CN1578907A - Substrate holding device and substrate inspection device - Google Patents
Substrate holding device and substrate inspection device Download PDFInfo
- Publication number
- CN1578907A CN1578907A CNA038007347A CN03800734A CN1578907A CN 1578907 A CN1578907 A CN 1578907A CN A038007347 A CNA038007347 A CN A038007347A CN 03800734 A CN03800734 A CN 03800734A CN 1578907 A CN1578907 A CN 1578907A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- substrate support
- aforesaid substrate
- stand
- rise
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/02—Mechanical
- G01N2201/021—Special mounting in general
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Liquid Crystal (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
A substrate holding device, wherein when a substrate holder (5) allowed to swing in a rising direction on a frame (1) by the telescoping operation of a jack (19) is raised on the frame (1) by swinging, the substrate holder (5) is slid on a movement block (14) fitted to a hinge (10) for a linear guide (15) and projected beyond the edge portion (11) of a base (3), and the lower end edge of the substrate holder (5) is lowered below the edge portion (11) of the base (3) of the frame (1).
Description
The present invention relates to base plate keeping device and the substrate verifying attachment that utilizes this base plate keeping device, this base plate keeping device keeps glass substrate and shakes when the defective of the flat-panel monitor glass substrates such as (being designated hereinafter simply as FPD) of inspection example such as big screen LCD (being designated hereinafter simply as LCD), plasma display panel (being designated hereinafter simply as PDP) etc.
In recent years, in LCD and this FPD of PDP field, required to increase picture and reduce cost.In order to satisfy these requirements, in FPD manufacturing process, what increase glass substrate cuts apart scribing quantity, the trend that its size increases day by day occurs.The big molded dimension of 1250 * 1100mm has for example appearred in the size of glass substrate.
The large-size glass substrate of making in this FPD manufacturing process is carried out the substrate check.A kind of method of substrate check is and with macroscopic examination and microexamination.Macroscopic examination is that illumination light is shone on the glass substrate, and the light that reflects on glass substrate is carried out visualization.Microexamination is to utilize microscope to amplify observation through macroscopic examination and definite defect part.
This substrate verifying attachment, its technology for example Japanese patent laid-open 11-160242 communique are described.Recorded and narrated in this communique: have and to make glass substrate rise to the support of the predetermined angular that keeps, when macroscopic examination, glass substrate is placed on the support, by support is risen, make glass substrate towards the observer to rise, be subjected to visual examination with visual, perhaps, stent cover is shaken to the observer on fore-and-aft direction, be subjected to visual examination with visual.When microexamination, make support turn back to original state, make glass substrate keep horizontality, amplify the observation defect part with the microscopic observation system.
But, when macroscopic examination, owing to being that the center is upwards risen support with its bottom, so if the glass substrate that is verified maximizes, the upper part of the large-size glass substrate during rise is higher than observer's eye position.Therefore, the distance of the upper end from observer's eyes to large-size glass substrate increases, and is difficult to the upper part of visible large-size glass substrate.
And the upper part of the large-size glass substrate when making large-size glass substrate rise is on the higher position, so, shake in order to make large-size glass substrate, higher space must be arranged.The entire equipment volume is increased.
Summary of the invention
According to main points of view of the present invention, such base plate keeping device can be provided, have: stand; Substrate holder is arranged on the described stand, is used to keep large substrate; And head motion, substrate holder can be shaken to the rise direction of horizontality or substrate holder on stand, if substrate holder is risen, then the edge as the lower end of aforesaid substrate support is dropped to below the marginal portion of above-mentioned stand upper surface by this rise.
According to main points of view of the present invention, such base plate keeping device can be provided, has macroscopical lighting device, this macroscopic view lighting device is arranged on the top of substrate holder, be used to make macroscopical illumination light to shine large substrate, this large substrate remain on by head motion make its rise or the substrate holder that shakes on.
Description of drawings
Fig. 1 is the structural drawing that expression relates to the 1st embodiment of base plate keeping device of the present invention.
Fig. 2 is the front elevation of substrate holder that expression relates to the 1st embodiment of base plate keeping device of the present invention.
Fig. 3 is the enlarged drawing of hinge fraction that expression relates to the 1st embodiment of base plate keeping device of the present invention.
Fig. 4 is the synoptic diagram of rise action of the substrate holder of expression the 1st embodiment that relates to base plate keeping device of the present invention.
Fig. 5 is the structural drawing that expression relates to the 2nd embodiment of base plate keeping device of the present invention.
Fig. 6 is the structural drawing of other direction head motion that expression relates to the 2nd embodiment of base plate keeping device of the present invention.
Fig. 7 is the synoptic diagram that shakes on the direction of shaking the head of substrate holder of expression the 2nd embodiment that relates to base plate keeping device of the present invention.
Following with reference to accompanying drawing, describe the 1st embodiment of the present invention in detail.
Fig. 1 is the sectional structure chart that is suitable for the substrate verifying attachment of base plate keeping device of the present invention.Stand 1 is made of pillar 2 and the pedestal 3 that is arranged on this pillar 2.On this pedestal 3, be provided with the substrate holder 5 that is used to keep large-size glass substrate 4.The height setting of the horizontality of this substrate holder 5 is the transmission height of transfer robot.The upper surface of pedestal 3 is arranged to horizontality.
On pedestal 5, formed peristome 6 as shown in Figure 2.On each limit of this peristome, be provided with: be used to determine each reference pins 7 of the reference position of large-size glass substrate 4, the reference pins 8 that has running roller and pushing pin 9.Pushing pin 9 is arranged to and can be moved on the direction that large-size glass substrate 4 is pressed to reference pins 7 one sides.
The head motion (as the hinge 10 that shakes fulcrum, the linear guide device 15 as ejecting mechanism, linkage assembly 17) that substrate holder 5 is arranged to by following explanation can be axis of rocking and shake with respect to the upper surface of pedestal 3 with hinge 10.It shakes direction is to make substrate holder 5 rise or turn back to horizontality (arrow A direction).When base plate keeping device was watched in the front, hinge 10 was separately positioned on the two ends of pedestal 3.
On the two ends of the marginal portion 11 of the face side of pedestal 3 upper surfaces, be provided with each hinged support member 12 as shown in Figure 3 respectively.Rotatable each hinge 10 freely is set respectively on this hinged support member 12.For substrate holder 5 is shaken on the direction (arrow A direction) that rises or turn back to horizontality, from the front, the rotation axis 13 of this hinge 10 is arranged on the horizontal direction (Y direction).
