TW200307339A

TW200307339A - Substrate holding apparatus and substrate examination apparatus

Info

Publication number: TW200307339A
Application number: TW092114436A
Authority: TW
Inventors: Mamoru Yasuda; Nobuo Fujisaki
Original assignee: Olympus Optical Co
Priority date: 2002-05-30
Filing date: 2003-05-28
Publication date: 2003-12-01
Also published as: CN1578907A; TWI313039B; JP3931111B2; JP2003344294A; KR20050005390A; WO2003102561A1; CN100483115C

Abstract

A substrate holding device is disclosed, wherein a substrate holder (5) allowed to swing in a rising direction on a frame (1) by the telescoping operation of a jack (19) is raised by swinging. When the substrate holder (5) swings upward, the substrate holder (5) is slid on a movement block (14) fitted to a hinge (10) for a linear guide (15) and projected beyond the edge portion (11) of a base (3), and the lower end edge of the substrate holder (5) is lowered below the edge portion (11) of the base (3).

Description

200307339 五、發明說明（l) - 【發明所屬之技術】 •本發明係關於在進行大型液晶顯示（丨iquid crystai display)(以下簡稱為LCD)，等離子顯示基板 display Panel)(以下簡稱為pDp)等平板顯示（fUt panel display)(以下簡稱為FpD)之玻璃基板瑕疵檢查時’用以維持玻璃基板，搖動基板保持裝置，以及該基板保持裝置的基板檢查裝置。【先前技術】近年來，在LCD、PDP等FPD的領域中，畫面大型化與成本削減，一直是期待達成的目標。為達成上述目標，在FPD 製造工程中，有採用多面玻璃基板使晝面尺寸有越來越大型化的傾向。所以，玻璃基板尺寸，目前已有出現1 2 5 0 X 1 1 0 0麵的大型尺寸了。在這樣的FPD製造工程中，應對生產的大型玻璃基板進行基板檢查。基板檢查的手法之一是採取目視（m a c r 〇 )檢查與顯微（micro)檢查兩者併行的方式。目視（macro)檢查，是利用照明光線照射玻璃基板，以目視觀察玻璃基板上的反射光。顯微（m i c r 〇)檢查’則是將目視檢查中發現的特疋瑕疵部分，利用顯微鏡加以擴大觀察。此之基板檢查裝置，包括刊載於特開平1卜1 6 0 242號公報中的技術。該公報中刊載著備有可將玻璃基板昇起並固定維持於規定角度的托架，於進行目視（m a c r 0)檢查時’將200307339 V. Description of the invention (l)-[Technology to which the invention belongs] • The present invention relates to a large liquid crystal display (丨 quick crystai display) (hereinafter referred to as LCD), a plasma display substrate (hereinafter referred to as pDp) When a glass substrate defect inspection of a fUt panel display (hereinafter abbreviated as FpD) is performed, it is used to maintain the glass substrate, shake the substrate holding device, and the substrate inspection device of the substrate holding device. [Prior art] In recent years, in the field of FPDs such as LCDs and PDPs, screen enlargement and cost reduction have been expected goals. In order to achieve the above-mentioned goals, in the FPD manufacturing process, a multi-faceted glass substrate is used to increase the size of the daylight surface. Therefore, the size of the glass substrate has already appeared in a large size of 1,250 X 1,100. In such FPD manufacturing processes, substrate inspection should be performed on large glass substrates produced. One of the methods of substrate inspection is to use a visual inspection (m a c r) inspection and a micro inspection (micro inspection) in parallel. The visual inspection (macro) is to irradiate the glass substrate with illumination light, and to visually observe the reflected light on the glass substrate. Microscopic inspection (m i c r 〇) inspection 'is to enlarge and observe the special defects found in the visual inspection with a microscope. The substrate inspection apparatus includes a technique disclosed in Japanese Patent Publication No. 1 1616 242. In this bulletin, a bracket is provided that can raise a glass substrate and hold it at a fixed angle. When visual inspection (m a c r 0) is performed,

200307339 五、發明說明（2) --- 玻㈤基板放置於托架之上，使托架昇高至與觀察者視線同南，使觀察者便於進行目視觀察（macr〇)檢查。另外，也可面向觀察者珂後方向搖動托架，讓觀察者進行目視觀察 fmacro)檢查。進行顯微（micr〇)檢查時，則使托架返回原來位置，令玻璃基板保持水平狀態，利用顯微觀察系統擴大親察疲》部分。一但是’進行目視（macro)檢查時是以托架下方為中心昇高的，若是檢查的玻璃基板大型化，則昇高後的大型玻璃基板上端部分，將高於觀察者眼睛的位置。因此，觀察者的眼睛至大型玻璃基板上端部分的距離越遠，就越不容易觀察大型玻璃基板的上端部分。另外’大型玻璃基板昇起時，由於大型玻璃基板上端部分位置較高，所以，必須要有足夠的高度空間使大型玻璃基板得以自在搖動。因此，裝置整體的尺寸也必須隨之大型化。【内容】依本發明主要觀點，提供具備有架台，與裝設於架台上固定大型基板的基板托架，以及使基板托架在架台上呈水平狀態，或使基板托架朝昇起方向搖動，且基板托架昇起時基板托架下端邊緣較架台上方邊緣部分降得更低的搖動構造荨之基板固定保持裝置。依本發明主要觀點，提供備有裝設於基板托架上方，200307339 V. Description of the invention (2) --- The glass substrate is placed on the bracket, so that the bracket is raised to the south of the observer's line of sight, making it easier for the observer to perform visual inspection (macr0) inspection. In addition, you can also shake the bracket toward the observer, and let the observer perform visual inspection (fmacro) inspection. When performing a micro (micr0) inspection, return the bracket to its original position, keep the glass substrate horizontal, and use a microscopic observation system to expand the pro-inspection fatigue section. -However, when the macro inspection is performed, the center is raised below the bracket. If the inspected glass substrate becomes larger, the upper end portion of the raised large glass substrate will be higher than the position of the observer's eyes. Therefore, the farther the observer's eyes are from the upper end portion of the large glass substrate, the easier it is to observe the upper end portion of the large glass substrate. In addition, when the large glass substrate is raised, since the upper end portion of the large glass substrate is relatively high, there must be a sufficient height space for the large glass substrate to shake freely. Therefore, the overall size of the device must be increased accordingly. [Contents] According to the main point of the present invention, a substrate holder provided with a stand and a large substrate fixed on the stand is provided, and the substrate holder is horizontal on the stand, or the substrate holder is shaken in a rising direction. And, when the substrate bracket is raised, the lower edge of the substrate bracket is lower than the upper edge portion of the stand, and the shaking structure of the substrate fixing and holding device is lowered. According to the main aspect of the present invention, there is provided a device mounted on a substrate holder,

第6頁 200307339 五、發明說明（3) 且固疋於藉由搖動構造昇起或搖動的基板托架上的目視照明I置’藉此對大型基板照射目視照明光線之基板檢查裝置。一【實施方式】以下，就有關本發明第1實施形態，參照圖示進行說明。圖一，為適用於本發明基板固定保持裝置的基板檢查裝置剖面結構圖。架台（1 )，由腳（2 )、與裝設於腳（2 )上的底座（3 )構成。在底座（3 )上裝設著固定維持大型玻璃基板 (4)的基板托架（5)。基板托架（5)呈水平狀態，高度設定於運送機器手臂移動的高度上。底座（3)上方，則呈水平裝設。基板托架（5 )，如圖二所示，形成開口部（6)。於開口部（6 )各邊上，設有決定大型玻璃基板（4 )基準位置的各基準栓銷（7 )，以及滾輪安裝基準栓銷（8 )，按壓栓銷（9 )。按鈕栓銷（9 )，則安裝在大型玻璃基板（4 )按壓於基準栓銷（7 ) 的可移動方向上。基板托架（5 )，相對於底座（3 )的上方，依以下說明之搖動裝置（包括搖動支點的鉸鏈（hinge) (10)，與推出裝置的直線導軌（1 5 )、連接裝置（1 7 )，可知是以鉸鏈 (hinge) (10)為搖動軸，而以可搖動的方式裝設。搖動方向，為基板托架（5 )昇起，或恢復水平狀態之方向（箭頭A 方向）。鉸鏈（hinge) (10)，從正面觀察基板固定保持裝Page 6 200307339 V. Description of the invention (3) A visual inspection device which is fixed on a substrate holder raised or shaken by a rocking structure, thereby irradiating a large substrate with visual illumination light. [Embodiment] Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional structural view of a substrate inspection device suitable for a substrate fixing and holding device of the present invention. The stand (1) is composed of a foot (2) and a base (3) mounted on the foot (2). A substrate bracket (5) for holding and maintaining a large glass substrate (4) is mounted on the base (3). The substrate holder (5) is horizontal, and the height is set to the height at which the transport robot arm moves. Above the base (3), it is installed horizontally. The substrate holder (5), as shown in Fig. 2, forms an opening (6). On each side of the opening (6), reference pins (7) for determining the reference position of the large glass substrate (4), reference pins (8) for roller mounting, and press pins (9) are provided. The button pin (9) is mounted on a large glass substrate (4) in a movable direction that is pressed against the reference pin (7). The base plate bracket (5) is relative to the upper part of the base (3) according to the following rocking device (including the hinge (10)) of the fulcrum, the linear guide (1 5) of the pushing device, and the connecting device (1 7), it can be seen that the hinge (10) is used as the swing axis, and it is installed in a swingable manner. The swing direction is the direction in which the substrate bracket (5) is raised or restored to a horizontal state (direction of arrow A) .Hinge (10), the board is fixed and held when viewed from the front

