TWI313039B - Substrate holding appatatus and substrate examination apparatus - Google Patents

Description

1313039 IX. Description of the Invention: [Technical Field] The present invention relates to a flat panel display such as a liquid crystal display panel (hereinafter referred to as LCD) piasma display panel (hereinafter abbreviated as PDP) The glass substrate of the panel display (hereinafter referred to as FPD) is used to maintain the glass substrate, shake the substrate holding device, and the substrate inspection device of the substrate holding device. [Prior Art] In recent years, in the field of FPDs such as LCDs and PDPs, large-scale kneading and cost reduction have been expected to be achieved. In order to achieve the above-mentioned object, in the FPD manufacturing process, a multi-faceted glass substrate has been used to increase the screen size. Therefore, the size of the glass substrate has now appeared in a large size of 1250 x llOOmm. In such an FPD manufacturing process, one of the methods for performing substrate inspection and substrate inspection on a large-sized glass substrate to be produced is to take a visual inspection (parallel inspection) and microscopic (micror〇) inspection. In the macro inspection, the glass substrate is irradiated with illumination light to visually observe the reflected light on the glass substrate. The microscopic (miaO) examination is a specific observation of the specific madness found in the visual inspection using a microscope. The substrate inspection apparatus of the present invention includes the technique disclosed in Japanese Laid-Open Patent Publication No. H-160242. In the bulletin, there is a bracket that can raise and hold the glass slab to maintain a predetermined angle. For visual inspection (with the inspection day, the glass substrate is placed on the bracket to raise the bracket to The observer's line of sight is the same, so that the mirrorer can perform the "(10)) inspection. The correction can also be viewed from the front and rear of the observer 1313039. The observer performs the visual inspection (maeiO). Microscopic (micro) During the inspection, the carriage is returned to the original position, the glass substrate is kept horizontal, and the observation portion is enlarged by the microscopic observation system. However, when the visual inspection is performed, the inspection is performed centering on the lower side of the bracket, and if it is checked The upper end portion of the glass substrate Dawei's (four) high will be higher than the position of the observer's eyes. Therefore, the farther the observer's eyes turn to the upper end portion of the large glass substrate, the less likely it is to observe the large glass substrate. In addition, when the large glass substrate is raised, due to the high position of the upper end portion of the large glass substrate, 'there must be enough space for the large glass substrate to shake freely. [Invention] The main point of the present invention is to provide a substrate holder having a base and a large substrate mounted on the gantry, and to make the substrate 姊The front side edge of the base raised as the front side can be rotated as the center pivoting 'at the same time or the substrate support_raising direction is shaken, and the upper edge portion of the lower end of the substrate bracket is lower when the substrate carrier is raised. According to the main point of the present invention, there is provided a visual illumination device provided on a substrate holder mounted above a substrate holder and fixed to a projection structure that is raised or shaken. [Embodiment] 1313039 [Best Embodiment] Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. Fig. - is a substrate suitable for use in the present invention. The substrate inspection device of the holding device has a cross-section of the substrate. The gantry (1)' is fixed by the foot (2) and the base (3) on the mounting foot (2) on the base (3) to maintain a large glass plate. The substrate holder (5). The substrate holder (5) is horizontal, and the height is set on the conveyor H arm shift_high red. Above the base (3), the financial level is installed. The substrate holder (5), as shown in Fig. 2, forms the opening 6 On each side of the opening 6, there is a large glass filament (4) scale (4) each bolt pin (7) H recording standard check lock (8), according to the remaining sales (9). Yu Jian _), the job is pressed on the big ship Wei board (4) The movable direction of the reference pin (7). The substrate bracket (5), relative to the upper side of the base (3), according to the following description of the rocking device (including the hinge of the rocking fulcrum (l〇), with the ejection device Straight line _(15), connecting device ((7), it can be seen that it is a hinge (10) phase _, and is set as a square wire. The direction of rotation is the direction in which the substrate carrier (5) is raised, or the horizontal state is restored (arrow) A direction). Qin key (hi Qing) (1〇) 'The base oil retaining device is viewed from the front, and it is known that it is mounted on both sides of the base (3). Further, the rocking mechanism