On hinge 10, be provided with movable block 14.On this movable block 14, form slip groove 16 with linear guide device 15 tablings that are arranged on substrate holder 5 back sides.
When substrate holder 5 was risen, linear guide device 15 slided in sliding with groove 16, and substrate holder 5 is released to face side.By hinge 10, be that fulcrum shakes substrate holder 5 with rotation axis 13.Like this, the lower end of substrate holder 5 drops to the position of the marginal portion 11 that is lower than pedestal 3 upper surfaces, constitutes ejecting mechanism by linear guide device 15 and hinge 10.
Be provided with retainer 15a in the upper end of this linear guide device 15.The purpose that this retainer 15a is set is the inclination of restricting substrate support 5, in order to avoid substrate holder 5 its degree of tilt when rising surpasses predefined maximum inclination angle.
Watch base plate keeping device from face side, linkage assembly 17 is separately positioned on the two ends of substrate holder 5.
So if the expansion link 19a of ground jack 19 elongation, then the front end of the expansion link 19a of this ground jack 19 upwards pushes away supporting member 21 sides of connecting rod 18.At this moment the other end of ground jack 19 is arranged on the horizontal beam 2a of pillar 2, and the length of connecting rod 18 is fixed.Connecting rod 18 rely on ground jacks 19 expansion link 19a elongation and be that rotate at the center with fulcrum 22.If this connecting rod 18 is that rotate at the center with fulcrum 22, then fulcrum 23 is that radius moves on circular arc with connecting rod 1.
At this moment, the interval between the rotation axis 13 of the interval of each fulcrum 22,23 at connecting rod 18 two ends and the fulcrum 22 of connecting rod 18 and hinge 10 is fixed, the interval change between the fulcrum 23 of connecting rod 18 and the rotation axis 13 of hinge 10.
Thus, if investigate by each fulcrum 22,23 and hinge 10 these 3 triangles that constitute, along with connecting rod 18 is that rotate at the center with fulcrum 22, shorten thereupon gradually at the interval of fulcrum 23 and hinge 10.
Yet, if along with shorten at the interval of rotation, fulcrum 23 and the hinge 10 of connecting rod 18 thereupon, then substrate holder 5 slides to face side on linear guide device 15, and the lower end of substrate holder 5 is that the edge is pushed out into the position than the marginal portion 11 also close face side of pedestal 3 upper surfaces.
Along with the elongation of the expansion link 19a of ground jack 19 increases, the amount of spin of connecting rod 18 increases.And along with the rise angle of substrate holder 5 increases, the lower end of substrate holder 5 is the edge to be increased from the marginal portion 11 extrapolated amounts of pedestal 3 upper surfaces.
Like this, if the rise angle of substrate holder 5 increases, then the lower end of substrate holder 5 is the released amount increase at edge.Therefore, the lower end of substrate holder 5 is the position that the edge drops to the marginal portion 11 that is lower than pedestal 3 upper surfaces.
By length, the length of linear guide device 15 and the extension elongation of expansion link 19a of change connecting rod 18, and the distance that any setting substrate support 5 descends from lower edge part 11.
That is to say, if investigate by above-mentioned each fulcrum 22,23 and hinge 10 these 3 triangles that constituted, then according to the extension elongation of expansion link 19a, the limit by each fulcrum 22,23 is with more little by the angle that the limit constituted of fulcrum 23 and hinge 10, and the rise angle of substrate holder 5 is big more.And less than the length of connecting rod 18, then the rise angle (pitch angle) of substrate holder 5 can be big more more at the interval of the fulcrum 22 of connecting rod 18 and the rotation axis 13 of hinge 10.
So, by adjusting the extension elongation of expansion link 19a, can change limit and the formed angle in limit of passing through fulcrum 23 and hinge 10 by each fulcrum 22,23, the rise angle of setting substrate support 5 and substrate holder 5 are from the distance of lower edge part 11 declines arbitrarily.
And, part and the supporting member 21 of substrate holder 5 by constituting by hinge support member 12, hinge 10 and movable block 14, and on pedestal 3, keep horizontality.The height of hinged support member 12, hinge 10 and movable block 14 is set to identical with the height of supporting member 21.
Above substrate holder 5, be provided with macroscopical lighting device 30.This macroscopic view lighting device 30 is by constituting with the lower part: the catoptron 32 that radiate macroscopical light source 31 of macroscopical illumination light, macroscopical illumination light of sending from this macroscopic view light source 31 is reflected and to carried out the Fresnel lens 33 of optically focused by macroscopical illumination light of these catoptron 32 reflections.Macroscopic view light source 31 for example is arranged in the horizontal direction send on (directions X) macroscopical illumination light.Catoptron 32 with respect to horizontal direction tilt approximately 50 the degree be provided with, make lighting optical axis be refracted to the large-size glass substrate side of rise.
The below action of explanation device of said structure under the situation of macroscopic examination and microexamination.
Before the check beginning, ground jack 19 is in contraction state, and the substrate holder 5 of placing large-size glass substrate 4 is in horizontality.
Under situation about being subjected to visual examination, if utilize the control of control device 43 to make the expansion link 19a elongation of ground jack 19, then connecting rod 18 is that rotate at the center with fulcrum 22.Utilize the elongation of expansion link 19a of this ground jack 19 and the rotation of connecting rod 18, make substrate holder 5 begin to rise.
At this moment each linear guide device 15 below the substrate holder 5 slides with sliding in the groove 16 at each.Like this, substrate holder 5 is pushed out into the place ahead of the marginal portion 11 of pedestal 3 as shown in Figure 4, simultaneously with hinge 10 for shaking the center rise that makes progress.
Moreover if along with the elongation of the expansion link 19a of ground jack 19 substrate holder 5 is risen, then the lower end of substrate holder 5 is the position that the edge drops to the marginal portion 11 that is lower than pedestal 3 upper surfaces.
When being subjected to visual examination, adjust the elongation of the expansion link 19a of ground jack 19 by the observer.Like this, substrate holder 5 is adjusted on any rise angle of carrying out macroscopic observation easily.
The lower end of the substrate holder 5 of Sheng Qiing is the position that the edge is reduced to the marginal portion 11 that is lower than pedestal 3 upper surfaces like this, so, substrate holder 5 be arranged on also can make large-size glass substrate 4 on the stand 1 whole face all near the observer.Especially the aspect ratio of the upper part of large-size glass substrate 4 reduces in the past, and the upper part of large-size glass substrate 4 and observer's distance shortens.