200307339 五、發明說明（4) 置’可知是裝設於底座（3 )的兩側。位於底座（3)上方正面側邊緣部分（11)的兩端，如圖三所示，分別設有各鉸鏈（hinge)支撐零件（12)。這些鉸鏈支撐零件（1 2 )上，又分別設有可自由回轉的鉸鏈 (hinge) (1 0)。為使基板托架（5)昇起，或往恢復水平狀態的方向（箭頭A方向）搖動，這些鉸鏈（hinge)(1〇)的回轉軸（1 3 )裝設於正面側的水平方向（γ方向）。鉸鏈（1^叫6)(1〇)上設有移動滑車（]31〇(：1〇(14)。移動滑車（block) (14)上，則形成與裝設於基板托架（5)背面之直線導軌（1 5 )嵌合的摩擦移動用溝槽（i β )。直線導執（1 5 )’於基板托架（5 )昇起時，在摩擦移動用溝槽（1 6 )内摩擦移動，將基板托架（5 )往正面側推出。鉸鏈 (hinge)(10) ’以回轉軸（13)為支點，使基板托架（5)搖動。藉此也能使基板托架（5 )下端，從底座（3 )上方的邊緣部分（11)下降’並由直線導軌（15)、鉸鏈（^“^(丨㈧構成推出裝置。直線導軌（1 5 )，分別裝設於基板托架（5 )背面的兩端側’放置在形成於底座（3 )兩端各移動滑車（1 4 )上的各摩擦移動用溝槽。這些直線導軌（丨5 )，於基板托架（5 )昇起時，在摩擦移動用溝槽（丨6 )内摩擦移動，將基板托架（5 )往正面側推出’而且為了使基板托架（5 )下端側邊緣降至底座（3 ) 上方邊緣部分（1 1 )以下，故必須要有充分的長度，例如：基板托架（5 )下端侧稍高於中央部。這些直線導軌（1 5 )的上端側，裝設著擂閥200307339 V. Description of the invention (4) It is known that it is installed on both sides of the base (3). Located at both ends of the front side edge portion (11) above the base (3), as shown in Fig. 3, each hinge support part (12) is provided. These hinge support parts (1 2) are respectively provided with hinges (1 0) that can be freely turned. In order to raise the substrate bracket (5) or swing it in the direction of returning to the horizontal state (direction of arrow A), the hinges (1 3) of the hinges (10) are installed in the horizontal direction on the front side ( γ direction). The hinge (1 ^ 6) (1〇) is provided with a moving block () 31〇 (: 10 (14). On the moving block (14), it is formed and installed on the substrate bracket (5) The friction guide groove (i β) is fitted on the linear guide (1 5) on the back. When the linear guide (1 5) 'is raised on the substrate bracket (5), the friction guide groove (1 6) is inserted. Internal friction movement pushes the substrate holder (5) to the front side. The hinge (10) 'uses the rotary shaft (13) as a fulcrum to swing the substrate holder (5). This also enables the substrate holder (5) The lower end is lowered from the edge portion (11) above the base (3) and is formed by a linear guide (15) and a hinge (^ "^ (丨㈧). The linear guides (1 5) are respectively installed on The two ends of the back surface of the substrate holder (5) are placed on the frictional movement grooves formed on the moving carriages (1 4) at both ends of the base (3). These linear guides (5) are placed on the substrate holder. (5) When raised, frictionally move within the frictional movement groove (丨 6) to push the substrate holder (5) toward the front side 'and to lower the lower edge of the substrate holder (5) to the base (3 ) Below the upper edge part (1 1), it must have a sufficient length, for example: the lower end side of the substrate bracket (5) is slightly higher than the central part. On the upper end side of these linear guides (1 5), a poppet valve is installed

200307339 五、發明說明（5) '- (stopper) (15a)。這些擋閥（st〇pper)(15a)，是為了在基板托架（5 )昇起時，不讓基板托架（5 )過度傾斜而超過事先預定的最大傾斜角度，而用以限制基板托架（5 )的傾斜角度。連接裝置（1 7 )，用以使基板托架（5 )在底座（3 )上維持水平狀態’或使之往昇起方向搖動而設的。連接裝置 (17) ’由連接頭（link) (18)與插口（jack) (19)構成。連接頭（link)(18)’由固定的長度形成。連接頭（Hnk)(i8)，女裝於設在底座（3 )下方延伸出來的延出端部（2 〇 )與基板托架（5 )下部的支撐零件（2 1 )之間。該連接頭（丨丨nk )(丨8 )，在面向延出端部（2 0 )與支撐零件（2 1 )的位置上，皆別各設有可回轉的支點（22)、（23)。插口（jack) (19)，尚包括伸縮桿（r〇d) (19a)。插口 (jack) (19)，裝設於連接頭（link )(18)上支撐零件（21)側與腳（2)的水平樑2a之間。插口（ jack) (19)，在面向連接頭 (1 i n k) (1 8 )的位置上，以支點（2 4 )為中心，連結伸縮桿 (rod) (1 9a)前端，並且可回轉。插口（ j ack ) (1 9 )的下端，則在面向水平樑2 a的位置上，以支點（2 5 )為中心，加以連結並可回轉。連接裝置（1 7 )，從正面侧觀察基板固定保持裝置，分別裝設於基板托架（5 )的兩端側。因此，當插口（ j a c k ) (1 9 )的伸縮桿（r 〇 d ) (1 9 a)—拉長，插口（ j a c k) (1 9 )的伸縮桿（r o d) (1 9 a )前端，會將連接頭（1 i n k ) (1 8 )的支撐零件（2 1 )側往上推。此時，插口200307339 V. Description of the invention (5) '-(stopper) (15a). These stop valves (15a) are used to limit the substrate holder when the substrate holder (5) is raised so as not to allow the substrate holder (5) to tilt excessively beyond the predetermined maximum tilt angle. The tilt angle of the frame (5). The connecting device (1 7) is provided to maintain the substrate holder (5) on the base (3) in a horizontal state 'or to swing it in a rising direction. The connecting device (17) 'is composed of a link (18) and a jack (19). The link (18) 'is formed with a fixed length. The connecting head (Hnk) (i8), the women's clothing is located between the extended end (20) extending under the base (3) and the supporting part (2 1) at the lower part of the substrate holder (5). The connecting heads (丨丨 nk) (丨 8) are respectively provided with pivotable supporting points (22), (23) at positions facing the extending end portion (2 0) and the supporting parts (2 1). . Jack (19), including telescopic rod (rod) (19a). A jack (19) is installed between the support part (21) side of the link (18) and the horizontal beam 2a of the foot (2). The jack (19) is connected to the front end of the telescopic rod (19a) around the fulcrum (2 4) at the position facing the connector (1 i n k) (1 8), and is rotatable. The lower end of the jack (Jack) (1 9) is connected at the position facing the horizontal beam 2a with the fulcrum (2 5) as the center, and can be rotated. The connection device (1 7) is viewed from the front side of the substrate fixing and holding device, and is installed on both end sides of the substrate holder (5). Therefore, when the telescopic rod (r 〇) (1 9 a) of the jack (19) is elongated, the front end of the telescopic rod (19a) of the jack (1 9) will be Push the support part (2 1) of the connector (1 ink) (1 8) upward. At this point, the socket

