JP2003344294A - Substrate holding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To save space by preventing the increase in height of the upper end part of a large glass substrate even when raising it. <P>SOLUTION: A substrate holder 5 is rockable on a frame 1 from a horizontal state in a raising direction by the expanding and contracting operation of a jack 19. When the substrate holder 5 is raised by the rocking, the substrate holder 5 is slid to a moving block 14 provided on the hinge 10 of a linear guide 16 and protruded forward from the edge part 11 of a base 3 and lower the edge of the substrate holder 5 which forms the lower end side by raising below the edge part of the base 3 of the frame 1. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention holds and swings a glass substrate when inspecting a glass substrate such as a flat panel such as a large liquid crystal display (LCD) or a plasma display panel (PDP) for a defect. The present invention relates to a substrate holding device.

[0002]

2. Description of the Related Art In recent years, in the field of flat panel displays such as LCDs and PDPs, in order to meet the demands for larger screens and cost reduction, the size of glass substrates has become more and more large in order to make multiple cuts in the flat panel display manufacturing process. It tends to increase in size.

Defect inspection is performed on a large glass substrate manufactured in such a flat panel display manufacturing process, and macro inspection and micro inspection can be used together as one method of this defect inspection. Has been done. In the macro inspection, the glass substrate is irradiated with illumination light and the light reflected by the glass substrate is visually observed. In the micro inspection, the defective portion specified by the macro inspection is enlarged and observed with a microscope.

As such a defect inspection apparatus, for example, there is a technique described in Japanese Patent Application Laid-Open No. 11-94756. In this publication, a glass substrate is placed on a holder and raised toward an observer during macro inspection. Performs macro inspection by visual inspection, holds the glass substrate in a horizontal state during micro inspection,
It is described that the defective portion is observed by magnifying with a microscope. Illumination during macro inspection is, for example, Japanese Patent Laid-Open No. 2000-2000.
The floodlighting device described in 146846 is used.

[0005]

The size of the glass substrate manufactured in the flat panel display manufacturing process tends to be larger and larger in order to meet the demand for larger screens and cost reduction, for example, 1250 ×. 11
A large size of 00 mm has appeared.

When a defect inspection is performed on such a large glass substrate using the defect inspection apparatus described in the above publication,
At the time of macro inspection, the lower side of the holder is raised to a predetermined inclination angle.

However, when the large glass substrate held by this holder is raised, the upper end portion of the large glass substrate when raised is higher than the position of the observer's eyes, which is large from the observer's eyes. The distance to the upper end portion of the glass substrate becomes longer, and it becomes difficult to see the upper end portion of the large glass substrate.

Further, since the upper end portion of the large glass substrate is located at a high position when the large glass substrate is raised, the height space required for swinging the large glass substrate increases and the apparatus becomes large.

SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a substrate holding device capable of realizing space saving without raising the upper end portion of a large glass substrate when it is raised.

[0010]

SUMMARY OF THE INVENTION The present invention is a substrate holding device in which a substrate holder for holding a large-sized substrate is provided on a gantry, and the substrate holder is oscillated in a horizontal state on the gantry or in a rising direction of the substrate holder. A substrate holding device provided with a swinging mechanism capable of raising the substrate holder by the swinging and lowering the edge of the substrate holder on the lower end side from the edge portion of the upper surface of the gantry by this raising. Is.

[0011]

DETAILED DESCRIPTION OF THE INVENTION A first embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view of the substrate holding apparatus of the present invention applied to a substrate inspection apparatus. The gantry 1 includes legs 2 and a base 3 provided on the legs 2. A substrate holder 5 for holding a large glass substrate 4 is provided on the base 3. The horizontal height of the substrate holder 5 is set to the delivery height of the transfer robot. The upper surface of the base 3 is provided horizontally.

An opening 6 is formed in the substrate holder 5 as shown in FIG. 2, and reference pins 7 for determining the reference position of the large glass substrate 4 are formed along each side of the opening 6.
A roller-equipped reference pin 8 and a pressing pin 9 are provided. The pressing pin 9 is provided so as to be movable in the direction in which the large glass substrate 4 is pressed against the reference pin 7 side.