If send macroscopical illumination light from macroscopical light source 31, then macroscopical illumination light is reflected by catoptron 32 under this state, carry out optically focused by Fresnel lens 33 after, shine on the large-size glass substrate 4 on the substrate holder 5.
The observer is subjected to visual examination to doing visualization by the light of large-size glass substrate 4 reflections.At this moment, the aspect ratio of the upper part of large-size glass substrate 4 is in the past low, so, the observer does not need to come back and watches the upper part of large-size glass substrate 4, and, can on the whole surface of large-size glass substrate 4, all can see the light of the different reflection directions that direction produced of scar for example or defect part such as inhomogeneous exactly clearly, determine the defect part that exists on the large-size glass substrate 4 exactly.
Moreover, when being subjected to visual examination, for example under the state on any rise angle of substrate holder 5 having been adjusted to easy macroscopic observation, if each ground jack 19 makes expansion link 19a carry out expanding-contracting action repeatedly according to predefined collapsing length.By carrying out this expanding-contracting action repeatedly, on arrow A direction continuously shake in accordance with regulations by the cycle for substrate holder 5.
The rise angular range of this substrate holder that shakes 5 is set by control device 43 in advance.This control device 43 is controlled the collapsing length of the expansion link 19a of each ground jack 19 according to predefined rise angular range.
If like this substrate holder is shaken continuously, then the light of the different reflection directions that direction produced of for example scar on the large-size glass substrate 4 or defect part such as inhomogeneous enters in observer's the visual field.Like this, the observer slightly moving view point can determine for example scar or defect part such as inhomogeneous on the large-size glass substrate 4.
And the coordinate data of the defect part by macroscopic examination on the definite large-size glass substrate 4 is imported in the control device 43.
Then, carry out microexamination.Ground jack 19 utilizes the control of control device 43 that expansion link 19a is shunk.Corresponding with the contraction phase of this expansion link 19a, connecting rod 18 is the center when rising with substrate holder 5 with fulcrum 22 opposite direction is rotated.Substrate holder 5 turns back to original horizontality like this.
If substrate holder 5 drops to horizontality on pedestal 3, the coordinate data of the defect part of importing when then control device 43 is according to macroscopic examination, control microscope stage 41 moves on the XY direction, and the field of view of microscope 42 is moved on the position that can see the defect part on the large-size glass substrate of determining when the macroscopic observation 4.
By the defect part image that microscope 42 amplifies, for example take by ccd video camera, be presented in the surveillance television.The observer observes the enlarged image of defect part shown in the surveillance television.
And control device 43 also may command microscope 42 moves on the XY direction, and the field of view of microscope 42 is scanned large-size glass substrate 4 whole surfaces.
When microexamination, substrate holder 5 is set on the pedestal 3 by part of being made up of hinged support member 12, hinge 10 and movable block 14 and supporting member 21, so, be not subjected to the influence of external vibration, can improve the stability of substrate holder 5.
This base plate keeping device is not limited only to when macroscopic examination and uses during microexamination, also can be used as when being put into large-size glass substrate 4 on the substrate holder 5 and the conveyer when substrate holder 5 is taken off and using.
For example, when being put into large-size glass substrate 4 on the substrate holder 5, if make the expansion link 19a elongation of ground jack 19 by the control of control device 43, then substrate holder 5 upwards rises as shown in Figure 4, and the lower end that makes substrate holder 5 is the position that the edge drops to the marginal portion 11 that is lower than pedestal 3 upper surfaces.
Like this, if substrate holder 5 rises, then large-size glass substrate 4 is placed on the reference pins 8 of each band running roller shown in Figure 2 with the state that is erected into approximate vertical direction (Z direction).And large-size glass substrate 4 is pushed pad 9 to each reference pins 7 pushings, is installed on the reference position.
Then, large-size glass substrate 4 utilizations are arranged on the attractive force of the no illustrated adsorption hole on the substrate holder 5 and are adsorbed on the surface of substrate holder 5.Then, if the expansion link 19a of ground jack 19 shrinks, then substrate holder 5 turns back to original horizontality.
On the other hand, when large-size glass substrate 4 when substrate holder 5 takes off, opposite order according to above-mentioned laying the time is removed the absorption to large-size glass substrate 4 under the state that substrate holder 5 is risen.And large-size glass substrate 4 is erected into vertical direction (Z direction) substantially, takes off from substrate holder 5.
When this large-size glass substrate 4 was laid or taken off on substrate holder 5, substrate holder 5 made the edge of lower end drop to the position of the marginal portion 11 of the upper surface that is lower than pedestal 3.Like this, under situation about large-size glass substrate 4 peaces being issued on the substrate holder 5, needn't bring up to large-size glass substrate 4 on the very high position, can on substrate holder 5, lay or take off large-size glass substrate 4 at an easy rate.
And if large-size glass substrate 4 is being placed under the state that erects on the substrate holder 5, then large-size glass substrate 4 utilizes deadweight that bottom is installed on the reference pins 8 of band running roller, positions.Like this, on substrate holder 5, can omit and the reference pins 8 opposed pushing pins of being with running roller, and, can reduce the face contact resistance between large-size glass substrate 4 and the substrate holder 5, can reduce to push the pushing force of pin.
Like this, according to above-mentioned the 1st embodiment, when substrate holder 5 is risen, the lower end side that makes substrate holder 5 is the place ahead of the marginal portion 11 of the edge pedestal 3 that is pushed out into stand 1, drop to the position of the marginal portion 11 of the pedestal 3 that is lower than stand 1 simultaneously, so, even substrate holder 5 is arranged on the stand 1, the whole surface that also can make large-size glass substrate 4 is near the observer, with compare in the past, the for example height of the upper part of the large-size glass substrate 4 of 1250 * 1000mm can be reduced particularly, the upper part of large-size glass substrate 4 and observer's distance can be shortened.
Like this, the observer does not need to come back and watches the upper part of large-size glass substrate 4, and, can on large-size glass substrate 4 whole surfaces, all can see the light of the different reflection directions that direction produced of scar for example or defect part such as inhomogeneous exactly clearly, determine the defect part that exists on the large-size glass substrate 4 exactly.
And, since large-size glass substrate 4 when rising its upper part with compare in the past and can reduce, so the position is set also reduces of macroscopical lighting device 30, the installing space of base plate keeping device integral body can reduce.
