, and the large glass substrate 4. Is set in a substantially vertical direction (Z direction) and removed from the substrate holder 5.
[0056]
When the large glass substrate 4 is placed on or removed from the substrate holder 5, the lower edge of the substrate holder 5 is lowered from the edge portion 11 on the upper surface of the base 3. Is placed on the substrate holder 5, it is not necessary to lift the large glass substrate 4 to a high position, and the large glass substrate 4 can be easily placed on or removed from the substrate holder 5. Further, by positioning the large glass substrate 4 in an upright state, the lower side is positioned on the reference pin 8 with the roller by the weight of the large glass substrate 4, so that the pressing pin facing the reference pin 8 with the roller can be omitted. The surface contact resistance between the large glass substrate 4 and the substrate holder 5 can be reduced, and the pressing force of the pressing pin 9 can be reduced.
[0057]
As described above, in the first embodiment, the substrate holder 5 can be swung in the horizontal state on the gantry 1 or in the rising direction by the expansion and contraction operation of the jack 19, and the substrate holder 5 is lifted by the swing. The substrate holder 5 slides with respect to the moving block 14 provided on the hinge 10 of the linear guide 15, protrudes forward from the edge portion 11 of the base 3, and rises so that the edge of the substrate holder 5 that becomes the lower end side is raised. Since it is lowered from the edge portion 11 of the base 3 of the gantry 1, even if the substrate holder 5 is provided on the gantry 1, the entire surface of the large glass substrate 4 can be brought close to the observer, particularly 1250 × 1100 mm, for example. The height of the upper end portion of the large glass substrate 4 can be made lower than before, and the distance between the upper end portion of the large glass substrate 4 and the observer can be shortened. A defect present in the large glass substrate 4 without looking up at the upper end portion of the glass substrate 4 and capturing light in a reflection direction that varies depending on the direction of the defect portion such as scratches and unevenness over the entire surface of the large glass substrate 4. The part can be reliably identified.
[0058]
In addition, the upper end portion when the large glass substrate 4 is raised can be made lower than before, so that the installation position of the macro illumination device 30 can be lowered, and the installation space of the entire substrate inspection apparatus can be reduced.
[0059]
Further, when performing the macro inspection, for example, the expansion and contraction operation of the expansion rod 19a of each jack 19 is continuously repeated in a state in which the substrate holder 5 is adjusted to an arbitrary rising angle at which macro observation is easy. By reducing the movement of the viewpoint, it is possible to identify the defective portion by capturing light in a reflection direction that differs depending on the direction of the defective portion such as a scratch or unevenness. In this case, since the angle range for swinging the substrate holder 5 can be arbitrarily set in the control device 43, for example, not only scratches and unevenness but also various defect parts such as chipping, dirt, dust and the like can be specified. Is possible.
[0060]
When performing the micro inspection, the substrate holder 5 is placed on the base 3 by the support member 21 and the portion including the hinge support member 11, the hinge 10 and the moving block 14, and thus is affected by external vibration. Therefore, the stability of the substrate holder 5 can be increased, and the defect portion can be observed with the magnified image of the microscope 42 without shaking.
[0061]
Furthermore, if the large-sized glass substrate 4 is placed on or removed from the substrate holder 5 in a state where the edge that has been raised from the substrate holder 5 and is lowered below the edge portion 11 of the base 3 is used, There is no need to lift the large glass substrate 4 to a high position, and the large glass substrate 4 can be easily placed on or removed from the substrate holder 5.
[0062]
Further, since the substrate holder 5 is raised while protruding from the edge portion 11 of the base 3 on the front side, the macro illumination light is not obstructed.
[0063]
The swing mechanism can be constructed at a low cost by the hinge 10 serving as a swing fulcrum, the linear guide 15 serving as a protruding mechanism, the link mechanism 17 and the like.
[0064]
Next, a second embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.
[0065]
FIG. 5 is a configuration diagram in which the substrate holding device of the present invention is applied to a substrate inspection device. In this substrate holding device, the hinge 10, the hinge support member 12, the moving block 14, the linear guide 15, the link 18, the jack 19, the extended end portion 20, and the support member 21 are as described in the first embodiment. One set is provided on each end in the Y direction as viewed from the front side. In the present embodiment, these are each hinge 10, 10 ', each hinge support member 12, 12', each moving block 14, 14 ′, the linear guides 15, 15 ′, the links 18, 18 ′, the jacks 19, 19 ′, and the support members 21, 21 ′ are indicated by the reference numerals.