200307339 五、發明說明（6) (j a c k ) (1 9 )的另一端裝設於腳（2 )的水平樑2 a上，而且連接頭（link)(18)的長度也是固定的。連接頭< 藉由插口（ j a c k ) (1 9 )伸縮桿（r 〇 d ) (1 9 a )的拉長，而以支點 (22)為中心回轉。當連接頭（link) (18)以支點（22)為中心回轉時，支點（2 3 )將以連接頭（1 i nk ) (1 )為半徑，在橢圓弧上移動。此時，連接頭（1 i nk ) (1 8 )兩端部支點（2 2 )、（ 2 3 )的間隔、連接頭（link) (18)支點（22)與鉸鏈（hinge) (10)回轉轴 (1 3 )的間隔是固定的’而連接頭（1 i n k ) (1 8 )支點（2 3 )與鉸鏈（hinge) (10)回轉軸（13)的間隔是變動的。因此’支點（2 2 )、（ 2 3 )與鉸鏈（h i n g e ) (1 0 )，3點形成三角形，連接頭（1 ink) (18)以支點（22)為中心回轉的同時，支點（23)與鉸鏈（hinge) (10)之間的間隔越來越短。然而，隨著連接頭（1 ink) (18)回轉而使支點（23)與鉸鏈（h i n g e ) (1 0 )間隔越來越短的同時，基板托架（5 )於直線導軌（1 5 )上朝正面側摩擦移動，使基板托架（5 )下端側邊緣比底座3上方的邊緣部分（11)更往正面側推出。隨著插口（jack) (19)伸縮桿（rod) (19a)的伸長，連接頭（1 ink) (1 8)的回轉量也隨之增大。而且，基板托架（5靖起角度越大，則基板托架（5 )下端側邊緣，從底座上方邊二部分（1 1 )的推出量也就越大。 ί 如此一來，基板托架（5)昇起的角度越大，基板托架 (5 )下端側邊緣的推出量也就隨之增大。由此可知，基板才架（5 )下端側邊緣，較底座（3 )上方邊緣部分（丨丨）更為下乇200307339 V. Description of the invention (6) (j a c k) (19) The other end is installed on the horizontal beam 2a of the foot (2), and the length of the link (18) is also fixed. The connector < rotates around the fulcrum (22) through the extension of the socket (j a c k) (19) and the extension rod (r oc) (19 a). When the link (18) revolves around the fulcrum (22), the fulcrum (2 3) will move on the elliptical arc with the link (1 i nk) (1) as the radius. At this time, the distance between the fulcrum points (2 2) and (2 3) at both ends of the connector (1 ink) (1 8), the link (18), the fulcrum (22), and the hinge (10) The interval of the rotary axis (1 3) is fixed, and the interval of the connecting point (1 ink) (1 8) fulcrum (2 3) and the hinge (10) of the rotary axis (13) varies. Therefore, the fulcrum (2 2), (2 3) and the hinge (1 0), three points form a triangle, and the connector (1 ink) (18) rotates around the fulcrum (22), and the fulcrum (23 ) And the hinge (10) are getting shorter and shorter. However, as the connection head (1 ink) (18) rotates and the distance between the fulcrum (23) and the hinge (1 0) becomes shorter and shorter, the substrate bracket (5) is on the linear guide (1 5) The frictional movement from the upper side to the front side causes the lower edge of the substrate holder (5) to be pushed toward the front side more than the edge portion (11) above the base 3. With the extension of the jack (19) and the telescopic rod (19a), the amount of rotation of the connector (1 ink) (18) also increases. In addition, the larger the angle of the substrate bracket (5), the greater the amount of the lower edge of the substrate bracket (5), the greater the amount of the two parts (1 1) from the upper side of the base. Ί In this way, the substrate bracket (5) The larger the lifting angle, the larger the amount of pushing out the lower edge of the substrate holder (5). From this, it can be seen that the lower edge of the substrate frame (5) is higher than the upper edge of the base (3). Part (丨丨) is more 乇

第10頁 200307339 五、發明說明（7) ^ 降。基板托架（5 )下端側邊緣部分（1 1 )的下降距離，可藉由變更連接頭（link)(18)的長度、直線導執（15)的長度/伸縮桿（rod)(19a)的長度而任意設定。也就是，支點（22)、（23)與鉸鏈（hinge)(l〇)，3點步成三角形，依據伸縮桿（r 〇 d )(1 9 a )的伸縮長度，通過支點 (22)、（23)的邊、以及通過支點（23)與鉸鏈（hinge)(1〇)的邊所形成的角度，如果越小，則基板托架（5 )昇起的角度就越大。另外，連接頭（link) (18)支點（2 2)與鉸鏈 (h i nge ) (1 0 )回轉軸（1 3 )的間隔若比連接頭（1丨nk ) (J 8 )的長度短，則基板托架（5 )昇起的角度（傾斜角）就會隨之增大。因此，可藉由調整伸縮桿（r 〇 d)(1 9 a)的伸縮長度，變化通過支點（2 2 )、（ 2 3 )的邊、以及通過支點（2 3 )與鉸鏈 (h i nge ) (1 0 )的邊所形成的角度，於是，基板托架（5 )的昇起角度與基板托架（5 )下端邊緣部分（1 1 )的下降距離，即可以此方式任意設定。再者’基板托架（5)’是措由绞鍵（hinge)支冑乘:件 (1 2 )、鉸鏈（h i nge ) (1 0 )與移動滑車（1 4 )構成的部分、以及支撐零件（2 1 )，以水平狀態載置於底座（3 )上。錢_ (hinge)支撐零件（12)，與鉸鏈（hinge)(l〇)與移動滑車 (1 4 )的高度、及支撐零件（2 1 )的高度是一致的。基板托架（5 )的上方，設有目視（m a c r 〇 )照明裝置 (3 0 )。本目視（m a c r 〇 )照明裝置（3 0 )，是由放射觀察照明光Page 10 200307339 V. Description of Invention (7) The lowering distance of the lower edge portion (1 1) of the substrate bracket (5) can be changed by changing the length of the link (18), the length of the linear guide (15) / the rod (19a). Arbitrarily set the length. That is, the fulcrum points (22), (23) and the hinge (10) form a triangle at 3 points, and according to the telescopic length of the telescopic rod (r 〇d) (19a), the fulcrum (22), The smaller the angle formed by the side of (23) and the side passing through the fulcrum (23) and the hinge (10), the larger the angle at which the substrate bracket (5) rises. In addition, if the distance between the link (18) fulcrum (2 2) and the hinge (hi nge) (1 0) rotary axis (1 3) is shorter than the length of the link (1 丨 nk) (J 8), Then, the angle (inclination angle) at which the substrate holder (5) is raised will increase accordingly. Therefore, by adjusting the extension length of the telescopic rod (rod) (19a), the sides passing through the fulcrum (2 2), (2 3), and the fulcrum (2 3) and the hinge (hi nge) can be changed. The angle formed by the sides of (1 0), so the raising angle of the substrate holder (5) and the lowering distance of the lower edge portion (1 1) of the substrate holder (5) can be arbitrarily set in this way. In addition, the 'substrate bracket (5)' is a part composed of hinges: a piece (1 2), a hinge (1 0), and a moving block (1 4), and a support The parts (2 1) are placed on the base (3) in a horizontal state. The (hinge) support part (12) is consistent with the height of the hinge (10) and the moving block (1 4), and the height of the support part (2 1). Above the substrate holder (5), a visual (m a c r 〇) lighting device (30) is provided. The visual (m a c r 〇) lighting device (30) is used to observe the illumination light by radiation