is rotated by the hinge 10, the substrate holder is rotated, the substrate holder 5 is raised or horizontally _reacted, and the substrate holder 5_ is continuously oscillated. At both ends of the front side edge portion (1) above the base (3), as shown in Fig. 3, each hinge support member (12) is provided. These hinge support parts (on the top, respectively, are provided with freely swingable hinges (hingeXlO). In order to make the substrate bracket (5) threaten, or to oscillate in the direction of returning to the horizontal state (arrow A direction), these hinges (five) nge) ((8) The rotary axis (10) is mounted in the horizontal direction (γ direction) on the side of the front surface 1313039. A moving block (14) is provided on the hinge (10). On the moving block (w〇ck) (i4), A frictional movement groove (16) is formed to be fitted to the linear guide (15) mounted on the back surface of the substrate holder (5). The linear guide (15) is raised when the substrate holder (5) is raised. The inner groove (16) is frictionally moved to push the substrate holder (5) toward the front side. The hinge (1〇) rotates the substrate holder (5) with the rotary axis (a) as a fulcrum. The lower end of the substrate holder (5) can be lowered from the edge portion (8) above the base (3), and the planting rail (10) and the hinge (10) constitute an ejection device. The linear guides (15) are respectively mounted on the back surface of the substrate holder (5). On both ends, each frictional movement groove is formed on each of the moving pulleys (14) formed at both ends of the base (3). These linear guides (π), When the substrate holder (5) is raised, the substrate holder (5) is pushed out toward the front side in the inner tray, and the lower end side edge of the substrate holder (5) is lowered to the upper edge portion (11) of the base (3). In the town, it is necessary to have a sufficient length. For example, the remaining bracket (5) is slightly higher than the center. The upper end of these straight lines (10) is equipped with a system (stQpper) (15a). These pedestals (St〇pPer) A5a) is to prevent the substrate holder (5) from being excessively tilted when the substrate holder (5) is raised, and exceeds the maximum tilt of the substrate, which is _ level (5) _ oblique angle. The connecting means (17)' is provided for maintaining the substrate holder (5) in a horizontal state on the base (3) or rotating it in the raising direction. The connecting device ((7) is constituted by the connecting head (1) η] 〇 (10) and the socket .10 (19). The connecting head (11nk) (10) is formed by a fixed length. The connecting head (lmk) (18) is mounted on the amp; Between the extended end portion (10) extending below the seat (3) and the support member (21) at the lower portion of the substrate holder 1313039 (5). The connector (18) is facing the extended end portion (2〇) The position of the support part (21) is provided with a pivot point (22), (23). The jack (19) 'includes the telescopic rod (r〇d) (l9a). Jack (jack) (19), installed on the joint (link) (18) between the support member (21) side and the foot (2) horizontal beam & jack (19), in the connector-facing (link) At the position of (18), the front end of the telescopic rod (r〇d) (19a) is connected with the fulcrum (24) as the center, and can be rotated. The lower end of the jack (19) is facing the horizontal beam 2a. In the position, the fulcrum (25) is centered and connected and revolved. The connecting device (17) is attached to the substrate holding and holding device from the front side, and is respectively mounted on both end sides of the substrate holder (5). Telescopic rod of jack (19) Rod) (19a) is elongated, and the front end of the telescopic rod (nxl) (19a) of the jack (19) pushes the side of the support part (2) of the link (10) upward. At this time, the other end of the socket (jad〇(19) is mounted on the horizontal beam % of the foot (2), and the length of the link (18) is also fixed. The connector (Unk) (10) can be used by Jack (10) telescopic rod (shout (10)) is elongated 'with fulcrum (22) as the center of the towel, domain. When the connector (ΙιηΙΟαδ) with the fulcrum (22) as the central domain, the fulcrum (23) will be connected The head (Hnk) (1) is a radius and moves on an elliptical arc. At this time, the spacing of the fulcrums (22) and (23) at both ends of the link (18), and the link (18) fulcrum (22) The spacing from the hinge (10) of the hinge (10) is fixed, and the spacing between the fulcrum (2) of the link (18) and the hinge (10) of the hinge (10) is varied. Therefore, 'the fulcrum (22), (23) and the hinge chain (1〇) form a triangle at 3 points, and the joint (lnik) (18) rotates around the fulcrum (22), while the fulcrum (23) The spacing between the hinges (five) and (13) 1313039 is getting shorter and shorter. However, as the link (18) rotates and the fulcrum (23) and the hinge (10) are spaced shorter and shorter, the substrate carrier (5) faces the front side of the linear guide (15). The side frictional movement causes the lower end side edge of the substrate holder (5) to be pushed out toward the front side of the edge portion (11) above the base 3.