[0066]
As shown in FIG. 6, this substrate holding device is provided with another direction swing mechanism 50 for swinging the substrate holder 5 in the axial direction perpendicular to the axial direction of the swing in the rising direction of the substrate holder 5. It has been. The other direction swing mechanism 50 is provided with a hinge unit (rotation support member) 51 that rotates (in the direction of arrow B) in an axial direction perpendicular to the swing axis direction of the substrate holder 5 in the raising direction. . The hinge unit 51 includes a hinge holding arm 52, hinge support pieces 52 a and 52 b provided at both ends of the hinge holding arm 52, and a rotating shaft 53 provided at a substantially central portion on the bottom surface of the hinge holding arm 52. It is made up of. Of these, the hinge support pieces 52a and 52b are rotatably provided with the hinges 13 and 13 ', respectively. The rotation shaft 53 is rotatably provided in a rotation hole 54 formed at a substantially central portion on the front side of the base 3.
[0067]
The control device 43 has a function of controlling the expansion and contraction amounts of the jacks 19 and 19 ′ with different swing amounts, for example, extending or contracting the other jack 19 ′ or 19 without expanding or contracting one jack 19 or 19 ′. Alternatively, one jack 19 or 19 'is extended and the other jack 19' or 19 is contracted, and further, the expansion and contraction operation of these jacks 19 and 19 'is synchronized.
[0068]
With such a configuration, when performing a macro inspection, the observer adjusts each extension of the telescopic rods 19a and 19a ′ of the jacks 19 and 19 ′ so that the substrate holder 5 can easily observe the macro. It is adjusted to the raising angle.
[0069]
In this state, if the telescopic rods 19a and 19a ′ of the jacks 19 and 19 ′ are synchronized and the telescopic operation is repeated, the substrate holder 5 is continuously moved in the direction of the arrow a with a predetermined cycle by repeating the telescopic operation. Swing.
[0070]
Each jack 19, 19 ′ is, for example, the other jack 19 ′ or 19 is expanded or contracted without expanding or contracting one jack 19 or 19 ′, or the other jack 19 or 19 ′ is extended and the other jack 19 ′ is expanded. Alternatively, the expansion / contraction operation of the jacks 19 and 19 ′ is continuously repeated.
[0071]
In this way, by changing the expansion / contraction operation of each jack 19, 19 ′, the substrate holder 5 can be viewed from the front side by rotating the hinge unit 51 shown in FIG. It swings in the direction (hereinafter referred to as the swing direction). FIG. 7 shows the substrate holder 5 viewed from the front side by extending or contracting the other jack 19 'or 19 without expanding or contracting one jack 19 or 19'. left Shows the state of swinging. The swing range in the swing direction may be set in the control device 43 in advance, or may be arbitrarily set by an observer's operation.
[0072]
As described above, according to the second embodiment, the substrate holder 5 can be swung in the swinging direction to set an arbitrary swinging angle, or can be swung continuously to perform macro inspection. Variations can be increased, whereby the observer can detect reflected light from a defective portion such as a scratch or unevenness that cannot be detected by swinging in the rising direction (the direction of arrow B), and the defective portion can be specified.
[0073]
In addition, the substrate holder 5 is swung in the rising direction and the swinging direction in the swinging direction at the same time to set the substrate holder 5 in any angular direction or continuously swing in any angular direction for macro inspection. it can.
[0074]
In addition, this invention is not limited to the said 1st and 2nd embodiment, In the implementation stage, it can change variously in the range which does not deviate from the summary.
[0075]
Furthermore, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent requirements. For example, even if some constituent elements are deleted from all the constituent elements shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and is described in the column of the effect of the invention. If the effect is obtained, a configuration from which this configuration requirement is deleted can be extracted as an invention.
[0076]
For example, in the first and second embodiments described above, when the substrate holder 5 is raised, the substrate holder 5 is projected forward from the edge portion 11 of the base 3 and the lower edge of the substrate holder 5 is formed on the base 1. Although it is lowered below the edge portion 11 of the base 3, the substrate holder 5 is first protruded forward from the edge portion 11 of the base 3 without being limited thereto, and then the substrate holder 5 is moved to the rotating shaft 13 of the hinge 10. May be lowered from the edge portion 11 of the base 3 so that the lower edge of the substrate holder 5 is raised when the substrate holder 5 is raised from the horizontal state to a predetermined inclination angle. May be swung so as to be lower than the edge portion 11 of the base 3. Such a swinging motion of the substrate holder 5 is possible by variously changing the configuration of the swinging mechanism.