第11頁 200307339 五、發明說明（8) 線的目視（macro)光源（31 )、將目視觀察（macro)光源（31) 放射出來的光線加以反射的反射鏡（3 2 )、將反射鏡（3 2 )上反射的目視（macro)照明光線加以聚集的菲涅耳透鏡 (Fresnel lens) (33)所構成。目視（macro)光源（31)的裝設能使目視觀察照明光線呈水平方向（X方向）放射出來。反射鏡（32)的裝設，相對於水平方向，約傾斜50度，在照明光軸昇起的大型玻璃基板側折曲。顯微（micro)檢查裝置（40)，由裝設於底座（3)上可往X 方向移動的門型臂（a r m) ( 4 1 )，以及沿著該門型臂 (arm) (41)的水平臂（arm)裝設可往Y方向移動的顯微鏡（42) 所構成。控制裝置（43)，主要是控制插口（jack) (19)的伸縮動作、及目視觀察光源（3 1 )的點燈控制。另外，控制裝置 (4 3 )，又控制顯微鏡鏡臺（4 2 ) X Y方向的移動，使顯微鏡 U 2 )的觀察視野移動到可捕捉大型玻璃基板（4 )上之瑕疵部分的位置。大型玻璃基板（4 )上的瑕疵部分，以目視檢查為特定方式，同時也記憶其座標資料。其次，誠文上文所述，構成的裝置動作是實施目視檢查與顯微檢查時，茲說明如下。檢查開始前，先將插口（jack) (19)縮短，並使載置大型玻璃基板（4 )的基板托架（5 )呈水平狀態。實施目視檢查時，插口（jack) (19)伸縮桿（rod) (19a) 的伸縮是由控制裝置（4 3 )所控制的，連接頭（1 8 )則是以支點（22)為中心進行回轉。藉由插口（jack) (19)伸縮桿（rod)Page 11 2003307339 V. Description of the invention (8) A line of macro light source (31), a reflecting mirror (3 2) reflecting the light emitted by the macro viewing light source (31), a reflecting mirror (3) 3 2) A Fresnel lens (33) composed of macro-illuminating light reflected from the upper side. The installation of the macro light source (31) enables the visual observation of the illumination light to be emitted in the horizontal direction (X direction). The reflector (32) is installed at an angle of about 50 degrees relative to the horizontal direction, and bends on the side of the large glass substrate where the illumination optical axis rises. A micro inspection device (40), comprising a portal arm (4 1) mounted on the base (3) and movable in the X direction, and a portal arm (41) along the portal arm The horizontal arm is equipped with a microscope (42) that can be moved in the Y direction. The control device (43) mainly controls the telescopic action of the jack (19) and the lighting control of the visual observation light source (3 1). In addition, the control device (4 3) controls the movement of the microscope stage (4 2) in the X and Y direction, so that the observation field of the microscope U 2) is moved to a position where the defective portion on the large glass substrate (4) can be captured. Defective parts on the large glass substrate (4) are visually inspected as a specific method, and their coordinate data are also memorized. Secondly, as described above, when the operation of the device is performed by visual inspection and microscopic inspection, it will be described below. Before starting the inspection, shorten the jack (19) and make the substrate holder (5) on which the large glass substrate (4) is placed level. When performing a visual inspection, the expansion of the jack (19), the telescopic rod (19a) is controlled by the control device (4 3), and the connector (1 8) is centered on the fulcrum (22). turn around. With jack (19) telescopic rod

第12頁 200307339 五、發明說明（9) (19a)的伸縮、與連接頭（18)的回轉，基板托架（5)開始昇起。此時，基板托架（5 )下方各直線導軌（1 5 )，開始在各摩擦移動用溝槽（1 6 )内展開摩擦移動。如此一來，基板托架 (5 ) ’如圖四所示，比底座（3 )邊緣部分（丨丨）更往前方側推出’同時又以鉸鏈（h i n g e ) (1 0 )為搖動中心使之昇起。再者’隨著插口（jack) (19)伸縮桿（r〇d) (19a)的伸長’基板托架（5 )也隨之昇起，於是，基板托架（5 )下端邊緣更降至低於底座（3 )上方邊緣部分（1 1 )的位置。進行目視檢查時，由觀察者自行調整插口（ jack)(丨9) 伸縮桿（rod) (19a)的伸縮狀況。如此可將基板托架乂5)任意調整至易於進行目視觀察的角度。藉此方式昇起的基板托架（5 )下端側邊緣，由於較底座 (3 )上方邊緣部分（丨丨）低下，所以，即使基板托架（5 )裝設於架台1之上，大型玻璃基板（4 )的全面就在觀察者附近。尤其是大型玻璃基板（4)上端部分的高度較以往低，大型玻璃基板（4 )上端部分與觀察者的距離縮短。在此狀態之下，當目視觀察光源（3丨）放射出觀察照明光線時’觀察照明光線會在反射鏡（3 2 )上反射，並由菲涅耳透鏡（Fresnel lens) (33)加以聚光後，照射於基板托架 (5 )上的大型玻璃基板（4 )上。觀察者，在大型玻璃基板（4 )上，以目視觀察反射的，線，進行目視檢查。此時，大型玻璃基板（4)上端部分的高度較以往低，所以，觀察者並未抬頭看大型玻璃基板（4)Page 12 200307339 5. Description of the invention (9) (19a) The expansion and contraction of the connector (18) and the rotation of the connector (18), the substrate bracket (5) starts to rise. At this time, the linear guides (1 5) below the substrate holder (5) begin to spread and move in the respective frictional movement grooves (1 6). In this way, as shown in Figure 4, the substrate bracket (5) is pushed forward more than the edge portion (丨丨) of the base (3), and the hinge (1 0) is used as the center of the swing. Rise. Furthermore, with the extension of the jack (19), the telescopic rod (rod) (19a), the substrate holder (5) also rises, so the lower edge of the substrate holder (5) is further lowered. Position lower than the upper edge part (1 1) of the base (3). When performing a visual inspection, the observer should adjust the telescopic condition of the jack (19) telescopic rod (19a). In this way, the substrate holder 乂 5) can be arbitrarily adjusted to an angle for easy visual observation. The lower edge of the substrate bracket (5) raised in this way is lower than the upper edge portion (丨丨) of the base (3), so even if the substrate bracket (5) is installed on the stand 1, large glass The full surface of the substrate (4) is near the observer. In particular, the height of the upper end portion of the large glass substrate (4) is lower than in the past, and the distance between the upper end portion of the large glass substrate (4) and the observer is shortened. In this state, when the visual observation light source (3 丨) emits the observation illumination light, the 'observation illumination light will be reflected on the reflector (3 2) and concentrated by the Fresnel lens (33). After the light, it is irradiated on the large glass substrate (4) on the substrate holder (5). The observer visually observes the reflected lines on the large glass substrate (4), and performs a visual inspection. At this time, the height of the upper end portion of the large glass substrate (4) was lower than before, so the observer did not look up at the large glass substrate (4).

第13頁 200307339Page 13 200307339

第14頁 200307339 五、發明說明（11) '~~一控制裝置（4 3 )’依據目視檢查時輸入的瑕疵部分座標資料’控制顯微鏡鏡堂（4 1 )朝X Y方向移動，並將顯微鏡（4 2 ) 的觀察視野移動至特定大型玻璃基板（4)上瑕疵部分的位置由顯微鏡（42)放大的瑕疵部分影像，例如：若是利用 CCD攝影機拍攝的’則顯示於電視螢幕上。觀察者可觀察顯示在電視螢幕上瑕窥部分的放大影像。再者，控制裝置（43)，可使顯微鏡（42)往χγ方向移動，全面掃目苗大型玻璃基板（4 )上顯微鏡（4 2 )的觀察視野。進行顯微檢查時，基板托架（5 )是藉由鉸鍊支撐零件 (1 2 )、鉸鍊（1 0 )與移動滑車（1 4 )構成的部分、及支撐零件 (2 1 )’而載置於底座（3 )上，所以，不受外部震動的影響，基板托架（5 )的穩定性很高。 3 基板固定保持裝置，不僅限於使用在目視檢查時、及顯微檢查時，同時亦可使用於將大型玻璃基板（4 )載置於基板托架（5 )之上時、以及從基板托架（5 )上方取下時的的搬運裝置上。例如：將大塑玻璃基板（4 )载置於基板托架（5 )之上時，若由控制裝置（4 3 )控制插口（ j ack) (1 9 )伸縮桿 (r 〇 d) (1 9 a )的伸縮時，如圖四所示，基板托架（5 )將會昇起’而基板托架（5 )下端側的邊緣將下降至低於底座（3 )上方的邊緣部分。如此一來，當基板托架（5 )昇起時，大型玻璃基板（4 ) 將以朝略微垂直的方向（Z方向）立起的狀態，如圖二所Page 14200307339 V. Description of the invention (11) '~~ a control device (4 3)' According to the coordinate data of the defective part input during the visual inspection ', the microscope mirror hall (4 1) is moved in the XY direction, and the microscope ( The observation field of 4 2) is moved to the position of the defective part on the specific large glass substrate (4), and the defective part image enlarged by the microscope (42), for example, if it is shot with a CCD camera, it is displayed on the TV screen. The observer can observe an enlarged image of the peeping portion displayed on the TV screen. In addition, the control device (43) can move the microscope (42) in the χγ direction to scan the observation field of the microscope (4 2) on the large glass substrate (4). During the microscopic inspection, the substrate holder (5) is mounted by a hinge support part (1 2), a part composed of the hinge (1 0) and a moving pulley (1 4), and a support part (2 1) '. It is on the base (3), so it is not affected by external vibration, and the substrate bracket (5) has high stability. 3 The substrate fixing and holding device is not only used for visual inspection and microscopic inspection, but also for placing large glass substrates (4) on substrate holders (5), and from substrate holders. (5) On the conveying device when the upper part is removed. For example: when the large plastic glass substrate (4) is placed on the substrate bracket (5), if the control device (4 3) controls the jack (j ack) (1 9) telescopic rod (r 〇d) (1 9 a) When the telescope is retracted, as shown in FIG. 4, the substrate bracket (5) will be raised ', and the edge of the lower end side of the substrate bracket (5) will be lowered to the edge portion above the base (3). In this way, when the substrate holder (5) is raised, the large glass substrate (4) will stand in a slightly vertical direction (Z direction), as shown in Figure 2