Moreover, when being subjected to visual examination, for example under the state of any rise angle of substrate holder 5 being adjusted to easy macroscopic observation, if repeat the expanding-contracting action of each ground jack 19 continuously substrate holder 5 is shaken, then observer's viewpoint moves minimizing, can see the light of the different reflection directions that direction produced of scar for example or defect part such as inhomogeneous, and determine this defect part.In the case, the angular range that substrate holder 5 is shaken can be set in arbitrarily in the control device 43, so for example be not limited only to scar and inhomogeneous etc., can also determine various defect parts such as breach, stain, dust.
When microexamination, for substrate holder 5 is remained horizontality, be placed on the pedestal 3 by part and the supporting member 21 formed by hinged support member 12, hinge 10 and movable block 14, so, be not subjected to the influence of external vibration, can improve the stability of substrate holder 5.Like this, can utilize microscope 42 non-oscillatory enlarged images to observe defect part on the large-size glass substrate 4.
Moreover, this device rises at substrate holder 5 that to make the lower end be under the state of position of the marginal portion 11 that drops to the pedestal 3 that is lower than stand 1, edge, also can be used as when being placed to large-size glass substrate 4 on the substrate holder 5 and the conveyer when substrate holder 5 is taken off uses.In the case, needn't rise to large-size glass substrate 4 on the very high position, can on substrate holder 5, lay or take off large-size glass substrate 4 at an easy rate.
Moreover, because substrate holder 5 is released the place ahead of the marginal portion 11 of pedestal 3 on one side, Yi Bian substrate holder 5 is upwards risen, so can not block macroscopical illumination light.
Head motion comprises as the hinge 10 that shakes fulcrum, as the linear guide device 15 of ejecting mechanism and linkage assembly 17 etc., so, can reduce price.
Following with reference to accompanying drawing, describe the 2nd embodiment of the present invention in detail.And, for the part identical, marking identical symbol with Fig. 1, its detailed description is omitted.
Fig. 5 is the pie graph that base plate keeping device of the present invention is applicable to the substrate verifying attachment.In this device, hinge 10, hinged support member 12, movable block 14, linear guide device 15, connecting rod 18, ground jack 19, extension end 20 and supporting member 21, as illustrating in above-mentioned the 1st embodiment, watch from face side, respectively be provided with one group at the two ends of Y direction respectively.
In the present embodiment, these are used following symbolic representation respectively: each hinge 10,10 ', each hinged support member 12,12 ', each movable block 14,14 ', each linear guide device 15,15 ', each connecting rod 18,18 ', each ground jack 19,19 ' and each supporting member 21,21 '.
In this device, as shown in Figure 6, be provided with other direction head motion 50, its purposes is: with the rise direction of substrate holder 5 on shake axial perpendicular axially on, substrate holder 5 is shaken.
In this other direction head motion 50, be provided with hinge assembly (rotating support member) 51, be used for the axis of rocking direction of the rise direction of substrate holder 5 perpendicular axially on rotate (arrow B direction).This hinge assembly 51 has following component part: hinged maintenance bar 52 is separately positioned on each hinged support sheet 52a, 52b on the two ends of this hinged maintenance bar 52, and is arranged on the rotation axis 53 in the substantial middle portion of bottom surface of hinged maintenance bar 52.
On each hinged support sheet 52a, 52b, divide be provided with each hinge 13,13 that can rotate '.Rotation axis 53 is arranged on and rotates with in the hole 54 and can rotate, and this rotation is formed on hole 54 in the substantial middle portion of face side of pedestal 3.
43 pairs of each ground jacks 19,19 of control device ' each stroke control by mutually different shaking quantity respectively.For example make on one side ground jack 19 or 19 ' flexible, make the ground jack 19 of another side ' or 19 stretch.Perhaps, make on one side ground jack 19 or 19 ' extend, make the ground jack 19 of another side ' or 19 shrink.And, make each ground jack 19,19 ' synchronously carry out expanding-contracting action.
If such structure, then under the situation of macroscopic examination, by the observer adjust each ground jack 19,19 ' each elongation of each expansion link 19a, 19 ' a.Like this, substrate holder 5 is adjusted to the rise angle arbitrarily that is subjected to visual examination easily.
Under this state, if repeatedly make each ground jack 19,19 ' each expansion link 19a, 19 ' a carry out synchronous expanding-contracting action, then by the repeating of this expanding-contracting action, the cycle shakes on the arrow A direction continuously in accordance with regulations to make substrate holder 5.
And, to each ground jack 19,19 ', for example make on one side ground jack 19 or 19 ' do not carry out expansion link and the ground jack 19 of another side ' or 19 shrink.Perhaps make on one side ground jack 19 or 19 ' elongation and the ground jack 19 of another side ' or 19 contractions.Perhaps repeat continuously each ground jack 19,19 ' expanding-contracting action.
Like this, by change each ground jack 19,19 ' expanding-contracting action, it is that rotate by the arrow B direction at the center with rotation axis 53 that substrate holder 5 makes articulated mounting shown in Figure 6 51.Like this, from the front, substrate holder 5 shakes at left and right directions (being designated hereinafter simply as the direction of shaking the head).
Fig. 7 allows 19 of on one side ground jack 19 or 19 ' flexible and another side ' or 19 flexible situations.In the case, substrate holder 5 is shown and sees the state of shaking the head to the left from the front.The swing range of this direction of shaking the head also can preestablish in control device 43, also can set arbitrarily by observer's operation.
Like this,, substrate holder 5 is shaken on the direction of shaking the head, set panning angle arbitrarily, perhaps shake continuously, increase the variation of macroscopic examination with this if adopt above-mentioned the 2nd embodiment.So, the observer can check out the scar on the large-size glass substrate 4 and the reflected light of defect part such as inhomogeneous, can determine these defect parts, and shake and to test out on rise direction (arrow A direction) by substrate holder 5 in the past.
Moreover, make substrate holder 5 the rise direction shake and the direction of shaking the head shake simultaneously action, can be set in substrate holder 5 on any angular orientation, perhaps on all angle directions, shake continuously, be subjected to visual examination.
And the present invention is not limited only to the above-mentioned the 1st and the 2nd embodiment, the implementation phase, in the scope that does not break away from its main points, can carry out various distortion.
For example, also can be: when substrate holder 5 is risen, at first make substrate holder 5 be pushed out into the place ahead of the marginal portion 11 of pedestal 3, making substrate holder 5 then is that rotate at the center with the rotation axis 13 of hinge 10, drops to the position of the marginal portion 11 that is lower than pedestal 3.