This substrate holder 5 swings the hinge 10 with respect to the upper surface of the base 3 by a swinging mechanism (a hinge 10, which is a swinging fulcrum, a linear guide 15 as a protruding mechanism, a link mechanism 17) described below. As a moving shaft, it is swingably provided in a direction (arrow A direction) in which the substrate holder 5 is raised or returned to a horizontal state. This hinge 10
The substrate holding devices are provided on both ends of the base 3 when viewed from the front side.

An edge portion 1 on the front side of the upper surface of the base 3
As shown in FIG. 3, hinge support members 12 are provided on both ends of the unit 1. Each hinge 10 is rotatably provided on each of the hinge support members 12. The pivot shafts 13 of the hinges 10 are provided in the horizontal direction (Y direction) when viewed from the front side in order to swing the substrate holder 5 in the direction of raising it or returning it to the horizontal state (arrow A direction).

The hinge 10 is provided with a moving block 14. The moving block 14 includes a substrate holder 5
Is formed with a sliding groove 16 that fits into a linear guide 15 provided on the back surface of the.

When the substrate holder 5 is raised, the linear guide 15 slides in the sliding groove 16 to push the substrate holder 5 toward the front side, and the hinge 10 uses the rotating shaft 13 as a fulcrum to support the substrate holder 5. By swinging, the lower end of the substrate holder 5 is lowered below the edge portion 11 on the upper surface of the base 3, and the linear guide 15 and the hinge 10 constitute a protrusion mechanism.

The linear guides 15 are provided on both ends of the lower surface of the substrate holder 5, and are placed in the sliding grooves 16 formed in the moving blocks 14 on both ends of the base 3. These linear guides 15 slide in the sliding grooves 16 when the substrate holder 5 is lifted to project the substrate holder 5 to the front side, and the edge of the lower end side of the substrate holder 5 is the upper surface of the base 3. It is formed to have a length sufficient for lowering it from the edge portion 11 of the substrate holder 5, for example, from the lower end side of the substrate holder 5 to slightly above the central portion.

A stopper 15a is provided on the upper end side of these linear guides 15. These stoppers 15a
Is so that when the substrate holder 5 is raised, the substrate holder 5 is prevented from being tilted more than a preset maximum tilt angle,
It is provided to limit the inclination of the substrate holder 5.

The link mechanism 17 has a function of swinging the substrate holder 5 on the base 3 in a horizontal state or in a rising direction, and includes a link 18 and a jack 19. The link 18 is formed to have a fixed length, and is provided between an extension end 20 extending downward from the base 3 and a support member 21 provided below the substrate holder 5. The link 18 is rotatable with respect to the extending end portion 20 and the supporting member 21 at respective fulcrums 22 and 23.

The jack 19 has a telescopic rod 19a and is provided between the support member 21 side of the link 18 and the horizontal beam 2a of the leg 2. In the jack 19, the tip end of the telescopic rod 19a is rotatably connected to the link 18 at a fulcrum 24, and the lower end of the jack 19 is rotatably connected to the horizontal beam 2a at a fulcrum 25.

The link mechanisms 17 are provided at both ends of the substrate holder 5 when the substrate holding device is viewed from the front side.

Therefore, the telescopic rod 19a of the jack 19
When is extended, the tip of the telescopic rod 19a of the jack 19 applies pressure to the support member 21 side of the link 18. At this time, the other end of the jack 19 is the horizontal beam 2a of the leg 2
And the length of the link 18 is fixed, the jack 19 rotates about the fulcrum 25 as the telescopic rod 19a of the jack 19 extends, and the link 18
Is rotated about the fulcrum 22 by the extension of the telescopic rod 19a of the jack 19.

When the link 18 rotates about the fulcrum 22, the link 18 has a fixed length, so that the fulcrum 23 connected between the link 18 and the supporting member 21 of the substrate holder 5 is provided.
Moves on an arc centered on the fulcrum 22 with the length of the link 18 as the radius.