Ik is the extension of the jack (i9) telescopic rod (r〇d) (i9a), and the amount of rotation of the joint (nnk) (i8) is also increased. Moreover, the larger the thief is raised in the substrate city (5), the lower edge of the lower end of the lining bracket (5), and the larger the amount of pushing out from the upper edge portion (11) of the base. As a result, the larger the angle at which the substrate holder (5) is raised, the more the push-out of the lower end side edge of the substrate holder (5) increases. From this, it can be seen that the substrate holder (5) has a lower edge which is lower than the upper edge portion (11) of the base (3). The lowering distance of the lower end side edge portion (n) of the substrate holder (5) can be changed by changing the length of the link (18), the length of the wire guide (the length of (5), and the length of the extension (rQd) (19a). Arbitrarily set. In other words, 'the fulcrum (22), (23) and the hinge (1〇), the triangle forms a triangle, and the fulcrum (22) is adopted according to the telescopic length of the telescopic rod (r〇d) (l9a). , the edge of (10), and the angle formed by the fulcrum (23) and the edge of the hinge (iG), if the smaller, the angle at which the substrate holder (5) rises is larger. Correction, connector (link) (10) If the distance between the fulcrum (10) and the hinge (10) rotary axis (10) is shorter than the length of the connector (Hnk) (10), the angle (inclination angle) at which the substrate holder (5) rises increases. By the length of the telescopic length of the telescopic rod (r〇d) (19a) for 5 weeks, the angle formed by the fulcrum (22), the angle formed by the fulcrum (23) and the edge of the hinge (i〇), At 1313039, the falling distance of the substrate holder (5) and the lower end edge portion (11) of the substrate holder (5) can be arbitrarily set in this manner. Further, the substrate holder (5)' is A portion consisting of a hinge support member (12), a hinge (i) and a moving block (14), and a branch member (21) are placed on the base (3) in a horizontal state. The hinge support member (12) is identical to the height of the hinge (l〇) and the moving block (14), and the height of the support member (21). There is a macro lighting device (3〇). This visual (macr〇) lighting device (30) is a visual (macr〇) light source (Μ) that observes the illumination light by radiation, and a visual view of the macro light source. (31) A mirror (32) that reflects the emitted light, and a Fresnel lens (33) that collects the visible illumination light reflected on the mirror (32). The macro light source (31) is arranged to allow the visual observation of the illumination light to be emitted in a horizontal direction. The mirror (32) is mounted at an angle of about 5 degrees with respect to the horizontal direction, and is bent on the side of the large glass substrate on which the illumination optical axis rises. A micro inspection device (40), a gantry arm (41) that is movable in the sense direction on the base (3), and a level along the door arm (4) The arm (_) is provided with a microscope (42) that can move toward the γ square φ. The control device (43) mainly controls the telescopic movement of the jack (10) and visually observes the mess of the light source (31). In addition, the control relay (10), and control the movement of the Wei Weitai (10) X γ direction, He Fiber (42) to observe the visual field shift _ can be on her face (4) on the fatigue. The position of the P knife. The mechanical part of the large-sized substrate (4) is visually inspected in a specific manner, and its coordinate data is also memorized. 11 1313039 It is described below, and the operation of the device is as follows when performing visual inspection and microscopic inspection. Before the inspection is started, the jack (19) is shortened, and the substrate holder (5) on which the large glass substrate (4) is placed is horizontal. When the visual inspection is carried out, the expansion and contraction of the jack (19) telescopic rod (r〇d) (19a) is controlled by the control device (43). The connector (18) is centered on the fulcrum (four). turn around. The wire bracket (5) starts to rise by the jack (19) telescopic rod (n3d) (19a) (four) and the _ (18) coffee. At this time, the linear guides (15) below the substrate holder (5) start to frictionally move in the respective frictional movement grooves (16). As a result, the substrate holder (5), as shown in Fig. 4, is pushed forward from the edge portion (11) of the base (3), and is raised by a hinge (10) as a center of shaking. Furthermore, with the extension of the socket (jad〇(19) telescopic rod (r〇d) (19a), the substrate holder (5) is also raised, so that the lower end edge of the stage bracket (5) is further lowered below the base (3). The position of the upper edge portion (11). When visually inspecting, the observer adjusts the expansion of the socket (i ack) (i 9) telescopic rod (i 9a); brother. This allows the substrate holder (5) Arbitrarily, adjust to the angle at which the stomach is visually observed in a row. The lower end side edge of the substrate holder (5) raised in this way is lower than the upper edge portion (11) of the base (3), so even if the substrate holder (5) is mounted Above the gantry i, the large glass substrate (4) is entirely near the observer. In particular, the height of the upper end portion of the large glass substrate (4) is lower than before. The distance between the upper end portion of the large glass substrate (4) and the observer is shortened. 1313039 In this state, when the visual observation light source (31) emits the observation illumination light, the observation illumination light is reflected on the mirror (32) and concentrated by the Fresnel lens (33). Thereafter, it is irradiated onto the large glass substrate (4) on the substrate holder (5). On the large glass substrate (4), the reflected light was visually observed and visually inspected. At this time, the height of the upper end portion of the large glass substrate (4) was lower than before, so that the observer did not look up at the large glass substrate (4) The upper end portion, and on the entire surface of the large glass substrate (4), by capturing the reflected light of the flaw portion such as damage or spots, it is possible to surely find the flaw portion existing on the large glass substrate (4). For the observation inspection, for example, the substrate holder is arbitrarily adjusted to a raised limb that is easy to perform visual observation, and each of the insertions (jaek) (19) is repeatedly subjected to the expansion and contraction operation, and the telescopic rod (19a) is expanded and contracted to advance. The length of the setting is repeated by the extension, and the substrate holder (5) is continuously oscillated in the direction of the arrow a according to a certain period. The state of the substrate 姊 (5) is shaken, and the setting is controlled by the control woven (4). Control Attack (43) ' Controls the telescopic length of each jack (10) telescopic rod (19a) according to a preset range of rocking angles. The substrate holder (5) corrects the continuous crane, and the damage, spots, and the like on the glass substrate (4) are reflected in the opposite direction and reflected in the observer's line of sight. In this way, the observer can reduce the __ reading and find out the damage, spots, etc. on the large glass substrate (4). Further, the coordinates of the specific sputum portion found on the large glass substrate (4) by visual inspection are input to the control device (43). 13, 1313039 followed by microscopic examination. A jack (19) is used to expand and contract the telescopic rod (19a) via the control of the control unit (43). As the telescopic rod (r〇(j) (i9a) is shortened, the joint (π) is centered on the fulcrum (22), and when the substrate holder (5) is raised, it is rotated in the opposite direction. In this way, the substrate holder (5) can be restored to the original horizontal state.