In a word, substrate holder 5 is when rising to the angle of inclination of regulation from horizontality, and shaking the downside that makes substrate holder 5 is the position that the edge drops to the marginal portion 11 that is lower than pedestal 3.This substrate holder 5 shake action, carry out various distortion by the structure that makes head motion and can realize.
Each connecting rod 18,18 ' also can replace to for example ground jack.By replacing to ground jack, under the state that substrate holder 5 rises, make this ground jack flexible, substrate holder 5 is moved up at upper and lower.Like this, can be arranged in the desired area of the visualization on the large-size glass substrate on the height and position that the observer is subjected to visual examination easily.
Head motion is by as the hinge 10 that shakes fulcrum, constitute as the linear guide device 15 of ejecting mechanism and linkage assembly 17 etc., but also can adopt other any mechanisms.For example also can adopt each hinge 10,10 that shakes fulcrum of making as substrate holder 5 ' have concurrently structure of shaking and sliding two kinds of functions, and, also can adopt the head motion that substrate holder 5 is moved by circular-arc route.
The possibility of utilizing on the industry
The present invention is not limited in the base plate keeping device used in FPD manufacturing processes such as giant-screen LCD and PDP and uses and in conjunction with the structure of macroscopic examination and microexamination.Also go for independent macroscopic examination, and, can be applicable to the verifying attachment of various substrates such as film thickness measuring on large-size glass substrate and figure check, can keep and it is laid and takes out large-size glass substrate.
(according to the modification of the 19th of treaty)
1 (revising the back), a kind of base plate keeping device is characterized in that having:
Pedestal;
Substrate holder is arranged on the said base, is used to keep large substrate; And
Head motion, making the aforesaid substrate support is that the center is rotated so that aforesaid substrate support when forwards rising with the pivot point in the forward edge portion that is arranged on said base, above-mentioned support is released the place ahead of the above-mentioned forward edge portion above the said base, so that when substrate holder is risen, the lower end of aforesaid substrate support drops to below the forward edge part above the said base.
2 (revising the back), base plate keeping device as claimed in claim 1, it is characterized in that, above-mentioned head motion has the other direction head motion, make the aforesaid substrate support with the above-mentioned pivot point that the aforesaid substrate support is risen axial perpendicular axial on be rotated.
3 (revising the back), base plate keeping device as claimed in claim 1 is characterized in that above-mentioned head motion makes in the rise angular range of aforesaid substrate support between horizontality and approximate vertical state and is rotated.
4 (revising the back), base plate keeping device as claimed in claim 2 is characterized in that, under the state that the aforesaid substrate support is risen, above-mentioned other direction head motion makes the direction rotation to the left and right of aforesaid substrate support.
5 (revising the back), base plate keeping device as claimed in claim 1 is characterized in that above-mentioned head motion has:
Each linear guide device is arranged on the both sides of aforesaid substrate support;
Above-mentioned pivot point is arranged on the both ends, front side of said base; And
Ground jack is the center with above-mentioned pivot point, and the aforesaid substrate support is risen,
By above-mentioned linear guide device is slided with respect to above-mentioned pivot point, the aforesaid substrate support is forwards released.
6 (revise back), base plate keeping device as claimed in claim 5 is characterized in that, are provided for limiting the retainer of the rise angle of aforesaid substrate support on above-mentioned linear guide device.
7 (revising the back), base plate keeping device as claimed in claim 5 is characterized in that, above-mentioned ground jack, and its two ends are attached between the horizontal beam of aforesaid substrate support and said base with rotating state.
8 (revising the back), base plate keeping device as claimed in claim 5, it is characterized in that, above-mentioned ground jack, the one end is attached on the horizontal beam of said base with rotating state, its other end is attached on the connecting rod with rotating state, and this connecting rod is attached between the place ahead of the rear of aforesaid substrate support and said base.
9 (revise back), base plate keeping device as claimed in claim 5 is characterized in that above-mentioned ground jack has flexible bar, utilize the stroke of above-mentioned bar to set the rise angle of aforesaid substrate support.
10 (revising the back), base plate keeping device as claimed in claim 5 is characterized in that above-mentioned ground jack has flexible bar, by the expanding-contracting action that carries out above-mentioned bar repeatedly the aforesaid substrate support are rotated up in front and back.
11 (revising the back), base plate keeping device as claimed in claim 5, it is characterized in that, above-mentioned ground jack is separately positioned on the both sides of aforesaid substrate support, make the angle rise in accordance with regulations of aforesaid substrate support by synchronously stretching in one direction, and, by synchronously the aforesaid substrate support being shaken on fore-and-aft direction flexible repeatedly on the above-below direction.
12 (revising the back), base plate keeping device as claimed in claim 1 is characterized in that above-mentioned pivot point is made of hinge, and this hinge is arranged on the two ends of the forward edge portion of said base with rotation state freely.
13 (revising the back), base plate keeping device as claimed in claim 8, it is characterized in that, the length of above-mentioned connecting rod, fulcrum and the interval between the above-mentioned pivot point than the aforesaid substrate support that is connected with an end of this connecting rod are little, and be bigger than above-mentioned pivot point and the interval that links between the fulcrum of said base of this connecting rod other end.
14 (revising the back), base plate keeping device as claimed in claim 2, it is characterized in that, above-mentioned head motion has the ground jack that the aforesaid substrate support is risen respectively in the both sides of aforesaid substrate support, under the state that the aforesaid substrate support rises, the aforesaid substrate support is moved up at upper and lower by above-mentioned each ground jack is stretched.
15 (revising the back), base plate keeping device as claimed in claim 2, it is characterized in that, above-mentioned other direction head motion, be respectively equipped with each ground jack that the aforesaid substrate support is risen in the both sides of aforesaid substrate support, make above-mentioned ground jack on one side flexible on above-below direction, the above-mentioned ground jack that perhaps makes both sides is flexible to different directions respectively, make like this aforesaid substrate support to the left and right one or two direction of direction shake.
16 (revising the back), base plate keeping device as claimed in claim 2 is characterized in that, are provided with in the above-mentioned other direction head motion:
Swivel bearing portion is arranged on the said base, with the axial perpendicular direction of the pivot point of the rise direction of aforesaid substrate support on rotatable; And
Pivot point, the two supports aforesaid substrate support in above-mentioned swivel bearing portion makes it rise on the direction rotation freely.