Therefore, when the link 18 rotates about the fulcrum 22, the substrate holder 5 is raised in the direction of arrow A about the hinge 10. When the substrate holder 5 is raised as described above, the distance between the fulcrums 22 and 23 at both ends of the link 18 is fixed, and the link 18 is fixed.
The distance between the fulcrum 22 and the hinge 10 is also fixed. Thus, considering a triangle composed of the fulcrums 22, 23 and the hinge 10, the distance between the fulcrum 23 and the hinge 10 becomes gradually shorter as the link 18 rotates about the fulcrum 22.

However, since the distance between the fulcrum 23 and the hinge 10 is gradually shortened, the substrate holder 5 slides on the linear guide 15 to the front side, and the edge of the substrate holder 5 on the lower end side is the upper surface of the base 3. It protrudes from the edge portion 11 to the front side.

The telescopic rod 19a of the jack 19
As the elongation of the substrate 18 increases, the amount of rotation of the link 18 increases, and as the rising angle of the substrate holder 5 increases, the amount of protrusion of the edge on the lower end side of the substrate holder 5 from the edge portion 11 of the upper surface of the base 3 increases. growing.

As the rising angle of the substrate holder 5 increases in this way, the amount of protrusion of the edge on the lower end side of the substrate holder 5 increases, so that the edge on the lower end side of the substrate holder 5 has the base 3 Lower than the edge portion 11 of the upper surface.

The descending distance of the lower edge portion 11 of the substrate holder 5 is arbitrarily set by changing the length of the link 18, the length of the linear guide 15, and the extension length of the telescopic rod 19a.

That is, considering a triangle consisting of the fulcrums 22, 23 and the hinge 10 at three points, the telescopic rod 1
The smaller the angle formed by the side passing through each fulcrum 22, 23 and the side passing through the fulcrum 23 and the hinge 10 in accordance with the length of extension of 9a, the larger the rising angle of the substrate holder 5,
By adjusting the angle and the extension length of the telescopic rod 19a, the rising angle of the substrate holder 5 and the substrate holder 5 can be adjusted.
The descending distance of the lower edge portion 11 can be set arbitrarily.

The substrate holder 5 is the hinge support member 1
1, a portion including the hinge 10 and the moving block 14,
It is placed on the base 3 in a horizontal state by the supporting member 21, and the heights of the hinge supporting member 11, the hinge 10 and the moving block 14 are the same as the height of the supporting member 21.

A macro lighting device 30 is provided above the substrate holder 5. The macro lighting device 30 converges the macro light source 31 that emits macro light, a reflection mirror 32 that reflects the macro light emitted from the macro light source 31, and the macro light that is reflected by the reflection mirror 32. And a Fresnel lens 33 that does. The macro light source 31 is provided so as to emit macro illumination light in the horizontal direction (X direction), for example, and the reflection mirror 32 is provided at an angle of about 50 degrees with respect to the horizontal direction, and a large glass with the illumination optical axis raised. Bend to the board side.

The microinspection device 40 includes a gate type arm 41 provided on the base 3 so as to be movable in the X direction, and a microscope 42 provided along the horizontal arm of the gate type arm 41 so as to be movable in the Y direction. Consists of.

The control device 43 has a function of controlling the expansion / contraction operation of the jack 19, a function of controlling the lighting of the macro light source 31, a movement control of the microscope stage 41 in the X direction and a movement control of the microscope 42 in the Y direction. It has a function of moving the observation field of view of the microscope 42 to a position where the defective portion on the large-sized glass substrate 4 specified by the macro inspection is captured.

Next, the operation of the apparatus constructed as described above will be described in the case of macro inspection and micro inspection.

Before starting the inspection, the jack 19 is contracted,
The substrate holder 5 on which the large glass substrate 4 is placed is in a horizontal state.

When conducting a macro inspection, the telescopic rod 19a of the jack 19 extends under the control of the control device 43, and the link 18 rotates about the fulcrum 22. The extension of the telescopic rod 19a of the jack 19 and the rotation of the link 18 start the raising of the substrate holder 5.