When the substrate holder (5) is lowered above the base (3) and is in a horizontal state, the control device (43) controls the microscope stage (41) to move in the direction of χ γ according to the 瑕疵 part coordinate data input during the visual inspection. The observation field of the microscope (42) is moved to the position of the upper portion of the specific large glass substrate (4). H Part of the image magnified by the microscope (42), for example, if it is taken with a CCD camera, it is displayed on the TV screen. The observer can observe the enlarged image displayed on the video screen. Further, the control device (43) can move the microscope (42) to (in the Y direction, comprehensively scan the observation field of the microscope (42) on the large glass substrate (4). When performing microscopic inspection, the substrate holder (5) ) is a part of the hinge supporting part (12), the hinge (1〇) and the moving block (14), and the supporting part (21), and is placed on the base (3), so that ... is not subject to external shock The substrate holder (5) has high stability. The substrate holding and holding device is not limited to use during visual inspection and microscopic inspection, and can also be used to mount a large glass substrate (4) on the substrate. On the carrier (5) and on the transport device when removed from the top of the substrate holder (5) - For example, when the large glass substrate (4) is placed on the substrate holder (5) If the control device (43) controls the expansion and contraction of the jack (19) telescopic rod (19a), as shown in FIG. 4, the substrate holder 14 1313039 (5) will rise, and the substrate holder The lower end of the frame (5) will be lowered to the edge portion above the base (3). So - 'When the substrate holder (5) is raised, the large glass substrate (4) The state in which it is raised in a slightly vertical direction (Ζ direction) is placed on the reference pin (8) of each roller when it is shown in Fig. 2. Moreover, the large glass substrate (4) is pressed by the lupin (9). The predetermined reference pin (7) is press-fitted to the reference position. Next, the 'large glass substrate (4) is attracted by the adsorption hole provided in the substrate holder (5) which is not shown in the drawing, and is adsorbed and fixed. On the surface of the substrate carrier (5). After that, when the jack (19) miscellaneous rod (mOCiga) is examined, the neon (5) is in the horizontal state of the material. On the other hand, 'taken from the substrate holder (5) When the large glass substrate (4) is placed, it is opposite to the above-mentioned device program. 'When the substrate holder (5) is in the state of inspection, the solution is removed, and after the large glass substrate (4) is raised in a slightly vertical direction. Remove from the substrate holder 。. When the large glass substrate (4) is placed on the substrate holder (5) or removed from the substrate holder (5), the lower edge of the substrate holder (5) will be compared with the base (3). The upper edge portion (u) is lowered to the bottom. When the large glass substrate (4) is placed on the substrate holder (5), it is large. The glass substrate (4) can be easily placed on or removed from the substrate holder (5) without being raised to a higher position. In addition, if it is on a large glass substrate (4) When the upright state is downloaded and placed in the substrate tray (5), the large glass substrate (4) will be fixed by its own position on the reference latch (8) with the roller attached thereto. Therefore, the base reduction pin (5) can be omitted from the corresponding pin-counting pin (8) 15 1313039, and the surface contact resistance between the big plate (4) and the substrate _ (5) is also reduced, pressing the pin ( 9) The pressing force can also be reduced. According to the first embodiment described above, the substrate holder (5) is raised _, and the lower end side edge of the silk gift (5) will be further forward than the edge portion (11) of the base (3) of the gantry 1 The introduction is also lower than the edge portion (11) of the base (3) of the gantry (1), so the shaft substrate bracket (5) is mounted on the gantry (1), but the entire large glass substrate (4) can be displayed on The height of the upper part of the large glass substrate (4) near the observer, especially ι25〇X 1100 mm, can be compared More reduced, the distance between the upper portion and the large glass surface viewer 4 can be shortened. Therefore, the observer does not look up at the upper end portion of the large glass substrate (4), and can be surely found on the large glass substrate (4) by the reflected light of the enemy and the scaly thief in the whole glass substrate (4). The part of the shelter. Further, when the large glass substrate (4) is raised, the upper portion thereof is lower than the conventional one. Therefore, the installation position of the visual illumination device (30) is also lowered, and the installation base of the entire substrate detection wire is also reduced. The visual inspection is performed, and the substrate holder (5) is arbitrarily adjusted to a viewing angle that is easy to perform visual observation. Each jack (10) repeatedly performs a telescopic operation to shake the substrate region (5), and the observer can reduce the movement of the line of sight. The number of times, but by capturing the damage, the light reflected from the spotted thief part is indeed looking for its scale. At this time, since the rectangular fan of the substrate holder (5) can be arbitrarily set in the control device (43), not only damage or spots, but also various plagues such as missing corners and dirty dust can be confirmed. Find out. The helium micro (mlerO) scale is used to make the substrate holder (5) horizontally woven, and the support member (12), the hinge (l) and the moving block ((4) are composed of the hinges 16 1313039 (hinge). The part, and the support part (2))' are placed on the base (3). Therefore, the stability of the substrate holder (5) from external shock is very high. Therefore, 'the bottom part of the large glass substrate (4) can be observed by a microscope that does not shake ((2) magnify the image. Further, after the substrate holder (5) is raised, the lower side edge will be lowered to the lower side. In the case of the gantry g) the base (3) wire portion (Π), and the shackle type glass sill (4) is placed on the substrate holder (5), and the transport device is removed from the substrate holder. At this time, it is not necessary to raise the large glass substrate (4) to a high position, and the large substrate (4) can be placed on the substrate holder (5) or removed from the substrate holder (5). Further, since the substrate holder (5) is pushed forward more than the edge portion (11) of the base (3), the substrate holder (5) is raised one by one, so that the illumination light is not obscured by visual observation. The rocking device is constituted by a hinge fulcrum (1 〇), a linear guide (15) of the ejection device, a connecting device (17), and the like, and therefore, the price is relatively low. Next, a second embodiment of the present invention will be described with reference to the drawings. In the device, a hinge (l〇), a hinge support member (12), a moving block (14), a linear guide (15), a connector (18), a jack (10), and an extended end (10)) and the supporting member (8), as described in the above-described first embodiment, the financial group is mounted on both end sides in the γ direction as seen from the front side. In this embodiment, each hinge (1〇), (1〇), each hinge support member (12), (12), each moving block ((4), (14), each line Guide rails ((5), (15,), connectors (18), (18'), sockets (jad〇 (19), (19), and support parts (2)), (2Γ), each with a symbol 17 1313039 In the present apparatus, as shown in Fig. 6, in the direction of the rocking axis in the direction of rotation of the substrate holder (5), another direction oscillating means 5 使 for rotating the substrate holder 5 is provided in the vertical axis direction. In the other direction, the swinging device 50 is provided with a hinge assembly (slewing support member) for rotating (arrow B direction) in the direction of the vertical axis with respect to the direction of the rotary axis of the substrate holder (5). 51) The hinge assembly (51) is a hinge support arm (52), and hinge support pieces (52) a, (52b), and mounting respectively installed at both ends of the chain maintenance arm (52) The hinge shaft (53) is formed at a slightly central portion of the bottom surface of the hinge maintaining arm (52). Each of the hinge supporting pieces (52a) and (52b) is respectively provided to be rotatable. Hinge (丨3), (13). The rotary shaft (53) is provided in the rotation hole 54 at the center of the front side of the base (3) and is rotatable. The control device (43) controls each socket (19). The amount of expansion and contraction of (19') is different from each other. For example, if the sockets (19) and (19) of the side are not stretched, the sockets (10) and (10) on the other side will expand and contract. When the socket (10) or 〇9,) of the side is extended, the socket (19) or (19') on the other side is shortened. Further, the expansion and contraction operations of the sockets (19) and (19,) can be expanded and contracted at the same time. When visual inspection is performed under such a configuration, the observer adjusts the elongation of each of the telescopic rods (19a) and (19a) of each of the jacks (10) and (10). In this way, the substrate holder (5) can be thought of. The angle of rise of the silk was observed by the entire circumference. - In this case, '4', each of the inserted D (jad〇(19), (19'), each of the telescopic rods α, (10),) is reversed with the temple, and the age is reversed. The frame (5) can be continuously oscillated in the direction of the arrow A according to the predetermined period. 18 1313039 In addition, for example, if the socket (jaCk) (19) or (19) is stretched and contracted, the other side can be inserted n (jad〇(10) or (19)). The fineness of the sides (jad〇(10), or (19') is elongated, and the jacks (19) or (19,) on the other side will expand and contract. Also, each jack (19), ( 19)) continuously performing the telescopic action repeatedly. Similarly, by changing the telescopic movement of the jacks (19), (19,), the substrate bracket (5), the hinge assembly (51) shown in FIG. The center of the rotary axis (53) is rotated in the direction of the arrow B. Thus, the 'substrate bracket (5)' is viewed from the front side in the left-right direction (hereinafter referred to as the shaking direction). Figure 7 is a side socket (jad) 〇 (19), or (19,) is not stretched, and the other jack (19), or (19') is stretched. At this time, the substrate holder (5) is viewed from the front side. The lion's fineness in this direction may be set in advance by the control device (10), or may be arbitrarily set by the observer's operation. Shake in the direction of shaking head, arbitrarily set the angle of rotation direction, or increase the change of visual inspection by continuous shaking. By this method, the substrate bracket (5) is turned down (arrow direction) and the large glass cannot be detected. The surface of the substrate (4), such as damage, surface, etc., can be reflected by the age reflection and can be found, and the specific position of the scorpion portion can be found. In addition, the brain substrate bracket (5) can be turned upright and the direction of the head is shaken. At the same time, the substrate holder (5) is set to all angular directions so that it is swayed in all the slanting directions, and the visual inspection is performed at the same time. Further, the present invention is not limited to the above-described first and second embodiments. In the implementation phase, various changes can be made within 19 1313039 without departing from the main purpose. For example, when the substrate carrier (5) is raised, the substrate carrier is first pushed forward to