[0077]
Further, the length of each link 18, 18 'may be replaced with, for example, jacks. By replacing these jacks, when the jacks are expanded and contracted with the substrate holders 5 raised, the substrate holders 5 are moved in the vertical direction. The region on the large glass substrate that is desired to be visually observed can be placed at a height that is easy for the observer to perform macro inspection.
[0078]
The swing mechanism is composed of the hinge 10 serving as a swing fulcrum, the linear guide 15 serving as a protruding mechanism, the link mechanism 17 and the like, but is not limited thereto, and any other mechanism may be used. For example, the substrate holder 5 Each of the hinges 10 and 10 'serving as the swing fulcrum of the above may be configured to have both swing and slide functions, and a swing mechanism for moving the substrate holder 5 in an arc shape may be used.
[0079]
In addition, the substrate holding apparatus of the present invention has been described with respect to a configuration in which macro inspection and micro inspection are combined by applying to a substrate inspection apparatus used in, for example, a flat panel display manufacturing process. Furthermore, it may be used for inspection of various substrates such as film thickness measurement and pattern inspection on the large glass substrate 4, and is used for holding the large glass substrate 4, placing it on the large glass substrate 4, and taking it out. be able to.
[0080]
【The invention's effect】
As detailed above, according to the present invention, When the substrate holder is rotated by the jack in the direction in which the substrate holder rises with the swing fulcrum as a fulcrum, the linear guide slides with respect to the swing fulcrum as the substrate holder rotates, and the substrate holder also swings. Because it protrudes forward from the front edge of the base while rotating around Even when a large glass substrate is raised, the upper end portion thereof is not raised, and a substrate holding device and a substrate inspection device capable of realizing space saving can be provided.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing a first embodiment of a substrate holding apparatus according to the present invention.
FIG. 2 is a front configuration diagram of a substrate holder in the first embodiment of the substrate holding apparatus according to the present invention.
FIG. 3 is an enlarged view of a hinge portion in the first embodiment of the substrate holding apparatus according to the present invention.
FIG. 4 is a view showing a rising operation of the substrate holder in the first embodiment of the substrate holding apparatus according to the present invention.
FIG. 5 is a configuration diagram showing a second embodiment of a substrate holding apparatus according to the present invention.
FIG. 6 is a configuration diagram of another direction swing mechanism in the second embodiment of the substrate holding apparatus according to the present invention.
FIG. 7 is a diagram showing the swinging of the substrate holder in the swing direction in the second embodiment of the substrate holding apparatus according to the present invention.
[Explanation of symbols]
1: Mount
2: Leg
2a: Horizontal beam
3: Base
4: Large glass substrate
5: Substrate holder
6: Opening
7: Reference pin
8: Reference pin with roller
9: Push pin
10, 10 ': Hinge
11: Edge part
12, 12 ': Hinge support member
13: Rotating shaft
14, 14 ': Moving block
15, 15 ': Straight guide
15a: Stopper
16: Sliding groove
17: Link mechanism
18, 18 ': Link
19, 19 ': Jack
19a: telescopic rod
20: Extension end
21, 21 ': Support member
22, 23: fulcrum
24, 25: fulcrum
30: Macro lighting device
31: Macro light source
32: Reflection mirror
33: Fresnel lens
40: Micro inspection device
41: Portal arm
42: Microscope
43: Control device
50: Separate direction swing mechanism
51: Hinge unit
52: Hinge holding arm
52a, 52b: Hinge support piece
53: Rotating shaft
54: Hole for rotation

Claims (12)

ベースと、
前記ベース上に設けられ、大型基板を保持する基板ホルダと、
前記基板ホルダの両側に設けられた直線ガイドと、
前記ベースの前側両端部に設けられ、前記直線ガイドをスライド移動可能に支持する揺動支点と、
前記基板ホルダに連結し、前記揺動支点を支点として前記基板ホルダを起き上がらせるジャッキとを有し、
前記直線ガイド、前記揺動支点及び前記ジャッキにより揺動機構を構成し、
前記揺動機構は、前記ジャッキにより前記基板ホルダを前記揺動支点を支点として起き上がる方向に回動させることにより、この基板ホルダの回動に伴って前記直線ガイドが前記揺動支点に対してスライド移動すると共に、前記基板ホルダが前記揺動支点を支点として回動しながら前記ベースの前側縁部より前方にせり出す、
ことを特徴とする基板保持装置。Base and
A substrate holder provided on the base and holding a large substrate;
Linear guides provided on both sides of the substrate holder;
A swing fulcrum provided at both front ends of the base and supporting the linear guide so as to be slidable;
A jack that is connected to the substrate holder and raises the substrate holder with the swing fulcrum as a fulcrum;
A rocking mechanism is constituted by the linear guide, the rocking fulcrum and the jack,
The swing mechanism rotates the substrate holder in the direction of rising with the swing fulcrum as a fulcrum by the jack, so that the linear guide slides with respect to the swing fulcrum as the substrate holder rotates. While moving, the substrate holder protrudes forward from the front edge of the base while rotating about the swing fulcrum.