17 (revising the back), a kind of base plate keeping device is characterized in that having:
Pedestal;
Substrate holder is arranged on the said base, is used to keep large substrate; And
Head motion, forward edge portion with said base is that pivot point is rotated the aforesaid substrate support, so that the aforesaid substrate support forwards rises, simultaneously, the aforesaid substrate support is released the place ahead of the above-mentioned forward edge portion above the said base, so that below the lower end that makes the aforesaid substrate support when above-mentioned support rises drops to forward edge portion above the said base
Utilize above-mentioned head motion to make the aforesaid substrate support rise to the position of approximate vertical, and the above-mentioned forward edge subordinate of aforesaid substrate support is dropped to below the said base, transmit under this state above-mentioned large substrate being changed to be downloaded on the aforesaid substrate support.
18 (appending), base plate keeping device as claimed in claim 17, it is characterized in that, have: be arranged on the reference pins that has running roller in the above-mentioned forward edge portion of aforesaid substrate support and be arranged on reference pins on the horizontal side end of aforesaid substrate support, by on the reference pins that above-mentioned large substrate is placed into above-mentioned band running roller and, above-mentioned large substrate is positioned to above-mentioned reference pins pushing.
19 (appending), base plate keeping device as claimed in claim 17, it is characterized in that, have: be arranged on the reference pins that has running roller in the above-mentioned forward edge portion of aforesaid substrate support, be arranged on the reference pins on the horizontal side end of aforesaid substrate support, and pushing pin, be arranged on and be provided with on the horizontal side end of the opposed aforesaid substrate support of horizontal side end of aforesaid substrate support of said reference pin
Under the state that above-mentioned large substrate is placed on the above-mentioned reference pins that has a running roller, utilize above-mentioned pushing pin that above-mentioned large substrate is pushed to above-mentioned reference pins, above-mentioned large substrate is positioned.
20 (appending), a kind of substrate verifying attachment is characterized in that having:
Pedestal;
Substrate holder is arranged on the said base, is used to keep large substrate;
Head motion, making the aforesaid substrate support is that the pivot point center is rotated with the forward edge portion of said base, so that the aforesaid substrate support forwards rises, simultaneously, the aforesaid substrate support is released the place ahead of the above-mentioned forward edge portion above the said base, so that below the lower end that makes the aforesaid substrate support when above-mentioned support rises drops to forward edge portion above the said base; And
The macroscopic view lighting device shines macroscopical illumination light on the surface that remains on the above-mentioned large substrate in the aforesaid substrate support.
21 (appending), substrate verifying attachment as claimed in claim 20 is characterized in that above-mentioned head motion has:
Each linear guide device is arranged on the both sides of aforesaid substrate support;
Above-mentioned pivot point is arranged on the two ends of the above-mentioned forward edge portion of said base; And
Ground jack is the center with above-mentioned pivot point, and the aforesaid substrate support is risen,
Make above-mentioned ground jack flexible, the aforesaid substrate support is risen to the angle that is easy to macroscopic observation, under this state, be subjected to visual examination.
22 (appending), substrate verifying attachment as claimed in claim 21, it is characterized in that, at above-mentioned ground jack the aforesaid substrate support is risen under the state of the angle that is easy to carry out above-mentioned macroscopic observation, carry out expanding-contracting action repeatedly, above-mentioned large substrate is shaken continuously by above-mentioned ground jack.
23 (appending), substrate verifying attachment as claimed in claim 20 is characterized in that having:
Door type arm, it is provided with state and is: under the aforesaid substrate support flatly is placed on state on the said base, can move along the both sides that remain on the above-mentioned large substrate on the aforesaid substrate support;
Microscope, it is arranged to and can moves along the horizon bar of above-mentioned door type arm; And
Control part is used on the XY direction above-mentioned door type arm and above-mentioned microscopical moving being controlled.
24 (appending), substrate verifying attachment as claimed in claim 23, it is characterized in that, input has the coordinate data of the defect part on the above-mentioned large substrate definite by above-mentioned macroscopic examination in the above-mentioned control part, the aforesaid substrate support is being placed under the horizontal state, and above-mentioned control part is controlled the mobile of XY direction above-mentioned door type arm and above-mentioned microscope according to above-mentioned coordinate data.
Claims (17)
1, a kind of base plate keeping device is characterized in that, has:
Stand;
Substrate holder is arranged on the described stand, is used to keep large substrate; And
Head motion, substrate holder can be shaken to the rise direction of horizontality or substrate holder on stand, if substrate holder is risen, then the edge as the lower end of aforesaid substrate support is dropped to below the marginal portion of above-mentioned stand upper surface by this rise.
2, base plate keeping device as claimed in claim 1 is characterized in that, above-mentioned head motion shakes the aforesaid substrate support in the rise angular range of setting arbitrarily.
3, base plate keeping device as claimed in claim 1 is characterized in that, above-mentioned head motion shakes the place ahead of the marginal portion of aforesaid substrate support on above-mentioned stand.
4, base plate keeping device as claimed in claim 1 is characterized in that, above-mentioned head motion has:
Linkage assembly shakes the aforesaid substrate support to horizontality or rise direction on above-mentioned stand;
Shake fulcrum, be arranged on the marginal portion above the above-mentioned stand, the aforesaid substrate support is shaken on the rise direction; And
Ejecting mechanism, along with shaking of the aforesaid substrate support that is undertaken by aforementioned link mechanism, the above-mentioned fulcrum that shakes is slided with respect to the aforesaid substrate support, on one side the aforesaid substrate support is released the place ahead of the marginal portion above the above-mentioned stand, one side rise by the aforesaid substrate support edge as downside is dropped to below the marginal portion above the above-mentioned stand.
5, base plate keeping device as claimed in claim 4 is characterized in that, aforementioned link mechanism is separately positioned on two ends with respect to the aforesaid substrate support.
6, base plate keeping device as claimed in claim 4, it is characterized in that in above-mentioned ejecting mechanism, the above-mentioned fulcrum that shakes is arranged on marginal portion above the above-mentioned stand, and, making the aforesaid substrate support shake the guides that fulcrum slides and be arranged on the aforesaid substrate support with respect to above-mentioned.
7, base plate keeping device as claimed in claim 4 is characterized in that, along with the increase of the rise angle of aforesaid substrate support, above-mentioned ejecting mechanism increases the released amount as the edge of the lower end side of aforesaid substrate support.
8, base plate keeping device as claimed in claim 1 is characterized in that, above-mentioned head motion has:
Connecting rod forms fixing length, and an end is arranged on the pedestal that constitutes above-mentioned stand and can rotates, and simultaneously, the other end is arranged on the edge of the aforesaid substrate support that becomes upside when the aforesaid substrate support rises, and can rotates;
Shake fulcrum, be arranged on the marginal portion above the above-mentioned stand, the aforesaid substrate support is shaken on the rise direction; And
When ejecting mechanism, the rotation by above-mentioned connecting rod rise the aforesaid substrate support, the aforesaid substrate support is slided with respect to the above-mentioned fulcrum that shakes, above-mentioned support is released the place ahead of the marginal portion above the above-mentioned stand.