make it More forward than the edge portion (11) of the base (3). Then, the chain ((8)_the shaft (10) is medium ~' can make the substrate bracket (5) rotate down to the edge portion (1) of the base (3)) The position of the lower part. Especially when the substrate 姊 (5) is from a horizontal ridge to a predetermined inclination, the substrate cradle (5) can be started, and the lower edge of the substrate (5) can be lowered below the base (3) (1). Therefore, it can be seen that the substrate holder (5) can be shaken by various changes of the structure of the shaking device. Each connector (10), (18,), for example, can replace the socket with (8). "jack" 'Under the state in which the substrate holder (5) is raised, # this jack (jack) expands and contracts, the substrate holder (5) is turned up and down the chicken. Thus, the large glass substrate can be implemented. The visually observed area is placed at a height position where the observer can easily perform visual inspection. The rocking device is composed of a rocking fulcrum hinge (10), a linear guide (15) of the pushing device, a connecting device (Π), etc., but can also be used for any other device. For example, the hinges (10) and (: 10') of the rocking fulcrum of the substrate holder (5) can be used for the movement and the sliding function, and can also be used for the rocking device for moving the substrate holder (5) in an arc shape. [Industrial Applicability] The present invention is not limited to a composite device consisting of a visual inspection and a microscopic inspection, and is a visual inspection device that is suitable for large-scale LCK and PDP manufacturing processes, and may be only visually inspected. Single-work «set. Further, various substrate inspection apparatuses, such as film thickness measurement and inspection, which can be applied to a large-sized glass substrate, can be used for fixing the large-sized glass substrate, or placed on a large glass substrate of 13 1313039 type, or removed. BRIEF DESCRIPTION OF THE DRAWINGS i- is a configuration diagram of a first embodiment of a substrate holding device of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front view showing the structure of a substrate holder of a first embodiment in which a substrate of the present invention is kept worn. Fig. 2 is an enlarged view of a hinge portion of the first embodiment of the substrate holding device of the present invention. Fig. 4 is a view showing a rising operation of the substrate holder of the first embodiment of the substrate holding device of the present invention. Figure 5 is a block diagram showing a second embodiment of the substrate holding device of the present invention. Fig. 6 is a view showing the configuration of a directional rocking mechanism of a second embodiment of the substrate holding device of the present invention. Figure 7 is a perspective view showing the shaking direction of the substrate holder of the second embodiment of the substrate holding device of the present invention. [Main component symbol description] ......................Rack 2a.................... Horizontal beam 4.....................glass substrate 6....................... ...opening 8....................reference pin (.................. .Qin Chain 12.....................Support Parts 14........................Mobile Pulley 16........................Transporting groove 18........................ Head 2 ..................... Foot 3 ..................... Base 5.. ...................Substrate bracket T......................reference pin 9. .................... Press the pin Π........................ edge part 13. .................... Rotary shaft 15.....................Linear guide 17... ...................Connecting device 19.....................Plug 21 1313039 19' . .................·. Sockets 20....................Extension end 22.... ................. fulcrum 24..................... fulcrum 30........ ............Lighting device 32........................Mirror 40........ ......... inspection device 42........................microscope 50............. ... shaking device 52..................... hinge maintaining arm (52b).............. .... hinge support piece 19a................... Telescopic rod 21.................... Supporting parts 23..................... fulcrums 25..................... fulcrums 31 .....................Light source 33.....................Lens 41.... .................Door arm 43.....................Control device 51..... ................Hinge assembly (52a)..................Hinge support piece

twenty two

Claims (1)

1313039 v P-1569 '~>~J 97/12/25 fg 92112436 M-Material® Correction 1 1. A substrate holding device comprising: a base; and mounting on the base to fix and maintain a large substrate The substrate holder 丨 and the substrate holder are raised forward, and the fulcrum of the front end edge of the base is rotated. When the substrate holder is lifted, the lower end edge of the substrate holder is lightly turned up. Some of the townships were shocked. 2. The substrate holding device according to the above aspect of the invention, wherein the rocking device has a rocking mechanism that rotates the substrate carrier in a direction perpendicular to the axial direction of the substrate carrier, When the direction oscillating mechanism raises the substrate holder by the oscillating mechanism, the substrate holder can be rotated in the left-right direction. The substrate holding device of claim 1, wherein the rocking device 'shakes the substrate carrier by the front side of the edge portion above the substrate holder to make the substrate carrier horizontal, The vertical state and the swivel angle within the range of 0 are characteristic. The substrate holding device according to claim 1, wherein the shaking device is provided with the substrate holder horizontally on the substrate holder, or a connecting device that swings in a rising direction; and a rocking fulcrum that is disposed on an upper edge portion of the substrate carrier to cause the substrate carrier to swing in a rising direction; and a connection device that causes the substrate carrier to be shaken Rotating the substrate holder to the front side of the upper edge portion of the substrate holder relative to the sliding fulcrum of the substrate holder; and lowering the lower edge to the foregoing by the lifting of the substrate holder An ejection device below the upper edge portion of the substrate holder is characterized by it. 5. The substrate holding device according to claim 4, wherein the connecting device is provided at both ends with respect to the substrate holder. 