A substrate holding device. 前記基板ホルダは、前記揺動支点の回転軸と直交する回転軸により左右方向に揺動可能に支持され、
前記揺動機構は、前記基板ホルダの両側にそれぞれ前記ジャッキを連結し、前記各ジャッキの各伸縮量を制御して前記基板ホルダを左右方向に揺動させる別方向揺動機構を有する、
ことを特徴とする請求項１記載の基板保持装置。The substrate holder is supported so as to be swingable in the left-right direction by a rotation axis orthogonal to the rotation axis of the swing fulcrum,
The swing mechanism includes a different-direction swing mechanism that connects the jacks to both sides of the substrate holder, and controls the expansion / contraction amount of each jack to swing the substrate holder in the left-right direction.
The substrate holding apparatus according to claim 1. 前記揺動機構は、前記ジャッキにより前記揺動支点を支点として前記基板ホルダを水平状態と略垂直状態との角度範囲内で回動させることを特徴とする請求項１記載の基板保持装置。  2. The substrate holding apparatus according to claim 1, wherein the swing mechanism rotates the substrate holder within an angular range between a horizontal state and a substantially vertical state with the swing fulcrum serving as a fulcrum by the jack. 前記ジャッキは、一端が前記ベースの水平梁に前記基板ホルダのせり出し方向に回転可能に連結され、他端が前記基板ホルダの後方側と前記ベースの前方側との間を連結するリンクに前記ホルダのせり出し方向に回転可能に連結されることを特徴とする請求項１記載の基板保持装置。  The jack has one end connected to the horizontal beam of the base so as to be rotatable in the protruding direction of the substrate holder, and the other end connected to a link connecting the rear side of the substrate holder and the front side of the base. The substrate holding apparatus according to claim 1, wherein the substrate holding apparatus is connected so as to be rotatable in the protruding direction. 前記ジャッキは、前記基板ホルダの両側にそれぞれ設けられ、これらジャッキを同期させて伸ばすことにより前記基板ホルダを所定の角度に起き上がらせ、前記各ジャッキを同期させて上下方向に伸縮を繰り返すことにより前記基板ホルダを前後方向に揺動させることを特徴とする請求項１又は４記載の基板保持装置。  The jacks are respectively provided on both sides of the substrate holder.The jack holders are raised at a predetermined angle by extending the jacks synchronously, and the jacks are repeatedly expanded and contracted in the vertical direction by synchronizing the jacks. 5. The substrate holding apparatus according to claim 1, wherein the substrate holder is swung in the front-rear direction. 前記リンクの長さは、当該リンクの一端が連結される前記基板ホルダの支点と前記揺動支点との間隔より短く、かつ前記揺動支点と前記リンクの他端とが連結される前記ベースの支点との間隔より長いことを特徴とする請求項４記載の基板保持装置。  The length of the link is shorter than the distance between the fulcrum of the substrate holder to which one end of the link is connected and the swing fulcrum, and the base of the base to which the swing fulcrum is connected to the other end of the link. The substrate holding device according to claim 4, wherein the substrate holding device is longer than a distance from the fulcrum. ベースと、
前記ベース上に設けられ、大型基板を保持する基板ホルダと、
前記基板ホルダの両側に設けられた直線ガイドと、
前記ベースの前側両端部に設けられ、前記直線ガイドをスライド移動可能に支持する揺動支点と、
前記基板ホルダに連結し、前記揺動支点を支点として前記基板ホルダを起き上がらせるジャッキとを有し、
前記ジャッキにより前記揺動支点を支点として前記基板ホルダを回動させると共に、前記直線ガイドを前記揺動支点に対してスライド移動させることにより、前記ベースに載置された水平状態と前記ベースの前方にせり出した垂直状態との角度範囲内で前記基板ホルダを回動移動させ、前記基板ホルダを略垂直方向に起こした状態で前記大型基板を載せ換え、前記基板ホルダ上に保持された前記大型基板を前記ベース上に搬送する、
ことを特徴とする基板保持装置。Base and
A substrate holder provided on the base and holding a large substrate;
Linear guides provided on both sides of the substrate holder;
A swing fulcrum provided at both front ends of the base and supporting the linear guide so as to be slidable;
A jack that is connected to the substrate holder and raises the substrate holder with the swing fulcrum as a fulcrum;