9, base plate keeping device as claimed in claim 8 is characterized in that, in the rotating fulcrum and the above-mentioned distance of shaking fulcrum of an end setting of above-mentioned connecting rod, sets for shorter than the length of above-mentioned connecting rod.
10, base plate keeping device as claimed in claim 1 is characterized in that, above-mentioned head motion has:
Connecting rod forms fixing length, and an end is arranged on the pedestal that constitutes above-mentioned stand and can rotates, and simultaneously, the other end is arranged on the edge of the aforesaid substrate support that becomes upside when the aforesaid substrate support rises, and can rotate;
Ground jack, the front end of its expansion link are rotatably connected on the above-mentioned other end of above-mentioned connecting rod, the lower end are attached at rotationally the bottom of above-mentioned stand;
Shake fulcrum, be arranged on the marginal portion above the above-mentioned stand, the aforesaid substrate support is shaken on the rise direction; And
Guides, be arranged on the back side of aforesaid substrate support, the flexible of above-mentioned expansion link by above-mentioned ground jack slides with respect to the above-mentioned fulcrum that shakes, above-mentioned support is released the place ahead of the marginal portion above the above-mentioned stand on one side, the rise by the aforesaid substrate support on one side drops to below the marginal portion above the above-mentioned stand edge as downside
By adjusting the collapsing length of above-mentioned expansion link, and according to the limit of the end by above-mentioned connecting rod and the other end, with by the above-mentioned connecting rod other end and the above-mentioned formed angle in limit of shaking fulcrum, change the rise angle of substrate holder, can set the rise angle of aforesaid substrate support and the lower edge dropping distance partly of aforesaid substrate support arbitrarily.
11, base plate keeping device as claimed in claim 1 is characterized in that, above-mentioned head motion has the other direction head motion, different with the axis of rocking direction of the rise direction of aforesaid substrate support axially on, the aforesaid substrate support is shaken.
12, base plate keeping device as claimed in claim 11, it is characterized in that, under the state that the aforesaid substrate support is risen, above-mentioned other direction head motion make the aforesaid substrate support with the perpendicular axle of the above-mentioned axis of rocking direction of above-mentioned head motion as the center, on the direction of shaking the head, shake.
13, base plate keeping device as claimed in claim 12 is characterized in that, above-mentioned head motion carries out shaking and utilize above-mentioned other direction head motion shaking to the above-mentioned direction of shaking the head to what above-mentioned substrate holder rose direction simultaneously.
14, base plate keeping device as claimed in claim 11 is characterized in that, above-mentioned other direction head motion has:
The rotating support member is arranged on the marginal portion above the above-mentioned stand, can with the axis of rocking direction of the rise direction of aforesaid substrate support perpendicular axially on rotate; And
Shake fulcrum, be arranged on this rotating support member, supporting aforesaid substrate support can shake it on the rise direction;
Mutually different each shaking quantity according to above-mentioned each linkage assembly of above-mentioned head motion shakes the aforesaid substrate support on the direction of shaking the head, above-mentioned head motion is separately positioned on the two ends of aforesaid substrate support.
15, base plate keeping device as claimed in claim 1, it is characterized in that, make the aforesaid substrate support rise, make the edge that becomes the lower end of aforesaid substrate support to drop under the state below the marginal portion above the above-mentioned stand by above-mentioned head motion, be used in above-mentioned large substrate is installed on the aforesaid substrate support or with it and take off.
16, a kind of substrate verifying attachment is characterized in that having:
Stand;
Substrate holder is arranged on the stand, keeps large substrate;
Head motion, substrate holder can be shaken to the rise direction of horizontality or substrate holder on stand, if substrate holder is risen, then the edge as the lower end of aforesaid substrate support is dropped to below the marginal portion of above-mentioned stand upper surface by this rise; And
The macroscopic view lighting device is arranged on the top of aforesaid substrate support, shines macroscopical illumination light to the above-mentioned large substrate that remains on the aforesaid substrate support that rises or shaking by above-mentioned head motion.
17, substrate verifying attachment as claimed in claim 16, it is characterized in that, has the microexamination device, the aforesaid substrate support level be arranged under the state on the above-mentioned stand, above the above-mentioned large substrate that is kept on the aforesaid substrate support, move the microscope of the enlarged image that obtains above-mentioned large substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002157941A JP3931111B2 (en) | 2002-05-30 | 2002-05-30 | Substrate holding device and substrate inspection device |
| JP157941/2002 | 2002-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1578907A true CN1578907A (en) | 2005-02-09 |
| CN100483115C CN100483115C (en) | 2009-04-29 |
Family
ID=29706474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB038007347A Expired - Fee Related CN100483115C (en) | 2002-05-30 | 2003-05-27 | Substrate holding device and substrate inspection device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP3931111B2 (en) |
| KR (1) | KR20050005390A (en) |
| CN (1) | CN100483115C (en) |
| TW (1) | TWI313039B (en) |
| WO (1) | WO2003102561A1 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101256157B (en) * | 2008-03-26 | 2010-06-02 | 广州中国科学院工业技术研究院 | Method and apparatus for testing surface defect |
| CN101261234B (en) * | 2008-03-26 | 2010-06-09 | 广州中国科学院工业技术研究院 | Surface flaw detection device |