第15頁 200307339 五、發明說明（12) 示，載置於各個附有滾輪的基準栓銷（8 )之上。而且，大型玻璃基板（4 )會藉由按壓栓銷（9 )，朝向各基準检銷（7 )壓人而裝設於基準位置上。其次，大型玻璃基板（4)，是藉由圖示中未出現之裝設於基板托架（5 )的吸附孔所吸引，而吸附固定於基板托^ & (5)表面上。之後’當插口（:^(：1〇(19)伸縮桿（1«〇(1)(1=)縮短時，基板托架（5 )將會恢復原來的水平狀態。 ''' 另一方面’從基板托架（5 )上取下大型玻螭基板（4 ) 時’與上述裝置程序相反，在基板托架（5)昇起的狀態時，解除對木玻璃基板（4)的吸附。並且在大型玻璃基板74)朝略微垂直的方向立起後，從基板托架（5 )之上取下。在大型玻璃基板（4)載置於基板托架（5)、或自基板托架（5 )上取下時’基板托架（5 )下端邊緣，將會較底座（3 )上方邊緣部分（1 1)降得更底。當大型玻璃基板（4 )載置於基板托架（5 )之上時’大型玻璃基板（4 )無需昇至較高的位置，即可容易地將大型玻璃基板（4 )載置於基板托架（5 )之上、或從基板托架（5 )之上拆下來。另外，若在大型玻璃基板（4)立起的狀態下載置於基板托架（5 )時’大型玻璃基板（4 )會藉由自身的重量而使下邊緣載置於附有滾輪的基準栓銷（8 )上固定其位置。如此一來，基板托架（5)上即可省略安裝與附滾輪栓銷（8)相對應的按壓栓銷，而且大型玻璃基板（4)與基板托架（5)之間的面接觸抵抗也會減小，按壓栓銷（9)的按壓力也可減小。若依上述第1實施形態，將基板托架（5 )昇起時，基板Page 15 200307339 5. The description of the invention (12) shows that it is placed on each reference pin (8) with a roller. In addition, the large glass substrate (4) is installed at the reference position by pressing the pin (9) toward the reference inspection pins (7). Secondly, the large-sized glass substrate (4) is attracted by the suction holes installed in the substrate holder (5), which are not shown in the figure, and are fixed on the surface of the substrate holder (5). After 'when the socket (: ^ (: 1〇 (19) telescopic rod (1 «〇 (1) (1 =) is shortened, the substrate bracket (5) will return to its original horizontal state.' '' 'When removing the large glass substrate (4) from the substrate holder (5)' Contrary to the above-mentioned device procedure, when the substrate holder (5) is raised, the wooden glass substrate (4) is desorbed. And after the large glass substrate 74) stands up in a slightly vertical direction, it is removed from the substrate holder (5). The large glass substrate (4) is placed on the substrate holder (5) or from the substrate holder (5) When removed from above, the lower edge of the substrate holder (5) will be lower than the upper edge portion (1 1) of the base (3). When a large glass substrate (4) is placed on the substrate holder ( 5) When the large glass substrate (4) is not raised to a high position, the large glass substrate (4) can be easily placed on or from the substrate holder (5) In addition, if the large-sized glass substrate (4) is placed on the substrate holder (5) while being erected, the 'large-sized glass substrate (4) will be weighed by its own weight. Place the lower edge on the reference pin (8) with a roller to fix its position. In this way, the mounting of the pressing pin corresponding to the roller pin (8) on the substrate bracket (5) can be omitted. In addition, the surface contact resistance between the large glass substrate (4) and the substrate holder (5) will also be reduced, and the pressing force for pressing the pin (9) can also be reduced. According to the first embodiment described above, the substrate When the bracket (5) is raised, the substrate

200307339 五、發明說明（13) 托架（5 )下端側邊緣將會較架台1的底座（3 )邊緣部分（1 1 )更往前方推出，同時也比架台（1 )的底座（3 )邊緣部分77 (丨1 )更為降低，所以，雖然基板托架（5 )是裝設在架台（7 )上，伸是大型玻璃基板（4)的全面皆可顯示於觀察者附近，特別一曰 1 2 5 0 X 1 1 〇 Omm大型玻璃基板（4 )上端部分的高度，可軟以疋往更為降低，則大型玻璃面4上端部分與觀察者乂以可縮短。、】距離也因此’觀察者並未抬頭看大型玻璃基板（4 )上端八，而且可在大型玻璃基板（4)的全面上，藉由捕捉損:二等瑕疵部分的反射光線，確實地找出存在於大破^ (4)上的瑕疵部分。主瑕瑪基板再者，大型玻璃基板（4 )昇起時，其上部分會較以低，所以，目視觀察照明裝置（3〇)的設置位置也會 … 低，基板檢查裝置全體的設置底座也會縮小。牛進行目視cro)檢查時，將基板托架（5)任意調貫，目視觀察的昇起角度，各插口（jack)(19)則反覆二^ ^縮動作使基板托架（5)搖動，觀察者即可減少視線的夕一—人數，而能藉由捕捉損傷、斑點等瑕疵部分反射出來、以門確實找出其瑕疲部分。此時，基板托架⑴搖動的角圍，、由於可任意設定於控制裝置（43)中，所以，不扣傷或斑點，缺角、髒污、灰塵等各種不同的瑕疵分皆可確實找出。進仃顯微（micro)檢查時，為使基板托架（5)呈水平狀恶，而由鉸鏈（hinge)支撐零件（12)、鉸鏈（hinge)(1〇)與200307339 V. Description of the invention (13) The lower side edge of the bracket (5) will be pushed forward more than the edge portion (1 1) of the base (3) of the stand 1 and at the same time than the base (3) of the stand (1) The edge portion 77 (丨 1) is further reduced, so although the substrate bracket (5) is mounted on the stand (7), the entire extension of the large glass substrate (4) can be displayed near the observer, especially The height of the upper end portion of the large glass substrate (4), which is 1 250 x 1 100 mm, can be softened and lowered, so that the upper end portion of the large glass surface 4 and the observer can be shortened. "] The distance is therefore 'the observer did not look up at the upper end of the large glass substrate (4), and can capture the damage: the reflected light of the second-class defective part, to find exactly Defects that exist in Dabao ^ (4). Main sema substrate Also, when the large glass substrate (4) is lifted, the upper part will be lower, so the installation position of the lighting device (30) visually will also be ... low, the base of the entire substrate inspection device is installed It will also shrink. When the cow performs visual cro) inspection, the substrate bracket (5) is arbitrarily adjusted, and the rising angle of the visual observation is observed, and the jacks (19) are repeatedly repeated to make the substrate bracket (5) shake, The observer can reduce the number of people in the line of sight, and can catch the flawed parts such as damage and spots to reflect them, and find out the flawed part with the door. At this time, the angle range of the substrate holder ⑴ can be arbitrarily set in the control device (43). Therefore, various defects such as missing corners, dirt, and dust can be reliably found without buckles or spots. Out. During the micro inspection, in order to make the substrate bracket (5) horizontally evil, the hinge (hinge) supports the part (12), the hinge (1〇) and

第17頁 200307339 五、發明說明（14) 移動滑車(14)所構成的部分、以及支撐零件而於底座（3 )之上。所以，某板乾牟f R w，戟置获—卜士 π古。m仏基板托木（5)不受外部震動影響的心疋„ 门可藉由不搖晃的顯微鏡（4 2 )放大影 μ .觀察大型玻璃基板（4 )上的瑕疵部分。Page 17 200307339 V. Description of the invention (14) The part formed by the moving pulley (14) and the supporting parts are on the base (3). Therefore, a certain board fou f R w, Ji Zhi Zhi won-Pu Shi π ancient. m 仏 The substrate support (5) is not affected by external vibrations. The door can be magnified by a microscope (4 2) without shaking. Observe the defective part on the large glass substrate (4).