At this time, in the substrate holder 5, the linear guides 15 on the lower surface of the substrate holder 5 slide in the sliding grooves 16 so that they are located in front of the edge portion 11 of the base 3 as shown in FIG. While being pushed out, the hinge 10 is raised around the swing center.

Further, the telescopic rod 19a of the jack 19
As the substrate holder 5 extends upward, the edge of the substrate holder 5 that is raised to the lower end side is the edge portion 1 of the upper surface of the base 3.
It is lower than 1.

When carrying out the macro inspection, the observer adjusts the extension of the telescopic rod 19a of the jack 19 so that the substrate holder 5 is adjusted to an arbitrary raising angle that facilitates macro observation.

The substrate holder 5 raised in this way
Is the lower end side of the edge portion 11 of the upper surface of the base 3.
Even if the substrate holder 5 is provided on the pedestal 1, the entire surface of the large glass substrate 4 approaches the observer, and in particular, the height of the upper end portion of the large glass substrate 4 is lower than in the conventional case. Therefore, the distance between the upper end portion of the large glass substrate 4 and the observer becomes short.

In this state, when macro illumination light is emitted from the macro light source 31, this macro illumination light is reflected by the reflection mirror 32, converged by the Fresnel lens 33, and is directed to the large glass substrate 4 on the substrate holder 5. Is irradiated.

The observer visually observes the light reflected by the large glass substrate 4 to perform macro inspection. At this time, since the height of the upper end portion of the large glass substrate 4 is lower than that of the conventional one, the upper end of the large glass substrate 4 is The defective portion existing on the large glass substrate 4 can be reliably identified by catching light in different reflection directions depending on the direction of the defective portion such as a scratch or unevenness over the entire surface of the large glass substrate 4 without looking up at the portion. it can.

When performing a macro inspection, for example, the substrate holder 5 is adjusted to an arbitrary raising angle that facilitates macro observation, and the telescopic rod 1 of each jack 19 is adjusted.
9a repeats the stretching operation with a preset stretching length.
By repeating this expansion and contraction operation, the substrate holder 5 continuously swings in the direction of arrow A at a predetermined cycle.

The rising angle range of the swinging substrate holder 5 is preset in the controller 43. The control device 43 determines the extension / contraction length of the extension / contraction rod 19a of each jack 19 according to a preset rising angle range.

When the substrate holder 5 continuously swings in this way, light in different reflection directions comes into the observer's field of view depending on the direction of a defect such as a scratch or unevenness, and the observer sees the viewpoint. It is possible to specify the defective portion such as scratches or unevenness by reducing the movement.

The coordinate data of the defective portion on the large glass substrate 4 specified by the macro inspection is the control device 43.
Is input to.

Next, micro inspection is performed. Jack 19
Is contracted by the control device 43, and in response to this, the link 18 rotates about the fulcrum 22 in a direction opposite to that when the substrate holder 5 is raised, and the substrate holder 5 is in the original horizontal state. Return to.

When the substrate holder 5 descends onto the base 3 and becomes horizontal, the control device 43 controls the movement of the microscope stage 41 in the X direction based on the coordinate data of the defective portion input during the macro inspection, and also the microscope. 42 is controlled to move in the Y direction on the microscope stage 41.
Large glass substrate 4 whose observation field of view was identified by macro inspection
Move to the position to catch the upper defect. The image of the defective portion magnified by the microscope 42 is captured by, for example, a CCD camera and displayed on a monitor television. The observer observes an enlarged image of the defective portion displayed on the monitor television.

Incidentally, the control device 43 controls the microscope stage 4
1 may be controlled to move in the X direction, and the microscope 42 may be controlled to move in the Y direction on the microscope stage 41 so that the observation field of the microscope 42 scans the entire surface of the large glass substrate 4.

During the micro inspection, the substrate holder 5 is placed on the base 3 by the portion including the hinge supporting member 11, the hinge 10 and the moving block 14 and the supporting member 21, so that the influence of external vibration is exerted. The stability of the substrate holder 5 is increased without being affected.