6. The substrate holding device of claim 4, wherein the pushing device sets the rocking fulcrum to an edge portion above the substrate carrier, and the substrate bracket is caused by the rocking fulcrum The sliding guide rail is mounted on the aforementioned substrate holder as a feature. 7. The substrate holding device of claim 4, wherein the push-out device 97/12/25 is trimmed, and the lower end edge of the substrate carrier is increased as the substrate holder is raised in angle The amount of launch is also becoming more and more characteristic. 8. The substrate holding device according to claim 1, wherein the rocking device is provided with a fixed length, one end is disposed to face the base plate constituting the substrate holder and is rotatable, and the other end faces the substrate holder. a connector that is mounted on the edge of the substrate holder at the upper side and that is rotatable; and an upper edge portion of the substrate holder that is configured to swing the fulcrum in the rising direction of the substrate holder, and the copper connection At the same time as the substrate holder is raised, the substrate holder is faced to the rocking fulcrum and pushed forward to the upper edge portion of the substrate holder, and the (10) (four) is characterized. 9. The substrate holding device according to Item 8, wherein the distance between the pivotable fulcrum and the rocking fulcrum is set to be more than the length of the connector Feature. The substrate holding device according to claim i, wherein the rocking device is provided with a S1 branch and the end is facing the base of the slab, 1313039 97/12/25, repairing P-1569, and capable of Rotating, the other end is facing the edge of the substrate holder on the upper side when the substrate holder is raised and is rotatable; and the front end of the telescopic rod is connected to the other end of the connecting head and can be rotated, and the lower end is facing a hinge that is coupled to the lower portion of the substrate holder and that is rotatable; and a pivoting fulcrum that is mounted on an upper edge portion of the substrate holder and that swings the substrate holder in a rising direction, and is attached to the back surface of the substrate holder Extending and contracting the telescopic rod of the hinge, the bracket is pushed forward to be forward of the upper edge portion of the substrate bracket relative to the rocking member, and is raised by the substrate holder (4). Lowering the lower edge to a lower rail than the upper edge portion of the substrate holder; by adjusting the telescopic length of the telescopic rod, one end of the connector and the other The edge formed by the end is connected to the front ship and the angle of the edge formed by the rocking fulcrum can change the rising angle of the substrate ,, and the rising angle of the substrate carrier can be arbitrarily set, and The distance from the lower end edge portion of the substrate holder is characterized by the distance. The substrate holding device of claim 1, wherein the rocking device is provided with a shaking direction in a direction of a rocking axis with respect to a direction in which the substrate carrier is raised. The other direction of the rocking device is characterized by the other direction of the rocking device, which is provided with a tilting direction relative to the rising direction of the substrate carrier 4 1313039 P-1569 97/12/25, in the direction of the vertical axis, in the foregoing a rotating slewing support component is disposed on an upper edge portion of the substrate holder; and a supporting rocking fulcrum for mounting the substrate carrier in a rising direction on the slewing support component; In the above-mentioned respective connecting devices of the above-mentioned shaking device, each of the connecting devices generates a shaking amount different from each other, and the substrate holder is swung in the direction of the shaking head. 12. As described in claim 1, a substrate holding device, wherein the shaking device raises the substrate holder to lower a lower end side edge of the substrate holder to a top edge portion of the substrate holder In the lower state, the large substrate can be placed on or removed from the substrate holder. 13. The substrate retention as described in claim 1 The device, wherein the rocking device has a linear guide disposed on both sides of the substrate bracket, a pivot point provided at both ends of the front side of the base, and a socket for raising the substrate bracket around the swing bracket The structure of the substrate holding device according to claim 13 is characterized in that the linear guide is provided with a stop rod for limiting the lifting angle of the substrate carrier. The substrate holding device according to claim 13, wherein the two ends of the socket are connected to the horizontal bracket of the substrate bracket and the base, and can be rotated between them to be characterized. σ 16 The substrate holding device of claim 13, wherein one of the insertion ends is coupled to the horizontal rod of the base and is rotatable, and the other end is coupled to the rear of the substrate holder and the front side of the base. The substrate holding device according to claim 13, wherein the socket has a telescopic rod, and the angle at which the substrate bracket is raised is set by the amount of expansion and contraction of the telescopic rod. 18. The substrate holding device according to claim 13, wherein the socket has a telescopic rod which is characterized by a reciprocating movement of the extension rod to enable the substrate holder to be rotated in the front-rear direction.