再者，本裝置，在基板托架（5)昇起後，下端側降至低於架台〇)底座（3)邊緣部分（11)的位置，且可使用於將大型玻璃基板（4)載置於基板托架（5)之上時，以及自基板托架上取下時的搬運裝置。此時，沒有必要將大型玻璃基板（4)昇至南位置，即可輕易地將大型玻璃基板（4)載置於基板托架（5 )、或從基板托架（5 )之上取下來。而且，由於疋一邊將基板托架（5 )比底座（3 )邊緣部分 (11)更往前推，一邊昇起基板托架（5)的，所以，並不會遮住目視觀察照明光線。搖動裝置，是由搖動支點鉸鏈（hinge)(1〇)、推出裝置的直線.導軌（15)、連接裝置（17)等所構成，所以，·價格較便宜。Furthermore, after the substrate bracket (5) is raised, the lower side of the device is lowered to a position lower than the pedestal (3) edge portion (11) of the base (3), and can be used to carry a large glass substrate (4) Carrying device when placed on the substrate holder (5) and when removed from the substrate holder. At this time, it is not necessary to raise the large glass substrate (4) to the south position, and the large glass substrate (4) can be easily placed on or removed from the substrate holder (5). . Furthermore, since the substrate holder (5) is pushed forward more than the edge portion (11) of the base (3), the substrate holder (5) is raised, so it does not block the visual observation of the illumination light. The rocking device is composed of a rocking hinge (10), a straight line for pushing out the device, a guide rail (15), and a connecting device (17). Therefore, the price is cheaper.

其次’關於本發明第2實施形態，則參照圖示進行說明。在本裝置中，鉸鏈（hinge) (10)、鉸鏈支撐零件（12)、移動滑車（1 4 )、直線導軌（1 5 )、連接頭（1 8 )、插口 (j a c k) (1 9 )、延出端部（2 0 )及支撐零件（2 1 )，誠如上述第1 實施形態的說明，從正面側來看，在γ方向的兩端側各裝設有1組。本實施形態中，各鉸鏈（hi nge) (1 〇 )、（ 1 〇,）、各鉸鏈 (hinge)支撐零件（12)、（12，）、各移動滑車（14)、（14，）、Next, the second embodiment of the present invention will be described with reference to the drawings. In this device, a hinge (10), a hinge supporting part (12), a moving block (1 4), a linear guide (1 5), a connector (1 8), a jack (1 9), As shown in the first embodiment described above, the extended end portion (20) and the supporting member (21) are provided with one set on each of the both ends in the γ direction as viewed from the front side. In this embodiment, each hinge (100), (10,), each hinge support part (12), (12,), each moving block (14), (14,),

第18頁 200307339 五、發明說明（15) 附有各直線導軌（1 5 )、（ 1 5 ’）、各連接頭（1 8 )、（丨8，）、各 (jack)(19)、（19，）及各支撐零件（21)、（21，），皆二 #口符號。 σ 向 5播動的本裝置中，如圖六所示，相對於基板托架（5 )昇起的搖動軸方向’在垂直軸方向上設置有使基板接架另一方向搖動裝置50。此之另一方向搖動裝置5 0上，相對於基板托架（5 )曰方向的搖動軸方向，在垂直軸方向上設置有使之回轉（1^起頭Β方向）的鉸鏈組件（回轉支撐零件）（5丨）。該鉸鏈組則 (5 1 )，則是由鉸鏈維持臂（5 2 )、與分別裝設於鉸鏈維持I# (52)兩端的鉸鏈支撐片（52)a、（52b)、以及裝設於較鍵維持臂（5 2 )底面略微中央部的回轉軸（5 3 )所構成。 ' 各较鍵支撐片（52a)、（52b )上’分別設有可回轉的參鏈（1 3 )、（ 1 3 ’）。回轉軸（5 3 )，設置於底座（3 )正面側略^ 央部的回轉用孔54内，並且能夠回轉。控制裝置（4 3 )，控制各插口（ 1 9 )、（ 1 9，）的伸縮量，夂伸縮量彼此相異。例如：一邊的插口（ 1 9 )、（ 1 9，）並未伸^ 時，另一邊的插口（ 1 9 )、（ 1 9，）就會伸縮。另外，當一邊$ 插口（ 1 9 )、或（1 9 ’）伸長時，則另一邊的插口（ 1 9 )、或、 (1 9 ’）則縮短。再者，則能使插口（ 1 9 )、（丨9，）的伸縮動作，同時展開伸縮。在這樣的結構之下進行目視檢查時，由觀察者調整各插口（jack) (19)、（19,）的各伸縮桿（19a)、（19a，）的伸長。如此一來，基板托架（5 )即可任意調整成易於進行目視Page 18 200307339 V. Description of the invention (15) Attached to each linear guide (1 5), (1 5 '), each connector (1 8), (丨 8,), each (jack) (19), ( 19,) and each supporting part (21), (21,) are two #port symbols. As shown in Fig. 6, in this apparatus which is broadcasted in σ direction 5, a swinging axis direction 50 is provided in the vertical axis direction with respect to the swinging axis direction 'in which the substrate holder (5) is raised. On the other side of the rocking device 50, a hinge assembly (a slewing support part) is provided in the vertical axis direction with respect to the swing axis direction of the substrate bracket (5) in the vertical axis direction. ) (5 丨). The hinge group (5 1) is composed of a hinge maintaining arm (5 2), and hinge support pieces (52) a, (52b) installed at both ends of the hinge maintaining I # (52), and It is constituted by a rotary shaft (5 3) slightly at the center of the bottom surface of the key holding arm (5 2). 'On each of the key supporting pieces (52a) and (52b), a rotatable chain (1 3) and (1 3') are provided, respectively. The rotation shaft (5 3) is provided in the rotation hole 54 at the center of the front side of the base (3), and is capable of rotation. The control device (4 3) controls the expansion and contraction amount of each of the sockets (1 9) and (19,), and the expansion and contraction amounts are different from each other. For example: When the sockets (1 9) and (19,) on one side are not extended, the sockets (1 9), (1, 9) on the other side will expand and contract. In addition, when the socket on one side (1 9) or (1 9 ′) is extended, the socket on the other side (1 9), or, (1 9 ′) is shortened. Furthermore, the expansion and contraction of the sockets (1 9) and (丨 9,) can be performed at the same time. When performing a visual inspection under such a structure, the observer adjusts the extension of each of the telescopic rods (19a), (19a,) of the jacks (19), (19,). In this way, the substrate holder (5) can be arbitrarily adjusted to facilitate visual inspection.

第19頁Page 19

200307339 五、發明說明（16) 一'〜-- 觀祭的昇起角度。在此狀態下，使各插口（ jack)(i9)、（19,）的各伸縮桿 (19a)、（19a’）同時反覆實施伸縮動作，藉由如此反覆的^ 縮動作，基板托架（5 )即可依一定周期往箭頭a方向連續搖動。、另外，例如：不使一邊的插口（ j ack) (i 9 )、或（i g，）伸备百’則能使另一邊的插口（ j a c k ) ( 1 9 )、或（1 9，）伸縮。再者，一邊的插口（jack) (19)、或（19,）伸長，則另一邊的插口（ jack) (1 9 )、或（1 9’）就會伸縮。又，能使各插口（ jack) (1 9 )、（ 1 9 ’）連續反覆實施伸縮動作。類似這樣地藉由變化各插口（jack) (19)、（19，）的伸縮動作，基板托架（5 )，如圖六所示之鉸鏈組件（5 1 )以回轉轴 (5 3 )為中心，往箭頭b方向回轉。如此一來，基板托架 (5 )，從正面側來看，是往左右方向（以下稱為搖頭方向）據動。圖七，為一邊插口（ jack) (19)、或（19,）未伸縮，而另 —邊插口（ j a c k ) (1 9 )、或（1 9 ’）伸縮的圖示。此時，基板托架（5 )，從正面側來看，是呈現往左側搖頭的狀態。此之搖頭方向的搖動範圍，可由控制裝置（4 3 )預先設定，也可藉由觀察者的操作而任意設定。依上述第2實施形態，使基板托架（5 )往搖頭方向搖動，任意設定搖頭方向角度，或者可藉由連續的搖動，增加目視觀察檢查的變化。藉此方法，使得基板托架（5 )往昇起方向（箭頭A方向）搖動而無法檢出大型玻璃基板（4 )上200307339 V. Description of the invention (16) I '~-The rising angle of the observing sacrifice. In this state, the telescopic levers (19a) and (19a ') of the jacks (i9) and (19,) are repeatedly implemented to perform the telescopic action at the same time, and the substrate bracket ( 5) You can continuously shake in the direction of arrow a according to a certain period. In addition, for example, if the jack on one side (j ack) (i 9), or (ig,) is extended to 100, the jack on the other side (jack) (1 9), or (1 9,) . Furthermore, when the jack (19) or (19,) on one side is extended, the jack (1 9) or (1 9 ') on the other side will expand and contract. In addition, each jack (1 9), (1 9 ′) can be repeatedly extended and retracted. Similarly, by changing the telescoping action of the jacks (19), (19,), the base plate bracket (5), the hinge assembly (5 1) shown in Fig. 6 uses the rotation axis (5 3) as Center, turn in the direction of arrow b. In this way, the substrate holder (5) is moved in the left-right direction (hereinafter referred to as the head-swinging direction) when viewed from the front side. Figure 7 is an illustration of one side jack (19), or (19,) not extended, and the other side jack (j a ck) (1 9), or (1 9 ') telescopic. At this time, when viewed from the front side, the substrate holder (5) is in a state of shaking its head to the left. The shaking range in the direction of shaking the head can be set in advance by the control device (43), or can be set arbitrarily by the operation of the observer. According to the second embodiment described above, the substrate holder (5) is shaken in the direction of shaking the head, and the angle of the shaking direction is arbitrarily set, or the change in the visual inspection can be increased by continuous shaking. In this way, the substrate holder (5) is shaken in the rising direction (arrow A direction) and the large glass substrate (4) cannot be detected.