The substrate holding device of the present invention is used not only during the macro inspection and the micro inspection but also as a transfer device when the large glass substrate 4 is placed on the substrate holder 5 and when it is removed from the substrate holder 5. it can.

For example, the large glass substrate 4 is attached to the substrate holder 5
When it is placed on the top, the expansion / contraction rod 19a of the jack 19 is extended by the control of the control device 43, so that the substrate holder 5 is pushed forward of the edge portion 11 of the base 3 as shown in FIG. The edge of the substrate holder 5 that is raised about the swing center and is on the lower end side of the substrate holder 5 is lower than the edge portion 11 of the upper surface of the base 3.

When the substrate holder 5 is raised in this manner, the large glass substrate 4 is placed on the reference pins 8 with rollers shown in FIG. 2 in a state of standing in a substantially vertical direction (Z direction) and pressed. The pin 9 is pressed toward each reference pin 7 and set in the reference position. After that, the large glass substrate 4 is sucked and fixed onto the surface of the substrate holder 5 by suction from a suction hole (not shown) provided in the substrate holder 5. After that, retract the telescopic rod 19a of the jack 19,
The substrate holder 5 is moved onto the base 3.

On the other hand, when the large glass substrate 4 is removed from the substrate holder 5, the adsorption to the large glass substrate 4 is released and the large glass substrate 4 is released in the state where the substrate holder 5 is raised, which is the reverse of the above placement. The glass substrate 4 is erected in a substantially vertical direction (Z direction) and removed from the substrate holder 5.

When such a large glass substrate 4 is placed on or removed from the substrate holder 5, the edge of the substrate holder 5 on the lower end side is lower than the edge portion 11 of the upper surface of the base 3, so that the large size of the substrate holder 5 is large. When the glass substrate 4 is placed on the substrate holder 5, it is not necessary to lift the large glass substrate 4 to a high position, and the large glass substrate 4 can be easily placed on or removed from the substrate holder 5. Further, by positioning the large glass substrate 4 in an upright state, the lower side of the large glass substrate 4 is positioned on the roller-equipped reference pin 8 by its own weight, so that the pressing pin facing the roller-equipped reference pin 8 can be omitted. In addition, the surface contact resistance between the large glass substrate 4 and the substrate holder 5 can be reduced, and the pressing force of the pressing pin 9 can be reduced.

As described above, in the first embodiment, the substrate holder 5 is placed in the horizontal state on the gantry 1 or the jack 1 is used.
When the substrate holder 5 is raised by the swinging motion, the substrate holder 5 slides with respect to the moving block 14 provided on the hinge 10 of the linear guide 15. The substrate holder 5 is provided on the pedestal 1 so that the edge of the substrate holder 5 that protrudes forward from the edge portion 11 of the base 3 and rises to the lower end side is lowered than the edge portion 11 of the base 3 of the pedestal 1. However, the entire surface of the large glass substrate 4 can be brought closer to the observer, and in particular, the height of the upper end portion of the large glass substrate 4 of, for example, 1250 × 1100 mm can be made lower than before, and The distance to the observer can be shortened, whereby the observer does not look up at the upper end portion of the large glass substrate 4 and scratches the entire surface of the large glass substrate 4, for example, scratches. Capture light of different reflection direction by the direction of the defect portion, such as, can be reliably identified defective portion present on a large glass substrate 4.

Further, the upper end portion when the large glass substrate 4 is raised can be made lower than in the conventional case, so that the installation position of the macro lighting device 30 can be made lower, and the installation space of the entire substrate inspection device can be made smaller.

When conducting a macro inspection, for example, the telescopic rod 19a of each jack 19 with the substrate holder 5 adjusted to an arbitrary raising angle that facilitates macro observation.
By continuously repeating the expansion / contraction operation of, the movement of the observer's viewpoint can be reduced, and the defective portion can be specified by capturing light in a different reflection direction depending on the direction of the defective portion such as a scratch or unevenness. In this case, since the angular range in which the substrate holder 5 is swung can be arbitrarily set in the control device 43, it is possible to specify various kinds of defective portions such as chips, stains, dust, etc., as well as scratches and unevenness. It is possible.