The jack rotates the substrate holder around the swing fulcrum and slides the linear guide with respect to the swing fulcrum so that the horizontal state placed on the base and the front of the base The large substrate held on the substrate holder by rotating the substrate holder within an angular range from the protruding vertical state and replacing the large substrate with the substrate holder raised in a substantially vertical direction. Transporting onto the base,
A substrate holding device. 前記基板ホルダは、前記基板ホルダの前側縁部に設けられたローラ付基準ピンと、前記基板ホルダの横側端部に設けられた基準ピンと、前記基準ピンを設けた前記基板ホルダの前記横側端部と対向する前記基板ホルダの横側端部に設けられた押付けピンとを有し、
前記基板ホルダを略垂直に起こした状態で前記ローラ付基準ピンに前記大型基板を載せ、前記押付けピンにより前記大型基板を前記基準ピンに押付けて前記大型基板を位置決めする、
ことを特徴とする請求項７記載の基板保持装置。The substrate holder includes a reference pin with a roller provided at a front edge of the substrate holder, a reference pin provided at a lateral end of the substrate holder, and the lateral end of the substrate holder provided with the reference pin A pressing pin provided at a lateral end of the substrate holder facing the portion,
The large substrate is placed on the reference pin with roller in a state where the substrate holder is raised substantially vertically, and the large substrate is positioned by pressing the large substrate against the reference pin by the pressing pin.
The substrate holding device according to claim 7. ベースと、
前記ベース上に設けられ、大型基板を保持する基板ホルダと、
前記基板ホルダの両側に設けられた直線ガイドと、
前記ベースの前側両端部に設けられ、前記直線ガイドをスライド移動可能に支持する揺動支点と、
前記基板ホルダに連結し、前記揺動支点を支点にして前記基板ホルダを起き上がらせるジャッキと、
前記基板ホルダに保持された前記大型基板の表面にマクロ照明光を照射するマクロ照明装置とを有し、
前記直線ガイドにより前記基板ホルダの前側端部を前記ベース上面の前側縁部より下降させて前方にせり出させると共に、前記ベースの前側縁部に設けられた揺動支点を支点として前記基板ホルダを所定の角度に起き上がらせた状態で前記マクロ照明光を照射して前記大型基板上の欠陥を検査する、
ことを特徴とする基板検査装置。Base and
A substrate holder provided on the base and holding a large substrate;
Linear guides provided on both sides of the substrate holder;
A swing fulcrum provided at both front ends of the base and supporting the linear guide so as to be slidable;
A jack that is connected to the substrate holder and raises the substrate holder around the swing fulcrum;
A macro illumination device that irradiates macro illumination light onto the surface of the large substrate held by the substrate holder;
The linear guide lowers the front end of the substrate holder from the front edge of the upper surface of the base and protrudes forward, and the substrate holder is supported using a swing fulcrum provided at the front edge of the base as a fulcrum. Inspecting the defects on the large substrate by irradiating the macro illumination light in a state where it is raised at a predetermined angle,
A substrate inspection apparatus. 前記基板ホルダは、前記揺動支点の回動軸と直交する回転軸により左右方向に移動可能に支持され、前記基板ホルダの両側に前記ジャッキをそれぞれ連結し、これらジャッキの各伸縮量を制御して前記基板ホルダを前後方向と左右方向とのあらゆる角度方向に設定して前記マクロ照明光により前記大型基板上の欠陥をマクロ検査する、
ことを特徴とする請求項９記載の基板検査装置。The substrate holder is supported so as to be movable in the left-right direction by a rotation axis orthogonal to the rotation axis of the swing fulcrum, and the jacks are respectively connected to both sides of the substrate holder to control the expansion and contraction amounts of these jacks. The substrate holder is set in any angular direction between the front-rear direction and the left-right direction, and the macro-illumination light is used to macro-inspect defects on the large substrate,