200307339 五、發明說明（17) 的損，、斑點等瑕疵部分’可以藉由反射光檢查出來，並且確貫找出這些瑕疲部分的特定位置。卞此外，亦可使朝基板粍架（5 )昇起方向的搖動、與搖頭向的搖動同時進行.，將基板托架（5 )設定為所有角度方 " 使之連績朝所有角度方向搖動，並同時進行目視觀察檢查。者"再者’本發明並不只限於上述第1與第2實施形態，在 =苑階段中，在不脫離其主要目的的範圍之内，皆可加以 σ種不同的變化。推例如·在使基板托架（5)昇起時，首先將基板托架往前出’使之位於比底座（3 )邊緣部分（1 1 )更前方的位置。然 ^ ’以鼓鏈（1〇)的回轉軸（13)為中心，可使基板托架（5)回下降至較底座（3 )邊緣部分（1 1 )更低處的位置。声护特別是在基板托架（5 )從水平狀態昇起至規定的傾斜角浐't可使基板托架（5 )開始搖動，使基板托架（5 )下側邊 2 ϋ =至底座（3 )邊緣部分（1 1)以下。由此可知’可藉由對姑4衣置的結構加以各種不同的變化，使基板托架（5 )進行银動動作。藉各連接頭（18)、（ 18,），例如：可以取代插口（ jack)。哕取代插口（ j· a c k )，在基板托架（5 )昇起的狀態之下，當 ‘ f 口（ j ack )伸縮時，就會使基板托架（5 )以上下方向移域j如此一來，可使大型玻璃基板上欲實施目視觀察的區 3 ’配置於觀察者易於實施目視觀察檢查的高度位置上。搖動裝置’由搖動支點鉸鏈（1 0 )，推出裝置的直線導200307339 V. Description of the invention (17) Defects, spots, and other flaws ’can be detected by reflected light, and the specific locations of these flaws can be accurately found.卞 In addition, you can make the shaking in the direction of raising the substrate holder (5) and the shaking of the head at the same time. Set the substrate holder (5) to all angles " so that the consecutive results in all angles Shake and perform visual inspection at the same time. In addition, the present invention is not limited to the above-mentioned first and second embodiments. In the stage, it is possible to add σ different changes without departing from its main purpose. For example, when raising the substrate holder (5), first advance the substrate holder 'so that it is positioned more forward than the edge portion (1 1) of the base (3). However, the center of the rotation axis (13) of the drum chain (10) can be used to lower the substrate bracket (5) to a position lower than the edge portion (1 1) of the base (3). Sound protection, especially when the substrate holder (5) is raised from a horizontal state to a predetermined inclination angle 浐 't can make the substrate holder (5) start to shake, so that the lower side of the substrate holder (5) 2 ϋ = to the base (3) The edge part (1 1) or less. From this, it can be known that the substrate holder (5) can be moved in silver by variously changing the structure of the clothes. By using the connectors (18), (18,), for example, it can replace the jack.哕 Instead of the socket (j · ack), in the state where the substrate bracket (5) is raised, when the 'f port (jack) is expanded and contracted, the substrate bracket (5) is moved in the upper and lower direction j such that As a result, the area 3 ′ to be visually observed on the large glass substrate can be arranged at a height position where an observer can easily perform visual inspection and inspection. The rocking device ’is guided by a rocking fulcrum hinge (1 0) to push out the device ’s linear guide

200307339 五、發明說明（18) 軌（⑸、連接裝置（17)等所構成 + 裝置。例如··基板托架（5 )的搖亦可使用於其他任何可以同時具備搖動與滑動、，動支點各鉸鏈（1 0 )、（丨〇，）托架（5 )呈圓弧狀移動的命犯另外，亦可使用於使基板艰勒裝置。 :產業上的利用可能性】本發明，為適用於大檢查裝置，不僅限於由、抑等FpD製造工程的基板裝置，也可以是只有目、a硯檢查與顯微檢查構成的複合式適用於大型玻璃基才Li檢查的單一功能裝置。更且，可200307339 V. Description of the invention (18) + device consisting of rail (⑸, connecting device (17), etc.) For example, the rocking of the substrate bracket (5) can also be used for any other device that can have both rocking and sliding. Each of the hinges (10), (丨〇,) the bracket (5) moves in the shape of an arc. In addition, it can also be used to make the substrate difficult .: Industrial Applicability] The present invention is applicable. The large inspection device is not limited to the substrate device manufactured by FpD manufacturing process, but can also be a single-function device that is suitable for large-scale glass-based Li inspection only by a combination of visual inspection, micro inspection, and micro inspection. ,can

第22頁檢查裝4，也可使用^膜厚測量與模型^等各種基板、用y大型玻璃基板的固定維於大型玻璃基板、或取γ 寺’或載置 200307339 圖式簡單說明【圖式之簡要說明】圖一係本發明基板保持裝置的第一實施例構成圖。圖二係本發明基板保持裝置的第一實施例的基板托架的正面構成圖。圖三係本發明基板保持裝置的第一實施例的鉸鍊部份擴大圖。圖四係本發明基板保持裝置的第一實施例基板托架的上升動作表示圖。圖五係本發明基板保持裝置的第二實施例構成圖。圖六係本發明基板保持裝置的第二實施例方向搖動機構的構成圖。圖七係本發明基板保持裝置的第二實施例基板托架的搖頭方向的搖動表不圖。【符號之說明】 1..................... % ^ 2 .....................m 2a....................水平樑 3 .....................^ Μ 4 .....................玻璃基板 5 .....................基板托架 6 .....................開口部 7 ......................基準栓銷 8 ......................基準栓銷Inspection equipment 4 on page 22, you can also use various substrates such as ^ film thickness measurement and model ^, fixed to large glass substrates with y large glass substrates, or take γ temple 'or mount 200307339 Brief Description] FIG. 1 is a structural diagram of a first embodiment of a substrate holding device of the present invention. Fig. 2 is a front structural view of a substrate holder of the first embodiment of the substrate holding device of the present invention. FIG. 3 is an enlarged view of a hinge portion of the first embodiment of the substrate holding device of the present invention. Fig. 4 is a diagram showing the raising operation of the substrate holder of the first embodiment of the substrate holding device of the present invention. FIG. 5 is a structural diagram of a second embodiment of the substrate holding device of the present invention. Fig. 6 is a structural diagram of a directional shaking mechanism according to a second embodiment of the substrate holding device of the present invention. Fig. 7 is a diagram showing the shaking of the substrate holder in the shaking direction of the substrate holder according to the second embodiment of the substrate holding device of the present invention. [Explanation of Symbols] 1 .............% ^ 2 .......... .m 2a ............. Horizontal beam 3 ..................... ^ Μ 4 ........... glass substrate 5 ........... substrate holder 6. ..... Opening 7 ......... Reference Pin 8. ........... reference bolt