When carrying out a micro inspection, the substrate holder 5 holds the hinge support member 11, the hinge 10 and the moving block 14.
Since it is placed on the base 3 by the part consisting of and the support member 21, the stability of the substrate holder 5 can be enhanced without being affected by external vibration, and a defect in an enlarged image of the shake-free microscope 42 can be obtained. You can observe the part.

Further, with the substrate holder 5 raised and the edge on the lower end side lower than the edge portion 11 of the base 3, the large glass substrate 4 is placed on or removed from the substrate holder 5 for use. Then, it is not necessary to lift the large glass substrate 4 to a high position, and the large glass substrate 4 can be easily placed on or removed from the substrate holder 5.

Further, the substrate holder 5 is attached to the edge portion 11 of the base 3.
Since the substrate holder 5 is raised while protruding toward the front side, there is no need to block the macro illumination light.

The swing mechanism includes a hinge 10, which is a swing fulcrum,
Linear guide 15 as a protruding mechanism, link mechanism 17
It can be constructed at a low cost.

Next, a second embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 1 are designated by the same reference numerals, and detailed description thereof will be omitted.

FIG. 5 is a configuration diagram in which the substrate holding device of the present invention is applied to a substrate inspection device. In this substrate holding device, the hinge 10, the hinge support member 12, the moving block 1
4, the linear guide 15, the link 18, the jack 19, the extended end portion 20 and the support member 21 are provided in pairs on both end sides in the Y direction when viewed from the front side, as described in the first embodiment. In the present embodiment, these are provided as the hinges 10 and 10 ′ and the hinge support members 12 and 1.
2 ', each moving block 14, 14', each linear guide 1
5, 15 ', each link 18, 18', each jack 19,
19 'and each support member 21, 21' are attached and shown.

In this substrate holding device, as shown in FIG. 6, another direction swing mechanism for swinging the substrate holder 5 in an axial direction perpendicular to the axial direction of swinging of the substrate holder 5 is raised. 50 are provided. The other-direction swing mechanism 50 is provided with a hinge unit (rotation support member) 51 for rotating (arrow arrow direction) in an axis direction perpendicular to the swing axis direction of the substrate holder 5 in the rising direction. . The hinge unit 51 includes a hinge holding arm 52, hinge supporting pieces 52a and 52b provided at both ends of the hinge holding arm 52, and a rotary shaft 53 provided at a substantially central portion of the bottom surface of the hinge holding arm 52. It consists of Of these, hinges 13 and 13 'are rotatably provided on the hinge support pieces 52a and 52b, respectively. The rotating shaft 53 is rotatably provided in a rotating hole 54 formed in a substantially central portion on the front side of the base 3.

The controller 43 controls the jacks 19 and 19 '.
Of controlling the respective expansion and contraction amounts of the respective jacks with different swinging amounts, for example, the other jack 19 'or 19' is expanded or contracted without expanding or contracting the one jack 19 or 19 ', or the one jack 19 or 19' is expanded. It has a function of contracting the other jack 19 'or 19 and further expanding and contracting in synchronization with the expansion and contraction operation of these jacks 19 and 19'.

With such a configuration, when performing macro inspection, the observer adjusts the respective extensions of the telescopic rods 19a and 19a 'of the jacks 19 and 19' so that the substrate holder 5 can be easily macro-observed. It is adjusted to any rising angle.

In this state, if the expansion and contraction operation is repeated by synchronizing the expansion and contraction rods 19a and 19a 'of the jacks 19 and 19', the expansion and contraction operation causes the substrate holder 5 to move in the direction of arrow A at a predetermined cycle. Swing continuously.

Further, each of the jacks 19 and 19 'may be configured such that the other jack 19' or 19 'is expanded or contracted without expanding or contracting the one jack 19 or 19', or the one jack 19 or 19 'is extended or contracted. Jack 19 'or 1
9 to shrink, and further these jacks 19, 1
The expansion / contraction operation of 9'is continuously repeated.