The substrate inspection apparatus according to claim 9. 前記各ジャッキは、前記基板ホルダをマクロ観察し易い角度に起き上がらせた状態で、予め設定された伸縮長さで伸縮動作を繰り返すことにより前記大型基板を連続的に揺動させながら前記マクロ照明光により前記大型基板上の欠陥をマクロ検査することを特徴とする請求項１０記載の基板検査装置。  Each of the jacks rotates the macro illumination light while continuously swinging the large substrate by repeating the expansion / contraction operation with a predetermined expansion / contraction length in a state where the substrate holder is raised at an angle at which macro observation is easy. The substrate inspection apparatus according to claim 10, wherein a defect on the large substrate is subjected to macro inspection. ベースと、
前記ベース上に設けられ、大型基板を保持する基板ホルダと、
前記基板ホルダの両側に設けられた直線ガイドと、
前記ベースの前側両端部に設けられ、前記直線ガイドをスライド移動可能に支持する揺動支点と、
前記基板ホルダに連結し、前記揺動支点を支点にして前記基板ホルダを起き上がらせるジャッキと、
前記ベース上に水平に置かれた前記基板ホルダの両側に沿って移動可能に設けられた門型アームと、
前記門型アームの水平アームに沿って移動可能に設けられた顕微鏡と、
前記基板ホルダの前側縁部にローラ付基準ピンを設け、前記基板ホルダの横側一端部に基準ピンを設け、前記基板ホルダの前記横側一端部と対向する横側他端部に押付けピンを設けてなる基板位置決め機構とを有し、
前記ジャッキにより前記基板ホルダを略垂直に起こした状態で前記ローラ付基準ピンに前記大型基板を載せ、前記押付けピンにより前記大型基板を前記基準ピンに押し付けて位置決めた状態で前記ジャッキにより前記基板ホルダを前記ベース上に移動して水平に戻し、前記基板ホルダ上に位置決めされた前記大型基板を前記顕微鏡で検査する、
ことを特徴とする基板検査装置。Base and
A substrate holder provided on the base and holding a large substrate;
Linear guides provided on both sides of the substrate holder;
A swing fulcrum provided at both front ends of the base and supporting the linear guide so as to be slidable;
A jack that is connected to the substrate holder and raises the substrate holder around the swing fulcrum;
A gate-type arm provided so as to be movable along both sides of the substrate holder placed horizontally on the base;
A microscope movably provided along the horizontal arm of the portal arm;
A reference pin with a roller is provided at the front edge of the substrate holder, a reference pin is provided at one end of the substrate holder, and a pressing pin is provided at the other end of the substrate holder opposite to the one end of the substrate. A board positioning mechanism provided,
The substrate holder is moved by the jack in a state where the large substrate is placed on the reference pin with the roller while the substrate holder is raised substantially vertically by the jack, and the large substrate is pressed and positioned by the pressing pin. Is moved to the base and returned horizontally, and the large substrate positioned on the substrate holder is inspected with the microscope.
A substrate inspection apparatus.
JP2002157941A 2002-05-30 2002-05-30 Substrate holding device and substrate inspection device Expired - Fee Related JP3931111B2 (en)

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JP2002157941A JP3931111B2 (en) 2002-05-30 2002-05-30 Substrate holding device and substrate inspection device
KR10-2004-7001004A KR20050005390A (en) 2002-05-30 2003-05-27 Substrate holding apparatus and substrate examining apparatus
PCT/JP2003/006611 WO2003102561A1 (en) 2002-05-30 2003-05-27 Substrate holding device and substrate inspection device
CNB038007347A CN100483115C (en) 2002-05-30 2003-05-27 Substrate holding device and substrate inspection device
TW092114436A TWI313039B (en) 2002-05-30 2003-05-28 Substrate holding appatatus and substrate examination apparatus

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WO2003102561A1 (en) 2003-12-11
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TW200307339A (en) 2003-12-01
JP2003344294A (en) 2003-12-03
TWI313039B (en) 2009-08-01
CN100483115C (en) 2009-04-29

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