| CN102207422A (en) * | 2010-03-31 | 2011-10-05 | 郭上鲲 | Support mechanism for inspection systems |
| CN102629029A (en) * | 2011-11-04 | 2012-08-08 | 京东方科技集团股份有限公司 | Friction method and device for oriented film |
| CN101995674B (en) * | 2009-08-13 | 2013-07-03 | 爱德牌工程有限公司 | Macroscopic inspection equipment for LCD (Liquid Crystal Display) glass |
| CN103594391A (en) * | 2012-08-14 | 2014-02-19 | 营口金辰机械股份有限公司 | Solar cell assembly overturn inspection mechanism |
| CN107768287A (en) * | 2017-11-03 | 2018-03-06 | 德淮半导体有限公司 | A kind of method and apparatus for test wafer |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4700365B2 (en) * | 2005-02-09 | 2011-06-15 | オリンパス株式会社 | Board inspection equipment |
| JP5722049B2 (en) * | 2011-01-06 | 2015-05-20 | オリンパス株式会社 | Board inspection system |
| KR101326655B1 (en) * | 2012-02-29 | 2013-11-08 | 한국표준과학연구원 | A measuring device for component defects by infrared thermal image and heat conduction and radiation |
| JP6053154B2 (en) * | 2013-03-28 | 2016-12-27 | リンテック株式会社 | Light irradiation apparatus and light irradiation method |
| KR101703904B1 (en) * | 2015-08-28 | 2017-02-22 | (주)오로스 테크놀로지 | Wafer gripping apparatus and dual wafer stress inspection apparatus having the same |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2870990B2 (en) * | 1990-06-01 | 1999-03-17 | 株式会社日本マイクロニクス | Liquid crystal display panel prober |
| JP2740580B2 (en) * | 1991-04-16 | 1998-04-15 | シャープ株式会社 | Appearance inspection device |
| JPH0559219U (en) * | 1992-01-21 | 1993-08-06 | テクノエイト株式会社 | Board inspection equipment |
| JPH06118112A (en) * | 1992-10-05 | 1994-04-28 | Asia Electron Inc | Test board fixing mechanism |
| JPH08189947A (en) * | 1995-01-09 | 1996-07-23 | Fujitsu Ltd | Printed wiring board inspecting device |
| JP3590170B2 (en) * | 1995-12-04 | 2004-11-17 | オリンパス株式会社 | Substrate transfer device and substrate appearance inspection device using the same |
| JPH09236755A (en) * | 1996-02-29 | 1997-09-09 | Jeol Ltd | Method for correcting position of sample stage of microscope and sample stage |
| JP3782525B2 (en) * | 1996-10-09 | 2006-06-07 | オリンパス株式会社 | Board inspection equipment |
| JP3958852B2 (en) * | 1997-12-22 | 2007-08-15 | 株式会社日本マイクロニクス | Substrate inspection device |
| JP2000162133A (en) * | 1998-09-21 | 2000-06-16 | Olympus Optical Co Ltd | Substrate inspection device and parallel link mechanism used therefor |
| JP2002090303A (en) * | 2000-09-20 | 2002-03-27 | Olympus Optical Co Ltd | Holder mechanism |
| JP2003014649A (en) * | 2001-06-27 | 2003-01-15 | Hitachi Kokusai Electric Inc | Plate-shaped matter inspection device |
-
2002
- 2002-05-30 JP JP2002157941A patent/JP3931111B2/en not_active Expired - Fee Related
-
2003
- 2003-05-27 KR KR10-2004-7001004A patent/KR20050005390A/en not_active Application Discontinuation
- 2003-05-27 WO PCT/JP2003/006611 patent/WO2003102561A1/en active Application Filing
- 2003-05-27 CN CNB038007347A patent/CN100483115C/en not_active Expired - Fee Related
- 2003-05-28 TW TW092114436A patent/TWI313039B/en not_active IP Right Cessation
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101256157B (en) * | 2008-03-26 | 2010-06-02 | 广州中国科学院工业技术研究院 | Method and apparatus for testing surface defect |
| CN101261234B (en) * | 2008-03-26 | 2010-06-09 | 广州中国科学院工业技术研究院 | Surface flaw detection device |
| CN101995674B (en) * | 2009-08-13 | 2013-07-03 | 爱德牌工程有限公司 | Macroscopic inspection equipment for LCD (Liquid Crystal Display) glass |
| CN102207422A (en) * | 2010-03-31 | 2011-10-05 | 郭上鲲 | Support mechanism for inspection systems |
| CN102207422B (en) * | 2010-03-31 | 2014-09-03 | 郭上鲲 | Support mechanism for inspection systems |
| CN102629029A (en) * | 2011-11-04 | 2012-08-08 | 京东方科技集团股份有限公司 | Friction method and device for oriented film |
| CN103594391A (en) * | 2012-08-14 | 2014-02-19 | 营口金辰机械股份有限公司 | Solar cell assembly overturn inspection mechanism |
| CN103594391B (en) * | 2012-08-14 | 2017-09-26 | 营口金辰机械股份有限公司 | Solar cell module overturns inspection body |
| CN107768287A (en) * | 2017-11-03 | 2018-03-06 | 德淮半导体有限公司 | A kind of method and apparatus for test wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200307339A (en) | 2003-12-01 |
| JP3931111B2 (en) | 2007-06-13 |
| WO2003102561A1 (en) | 2003-12-11 |
| KR20050005390A (en) | 2005-01-13 |
| CN100483115C (en) | 2009-04-29 |
| JP2003344294A (en) | 2003-12-03 |
| TWI313039B (en) | 2009-08-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1179206C (en) | Chip testing device | |
| CN1578907A (en) | Substrate holding device and substrate inspection device | |
| CN1582393A (en) | Substrate inspecting device | |
| CN1780542A (en) | Panel assembling apparatus and panel assembling method | |
| CN1924513A (en) | Microcosmic checking device for glass panel | |
| CN101027547B (en) | Substrate holder for substrate inspecting apparatus, and substrate inspecting apparatus | |
| CN1556920A (en) | Defect inspection apparatus | |
| CN101067711A (en) | Liquid crystal projecting device | |
| CN1537225A (en) | Macro illumination device | |
| CN1707248A (en) | Stage apparatus and vision measuring apparatus | |
| CN101047090A (en) | Image correction device and coating unit thereof | |
| CN1621818A (en) | Cutting surface testing apparatus for glass substrate | |
| JP2003270155A (en) | Substrate holding device and inspection device | |
| CN1627059A (en) | Checker and checking method for glass substrate | |
| CN1304866C (en) | Microscopie unit | |
| CN1464976A (en) | Substrate holding device | |
| KR20120080135A (en) | Substrate inspection system | |
| CN1288435C (en) | Substrate checking apparatus | |
| CN208539319U (en) | It is a kind of for liquid crystal display connector to the angle adjusting mechanism of plug in machine | |
| CN1624539A (en) | Loader and bonding apparatus for fabricating liquid crystal display device and loading method thereof | |
| CN209727801U (en) | A kind of backlight assembly of achievable correcting camera position and backlight multiaxis optical detection apparatus containing the backlight assembly | |
| CN1906932A (en) | Display device | |
| CN114253085B (en) | Drawing device | |
| CN1379286A (en) | Exposure device | |
| KR102111234B1 (en) | Chart stage apparatus for inspectinon of camera module |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090429 Termination date: 20140527 |