By changing the expansion / contraction operation of the jacks 19 and 19 'in this way, the substrate holder 5 is moved from the front side by rotating the hinge unit 51 shown in FIG. It swings in the left-right direction when viewed (hereinafter referred to as the swinging direction). FIG. 7 shows one jack 19 or 19 'without expanding or contracting the other jack 1 or 19'.
9 shows a state in which 9 ′ or 19 is expanded / contracted and the substrate holder 5 is swung to the outer side when viewed from the front. The swing range in the swinging direction may be set in the control device 43 in advance, or may be set arbitrarily by the operation of the observer.

As described above, according to the second embodiment, the substrate holder 5 can be swung in the swinging direction to set an arbitrary swinging angle, or can be continuously swung. It is possible to increase the variation of macro inspection, so that the observer can detect the reflected light from the defect such as scratches and unevenness that could not be detected by the swing in the rising direction (arrow A direction), and the defect can be detected. Can be specified.

Further, the swinging of the substrate holder 5 in the rising direction and the swinging in the swinging direction are simultaneously operated to set the substrate holder 5 in any angular direction or continuously swing in any angular direction. Macro inspection.

The present invention is not limited to the above-mentioned first and second embodiments, and can be variously modified at the stage of implementation without departing from the spirit of the invention.

Furthermore, the above-described embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements. For example, even if some constituent elements are deleted from all the constituent elements shown in the embodiment, the problem described in the section of the problem to be solved by the invention can be solved, and it is described in the section of the effect of the invention. When the effect of being obtained is obtained, a configuration in which this constituent element is deleted can be extracted as an invention.

For example, in the first and second embodiments, when raising the substrate holder 5, the substrate holder 5
Edge of the base 3 of the pedestal 1 while protruding the edge of the base 3 forward of the edge 11 of the base 3.
Although it is lower than 1, the substrate holder 5 is first pushed forward from the edge portion 11 of the base 3, and then the substrate holder 5 is rotated around the rotation shaft 13 of the hinge 10. It may be moved to lower than the edge portion 11 of the base 3, and anyway, when the substrate holder 5 is raised from the horizontal state to a predetermined inclination angle, the edge below the substrate holder 5 is the edge of the base 3. It may be rocked so as to be lower than the portion 11. Such swinging movement of the substrate holder 5 can be performed by variously modifying the structure of the swinging mechanism.

The lengths of the links 18 and 18 'may be replaced by, for example, jacks. When the jacks are expanded and contracted while the board holder 5 is raised by replacing these jacks, the board holder 5 Can be moved in the vertical direction, and the region on the large glass substrate desired to be visually observed can be arranged at the height position where the macro inspection by the observer is easy.

The swing mechanism includes a hinge 10, which is a swing fulcrum,
Linear guide 15 as a protruding mechanism, link mechanism 17
However, the present invention is not limited to this, and any other mechanism may be used. For example, each of the hinges 10 and 10 ′ serving as the swing fulcrum of the substrate holder 5 has a swing function and a slide function. Alternatively, a swinging mechanism that moves the substrate holder 5 in an arc shape may be used.

Further, although the substrate holding apparatus of the present invention is applied to, for example, a substrate inspecting apparatus used in the manufacturing process of a flat panel display, and a configuration in which a macro inspection and a micro inspection are combined is described, the present invention is not limited to this. May be used alone, and further applied to various substrate inspection devices such as film thickness measurement and pattern inspection on the large glass substrate 4,
Holding the large glass substrate 4, mounting on the large glass substrate 4,
It can be used for removal.

[0080]

As described above in detail, according to the present invention, it is possible to provide a substrate holding device capable of realizing space saving without raising the upper end portion of a large glass substrate even when it is raised.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a first embodiment of a substrate holding device according to the present invention.

FIG. 2 is a front configuration diagram of a substrate holder in the first embodiment of the substrate holding device according to the present invention.