基板 30 39 39 39 39 39 39 39 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板The expansion and contraction is used to set the raising angle of the substrate holder, and it is also possible to simultaneously oscillate the substrate holder in the front-rear direction by the amount of round-trip reduction in the vertical direction. 20. The substrate holding device of claim 1, wherein the slewing fulcrum is configured by a _ freely rotatable hinge of the base portion of the base. 21. The substrate holding device of claim 16, wherein the length of the connecting head is shorter than a distance between a fulcrum of the connecting substrate end and the pivot point of the connecting head, but the slewing fulcrum and the connecting head are different. The one between the one end and the base fulcrum is characterized by its length. [22] The substrate holding device of claim 2, wherein the rocking mechanism has a socket that enables the substrate holder to be raised on both sides of the substrate holder, in a state in which the substrate holder is raised. The expansion and contraction of the socket causes the substrate holder to move up and down to be characterized. The substrate holding device of claim 2, wherein the different direction rocking mechanism has a substrate holder that can be raised on both sides of the substrate carrier. The socket, the upper and lower telescopic sockets, or the two sockets are individually extended and contracted in the opposite direction to unidirectional or bidirectional rocking of the substrate bracket in the left-right direction. The substrate holding device of claim 2, wherein the different direction rocking mechanism is provided with: a support portion: a pivot point supported on the base and capable of rising relative to the substrate carrier The vertical axis of the axis direction is rotatable; and the pivot point is: the substrate bracket supporting both ends of the swing support portion is freely rotatable in the rising direction; the above two elements are characterized by the configuration. 25. A substrate holding device comprising: a base; and a substrate holder 丨 and a rocking mechanism mounted on the base to fix a large substrate. · The base bracket is used as a pivot point for the base bracket When the substrate holder is raised and rotated, and the substrate holder is raised, the lower end of the substrate holder is lowered on the front side edge of the base, the substrate holder is pushed forward, and the substrate holder is slightly moved by the shaking mechanism. When raised, the base lowers the front side edge of the substrate holder 8 1313039 P-1569 97/12/25, and the large substrate is alternately transported on the substrate holder. The substrate holding device according to claim 25, wherein the front side edge portion of the substrate holder is provided with a roller reference rod, and the lateral end portion of the substrate holder is provided with a reference rod, and the large substrate is When the roller reference rod is carried, the position of the large substrate can be determined by the escrow of the reference rod. The substrate holding device according to claim 25, wherein the front substrate of the substrate holder is provided with a heterogeneous turn, the substrate is provided with a reference rod at the side of the substrate, and the substrate is supported by the substrate. The lateral side end of the substrate holder opposite thereto is also provided with a lever; the state in which the large-sized board is placed on the roller is characterized by the position of the above-mentioned large-sized substrate by the above-mentioned lever to the reference rod. 28. A substrate inspection apparatus comprising: a base; and a substrate holder mounted on the base to fix and maintain a large substrate; and a rocking paper with a front side edge of the base as a center of a pivot point, the substrate holder being forwardly When the substrate bracket is raised, and when the substrate holder is raised, the trimming end of the substrate holder 9 1313039 P-1569 97/12/25 is lowered according to the front side edge portion of the base, and the substrate tray is pushed forward; And the visual illumination H emits illumination light on the surface of the large panel which is laid on the substrate holder. 29. The substrate inspection device according to claim 28, wherein the rocking mechanism has a pivoting fulcrum disposed on the substrate minus two straight rails, and disposed at both ends of the front side of the base, and the substrate supporting The insertion of the yoke centered on the slewing bracket is characterized by the expansion and contraction of the socket, and the angle at which the observer easily observes is checked from the raised state of the substrate holder. The substrate inspecting apparatus according to claim 29, wherein the substrate holder is continuously shaken by a reciprocating movement in a state where the substrate holder is raised to an angle which is easily visually observed. The substrate inspection apparatus according to claim 28, wherein the substrate holder provided is provided in a horizontally placed state on the bottom reed, and is provided to be movable along both sides of the large substrate holder a door arm; and a microscope movable along the horizontal arm of the door arm; and 10 1313039 P-1569 97/12/25 to control the door arm and the microscope for the gamma direction movement control unit Its characteristics. The substrate inspection device according to claim 31, wherein the control unit inputs the coordinate data of the defective portion on the specific large substrate by visual inspection, and sets the plate touch data in the horizontal state as a reference. The movement of the money control and the direction of the microscope (4) is characteristic.