第23頁 200307339 圖式簡單說明 9 .....................按壓栓銷 10 .................. ••鉸鍊 11 .....................邊緣部份 12···..................支撐零件 13 .....................回轉車由 14 .....................移動滑車 15 .....................直線導執 16 .....................移動用溝槽 17 ......................連接裝置 18 ......................連接頭 19 .....................插 π 19,.................. ··插口 19a.................. •伸縮桿 20 ....................延出端部 21 .....................支撐零件 22 .....................支點 23 .....................支點 24 .....................支點 25 .....................支點 30 ....................照明裝置 31 .....................光源 32 .....................反射鏡 33 .....................透鏡 40....................檢查裝置Page 23 200307339 Brief description of the drawings 9 ... .. •• Hinge 11 ..................... Edge part 12 ... .. support parts 13 ........... slewing car by 14 .......... .Moving pulley 15 ........... linear guide 16 ........... Groove for moving 17 ................................. 18 ..Connector 19 ..................... Plug π 19, .............. Socket 19a ............ Extension rod 20 ..... Extend the end 21. ..... support parts 22 ........... support 23 ... ....... pivot 24 ..................... pivot 25 ... ............. Fulcrum 30 ........ Lighting device 31 ............ ......... Light source 32 ........... Reflector 33 ............... ... Lens 40 ........ Inspection device

mmmm

第24頁 200307339 圖式簡單說明 41 .....................門型臂 42 .....................顯微鏡 43 .....................控制裝置 50 ....................搖動裝置 51 .....................鉸鍊組件 5 2.....................较鍵維持臂 52a..................鉸鍊支撐片 52b..................鉸鍊支撐片Page 24 200307339 Brief description of the drawings 41 ..... Door arm 42 ... ..... Microscope 43 ..................... Control unit 50 ..... .Swing device 51 ........... hinge assembly 5 2 ............. Key-maintaining arm 52a ........ hinge support piece 52b ........ hinge support piece

Claims

200307339 6. Application scope Claims: 1 · A substrate holding device characterized by: a stand; and ^ a substrate holder installed on the stand capable of maintaining large substrates gj and a substrate stand on the stand In a horizontal state, it may be shaken in the direction in which the substrate tray is raised. When the substrate tray is raised, the lower edge of the substrate tray is lowered to a swinging device under the upper edge of the stand; Constitute its characteristics. 2. The substrate holding device described in item 1 of the scope of the patent application, and the aforementioned shaking device, which arbitrarily sets the lifting angle range, makes the substrate holder shake as its characteristic. 3. The substrate holding device according to item 1 of the scope of the patent application, wherein the moving device is characterized by the edge portion ^. Of the upper surface bracket being shaken. The blade is on the side, so that it is described 4. The substrate protection as described in item 1 of the scope of patent application ^ m by right, two, 丄, " The bracket is horizontal on the aforementioned stand or swings in the lifting direction, and a connecting device installed on the upper edge portion of the said stand, and a swinging fulcrum in the lifting direction; and the lead 'L 土木 4

200307339 VI. Scope of patent application ^ --- .. A prescriptive connection device causes the 4th substrate holder to shake while causing the aforementioned pivoting support point to slide relative to the preamble substrate holder to push the substrate holder above the stand. The edge part is further forward; at the same time, the ejection device that lowers the lower edge to below the upper edge part of the front stand by the raising of the aforementioned substrate bracket is also its feature. 5. The substrate holding device according to item 4 of the scope of the patent application, wherein the above-mentioned connection device is respectively installed at both ends thereof as a feature relative to the above-mentioned substrate bracket. 6 · The substrate holding device according to item 4 of the scope of the patent application, wherein the ejection device 'sets the swing support point above the edge of the stand; partly, and relative to the swing support point, the substrate holder slides. The guide is mounted on the substrate holder and is characterized by the guide. 7. The substrate holding device according to item 4 of the scope of patent application, wherein the pushing-out device, as the raising angle of the substrate tray becomes larger, the amount of pushing out of the lower edge of the substrate tray also increases. The larger it is, it is the character. '8 _ The substrate holding device according to item 1 of the scope of the patent application, wherein the swinging device is provided with a fixed length and one end is installed and can be rotated while facing the base constituting the stand, and the other end is raised when facing the substrate support. A rotatable connector mounted on the edge of the substrate bracket on the upper side; and

Page 27, 200307339 VI. Applying for Lem® ——--- Installed on the top of the aforementioned platform, Qiba Ba, lift the rake square θ to shake the pull ^ + trowel 'swing the substrate holder in the direction of lifting When the fulcrum fulcrum and the aforementioned substrate bracket are raised, the front is moved; when the shell is turned, the front can pulley is moved)) is: the front edge of the edge part is pushed forward = the substrate holding device described in the item, which is installed in Then the fan is connected, and the distance between the pivotable pivot point and the pivot point is set to be shorter than the length of the connector described above. 1 0 · If you apply for the installation of a special rocking device seat, and the front telescopic rotation on the upper side, the lower side and the installation side are raised, the sliding part is moved forward by the moving fulcrum, the edge is lowered, and the board lever can be swiveled. The front end is faced with the hinge in the direction described above, and the side is adjusted to the substrate holding device described in item i before the previous adjustment, wherein the fixed length and one end faces the bottom constituting the stand, and the other end faces the aforementioned When the substrate is lifted, the connector is installed on the edge of the bracket and can be rotated; and the hinge facing the other end of the connector just described and connected to the lower part of the aforementioned stand can be rotated; the upper edge of the wooden table, and The swing support of the substrate tray and the expansion and contraction of the telescopic rod installed on the substrate tray back 2 are pushed forward relative to the swing of the bracket to the upper edge of the stand and simultaneously lifted by the substrate tray. Guide the lower part of the upper part of the upper edge of the platform; the telescopic length of the telescopic rod,

Page 28 200307339

Sixth, the range of the patent application angle between the end and the other end of the movable fulcrum can also be described as the edge formed under the substrate bracket, and the angle formed with the front side can be set arbitrarily. The lifting distance of the substrate holder is the lifting angle between one end of the substrate holder and the aforementioned substrate holder, and the former feature. 1 1 · The substrate holding device according to item 1 of the scope of patent application, wherein the front-request shaking device is 'equipped with a rigid: relative to the direction of the moving axis of the substrate bracket in the raising direction: the direction of the different axis of the moving axis' The characteristics of the substrate mounting and described in the application item] The substrate's fixed setting = 1 is its characteristic. 1 2. The substrate holding device described in item 丨 i of the scope of patent application, the aforementioned in 1 :: to the rocking device 'in the state of the substrate holder raised, relative to the direction of the rocking axis of the rocking device Above, the aforementioned substrate holder is swung in the direction of the head with the vertical axis as the center. 1 3 · If you apply for a shaking device in the scope of the patent, it is the substrate described in Item 12 of the other direction that is previously characterized by shaking. The substrate holder is lifted to move the square device to the aforementioned shaking head holding device. The shaking in the same direction as the shaking in the same direction is the same as the shaking in the other direction as described in item 11 of the scope of patent application. The shaking axis direction is provided. The substrate holding device is described in the vertical axis. The substrate tray is raised in the direction of 'on the upper edge of the aforementioned stand'

200307339 VI. Part of the scope of the patent application can be reinstalled, and the amount of each connecting device in the above-mentioned base can be reinstalled, so that the above-mentioned base is 15 Rotary support parts taken from the large substrate bracket; Slewing support and zero support rocking support: The substrate bracket can be moved to the two ends of the rising plate bracket, and the front plate bracket can be moved to the head by each link. 3 ί The different shakings of the broadcast master are characterized by their shaking. ^ The substrate holding device according to item 1, wherein the aforementioned ^ force surface t frame # # makes the lower side of the substrate bracket and the upper edge portion of the wood σ lower, and the shapeable substrate is placed on the aforementioned substrate. It is characterized by being on the substrate holder or from the foregoing. 1 6 · A substrate inspection apparatus, comprising: a stand; and a substrate holder installed on the stand to fix and maintain a large substrate; and the substrate holder is kept horizontal on the stand, Or shake in the direction in which the substrate tray is raised, and when the substrate tray is raised, the lower edge of the substrate tray will fall below the upper edge portion of the stand; and a swinging device installed on the substrate tray. Above the rack, the above-mentioned shaking device is used for raising, or the above-mentioned large substrate is shaken, and a visual observation lighting device for illuminating the visual observation illumination light is provided;

Page 30 200307339 6. Scope of patent application Those who have the above-mentioned components and devices constitute their features. 1 7. The substrate inspection device according to item 1 of the scope of the patent application, wherein the substrate holder is horizontally disposed on the stand, and in this state is fixed above the large substrate on the substrate holder, and is provided with an enabling device. A microscope moving microscopic inspection device that obtains an enlarged image of the large substrate is a feature of the microscope.

Page 31