FIG. 3 is an enlarged view of a hinge portion in the first embodiment of the substrate holding device according to the present invention.

FIG. 4 is a view showing a rising operation of the substrate holder in the first embodiment of the substrate holding device according to the present invention.

FIG. 5 is a configuration diagram showing a second embodiment of a substrate holding device according to the present invention.

FIG. 6 is a configuration diagram of another direction swing mechanism in the second embodiment of the substrate holding device according to the present invention.

FIG. 7 is a diagram showing swinging of a substrate holder in a swinging direction in a second embodiment of a substrate holding device according to the present invention.

[Explanation of symbols]

1: Stand 2: leg 2a: Horizontal beam 3: Base 4: Large glass substrate 5: Substrate holder 6: opening 7: Reference pin 8: Reference pin with roller 9: Press pin 10, 10 ': Hinge 11: Edge 12, 12 ': Hinge support member 13: rotation axis 14,14 ': Moving block 15,15 ': Straight guide 15a: Stopper 16: Sliding groove 17: Link mechanism 18,18 ': Link 19, 19 ': Jack 19a: Telescopic rod 20: Extended end 21,21 ': support member 22, 23: fulcrum 24, 25: fulcrum 30: Macro lighting device 31: Macro light source 32: Reflection mirror 33: Fresnel lens 40: Micro inspection device 41: Gate type arm 42: microscope 43: Control device 50: Different direction swing mechanism 51: Hinge unit 52: Hinge holding arm 52a, 52b: Hinge support pieces 53: rotating shaft 54: hole for rotation

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 2G051 AA84 DA01 DA08                 2G086 EE10                 2H088 FA17 FA30 HA01 MA20                 5F031 CA05 HA13 KA03 LA16 MA33                       PA18

Claims (7)

[Claims] 1. A substrate holding device in which a substrate holder for holding a large-sized substrate is provided on a pedestal, wherein the substrate holder can be oscillated in a horizontal state on the gantry or in a rising direction of the substrate holder. When the substrate holder is raised by means of the above, the substrate holding device is provided with a swinging mechanism for lowering the edge of the substrate holder on the lower end side from the edge portion of the upper surface of the gantry by this raising. 2. A different-direction swing mechanism that swings the substrate holder in different axial directions with respect to the swing axis direction of the rising direction of the substrate holder. Substrate holding device. 3. The substrate holding device according to claim 1, wherein the swinging mechanism swings the substrate holder in front of an edge portion of the upper surface of the gantry. 4. The link mechanism, which is provided at an edge portion of an upper surface of the gantry, includes a link mechanism that oscillates the substrate holder in a horizontal state on the gantry or in an upright direction. And a swing fulcrum for swinging the substrate holder by the link mechanism to slide the swing fulcrum with respect to the substrate holder to move the substrate holder forward of the edge portion of the pedestal upper surface. 3. The substrate holding device according to claim 1 or 2, further comprising: a protruding mechanism that lowers the lower edge of the substrate holder from the edge portion of the top surface of the gantry while raising the substrate holder. 5. The protrusion mechanism is characterized in that the swing fulcrum is provided at an edge portion of the upper surface of the gantry, and a guide for slidingly moving the substrate holder with respect to the swing fulcrum is provided on the substrate holder. The substrate holding device according to claim 4. 6. The another-direction swing mechanism swings the substrate holder in an axial direction perpendicular to the axial direction of the swing in the raising direction of the substrate holder. 2. The substrate holding device according to item 2. 7. The other-direction swing mechanism includes a rotation support member provided on an edge portion of the pedestal upper surface so as to be rotatable in an axial direction perpendicular to a swing axis direction of a rising direction of the substrate holder. A swing fulcrum provided on the rotation support member for swingably supporting the substrate holder in a rising direction; and a guide provided on the substrate holder for sliding the substrate holder with respect to the swing fulcrum. And link mechanisms that are respectively provided on both end sides of the substrate holder and that swing on both end sides of the substrate holder with different swing amounts with respect to the rising direction of the substrate holder,
The substrate holding apparatus according to claim 2, further comprising: